WO2016074773A1 - Optischer gassensor mit led-emitter zur emission von licht schmaler bandbreite - Google Patents
Optischer gassensor mit led-emitter zur emission von licht schmaler bandbreite Download PDFInfo
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- WO2016074773A1 WO2016074773A1 PCT/EP2015/002195 EP2015002195W WO2016074773A1 WO 2016074773 A1 WO2016074773 A1 WO 2016074773A1 EP 2015002195 W EP2015002195 W EP 2015002195W WO 2016074773 A1 WO2016074773 A1 WO 2016074773A1
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- WIPO (PCT)
- Prior art keywords
- emitter
- gas sensor
- light waves
- detector
- wavelength
- Prior art date
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- 230000003287 optical effect Effects 0.000 title claims abstract description 38
- 239000007789 gas Substances 0.000 claims abstract description 120
- 230000005855 radiation Effects 0.000 claims abstract description 70
- 238000001228 spectrum Methods 0.000 claims abstract description 12
- 230000005484 gravity Effects 0.000 claims 2
- 238000005259 measurement Methods 0.000 description 11
- 239000000203 mixture Substances 0.000 description 11
- 238000010521 absorption reaction Methods 0.000 description 4
- 238000001514 detection method Methods 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000002329 infrared spectrum Methods 0.000 description 2
- 230000031700 light absorption Effects 0.000 description 2
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 2
- 230000002411 adverse Effects 0.000 description 1
- 238000012790 confirmation Methods 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000008054 signal transmission Effects 0.000 description 1
- 239000002341 toxic gas Substances 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
- G01N21/3504—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing gases, e.g. multi-gas analysis
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/42—Absorption spectrometry; Double beam spectrometry; Flicker spectrometry; Reflection spectrometry
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/1702—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
Definitions
- the invention relates to an optical gas sensor for quantitatively measuring a concentration of one or more gases.
- Optical gas sensors allow both a qualitative determination of the presence of one or more gases, as well as a quantitative determination of a concentration of one or more gases.
- Such gas sensors are e.g. used in gas detection devices in systems for the extraction and processing of combustible and / or toxic gases to detect unintentionally leaking gases.
- Optical gas sensors which have an emitter, a cuvette and a detector.
- Emitter a light source, such. an incandescent lamp that emits a wide range of light waves, ie light waves with a large number of different wavelengths.
- the cuvette is preferably a substantially closed space in which the gas to be measured is located.
- the cuvette may have openings to the outside, which allow a gas exchange of the cuvette with an environment of the gas sensor.
- the detector is a light sensor with which preferably an intensity of light incident on the detector can be measured.
- bandpass filters are connected upstream of the corresponding detectors. Such bandpass filters may be designed to pass one or more wavelengths.
- the gas or gas mixture to be measured is introduced into the cuvette.
- the cuvette may have one or more openings. Light waves emitted by the light source are used as a function of the concentration of the light
- CONFIRMATION COPY components of the gas mixture as well as the absorption wavelengths of the respective gas more or less strongly absorbed and meet in the connection to the
- Light sensor that measures an intensity of these light waves. In this way it can be determined which wavelengths were strongly absorbed by the gas. Because of known specific absorption properties of different gases, a composition of the gas mixture can be determined from this result.
- an optical gas sensor with a hollow-cylindrical cuvette for receiving the gas to be measured is known.
- a plane mirror are arranged in the longitudinal axial direction on one side and a concave mirror on the other side.
- the concave mirror has a plurality of recesses for receiving an incandescent lamp and a light wave detector. Light waves emitted by the incandescent lamp are first reflected several times between plane mirror and concave mirror until they strike the light wave detector. As a result, an optical path is extended, on which these light waves can be absorbed by the gas or gas mixture to be measured. Thus, weakly absorbing gases are easier to measure.
