WO2017008975A1 - Profilé de cadre, élément de paroi et châssis pour une cabine à atmosphère propre - Google Patents
Profilé de cadre, élément de paroi et châssis pour une cabine à atmosphère propre Download PDFInfo
- Publication number
- WO2017008975A1 WO2017008975A1 PCT/EP2016/063567 EP2016063567W WO2017008975A1 WO 2017008975 A1 WO2017008975 A1 WO 2017008975A1 EP 2016063567 W EP2016063567 W EP 2016063567W WO 2017008975 A1 WO2017008975 A1 WO 2017008975A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- frame
- plate
- elements
- frame profiles
- gas
- Prior art date
Links
- 238000007789 sealing Methods 0.000 claims description 64
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 13
- 229910052782 aluminium Inorganic materials 0.000 claims description 13
- 230000000087 stabilizing effect Effects 0.000 claims description 8
- 239000000853 adhesive Substances 0.000 claims description 7
- 230000001070 adhesive effect Effects 0.000 claims description 6
- 239000007789 gas Substances 0.000 description 23
- 238000004519 manufacturing process Methods 0.000 description 16
- 239000011261 inert gas Substances 0.000 description 9
- 238000009434 installation Methods 0.000 description 8
- 238000013461 design Methods 0.000 description 7
- 239000000463 material Substances 0.000 description 6
- 238000010276 construction Methods 0.000 description 5
- 230000008878 coupling Effects 0.000 description 5
- 238000010168 coupling process Methods 0.000 description 5
- 238000005859 coupling reaction Methods 0.000 description 5
- 239000000203 mixture Substances 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 229910001220 stainless steel Inorganic materials 0.000 description 3
- 239000010935 stainless steel Substances 0.000 description 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 238000005538 encapsulation Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 230000007704 transition Effects 0.000 description 2
- 208000034656 Contusions Diseases 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 230000000712 assembly Effects 0.000 description 1
- 238000000429 assembly Methods 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000009519 contusion Effects 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 239000006261 foam material Substances 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000010943 off-gassing Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000002689 soil Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Classifications
-
- E—FIXED CONSTRUCTIONS
- E06—DOORS, WINDOWS, SHUTTERS, OR ROLLER BLINDS IN GENERAL; LADDERS
- E06B—FIXED OR MOVABLE CLOSURES FOR OPENINGS IN BUILDINGS, VEHICLES, FENCES OR LIKE ENCLOSURES IN GENERAL, e.g. DOORS, WINDOWS, BLINDS, GATES
- E06B1/00—Border constructions of openings in walls, floors, or ceilings; Frames to be rigidly mounted in such openings
- E06B1/04—Frames for doors, windows, or the like to be fixed in openings
- E06B1/36—Frames uniquely adapted for windows
- E06B1/363—Bay windows
-
- E—FIXED CONSTRUCTIONS
- E04—BUILDING
- E04H—BUILDINGS OR LIKE STRUCTURES FOR PARTICULAR PURPOSES; SWIMMING OR SPLASH BATHS OR POOLS; MASTS; FENCING; TENTS OR CANOPIES, IN GENERAL
- E04H5/00—Buildings or groups of buildings for industrial or agricultural purposes
- E04H5/02—Buildings or groups of buildings for industrial purposes, e.g. for power-plants or factories
-
- E—FIXED CONSTRUCTIONS
- E04—BUILDING
- E04B—GENERAL BUILDING CONSTRUCTIONS; WALLS, e.g. PARTITIONS; ROOFS; FLOORS; CEILINGS; INSULATION OR OTHER PROTECTION OF BUILDINGS
- E04B1/00—Constructions in general; Structures which are not restricted either to walls, e.g. partitions, or floors or ceilings or roofs
- E04B1/18—Structures comprising elongated load-supporting parts, e.g. columns, girders, skeletons
- E04B1/24—Structures comprising elongated load-supporting parts, e.g. columns, girders, skeletons the supporting parts consisting of metal
- E04B1/2403—Connection details of the elongated load-supporting parts
-
- E—FIXED CONSTRUCTIONS
- E04—BUILDING
- E04B—GENERAL BUILDING CONSTRUCTIONS; WALLS, e.g. PARTITIONS; ROOFS; FLOORS; CEILINGS; INSULATION OR OTHER PROTECTION OF BUILDINGS
- E04B1/00—Constructions in general; Structures which are not restricted either to walls, e.g. partitions, or floors or ceilings or roofs
- E04B1/343—Structures characterised by movable, separable, or collapsible parts, e.g. for transport
- E04B1/34315—Structures characterised by movable, separable, or collapsible parts, e.g. for transport characterised by separable parts
-
- E—FIXED CONSTRUCTIONS
- E04—BUILDING
- E04B—GENERAL BUILDING CONSTRUCTIONS; WALLS, e.g. PARTITIONS; ROOFS; FLOORS; CEILINGS; INSULATION OR OTHER PROTECTION OF BUILDINGS
- E04B1/00—Constructions in general; Structures which are not restricted either to walls, e.g. partitions, or floors or ceilings or roofs
- E04B1/343—Structures characterised by movable, separable, or collapsible parts, e.g. for transport
- E04B1/34384—Assembling details for foldable, separable, collapsible or retractable structures
-
- E—FIXED CONSTRUCTIONS
- E04—BUILDING
- E04C—STRUCTURAL ELEMENTS; BUILDING MATERIALS
- E04C3/00—Structural elongated elements designed for load-supporting
- E04C3/02—Joists; Girders, trusses, or trusslike structures, e.g. prefabricated; Lintels; Transoms; Braces
- E04C3/04—Joists; Girders, trusses, or trusslike structures, e.g. prefabricated; Lintels; Transoms; Braces of metal
