WO2015133430A1 - 熱電変換モジュール - Google Patents
熱電変換モジュール Download PDFInfo
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- WO2015133430A1 WO2015133430A1 PCT/JP2015/056074 JP2015056074W WO2015133430A1 WO 2015133430 A1 WO2015133430 A1 WO 2015133430A1 JP 2015056074 W JP2015056074 W JP 2015056074W WO 2015133430 A1 WO2015133430 A1 WO 2015133430A1
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N10/00—Thermoelectric devices comprising a junction of dissimilar materials, i.e. devices exhibiting Seebeck or Peltier effects
- H10N10/10—Thermoelectric devices comprising a junction of dissimilar materials, i.e. devices exhibiting Seebeck or Peltier effects operating with only the Peltier or Seebeck effects
- H10N10/17—Thermoelectric devices comprising a junction of dissimilar materials, i.e. devices exhibiting Seebeck or Peltier effects operating with only the Peltier or Seebeck effects characterised by the structure or configuration of the cell or thermocouple forming the device
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N10/00—Thermoelectric devices comprising a junction of dissimilar materials, i.e. devices exhibiting Seebeck or Peltier effects
- H10N10/01—Manufacture or treatment
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N10/00—Thermoelectric devices comprising a junction of dissimilar materials, i.e. devices exhibiting Seebeck or Peltier effects
- H10N10/80—Constructional details
- H10N10/81—Structural details of the junction
- H10N10/817—Structural details of the junction the junction being non-separable, e.g. being cemented, sintered or soldered
Definitions
- the present invention relates to a thermoelectric conversion module that converts heat into electricity.
- thermoelectric conversion modules used by being attached to piping of industrial furnaces such as blast furnaces and incinerators and exhaust pipes of automobiles are used in a high temperature environment of 300 to 600 ° C.
- stress is generated at the joint between the thermoelectric conversion element and the electrode due to the difference in thermal expansion between the thermoelectric conversion element and the electrode, and the joint and the thermoelectric conversion element are destroyed.
- thermoelectric conversion module is formed with a pair of electrode-side joining surfaces that are spaced apart from each other and a connecting portion that connects each electrode-side joining surface.
- Each thermoelectric conversion element has a prismatic shape.
- Each element-side bonding surface is similar to each electrode-side bonding surface, and each electrode-side bonding surface is formed to have a smaller area than each element-side bonding surface.
- each electrode-side joining surface and the element-side joining surface are joined by solder, and each electrode-side joining surface and the element-side joining surface are joined by solder, whereby the thermoelectric conversion element In all corners C and outer periphery L, the solder is formed thinner than the other parts ”(see summary).
- Patent Document 1 describes the structure of a thermoelectric conversion module. However, although it is described that the thermoelectric conversion module of Patent Document 1 can relieve the stress generated in the element portion, it cannot relieve the strain on the solder. In such a thermoelectric conversion module, since the solder joint at the end is thin, if a temperature change occurs, strain concentrates in the solder, and it is difficult to ensure the heat fatigue reliability of the joint.
- An object of the present invention is to provide a thermoelectric conversion module that realizes relaxation of stress and strain in the element and in the junction in the vicinity of the element / high temperature side electrode junction where stress is concentrated.
- the present invention includes a plurality of means for solving the above-described problems.
- electrodes arranged on the high temperature side and the low temperature side, and P-type and N-type thermoelectric conversions include an end face to which a high temperature side electrode is connected, an end face to which a low temperature side electrode is connected, and the high temperature side electrode.
- an end surface to which the low temperature side electrode is connected, and an area of the end surface to which the high temperature side electrode is connected is smaller than an area of the end surface to which the low temperature side electrode is connected.
- the parallel portion having the side surfaces formed in parallel and a small-diameter portion whose cross-sectional area decreases toward the end surface to which the high temperature side electrode is connected.
- thermoelectric conversion module of the present invention may have a notch formed by removing the outer periphery of the high-temperature side joint of the P-type and N-type thermoelectric conversion elements.
- thermoelectric conversion module of the present invention thermoelectric conversion in which electrodes arranged on the high temperature side and the low temperature side and P-type and N-type thermoelectric conversion elements are connected via a bonding layer.
