WO2016107535A1 - 减震装置 - Google Patents

减震装置 Download PDF

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Publication number
WO2016107535A1
WO2016107535A1 PCT/CN2015/099364 CN2015099364W WO2016107535A1 WO 2016107535 A1 WO2016107535 A1 WO 2016107535A1 CN 2015099364 W CN2015099364 W CN 2015099364W WO 2016107535 A1 WO2016107535 A1 WO 2016107535A1
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WO
WIPO (PCT)
Prior art keywords
damper device
component
base
elastic ribs
ring
Prior art date
Application number
PCT/CN2015/099364
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English (en)
French (fr)
Inventor
胡恩德
Original Assignee
史拓莱姆有限公司
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Publication date
Application filed by 史拓莱姆有限公司 filed Critical 史拓莱姆有限公司
Priority to CN201580052552.XA priority Critical patent/CN106795940B/zh
Publication of WO2016107535A1 publication Critical patent/WO2016107535A1/zh

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
    • G01Q60/38—Probes, their manufacture, or their related instrumentation, e.g. holders
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
    • G01Q70/02—Probe holders
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
    • G01Q70/02—Probe holders
    • G01Q70/04—Probe holders with compensation for temperature or vibration induced errors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q20/00—Monitoring the movement or position of the probe

Definitions

  • the invention relates to a damping device, and more particularly to a damping device for a detecting device.
  • An atomic force microscope is a detection device for detecting tiny objects.
  • the atomic force microscope touches the surface of the object by a probe and moves along its surface, and then the light lever is used to read the micro-actuation of the probe, so that the shape of the tiny object can be accurately measured.
  • the action of the probe is quite small, the atomic force microscope is subject to vibration caused by external force, which may cause serious measurement error. Therefore, the atomic force microscope needs to be equipped with a good damping mechanism to accurately measure.
  • Atomic force microscopy needs to be equipped with a good damping mechanism to accurately measure.
  • the present invention provides a damper device for a detecting device.
  • the invention provides a shock absorbing device comprising a base, a movable carrier and a plurality of elastic ribs.
  • the elastic rib ring row is disposed, and the two ends of each elastic rib are respectively connected to the base and the movable carrier, and each of the elastic ribs respectively forms at least one arc segment.
  • each of the elastic ribs respectively forms a pair of successively connected arc segments, and the pair of arc segments are bent in opposite directions.
  • the shape of the pair of arcs is different.
  • the radius of curvature of the pair of arcs is different.
  • the base comprises a ring, and one end of each elastic rib is respectively connected to the seat ring.
  • the movable carrier includes a carrier ring disposed at a distance from the seat ring along the same central axis, and the other ends of the elastic ribs are respectively connected to the carrier ring.
  • the elastic ribs are interspersed in a direction parallel to the central axis. Each arc segment is disposed along the tangential direction of the damper device.
  • the damper device further comprises a sensing component, a part of the sensing component is connected to the base and another part of the sensing component is coupled with the movable carrier.
  • the sensing component includes a magnetic component and a conductive component.
  • the conductive component is spaced apart from the magnetic component.
  • the magnetic component can be disposed on the base and the conductive component is coupled to the movable carrier.
  • the conductive element can also be disposed on the base and the magnetic element can be coupled to the movable carrier.
  • the curved elastic ribs can generate a balance force corresponding to the external force in the axial direction and the circumferential direction, thereby eliminating the vibration caused by the external force.
  • Fig. 1 is a perspective exploded view of a damper device according to a first embodiment of the present invention.
  • Fig. 2 is a perspective view showing a damper device according to a first embodiment of the present invention.
  • Figure 3 is a side view of a damper device of a first embodiment of the present invention.
  • Fig. 4 is a perspective view showing a damper device according to a second embodiment of the present invention.
  • a first embodiment of the present invention provides a damping device for providing a detecting device 10.
  • the damper device of the present invention comprises a base 100, a movable carrier 200 and a plurality of elastic ribs 300.
  • the base 100 includes a ring 110 in the shape of a ring
  • the movable carrier 200 includes a carrier ring 210 in the shape of a ring.
  • the seat ring 110 is vertically spaced apart from each other along the same central axis CA (ie, the central axis CA of the seat ring 110 and the central axis CA of the carrier ring 210 overlap each other) and the carrier ring 210 is disposed above the seat ring 110.
  • the seat ring 110 is used to place the fixed damping device, and the carrier ring 210 is used to carry the detecting device 10.
  • the carrier ring 210 is preferably sleeved outside the detecting device 10 and locked with the detecting device 10. .
  • the elastic ribs 300 are arranged around the central axis CA, and the two ends of the elastic ribs 300 are respectively connected to the base 100 and the movable carrier 200.
