WO2015083257A1

WO2015083257A1 - Method for manufacturing bonded device

Info

Publication number: WO2015083257A1
Application number: PCT/JP2013/082620
Authority: WO
Inventors: 義和大谷
Original assignee: 信越エンジニアリング株式会社
Priority date: 2013-12-04
Filing date: 2013-12-04
Publication date: 2015-06-11
Also published as: TW201529326A; JP5523646B1; TWI576246B; CN104937652A; KR20160093539A; JPWO2015083257A1

Abstract

Provided is a sealing structure wherein a sealing member is not used between a pressure chamber or through holes and a delivery member, and the delivery member can be moved contactlessly without limit. When a workpiece is brought into a pressure chamber (1), a control unit (7) opens a closing member (6) so as to open through holes (12) in the pressure chamber (1), thereby making a delivery member (5) movable. Either or both of a first workpiece (W1) and a second workpiece (W2) are received by the delivery member (5) and delivered from the delivery member (5) to either or both of a first holding member (2) and a second holding member (3). Thereafter, the control unit withdraws the delivery member (5) from the through holes (12) in the pressure chamber (1) and then closes the closing member (6) so as to close the through holes (12) airtight. Thus, pressure can be reduced in the pressure chamber (1) to a high degree of vacuum state, and the first workpiece (W1) and the second workpiece (W2) are bonded.

Description

貼合デバイスの製造装置Bonding device manufacturing equipment

　本発明は、例えば液晶ディスプレイ（ＬＣＤ）、有機ＥＬディスプレイ（ＯＬＥＤ）、プラズマディスプレイ（ＰＤＰ）、フレキシブルディスプレイなどのフラットパネルディスプレイ（ＦＰＤ）やセンサーデバイスか、又は例えばタッチパネル式ＦＰＤや３Ｄ（３次元）ディスプレイや電子書籍などのような、液晶モジュール（ＬＣＭ）やフレキシブルプリント配線板（ＦＰＣ）などの板状ワークに対して、タッチパネルやカバーガラスやカバーフィルムやＦＰＤなどのもう一枚の板状ワークを貼り合わせる貼合デバイスの製造装置に関する。 The present invention may be a flat panel display (FPD) or a sensor device such as a liquid crystal display (LCD), an organic EL display (OLED), a plasma display (PDP), or a flexible display, or a touch panel type FPD or 3D (three-dimensional). Another plate-like workpiece such as a touch panel, cover glass, cover film, or FPD is used for a plate-like workpiece such as a liquid crystal module (LCM) or flexible printed wiring board (FPC) such as a display or an electronic book. It is related with the manufacturing apparatus of the bonding device bonded together.

　従来、この種の貼合デバイスの製造装置として、上側基板保持具及び下側基板保持具に設けられた貫通孔に沿って、上側基板及び下側基板の受け渡し用のリフトピンをそれぞれ上下動可能に設け、大気圧における搬入時には、搬送ロボットのアームで保持して搬送された上側基板及び下側基板を、上側基板保持具及び下側基板保持具の表面から突出するように上下動したリフトピンでそれぞれ受け取り、これに続いてリフトピンが逆移動して、上側基板及び下側基板を上側基板保持具及び下側基板保持具の表面にそれぞれ受け渡す基板重ね合わせ装置がある（例えば、特許文献１参照）。基板の受け渡し後は、上側基板保持具と下側基板保持具が接近移動して両者間の真空容器内を真空状態にしてから、上側基板と下側基板を重ね合わせて仮止めし、真空容器内が大気圧になってから、貼り合わされた基板をリフトピンにより搬送ロボットのアームに受け渡して搬出している。
　さらに、特許文献１に記載される、上側基板保持具及び下側基板保持具の貫通孔と、リフトピンと間には、Ｏリングのようなシール部材を設けて、リフトピンと摺動可能に接触させることにより、真空容器内の密封状態を維持している。
　また、その他の例として、貫通孔が設けられるチャンバーと、上側基板及び下側基板の受け渡し用のリフトピンとに亘って、ベローズなどの弾性変形可能なシール部材を設けて、リフトピンと上下動可能に連結することにより、チャンバー内の密封状態を維持する基板貼り合わせ装置もある（例えば、特許文献２参照）。 Conventionally, as a manufacturing apparatus of this kind of bonding device, the lift pins for transferring the upper substrate and the lower substrate can be moved up and down along the through holes provided in the upper substrate holder and the lower substrate holder, respectively. The upper and lower substrates held and transferred by the arm of the transfer robot at the time of carrying in at atmospheric pressure are lift pins that move up and down so as to protrude from the surfaces of the upper and lower substrate holders, respectively. There is a substrate superimposing apparatus that receives and subsequently moves the lift pins in reverse to transfer the upper substrate and the lower substrate to the surfaces of the upper substrate holder and the lower substrate holder, respectively (for example, refer to Patent Document 1). . After the delivery of the substrate, the upper substrate holder and the lower substrate holder move closer to bring the inside of the vacuum container into a vacuum state, and then the upper substrate and the lower substrate are overlapped and temporarily fixed. After the inside becomes atmospheric pressure, the bonded substrates are transferred to the arm of the transfer robot by lift pins and are carried out.
Further, a seal member such as an O-ring is provided between the through hole of the upper substrate holder and the lower substrate holder described in Patent Document 1 and the lift pin so as to be slidably contacted with the lift pin. Thus, the sealed state in the vacuum vessel is maintained.
As another example, an elastically deformable seal member such as a bellows is provided across the chamber in which the through hole is provided and the lift pins for transferring the upper substrate and the lower substrate so that the lift pins can move up and down. There is also a substrate laminating apparatus that maintains a sealed state in the chamber by being connected (see, for example, Patent Document 2).

特開２００２－２２９４７１号公報JP 2002-229471 A 国際公開第２００８／１１４３３７号パンフレットInternational Publication No. 2008/114337 Pamphlet

　しかし乍ら、このような従来の貼合デバイスの製造装置では、Ｏリングなどのシール部材がリフトピンと摺動可能に接触する特許文献１の場合、リフトピンが移動する度にＯリングなどと擦れるため、これらの摺動部位からＯリングなどの一部がゴミとなって発生し、ワークの貼り合わせに悪影響を与えるとともに、Ｏリングなどが摩耗して短寿命であり、定期的に部品交換が必要になるという問題があった。ゴミの発生を抑制するために、摺動グリースなどの潤滑剤を滑り部分に供給すると、真空中でガスの発生懸念や揮発だけでなく、メンテナンス性においても問題がある。
　さらに、Ｏリングなどのシール部材でシールされた密閉空間が大気圧と真空に変化する際に、これら圧力差の変化によって僅かではあるが変形するため、その変形によってリフトピンの移動時に過大な負荷がかかることもあり、最悪の場合にはリフトピンが削られたり、移動不良で不慮の事故が起きたりする可能性もあった。
　また、ベローズなどの弾性変形可能なシール部材でリフトピンが移動可能に連結される特許文献２の場合には、リフトピンの移動に伴ってベローズなどの伸縮できるストロークが限られており、その範囲を超えると著しくベローズなどの寿命低下につながる。そのため、リフトピンの移動ストロークを増大させるには、ベローズなどのシール部材自体の大きさをリフトピンの移動方向へ延長する必要があり、それに伴い装置全体が大型化してコスト高になるという問題があった。 However, in such a conventional bonding device manufacturing apparatus, in the case of Patent Document 1 in which a seal member such as an O-ring is slidably contacted with a lift pin, it rubs against the O-ring or the like every time the lift pin moves. Some parts such as O-rings are generated as dust from these sliding parts, which adversely affects the bonding of workpieces, wears the O-rings etc., has a short life, and requires regular replacement of parts. There was a problem of becoming. If a lubricant such as sliding grease is supplied to the sliding portion in order to suppress the generation of dust, there is a problem not only in terms of gas generation or volatilization but also in maintainability in vacuum.
Furthermore, when the sealed space sealed with a sealing member such as an O-ring changes to atmospheric pressure and vacuum, the deformation changes slightly due to the change in the pressure difference, and this deformation causes an excessive load when the lift pin moves. In some cases, the lift pins may be scraped off, or an accident may occur due to poor movement.
Further, in Patent Document 2 in which a lift pin is movably connected with a seal member that can be elastically deformed, such as a bellows, the stroke that can be expanded and contracted with the movement of the lift pin is limited and exceeds that range. And remarkably lead to a shortened life of bellows. Therefore, in order to increase the movement stroke of the lift pin, it is necessary to extend the size of the sealing member itself such as the bellows in the movement direction of the lift pin. .

　本発明は、このような問題に対処することを課題とするものであり、変圧室や貫通孔と受け渡し部材との間にシール部材を用いることなく受け渡し部材を無接触で且つ無制限に移動可能なシール構造を提供すること、などを目的とするものである。 An object of the present invention is to cope with such a problem, and the transfer member can be moved without contact and without limitation without using a seal member between the variable pressure chamber or the through hole and the transfer member. The object is to provide a sealing structure.

　このような目的を達成するために本発明は、変圧室に搬入された第一ワークと第二ワークを第一保持部材と第二保持部材にそれぞれ受け渡し、減圧された前記変圧室で前記第一保持部材又は前記第二保持部材のいずれか一方か若しくは両方が相対的に接近移動して前記第一ワークと前記第二ワークを貼り合わせる貼合デバイスの製造装置であって、前記第一ワーク及び前記第二ワークが出し入れ自在に収容される前記変圧室と、前記変圧室にワーク貼り合わせ方向へ互いに対向するように設けられる前記第一保持部材及び前記第二保持部材と、前記第一保持部材又は前記第二保持部材のいずれか一方か若しくは両方を前記ワーク貼り合わせ方向へ相対的に接近或いは離隔するように移動させる貼り合わせ用駆動部と、前記変圧室に設けられる貫通孔を通って前記ワーク貼り合わせ方向へ移動自在に設けられるワーク受け渡し用の受け渡し部材と、前記変圧室の前記貫通孔を気密状に開閉するように移動自在に設けられる閉鎖部材と、前記貼り合わせ用駆動部と前記受け渡し部材の受け渡し用駆動部及び前記閉鎖部材の閉鎖用駆動部をそれぞれ作動制御する制御部と、を備え、前記制御部は、ワーク搬入時において、前記貫通孔が開口するように前記閉鎖部材を開動させるとともに、前記受け渡し部材をワーク受け渡しのために移動させ、ワーク貼り合わせ時において、前記貫通孔から前記受け渡し部材を抜き出し、前記貫通孔が気密状に閉鎖されるように前記閉鎖部材を閉動させることを特徴とする。 In order to achieve such an object, the present invention transfers the first work and the second work carried into the variable pressure chamber to the first holding member and the second holding member, respectively, and the first pressure is reduced in the variable pressure chamber. Either one or both of the holding member and the second holding member relatively move to move, and is a manufacturing apparatus for a bonding device that bonds the first work and the second work, the first work and The variable pressure chamber in which the second workpiece is accommodated in a freely removable manner, the first holding member and the second holding member provided in the variable pressure chamber so as to face each other in the workpiece bonding direction, and the first holding member Alternatively, a laminating drive unit that moves either one or both of the second holding members so as to relatively approach or separate from each other in the workpiece laminating direction, and provided in the variable pressure chamber. A workpiece transfer member provided movably in the workpiece bonding direction through the through hole, a closing member movably provided to open and close the through hole of the variable pressure chamber, and the bonding A control unit for controlling the operation of each of the alignment drive unit, the transfer drive unit for the transfer member, and the drive unit for closing the closing member, and the control unit opens the through-hole when the workpiece is loaded. The closing member is moved and the transfer member is moved for transferring the workpiece, and when the workpiece is bonded, the transfer member is extracted from the through hole so that the through hole is closed in an airtight manner. The closing member is closed.

　前述した特徴を有する本発明は、変圧室へのワーク搬入時には、制御部で閉鎖部材が開動して変圧室の貫通孔を開口させることにより、受け渡し部材が移動可能になって、第一ワーク又は第二ワークのいずれか一方か若しくは両方を受け渡し部材で受け取るとともに、受け渡し部材から第一保持部材又は第二保持部材のいずれか一方か若しくは両方に受け渡す。その後は、制御部で変圧室の貫通孔から受け渡し部材を抜き出してから、閉鎖部材が閉動して貫通孔を気密状に閉鎖させることにより、変圧室が高度な真空状態になるまで減圧可能になって、第一ワークと第二ワークが貼り合わされる。
　したがって、変圧室や貫通孔と受け渡し部材との間にシール部材を用いることなく受け渡し部材を無接触で且つ無制限に移動可能なシール構造を提供することができる。
　その結果、Ｏリングなどのシール部材がリフトピンと摺動可能に接触する従来のものに比べ、摺動部位が無いシール構造であるため、ゴミの発生によるワークの貼り合わせに悪影響や、摩耗に伴う部品交換や、圧力差の変化によるシール部材の変形を防止できて、長期に亘り安定した稼働が図れる。
　さらに、ベローズなどの弾性変形可能なシール部材でリフトピンが移動可能に連結される従来のものに比べ、受け渡し部材をフリーで移動できるため、部品の寿命低下や、装置全体の大型化を防止できて、コストの低減化が図れる。 In the present invention having the above-described features, the transfer member can be moved by opening the through-hole of the variable pressure chamber by opening the through hole of the variable pressure chamber by opening the through-hole of the variable pressure chamber when the work is carried into the variable pressure chamber. Either one or both of the second workpieces are received by the transfer member, and transferred from the transfer member to either one or both of the first holding member and the second holding member. After that, after the delivery member is pulled out from the through hole of the variable pressure chamber in the control unit, the closing member is closed and the through hole is closed in an airtight manner, so that the pressure can be reduced until the variable pressure chamber becomes highly vacuumed. Thus, the first work and the second work are pasted together.
Therefore, it is possible to provide a seal structure in which the transfer member can be moved without contact and without limitation without using a seal member between the variable pressure chamber or the through hole and the transfer member.
As a result, the seal structure has no sliding part compared to the conventional one in which a seal member such as an O-ring is slidably in contact with the lift pin. The replacement of the parts and the deformation of the seal member due to the change in the pressure difference can be prevented, and stable operation can be achieved for a long time.
Furthermore, compared to the conventional type in which the lift pin is movably connected by an elastically deformable seal member such as a bellows, the delivery member can be moved freely, so that the life of parts can be prevented and the overall size of the apparatus can be prevented. Cost reduction can be achieved.

