WO2015155825A1 - リニアアクチュエータ - Google Patents
リニアアクチュエータ Download PDFInfo
- Publication number
- WO2015155825A1 WO2015155825A1 PCT/JP2014/060128 JP2014060128W WO2015155825A1 WO 2015155825 A1 WO2015155825 A1 WO 2015155825A1 JP 2014060128 W JP2014060128 W JP 2014060128W WO 2015155825 A1 WO2015155825 A1 WO 2015155825A1
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- WIPO (PCT)
- Prior art keywords
- light
- frame
- mover
- linear actuator
- light emitting
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
- H02K41/02—Linear motors; Sectional motors
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K1/00—Details of the magnetic circuit
- H02K1/06—Details of the magnetic circuit characterised by the shape, form or construction
- H02K1/12—Stationary parts of the magnetic circuit
- H02K1/17—Stator cores with permanent magnets
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K1/00—Details of the magnetic circuit
- H02K1/06—Details of the magnetic circuit characterised by the shape, form or construction
- H02K1/34—Reciprocating, oscillating or vibrating parts of the magnetic circuit
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K11/00—Structural association of dynamo-electric machines with electric components or with devices for shielding, monitoring or protection
- H02K11/20—Structural association of dynamo-electric machines with electric components or with devices for shielding, monitoring or protection for measuring, monitoring, testing, protecting or switching
- H02K11/21—Devices for sensing speed or position, or actuated thereby
- H02K11/22—Optical devices
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
- H02K41/02—Linear motors; Sectional motors
- H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors
- H02K41/031—Synchronous motors; Motors moving step by step; Reluctance motors of the permanent magnet type
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K1/00—Details of the magnetic circuit
- H02K1/06—Details of the magnetic circuit characterised by the shape, form or construction
- H02K1/22—Rotating parts of the magnetic circuit
- H02K1/24—Rotor cores with salient poles ; Variable reluctance rotors
Definitions
- the present invention relates to a linear actuator that reciprocates along a straight path using a voice coil motor.
- Linear actuators that use a voice coil motor to move a lens or the like with good responsiveness and perform focusing are widely used.
- the movable element is supported in a linearly movable state by a linear guide or the like, and a load attaching portion for attaching a lens to be driven is fixed to the movable element.
- a magnetically driven linear actuator is required to linearly move a minute range of a load such as a lens with high responsiveness and high positioning accuracy.
- the present inventors have proposed a magnetically driven linear actuator for the purpose of improving positioning accuracy and durability.
- a load mounting part, a linear guide, and a sensor part for detecting the position of the mover are arranged inside a rectangular cylindrical coil frame so that the center of gravity of the mover and the support center of the linear guide coincide with each other. I have to. Further, the generation center of magnetic force (thrust) acting on the mover is made to coincide with the center of gravity of the mover. As a result, the moment applied to the linear guide portion can be reduced, and the mover can be positioned with high responsiveness and high positioning accuracy. Further, since the moment acting on the linear guide supporting the mover is reduced, the durability of the linear actuator can be improved.
- the linear guide is sandwiched, the load attachment portion is fixed to the frame portion on one side, and the sensor portion is fixed to the frame portion on the other side.
- the load mounting member and the sensor unit are located at positions separated from each other in a direction orthogonal to the moving direction of the mover.
- the load mounting portion does not move due to the influence of the sliding resistance of the linear guide, etc., even at the time of a minute input response from a substantially stationary state.
- the problem of the present invention is to perform positioning operation by high acceleration drive with high responsiveness and high accuracy by suppressing the increase in the weight of the mover and increasing the rigidity of the mover. It is to provide a linear actuator that can be used.
- the linear actuator of the present invention is A cylindrical coil frame, and a cylindrical mover provided with a drive coil wound around the coil frame;
- a stator including a magnet for generating a thrust force that moves the mover along a linear path parallel to the central axis between the drive coil through which an excitation current flows;
- a linear motion bearing that supports the mover movably along the linear path inside the coil frame;
- the portions facing each other across the linear motion bearing in the coil frame are defined as a first frame portion and a second frame portion, a load attachment portion attached to the first frame portion;
- a movable side detector attached to the second frame portion, and a position detector for detecting a moving position of the movable element on the linear path;
- a beam portion spanned between the first frame portion or the load mounting portion and the second frame portion or the movable side detection portion; It is characterized by having.
