WO2016108805A1 - Procédé de détermination des paramètres d'un objet et dispositif de fabrication de celui-ci (variantes) - Google Patents

Procédé de détermination des paramètres d'un objet et dispositif de fabrication de celui-ci (variantes) Download PDF

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Publication number
WO2016108805A1
WO2016108805A1 PCT/UA2015/000123 UA2015000123W WO2016108805A1 WO 2016108805 A1 WO2016108805 A1 WO 2016108805A1 UA 2015000123 W UA2015000123 W UA 2015000123W WO 2016108805 A1 WO2016108805 A1 WO 2016108805A1
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Prior art keywords
input
module
optical
acousto
parameters
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PCT/UA2015/000123
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English (en)
Russian (ru)
Inventor
Александр Устимович СТЕЛЬМАХ
Сергей Александрович КОЛЕНОВ
Юрий Викторович ПИЛЬГУН
Евгений Николаевич СМИРНОВ
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Александр Устимович СТЕЛЬМАХ
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Priority claimed from UAA201414037A external-priority patent/UA110587C2/ru
Priority claimed from UAU201502669U external-priority patent/UA100915U/uk
Application filed by Александр Устимович СТЕЛЬМАХ filed Critical Александр Устимович СТЕЛЬМАХ
Priority to RU2017121999A priority Critical patent/RU2659720C1/ru
Publication of WO2016108805A1 publication Critical patent/WO2016108805A1/fr

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/04—Measuring microscopes

Definitions

  • the invention relates to methods and means using methods of differential phase profilometry / profilography and optical refractometry, and can be used in almost all industries, for example, in the automotive, aviation, aerospace, chemical, electronic, optical and medical industries, in mechanical engineering the manufacture of various parts, assemblies and machines, highly efficient turbosystems, in instrumentation, especially in the production of bearings, as well as to determine the operation nnyh fuel parameters lubricants, for example, for rapid analysis to determine the number and sizes of particles in the oils and petroleum fuels, in transparent materials, and biological fluids.
  • a laser scanning microscope which contains a laser source, a beam splitter, an acousto-optic cell, electric signal generators, a beam scanner, a lens, a photodetector and a series-connected mixer, a phase detector and a video monitoring device in which an acousto-optical cell, a beam scanner the beam splitter and the lens are sequentially mounted along the laser beam, the outputs of the electric signal generators are connected to the acousto optical cell and to the mixer, the beam scanner comprises a control unit, a telescopic optical system sequentially located along the beam, two acousto-optical deflectors and a cylindrical lens located in mutually perpendicular planes, two acousto-optical deflectors attached to the control unit, and a photodetector located along the axis of the reflected from a beam splitter, connected to the input of a phase detector.
  • a disadvantage of the known method is its extremely low efficiency, due to the fact that the separation of the light beam is possible only along one axis in the direction of scanning the beam, and therefore data on the parameters of the investigated surface can be obtained only along one specific direction (axis OX or axis OY).
  • an optical device comprising a laser source; acousto-optical element; means for actuating an acousto-optical element for transforming an incident laser beam into at least two beams with different frequencies; two beam splitters, the first of which is located between the acousto-optical element and the sample on the optical axis of at least two laser beams directed to the surface of the sample and is used to separate them and to separate the light reflected from the sample into the first and second separated light rays, and the second used to reflect the second beam split reflected from the first beam splitter; three photodetectors, the first of which in relation to generating a reference beat signal responds to at least two laser beams that are separated by the first beam splitter, the second responds to the first reflection of the split beam with respect to generating the beat signal, and the third is used to detect the light intensity of the second reflection portion of the split light beam with respect to the formation of light signal; a phase comparator connected to the first and second photodetectors as
  • the disadvantages of this method are the need to compare data on the parameters of the investigated surface with data on the parameters of the surface of the reference sample, which has its own irregularities, as well as the fact that the separation of the light beam is possible only in the direction of scanning the beam, and therefore the data on the parameters of the studied surface in the scanning plane can only be obtained along one axis (axis OX or axis OY).
  • the result is a profilogram (section of the relief of the investigated surface) or a set of profilograms. For stitching the obtained profilograms in order to recreate the relief of the investigated surface, additional information is needed on the reference point in each profilogram, which is not measured with this method of investigation.