本発明の実施形態に係る貼合デバイスの製造装置の全体構成を示す説明図であり、（ａ）がワーク搬入時の縦断正面図、（ｂ）が減圧時の縦断正面図である。It is explanatory drawing which shows the whole structure of the manufacturing apparatus of the bonding device which concerns on embodiment of this invention, (a) is a longitudinal front view at the time of workpiece | work carrying-in, (b) is a longitudinal front view at the time of pressure reduction. チャンバーの変形例を示す説明図であり、（ａ）がワーク搬入時の縦断正面図、（ｂ）が減圧時の縦断正面図である。It is explanatory drawing which shows the modification of a chamber, (a) is a vertical front view at the time of workpiece | work carrying-in, (b) is a vertical front view at the time of pressure reduction. 第二保持部材の変形例を示す説明図であり、（ａ）がワーク搬入時の縦断正面図、（ｂ）が減圧時の縦断正面図である。It is explanatory drawing which shows the modification of a 2nd holding member, (a) is a vertical front view at the time of workpiece | work carrying in, (b) is a vertical front view at the time of pressure reduction. 閉鎖部材の駆動部の一例を示す説明図であり、（ａ）がワーク搬入時の縦断正面図、（ｂ）が減圧時の縦断正面図である。It is explanatory drawing which shows an example of the drive part of a closing member, (a) is a vertical front view at the time of workpiece | work carrying-in, (b) is a vertical front view at the time of pressure reduction. 閉鎖部材の変形例を示す説明図であり、（ａ）がワーク搬入時の縦断正面図、（ｂ）が減圧時の縦断正面図である。It is explanatory drawing which shows the modification of a closing member, (a) is a vertical front view at the time of workpiece | work carrying-in, (b) is a vertical front view at the time of pressure reduction. 本発明の実施例１に係る貼合デバイスの製造装置の全体構成を示す説明図であり、（ａ）がワーク搬入時の縦断正面図、（ｂ）が減圧時の縦断正面図である。It is explanatory drawing which shows the whole structure of the manufacturing apparatus of the bonding device which concerns on Example 1 of this invention, (a) is a longitudinal front view at the time of workpiece | work carrying-in, (b) is a longitudinal front view at the time of pressure reduction. 本発明の実施例２に係る貼合デバイスの製造装置の全体構成を示す説明図であり、（ａ）がワーク搬入時の縦断正面図、（ｂ）が減圧時の縦断正面図である。It is explanatory drawing which shows the whole structure of the manufacturing apparatus of the bonding device which concerns on Example 2 of this invention, (a) is a longitudinal front view at the time of workpiece | work carrying-in, (b) is a longitudinal front view at the time of pressure reduction. 本発明の実施例３に係る貼合デバイスの製造装置の全体構成を示す説明図であり、（ａ）がワーク搬入時の縮小縦断正面図、（ｂ）が位置合わせ後の縮小縦断正面図、（ｃ）が減圧時の縮小縦断正面図である。It is explanatory drawing which shows the whole structure of the manufacturing apparatus of the bonding device which concerns on Example 3 of this invention, (a) The reduction | decrease vertical front view at the time of workpiece | work carrying in, (b) The reduction | decrease vertical front view after alignment, (C) is a reduced longitudinal front view during decompression.

　以下、本発明の実施形態を図面に基づいて詳細に説明する。
　本発明の実施形態に係る貼合デバイスＷの製造装置Ａは、図１～図８に示すように、外から変圧室１に向けて搬入された第一ワークＷ１と第二ワークＷ２を、変圧室１に対向して配置される第一保持部材２と第二保持部材３にそれぞれ受け渡し、その後、減圧された変圧室１で第一保持部材２又は第二保持部材３のいずれか一方か若しくは両方を、前記対向方向へ相対的に接近移動させることにより、第一ワークＷ１と第二ワークＷ２が貼り合わ（合着）されて貼合デバイスＷを作製する真空貼り合わせ装置である。
　詳しく説明すると、本発明の実施形態に係る貼合デバイスＷの製造装置Ａは、第一ワークＷ１及び第二ワークＷ２が出し入れ自在に収容される変圧室１と、変圧室１に前記ワーク貼り合わせ方向（第一ワークＷ１及び第二ワークＷ２の貼り合わせ方向）へ互いに対向するように設けられる第一保持部材２及び第二保持部材３と、第一保持部材２又は第二保持部材３のいずれか一方か若しくは両方を前記貼り合わせ方向へ相対的に接近或いは離隔するように移動させる貼り合わせ用駆動部４と、変圧室１に設けられる貫通孔１２を通って前記貼り合わせ方向へ移動自在に設けられるワーク受け渡し用の受け渡し部材５と、変圧室１の貫通孔１２の近傍に貫通孔１２を気密状に開閉するように移動自在に設けられる閉鎖部材６と、貼り合わせ用駆動部４と受け渡し部材５の受け渡し用駆動部５Ｄ及び閉鎖部材６の閉鎖用駆動部６Ｄと電気的に連通するように設けられてそれらをそれぞれ作動制御する制御部７と、を主要な構成要素として備えている。 Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.
As shown in FIGS. 1 to 8, the manufacturing apparatus A for the bonding device W according to the embodiment of the present invention transforms the first work W1 and the second work W2 carried from the outside toward the variable pressure chamber 1, The first holding member 2 and the second holding member 3 disposed opposite to the chamber 1, respectively, and then either the first holding member 2 or the second holding member 3 in the pressure-reducing chamber 1 decompressed or It is a vacuum bonding apparatus in which the first workpiece W1 and the second workpiece W2 are bonded (bonded) to produce the bonding device W by moving both relatively close to each other in the facing direction.
If it explains in detail, manufacturing device A of pasting device W concerning an embodiment of the present invention will be the 1st work W1 and the 2nd work W2 which are stored in the transformer room 1 which can be put in and out freely, and the work pasting to the transformer room 1 The first holding member 2 and the second holding member 3 provided so as to face each other in the direction (the bonding direction of the first workpiece W1 and the second workpiece W2), and either the first holding member 2 or the second holding member 3 Either or both of them can be moved in the laminating direction through a laminating drive unit 4 that moves so as to be relatively close to or separated from the laminating direction, and a through hole 12 provided in the variable pressure chamber 1. The workpiece delivery member 5 provided, the closing member 6 movably provided so as to open and close the through hole 12 in the vicinity of the through hole 12 of the variable pressure chamber 1, and the laminating drive As a main component, a control unit 7 is provided so as to be in electrical communication with the part 4 and the delivery drive part 5D of the delivery member 5 and the closure drive part 6D of the closure member 6 and controls their operation. I have.

　貼合デバイスＷは、例えばＦＰＤやセンサーデバイスなどのような複数の構成部品が一体的に組み付けられた薄板状の構造体である。第二ワークＷ２は、例えばタッチパネルやカバーガラスやカバーフィルムなど、第一ワークＷ１を覆うように接着されることで、ＦＰＤやセンサーデバイスなどを構成するものである。
　さらに、第一ワークＷ１及び第二ワークＷ２において膜面などからなるＷ１ｆ，Ｗ２ｆのいずれか一方又は両方には、シール材（図示しない）がディスペンサなどの定量吐出ノズルを用いて塗布される。シール材としては、紫外線などの光エネルギーを吸収して重合が進行することにより硬化して接着性を発現する、ＵＶ硬化性の光学透明樹脂（ＯＣＲ）などの光硬化型接着剤を用いることが好ましい。また、その他の例として、熱エネルギーの吸収により重合が進行して硬化する熱硬化型接着剤、二液混合硬化型接着剤などを用いることも可能である。
　なお、第一ワークＷ１及び第二ワークＷ２は、図１～図８に示されるように、通常、上下方向へ対向するように配置され、下側の第一ワークＷ１と上側の第二ワークＷ２が貼り合わされる方向、すなわち前記ワーク貼り合わせ方向を「Ｚ方向」という。 The bonding device W is a thin plate-like structure in which a plurality of components such as an FPD and a sensor device are integrally assembled. The second workpiece W2 constitutes an FPD, a sensor device, or the like by being bonded so as to cover the first workpiece W1, such as a touch panel, a cover glass, or a cover film.
Furthermore, a sealing material (not shown) is applied to one or both of W1f and W2f made of a film surface or the like in the first workpiece W1 and the second workpiece W2 using a fixed discharge nozzle such as a dispenser. As the sealing material, a photo-curing adhesive such as a UV curable optical transparent resin (OCR) which is cured by absorbing light energy such as ultraviolet rays and develops as polymerization progresses is used. preferable. As other examples, it is also possible to use a thermosetting adhesive, a two-component mixed curable adhesive, or the like that is cured by polymerization by absorption of thermal energy.
As shown in FIGS. 1 to 8, the first work W1 and the second work W2 are usually arranged so as to face each other in the vertical direction, and the lower first work W1 and the upper second work W2 are arranged. The direction in which the workpieces are bonded, that is, the workpiece bonding direction is referred to as the “Z direction”.

　変圧室１は、チャンバー１０の内部に形成され、例えば搬送ロボットなどの搬送手段Ｂを用いて、大気雰囲気で第一ワークＷ１と第二ワークＷ２がチャンバー１０内の変圧室１とチャンバー１０の外部空間とに亘って出し入れ可能となるように、チャンバー１０の全体又は一部を後述する駆動手段１３，１４によって開閉自在に構成している。
　チャンバー１０には、変圧室１と連通してその内圧を大気雰囲気から所定の真空度まで変圧調整するために、例えば真空ポンプなどからなる吸排気手段（図示しない）が設けられている。この吸排気手段は後述する制御部７によって作動制御される。
　変圧室１やチャンバー１０の具体例としては、図１（ａ）（ｂ）などに示されるように、搬送ロボットなどの搬送手段Ｂが一対の第一搬送部Ｂａと第二搬送部Ｂｂを有し、大気雰囲気においてチャンバー１０の外部から、第一搬送部Ｂａにより第一ワークＷ１がチャンバー１０内の変圧室１へ搬入すると同時に、搬送手段Ｂの第二搬送部Ｂｂにより第二ワークＷ２がチャンバー１０内の変圧室１へ搬入される。この搬入が終了した後に変圧室１を閉じて吸排気手段により所定の真空度まで減圧して、第一ワークＷ１と第二ワークＷ２が重ね合わされる。この重ね合わせが終了した後は、変圧室１が大気開放されて大気雰囲気により第一ワークＷ１と第二ワークＷ２が所定ギャップまで押し潰されて貼合デバイスＷとなる。その後、この貼合デバイスＷは図示しないが、後述する受け渡し部材５と搬送手段Ｂの第二搬送部Ｂｂを用いて、変圧室１からチャンバー１０の外部に搬出される。 The variable pressure chamber 1 is formed inside the chamber 10, and the first workpiece W1 and the second workpiece W2 are outside of the variable pressure chamber 1 inside the chamber 10 and the outside of the chamber 10 in the atmospheric atmosphere by using the transfer means B such as a transfer robot. The whole or part of the chamber 10 is configured to be openable and closable by

drive means

13 and 14 to be described later so that it can be taken in and out over the space.
The chamber 10 is provided with intake / exhaust means (not shown) such as a vacuum pump for communicating with the variable pressure chamber 1 and adjusting its internal pressure from the atmospheric atmosphere to a predetermined degree of vacuum. The intake / exhaust means is controlled by a control unit 7 described later.
As specific examples of the variable pressure chamber 1 and the chamber 10, as shown in FIGS. 1 (a) and 1 (b), the transfer means B such as a transfer robot has a pair of a first transfer portion Ba and a second transfer portion Bb. In the air atmosphere, the first workpiece W1 is carried into the variable pressure chamber 1 in the chamber 10 by the first carrier Ba from the outside of the chamber 10, and at the same time, the second workpiece W2 is brought into the chamber by the second carrier Bb of the carrier means B. It is carried into the transformer room 1 in 10. After the carry-in is completed, the variable pressure chamber 1 is closed and the pressure is reduced to a predetermined vacuum level by the intake / exhaust means, and the first workpiece W1 and the second workpiece W2 are overlapped. After this superposition is completed, the variable pressure chamber 1 is opened to the atmosphere, and the first workpiece W1 and the second workpiece W2 are crushed to a predetermined gap by the atmospheric atmosphere to form the bonding device W. Then, although this bonding device W is not shown in figure, it is carried out from the variable pressure chamber 1 to the exterior of the chamber 10 using the delivery member 5 and the 2nd conveyance part Bb of the conveyance means B which are mentioned later.

