WO2017038889A1 - ガス分析システム、及び、ガス分析方法 - Google Patents

ガス分析システム、及び、ガス分析方法 Download PDF

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WO2017038889A1
WO2017038889A1 PCT/JP2016/075554 JP2016075554W WO2017038889A1 WO 2017038889 A1 WO2017038889 A1 WO 2017038889A1 JP 2016075554 W JP2016075554 W JP 2016075554W WO 2017038889 A1 WO2017038889 A1 WO 2017038889A1
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gas
sensor
type
output value
gas type
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PCT/JP2016/075554
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English (en)
French (fr)
Japanese (ja)
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吉崎公也
西井誠
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新コスモス電機株式会社
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Priority to KR1020187007036A priority Critical patent/KR102534577B1/ko
Publication of WO2017038889A1 publication Critical patent/WO2017038889A1/ja

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/62—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating the ionisation of gases, e.g. aerosols; by investigating electric discharges, e.g. emission of cathode
    • G01N27/64—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating the ionisation of gases, e.g. aerosols; by investigating electric discharges, e.g. emission of cathode using wave or particle radiation to ionise a gas, e.g. in an ionisation chamber
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means

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  • the present invention relates to a gas analysis system and a gas analysis method for specifying a gas type of a determination target gas using a plurality of types of gas sensors.
  • a gas analysis system and a gas analysis method that can reduce the number of gas sensors required to specify the gas type of the determination target gas and can specify the gas type with high accuracy are desired.
  • a gas analysis system includes: A detection unit comprising a plurality of types of gas sensors; An input unit to which an output value of each gas sensor for the determination target gas is input; A storage unit storing a correspondence relationship between a gas type to be determined and a tendency of an output value of each gas sensor with respect to the gas type for each gas type; A determination unit that specifies a gas type of the determination target gas based on the stored correspondence relationship and the tendency of the input output values.
  • the inventor has a one-to-one correspondence between the magnitude relationship pattern between each gas type to be determined and the output value, and the tendency of the output value from each gas sensor, such as which gas sensor has what output. I found out. Therefore, according to this configuration, the correspondence found by the inventor is adopted, the correspondence between the gas type to be determined and the tendency of the output value from each gas sensor is obtained for each gas type, and the individual output.
  • the gas types included in the determination target gas can be specified by combining individual output values and referring to the corresponding relationship obtained in advance. Thereby, even if there is an output of a predetermined value or more from a plurality of gas sensors, the gas type can be specified with high accuracy.
  • the gas sensor provided in the detection unit can be obtained by obtaining the correspondence between the gas type and the tendency of the output value from each gas sensor.
  • Gas types other than the detection target gas can be specified. Thereby, it is possible to specify a gas type more than the type of gas sensor provided in the detection unit, and it is possible to reduce the number of necessary gas sensors compared to using the same number of gas sensors as the type of gas to be determined. .
  • the correspondence includes, for each gas type to be determined, a correspondence between the gas type and a pattern of magnitude relationship with respect to a predetermined threshold value of the output value of each gas sensor for the gas type,
  • the determination unit performs a threshold determination as to whether or not the output value exceeds the threshold, and based on the correspondence and the result of the threshold determination for each output value, the gas type of the determination target gas Is preferably specified.
  • the determination is made based on a simple tendency of whether each output value exceeds the threshold value. It can be performed.
  • the correspondence includes a combination of the gas sensors determined for a gas type to be determined, and a ratio of the output values between the gas sensors in the combination for the gas type
  • the determination unit preferably specifies the gas type of the determination target gas based on the correspondence relationship and the ratio between the output values in the combination.
  • the threshold determination described above is performed. Even if the gas concentration is lower than the concentration necessary for the determination of the means used, the gas type of the determination target gas can be specified as long as the ratio of the output values in the combination of specific gas sensors can be determined. Thereby, the gas species can be specified with higher accuracy.
