WO2016000617A1 - 用于晶体培养的坩埚 - Google Patents
用于晶体培养的坩埚 Download PDFInfo
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- WO2016000617A1 WO2016000617A1 PCT/CN2015/083053 CN2015083053W WO2016000617A1 WO 2016000617 A1 WO2016000617 A1 WO 2016000617A1 CN 2015083053 W CN2015083053 W CN 2015083053W WO 2016000617 A1 WO2016000617 A1 WO 2016000617A1
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- crucible
- embossing pattern
- partially
- depressions
- single crystal
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B35/00—Apparatus not otherwise provided for, specially adapted for the growth, production or after-treatment of single crystals or of a homogeneous polycrystalline material with defined structure
- C30B35/002—Crucibles or containers
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/10—Crucibles or containers for supporting the melt
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/14—Heating of the melt or the crystallised materials
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/10—Inorganic compounds or compositions
- C30B29/16—Oxides
- C30B29/20—Aluminium oxides
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B35/00—Apparatus not otherwise provided for, specially adapted for the growth, production or after-treatment of single crystals or of a homogeneous polycrystalline material with defined structure
- C30B35/007—Apparatus for preparing, pre-treating the source material to be used for crystal growth
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B11/00—Single-crystal growth by normal freezing or freezing under temperature gradient, e.g. Bridgman-Stockbarger method
- C30B11/002—Crucibles or containers for supporting the melt
Definitions
- the present invention relates to a crucible for crystal culture, particularly single crystal culture, which is composed of W, Mo, Re, an alloy of these metals or a base alloy, and to a method for producing such a crucible.
- a crucible for crystal culture in particular for sapphire-single crystal culture, is provided.
- the crucible is made of W, Mo, Re, an alloy of these metals or a base alloy of these metals.
- An alloy composed of W, Mo and/or Re means a W-Mo alloy, a W-Re alloy, a Mo-Re alloy or a W-Mo-Re alloy, wherein the total content of Mo, W and Re is >95 atomic % Preferably, it is >98 atomic %, particularly preferably >99 atomic % or 99.5 atomic %.
- the base alloy comprises an alloy in which the proportion of each metal is greater than 90 atomic %, preferably greater than 95 atomic %, particularly preferably greater than 99 atomic %.
- Other alloying elements may, for example, be high melting point oxides such as ZrO 2 .
- At least a portion of the outer surface of the crucible (outer surface) at least partially comprises an embossing pattern having an average tread depth of between 5 and 500 ⁇ m, preferably between 10 and 300 ⁇ m, particularly preferably between 15 and 150 ⁇ m, between 20 and 100 ⁇ m or between 30 and 80 ⁇ m.
- the embossed pattern refers to a pattern which is uniformly formed, for example, in the form of a groove, or formed as a non-uniform structure, for example, in the form of a porous layer.
- the outer side surface of the crucible is, for example, at least partially provided with the embossing pattern, whereby the side surface has a structured surface.
- the average tread depth was measured using a conventional profilometer. In order to determine the average tread depth, it is necessary to measure at least 5 or more measurements. If at least five recesses are placed adjacent to each other, the five adjacent recesses are selected to determine the average pattern depth.
- the embossing pattern is produced, for example, by pressing, for example turning, milling, grinding and/or drilling, after pressing and sintering the body.
- the embossing pattern may be generated by a non-cutting process such as laser engraving or EDM (electrical discharge machining).
- the embossing pattern can be formed by a suitable method, such as turning, in the green state of the powder compact, that is, before sintering. This embossing pattern is maintained throughout the subsequent sintering process.
- the embossing pattern can be formed by a coating.
- a porous layer is preferably used for this, and the porous layer is formed by cutting a mortar (a mixture of a powder and a binder). For this, the solidification of the coating can be carried out by a separate heat treatment. If the coating is applied to the compact, solidification can also take place during the sintering process.
- the crucible In the manufacture of a single crystal, the crucible is usually heated externally by means of thermal radiation, which is generated by a heater placed spaced apart from the crucible.
- the above-described surface having a embossed pattern has, for example, higher irradiance and absorbance than a smooth, such as a polished or polished surface. Due to the structured outer surface, the crucible has a high degree of irradiance/absorbance. For example, when the heating power is lowered, the heat is dissipated faster by the crucible and the generated heat is absorbed by the crucible faster when the heating power is increased.
