WO2017012469A1 - Smart magnetic sensor and vehicle detection method based on smart magnetic sensor - Google Patents

Smart magnetic sensor and vehicle detection method based on smart magnetic sensor Download PDF

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Publication number
WO2017012469A1
WO2017012469A1 PCT/CN2016/088790 CN2016088790W WO2017012469A1 WO 2017012469 A1 WO2017012469 A1 WO 2017012469A1 CN 2016088790 W CN2016088790 W CN 2016088790W WO 2017012469 A1 WO2017012469 A1 WO 2017012469A1
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magnetic
circuit
magnetic sensor
amorphous wire
detection
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PCT/CN2016/088790
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French (fr)
Chinese (zh)
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袁丽
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袁丽
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00Arrangements or instruments for measuring magnetic variables
    • G01R33/02Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/06Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
    • G01R33/09Magnetoresistive devices

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  • the present invention relates to the field of weak magnetic field measurement technology, and in particular to an intelligent magnetic sensor, a probe for the smart magnetic sensor, and a vehicle detection method based on the smart magnetic sensor.
  • the invention belongs to the technical field of weak magnetic field measurement, and relates to an intelligent weak magnetic field detecting sensor and a method for detecting slow and transient magnetic fields, in particular to a giant magneto-impedance amorphous wire sensor and an amorphous wire based
  • the giant magneto-impedance effect can be used for magnetic sensors in the fields of vehicle detection, stress detection of ferromagnetic engineering structures, and broken wire detection of steel strands.
  • the new sensor is gradually developing towards miniaturization, digitization, intelligence, multi-functionality, systemization and networking. It not only promotes the transformation of traditional industries, but also leads to the establishment of new industries, which is a new economic growth in the 21st century. point.
  • the existing magneto-impedance sensors using the amorphous magnetic impedance technique have many problems, for example, the use of a pulse signal as an excitation signal, which has an impact on the circuit, a large noise, and a limited variety of excitation signal waveforms.
  • prior art amorphous magneto-impedance sensors apply a biasing magnetic field to the amorphous wire by energizing a coil wound on the amorphous wire, which bias magnetic field has an effect on the measured magnetic field due to the bias
  • the application of a magnetic field to the axial direction of the amorphous wire prevents the circumferential magnetization of the annular magnetic domain, which hinders the improvement of the magnetic field measurement sensitivity to a certain extent and weakens the magnetic impedance effect of the amorphous wire.
  • an amplifying circuit is usually provided in the signal processing circuit, which not only increases the complexity of the circuit and the cost of the sensor, but also the amplification effect is not satisfactory.
  • the magnetic induction technology in the range of the earth's magnetic field is also fully applied, and these applications are focused on vehicle detection in the geomagnetic field environment.
  • the magnetic lines of force of the detection area are squeezed and assembled.
  • the magnetic lines of force of the detection area are further contracted, and when the vehicle passes the detection area, the magnetic lines of force are pulled. Divergence along the center. With these characteristics, the sensor can capture the vehicle approaching, passing or moving away, thus achieving the vehicle Real-time detection of the vehicle.
  • CN200810181901X discloses a micro-magnetic sensor, which utilizes the magnetoresistance effect of an amorphous wire and the principle of electromagnetic relationship to convert magnetic field information into electrical signals for measurement, but the sensor acts through the bias current and the excitation current of the secondary sensitive device.
  • the bias current can generate a higher temperature drift and affect the detection result.
  • CN201110055819 discloses a traffic information detecting system, wherein the pushpin structure sensor utilizes a magnetic sensitive material-amorphous wire according to the impedance change to detect a change of the magnetic field of the disturbed ground when the vehicle passes, and the dynamic parameter adopts a pulse power supply form, thereby generating
  • the problem is that the power consumption is large, the power is small, and the parameter acquisition by the pulse power supply mode is not accurate in the implementation process. Since the peak duration is small, and the device starts to have a time difference, the peak cannot be accurately collected, and the detection is impossible. The distance is short, and thus the number of sensors required is large and costly.
  • the development of an intelligent high-precision magnetic sensor has become one of the focuses in current engineering applications.
  • the giant magneto-impedance smart magnetic sensor mentioned in the present invention can effectively adapt to weak magnetic field detection. .
  • a magnetic sensor is a device that detects a change in the magnetic properties of a sensitive component, such as a magnetic field, a current, a stress strain, a temperature, or a light, into an electrical signal, in such a manner as to detect a corresponding physical quantity.
  • a sensitive component such as a magnetic field, a current, a stress strain, a temperature, or a light
  • the area of the magnetic sensing element should be smaller and more accurate than the area of the magnetic field to be measured.
  • the smaller the component volume the more pixels are collected in the same area. The higher the resolution and clarity.
  • there is a certain requirement in the magnetic scale From the perspective of the working mechanism of the magnetic sensing element, in order to improve the sensitivity, the geometry of the geometric shape in the magnetic field has corresponding requirements.
  • Magnetic field measurement is an important issue in all areas of production research. With the rapid development of microelectronics technology, some micro- or small-sized, high-performance, high-sensitivity and fast-responding magnetic field sensors are needed in the fields of national defense, automotive electronics, robotics, bioengineering, and automation control to detect related parameters, such as Magnetic field information, speed, displacement, etc.
  • conventional magnetic field sensors include: Hall effect magnetic field sensor, anisotropic magnetoresistance (AMR) magnetic field sensor, giant magnetoresistance (GMR) magnetic field sensor, Fluxgate sensors and more.
  • AMR anisotropic magnetoresistance
  • GMR giant magnetoresistance
  • Fluxgate sensors Fluxgate sensors and more.
  • the above magnetic field sensors have certain drawbacks.
  • the Hall effect magnetic field sensor is the most widely used magnetic field sensor, but its output signal has small change, low sensitivity, and certain magnetic field anisotropy when measuring magnetic field. It is suitable for medium and strong magnetic field measurement;
  • the magnetoresistive (AMR) magnetic field sensor has a magnetoresistance change rate of only 2%-4%, its magnetic field sensitivity is less than 1%/Oe, and the manufacturing equipment is complicated; the magnetoresistance change rate of the giant magnetoresistance (GMR) sensor can reach 80%.
  • GMR giant magnetoresistance
  • the above-mentioned magnetic field sensors have low resolution, close detection distance, slow response speed, large volume, high power consumption and poor temperature stability due to the detection of magnetic safety, the establishment of concealed perimeter, aviation, aerospace and navigation.
  • the directionality is poor, the wiring is cumbersome, or the maintenance is difficult to meet the requirements of the rapid measurement of the weak magnetic field in practical applications.
  • the giant magneto-impedance effect refers to the phenomenon that the material changes rapidly with the change of the applied magnetic field strength under the excitation of the high-frequency alternating current.
  • High-precision, high-performance sensor preparation is based on sensor materials with excellent quality and excellent performance.
  • Amorphous materials are one of the best micro-magnetic sensitive materials found in the world. They are unique in the application of giant magneto-impedance sensors. The advantages.
  • the working principle of the amorphous magnetic impedance sensor is to make the amorphous wire become a carrier of magnetic impedance change by applying a certain frequency excitation to the amorphous wire by utilizing the magnetic impedance effect of the amorphous wire.
  • the magnetic impedance of the amorphous wire also changes, and the signal sampling coil wound around the amorphous wire induces a corresponding voltage signal.
  • the voltage signal forms a clear correspondence with the strength of the external magnetic field at this time. By measuring this voltage signal, the strength and magnitude of the external magnetic field can be measured.
  • the present invention proposes a technical solution of an intelligent magnetic sensor, which can be widely applied to various types of high-precision magnetic field detecting applications, such as ground magnetic field disturbances and the like.
  • the present invention proposes the following specific technical solutions:
  • An intelligent magnetic sensor includes an MCU circuit, a GMI detecting unit, a compensation circuit, a detecting circuit and a management circuit; the GMI detecting unit is connected to the compensation circuit and the detecting circuit, and the management circuit and the compensation circuit respectively detect Circuit, MCU circuit connection; characterized by: said GMI check The detecting unit is configured to detect a magnetic signal, and the compensating circuit is configured to perform magnetic compensation on a magnetic signal detected by the GMI detecting unit, where the detecting circuit is configured to detect an ambient magnetic field in which the GMI detecting unit is located;
  • the management circuit is used for amplifying processing of the magnetic signal detected by the GMI detecting unit, and managing the compensation circuit and the detecting circuit; the MCU circuit is used for controlling the management circuit, implementing the management circuit to the GMI detecting unit, and compensating Management control of circuits and detection circuits.
  • the GMI detecting unit further includes: a probe unit, a power input module, a protection grounding module, and a signal output module; and the GMI detecting unit is configured to implement signal detection on a slowly changing or transient magnetic field;
  • the probe unit is configured to sense a current graded or transient magnetic environment and acquire a corresponding magnetic signal.
  • the probe unit comprises an amorphous wire pad, a conductor pad, a wire, an amorphous wire, a bobbin and a bobbin, and the probe unit is packaged by a MEMS process.
  • the amorphous wire is symmetrically welded to the amorphous wire pad through the center of the bobbin; the wire is wound around the bobbin to form an excitation coil and a detection coil, and is soldered to the conductor pad.
  • the wire is a metal wire, preferably metal, copper, aluminum or silver; the skeleton is arranged in the shape of a dumbbell, a rectangle or a diamond, and the material of manufacture is preferably an LCP material.
  • the detecting circuit comprises a magnetic abnormality detecting circuit, a magnetic detecting coil, a detecting and amplifying circuit, and a temperature compensating circuit;
  • the magnetic abnormality detecting circuit is connected with the magnetic detecting coil to detect a magnetic field change;
  • the compensation circuit is connected with the magnetic abnormality detecting circuit, and performs temperature compensation according to the output of the magnetic abnormality detecting circuit, and feeds the compensation amount to the magnetic abnormality detecting circuit;
  • the temperature compensation circuit outputs the temperature-compensated output value to the detection and amplification.
  • the circuit, the detection amplification circuit transmits the amplified detection value to the compensation circuit.
  • the compensation circuit comprises a magnetic compensation coil, a magnetic resonance drive circuit, and an excitation oscillator; the magnetic compensation coil is disposed outside the amorphous wire, and the amorphous wire is respectively connected to the magnetic resonance drive circuit and the excitation oscillator.
  • the excitation oscillator is coupled to the magnetic resonance drive circuit.
  • the magnetic compensation coil and the magnetic detection coil are respectively connected in series with a capacitor to isolate a direct current or an alternating current.
  • the amorphous wire is made of a Co-Fe-M-Si-B amorphous wire material, and the outer layer of the amorphous wire is coated with a layer of glass.
  • the amorphous wire adopts a Co-Fe-M-Si-B amorphous silk material, and the response speed is less than 10 Nanoseconds, high sensitivity (about 1000mV full scale output), length less than 5mm, diameter range: 30 microns - 100 microns.
  • the present invention also provides a magnetic sensor probe comprising an amorphous wire pad, a conductor pad, a wire, an amorphous wire, a bobbin and a skeleton; wherein the intermediate portion of the skeleton is arranged as a winding axis, The ends of the bobbin are respectively provided with a tip, the cross-sectional area of the bobbin is smaller than the cross-sectional area of the end; the amorphous wire is buried in the center of the skeleton, and the amorphous wire is placed concentrically with the bobbin.
  • the amorphous wire is symmetrically welded to the conductor pad through the center of the bobbin; the wire is wound around the bobbin to form an excitation coil and a detection coil, and is soldered to the conductor pad.
  • the amorphous wire is made of a Co-Fe-M-Si-B amorphous wire material, and the outer layer of the amorphous wire is coated with a layer of glass.
  • the amorphous material of the amorphous wire has a tensile strength at break of 3000 MPa, and the outer layer of the amorphous wire is coated with a layer of glass; the ends of the amorphous wire are stripped of the glass layer before injection molding.
  • the amorphous wire adopts a Co-Fe-M-Si-B amorphous wire material, and has a response speed of less than 10 nanoseconds, high sensitivity (about 1000 mV of full-scale output), length of less than 5 mm, and a diameter range of: 30 microns - 100 microns.
  • the amorphous wire pad and the conductor pad have a thickness of 0.1 mm to 0.2 mm; the material of the conductor pad is adapted to the material of the amorphous wire to ensure conductivity and solderability;
  • the electrode material of the conductor pad is preferably gold plated or immersed in gold.
  • the skeleton material is LCP or PEI; the diameter of the bobbin is ⁇ 0.3 ⁇ 0.02 mm;
  • the skeleton may be formed into a dumbbell shape with a winding shaft disposed therebetween for winding the wire coil.
  • the skeleton is provided with two amorphous wire pads and four conductor pads;
  • the two amorphous wire pads are respectively located on the top sides of the probes, and the four conductor pads are located in the middle of the probe, symmetrically disposed with respect to the winding axis, and disposed on a side close to the winding axis.
  • the magnetic sensor probe is fabricated by a MEMS process, designed on a silicon crystal, and prefabricated with six bond points, the six bond points including two amorphous wire pads and four conductor pads.
  • the magnetic sensor probe when used to detect a metal object such as a wire, the probe is provided in a hollow ring shape or an arc shape.
  • the invention also provides a vehicle detection method based on an intelligent magnetic sensor, which uses the right The intelligent magnetic sensor of any of claims 1-10, the method comprising the steps of:
  • the timing of the vehicle entering the signal is issued, and when the vehicle exit signal is issued, the timing is stopped, thereby obtaining the duration of the vehicle staying, and transmitting the duration signal.
  • the detection may set a different time threshold.
  • the threshold may be longer.
  • the threshold may be shorter; when the time is less than a certain threshold, the default is different tires of the same vehicle.