- E04C3/06—Joists; Girders, trusses, or trusslike structures, e.g. prefabricated; Lintels; Transoms; Braces of metal with substantially solid, i.e. unapertured, web
-
- E—FIXED CONSTRUCTIONS
- E06—DOORS, WINDOWS, SHUTTERS, OR ROLLER BLINDS IN GENERAL; LADDERS
- E06B—FIXED OR MOVABLE CLOSURES FOR OPENINGS IN BUILDINGS, VEHICLES, FENCES OR LIKE ENCLOSURES IN GENERAL, e.g. DOORS, WINDOWS, BLINDS, GATES
- E06B3/00—Window sashes, door leaves, or like elements for closing wall or like openings; Layout of fixed or moving closures, e.g. windows in wall or like openings; Features of rigidly-mounted outer frames relating to the mounting of wing frames
- E06B3/96—Corner joints or edge joints for windows, doors, or the like frames or wings
- E06B3/964—Corner joints or edge joints for windows, doors, or the like frames or wings using separate connection pieces, e.g. T-connection pieces
- E06B3/9641—Corner joints or edge joints for windows, doors, or the like frames or wings using separate connection pieces, e.g. T-connection pieces part of which remains visible
-
- E—FIXED CONSTRUCTIONS
- E04—BUILDING
- E04B—GENERAL BUILDING CONSTRUCTIONS; WALLS, e.g. PARTITIONS; ROOFS; FLOORS; CEILINGS; INSULATION OR OTHER PROTECTION OF BUILDINGS
- E04B1/00—Constructions in general; Structures which are not restricted either to walls, e.g. partitions, or floors or ceilings or roofs
- E04B1/18—Structures comprising elongated load-supporting parts, e.g. columns, girders, skeletons
- E04B1/24—Structures comprising elongated load-supporting parts, e.g. columns, girders, skeletons the supporting parts consisting of metal
- E04B1/2403—Connection details of the elongated load-supporting parts
- E04B2001/2439—Adjustable connections, e.g. using elongated slots or threaded adjustment elements
-
- E—FIXED CONSTRUCTIONS
- E04—BUILDING
- E04B—GENERAL BUILDING CONSTRUCTIONS; WALLS, e.g. PARTITIONS; ROOFS; FLOORS; CEILINGS; INSULATION OR OTHER PROTECTION OF BUILDINGS
- E04B2/00—Walls, e.g. partitions, for buildings; Wall construction with regard to insulation; Connections specially adapted to walls
- E04B2/74—Removable non-load-bearing partitions; Partitions with a free upper edge
- E04B2002/7498—Partitions for clean rooms
-
- E—FIXED CONSTRUCTIONS
- E04—BUILDING
- E04C—STRUCTURAL ELEMENTS; BUILDING MATERIALS
- E04C3/00—Structural elongated elements designed for load-supporting
- E04C3/02—Joists; Girders, trusses, or trusslike structures, e.g. prefabricated; Lintels; Transoms; Braces
- E04C3/04—Joists; Girders, trusses, or trusslike structures, e.g. prefabricated; Lintels; Transoms; Braces of metal
- E04C2003/0404—Joists; Girders, trusses, or trusslike structures, e.g. prefabricated; Lintels; Transoms; Braces of metal beams, girders, or joists characterised by cross-sectional aspects
- E04C2003/0426—Joists; Girders, trusses, or trusslike structures, e.g. prefabricated; Lintels; Transoms; Braces of metal beams, girders, or joists characterised by cross-sectional aspects characterised by material distribution in cross section
- E04C2003/0439—Joists; Girders, trusses, or trusslike structures, e.g. prefabricated; Lintels; Transoms; Braces of metal beams, girders, or joists characterised by cross-sectional aspects characterised by material distribution in cross section the cross-section comprising open parts and hollow parts
-
- E—FIXED CONSTRUCTIONS
- E04—BUILDING
- E04C—STRUCTURAL ELEMENTS; BUILDING MATERIALS
- E04C3/00—Structural elongated elements designed for load-supporting
- E04C3/02—Joists; Girders, trusses, or trusslike structures, e.g. prefabricated; Lintels; Transoms; Braces
- E04C3/04—Joists; Girders, trusses, or trusslike structures, e.g. prefabricated; Lintels; Transoms; Braces of metal
- E04C2003/0404—Joists; Girders, trusses, or trusslike structures, e.g. prefabricated; Lintels; Transoms; Braces of metal beams, girders, or joists characterised by cross-sectional aspects
- E04C2003/0443—Joists; Girders, trusses, or trusslike structures, e.g. prefabricated; Lintels; Transoms; Braces of metal beams, girders, or joists characterised by cross-sectional aspects characterised by substantial shape of the cross-section
- E04C2003/0465—Joists; Girders, trusses, or trusslike structures, e.g. prefabricated; Lintels; Transoms; Braces of metal beams, girders, or joists characterised by cross-sectional aspects characterised by substantial shape of the cross-section square- or rectangular-shaped
Definitions
- the invention relates to a frame profile, a wall element and a frame formed from the frame profiles of a clean gas cabin.
- Such manufacturing processes can be coating processes, for example in semiconductor production, encapsulation steps in LCD or OLED production or production processes of highly pure base materials, for example in medical and pharmaceutical technology and in welding applications, in particular titanium welds.
- the processes may require clean room conditions, low humidity, an inert gas atmosphere, or a combination of various such and other conditions.
- Inert gas housing or clean cabins are therefore known in a hood design.
- the hoods form with a base plate an enclosed space in which the required atmosphere can be adjusted.
- the pre-assembled hood is placed on top of the base plate and sealed.
- Required bushings, locks, upstream chambers and other required units and assemblies are preferably already mounted and tested on the hood.
- the inert gas housing can therefore be quickly placed at a designated work or production place.