- the area of the portion of the high-temperature side electrode connected to the end faces of the P-type and N-type thermoelectric conversion elements is larger than the area of the portion of the low-temperature side electrode connected to the end faces of the P-type and N-type thermoelectric conversion elements. Is also small.
- thermoelectric conversion module of the present invention may be one in which a portion of the high temperature side electrode facing the outer periphery of the high temperature side junction of the thermoelectric conversion element is removed to form a notch.
- thermoelectric conversion module stress and strain generated in the element and in the junction in the vicinity of the element / electrode junction where stress is concentrated are alleviated, and cracks in the element and fracture of the junction are suppressed. be able to.
- thermoelectric conversion module in Example 1 of this invention It is the side view which extracted the element vicinity of the thermoelectric conversion module in Example 1 of this invention. It is a figure which shows the notch part of the thermoelectric conversion element in Example 1 of this invention. It is a figure which shows the stress reduction effect of the notch width and notch depth of the thermoelectric conversion element in Example 1 of this invention. It is a flow side view which shows a series of flows of the manufacturing method of the thermoelectric conversion element assembly in Example 1 of this invention. It is a perspective view of an example of the thermoelectric conversion module in Example 1 of the present invention.
- FIG. 4 is a plan view of the element shape on the high-temperature bonding side of the thermoelectric conversion module in Examples 1 to 3 of the present invention. It is the side view which extracted the element vicinity of the thermoelectric conversion module in Example 4 of this invention. It is the side view which extracted the element vicinity of the conventional thermoelectric conversion module.
- FIG. 1 shows a side view of the vicinity of the elements of the thermoelectric conversion module of Example 1 of the present invention.
- a thermoelectric conversion element 11 which is a P-type thermoelectric conversion element and an N-type thermoelectric conversion element is bonded to a low temperature side electrode 21 and a high temperature side electrode 22 by a bonding material 30.
- a notch 111 is formed on the outer periphery of the thermoelectric conversion element 11 on the high temperature side electrode 22 side so that the high temperature side element junction area 112 is smaller than the low temperature side element junction area 113.
- the P-type and N-type thermoelectric conversion elements 11 have an end face to which the high temperature side electrode 22 is connected, an end face to which the low temperature side electrode 21 is connected, an end face to which the high temperature side electrode is connected, and an end face to which the low temperature side electrode is connected.
- An end surface area 112 to which the high temperature side electrode is connected is formed smaller than an end surface area 113 to which the low temperature side electrode is connected, and a parallel portion in which the side surfaces are formed in parallel, and a high temperature It consists of a small-diameter portion where the area of the cross section decreases toward the end face to which the side electrode is connected.
- thermoelectric conversion module uses the Seebeck effect in which electrons move to generate a current by giving a temperature difference to each side surface of the P-type and N-type thermoelectric conversion elements. This movement of electrons has a function of converting heat into electricity.
- FIG. 1 is a diagram when the upper surface is made low and the lower surface is made high.
- the electric current forms an electric circuit by joining a P-type thermoelectric conversion element and an N-type thermoelectric conversion element in series.
- the thermoelectric conversion element assembly 1 is configured by joining a plurality of such thermoelectric conversion elements connected in series in a planar shape or a line shape.
- thermoelectric conversion element 11 differs depending on the environmental temperature in which the module is used. Silicon-germanium, iron-silicon, bismuth-tellurium, magnesium-silicon, lead-tellurium, cobalt-antimony, bismuth- There are antimony, Heusler alloy, and half-Heusler alloy.
- thermoelectric conversion module 1 since the thermoelectric conversion module 1 needs to have a temperature difference between the upper and lower surfaces, the thermoelectric conversion element 11 has an element / electrode junction, particularly a high temperature side junction, due to a thermal load during bonding and a temperature change during operation. It is conceivable that stress concentrates on the surface. If stress is generated in the joint and exceeds the destructive stress of the element or the joint, a crack occurs in the element or the joint, and there is a problem that joint reliability is greatly reduced.
- the bonding material for joining the thermoelectric conversion element and the electrode.
- the bonding temperature is as high as 600 to 800 ° C., and a structure that reduces the stress generated in the bonded portion during the cooling process of the bonding process is required.
- soft solder since the joining temperature is 300 ° C. or less, the stress of the joining process can be reduced as compared with hard solder, but since the melting point is 300 ° C. or less, the use is limited only to low-temperature thermoelectric conversion modules.