- a beam portion is bridged between the load mounting portion and the movable side detection portion which are located apart from each other with the linear motion bearing interposed therebetween. Therefore, it is possible to prevent or suppress the displacement of the load attachment portion and the movable side detection portion before and after the movement direction when the mover moves. As a result, it is possible to prevent or suppress a decrease in positioning control responsiveness and positioning accuracy during high acceleration driving, minute driving from a stationary state, and the like.
- the beam portion a member separate from the constituent members of the load attachment portion and the movable side detection portion is used, and this member is attached to both the constituent member of the load attachment portion and the constituent member of the movable side detection portion. It can be fixed using metal fittings, adhesives, and other fixtures. In the case of using a metal fitting such as a screw, it may not be possible to use a heavy one that exerts a large fastening force for weight reduction.
- the contact portion that can be contacted from the moving direction of the mover is provided between the beam portion and the first frame portion or the load mounting member, and between the beam portion and the second frame portion or the movable side detection portion. It should be provided in between.
- the beam portion is a plate-like member having a predetermined width in the moving direction so that the beam portion is lightweight and has high rigidity in the moving direction of the mover.
- the support center of the movable element by the linear motion bearing and the movable element acting on the movable element It is desirable that the center of thrust generation coincides with the center of gravity of the mover.
- the movable element, the load attaching part, the movable side bearing part attached to the movable element in the linear motion bearing, the movable side detecting part, and the beam part include the central axis. It is desirable that the structure is symmetrical with respect to a plane extending toward the first and second frame portions.
- the movable side detection unit is attached to the outer peripheral surface of the second frame portion, and the fixed side detection unit attached to the stator side of the position detection unit is the movable unit. It is desirable that the side detection portion is opposed to the second frame portion from the opposite side, and the linear bearing is located between the load mounting portion and the second frame portion.
- the position detector By disposing the position detector on the outside of the cylindrical coil frame, the interval between the first and second frame portions in the coil frame can be reduced, and the coil frame can be reduced in weight and rigidity. Moreover, since the beam part spanned between the 1st, 2nd frame parts can be shortened, the weight reduction and high rigidity can be achieved. Thereby, the weight increase of the needle
- the position detection unit when the position detection unit is arranged outside the cylindrical coil frame, the installation space restriction is eased compared to the case where the position detection unit is arranged inside, and the degree of freedom in design is increased. Therefore, it is advantageous for nozzle reduction and cost reduction of the detection output of the position detection unit.
- the position detection unit includes a light emitting unit and a light receiving unit that are arranged to face each other, and a light blocking unit that prevents disturbance light from entering the light receiving unit, and the light emitting unit is the movable side detection unit
- the light receiving unit is the fixed side detection unit
- the light blocking unit includes a light emitting side light blocking unit disposed on the light emitting unit side, and a light receiving side light blocking unit disposed on the light receiving unit side
- the light-shielding portion includes a light-emitting side protruding portion that protrudes toward the light-receiving-side light-shielding portion in a state of surrounding the light-emitting surface of the light-emitting element of the light-emitting portion, and the light-receiving-side light-shielding portion receives light from the light-receiving element of the light-receiving portion It is preferable that a light receiving side protruding portion that protrudes toward the light
- the irradiation light may enter the position detection part along the beam part.
- the light-emitting side light-shielding part and the light-receiving-side light shielding part so as to enter between the light emitting part and the light receiving part, it is possible to reliably prevent such disturbance light from entering the light receiving surface of the light receiving part. . Thereby, it can avoid or suppress that the s / n ratio of a position detection part falls because of having provided the beam part.
- FIG. 1 is an external perspective view showing a linear actuator according to the present embodiment, as viewed from the front lower side.
- 2A, 2B, and 2C are a longitudinal sectional view, a transverse sectional view, and a bottom view of the linear actuator
- FIG. 3A is a perspective view showing a mover assembly.
