WO2016082741A1 - 直线电机共定子双驱动宏微一体化高速精密运动一维平台 - Google Patents

直线电机共定子双驱动宏微一体化高速精密运动一维平台 Download PDF

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Publication number
WO2016082741A1
WO2016082741A1 PCT/CN2015/095411 CN2015095411W WO2016082741A1 WO 2016082741 A1 WO2016082741 A1 WO 2016082741A1 CN 2015095411 W CN2015095411 W CN 2015095411W WO 2016082741 A1 WO2016082741 A1 WO 2016082741A1
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WO
WIPO (PCT)
Prior art keywords
motion
macro
platform
micro
outer frame
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PCT/CN2015/095411
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English (en)
French (fr)
Inventor
杨志军
白有盾
陈新
王梦
高健
李涵雄
李成祥
王江龙
刘浩文
黄宇涵
余明峰
李振新
钟裕导
刘伟光
杨海东
管贻生
陈新度
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广东工业大学
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Application filed by 广东工业大学 filed Critical 广东工业大学
Publication of WO2016082741A1 publication Critical patent/WO2016082741A1/zh
Priority to US15/375,178 priority Critical patent/US10236762B2/en

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/44—Movable or adjustable work or tool supports using particular mechanisms
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q5/00—Driving or feeding mechanisms; Control arrangements therefor
    • B23Q5/22—Feeding members carrying tools or work
    • B23Q5/28—Electric drives
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q5/00—Driving or feeding mechanisms; Control arrangements therefor
    • B23Q5/22—Feeding members carrying tools or work
    • B23Q5/34—Feeding other members supporting tools or work, e.g. saddles, tool-slides, through mechanical transmission
    • B23Q5/36—Feeding other members supporting tools or work, e.g. saddles, tool-slides, through mechanical transmission in which a servomotor forms an essential element
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K11/00—Structural association of dynamo-electric machines with electric components or with devices for shielding, monitoring or protection
    • H02K11/20—Structural association of dynamo-electric machines with electric components or with devices for shielding, monitoring or protection for measuring, monitoring, testing, protecting or switching
    • H02K11/21—Devices for sensing speed or position, or actuated thereby
    • H02K11/22—Optical devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators

Definitions

  • the invention relates to a precision motion platform, in particular to a linear motor integrated stator and double drive macro-micro integrated high-speed precision motion one-dimensional platform.
  • the object of the present invention is to propose a one-dimensional platform for linear motor common stator double drive macro-micro integrated high-speed precision motion, which adopts a common stator to realize large-stroke high-precision feeding of one-dimensional macro-micro motion.
  • Linear motor common stator double drive macro-micro integrated high-speed precision motion one-dimensional platform including pedestal, macro-motion outer frame and micro-motion platform;
  • the micro-motion platform is disposed inside a frame of the macro-motion outer frame, the micro-motion platform includes a core platform for placing a workpiece and is used for a limited set of elastic pieces, the core platform being connected to the macro-motion outer frame by the elastic piece group;
  • the base is provided with a guide rail, a slider and a U-shaped linear motor, the slider is slidable to the guide rail, and the U-shaped linear motor comprises a stator, a macro-motion outer frame mover, a micro-motion platform mover and The connecting member, the macro motion and the micro motion share the same stator;
  • the macro-moving outer frame is fixedly mounted on the slider, and is connected to the macro-moving outer frame mover through the connecting member, and the macro-moving outer frame mover, the micro-motion platform mover and the The stator controls its sliding on the guide rail to realize macro motion;
  • the core platform is fixed to the micro-motion platform mover by the connecting member, and the micro-movement of the stator is controlled by the micro-motion platform mover.
  • the macro motion outer frame mover is provided with two, which are respectively disposed at two ends of the macro motion outer frame in the feeding direction.
  • shrapnel group, the core platform and the macro-motion outer frame are of a unitary structure.