- Eiri such gas sensor has the particular disadvantage that an arrangement of incandescent lamp and light wave detectors on the concave mirror because of the curved surface of the concave mirror can be produced only with great effort.
- a variety of light sources used in optical gas sensors have the disadvantage of emitting a relatively wide light wave spectrum.
- light waves emitted at wavelengths needed to measure the gas concentration but also light waves having wavelengths that are not significant to the measurement of gas concentration and that need to be filtered out by a bandpass filter to avoid measurement errors.
- the efficiency of the optical gas sensor is adversely affected.
- incandescent lamps have the additional disadvantage that a large proportion of electrical energy is converted into heat, which must be dissipated as heat loss. This leads to excessive energy consumption of the gas sensor and is particularly disadvantageous for mobile applications that are powered by an internal power source such as a battery become. Due to the increased power consumption, the life of the battery and thus the service life of the mobile gas sensor is significantly reduced.
- the invention has the object to provide an optical gas sensor, which at least partially does not have these disadvantages. It is therefore the object of the present invention to provide an optical gas sensor with which, in particular, concentrations of weakly light-wave absorbing gases can be quantitatively measured and which has an improved efficiency.
- an optical gas sensor for quantitatively measuring a concentration of one or more gases, comprising a radiation source for emitting light waves, a cuvette for receiving a gas to be measured and a detector for measuring light intensities.
- the radiation source has at least one emitter of light waves, such as an LED, and is designed to emit light waves of at least a first wavelength and a second wavelength different from the first wavelength simultaneously and separately from one another.
- the emitter is preferably designed to emit a spectrum whose full half width is at most 50% of the centroid wavelength.
- the emitter is further configured to emit a discrete spectrum whose full half width is at most 20% of the centroid wavelength.
- the detector is configured to quantitatively detect an intensity of the emitted light waves of the first wavelength and the second wavelength.
- the emitter is preferably designed to convert at least 80% of the electrical energy consumed by the emitter into light waves.
- the invention is based on the idea that the efficiency of the optical gas sensor can be significantly improved by the use of such an emitter. As a result, less heat is produced in the generation of light waves and thus consumes less electrical energy.
- the conversion of electrical energy into light waves by an LED generates less heat than, for example, an incandescent lamp, as used in many conventional gas sensors.
- the gas sensor has a lower power consumption during operation. This is advantageous, in particular, for mobile applications, since in this way a charging cycle of a rechargeable battery or a service life of a battery of the mobile application can be significantly increased.
- a main signal By separately emitting light waves of different wavelengths, e.g. a main signal, and a reference signal can be generated, wherein the reference signal for checking the measurement result of the main signal can be used.
- a reference signal By way of example, an embodiment for the quantitative determination of methane may be mentioned.
- the measuring wavelength of the measuring signal is chosen to be about 3.2 pm, suitable reference wavelengths for the reference signal are found at 3.1 pm and / or at 3.9 pm.
- the more light waves of different wavelengths can preferably be generated separately, the more gases can be quantitatively determined with the gas sensor according to the invention.
- the emitter emits only a relatively narrow band of light.
- the light waves are preferably in the infrared because of the absorption properties of gases.
- Emitters designed as LED have the advantage that relatively short light pulses can be emitted with them without the LEDs after the light pulse glowing like an incandescent lamp.
- the individual LEDs can thus emit light pulses essentially immediately one after the other so that, for example, the measurement signal and the reference signal extend through a substantially constant gas mixture arranged in the cuvette.
- LEDs have the advantage that they are suitable for emitting a relatively narrow-band light spectrum and have a particularly good efficiency in the conversion of electrical energy into light waves.
- the particular optical properties of LEDs in the form of emitters are, for example, in the field of optical signal transmission with light sources. Waveguides known. In particular, the narrow band of the emitted spectrum due to half-width and center wavelength, for example, in DE 40 11 462 C2 set forth.
- the detector is e.g. a photodiode, which generates a current upon the impingement of light waves whose current intensity depends on the intensity of the light waves.