- the direction of the arrow X is the width direction
- the direction of the arrow Y perpendicular to the direction is the front-rear direction
- the direction of the arrow Z perpendicular to the arrows X, Y is the up-down direction.
- the linear actuator 1 is composed of a voice coil motor provided with a stator 2 and a mover 3, and basically has a symmetrical structure.
- the stator 2 includes a pair of outer yokes 4L and 4R, a pair of permanent magnets 5L and 5R, and a pair of inner yokes 6L and 6R.
- the outer yokes 4L and 4R are rectangular plates having a constant thickness extending in the front-rear direction Y, and the front and rear end portions thereof are projecting portions 41 and 42 projecting inwardly at right angles, and in the vertical direction Z therebetween.
- a recess 43 having a constant depth extending is formed. Rectangular plate-shaped permanent magnets 5L and 5R are attached in the recess 43, respectively.
- the inner yokes 6L and 6R are fixed to the outer yokes 4L and 4R in a state where the front and rear outer end surfaces are in close contact with the inner end surfaces of the front and rear protrusions 41 and 42 of the outer yokes 4L and 4R.
- the depth of the recess 43 is deeper than the thickness of the permanent magnets 5L and 5R. Therefore, a gap 7L extending in the front-rear direction with a constant width is formed between the permanent magnet 5L and the inner yoke 6L facing it. Yes.
- a gap 7R extending in the front-rear direction with a constant width is also formed between the permanent magnet 5R and the inner yoke 6R facing it.
- the mover 3 is disposed between the left and right permanent magnets 5L and 5R of the stator 2, and includes a rectangular cylindrical coil frame 11 and a drive coil 12 wound in the circumferential direction along the outer peripheral surface. ing.
- Inner yokes 6L and 6R are located on the inner left and right sides of the coil frame 11, and the left side portion 11L and the right side portion 11R extending in the vertical direction Z of the coil frame 11 are between the permanent magnets 5L and 5R and the inner yokes 6L and 6R.
- the gaps 7L and 7R are passed through.
- the portion of the drive coil 12 wound around the left side portion 11L and the right side portion 11R faces the left and right permanent magnets 5L and 5R with a certain gap.
- the upper side portion 11U and the lower side portion 11B extending in the width direction X of the coil frame 11 are arranged along the upper side and the lower side of the inner yokes 6L and 6R.
- the load attaching portion 14 is attached to the inner peripheral surface (the surface facing upward) of the lower side portion 11B (first frame portion) of the coil frame 11.
- the load attachment portion 14 is, for example, a lens holder, and is formed with a circular opening portion 14a that is a lens attachment portion, and an optical path 14b that extends in a direction parallel to the central axis 3a of the mover 3.
- the linear motion bearing portion 15 is disposed on the upper side of the load attachment portion 14, defines a straight path of the mover 3 parallel to the central axis 3a, and guides the mover 3 along the straight path.
- the linear motion bearing portion 15 includes a guide rail 15a that defines a linear path of the mover 3, and a slider 15b that can slide along the guide rail 15a.
- the guide rail 15a is fixed to the lower surface of the horizontal block 16, and extends horizontally in the front-rear direction.
- the horizontal block 16 is disposed inside the coil frame 11 and is horizontally mounted between the left and right inner yokes 6L and 6R on the stator 2 side.
- the slider 15b is fixed to a horizontal upper surface formed on the load attaching portion 14 on the movable element 3 side by a bolt or the like.
- a position detection unit 20 for detecting the moving position of the mover 3 is disposed above the drive coil 12.
- the position detection unit 20 includes a light emitting unit 22 including an LED 21 and a light receiving unit 24 including a semiconductor position detection element (PSD) 23.
- the light emitting unit 22 is a movable side detection unit attached to the outer peripheral surface (surface facing upward) of the upper side portion 11U of the coil frame 11.
- the light receiving unit 24 is a fixed side detection unit, is opposed to the light emitting unit 22 from above, and is attached to the inner lower surface of the light shielding sensor cover 25 that covers the upper end portion of the linear actuator 1.
- a wiring board 26 for external connection is attached to the upper surface of the light shielding sensor cover 25. The wiring board 26 is wired to the light emitting unit 22 and the light receiving unit 24 and has a connector 27 for external connection.