  • one end of each elastic rib 300 is connected to the seat ring 110, and the other end of each elastic rib 300 is connected to the carrier ring 210, respectively. Therefore, the damper device of the present invention has a cylindrical shape, and the aforementioned central axis CA defines the axial direction of the damper device.
  • each of the elastic ribs 300 has a continuous curved shape, and the elastic ribs 300 have the same shape. Therefore, each of the elastic ribs 300 respectively forms at least one arc segment 310/320. In this embodiment, each of the elastic ribs 300 respectively forms at least one pair of consecutive arc segments 310/320, and the bending of the pair of arc segments 310/320 The directions are opposite and the shapes are different. Preferably, the radius of curvature of the pair of arc segments 310/320 is different.
  • Each arc segment 310/320 is disposed at a radial angle with the damper device (in the present embodiment, preferably disposed in a tangential direction), and any arc segment 310/320 on each elastic rib 300 is respectively accommodated in Adjacent elastic ribs 300 are located within corresponding arc segments 310/320, and therefore, the elastic ribs 300 are interspersed in a direction parallel to the central axis CA.
  • the elastic ribs 300 can support the carrier ring 210 and allow the carrier ring 210 to have a degree of freedom in the axial direction and the circumferential direction, respectively, and can move or rotate relative to the seat ring 110. Moreover, when the elastic ribs 300 are compressed, stretched or rotated, the arc segments 310/320 can generate a restoring force opposite to the external force in both the axial direction and the circumferential direction (due to the radial direction of the arc segments 310/320 and the damper device) The angle is configured so that the restoring force can produce a component in the circumferential direction).
  • the pair of arcs 310/320 of different shapes and opposite configurations can simultaneously generate unequal restoring forces in opposite directions, thereby enabling the elastic deformation action of the elastic ribs 300 to quickly converge to a stationary state, avoiding bidirectional In the state of balanced force, a simple harmonic expansion or torsion that cannot converge is caused.
  • each of the elastic ribs 300 can generate a restoring force in the axial direction and the circumferential direction of the carrier ring 210 to balance the external force, thereby reducing the vibration of the detecting device 10.
  • a second embodiment of the present invention provides a damping device for providing a detecting device 10.
  • the shock absorbing device of the present invention comprises a base 100, a movable carrier 200, a plurality of elastic ribs 300, and a sensing assembly 400.
  • the base 100, the movable carrier 200, and the elastic rib 300 are the same as the first embodiment described above, and thus are not described herein.
  • the sensing component 400 includes a magnetic component 410 and a conductive component 420, a magnetic component 410 and a conductive component 420. One of them is fixed to the base 100.
  • the magnetic element 410 and the other of the conductive element 420 are disposed in conjunction with the movable carrier 200, and the magnetic element 410 and the conductive element 420 are disposed adjacent to each other such that the conductive element 420 is spaced apart from the magnetic element 410 by a gap.
  • the magnetic component 410 can be disposed on the base 100.
  • the conductive component 420 can be disposed on the movable carrier 200, the elastic rib 300, or the detecting device 10 to be coupled with the movable carrier 200.
  • the magnetic element 410 and the conductive element 420 can also be interchangeably arranged.
  • the conductive element 420 can be disposed on the base 100.
  • the magnetic element 410 can be disposed on the movable carrier 200, the elastic rib 300, or the detecting device 10 to be coupled with the movable carrier 200.
  • the conductive element 420 When the relative position of the magnetic element 410 and the conductive element 420 is changed, the conductive element 420 generates an induced current by traversing the magnetic field line, and the induced current generates a magnetic field to attract or repel the magnetic element 410, thereby generating a direction opposite to the relative movement direction. Force. Therefore, when the detecting device 10 is moved or rotated by the external force, the sensing assembly 400 can generate a restoring force opposite to the external force to balance the external force, thereby reducing the vibration of the detecting device 10.
  • the damper device of the present invention can be provided with a plurality of sets of sensing components 400, and the sensing components 400 can be symmetrically or evenly disposed on the damper device, thereby enabling the sensing component 400 to generate an average response to various parts of the damper device. Force, thus making the damping device less prone to skew.
  • the damper device of the present invention has a curved elastic rib 300 connected between the base 100 and the movable carrier 200. Therefore, when the detecting device 10 receives an external force, the elastic rib 300 can generate a corresponding balancing force in the axial direction and the circumferential direction, respectively. Therefore, the vibration caused by external force is eliminated.
  • the sensing component 400 can be further provided on the damper device, and the balance force corresponding to the external force can be generated in the axial direction and the circumferential direction by electromagnetic induction to eliminate the vibration caused by the external force.