  • the two sides of the core platform are connected to the inner wall of the macro-motion outer frame by the elastic piece group, the elastic piece groups are arranged in parallel, and the longitudinal direction of the elastic piece is perpendicular to the moving direction of the core platform. .
  • the macro-motion outer frame is provided with a groove at the joint of the elastic piece group, so that a thin deformable elastic member is formed inside the macro-motion outer frame, and the macro-motion outer frame is provided with the adjustment The frequency adjustment mechanism of the degree of deformation of the elastic member.
  • the frequency adjusting mechanism is a bolt passing through the slot, and two ends thereof are respectively connected to both sides of the slot.
  • the frequency adjustment mechanism further includes a piezoelectric ceramic piece that is mounted to the outside of the groove by the bolt.
  • micro-motion platform further includes a displacement sensor disposed at an end of the core platform in a feeding direction.
  • the displacement sensor is a differential capacitance sensor or a photoelectric sensor.
  • the non-working surface of the displacement sensor is provided with an insulating layer.
  • the invention provides a one-dimensional platform for linear motor common stator double drive macro-micro integrated high-speed precision motion, including a base, a linear guide, a slider, a U-shaped linear motor stator, a macro mover, a micro mover and a macro-micro integrated platform.
  • the macro motion platform (macro-motion outer frame) and the micro-motion platform are coupled by an elastic member to form an integrated platform, and the macro-motion outer frame of the macro-micro-integrated platform is mounted on a linear guide slider, and the base is mounted thereon
  • the U-shaped linear motor stator, the macro-motion platform and the micro-motion platform are respectively equipped with movers.
  • the macro-micro mover When the macro-micro mover is driven at the same time, the whole range of high-speed motion can be realized; when the motion deviation occurs, the micro-motion platform is small due to the inertia. No friction, precise displacement output through elastic deformation, can be driven separately to achieve high frequency motion deviation compensation.
  • the composite motion control Through the composite motion control, one-dimensional high-speed precision motion can be realized, and the installation and use mode is consistent with the traditional platform, which is convenient for popularization and application.
  • the invention has the following advantages: 1. Macro-micro integration, realizing large-stroke high-precision feed motion in one dimension; 2.
  • the stator is fixed on the frame, which reduces the motion inertia of the micro-motion platform, and is beneficial to improve one.
  • Figure 1 is a schematic view showing the structure of an embodiment of the present invention
  • Figure 2 is a schematic structural view of an embodiment of the present invention.
  • Figure 3 is a plan view of an embodiment of the present invention.
  • FIG. 4 is a schematic structural view of an integrated platform according to an embodiment of the present invention.
  • Fig. 5 is a schematic structural view of an integrated platform according to an embodiment of the present invention.
  • base 1 macro-moving outer frame 2, micro-motion platform 3, core platform 31, shrapnel group 32, guide rail 11, slider 12, U-shaped linear motor 13, stator 131, macro-motion outer frame mover 132, micro The movable platform mover 133, the connecting member 134, the groove 33, the displacement sensor 34, the elastic member 21, the frequency adjusting mechanism 22, the bolt 221, and the piezoelectric ceramic piece 222.
  • Linear motor common stator double drive macro-micro integrated high-speed precision motion one-dimensional platform including base 1, macro-motion outer frame 2 and micro-motion platform 3;
  • the macro motion outer frame 2 forms an integrated platform with the micro-motion platform 3, the micro-motion platform 3 is disposed inside the frame of the macro-motion outer frame 2, and the micro-motion platform 3 includes a workpiece for placing a workpiece.
  • the base 1 is provided with a guide rail 11, a slider 12 and a U-shaped linear motor 13, the slider 12 is slidable to the guide rail 11, and the U-shaped linear motor 13 includes a stator 131 and a macro-motion outer frame.