- the approach of the hood design offers the possibility to operate any plant or plant parts in a closed room, whose atmosphere can be adjusted according to the requirements.
- the size of the hood is adapted to the respective system.
- inert gas housings are designed so as not to alter the atmosphere inside them, for example due to contamination or outgassing. Furthermore, the enclosure is designed such that no gas exchange between the interior of the inert gas housing and the environment takes place. Inert gas housing made of stainless steel or aluminum are known. A disadvantage of such inert gas housings is their size and their high weight, whereby the transport to and installation at a production site is complex.
- the object of the invention is achieved according to claim 1 with a frame profile, wherein at the Anreih friendship of the frame profile fixing portions are arranged, that at least one Anreihseite each at least one longitudinal sealing portion for receiving sealing elements is arranged and that at a plate connection side a longitudinal plate connection area sealed receptacle of a plate member is arranged.
- the frame profile can thus be connected in a gas-tight manner to a panel element and a wall element of the clean-out cabin can be formed.
- the plate element of a wall element is preferably encircled by frame profiles. By means of the fastening sections, the latter can be coupled to other components of the clean cabin, which rest along the longitudinal extension of the frame profile.
- sealing elements can be connected to the sealing portions, so that a gas-tight coupling between the wall element and the other component is achieved.
- a plurality of wall elements connected to each other gas-tight and thus a clean cab be constructed.
- gas-tight in the context of the invention, for example, arrangements are to be understood, the permissible leakage rate in the range of ⁇ 0.25 vol% / h. For example, this applies to inert gas operated plants.
- gas-tight may also be understood as meaning a leak rate in the range of ⁇ 0.01% by volume / h, when a residual oxygen concentration of 1 ppm oxygen is to be reached during operation.
- a preferred embodiment of the invention is such that the frame profile has several Anreih connections, wherein the adjacent Anreihonne each other preferably at right angles. Then you can produce a variety of corner joints with two frame profiles. Particularly preferably three Anreihonne and a plate connection side are provided on a frame profile.
- the at least one sealing section is arranged between two fastening sections arranged on a row side.
- a sealing element connected to the sealing portion is thus protected in the central region of the frame profile.
- the arrangement allows a tight coupling, for example, two adjacent frame profiles, using only one sealing element.
- the at least one sealing section is arranged laterally of a fastening section and along an edge of the arrangement side.
- the sealing along the edges of the frame profile so that the remaining gap between the frame profile and the adjacent component, in which may possibly accumulate impurities, is separated from the interior of the clean cab.
- a simple coupling of the frame profiles to adjacent components can be achieved in that the fastening portions are formed by the frame profile longitudinally directed mounting grooves or rows of fasteners.
- the fastening grooves for example, sliding blocks can be introduced, in which screws are screwed, with which the adjacent component is held.
- the plate elements can thereby easily, mechanically and gas-tightly connected to the frame profiles, that the plate connection area is formed as a plate receptacle, that in the plate receiving opposing contact surfaces are arranged and that are arranged in the region of at least one of the contact surfaces Reservoirnuten for receiving adhesive.
- the frame profiles can be plugged with the plate holder on the edge of the associated plate member. The lateral guidance takes place via the contact surfaces.
- the frame profiles are glued in the region of the contact surfaces with the plate elements. Excess adhesive can be absorbed by the reservoir grooves, so that the plate elements can be fully inserted with their edges in the disc recordings.
- the provided on the Anreihstead sealing elements can be accurately positioned and held that the at least one sealing portion is designed as a seal receptacle and / or that the seal receptacle has a semi-circular or a rectangular cross-section.
- the cross section of the gasket receptacle preferably depends on the cross section of the preferably self-adhesive sealing element used. This can be inserted into the seal holder and held by this. In this case, the configuration of the seal receptacle and the sealing element defines how far the sealing element protrudes beyond the Anreihseite of the frame profile and is deformed when coupling to another component.
- the cross sections of the seal receptacle and the sealing elements are preferably coordinated so that a defined deformation of the sealing element takes place during coupling, whereby the sealing effect is ensured and an impermissible contusion can be prevented.
- the object of the invention is also achieved with a wall element in that the wall element is formed at least from a plate member with it circumferentially gas-tight connected frame profiles that are arranged on Anreihnature the frame profiles mounting portions that at the Anreihonne each at least one longitudinal sealing portion for receiving Is arranged sealing elements and that at a plate connection side a longitudinal directed Piattean gleich Schl is arranged for sealing attachment of the plate member.
- the wall element thus represents an assembly enclosed by frame profiles.
- the mounting portions allow a simple and secure connection between the frame profiles and adjacent components.
- sealing elements can be arranged. These seal the abutment surfaces between the wall element and the adjacent components. With the help of such wall elements thus a gas-tight clean cab can be easily and quickly, for example, at the later site, built.
- the weight of the clean cab can be kept low, that the plate element as a structural core plate, in particular as aluminum honeycomb core plate is formed.
- Structural core plates have a high flexural rigidity, so that the wall elements formed therefrom do not bend under load or bend only slightly elastically. They are gas-tight due to their cover plates arranged on both sides according to the permeation properties of the cover plates used in the direction of their surface normal.
- aluminum honeycomb core plates in which the cover plates and the structural core are formed of aluminum, are suitable for the production of gas-tight side walls of the clean gas cabin.
- the structural core prevents gas within the structural core plate from flowing across its surface normal. This ensures that no gas, for example via breakthroughs introduced into the cover plates, enters the clean gas cabin or can flow out of the clean gas cabin.
- structural core plates are to be understood as meaning, in particular, those plate-shaped components which are of sandwiched construction and have two or more cover plates, between which a structural core is arranged.
- the structural core can be any, in particular lightweight, structure. This may for example be formed by a honeycomb core, a wave or meandering material, a foam material or the like.