- the enthalpy reacts to changes in temperature and the power of the heater, allowing precise adjustment of the temperature of the melt in the crucible Degree and temperature gradient. In this way, stable, reproducible growth results and equally good quality of the single crystals produced by the ruthenium can be obtained.
- the outer surface of the side wall of the crucible is at least partially provided with a relief pattern.
- the outer bottom surface of the crucible may additionally be provided with embossing so that all exposed outer surfaces of the crucible have improved irradiance/absorption which faces the heating device during the manufacture of the single crystal.
- the relief pattern (in cross section) is at least partially formed as a depression surrounding the crucible or a plurality of depressions surrounding the crucible.
- a groove, groove in the form of a thread which can be produced in a simple manner by turning, is provided.
- a plurality of adjacently disposed depressions may be provided, such as a plurality of adjacently disposed grooves or grooves.
- the embossing pattern may be provided with a plurality of recesses in which a plurality of adjacently disposed recesses are formed; for example a plurality of adjacently disposed blinds formed by milling or drilling a hole, or a plurality of pores formed by a porous layer.
- the (all) embossing pattern and structure of the outer surface of the crucible are preferably formed by the combination of the above-described depressed portions.
- depressions are preferably dispersed uniformly or uniformly on the outer surface to achieve uniform irradiance/absorbance over the entire outer surface.
- the single or plurality of depressions preferably have, at least in sections, a section of a circular, trapezoidal, wedge-shaped and/or rectangular shape.
- the individual or plurality of recesses at least partially have a circular section which has a radius of 0.2 to 10 mm, preferably 0.5 to 8 mm, further preferably 0.6 to 5 mm, particularly preferably 0.8 to 2 mm.
- the embossing and the recesses can be produced by means of a tool, for example a blade, in a corresponding blade geometry, for which the depth of the pattern can be easily adjusted by the depth of cut.
- Suitable materials for tools for processing extremely hard and brittle crucible materials are, for example, polycrystalline diamond (PKD) or cubic crystal boron nitride (CBN).
- the average spacing between adjacent depressions in the axial direction of the crucible is from 0.2 to 10 mm, preferably from 0.6 to 5 mm, further preferably from 0.7 to 2 mm, particularly preferably from 0.8 to 1.5 mm.
- the average spacing is determined by measuring at least 5 measurements.
- the average pitch is determined by forming an average value of the respective pitches.
- the distance can be easily adjusted, for example, by turning in a corresponding manner in the axial direction of the cymbal (in millimeters per revolution). From this The (thread-shaped) embossing pattern as described above is fabricated on the entire outer surface and side of the crucible in one working process and without removing the tool.
- the inner surface of the crucible directed towards the inner volume at least partially has a (radial and axial) average roughness Ra of 0.1 to 1.6 ⁇ m, preferably 0.2 to 0.4 ⁇ m.
- the average roughness of the radial direction is measured radially along the longitudinal axis of the crucible and the axis of symmetry along the inner surface and the average roughness of the axial direction is measured along the inner surface in the direction of the longitudinal axis of the crucible.
- the inner surface is polished and/or polished, in particular the inner surface is polished and/or polished axially. All internal surfaces preferably have the aforementioned Ra value.
- the interaction between the inner surface of the crucible and the melt is minimized by a low average roughness Ra and a very smooth surface, thereby obtaining stable and reproducible growth results.
- a low average roughness Ra since there is a low surface tension on a smooth surface, only a small amount of tension is generated in the produced single crystal.
- the smooth inner surface also reduces the degree of erosion of the crucible during the single crystal manufacturing process, thereby increasing the service life of the crucible and the crucible can be used for single crystal cultivation multiple times.
- the inner surface of the crucible has a low degree of irradiance due to a low average roughness Ra.
- the crucible body is composed of W, Mo, Re, an alloy of these metals or a base alloy of these metals, which is formed by pressing or alternatively by pressing and sintering or alternatively by pressing, sintering and forming (for example Formed by pressure rolls) or alternatively by coating methods (for example CVD, powder jet), the total content of Mo, W and Re is >95 atomic %, preferably >98 atomic %, particularly preferably >99 Atomic number % or 99.5 atomic %.
- the base alloy includes an alloy in which the proportion of various elements or metals is greater than 90 atomic %, preferably greater than 95 atomic %, It is particularly preferably more than 99 atomic%. Other alloying elements may, for example, be high melting point oxides.
