WO2016110442A1 - Capteur lidar 3d - Google Patents

Capteur lidar 3d Download PDF

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Publication number
WO2016110442A1
WO2016110442A1 PCT/EP2015/081450 EP2015081450W WO2016110442A1 WO 2016110442 A1 WO2016110442 A1 WO 2016110442A1 EP 2015081450 W EP2015081450 W EP 2015081450W WO 2016110442 A1 WO2016110442 A1 WO 2016110442A1
Authority
WO
WIPO (PCT)
Prior art keywords
laser beam
mirror
receiver
beam source
axis
Prior art date
Application number
PCT/EP2015/081450
Other languages
German (de)
English (en)
Inventor
Heiko Ridderbusch
Original Assignee
Robert Bosch Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch Gmbh filed Critical Robert Bosch Gmbh
Publication of WO2016110442A1 publication Critical patent/WO2016110442A1/fr

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/491—Details of non-pulse systems
    • G01S7/4912—Receivers
    • G01S7/4916—Receivers using self-mixing in the laser cavity
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
    • G01S17/06—Systems determining position data of a target
    • G01S17/08—Systems determining position data of a target for measuring distance only
    • G01S17/10—Systems determining position data of a target for measuring distance only using transmission of interrupted, pulse-modulated waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
    • G01S17/06—Systems determining position data of a target
    • G01S17/08—Systems determining position data of a target for measuring distance only
    • G01S17/32—Systems determining position data of a target for measuring distance only using transmission of continuous waves, whether amplitude-, frequency-, or phase-modulated, or unmodulated
    • G01S17/34—Systems determining position data of a target for measuring distance only using transmission of continuous waves, whether amplitude-, frequency-, or phase-modulated, or unmodulated using transmission of continuous, frequency-modulated waves while heterodyning the received signal, or a signal derived therefrom, with a locally-generated signal related to the contemporaneously transmitted signal
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
    • G01S17/06—Systems determining position data of a target
    • G01S17/42—Simultaneous measurement of distance and other co-ordinates
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/88—Lidar systems specially adapted for specific applications
    • G01S17/93—Lidar systems specially adapted for specific applications for anti-collision purposes
    • G01S17/931—Lidar systems specially adapted for specific applications for anti-collision purposes of land vehicles
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/481—Constructional features, e.g. arrangements of optical elements
    • G01S7/4817—Constructional features, e.g. arrangements of optical elements relating to scanning