  • the storage unit for each gas type to be determined, the type of the main gas sensor used as a reference when calculating the concentration, the output value of the main gas sensor, and the concentration of the gas type
  • the concentration calculation information including the correlation is stored, and the determination unit uses the output value of the main gas sensor based on the concentration calculation information when the gas type of the determination target gas is specified. It is preferable to calculate the concentration of the gas species.
  • the main gas sensor used as a reference for calculating the concentration is determined in advance and not only the gas type is specified, but also the concentration can be calculated with high accuracy, more effective gas analysis can be performed.
  • the storage unit includes the type of sub gas sensor determined for each gas type to be determined and the correlation between the output value of the sub gas sensor and the concentration of the gas type, and the determination
  • the concentration of the gas species is calculated using the output value of the sub gas sensor based on the concentration calculation information. It is.
  • the output of a gas sensor changes in proportion to the concentration of the target gas, but the output value has a detection limit value called full scale, and there is a problem that it is not possible to measure a concentration exceeding this detection limit value. is there. Therefore, according to this configuration, a gas sensor or the like whose output changes in response to the concentration of the target gas as the main gas sensor is set as a sub gas sensor, and when the main gas sensor exceeds the detection limit value, Since the concentration of the gas species is calculated based on the output value of the gas sensor, it is possible to effectively suppress the occurrence of the above problem.
  • the detection unit includes at least one photoionization sensor, and the correspondence relationship includes a gas type that can be detected by the photoionization sensor and a predetermined output value of the gas sensor other than the photoionization sensor.
  • the determination unit determines the gas type of the determination target gas based on the correspondence and the tendency of the output value of the predetermined gas sensor when the photoionization sensor outputs. It is preferable to specify.
  • a photoionization sensor is a sensor that reacts to many gases, mainly organic solvents. Even if it is possible to narrow down roughly the gas type from its output value, the gas type is highly accurate from its output value. It cannot be judged. On the other hand, even if the gas sensor does not use a gas type that can be detected by the photoionization sensor as a detection target gas, the inventor considers the gas from the tendency of the output value from each gas sensor in the same manner as described above. We found that species can be identified.
  • a correspondence relationship between a gas type that can be detected by the photoionization sensor and a tendency of the output value of the predetermined gas sensor other than the photoionization sensor is obtained, and based on this correspondence relationship,
  • the gas type detected by the photoionization sensor can be specified.
  • the number of gas types that can be determined can be increased, and this has the advantage of reducing the number of gas sensors required to identify various gas types.
  • the storage unit stores a correlation between a concentration of a gas type to be determined and the output value of the photoionization sensor, and the determination unit has a gas type of the determination target gas. It is preferable to calculate the concentration of the gas species using the output value of the photoionization sensor based on the correlation.
  • the concentration of the specified gas type can be easily calculated from the output of the photoionization sensor.
  • the gas analysis method includes: Measuring the determination target gas using a plurality of types of gas sensors; and Identifying the gas type of the determination target gas based on the correspondence between the gas type to be determined and the tendency of the output value of each gas sensor with respect to the gas type and the tendency of the output value of each gas sensor; Is provided.
  • the gas analysis system 1 includes a detection unit 2 including a plurality of types of gas sensors, an input unit 4 to which an output value of each gas sensor for a determination target gas is input, a gas type to be determined and the gas Based on the storage unit 5 storing the correspondence relationship between the output value of each gas sensor with respect to the species for each gas species, the stored correspondence relationship, and the tendency of the input output values. And a determination unit 6 that specifies a gas type of the determination target gas. Thereby, the number of gas sensors required to specify the gas type of the determination target gas can be reduced, and the gas type can be specified with high accuracy.
  • the gas analysis system 1 according to the present embodiment will be described in detail.
  • FIG. 1 shows an example of a gas analysis system 1 according to the present embodiment.
  • the gas analysis system 1 includes a detector 2 and an analyzer 3.
  • the detector 2 is portable and is a sensor array provided with a plurality of types of gas sensors (not shown) to be described later.