  • the resulting disturbance can also be simply determined by the number of tire disturbances within the time threshold.
  • the method further comprises: arranging the piezoelectric sensor in parallel at the smart magnetic sensor; wherein the piezoelectric sensor detects a pressure signal generated by the vehicle tire on the piezoelectric sensor while the smart magnetic sensor detects the ground magnetic field change signal And integrating the pressure signal to obtain vehicle weight information during the vehicle stay duration.
  • the magnetic sensor probe of the invention has a response speed of less than 10 nanoseconds, high sensitivity (about 1000 mV of full-scale output), small volume, corrosion resistance and strong impact resistance;
  • the intelligent magnetic sensor provided by the invention has a shape which can be varied due to the amorphous wire technology of the probe, and can be designed as a boxed, curved or circular shape, and can be adapted to various situations such as vehicle, wire detection and steel cable detection. , with good applicability;
  • the invention adjusts the chip by using RFID as an independent module, and integrates the magnetic circuit and circuit of the amorphous wire, reduces power consumption, increases power, and adjusts the waveform to a modulated wave form that is convenient for capturing and collecting peaks. Solved problems in the prior art.
  • Figure 1 is a circuit block diagram of an intelligent magnetic sensor
  • FIG. 2 is a diagram showing an example of a GMI detection unit interface according to an embodiment of the present invention.
  • FIG. 3 is a view showing an example of a probe unit according to an embodiment of the present invention.
  • FIG. 4 is a diagram showing an example of a probe unit fabricated by a MEMS process according to an embodiment of the present invention
  • FIG. 5 is a structural diagram of a detection circuit according to an embodiment of the present invention.
  • FIG. 6 is a structural diagram of a compensation circuit according to an embodiment of the present invention.
  • FIG. 7 is a schematic diagram showing a modification of a detection circuit and a compensation circuit according to an embodiment of the present invention.
  • Figure 8 is a graph showing magnetic field and magnetic sensor characteristics
  • FIG. 9 is a view showing an example of a skeleton according to an embodiment of the present invention.
  • Figure 10 is a view showing an example of a pad according to an embodiment of the present invention.
  • Figure 11 is a view showing an example of a cross section of an amorphous wire according to an embodiment of the present invention.
  • FIG. 12 is a view showing an example of a package of a magnetic sensor according to an embodiment of the present invention.
  • FIG. 13 is a diagram showing an example of a vehicle detecting device based on an intelligent magnetic sensor according to an embodiment of the present invention.
  • FIG. 14 is a diagram showing an example of an intelligent magnetic sensor for detecting a disturbance of a magnetic field by a vehicle according to an embodiment of the present invention.
  • the present invention provides an intelligent magnetic sensor including an MCU circuit, a GMI detecting unit, and compensation. a circuit, a detection circuit, and a management circuit; the GMI detection unit is connected to the compensation circuit and the detection circuit, and the management circuit is respectively connected to the compensation circuit, the detection circuit, and the MCU circuit; wherein the GMI detection unit is used for Detecting a magnetic signal; the compensation circuit is configured to magnetically compensate a magnetic signal detected by the GMI detecting unit; the detecting circuit is configured to detect the GMI detecting unit An environmental magnetic field; the management circuit is used for amplifying processing of the magnetic signal detected by the GMI detecting unit, and managing the compensation circuit and the detecting circuit; the MCU circuit is used for controlling the management circuit, and the management circuit is configured to Management control of GMI detection unit, compensation circuit and detection circuit.
  • the GMI detecting unit further includes: a probe unit, a power input module, a protection grounding module, and a signal output module.
  • the GMI detecting unit includes: a probe unit, a power input module, a protection grounding module, and a signal output module, and the four parts are integrated in a square box.
  • the 1, 2, 3, and 4 connection ends are designed to be connected to the 4pin gold finger connection terminal, or 5, 6 discrete connections.
  • the probe unit includes an amorphous wire pad, a conductor pad, a wire, an amorphous wire, a bobbin, and a skeleton; the amorphous wire is symmetrically passed through a bobbin The center is soldered to the amorphous wire pad; the wire is wound around the bobbin to form an excitation coil and a detection coil, and is soldered to the conductor pad.
  • the skeleton can be set in the shape of a dumbbell and adopts an LCP material. Of course, it can also be made of other materials such as PEI materials. It should be noted that the skeleton in Fig. 3 is only shown as a preferred embodiment.
  • the skeleton may be provided in other shapes such as a curved shape, a circular shape, or the like, thereby facilitating different use environments and objects to be detected.
  • a general magnetic sensor such as a vehicle
  • it may be made into a dumbbell shape or a rectangular shape.
  • Shapes such as diamonds and the like can be easily assembled by the magnetic sensor, so that the smart magnetic sensor can be easily buried in the ground or embedded in other objects for easy detection; in addition, the skeleton can also be curved or rounded, so that the whole
  • the probe can be a hollow ring or an arc, which is more convenient for detecting metal objects such as wires; of course, those skilled in the art can also appropriately improve the shape of the skeleton according to the specific use environment, but it should be stated that these improvements are All should be considered to fall within the scope of protection of this application.
  • the wire is a metal wire; the wire is also a coil wire wound around the outside of the amorphous wire; the metal is copper, aluminum, silver, etc., and other metal conductors may also be used.
  • the probe unit is packaged in a MEMS process.
  • FIG. 4 is an exemplary example of a probe unit fabricated by a MEMS process package.
  • the probe unit in the GMI detection unit based on the MEMS process uses the probe.
  • the MEMS process produces more than 400 designs on 6-inch silicon wafers and prefabricates six bond points with special material choices.
  • the method utilizes a semiconductor process to effectively improve process consistency and solder quality through matching design of bond points and sensitive materials.
  • the detecting circuit includes a magnetic abnormality detecting circuit, a magnetic detecting coil, a detecting and amplifying circuit, and a temperature compensation circuit; and the magnetic abnormality detecting circuit and the magnetic detecting The coil is connected to detect a change of the magnetic field; the temperature compensation circuit is connected to the magnetic abnormality detecting circuit, and the temperature is compensated according to the output of the magnetic abnormality detecting circuit, and the compensation amount is fed back to the magnetic abnormality detecting circuit; the temperature compensation circuit will The temperature-compensated output value is output to the detection amplifying circuit, and the detected amplifying circuit transmits the amplified detected value to the compensation circuit.
  • a magnetically sensitive sub-nano metallic glass fiber that is, an amorphous wire specifically used in the present embodiment, is also a management circuit in the present embodiment.
  • the compensation circuit includes a magnetic compensation coil, a magnetic resonance drive circuit, and an excitation oscillator; the magnetic compensation coil is disposed outside the amorphous wire, and the amorphous wires are respectively Connected to the magnetic resonance drive circuit, the excitation oscillator, and the excitation oscillator is connected to the magnetic resonance drive circuit.
  • the magnetic compensation coil and the magnetic detection coil are respectively connected in series with a capacitor to isolate a direct current or an alternating current.
  • a capacitor to isolate a direct current or an alternating current.
  • the alternating current and the direct current flow through the magnetic compensation coil and the magnetic detection coil, an alternating current modulation magnetic field and a direct current bias magnetic field are generated, and at this time, the capacitors C1 and C2 are respectively connected in series with the magnetic compensation coil and the magnetic detection coil, and Effectively isolates DC or AC current.
  • a suitable DC bias magnetic field is applied to the sensor, due to the nonlinearity of the BH curve of the amorphous wire, the amplitude of the AC voltage and the external field will change as shown in Fig. 8, which is the detection of the magnetic sensor. principle.
  • the amorphous wire is made of a Co-Fe-M-Si-B amorphous wire material; and the outer layer of the amorphous wire is coated with a layer of glass.
  • the sensor is a very fast magnetic anomaly detection sensor. It is suitable for high-speed magnetic field change and slow-change magnetic field ratio, such as remote magnetic switch, submarine detection sensor network, high-speed ferromagnetic detection, etc. It can also be applied to geomagnetic anomaly detection, such as ships. , ship detection, frontal defense weapons, vehicle tanks and other magnetic anomaly detection, geological exploration, seismic magnetic anomaly detection.
  • the smart magnetic sensor can be configured as an analog signal output type or a digital signal output type, that is, an analog detection signal and a digital detection signal are respectively output, and the digital output type is provided with a microprocessor.
  • the sensor is output according to the switch quantity and is suitable for intelligent traffic vehicle detection. It can replace the traditional ground sense coil detector and can be widely used in traffic intersections, intelligent control traffic lights, roadside berth parking, parking lot access. Port, automatic control of the door, highway traffic monitoring and other aspects.
  • the invention also provides a magnetic sensor probe, the probe comprising an amorphous wire pad, a conductor pad, a wire, an amorphous wire, a bobbin and a skeleton; the middle section of the skeleton is arranged as a winding axis, and the two ends of the skeleton are respectively Provided with a tip, the winding axis cross-sectional area is smaller than the end cross-sectional area; the amorphous wire is embedded in the center of the skeleton, the amorphous wire is placed concentrically with the winding axis; and the frame is provided with two non- Crystal pad, 4 conductor pads.
  • the skeleton can be formed into a dumbbell shape, and the middle is set as a winding shaft for winding the wire coil, and the size in FIG. 9 is only It is used as an exemplary preferred embodiment and is not intended to limit the scope of the invention.
  • the materials of the four conductor pads are adapted to the material of the winding coil to ensure conductivity and solderability; the two amorphous wire pads They are respectively located on the top sides of the probes, such as rectangular pads at both ends of the skeleton in FIG. 10; the four conductor pads are located in the middle of the probe, symmetrically disposed with respect to the winding axis, and close to the side of the winding axis. As shown in Figure 10, there are four square small pads in the middle of the skeleton.
  • the specific size setting in FIG. 10 is only an example of a specific embodiment, and is not intended to limit the scope of the present invention.
  • the pads are arranged in a rectangular or square shape.
  • the pads may be disposed in any other shape.
  • the shapes may be set according to specific process requirements, and the positions of the pads are set. In FIG. 10, it is only a preferred embodiment.
  • the amorphous wire pad can also be disposed near the middle of the skeleton, and the conductor pad can be disposed at other positions without affecting the winding requirements. It should be understood by those skilled in the art that the conventional positions and the setting changes of the pad shapes are considered to fall within the protection scope of the present invention.
  • the materials of the four conductor pads are adapted to the material of the winding coil to facilitate excellent electrical conductivity and solderability.
  • the specific pad material may be determined according to the conductor material, and details are not described herein.
  • the probe is fabricated by a MEMS process, designed on a silicon crystal, and prefabricated with six binding points. Based on the binding point, the probe can implement power supply, data transmission, and the like. Specifically, in a specific embodiment, more than 400 designs are designed on a 6 inch silicon wafer, and six bond points selected by a particular material are prefabricated. The method utilizes a semiconductor process by binding Matching design of points and sensitive materials effectively improves process consistency and weld quality.
  • the amorphous wire is made of a Co-Fe-M-Si-B amorphous wire material.
  • the amorphous material of the amorphous wire has a tensile strength at break of 3000 MPa, an amorphous wire diameter of 0.0328 mm, and an outer layer coated with a layer of 0.002 mm of glass.
  • the diameter and thickness of the glass layer are a preferred embodiment of the present invention and are not intended to limit the scope of protection of the present invention; both ends of the amorphous wire are stripped of the glass layer prior to injection molding.
  • the skeleton material is LCP or PEI; and the diameter of the bobbin is ⁇ 0.3 ⁇ 0.02 mm.
  • the thickness of the amorphous wire pad and the conductor pad is 0.1 mm to 0.2 mm; the electrode material of the pad is gold plated or immersed.
  • the magnetic sensor can be packaged in a box type, and the processed magnetic sensor is packaged into a cubic shape to facilitate assembly and use with other circuits.
  • the package may also adopt other manners, such as a shape of a curved shape, a circular ring, or the like, and the change of the shapes may be changed according to actual detection targets and usage environments. These changes are considered to fall within the scope of this application.
  • the amorphous wire adopts Co-Fe-M-Si-B amorphous wire material, and has a response speed of less than 10 nanoseconds, high sensitivity (about 1000 mV of full-scale output), length of less than 5 mm, and a diameter range of 30 micrometers- 100 microns, resistant to corrosion and impact.
  • the present invention further provides a vehicle detector using the above-described smart magnetic sensor.
  • the vehicle detector includes an intelligent magnetic sensor.
  • the smart magnetic sensor is configured to monitor a vehicle magnetic field magnetic anomaly signal of a parking space, and the system microprocessor is configured to detect the detected parking
  • the vehicle has a signal and a vehicle disturbance magnetic field magnetic abnormal signal for analog-to-digital conversion, acquisition and signal processing analysis to obtain vehicle information of the parking space, and the parking information is transmitted through the wireless transmitting module;
  • the RFID reading card The module is used to read vehicle information carried by the vehicle RFID radio frequency card.
  • the smart magnetic sensor has the function of detecting a slowly varying magnetic field signal and a transient magnetic field signal, and different vehicle chassis heights will have different disturbance effects on the earth magnetic field, and therefore, based on this, the smart magnetic The sensor can be applied to the detection of the presence or absence of the state of the vehicle above the parking position in the parking state, the detection and determination of the type of the vehicle.
  • the smart magnetic sensor can detect the geomagnetic disturbance sharply, thereby detecting that the vehicle is in the At the location, the detected and processed signals are passed to the system microprocessor, the MCU.
  • the smart magnetic sensor may be purchased in advance under the ground at a position to be detected, or may be embedded in other objects near the ground, and the specific position may be determined according to the detection environment.