  • the sub-132, the micro-motion platform mover 133 and the connecting member 134, the macro motion and the micro-motion share the same stator 131;
  • the macro-motion outer frame 2 is fixedly mounted on the slider 13 and connected to the macro-motion outer frame mover 132 through the connecting member 134, and the macro-motion outer frame mover 132 and the micro-motion
  • the platform mover 133 and the stator 121 control the sliding of the guide rail 11 to realize macro motion
  • the core platform 31 is fixed to the fine movement platform mover 133 by the connecting member 134, and the micro motion of the stator 131 is controlled by the fine movement platform mover 133.
  • the U-shaped linear motor 12 realizes one-dimensional macro-micro motion, which can move the range of large stroke, small inertia and fast response speed, including the adjustment of the macro motion large stroke of the macro motion outer frame 2, and also includes the micro-motion platform. 2
  • the precise positioning is realized on the micro motion, so that the linear motor integrated stator and double drive macro-integrated high-speed precision motion one-dimensional platform of the invention can realize large-scale and precise mobile positioning.
  • the controller sends a displacement command to the macro motion outer frame 2 and the micro motion platform 3, and the macro motion outer frame 2 and the micro motion platform 3 are integrated, so that the macro motion outer frame 2 is in the macro motion outer frame mover 132 and the micro motion platform.
  • the mover 133 is moved together with the micro-motion platform 3 to the desired position, and the plurality of movers are powered together to realize high-speed motion, providing greater driving force and load capacity, when the micro-motion platform 3 reaches the expected position.
  • the mover 133 sends a signal to drive the micro-motion platform 3 to actively compensate the displacement fluctuation of the macro-motion outer frame 2 relative to the expected position in real time until the workpiece placed on the core platform 31 reaches the expected position, thereby realizing the linear motor common stator double drive macro-micro integration High dynamic precision of high-speed precision motion 1D platform.
  • the macro-motion outer frame mover 132 and the fine-motion platform mover 133 share the same stator 131, and only one U-shaped linear motor 13 is provided to realize different macro-micro motions of the stroke, and the structure is simple and more acceptable to the enterprise.
  • the macro-motion outer frame 2 and the micro-motion platform 3 form an integrated platform, and the whole piece of material is obtained by milling, electric discharge machining, etc., thereby avoiding assembly error of the parts and improving the movement precision of the platform.
  • the macro-motion outer frame mover 132 is provided with two, which are respectively disposed at two ends of the macro-motion outer frame 2 in the feeding direction.
  • the micro-motion platform 3 is disposed in the middle of the frame of the macro-motion outer frame, so that two macro-motion outer frame movers 132 are disposed, which are respectively disposed at two ends of the feed direction of the macro-motion outer frame 2, so that the macro-motion outer frame 2 is More balanced, faster response and more stable.
  • the shrapnel group 32, the core platform 31 and the macro motion outer frame 2 are of a unitary structure.
  • the integrated design of the macro-motion outer frame 2 and the micro-motion platform 3 is compact in structure, and is obtained by milling, electric spark machining, etc. of the whole piece of material, thereby avoiding the assembly error of the parts and improving the movement precision of the platform.
  • the two sides of the core platform 31 are connected to the inner wall of the macro-motion outer frame 2 through the elastic group 32, the elastic group 32 is arranged in parallel, and the length direction of the elastic piece is perpendicular to the core.
  • the parallel arrangement of the shrapnel groups 32 effectively moves the limit core platform 31 in one dimension, and the movement of the core platform 31 in the non-feeding direction is suppressed under the formation of the shrapnel group 32.
  • a groove 33 is formed at a joint of the macro-motion outer frame 2 and the elastic piece group 32, so that a thin deformable elastic member 21 is formed inside the macro-motion outer frame 2, and the macro-motion outer frame 2 is provided with the frequency adjustment mechanism 22 that adjusts the degree of deformation of the elastic member 21. Changed by the frequency adjustment mechanism 22 The degree of tightness of the shrapnel group 32 can change the natural frequency of the mechanism in the above micro motion, thereby changing the motion characteristics of the core platform 31.