  • the detector 2 includes a communication unit (not shown) that can transmit the output signal ⁇ from each gas sensor to the analyzer 3.
  • the analyzer 3 is a PC in this embodiment, and includes an input unit 4, a storage unit 5, and a determination unit 6, as shown in FIG.
  • An output signal ⁇ from the detector 3 is input to the input unit 4. That is, the output value of each gas sensor for the gas to be detected by the detector 2 is input.
  • the storage unit 5 stores a database that stores the relationship between the gas types for determination described later and the output value of each gas sensor, and the analysis that realizes an algorithm for the analysis unit 6 to specify the gas types. Program is stored.
  • the analysis unit 6 specifies the gas type of the determination target gas based on the output signal from the detector 2 using various relationships stored in the database according to the analysis program stored in the storage unit 5.
  • the gas analysis system 1 output values from a plurality of types of gas sensors provided in the detector 2 are input to the input unit 4 of the analyzer 3, and the gas types stored in the storage unit 5 and the output values of each gas sensor
  • the determination unit 6 identifies the gas type of the determination target gas from the input output values based on the above relationship.
  • the illustrated gas analysis system 1 is merely an example, and is not particularly limited as long as the gas type of the determination target gas can be specified by the same procedure.
  • the detector 2 may not be able to input an output signal to the analyzer 3 by wireless communication, but may input the output signal of the gas sensor to the analyzer 3 via some recording medium or by wired communication.
  • it may be a stationary type instead of a portable type.
  • the analyzer 3 is not limited to a PC, and is not particularly limited as long as it has at least functions equivalent to those of the input unit 4, the storage unit 5, and the analysis unit 6. Moreover, you may be comprised from the apparatus with which the detector 2 and the analyzer 3 were united.
  • the gas analysis system 1 uses the correspondence between the gas type to be determined and the tendency of the output value of each gas sensor with respect to the gas type to indicate the correspondence and the output value from each gas sensor.
  • the gas type of the determination target gas is specified based on the tendency.
  • the database storage unit 5 stores the correspondence relationship between the gas type to be determined and the tendency of the output value of each gas sensor with respect to the gas type for each gas type.
  • the gas type of the determination target gas is specified by referring to the correspondence relationship stored in the database and the tendency of each output value input to the input unit 4 (more specifically, below).
  • the analysis program is created so that the judgment is made according to the procedure shown).
  • the tendency of the output value of each gas sensor the tendency of the response of each gas sensor to the gas type, such as whether the output value is a positive value, a negative value, or almost zero, and the output value of which gas sensor.
  • Trend of threshold judgment of each output value when threshold judgment of whether it exceeds (or falls below) a predetermined threshold, which gas sensor has the highest sensitivity, and the output value of the gas sensor with the highest detection sensitivity The ratio of the output values of the other gas sensors, the tendency of the output of each gas sensor to change with time (how the response waveform rises, etc.) and the like can be mentioned.
  • the determination unit 6 can input the correspondence relationship and each input to the input unit 4.
  • the gas type of the determination target gas can be specified by referring to the tendency of the output value.
  • the type of gas sensor that shows a positive response (output value is positive), a gas sensor that shows a negative response (output value is negative), or a gas sensor that has poor sensitivity (the absolute value of the output value is less than a certain value) is determined. ing. That is, for each gas type, a combination of a gas sensor type showing a positive response, a gas sensor type showing a negative response, and a gas sensor type having low sensitivity is determined.
  • the gas type of the determination target gas measured by the detector 2 is It is possible to specify that the gas type is A. Therefore, in the gas analysis system 1 of the present embodiment, whether or not the determination unit 6 exceeds the positive threshold value and the negative threshold value (for example, 25% of full scale) determined in advance for each output value from the detector 2. Threshold judgment is performed.
  • a gas sensor whose output value exceeds a positive threshold is a gas sensor showing a positive response
  • a gas sensor whose output value is below a negative threshold is a gas sensor showing a negative response
  • a positive A gas sensor showing an output value between the threshold value and the negative threshold value is a gas sensor with poor sensitivity.