Definitions

  • the invention relates to a 3D LIDAR sensor, in particular for motor vehicles, having a laser beam source, an optical receiver, and a scanning system for deflecting a laser beam generated by the laser beam source in two mutually perpendicular scanning directions.
  • the laser beam source used is usually a pulse laser with a pulse duration of the order of magnitude of a few nanoseconds and a wavelength between 850 and 1500 nm or more.
  • a two-dimensional image is obtained.
  • information about the distance of the object is obtained, so that a three-dimensional image of the environment can be constructed.
  • 3D LIDAR sensor makes it possible to provide data about the traffic environment, which can then be stored in one or more driver assistance systems, for example in distance control systems, dead-angle warning systems, parking aids and the like.
  • 3D LIDAR sensors have as a scanning system in a two-axis oscillating deflection mirror, which is formed for example by a MEMS (Micro-Electro-Mechanical System).
  • MEMS Micro-Electro-Mechanical System
  • Flash LIDARs work similarly to a digital camera with a two-dimensional optical detector array and a relatively wide-spread laser beam, so that no deflection of the laser beam is required.
  • the object of the invention is to provide a cost-effective and robust 3D LIDAR sensor which is particularly suitable for motor vehicles.
  • the scanning system has an oscillating mirror for deflecting the laser beam in one of the scanning directions and a rotary drive for rotating the deflecting mirror and the receiver about an axis parallel to this scanning direction.
  • the scanning in the second scanning direction is thus achieved in that the entire sensor rotates about the axis parallel to the first scanning direction, so that the laser beam in the plane perpendicular to this axis sweeps over the entire angular range of 360 °.
  • This has the advantage that in the second scanning direction, no reversal of the direction of movement of the mechanical components is required, but the entire system can rotate continuously in a single direction of rotation. This allows a high speed and a correspondingly high scanning speed in this direction and has the additional advantage that in principle an all-round view is made possible, for example, when the sensor is mounted on the roof of a motor vehicle.
  • Another advantage is that due to the high (and constant) scanning speed a higher eye safety is achieved with unchanged intensity of the laser beam or vice versa given minimum requirements for eye safety higher laser power and thus a higher range is possible.
  • a low cost single axis MEMS scanner can be used for the first scanning direction (parallel to the axis of rotation).
  • the deflection mirror, the receiver and the laser beam source form a rigid unit which is set in rotation by means of the rotary drive.
  • the laser beam source can also be arranged in a position offset from the axis of rotation.
  • the optical receiver preferably has a detector array which includes a plurality of optical detector elements and extends in the direction parallel to the axis of rotation. Each detector element is then sensitive to backscattered laser light, which falls from a certain direction (in elevation, when the axis of rotation is vertically oriented) to a receiving optics of the receiver and then focused by this optics on the relevant sensor element. This allows a simple and fast signal evaluation in a plurality of parallel receiving channels.
  • a frequency-modulated continuous wave laser can also be used as the laser beam source instead of a pulse laser.
  • a beat signal whose frequency position of The speed of the frequency modulation as well as the signal transit time and thus the distance of the object and in moving objects also on the relative speed of the object is dependent.
  • a laser beam source which can be switched over between pulse operation and continuous line operation.
  • a particularly high distance resolution in the near range can be achieved by an arrangement of the laser beam source and the receiver, which operates on the principle of the so-called "self-mixing interference".
  • a beam splitter a part of the light reflected or backscattered by the object is directed back into the laser beam source so that a mixture of the emitted and reflected beams occurs directly in the laser cavity.
  • FIG. 1 is a schematic front view of a LIDAR sensor according to a first embodiment
  • FIG. 2 shows the LIDAR sensor according to FIG. 1 in a view from above;
  • Fig. 3 is a side view of the LIDAR sensor from the direction of the arrows
  • Fig. 4 is a side view from the direction of the arrows IV-IV in Fig. 3;
  • Fig. 5 is a front view of a LIDAR sensor according to another
  • Embodiment shows a side view of the LIDAR sensor according to FIG. 5 from the direction of the arrows V 1 -V 1 in FIG. 5;
  • FIG. 7 shows a side view of a LIDAR sensor according to a further exemplary embodiment.
  • Fig. 8 shows a modification of the embodiment of FIG. 7 in the
  • the 3D LIDAR sensor shown in FIG. 1 comprises a laser beam source 10, an oscillating mirror 12, which is formed for example by a uniaxial MEMS scanner, and an optical receiver 14.
  • the laser beam source 10 is mounted in the example shown on the underside of a rotatably driven disc 16 and generates a sharply focused laser beam 18 which falls through a hole 20 in the disc 16 vertically upwards on the mirror 12.
  • the mirror 12 is tilted so that the laser beam 18 in Fig. 1 is reflected toward the viewer.
  • the mirror 12 is mounted on a mirror support 22.
  • the optical receiver 14 has a detector line 24 which extends vertically in the image plane of an optical lens 26.
  • the detector row 24 and the mirror support 22 are mounted side by side on a common support plate 28 which projects perpendicularly from the disk 16.
  • a stationary base plate 30 is arranged, on which a rotary drive 32 for the disc 16 is mounted.
  • the disc 16 is non-rotatably mounted on the free end of an output shaft 34 and is rotated at high speed, for example at 600 to 1200 min "1 , about a vertical axis A.
  • the laser beam 18 (FIG. 2) deflected by the mirror 12 in a substantially horizontal direction thus scans the entire surroundings of the sensor over a full circle of 360 ° in each azimuth rotation of the disk 16.