- the low temperature side electrode 21 and the high temperature side electrode 22 are preferably nickel, molybdenum, titanium, iron, copper, manganese, tungsten, or an alloy containing any one of these metals as a main component.
- the thermoelectric conversion element material and the linear expansion coefficient of the electrode are different, stress is generated in the vicinity of the joint when a temperature change occurs. Therefore, for the purpose of reducing the stress in the vicinity of the joint, the thermoelectric conversion element The reliability of bonding can be improved by selecting a material having a smaller difference in linear expansion coefficient as the electrode.
- the bonding material 30 is preferably aluminum, nickel, tin, copper, zinc, germanium, magnesium, gold, silver, indium, lead, bismuth, tellurium, or an alloy containing any one of these metals as a main component. .
- the linear expansion coefficient of a silicon-germanium element as an example of the thermoelectric conversion element 11 is 4.5 ppm / ° C.
- the linear expansion coefficient of a silicon-magnesium element is 15.5 ppm / ° C.
- the linear expansion coefficient of the thermoelectric conversion element 11 is The coefficient is described as ⁇ ppm / ° C.
- the materials of the low temperature side electrode 21 and the high temperature side electrode 22 include molybdenum (linear expansion coefficient 5.8 ppm / ° C.), nickel (linear expansion coefficient 15.2 ppm / ° C.), etc.
- the linear expansion coefficient ⁇ ppm / ° C It is described as a material.
- thermoelectric conversion module 1 Since only the high temperature side electrode 22 is heated in the thermoelectric conversion module 1, the high temperature side thermoelectric conversion element 11 and the high temperature side electrode 22 are stretched as the temperature rises.
- the length that the thermoelectric conversion module 1 and the high temperature side electrode 22 extend when the temperature rises is ⁇ ⁇ ⁇ T ⁇ L and ⁇ ⁇ ⁇ T ⁇ L, respectively, where L is the distance from the center of the junction.
- causes stress in the vicinity of the joint. Since the material of the thermoelectric conversion element 11 and the use environment temperature are determined by the target product, it can be said that ⁇ , ⁇ , and ⁇ T are determined by the product.
- the outer periphery of the high-temperature side joint of the thermoelectric conversion element 11 is removed to form the notch 111, thereby shortening the distance L from the center of the joint, and the high-temperature side joint area.
- the bonding reliability can be improved by making 112 smaller than the low-temperature side bonding area 113.
- the low temperature side electrode 21 is cooled in the low temperature side junction part, a temperature rise is suppressed compared with the high temperature side junction part. In order to improve the thermoelectric conversion characteristics, it is better to increase the junction area as much as possible, so the junction area is secured on the low temperature side.
- the high-temperature side bonding area 112 is determined by the removal length a (in FIG. 1) of the outer periphery.
- the temperature difference ⁇ T from the use environment temperature and the thermoelectric conversion element 11 and the high-temperature side electrode 22 are derived from the difference in linear expansion coefficient ⁇ - ⁇ , and the stress a is determined so that the stress value is smaller than the fracture stress of the thermoelectric conversion element 11.
- the shape of the bonding material 30 on the high-temperature bonding side is described as the same size as the high-temperature bonding area 112, but this is not restrictive.
- the deletion of the outer peripheral portion may be performed by dicing blade or laser processing when dicing the element, or may be performed after being divided into individual pieces.
- FIG. 2 shows the shape of the notch 111 from which the outer periphery of the high temperature side joint of the thermoelectric conversion element 11 is removed.
- FIG. 2B when the notch 111 has a right-angled portion, stress concentrates on the right-angled portion, and cracks and breaks tend to occur.
- FIG. 2A by making the notch into a curved surface that is recessed toward the thermoelectric conversion element, stress is dispersed, and cracks and breakage are less likely to occur.
- the horizontal axis represents the notch width a (mm)
- the vertical axis represents the stress ratio when the vertical tensile stress on the side surface of the thermoelectric conversion element without the notch is 1.
- a thermoelectric conversion element having a height of 2.3 mm is formed between electrodes via a bonding material having a thickness of 0.05 mm, and when the temperature is lowered from 600 ° C. to 25 ° C., the thermoelectric The stress generated in the vertical direction on the side surface of the conversion element is evaluated. From FIG.