  • the oscillator is used to excite the amorphous wire to speed up the response
  • the amplifier is used to amplify the signal of the amorphous probe and send it to the A/D converter to become a digital signal into the system microprocessor.
  • the system microprocessor processes the collected information, and the system microprocessor sends the data to the data receiving antenna of the traffic flow dynamic parameter acquisition and storage processing system through the ceramic antenna.
  • the magnetic sensor signal is used to convert the magnetic field signal into an alternating current signal, which is then processed by the circuit.
  • the system microprocessor collects the magnetic field signal and is identified by software to perform environmental geomagnetic analysis and vehicle disturbance geomagnetic detection.
  • the system microprocessor communicates with the single-chip computer in the traffic flow dynamic parameter acquisition and storage processing system through wireless communication, and the traffic flow dynamic parameter acquisition, storage and processing system can process the number of vehicles passing through and the vehicle speed in real time.
  • the smart magnetic sensor can also be applied to vehicle detection while traveling, and the vehicle detection device detects the vehicle by adopting the following method:
  • the present invention also provides a method for detecting various types of information of a vehicle, which uses the smart magnetic sensor described in the above technical solution, and the method steps are as follows:
  • the vehicle exit signal is issued when the rate of change of the local magnetic field reduction exceeds a threshold.
  • the timing of the vehicle entering the signal is issued, and when the vehicle exit signal is issued, the timing is stopped, thereby obtaining the duration of the vehicle staying, and transmitting the duration signal.
  • the disturbance caused by the vehicle's magnetic field is mainly caused by the wheel, but for a certain type of special
  • the geomagnetic disturbance caused by the passing of the vehicles will be basically continuous, and the detection of various disturbances can be realized by detecting the changes of these disturbances.
  • the driving in and out can be applied to the parking detection, and can also be applied to the vehicle in the road to pass the detection.
  • the detection can set a different time threshold. For example, when detecting the parking, the threshold can be longer. When detecting highway vehicles, the threshold value can be shorter; when the time is less than a certain threshold, the default is the disturbance caused by different tires of the same vehicle, and the type of the vehicle can be simply determined according to the number of tire disturbances within the time threshold. For example, a six-wheel engineering vehicle, or a four-wheeled ordinary vehicle, or a military tank, a military special vehicle, and the like.
  • the piezoelectric sensor is disposed in parallel with the smart magnetic sensor, and detects a pressure signal generated by the vehicle tire on the piezoelectric sensor while detecting the ground magnetic field change signal;
  • the pressure signal performs an integral operation to obtain vehicle weight information.
  • a combination of magnetic anomaly slope detection and threshold detection is used to calculate the change speed (ie slope) of the magnetic signal by collecting the magnetic signal, and the difference detection range of the environmental magnetic field signal is used to realize the parking detection; Counting, using the reverse change of the magnetic signal of the front parking space to identify and calculate the number of vehicles; in order to detect the vehicle speed, the reverse time difference of the magnetic signal of the front parking space and the length of the specific model are used to calculate the speed.
  • the smart magnetic sensor can only display a ferromagnetic object passing through the detector, and in the vehicle detection, only the characteristic information of the vehicle can be provided, and the vehicle weight information cannot be provided, and the combination is Piezoelectric sensors (such as piezoelectric fiber optic sensors, etc.) detect the tire passing through the sensor, producing an analog signal proportional to the pressure applied to the sensor, and the period of the output is the same as the time the tire stays on the sensor. Whenever a tire passes the sensor, the sensor produces a new electronic pulse. When the weight of the vehicle is not equal, the amplitude of the generated pulse changes, and the time elapsed by the vehicle is recorded by the smart magnetic sensor, and the signal generated by the force is integrated to be weighed while traveling.
  • Piezoelectric sensors such as piezoelectric fiber optic sensors, etc.

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  • Measuring Magnetic Variables (AREA)

Abstract

A smart magnetic sensor and a vehicle detection method based on a smart magnetic sensor. The smart magnetic sensor comprises an MCU circuit, a GMI detection unit, a compensation circuit, a detection circuit, and a management circuit. The GMI detection unit is used for detecting a magnetic signal. The compensation circuit is used for magnetically compensating the magnetic signal detected by the GMI detection unit. The detection circuit is used for detecting an environmental magnetic field where the GMI detection unit is located. The management circuit is used for amplifying the magnetic signal detected by the GMI detection unit, and managing the compensation circuit and the detection circuit. The MCU circuit is used for controlling the management circuit, so as to achieve management control of the management circuit over the GMI detection unit, the compensation circuit, and the detection circuit. The smart magnetic sensor can be applied to vehicle detection, detects a vehicle disturbance geomagnetic field anomaly signal of a parking space, and obtains vehicle information about the parking space.

Description

智能磁传感器和基于智能磁传感器的车辆检测方法Intelligent magnetic sensor and vehicle detection method based on intelligent magnetic sensor 技术领域Technical field
本发明涉及弱磁场测量技术领域,具体涉及一种智能磁传感器,用于该智能磁传感器的探头、以及基于该智能磁传感器的车辆检测方法。The present invention relates to the field of weak magnetic field measurement technology, and in particular to an intelligent magnetic sensor, a probe for the smart magnetic sensor, and a vehicle detection method based on the smart magnetic sensor.
背景技术Background technique
本发明属于弱磁场测量技术领域,本发明涉及一种智能弱磁磁场探测传感器和一种缓变和瞬变磁场探测方法,具体涉及一种巨磁阻抗非晶丝传感器以及一种基于非晶丝巨磁磁阻抗效应的可用于车辆检测、铁磁性工程结构物应力检测,钢绞线断丝检测等领域的磁传感器。The invention belongs to the technical field of weak magnetic field measurement, and relates to an intelligent weak magnetic field detecting sensor and a method for detecting slow and transient magnetic fields, in particular to a giant magneto-impedance amorphous wire sensor and an amorphous wire based The giant magneto-impedance effect can be used for magnetic sensors in the fields of vehicle detection, stress detection of ferromagnetic engineering structures, and broken wire detection of steel strands.
现阶段,新型传感器逐渐向着微型化、数字化、智能化、多功能化、***化、网络化方向发展,它不仅促进了传统产业的改造,而且可能导致建立新型工业,是21世纪新的经济增长点。At this stage, the new sensor is gradually developing towards miniaturization, digitization, intelligence, multi-functionality, systemization and networking. It not only promotes the transformation of traditional industries, but also leads to the establishment of new industries, which is a new economic growth in the 21st century. point.
但是,目前已有的利用非晶丝磁阻抗技术的磁阻抗传感器存在许多问题,例如,使用脉冲信号作为激励信号,这种信号对电路存在冲击,噪音大,可选激励信号波形种类有限。而且,现有技术的非晶丝磁阻抗传感器通过对缠绕在非晶丝上的线圈通电而对非晶丝施加偏置磁场,这种偏置磁场会对测量磁场产生影响,由于这种偏置磁场施加于非晶丝的轴向,会阻止环形磁畴的圆周方向磁化,在一定程度上阻碍了磁场测量灵敏度的提高,削弱了非晶丝的磁阻抗效应。此外,为了对采样信号进行放大,通常会在信号处理电路中设置放大电路,这不仅增加了电路的复杂性和传感器的成本,而且放大效果也不理想。However, the existing magneto-impedance sensors using the amorphous magnetic impedance technique have many problems, for example, the use of a pulse signal as an excitation signal, which has an impact on the circuit, a large noise, and a limited variety of excitation signal waveforms. Moreover, prior art amorphous magneto-impedance sensors apply a biasing magnetic field to the amorphous wire by energizing a coil wound on the amorphous wire, which bias magnetic field has an effect on the measured magnetic field due to the bias The application of a magnetic field to the axial direction of the amorphous wire prevents the circumferential magnetization of the annular magnetic domain, which hinders the improvement of the magnetic field measurement sensitivity to a certain extent and weakens the magnetic impedance effect of the amorphous wire. In addition, in order to amplify the sampling signal, an amplifying circuit is usually provided in the signal processing circuit, which not only increases the complexity of the circuit and the cost of the sensor, but also the amplification effect is not satisfactory.
现有的在智能交通中,地球磁场范围内的磁感应技术也得到充分的应用,这些都应用侧重于在地磁场环境下的车辆检测。当车辆接近磁传感车辆检测器检测区域时,检测区域的磁力线受挤压而集合,当车辆将要通过检测区域时,检测区域的磁力线进一步收缩,当车辆通过检测区域时,磁力线受牵拉而沿中心发散。利用这些特点传感器可以捕捉车辆接近、通过或远离,从而实现对车 辆的实时检测。In the existing intelligent transportation, the magnetic induction technology in the range of the earth's magnetic field is also fully applied, and these applications are focused on vehicle detection in the geomagnetic field environment. When the vehicle approaches the magnetic sensor vehicle detector detection area, the magnetic lines of force of the detection area are squeezed and assembled. When the vehicle is about to pass the detection area, the magnetic lines of force of the detection area are further contracted, and when the vehicle passes the detection area, the magnetic lines of force are pulled. Divergence along the center. With these characteristics, the sensor can capture the vehicle approaching, passing or moving away, thus achieving the vehicle Real-time detection of the vehicle.
CN200810181901X中公开了一种微磁传感器,利用非晶丝的磁阻效应和电磁关系原理,将磁场信息转变成电讯号进行测量,但传感器通过次敏感器件的偏置电流和激励电流共同起作用,而偏置电流能够产生较高的温飘从而影响检测结果。CN200810181901X discloses a micro-magnetic sensor, which utilizes the magnetoresistance effect of an amorphous wire and the principle of electromagnetic relationship to convert magnetic field information into electrical signals for measurement, but the sensor acts through the bias current and the excitation current of the secondary sensitive device. The bias current can generate a higher temperature drift and affect the detection result.
CN201110055819公开了一种交通信息检测***,其中图钉结构传感器是利用磁敏感材料-非晶丝的据此阻抗变化来检测车辆通过时其扰动地磁场的变化,动态参数采用脉冲供电形式,由此产生的问题为功耗较大,功率较小,且通过脉冲供电形式进行参数采集在实施过程中并不准确,由于峰值持续时间小,而设备启动需要有时间差,因此无法精确采集到峰值,并且检测距离较短,由此需用传感器的数量较多,耗费大量成本。CN201110055819 discloses a traffic information detecting system, wherein the pushpin structure sensor utilizes a magnetic sensitive material-amorphous wire according to the impedance change to detect a change of the magnetic field of the disturbed ground when the vehicle passes, and the dynamic parameter adopts a pulse power supply form, thereby generating The problem is that the power consumption is large, the power is small, and the parameter acquisition by the pulse power supply mode is not accurate in the implementation process. Since the peak duration is small, and the device starts to have a time difference, the peak cannot be accurately collected, and the detection is impossible. The distance is short, and thus the number of sensors required is large and costly.
因此,研制一种智能化的高精度磁传感器,就成为了现在工程应用中的焦点之一,而针对弱磁检测领域,本发明提到的巨磁阻抗智能磁敏传感器可以有效适应弱磁场检测。Therefore, the development of an intelligent high-precision magnetic sensor has become one of the focuses in current engineering applications. For the field of weak magnetic detection, the giant magneto-impedance smart magnetic sensor mentioned in the present invention can effectively adapt to weak magnetic field detection. .
发明内容Summary of the invention
磁传感器就是把磁场、电流、应力应变、温度、光等引起敏感元件磁性能的变化转换成电信号,以这种方式来检测相应物理量的器件。在磁场检测中,由于磁场的面积、体积、缝隙大小等都是有限面积(尺寸),因此我们希望磁敏元件之面积与被测磁场面积相比也应该是越小越准确。在磁场成像的技术中,元件体积越小,在相同的面积内采集的像素就愈多。分辨率、清晰度越高。在表面磁场测量与多级磁体的检测中,在磁栅尺中,必然有如此要求。从磁敏元件工作机理看,为提高灵敏度在几何形状处于磁场中的几何尺寸都有相应要求。A magnetic sensor is a device that detects a change in the magnetic properties of a sensitive component, such as a magnetic field, a current, a stress strain, a temperature, or a light, into an electrical signal, in such a manner as to detect a corresponding physical quantity. In the magnetic field detection, since the area, volume, and gap size of the magnetic field are all finite areas (sizes), it is desirable that the area of the magnetic sensing element should be smaller and more accurate than the area of the magnetic field to be measured. In the technique of magnetic field imaging, the smaller the component volume, the more pixels are collected in the same area. The higher the resolution and clarity. In the measurement of surface magnetic fields and the detection of multi-stage magnets, there is a certain requirement in the magnetic scale. From the perspective of the working mechanism of the magnetic sensing element, in order to improve the sensitivity, the geometry of the geometric shape in the magnetic field has corresponding requirements.