　変圧室１が形成されるチャンバー１０の底壁部１１ａ又は天井部１１ｂのいずれか一方か若しくは両方には、貫通孔１２がＺ方向へ開穿される。
　その具体例としては、図１（ａ）（ｂ）などに示されるように、チャンバー１０の底壁部１１ａに複数の第一貫通孔１２ａをＺ方向と交差（直交）するＸＹ方向へ所定間隔毎に開穿するとともに、チャンバー１０の天井部１１ｂに複数の第二貫通孔１２ｂをＸＹ方向へ所定間隔毎に開穿し、第一貫通孔１２ａ及び第二貫通孔１２ｂの両方を後述する閉鎖部材６でそれぞれ開閉することが好ましい。さらに、第一貫通孔１２ａの開口縁及び第二貫通孔１２ｂの開口縁には、後述する閉鎖部材６との間を密閉するため、例えばＯリングのようなシール部材１２ｓが設けられている。
　また、その他の例として図示しないが、貫通孔１２（第一貫通孔１２ａ，第二貫通孔１２ｂ）の開穿個数を単数に変更したり、チャンバー１０の底壁部１１ａ又は天井部１１ｂのいずれか一方のみに貫通孔１２を開穿したり、チャンバー１０の底壁部１１ａに開穿される第一貫通孔１２ａか、又はチャンバー１０の天井部１１ｂに開穿される第二貫通孔１２ｂのいずれか一方のみを後述する閉鎖部材６で開閉したり変更することも可能である。なお、貫通孔１２と後述する閉鎖部材６との間を密閉できる構造であれば、シール部材１２ｓを用いる必要はない。 A through hole 12 is opened in the Z direction in one or both of the bottom wall portion 11a and the ceiling portion 11b of the chamber 10 in which the variable pressure chamber 1 is formed.
As a specific example, as shown in FIGS. 1A and 1B, a plurality of first through holes 12a are formed in the bottom wall portion 11a of the chamber 10 at predetermined intervals in the XY direction intersecting (orthogonal) with the Z direction. A plurality of second through holes 12b are opened in the XY direction at predetermined intervals in the ceiling portion 11b of the chamber 10, and both the first through holes 12a and the second through holes 12b are closed as described later. Each member 6 is preferably opened and closed. Furthermore, a sealing member 12s such as an O-ring is provided at the opening edge of the first through hole 12a and the opening edge of the second through hole 12b in order to seal between the closing member 6 described later.
Although not shown as another example, the number of through holes 12 (the first through hole 12a and the second through hole 12b) is changed to a single number, or either the bottom wall portion 11a or the ceiling portion 11b of the chamber 10 is used. Only one of the through holes 12 is opened, the first through hole 12a is opened in the bottom wall portion 11a of the chamber 10, or the second through hole 12b is opened in the ceiling portion 11b of the chamber 10. Only one of them can be opened / closed or changed by a closing member 6 described later. In addition, if it is a structure which can seal between the through-hole 12 and the closing member 6 mentioned later, it is not necessary to use the sealing member 12s.

　チャンバー１０の開閉構造としては、図１（ａ）（ｂ）などに示されるように、チャンバー１０をＺ方向へ第一チャンバー１０ａと第二チャンバー１０ｂに分割し、下側の第一チャンバー１０ａと上側の第二チャンバー１０ｂを駆動手段１３でＺ方向へ相対的に接近又は離隔するように往復動させることにより、パッキンなどのシール材１０ｓを介して変圧室１が開閉自在で且つ密封構造となるように構成することが好ましい。
　駆動手段１３は、アクチュエーターなどから構成され、後述する制御部７により、図１（ａ）などに示されるワーク搬入時においては、下側の第一チャンバー１０ａと上側の第二チャンバー１０ｂを離隔移動させることでチャンバー１０が開き、その後、図１（ｂ）などに示されるワーク貼り合わせ時においては、下側の第一チャンバー１０ａと上側の第二チャンバー１０ｂを接近移動させることでチャンバー１０が閉じ密封状態となるように作動制御している。
　さらに、図１（ａ）（ｂ）などに示される例では、上側の第二チャンバー１０ｂのみを下側の第一チャンバー１０ａへ向け接近又は離隔移動させている。
　また、その他の例として図示しないが、第一チャンバー１０ａのみか、又は第一チャンバー１０ａ及び第二チャンバー１０ｂの両方を、駆動手段１３で接近又は離隔させるように変更することも可能ある。
　なお、チャンバー１０の変形例として、図２（ａ）（ｂ）に示されるように、箱形のチャンバー１０ｃの一部に開口部１０ｄが開設され、開口部１０ｄに対し駆動手段１４で扉１０ｅを開閉動させることにより、変圧室１が開閉自在で且つ密封構造となるように変更することも可能である。 As the opening / closing structure of the chamber 10, as shown in FIGS. 1A and 1B, the chamber 10 is divided into a first chamber 10 a and a second chamber 10 b in the Z direction. By reciprocating the second chamber 10b on the upper side so as to be relatively close to or away from each other in the Z direction by the driving means 13, the variable pressure chamber 1 can be opened and closed through a sealing material 10s such as packing and has a sealed structure. It is preferable to configure as described above.
The driving means 13 is composed of an actuator or the like, and is moved away from the lower first chamber 10a and the upper second chamber 10b by the control unit 7 which will be described later when the workpiece shown in FIG. Then, the chamber 10 is opened, and then the chamber 10 is closed by moving the lower first chamber 10a and the upper second chamber 10b close to each other at the time of workpiece bonding shown in FIG. The operation is controlled to be in a sealed state.
Further, in the example shown in FIGS. 1A and 1B, only the upper second chamber 10b is moved toward or away from the lower first chamber 10a.
Although not shown as another example, only the first chamber 10a or both the first chamber 10a and the second chamber 10b can be changed so as to approach or separate by the driving means 13.
As a modification of the chamber 10, as shown in FIGS. 2 (a) and 2 (b), an opening 10d is formed in a part of a box-shaped chamber 10c, and a door 10e is connected to the opening 10d by a driving means 14. It is also possible to change the variable pressure chamber 1 so that it can be opened and closed and has a sealed structure.

　チャンバー１０の内部には、第一保持部材２と第二保持部材３が、Ｚ方向へ互いに対向するように設けられている。
　第一保持部材２と第二保持部材３は、例えば金属やセラミックスなどの剛体で歪み（撓み）変形しない厚さの平板状に形成された定盤などで構成され、Ｚ方向へ対向するそれらの保持面２ａ，３ａをそれぞれ平行に配設している。
　第一保持部材２と第二保持部材３の保持面２１，３１には、第一ワークＷ１の裏面Ｗ１ｒと第二ワークＷ２の裏面Ｗ２ｒをそれぞれ着脱自在で且つ移動不能に保持するために、粘着チャックや静電チャックや吸引チャックか又はそれらの組み合わせなどからなる保持チャック２２，３２が設けられる。 A first holding member 2 and a second holding member 3 are provided inside the chamber 10 so as to face each other in the Z direction.
The first holding member 2 and the second holding member 3 are composed of a platen having a thickness that does not deform (bend) with a rigid body such as metal or ceramics, for example. The holding surfaces 2a and 3a are arranged in parallel.
The holding surfaces 21 and 31 of the first holding member 2 and the second holding member 3 are adhesive in order to hold the back surface W1r of the first work W1 and the back surface W2r of the second work W2 detachably and immovably. Holding chucks 22 and 32 made of a chuck, an electrostatic chuck, a suction chuck, or a combination thereof are provided.

　第一保持部材２及び第二保持部材３の具体例としては、図１（ａ）（ｂ）などに示されるように、第一保持部材２と第二保持部材３が定盤のような平板で構成することが好ましい。図１（ａ）（ｂ）などに示されるように、チャンバー１０がＺ方向へ第一チャンバー１０ａと第二チャンバー１０ｂに分割される場合には、下側の第一チャンバー１０ａの内部に、下側の第一ワークＷ１を着脱自在に保持する第一保持部材２が具備され、上側の第二チャンバー１０ｂの内部に、上側の第二ワークＷ２を着脱自在に保持する第二保持部材３が具備されている。
　特に、上側の第二保持部材３の保持チャック３２としては、第二保持部材３となる平板の保持面３１に、複数の粘着チャックをＸＹ方向へそれぞれ所定間隔毎に配設することで、上側の第二ワークＷ２が落下不能に粘着保持されるように構成することが好ましい。複数の粘着チャックは、第二保持部材３の平板に対してＺ方向へ往復動自在に支持され、これら粘着チャックの全てを第二保持部材３の平板の内部に没入移動させることにより、第二ワークＷ２から引き剥がされるように構成することが好ましい。
　粘着チャックによるワーク着脱構造について詳しく説明すると、図１（ａ）（ｂ）などに示されるように、複数の粘着チャックを連結部３３で一体化し、連結部３３が第二保持部材３の平板に向けて接近移動した時には、粘着チャックの粘着面を第二保持部材３の保持面３１と略面一状又は僅かに突出させて、第二ワークＷ２の表面と接触するようにしている。これと逆に、粘着チャックの連結部３３が第二保持部材３の平板から離隔移動した時（図示しない）には、粘着チャックの粘着面を第二保持部材３の保持面３１から没入させて、第二ワークＷ２の表面から引き剥がされるようにしている。
　また、第一保持部材２や第二保持部材３の変形例として、図３（ａ）（ｂ）に示されるように、第二保持部材３を平板に代えて複数個のピンで構成し、これらピンの先端面となる保持面３１に保持チャック３２として粘着チャックや静電チャックなどの真空中で保持可能な機構を設けることも可能である。なお、図示しないが、第一保持部材２の保持チャック２２を図示されるような第二保持部材３の保持チャック３２と同じ構造にすることも可能ある。 As a specific example of the first holding member 2 and the second holding member 3, as shown in FIGS. 1A and 1B, the first holding member 2 and the second holding member 3 are flat plates such as a surface plate. It is preferable to comprise. As shown in FIGS. 1A and 1B, when the chamber 10 is divided into the first chamber 10a and the second chamber 10b in the Z direction, A first holding member 2 for detachably holding the first work W1 on the side is provided, and a second holding member 3 for detachably holding the second work W2 on the upper side is provided in the upper second chamber 10b. Has been.
In particular, as the holding chuck 32 of the upper second holding member 3, a plurality of adhesive chucks are arranged at predetermined intervals in the XY direction on the holding surface 31 of the flat plate serving as the second holding member 3. It is preferable that the second workpiece W2 is configured to be adhered and held so as not to drop. The plurality of adhesive chucks are supported so as to be able to reciprocate in the Z direction with respect to the flat plate of the second holding member 3, and all of the adhesive chucks are moved into and out of the flat plate of the second holding member 3. It is preferable to configure so as to be peeled off from the workpiece W2.
The work attaching / detaching structure by the adhesive chuck will be described in detail. As shown in FIGS. 1A and 1B, a plurality of adhesive chucks are integrated by a connecting portion 33, and the connecting portion 33 is formed on a flat plate of the second holding member 3. When approaching and moving, the adhesive surface of the adhesive chuck is substantially flush with or slightly protruding from the holding surface 31 of the second holding member 3 so as to contact the surface of the second workpiece W2. On the contrary, when the connecting portion 33 of the adhesive chuck moves away from the flat plate of the second holding member 3 (not shown), the adhesive surface of the adhesive chuck is made to immerse from the holding surface 31 of the second holding member 3. The second work W2 is peeled off from the surface.
As a modification of the first holding member 2 and the second holding member 3, as shown in FIGS. 3 (a) and 3 (b), the second holding member 3 is composed of a plurality of pins instead of a flat plate, It is also possible to provide a mechanism that can be held in a vacuum, such as an adhesive chuck or an electrostatic chuck, as the holding chuck 32 on the holding surface 31 serving as the tip surface of these pins. Although not shown, the holding chuck 22 of the first holding member 2 may have the same structure as the holding chuck 32 of the second holding member 3 as shown.

　さらに、第一保持部材２又は第二保持部材３のいずれか一方か、若しくは第一保持部材２及び第二保持部材３の両方は、チャンバー１０の底壁部１１ａ又は天井部１１ｂに対してＺ方向へ移動自在に支持され、貼り合わせ用駆動部４によって第一保持部材２と第二保持部材３を相対的に接近或いは離隔するように移動させている。
　貼り合わせ用駆動部４は、アクチュエーターなどから構成され、後述する制御部７により、第一ワークＷ１と第二ワークＷ２を、それらの保持面にいずれか一方又は両方に塗布された接着剤（図示しない）を介して互いに重なり合うように、第一保持部材２又は第二保持部材３のいずれか一方か若しくは両方をＺ方向へ相対的に接近移動させるように作動制御している。
　貼り合わせ用駆動部４の具体例として、図１（ａ）（ｂ）などに示される場合には、第二保持部材３を、第一保持部材２に向けて下降させている。
　また、その他の例として図示しないが、第二保持部材３に代えて、第一保持部材２を上昇させるか、又は第一保持部材２及び第二保持部材３の両方を互いに接近移動させるなど、変更することも可能である。 Furthermore, either the first holding member 2 or the second holding member 3, or both the first holding member 2 and the second holding member 3 are Z with respect to the bottom wall portion 11 a or the ceiling portion 11 b of the chamber 10. The first holding member 2 and the second holding member 3 are moved so as to approach or separate from each other by the laminating drive unit 4.
The laminating drive unit 4 is composed of an actuator or the like, and an adhesive (illustrated) in which the first work W1 and the second work W2 are applied to either or both of the holding surfaces by the control unit 7 described later. The first holding member 2 and the second holding member 3 are controlled to move relatively close to each other in the Z direction so as to overlap each other.
As a specific example of the bonding drive unit 4, the second holding member 3 is lowered toward the first holding member 2 in the case shown in FIGS.
Although not shown as another example, instead of the second holding member 3, the first holding member 2 is raised, or both the first holding member 2 and the second holding member 3 are moved closer to each other. It is also possible to change.

