WO2015039427A1 - Electrochemical composite deposition machining method and apparatus using laser light tube as electrode - Google Patents

Electrochemical composite deposition machining method and apparatus using laser light tube as electrode Download PDF

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WO2015039427A1
WO2015039427A1 PCT/CN2014/074800 CN2014074800W WO2015039427A1 WO 2015039427 A1 WO2015039427 A1 WO 2015039427A1 CN 2014074800 W CN2014074800 W CN 2014074800W WO 2015039427 A1 WO2015039427 A1 WO 2015039427A1
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Prior art keywords
laser
electrochemical
deposition
electrode
cathode substrate
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PCT/CN2014/074800
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French (fr)
Chinese (zh)
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张朝阳
张长桃
蔡明霞
冯钦玉
周建忠
黄磊
姜雨佳
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江苏大学
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Priority to GB1604795.3A priority Critical patent/GB2537487B/en
Publication of WO2015039427A1 publication Critical patent/WO2015039427A1/en

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    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/08—Electroplating with moving electrolyte e.g. jet electroplating
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D21/00—Processes for servicing or operating cells for electrolytic coating
    • C25D21/10—Agitating of electrolytes; Moving of racks
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/011—Electroplating using electromagnetic wave irradiation
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/18—Electroplating using modulated, pulsed or reversing current
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/67—Electroplating to repair workpiece
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0927—Systems for changing the beam intensity distribution, e.g. Gaussian to top-hat
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0938—Using specific optical elements
    • G02B27/095—Refractive optical elements
    • G02B27/0972—Prisms

Definitions

  • the present invention relates to the field of micro rapid prototyping processing in the manufacturing technology, and particularly relates to an electrochemical composite deposition manufacturing method and device for a laser light pipe electrode, which is suitable for processing, repairing and surface performance enhancement of micro small and high performance metal parts. . Background technique
  • Both laser processing and electrochemical machining are special processing methods.
  • the two processing methods have their own characteristics.
  • Laser processing uses high-energy beams as processing energy. It generates unique light when it is focused on the surface of the workpiece through optical path transmission. Nonlinear effects such as heat and force.
  • Electrochemical machining uses a circuit to transfer current to both ends of the electrode. Electrodeposition is used as a medium between the electrodes. Finally, an electrochemical reaction occurs at the electrode/solution interface. The essence is to remove or deposit materials in the form of ions by electrochemical reaction. .
  • the electrode state of the irradiation region can be changed by using a high power density of the laser to generate a photoelectrochemical effect, a thermal electrochemical effect, and a force electrochemical effect. Therefore, the photoelectrochemical reaction current and the reaction speed are affected, and the materials are processed and manufactured by the combination of the two energies of electrochemistry and laser.
  • the composite efficiency of laser energy and electrochemical reaction is not ideal.
  • the thermal effect of the laser will vaporize the solution at the deposition site to form a water-free zone, and at the same time cover a layer of vapor barrier on the surface of the electrochemical electrode, affecting the electrodeposition process.
  • laser plasma The expansion expansion of the body pushes the solution outward, which is not conducive to the localized deposition of metal ions in the processing zone.
  • the object of the present invention is to provide an electrochemical composite deposition manufacturing method for a laser light pipe electrode, by which the density of the material can be increased, and the deposition reaction can be performed only at the laser energy at the center of the beam, and the quality is achieved. High, localized features of electrochemical composite deposition processing, repair and surface performance enhancement.
  • Another object of the present invention is to provide an electrochemical composite deposition manufacturing apparatus for a laser light pipe electrode, which utilizes a common laser and optical path transmission device and an electrochemical deposition device to significantly improve the localization of deposition manufacturing and Deposition quality.
  • a technical solution for the electrochemical composite deposition manufacturing method of a laser light pipe electrode is: using a photoelectrochemical reaction caused by laser irradiation on the surface of the electrode to realize deposition of the material, comprising the following steps:
  • the cathode substrate is sequentially subjected to grinding, degreasing, water washing, weak etching, and water washing.
  • the beam modulation system includes a positive pyramid lens and a negative pyramid lens, and the positive pyramid lens and the negative pyramid lens have the same refractive index, azimuth angle, and cone angle.
  • the width of the ring is R.
  • a technical solution of an electrochemical composite deposition manufacturing device for a laser light pipe electrode is: including a laser output device, light a beam modulation system, a composite deposition manufacturing system;
  • the laser output device includes a laser controller, a laser cavity, the laser controller controls a laser cavity to emit a Gaussian laser, and the Gaussian laser is modulated into a circular hollow by the beam modulation system
  • the composite deposition manufacturing system includes a tool anode, a cathode substrate, a processing chamber, an electrodeposition liquid, an electrochemical pulse power source, the tool anode is connected to the anode of the electrochemical pulse power source, and the cathode substrate is connected to the electrochemical pulse power source.
  • the cathode substrate is placed in an electrodeposition liquid in a processing chamber, the annular hollow laser beam is irradiated onto the cathode substrate through a focusing lens, and the tool anode is placed at a center position of the annular hollow laser beam, and One end of the tool anode is placed in the electrodeposition bath.
  • the device further includes a motion and control system
  • the motion control system includes a computer, a motion control card, and an XYZ working platform
  • the computer is connected to the motion control card
  • the motion control card is connected to the XYZ working platform.
  • the processing chamber is placed on the XYZ work platform.
  • the apparatus further includes a liquid storage tank and an acid and alkali resistant pump, and the acid and alkali resistant pump conveys the electrodeposition liquid in the liquid storage tank into the working chamber.
  • the temperature of the electrodeposition liquid in the liquid storage tank is 40 to 50 ° C; the anode of the tool is an insoluble metal electrode wire having a diameter of 0.1 0.2 mm; and the laser controller outputs a pulsed laser.
  • the parameters are: single pulse energy of 0.1 ⁇ 1 joule, pulse time of 10 nanoseconds, frequency of 1 ⁇ 10 Hz, wavelength of 1064 nm; output parameters of the electrochemical pulse power supply are: peak voltage is 2 ⁇ 5 volts The pulse frequency is 0.5 2 MHz and the pulse width is 500 30 nanoseconds.
  • a laser light pipe electrode is formed on the periphery of the electrode of the electrodeposition tool by a ring-shaped hollow laser beam and an electrochemical composite micro-machining system, and an insoluble metal electrode wire having a diameter of several tens of micrometers is added to the center of the beam of the annular hollow laser beam. It does not affect the transmission of beam energy, thus ensuring efficient compounding of laser irradiation and electrochemical reaction.
  • FIG. 1 is a view of a micro-machining system of a ring-shaped hollow laser beam and an electrochemical composite
  • FIG. 2 is a schematic diagram of conversion of a Gaussian laser into a circular hollow laser beam
  • Figure 3 is a schematic diagram of laser and electrochemical composite deposition processing
  • Figure 4 is an example of laser electrochemical composite deposition produced
  • Figure 1 The label names in Figure 1 are: 1. Computer, 2. Laser controller, 3. Laser cavity, 4. Gaussian laser, 5. Negative pyramid lens, 6. Positive pyramid lens, 7. Annular hollow laser beam, 8. Mirror 9. Focusing lens, 10. Tool anode, 11. Cathode substrate, 12. Processing chamber, 13.XYZ table, 14. Reservoir, 15. Oscilloscope, 16. Motion control card, 17. Electrochemical pulse power supply, 18. Ammeter, 19. Acid and alkali resistant pump, 20. Electrodeposited liquid, 21. Shock wave, 22. Deposition. detailed description
  • the electrochemical composite deposition manufacturing method of the laser light pipe electrode processes the laser beam outputted by the laser through a beam modulation system, and modulates the spatial energy distribution from a solid circular laser beam into a circular hollow laser beam with a central light intensity of zero.
  • the annular hollow laser beam and the electrochemical tool anode located at the center of the ring form a composite processing system, that is, a non-solid laser light pipe electrode is formed on the periphery of the electrochemical tool anode, and the plasma expansion expansion effect by the laser irradiation is applied to the laser
  • the electrochemical deposition in the phototube electrode produces a compression shock, removes the deposition stress, discharges the cathode reaction gas, increases the density of the material, and achieves high-quality electrochemical composite deposition processing, repair, and surface performance enhancement.