磁场测量在生产科研各领域是一个重要问题。随着微电子技术的迅速发展,在国防、汽车电子、机器人技术、生物工程、自动化控制等领域需要一些微型或小型的、高性能、高灵敏度且响应速度快的磁场传感器来检测相关参数,例如磁场信息、转速、位移等等。目前,常规的磁场传感器有:霍尔效应(Hall)磁场传感器、各向异性磁电阻(AMR)磁场传感器、巨磁电阻(GMR)磁场传感器、 磁通门(Fluxgate)传感器等等。但是,上述磁场传感器都有一定的缺陷。例如,霍尔效应磁场传感器虽然是目前应用最为广泛的磁场传感器,但其输出信号变化小,灵敏度低,测量磁场时还有一定的磁场方向各向异性,适用于中强磁场测量;各向异性磁电阻(AMR)磁场传感器的磁阻变化率大小只有2%-4%,其磁场灵敏度小于1%/Oe,制造设备复杂;巨磁电阻(GMR)传感器的磁阻变化率虽然可以达到80%以上,可获得较高信号输出,但其磁场灵敏度仍然较低;磁通门传感器对线圈绕制的要求特别精确,信号处理要求较高。而且上述传感器的电路太过复杂,成本较高。在较高要求的应用领域中,尤其在智能交通、水陆交通流量监测、车型与船型检测、车辆间隔与车速检测、车位及泊位检测与引导等通过探测磁场扰动的变化实现报警与信息监控的场合、公共安全防范、隐蔽性周界的建立、航空、航天、航海领域等场合下,上述磁场传感器由于磁场探测分辨率低、探测距离近、响应速度慢、体积大、功耗高、温度稳定性差、方向性差、布线繁琐、或维护困难而不能满足实际应用对微弱磁场快速测定的要求。Magnetic field measurement is an important issue in all areas of production research. With the rapid development of microelectronics technology, some micro- or small-sized, high-performance, high-sensitivity and fast-responding magnetic field sensors are needed in the fields of national defense, automotive electronics, robotics, bioengineering, and automation control to detect related parameters, such as Magnetic field information, speed, displacement, etc. At present, conventional magnetic field sensors include: Hall effect magnetic field sensor, anisotropic magnetoresistance (AMR) magnetic field sensor, giant magnetoresistance (GMR) magnetic field sensor, Fluxgate sensors and more. However, the above magnetic field sensors have certain drawbacks. For example, the Hall effect magnetic field sensor is the most widely used magnetic field sensor, but its output signal has small change, low sensitivity, and certain magnetic field anisotropy when measuring magnetic field. It is suitable for medium and strong magnetic field measurement; The magnetoresistive (AMR) magnetic field sensor has a magnetoresistance change rate of only 2%-4%, its magnetic field sensitivity is less than 1%/Oe, and the manufacturing equipment is complicated; the magnetoresistance change rate of the giant magnetoresistance (GMR) sensor can reach 80%. Above, a higher signal output can be obtained, but the magnetic field sensitivity is still low; the fluxgate sensor has a particularly precise requirement for coil winding, and the signal processing requirements are high. Moreover, the circuit of the above sensor is too complicated and costly. In the higher demanding application areas, especially in the areas of intelligent traffic, water and land traffic flow monitoring, vehicle and ship type detection, vehicle interval and vehicle speed detection, parking space and berth detection and guidance, etc., by detecting changes in magnetic field disturbances to realize alarm and information monitoring. The above-mentioned magnetic field sensors have low resolution, close detection distance, slow response speed, large volume, high power consumption and poor temperature stability due to the detection of magnetic safety, the establishment of concealed perimeter, aviation, aerospace and navigation. The directionality is poor, the wiring is cumbersome, or the maintenance is difficult to meet the requirements of the rapid measurement of the weak magnetic field in practical applications.
巨磁磁阻抗效应是指材料在高频交变电流的激励下,交流阻抗随外加磁场强度的变化而迅速变化的现象。高精度、高性能的传感器制备要以质量优异、性能卓越的传感器材料为基础,非晶态材料是目前发现的微磁敏感性能最好的材料之一,在巨磁阻抗传感器的应用中具有得天独厚的优势。The giant magneto-impedance effect refers to the phenomenon that the material changes rapidly with the change of the applied magnetic field strength under the excitation of the high-frequency alternating current. High-precision, high-performance sensor preparation is based on sensor materials with excellent quality and excellent performance. Amorphous materials are one of the best micro-magnetic sensitive materials found in the world. They are unique in the application of giant magneto-impedance sensors. The advantages.
非晶丝磁阻抗传感器的工作原理是:利用非晶丝的磁阻抗效应,通过对非晶丝施以一定频率的激励,使非晶丝成为磁阻抗变化的载体。当外部磁场发生变化时,非晶丝的磁阻抗也随之变化,绕在非晶丝上的信号采样线圈随即感应出相应的电压信号。由此,该电压信号就与此时外部磁场的强弱形成了明确的对应关系。通过测量此电压信号,就可以测量外部磁场的强弱和大小。The working principle of the amorphous magnetic impedance sensor is to make the amorphous wire become a carrier of magnetic impedance change by applying a certain frequency excitation to the amorphous wire by utilizing the magnetic impedance effect of the amorphous wire. When the external magnetic field changes, the magnetic impedance of the amorphous wire also changes, and the signal sampling coil wound around the amorphous wire induces a corresponding voltage signal. Thus, the voltage signal forms a clear correspondence with the strength of the external magnetic field at this time. By measuring this voltage signal, the strength and magnitude of the external magnetic field can be measured.
在上述现有技术的基础上,本发明提出了智能磁传感器的技术方案,该技术方案可以广泛的适用于各类高精度的磁场检测应用中,例如地磁场扰动等等。本发明提出了以下的具体技术方案:Based on the above prior art, the present invention proposes a technical solution of an intelligent magnetic sensor, which can be widely applied to various types of high-precision magnetic field detecting applications, such as ground magnetic field disturbances and the like. The present invention proposes the following specific technical solutions:
一种智能磁传感器,包括MCU电路、GMI检测单元、补偿电路、检测电路和管理电路;所述GMI检测单元与所述补偿电路、检测电路连接,所述管理电路分别与所述补偿电路、检测电路、MCU电路连接;其特征在于:所述GMI检 测单元用于检测磁信号,所述补偿电路用于对GMI检测单元所检测到的磁信号进行磁补偿,所述检测电路用于检测出所述GMI检测单元所处的环境磁场;An intelligent magnetic sensor includes an MCU circuit, a GMI detecting unit, a compensation circuit, a detecting circuit and a management circuit; the GMI detecting unit is connected to the compensation circuit and the detecting circuit, and the management circuit and the compensation circuit respectively detect Circuit, MCU circuit connection; characterized by: said GMI check The detecting unit is configured to detect a magnetic signal, and the compensating circuit is configured to perform magnetic compensation on a magnetic signal detected by the GMI detecting unit, where the detecting circuit is configured to detect an ambient magnetic field in which the GMI detecting unit is located;
所述管理电路用于GMI检测单元所检测出的磁信号的放大处理,并对补偿电路和检测电路进行管理;所述MCU电路用于控制管理电路,实现管理电路对所述GMI检测单元、补偿电路和检测电路的管理控制。The management circuit is used for amplifying processing of the magnetic signal detected by the GMI detecting unit, and managing the compensation circuit and the detecting circuit; the MCU circuit is used for controlling the management circuit, implementing the management circuit to the GMI detecting unit, and compensating Management control of circuits and detection circuits.
优选的,所述GMI检测单元进一步包括:测头单元、电源输入模块、保护接地模块、信号输出模块;所述GMI检测单元,用于实现对缓变或瞬变磁场的信号探测;其中,所述测头单元,用于感测当前的缓变或瞬变磁环境、并获取对应的磁信号。Preferably, the GMI detecting unit further includes: a probe unit, a power input module, a protection grounding module, and a signal output module; and the GMI detecting unit is configured to implement signal detection on a slowly changing or transient magnetic field; The probe unit is configured to sense a current graded or transient magnetic environment and acquire a corresponding magnetic signal.
优选的,所述测头单元包括非晶丝焊盘、导体焊盘、导线、非晶丝、绕线轴和骨架,所述测头单元采用MEMS工艺封装。Preferably, the probe unit comprises an amorphous wire pad, a conductor pad, a wire, an amorphous wire, a bobbin and a bobbin, and the probe unit is packaged by a MEMS process.
优选的,所述非晶丝对称通过绕线轴中心与非晶丝焊盘焊接;所述导线缠绕在绕线轴上构成激励线圈和检测线圈,并与导体焊盘焊接。Preferably, the amorphous wire is symmetrically welded to the amorphous wire pad through the center of the bobbin; the wire is wound around the bobbin to form an excitation coil and a detection coil, and is soldered to the conductor pad.
优选的,所述导线为金属导线,所述金属优选为铜、铝或银;所述骨架设置成哑铃、矩形或者菱形的形状,制造材料优选为LCP材料。Preferably, the wire is a metal wire, preferably metal, copper, aluminum or silver; the skeleton is arranged in the shape of a dumbbell, a rectangle or a diamond, and the material of manufacture is preferably an LCP material.
优选的,所述检测电路包括磁异常检出电路、磁检出线圈、检出放大电路、温度补偿电路;所述磁异常检出电路与磁检出线圈连接,以检测磁场变化;所述温度补偿电路与磁异常检出电路连接,并根据磁异常检出电路的输出进行温度补偿,并将补偿量反馈给磁异常检出电路;温度补偿电路将温度补偿后的输出值输出给检出放大电路,所述检出放大电路将放大后的检出值传输给补偿电路。Preferably, the detecting circuit comprises a magnetic abnormality detecting circuit, a magnetic detecting coil, a detecting and amplifying circuit, and a temperature compensating circuit; the magnetic abnormality detecting circuit is connected with the magnetic detecting coil to detect a magnetic field change; The compensation circuit is connected with the magnetic abnormality detecting circuit, and performs temperature compensation according to the output of the magnetic abnormality detecting circuit, and feeds the compensation amount to the magnetic abnormality detecting circuit; the temperature compensation circuit outputs the temperature-compensated output value to the detection and amplification. The circuit, the detection amplification circuit transmits the amplified detection value to the compensation circuit.
优选的,所述补偿电路包括磁补偿线圈、磁共振驱动电路、激励振荡器;所述磁补偿线圈设置在非晶丝外侧,所述非晶丝分别与磁共振驱动电路、激励振荡器连接,所述激励振荡器与所述磁共振驱动电路连接。Preferably, the compensation circuit comprises a magnetic compensation coil, a magnetic resonance drive circuit, and an excitation oscillator; the magnetic compensation coil is disposed outside the amorphous wire, and the amorphous wire is respectively connected to the magnetic resonance drive circuit and the excitation oscillator. The excitation oscillator is coupled to the magnetic resonance drive circuit.
优选的,所述磁补偿线圈、磁检出线圈分别串接一电容器,以隔离直流电流或交流电流。Preferably, the magnetic compensation coil and the magnetic detection coil are respectively connected in series with a capacitor to isolate a direct current or an alternating current.
优选的,所述非晶丝采用Co-Fe-M-Si-B非晶丝材料制成,所述非晶丝外层包覆一层玻璃。Preferably, the amorphous wire is made of a Co-Fe-M-Si-B amorphous wire material, and the outer layer of the amorphous wire is coated with a layer of glass.
优选的,所述非晶丝采用Co-Fe-M-Si-B非晶丝材料,其响应速度小于10 纳秒,灵敏度高(满量程输出1000mV左右)、长度小于5毫米,直径范围为:30微米-100微米。Preferably, the amorphous wire adopts a Co-Fe-M-Si-B amorphous silk material, and the response speed is less than 10 Nanoseconds, high sensitivity (about 1000mV full scale output), length less than 5mm, diameter range: 30 microns - 100 microns.
本发明还提供了一种磁传感器探头,所述探头包括非晶丝焊盘、导体焊盘、导线、非晶丝、绕线轴和骨架;其特征在于:所述骨架中间段设置为绕线轴,骨架两端分别设置有端头,所述绕线轴截面积小于端头截面积;在所述骨架中心埋入所述非晶丝,所述非晶丝与绕线轴同心放置。The present invention also provides a magnetic sensor probe comprising an amorphous wire pad, a conductor pad, a wire, an amorphous wire, a bobbin and a skeleton; wherein the intermediate portion of the skeleton is arranged as a winding axis, The ends of the bobbin are respectively provided with a tip, the cross-sectional area of the bobbin is smaller than the cross-sectional area of the end; the amorphous wire is buried in the center of the skeleton, and the amorphous wire is placed concentrically with the bobbin.
优选的,所述非晶丝对称通过绕线轴中心与导体焊盘焊接;所述导线缠绕在绕线轴上构成激励线圈和检测线圈,并与导体焊盘焊接。Preferably, the amorphous wire is symmetrically welded to the conductor pad through the center of the bobbin; the wire is wound around the bobbin to form an excitation coil and a detection coil, and is soldered to the conductor pad.
优选的,所述非晶丝采用Co-Fe-M-Si-B非晶丝材料制成,所述非晶丝外层包覆一层玻璃。Preferably, the amorphous wire is made of a Co-Fe-M-Si-B amorphous wire material, and the outer layer of the amorphous wire is coated with a layer of glass.
优选的,所述非晶丝的非晶材料断裂拉伸强度为3000Mpa,非晶丝外层包覆一层玻璃;所述非晶丝两端在注塑前剥除玻璃层。Preferably, the amorphous material of the amorphous wire has a tensile strength at break of 3000 MPa, and the outer layer of the amorphous wire is coated with a layer of glass; the ends of the amorphous wire are stripped of the glass layer before injection molding.
优选的,所述非晶丝采用Co-Fe-M-Si-B非晶丝材料,其响应速度小于10纳秒,灵敏度高(满量程输出1000mV左右)、长度小于5毫米,直径范围为:30微米-100微米。Preferably, the amorphous wire adopts a Co-Fe-M-Si-B amorphous wire material, and has a response speed of less than 10 nanoseconds, high sensitivity (about 1000 mV of full-scale output), length of less than 5 mm, and a diameter range of: 30 microns - 100 microns.
优选的,所述非晶丝焊盘和导体焊盘的厚度为0.1mm-0.2mm;所述导体焊盘的材料与非晶丝的材料相适应,用以保证导电性和焊接性;所述导体焊盘的电极材料优选采用镀金或沉金。Preferably, the amorphous wire pad and the conductor pad have a thickness of 0.1 mm to 0.2 mm; the material of the conductor pad is adapted to the material of the amorphous wire to ensure conductivity and solderability; The electrode material of the conductor pad is preferably gold plated or immersed in gold.