  • a device for measuring refractive aberrations of the eye including a sensing channel, a measuring channel and a normalization channel, the sensing channel consists of sequentially installed: laser, first and second diffraction one-coordinate deflectors, selector first-order diffraction and a collimation lens, the first-order diffraction selector made in the form of a telescope according to Kepler’s scheme with an aperture diaphragm mounted at the point of coincidence of the foci of the input and output lenses, the front focus point of the collimation lens is located in the plane of the telescope exit pupil, each single-axis deflector has The composition of the acousto-optical crystal controlled by a digital frequency synthesizer through the output driver amplifier after the collimation lens in front of the patient’s eye is set Lena is a polarization separator, the orthogonal output of which is oriented to the measuring channel, and the measuring channel consists of a lens, a positionally sensitive photodetector installed in its focal
  • the disadvantages of the known device is that for measurements in this device, a more complex position-sensitive photodetector is used, which has several output information signals that require additional processing and, accordingly, a more complex circuit of the electronic unit.
  • the position-sensitive photodetector has a linear characteristic only in a rather limited area, the dimensions of which depend significantly on the shape and size of the focal spot on the photodetectors, which are difficult to control.
  • the indicated disadvantages of this technical solution result in a lower dynamic range and low measurement accuracy compared to devices implementing the differential-phase method.
  • a laser scanning confocal microscope including a microscope with two direct current servomotors, a light source in the form of a halogen and mercury lamp, and a laser module.
  • the laser unit of the scanning confocal microscope contains two independently moving galvanometric scanners, four lasers (argon, two helium-neon and diode), generating radiation of different wavelengths (from 405 to 633 nm) and different powers (from 1 to 30 mW) .
  • the microscope has a set of lenses (from 1 * to 40 x ), a field of view of 10x 10 mm (using a 1.25x lens), two confocal fluorescent channels [www.biochemistry.org.ua/index.php/ uklactivities / services.html] .
  • the closest technical solution which is selected as a prototype, is a method of differential-phase profilometry and / or profilography, which consists in the fact that the reference surface is first scanned with a light beam, and then the test surface is scanned along the same paths; moreover, each point of both the investigated and the reference surface is sequentially scanned by at least the first and second light beam, and these light beams are divided into at least two paraxial rays, at least one of which is shifted relative to the others by frequency and in space along the first axis in the first light beam and along the second axis orthogonal to it in the second light beam, while the phase difference of the reflected rays is measured for a selected number of points of the surface to be scanned, approximated the data on the phase difference of the reflected rays obtained by scanning the reference surface, a two-dimensional function, then correct the data on the phase difference of the reflected rays obtained by scanning the reference surface, based on these approximated data and carry out two-dimensional integration of the corrected data obtained by scanning
  • scanning is carried out by moving the light beam from one point on the surface to another parallel to the optical axis along the paths in the form of equidistant lines that begin and end at the boundary of a given region of the surface under study, and when scanning first, the light beam is moved through the studied points of a given region of the scanned surface along the equidistant paths in the direction of the first axis, and then the light beam is moved through the mentioned points of the given region of the scanned surface along the equidistant paths in the direction of the second axis, orthogonal to the first, the light beam moves through the studied points a given area of the scanned surface is carried out by sequentially moving the light beam through h each set of points of the specified region, formed by points lying between its boundaries on one of the paths oriented in the direction of the first axis, and on one of the paths oriented in the direction of the second axis orthogonal to it, at least one of the rays of the light beam is shifted into space along the axi
  • a device for differential-phase profilometry and / or profilography containing a radiation source, which can be used as a laser; at least two acousto-optical deflectors, a beam splitter and a lens mounted along the light beam, each of the acousto-optical deflectors being able to deflect, scan, and also split at least part of the light beam into at least two beams in frequency and space along one of the coordinates, at the same time, said acousto-optical deflectors are arranged to deflect, scan and separate at least part of the light beam, at least two orthogonal In other directions, the device also contains at least two control signal generators for each acousto-optical deflector with a common reference frequency generator for all control signal generators of each acousto-optical deflector, while the outputs of the control signal generators are connected to the input of the corresponding acousto-optic deflector through an adder, the
  • the phase detector is connected through an analog-to-digital converter, a noise suppression module, and an operation mode selection unit to the input of the third comparison module, the first memory module, and the first approximation module, the output of which is connected to the input of the second memory module, the output of the second memory module is connected to the second input said third comparison module, the output of which is connected with the input of the first integration module, and the output of the first integration module is connected to the input of the second approximation module, the output of which is connected to the input of the third memory module, the outputs of the first and second memory modules are connected to the inputs of the first comparison module, the output of which is connected to the first input of the second integration module, and the second input of the second integration module is connected via the correction module with the output of the aforementioned first memory module, the second integration module and the third memory module with are connected to the inputs of the second comparison module, the output of which is connected to the first input of the calibration module, and the second input of the calibration module is connected to the second output
  • a first optical system is installed, which is configured to expand the light beam
  • a second optical system is installed, which is configured to narrow the light beam
  • the disadvantages of the technical solution taken as a prototype are the need to compare data on the parameters of the investigated surface with data on the parameters of the reference surface, which has its own irregularities. Errors in determining the surface relief parameters of the reference sample lead to additional errors in the measurement and processing of data relating to the relief parameters of the surface under study.