  • a pattern of magnitude relationship with respect to a predetermined threshold value of the gas type and the output value of each gas sensor for the gas type that is, a threshold determination result pattern.
  • the correspondence relationship between the type of gas sensor showing a positive response and the type of gas sensor showing a negative response and the type of gas sensor having low sensitivity is obtained, and this correspondence relationship is determined in the database (storage unit 5). It is stored as a correspondence relationship between the target gas type and the tendency of the output value of each gas sensor for the gas type.
  • the determination unit 6 performs threshold determination for each output value.
  • the threshold determination is performed based on the output value of each gas sensor when a certain time (30 seconds or 60 seconds) has passed since the output of any gas sensor exceeding the positive threshold. Thereafter, the gas type of the determination target gas is specified by referring to the stored correspondence relationship (threshold determination result pattern) and the threshold determination result for each output value. That is, the gas type whose threshold determination result matches the threshold determination result pattern is specified as the gas type of the determination target gas type.
  • the correspondence table (threshold determination result pattern) for the threshold value for each gas type in the ten gas sensors is as shown in Table 1 below.
  • Max in Table 1 exceeds a positive threshold (that is, when a positive response is shown)
  • Min is below a negative threshold (that is, when a negative response is shown)
  • Norm When showing an output value between a positive threshold and a negative threshold (ie, when the sensitivity is poor), blank means that the output value is irrelevant to specifying the gas type.
  • the column of algorithm determination is the gas type specified by the result of the threshold determination of each gas sensor showing the pattern shown there. When a plurality of gas types are described, it indicates that either one or both of them are included.
  • the threshold value determination result of the input output value indicates an output value that exceeds the positive threshold value for at least the PH 3 sensor, and at least the NH 3 sensor, the O 3 sensor, the HCl sensor, the HF sensor, the H 2 S sensor, and
  • the Cl 2 sensor indicates an output value between a positive threshold value and a negative threshold value (No. 3 in Table 1)
  • the determination unit 6 specifies the gas type of the determination target gas as PH 3. To do.
  • the determination unit 6 specifies the gas type of the determination target gas as H 2 S.
  • the result of threshold determination does not correspond to any pattern of Table 1, it determines with multiple types of gas being contained.
  • FIG. 3 shows the output of each gas sensor when the measurement target gas is measured using the detector 2 having the above ten types of gas sensors.
  • the result of the threshold determination at time T2 PH 3 sensor, E20C sensors, NO sensors, for E20 sensor is determined to exceed the positive threshold value (Max), positive threshold and negative for other sensors It is determined that the output value between the threshold is (Norm). Then, this determination result is checked against the correspondence table in Table 1 to determine whether there is a threshold determination result pattern that matches the determination result.
  • an output value exceeding a positive threshold is shown for at least the PH 3 sensor, and a positive threshold is shown for at least the NH 3 sensor, the O 3 sensor, the HCl sensor, the HF sensor, the H 2 S sensor, and the Cl 2 sensor. No. indicating an output value between the negative threshold value. 3 matches the threshold determination result pattern of 3, it is specified that the gas type of the determination target gas is PH3.
  • the correspondence table (threshold determination result pattern) for the threshold value for each gas type in the five gas sensors is as shown in Table 2 below. become.
  • E20C sensor detection target gas is an organic solvent excluding alcohol, mainly toluene, E20C in Table 1)
  • Max / Norm in Table 2 indicates that the output value exceeds the positive threshold value, or indicates an output value between the positive threshold value and the negative threshold value (that is, indicates an output value equal to or greater than the negative threshold value).
  • Min / Norm indicates that the output value is below the negative threshold value or indicates an output value between the positive threshold value and the negative threshold value (ie, an output value less than the positive threshold value). It means).
  • the threshold value determination result of the input output value indicates an output value that exceeds the positive threshold value for at least the PH 3 sensor, and the positive threshold value and the negative threshold value for the NH 3 sensor, the O 3 sensor, and the HCl sensor.