优选的,所述骨架材质为LCP或PEI;所述绕线轴直径为φ0.3±0.02mm;Preferably, the skeleton material is LCP or PEI; the diameter of the bobbin is φ0.3±0.02 mm;
优选的,所述骨架可以制成一哑铃形状,中间设置为绕线轴,用来绕制导线线圈。Preferably, the skeleton may be formed into a dumbbell shape with a winding shaft disposed therebetween for winding the wire coil.
优选的,所述骨架上设置有2个非晶丝焊盘、4个导体焊盘;Preferably, the skeleton is provided with two amorphous wire pads and four conductor pads;
所述2个非晶丝焊盘分别位于所述探头的两端顶侧,所述4个导体焊盘位于所述探头的中部,相对于绕线轴对称设置,并设置于靠近绕线轴一侧。The two amorphous wire pads are respectively located on the top sides of the probes, and the four conductor pads are located in the middle of the probe, symmetrically disposed with respect to the winding axis, and disposed on a side close to the winding axis.
优选的,所述磁传感器探头通过MEMS工艺制造,在硅晶上设计,并预制出6个绑定点,所述6个绑定点包括2个非晶丝焊盘和4个导体焊盘。Preferably, the magnetic sensor probe is fabricated by a MEMS process, designed on a silicon crystal, and prefabricated with six bond points, the six bond points including two amorphous wire pads and four conductor pads.
优选的,当所述磁传感器探头用于检测导线等金属物体时,该探头设置为中空的环形或弧形。Preferably, when the magnetic sensor probe is used to detect a metal object such as a wire, the probe is provided in a hollow ring shape or an arc shape.
本发明还提供了一种基于智能磁传感器的车辆检测方法,其使用到如权利 要求1-10中任一所述的智能磁传感器,该方法包括如下步骤:The invention also provides a vehicle detection method based on an intelligent magnetic sensor, which uses the right The intelligent magnetic sensor of any of claims 1-10, the method comprising the steps of:
将所述智能磁传感器设置在车辆检测地点;以一预设采样速率检测所述车辆检测地点地磁场信号的变化;并在地磁场增高的变化率超过阈值时,发出车辆驶入信号;当地磁场降低的变化率超过阈值时,发出车辆驶出信号。Setting the smart magnetic sensor at a vehicle detection location; detecting a change of a magnetic field signal of the vehicle detection location at a preset sampling rate; and issuing a vehicle driving signal when the rate of change of the geomagnetic field increases exceeds a threshold; When the reduced rate of change exceeds the threshold, a vehicle exit signal is issued.
优选的,在该方法中,发出车辆驶入信号的同时进行计时,并在发出车辆驶出信号时,停止计时,从而获取车辆停留的时长,并发送时长信号。Preferably, in the method, the timing of the vehicle entering the signal is issued, and when the vehicle exit signal is issued, the timing is stopped, thereby obtaining the duration of the vehicle staying, and transmitting the duration signal.
优选的,检测可以设定一不同的时间阈值,当检测停车时,阈值可以较长,检测高速公路车辆时,阈值可以较短;当时间小于某一阈值时,默认为同一辆车的不同轮胎造成的扰动,也可以根据在该时间阈值以内的轮胎扰动次数,简单确定车辆的类型。Preferably, the detection may set a different time threshold. When detecting parking, the threshold may be longer. When detecting the highway vehicle, the threshold may be shorter; when the time is less than a certain threshold, the default is different tires of the same vehicle. The resulting disturbance can also be simply determined by the number of tire disturbances within the time threshold.
优选的,该方法进一步包括在所述智能磁传感器处平行设置压电传感器;其特征在于:在智能磁传感器检测地磁场变化信号的同时,压电传感器检测车辆轮胎对压电传感器产生的压力信号;在所述车辆停留时长内,对所述压力信号进行积分运算,获取车辆重量信息。Preferably, the method further comprises: arranging the piezoelectric sensor in parallel at the smart magnetic sensor; wherein the piezoelectric sensor detects a pressure signal generated by the vehicle tire on the piezoelectric sensor while the smart magnetic sensor detects the ground magnetic field change signal And integrating the pressure signal to obtain vehicle weight information during the vehicle stay duration.
本发明提供的技术方案具有以下优势:The technical solution provided by the invention has the following advantages:
1、本发明的磁传感器探头,其响应速度小于10纳秒,灵敏度高(满量程输出1000mV左右)、体积小、耐腐蚀、抗冲击能力强;1. The magnetic sensor probe of the invention has a response speed of less than 10 nanoseconds, high sensitivity (about 1000 mV of full-scale output), small volume, corrosion resistance and strong impact resistance;
2、本发明提供的智能磁传感器,由于探头采用非晶丝技术,形状可以多变,可以设计为盒装、弧形或圆形等,能够适应车辆、导线检测、钢缆检测等多种情形,具有良好的适用性;2. The intelligent magnetic sensor provided by the invention has a shape which can be varied due to the amorphous wire technology of the probe, and can be designed as a boxed, curved or circular shape, and can be adapted to various situations such as vehicle, wire detection and steel cable detection. , with good applicability;
3、本发明通过将RFID作为独立的模块,调整芯片,以及对非晶丝磁路和电路进行整合,降低了功耗,增加功率,并将波形调整为方便捕捉和采集峰值的调制波形式,解决的现有技术中出现的问题。3. The invention adjusts the chip by using RFID as an independent module, and integrates the magnetic circuit and circuit of the amorphous wire, reduces power consumption, increases power, and adjusts the waveform to a modulated wave form that is convenient for capturing and collecting peaks. Solved problems in the prior art.
附图说明DRAWINGS
图1为智能磁传感器的电路框图;Figure 1 is a circuit block diagram of an intelligent magnetic sensor;
图2为本发明实施例的GMI检测单元接口示例图;2 is a diagram showing an example of a GMI detection unit interface according to an embodiment of the present invention;
图3为本发明实施例的测头单元示例图; 3 is a view showing an example of a probe unit according to an embodiment of the present invention;
图4为本发明实施例的通过MEMS工艺制作的测头单元示例图;4 is a diagram showing an example of a probe unit fabricated by a MEMS process according to an embodiment of the present invention;
图5为本发明实施例的检测电路结构图;FIG. 5 is a structural diagram of a detection circuit according to an embodiment of the present invention; FIG.
图6为本发明实施例的补偿电路结构图;6 is a structural diagram of a compensation circuit according to an embodiment of the present invention;
图7为本发明实施例的检测电路、补偿电路一改进示例图;FIG. 7 is a schematic diagram showing a modification of a detection circuit and a compensation circuit according to an embodiment of the present invention; FIG.
图8为磁场与磁传感器特性曲线图;Figure 8 is a graph showing magnetic field and magnetic sensor characteristics;
图9为本发明实施例的骨架的一示例图;FIG. 9 is a view showing an example of a skeleton according to an embodiment of the present invention; FIG.
图10为本发明实施例的焊盘示例图;Figure 10 is a view showing an example of a pad according to an embodiment of the present invention;
图11为本发明实施例的非晶丝剖面示例图;Figure 11 is a view showing an example of a cross section of an amorphous wire according to an embodiment of the present invention;
图12为本发明实施例的磁传感器的盒式封装示例图;12 is a view showing an example of a package of a magnetic sensor according to an embodiment of the present invention;
图13为本发明实施例的基于智能磁传感器的车辆检测装置示例图;FIG. 13 is a diagram showing an example of a vehicle detecting device based on an intelligent magnetic sensor according to an embodiment of the present invention; FIG.
图14为本发明实施例的智能磁传感器检测车辆对磁场扰动的示例图。FIG. 14 is a diagram showing an example of an intelligent magnetic sensor for detecting a disturbance of a magnetic field by a vehicle according to an embodiment of the present invention.
具体实施方式detailed description
为使本发明要解决的技术问题、技术方案和优点更加清楚,下面将结合附图及具体实施例进行详细描述。本领域技术人员应当知晓,下述具体实施例或具体实施方式,是本发明为进一步解释具体的发明内容而列举的一系列优化的设置方式,是对权利要求的进一步解释,而本发明的保护范围并不限于下列具体实施例的描述,并且该些设置方式之间均是可以相互结合或者相互关联使用的,除非在本发明明确提出了其中某些或某一具体实施例或实施方式无法与其他的实施例或实施方式进行关联设置或共同使用。同时,下述的具体实施例或实施方式仅作为最优化的设置方式,而不作为限定本发明的保护范围的理解。The technical problems, the technical solutions, and the advantages of the present invention will be more clearly described in the following description. Those skilled in the art should appreciate that the following specific embodiments or specific embodiments are a series of optimized arrangements for further explaining the specific invention, which are further explanation of the claims, and the protection of the present invention. The scope is not limited to the description of the specific embodiments below, and the embodiments may be used in conjunction with each other or in association with each other unless the invention clearly stipulates that some or a specific embodiment or embodiment cannot Other embodiments or implementations are associated or used in conjunction. In the meantime, the specific embodiments or embodiments described below are merely intended to be an optimal arrangement, and are not to be construed as limiting the scope of the invention.
实施例1Example 1
如图1为本发明的智能磁传感器的电路框图,在该具体实施例中,如图1所示,本发明提供了一种智能磁传感器,所述磁传感器包括MCU电路、GMI检测单元、补偿电路、检测电路和管理电路;所述GMI检测单元与所述补偿电路、检测电路连接,所述管理电路分别与所述补偿电路、检测电路、MCU电路连接;其中,所述GMI检测单元用于检测磁信号;所述补偿电路用于对GMI检测单元所检测到的磁信号进行磁补偿;所述检测电路用于检测出所述GMI检测单元所 处的环境磁场;所述管理电路用于GMI检测单元所检测出的磁信号的放大处理,并对补偿电路和检测电路进行管理;所述MCU电路用于控制管理电路,实现管理电路对所述GMI检测单元、补偿电路和检测电路的管理控制。1 is a circuit block diagram of an intelligent magnetic sensor according to the present invention. In this embodiment, as shown in FIG. 1, the present invention provides an intelligent magnetic sensor including an MCU circuit, a GMI detecting unit, and compensation. a circuit, a detection circuit, and a management circuit; the GMI detection unit is connected to the compensation circuit and the detection circuit, and the management circuit is respectively connected to the compensation circuit, the detection circuit, and the MCU circuit; wherein the GMI detection unit is used for Detecting a magnetic signal; the compensation circuit is configured to magnetically compensate a magnetic signal detected by the GMI detecting unit; the detecting circuit is configured to detect the GMI detecting unit An environmental magnetic field; the management circuit is used for amplifying processing of the magnetic signal detected by the GMI detecting unit, and managing the compensation circuit and the detecting circuit; the MCU circuit is used for controlling the management circuit, and the management circuit is configured to Management control of GMI detection unit, compensation circuit and detection circuit.
在一具体的实施方式中,所述GMI检测单元进一步包括:测头单元、电源输入模块、保护接地模块、信号输出模块。In a specific implementation, the GMI detecting unit further includes: a probe unit, a power input module, a protection grounding module, and a signal output module.
如图2所示,GMI检测单元,其包括:测头单元、电源输入模块,及保护接地模块,信号输出模块,四个部分整合在了一个方盒子里。为适合电器连接,1、2、3、4连接端部分,被设计可以和4pin的金手指连接端子连接,也可以利用5、6分立连接。As shown in FIG. 2, the GMI detecting unit includes: a probe unit, a power input module, a protection grounding module, and a signal output module, and the four parts are integrated in a square box. In order to be suitable for electrical connection, the 1, 2, 3, and 4 connection ends are designed to be connected to the 4pin gold finger connection terminal, or 5, 6 discrete connections.
在一具体的实施方式中,如图3所示,所述测头单元包括非晶丝焊盘、导体焊盘、导线、非晶丝、绕线轴和骨架;所述非晶丝对称通过绕线轴中心与非晶丝焊盘焊接;所述导线缠绕在绕线轴上构成激励线圈和检测线圈,并与导体焊盘焊接。图3中,骨架可以设置成哑铃的形状,并采用LCP材料,当然此处也可以采用PEI材料等其他材料制作,需要声明,图3中的骨架仅作为一种优选的具体实施方式进行展示,该骨架可以也可以设置成为弧形、圆形等其他的形状,从而方便不同的使用环境和被检测物,例如,当作为一般的磁传感器进行例如车辆等检测时,可以做成哑铃状、矩形、菱形等形状,只要方便磁传感器的装配即可,这样可以方便地将智能磁传感器埋于地下或嵌入其他物体中,方便检测;此外,骨架也可以做成弧形或圆形,这样,整个探头即可以成为中空的环形或弧形,对于检测导线等金属物体更为方便;当然,本领域技术人员也可以根据具体的使用环境对骨架形状进行适当的改进,但应当声明的是,这些改进均应视为落入本申请的保护范围之内。In a specific embodiment, as shown in FIG. 3, the probe unit includes an amorphous wire pad, a conductor pad, a wire, an amorphous wire, a bobbin, and a skeleton; the amorphous wire is symmetrically passed through a bobbin The center is soldered to the amorphous wire pad; the wire is wound around the bobbin to form an excitation coil and a detection coil, and is soldered to the conductor pad. In Fig. 3, the skeleton can be set in the shape of a dumbbell and adopts an LCP material. Of course, it can also be made of other materials such as PEI materials. It should be noted that the skeleton in Fig. 3 is only shown as a preferred embodiment. The skeleton may be provided in other shapes such as a curved shape, a circular shape, or the like, thereby facilitating different use environments and objects to be detected. For example, when it is detected as a general magnetic sensor such as a vehicle, it may be made into a dumbbell shape or a rectangular shape. Shapes such as diamonds and the like can be easily assembled by the magnetic sensor, so that the smart magnetic sensor can be easily buried in the ground or embedded in other objects for easy detection; in addition, the skeleton can also be curved or rounded, so that the whole The probe can be a hollow ring or an arc, which is more convenient for detecting metal objects such as wires; of course, those skilled in the art can also appropriately improve the shape of the skeleton according to the specific use environment, but it should be stated that these improvements are All should be considered to fall within the scope of protection of this application.