- the notch width a is 0.1 mm, the stress value is reduced by approximately 40%. Moreover, since the junction area of the thermoelectric conversion element 11 and the high temperature side electrode 22 will become small if notch width a is enlarged too much, it will affect the thermoelectric conversion characteristic. Accordingly, the notch width a is 0.1 mm or more, and the bonding area between the thermoelectric conversion element 11 and the high temperature side electrode 22 is not longer than a length that ensures 50% or more of the bonding area between the thermoelectric conversion element 11 and the low temperature side electrode 21. It is desirable to do.
- the area of the end face connected to the high temperature side electrode is suitably 50 to 95% of the area of the end face connected to the low temperature side electrode.
- FIG. 3B shows the stress ratio when the cut depth b (mm) is plotted on the horizontal axis and the vertical tensile stress on the side surface of the thermoelectric conversion element when the notch is not cut is 1.
- the simulation conditions are the same as in FIG. From FIG. 3 (b), it can be seen that if the cut depth b (mm) is 0.05 mm, the stress value is reduced by approximately 30%. On the other hand, if the cutting depth b is too large, the volume of the thermoelectric conversion element 11 is reduced and the thermoelectric conversion characteristics are affected. From these, the cutting depth b is 0.05 mm or more, and is preferably 50% or less of the height of the thermoelectric conversion element 11.
- FIG. 8 shows a conventional heat conversion module having no notch.
- stress is applied to the outer peripheral portion of the joint between the thermoelectric conversion element 11 and the high temperature side electrode 22 surrounded by a dotted line.
- FIG. 4 is a flow side view showing a series of flows of the manufacturing method of the thermoelectric conversion element assembly in Embodiment 1 of the present invention. Note that description of elements already described in FIG. 1 is omitted.
- the high temperature side electrode 22 is installed on the support jig 40.
- the support jig 40 may be any material that does not melt in the joining process, such as ceramic or metal, and it is desirable to suppress the reaction by forming a material that does not react with the joining material 30 or a layer that does not react with the surface.
- the bonding material 30 and the thermoelectric conversion element 11 are aligned and installed on the high temperature side electrode 22 in this order.
- the bonding material 30 is again installed on each thermoelectric conversion element, and the low temperature side electrode 21 is arranged on the thermoelectric conversion element 11.
- the bonding material 30 is described as a metal foil, but the thickness of the bonding material 30 is preferably 1 to 500 ⁇ m.
- a jig (not shown) may be installed in a lump or may be installed individually, and any method may be used.
- the notch in the thermoelectric conversion element 11 is formed by dicing blade, laser processing or wire saw when dividing the thermoelectric element wafer into individual pieces, or by cutting or grinding after dividing into individual pieces. Can be considered.
- a method using a dicing blade is shown below as an example of forming from a thermoelectric element wafer when dividing individual pieces. First, a groove is formed with a blade having a large blade width on the dicing line of the thermoelectric element wafer to form a notch. After that, the thermoelectric conversion element 11 with a notch can be formed by dicing on the same line with a blade having a thin blade width and dividing into pieces.
- dicing may be performed from the front and back of the thermoelectric element wafer.
- the notch may be formed with a thick blade after dicing with a thin blade in advance.
- the dicing blade is taken as an example, but the same processing can be performed by changing the output when laser processing is performed and changing the wire diameter when using a wire saw.
- the pressure jig 41 is pressed and heated from above to melt the bonding material 30, and the low temperature side electrode 21, the thermoelectric conversion element 11, and the high temperature
- the side electrode 22 and the thermoelectric conversion element 11 are bonded via the bonding material 30.
- the load applied to the thermoelectric conversion element is preferably 0.12 kPa or more.
- the thermoelectric conversion module 1 can be formed by detaching from the pressing jig 41 and the supporting jig 40.
- the joining process is the same as the conventional process, and no new process is required.
- thermoelectric conversion module 1 may be formed by bonding the element 11 and the high temperature side electrode 22 and then bonding the upper surface of the thermoelectric conversion element 11 and the low temperature side electrode 21 with the bonding material 30.
- the applied pressure is set to 0.12 kPa or more to prevent the thermoelectric conversion element 11 from being tilted at the time of bonding, and to the bonding melted from the interface between the thermoelectric conversion element 11, the low temperature side electrode 21, and the high temperature side electrode 22. This is to discharge the material 30 as much as possible.