- the degree of absorption of the light waves of a certain wavelength by the gas, and the nature of the gas or composition of the gas mixture can be determined.
- at least one detector is designed to detect a plurality of different, preferably disjoint wavelength ranges.
- a corresponding bandpass filter may e.g. be arranged in front of the detector to avoid interference.
- the bandpass filter may be formed as a function of the radiation source.
- a band pass filter is preferably arranged in front of the detector, which is permeable to these four wavelengths.
- Bandpass filters have the further advantage that light waves that are not transmitted by the bandpass filter can be reflected by it.
- it may be advantageous to arrange a bandpass filter at an emitter or radiation source so that with a plurality of radiation sources with bandpass filters arranged in front of them, less reflection surface of a mirror is lost than without a bandpass filter.
- the cuvette is preferably designed in such a way that no disturbing influences, like e.g. Light waves from an environment of the gas sensor can penetrate into the cuvette or hit the detector. As a result, a required accuracy of the measurement results of the gas sensor is ensured. Furthermore, an air exchange of the cuvette with the surroundings of the gas sensor is preferably controllable or relatively low, so that during a measurement cycle having at least the single emission of a measurement signal and a reference signal, the gas mixture within the cuvette remains substantially constant. As a result, measurement errors are also avoided or reduced.
- no disturbing influences like e.g. Light waves from an environment of the gas sensor can penetrate into the cuvette or hit the detector.
- an air exchange of the cuvette with the surroundings of the gas sensor is preferably controllable or relatively low, so that during a measurement cycle having at least the single emission of a measurement signal and a reference signal, the gas mixture within the cuvette remains substantially constant. As a result, measurement errors are also avoided or reduced.
- the radiation source has at least a first emitter and a second emitter, the first emitter being formed. det, light waves of the first wavelength and the second emitter is adapted to emit light waves of the second wavelength.
- the detector and / or at least one emitter have at least one optical filter, such as a bandpass filter.
- the emitters are designed as LEDs.
- Such a radiation source is easy to produce and requires a relatively small amount of space.
- the radiation source is designed to emit a discrete light wave spectrum.
- the radiation source is designed to generate only light waves of a specific wavelength or a relatively narrow wavelength range.
- a bandpass filter is arranged in front of the radiation source, which further reduces the wavelength range generated by the radiation source.
- a plurality of light waves having wavelengths which are spaced apart within the IR spectrum can be generated by the radiation source.
- the cuvette has a mirror arrangement with a plane mirror and a concave mirror arranged opposite the plane mirror, wherein an optical axis of the concave mirror is arranged substantially perpendicular to the plane mirror.
- a distance between concave mirror and plane mirror preferably corresponds to an integer fraction of the radius of curvature of the concave mirror.
- a beam of light passes the cuvette between the mirrors several times, e.g. four or six times before hitting the light sensor.
- This arrangement has the advantage that even weakly absorbing measuring gases can be measured with a relatively compact size of the gas sensor.
- a radius of curvature of the concave mirror is variable or the hollow mirror is exchangeable by concave mirrors with different radii of curvature.
- the beam path of the light waves can be made variable within the gas sensor, so that the light waves depending on the setting. of the curvature radius of the concave mirror are reflected differently between concave mirror and plane mirror until they hit the detector.
- the gas sensor can be used for measuring gases with weak as well as strong absorption of light waves.
- the mirror arrangement can have two plane mirrors arranged essentially facing one another, wherein, for example, by turning on the radiation source or at least one mirror, a corresponding reflection of the light beam can be achieved.
- This variant is particularly simple and inexpensive to produce.
- Angles of incidence to the surface normal of the mirror are as small as possible, i. that the light waves are almost perpendicular to the mirrors. to meet. This reduces the influence of interfering factors, such as Moisture on the mirror surfaces, which causes absorbing the light waves reduced.