在一具体的实施方式中,所述导线为金属导线;该导线也即绕在非晶丝外侧的线圈导线;所述金属为铜、铝、银等,也可以采用其他的金属导体,此处不再赘述;所述测头单元采用MEMS工艺封装,图4为一示例性的通过MEMS工艺封装制作的测头单元示例图,基于MEMS工艺的GMI检测单元中的测头单元,该测头利用MEMS工艺生产,在6英寸硅晶圆上设计数量超过400个,并且预制出6个经过特殊材料选择的绑定点。该方法利用半导体工艺,通过绑定点和敏感材料的匹配设计,有效提高了工艺一致性和焊接质量。 In a specific embodiment, the wire is a metal wire; the wire is also a coil wire wound around the outside of the amorphous wire; the metal is copper, aluminum, silver, etc., and other metal conductors may also be used. The probe unit is packaged in a MEMS process. FIG. 4 is an exemplary example of a probe unit fabricated by a MEMS process package. The probe unit in the GMI detection unit based on the MEMS process uses the probe. The MEMS process produces more than 400 designs on 6-inch silicon wafers and prefabricates six bond points with special material choices. The method utilizes a semiconductor process to effectively improve process consistency and solder quality through matching design of bond points and sensitive materials.
在一具体的实施方式中,如图5所示,所述检测电路包括磁异常检出电路、磁检出线圈、检出放大电路、温度补偿电路;所述磁异常检出电路与磁检出线圈连接,以检测磁场变化;所述温度补偿电路与磁异常检出电路连接,并根据磁异常检出电路的输出进行温度补偿,并将补偿量反馈给磁异常检出电路;温度补偿电路将温度补偿后的输出值输出给检出放大电路,所述检出放大电路将放大后的检出值传输给补偿电路。图5中,磁敏亚纳米金属玻璃纤维,也即本实施例中具体所采用的非晶丝,该管理控制电路也即本实施例中的管理电路。In a specific embodiment, as shown in FIG. 5, the detecting circuit includes a magnetic abnormality detecting circuit, a magnetic detecting coil, a detecting and amplifying circuit, and a temperature compensation circuit; and the magnetic abnormality detecting circuit and the magnetic detecting The coil is connected to detect a change of the magnetic field; the temperature compensation circuit is connected to the magnetic abnormality detecting circuit, and the temperature is compensated according to the output of the magnetic abnormality detecting circuit, and the compensation amount is fed back to the magnetic abnormality detecting circuit; the temperature compensation circuit will The temperature-compensated output value is output to the detection amplifying circuit, and the detected amplifying circuit transmits the amplified detected value to the compensation circuit. In Fig. 5, a magnetically sensitive sub-nano metallic glass fiber, that is, an amorphous wire specifically used in the present embodiment, is also a management circuit in the present embodiment.
在一具体的实施方式中,如图6所示,所述补偿电路包括磁补偿线圈、磁共振驱动电路、激励振荡器;所述磁补偿线圈设置在非晶丝外侧,所述非晶丝分别与磁共振驱动电路、激励振荡器连接,所述激励振荡器与所述磁共振驱动电路连接。In a specific embodiment, as shown in FIG. 6, the compensation circuit includes a magnetic compensation coil, a magnetic resonance drive circuit, and an excitation oscillator; the magnetic compensation coil is disposed outside the amorphous wire, and the amorphous wires are respectively Connected to the magnetic resonance drive circuit, the excitation oscillator, and the excitation oscillator is connected to the magnetic resonance drive circuit.
在一具体的实施方式中,如图7所示,所述磁补偿线圈、磁检出线圈分别串接一电容器,以隔离直流电流或交流电流。当交流电流和直流电流流过磁补偿线圈、磁检出线圈时,产生交流调制磁场和直流偏置磁场,而此时设置电容器C1,C2分别与磁补偿线圈、磁检出线圈串接,可以有效隔离直流电流或交流电流。当一个适当的直流偏置磁场被施加到传感器时,由于非晶丝的BH曲线的非线性,所述交流电压的振幅与外部场的变化将如图8所示,这即是磁传感器的检测原理。In a specific embodiment, as shown in FIG. 7, the magnetic compensation coil and the magnetic detection coil are respectively connected in series with a capacitor to isolate a direct current or an alternating current. When the alternating current and the direct current flow through the magnetic compensation coil and the magnetic detection coil, an alternating current modulation magnetic field and a direct current bias magnetic field are generated, and at this time, the capacitors C1 and C2 are respectively connected in series with the magnetic compensation coil and the magnetic detection coil, and Effectively isolates DC or AC current. When a suitable DC bias magnetic field is applied to the sensor, due to the nonlinearity of the BH curve of the amorphous wire, the amplitude of the AC voltage and the external field will change as shown in Fig. 8, which is the detection of the magnetic sensor. principle.
在一具体的实施方式中,所述非晶丝采用Co-Fe-M-Si-B非晶丝材料;所述非晶丝外层包覆一层玻璃。In a specific embodiment, the amorphous wire is made of a Co-Fe-M-Si-B amorphous wire material; and the outer layer of the amorphous wire is coated with a layer of glass.
本传感器是一种响应极快地磁异常检测传感器,适用高速磁场变化和缓变磁场比值,如远距离磁开关、海底潜艇检测传感器网络、高速铁磁检测等,还可适用于地磁异常检测,如舰艇、船舰检测、边防武器车辆坦克等磁异常检测、地质探勘、地震磁异常检测等。The sensor is a very fast magnetic anomaly detection sensor. It is suitable for high-speed magnetic field change and slow-change magnetic field ratio, such as remote magnetic switch, submarine detection sensor network, high-speed ferromagnetic detection, etc. It can also be applied to geomagnetic anomaly detection, such as ships. , ship detection, frontal defense weapons, vehicle tanks and other magnetic anomaly detection, geological exploration, seismic magnetic anomaly detection.
在一具体的实施方式中,所述智能磁传感器可以设置成为模拟信号输出型或者数字信号输出型,即分别输出模拟检测信号、数字检测信号,该数字输出型设置有微处理器。In a specific embodiment, the smart magnetic sensor can be configured as an analog signal output type or a digital signal output type, that is, an analog detection signal and a digital detection signal are respectively output, and the digital output type is provided with a microprocessor.
本传感器按开关量输出,适用于智能交通车辆检测,替代传统的地感线圈检测器,可广泛用于交通路口、智能控制红绿灯、路边泊位停车、停车场出入 口、自动控制的门、高速公路车流量监测等方面。The sensor is output according to the switch quantity and is suitable for intelligent traffic vehicle detection. It can replace the traditional ground sense coil detector and can be widely used in traffic intersections, intelligent control traffic lights, roadside berth parking, parking lot access. Port, automatic control of the door, highway traffic monitoring and other aspects.
实施例2Example 2
本发明还提供了一种磁传感器探头,所述探头包括非晶丝焊盘、导体焊盘、导线、非晶丝、绕线轴和骨架;所述骨架中间段设置为绕线轴,骨架两端分别设置有端头,所述绕线轴截面积小于端头截面积;在所述骨架中心埋入所述非晶丝,所述非晶丝与绕线轴同心放置;所述骨架上设置有2个非晶丝焊盘、4个导体焊盘。The invention also provides a magnetic sensor probe, the probe comprising an amorphous wire pad, a conductor pad, a wire, an amorphous wire, a bobbin and a skeleton; the middle section of the skeleton is arranged as a winding axis, and the two ends of the skeleton are respectively Provided with a tip, the winding axis cross-sectional area is smaller than the end cross-sectional area; the amorphous wire is embedded in the center of the skeleton, the amorphous wire is placed concentrically with the winding axis; and the frame is provided with two non- Crystal pad, 4 conductor pads.
如图9所示,为本实施例一具体实施方式中骨架的形状以及参数设置,该骨架可以制成一哑铃形状,中间设置为绕线轴,用来绕制导线线圈,图9中的尺寸仅作为一示例性的优选实施方式使用,并不作为本发明的范围限定。As shown in FIG. 9 , for the shape and parameter setting of the skeleton in the embodiment of the embodiment, the skeleton can be formed into a dumbbell shape, and the middle is set as a winding shaft for winding the wire coil, and the size in FIG. 9 is only It is used as an exemplary preferred embodiment and is not intended to limit the scope of the invention.
在一具体的实施方式中,如图10所示,所述4个导体焊盘的材料与绕线线圈的材料相适应,用以保证导电性和焊接性;所述2个非晶丝焊盘分别位于所述探头的两端顶侧,如图10中骨架两端的矩形焊盘;所述4个导体焊盘位于所述探头的中部,相对于绕线轴对称设置,并靠近绕线轴一侧,如图10中位于骨架中间的四个正方形小焊盘。当然,图10中的具体尺寸设置,仅作为一个具体的实施方式的示例,并不作为限定本发明保护范围的理解。所述的焊盘,设置成为矩形或正方形,仅仅是一示例,该些焊盘也可以设置成为其他的任意形状,该些形状可以根据具体制作的工艺需要来设置,而这些焊盘的位置设置,图10中也仅是一优选的实施方式,也可以将非晶丝焊盘设置在骨架的靠近中间位置,而在不影响绕线需要的情况下,导体焊盘也可以设置在其他的位置上,本领域技术人员应当理解,该些常规的位置以及焊盘形状的设置更改,均应视为落入本发明的保护范围之内。In a specific embodiment, as shown in FIG. 10, the materials of the four conductor pads are adapted to the material of the winding coil to ensure conductivity and solderability; the two amorphous wire pads They are respectively located on the top sides of the probes, such as rectangular pads at both ends of the skeleton in FIG. 10; the four conductor pads are located in the middle of the probe, symmetrically disposed with respect to the winding axis, and close to the side of the winding axis. As shown in Figure 10, there are four square small pads in the middle of the skeleton. The specific size setting in FIG. 10 is only an example of a specific embodiment, and is not intended to limit the scope of the present invention. The pads are arranged in a rectangular or square shape. For example, the pads may be disposed in any other shape. The shapes may be set according to specific process requirements, and the positions of the pads are set. In FIG. 10, it is only a preferred embodiment. The amorphous wire pad can also be disposed near the middle of the skeleton, and the conductor pad can be disposed at other positions without affecting the winding requirements. It should be understood by those skilled in the art that the conventional positions and the setting changes of the pad shapes are considered to fall within the protection scope of the present invention.
此外,所述的4个导体焊盘的材料与绕线线圈的材料相适应,以利于优良的导电性和焊接性,具体的焊盘材料可以依据导体材料而定,此处不再赘述。In addition, the materials of the four conductor pads are adapted to the material of the winding coil to facilitate excellent electrical conductivity and solderability. The specific pad material may be determined according to the conductor material, and details are not described herein.
在一具体的实施方式中,所述探头通过MEMS工艺制造,在硅晶上设计,并预制出6个绑定点,基于该绑定点上述探头可以实现供电、数据的传输等。具体而言,在一具体的实施方式中,在6英寸硅晶圆上设计数量超过400个,并且预制出6个经过特殊材料选择的绑定点。该方法利用半导体工艺,通过绑定 点和敏感材料的匹配设计,有效提高了工艺一致性和焊接质量。In a specific embodiment, the probe is fabricated by a MEMS process, designed on a silicon crystal, and prefabricated with six binding points. Based on the binding point, the probe can implement power supply, data transmission, and the like. Specifically, in a specific embodiment, more than 400 designs are designed on a 6 inch silicon wafer, and six bond points selected by a particular material are prefabricated. The method utilizes a semiconductor process by binding Matching design of points and sensitive materials effectively improves process consistency and weld quality.
在一具体的实施方式中,所述非晶丝采用Co-Fe-M-Si-B非晶丝材料。如图11所示的一示例性实施例中,所述非晶丝的非晶材料断裂拉伸强度为3000Mpa,非晶丝直径为0.0328mm,外层包覆一层0.002mm的玻璃,此处的直径与玻璃层厚度,为本实施例中的一优选实施方式,并不作为限定本发明保护范围的理解;所述非晶丝两端在注塑前剥除玻璃层。In a specific embodiment, the amorphous wire is made of a Co-Fe-M-Si-B amorphous wire material. In an exemplary embodiment as shown in FIG. 11, the amorphous material of the amorphous wire has a tensile strength at break of 3000 MPa, an amorphous wire diameter of 0.0328 mm, and an outer layer coated with a layer of 0.002 mm of glass. The diameter and thickness of the glass layer are a preferred embodiment of the present invention and are not intended to limit the scope of protection of the present invention; both ends of the amorphous wire are stripped of the glass layer prior to injection molding.
在一具体的实施方式中,所述骨架材质为LCP或PEI;所述绕线轴直径为φ0.3±0.02mm。所述非晶丝焊盘和导体焊盘的厚度为0.1mm-0.2mm;所述焊盘的电极材料采用镀金或沉金。In a specific embodiment, the skeleton material is LCP or PEI; and the diameter of the bobbin is φ0.3±0.02 mm. The thickness of the amorphous wire pad and the conductor pad is 0.1 mm to 0.2 mm; the electrode material of the pad is gold plated or immersed.