  • the lens 26 and the detector line 24, as well as the mirror 12 and the laser beam source 10 are rigidly secured to the disc 16, in each angular position of the disc 16, the light of the laser beam 18, which is reflected at a lying in the current direction of the laser beam object or backscattered (beam 18 'in FIG. 2), is focused and detected by the lens 26 on the detector line 24.
  • a horizontal picture line of a 360 ° panoramic picture is scanned at a line scanning frequency of 10 to 20 Hz.
  • the mirror 12 is oscillated about a horizontal axis with the aid of the MEMS, so that the laser beam 18 also oscillates in a vertical scanning direction, as indicated by a double arrow B in FIG.
  • the vertical scanning angle range can be 60 ° ( ⁇ 30 °) and can be selectively increased by using an additional optics, not shown, for example, to 120 °.
  • the reflected or backscattered beam 18 'from the object is focused by the lens 26 onto the detector array 24.
  • the vertical position of the focus on the detector line 24 is, as indicated in Fig. 4, depending on the angle of incidence of the beam 18 ', which in turn is dependent on the current inclination of the mirror 12.
  • the oscillation frequency of the mirror 12 may be significantly higher than the determined by the rotation of the disc 16 Zeilenabtastfrequenz.
  • the vertical scanning direction constitutes the main scanning direction.
  • an operation is possible in which the vertical scanning direction forms the (slow) sub-scanning direction.
  • the detector row 24 has a multiplicity of optical detectors, for example PIN detectors or APD detectors made of silicon or indium / gallium arsenide. Each individual detector forms a receiving channel, to which a certain vertical position of the reflection source is assigned, from which the beam 18 'is received.
  • the detectors of detector array 24 together thus provide at all times a set of electronic signals representing the image content of a pixel column in a two-dimensional image. Due to the rotation of the disc 16, the signals received at different times by the same detector element form one pixel row of that image.
  • the laser beam 18 generated by the laser beam source 10 has, for example, a wavelength between 850 and 1500 mm and is pulsed, with pulse durations on the order of a few nanoseconds. Due to the finite speed of light, the transit time between the emission of a pulse and the receipt of this pulse by the detector line 24 forms a measure of the distance of the object. Since this information is available for each pixel of the two-dimensional image, one obtains a total of a three-dimensional image of the environment of the sensor, on a full circle (360 °) in azimuth and in an angular range of 60 to 120 ° in elevation.
  • the lens 26 has a diameter of the order of 20 to 30 mm, and the focal length of this lens is of the same order of magnitude.
  • the mirror 12 may be a rectangular mirror with an edge length in the range of 1 to 3 mm.
  • the brilliance of the laser beam source 10 is preferably in the range of 100 to 1000 kW / mm 2 sr. This allows a range of the LIDAR sensor of more than 100 m to over 180 m.
  • Figs. 5 and 6 show a modified embodiment.
  • the reference numerals in Figs. 5 and 6 have the same meaning as in Figs. 1 to 4, but are each supplemented by an apostrophe.
  • the mirror support 22 'and the optical receiver 14' are arranged one above the other here, so that the disk 16 'can have a smaller diameter.
  • This embodiment has the advantage that the unit-rotatable parts of the sensor have a smaller moment of inertia, thereby enabling higher speeds.
  • FIG. 7 shows an exemplary embodiment in which a carrier 38 is arranged on a rotatably drivable disk 36, on which a laser beam source 40, a mirror 42 oscillatingly driven by means of a MEMS and a receiver 44 are arranged.
  • the laser beam emitted from the laser beam source 40 is parallel to or coincides with the axis of rotation A and is then deflected by the mirror 42 in an approximately horizontal direction. By the oscillation of the mirror 42 takes place a deflection in the vertical.
  • a beam splitter 46 is arranged in the form of a semitransparent mirror.
  • the beam emitted by the laser beam source passes through the beam splitter and is then deflected by the mirror 42 onto the objects to be located.
  • the light reflected or scattered on these objects travels in the same way back to the mirror 42 and is deflected by it again in the direction of the laser beam source 40.
  • the beam splitter 46 leaves only a part of this
  • Light again pass to the laser beam source 40, while the other part is directed to the receiver 44.
  • the frequency of the laser beam emitted by the laser beam source 40 is modulated, for example in the form of rising and / or falling ramps.
  • In the cavity of the laser beam source there is an interference between the emitted light and the light emitted. back-scattered light (self-mixing interference) and thus to a beat in the signal received by the receiver 44, which is dependent on the frequency difference between transmitted and received light and thus the distance of the object.
  • the evaluation of this signal allows a very high-resolution distance measurement, especially in the near range.
  • the reflectivity of the beam splitter 46 may vary depending on the application. If predominantly objects in the near range (e.g., ⁇ 1 m) are to be located, it is expedient to design or adjust the steel divider so that the reflectivity is less than 50% in order to increase the interference in the laser beam source. On the other hand, if predominantly objects in the middle distance range are to be located, in the arrangement shown here, the intensity at the receiver 44 can be increased by increasing the reflectivity
  • Range can be increased.
  • the beam splitter reflects the light coming from the laser beam source and returning to it, and allows the beam traveling to the receiver to pass in transmission.
  • the beam splitter 46, the receiver 44 and the laser beam source 40 rotate together with the mirror 42 and the disk 36
  • an arrangement is conceivable in which the laser beam source 40, the beam splitter 46 and the receiver 44 are stationary and only the mirror 42 rotates.
  • 8 shows a further exemplary embodiment in which a laser beam source 40 ', a beam splitter 46', a receiver 44 'and a mirror 42' are arranged lying on the rotating disk 36. The oscillating movement of the mirror 42 'and thus the deflection of the laser beam takes place in this case in the direction perpendicular to the plane of the drawing.