- the upper and lower pair of fixing plate portions 28a are respectively fixed to the left and right portions of the upper side portion 11U of the coil frame 11 by screws 29a.
- the light emitting portion 22 is attached to the upper side portion 11U.
- the pair of front and rear fixing plate portions 28b on the lower side are respectively fixed to the rear end portions of the left and right side surfaces of the load mounting portion 14 with screws 29b.
- the left and right beam portions 28L and 28R are connected.
- the beam portions 28L and 28R are plate-like members, and the rigidity in the moving direction (front-rear direction Y) of the mover 3 is higher than that in the width direction X orthogonal thereto.
- the light emitting portion 22 and the load mounting portion 14 that are separated in the vertical direction Z in the direction orthogonal to the moving direction of the mover 3 are connected by the left and right beam portions 28L and 28R. . Therefore, the rigidity in the moving direction of the rectangular cylindrical movable element 3 can be increased, and the occurrence of a behavioral deviation between the load attaching part 14 and the light emitting part 22 when the movable element 3 is moved can be prevented or suppressed. . As a result, it is possible to accurately detect the position of the load mounting portion 14 (and hence the load such as a lens mounted thereon) obtained from the output signal of the position detection portion 20. Therefore, the responsiveness and positioning accuracy during high acceleration driving can be improved.
- members separate from the load attachment portion 14 and the light emitting portion 22 are used as the beam portions 28L and 28R, and screws 29a and 29b are provided on both the load attachment portion 14 and the light emission portion 22. It is fixed using metal fittings, adhesives, and other fixtures. When metal fittings such as screws 29a and 29b are used, it is sometimes impossible to use a heavy one that exhibits a large fastening force for weight reduction. In this case, a contact portion that can be contacted from the moving direction of the mover 3 may be formed between the beam portions 28L and 28R and the lower side portion 11B or the load mounting portion 14 of the coil frame 11. .
- the beam portions 28L and 28R may be formed between the beam portions 28L and 28R and the upper side portion 11U or the light emitting portion 22 of the coil frame 11.
- the ends of the upper and lower fixing plate portions 28a, 28b in the beam portions 28L, 28R are bent at right angles to the inside in the width direction X, and the contact portions 28c, 28d can be formed.
- FIG. 3B is a perspective view showing another configuration example of the movable side assembly including the movable element 3.
- the coil frame 11 and the beam portions 28L and 28R are formed from a single component 30.
- a fixture such as a screw 29a for fixing the beam portions 28L and 28R to the light emitting portion 22 side becomes unnecessary.
- the coil frame 11, the load mounting portion 14, and the beam portions 28L and 28R can be a single component in which these portions are integrally formed.
- the present inventors conducted a verification experiment on the positioning accuracy of the linear actuator 1 including the beam portions 28L and 28R.
- Two types of linear actuators for comparison were used.
- One is a linear actuator having the same structure as the linear actuator 1 except that no beam is provided, and the other is a coil frame having a thicker wall than the coil frame 11 and no beam.
- the linear actuator has the same structure as that of the linear actuator 1 except that is used. It was confirmed that the linear actuator 1 of the present embodiment did not cause a position shift and the configuration of the present invention was effective in a high acceleration drive in which a position shift occurred in positioning control in both types of linear actuators. .
- the support center of the mover 3 by the linear motion bearing portion 14, and The generation center of the thrust acting on the mover 3 is made to coincide with the center of gravity of the mover 3.
- the movable element 3, the load mounting portion 14, the slider 15b of the linear motion bearing portion 15, the light emitting portion 22, and the beam portions 28L and 28R are connected to the central axis 3a.
- the structure is symmetrical with respect to a plane P extending in the up-down direction Z.
- the linear actuator 1 of this example it is possible to prevent or suppress an excessive stress from acting on the linear motion bearing portion 15 and to reduce the sliding resistance of the mover 3 guided by the linear motion bearing portion 15. As a result, the mover 3 can be moved with good responsiveness and accurately positioned. Moreover, since excessive stress does not act on parts such as the linear motion bearing portion 15, the durability of the linear actuator 1 is also improved.