  • the beam modulation system adopts two positive pyramid lenses with the same cone angle and a negative pyramid lens combination to modulate a Gaussian solid circular laser beam into a circular hollow laser beam; a space position of the positive pyramid lens, the negative pyramid lens, and a cone
  • the angular change changes the diameter of the annular hollow laser beam
  • the energy gradient distribution in the laser irradiation region is adjusted to match the energy of the electrochemical electric field to form a laser and electrochemical composite deposition manufacturing system.
  • the solution of the irradiated portion is broken due to the high power density of the beam, and the generated annular plasma shock wave front forms a non-solid laser light pipe electrode around the anode of the electrochemical tool.
  • the annular water-free zone is caused; at the same time, the solution at the center of the laser light pipe electrode generates strong micro-convection, which can reduce the concentration polarization and accelerate the convective mass transfer rate; the electrochemical reaction does not occur in the ring portion, and the center occurs. Rapid electrochemical deposition, the deposition reaction speed inside and outside the laser tube electrode is significantly different, which significantly enhances the nonlinear localization effect of the electrochemical reaction.
  • the laser outputs a periodic pulsed laser, a periodic light curtain is generated at the periphery of the electrochemical tool electrode to finally achieve selective localized electrochemical composite deposition.
  • the apparatus for the electrochemical composite deposition manufacturing method of the laser light pipe electrode mainly comprises: a laser output device, a beam modulation system, a composite deposition manufacturing system, a motion and a control system.
  • the laser output device comprises a laser controller, a laser cavity
  • the beam modulation system comprises a positive pyramid lens, a negative pyramid lens
  • the composite deposition manufacturing part comprises a tool anode, a cathode substrate, a processing cavity, an electrodeposition liquid, an ammeter, an electrochemical machining power source
  • the liquid storage tank, the acid-resistant pump and the oscilloscope are configured, the negative electrode of the electrochemical pulse power source is connected with the substrate as the cathode; the positive electrode of the electrochemical pulse power source is connected with the tool anode, and the current meter is connected between the series to detect the machining current, and the oscilloscope is used for detecting The pulse waveform of the power supply during processing.
  • the motion and control system consists of a computer, motion control card, and X-
  • [0025] 2) Constructing a circular hollow laser beam and an electrochemical composite micromachining system.
  • An insoluble metal electrode wire is fixed under the center of the focusing mirror optical path, and is connected as an anode tool to the positive electrode of the electrochemical high-frequency pulse power source, and an ammeter is connected between them to detect the processing current;
  • the flat metal electrode is used as the electrodeposited cathode substrate, and the negative electrode of the power source Connected;
  • the output of the power supply is connected to a digital storage oscilloscope for observing changes in the pulse waveform between the electrodes during processing.
  • the cathode substrate is mounted and fixed in the processing cavity on the workbench, and the computer can send instructions in the three directions of XYZ through the motion control card.
  • the computer controls the performance parameters of the laser output beam, such as single pulse energy, pulse width and frequency, etc.; adjusts the output parameters of the electrochemical power source, such as peak voltage, pulse width and frequency.
  • the laser output device emits a solid Gaussian laser beam modulated by a beam into a circular hollow laser beam, which is focused by a convex lens, irradiated on the cathode substrate through an electrodeposition liquid, and formed into a light pipe electrode by a laser-induced annular plasma.
  • the adiabatic expansion occurs, and the electrochemical deposition reaction of the center of the annular hollow laser beam forms a centrifugal compression of the centripetal convergence, so that the deposition and crystallization process of the metal ions is subjected to an external thermal force, and the material is dense, and the internal stress is small and localized deposition processing.
  • the computer issues a control command, and the motion control card drives the worktable to realize three-dimensional motion of the space, so that the deposition material gradually accumulates with the motion of the worktable to form a desired three-dimensional structure.
  • the method of laser descaling can be used first to remove oxides at the corrosion site; and then through electrochemical localized etching technology.
  • the oxide layer and part of the material are removed to activate the cathode substrate, and a small electrochemical corrosion pit is formed, and then the electrochemical deposition method of the laser tube electrode is used to achieve corrosion region repair or surface property enhancement, thereby improving electrochemistry.
  • the adhesion strength of the deposited material on the substrate is improved.
  • FIG. 1 The apparatus for implementing the annular hollow laser beam impact and electrochemical deposition composite processing method of the present invention is shown in FIG. 1.
  • the computer 1 issues a control command to the laser
  • the controller 2 causes the laser cavity 3 to emit a Gaussian laser 4, which in turn forms a ring-shaped hollow laser beam 7 through the negative pyramid lens 5 and the positive pyramid lens 6, and the hollow laser beam 7 is sequentially irradiated to the cathode through the mirror 8 and the focus lens 9.
  • the detailed connection relationship of the electrochemical system is as follows:
  • the negative electrode of the electrochemical pulse power source 17 is connected to the cathode substrate 11;
  • the positive electrode of the electrochemical pulse power source 17 is connected to the tool anode 10, and the current meter 18 is connected between them to detect the machining current, the oscilloscope 15
  • the cathode substrate 11 is mounted in the processing chamber 12;
  • the space control of the XYZ table 13 is commanded by the motion control card 16, and the computer 1 can also control the acid-resistant pump 19 to transport the electrodeposition liquid 20 in the reservoir 14 into the working chamber 12 via the motion control card 16.
  • the laser beam is modulated.
  • the solid parallel Gaussian laser 4 with a single pulse energy of 0.1 1 joule, a pulse time of 10 nanoseconds, a frequency of 1 to 10 Hz, and a wavelength of 1064 nm is output by the computer 1 through the laser controller 2 and the laser cavity 3, and the Gaussian laser 4 After passing through the negative pyramid lens 5 and the positive pyramid lens 6, the energy of the center of the Gaussian laser beam 4 is refracted and diverged by the pyramid faces of the negative pyramid lens 5 and the positive pyramid lens 6, forming a circular hollow laser beam 7 whose center energy is approximately parallel. as shown in picture 2.
  • the refractive index n, the azimuth angle, and the taper angle ⁇ of the negative pyramid lens 5 and the positive pyramid lens 6 are the same, and the incident solid parallel Gaussian laser beam 4 has a beam radius r, and the distance d between the negative pyramid lens 5 and the regular pyramid lens is adjusted,
  • the annular hollow laser beam 7 satisfying the processing requirements can be obtained, and the ring has a width R and an inner ring inner diameter of r m ⁇ d (ctg( ) - tg(a))
  • FIG. 1 Constructing a circular hollow laser beam 7 and an electrochemical composite micromachining system.
  • the electrochemical pulse power source 17 and the tool anode 10 and the cathode substrate 11 are connected.
  • the tool anode 10 is made of an insoluble metal electrode wire having a diameter of 0.1 0.2 mm, and is fixed below the center of the focusing mirror optical path;
  • the cathode substrate 11 is 30 mm x 40 mm thick.
  • the 1mm stainless steel piece is used before the use: grinding ⁇ degreasing ⁇ water washing ⁇ weak erosion ⁇ water washing, and then installed in the processing chamber 12 fixed on the table 13 .
  • the output parameters of the electrochemical pulse power source 17 are adjusted, wherein the peak voltage is 2 to 5 volts, the pulse frequency is 0.5 2 megahertz, and the pulse width is 500 30 nanoseconds.
  • the acid-resistant alkaline pump 19 is turned on, and the configured electrodeposition solution is filled into the processing chamber 12 from the liquid storage tank 14, completely immersing the cathode substrate 11 and the lower portion of the tool anode 10. And keep the circulating flow of the electrodeposition liquid during processing.
  • the electrochemical pulse power source 17 is turned on, and the metal ions in the deposition liquid undergo an electrochemical reduction reaction on the surface of the cathode substrate 11 under the action of a nanosecond pulse current; at the same time, the annular hollow laser beam 7 emitted by the laser is reflected by the mirror 8 and is focused by the lens. 9 focuses the deposition area on the cathode substrate 11.
  • the laser light pipe electrode formed by the annular hollow laser beam 7 induces adiabatic expansion of the annular plasma shock wave 21, and the electrochemical deposition reaction at the center of the annular hollow laser beam 7 forms a centrifugal compression of the centripetal convergence, so that the deposition and crystallization process of the metal ions is subjected to
  • the thermal impact effect makes the material of the deposit body 22 dense, and the localized stress processing with small internal stress is realized, as shown in Fig. 3.