  • the frequency adjusting mechanism 22 is a bolt 221 passing through the groove 33, and two ends thereof are respectively connected to both sides of the groove 33.
  • the bolt 221 can manually adjust the displacement in the longitudinal direction, change the deformation degree of the elastic member 21, and then change the elastic tension of the elastic piece group 32, thereby realizing dynamic adjustment of the natural frequency of the structure of the platform.
  • the frequency adjustment mechanism 22 further includes a piezoelectric ceramic sheet 222 that is attached to the outside of the groove 33 by the bolt 221 .
  • the piezoelectric ceramic piece 222 can be displaced in the longitudinal direction of the bolt 221 under the applied voltage, and the deformation degree of the elastic member 21 is changed, thereby changing the tension of the elastic piece of the elastic piece group 32, thereby realizing the structure of the platform. Dynamic adjustment of the natural frequency.
  • micro-motion platform 3 further includes a displacement sensor 34 disposed at an end of the core platform 31 in the feeding direction.
  • a displacement sensor 34 disposed at an end of the core platform 31 in the feeding direction.
  • the displacement sensor 34 is a differential capacitance sensor or a photoelectric sensor.
  • the differential capacitance sensor has less mechanical displacement, high precision and better anti-interference.
  • the photoelectric sensor has the advantages of high precision, fast response, non-contact, etc. The structure is simple and the volume is small, and it can be used as the choice of displacement sensor.
  • the non-working surface of the displacement sensor 34 is provided with an insulating layer. It is used to prevent the micro-displacement sensor 25 from being interfered by other metal materials, which affects the measurement accuracy.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Electromagnetism (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)

