WO2015037918A1 - 기판 검사를 위한 기준 데이터 생성방법 - Google Patents
기판 검사를 위한 기준 데이터 생성방법 Download PDFInfo
- Publication number
- WO2015037918A1 WO2015037918A1 PCT/KR2014/008473 KR2014008473W WO2015037918A1 WO 2015037918 A1 WO2015037918 A1 WO 2015037918A1 KR 2014008473 W KR2014008473 W KR 2014008473W WO 2015037918 A1 WO2015037918 A1 WO 2015037918A1
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- WO
- WIPO (PCT)
- Prior art keywords
- reference data
- information
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- generating
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Classifications
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T7/00—Image analysis
- G06T7/0002—Inspection of images, e.g. flaw detection
- G06T7/0004—Industrial image inspection
- G06T7/001—Industrial image inspection using an image reference approach
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
- H05K13/08—Monitoring manufacture of assemblages
- H05K13/081—Integration of optical monitoring devices in assembly lines; Processes using optical monitoring devices specially adapted for controlling devices or machines in assembly lines
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/002—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/93—Detection standards; Calibrating baseline adjustment, drift correction
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/956—Inspecting patterns on the surface of objects
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/956—Inspecting patterns on the surface of objects
- G01N21/95607—Inspecting patterns on the surface of objects using a comparative method
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/956—Inspecting patterns on the surface of objects
- G01N21/95684—Patterns showing highly reflecting parts, e.g. metallic elements
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T7/00—Image analysis
- G06T7/0002—Inspection of images, e.g. flaw detection
- G06T7/0004—Industrial image inspection
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T7/00—Image analysis
- G06T7/0002—Inspection of images, e.g. flaw detection
- G06T7/0004—Industrial image inspection
- G06T7/0006—Industrial image inspection using a design-rule based approach
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2201/00—Features of devices classified in G01N21/00
- G01N2201/12—Circuits of general importance; Signal processing
- G01N2201/13—Standards, constitution
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T2207/00—Indexing scheme for image analysis or image enhancement
- G06T2207/10—Image acquisition modality
- G06T2207/10016—Video; Image sequence
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T2207/00—Indexing scheme for image analysis or image enhancement
- G06T2207/30—Subject of image; Context of image processing
- G06T2207/30108—Industrial image inspection
- G06T2207/30141—Printed circuit board [PCB]
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T2207/00—Indexing scheme for image analysis or image enhancement
- G06T2207/30—Subject of image; Context of image processing
- G06T2207/30108—Industrial image inspection
- G06T2207/30148—Semiconductor; IC; Wafer
Definitions
- the present invention relates to a method of generating reference data for inspecting a substrate. More specifically, a compensation matrix is generated using pad coordinate information on image information of a bare substrate and pad coordinate information on design information, and applied to the image information. To generate reference data for substrate inspection.
- At least one printed circuit board is provided in an electronic device, and various circuit elements such as a circuit pattern, a connection pad part, and a driving chip electrically connected to the connection pad part are provided on the printed circuit board. Are mounted.
- a substrate inspection apparatus is used to confirm that the various circuit elements as described above are properly formed or disposed on the printed circuit board.
- reference data is acquired to perform substrate inspection.
- the reference data may be a theoretical planar image of the substrate.
- the reference data may be obtained from CAD information that records a shape of the substrate.
- the CAD information includes design reference information of the substrate, and generally includes layout information regarding pads, circuit patterns, hole patterns, and the like.
- the present invention generates a compensation matrix by using the pad coordinate information on the image information on the bare substrate and the pad coordinate information on the pre-stored design information, and the compensation matrix is image information on the bare substrate.
- the object of the present invention is to provide a method of generating reference data for inspecting a substrate without generating CAD information by generating reference data including coordinate information of a feature object.
- a method of generating reference data for inspecting a substrate comprising: scanning a bare substrate to obtain image information on the bare substrate, pad coordinate information extracted from the image information, and storing in advance Generating a compensation matrix by using pad coordinate information on the predetermined design information, and generating reference data including coordinate information of a feature object by applying the compensation matrix to the image information.
- the generating of the reference data may include extracting coordinate information of a feature object from the image information, and generating reference data by applying the compensation matrix to the coordinates of the extracted feature object.
- the feature object may be at least one of a corner portion of a hole pattern, a circle pattern, or a curved pattern on the bare substrate.
- the reference data may be image information generated by applying the generated compensation matrix to the image information.
- the image information may be two-dimensional image information of the bare substrate.
- a program executable on a computer for performing the method may be stored in a recording medium.
- a method for generating reference data for inspecting a substrate and a method for inspecting a substrate using the same according to an embodiment of the present invention, it is possible to replace the CAD data without generating CAD data for a printed circuit board for substrate inspection. Since the reference data can be generated, the time for generating the CAD data can be saved, thereby significantly increasing work efficiency.
- FIG. 1 is a block diagram of a substrate inspection apparatus for performing a measurement area compensation method during a substrate inspection according to an exemplary embodiment of the present invention.
- FIG. 2 is a flowchart of a method of generating reference data for inspecting a substrate according to an exemplary embodiment of the present invention.