- the beam portions 28L and 28R are added to increase the rigidity of the mover 3, so that the weight of the mover 3 is increased.
- the position detection unit 20 is arranged outside the rectangular cylindrical movable element 3. Compared with the case where the position detection unit 20 is disposed inside the coil frame 11, the distance between the upper side portion 11 ⁇ / b> U and the lower side portion 11 ⁇ / b> B in the coil frame 11 can be narrowed, and the rigidity of the mover 3 can be increased.
- the beam portions 28L and 28R spanned between the upper side portion 11U and the lower side portion 11B can be shortened, and the weight and rigidity thereof can be increased.
- the rigidity of the whole movable element 3 can be increased, and an increase in the weight of the movable element 3 due to the arrangement of the beam portions 28L and 28R can be suppressed. Therefore, it is advantageous for improving responsiveness and positioning accuracy during high acceleration driving.
- FIG. 4 is an enlarged partial sectional view showing a portion of the position detection unit 20 of the linear actuator 1.
- the load attachment portion 14 of the linear actuator 1 is a lens holder on which a lens that transmits irradiation light such as laser light is mounted.
- a part of the irradiation light passing through the optical path 14b penetrating the load attachment portion 14 in the front-rear direction is detected on the upper side along the beam portions 28L and 28R extending in the vertical direction on both sides thereof.
- the position detection unit 20 is provided with the following light shielding structure.
- the position detection unit 20 includes a light emitting unit 22 and a light receiving unit 24 that are arranged to face each other in the vertical direction Z, and a light receiving surface of the semiconductor position detecting element 23 that is a light receiving element of the light receiving unit 24. And a light-shielding portion 31 that prevents the intrusion of ambient light.
- the light shielding unit 31 includes a light emitting side light shielding plate 32 disposed on the light emitting unit 22 side and a light receiving side light shielding plate 33 disposed on the light receiving unit 24 side.
- the light emitting side light shielding plate 32 includes a light emitting side protruding portion 32 a that protrudes toward the light receiving side light shielding plate 33 in a state of surrounding the light emitting surface of the LED 21 that is a light emitting element of the light emitting portion 22.
- a slit extending in the width direction is formed at the upper end of the light emitting side protruding portion 32a, and the light emitted from the LED 21 is irradiated to the light receiving portion 24 through this slit.
- the light-receiving side light-shielding plate 33 includes an opening 33a where the semiconductor position detecting element 23, which is a light-receiving element of the light-receiving unit 24, and a light-receiving-side protrusion that protrudes toward the light-emitting side light-shielding plate 32 in a state of surrounding the opening 33a. Part 33b.
- the tip end portion of the light emitting side protruding portion 32a enters the coaxial state inside the light receiving side protruding portion 33b.
- the light-emitting side light-shielding plate 32 and the light-receiving-side light-shielding plate 33 are arranged so as to face each other between the light emitting unit 22 and the light receiving unit 24 at a narrow interval. Therefore, it is possible to reliably prevent disturbance light from entering the light receiving surface of the light receiving unit 24 along the surfaces of the beam portions 28L and 28R on both sides. Thereby, it can avoid or suppress that the s / n ratio of the position detection part 20 falls by having provided the beam parts 28L and 28R.
- a cylindrical movable element other than a rectangular shape can also be used.
- a cylindrical mover can be used.
- the load attaching portion 14 is an example of a lens holder, but it goes without saying that the linear actuator of the present invention can be used to reciprocate a member other than the lens linearly.