Abstract

一种直线电机共定子双驱动宏微一体化高速精密运动一维平台，包括基座（1），宏动外框架（2）和微动平台（3）。宏动外框架（2）与微动平台（3）形成一体化平台；基座（1）上设置有导轨（11），滑块（12）和U型直线电机（13）；滑块（12）可滑动于导轨（11）；U型直线电机（13）包括定子（131），宏动外框架动子（132），微动平台动子（133）和连接件（134）；宏运动和微运动共用同一个定子（131）；由宏动外框架动子（132），微动平台动子（133）和定子（121）控制宏动外框架（2）滑动于导轨（11）上实现宏运动；由微动平台动子（133）控制核心平台（31）在定子（131）上的微运动。该直线电机共定子双驱动宏微一体化高速精密运动一维平台通过复合运动控制，可以实现一维高速精密运动。

Description

直线电机共定子双驱动宏微一体化高速精密运动一维平台 技术领域
本发明涉及精密运动平台，尤其涉及直线电机共定子双驱动宏微一体化高速精密运动一维平台。
背景技术
随着科技的进步，人们对产品的要求越来越高，促使生产商对产品的加工精度要求也越来越高，现有设备中高精度进给运动平台的行程普遍较短，而大行程的普通宏运动设备的精度又无法满足实际需求，如果采用专用的大行程高精度运动设备，产品的制造成本将大幅增加。针对上述现状，一种能将大行程一般精度的宏运动和高精度小行程的微运动相复合的可以实现大行程高精度进给，且具有多方向的运动平台越来越受到行业的青睐。
发明内容
本发明的目的在于提出直线电机共定子双驱动宏微一体化高速精密运动一维平台，采用共用定子实现一维宏微运动的大行程高精度的进给。
为达此目的，本发明采用以下技术方案：
直线电机共定子双驱动宏微一体化高速精密运动一维平台，包括基座、宏动外框架和微动平台；
所述宏动外框架与所述微动平台形成一体化平台，所述微动平台设置在所述宏动外框架的框架内部，所述微动平台包括用于放置工件的核心平台和用于限位的弹片组，所述核心平台通过所述弹片组连接于所述宏动外框架；
所述基座上设置有导轨、滑块和U型直线电机，所述滑块可滑动于所述导轨，所述U型直线电机包括定子、宏动外框架动子、微动平台动子和连接件，宏运动和微运动共用同一个所述定子；
所述宏动外框架固定安装于所述滑块，并通过所述连接件连接于所述宏动外框架动子，由所述宏动外框架动子、所述微动平台动子和所述定子控制其滑动于所述导轨实现宏运动；
所述核心平台通过所述连接件固定于所述微动平台动子，并由所述微动平台动子控制其在所述定子的微运动。
更进一步说明，所述宏动外框架动子设置有两个，分别设置在所述宏动外框架的进给方向的两端。
更进一步说明，所述弹片组、所述核心平台和所述宏动外框架为一体式结构。
更进一步说明，所述核心平台的两侧通过所述弹片组与所述宏动外框架内壁连接，所述弹片组为平行布置，且所述弹片的长度方向垂直于所述核心平台的运动方向。
更进一步说明，所述宏动外框架与所述弹片组连接处设有槽，使所述宏动外框架内侧形成较薄的可变形的弹性件，所述宏动外框架设有调节所述弹性件变形度的所述频率调节机构。
更进一步说明，所述频率调节机构为穿过所述槽的螺栓，其两端分别连接于所述槽的两侧。
更进一步说明，所述频率调节机构还包括压电陶瓷片，所述压电陶瓷片通过所述螺栓安装于所述槽的外侧。
更进一步说明，所述微动平台还包括位移传感器，设于所述核心平台的进给方向的端部。
更进一步说明，所述位移传感器为差动电容传感器或光电传感器。
更进一步说明，所述位移传感器的非工作面设置有绝缘层。
本发明提出直线电机共定子双驱动宏微一体化高速精密运动一维平台，包括基座、直线导轨、滑块、U型直线电机定子、宏动动子、微动动子和宏微一体化平台。所述宏动平台(宏动外框架)与所述微动平台通过弹性构件联接形成一体化平台，所述宏微一体化平台的宏动外框架安装在直线导轨滑块上，基座上装有U型直线电机定子，宏动平台和微动平台上分别装有动子，当宏微动子同时驱动时，可实现整体大范围的高速运动；当出现运动偏差时，微动平台由于惯量小、无摩擦、通过弹性变形实现精密位移输出，可以单独驱动实现高频运动偏差补偿。通过复合运动控制，可以实现一维高速精密运动，安装使用方式与传统平台一致，方便推广应用。