　そして、第一保持部材２又は第二保持部材３のいずれか一方か若しくは両方には、チャンバー１０の底壁部１１ａ又は天井部１１ｂのいずれか一方か若しくは両方に開穿される貫通孔１２とＺ方向へ同一の軸線状に配置される通孔２Ｈ，３Ｈを開穿することが好ましい。
　詳しく説明すると、図１（ａ）（ｂ）などに示されるように、第一保持部材２と第二保持部材３が定盤のような平板で構成される場合には、第一保持部材２と第二保持部材３の両方に通孔２Ｈ，３Ｈを開穿している。
　また、その他の例として、図３（ａ）（ｂ）に示されるように、第二保持部材３を平板に代えて複数個のピンで構成し、これらピンの先端面となる保持面３１に保持チャック３２として粘着チャックや静電チャックなどの真空中で保持可能な機構を設けることも可能である。粘着チャックの連結部３３が平板で構成される場合には、連結部３３に通孔３Ｈを開穿して、後述する受け渡し部材５が、粘着チャックの連結部３３に対し、Ｚ方向へ無接触で挿通して往復動可能となるように構成している。なお、図示しないが、第一保持部材２や第二保持部材３又は粘着チャックの連結部３３が平板ではなく、例えば櫛歯状など、後述する受け渡し部材５と干渉しない形状に形成される場合には、通孔２Ｈ，３Ｈを開穿する必要がない。
　さらに必要に応じて、図１（ａ）（ｂ）などには図示しないが、第一保持部材２又は第二保持部材３のいずれか一方か若しくは両方には、位置合わせ手段（図示しない）が備えられ、第一保持部材２と第二保持部材３を相対的にＸＹθ方向へ移動させることで、第一ワークＷ１と第二ワークＷ２を位置合わせすることが好ましい。 Further, either one or both of the first holding member 2 and the second holding member 3 include a through-hole 12 that is opened in one or both of the bottom wall portion 11a and the ceiling portion 11b of the chamber 10 and It is preferable to open the through

holes

2H and 3H arranged in the same axial line in the Z direction.
More specifically, as shown in FIGS. 1A and 1B, when the first holding member 2 and the second holding member 3 are formed of flat plates such as a surface plate, the first holding member 2 is used. And the second holding member 3 have through

holes

2H and 3H.
As another example, as shown in FIGS. 3 (a) and 3 (b), the second holding member 3 is constituted by a plurality of pins instead of a flat plate, and a holding surface 31 serving as a tip surface of these pins is provided. As the holding chuck 32, a mechanism capable of holding in vacuum such as an adhesive chuck or an electrostatic chuck may be provided. In the case where the connecting portion 33 of the adhesive chuck is formed of a flat plate, a through hole 3H is opened in the connecting portion 33 so that a delivery member 5 described later does not contact the connecting portion 33 of the adhesive chuck in the Z direction. It is configured so that it can be reciprocated by being inserted through. Although not shown, when the first holding member 2, the second holding member 3, or the connecting portion 33 of the adhesive chuck is not a flat plate, it is formed in a shape that does not interfere with a delivery member 5 described later, such as a comb-like shape. Does not need to open the through

holes

2H and 3H.
Further, as necessary, although not shown in FIGS. 1A and 1B, or the like, either one or both of the first holding member 2 and the second holding member 3 has an alignment means (not shown). It is preferable to align the first workpiece W1 and the second workpiece W2 by relatively moving the first holding member 2 and the second holding member 3 in the XYθ directions.

　受け渡し部材５は、搬送ロボットなどの搬送手段Ｂと、第一保持部材２又は第二保持部材３のいずれか一方か若しくは両方とに亘って、第一ワークＷ１又は第二ワークＷ２のいずれか一方か若しくは両方を受け渡すリフトピンなどから構成され、ワーク保持用のチャック部５１と、チャック部５１に連設される軸部５２を有している。
　チャック部５１は、吸引源（図示しない）と連通して第一ワークＷ１又は第二ワークＷ２の表面を着脱自在に吸着保持する吸引チャックなどからなり、第一ワークＷ１又は第二ワークＷ２の一方か若しくは両方の表面に対して、ＸＹ方向へ所定間隔毎に複数か或いは単数設けられている。
　軸部５２は、その先端にチャック部５１からＺ方向へ延びるように設けられ、チャンバー１０内の変圧室１に対し、少なくとも変圧室１の貫通孔１２を無接触で挿通して、チャンバー１０の外部に配設される吸引源（図示しない）と連通するとともに、受け渡し用駆動部５ＤによってＺ方向へ往復動自在に構成されている。
　受け渡し用駆動部５Ｄは、アクチュエーターなどから構成され、後述する制御部７により、図１（ａ）などに示されるワーク搬入時においては、搬送ロボットなどの搬送手段Ｂ（第一搬送部Ｂａ，第二搬送部Ｂｂ）によって搬入された第一ワークＷ１又は第二ワークＷ２のいずれか一方か、若しくは両方に向け、チャック部５１及び軸部５２を移動させて、搬送手段Ｂからチャック部５１へワークを受け取るように作動制御されている。その後、図１（ｂ）などに示されるように、チャック部５１から第一保持部材２又は第二保持部材３の一方か若しくは両方へのワーク受け渡しが行われ、このワーク受け渡しが完了してからワーク貼り合わせ時においては、チャック部５１及び軸部５２を変圧室１の貫通孔１２から抜き出るように逆向きに移動させるように作動制御されている。 The delivery member 5 is either the first work W1 or the second work W2 across the transport means B such as a transport robot and either the first holding member 2 or the second holding member 3 or both. Or a lift pin that delivers both of them, and has a chuck portion 51 for holding a workpiece and a shaft portion 52 that is connected to the chuck portion 51.
The chuck portion 51 includes a suction chuck that communicates with a suction source (not shown) and detachably sucks and holds the surface of the first workpiece W1 or the second workpiece W2, and one of the first workpiece W1 and the second workpiece W2. Or, both or a plurality of surfaces are provided at predetermined intervals in the XY direction.
The shaft portion 52 is provided at the tip of the shaft portion 52 so as to extend in the Z direction from the chuck portion 51, and is inserted into the variable pressure chamber 1 in the chamber 10 at least through the through hole 12 of the variable pressure chamber 1 without contact. It communicates with an external suction source (not shown) and is configured to reciprocate in the Z direction by a delivery drive unit 5D.
The delivery drive unit 5D is composed of an actuator or the like, and when a work is loaded as shown in FIG. 1A or the like by the control unit 7 described later, the transfer means B (first transfer unit Ba, first transfer unit Ba, etc.) The chuck 51 and the shaft 52 are moved toward one or both of the first workpiece W1 and the second workpiece W2 carried in by the second conveying section Bb), and the workpiece is transferred from the conveying means B to the chuck section 51. Are controlled to receive. Thereafter, as shown in FIG. 1B and the like, the workpiece is transferred from the chuck portion 51 to one or both of the first holding member 2 and the second holding member 3, and after the workpiece transfer is completed. When the workpieces are bonded, the operation is controlled so that the chuck portion 51 and the shaft portion 52 are moved in the opposite directions so as to be extracted from the through hole 12 of the variable pressure chamber 1.

　受け渡し部材５の具体例としては、図１（ａ）（ｂ）などに示されるように、軸部５２がチャンバー１０の底壁部１１ａの第一貫通孔１２ａと第一保持部材２の通孔２Ｈを挿通する下側の第一受け渡し部材５ａと、軸部５２がチャンバー１０の天井部１１ｂの第二貫通孔１２ｂと第二保持部材３の通孔３Ｈを挿通する上側の第二受け渡し部材５ｂと、が備えられている。下側の第一受け渡し部材５ａのみを、受け渡し用駆動部５Ｄによって、下側の第一受け渡し部材５ａのチャック部５１が、第一貫通孔１２ａと第一保持部材２の通孔２Ｈから抜き出るように下降させている。上側の第二受け渡し部材５ｂは、第二チャンバー１０ｂが駆動手段１３で第一チャンバー１０ａへ向け接近移動（下降）することにより、上側の第二受け渡し部材５ｂのチャック部５１が、第二貫通孔１２ｂと第二保持部材３の通孔３Ｈから抜き出るように構成している。
　また、その他の例として図示しないが、上側の第二受け渡し部材５ｂのみを受け渡し用駆動部５Ｄで、チャック部５１が第二貫通孔１２ｂと第二保持部材３の通孔３Ｈから抜き出るように上昇させたり、図２（ａ）（ｂ）や図４（ａ）（ｂ）に示されるように、下側の第一受け渡し部材５ａ及び上側の第二受け渡し部材５ｂの両方を受け渡し用駆動部５Ｄで、これらのチャック部５１がそれぞれ抜き出るように逆方向へ移動させたり変更することも可能である。 As a specific example of the delivery member 5, as shown in FIGS. 1 (a) and 1 (b), the shaft portion 52 has a first through hole 12 a in the bottom wall portion 11 a of the chamber 10 and a through hole in the first holding member 2. The lower first delivery member 5a through which 2H is inserted, and the upper second delivery member 5b through which the shaft portion 52 is inserted through the second through hole 12b of the ceiling portion 11b of the chamber 10 and the through hole 3H of the second holding member 3. And are provided. Only the lower first delivery member 5a is pulled out of the first through hole 12a and the through hole 2H of the first holding member 2 by the delivery drive unit 5D. Has been lowered. The upper second delivery member 5b moves the lower chamber 10b closer to the first chamber 10a by the driving means 13 (lowering), so that the chuck portion 51 of the upper second delivery member 5b becomes the second through hole. 12b and the 2nd holding member 3 are comprised so that it may extract from 3H.
Although not shown in the drawings as another example, only the upper second delivery member 5b is used to deliver the chuck portion 51 from the second through hole 12b and the through hole 3H of the second holding member 3 in the delivery drive unit 5D. As shown in FIGS. 2 (a), 2 (b) and 4 (a) (b), both the lower first delivery member 5a and the upper second delivery member 5b are delivered. In 5D, it is also possible to move or change these chuck portions 51 in the opposite direction so as to be extracted.

　閉鎖部材６は、変圧室１が形成されるチャンバー１０の底壁部１１ａ又は天井部１１ｂのいずれか一方か若しくは両方に対して開閉動自在に設けられる蓋体６１を有している。
　蓋体６１は、貫通孔１２の開口よりも大きくて被蓋し得る形状に形成され、閉鎖用駆動部６Ｄによって貫通孔１２に対し所定の方向へ開閉動自在に構成されている。
　蓋体６１の閉鎖用駆動部６Ｄは、スライドアクチュエーターなどから構成され、後述する制御部７により、ワーク搬入時において、貫通孔１２が開口するように蓋体６１を移動させ、ワーク貼り合わせ時において、貫通孔１２から受け渡し部材５が抜き出された後に、貫通孔１２が気密状に閉鎖されるように蓋体６１を逆向きに移動させるように作動制御されている。 The closing member 6 has a lid 61 that can be opened and closed with respect to either or both of the bottom wall portion 11a and the ceiling portion 11b of the chamber 10 in which the variable pressure chamber 1 is formed.
The lid body 61 is formed in a shape that is larger than the opening of the through hole 12 and can be covered, and is configured to be movable in a predetermined direction with respect to the through hole 12 by the closing drive unit 6D.
The closing drive unit 6D of the lid 61 is composed of a slide actuator or the like, and the lid 61 is moved by the control unit 7 to be described later so that the through hole 12 is opened when the workpiece is loaded. After the delivery member 5 is extracted from the through hole 12, the operation is controlled so that the lid 61 is moved in the opposite direction so that the through hole 12 is closed in an airtight manner.

　閉鎖部材６の具体例としては、図１（ａ）（ｂ）などに示されるように、チャンバー１０の底壁部１１ａに開穿した第一貫通孔１２ａに対し、蓋体６１として平板状の第一蓋体６ａが底壁部１１ａに沿ってＸ方向へ往復動自在に支持されるとともに、天井部１１ｂに開穿した第二貫通孔１２ｂに対し、蓋体６１として平板状の第二蓋体６ｂが天井部１１ｂに沿って少なくともＸ方向へ往復動自在に支持されている。
　これら第一蓋体６ａ，第二蓋体６ｂのすべてを閉鎖用駆動部６Ｄで同時にＸ方向へ移動させることにより、第一貫通孔１２ａ及び第二貫通孔１２ｂをそれぞれ気密状に閉鎖している。 As a specific example of the closing member 6, as shown in FIGS. 1 (a) and 1 (b), the first through hole 12 a opened in the bottom wall portion 11 a of the chamber 10 has a flat plate shape as the lid 61. The first lid 6a is supported so as to reciprocate in the X direction along the bottom wall portion 11a, and a flat plate-like second lid is used as the lid body 61 for the second through hole 12b opened in the ceiling portion 11b. The body 6b is supported so as to reciprocate at least in the X direction along the ceiling portion 11b.
The first through hole 12a and the second through hole 12b are closed in an airtight manner by moving all of the first lid 6a and the second lid 6b simultaneously in the X direction by the closing drive unit 6D. .