在一具体的实施方式中,如图12所示,该磁传感器可以封装为盒式的,将工艺加工完成的磁传感器封装为立方体形状,以方便与其他电路的组装和使用。当然,此处仅作为一优选的示例,该封装也可以采用其他的方式,例如弧形、圆环等形状,该些形状的改变,可以根据实际检测目标和使用环境的不同而进行更改,该些更改均应视为落入本申请的保护范围之内。In a specific embodiment, as shown in FIG. 12, the magnetic sensor can be packaged in a box type, and the processed magnetic sensor is packaged into a cubic shape to facilitate assembly and use with other circuits. Of course, as a preferred example, the package may also adopt other manners, such as a shape of a curved shape, a circular ring, or the like, and the change of the shapes may be changed according to actual detection targets and usage environments. These changes are considered to fall within the scope of this application.
所述非晶丝采用Co-Fe-M-Si-B非晶丝材料,其响应速度小于10纳秒,灵敏度高(满量程输出1000mV左右)、长度小于5毫米,直径范围为:30微米-100微米,耐腐蚀、抗冲击能力强。The amorphous wire adopts Co-Fe-M-Si-B amorphous wire material, and has a response speed of less than 10 nanoseconds, high sensitivity (about 1000 mV of full-scale output), length of less than 5 mm, and a diameter range of 30 micrometers- 100 microns, resistant to corrosion and impact.
实施例3Example 3
在一具体的实施方式中,在上述实施例的基础上,本发明还提供了一种使用上述的智能磁传感器的车辆检测器,如图15所示,所述车辆检测器包括智能磁传感器、***微处理器(MCU)、无线发射模块、无线RFID读卡器模块;所述智能磁传感器用于监测停车位的车辆扰动地磁场磁异常信号,所述***微处理器用于对检测到的停车位车辆有无信号和车辆扰动地磁场磁异常信号进行模数转换、采集及信号处理分析,以获得停车位的车辆信息,并将所述停车信息通过无线发射模块进行发送;所述RFID读卡器模块用于读取车辆RFID射频卡所携带的车辆信息。In a specific embodiment, based on the above embodiments, the present invention further provides a vehicle detector using the above-described smart magnetic sensor. As shown in FIG. 15, the vehicle detector includes an intelligent magnetic sensor. a system microprocessor (MCU), a wireless transmitting module, and a wireless RFID card reader module; the smart magnetic sensor is configured to monitor a vehicle magnetic field magnetic anomaly signal of a parking space, and the system microprocessor is configured to detect the detected parking The vehicle has a signal and a vehicle disturbance magnetic field magnetic abnormal signal for analog-to-digital conversion, acquisition and signal processing analysis to obtain vehicle information of the parking space, and the parking information is transmitted through the wireless transmitting module; the RFID reading card The module is used to read vehicle information carried by the vehicle RFID radio frequency card.
该智能磁传感器具有检测缓变磁场信号和瞬变磁场信号功能,而不同的车底盘高度,将会对地磁场产生大小不同的扰动影响,因此,基于此,该智能磁 传感器可适用于泊车状态的停车位置上面的车辆有无状态的检测判断、车辆类型的检测及判断。当车辆经过智能磁传感器附近时,由于车辆是具有磁导材料的,因此,会对所在位置处的地磁场产生扰动,智能磁传感器可以敏锐地检测到这一地磁扰动,从而检测出车辆在该位置处,并将检测及处理后的信号传递给***微处理器,即MCU。在一具体的实施方式中,该智能磁传感器可以预先买入需要检测的位置处的地面下,也可以嵌入地面附近的其他物体中,具***置可以根据检测环境而定。The smart magnetic sensor has the function of detecting a slowly varying magnetic field signal and a transient magnetic field signal, and different vehicle chassis heights will have different disturbance effects on the earth magnetic field, and therefore, based on this, the smart magnetic The sensor can be applied to the detection of the presence or absence of the state of the vehicle above the parking position in the parking state, the detection and determination of the type of the vehicle. When the vehicle passes near the smart magnetic sensor, since the vehicle is magnetically permeable, it will disturb the geomagnetic field at the location, and the smart magnetic sensor can detect the geomagnetic disturbance sharply, thereby detecting that the vehicle is in the At the location, the detected and processed signals are passed to the system microprocessor, the MCU. In a specific embodiment, the smart magnetic sensor may be purchased in advance under the ground at a position to be detected, or may be embedded in other objects near the ground, and the specific position may be determined according to the detection environment.
在一具体的实施方式中,振荡器用来激励非晶丝,加快其响应速度,放大器用于放大非晶丝探头的信号并送入A/D转换器变为数字信号进入***微处理器,***微处理器对采集的信息进行处理,通过陶瓷天线,***微处理器发送数据到交通流动态参数采集存贮处理***的数据接收天线。通过磁传感器探头,将磁场信号转换为交流电信号,再由电路进行计算处理。***微处理器采集磁场信号,经软件识别,进行环境地磁分析和车辆扰动地磁检测。***微处理器通过无线通信方式与交通流动态参数采集存贮处理***中的单片机进行通信,交通流动态参数采集、存贮、处理***能实时处理车辆的通过数量、车速等。In a specific embodiment, the oscillator is used to excite the amorphous wire to speed up the response, and the amplifier is used to amplify the signal of the amorphous probe and send it to the A/D converter to become a digital signal into the system microprocessor. The system microprocessor processes the collected information, and the system microprocessor sends the data to the data receiving antenna of the traffic flow dynamic parameter acquisition and storage processing system through the ceramic antenna. The magnetic sensor signal is used to convert the magnetic field signal into an alternating current signal, which is then processed by the circuit. The system microprocessor collects the magnetic field signal and is identified by software to perform environmental geomagnetic analysis and vehicle disturbance geomagnetic detection. The system microprocessor communicates with the single-chip computer in the traffic flow dynamic parameter acquisition and storage processing system through wireless communication, and the traffic flow dynamic parameter acquisition, storage and processing system can process the number of vehicles passing through and the vehicle speed in real time.
在一具体的实施方式中,该智能磁传感器也可应用于行驶中的车辆检测,该车辆检测装置检测车辆时采用以下方法:In a specific embodiment, the smart magnetic sensor can also be applied to vehicle detection while traveling, and the vehicle detection device detects the vehicle by adopting the following method:
本发明还提供了一种用于检测车辆各类信息的方法,其使用到如上技术方案中所述的智能磁传感器,该方法步骤如下:The present invention also provides a method for detecting various types of information of a vehicle, which uses the smart magnetic sensor described in the above technical solution, and the method steps are as follows:
将所述智能磁传感器设置在车辆检测地点;Setting the smart magnetic sensor at a vehicle detection location;
以一预设采样速率检测所述车辆检测地点地磁场信号的变化;Detecting a change in a magnetic field signal of the vehicle detection location at a predetermined sampling rate;
并在地磁场增高的变化率超过阈值时,发出车辆驶入信号。And when the rate of change of the geomagnetic field increases exceeds the threshold, the vehicle enters the signal.
在一具体的实施方式中,当地磁场降低的变化率超过阈值时,发出车辆驶出信号。In a specific embodiment, the vehicle exit signal is issued when the rate of change of the local magnetic field reduction exceeds a threshold.
在一具体的实施方式中,发出车辆驶入信号的同时进行计时,并在发出车辆驶出信号时,停止计时,从而获取车辆停留的时长,并发送时长信号。如图16所示,车辆对地磁场造成的扰动变化,主要是由车轮造成,而对于某类特 殊车辆,例如坦克车,则其驶过造成的地磁扰动将是基本连续的,可以通过对这些扰动的变化的检测,实现对车辆多种信息检测。In a specific embodiment, the timing of the vehicle entering the signal is issued, and when the vehicle exit signal is issued, the timing is stopped, thereby obtaining the duration of the vehicle staying, and transmitting the duration signal. As shown in Figure 16, the disturbance caused by the vehicle's magnetic field is mainly caused by the wheel, but for a certain type of special For special vehicles, such as tank cars, the geomagnetic disturbance caused by the passing of the vehicles will be basically continuous, and the detection of various disturbances can be realized by detecting the changes of these disturbances.
这一驶入与驶出可以是应用在停车检测上,也可以应用在道路中的车辆通过检测,此时,检测可以设定一不同的时间阈值,例如,检测停车时,阈值可以较长,检测高速公路车辆时,阈值可以较短;当时间小于某一阈值时,默认为同一辆车的不同轮胎造成的扰动,也可以根据在该时间阈值以内的轮胎扰动次数,简单确定车辆的类型,例如是六轮工程车辆,还是四轮普通车辆,或者军用坦克、军用特殊车辆等等。The driving in and out can be applied to the parking detection, and can also be applied to the vehicle in the road to pass the detection. At this time, the detection can set a different time threshold. For example, when detecting the parking, the threshold can be longer. When detecting highway vehicles, the threshold value can be shorter; when the time is less than a certain threshold, the default is the disturbance caused by different tires of the same vehicle, and the type of the vehicle can be simply determined according to the number of tire disturbances within the time threshold. For example, a six-wheel engineering vehicle, or a four-wheeled ordinary vehicle, or a military tank, a military special vehicle, and the like.
在一具体的实施方式中,在所述智能磁传感器平行设置压电传感器,在检测地磁场变化信号的同时,检测车辆轮胎对压电传感器产生的压力信号;在所述车辆停留时长内,对所述压力信号进行积分运算,获取车辆重量信息。In a specific embodiment, the piezoelectric sensor is disposed in parallel with the smart magnetic sensor, and detects a pressure signal generated by the vehicle tire on the piezoelectric sensor while detecting the ground magnetic field change signal; The pressure signal performs an integral operation to obtain vehicle weight information.
为检测车辆停车,采用磁异常斜率检测和阈值检测结合的方法,通过采集磁信号,计算磁信号的变化速度(即斜率),与环境磁场信号进行差值检测变化幅度实现停车检测;为检测车辆计数,采用车头车位磁信号反向变化识别计算车辆个数;为检测车速,采用车头车位磁信号反向变化时间差和特定车型的车长,进行速度计算。In order to detect vehicle parking, a combination of magnetic anomaly slope detection and threshold detection is used to calculate the change speed (ie slope) of the magnetic signal by collecting the magnetic signal, and the difference detection range of the environmental magnetic field signal is used to realize the parking detection; Counting, using the reverse change of the magnetic signal of the front parking space to identify and calculate the number of vehicles; in order to detect the vehicle speed, the reverse time difference of the magnetic signal of the front parking space and the length of the specific model are used to calculate the speed.
在又一具体的实施方式中,所述的智能磁敏传感器只能显示出一个铁磁性物体经过了检测器,在车辆检测方面,只能提供车辆的特征信息,不能提供车重信息,而结合压电传感器(例如压电光纤传感器器等)检测经过传感器的轮胎,产生一个与施加到传感器上的压力成正比的模拟信号,并且输出的周期与轮胎停留在传感器上的时间相同。每当一个轮胎经过传感器时,传感器就会产生一个新的电子脉冲。在车辆重量不等时,产生的脉冲的幅度变化,用智能磁敏传感器记录车辆经过的时间,通过对受力产生的信号积分,从而在行驶中称重。In still another specific embodiment, the smart magnetic sensor can only display a ferromagnetic object passing through the detector, and in the vehicle detection, only the characteristic information of the vehicle can be provided, and the vehicle weight information cannot be provided, and the combination is Piezoelectric sensors (such as piezoelectric fiber optic sensors, etc.) detect the tire passing through the sensor, producing an analog signal proportional to the pressure applied to the sensor, and the period of the output is the same as the time the tire stays on the sensor. Whenever a tire passes the sensor, the sensor produces a new electronic pulse. When the weight of the vehicle is not equal, the amplitude of the generated pulse changes, and the time elapsed by the vehicle is recorded by the smart magnetic sensor, and the signal generated by the force is integrated to be weighed while traveling.
以上所述是本发明的优选实施方式,应当指出,对于本技术领域的普通技术人员来说,在不脱离本发明所述原理的前提下,还可以做出若干改进和润饰,这些改进和润饰也应视为本发明的保护范围。 The above is a preferred embodiment of the present invention, and it should be noted that those skilled in the art can also make several improvements and retouchings without departing from the principles of the present invention. It should also be considered as the scope of protection of the present invention.

Claims (24)

  1. 一种智能磁传感器,包括MCU电路、GMI检测单元、补偿电路、检测电路和管理电路;所述GMI检测单元与所述补偿电路、检测电路连接,所述管理电路分别与所述补偿电路、检测电路、MCU电路连接;其特征在于:An intelligent magnetic sensor includes an MCU circuit, a GMI detecting unit, a compensation circuit, a detecting circuit and a management circuit; the GMI detecting unit is connected to the compensation circuit and the detecting circuit, and the management circuit and the compensation circuit respectively detect Circuit, MCU circuit connection; characterized by:
    所述GMI检测单元用于检测磁信号,所述补偿电路用于对GMI检测单元所检测到的磁信号进行磁补偿,所述检测电路用于检测出所述GMI检测单元所处的环境磁场;The GMI detecting unit is configured to detect a magnetic signal, and the compensating circuit is configured to perform magnetic compensation on a magnetic signal detected by the GMI detecting unit, where the detecting circuit is configured to detect an ambient magnetic field in which the GMI detecting unit is located;
    所述管理电路用于GMI检测单元所检测出的磁信号的放大处理,并对补偿电路和检测电路进行管理;所述MCU电路用于控制管理电路,实现管理电路对所述GMI检测单元、补偿电路和检测电路的管理控制。The management circuit is used for amplifying processing of the magnetic signal detected by the GMI detecting unit, and managing the compensation circuit and the detecting circuit; the MCU circuit is used for controlling the management circuit, implementing the management circuit to the GMI detecting unit, and compensating Management control of circuits and detection circuits.