Abstract

一种减震装置，其包含一底座（100），一活动载具（200）以及多个弹性肋（300），弹性肋（300）环列配置，各弹性肋（300）的两端分别连接底座（100）以及活动载具（200），各弹性肋（300）分别形成至少一弧段。弯曲的弹性肋（300）能够在轴向及周向上分别产生对应所受外力的平衡力以消除外力造成的震动。

Description

减震装置 技术领域
本发明有关于减震装置，尤指一种用于检测装置的减震装置。
背景技术
原子力显微镜为一种用于检测微小物件的检测装置。原子力显微镜借由一探针接触物件的表面并且沿其表面移动，再借由光杠杆来读取探针的微小作动，因此而能够精确量测到微小物件的外形。由于探针的作动相当微小一但原子力显微镜受到外力产生震动即可能造成量测严重误差，因此原子力显微镜需要配置有良好的减震机制才能精确量测。
技术问题
原子力显微镜需要配置有良好的减震机制才能精确量测。
技术解决方案
本发明提供一种用于检测装置的减震装置。
本发明提供一种减震装置，其包含一底座、一活动载具以及多个弹性肋。弹性肋环列配置，各弹性肋的二端分别连接底座以及活动载具，各弹性肋分别形成至少一弧段。
较佳地，各弹性肋分别形成一对接续相连的弧段，而且该对弧段的弯曲方向相反。该对弧段的形状相异。该对弧段的曲率半径相异。
较佳地，底座包含有一座环，各弹性肋的一端分别连接座环。活动载具包含有与座环沿同一中心轴相互间隔配置一载环，各弹性肋的另一端分别连接载环。该些弹性肋在平行于中心轴的方向上穿插配置。各弧段分别沿减震装置的切线方向配置。
较佳地，减震装置更包含一感应组件，感应组件的一部分连接底座且感应组件的另一部分与活动载具连动。感应组件包含一磁性元件以及导电元件，该导电元件与该磁性元件间隔一间隙，磁性元件可以设置于底座且导电元件与活动载具连动。导电元件也可以设置于底座且磁性元件与活动载具连动。
有益效果
本发明的减震装置，其弯曲的弹性肋能而够在轴向及周向上分别产生对应所受外力的平衡力，借此消除外力造成的震动。
附图说明
图1是本发明第一实施例的减震装置的立体分解示意图。
图2是本发明第一实施例的减震装置的立体示意图。
图3是本发明第一实施例的减震装置的侧视图。
图4是本发明第二实施例的减震装置的立体示意图。
附图标记说明：
10      检测装置；
100     底座；
110     座环；
200     活动载具；
210     载环；
300     弹性肋；
310/320 弧段；
400     感应组件；
410     磁性元件；
420     导电元件；
CA      中心轴。
本发明的实施方式
参阅图1至图3，本发明的第一实施例提供一种减震装置，供设置一检测装置10。本发明的减震装置包含有一底座100、一活动载具200以及多个弹性肋300。
底座100包含有呈圆环状的一座环110，活动载具200则包含有呈圆环状的一载环210。座环110沿同一中心轴CA(即座环110的中心轴CA与载环210的中心轴CA相互重合)上下相互间隔排列而且载环210配置在座环110的上方。座环110用于放置固定减震装置，而载环210则用于承载检测装置10，于本实施例中，载环210较佳地套于检测装置10之外并且与检测装置10锁附固定。
该些弹性肋300环绕前述的中心轴CA排列配置，而且各弹性肋300的二端分别连接底座100以及活动载具200。于本实施例中，较佳地，各弹性肋300的一端分别连接座环110，各弹性肋300的另一端则分别连接载环210。因此，本发明的减震装置呈圆柱状，且前述的中心轴CA定义减震装置的轴向。
各弹性肋300皆呈连续弯曲的长条状，而且该些弹性肋300具有相同的形状。因此，各弹性肋300分别形成至少一弧段310/320，于本实施例中，各弹性肋300分别至少形成一对接续相连的弧段310/320，而且该对弧段310/320的弯曲方向相反且形状相异，较佳地，该对弧段310/320的曲率半径相异。各弧段310/320分别与减震装置的径向夹角配置(于本实施例中，较佳地沿切线方向配置)，各弹性肋300上的任一弧段310/320分别容置在相邻弹性肋300上相对应弧段310/320之内，因此，该些弹性肋300在平行于该中心轴CA的方向上穿插配置。
该些弹性肋300能够支撑载环210，并且使得载环210在轴向及周向上分别具有自由度而能够相对于座环110移动或转动。而且，当各弹性肋300被压缩、拉伸或旋转时，弧段310/320在轴向及周向皆能够产生与外力相反的回复力(因弧段310/320与减震装置的径向夹角配置，故回复力能够在周向上产生分量)。形状相异且反向配置的该对弧段310/320能够同时在相反的方向上分别产生不等量的回复力，借此使得弹性肋300的弹性变形动作能够快速收敛至静止，避免在双向受力平衡的状态下造成无法收敛的简谐伸缩或扭转作动。当检测装置10受外力扰动时，各弹性肋300能够在载环210在轴向及周向上分别产生回复力而平衡外力，借此减少检测装置10震动。
参阅图4，本发明的第二实施例提供一种减震装置，供设置一检测装置10。本发明的减震装置包含有一底座100、一活动载具200、多个弹性肋300以及一感应组件400。
其中，底座100、活动载具200及弹性肋300如同前述第一实施例，故于此不再赘述。
感应组件400包含一磁性元件410以及一导电元件420，磁性元件410以及导电元件420 的其中之一设置在底座100而固定。磁性元件410以及导电元件420的另一者则与活动载具200连动配置，且磁性元件410与导电元件420相互邻近配置而使得导电元件420与磁性元件410间隔一间隙。
其中一种配置方式可以将磁性元件410设置于底座100上，导电元件420则可以设置在活动载具200上、弹性肋300上或是检测装置10上而能够与活动载具200连动。
磁性元件410及导电元件420也可以对换配置。另一种配置方式可以将导电元件420设置于底座100上，磁性元件410则可以设置在活动载具200上、弹性肋300上或是检测装置10上而能够与该活动载具200连动。当磁性元件410与导电元件420的相对位置改变时，导电元件420会因横越磁力线而产生感应电流，感应电流产生磁场而与磁性元件410相吸或相斥，借此产生与相对移动方向相反的作用力。因此，当检测装置10受外力扰动而移动或转动时，感应组件400能够产生与外力相反的回复力而平衡外力，借此减少检测装置10震动。
本发明的减震装置较佳地可以设置多组感应组件400，且感应组件400可以对称或是平均布设在减震装置，借此使得感应组件400能够对减震装置的各部位产生平均的回复力，因此使得减震装置不易偏移歪斜。
本发明的减震装置具有弯曲的弹性肋300连接于底座100及活动载具200之间，因此当检测装置10受到外力时，弹性肋300能够在轴向及周向上分别产生相对应的平衡力，因此消除外力造成的震动。
再者，减震装置上可以进一步附加设置感应组件400，借由电磁感应而在能够在轴向及周向上分别产生对应于外力的平衡力以消除外力造成的震动。
以上所述仅为本发明的较佳实施例，非用以限定本发明的保护范围，其他运用本发明的专利精神的等效变化，均应俱属本发明的专利范围。