　閉鎖用駆動部６Ｄによる蓋体６１の開閉方法として、図４（ａ）（ｂ）に示される場合には、天井部１１ｂの第二貫通孔１２ｂを開閉する複数の第二蓋体６ｂが連絡部６２で一体的に連結されている。
　第二蓋体６ｂの閉鎖用駆動部６Ｄは、スライドアクチュエーターなどからなるＸ方向移動用の駆動部６Ｄ１とＺ方向移動用の駆動部６Ｄ２を有し、これらＸ方向移動用の駆動部６Ｄ１及びＺ方向移動用の駆動部６Ｄ２が第二チャンバー１０ｂに対して一体的に組み付けられている。
　Ｘ方向移動用の駆動部６Ｄ１及びＺ方向移動用の駆動部６Ｄ２は、スライドアクチュエーターなどから構成され、後述する制御部７により、図４（ａ）などに示されるワーク搬入時においてはＸ方向移動用の駆動部６Ｄ１とＺ方向移動用の駆動部６Ｄ２により、第二蓋体６ｂを第二貫通孔１２ｂからＸ方向及びＺ方向へ離れた開動位置で待機させている。これに続き、上側の第二受け渡し部材５ｂで第二ワークＷ２が第二保持部材３の保持チャック３２に受け渡され、受け渡し用駆動部５Ｄで上側の第二受け渡し部材５ｂのチャック部５１が第二蓋体６ｂと干渉しない位置まで上昇した後に、Ｘ方向移動用の駆動部６Ｄ１により、連絡部６２と共に第二蓋体６ｂをチャンバー１０の天井部１１ｂと接触しないように、第二貫通孔１２ｂの上方位置までＸ方向へスライド移動させている。その後、図４（ｂ）に示されるワーク貼り合わせ時においては、駆動手段１３による第二チャンバー１０ｂの下降タイミングと同時か、又は下降タイミングよりも前に、Ｚ方向移動用の駆動部６Ｄ２により、連絡部６２と共に第二蓋体６ｂを第二貫通孔１２ｂに向けＺ方向へ下降させて閉じ、気密状に閉鎖している。ワーク貼り合わせ後は、第二蓋体６ｂが逆の手順で待機位置に戻される。
　一方、底壁部１１ａの第一貫通孔１２ａを開閉する複数の第一蓋体６ａは、図示されない連絡部で一体的に連結されるとともに、閉鎖用駆動部６Ｄとして図示されないＸ方向移動用の駆動部でＸ方向へスライド移動させることにより、図１（ａ）（ｂ）などに示される場合と同様に、第一貫通孔１２ａを気密状に閉鎖している。
　また、その他の例として図示しないが、第二蓋体６ｂを第一蓋体６ａと同様な構造の閉鎖用駆動部６Ｄにより開閉動させて第二貫通孔１２ｂを気密状に閉鎖したり、第一蓋体６ａを第二蓋体６ｂと同様な構造の閉鎖用駆動部６Ｄにより開閉動させて第一貫通孔１２ａを気密状に閉鎖したり変更することも可能である。 As shown in FIGS. 4 (a) and 4 (b), as a method for opening and closing the lid 61 by the closing drive unit 6D, a plurality of second lids 6b for opening and closing the second through hole 12b of the ceiling portion 11b communicate with each other. The parts 62 are integrally connected.
The closing drive unit 6D of the second lid body 6b includes a drive unit 6D1 for moving in the X direction and a drive unit 6D2 for moving in the Z direction made of a slide actuator, and the drive units 6D1 and Z for moving in the X direction. The direction moving drive unit 6D2 is integrally assembled with the second chamber 10b.
The driving unit 6D1 for moving in the X direction and the driving unit 6D2 for moving in the Z direction are composed of a slide actuator or the like, and are moved in the X direction by the control unit 7 to be described later when the workpiece is loaded as shown in FIG. The drive unit 6D1 for driving and the drive unit 6D2 for moving in the Z direction make the second lid 6b stand by at an open position away from the second through hole 12b in the X direction and the Z direction. Following this, the second workpiece W2 is transferred to the holding chuck 32 of the second holding member 3 by the upper second transfer member 5b, and the chuck portion 51 of the upper second transfer member 5b is transferred by the transfer drive unit 5D. After ascending to a position where it does not interfere with the two lids 6b, the second through-holes 12b are arranged so that the second lid 6b is not brought into contact with the ceiling 11b of the chamber 10 together with the connecting part 62 by the driving unit 6D1 for moving in the X direction. Is slid in the X direction up to the upper position. Thereafter, at the time of workpiece bonding shown in FIG. 4 (b), the driving unit 6D2 for moving in the Z direction is used at the same time as the lowering timing of the second chamber 10b by the driving means 13 or before the lowering timing. The second lid 6b together with the connecting portion 62 is lowered and closed in the Z direction toward the second through hole 12b, and is closed in an airtight manner. After the workpieces are pasted together, the second lid 6b is returned to the standby position in the reverse procedure.
On the other hand, the plurality of first lid bodies 6a for opening and closing the first through hole 12a of the bottom wall portion 11a are integrally connected by a connecting portion (not shown) and are used for moving in the X direction (not shown) as a closing drive portion 6D. By sliding the drive unit in the X direction, the first through hole 12a is closed in an airtight manner, as in the case shown in FIGS.
Although not shown as another example, the second lid 6b is opened and closed by a closing drive unit 6D having the same structure as the first lid 6a to close the second through hole 12b in an airtight manner, It is also possible to close or change the first through-hole 12a in an airtight manner by opening and closing the one lid 6a by a closing drive unit 6D having the same structure as the second lid 6b.

　さらに、閉鎖部材６の変形例として、図５（ａ）（ｂ）に示されるように、閉鎖部材６が、変圧室１が形成されるチャンバー１０の底壁部１１ａ又は天井部１１ｂのいずれか一方か若しくは両方に向けて、蓋体６１を回動自在に設け、閉鎖用駆動部６Ｄにより蓋体６１を、受け渡し部材５が抜き出し移動された貫通孔１２に向け閉動させることも可能である。
　詳しく説明すると、蓋体６１は、蓋体６１と同様に貫通孔１２の開口よりも大きくて被蓋し得る形状に形成され、その一辺をチャンバー１０の底壁部１１ａや天井部１１ｂに対してＺ方向などへ回動自在に支持し、閉鎖用駆動部６Ｄにより貫通孔１２に向け蓋体６１が回動して開閉するように構成されている。
　蓋体６１の閉鎖用駆動部６Ｄは、回転アクチュエーターなどから構成され、後述する制御部７により、ワーク搬入時において、貫通孔１２が開口するように蓋体６１を回動させ、ワーク貼り合わせ時において、貫通孔１２から受け渡し部材５が抜き出された後に、貫通孔１２が気密状に閉鎖されるように蓋体６１を逆向きに回動させるように作動制御されている。
　図５（ａ）（ｂ）に示される例では、チャンバー１０の天井部１１ｂに対し、蓋体６１として第二蓋体６ｂがＺ方向へ回動自在に支持され、閉鎖用駆動部６Ｄにより天井部１１ｂの第二貫通孔１２ｂに向け第二蓋体６ｂを回動させて開閉している。
　また、その他の閉鎖部材６の変形例として図示しないが、チャンバー１０の底壁部１１ａに対し、第一蓋体６ａをＺ方向へ回動自在に支持して、底壁部１１ａの第一貫通孔１２ａを第一蓋体６ａで開閉したり、チャンバー１０の底壁部１１ａや天井部１１ｂに沿って蓋体６１をＸＹ方向へ回動自在に支持し、閉鎖用駆動部６Ｄにより貫通孔１２に向け蓋体６１を回動させて開閉したり、図示例以外の開閉構造に変更することも可能である。 Furthermore, as a modified example of the closing member 6, as shown in FIGS. 5A and 5B, the closing member 6 is either the bottom wall portion 11a or the ceiling portion 11b of the chamber 10 in which the variable pressure chamber 1 is formed. It is also possible to provide the lid 61 so as to be pivotable toward one or both, and to close the lid 61 toward the through hole 12 from which the delivery member 5 has been extracted and moved by the closing drive unit 6D. .
More specifically, the lid body 61 is formed in a shape that is larger than the opening of the through hole 12 and can be covered like the lid body 61, and one side of the lid body 61 with respect to the bottom wall portion 11 a and the ceiling portion 11 b of the chamber 10. The lid 61 is rotatably supported in the Z direction or the like, and the lid 61 is rotated and opened toward the through hole 12 by the closing drive unit 6D.
The closing drive unit 6D of the lid 61 is composed of a rotary actuator or the like. When the workpiece is loaded, the lid 61 is rotated by the control unit 7 to be described later so that the through hole 12 is opened. In FIG. 5, after the delivery member 5 is extracted from the through hole 12, the operation is controlled so that the lid body 61 is rotated in the reverse direction so that the through hole 12 is closed in an airtight manner.
In the example shown in FIGS. 5 (a) and 5 (b), the second lid 6b is supported as a lid 61 so as to be rotatable in the Z direction with respect to the ceiling 11b of the chamber 10, and the ceiling drive unit 6D closes the ceiling. The second lid 6b is rotated toward the second through hole 12b of the portion 11b to open and close.
Although not shown as a modification of the other closure member 6, the first lid 6 a is rotatably supported in the Z direction with respect to the bottom wall portion 11 a of the chamber 10, and the first penetration of the bottom wall portion 11 a is performed. The hole 12a is opened and closed by the first lid body 6a, or the lid body 61 is rotatably supported in the XY direction along the bottom wall portion 11a and the ceiling portion 11b of the chamber 10, and the through hole 12 is driven by the closing drive portion 6D. It is also possible to open and close the cover body 61 by turning the cover body 61 toward the side, or to change to an opening / closing structure other than the illustrated example.

　制御部７は、チャンバー１０の開閉用駆動手段１３，１４と、第一保持部材２及び第二保持部材３の貼り合わせ用駆動部４と、受け渡し部材５の受け渡し用駆動部５Ｄと、閉鎖部材６の閉鎖用駆動部６Ｄにそれぞれ電気的に接続するだけでなく、変圧室１に対して第一ワークＷ１と第二ワークＷ２を出し入れするための搬送手段Ｂ（Ｂａ，Ｂｂ）や、チャンバー１０の吸排気手段や、第一ワークＷ１と第二ワークＷ２をＸＹθ方向へ相対的に移動させるための位置合わせ手段の位置合わせ用駆動部（図示しない）や、シール材を硬化させる硬化手段（図示しない）などにも電気的に接続するコントローラーである。
　制御部７となるコントローラーは、その制御回路（図示しない）に予め設定されたプログラムに従って、予め設定されたタイミングで順次それぞれ作動制御している。
　詳しく説明すると、制御部７が、ワーク搬入時においては、貫通孔１２が開口するように閉鎖部材６を開動させるとともに、受け渡し部材５をワーク受け渡しのために移動させるように作動制御している。その後のワーク貼り合わせ時においては、貫通孔１２から受け渡し部材５を抜き出し、貫通孔１２が気密状に閉鎖されるように閉鎖部材６を閉動させるとともに、第一保持部材２及び第二保持部材３を相対的に接近移動させるように作動制御している。 The control unit 7 includes an opening / closing drive means 13 and 14 for the chamber 10, a bonding drive unit 4 for the first holding member 2 and the second holding member 3, a delivery drive unit 5D for the delivery member 5, and a closing member. In addition to being electrically connected to the closing drive unit 6D, the transfer means B (Ba, Bb) for taking in and out the first work W1 and the second work W2 with respect to the variable pressure chamber 1, and the chamber 10 Intake / exhaust means, a positioning drive unit (not shown) for positioning means for relatively moving the first work W1 and the second work W2 in the XYθ direction, and a hardening means (not shown) for hardening the sealing material. It is a controller that is electrically connected to the
The controller serving as the controller 7 sequentially controls the operation at a preset timing in accordance with a preset program in its control circuit (not shown).
More specifically, when the workpiece is carried in, the control unit 7 controls the operation so that the closing member 6 is opened so that the through-hole 12 is opened and the delivery member 5 is moved for workpiece delivery. At the time of subsequent workpiece bonding, the delivery member 5 is extracted from the through hole 12, and the closing member 6 is closed so that the through hole 12 is closed in an airtight manner, and the first holding member 2 and the second holding member. The operation is controlled so as to relatively move 3.

　このような本発明の実施形態に係る貼合デバイスＷの製造装置Ａによると、図１（ａ）などに示されるように、変圧室１が形成されるチャンバー１０の内部へ第一ワークＷ１及び第二ワークＷ２が搬入されるワーク搬入時には、制御部７で閉鎖部材６が開動して変圧室１の貫通孔１２を開口させる。それにより、受け渡し部材５が移動可能になって、第一ワークＷ１又は第二ワークＷ２のいずれか一方か若しくは両方を受け渡し部材５で受け取るとともに、受け渡し部材５から第一保持部材２又は第二保持部材３のいずれか一方か若しくは両方に受け渡す。このワーク受け渡し後は、図１（ｂ）などに示されるように、制御部７で変圧室１の貫通孔１２から受け渡し部材５を抜き出してから、閉鎖部材６が閉動して貫通孔１２を気密状に閉鎖させる。それにより、変圧室１が高度な真空状態になるまで減圧可能になる。この減圧状態で、第一保持部材２又は第二保持部材３の一方若しくは両方が相対的に接近移動して、第一ワークＷ１と第二ワークＷ２が貼り合わされる。
　したがって、変圧室１や貫通孔１２と受け渡し部材５との間にシール部材を用いることなく受け渡し部材５を無接触で且つ無制限に移動可能なシール構造を提供することができる。
　その結果、摺動部位が無いシール構造であるため、ゴミの発生によるワークの貼り合わせに悪影響や、摩耗に伴う部品交換や、圧力差の変化によるシール部材の変形を防止できて、長期に亘り安定した稼働が図れる。
　さらに、受け渡し部材５をフリーで移動できるため、部品の寿命低下や、装置全体の大型化を防止できて、コストの低減化が図れる。 According to the manufacturing apparatus A for the bonding device W according to the embodiment of the present invention, as shown in FIG. 1A and the like, the first work W1 and the inside of the chamber 10 in which the variable pressure chamber 1 is formed and At the time of loading the workpiece into which the second workpiece W2 is loaded, the closing member 6 is opened by the control unit 7 to open the through hole 12 of the variable pressure chamber 1. Thereby, the delivery member 5 becomes movable, and either one or both of the first work W1 and the second work W2 are received by the delivery member 5, and from the delivery member 5, the first holding member 2 or the second holding member is received. Transfer to one or both of the members 3. After the workpiece is transferred, as shown in FIG. 1B and the like, the control member 7 pulls out the transfer member 5 from the through hole 12 of the variable pressure chamber 1, and then the closing member 6 is closed to open the through hole 12. Close in an airtight manner. Accordingly, the pressure can be reduced until the variable pressure chamber 1 is in a high vacuum state. In this reduced pressure state, one or both of the first holding member 2 and the second holding member 3 move relatively close together, and the first workpiece W1 and the second workpiece W2 are bonded together.
Accordingly, it is possible to provide a seal structure in which the transfer member 5 can be moved without contact and without limitation without using a seal member between the variable pressure chamber 1 or the through hole 12 and the transfer member 5.
As a result, since the seal structure has no sliding parts, it is possible to prevent adverse effects on workpiece bonding due to the generation of dust, replacement of parts due to wear, and deformation of the seal member due to changes in pressure difference. Stable operation can be achieved.
Furthermore, since the delivery member 5 can be moved freely, it is possible to prevent a reduction in the service life of parts and an increase in the size of the entire apparatus, thereby reducing costs.