  • the computer 1 issues a control command, and the motion control card 16 drives the XYZ table 13 to realize three-dimensional spatial motion, so that the deposition body 22 gradually accumulates with the movement of the XYZ table 13 to manufacture a desired three-dimensional structure.
  • Figure 4 is an example of a simple cylindrical deposit made using a laser tube electrode and electrochemical composite deposition.
  • Laser rust removal method can be used to focus the pulsed laser on the corrosion site to pulse the surface of the substrate and the rust particles. Vibration, when the impact force is greater than the surface adsorption force of the particles, the rust products are removed from the surface.
  • the laser electrochemical composite stress etching technique is used to remove the oxide layer and some materials on the surface of the workpiece to be deposited, activate the cathode substrate, and form tiny electrochemical corrosion pits to improve the adhesion strength of the electrochemical deposition material.
  • the laser tube electrode and electro-chemical composite deposition method are used to repair the corrosion part of the part, or a corrosion-resistant alloy layer is deposited on the surface to improve the surface properties.
  • the laser light pipe electrode formed by the energy of the annular hollow laser beam is combined with the electrochemical deposition system to generate a thermal impact of centripetal convergence on the electrodeposition ion crystallization process in the system, thereby improving the electrode reaction rate and reducing the deposition.
  • the stress enhances the density of the deposited material, and has high selectivity and processing precision, thereby achieving high-quality local deposition of the microdomain.

Abstract

The present invention relates to an electrochemical composite deposition machining method and apparatus using a laser light tube as an electrode. A full-beam pulse laser beam is converted to an annular hollow laser beam with zero light intensity at the center by a light beam modulating system; the annular laser is used to irradiate the expansion of plasma; a compression impact is generated on the electrochemical deposition within a non-solid light tube electrode. The deposition stress is removed, the cathode reaction gas is discharged, and the material density is improved; moreover, the deposition reaction can only occur in the center of the light beam where the laser energy is zero, thereby enabling electrochemical composite deposition machining, repairing and surface performance strengthening having high quality and good location-targeting. The present invention belongs to the field of rapid miniature machining and processing, and is suitable for the machining, repairing and surface performance strengthening of miniature high-performance metal parts.

Description

激光光管电极的电化学复合沉积制造方法与装置 技术领域  Electrochemical composite deposition manufacturing method and device for laser light pipe electrode
[0001] 本发明涉及制造技术中的微细快速成型加工领域， 特指一种激光光管电极的电化学复 合沉积制造方法与装置， 适用于微小型高性能金属零件的加工、 修复及表面性能强化。 背景技术  [0001] The present invention relates to the field of micro rapid prototyping processing in the manufacturing technology, and particularly relates to an electrochemical composite deposition manufacturing method and device for a laser light pipe electrode, which is suitable for processing, repairing and surface performance enhancement of micro small and high performance metal parts. . Background technique
[0002] 激光加工和电化学加工都属于特种加工方式， 两种加工方式又各有特点， 激光加工以 高能量的光束作为加工能源， 它通过光路传输聚焦于工件表面时会产生独特的光、 热、 力等 非线性效应。 电化学加工是利用电路将电流传至电极两端， 电极之间以电沉积液作为介质， 最终在电极 /溶液界面发生电化学反应， 其本质是利用电化学反应以离子的形式去除或沉积材 料。  [0002] Both laser processing and electrochemical machining are special processing methods. The two processing methods have their own characteristics. Laser processing uses high-energy beams as processing energy. It generates unique light when it is focused on the surface of the workpiece through optical path transmission. Nonlinear effects such as heat and force. Electrochemical machining uses a circuit to transfer current to both ends of the electrode. Electrodeposition is used as a medium between the electrodes. Finally, an electrochemical reaction occurs at the electrode/solution interface. The essence is to remove or deposit materials in the form of ions by electrochemical reaction. .
[0003] 在电化学体系中引入激光束， 进行激光与电化学复合加工时， 可以利用激光所具有的 高功率密度改变照射区域的电极状态， 产生光电化学效应、 热电化学效应和力电化学效应， 从而影响光电化学反应电流和反应速度， 由电化学和激光两种能量的共同作用实现材料的加 工制造。 [0003] When a laser beam is introduced into an electrochemical system for laser and electrochemical composite processing, the electrode state of the irradiation region can be changed by using a high power density of the laser to generate a photoelectrochemical effect, a thermal electrochemical effect, and a force electrochemical effect. Therefore, the photoelectrochemical reaction current and the reaction speed are affected, and the materials are processed and manufactured by the combination of the two energies of electrochemistry and laser.
[0004] 国内外的研究人员对激光电化学复合加工技术的研究取得了一定进展， 中国专利 "喷 射液束电解 -激光复合加工方法及其装置"， 专利号： CN1919514A提出： 在激光加工的同时 复合与激光束同轴的高速喷射电沉积液束，激光在喷射液束的引导下利用光热效应去除材料， 被阴极极化的电沉积液束对激光加工区进行冷却、 冲刷和电化学溶解， 去除激光熔蚀加工的 再铸层。在激光电化学复合沉积方面， 中国专利"利用超声波和激光共同作用的电铸方法和 电铸设备"，专利号： CN200910306817 提出：在电铸液选定区域内同时施加超声波和激光波， 超声波使得电铸液中的金属离子团不断被打碎， 激光波增大电铸金属离子的活性， 超声作用 产生的空化气泡对激光产生反射和折射， 会使原本直线传播的激光发生光路的改变。 [0005] 在国内外现有的激光电化学复合加工技术中， 激光的作用主要是增强电化学反应和诱 导电化学反应两种方式。 但激光能量和电化学反应的复合效率都不理想， 激光的热效应会使 沉积部位的溶液汽化形成无水区， 同时在电化学电极表面笼罩一层蒸汽障， 影响电沉积过程； 同时， 激光等离子体的扩张膨胀则将溶液向外推挤， 不利于金属离子在加工区的定域沉积。 [0004] Researchers at home and abroad have made some progress in the research of laser electrochemical composite processing technology. The Chinese patent "jet liquid beam electrolysis-laser composite processing method and device", patent number: CN1919514A proposes: at the same time of laser processing A high-speed jet electrodeposited liquid beam coaxial with the laser beam, the laser removes the material by the photothermal effect under the guidance of the jet liquid beam, and the laser-processed region is cooled, washed and electrochemically dissolved by the cathodically polarized electrodeposited liquid beam. The re-cast layer of the laser ablation process is removed. In the field of laser electrochemical composite deposition, the Chinese patent "electroforming method and electroforming equipment using ultrasonic and laser interaction", patent number: CN200910306817 proposes: simultaneously applying ultrasonic waves and laser waves in selected areas of electroforming liquid, ultrasonic waves make The metal ion cluster in the electroforming liquid is continuously broken, the laser wave increases the activity of the electroforming metal ion, and the cavitation bubble generated by the ultrasonic action reflects and refracts the laser, which causes the optical path of the originally linearly propagated laser to change. [0005] In the existing laser electrochemical composite processing technology at home and abroad, the role of the laser is mainly to enhance the electrochemical reaction and induce Conductive chemical reaction in two ways. However, the composite efficiency of laser energy and electrochemical reaction is not ideal. The thermal effect of the laser will vaporize the solution at the deposition site to form a water-free zone, and at the same time cover a layer of vapor barrier on the surface of the electrochemical electrode, affecting the electrodeposition process. Meanwhile, laser plasma The expansion expansion of the body pushes the solution outward, which is not conducive to the localized deposition of metal ions in the processing zone.
[0006] 发明内容 SUMMARY OF THE INVENTION
[0007] 本发明的目的是提出一种激光光管电极的电化学复合沉积制造方法， 通过该方法可以 提高材料致密度， 且只能在光束中心激光能量为零处发生沉积反应， 实现了质量高， 定域性 好的电化学复合沉积加工、 修复及表面性能强化的特点。  [0007] The object of the present invention is to provide an electrochemical composite deposition manufacturing method for a laser light pipe electrode, by which the density of the material can be increased, and the deposition reaction can be performed only at the laser energy at the center of the beam, and the quality is achieved. High, localized features of electrochemical composite deposition processing, repair and surface performance enhancement.