- a secure and gas-tight bond between the frame profiles and the plate elements can be achieved by inserting the plate element with its outer edges into the plate connection areas of the circulatingly arranged frame profiles designed as plate receptacles and glued to them.
- the object of the invention is further achieved with a frame, wherein in each case a plate connection side with a plate connection region for gas-tight connection with a plate element is arranged on the frame profiles of the frame profiles that at least one Anreihseite with at least one longitudinal sealing portion for receiving sealing elements is arranged, that a plurality of frame profiles are arranged on the plate connection sides circumferentially to the plate members and gas-tight connected thereto and that at least one of the frame profiles is connected with its Anreihseite gasket to the Anreihseite another frame profile and / or that at least one of the frame profiles with the Anreihseite with a connection profile, in particular with a corner connector and / or gas-tightly connected to a surface of another plate member.
- the frame is thus formed from frame profiles which enclose the plate member.
- the plate elements with the encircling frame profiles form gas-tight wall elements with which the clean cabin can be constructed with little installation effort at the place of use.
- the frame profiles thus assume several tasks, namely the gas-tight connection to the plate elements and the adjacent components as well as a supporting structure of the clean cab.
- the wall elements can be delivered pre-assembled to a place of installation of the clean-gas cabin where they can be quickly and easily assembled into a clean-gas cabin.
- the sealing elements ensures that no unwanted gas exchange between the interior of the clean cab and the environment takes place.
- a simple assembly of the frame and the clean cabin can be achieved that are arranged on at least one Anreihseite the frame profile attachment portions that adjacent frame profiles are connected to each other via connecting elements and that the connecting elements are fastened by means of fastening elements to the fastening portions of the frame profiles.
- connecting elements for example, perforated plates or other surface elements with openings, in particular sheets with holes can be used, which are screwed to the mounting portions, for example.
- a corner connector has at least two legs arranged at an angle to each other, that each leg rests against a Anreihseite a frame profile and is connected thereto via fastening means, in particular screws.
- the corner connector extends advantageously over the entire length of the frame profiles to be connected at an angle to each other.
- the one or more sealing elements are connected to the associated sealing portions of the frame profiles and abut against the respective legs of the corner connector.
- the attachment portions may be formed as introduced into the frame profiles mounting grooves.
- this mounting grooves can be inserted on the corner connector facing profile side sliding blocks on which the legs of the corner connectors are fixed by means of screws.
- the screws are tightened to a stop and that then the appropriate deformation of the sealing elements is achieved.
- the stop can be formed by the contact of the frame profile with the legs of the corner connector outside of the seal holder.
- the legs of the corner connector merge into one another directly by means of a bend or that the legs are connected by means of a web and / or that the legs are connected by means of at least one stabilizing element.
- Both the bend and the web provide a gas-tight connection of the two legs of the corner connector.
- the corner area can be extended and thereby the contour of the clean cabin can be adapted to the respective requirements.
- stabilizing elements mounted between the legs can prevent the angle between the legs and thus between wall elements attached thereto from changing.
- the stabilizing elements can also be arranged on the longitudinal ends of the frame profiles. Then they can be used simultaneously for the frontal sealing of the corner joint in the transition region between the adjacent frame profiles.
- FIG. 1 is a perspective view of a partially assembled clean cab with a frame of a frame profile A
- FIG. 2 is a perspective view of a same partially assembled clean cabin as in Figure 1 from an opposite direction with a frame of a frame profile B,
- Fig. 9 shows a connection of two superimposed
- Figure 1 shows a perspective view of a partially assembled clean cabin 10 with a frame of a frame profile A 20, which is shown in more detail in Figure 3.
- Figure 2 shows a perspective view of a same partially assembled clean cabin as in Figure 1 from an opposite direction with a frame of a frame profile B 27, which is shown in cross section in Figure 6.
- the clean cab 10 shown in Figures 1 and 2 has a floor plan with five corners 16.1, 16.2, 16.3, 16.5, 16.5.
- wall elements 11 are placed in the form of Thiswandeiementen along the outer edge of a bottom 13 and connected thereto via retaining clips 15.
- the bottom 13 is formed of structural core plates 12, in the present case of aluminum honeycomb core plates.
- the wall elements 11 are formed by the frame profiles 20, 27 enclosed plate elements.
- the plate elements are made of structural core plates 12, preferably of aluminum honeycomb core plates.
- the frame profiles 20, 27 are mitred in the corner regions of the wall elements 11 and connected to each other by means of first connecting elements 14.1.
- the plate elements are circumferentially bordered by the frame profiles 20, 27 and connected to these gas-tight.
- second connecting elements 14.2 are mounted both to the interior of the clean cabin 10 as well as to the outside between two frame profiles 20, 27.
- the abutting along its longitudinal extension frame sections 20, 27 are interconnected via third connecting elements 14.3.
- the third connecting elements 14.3 are designed as corner angles and arranged on the inner corners of the second and fifth corners 16.2, 16.5.
- the frame profiles 20, 27 are preferably formed with a rectangular, in the present embodiment with a square cross-section.
- the frame profiles 20, 27 of the wall elements 11 abut with a first and third Anreihseite 26.1, 26.3 shown in Figures 3 and 6, extending in the direction of the plate plane and a second Anreihseite 26.2 transverse to the plane of the plate together.
- a right angle is formed between the second and fifth corner 16.2, 16.5 abutting wall elements 11.
- a first corner connector 30 is disposed between the adjacent side wall elements 11.
- the frame profiles 20, 27 of the adjacent wall elements 11 running vertically along the fourth corner 16.4 are each connected with their second attachment sides 26.2 to a first and second leg 31.1, 31.2 of the first corner connector 30 shown in FIG.