  • the determination unit 6 sets the gas type of the determination target gas as PH 3 . Identify.
  • an output value between the positive threshold value and the negative threshold value is shown for the NH 3 sensor, an output value less than the positive threshold value is shown for the O 3 sensor, and a positive value is shown for the PH 3 sensor, the HCl sensor, and the E20C sensor.
  • the determination unit 6 specifies the gas type of the determination target gas as H 2 S.
  • the standard of Max / Norm and Min / Norm may be added to the blank portion in Table 1 as in the case of using 5 gas sensors.
  • the means using the threshold judgment requires a gas concentration that can at least output an output exceeding the threshold for judging the gas type.
  • the means using the ratio between the output values uses the threshold judgment. Even if the gas concentration is lower than the concentration required for the determination of the means, the gas type of the determination target gas can be specified as long as the ratio of the output values can be determined.
  • the specific procedure of the gas type based on the ratio between the output values will be described.
  • FIGS. 4 and 5 are graphs showing the output of the Cl 2 sensor, H 2 S sensor and HF sensor for Cl 2 gas at each concentration, and according to FIGS. 4 and 5, the H 2 S sensor for the Cl 2 sensor.
  • the ratio of the output values of the HF sensor is almost the same when the Cl 2 gas concentration is 0.3 ppm and 0.5 ppm. Then, the inventors by the results of experiments, the ratio of the output value of the H 2 S sensor and HF sensor for Cl 2 sensor when the output value of Cl 2 sensor and 100%, H 2 for the output values of the Cl 2 sensor The output value of the S sensor was -50 to -30%, and the output value of the HF sensor was required to be 80 to 100%.
  • the gas type of the determination target gas is Cl 2 gas. That is, if the ratio of the output values between the gas sensors is known, the gas type of the determination target gas can be specified.
  • a specific combination of gas sensors is determined for a gas type to be determined based on the result of an experiment or the like (for example, a gas sensor having high sensitivity to the gas type). Combination), and the correspondence between the ratio of the output value between the gas sensors in the combination and the gas type. Then, in the database (storage unit 5), the specific combination of the gas sensors determined for the gas type to be determined and the ratio of the output values between the gas sensors in the combination for the gas type are determined as the determination target. This is stored as a correspondence relationship between the gas type to be used and the tendency of the output value of each gas sensor with respect to the gas type.
  • the determination unit 6 specifies the gas type of the determination target gas based on the stored correspondence relationship and the ratio of the output values in the combination. To do.
  • the determination unit 6 specifies the gas type based on the output value of each gas sensor when a certain time (30 seconds or 60 seconds) has passed since any output from any gas sensor. . Then, from the output value of each gas sensor after the lapse of a certain time, the ratio between the output values in the combination of gas sensors determined for the gas type is obtained for each gas type to be discriminated. It is sequentially judged whether the ratio matches the ratio between the output values corresponding to the stored gas type (contains within the range), and when there is a match, the gas type of the judgment target gas Is identified as the matching gas species.
  • the output of the Cl 2 sensor, H 2 S sensor and HF sensor is 100% of the output value of the Cl 2 sensor
  • the output value of the H 2 S sensor is ⁇ 50 to ⁇ 30%
  • the output of the HF sensor If the value falls within the range of 80 to 100%, it is specified that the gas type of the determination target gas is Cl 2 gas.
  • the correlation between the output value of the main gas sensor and the concentration of the gas type is also obtained, and the type of the main gas sensor for each gas type, its output value, and the gas type are stored in the database (storage unit 5).
  • the correlation with the density is stored as density calculation information.
  • the output of the gas sensor changes in proportion to the concentration of the target gas, but the output value has a detection limit value called full scale, and the concentration exceeding this detection limit value must be measured. There is a problem that can not be.
  • the detection limit value is easily reached by the high sensitivity. . Therefore, in the gas analysis system 1 according to this embodiment, in addition to the main gas sensor, a sub gas sensor is determined for each gas type to be determined.