  • a functional block diagram of a known device including a two-channel data determination circuit relating to the topography of the surface to be studied, and a circuit for processing the received data too complicated.
  • a separate photodetector for extracting the reference signal from the signals received from the reference sample introduces additional errors into the measurement results.
  • the known device operates in the "reflection" mode, it cannot be used to determine the parameters (refractive index, density distribution) of transparent objects, i.e. for work in the "on a clearance" mode.
  • the task to which the claimed invention is directed is to provide the possibility of studying both opaque and transparent objects, directly (without using reference samples and contrast agents) measuring parameters (height and local surface tilts, refractive index, density distribution) the studied object, as well as the possibility of reconstructing the image of the relief of its surface and (or) constructing a “refraction map” (density distribution), and at the same time improving the known device for differential-phase profilometry / profilography by excluding from the circuit a known device of a photodetector designed to extract a reference signal from signals received from a reference sample and, accordingly, replace a two-channel circuit functional diagram with a single-channel one.
  • the technical result which is achieved as a result of the implementation of the claimed invention, lies in the fact that due to the direct measurement of the parameters of the investigated object, the processing time of the obtained data is reduced while increasing the accuracy and reliability of the results; the principal functional diagram of a known device (including both optical and electronic parts) is improved by creating circuit-technical and structural solutions of two device variants for implementing the inventive method, operating both in reflection mode and in transparency mode .
  • the test object is scanned in two mutually orthogonal directions with the alignment of the scanning centers with two light beams, which are formed by preliminary sequentially dividing the light beam in each of the two acousto-optical deflectors into at least two light beams, with a shift in frequency and in space along the first axis in the first acousto-optic deflector and along the orthogonal her second axis in the second acousto-optical deflector, despite the fact that scanning is carried out by moving light beams through each point of the set of points of the object under study within the boundaries of the region chosen for the study, first along one of the trajectories oriented in the direction of the first axis, two light beams that are separated in the plane of the first axis, and then along one of the trajectories oriented in the direction of the second axis, which is orthogonal to the first, two light beams that are separated in the plane of the second axis, after which the light beams reflected
  • the parameters of the studied object is determined by measuring the phase of the variable component of the photocurrent with a frequency Af equal to the difference between the frequency parameters of each of the pair of scanning light beams, while the parameters of each individual point of the studied object are measured twice, at the beginning of the next and at the end of the previous scan clock, which increases accuracy and reliability of measurement results;
  • New in the claimed method is the possibility of direct (without the use of reference samples and contrast materials) measurements parameters of the object under study by measuring the phase difference between two spaced apart in frequency and space, reflected from the surface of the object under study (or passing through it) light beams, which allows to reduce the measurement time, simplify the processing of the data obtained as a result of scanning and increase the accuracy and reliability of the measurement results .
  • FIG. 1 is a diagram of the first stage of separation of the light beam and combining
  • FIG. 2 is a diagram of the second stage of separation of the light beam and combining
  • the inventive method for determining the parameters of the investigated object (or its surface) is implemented as follows.
  • fx is the frequency of the control signal, which provides scanning along the axis OX,
  • f Y is the frequency of the control signal, which provides scanning along the OY axis
  • a signal with components that have frequencies f Y , ⁇ + ⁇ is applied to the first acousto-optical deflector 5, which splits the light beam 12 into two beams and deflects them along the ⁇ axis.
  • the center of splitting and scanning of light beams is transferred to a second acousto-optic deflector 7, to which a signal with a frequency f x is supplied.
  • the second acousto-optic deflector 7 deflects the resulting light beams along the OX axis. This provides a measurement of the phase difference between two light beams that have been separated in the direction of the OY axis.
  • a signal with a frequency f Y is applied to an acousto-optical deflector 5, which deflects the received light beam along the OY axis.
  • the center of scanning of the deflected light beam is transferred to a second acousto-optic deflector 7, to which a signal with components having frequencies f x , fx + Af is supplied.
  • the second acousto-optical deflector 7 divides the resulting light beam into two beams and deflects them along the OX axis. This provides a measurement of the phase difference between two light beams that are split in the direction of the OX axis.
  • the control sequence of the signals to the first 5 and second 7 acousto-optical deflectors with the necessary frequencies in relation to the separation of light beams, their shift and scanning is carried out in automatic mode.