Claims (11)

  1. 一种减震装置，其特征在于，包含：
    一底座，
    一活动载具；以及
    环列配置的多个弹性肋，各该弹性肋的二端分别连接该底座以及该活动载具，各该弹性肋分别形成至少一弧段。
  2. 如权利要求1所述的减震装置，其特征在于，各该弹性肋分别形成一对接续相连的该弧段，而且该对弧段的弯曲方向相反。
  3. 如权利要求2所述的减震装置，其特征在于，该对弧段的形状相异。
  4. 如权利要求2所述的减震装置，其特征在于，该对弧段的曲率半径相异。
  5. 如权利要求1所述的减震装置，其特征在于，该底座包含有一座环，各该弹性肋的一端分别连接该座环。
  6. 如权利要求5所述的减震装置，其特征在于，该活动载具包含有与该座环沿同一中心轴相互间隔配置一载环，各该弹性肋的另一端分别连接该载环。
  7. 如权利要求6所述的减震装置，其特征在于，该多个弹性肋在平行于该中心轴的方向上穿插配置。
  8. 如权利要求6所述的减震装置，其特征在于，各该弧段分别沿该减震装置的切线方向配置。
  9. 如权利要求1所述的减震装置，其特征在于，更包含一感应组件，该感应组件的一部分连接该底座且该感应组件的另一部分与该活动载具连动。
  10. 如权利要求9所述的减震装置，其特征在于，该感应组件包含一磁性元件以及一导电元件，该导电元件与该磁性元件间隔一间隙，该磁性元件设置于该底座且该导电元件与该活动载具连动。
  11. 如权利要求9所述的减震装置，其特征在于，该感应组件包含一磁性元件以及一导电元件，该导电元件与该磁性元件间隔一间隙，该导电元件设置于该底座且该磁性元件与该活动载具连动。
PCT/CN2015/099364 2014-12-29 2015-12-29 减震装置 WO2016107535A1 (zh)

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