[0008] 本发明的另一目的是提出一种激光光管电极的电化学复合沉积制造装置， 该装置利用 常用的激光及光路传输器件和电化学沉积装置， 显著提高沉积制造的定域性和沉积质量。 [0009] 一种激光光管电极的电化学复合沉积制造方法的技术方案为： 利用激光在电极表面辐 照引起的光电化学反应实现材料的沉积制造， 包括以下步骤： Another object of the present invention is to provide an electrochemical composite deposition manufacturing apparatus for a laser light pipe electrode, which utilizes a common laser and optical path transmission device and an electrochemical deposition device to significantly improve the localization of deposition manufacturing and Deposition quality. [0009] A technical solution for the electrochemical composite deposition manufacturing method of a laser light pipe electrode is: using a photoelectrochemical reaction caused by laser irradiation on the surface of the electrode to realize deposition of the material, comprising the following steps:
1 ) 将工具阳极的下部和阴极基板浸入电沉积液中， 接通电源并保持电沉积液循环流动； 1) immersing the lower portion of the tool anode and the cathode substrate in the electrodeposition liquid, turning on the power source and keeping the electrodeposition liquid circulating;
2 ) 将实心高斯激光通过光束调制***调制为中心光强为零的环形空心激光束； 2) modulating the solid Gaussian laser into a circular hollow laser beam having a central light intensity of zero by a beam modulation system;
3 ) 将所述环形空心激光束聚焦到所述阴极基板上， 并使所述工具阳极处于所述环形空心 激光束中心位置， 使激光诱导的环形等离子体形成激光管电极发生扩张膨胀； 3) focusing the annular hollow laser beam onto the cathode substrate, and placing the tool anode at a center position of the annular hollow laser beam, so that the laser induced annular plasma forms a laser tube electrode to expand and expand;
4 ) 通过移动阴极基板实现对阴极基板的持续加工。 4) Continuous processing of the cathode substrate is achieved by moving the cathode substrate.
[0010] 所述步骤 1 ) 前对阴极基板依次进行研磨、 除油、 水洗、 弱侵蚀、 水洗的处理。 [0011] 所述光束调制***包括正棱锥透镜和负棱锥透镜， 所述正棱锥透镜和负棱锥透镜折射 率、 方位角和锥角相同。 所述环形空心激光束的内环半径^为^ = (^ - ^))， 其中： 折射率 n、 方位角 、 和锥角 σ， 负棱锥透镜和正棱锥透镜之间的距离 d， 空心激光束环的宽 度为 R。 [0010] In the step 1), the cathode substrate is sequentially subjected to grinding, degreasing, water washing, weak etching, and water washing. [0011] The beam modulation system includes a positive pyramid lens and a negative pyramid lens, and the positive pyramid lens and the negative pyramid lens have the same refractive index, azimuth angle, and cone angle. The inner ring radius ^ of the annular hollow laser beam is ^ = (^ - ^)), wherein: refractive index n, azimuth angle, and cone angle σ, distance d between the negative pyramid lens and the regular pyramid lens, hollow laser beam The width of the ring is R.
[0012] 一种激光光管电极的电化学复合沉积制造装置的技术方案为： 包括激光输出装置、 光 束调制***、 复合沉积制造***； 所述激光输出装置包括激光控制器、 激光谐振腔， 所述激 光控制器控制激光谐振腔发出高斯激光， 所述高斯激光经所述光束调制***调制为环形空心 激光束； 所述复合沉积制造***包括工具阳极、 阴极基板、 加工腔、 电沉积液、 电化学脉冲 电源， 所述工具阳极连接于电化学脉冲电源的正极， 阴极基板连接于电化学脉冲电源的负极， 所述阴极基板置于加工腔内的电沉积液中， 所述环形空心激光束经过聚焦透镜照射于所述阴 极基板， 所述工具阳极置于所述环形空心激光束的中心位置， 且工具阳极的一端置于电沉积 液中。 [0012] A technical solution of an electrochemical composite deposition manufacturing device for a laser light pipe electrode is: including a laser output device, light a beam modulation system, a composite deposition manufacturing system; the laser output device includes a laser controller, a laser cavity, the laser controller controls a laser cavity to emit a Gaussian laser, and the Gaussian laser is modulated into a circular hollow by the beam modulation system The composite deposition manufacturing system includes a tool anode, a cathode substrate, a processing chamber, an electrodeposition liquid, an electrochemical pulse power source, the tool anode is connected to the anode of the electrochemical pulse power source, and the cathode substrate is connected to the electrochemical pulse power source. a negative electrode, the cathode substrate is placed in an electrodeposition liquid in a processing chamber, the annular hollow laser beam is irradiated onto the cathode substrate through a focusing lens, and the tool anode is placed at a center position of the annular hollow laser beam, and One end of the tool anode is placed in the electrodeposition bath.
[0013] 进一步， 该装置还包括运动和控制***， 所述运动控制***包括计算机、运动控制卡、 X-Y-Z工作平台， 所述计算机与运动控制卡相连， 所述运动控制卡与 X-Y-Z工作平台相连， 所述加工腔置于所述 X-Y-Z工作平台上。  [0013] Further, the device further includes a motion and control system, the motion control system includes a computer, a motion control card, and an XYZ working platform, the computer is connected to the motion control card, and the motion control card is connected to the XYZ working platform. The processing chamber is placed on the XYZ work platform.
[0014] 进一步， 该装置还包括储液槽、 耐酸碱泵， 所述耐酸碱泵将储液槽中的电沉积液输送 到工作腔中。  [0014] Further, the apparatus further includes a liquid storage tank and an acid and alkali resistant pump, and the acid and alkali resistant pump conveys the electrodeposition liquid in the liquid storage tank into the working chamber.
[0015] 进一步， 所述储液槽中电沉积液的温度为 40~50°C ; 所述工具阳极是直径为 0.1 0.2毫 米的不溶性金属电极丝； 所述激光控制器输出的为脉冲激光， 其参数为： 单脉冲能量在 0.1~1 焦耳、 脉冲时间为 10纳秒、 频率为 1~10赫兹、 波长为 1064纳米； 所述电化学脉冲电源的输 出参数为： 峰值电压为 2~5伏、 脉冲频率为 0.5 2兆赫兹、 脉冲宽度为 500 30纳秒。  [0015] Further, the temperature of the electrodeposition liquid in the liquid storage tank is 40 to 50 ° C; the anode of the tool is an insoluble metal electrode wire having a diameter of 0.1 0.2 mm; and the laser controller outputs a pulsed laser. The parameters are: single pulse energy of 0.1~1 joule, pulse time of 10 nanoseconds, frequency of 1~10 Hz, wavelength of 1064 nm; output parameters of the electrochemical pulse power supply are: peak voltage is 2~5 volts The pulse frequency is 0.5 2 MHz and the pulse width is 500 30 nanoseconds.
[0016] 本发明的技术优势和有益效果如下： [0016] The technical advantages and beneficial effects of the present invention are as follows:
(1) 通过环形空心激光束与电化学的复合微加工***，在电沉积工具电极的***形成激光光 管电极， 在环形空心激光束的光束中心加上直径数十微米的不溶性金属电极丝， 不会影响光 束能量的传输， 从而保证了激光辐照与电化学反应的高效复合。  (1) a laser light pipe electrode is formed on the periphery of the electrode of the electrodeposition tool by a ring-shaped hollow laser beam and an electrochemical composite micro-machining system, and an insoluble metal electrode wire having a diameter of several tens of micrometers is added to the center of the beam of the annular hollow laser beam. It does not affect the transmission of beam energy, thus ensuring efficient compounding of laser irradiation and electrochemical reaction.