  • the frequencies f x and f Y provide scanning in predetermined directions and within predetermined boundaries.
  • a device for determining the parameters of an object which provides measurement of parameters (height and local inclinations) of the surface relief of the object under study, is a differential-phase profilometry / profilography device, which consists of a radiation source, which can be used a laser installed along the light beam and interconnected sequentially and mechanically on a common optical axis, the first optical system configured to expand irradiation of the light beam of at least two acousto-optic deflectors, each of which is capable of dividing the light beam into at least two beams, displacing them in frequency and space, and scanning a selected portion of the object under study in two mutually orthogonal directions established between the first and second acousto-optical deflectors of the Badal telescopic system, the second optical system configured to
  • New in Device 1 is that the optical axis on which the radiation source, the first and second acousto-optical deflectors, the first and second optical systems, the beam splitter, the lens, and the photodetector are broken.
  • the device also includes the Badal telescopic system for transferring the scanning center from the first to the second acousto-optical deflector and a video monitor to visualize the measurement results.
  • the phase detector additionally contains a frequency filter that limits the frequency band of the input signal reflected from the studied surface and contains a variable component with frequency Af, which is the main carrier of information about the topography of the studied surface, amplifier-limiter, counter-synchronizer, and digital counter.
  • the control and processing unit further comprises a module for reconstructing the relief of the surface under study, a module for selecting display modes, and a sweep control module.
  • the output of the photodetector is connected to the input of the phase detector, which is simultaneously the input of the frequency filter, the output of which is connected to the input of the amplifier-limiter, and the output of the amplifier-limiter is connected to the first input of the digital counter.
  • the output of the reference signal generator is connected to the first inputs of the control signal generators, to the input of the counter-synchronizer and to the third input of the digital counter, while the output of the counter-synchronizer is connected to the second input of the digital counter, the output of which is connected to the input of the control unit and processing, which at the same time is the input of the operation mode selection module, while the outputs of the operation mode selection module are connected to the inputs of the surface relief reconstruction module of the investigated object and the selection module and the display mode, and the output of the surface topography module of the investigated object is connected to the second input of the display mode selection module, one of the outputs of which is connected to the input of an additionally installed video monitor, and the second to the input of the scan control module, the first output of which, in turn, is connected back communication with the third input of the display mode selection module, while the other four outputs of the scan control module, which are simultaneously the outputs of the control and processing unit, are connected to the input dams of control signal generators whose outputs are connected
  • control and processing unit excluded from the control and processing unit are modules for establishing the boundaries of surface research, noise suppression, approximation,
  • control module for surface relief a control module for surface relief, a module for selecting a display mode, and a sweep control module are additionally included in the control and processing unit; - a video monitor has been added to the device 1.
  • a device for determining the parameters of an object is a device for differential phase profilometer / profilography, which consists of a radiation source, which can be used as a laser, installed along the light beam and interconnected sequentially and mechanically on a common optical axis, the first optical system configured to expand the light beam at least two acousto-optic deflectors, each of which is capable of dividing the light beam into at least two beams, displacing them in frequency and space, and scanning a selected portion of the object under study in two mutually orthogonal directions established between the first and the second acousto-optical deflectors of the Badal telescopic system, the second optical system made with the possibility of narrowing the light beam, two lenses installed before and after the object under study, and f topriemnika four generators of control signals - two for each of the acoustooptic deflector,
  • New in Device 2 is that the optical axis on which the radiation source is mounted, the first and second acousto-optical deflectors, the first and second optical systems, both the lens and the photodetector, are broken.
  • the device also includes the Badal telescopic system for transferring the scanning center from the first to the second acousto-optical deflector and a video monitor to visualize the measurement results.
  • a beam splitter was removed from the device and a second lens was additionally mounted behind the object under study to focus light beams passing through the object under study onto the photodetector.
  • the phase detector additionally contains a frequency filter that limits the frequency band of the input signal passing through the object under study and contains a variable component with a frequency ⁇ £, which is the main carrier of information about the parameters of the object under study, an amplifier-limiter, counter-synchronizer, and a digital counter.
  • Control and processing unit optional contains a module for creating a "refraction map" (density distribution) of the object under study and a module for selecting display modes.
  • the output of the photodetector is connected to the input of the phase detector, which is also the input of the frequency filter, the output of which is connected to the input of the amplifier-limiter, and the output of the amplifier-limiter is connected to the first input of the digital counter.