本发明的有益效果：1、宏微一体化，实现一维上的大行程高精度的进给运动；2、定子固定在机架上，减小了微动平台的运动惯性，有利于提高一维微动平台的响应速度；3、采用共用定子，结构简单，平台稳定性更高。
附图说明
图1是本发明的一个实施例的结构示意图；
图2是本发明的一个实施例的结构示意图；
图3是本发明的一个实施例的俯视图；
图4是本发明的一个实施例的一体化平台的结构示意图；
图5是本发明的一个实施例的一体化平台的结构示意图。
其中：基座1、宏动外框架2、微动平台3、核心平台31、弹片组32、导轨11、滑块12、U型直线电机13、定子131、宏动外框架动子132、微动平台动子133、连接件134、槽33、位移传感器34、弹性件21、频率调节机构22、螺栓221、压电陶瓷片222。
具体实施方式
下面结合附图并通过具体实施方式来进一步说明本发明的技术方案。
直线电机共定子双驱动宏微一体化高速精密运动一维平台，包括基座1、宏动外框架2和微动平台3；
所述宏动外框架2与所述微动平台3形成一体化平台，所述微动平台3设置在所述宏动外框架2的框架内部，所述微动平台3包括用于放置工件的核心平台31和用于限位的弹片组32，所述核心平台31通过所述弹片组32连接于所述宏动外框架2；
所述基座1上设置有导轨11、滑块12和U型直线电机13，所述滑块12可滑动于所述导轨11，所述U型直线电机13包括定子131、宏动外框架动子132、微动平台动子133和连接件134，宏运动和微运动共用同一个所述定子131；
所述宏动外框架2固定安装于所述滑块13，并通过所述连接件134连接于所述宏动外框架动子132，由所述宏动外框架动子132、所述微动平台动子133和所述定子121控制其滑动于所述导轨11实现宏运动；
所述核心平台31通过所述连接件134固定于所述微动平台动子133，并由所述微动平台动子133控制其在所述定子131的微运动。
基于U型直线电机12实现一维宏微运动，可大行程的运动范围，惯量小，响应速度快，其中包括对宏动外框架2的宏运动大行程的调节，同时也包括对微动平台2在微运动上实现精密定位，使本发明直线电机共定子双驱动宏微一体化高速精密运动一维平台可实现大范围且精准的移动定位。控制器向宏动外框架2和微动平台3发出位移指令，宏动外框架2与微动平台3的一体化设计，使宏动外框架2在宏动外框架动子132和微动平台动子133的带动下与微动平台3一起向预期位置移动，由多个动子一起提供动力实现高速运动，提供的驱动力更大，负载能力也更大，当微动平台3到达预期位置时，控制器向微动平 台动子133发出信号，驱动微动平台3主动实时补偿宏动外框架2相对预期位置的位移波动，直至放置在核心平台31的工件到达预期位置，实现直线电机共定子双驱动宏微一体化高速精密运动一维平台的高动态精度。宏动外框架动子132和微动平台动子133共用同一个定子131，只设置有一部U型直线电机13即可实现行程不同的宏微运动，结构简单，更为企业接受。宏动外框架2与所述微动平台3形成一体化平台，由整块材料经过铣削、电火花加工等方式获取，避免了零件的装配误差，可以提高平台运动精度。
更进一步说明，所述宏动外框架动子132设置有两个，分别设置在所述宏动外框架2的进给方向的两端。微动平台3设置在宏动外框架的框架中部，因此设置有两个宏动外框架动子132，分别设置在宏动外框架2的进给方向的两端，使宏动外框架2的受力更均衡，响应更快，更稳定。
更进一步说明，所述弹片组32、所述核心平台31和所述宏动外框架2为一体式结构。宏动外框架2与微动平台3的一体化设计，结构紧凑，是由整块材料经过铣削、电火花加工等方式获取，避免了零件的装配误差，可以提高平台运动精度。
更进一步说明，所述核心平台31的两侧通过所述弹片组32与所述宏动外框架2内壁连接，所述弹片组32为平行布置，且所述弹片的长度方向垂直于所述核心平台31的运动方向。平行布置的弹片组32有效的限位核心平台31在一维上的运动，在所述弹片组32的牵制作用下，所述核心平台31在非进给方向的运动被抑制。
更进一步说明，所述宏动外框架2与所述弹片组32连接处设有槽33，使所述宏动外框架2内侧形成较薄的可变形的弹性件21，所述宏动外框架2设有调节所述弹性件21变形度的所述频率调节机构22。通过所述频率调节机构22改 变弹片组32的松紧程度可以改变上述微运动中的机构固有频率，从而改变核心平台31的运动特性。