[0017] (2) 激光光管电极所产生的等离子冲击波阵面笼罩在电极表面形成环形无水区， 不会 发生电化学反应， 而只能在光束中心激光能量为零处发生沉积反应， 提高了电化学反应的定 域选择性。 [0018] (3) 利用激光等离子体的扩张膨胀形成向心会聚的冲击应力， 作用于中心的电化学沉 积部位， 既提高了沉积离子的液相传质速度， 又可以减小沉积应力， 增强材料的致密度， 能 够显著提高激光电化学复合沉积的加工质量。 附图说明 [0017] (2) The plasma shock wave front generated by the laser light pipe electrode covers the annular water-free region on the surface of the electrode, and no electrochemical reaction occurs, but the deposition reaction can only occur at the laser energy at the center of the beam. The localized selectivity of the electrochemical reaction. [0018] (3) Using the expansion and expansion of the laser plasma to form a centripetal convergence impact stress, acting on the central electrochemical deposition site, not only improves the liquid phase mass transfer rate of the deposited ions, but also reduces the deposition stress and enhances The density of the material can significantly improve the processing quality of laser electrochemical composite deposition. DRAWINGS
[0019] 图 1是环形空心激光束与电化学复合的微加工***图；  1 is a view of a micro-machining system of a ring-shaped hollow laser beam and an electrochemical composite;
图 2是高斯激光转换为环形空心激光束示意图； 2 is a schematic diagram of conversion of a Gaussian laser into a circular hollow laser beam;
图 3是激光与电化学复合沉积加工的原理图； Figure 3 is a schematic diagram of laser and electrochemical composite deposition processing;
图 4是制造出的激光电化学复合沉积实例； Figure 4 is an example of laser electrochemical composite deposition produced;
图 1 中标号名称： 1.计算机， 2.激光器控制器， 3.激光谐振腔、 4.高斯激光， 5.负棱锥透镜， 6.正棱锥透镜， 7.环形空心激光束， 8.反射镜， 9.聚焦透镜， 10.工具阳极， 11.阴极基板， 12. 加工腔， 13.X-Y-Z工作台， 14.储液槽， 15.示波器， 16.运动控制卡， 17.电化学脉冲电源， 18. 电流表， 19.耐酸碱泵, 20.电沉积液， 21.冲击波， 22.沉积体。 具体实施方式 The label names in Figure 1 are: 1. Computer, 2. Laser controller, 3. Laser cavity, 4. Gaussian laser, 5. Negative pyramid lens, 6. Positive pyramid lens, 7. Annular hollow laser beam, 8. Mirror 9. Focusing lens, 10. Tool anode, 11. Cathode substrate, 12. Processing chamber, 13.XYZ table, 14. Reservoir, 15. Oscilloscope, 16. Motion control card, 17. Electrochemical pulse power supply, 18. Ammeter, 19. Acid and alkali resistant pump, 20. Electrodeposited liquid, 21. Shock wave, 22. Deposition. detailed description
[0020] 激光光管电极的电化学复合沉积制造方法通过光束调制***对激光器输出的激光束 进行处理， 将其空间能量分布由实心圆形激光束调制为中心光强为零的环形空心激光束； 环 形空心激光束与位于环形中心的电化学工具阳极构成复合加工***， 即在电化学工具阳极的 ***形成非实体的激光光管电极， 利用激光辐照产生的等离子体扩张膨胀作用， 对激光光管 电极内的电化学沉积产生压缩冲击， 去除沉积应力， 排出阴极反应气体， 提高材料致密度， 实现高质量的电化学复合沉积加工、 修复及表面性能强化。  [0020] The electrochemical composite deposition manufacturing method of the laser light pipe electrode processes the laser beam outputted by the laser through a beam modulation system, and modulates the spatial energy distribution from a solid circular laser beam into a circular hollow laser beam with a central light intensity of zero. The annular hollow laser beam and the electrochemical tool anode located at the center of the ring form a composite processing system, that is, a non-solid laser light pipe electrode is formed on the periphery of the electrochemical tool anode, and the plasma expansion expansion effect by the laser irradiation is applied to the laser The electrochemical deposition in the phototube electrode produces a compression shock, removes the deposition stress, discharges the cathode reaction gas, increases the density of the material, and achieves high-quality electrochemical composite deposition processing, repair, and surface performance enhancement.
[0021] 光束调制***采用两个锥角相同的正棱锥透镜、 负棱锥透镜组合方式， 将高斯实心圆 形激光束调制为环形空心激光束； 通过正棱锥透镜、 负棱锥透镜的空间位置、 锥角变化改变 环形空心激光束的直径， 调整激光辐照区域内的能量梯度分布， 使其与电化学电场能量相配 合， 构成激光与电化学复合沉积制造***。 [0022] 环形空心激光透过电沉积溶液后， 由于光束功率密度高使得照射部位溶液被击穿， 所 产生的环形等离子冲击波阵面在电化学工具阳极周围形成了非实体的激光光管电极， 造成环 形无水区； 同时使激光光管电极中心部位的溶液， 产生强烈的微对流， 可以减小浓差极化， 加快对流传质速度； 使得环形部位不会发生电化学反应， 而中心发生快速电化学沉积， 激光 光管电极内、外的沉积反应速度产生明显差异， 从而显著增强电化学反应的非线性定域效果。 当激光器输出周期作用的脉冲激光时， 就会在电化学工具电极***产生周期性的光幕作用， 最终实现选择性的定域电化学复合沉积。 [0021] The beam modulation system adopts two positive pyramid lenses with the same cone angle and a negative pyramid lens combination to modulate a Gaussian solid circular laser beam into a circular hollow laser beam; a space position of the positive pyramid lens, the negative pyramid lens, and a cone The angular change changes the diameter of the annular hollow laser beam, and the energy gradient distribution in the laser irradiation region is adjusted to match the energy of the electrochemical electric field to form a laser and electrochemical composite deposition manufacturing system. [0022] After the annular hollow laser passes through the electrodeposition solution, the solution of the irradiated portion is broken due to the high power density of the beam, and the generated annular plasma shock wave front forms a non-solid laser light pipe electrode around the anode of the electrochemical tool. The annular water-free zone is caused; at the same time, the solution at the center of the laser light pipe electrode generates strong micro-convection, which can reduce the concentration polarization and accelerate the convective mass transfer rate; the electrochemical reaction does not occur in the ring portion, and the center occurs. Rapid electrochemical deposition, the deposition reaction speed inside and outside the laser tube electrode is significantly different, which significantly enhances the nonlinear localization effect of the electrochemical reaction. When the laser outputs a periodic pulsed laser, a periodic light curtain is generated at the periphery of the electrochemical tool electrode to finally achieve selective localized electrochemical composite deposition.
[0023] 激光光管电极的电化学复合沉积制造方法的装置主要包括： 激光输出装置、 光束调制 ***、 复合沉积制造***、 运动和控制***。 其中激光输出装置包括激光控制器、 激光谐振 腔， 光束调制***包括正棱锥透镜， 负棱锥透镜； 复合沉积制造部分由工具阳极、 阴极基板、 加工腔、 电沉积液、 电流表、 电化学加工电源、 储液槽、 耐酸碱泵和示波器等构成， 电化学 脉冲电源的负极与作为阴极的基板相连； 电化学脉冲电源的正极与工具阳极相连， 它们之间 串联电流表检测加工电流， 示波器用于检测加工过程中电源的脉冲波形。 运动和控制***由 计算机、 运动控制卡、 X-Y-Z工作平台构成。  [0023] The apparatus for the electrochemical composite deposition manufacturing method of the laser light pipe electrode mainly comprises: a laser output device, a beam modulation system, a composite deposition manufacturing system, a motion and a control system. The laser output device comprises a laser controller, a laser cavity, the beam modulation system comprises a positive pyramid lens, a negative pyramid lens; the composite deposition manufacturing part comprises a tool anode, a cathode substrate, a processing cavity, an electrodeposition liquid, an ammeter, an electrochemical machining power source, The liquid storage tank, the acid-resistant pump and the oscilloscope are configured, the negative electrode of the electrochemical pulse power source is connected with the substrate as the cathode; the positive electrode of the electrochemical pulse power source is connected with the tool anode, and the current meter is connected between the series to detect the machining current, and the oscilloscope is used for detecting The pulse waveform of the power supply during processing. The motion and control system consists of a computer, motion control card, and X-Y-Z work platform.
[0024] 本发明是按下列技术方案实现的： [0024] The present invention is implemented according to the following technical solutions:
1 )建立激光能量的光束调制及传输***。将两个锥角相同的正棱锥透镜、 负棱锥透镜组合起 来， 负棱锥镜在前， 正棱锥镜在后， 正负棱锥透镜都与激光器输出的光束轴线重合， 然后用 反射镜改变光束方向， 最后由凸透镜实现光束聚焦。。  1) Establish a beam modulation and transmission system for laser energy. Combine two positive pyramid lenses and negative pyramid lenses with the same cone angle. The negative pyramid mirror is in front, the positive pyramid mirror is behind, the positive and negative pyramid lenses are coincident with the beam axis of the laser output, and then the beam direction is changed by the mirror. Finally, the beam is focused by a convex lens. .