　特に、図１（ａ）（ｂ）などに示されるように、第一保持部材２又は第二保持部材３のいずれか一方か若しくは両方は、変圧室１の貫通孔１２とワーク貼り合わせ方向（Ｚ方向）へ同軸状に配置される通孔２Ｈ，３Ｈを有し、受け渡し部材５は、ワーク保持用のチャック部５１を有し、受け渡し用駆動部５Ｄによりチャック部５１が貫通孔１２及び通孔２Ｈ，３Ｈを挿通し、変圧室１に搬入された第一ワークＷ１又は第二ワークＷ２のいずれか一方か若しくは両方に向け移動して保持させ、ワーク受け渡しが完了してから、チャック部５１を通孔２Ｈ，３Ｈ及び貫通孔１２から抜き出し移動させることが好ましい。
　この場合には、変圧室１に搬入される第一ワークＷ１又は第二ワークＷ２の一方か若しくは両方を、受け渡し部材５のチャック部５１で保持して受け取った後に、受け渡し部材５のチャック部５１が、通孔２Ｈ，３Ｈを通って第一保持部材２又は第二保持部材３の一方か若しくは両方に向け無接触で移動することにより、第一ワークＷ１又は第二ワークＷ２の一方か若しくは両方が第一保持部材２又は第二保持部材３の一方か若しくは両方に受け渡される。このワーク受け渡し後は、ワーク貼り合わせのために通孔２Ｈ，３Ｈ及び貫通孔１２からチャック部５１が引き出され、閉鎖部材６の閉動で変圧室１が高度な気密状態になるまで減圧される。
　したがって、第一保持部材２や第二保持部材３に対して受け渡し部材５を無接触で且つ無制限に移動可能なシールをすることができる。
　その結果、第一保持部材２や第二保持部材３に対する第一ワークＷ１や第二ワークＷ２の受け渡しを確実に且つ簡素な構造で行うことができ、更なる装置全体のコンパクト化と更なるコストの低減化が図れる。 In particular, as shown in FIGS. 1 (a) and 1 (b), one or both of the first holding member 2 and the second holding member 3 are connected to the through hole 12 of the variable pressure chamber 1 and the workpiece bonding direction ( ZH), and the delivery member 5 has a chuck part 51 for holding a workpiece, and the chuck part 51 is connected to the through-hole 12 and the through-hole 12D by the delivery drive part 5D. After the

holes

2H and 3H are inserted and moved toward one or both of the first workpiece W1 and the second workpiece W2 carried into the variable pressure chamber 1 and held, the chuck portion 51 is completed. The through

holes

2H and 3H and the through holes 12 are preferably extracted and moved.
In this case, after one or both of the first workpiece W1 and the second workpiece W2 carried into the variable pressure chamber 1 are held and received by the chuck portion 51 of the delivery member 5, the chuck portion 51 of the delivery member 5 is received. Moves through the through-

holes

2H and 3H toward one or both of the first holding member 2 and the second holding member 3 in a contactless manner, so that one or both of the first workpiece W1 and the second workpiece W2 are moved. Is delivered to one or both of the first holding member 2 and the second holding member 3. After the workpiece is transferred, the chuck portion 51 is pulled out from the through

holes

2H and 3H and the through hole 12 for bonding the workpieces, and the pressure is reduced until the variable pressure chamber 1 is in a highly airtight state by the closing member 6 being closed. .
Therefore, the transfer member 5 can be contacted with the first holding member 2 and the second holding member 3 without contact and without limitation.
As a result, the delivery of the first workpiece W1 and the second workpiece W2 to the first holding member 2 and the second holding member 3 can be performed reliably and with a simple structure, further downsizing the entire device and further cost. Can be reduced.

　さらに、図１（ａ）（ｂ）～図４（ａ）（ｂ）などに示されるように、閉鎖部材６は、変圧室１の底壁部１１ａ又は天井部１１ｂのいずれか一方か若しくは両方に沿ってワーク貼り合わせ方向（Ｚ方向）と交差する方向（Ｘ方向）へ開閉動自在に設けられる蓋体６１を有し、閉鎖用駆動部６Ｄにより蓋体６１を、受け渡し部材５が抜き出し移動された貫通孔１２に向け閉動させることが好ましい。
　この場合には、変圧室１の貫通孔１２から受け渡し部材５が抜き出された後に、閉鎖部材６の蓋体６１を変圧室１の底壁部１１ａや天井部１１ｂに沿ってＸ方向へ閉動して貫通孔１２が被蓋される。
　したがって、貫通孔１２を確実に開閉して変圧室１を完全な密閉状態にすることができる。
　その結果、簡素な構造で第一ワークＷ１と第二ワークＷ２を完全な真空状態で貼り合わせることができる。 Further, as shown in FIGS. 1 (a) (b) to 4 (a) (b), etc., the closing member 6 is either one or both of the bottom wall portion 11a and the ceiling portion 11b of the variable pressure chamber 1. The lid 61 is provided so as to freely open and close in the direction (X direction) intersecting the workpiece laminating direction (Z direction), and the transfer member 5 is extracted and moved by the closing drive unit 6D. It is preferable to make it close toward the through-hole 12 made.
In this case, after the delivery member 5 is extracted from the through hole 12 of the variable pressure chamber 1, the lid 61 of the closing member 6 is closed in the X direction along the bottom wall portion 11a and the ceiling portion 11b of the variable pressure chamber 1. It moves and the through-hole 12 is covered.
Therefore, the through-hole 12 can be reliably opened and closed, and the variable pressure chamber 1 can be completely sealed.
As a result, the first workpiece W1 and the second workpiece W2 can be bonded together in a complete vacuum state with a simple structure.

　また、図５（ａ）（ｂ）に示されるように、閉鎖部材６は、変圧室１の底壁部１１ａ又は天井部１１ｂのいずれか一方か若しくは両方に向けて回動自在に設けられる蓋体６１を有し、閉鎖用駆動部６Ｄにより蓋体６１を、受け渡し部材５が抜き出し移動された貫通孔１２に向け閉動させる場合には、変圧室１の貫通孔１２から受け渡し部材５が抜き出された後に、閉鎖部材６の蓋体６１を変圧室１の底壁部１１ａや天井部１１ｂに向けて回動して貫通孔１２が被蓋される。
　したがって、貫通孔１２を確実に開閉して変圧室１を完全な密閉状態にすることができる。
　その結果、簡素な構造で第一ワークＷ１と第二ワークＷ２を完全な真空状態で貼り合わせることができる。 5 (a) and 5 (b), the closing member 6 is a lid that is rotatably provided toward one or both of the bottom wall portion 11a and the ceiling portion 11b of the variable pressure chamber 1. In the case where the lid 61 is moved toward the through hole 12 from which the delivery member 5 has been extracted and moved by the closing drive unit 6D, the delivery member 5 is removed from the through hole 12 of the variable pressure chamber 1. After being taken out, the cover 61 of the closing member 6 is rotated toward the bottom wall portion 11a and the ceiling portion 11b of the variable pressure chamber 1 so that the through hole 12 is covered.
Therefore, the through-hole 12 can be reliably opened and closed, and the variable pressure chamber 1 can be completely sealed.
As a result, the first workpiece W1 and the second workpiece W2 can be bonded together in a complete vacuum state with a simple structure.

　次に、本発明の各実施例を図面に基づいて説明する。
　この実施例１は、図６（ａ）（ｂ）に示すように、受け渡し部材５の軸部５２をＺ方向へ移動自在に案内するためのガイド部材５３を、変圧室１の貫通孔１２とＺ方向へ同軸状に設けたものである。
　ガイド部材５３は、転がりを用いた直動ガイドなどで構成され、受け渡し部材５の軸部５２の外面とＸＹ方向へ当接してＺ方向のみに移動可能に支えている。変圧室１が形成されるチャンバー１０の底壁部１１ａや天井部１１ｂに対しガイド部材５３を一体的に組み付けることで、軸部５２のＺ方向への移動と関係なく、貫通孔１２とのＺ方向へ同軸状態が保持されている。 Next, each embodiment of the present invention will be described with reference to the drawings.
In the first embodiment, as shown in FIGS. 6A and 6B, the guide member 53 for guiding the shaft portion 52 of the delivery member 5 to be movable in the Z direction is provided with the through hole 12 of the variable pressure chamber 1. It is provided coaxially in the Z direction.
The guide member 53 is configured by a linear guide using rolling, and supports the outer surface of the shaft portion 52 of the delivery member 5 in the XY direction so as to be movable only in the Z direction. By assembling the guide member 53 integrally with the bottom wall portion 11a and the ceiling portion 11b of the chamber 10 in which the variable pressure chamber 1 is formed, the Z with the through hole 12 is independent of the movement of the shaft portion 52 in the Z direction. A coaxial state is maintained in the direction.

　図６（ａ）（ｂ）に示される例では、第二チャンバー１０ｂの外側にガイド部材５３を板状部材５４によって、チャンバー１０の天井部１１ｂの第二貫通孔１２ｂとＺ方向へ同一軸線状に固定配置される一体的に組み付けている。
　また、その他の例として図示しないが、第一チャンバー１０ａや箱形のチャンバー１０ｃに対して、ガイド部材５３をチャンバー１０の底壁部１１ａの第一貫通孔１２ａなどとＺ方向へ同一軸線状に固定配置される一体的に組み付けることも可能である。 In the example shown in FIGS. 6A and 6B, the guide member 53 is placed outside the second chamber 10 b by the plate-like member 54, and is coaxial with the second through hole 12 b of the ceiling portion 11 b of the chamber 10 in the Z direction. It is assembled in one piece that is fixedly arranged.
Although not shown in the drawings as another example, the guide member 53 is aligned with the first through hole 12a of the bottom wall portion 11a of the chamber 10 in the same direction in the Z direction with respect to the first chamber 10a or the box-shaped chamber 10c. It is also possible to assemble them fixedly.

　このような本発明の実施例１に係る貼合デバイスＷの製造装置Ａによると、受け渡し部材５の軸部５２が長くなっても、ガイド部材５３によりＺ方向のみに移動可能に案内されるため、軸部５２のＺ方向への移動に伴ってそれと交差するＸＹ方向へ振れ移動することがない。
　したがって、受け渡し部材５の軸部５２を変圧室１の貫通孔１２や壁面などと接触せずスムーズで確実に移動させることができる。
　その結果、安定性に優れるという利点がある。 According to the manufacturing apparatus A for the bonding device W according to the first embodiment of the present invention, the guide member 53 is guided so as to be movable only in the Z direction even when the shaft portion 52 of the delivery member 5 becomes long. As the shaft portion 52 moves in the Z direction, there is no wobbling movement in the XY direction that intersects with the Z portion.
Therefore, the shaft portion 52 of the delivery member 5 can be moved smoothly and reliably without contacting the through hole 12 or the wall surface of the variable pressure chamber 1.
As a result, there is an advantage of excellent stability.

　この実施例２は、図７（ａ）（ｂ）に示すように、変圧室１が形成されるチャンバー１０をＺ方向へ、内部に第一保持部材２が具備される第一チャンバー１０ａと、内部に第二保持部材３が具備される第二チャンバー１０ｂに分割し、第一チャンバー１０ａ又は第二チャンバー１０ｂの一方を他方へ向けて反転させるための反転手段８を設け、反転手段８で第一チャンバー１０ａと第二チャンバー１０ｂが共にＺ方向へ開口するように反転した開動位置を、第一チャンバー１０ａ内の第一保持部材２に向けて第一ワークＷ１が搬入されるとともに、第二チャンバー１０ｂ内の第二保持部材３に向けて第二ワークＷ２が搬入される搬入ポジションＰ１とし、反転手段８で第一チャンバー１０ａと第二チャンバー１０ｂがＺ方向へ重ね合わされるように反転した閉動位置を、第一ワークＷ１及び第二ワークＷ２が貼り合わされる貼り合わせポジションＰ２とする構成が、図６（ａ）（ｂ）に示した実施例１とは異なるものである。
　なお、図示しないが、実施例２も図６（ａ）（ｂ）に示した実施例１のように構成することも可能である。 As shown in FIGS. 7A and 7B, the second embodiment includes a first chamber 10a in which a first holding member 2 is provided inside a chamber 10 in which a variable pressure chamber 1 is formed in the Z direction. A reversing means 8 is provided for reversing one of the first chamber 10a and the second chamber 10b toward the other, divided into second chambers 10b in which the second holding member 3 is provided. The first workpiece W1 is loaded toward the first holding member 2 in the first chamber 10a at the opening position where the one chamber 10a and the second chamber 10b are reversed so as to open in the Z direction, and the second chamber The loading position P1 into which the second workpiece W2 is loaded toward the second holding member 3 in 10b is set, and the first chamber 10a and the second chamber 10b are overlapped in the Z direction by the reversing means 8. The configuration in which the closed moving position reversed is a bonding position P2 where the first workpiece W1 and the second workpiece W2 are bonded is different from that of the first embodiment shown in FIGS. 6 (a) and 6 (b). .
Although not shown, the second embodiment can also be configured as in the first embodiment shown in FIGS. 6 (a) and 6 (b).

　反転手段８は、第一チャンバー１０ａ又は第二チャンバー１０ｂのいずれか一方に連設され、反転用駆動源１５によって第一チャンバー１０ａ又は第二チャンバー１０ｂの一方を、搬入ポジションＰ１となる開動位置から貼り合わせポジションＰ２となる閉動位置に向け、Ｚ方向へ反転移動自在に構成している。さらに必要に応じて、反転手段８は、第一チャンバー１０ａ又は第二チャンバー１０ｂの一方を他方へ向けてＺ方向へ昇降移動させる機能を有することが好ましい。
　反転用駆動源１５は、アクチュエーターなどから構成され、制御部７により、ワーク搬入時には搬入ポジションＰ１において、第一チャンバー１０ａを第一保持部材２の保持チャック２２がＺ方向へ露出するように開口させると同時に、第二チャンバー１０ｂを第二保持部材３の保持チャック３２がＺ方向へ露出するように開口させるように作動制御されている。受け渡し部材５によるワーク受け渡し後には、第一チャンバー１０ａ又は第二チャンバー１０ｂの一方を他方へ向け反転して、チャンバー１０が閉じ密封状態となると同時に、貼り合わせポジションＰ２において、第一保持部材２の保持チャック２２に保持された第一ワークＷ１の膜面などからなる貼り合わせ面Ｗ１ｆと、第二保持部材３の保持チャック３２に保持された第二ワークＷ２の膜面などからなる貼り合わせ面Ｗ２ｆがＺ方向へ対向するように作動制御されている。 The reversing means 8 is connected to either the first chamber 10a or the second chamber 10b, and the reversing drive source 15 moves one of the first chamber 10a or the second chamber 10b from the open position where it becomes the loading position P1. It is configured to be movable in a reverse direction in the Z direction toward the closing position that becomes the bonding position P2. Furthermore, the reversing means 8 preferably has a function of moving up or down in the Z direction toward one of the first chamber 10a or the second chamber 10b as necessary.
The reversing drive source 15 is composed of an actuator or the like, and the control unit 7 opens the first chamber 10a so that the holding chuck 22 of the first holding member 2 is exposed in the Z direction at the loading position P1 when the workpiece is loaded. At the same time, the operation of the second chamber 10b is controlled to open so that the holding chuck 32 of the second holding member 3 is exposed in the Z direction. After the workpiece is transferred by the transfer member 5, one of the first chamber 10a and the second chamber 10b is reversed toward the other, the chamber 10 is closed and sealed, and at the bonding position P2, the first holding member 2 A bonding surface W1f including a film surface of the first workpiece W1 held by the holding chuck 22 and a bonding surface W2f including a film surface of the second workpiece W2 held by the holding chuck 32 of the second holding member 3 Are controlled so as to face each other in the Z direction.