- the adjacent frame sections 20, 27 are connected to a fourth connecting element 14.4.
- the angle between the indirectly connected via the first corner connector 30 wall elements 11 is predetermined by the angle between the first and the second leg 31.1, 31.2.
- stabilizing elements in the embodiment shown triangular stabilizing elements 32, are provided between the first and second legs 31.1, 31.2.
- a second corner connector 40 is disposed between the adjacent wall elements 11.
- the frame profiles 20, 27 of the adjacent wall elements 11, which run vertically along the third corner 16.3, are each connected with their second arrangement sides 26.2 to a third and fourth leg 41.2, 41.3 of the second corner connector 40 shown in FIG.
- the angle between the indirectly connected via the second corner connector 40 wall elements 11 is given by the angle between the third and fourth legs 41.2, 41.3.
- the third and fourth legs 41.2, 41.3 are spaced apart by a web 41.1 in the case of the second corner connector 40. This makes it possible, in addition to the angle and the distance between two indirectly abutting wall elements 11 pretend.
- stabilizing elements 42 are provided between the third and the fourth legs 41.2, 41.3.
- the clean cabin 10 is closed with a lid, not shown.
- the lid is also constructed with plate elements, in the embodiment shown with structural core plates 11.
- sealing elements 18, are arranged between the frame profiles 20, 27 and along their longitudinal extent adjacent components. Furthermore, it is provided that the plate elements are gas-tightly connected to the frame profiles 20, 27.
- the wall elements 11 can as Sidewall elements, but also as wall elements 11 for the construction of the lid, not shown, or an alternatively constructed bottom 13, be executed.
- the frame profiles 20, 27 are connected in a gastight manner with adjacent components. Thus, a gas-tight connection can be produced between two frame profiles 20, 27 adjoining one another along their longitudinal extent.
- gas-tight connections between frame sections 20, 27 and connecting elements for example, the corner connectors 20, 27, are produced. It is also possible to produce a gas-tight connection between frame profiles 20, 27 and adjacent planar surfaces, as provided for example in the embodiment shown between the side wall elements and the bottom 13.
- the frame profiles 27 form a frame as a supporting structure of the clean cabin 10.
- the frame is thereby stabilized by the connecting elements 14.1, 14.2, 14.3, 14.4 and connected to the frame profiles 20, 27 plate elements.
- the clean cabin 10 constructed in this way represents a housing which is sealed with respect to its surroundings.
- production facilities or laboratory facilities etc. can be arranged.
- a predetermined atmosphere can be set.
- a specific gas or a gas mixture having a predetermined composition in the interior of the clean cabin 10 may be present.
- the gas or gas mixture may be an inert gas.
- the humidity of the gas or the gas mixture can be adjusted.
- a required clean room class for the clean cabin 10 can be specified. The requirements can apply both individually and in combination.
- other atmospheric parameters such as temperature and pressure, can be adjusted.
- As clean gas according to the present invention an atmosphere which corresponds to the respectively required requirements, to understand.
- the clean cab 10 allows the implementation of manufacturing processes or operations that require a special atmosphere. Such manufacturing steps can be coating processes, encapsulation processes or the processing or production of highly pure substances, for example in the pharmaceutical sector. The supply of required materials and substances via provided locks.
- wall elements 11 Due to the modular design with prefabricated wall elements, in particular wall elements 11, floor panels, corner connectors and cover elements, the clean cab can be easily and quickly assembled on site. It is also possible to make wall elements 11 at the installation site and thus take into account local conditions or required changes.
- the plate elements are preferably formed from structural templates 12.
- aluminum honeycomb core plates can be used for this purpose.
- Structural templates 12 have a multilayer structure. At least two spaced cover plates are connected flat with a structural core.
- the cover plates and the structural core are made of aluminum.
- the structural core is designed as a honeycomb core. In this way plates are produced with a high bending stiffness and at the same time a low weight.
- the clean cabin 10 thus has a significantly lower weight than a clean cabin 10 made with solid aluminum or stainless steel walls.
- the ground load which results from the weight of the converted plant parts and the clean cabin 10 significantly reduced.
- the clean cab 10 can thus be used in buildings with low soil load capacity.
- a lighter weight facilitates the installation of the clean cabin 10 at its place of use, since this requires no lifting devices or lifting devices with a low load capacity.
- the first corner 16.1 is formed by an angled side wall element 11.
- the structural core plate 12 used as a plate element is slotted in a wedge shape along the outer angle of the first corner 16.
- the slot penetrates the outer cover plate and the structural core of the structural core plate 12 Structural core plate 12 can thus be bent around the remaining inner cover plate so that the wedge-shaped slot opens on the outside. Due to the remaining inner cover plate, the structural core plate 12 remains gas-tight in the region of the first corner 16.1.
- the vertically arranged frame profiles 20, 27 are mitred in the area of the first corner 16.1.
- FIG. 3 shows the frame profile A 20 in a sectional view.
- the frame profile A 20 is manufactured as an extruded profile, preferably made of aluminum. It shows a rectangular, in the present embodiment square cross-section. Within the extruded profile cavities are formed for material and weight savings.
- the fastening grooves 21 extend in the direction of the longitudinal extension of the frame profile A 20. They are open to the respective Anreih service 26.1, 26.2, 26.3 and widen the frame profile A 20 out.
- sliding blocks 19 as shown in Figs. 4, 5, 7 and 8 can be inserted into the attachment grooves 21, positioned along the attachment grooves 21 and held there.
- sealing portions in the form of first sealing seats 22 are formed.
- the seal receivers 22 are preferably designed as rectangular recesses. However, other designs, for example, with a half-round profile, conceivable.
- the seal receivers 22 serve to receive and position the sealing elements 18. Their cross-section and their depth are preferably adapted to the geometry of the sealing element 18 used.