[0025] 2 )构建环形空心激光束与电化学的复合微加工***。在聚焦镜光路中心的下方固定不 溶性金属电极丝， 作为阳极工具与电化学高频脉冲电源的正极相连， 它们之间串联电流表检 测加工电流； 平板金属电极作为电沉积的阴极基板， 与电源的负极相连； 电源的输出端同时 接数字存储示波器， 用于观测加工过程中电极之间脉冲波形的变化。 阴极基板安装固定在工 作台上的加工腔内，可以由计算机通过运动控制卡发出指令实现 X-Y-Z三个方向的空间运动。 [0026] 3 )光路和电路连接好后， 启动溶液循环***， 利用耐酸碱泵将储液槽中配置好的电沉 积液充入加工腔中， 完全浸没阴极基板和工具阳极丝的下部， 并保持电沉积液在加工过程中 的循环流动。 [0025] 2) Constructing a circular hollow laser beam and an electrochemical composite micromachining system. An insoluble metal electrode wire is fixed under the center of the focusing mirror optical path, and is connected as an anode tool to the positive electrode of the electrochemical high-frequency pulse power source, and an ammeter is connected between them to detect the processing current; the flat metal electrode is used as the electrodeposited cathode substrate, and the negative electrode of the power source Connected; the output of the power supply is connected to a digital storage oscilloscope for observing changes in the pulse waveform between the electrodes during processing. The cathode substrate is mounted and fixed in the processing cavity on the workbench, and the computer can send instructions in the three directions of XYZ through the motion control card. [0026] 3) After the optical path and the circuit are connected, the solution circulation system is started, and the electrodeposition liquid disposed in the liquid storage tank is filled into the processing chamber by the acid-resistant alkali pump, and the lower portion of the cathode substrate and the tool anode wire are completely immersed. And keep the circulating flow of the electrodeposition liquid during processing.
[0027] 4)根据加工需要， 由计算机控制激光器输出光束的性能参数， 如单脉冲能量、 脉冲宽 度和频率等； 调节电化学电源的输出参数， 如峰值电压、 脉冲宽度和频率等。  [0027] 4) according to the processing needs, the computer controls the performance parameters of the laser output beam, such as single pulse energy, pulse width and frequency, etc.; adjusts the output parameters of the electrochemical power source, such as peak voltage, pulse width and frequency.
[0028] 5 )激光输出装置发出实心高斯激光束经光束调制为环形空心激光束，由凸透镜聚焦后， 透过电沉积液辐照在阴极基板上， 由激光诱导的环形等离子体形成光管电极发生绝热膨胀， 对环形空心激光束中心的电化学沉积反应形成向心会聚的冲击压缩， 使金属离子的沉积结晶 过程受到外加的热力作用， 实现材料致密， 内应力小的定域沉积加工。 [0028] 5) The laser output device emits a solid Gaussian laser beam modulated by a beam into a circular hollow laser beam, which is focused by a convex lens, irradiated on the cathode substrate through an electrodeposition liquid, and formed into a light pipe electrode by a laser-induced annular plasma. The adiabatic expansion occurs, and the electrochemical deposition reaction of the center of the annular hollow laser beam forms a centrifugal compression of the centripetal convergence, so that the deposition and crystallization process of the metal ions is subjected to an external thermal force, and the material is dense, and the internal stress is small and localized deposition processing.
[0029] 6)在激光电化学复合沉积过程中， 计算机发出控制指令， 通过运动控制卡驱动工作台 实现空间三维运动， 使沉积材料随工作台的运动逐渐累积形成所需的三维结构。  [0029] 6) In the laser electrochemical composite deposition process, the computer issues a control command, and the motion control card drives the worktable to realize three-dimensional motion of the space, so that the deposition material gradually accumulates with the motion of the worktable to form a desired three-dimensional structure.
[0030] 对于已经发生明显腐蚀的金属零部件， 其形状精度或尺寸精度已经被改变的情况， 可 先采用激光除锈的方法， 去除腐蚀部位的氧化物； 然后通过电化学定域刻蚀技术去除该部位 的氧化层和部分材料， 以活化阴极基底， 并形成微小的电化学腐蚀凹坑， 再利用激光光管电 极的电化学沉积方法， 实现腐蚀区修复或表面性能强化， 可以提高电化学沉积材料在基体上 的附着强度。 [0030] For metal parts that have undergone significant corrosion, the shape accuracy or dimensional accuracy has been changed, and the method of laser descaling can be used first to remove oxides at the corrosion site; and then through electrochemical localized etching technology. The oxide layer and part of the material are removed to activate the cathode substrate, and a small electrochemical corrosion pit is formed, and then the electrochemical deposition method of the laser tube electrode is used to achieve corrosion region repair or surface property enhancement, thereby improving electrochemistry. The adhesion strength of the deposited material on the substrate.
[0031] 实施本发明环形空心激光束冲击与电化学沉积复合加工方法的所采用装置如图 1 所 示， 按照激光束的前进方向， 激光器***的详细连接关系为： 计算机 1发出控制指令到激光 控制器 2使激光谐振腔 3发出高斯激光 4，高斯激光 4依次通过负棱锥透镜 5和正棱锥透镜 6 形成环形空心激光束 7，形空心激光束 7依次经过反射镜 8和聚焦透镜 9照射于阴极基板 11 ; 电化学***的详细连接关系为： 电化学脉冲电源 17的负极与阴极基板 11相连； 电化学脉冲 电源 17的正极与工具阳极 10相连， 它们之间串联电流表 18检测加工电流， 示波器 15用于 检测加工过程中电化学脉冲电源 17的脉冲波形， 阴极基板 11安装在加工腔 12中； 计算机 1 通过运动控制卡 16发出指令控制 X-Y-Z工作台 13的空间运动， 计算机 1通过运动控制卡 16 还能控制耐酸碱泵 19将储液槽 14中的电沉积液 20输送到工作腔 12中。 [0031] The apparatus for implementing the annular hollow laser beam impact and electrochemical deposition composite processing method of the present invention is shown in FIG. 1. According to the forward direction of the laser beam, the detailed connection relationship of the laser system is as follows: The computer 1 issues a control command to the laser The controller 2 causes the laser cavity 3 to emit a Gaussian laser 4, which in turn forms a ring-shaped hollow laser beam 7 through the negative pyramid lens 5 and the positive pyramid lens 6, and the hollow laser beam 7 is sequentially irradiated to the cathode through the mirror 8 and the focus lens 9. The detailed connection relationship of the electrochemical system is as follows: The negative electrode of the electrochemical pulse power source 17 is connected to the cathode substrate 11; the positive electrode of the electrochemical pulse power source 17 is connected to the tool anode 10, and the current meter 18 is connected between them to detect the machining current, the oscilloscope 15 For detecting the pulse waveform of the electrochemical pulse power source 17 during processing, the cathode substrate 11 is mounted in the processing chamber 12; The space control of the XYZ table 13 is commanded by the motion control card 16, and the computer 1 can also control the acid-resistant pump 19 to transport the electrodeposition liquid 20 in the reservoir 14 into the working chamber 12 via the motion control card 16.