  • the output of the reference signal generator is connected to the first inputs of the control signal generators, to the input of the counter-synchronizer and to the third input of the digital counter, while the output of the counter-synchronizer is connected to the second input of the digital counter, the output of which is connected to the input of the control unit and processing, which is simultaneously the input of the operating mode selection module, while the outputs of the operating mode selection module are connected to the inputs of the module for creating a “refraction map” (density distribution) of the studied volume kta and the display mode selection module, and the output of the “refraction map” (density distribution) module of the object under study is connected to the second input of the display mode selection module, one of the outputs of which is connected to the input of an additionally installed video monitor, and the second to the input of the scan control module, the first output of which, in turn, is connected by feedback with the third input of the display mode selection module, while the other four outputs of the scan control module, which are simultaneously odes processing and control unit,
  • a module for creating a “refraction map” (density distribution) of the object under study a module for selecting a display mode, and a scan control module are additionally introduced into the control and processing unit;
  • Device 1 and Device 2 can be illustrated by a detailed description of their design and operation according to the following graphic materials, where:
  • FIG. 3 is a schematic functional diagram of Device 1
  • FIG. 4 - an example of the use of Device 1 in mechanical engineering
  • FIG. 5 is the appearance of Device 1 in medicine.
  • FIG. 6 is a schematic functional diagram of a Device 2
  • FIG. 7 is an example of the use of Device 2 in medicine
  • FIG. 8 is an example of the use of Device 2 in biology
  • Schematic diagram (Fig. 3) of the Device 1 consists of two parts - the optical part 1 and the electronic part 2.
  • the optical part 1 of Device 1 includes a radiation source 3, mounted sequentially along the light beam 4 and technologically (optically and mechanically) interconnected, the first optical system 5, the first acousto-optical deflector 6, the Badal telescopic system 7, the second acousto-optical deflector 8, and the second optical system 9, a lens 10, a beam splitter 12, and a photodetector 13.
  • a linearly polarized coherent radiation source (laser) is used as the radiation source 3.
  • the optical axis of the device is broken, i.e. is shifted in space from the straight (imaginary) axis in the corresponding directions (OX and OY) - from the deflector 6 through the telescopic Badal system 7 to the deflector 8 (along the OY axis), from the deflector 8 to the second optical system 9 and the surface 1 1 (along axis OX).
  • First optical system 5 made with the possibility of expanding the light beam 4 at the input of the first acousto-optical deflector 6.
  • Acousto-optical deflectors 6 and 8 are made with the possibility of dividing the light beam 4 into two beams, their displacement in space and frequency and scanning along one of the axes (axis OX or axis OY) , and are located relative to each other with a rotation of 90 °.
  • the Badal telescopic system 7 allows you to transfer the scanning center from the first acousto-optical deflector 6 to the second acousto-optic deflector 8.
  • the second optical system 9 matches the diameter of the scanning beam with the entrance pupil of the lens 10 and is configured so that the beam splitter 12 is located on the axis of the light beam 4 between the lenses of the second optical system 9.
  • the beam splitter 12 divides the light beam into equal shares — their intensities should be about 50% of the incident light intensity.
  • the lens 10 is designed to focus the light beam on the test surface 11 and receive the reflected light beam.
  • the photodetector 13 At the photodetector 13, light beams reflected at a different frequency from the test surface 11 are received.
  • the photodetector 13 should provide high sensitivity, signal-to-noise ratio, dynamic range and minimal phase distortion.
  • the electronic part 2 of Device 1 includes a reference signal generator 14; generators 15, 16, 17 and 18 control signals; adders 19 and 20; a phase detector 21, including a frequency filter 22, an amplifier-limiter 23, a counter-synchronizer 24 and a digital counter 25; control and processing unit 26, including an operating mode selection module 27, a surface topography reconstruction module 28 of a test object, a display mode selection module 29, a scan control module 30, and a video monitor 31.
  • Elements of the electronic part 2 of the Device 1 are interconnected in this way.
  • the output of the photodetector 13 is connected to the input of the phase detector 21, which is simultaneously the input of the frequency filter 22, the output of which is connected to the input of the limiter amplifier 23, the output of the limiter amplifier, in turn, is connected to the first input of the digital counter 25.
  • the radiation source 3 (Fig. 3) generates a light beam 4, which expands in the first optical system 5, passes the first acousto-optical deflector 6, which divides the light beam 4 into two parts for their displacement in space (for example, along the OY axis) and further scanning, passes the Badal telescopic system 7, which transfers the scanning center from the first 6 to the second acousto-optic deflector 8, which, in turn, divides the light beam into two parts for their displacement in space (for example, along the OX axis) and further scanning vania.