- the radiation source and / or the detector are arranged on the plane mirror.
- the radiation source and detector in such an arrangement are readily isolatable from the interior of the cuvette, e.g. through a translucent disk or a bandpass filter, so that they have no direct contact with the sample gas.
- an arrangement of radiation source and detector on one level has the advantage that they can be arranged on a common board.
- Such an arrangement is thus particularly simple and inexpensive to produce. More preferably, a distance of the radiation source to an intersection of the optical axis with the plane mirror corresponds to a distance of a detector to this intersection.
- Such a plane mirror is particularly easy to install because of its symmetry.
- a radiation source and a detector are arranged on the cuvette such that light waves emitted by the radiation source strike the detector directly.
- the radiation source and detector are not arranged at the same mirror, so that the light waves strike the detector without being reflected.
- This has the advantage that particularly strongly absorbing gases can be determined.
- such a gas sensor has at least two radiation sources spaced apart from one another, wherein at least one radiation source is arranged on the cuvette such that light waves emitted by the radiation source strike the detector only via the mirror arrangement.
- the gas sensor is designed such that the radiation source is arranged at a distance from the detector on the cuvette.
- the emitter is designed to emit light waves with a guided beam path.
- Plan mirror and concave mirror in the context of the invention are considered as components of the cuvette.
- Such an arrangement is particularly advantageous for gas sensors intended for measuring gases which only weakly absorb light waves.
- the light waves are emitted as a guided beam path which has substantially no diffuse radiation. This has the advantage that the emitted light is used particularly efficiently for the detection of gases.
- this is particularly advantageous for gas sensors which are suitable for the detection of gases which have a weak light absorption, since this allows a particularly compact design of the gas sensor.
- the detector is designed to detect substantially only light waves emitted by the radiation source.
- the detector can be e.g. have a corresponding bandpass filter.
- the detector may be configured to quantitatively detect a broad spectrum of light waves of different wavelengths, wherein light waves emitted by the radiation source are part of this spectrum.
- Such a sensor can be produced particularly inexpensively.
- the use of only one detector has the advantage that costs for further detectors can be saved.
- the cuvette with only one detector and the same size on a larger reflection surface of the mirror since only one point of a mirror has a detector. As a result, in particular, the accuracy in the measurement of gases that absorb only weak light waves can be improved.
- At least two radiation sources are arranged at a distance from one another on the cuvette.
- the individual radiation sources can have a less complex structure.
- defective radiation sources are separately interchangeable.
- repair or replacement costs can be reduced.
- four radiation sources are arranged on the cuvette.
- the cuvette has two detectors, wherein the detectors are designed for measuring light intensities of different radiation sources or different emitters, such as different LEDs, of the two radiation sources.
- the detectors are preferably arranged such that only light waves of a radiation source can be detected by each detector.
- the radiation sources can be switched or modulated differently. This arrangement has the advantage that a plurality of measuring gases arranged in the cuvette can be determined quantitatively at the same time.
- the gas sensor has at least one Doppelbandpassfil- ter, which is preferably arranged at a radiation source. More preferably, the gas sensor has at least one triple band pass filter, which is preferably arranged on a radiation source. As a result, a spectrum of light waves emitted by the respective radiation source can be split into clearly separated wavelengths or wavelength spectra.
- FIG. 1 shows a side view of a first embodiment of a gas sensor according to the invention
- Figure 2 is a plan view of a plane mirror of the gas sensor according to the invention of Fig. 1;
- Figure 3 is a plan view of a plane mirror of a second embodiment of a gas sensor according to the invention.
- Figure 4 is a plan view of a plane mirror of a third embodiment of a gas sensor according to the invention.
- the first embodiment of the invention opti see gas sensor 1 has a substantially cylindrically shaped cuvette 3, in which a gas to be measured G or gas mixture is arranged.