- the outer surface of the crucible body is then processed such that at least a portion of the outer surface at least partially comprises a relief pattern having a pattern depth of between 5 and 500 ⁇ m, preferably between 10 and 300 ⁇ m, particularly preferably between 15 and 150 ⁇ m, between 20 and 100 ⁇ m or between 30 and 80 ⁇ m. .
- the outer surface of the body is machined, for example by means of a cutting process, such as turning, milling and/or drilling.
- the inner surface of the crucible or crucible body directed towards the inner cavity such that the inner surface has a (radial and axial) average roughness Ra of 0.1 to 1.6 ⁇ m, preferably 0.2 to 0.3 ⁇ m.
- the inner surface is processed, for example, by axially polishing and/or polishing.
- Figure 1 shows a schematic, not to scale representation, of the crucible during the preparation of the single crystal.
- Figures 2a-b show schematic, not to scale representations of the outer and inner surfaces of the crucible of Figure 1.
- Figure 3 shows the results of the contour measurement.
- Figure 1 shows a schematic, not to scale, cross-sectional view of the crucible 2 during the preparation of the single crystal.
- the crucible 2 is made of W, Mo, Re or an alloy of these metals to withstand the high temperatures in the process of preparing a single crystal, such as a sapphire single crystal.
- the ⁇ 2 shown schematically is rotationally symmetrical about the yoke axis A, for example cylindrical or substantially cylindrical.
- the crucible 2 can be formed into a conical shape, thereby making it easy to take out the single crystal 8 produced in the crucible.
- the outer dimensions of the crucible 2 can be matched to the desired size of the single crystal to be produced.
- a sapphire single crystal having a weight of 30 kg, 60 kg, 90 kg, 120 kg or more can be prepared with the corresponding crucible 2.
- the crucible 2 may have, for example, a diameter of 500 mm and a height of approximately 600 mm.
- the sidewall heaters 10, 10' and the bottom heater 10" require heating of the crucible 2 by means of thermal radiation.
- the seed crystal 12 is roughly shown above the crucible 2 from which the single crystal growth begins.
- the seed crystal 12 remains in the seed holder 14 and slowly pulls the seed crystal from the melt in the crucible 2 (Al 2 O 3 for the sapphire single crystal) to prepare a single crystal. It is then shown on the seed crystal 12.
- Single crystal 8 which has been pulled out of the melt in the lower region of the crucible 2.
- a Nikon-Carero bubble method or a Czochralski method can be used, in which the crystal is crystallized
- the species 12 is immersed into the melt from above.
- the seed crystals can be placed in the bottom region of the crucible 2 and controllably reverse cooled to achieve slow solidification from the melt.
- the outer surface 4 and the side surface of the crucible 2 have embossed patterns, and Fig. 2a enlarges and exemplarily shows the embossing pattern.
- the embossing pattern or surface structure has an average pattern depth a of between 5 and 500 ⁇ m, 10 to 300 ⁇ m, 15 to 150 ⁇ m, 20 to 100 ⁇ m or 30 to 80 ⁇ m.
- the depth of the pattern is measured by a profilometer, for example a Mitutoyo Formtracer SV-C3200.
- the starting point of the recess constitutes two raised portions and a recessed portion surrounded by the raised portion. At least 5 or more measurement results were measured to determine the average tread depth a. As shown in Fig.
- the embossed pattern may be composed of a plurality of depressed portions disposed adjacent to each other and having the above-described pattern depth. If at least 5 depressions are placed adjacent to each other, the five adjacent depressions are selected to determine the average pattern depth Degree a.
- the results of the exemplary profile measurements are given in Figure 3. For this purpose, an average of at least 5 elevations adjacent to one another is calculated and the average tread depth is thus determined.
- the embossing or structure of the outer surface 4 can be easily produced, for example, by turning or milling.
- the embossing in the form of a thread can be produced in a simple and rapid manner during the turning process by means of a correspondingly formed tool, a correspondingly adjusted depth of cut and a correspondingly adjusted feed (millimeters per revolution).
- the recesses have, for example, a conical, wedge-shaped, trapezoidal, circular or rectangular cross section, for example, the cross-sectional shape can be determined simply by selecting the respective tool and the blade shape of the tool.
- the embossing in the form of a thread comprises a recess having a circular section having an average radius of 0.2 to 10 mm, 0.6 to 5 mm or 0.8 to 2 mm. In order to determine the average radius, at least 5 or more measurements are measured.