更进一步说明，所述频率调节机构22为穿过所述槽33的螺栓221，其两端分别连接于所述槽33的两侧。所述螺栓221可手动调节长度方向产生位移，改变所述弹性件21的变形度，进而改变弹片组32的弹片张紧力，实现对平台的结构固有频率的动态调整。
更进一步说明，所述频率调节机构22还包括压电陶瓷片222，所述压电陶瓷片222通过所述螺栓221安装于所述槽33的外侧。所述压电陶瓷片222在外加电压作用下可在螺栓221的长度方向产生位移，改变所述弹性件21的变形度，进而改变所述弹片组32的弹片张紧力，实现对平台的结构固有频率的动态调整。
更进一步说明，所述微动平台3还包括位移传感器34，设于所述核心平台31的进给方向的端部。用于所述检测核心平台31的一维微位移。
更进一步说明，所述位移传感器34为差动电容传感器或光电传感器。差动电容传感器机械位移少，精度高，抗干扰性更好，光电传感器具有精度高、反应快、非接触等优点，结构简单，体积小，都可作为位移传感器的选择。
更进一步说明，所述位移传感器34的非工作面设置有绝缘层。用于防止微位移传感器25被其他金属材料干扰，影响测量精度。
以上结合具体实施例描述了本发明的技术原理。这些描述只是为了解释本发明的原理，而不能以任何方式解释为对本发明保护范围的限制。基于此处的解释，本领域的技术人员不需要付出创造性的劳动即可联想到本发明的其它具体实施方式，这些方式都将落入本发明的保护范围之内。

Claims (10)

  1. 直线电机共定子双驱动宏微一体化高速精密运动一维平台，其特征在于：包括基座、宏动外框架和微动平台；
    所述宏动外框架与所述微动平台形成一体化平台，所述微动平台设置在所述宏动外框架的框架内部，所述微动平台包括用于放置工件的核心平台和用于限位的弹片组，所述核心平台通过所述弹片组连接于所述宏动外框架；
    所述基座上设置有导轨、滑块和U型直线电机，所述滑块可滑动于所述导轨，所述U型直线电机包括定子、宏动外框架动子、微动平台动子和连接件，宏运动和微运动共用同一个所述定子；
    所述宏动外框架固定安装于所述滑块，并通过所述连接件连接于所述宏动外框架动子，由所述宏动外框架动子、所述微动平台动子和所述定子控制其滑动于所述导轨实现宏运动；
    所述核心平台通过所述连接件固定于所述微动平台动子，并由所述微动平台动子控制其在所述定子的微运动。
  2. 根据权利要求1所述的直线电机共定子双驱动宏微一体化高速精密运动一维平台，其特征在于：所述宏动外框架动子设置有两个，分别设置在所述宏动外框架的进给方向的两端。
  3. 根据权利要求1所述的直线电机共定子双驱动宏微一体化高速精密运动一维平台，其特征在于：所述弹片组、所述核心平台和所述宏动外框架为一体式结构。
  4. 根据权利要求1所述的直线电机共定子双驱动宏微一体化高速精密运动一维平台，其特征在于：所述核心平台的两侧通过所述弹片组与所述宏动外框架内壁连接，所述弹片组为平行布置，且所述弹片的长度方向垂直于所述核心平台的运动方向。
  5. 根据权利要求4所述的直线电机共定子双驱动宏微一体化高速精密运动一维平台，其特征在于：所述宏动外框架与所述弹片组连接处设有槽，使所述宏动外框架内侧形成较薄的可变形的弹性件，所述宏动外框架设有调节所述弹性件变形度的所述频率调节机构。
  6. 根据权利要求5所述的直线电机共定子双驱动宏微一体化高速精密运动一维平台，其特征在于：所述频率调节机构为穿过所述槽的螺栓，其两端分别连接于所述槽的两侧。
  7. 根据权利要求6所述的直线电机共定子双驱动宏微一体化高速精密运动一维平台，其特征在于：所述频率调节机构还包括压电陶瓷片，所述压电陶瓷片通过所述螺栓安装于所述槽的外侧。
  8. 根据权利要求1所述的直线电机共定子双驱动宏微一体化高速精密运动一维平台，其特征在于：所述微动平台还包括位移传感器，设于所述核心平台的进给方向的端部。
  9. 根据权利要求8所述的直线电机共定子双驱动宏微一体化高速精密运动一维平台，其特征在于：所述位移传感器为差动电容传感器或光电传感器。
  10. 根据权利要求8所述的直线电机共定子双驱动宏微一体化高速精密运动一维平台，其特征在于：所述位移传感器的非工作面设置有绝缘层。
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