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Abstract
Description
筒状のコイルフレーム、および、当該コイルフレームに巻き付けられた駆動コイルを備えた筒状の可動子と、
励磁電流が流れる前記駆動コイルとの間に、前記可動子をその中心軸線に平行な直線経路に沿って移動させる推力を発生させる磁石を備えた固定子と、
前記コイルフレームの内側において、前記可動子を、前記直線経路に沿って移動可能に支持する直動軸受けと、
前記コイルフレームにおける前記直動軸受けを挟み相互に対峙する部分を、第1フレーム部分および第2フレーム部分とすると、前記第1フレーム部分に取り付けた負荷取付け部と、
前記第2フレーム部分に取り付けた可動側検出部を備え、前記可動子の前記直線経路上の移動位置を検出する位置検出部と、
前記第1フレーム部分あるいは前記負荷取付け部から、前記第2フレーム部分あるいは前記可動側検出部までの間に架け渡した梁部と、
を有していることを特徴としている。
図1は本実施の形態に係るリニアアクチュエータを示す外観斜視図であり、前方の下側から見た場合のものである。図2(a)、(b)および(c)は、リニアアクチュエータの縦断面図、横断面図および底面図であり、図3(a)は可動子アセンブリを示す斜視図である。以下においては、説明の便宜上、矢印Xの方向を幅方向、これに直交する矢印Yの方向を前後方向、矢印X、Yに直交する矢印Zの方向を上下方向とする。
ここで、コイルフレーム11の下辺部分11Bに取り付けた負荷取付け部14と、コイルフレーム11の上辺部分11Uとの間には、それらの両側において上下方向Zに延びる一対の板状の梁部28L、28Rが掛け渡されている。梁部28L、28Rは左右対称な形状をしており、図3から分かるように、それらの前後の端において上下方向に突出している固定用板部分28a、28bを備え、中央部分は円形に切り取られて軽量化が図られている。
本実施の形態では、リニアアクチュエータ1の位置決めの応答性、精度を高めるために、可動子3の中心軸線3aの方向から見た場合に、直動軸受け部14による可動子3の支持中心、および、可動子3に作用する推力の発生中心を、可動子3の重心に一致させるようにしている。このために、図2(a)、(c)に示すように、可動子3、負荷取付け部14、直動軸受け部15のスライダ15b、発光部22および梁部28L、28Rが、中心軸線3aを含む上下方向Zに延びる平面Pに対して、左右対称な構造となっている。
本実施の形態では、梁部28L、28Rを追加して可動子3の剛性を高めているので、可動子3の重量が増加している。しかしながら、位置検出部20を矩形筒状の可動子3の外側に配置してある。位置検出部20をコイルフレーム11の内側に配置する場合に比べて、コイルフレーム11における上辺部分11Uと下辺部分11Bとの間隔を狭くでき、可動子3の剛性を高めることができる。また、上辺部分11Uおよび下辺部分11Bの間に架け渡される梁部28L、28Rも短くでき、その軽量化および高剛性化を図ることができる。このように、可動子3の全体の剛性を高めることができ、かつ、梁部28L、28Rを配置したことに起因する可動子3の重量増加も抑制できる。よって、高加速度駆動時等における応答性、位置決め精度の向上に有利である。
次に、図4は、リニアアクチュエータ1の位置検出部20の部分を示す拡大部分断面図である。リニアアクチュエータ1の負荷取付け部14は、レーザー光等の照射光が透過するレンズが搭載されるレンズホルダである。この場合には、負荷取付け部14を前後に貫通する光路14bを通過する照射光の一部が、その両側において、上下方向に架け渡されている梁部28L、28Rに沿って上側の位置検出部20に侵入するおそれがある。このような外乱光の侵入を防止するために、位置検出部20には次のような遮光構造が備わっている。
上記の例は、矩形筒状の可動子を用いているが、矩形以外の筒形状の可動子を用いることもできる。例えば、円筒状の可動子などを用いることもできる。
Claims (9)
- 筒状のコイルフレーム、および、当該コイルフレームに巻き付けられた駆動コイルを備えた筒状の可動子と、
励磁電流が流れる前記駆動コイルとの間に、前記可動子をその中心軸線に平行な直線経路に沿って移動させる推力を発生させる磁石を備えた固定子と、
前記コイルフレームの内側において、前記可動子を、前記直線経路に沿って移動可能に支持する直動軸受けと、
前記コイルフレームにおける前記直動軸受けを挟み相互に対峙する第1フレーム部分および第2フレーム部分と、
前記第1フレーム部分に取り付けた負荷取付け部と、
前記第2フレーム部分に取り付けた可動側検出部を備え、前記可動子の前記直線経路上の移動位置を検出する位置検出部と、
前記第1フレーム部分あるいは前記負荷取付け部から、前記第2フレーム部分あるいは前記可動側検出部までの間に架け渡した梁部と、