- the upper limit of the applied pressure is not particularly limited, but is set to be less than the crushing strength of the element because it is necessary that the element is not destroyed. Specifically, it may be about 1000 MPa or less, but in this embodiment, a sufficient effect can be obtained with a pressure of about several MPa.
- the bonding atmosphere may be a non-oxidizing atmosphere, and specifically, a vacuum atmosphere, a nitrogen atmosphere, a nitrogen-hydrogen mixed atmosphere, or the like can be used.
- a metal foil is taken as an example of the bonding material 30, but the bonding material 30 may be powder or alloy powder.
- the compact formed by compacting only the powder may be disposed only at the location where the thermoelectric conversion element 11 is joined, or the powder is applied only to the location where the thermoelectric conversion element is joined in advance. Further, it may be arranged by applying powder paste made using a resin or the like to a portion where thermoelectric conversion elements are to be joined. Since the step of installing the foil can be omitted by applying the powder in advance, the manufacturing process can be further simplified.
- FIG. 5 shows a perspective view of an example of the thermoelectric conversion module according to the first embodiment of the present invention, in which 62 thermoelectric conversion elements are aligned and joined in a grid pattern.
- Reference numeral 23 denotes a lead-out wiring, but the other elements are already described with reference to FIG.
- the lead-out wiring 23 is a wiring for taking out the electric power generated in the thermoelectric conversion element, and any material may be used as long as it is an energized material.
- the process shown in FIG. 4 is applied to form the thermoelectric conversion module shown in FIG. This thermoelectric conversion module may be used by being enclosed in a case, or may be used as it is. As shown in FIG.
- thermoelectric conversion elements 11 are alternately connected by a low temperature side electrode 21 and a high temperature side electrode 22 and are electrically connected in series.
- a lead-out wiring 23 is formed from both ends of the series connection, and an electromotive force is taken out to the outside.
- the thermoelectric conversion element 11 is represented as a quadrangular prism, and the shape seen from the high temperature side electrode is as shown in FIG.
- the shape of the thermoelectric conversion element is not limited to a rectangular column, and may be a columnar shape such as a triangular column, a polygonal column, a cylinder, or an elliptical column.
- thermoelectric conversion element 11 and the high temperature side electrode 22 are smaller than the bonding area between the thermoelectric conversion element 11 and the low temperature side electrode 21 as shown in the first embodiment, for example, by removing the outer periphery.
- the thermoelectric conversion element As a structure in which the junction area between the thermoelectric conversion element and the high temperature side electrode is smaller than the junction area between the thermoelectric conversion element and the low temperature side electrode, the thermoelectric conversion element has a conical shape, and the junction area between the high temperature side electrode and the low temperature side electrode It is conceivable to make it smaller than the bonding area. However, when the thermoelectric conversion element has a conical shape, the volume of the element decreases, and the power generation efficiency decreases. According to the present embodiment, the thermoelectric conversion element includes a parallel portion having side surfaces formed in parallel and a small-diameter portion whose cross-sectional area decreases toward the end surface to which the high temperature side electrode is connected. The thermal stress generated between the thermoelectric conversion element and the electrode can be suppressed without lowering.
- FIG. 6 (b) is a plan view excerpting the element shape on the high-temperature bonding side of the thermoelectric conversion module in Example 2 of the present invention.
- the quadrangular prism-shaped thermoelectric conversion element 11 as shown in FIGS. 5 and 6A is used, but in the second embodiment, a cylindrical shape is used.
- the cylindrical shape By using the cylindrical shape in this way, the stress generated in the outer peripheral portion can be made uniform, and an improvement in bonding reliability is expected.
- the thermoelectric conversion module can be manufactured by the process shown in FIG. 4, and there is no process newly required due to the element shape of this example.
- FIG. 6 (c) is a plan view excerpting the element shape on the high-temperature bonding side of the thermoelectric conversion module in Example 3 of the present invention.
- the thermoelectric conversion element 11 has a quadrangular prism shape as shown in FIGS. 5 and 6A.
- a hexagonal prism shape is used.
- stress that tends to concentrate on the corner portion can be dispersed, and joint reliability is expected to be improved.