  • the light beam divided in the second acousto-optical deflector 8 narrows in the second optical system 9, between the lenses of which a beam splitter 12 is located, and falls on the lenses of the lens 10 and further onto the test surface 1 1. Reflected from the surface of the beam splitter 12 and, accordingly, from the studied surface And optical the signal 32 goes to the photo receiver 13, where it turns into its electrical analogue - signal 33.
  • the signal 33 is fed to the input of the phase detector 21, which is also the input of the frequency filter 22.
  • the frequency filter 22 limits the frequency band of the incoming signal 33 and extracts from it a periodic component with a frequency Af, phase, as a sinusoidal signal 34, phase which carries information about the phase difference of the light beams 32 reflected from the investigated surface 1 1 during each measurement, and which, in the set of points selected for the study, consisting of rows of points located along the OX axis and separately along the OY axis, is the main carrier of information about the parameters (height, local inclinations) of the investigated surface 1 1.
  • the data obtained for each investigated point are stored.
  • a periodic sinusoidal signal 34 is supplied to an amplifier-limiter 23, which processes the input signal so that a rectangular signal 35 is generated at its output with a phase corresponding to the phase of the input sinusoidal signal 34, regardless of fluctuations in the amplitude of the latter.
  • the rectangular signal 35 is supplied to a digital counter 25, which measures the phase (corresponding to a variable component with a frequency ⁇ ) of the rectangular signal 35 relative to the start signal 36, which generates a counter-synchronizer 24 based on the reference signal 39 of the reference signal generator 14. Moreover, due to the simultaneous use of signal 39 of the common reference signal generator 14 both for generating control signals for acousto-optical deflectors 6 and 8, and for generating a reference signal for counter-synchronizer 24, the initial phase of the variable component with frequency ⁇ coincides with the phase of the start signal 36 .
  • the operation mode selection module 27 of the block 26 control and processing by measuring along the axes OX and ⁇ the final changes in the parameters (height, local slopes) of the investigated surface 1 1 allows you to set the scan mode and read the parameters of the studied surface 1 1 and (or) set the mode of outputting data about its parameters to the module 28 of the choice of display modes; module 28 reconstruction of the surface topography of the investigated object of the control and processing unit 26 on the basis of signals generates data on the parameters of the studied object 1 1 and sends them to the module 29 of the choice of display modes; module 29 of the selection of display modes of the control and processing unit 26 carries out a selection of the presentation of data received from module 27 of the selection of operating modes and module 28 of the reconstruction of the surface topography for transmission to the input of
  • the video signal 38 coming from the control and processing unit 26 is input video monitor 31, on the screen of which in real time in selected scale and color gamut the parameters (height, local slopes) and (or) the image of the relief of the investigated surface 11 are observed. Simultaneously with the output
  • the scan control module 30, which coincides with the outputs of the control and processing unit 26, sends a signal to the control signal generators 15, 16, 17 and 18, which is generated based on the number of scan points that are read, in the scan control module 30, which also receives a signal 39 from the output of the generator 14 reference signals.
  • the control signal generators 15, 16, 17 and 18, in turn, generate control signals, which are sent through the adders 19 and 20 to the acousto-optical deflectors 6 and 8 and control the separation, displacement and scanning of the light beam 4.
  • Device 1 provides the ability to directly measure (without using reference samples) the parameters (height, local slopes) of the surface of the object under study, and the ability to build three-dimensional (3D) images of its relief.
  • the Device 1 in comparison with the known device for differential phase profilometry / profilography has a simpler circuit diagram and design, as well as higher sensitivity, speed, accuracy and reliability of the measurement results.
  • FIG. 4 An example of the use of Device 1 in engineering and medicine is illustrated respectively in FIG. 4 and FIG. 5.
  • Schematic diagram (Fig. 6) of the Device 2 consists of two parts - the optical part 1 and the electronic part 2.
  • the optical part 1 of Device 2 includes a radiation source 3, mounted sequentially along the light beam 4 and technologically (optically and mechanically) interconnected, the first optical system 5, the first acousto-optical deflector 6, the Badal telescopic system 7, the second acousto-optical deflector 8, and the second optical system 9, a lens 10 and a lens 12, a photodetector 13, installed behind the test object 11.
  • a linearly polarized coherent radiation source (laser) is used as the radiation source 3.
  • the optical axis of Device 1 is broken, i.e. is shifted in space from the direct (imaginary) axis in the corresponding directions (OY and OX) - from the deflector 6 through the telescopic system 7 Badal to the deflector 8 (along the OY axis), from the deflector 8 to the second optical system 9 and the object under investigation 1 1 (along axis OX).
  • the first optical system 5 is configured to expand the light beam 4 at the input of the first acousto-optical deflector 6.