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Electromagnetism (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Optics & Photonics (AREA)
  • Optical Radar Systems And Details Thereof (AREA)

Abstract

Capteur lidar 3D comprenant une source de faisceau laser (10), un récepteur optique (14) et un système de balayage pour dévier un faisceau laser (18) généré par ladite source de faisceau laser dans deux directions de balayage perpendiculaires entre elles. Ce capteur est caractérisé en ce que le système de balayage comporte un miroir oscillant (12) pour dévier le faisceau laser (18) dans une des directions de balayage, et un entraînement rotatif (32) pour faire tourner le miroir (12) et le récepteur (14) autour d'un axe (A) parallèle à ladite direction de balayage.
PCT/EP2015/081450 2015-01-09 2015-12-30 Capteur lidar 3d WO2016110442A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102015200224.1 2015-01-09
DE102015200224.1A DE102015200224A1 (de) 2015-01-09 2015-01-09 3D-LIDAR-Sensor

Publications (1)

Publication Number Publication Date
WO2016110442A1 true WO2016110442A1 (fr) 2016-07-14

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DE (1) DE102015200224A1 (fr)
WO (1) WO2016110442A1 (fr)

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107153184A (zh) * 2017-05-25 2017-09-12 深圳市速腾聚创科技有限公司 激光雷达及激光雷达控制方法
CN107643516A (zh) * 2017-09-27 2018-01-30 北京因泰立科技有限公司 一种基于mems微镜的三维扫描激光雷达
CN108008371A (zh) * 2016-10-28 2018-05-08 罗伯特·博世有限公司 用于检测对象的激光雷达传感器
CN108196243A (zh) * 2018-03-14 2018-06-22 北京因泰立科技有限公司 一种基于mems微镜的三维扫描激光雷达
CN108226945A (zh) * 2018-01-15 2018-06-29 上海禾赛光电科技有限公司 激光雷达及其工作方法
CN110140060A (zh) * 2016-07-29 2019-08-16 罗伯特·博世有限公司 用于激光雷达***的光学组件、激光雷达***和工作装置
US10473767B2 (en) 2017-06-19 2019-11-12 Hesai Photonics Technology Co., Ltd. Lidar system and method
KR20190141345A (ko) * 2018-06-14 2019-12-24 현대모비스 주식회사 라이다 센서 및 그 제어 방법
CN112034435A (zh) * 2017-09-29 2020-12-04 北京万集科技股份有限公司 一种微机电激光雷达***
WO2022055752A3 (fr) * 2020-09-10 2022-04-14 Nuro, Inc. Orientation de faisceau dans des systèmes lidar à onde entretenue modulée en fréquence (fmcw)
US11561302B2 (en) * 2017-05-11 2023-01-24 Robert Bosch Gmbh Laser scanner for a LIDAR system and method for operating a laser scanner