　図７（ａ）（ｂ）に示される例では、内部に第一保持部材２が具備される下側の第一チャンバー１０ａに対し、内部に第二保持部材３が具備される上側の第二チャンバー１０ｂを反転手段８で反転自在に支持している。
　図７（ａ）に示される搬入ポジションＰ１では、第一チャンバー１０ａと第二チャンバー１０ｂが共に上向きに開口するように開動させ、第二受け渡し部材５ｂにより第二ワークＷ２が第二保持部材３の保持チャック３２に受け渡された後に、反転手段８により上側の第二チャンバー１０ｂを下側の第一チャンバー１０ａに向け反転移動して、第一受け渡し部材５ａにより第一保持部材２の保持チャック２２に受け渡される第一ワークＷ１とＺ方向へ対向させている。
　図７（ｂ）に示される貼り合わせポジションＰ２では、反転手段８により、反転移動した上側の第二チャンバー１０ｂを下降させ、下側の第一チャンバー１０ａと接触してチャンバー１０が閉じるようにしている。
　また、その他の例として図示しないが、反転手段８により上側の第二チャンバー１０ｂを下側の第一チャンバー１０ａに向けて反転移動した後に、下側の第一チャンバー１０ａを駆動手段１３で上昇させ、上側の第二チャンバー１０ｂと接触してチャンバー１０が閉じるように変更することも可能である。 In the example shown in FIGS. 7 (a) and 7 (b), the upper second chamber 3a provided with the second holding member 3 is provided in the lower first chamber 10a provided with the first holding member 2 therein. The chamber 10b is supported by the reversing means 8 so as to be reversible.
7A, the first chamber 10a and the second chamber 10b are both opened so as to open upward, and the second delivery member 5b causes the second workpiece W2 to move to the second holding member 3. After being transferred to the holding chuck 32, the reversing means 8 reversely moves the upper second chamber 10 b toward the lower first chamber 10 a, and the first transferring member 5 a moves the holding chuck 22 of the first holding member 2. It is made to oppose to the 1st workpiece | work W1 delivered to Z direction.
At the bonding position P2 shown in FIG. 7 (b), the reversing means 8 lowers the second chamber 10b that has been reversed and brought into contact with the lower first chamber 10a so that the chamber 10 is closed. Yes.
Although not shown as another example, the upper second chamber 10b is reversed by the reversing means 8 toward the lower first chamber 10a, and then the lower first chamber 10a is raised by the driving means 13. It is also possible to change so that the chamber 10 is closed in contact with the upper second chamber 10b.

　このような本発明の実施例２に係る貼合デバイスＷの製造装置Ａによると、図７（ａ）（ｂ）に示されるように、搬入ポジションＰ１において反転手段８により第一チャンバー１０ａと第二チャンバー１０ｂが共に上向きに開口するように反転させると、変圧室１に搬入される第一ワークＷ１と第二ワークＷ２を、それぞれの貼り合わせ面Ｗ１ｆ，Ｗ２ｆが上向きになるように裏面Ｗ１ｒ，Ｗ２ｒを下から支持したまま、受け渡し部材５で受け取れるとともに、第一保持部材２と第二保持部材３に受け渡される。
　したがって、変圧室１に搬入された第一ワークＷ１と第二ワークＷ２をそれらの貼り合わせ面Ｗ１ｆ，Ｗ２ｆに不接触で且つ簡単に第一保持部材２と第二保持部材３に受け渡すことができる。
　その結果、受け渡し部材５に限らず、変圧室１への搬入手段として用いられる搬送ロボットなども含めて、第一ワークＷ１及び第二ワークＷ２の搬送システムの構造が簡素化できるため、コストの低減化が図れるとともに、これらの搬送に伴う膜面などからなる貼り合わせ面Ｗ１ｆ，Ｗ２ｆへの傷付きを完全に防止できるため、貼合デバイスＷの品質の向上も図れるという利点がある。 According to the manufacturing apparatus A of the bonding device W according to the second embodiment of the present invention, as shown in FIGS. 7A and 7B, the first chamber 10a and the first chamber 10a are moved by the reversing unit 8 at the loading position P1. When the two chambers 10b are reversed so as to open upward, the first workpiece W1 and the second workpiece W2 carried into the variable pressure chamber 1 are rearwardly connected to the rear surfaces W1r, W1f, W2f so that the respective bonding surfaces W1f, W2f are upward. While being supported by W2r from below, it can be received by the transfer member 5 and transferred to the first holding member 2 and the second holding member 3.
Therefore, the first workpiece W1 and the second workpiece W2 carried into the variable pressure chamber 1 can be easily transferred to the first holding member 2 and the second holding member 3 without contacting the bonding surfaces W1f and W2f. it can.
As a result, the structure of the transfer system for the first workpiece W1 and the second workpiece W2 can be simplified, including not only the delivery member 5 but also a transfer robot used as a means for carrying into the variable pressure chamber 1, thus reducing costs. There is an advantage that the quality of the bonding device W can be improved because it is possible to completely prevent damage to the bonding surfaces W1f and W2f made of the film surfaces and the like accompanying the conveyance.

　この実施例３は、図８（ａ）～（ｃ）に示すように、搬入ポジションＰ１において、受け渡し部材５となる第一受け渡し部材５ａで受け取った第一ワークＷ１又は第二受け渡し部材５ｂで受け取った第二ワークＷ２のいずれか一方を他方に対して相対的にＸＹθ方向へ移動させてＺ方向へ位置合わせする位置合わせ手段９を備え、位置合わせ手段９は、第一受け渡し部材５ａで受け取った第一ワークＷ１と、第二受け渡し部材５ｂで受け取った第二ワークＷ２を位置検出する検出部９１と、検出部９１からの位置データに基づいて第一受け渡し部材５ａ又は第二受け渡し部材５ｂのいずれか一方か若しくは両方をＸＹθ方向へ相対的に移動させる位置合わせ用駆動部９２を有する構成が、図７（ａ）（ｂ）に示した実施例２とは異なり、それ以外の構成は図７（ａ）（ｂ）に示した実施例２と同じものである。 In the third embodiment, as shown in FIGS. 8A to 8C, the first workpiece W1 or the second delivery member 5b received by the first delivery member 5a serving as the delivery member 5 at the loading position P1 is received. The second workpiece W2 is provided with alignment means 9 that moves in the XYθ direction relative to the other to align in the Z direction, and the alignment means 9 is received by the first delivery member 5a. Based on the position data from the first work W1, the second delivery member 5b and the second work W2 received by the second delivery member 5b, the first delivery member 5a or the second delivery member 5b. Unlike the second embodiment shown in FIGS. 7 (a) and 7 (b), the configuration having the alignment driving unit 92 that relatively moves either or both in the XYθ direction The configuration other than that is the same as that of the second embodiment shown in FIGS.

　位置合わせ手段９の検出部９１は、予め第一ワークＷ１や第二ワークＷ２に付されたマークやコーナー部などを撮影によって検知するカメラなどからなる。位置合わせ用駆動部９２は、第一受け渡し部材５ａや第二受け渡し部材５ｂに連設されるＸＹθステージやＸＹテーブルなどからなる。
　検出部９１と位置合わせ用駆動部９２は、図示しないが、制御部７を介して電気的に接続されており、検出部９１から入力した位置データに基づき位置合わせ用駆動部９２を作動させている。
　詳しく説明すると、位置合わせ手段９は、検出部９１から入力した位置データにより、第一受け渡し部材５ａで支持された第一ワークＷ１のＸＹ方向位置と、第二受け渡し部材５ｂで支持された第二ワークＷ２のＸＹ方向位置との位置ズレ状況を検知し、位置ズレ量を位置合わせ用駆動部９２に出力して作動させている。
　位置合わせ用駆動部９２は、この位置ズレ量に応じて第一受け渡し部材５ａ又は第二受け渡し部材５ｂのいずれか一方か若しくは両方をＸＹθ方向へ相対的に移動させることにより、第一受け渡し部材５ａと第二受け渡し部材５ｂのＸＹ方向位置が相対的に調整移動される。
　制御部７は、位置合わせ用駆動部９２による調整移動が終了した後に、第一受け渡し部材５ａの作動を開始して、第一ワークＷ１が第一保持部材２の保持チャック２２に受け渡されるとともに、第二受け渡し部材５ｂの作動を開始して、第二ワークＷ２が第二保持部材３の保持チャック３２に受け渡される。この受け渡し時においては、第一受け渡し部材５ａ又は第二受け渡し部材５ｂのいずれか一方か若しくは両方が、位置合わせ用駆動部９２によるＸＹ方向位置を維持しながら、第一ワークＷ１と第二ワークＷ２の受け渡しを行うことで、貼り合わせポジションＰ２において第一ワークＷ１と第二ワークＷ２のＸＹ方向位置がＺ方向へ位置合わせされるように構成している。 The detection unit 91 of the alignment means 9 includes a camera that detects a mark, a corner portion, and the like previously attached to the first workpiece W1 and the second workpiece W2 by photographing. The alignment driving unit 92 includes an XYθ stage, an XY table, and the like that are connected to the first delivery member 5a and the second delivery member 5b.
Although not shown, the detection unit 91 and the alignment drive unit 92 are electrically connected via the control unit 7 and operate the alignment drive unit 92 based on the position data input from the detection unit 91. Yes.
More specifically, the alignment means 9 uses the position data input from the detection unit 91 to determine the position in the XY direction of the first workpiece W1 supported by the first delivery member 5a and the second position supported by the second delivery member 5b. The positional deviation state with respect to the position of the workpiece W2 in the XY direction is detected, and the positional deviation amount is output to the alignment driving unit 92 to be operated.
The alignment driving section 92 moves either the first delivery member 5a or the second delivery member 5b or both in the XYθ direction relative to the first displacement member 5a according to the amount of displacement. And the XY direction position of the 2nd delivery member 5b is adjusted and moved relatively.
The control unit 7 starts the operation of the first delivery member 5a after the adjustment movement by the positioning drive unit 92 is completed, and the first workpiece W1 is delivered to the holding chuck 22 of the first holding member 2. Then, the operation of the second delivery member 5b is started, and the second workpiece W2 is delivered to the holding chuck 32 of the second holding member 3. At the time of this delivery, either the first delivery member 5a or the second delivery member 5b or both of the first workpiece W1 and the second workpiece W2 are maintained while maintaining the position in the XY direction by the positioning drive unit 92. By performing the delivery, the XY direction positions of the first workpiece W1 and the second workpiece W2 are aligned in the Z direction at the bonding position P2.

　図８（ａ）～（ｃ）に示される例では、図８（ａ）に示される搬入ポジションＰ１において、第一チャンバー１０ａと第二チャンバー１０ｂが共に上向きに開口するように開動し、第一搬送部Ｂａから第一ワークＷ１が第一受け渡し部材５ａのチャック部５１に受け渡された状態を、複数の検出部９１で撮影して第一ワークＷ１のＸＹ方向位置が検知されるとともに、第二搬送部Ｂｂから第二ワークＷ２が第二受け渡し部材５ｂのチャック部５１に受け渡された状態を、複数の検出部９１で撮影して第二ワークＷ２のＸＹ方向位置が検知されている。
　第二受け渡し部材５ｂに位置合わせ用駆動部９２が設けられ、複数の検出部９１から出力された位置データに基づいた位置ズレ量に応じて、第二受け渡し部材５ｂのみを第二貫通孔１２ｂ及び通孔３Ｈの内部でＸＹθ方向へ調整移動し、この調整移動されたＸＹ方向位置を維持しながら第二ワークＷ２が第二保持部材３の保持チャック３２に受け渡されている。
　また、その他の例として図示しないが、第二受け渡し部材５ｂに代えて第一受け渡し部材５ａのみに位置合わせ用駆動部９２を設け、位置ズレ量に応じて、第一受け渡し部材５ａのみを第一貫通孔１２ａ及び通孔２Ｈの内部でＸＹθ方向へ調整移動し、この調整移動されたＸＹ方向位置を維持しながら第一ワークＷ１が第一保持部材２の保持チャック２２に受け渡されるように変更したり、第一受け渡し部材５ａ及び第二受け渡し部材５ｂの両方を調整移動したり変更することも可能である。 In the example shown in FIGS. 8A to 8C, the first chamber 10a and the second chamber 10b are both opened upward at the loading position P1 shown in FIG. The state in which the first workpiece W1 is transferred from the transport unit Ba to the chuck portion 51 of the first transfer member 5a is photographed by the plurality of detection units 91, and the position in the XY direction of the first workpiece W1 is detected. The state in which the second workpiece W2 is transferred from the second conveying portion Bb to the chuck portion 51 of the second transfer member 5b is photographed by the plurality of detection portions 91, and the position in the XY direction of the second workpiece W2 is detected.
The second delivery member 5b is provided with an alignment driving unit 92, and only the second delivery member 5b is connected to the second through-hole 12b and the second delivery member 5b according to the positional deviation amount based on the position data output from the plurality of detection units 91. The second workpiece W2 is transferred to the holding chuck 32 of the second holding member 3 while adjusting and moving in the XYθ direction inside the through hole 3H and maintaining the adjusted and moved position in the XY direction.
Although not shown in the drawings as another example, only the first delivery member 5a is provided with an alignment driving unit 92 instead of the second delivery member 5b, and only the first delivery member 5a is provided in accordance with the amount of displacement. Changed so that the first workpiece W1 is transferred to the holding chuck 22 of the first holding member 2 while adjusting and moving in the XYθ direction inside the through hole 12a and the through hole 2H and maintaining the position in the adjusted XY direction. It is also possible to adjust and move or change both the first delivery member 5a and the second delivery member 5b.