- the number of wafers taken from one wafer can be improved, and the unit price of the element can be reduced.
- a hexagonal column is described as an example of a polygonal column, but it may be a polygonal column. Even when the thermoelectric conversion element having the shape of Example 3 is used, the thermoelectric conversion module can be manufactured by the process shown in FIG. 4, and there is no process newly required due to the element shape of this example.
- FIG. 7 is a side view of the vicinity of the elements of the thermoelectric conversion module in Example 4 of the present invention. Description of elements already described in FIG. 1 is omitted.
- a cutout portion is formed in the high temperature side electrode 22. That is, the notched portion 221 is formed by removing the portion of the high temperature side electrode 22 facing the outer periphery of the high temperature side bonding portion of the thermoelectric conversion element 11.
- the notch 221 is formed with a curved surface that is recessed toward the high temperature side electrode 22.
- thermoelectric conversion module 1 By making the thermoelectric conversion module 1 using the high temperature side electrode 22 having the notch 221, the high temperature side electrode bonding area 222 is made smaller than the low temperature side electrode bonding area 223, thereby causing stress generated in the vicinity of the bonding portion. The same effect as in the first embodiment can be obtained. In addition, since the bonding area is adjusted on the electrode side, processing to the thermoelectric conversion element 11 is not necessary.
- the shape of the notch 221 is not limited, but it is only necessary that the high temperature side electrode bonding area 222 can be controlled to be smaller than the low temperature side electrode bonding area 223.
- thermoelectric conversion element 11 may be a quadrangular column, a cylinder, or a polygonal column as shown in the first to third embodiments.
- manufacturing process of the thermoelectric conversion module 1 is realizable by the same process as Example 1 of FIG.
- thermoelectric conversion module in the thermoelectric conversion module, stress and strain generated in the element and in the junction in the vicinity of the element / electrode junction where stress is concentrated are alleviated, and cracks in the element and fracture of the junction are suppressed. be able to. Therefore, the thermoelectric conversion module of the present invention can be used for power generation under a high-temperature environment, for example, by attaching it to a piping of an industrial furnace such as a blast furnace or an incinerator or an exhaust pipe of an automobile.
- an industrial furnace such as a blast furnace or an incinerator or an exhaust pipe of an automobile.
- Thermoelectric conversion module 11 Thermoelectric conversion element 21 Low temperature side electrode 22 High temperature side electrode 23 Lead wiring 30 Joining material 40 Support jig 41 Pressing jig 111 Notch part 112 High temperature side element junction area 113 Low temperature side element junction area 221 Notch Part 222 High temperature side electrode bonding area 223 Low temperature side electrode bonding area