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DE102016220504A1 (de) 2016-10-19 2018-04-19 Robert Bosch Gmbh 3D-LIDAR-Sensor
CN109387850A (zh) * 2017-08-02 2019-02-26 松下知识产权经营株式会社 距离测定装置
DE102018115452A1 (de) * 2018-06-27 2020-01-02 Carl Zeiss Ag Verfahren und Vorrichtung zur scannenden Abstandsermittlung eines Objekts
JP2021001787A (ja) * 2019-06-21 2021-01-07 三菱電機株式会社 レーザ距離測定装置

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Cited By (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110140060A (zh) * 2016-07-29 2019-08-16 罗伯特·博世有限公司 用于激光雷达***的光学组件、激光雷达***和工作装置
CN110140060B (zh) * 2016-07-29 2024-01-30 罗伯特·博世有限公司 用于激光雷达***的光学组件、激光雷达***和工作装置
CN108008371A (zh) * 2016-10-28 2018-05-08 罗伯特·博世有限公司 用于检测对象的激光雷达传感器
CN108008371B (zh) * 2016-10-28 2023-12-01 罗伯特·博世有限公司 用于检测对象的激光雷达传感器
US11561302B2 (en) * 2017-05-11 2023-01-24 Robert Bosch Gmbh Laser scanner for a LIDAR system and method for operating a laser scanner
CN107153184A (zh) * 2017-05-25 2017-09-12 深圳市速腾聚创科技有限公司 激光雷达及激光雷达控制方法
US12019187B2 (en) 2017-06-19 2024-06-25 Hesai Technology Co., Ltd. Lidar system and method
US10473767B2 (en) 2017-06-19 2019-11-12 Hesai Photonics Technology Co., Ltd. Lidar system and method
US10816647B2 (en) 2017-06-19 2020-10-27 Hesai Photonics Technology Co., Ltd. Lidar system and method
CN107643516A (zh) * 2017-09-27 2018-01-30 北京因泰立科技有限公司 一种基于mems微镜的三维扫描激光雷达
CN112034435A (zh) * 2017-09-29 2020-12-04 北京万集科技股份有限公司 一种微机电激光雷达***
CN108226945A (zh) * 2018-01-15 2018-06-29 上海禾赛光电科技有限公司 激光雷达及其工作方法
CN108196243A (zh) * 2018-03-14 2018-06-22 北京因泰立科技有限公司 一种基于mems微镜的三维扫描激光雷达
KR102466555B1 (ko) 2018-06-14 2022-11-14 현대모비스 주식회사 라이다 센서 및 그 제어 방법
US11624808B2 (en) 2018-06-14 2023-04-11 Hyundai Mobis Co., Ltd. Lidar sensor and control method thereof
US11740332B2 (en) 2018-06-14 2023-08-29 Hyundai Mobis Co., Ltd. Lidar sensor and control method thereof
CN113552592A (zh) * 2018-06-14 2021-10-26 现代摩比斯株式会社 激光雷达传感器及其控制方法
KR20190141345A (ko) * 2018-06-14 2019-12-24 현대모비스 주식회사 라이다 센서 및 그 제어 방법
WO2022055752A3 (fr) * 2020-09-10 2022-04-14 Nuro, Inc. Orientation de faisceau dans des systèmes lidar à onde entretenue modulée en fréquence (fmcw)

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