- the cuvette 3 has at least one opening which is not recognizable in this view for exchanging the gas G arranged in the cuvette 3 with gas G from the surroundings of the gas sensor 1 arranged.
- the plane mirror has a radiation source 2, which is designed to emit light waves L of two different wavelengths within the IR spectrum and is aligned in the direction of the concave mirror 7.
- the radiation source 2 has an emitter 5 embodied as an LED and is embodied such that the light waves L of different wavelengths can be emitted separately from one another.
- an optical filter such as a bandpass filter, double bandpass filter or triple bandpass filter is optionally arranged.
- a detector 4 Spaced apart from the light source 2, a detector 4 is arranged on the plane mirror 6 and aligned in the direction of the concave mirror 7. The detector 4 is designed to measure the intensity of light waves.
- the concave mirror 7 has an optical axis 8, which is arranged substantially perpendicular to the plane mirror 6. The distance from the concave mirror 7 to the emitter 5 in this first embodiment is about half the radius of curvature of the concave mirror 7. When using an arranged in front of the emitter 5 optical filter, the distance is slightly larger than half of the radius of curvature of the concave mirror 7.
- the plane mirror 6 has a first hole 9, in which a radiation source 2 with a first emitter 5a and a second emitter 5b is arranged, and a second hole 10, in which the detector 4 is arranged on.
- This first embodiment of the gas sensor 1 according to the invention is particularly suitable for quantitatively measuring the gas concentration or for detecting a single gas G.
- light waves L of different wavelengths can be emitted alternately from the first emitter 5a and the second emitter 5b and / or modulated with different frequencies.
- the detector 4 detects the intensity of these partially absorbed light waves L.
- the light waves emitted by the second emitter 5b can be used as a reference signal.
- the first emitter 5a and the second emitter 5b are formed as LED in this embodiment.
- the plane mirror 6 has a first hole 9, in which a radiation source 2 with a first emitter 5a, a second emitter 5b and a third emitter 5c is arranged, and a second hole 10, in which the detector 4 is arranged on.
- an optical filter such as a bandpass filter, double bandpass filter or triple bandpass filter is optionally arranged.
- the first emitter 5a, the second emitter 5b and the third emitter 5c are formed as LED in this embodiment.
- the second embodiment of the gas sensor 1 differs from the first embodiment in that the radiation source 2 additionally has a third emitter 5c.
- This second embodiment of the gas sensor 1 according to the invention is particularly suitable for quantitatively measuring or for detecting two different gases G.
- light waves L of different wavelengths can be emitted by the first emitter 5a, the second emitter 5b and the third emitter 5c.
- the detector 4 determines the intensity of these partially absorbed light waves L.
- the light waves emitted by the third emitter 5c serve as the reference signal.
- a plane mirror 6 of a third embodiment of the gas sensor 1 according to the invention is shown in a plan view.
- the plane mirror 6 has two first holes 9 and two second holes 10. In a first.
- Hole 9 is a first radiation source 2a with a first emitter 5a and a second emitter 5b arranged.
- a second radiation source 2b having a third emitter 5c and a fourth emitter 5d is arranged in a second hole 10.
- a first detector 4a and in the other second hole 10 a second detector 4b is arranged.
- the third embodiment of the gas sensor 1 differs from the first embodiment in that the gas sensor 1 has two radiation sources 2 and two detectors 4.
- Light waves L emitted by the first radiation source 2 a are preferably exclusively or essentially detectable by the first detector 4 a and light waves L emitted by the second radiation source 2 b exclusively or essentially by the second detector 4 b.
- the first radiation source 2a and the second radiation source 2b can simultaneously emit lightwaves L.
- the first emitter 5a, the second emitter 5b, the third emitter 5c, and the fourth emitter 5d are formed as LEDs in this embodiment.
- This third embodiment of the gas sensor 1 according to the invention is particularly suitable for the simultaneous quantitative measurement or for detecting two different gases G in a gas mixture.