[0032] 实施本发明的主要过程和步骤如下： [0032] The main processes and steps for implementing the invention are as follows:
( 1 )首先对激光束进行调制处理。 由计算机 1通过激光控制器 2和激光谐振腔 3输出单脉冲 能量在 0.1 1焦耳、 脉冲时间为 10纳秒、 频率为 1~10赫兹、 波长 1064纳米的实心平行的高 斯激光 4， 高斯激光 4先后经过负棱锥透镜 5和正棱锥透镜 6， 高斯激光 4光束中心的能量就 被负棱锥透镜 5和正棱锥透镜 6的棱锥面折射发散， 形成一束中心能量为零近似平行的环形 空心激光束 7， 如图 2所示。 要求负棱锥透镜 5和正棱锥透镜 6的折射率 n、 方位角 、 和锥 角 σ都相同，入射实心平行的高斯激光 4光束半径为 r，调整负棱锥透镜 5和正棱锥透镜之间 的距离 d， 就可以得到满足加工要求的环形空心激光束 7， 其环的宽度为 R， 内环内径尺寸为 rm ^ d(ctg( ) - tg(a)) (1) First, the laser beam is modulated. The solid parallel Gaussian laser 4 with a single pulse energy of 0.1 1 joule, a pulse time of 10 nanoseconds, a frequency of 1 to 10 Hz, and a wavelength of 1064 nm is output by the computer 1 through the laser controller 2 and the laser cavity 3, and the Gaussian laser 4 After passing through the negative pyramid lens 5 and the positive pyramid lens 6, the energy of the center of the Gaussian laser beam 4 is refracted and diverged by the pyramid faces of the negative pyramid lens 5 and the positive pyramid lens 6, forming a circular hollow laser beam 7 whose center energy is approximately parallel. as shown in picture 2. It is required that the refractive index n, the azimuth angle, and the taper angle σ of the negative pyramid lens 5 and the positive pyramid lens 6 are the same, and the incident solid parallel Gaussian laser beam 4 has a beam radius r, and the distance d between the negative pyramid lens 5 and the regular pyramid lens is adjusted, The annular hollow laser beam 7 satisfying the processing requirements can be obtained, and the ring has a width R and an inner ring inner diameter of r m ^ d (ctg( ) - tg(a))
[0033] ( 2 ) 配制电化学沉积所需的溶液。 选择电沉积的镀液种类， 用纯净蒸熘水配置溶液， 并加入少量能显著改善镀层性能和沉积速度的添加剂， 包括能促进阳极活化的阳极活化剂， 以提高阳极开始钝化的电流密度， 从而保证阳极处于活化状态而能正常地溶解； 能提高沉积 层材料质量的光亮剂、 整平剂等； 以及用于提高电铸液的导电性的碱金属或碱土金属盐类。 沉积过程中为提高沉积速度， 将储液槽中的溶液加热至 40~50°C。  [0033] (2) Preparing a solution required for electrochemical deposition. Select the type of electrodeposited bath, configure the solution with pure distilled water, and add a small amount of additives that significantly improve coating performance and deposition rate, including an anodic activator that promotes anodic activation to increase the current density at which the anode begins to passivate. Thereby, the anode is in an activated state to be normally dissolved; a brightener, a leveling agent, etc., which can improve the quality of the material of the deposited layer; and an alkali metal or alkaline earth metal salt for improving the conductivity of the electroforming liquid. In order to increase the deposition rate during the deposition process, the solution in the reservoir is heated to 40~50 °C.
[0034] ( 3 ) 构建环形空心激光束 7与电化学的复合微加工***。 根据图 1所示连接电化学 脉冲电源 17和工具阳极 10、 阴极基板 11， 工具阳极 10采用直径 0.1 0.2毫米的不溶性金属 电极丝，固定于聚焦镜光路中心的下方；阴极基板 11为 30mm x40mm厚度 1mm的不锈钢片， 使用前采用： 研磨→除油→水洗→弱侵蚀→水洗的处理方式， 然后安装固定在工作台 13上的 加工腔 12内。调节电化学脉冲电源 17的输出参数，其中峰值电压为 2~5伏、脉冲频率为 0.5 2 兆赫兹、 脉冲宽度为 500 30纳秒。 [0035] ( 4 ) 激光电化学复合沉积试验： 首先开启耐酸碱泵 19将配置好的电沉积溶液由储液 槽 14充入加工腔 12中， 完全浸没阴极基板 11和工具阳极 10的下部， 并保持电沉积液在加 工过程中的循环流动。电化学脉冲电源 17开启，沉积液中的金属离子在纳秒脉冲电流作用下， 在阴极基板 11表面发生电化学还原反应； 同时激光器发出的环形空心激光束 7经反射镜 8反 射后被聚焦透镜 9聚焦辐照在阴极基板 11上的沉积区域。由环形空心激光束 7形成的激光光 管电极诱导环形等离子体冲击波 21发生绝热膨胀，对环形空心激光束 7中心的电化学沉积反 应形成向心会聚的冲击压缩， 使金属离子的沉积结晶过程受到热力冲击作用， 使得沉积体 22 材料致密， 实现内应力小的定域沉积加工， 如图 3所示。 再由计算机 1发出控制指令， 通过 运动控制卡 16驱动 X-Y-Z工作台 13实现空间三维运动， 使沉积体 22随 X-Y-Z工作台 13的 运动逐渐累积制造出所需的三维结构。 图 4就是采用激光光管电极与电化学复合沉积制造出 的简单圆柱形沉积体实例。 [0034] (3) Constructing a circular hollow laser beam 7 and an electrochemical composite micromachining system. According to FIG. 1, the electrochemical pulse power source 17 and the tool anode 10 and the cathode substrate 11 are connected. The tool anode 10 is made of an insoluble metal electrode wire having a diameter of 0.1 0.2 mm, and is fixed below the center of the focusing mirror optical path; the cathode substrate 11 is 30 mm x 40 mm thick. The 1mm stainless steel piece is used before the use: grinding → degreasing → water washing → weak erosion → water washing, and then installed in the processing chamber 12 fixed on the table 13 . The output parameters of the electrochemical pulse power source 17 are adjusted, wherein the peak voltage is 2 to 5 volts, the pulse frequency is 0.5 2 megahertz, and the pulse width is 500 30 nanoseconds. [0035] (4) Laser Electrochemical Composite Deposition Test: First, the acid-resistant alkaline pump 19 is turned on, and the configured electrodeposition solution is filled into the processing chamber 12 from the liquid storage tank 14, completely immersing the cathode substrate 11 and the lower portion of the tool anode 10. And keep the circulating flow of the electrodeposition liquid during processing. The electrochemical pulse power source 17 is turned on, and the metal ions in the deposition liquid undergo an electrochemical reduction reaction on the surface of the cathode substrate 11 under the action of a nanosecond pulse current; at the same time, the annular hollow laser beam 7 emitted by the laser is reflected by the mirror 8 and is focused by the lens. 9 focuses the deposition area on the cathode substrate 11. The laser light pipe electrode formed by the annular hollow laser beam 7 induces adiabatic expansion of the annular plasma shock wave 21, and the electrochemical deposition reaction at the center of the annular hollow laser beam 7 forms a centrifugal compression of the centripetal convergence, so that the deposition and crystallization process of the metal ions is subjected to The thermal impact effect makes the material of the deposit body 22 dense, and the localized stress processing with small internal stress is realized, as shown in Fig. 3. Then, the computer 1 issues a control command, and the motion control card 16 drives the XYZ table 13 to realize three-dimensional spatial motion, so that the deposition body 22 gradually accumulates with the movement of the XYZ table 13 to manufacture a desired three-dimensional structure. Figure 4 is an example of a simple cylindrical deposit made using a laser tube electrode and electrochemical composite deposition.
[0036] 对于已经发生明显腐蚀的金属零部件， 其形状精度或尺寸精度已经被改变的情况， 可 采用激光除锈的方法， 将脉冲激光聚焦照射到腐蚀部位， 使基体表面和锈蚀微粒产生脉冲振 动， 当形成的冲击力大于颗粒的表面吸附力时， 锈蚀产物就会脱离表面被去除。 再利用激光 电化学复合应力刻蚀技术去除工件表面待沉积区域的氧化层和部分材料， 活化阴极基底， 并 形成微小的电化学腐蚀凹坑， 提高电化学沉积材料的附着强度。 最后采用激光光管电极与电 化学复合沉积的方法修复该零件腐蚀部位， 或在其表面沉积耐腐蚀合金层以改善表面性能。  [0036] For metal parts that have undergone significant corrosion, the shape accuracy or dimensional accuracy has been changed. Laser rust removal method can be used to focus the pulsed laser on the corrosion site to pulse the surface of the substrate and the rust particles. Vibration, when the impact force is greater than the surface adsorption force of the particles, the rust products are removed from the surface. The laser electrochemical composite stress etching technique is used to remove the oxide layer and some materials on the surface of the workpiece to be deposited, activate the cathode substrate, and form tiny electrochemical corrosion pits to improve the adhesion strength of the electrochemical deposition material. Finally, the laser tube electrode and electro-chemical composite deposition method are used to repair the corrosion part of the part, or a corrosion-resistant alloy layer is deposited on the surface to improve the surface properties.
[0037] 环形空心激光束能量形成的激光光管电极与电化学沉积***复合后， 对***中的电沉 积离子结晶过程产生向心会聚的热力冲击作用， 提高了电极反应速率， 减小了沉积应力， 增 强了沉积材料的致密度， 具有高的选择性及加工精度， 从而实现高质量的微区局部沉积。 [0037] The laser light pipe electrode formed by the energy of the annular hollow laser beam is combined with the electrochemical deposition system to generate a thermal impact of centripetal convergence on the electrodeposition ion crystallization process in the system, thereby improving the electrode reaction rate and reducing the deposition. The stress enhances the density of the deposited material, and has high selectivity and processing precision, thereby achieving high-quality local deposition of the microdomain.