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Abstract
Description
また、本実施例では接合材30の高温接合側の形状を高温側接合面積112と同サイズで記載しているが、その限りではない。
11 熱電変換素子
21 低温側電極
22 高温側電極
23 引き出し配線
30 接合材
40 支持治具
41 加圧治具
111 切り欠き部
112 高温側素子接合面積
113 低温側素子接合面積
221 切り欠き部
222 高温側電極接合面積
223 低温側電極接合面積
Claims (15)
- 高温側および低温側に配置される電極と、P型およびN型の熱電変換素子とが接合層を介して接続される熱電変換モジュールにおいて、
前記P型およびN型の熱電変換素子は、高温側電極が接続する端面と、低温側電極が接続する端面と、前記高温側電極が接続する端面および低温側電極が接続する端面を接続する側面とを有し、前記高温側電極が接続する端面の面積が、前記低温側電極が接続する端面の面積よりも小さく形成されるとともに、前記側面が平行に形成された平行部と、前記高温側電極が接続する端面に向けて断面の面積が縮小する径小部とからなることを特徴とする熱電変換モジュール。 - 高温側および低温側に配置される電極と、P型およびN型の熱電変換素子とが接合層を介して接続される熱電変換モジュールにおいて、
前記高温側電極の前記P型およびN型熱電変換素子の端面と接続する部分の面積が、前記低温側電極の前記P型およびN型熱電変換素子の端面と接続する部分の面積よりも小さいことを特徴とする熱電変換モジュール。 - 請求項1または請求項2に記載の熱電変換モジュールにおいて、
前記高温側電極が接続する端面の面積もしくは前記高温側電極の前記P型およびN型熱電変換素子の端面と接続する部分の面積が、前記低温側電極が接続する端面の面積の50~95%であることを特徴とする熱電変換モジュール。 - 請求項1に記載の熱電変換モジュールにおいて、
前記P型およびN型の熱電変換素子の高温側接合部の外周を除去して切り欠き部を形成したことを特徴とする熱電変換モジュール。 - 請求項2に記載の熱電変換モジュールにおいて、
前記熱電変換素子の高温側接合部の外周に対向する、前記高温側の電極の部分を除去して切り欠き部を形成したことを特徴とする熱電変換モジュール。 - 請求項4に記載の熱電変換モジュールにおいて、
前記切り欠き部は、前記熱電変換素子の側に向けてくぼむ曲面で形成されていることを特徴とする熱電変換モジュール。 - 請求項5に記載の熱電変換モジュールにおいて、
前記切り欠き部は、前記高温側の電極の側に向けてくぼむ曲面で形成されていることを特徴とする熱電変換モジュール。 - 請求項6に記載の熱電変換モジュールにおいて、
前記切り欠き部の深さが0.05mm以上であり、熱電変換素子高さの50%以下であり、かつ前記切り欠き部の端部からの長さが0.1mm以上であり、熱電変換素子と高温側電極の接合面積が熱電変換素子と低温側電極の接合面積の50%以上を確保する長さ以下であることを特徴とする熱電変換モジュール。 - 請求項4~8のいずれか1つに記載の熱電変換モジュールにおいて、
前記切り欠き部を切削加工により形成したものであることを特徴とする熱電変換モジュール。 - 請求項4~8のいずれか1つに記載の熱電変換モジュールにおいて、
前記切り欠き部を研削加工により形成したものであることを特徴とする熱電変換モジュール。 - 請求項4~8のいずれか1つに記載の熱電変換モジュールにおいて、
前記切り欠き部は、ダイシングブレードを用いるダイシングにより形成したものであることを特徴とする熱電変換モジュール。 - 請求項4~8のいずれか1つに記載の熱電変換モジュールにおいて、
前記切り欠き部は、レーザ加工により形成したものであることを特徴とする熱電変換モジュール。 - 請求項1~12の何れか1つに記載の熱電変換モジュールにおいて、
前記熱電変換素子の形状が四角柱、円柱、多角柱のいずれかの形状であることを特徴とする熱電変換モジュール。 - 請求項1~13の何れか1つに記載の熱電変換モジュールにおいて、
前記P型およびN型の熱電変換素子が、シリコン-ゲルマニウム系、鉄-シリコン系、ビスマス-テルル系、マグネシウム-シリコン系、鉛-テルル系、コバルト-アンチモン系、ビスマス-アンチモン系やホイスラー合金系、ハーフホイスラー合金系のいずれかの組合せであることを特徴とする熱電変換モジュール。 - 請求項1~13の何れか1つに記載の熱電変換モジュールにおいて、
複数のP型およびN型の熱電変換素子を格子状に整列して接合し、前記複数のP型およびN型の熱電変換素子の一部もしくは全てを電気的に直列に接続したことを特徴とする熱電変換モジュール。
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JP2001237465A (ja) * | 2000-02-23 | 2001-08-31 | Citizen Watch Co Ltd | 熱電素子とその製造方法 |
JP2005302783A (ja) * | 2004-04-06 | 2005-10-27 | Toshiba Corp | 熱電変換モジュール及びその形状評価装置及び形状評価方法 |
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JP2009099686A (ja) * | 2007-10-15 | 2009-05-07 | Sumitomo Chemical Co Ltd | 熱電変換モジュール |
US9082928B2 (en) * | 2010-12-09 | 2015-07-14 | Brian Isaac Ashkenazi | Next generation thermoelectric device designs and methods of using same |
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JPH10229223A (ja) * | 1997-02-17 | 1998-08-25 | Tekunisuko:Kk | 熱電素子 |
JP2001237465A (ja) * | 2000-02-23 | 2001-08-31 | Citizen Watch Co Ltd | 熱電素子とその製造方法 |
JP2005302783A (ja) * | 2004-04-06 | 2005-10-27 | Toshiba Corp | 熱電変換モジュール及びその形状評価装置及び形状評価方法 |
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