  • the correlation between the output value of the sub gas sensor and the concentration of the gas type is also obtained, and the type of the sub gas sensor for each gas type, the output value, and the gas type are stored in the database (storage unit 5).
  • the correlation with the density is further stored as density calculation information.
  • the determination unit 6 calculates the concentration of the gas type using the output value of the sub gas sensor based on the concentration calculation information.
  • 6 to 8 are graphs showing the outputs of the PH 3 sensor (1.0 ppm FS) and the NO sensor (0.5 ppm FS) for the PH 3 gas at each concentration.
  • 1.0 ppmF. S. Means that the concentration of the PH 3 gas is 1.0 ppm when the PH 3 sensor outputs a full scale (100% FS). That is, the concentration of the PH 3 gas is obtained from the output value (% FS) of the PH 3 sensor according to the following equation.
  • PH 3 gas concentration (ppm) PH 3 sensor output / 100 ⁇ 1.0 (ppm) (Formula 1)
  • the PH 3 sensor is 150% F.S. S. Is the detection limit value, and if it exceeds this limit, the output reaches a peak, and the gas concentration cannot be calculated accurately.
  • the concentration of PH 3 gas is 0.3 ppm (FIG. 6) and 1.0 ppm (FIG. 7)
  • the output value does not reach the detection limit value, and the output value is PH 3 gas.
  • the PH 3 gas concentration is 2.0 ppm (FIG. 8)
  • the output value exceeds the detection limit value (150% FS) and reaches a peak.
  • the output value does not reflect the concentration of PH 3 gas.
  • FIG. 9 is a graph showing the relationship between the concentration of PH 3 gas and the output value of each sensor.
  • the output value of the NO sensor is proportional to the concentration of PH 3 gas to some extent. Recognize. Then, when an approximate straight line is drawn for the output value of the NO sensor, the slope becomes 21.21. Considering that the slope of the output value of the PH 3 sensor is about 100, when detecting PH 3 gas of the same concentration, the output value of the PH 3 sensor is 100/21.
  • PH 3 gas concentration (ppm) NO sensor output / 21.21 ⁇ 1.0 (ppm) (Formula 2)
  • the concentration of the PH 3 gas can be calculated from the output value of the NO sensor based on the above formula 2. Therefore, the main gas sensor in calculating the PH 3 gas concentration is a PH 3 sensor, the NO sensor is a sub gas sensor thereof, and the PH 3 gas concentration, the PH 3 sensor and the NO 3 of the above formulas 1 and 2 are used.
  • the determination unit 6 to the output value of PH 3 sensor reaches the detection limit value PH 3 the output of the sensor
  • the concentration of PH 3 gas is calculated from the value based on the above equation 1, and when the output value of the PH 3 sensor reaches the detection limit value, the gas concentration is calculated based on the above equation 2 from the output value of the NO sensor. become.
  • a photoionization sensor is a sensor that reacts to many gases, mainly organic solvents, and has an advantage that concentration analysis of various gas types can be performed with a single sensor.
  • concentration analysis of various gas types can be performed with a single sensor.
  • the gas type cannot be determined with high accuracy even if it is possible to narrow the gas type roughly from the output value.
  • the inventor concerned the gas type from the tendency of the output value from each gas sensor of these gas sensors in the same way as the above. It was found that it is possible to specify.
  • the use of a PID sensor makes it possible to narrow down the gas type that can be detected by the PID sensor when there is an output from the PID sensor. When there is no output, it is possible to narrow down that the gas type cannot be detected by at least the PID sensor). Then, by narrowing down the gas types, the number of gas types that must be distinguished is reduced, so that it is easy to obtain the correspondence between the tendency of output values from a plurality of gas sensors and the gas types. As a result, even for a gas sensor that does not use a gas type that can be detected by the PID sensor as a detection target gas, the gas type can be identified from the tendency of output values from the gas sensors of these gas sensors.
  • the detector 2 includes at least one PID sensor.
  • 10 ppmF. S. An isobutylene PID sensor is used.