　このような本発明の実施例３に係る貼合デバイスＷの製造装置Ａによると、搬入ポジションＰ１において位置合わせ手段９の検出部９１が、第一受け渡し部材５ａで受け取った第一ワークＷ１と、第二受け渡し部材５ｂで受け取った第二ワークＷ２を位置検出し、その位置データに基づいて位置合わせ用駆動部９２で、第一受け渡し部材５ａ又は第二受け渡し部材５ｂのいずれか一方か若しくは両方をＸＹθ方向へ相対的に移動させることにより、その後の第一受け渡し部材５ａや第二受け渡し部材５ｂの作動で第一保持部材２や第二保持部材３に対する受け渡し位置が、貼り合わせポジションＰ２において第一ワークＷ１と第二ワークＷ２のＸＹ方向位置がＺ方向へ位置合わせされるように調整される。
　したがって、搬入時に位置ズレが生じても第一ワークＷ１と第二ワークＷ２を正確に貼り合わせることができる。
　その結果、貼合デバイスＷの貼り合わせ精度が向上して品質の安定性に優れるという利点がある。 According to the manufacturing apparatus A of the bonding device W according to Example 3 of the present invention, the detection unit 91 of the alignment means 9 at the carry-in position P1 receives the first workpiece W1 received by the first delivery member 5a, The position of the second workpiece W2 received by the second delivery member 5b is detected, and based on the position data, either one or both of the first delivery member 5a and the second delivery member 5b is detected by the positioning drive unit 92. By relatively moving in the XYθ direction, the delivery position with respect to the first holding member 2 and the second holding member 3 by the subsequent operation of the first delivery member 5a and the second delivery member 5b is the first at the bonding position P2. Adjustment is made so that the positions of the workpiece W1 and the second workpiece W2 in the X and Y directions are aligned in the Z direction.
Therefore, the first workpiece W1 and the second workpiece W2 can be accurately bonded even if a positional deviation occurs during loading.
As a result, there is an advantage that the bonding accuracy of the bonding device W is improved and the stability of quality is excellent.

　Ａ　貼合デバイスの製造装置
　１　変圧室　　　　　　　　　　　　　　　１０　チャンバー
　１０ａ　第一チャンバー　　　　　　　　　１０ｂ　第二チャンバー
　１１ａ　底壁部　　　　　　　　　　　　　１１ｂ　天井部
　１２　貫通孔　　　　　　　　　　　　　　２　第一保持部材
　２Ｈ　通孔　　　　　　　　　　　　　　　３　第二保持部材
　３Ｈ　通孔　　　　　　　　　　　　　　　４　貼り合わせ用駆動部
　５　受け渡し部材　　　　　　　　　　　　５Ｄ　受け渡し用駆動部
　５ａ　第一受け渡し部材　　　　　　　　　５ｂ　第二受け渡し部材
　５１　チャック部　　　　　　　　　　　　５２　軸部
　５３　ガイド部材　　　　　　　　　　　　６　閉鎖部材
　６Ｄ　閉鎖用駆動部　　　　　　　　　　　６１　蓋体
　７　制御部　　　　　　　　　　　　　　　８　反転手段
　９　位置合わせ手段　　　　　　　　　　　９１　検出部
　９２　位置合わせ用駆動部
　Ｐ１　搬入ポジション　　　　　　　　　　Ｐ２　貼り合わせポジション
　Ｗ　貼合デバイス
　Ｗ１　第一ワーク　　　　　　　　　　　　Ｗ２　第二ワーク DESCRIPTION OF SYMBOLS A Manufacturing apparatus of a bonding device 1 Transformer room 10 Chamber

10a First chamber

10b Second chamber 11a Bottom wall part 11b Ceiling part 12 Through hole 2 First holding member 2H Through hole 3 Second holding member 3H Through hole 4 For bonding Drive part 5 Delivery member 5D Delivery drive part 5a First delivery member 5b Second delivery member 51 Chuck part 52 Shaft part 53 Guide member 6 Closing member 6D Closing drive part 61 Lid 7 Control part 8 Reversing means 9 Positioning means 91 Detection Unit 92 Positioning Drive Unit P1 Loading Position P2 Bonding Position W Bonding Device W1 First Work W2 Second Work

Claims

　変圧室に搬入された第一ワークと第二ワークを第一保持部材と第二保持部材にそれぞれ受け渡し、減圧された前記変圧室で前記第一保持部材又は前記第二保持部材のいずれか一方か若しくは両方が相対的に接近移動して前記第一ワークと前記第二ワークを貼り合わせる貼合デバイスの製造装置であって、
　前記第一ワーク及び前記第二ワークが出し入れ自在に収容される前記変圧室と、
　前記変圧室にワーク貼り合わせ方向へ互いに対向するように設けられる前記第一保持部材及び前記第二保持部材と、
　前記第一保持部材又は前記第二保持部材のいずれか一方か若しくは両方を前記ワーク貼り合わせ方向へ相対的に接近或いは離隔するように移動させる貼り合わせ用駆動部と、
　前記変圧室に設けられる貫通孔を通って前記ワーク貼り合わせ方向へ移動自在に設けられるワーク受け渡し用の受け渡し部材と、
　前記変圧室の前記貫通孔を気密状に開閉するように移動自在に設けられる閉鎖部材と、
　前記貼り合わせ用駆動部と前記受け渡し部材の受け渡し用駆動部及び前記閉鎖部材の閉鎖用駆動部をそれぞれ作動制御する制御部と、を備え、
　前記制御部は、ワーク搬入時において、前記貫通孔が開口するように前記閉鎖部材を開動させるとともに、前記受け渡し部材をワーク受け渡しのために移動させ、ワーク貼り合わせ時において、前記貫通孔から前記受け渡し部材を抜き出し、前記貫通孔が気密状に閉鎖されるように前記閉鎖部材を閉動させることを特徴とする貼合デバイスの製造装置。 The first work and the second work carried into the variable pressure chamber are respectively transferred to the first holding member and the second holding member, and either the first holding member or the second holding member in the reduced pressure chamber. Or it is a manufacturing apparatus of the bonding device which bonds the first work and the second work by moving both relatively approaching,
The variable pressure chamber in which the first workpiece and the second workpiece are accommodated in a freely removable manner; and
The first holding member and the second holding member provided to face each other in the workpiece bonding direction in the variable pressure chamber;
A bonding drive unit that moves either or both of the first holding member and the second holding member so as to approach or separate from each other in the workpiece bonding direction;
A workpiece delivery member provided movably in the workpiece laminating direction through a through hole provided in the variable pressure chamber;
A closing member movably provided to open and close the through hole of the variable pressure chamber in an airtight manner;
A controller for controlling the operation of the laminating drive unit, the delivery drive unit of the delivery member and the closure drive unit of the closing member, respectively.
The control unit opens the closing member so that the through-hole is opened when a workpiece is loaded, and moves the delivery member for delivering the workpiece, and transfers the workpiece from the through-hole when bonding the workpiece. An apparatus for manufacturing a bonding device, wherein a member is extracted and the closing member is closed so that the through hole is closed in an airtight manner.
　前記第一保持部材又は前記第二保持部材のいずれか一方か若しくは両方は、前記変圧室の前記貫通孔と前記ワーク貼り合わせ方向へ同軸状に配置される通孔を有し、
　前記受け渡し部材は、ワーク保持用のチャック部を有し、前記受け渡し用駆動部により前記チャック部が前記貫通孔及び前記通孔を挿通し、前記変圧室に搬入された前記第一ワーク又は前記第二ワークのいずれか一方か若しくは両方に向け移動して保持させ、前記ワーク受け渡しが完了してから、前記チャック部を前記通孔及び前記貫通孔から抜き出し移動させることを特徴とする請求項１記載の貼合デバイスの製造装置。 Either one or both of the first holding member and the second holding member have a through hole arranged coaxially in the through hole of the variable pressure chamber and the workpiece bonding direction,
The delivery member has a chuck part for holding a workpiece, and the chuck part is inserted through the through hole and the through hole by the delivery drive part, and the first work or the first work carried into the variable pressure chamber is loaded. 2. The apparatus according to claim 1, wherein the chuck part is extracted and moved from the through hole and the through hole after the workpiece has been delivered and moved toward one or both of the two works. Manufacturing device for pasting devices.
　前記閉鎖部材は、前記変圧室の底壁部又は天井部のいずれか一方か若しくは両方に沿って前記ワーク貼り合わせ方向と交差する方向へ開閉動自在に設けられる蓋体を有し、前記閉鎖用駆動部により前記蓋体を、前記受け渡し部材が抜き出し移動された前記貫通孔に向け閉動させることを特徴とする請求項１又は２記載の貼合デバイスの製造装置。 The closing member has a lid that can be opened and closed in a direction intersecting with the workpiece laminating direction along one or both of the bottom wall portion and the ceiling portion of the variable pressure chamber, and the closing member The apparatus for manufacturing a bonding device according to claim 1, wherein the lid is closed by the drive unit toward the through hole from which the delivery member has been extracted and moved.
　前記閉鎖部材は、前記変圧室の底壁部又は天井部のいずれか一方か若しくは両方に向けて回動自在に設けられる蓋体を有し、前記閉鎖用駆動部により前記蓋体を、前記受け渡し部材が抜き出し移動された前記貫通孔に向け閉動させることを特徴とする請求項１又は２記載の貼合デバイスの製造装置。 The closing member has a lid that is rotatably provided toward one or both of a bottom wall portion and a ceiling portion of the variable pressure chamber, and the lid is transferred by the closing drive portion. The apparatus for manufacturing a bonding device according to claim 1, wherein the member is closed toward the through hole from which the member has been extracted and moved.
　前記受け渡し部材は、前記チャック部が先端に設けられて前記変圧室の前記貫通孔を挿通する軸部を有し、前記軸部を前記ワーク貼り合わせ方向へ移動自在に案内するガイド部材を、前記貫通孔と前記ワーク貼り合わせ方向へ同軸状に設けることを特徴とする請求項２～４のいずれかに記載の貼合デバイスの製造装置。 The delivery member has a shaft portion in which the chuck portion is provided at a tip and passes through the through hole of the variable pressure chamber, and a guide member that guides the shaft portion movably in the workpiece bonding direction, The bonding device manufacturing apparatus according to any one of claims 2 to 4, wherein the bonding device is provided coaxially in the through hole and the workpiece bonding direction.
　前記変圧室が形成されるチャンバーを前記ワーク貼り合わせ方向へ、内部に前記第一保持部材が具備される第一チャンバーと、内部に前記第二保持部材が具備される第二チャンバーに分割し、前記第一チャンバー又は前記第二チャンバーのいずれか一方を他方に向け前記ワーク貼り合わせ方向へ反転自在に移動させる反転手段を設け、前記第一チャンバーと前記第二チャンバーが共に前記ワーク貼り合わせ方向へ開口するように反転した開動位置を、前記第一保持部材に向けて前記第一ワークが搬入されるとともに前記第二保持部材に向けて前記第二ワークが搬入される搬入ポジションとし、前記第一チャンバーと前記第二チャンバーが前記ワーク貼り合わせ方向へ重ね合わされるように反転した閉動位置を、前記第一ワーク及び前記第二ワークが貼り合わされる貼り合わせポジションとすることを特徴とする請求項１～５のいずれかに記載の貼合デバイスの製造装置。 Dividing the chamber in which the variable pressure chamber is formed into the workpiece laminating direction, a first chamber in which the first holding member is provided, and a second chamber in which the second holding member is provided; Reversing means is provided for reversibly moving either the first chamber or the second chamber toward the other in the workpiece bonding direction, and both the first chamber and the second chamber move in the workpiece bonding direction. The opening position reversed so as to open is defined as a loading position where the first workpiece is loaded toward the first holding member and the second workpiece is loaded toward the second holding member. The closed position in which the chamber and the second chamber are reversed so that they overlap each other in the workpiece bonding direction is defined as the first workpiece and the second chamber. Apparatus for producing laminated device according to any one of claims 1 to 5, characterized in that the bonding position over click is bonded.
　前記搬入ポジションにおいて、前記受け渡し部材として第一受け渡し部材で受け取った前記第一ワーク又は第二受け渡し部材で受け取った前記第二ワークのいずれか一方を他方に対して相対的に移動させて前記ワーク貼り合わせ方向へ位置合わせする位置合わせ手段を備え、
　前記位置合わせ手段は、前記第一受け渡し部材で受け取った前記第一ワークと、前記第二受け渡し部材で受け取った前記第二ワークを位置検出する検出部と、前記検出部からの位置データに基づいて前記第一受け渡し部材又は前記第二受け渡し部材のいずれか一方か若しくは両方を、前記ワーク貼り合わせ方向と交差する方向へ相対的に移動させる位置合わせ用駆動部を有することを特徴とする請求項６記載の貼合デバイスの製造装置。 At the loading position, either the first workpiece received by the first delivery member as the delivery member or the second workpiece received by the second delivery member is moved relative to the other to attach the workpiece. Alignment means for aligning in the alignment direction,
The alignment means is based on the first workpiece received by the first delivery member, a detection unit for detecting the position of the second workpiece received by the second delivery member, and position data from the detection unit. 7. A positioning drive unit that relatively moves either one or both of the first delivery member and the second delivery member in a direction intersecting the workpiece bonding direction. The manufacturing apparatus of the bonding device of description.