- the average spacing between adjacent recesses in the axial direction of the crucible 2 may be 0.2 to 10 mm, 0.5 to 8 mm, 0.6 to 5 mm, 0.7 to 2 mm, or 0.8 to 1.5 mm.
- the feed is adjusted to 0.2 to 10 mm per revolution, 0.5 to 8 mm per revolution, 0.6 to 5 mm per revolution or 0.7 to 2 mm per revolution. In order to determine the average spacing, at least 5 measurements are also selected.
- Suitable materials for processing extremely hard and brittle tantalum materials are, for example, tools having a blade made of polycrystalline diamond (PKD) or cubic crystal boron nitride (CBN).
- PLD polycrystalline diamond
- CBN cubic crystal boron nitride
- the inner surface 6 of the crucible 2 is very smooth compared to the outer surface 4, whereby the inner surface 6 at least partially has a (radial and axial) average roughness Ra of 0.1 to 1.6 ⁇ m, 0.1 to 1 ⁇ m or 0.2 to 0.3 ⁇ m.
- the inner surface 6 is axially polished.
- the inner surface 6 can be polished in the axial direction of the crucible 2 to form a particularly smooth surface.
- the outer surface of the crucible 2 has a high degree of irradiance and absorbance compared to a smooth surface by the embossing pattern.
- a comparison of the radiated or absorbed thermal radiation of the rough outer surface 4 of the crucible with the smooth inner surface 6 is qualitatively illustrated by means of arrows in Figures 2a-b. Due to the high radiance/absorbance of the outer surface 4, the heat is dissipated faster by the crucible 2 when the heating power is lowered and the generated heat is absorbed by the crucible 2 faster when the heating power is increased.
- the ⁇ 2 reacts to the temperature change and the power variation of the heaters 10, 10' relatively quickly, so that the temperature and temperature gradient of the single crystal 8 in ⁇ 2 can be accurately adjusted. In this way, stable, reproducible growth can be obtained The result is as well as the quality of the single crystal 8 produced by ⁇ 2.
- the very smooth inner surface 6 has only low irradiance and absorbance compared to the rough outer surface 4. Therefore, in the upper region of the crucible 2, only a small amount of heat is radiated through the inner surface 6 onto the single crystal 8, in which the single crystal 8 has been formed and the single crystal does not contact the inner surface 4 of the crucible 2. In the lower region of the melt contact inner surface 6 or the crucible wall of the crucible 2, heat is effectively transferred from the crucible 2 into the melt by heat conduction. Thereby, the temperature gradient in the generated single crystal 8 can be precisely controlled. This is particularly advantageous when preparing a single crystal by means of the Niken-Carlofoss method, in which the temperature and temperature gradient of the single crystal and the melt need to be precisely controlled.
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Abstract
Description
Claims (13)