  • Acousto-optical deflectors 6 and 8 are configured to divide the light beam 4 into two beams, shift them in space and frequency, and scan along one of the axes (OX or OY), and are located relative to each other with a rotation of 90 °.
  • the Badal telescopic system 7 allows you to transfer the scanning center from the first acousto-optic deflector 6 to the second acousto-optic deflector 8.
  • the second optical system 9 matches the diameter of the scanning beam with the entrance pupil of the lens 10, which focuses the light beam 4 on the object 1 under study 1.
  • the lens 12 directs the light beam, passed through the object 1 1 to the photodetector 13.
  • Photodetector 13 should have high sensitivity, signal-to-noise ratio, dynamic range and minimal phase distortion.
  • the electronic part 2 of Device 2 includes a reference signal generator 14; generators 15, 16, 17 and 18 control signals; adders 19 and 20; a phase detector 21, including a frequency filter 22, an amplifier-limiter 23, a counter-synchronizer 24 and a digital counter 25; control unit 26 and processing, including module 27 of the choice of operating modes, module 28 of creating a "refraction map" (density distribution) of the object under study, module 29 of the choice of display modes, module 30 of the scan control and video monitor 31.
  • the elements of the electronic part 2 of the Device 2 are interconnected in this way.
  • the output of the photodetector 13 is connected to the input of the phase detector 21, which is simultaneously the input of the frequency filter 22, the output of which is connected to the input of the limiter amplifier 23, the output of the limiter amplifier, in turn, is connected to the first input of the digital counter 25.
  • the radiation source 3 (Fig. 6) generates a light beam 4, which expands in the first optical system 5, passes the first acousto-optical deflector 6, which divides the light beam 4 into two parts for their displacement in space (for example, along the OY axis) and further scanning, passes Badal’s telescopic system 7, which transfers the scanning center from the first 6 to the second acousto-optic deflector 8, which, in turn, divides the light beam into two parts for their displacement in space (for example, along the OX axis) and further scanning.
  • the light beam separated in the second acousto-optical deflector 8 narrows in the second optical system 9 and falls on the lenses of the lens 10 and then on to the object under study 11.
  • the light beam 32 which passed through the thickness of the object under study 11, enters the lens 12, which directs the light beam 32 to the photodetector 13, where it is converted into its electrical analogue - signal 33.
  • the signal 33 is fed to the input of the phase detector 21, which is also the input of the frequency filter 22.
  • the frequency filter 22 limits the frequency band of the incoming signal 33 and extracts a variable component with frequency f from it in the form of a periodic sinusoidal signal 34, whose phase carries information about the phase difference of the light beams 32, passing through the thickness of the investigated object 11 during each measurement, and which in the set of points selected for the study, consisting of rows of points located along the OX axis and separately along the OY axis, is is the main carrier of information on the parameters (refractive index, density) of the studied object 11.
  • the data obtained for each studied point (its coordinates, the direction and amount of separation of light beams established when measuring this point) are stored.
  • a periodic sinusoidal signal 34 is supplied to an amplifier-limiter 23, which processes the input signal so that a rectangular signal 35 is generated at its output with a phase corresponding to the phase of the input sinusoidal signal 34, regardless of fluctuations in the amplitude of the latter.
  • the rectangular signal 35 is supplied to a digital counter 25, which measures the phase (corresponding to a variable component with a frequency ⁇ ) of the rectangular signal 35 relative to the start signal 36, which generates a counter-synchronizer 24 based on the reference signal 39 of the reference signal generator 14. Moreover, due to the simultaneous use of signal 39 of the common generator 14 of the reference signals as for generating control signals for acousto-optical deflectors 6 and 8, and for generating a reference signal for counter-synchronizer 24, the initial phase of the variable component with a frequency ⁇ coincides with the phase of the start signal 36.
  • the unit operation mode selection module 27 26 control and processing by measuring along the axes OX and ⁇ the final changes in the refractive index in the studied object 11 allows you to set the scanning and reading parameters (refractive index, density) studied of the first object 1 1 and (or) to set the output mode of the data on the parameters of the investigated object 1 1 to the module 28 of the choice of display modes; a module 28 for creating a “refraction map” (density distribution) of the test object of the control and processing unit 26 generates data on the parameters of the test object 11 from the signals and sends them to the display mode selection module 29; module 29 of the selection of display modes of the control and processing unit 26 performs selection of the form for presenting data received from module 27 of the selection of operating modes and module 28 of creating a
  • control and processing of the video signal 38 is input to the video monitor 31, on the screen of which in real time in the selected scale and color gamut observe the parameters (refractive indices, density distribution) and (or) "car at refraction ”(density distribution) of the studied object 1 1.