  • a correspondence relationship between a gas type that can be detected by the PID sensor and a tendency of an output value of a predetermined gas sensor other than the PID sensor is obtained and stored in the database (storage unit 5).
  • the determination part 6 specifies the gas type of determination object gas based on this correspondence and the tendency of the output value in a predetermined gas sensor, when there exists an output of a PID sensor.
  • the database stores the correlation between the concentration of the gas type to be determined and the output value of the PID sensor.
  • the concentration of the gas species is calculated.
  • a coefficient is determined for each gas type, and the concentration of the gas type is calculated by multiplying the coefficient by the output value. Specifically, 10 ppmF. S.
  • the concentration of the gas species is obtained by the following equation.
  • the tendency of the output value of a predetermined gas sensor other than the PID sensor associated with the gas type that can be detected by the PID sensor includes the ratio of the output values of the E20 sensor and the E20C sensor with respect to the gas type.
  • 10 and 11 show the relationship between the concentration of the gas species that can be detected by the PID sensor and the output values of the E20 sensor and the E20C sensor.
  • FIGS. 10 and 11 there is a large difference in sensitivity between the E20 sensor and the E20C sensor depending on whether the target gas is alcohol or alcohol, and the ratio of the output values of the E20 sensor and the E20C sensor is different. .
  • an output as shown in FIG. 12 is obtained (the first half was measured with a toluene concentration of 1 ppm and the second half with a toluene concentration of 5 ppm).
  • output is obtained from the PID sensor, and output is also obtained from the E20 sensor and the E20C sensor.
  • the ratio of the output values of the E20 sensor and the E20C sensor is 30 to 40% when the E20C sensor is 100%.
  • an output as shown in FIG. 13 is obtained.
  • output is obtained from the PID sensor, and output is also obtained from the E20 sensor and the E20C sensor.
  • the ratio of the output values of the E20 sensor and the E20C sensor is 40 to 50% when the E20C sensor is 100%.
  • the ratio of the output values of the E20 sensor and the E20C sensor differs depending on the gas type. Using this, when the output value of the E20C sensor is 30% to 40% when the output value of the E20C sensor is 100%, the gas type is toluene, and the output value of the E20C sensor is 100%.
  • the output value of the E20 sensor at this time is 40 to 50%, it can be seen that the gas type is acetone.
  • the determination unit 6 can determine the gas type. Further, the determination unit 6 can calculate the concentration of the gas type from the PID sensor output value using the coefficient for the gas type stored in the database based on the above equation 3.
  • the gas type is specified based on threshold determination.
  • the specification of the gas type based on the ratio between the output values has been described as an example.
  • the embodiment of the present invention is not limited to this, and the gas type can be specified by utilizing the correspondence relationship between the gas type to be determined and the tendency of the output value of each gas sensor with respect to the gas type. Anything may be used.
  • the determination unit 6 outputs (or exceeds the positive threshold value) in any gas sensor (or An example has been described in which the determination is made based on the output value of each gas sensor when a certain time (30 seconds or 60 seconds) has passed since the output.
  • the embodiment of the present invention is not limited to this. For example, during the period from when any gas sensor has an output exceeding the positive threshold until a certain time thereafter, the same threshold judgment or ratio between the output values is obtained from the output of each gas sensor at that time. It may be possible to identify the gas type early by specifying the gas type based on the result and indicating the result as the predicted gas type. Further, even after the determination is made after the elapse of a certain time, the determination may be performed again at predetermined time intervals, and the result may be updated to improve the accuracy of specifying the gas type.
  • the ratio of the output values of the E20 sensor and the E20C sensor with respect to the gas type is used as the tendency of the output value of a predetermined gas sensor other than the PID sensor.
  • the embodiment of the present invention is not limited to this, and the tendency of the output value of a predetermined gas sensor other than the PID sensor is any as long as it is associated with a gas type that can be detected by the PID sensor. May be.
  • the present invention can be used to specify a gas type of a determination target gas using a plurality of types of gas sensors.

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