- a plate connection region in the form of a plate receptacle 23 is formed in the frame profile A 20.
- the plate holder 23 is bounded laterally by contact surfaces 23.2.
- To frame profile A 20 toward the plate holder 23 is completed by a stop surface 23.4.
- Reservoirnuten 23.1 In the area of the contact surfaces 23.2 Reservoirnuten 23.1, 23.3 are formed.
- Outer Reservoirnuten 23.3 are arranged along the opening of the disc holder 23. Laterally of the disc holder 23, longitudinal engagements 25 are arranged as preferably rectangular grooves.
- a plate member preferably a structural core plate 11, are inserted with its outer edge.
- the structural core plate 11 is guided between the contact surfaces 23.2.
- the frame profile A20 and the plate member in the region of the disc holder 23 are glued together.
- adhesive is applied to the outer edge of the plate member and / or in the disc holder 23 and the plate member inserted into the disc holder 23. Excess adhesive is displaced into the Reservoirnuten 23.1, 23.3. This ensures that the plate element can be inserted into the plate holder 23 as far as the stop surface 23.4.
- sealing elements 18 shown in FIGS. 4 and 5 can be positioned and held.
- the cross section of the sealing elements 18 is preferably adapted to the cross section of the first seal receptacle 22 so that the sealing element 18 is guided securely in the seal receptacle 22 and projects beyond the respective Anreihseite 26.1, 26.2, 26.3.
- Figure 4 shows the fifth corner 16.5 of the clean cab 10 in a sectional view from above.
- the frame of the clean cab 10 is constructed with frame profiles A 20.
- a frame profile A 20 of a wall element 11 rests with its second Anreihseite 26.2 on the first Anreihseite 26.1 a frame profile A 20 of another wall element 11 at.
- a third connecting element 14.3 connects the two wall elements 11.
- the third connecting element 14.3 designed as a corner angle is screwed to horizontally extending frame profiles A 20 of the wall elements 11.
- the vertically arranged frame elements A 20 shown in section are additionally connected via a fifth connecting element 14.5.
- the fifth connecting element 14.5 is screwed to one of the vertically extending frame profiles 20 by means of screws 17.2.
- sliding nuts 19 are also inserted into corresponding fastening grooves 21, into which the screws 17.2 are screwed.
- the fifth connecting element 14.5 is angled at the end. The angled portion engages the engagement 28 of the second vertically extending frame profile A 20.
- the two vertical frame profiles A 20 are also connected on the inside of the fifth corner 16.5.
- a sealing element 18 is inserted into the first sealing receptacles 22.
- the sealing element 18 seals the gap between the two vertically extending frame profiles A 20 of the adjacent wall elements.
- FIG 4 shows the construction shown in Figure 4 in a sectional view from above.
- two wall elements 11 are arranged at an angle to each other and connected indirectly via the second Eckerbinder 40 together.
- the wall elements 11 are constructed with frame profiles A 20.
- frame profiles B 27 may alternatively be used.
- the second corner connector 40 has two legs 41.2, 41.3 which are at an angle to one another and which are connected to one another via the web 41.1. Between the legs 41.2, 41.3 and the web 41.1 stabilizing elements 42 are arranged. The legs 41.2, 41.3 are each connected to the second Anreihseite 26.2 of the adjacent frame profiles A 20. For this purpose, the legs 41.2, 41.3 have holes through which screws 17.2 are guided. The screws 17.2 are screwed into sliding blocks 19, which are held in the fastening grooves 21 of the second Anreihnet 26.2. In the first seal receivers 22 of the second Anreihservice 26.2 sealing elements 18 are inserted. These seal the gap, which forms between the second Anreihquest 26.2 and the legs 41.2, 41.3, gas-tight.
- angle between the two legs 41.2, 41.3 of the second corner connector 40 wall elements 11 can be connected to each other in almost any angle. It can be specified by the width of the web 41.1, the distance between the wall elements 11. It can be so pure cabins 10 produce with varied, adapted to the particular conditions and requirements floor plans.
- Figure 7 shows the second corner 16.2 of the clean cab 10 in a sectional view from above.
- the frame of the clean cab 10 is constructed with frame profiles B 27.
- the section extends in the region of upper, horizontally extending frame profiles B 27.1, 27.2 of two angularly stacked wall elements 11.
- the mitred corners of the frame profiles B 27 are at the edge of the respective wall elements 11, the sectional surfaces of two vertically arranged frame profiles B 27.3, 27.4 hatched shown to recognize.
- the section is arranged in the region of the fastening grooves 21 of the horizontally extending frame profiles B 27.1, 27.2, so that the sliding blocks 19 introduced there can be seen in section.
- the horizontally extending frame profiles B 27.1, 27.2 are connected to one another via the third connecting element 14.3.
- the third connecting element 14.3 designed as a corner angle is connected to the horizontal frame profiles B 27.1, 27.2 by means of countersunk screws 17.1, which are screwed into the sliding blocks.
- the two vertical frame profiles B 27.3, 27.4 are held together on the outside of the clean cabin 10 by second connecting elements 14.2.
- the first vertical frame profile B 27.3 rests with its third Anreihseite 26.3 on the second Anreihseite 26.2 of the second vertical frame profile B 27.4.
- sealing elements 18 are arranged in the second seal receivers. These seal the gap between the two Anreih massage 26.2, 26.3 along both edges of the adjacent frame profiles 27.3, 27.4.
- the frame profile B 27 has the advantage that the gap between the adjoining abutment surfaces is sealed by means of two sealing elements 18. As a result, an improved sealing effect and increased safety that no gas gets into or out of the clean cabin 10 is achieved.
- Figure 8 shows the fourth corner 16.4 of the clean cab 10 in a sectional view from above.