  • a signal is generated that is generated based on the number of scan points, to the control signal generators 15, 16, 17 and 18 which are read in the scan control module 30, which also receives a signal 39 from the output of the reference signal generator 14.
  • Device 2 provides the ability to directly determine (without using reference samples and contrast agents) the density of the test object and (or) construct on the video monitor a two-dimensional (2D) or three-dimensional (3D) image of a “refraction map” (density distribution) of the test object.
  • Device 2 in comparison with the known device for differential phase profilometry and / or profilography has a simpler circuit diagram and design, as well as higher sensitivity, speed, accuracy and reliability of the measurement results.
  • FIG. 7 is an image of red blood cells
  • FIG. 8 is an image of a lacewing porch.
  • Patent of Ukraine N> 19905 A method for studying relief and phase objects in a laser scanning microscope and a device for its implementation (Cnoci6 obtaining of relief and phase ⁇ 6' ⁇ in a laser scanning microscope and pristr for this building) (re-registered Copyright Certificate of the USSR 40 03/30/1989), G02 B21 / 00, 12/25/1997.
  • Patent of Ukraine N ° 66936 A device for measuring refractive aberrations of the eye (Pristrish for visual refraction aberration), ⁇ 61 ⁇ 3/00, ⁇ 61 ⁇ 3/10, ⁇ 61 ⁇ 3/14, 06/15/2004.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

Procédé de détermination des paramètres d'un objet et dispositif de fabrication de celui-ci (variantes) par la mesure directe de la phase de la variable constituant le courant photoélectrique ayant une fréquence Δf entre les paramètres de fréquence de chacune d'une paire d'objets des faisceau lumineux séparés en fréquence et dans l'espace et réfléchis de la surface de l'objet examiné (ou ayant passé à travers celui-ci), et par la reconstitution de l'image du relief de la surface de l'objet examiné ou de création d'une "carte de réfraction" (répartition de la densité) qui se rapport aux procédés et moyens utilisant des procédés de mesure ou d'enregistrement de profils et de réfractométrie optique et peut s'utiliser dans toutes les industries, à savoir l'industrie automobile, d'aviation, aérospatiale, chimique, électronique, optique et médicale, en génie mécanique pour fabriquer différentes pièces, unités et machines, des systèmes de turbines hautement efficaces, dans l'industrie des instruments, notamment dans la fabrication de palier ainsi que pour déterminer les paramètres d'utilisation de carburants et de lubrifiants, par exemple, pour une analyse express visant à déterminer la quantité et les dimensions des particules dans les huiles, le carburants et les produits pétroliers, dans des substances transparentes et les milieux biologiques.
PCT/UA2015/000123 2014-12-29 2015-12-11 Procédé de détermination des paramètres d'un objet et dispositif de fabrication de celui-ci (variantes) WO2016108805A1 (fr)

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UAU201414036 2014-12-29
UA201414036 2014-12-29
UA201414035 2014-12-29
UAA201414037 2014-12-29
UAA201414037A UA110587C2 (ru) 2014-12-29 2014-12-29 Спосіб визначення параметрів рельєфу поверхні та пристрій для його реалізації
UAU201414035 2014-12-29
UAU201502669 2015-03-24
UAU201502669U UA100915U (uk) 2015-03-24 2015-03-24 Пристрій для дослідження рефракції об'єктів

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RU2761480C1 (ru) * 2021-02-15 2021-12-08 Геннадий Генрихович Левин Способ определения координат изменения структуры клетки по фазовым изображениям

Citations (4)

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US4577967A (en) * 1983-05-20 1986-03-25 Citizen Watch Co., Ltd. Surface shape measurement apparatus
US4732485A (en) * 1985-04-17 1988-03-22 Olympus Optical Co., Ltd. Optical surface profile measuring device
SU1384950A1 (ru) * 1986-10-29 1988-03-30 Институт Физики Им.Л.В.Киренского Со Ан Ссср Бесконтактный интерференционный профилограф
US5953126A (en) * 1996-10-17 1999-09-14 Lucid Inc Optical profilometry

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4577967A (en) * 1983-05-20 1986-03-25 Citizen Watch Co., Ltd. Surface shape measurement apparatus
US4732485A (en) * 1985-04-17 1988-03-22 Olympus Optical Co., Ltd. Optical surface profile measuring device
SU1384950A1 (ru) * 1986-10-29 1988-03-30 Институт Физики Им.Л.В.Киренского Со Ан Ссср Бесконтактный интерференционный профилограф
US5953126A (en) * 1996-10-17 1999-09-14 Lucid Inc Optical profilometry

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