[0038] 本所述实施例为本发明的优选的实施方式， 但发明并不限于上述实施方式， 在不背离 本发明的实质内容的情况下， 本领域技术人员能够做出的任何显而易见的改进、 替换或变型 均属于本发明的保护范围。 The embodiments described herein are preferred embodiments of the present invention, but the invention is not limited to the embodiments described above, and any obvious improvement that can be made by those skilled in the art without departing from the spirit of the invention. ALTERNATES OR MODIFICATIONS are within the scope of the invention.

Claims

权 利 要 求 书 Claim
1. 一种激光光管电极的电化学复合沉积制造方法， 利用激光在电极表面辐照引起的光电化学 反应实现材料的沉积制造， 其特征在于包括以下步骤  An electrochemical composite deposition manufacturing method for a laser light pipe electrode, which utilizes a photoelectrochemical reaction caused by laser irradiation on an electrode surface to realize deposition of a material, which is characterized by comprising the following steps
将工具阳极的下部和阴极基板浸入电沉积液中， 接通电源并保持电沉积液循环流动； 将实心高斯激光通过光束调制***调制为中心光强为零的环形空心激光束； Immersing the lower part of the anode of the tool and the cathode substrate into the electrodeposition liquid, turning on the power supply and keeping the electrodeposition liquid circulating; and modulating the solid Gaussian laser into a circular hollow laser beam with a central light intensity of zero by the beam modulation system;
将所述环形空心激光束聚焦到所述阴极基板上， 并使所述工具阳极处于所述环形空心激光束 中心位置， 使激光诱导的环形等离子体形成激光管电极发生扩张膨胀； Focusing the annular hollow laser beam on the cathode substrate, and placing the tool anode at a center position of the annular hollow laser beam, causing the laser-induced annular plasma to form a laser tube electrode to expand and expand;
通过移动阴极基板实现对阴极基板的持续加工。 Continuous processing of the cathode substrate is achieved by moving the cathode substrate.
2. 根据权利要求 1所述的一种激光光管电极的电化学复合沉积制造方法， 其特征在于： 所述 步骤 1 ) 前对阴极基板依次进行研磨、 除油、 水洗、 弱侵蚀、 水洗的处理。  2 . The electrochemical composite deposition manufacturing method of a laser light pipe electrode according to claim 1 , wherein: the step 1 ) is followed by grinding, degreasing, water washing, weak etching, and water washing on the cathode substrate. deal with.
3. 根据权利要求 1所述的一种激光光管电极的电化学复合沉积制造方法， 其特征在于： 所述 光束调制***包括正棱锥透镜和负棱锥透镜， 所述正棱锥透镜和负棱锥透镜折射率、 方位角 和锥角相同。  3. The electrochemical composite deposition manufacturing method of a laser light pipe electrode according to claim 1, wherein: the beam modulation system comprises a positive pyramid lens and a negative pyramid lens, and the positive pyramid lens and the negative pyramid lens The refractive index, azimuth and cone angle are the same.
4. 根据权利要求 3所述的一种激光光管电极的电化学复合沉积制造方法， 其特征在于： 所述 环形空心激光束的内环半径^为^ = (^ - ^))， 其中： 折射率 n、 方位角 、 和锥角 σ , 负棱锥透镜和正棱锥透镜之间的距离 d， 空心激光束环的宽度为1 。  4 . The method of claim 3 , wherein the radius of the inner ring of the annular hollow laser beam is ^ = (^ - ^)), wherein: The refractive index n, the azimuth angle, and the taper angle σ, the distance d between the negative pyramid lens and the regular pyramid lens, and the width of the hollow laser beam ring is 1.
5. —种激光光管电极的电化学复合沉积制造装置， 包括激光输出装置、 光束调制***、 复合 沉积制造***； 其特征在于， 所述激光输出装置包括激光控制器、 激光谐振腔， 所述激光控 制器控制激光谐振腔发出高斯激光， 所述高斯激光经所述光束调制***调制为环形空心激光 束； 所述复合沉积制造***包括工具阳极、 阴极基板、 加工腔、 电沉积液、 电化学脉冲电源， 所述工具阳极连接于电化学脉冲电源的正极， 阴极基板连接于电化学脉冲电源的负极， 所述 阴极基板置于加工腔内的电沉积液中， 所述环形空心激光束经过聚焦透镜照射于所述阴极基 板， 所述工具阳极置于所述环形空心激光束的中心位置， 且工具阳极的一端置于电沉积液中。  5. An electrochemical composite deposition manufacturing apparatus for a laser light pipe electrode, comprising: a laser output device, a beam modulation system, and a composite deposition manufacturing system; wherein the laser output device comprises a laser controller, a laser cavity, The laser controller controls the laser cavity to emit a Gaussian laser, and the Gaussian laser is modulated into a circular hollow laser beam by the beam modulation system; the composite deposition manufacturing system includes a tool anode, a cathode substrate, a processing cavity, an electrodeposition liquid, and an electrochemical a pulse power source, the tool anode is connected to the positive electrode of the electrochemical pulse power source, the cathode substrate is connected to the negative electrode of the electrochemical pulse power source, the cathode substrate is placed in the electrodeposition liquid in the processing chamber, and the annular hollow laser beam is focused A lens is irradiated to the cathode substrate, the tool anode is placed at a center position of the annular hollow laser beam, and one end of the tool anode is placed in the electrodeposition liquid.
6. 根据权利要求 5所述的一种激光光管电极的电化学复合沉积制造方法的装置，其特征在于: 还包括运动和控制***， 所述运动控制***包括计算机、 运动控制卡、 X-Y-Z 工作平台， 所 述计算机与运动控制卡相连， 所述运动控制卡与 X-Y-Z工作平台相连， 所述加工腔置于所述 X-Y-Z工作平台上。 6 . The device for manufacturing an electrochemical composite deposition method of a laser light pipe electrode according to claim 5 , wherein: Also included is a motion and control system, the motion control system including a computer, a motion control card, an XYZ work platform, the computer being coupled to a motion control card, the motion control card being coupled to an XYZ work platform, the processing chamber being placed On the XYZ work platform.
7. 根据权利要求 5所述的一种激光光管电极的电化学复合沉积制造方法的装置，其特征在于: 还包括储液槽、 耐酸碱泵， 所述耐酸碱泵将储液槽中的电沉积液输送到工作腔中。  The device for manufacturing an electrochemical composite deposition method of a laser light pipe electrode according to claim 5, further comprising: a liquid storage tank and an acid and alkali resistant pump, wherein the acid and alkali resistant pump will store the liquid storage tank The electrodeposition liquid in the medium is delivered to the working chamber.
8. 根据权利要求 7所述的一种激光光管电极的电化学复合沉积制造方法的装置，其特征在于: 所述储液槽中电沉积液的温度为 40~50°C。  8. The apparatus for electrochemically depositing a laser light pipe electrode according to claim 7, wherein the temperature of the electrodeposition liquid in the liquid storage tank is 40 to 50 °C.
9. 根据权利要求 5所述的一种激光光管电极的电化学复合沉积制造方法的装置，其特征在于: 所述工具阳极是直径为 0.1 0.2毫米的不溶性金属电极丝。  9. The apparatus for electrochemically depositing a laser tube electrode according to claim 5, wherein: the tool anode is an insoluble metal electrode wire having a diameter of 0.1 0.2 mm.
10. 根据权利要求 5 所述的一种激光光管电极的电化学复合沉积制造方法的装置， 其特征在 于： 所述激光控制器输出的为脉冲激光， 其参数为： 单脉冲能量在 0.1 1 焦耳、 脉冲时间为 10纳秒、 频率为 1~10赫兹、 波长为 1064纳米； 所述电化学脉冲电源的输出参数为： 峰值电 压为 2~5伏、 脉冲频率为 0.5 2兆赫兹、 脉冲宽度为 500 30纳秒。  10. The apparatus for manufacturing an electrochemical composite deposition method of a laser light pipe electrode according to claim 5, wherein: the laser controller outputs a pulsed laser, the parameters of which are: single pulse energy at 0.1 1 Joule, pulse time is 10 nanoseconds, frequency is 1~10 Hz, wavelength is 1064 nm; output parameters of the electrochemical pulse power supply are: peak voltage is 2~5 volts, pulse frequency is 0.5 2 megahertz, pulse width It is 500 30 nanoseconds.
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