- the wall elements 11 are constructed with frame profiles B 27.
- the cutting edge of the illustration runs along the fastening grooves 21 of two horizontally extending upper frame profiles B 27.5, 27.6 of the wall elements 11.
- the vertically extending frame profiles 27.7, 27.8 are only peripherally due to the miter cut of the frame profiles 27 in the corner regions of the wall elements 11 the wall elements 11 to see and hatched marked.
- the wall elements 11 abut with the second Anreihseite 26.2 of the vertical frame profiles 27.7, 27.8 on the legs 31.1, 31.2 of the first corner connector 30 at.
- outer mounting grooves 21 of the second Anreihnet 26.2 are distributed over the length of the vertical frame profiles 27.7, 27.8 sliding nuts 19 introduced.
- the legs 31.1, 31.2 are screwed by means of screws 17.2 to these sliding blocks 19.
- sealing elements 18 are inserted. These are jammed between the second Anreihnet 26.2 and the legs 31.1, 31.2 of the first corner connector 30.
- first corner connector 30 can be combined with two frame profiles A, B 20, 27.
- the two vertical frame profiles B 27.7, 27.8 on the inside of the fourth corner 16.4 almost abut each other.
- the two vertical frame profiles B 27.7, 27.8 can thus be directly connected to one another via fourth connecting elements 14.4 shown in FIG.
- the fourth connecting elements 14.4 are bent in accordance with the angle of the fourth corner 16.4.
- FIG. 9 shows a connection of two wall elements 11 arranged one above the other.
- the wall elements 11 are constructed of plate elements, preferably structural core plates 11, which in the exemplary embodiment shown are peripherally surrounded by frame profiles B 27.
- frame profiles A 20 may be provided.
- the corners of the frame profiles B 27 are mitred and joined together.
- the abutting at a corner of the side wall member 11 frame profiles B 27 are connected by means of first connecting elements 14.1.
- the first connecting elements 14.1 are designed as perforated, flat and plate-shaped components. They show an angular base surface, so that they rest on both frame profiles B 27.
- the holes are arranged along the fastening grooves 21. In the fastening grooves 21 are concealed opposite to the holes arranged sliding blocks 19 introduced.
- the first connecting elements 14.1 are connected by means of countersunk screws 17.1 with these sliding blocks 19. As a result, a stable and resilient corner connection between the frame profiles B 27 of the wall elements 11 is achieved.
- the wall elements 11 are interconnected by means of second connecting elements 14.2, of which only one is shown in the section shown.
- the second connecting elements 14.2 are designed as perforated, plate-shaped components. They are connected by countersunk screws 17.1 with two adjacent frame profiles B 27.
- the holes in the connecting elements 14.2 are chosen so that they are opposite to the Mounting grooves 21 are located so that the countersunk screws 17.1 can be screwed with inserted sliding blocks 19.
- the distance between the inner holes is chosen so that the adjacent frame profiles B 27 are firmly contracted and lie with their second Anreihnet 26.2 directly to each other.
- the first and the second connecting elements 14.1, 14.2 are arranged both to the interior and to the outside of the clean cabin 10.
- a stable composite of the frame profiles B 27 and thus a stably constructed frame of the clean cab 10 is achieved.
- the gas-tight bonding of the plate elements (structural core plate 11) with the frame profiles B 27 and the concealed sealing elements 18 between the frame profiles B 27, a gas-tight outer wall of the clean cab 10 is obtained.
- FIG. 10 shows the fifth corner 16.5 of the clean cabin 10 in a perspective view.
- the wall elements 11 are constructed with frame profiles B 27, but alternatively, frame profiles A 20 may be provided.
- Two vertically arranged frame profiles B 27 abut each other with their first and second Anreihseite 26.1, 26.2.
- the upper, horizontally extending frame profiles B 27 of the wall elements 11 meet at an angle to each other.
- the two wall elements 11 are connected to one another by means of a third connecting elements 14.3 designed as corner angles.
- the third connecting elements 14.3 is screwed thereto in the manner described by means of countersunk screws 17.1 to the vertically extending upper frame profiles B27.
- the frame profiles 20, 27 and the corner connectors 30, 40 are cut to size.
- the frame profiles 20, 27 are mitred.
- adhesive is applied in the plate holder 23 or on the edges of a respective plate element.
- the miter-cut frame sections 20, 27 thus form a frame surrounding the plate member, which is connected in a gas-tight manner with the plate element.
- the prefabricated wall elements 11 are connected at the site of the clean cab by means of the connecting elements 14.1, 14.2, 14.3, 14.4, 14.5.
- the sealing elements or the sealing elements 18 are inserted into the seal receptacles 22, 24 on the Anreihphone 26.1, 26.2, 26.3, which rest on a further components of the clean cabin 10.
- the illustrated, surrounded by frame sections 20, 27 and in itself gas-tight wall panels 11 clean cabins 10 can be built quickly and with little installation on site.
- the connecting elements 14.1, 14.2, 14.3, 14.4, 14.5 allow a secure bond between the frame profiles 20, 27, so that a load-bearing frame of the clean cabin 10 is obtained.
- the sealing elements 18 seal the wall elements 11 against each other or against other adjacent components.
- corner connectors 30, 40 wall elements 11 can be joined together at different angles, so that the floor plan of the clean cabin 10 can be optimally adapted to the respective application situation.
- structural core plates 12 in particular aluminum honeycomb matrices, as plate elements, a lighter yet resilient and gas-tight construction of the clean gas cabin is achieved.