を有していることを特徴とするリニアアクチュエータ。 - 前記梁部を前記第1フレーム部分あるいは前記負荷取付け部に固定する第1固定具と、
前記梁部を前記第2フレーム部分あるいは前記可動側検出部に固定する第2固定具と、
前記梁部と、前記第1フレーム部分あるいは前記負荷取付け部との間に形成され、前記可動子の中心軸線の方向から当接可能な第1当接部と、
前記梁部と、前記第2フレーム部分あるいは前記可動側検出部との間に形成され、前記可動子の中心軸線の方向から当接可能な第2当接部と、
を有している請求項1に記載のリニアアクチュエータ。 - 前記コイルフレームおよび前記梁部は、これらの部位が一体形成された単一部品である請求項1に記載のリニアアクチュエータ。
- 前記コイルフレーム、前記負荷取付け部および前記梁部は、これらの部位が一体形成された単一部品である請求項1に記載のリニアアクチュエータ。
- 前記梁部は、前記可動子の中心軸線の方向に所定幅の板状部材である請求項1に記載のリニアアクチュエータ。
- 前記第2フレーム部分の外周面に、前記可動側検出部が取り付けられ、
前記位置検出部における前記固定子の側に取り付けた固定側検出部は、前記可動側検出部に対して、前記第2フレーム部分とは反対側から対峙しており、
前記負荷取付け部と前記第2フレーム部分との間に前記直動軸受けが位置している、
請求項1に記載のリニアアクチュエータ。 - 前記位置検出部は、対向配置された発光部および受光部と、前記受光部への外乱光の侵入を阻止する遮光部とを備え、
前記発光部は前記可動側検出部であり、前記受光部は前記固定側検出部であり、
前記遮光部は、前記発光部の側に配置した発光側遮光部と、前記受光部の側に配置した受光側遮光部とを備え、
前記発光側遮光部は、前記発光部の発光素子の発光面を取り囲む状態で前記受光側遮光部の側に突出している発光側突出部を備え、
前記受光側遮光部は、前記受光部の受光素子の受光面を取り囲む状態で前記発光側遮光部の側に突出している受光側突出部を備え、
前記発光側突出部の少なくとも先端部分は、前記受光側突出部の内側に入り込んでいる、
請求項6に記載のリニアアクチュエータ。 - 前記中心軸線の方向から見た場合に、
前記直動軸受けによる前記可動子の支持中心、および、前記可動子に作用する前記推力の発生中心は、前記可動子の重心に一致している請求項1に記載のリニアアクチュエータ。 - 前記可動子、前記負荷取付け部、前記直動軸受けにおける前記可動子に取り付けられている可動側軸受け部、前記可動側検出部、および、前記梁部は、前記中心軸線を含み前記第1、第2フレーム部分の方向に延びる平面に対して、左右対称な構造となっている請求項8に記載のリニアアクチュエータ。
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US15/301,971 US10256710B2 (en) | 2014-04-07 | 2014-04-07 | Linear actuator |
PCT/JP2014/060128 WO2015155825A1 (ja) | 2014-04-07 | 2014-04-07 | リニアアクチュエータ |
JP2016512503A JP6284625B2 (ja) | 2014-04-07 | 2014-04-07 | リニアアクチュエータ |
DE112014006560.9T DE112014006560T5 (de) | 2014-04-07 | 2014-04-07 | Linear-Aktuator |
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JP2004015863A (ja) * | 2002-06-04 | 2004-01-15 | Yaskawa Electric Corp | ボイスコイルモータ |
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US7378765B2 (en) * | 2004-08-09 | 2008-05-27 | Oriental Motor Co., Ltd. | Cylinder-type linear motor and moving part thereof |
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TWI658679B (zh) | 2019-05-01 |
US10256710B2 (en) | 2019-04-09 |
JP6284625B2 (ja) | 2018-02-28 |
DE112014006560T5 (de) | 2017-02-16 |
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JPWO2015155825A1 (ja) | 2017-04-13 |
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