  2. 根据权利要求1所述的智能磁传感器,其特征在于:The smart magnetic sensor of claim 1 wherein:
    所述GMI检测单元进一步包括:测头单元、电源输入模块、保护接地模块、信号输出模块;所述GMI检测单元,用于实现对缓变或瞬变磁场的信号探测;所述测头单元,用于感测当前的缓变或瞬变磁环境、并获取对应的磁信号。The GMI detecting unit further includes: a probe unit, a power input module, a protection grounding module, and a signal output module; and the GMI detecting unit is configured to implement signal detection on a slowly changing or transient magnetic field; Used to sense the current graded or transient magnetic environment and acquire the corresponding magnetic signal.
  3. 根据权利要求2所述的智能磁传感器,其特征在于:The intelligent magnetic sensor according to claim 2, wherein:
    所述测头单元包括非晶丝焊盘、导体焊盘、导线、非晶丝、绕线轴和骨架,所述测头单元采用MEMS工艺封装。The probe unit includes an amorphous wire pad, a conductor pad, a wire, an amorphous wire, a bobbin and a bobbin, and the probe unit is packaged using a MEMS process.
  4. 根据权利要求3所述的智能磁传感器,其特征在于:The intelligent magnetic sensor according to claim 3, wherein:
    所述非晶丝对称通过绕线轴中心与非晶丝焊盘焊接;The amorphous wire is symmetrically welded to the amorphous wire pad through the center of the winding shaft;
    所述导线缠绕在绕线轴上构成激励线圈和检测线圈,并与导体焊盘焊接。The wire is wound around a bobbin to form an excitation coil and a detection coil, and is soldered to the conductor pad.
  5. 根据权利要求3或4所述的智能磁传感器,其特征在于:The intelligent magnetic sensor according to claim 3 or 4, characterized in that:
    所述导线为金属导线,所述金属优选为铜、铝或银;The wire is a metal wire, and the metal is preferably copper, aluminum or silver;
    所述骨架设置成哑铃、矩形或者菱形的形状,制造材料优选为LCP材料。The skeleton is provided in the shape of a dumbbell, a rectangle or a diamond, and the material of manufacture is preferably an LCP material.
  6. 根据权利要求1-5任一所述的智能磁传感器,其特征在于:The smart magnetic sensor according to any one of claims 1 to 5, characterized in that:
    所述检测电路包括磁异常检出电路、磁检出线圈、检出放大电路、温度补偿电路;所述磁异常检出电路与磁检出线圈连接,以检测磁场变化;所述温度补偿电路与磁异常检出电路连接,并根据磁异常检出电路的输出进行温度补偿,并将补偿量反馈给磁异常检出电路;温度补偿电路将温度补偿后的输出值 输出给检出放大电路,所述检出放大电路将放大后的检出值传输给补偿电路。The detecting circuit includes a magnetic abnormality detecting circuit, a magnetic detecting coil, a detecting and amplifying circuit, and a temperature compensating circuit; the magnetic abnormality detecting circuit is connected with the magnetic detecting coil to detect a magnetic field change; and the temperature compensating circuit and The magnetic anomaly detection circuit is connected, and the temperature compensation is performed according to the output of the magnetic abnormality detecting circuit, and the compensation amount is fed back to the magnetic abnormality detecting circuit; the temperature compensation circuit outputs the temperature after compensation The output is output to the detection amplification circuit, and the detection amplification circuit transmits the amplified detection value to the compensation circuit.
  7. 根据权利要求3-5任一所述的智能磁传感器,其特征在于:The intelligent magnetic sensor according to any one of claims 3-5, characterized in that:
    所述补偿电路包括磁补偿线圈、磁共振驱动电路、激励振荡器;所述磁补偿线圈设置在非晶丝外侧,所述非晶丝分别与磁共振驱动电路、激励振荡器连接,所述激励振荡器与所述磁共振驱动电路连接。The compensation circuit includes a magnetic compensation coil, a magnetic resonance drive circuit, and an excitation oscillator; the magnetic compensation coil is disposed outside the amorphous wire, and the amorphous wire is respectively connected to the magnetic resonance drive circuit and the excitation oscillator, and the excitation An oscillator is coupled to the magnetic resonance drive circuit.
  8. 根据权利要求5或6所述的智能磁传感器,其特征在于:The intelligent magnetic sensor according to claim 5 or 6, wherein:
    所述磁补偿线圈、磁检出线圈分别串接一电容器,以隔离直流电流或交流电流。The magnetic compensation coil and the magnetic detection coil are respectively connected in series with a capacitor to isolate a direct current or an alternating current.
  9. 根据权利要求3-8中任一所述的智能磁传感器,其特征在于:The intelligent magnetic sensor according to any one of claims 3-8, characterized in that:
    所述非晶丝采用Co-Fe-M-Si-B非晶丝材料制成,所述非晶丝外层包覆一层玻璃。The amorphous wire is made of a Co-Fe-M-Si-B amorphous wire material, and the outer layer of the amorphous wire is coated with a layer of glass.
  10. 根据权利要求9所述的智能磁传感器,其特征在于:The intelligent magnetic sensor according to claim 9, wherein:
    所述非晶丝采用Co-Fe-M-Si-B非晶丝材料,其响应速度小于10纳秒,灵敏度高(满量程输出1000mV左右)、长度小于5毫米,直径范围为:30-100微米。The amorphous wire adopts Co-Fe-M-Si-B amorphous wire material, and has a response speed of less than 10 nanoseconds, high sensitivity (about 1000 mV of full-scale output), length of less than 5 mm, and a diameter range of 30-100. Micron.
  11. 一种磁传感器探头,所述探头包括非晶丝焊盘、导体焊盘、导线、非晶丝、绕线轴和骨架;其特征在于:A magnetic sensor probe comprising an amorphous wire pad, a conductor pad, a wire, an amorphous wire, a bobbin and a skeleton;
    所述骨架中间段设置为绕线轴,骨架两端分别设置有端头,所述绕线轴截面积小于端头截面积;在所述骨架中心埋入所述非晶丝,所述非晶丝与绕线轴同心放置。The middle section of the skeleton is disposed as a winding shaft, and ends of the skeleton are respectively provided with ends, the cross-sectional area of the winding shaft is smaller than the cross-sectional area of the end; the amorphous wire is embedded in the center of the skeleton, and the amorphous wire is The bobbins are placed concentrically.
  12. 根据权利要求11所述的磁传感器探头,其特征在于:The magnetic sensor probe of claim 11 wherein:
    所述非晶丝对称通过绕线轴中心与导体焊盘焊接;The amorphous wire is symmetrically welded to the conductor pad through the center of the winding shaft;
    所述导线缠绕在绕线轴上构成激励线圈和检测线圈,并与导体焊盘焊接。The wire is wound around a bobbin to form an excitation coil and a detection coil, and is soldered to the conductor pad.
  13. 根据权利要求11所述的磁传感器探头,其特征在于:The magnetic sensor probe of claim 11 wherein:
    所述非晶丝采用Co-Fe-M-Si-B非晶丝材料制成,所述非晶丝外层包覆一层玻璃。The amorphous wire is made of a Co-Fe-M-Si-B amorphous wire material, and the outer layer of the amorphous wire is coated with a layer of glass.
  14. 根据权利要求11-13中任一所述的磁传感器探头,其特征在于:A magnetic sensor probe according to any of claims 11-13, characterized in that:
    所述非晶丝的非晶材料断裂拉伸强度为3000Mpa,非晶丝外层包覆一层玻璃;所述非晶丝两端在注塑前剥除玻璃层。 The amorphous material of the amorphous wire has a tensile strength at break of 3000 MPa, and the outer layer of the amorphous wire is coated with a layer of glass; both ends of the amorphous wire are stripped of the glass layer before injection molding.
  15. 根据权利要求11-14中任一所述的磁传感器探头,其特征在于:A magnetic sensor probe according to any of claims 11-14, characterized in that:
    所述非晶丝采用Co-Fe-M-Si-B非晶丝材料,其响应速度小于10纳秒,灵敏度高(满量程输出1000mV左右)、长度小于5毫米,直径范围为:30-100微米。The amorphous wire adopts Co-Fe-M-Si-B amorphous wire material, and has a response speed of less than 10 nanoseconds, high sensitivity (about 1000 mV of full-scale output), length of less than 5 mm, and a diameter range of 30-100. Micron.
  16. 根据权利要求11-15中任一所述的磁传感器探头,其特征在于:A magnetic sensor probe according to any of claims 11-15, characterized in that:
    所述非晶丝焊盘和导体焊盘的厚度为0.1mm-0.2mm;The amorphous wire pad and the conductor pad have a thickness of 0.1 mm to 0.2 mm;
    所述导体焊盘的材料与非晶丝的材料相适应,用以保证导电性和焊接性;The material of the conductor pad is adapted to the material of the amorphous wire to ensure conductivity and solderability;
    所述导体焊盘的电极材料优选采用镀金或沉金。The electrode material of the conductor pad is preferably gold plated or immersed in gold.
  17. 根据权利要求11-16中任一所述的磁传感器探头,其特征在于:A magnetic sensor probe according to any of claims 11-16, characterized in that:
    所述骨架材质为LCP或PEI;所述绕线轴直径为φ0.3±0.02mm;The skeleton material is LCP or PEI; the diameter of the bobbin is φ0.3±0.02 mm;
    优选的,所述骨架可以制成一哑铃形状,中间设置为绕线轴,用来绕制导线线圈。Preferably, the skeleton may be formed into a dumbbell shape with a winding shaft disposed therebetween for winding the wire coil.
  18. 根据权利要求11-17中任一所述的磁传感器探头,其特征在于:A magnetic sensor probe according to any of claims 11-17, characterized in that:
    所述骨架上设置有2个非晶丝焊盘、4个导体焊盘;Two amorphous wire pads and four conductor pads are disposed on the skeleton;
    所述2个非晶丝焊盘分别位于所述探头的两端顶侧,所述4个导体焊盘位于所述探头的中部,相对于绕线轴对称设置,并设置于靠近绕线轴一侧。The two amorphous wire pads are respectively located on the top sides of the probes, and the four conductor pads are located in the middle of the probe, symmetrically disposed with respect to the winding axis, and disposed on a side close to the winding axis.
  19. 根据权利要求11-18中任一所述的磁传感器探头,其特征在于:A magnetic sensor probe according to any of claims 11-18, characterized in that:
    所述磁传感器探头通过MEMS工艺制造,在硅晶上设计,并预制出6个绑定点,所述6个绑定点包括2个非晶丝焊盘和4个导体焊盘。The magnetic sensor probe is fabricated by a MEMS process, designed on a silicon crystal, and prefabricated with six bond points, including two amorphous wire pads and four conductor pads.
  20. 根据权利要求11-19中任一所述的磁传感器探头,其特征在于:A magnetic sensor probe according to any of claims 11-19, characterized in that:
    当所述磁传感器探头用于检测导线等金属物体时,该探头设置为中空的环形或弧形。When the magnetic sensor probe is used to detect a metal object such as a wire, the probe is provided in a hollow ring shape or an arc shape.
  21. 一种基于智能磁传感器的车辆检测方法,其使用到如权利要求1-10中任一所述的智能磁传感器,该方法包括如下步骤:An intelligent magnetic sensor-based vehicle detection method using the smart magnetic sensor according to any one of claims 1-10, the method comprising the steps of:
    将所述智能磁传感器设置在车辆检测地点;Setting the smart magnetic sensor at a vehicle detection location;
    以一预设采样速率检测所述车辆检测地点地磁场信号的变化;Detecting a change in a magnetic field signal of the vehicle detection location at a predetermined sampling rate;
    并在地磁场增高的变化率超过阈值时,发出车辆驶入信号;And when the rate of change of the geomagnetic field increases exceeds the threshold, the vehicle enters the signal;
    当地磁场降低的变化率超过阈值时,发出车辆驶出信号。When the rate of change of the local magnetic field decreases exceeds the threshold, a vehicle exit signal is issued.
  22. 根据权利要求21所述的方法,其特征在于: The method of claim 21 wherein:
    发出车辆驶入信号的同时进行计时,并在发出车辆驶出信号时,停止计时,从而获取车辆停留的时长,并发送时长信号。Timing is issued while the vehicle is entering the signal, and when the vehicle exit signal is issued, the timing is stopped, thereby obtaining the duration of the vehicle staying and transmitting the duration signal.
  23. 根据权利要求21或22所述的方法,其特征在于:A method according to claim 21 or 22, wherein:
    检测可以设定一不同的时间阈值,当检测停车时,阈值可以较长,检测高速公路车辆时,阈值可以较短;当时间小于某一阈值时,默认为同一辆车的不同轮胎造成的扰动,也可以根据在该时间阈值以内的轮胎扰动次数,简单确定车辆的类型。The detection can set a different time threshold. When detecting the stop, the threshold can be longer. When detecting the highway vehicle, the threshold can be shorter; when the time is less than a certain threshold, the default is the disturbance caused by different tires of the same car. It is also possible to simply determine the type of vehicle based on the number of tire disturbances within the time threshold.
  24. 根据权利要求22或23所述的方法,该方法进一步包括在所述智能磁传感器处平行设置压电传感器;其特征在于:A method according to claim 22 or 23, further comprising placing piezoelectric sensors in parallel at said smart magnetic sensor;
    在智能磁传感器检测地磁场变化信号的同时,压电传感器检测车辆轮胎对压电传感器产生的压力信号;While the smart magnetic sensor detects the ground magnetic field change signal, the piezoelectric sensor detects the pressure signal generated by the vehicle tire on the piezoelectric sensor;
    在所述车辆停留时长内,对所述压力信号进行积分运算,获取车辆重量信息。 During the vehicle stay duration, the pressure signal is integrated to obtain vehicle weight information.
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