Landscapes
- Engineering & Computer Science (AREA)
- Architecture (AREA)
- Civil Engineering (AREA)
- Structural Engineering (AREA)
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- Electromagnetism (AREA)
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Abstract
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020187004297A KR20180031020A (ko) | 2015-07-15 | 2016-06-14 | 프레임 성형된 요소, 벽 요소, 및 클린 가스 챔버용 프레임워크 |
CN201680041688.5A CN107949680B (zh) | 2015-07-15 | 2016-06-14 | 用于洁净气体腔室的框架型材元件、壁元件和框架 |
JP2018502161A JP2018523806A (ja) | 2015-07-15 | 2016-06-14 | クリーンガスチャンバのためのフレームプロファイル要素、壁要素、およびフレームワーク |
EP16732539.8A EP3322875A1 (fr) | 2015-07-15 | 2016-06-14 | Profilé de cadre, élément de paroi et châssis pour une cabine à atmosphère propre |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102015111477.1A DE102015111477A1 (de) | 2015-07-15 | 2015-07-15 | Rahmenprofil, Wandelement und Rahmengestell für eine Reingaskabine |
DE102015111477.1 | 2015-07-15 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2017008975A1 true WO2017008975A1 (fr) | 2017-01-19 |
Family
ID=56263666
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/EP2016/063567 WO2017008975A1 (fr) | 2015-07-15 | 2016-06-14 | Profilé de cadre, élément de paroi et châssis pour une cabine à atmosphère propre |
Country Status (6)
Country | Link |
---|---|
EP (1) | EP3322875A1 (fr) |
JP (1) | JP2018523806A (fr) |
KR (1) | KR20180031020A (fr) |
CN (1) | CN107949680B (fr) |
DE (1) | DE102015111477A1 (fr) |
WO (1) | WO2017008975A1 (fr) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN116084571A (zh) * | 2023-02-20 | 2023-05-09 | 哈尔滨工业大学 | 环形基地单元模块及使用其模块建造的模块化环形月面基地 |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106505008B (zh) * | 2015-09-08 | 2019-04-26 | 沈阳拓荆科技有限公司 | 一种防止腔室盖板坠落的支撑结构 |
DE102017129350A1 (de) * | 2017-12-08 | 2019-06-13 | Clean-Tek Reinraumtechnik Gmbh + Co. Kg | Reinraumsystem für Hochreinräume |
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EP1360031A1 (fr) * | 2001-02-15 | 2003-11-12 | FMS Förder- und Montage-Systeme Schmalzhofer GmbH | Systeme de coulisse pour une barre profilee |
DE102009051070A1 (de) * | 2009-10-28 | 2011-05-05 | teamtechnik Industrieausrüstung GmbH | Wandsystem |
EP2360322A1 (fr) * | 2010-02-11 | 2011-08-24 | Duo Industrie | Système modulaire de cloison des panneaux de toile tendue |
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DE3900411C2 (de) * | 1989-01-09 | 2002-08-22 | Peter Hauser | Stranggußprofil |
DE8913727U1 (de) * | 1989-11-21 | 1991-03-21 | Papst, Hans Dieter, Dipl.-Ing., 7742 St Georgen | Stabprofil |
DE19751167C1 (de) * | 1997-11-19 | 1999-06-24 | Bosch Gmbh Robert | Profilstab |
DE20321258U1 (de) * | 2003-04-24 | 2006-08-24 | Maytec Aluminium Systemtechnik Gmbh | Profilanordnung und Einfassprofil für eine Profilanordnung |
DE20309157U1 (de) * | 2003-06-13 | 2003-08-14 | ASS Maschinenbau GmbH, 51491 Overath | Konstruktionsprofil |
DE202005008334U1 (de) * | 2005-05-27 | 2006-10-05 | Opitz + Flierl Hospitaltechnik Ag | Reinraum |
US9003737B2 (en) * | 2011-10-07 | 2015-04-14 | Concepts To Solutions Inc. | Demountable wall system |
CN104632004B (zh) * | 2013-11-15 | 2016-04-06 | 威可楷(中国)投资有限公司 | 组合窗的窗框连接结构及组合窗 |
-
2015
- 2015-07-15 DE DE102015111477.1A patent/DE102015111477A1/de not_active Ceased
-
2016
- 2016-06-14 WO PCT/EP2016/063567 patent/WO2017008975A1/fr active Application Filing
- 2016-06-14 CN CN201680041688.5A patent/CN107949680B/zh active Active
- 2016-06-14 EP EP16732539.8A patent/EP3322875A1/fr not_active Withdrawn
- 2016-06-14 JP JP2018502161A patent/JP2018523806A/ja active Pending
- 2016-06-14 KR KR1020187004297A patent/KR20180031020A/ko unknown
Patent Citations (3)
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EP1360031A1 (fr) * | 2001-02-15 | 2003-11-12 | FMS Förder- und Montage-Systeme Schmalzhofer GmbH | Systeme de coulisse pour une barre profilee |
DE102009051070A1 (de) * | 2009-10-28 | 2011-05-05 | teamtechnik Industrieausrüstung GmbH | Wandsystem |
EP2360322A1 (fr) * | 2010-02-11 | 2011-08-24 | Duo Industrie | Système modulaire de cloison des panneaux de toile tendue |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN116084571A (zh) * | 2023-02-20 | 2023-05-09 | 哈尔滨工业大学 | 环形基地单元模块及使用其模块建造的模块化环形月面基地 |
CN116084571B (zh) * | 2023-02-20 | 2023-08-29 | 哈尔滨工业大学 | 环形基地单元模块及使用其模块建造的模块化环形月面基地 |
Also Published As
Publication number | Publication date |
---|---|
DE102015111477A1 (de) | 2017-01-19 |
CN107949680A (zh) | 2018-04-20 |
KR20180031020A (ko) | 2018-03-27 |
CN107949680B (zh) | 2019-07-02 |
EP3322875A1 (fr) | 2018-05-23 |
JP2018523806A (ja) | 2018-08-23 |
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