- Bandpass filters which are arranged in front of the radiation sources 2 or detectors 4, act for light waves of the respective other radiation sources 2 as a mirror. This increases the efficiency of the gas sensor 1.
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- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
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Abstract
Description
Claims
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
AU2015345502A AU2015345502B2 (en) | 2014-11-10 | 2015-11-02 | Optical gas sensor comprising an LED emitter for the emission of light of a narrow bandwidth |
CN202210528201.3A CN114910432A (zh) | 2014-11-10 | 2015-11-02 | 具有用于发射窄带宽的光的led发射体的光学气体传感器 |
CA2964020A CA2964020C (en) | 2014-11-10 | 2015-11-02 | Optical gas sensor comprising an led emitter for the emission of light of a narrow bandwidth |
CN201580060984.5A CN107148566A (zh) | 2014-11-10 | 2015-11-02 | 具有用于发射窄带宽的光的led发射体的光学气体传感器 |
US15/525,338 US10190974B2 (en) | 2014-11-10 | 2015-11-02 | Optical gas sensor comprising an LED emitter for the emission of light of a narrow bandwidth |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102014016515.9 | 2014-11-10 | ||
DE102014016515.9A DE102014016515B4 (de) | 2014-11-10 | 2014-11-10 | Optischer Gassensor |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2016074773A1 true WO2016074773A1 (de) | 2016-05-19 |
Family
ID=54843785
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/EP2015/002195 WO2016074773A1 (de) | 2014-11-10 | 2015-11-02 | Optischer gassensor mit led-emitter zur emission von licht schmaler bandbreite |
Country Status (6)
Country | Link |
---|---|
US (1) | US10190974B2 (de) |
CN (2) | CN114910432A (de) |
AU (1) | AU2015345502B2 (de) |
CA (1) | CA2964020C (de) |
DE (1) | DE102014016515B4 (de) |
WO (1) | WO2016074773A1 (de) |
Cited By (1)
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CN109564153A (zh) * | 2016-08-23 | 2019-04-02 | 德尔格安全股份两合公司 | 用于气体的吸收测量的测量装置 |
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FR3042038B1 (fr) * | 2015-10-01 | 2017-12-08 | Commissariat Energie Atomique | Procede d'optimisation de longueurs d'onde de detection pour une detection multi-gaz |
EP4361510A3 (de) * | 2017-04-06 | 2024-07-10 | Carrier Corporation | Kältemittelleckdetektion mit mittelschwerem bis niedrigem globalem erwärmungspotenzialwert |
CA3105472A1 (en) * | 2018-07-03 | 2020-01-09 | Global Analyzer Systems Limited | Self-aligned high finesse optical sensor cell |
US11114286B2 (en) | 2019-04-08 | 2021-09-07 | Applied Materials, Inc. | In-situ optical chamber surface and process sensor |
DE102019003021A1 (de) * | 2019-04-29 | 2020-10-29 | Dräger Safety AG & Co. KGaA | Gaserfassungsvorrichtung zur Erfassung wenigstens eines Parameters eines Gases |
US11499869B2 (en) * | 2019-11-13 | 2022-11-15 | Applied Materials, Inc. | Optical wall and process sensor with plasma facing sensor |
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- 2015-11-02 CN CN202210528201.3A patent/CN114910432A/zh active Pending
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CN114910432A (zh) | 2022-08-16 |
DE102014016515A1 (de) | 2016-05-12 |
CA2964020A1 (en) | 2016-05-19 |
CA2964020C (en) | 2019-08-06 |
CN107148566A (zh) | 2017-09-08 |
DE102014016515B4 (de) | 2021-04-29 |
AU2015345502A1 (en) | 2017-04-13 |
US20170322149A1 (en) | 2017-11-09 |
AU2015345502B2 (en) | 2018-07-19 |
US10190974B2 (en) | 2019-01-29 |
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