- 一种用于晶体培养、特别是单晶培养的坩埚,所述坩埚由W、Mo、Re、这些金属的合金或基础合金构成,其特征在于,坩埚(2)的外表面(4)至少局部地包含具有5至500μm之间的平均花纹深度(a)的凹凸花纹。
- 根据权利要求1所述的坩埚,其特征在于,所述凹凸花纹具有10至300μm之间的平均花纹深度(a)。
- 根据权利要求1或2所述的坩埚,其特征在于,所述凹凸花纹具有一个或多个凹陷部,所述凹陷部至少局部地在坩埚(2)的外表面(4)上均匀相间地安置。
- 根据前述权利要求中任意一项所述的坩埚,其特征在于,所述凹凸花纹形成为环绕坩埚(2)的凹陷部、特别是沟纹或沟槽,或者形成多个环绕坩埚(2)的凹陷部。
- 根据前述权利要求中任意一项所述的坩埚,其特征在于,所述凹凸花纹具有一个或多个含有节圆形、梯形、楔形、圆锥形和/或矩形截面的凹陷部。
- 根据前述权利要求中任意一项所述的坩埚,其特征在于,所述凹凸花纹至少局部地具有一个或多个含有半径为0.2至10mm的节圆形截面的凹陷部。
- 根据前述权利要求中任意一项所述的坩埚,其特征在于,所述凹凸花纹具有一个或多个至少局部地含有半径为0.8至6mm的节圆形截面的凹陷部。
- 根据前述权利要求中任意一项所述的坩埚,其特征在于,所述凹凸花纹具有多个凹陷部并且在坩埚(2)的轴向方向上相邻凹陷部之间的平均间距(b)至少局部地在0.2至10mm之间。
- 根据前述权利要求中任意一项所述的坩埚,其特征在于,所述凹凸花纹具有多个凹陷部并且在坩埚(2)的轴向方向上相邻凹陷部之间的间距(b)至少局部地在0.8至6mm之间。
- 根据前述权利要求中任意一项所述的坩埚,其特征在于,在制备单晶的过程中坩埚(2)的、暴露的外表面(4)、特别是坩埚(2)的侧壁具有凹凸花纹。
- 根据前述权利要求中任意一项所述的坩埚,其特征在于,坩埚(2)的、指向内部容腔的内表面(6)至少局部地具有0.1至1.6μm之间的平均粗糙度Ra,特别是经过轴向上的磨光和/或轴向上的抛光。
- 一种用于晶体培养的坩埚、特别是根据前述权利要求中任意一项所述的坩埚(2)的制造方法,所述方法具有以下步骤:提供经压制形成的、经压制和烧结形成的、经压制、烧结和成型形成的或者通过涂层方法形成的坩埚主体,其特征在于加工或涂覆坩埚主体的外表面(4),从而外表面(4)的至少一部分具有至少局部地包含5至500μm平均花纹深度的凹凸花纹。
- 根据权利要求12所述的方法,所述方法具有以下步骤:加工坩埚(2)的、指向内部容腔的内表面(6),从而所述内表面(6)至少局部地具有0.1至1.6μm的平均粗糙度Ra。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
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US15/323,246 US20170191188A1 (en) | 2014-07-02 | 2015-07-01 | Crucible for growing crystals |
JP2016576028A JP2017521345A (ja) | 2014-07-02 | 2015-07-01 | 結晶を育成するための坩堝 |
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CN201410312751.7 | 2014-07-02 | ||
CN201410312751.7A CN105220223A (zh) | 2014-07-02 | 2014-07-02 | 用于晶体培养的坩埚 |
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CN108421824A (zh) * | 2018-03-12 | 2018-08-21 | 陕西三毅有岩材料科技有限公司 | 铱板及其加工方法、铱坩埚 |
CN108580549B (zh) * | 2018-03-14 | 2020-06-09 | 陕西三毅有岩材料科技有限公司 | 一种铱板及其加工方法和制备的坩埚 |
JP7155968B2 (ja) * | 2018-12-04 | 2022-10-19 | Tdk株式会社 | 単結晶育成用ルツボ及び単結晶製造方法 |
CN111286785A (zh) * | 2018-12-07 | 2020-06-16 | 昭和电工株式会社 | 晶体生长装置以及坩埚 |
EP3702483B1 (de) | 2019-02-26 | 2022-05-11 | Heraeus Deutschland GmbH & Co. KG | Formkörper aus einer molybdän-aluminium-titan-legierung |
CN111778557A (zh) * | 2020-06-19 | 2020-10-16 | 山东新升光电科技有限责任公司 | 一种制备蓝宝石单晶用坩埚 |
CN111703698B (zh) * | 2020-06-28 | 2021-12-21 | 株洲铼因材料技术有限公司 | 装料容器及其制备方法以及使用其制备高纯铼的方法 |
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JP2014031291A (ja) * | 2012-08-02 | 2014-02-20 | Sharp Corp | 単結晶サファイアインゴット及び坩堝 |
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CN101024898A (zh) * | 2007-01-17 | 2007-08-29 | 上海晶生实业有限公司 | 蓝宝石晶体多坩埚熔体生长技术 |
CN202390577U (zh) * | 2011-11-07 | 2012-08-22 | 周兵 | 单晶硅生长炉的石墨坩埚 |
CN103088419A (zh) * | 2011-11-07 | 2013-05-08 | 周兵 | 单晶硅生长炉的石墨坩埚 |
CN102560631A (zh) * | 2012-01-20 | 2012-07-11 | 上海中电振华晶体技术有限公司 | 蓝宝石晶体的生长方法及设备 |
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CN103526280A (zh) * | 2013-10-12 | 2014-01-22 | 南通路博石英材料有限公司 | 一种内表面具有凹槽拉晶用石英玻璃坩埚的制备方法 |
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US20170191188A1 (en) | 2017-07-06 |
JP2017521345A (ja) | 2017-08-03 |
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