- FIG. 3 is a plan view of a bare substrate for explaining a method of generating reference data for inspecting a substrate according to an exemplary embodiment of the present invention.
- FIG. 1 is a block diagram of a substrate inspection apparatus for performing a reference data generation method for a substrate inspection according to an embodiment of the present invention
- Figure 2 is a reference data generation method for a substrate inspection according to an embodiment of the present invention
- 3 is a plan view of a bare substrate for explaining a method of generating reference data for inspecting a substrate according to an embodiment of the present invention.
- the substrate inspection apparatus 100 controls and controls an operation of the substrate inspection apparatus 100, and processes a calculation to perform various functions, and transfers and mounts a substrate to be inspected.
- the memory unit 140 stores a stage unit 120, a measurement unit 130 for performing inspection on a substrate mounted on the stage unit 120, and a program and data for driving the substrate inspection apparatus 100. ),
- a display unit 150 for outputting an operation state of the substrate inspection apparatus 100, an inspection result, and the like, and a user interface unit 160 for receiving a user's command.
- image information about the bare substrate is obtained by scanning the bare substrate 200 through the measuring unit 130 (S100).
- the bare substrate 200 is a substrate before lead is applied. Characteristic objects such as a pad region 210 to which lead is actually applied, holes 220 and non-lead 220, and silk 230 are not applied. Means a substrate formed.
- the feature object may be at least one of a corner portion of a hole pattern, a circle pattern, or a curved pattern formed on a bare substrate.
- the image information may be 2D image information on the bare substrate 200.
- the controller 110 generates a compensation matrix by using the coordinate information of the pad 210 extracted from the image information and the pad coordinate information on previously stored design information (S110).
- the compensation matrix may be one of an affine transformation matrix or a projective transformation matrix.
- the controller 110 generates the reference data including the coordinate information of the feature object by applying the compensation matrix to the image information (S120).
- the reference data may be generated as coordinate information of the feature object or as image information including coordinate information of the feature object.
- reference data may be generated by applying the compensation matrix to the coordinates of the extracted feature object.
- the coordinate information of the feature object is generated as reference data.
- an image generated by compensating the image information by applying the generated compensation matrix to image information of the bare substrate may be generated as reference data.
- the reference data generated by the reference data generation method for inspecting the substrate according to the exemplary embodiment of the present invention described above may be used when inspecting the substrate.
- a feature object may be extracted from the substrate to generate a compensation matrix using coordinate information of the feature object and coordinate information of the feature object on the reference data.
- the generated compensation matrix may be applied to coordinate information of a pad on previously stored design information to generate coordinate information of a pad to be inspected on the substrate.
- Substrate inspection may be performed at a position on the coordinate information of the pad.
- the method of generating reference data for inspecting a substrate according to the embodiment of the present invention described above may be implemented in the form of program instructions that can be executed by various computer means and recorded in a computer readable medium.
- the computer-readable medium may include a program command, a data file, a data structure, etc. alone or in combination.
- Program instructions recorded on the media may be those specially designed and constructed for the purposes of the present invention, or they may be of the kind well-known and available to those having skill in the computer software arts.
- Examples of computer-readable recording media include magnetic media such as hard disks, floppy disks, and magnetic tape, optical media such as CD-ROMs, DVDs, and magnetic disks, such as floppy disks.
- Magneto-optical media and hardware devices specifically configured to store and execute program instructions, such as ROM, RAM, flash memory, and the like.
- program instructions include not only machine code generated by a compiler, but also high-level language code that can be executed by a computer using an interpreter or the like.
- the measurement area compensation method when inspecting a substrate when inspecting a substrate according to an exemplary embodiment of the present invention, when the validity of a compensation matrix generated by using information of feature objects in the current measurement area is unreliable, information of feature objects in neighboring measurement areas may be used. By generating a compensation matrix it is possible to improve the reliability of the substrate inspection results for the current measurement area.
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Biochemistry (AREA)
- Analytical Chemistry (AREA)
- Chemical & Material Sciences (AREA)
- General Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Health & Medical Sciences (AREA)
- Computer Vision & Pattern Recognition (AREA)
- Quality & Reliability (AREA)
- Theoretical Computer Science (AREA)
- Operations Research (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Tests Of Electronic Circuits (AREA)
- Image Processing (AREA)
- Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)
- Image Analysis (AREA)
Abstract
Description
Claims (6)
- 베어 기판을 스캔하여 상기 베어 기판에 대한 영상정보를 획득하는 단계;상기 영상정보에서 추출한 패드 좌표 정보와 미리 저장되어 있는 설계 정보 상의 패드 좌표 정보를 이용하여 보상 매트릭스를 생성하는 단계;상기 보상 매트릭스를 상기 영상정보에 적용하여 특징 객체의 좌표 정보를 포함하는 기준 데이터를 생성하는 단계를 포함하는기판 검사를 위한 기준 데이터 생성방법.
- 제1항에 있어서,상기 기준 데이터를 생성하여 단계는상기 영상정보에서 특징객체의 좌표 정보를 추출하는 단계;상기 보상 매트릭스를 상기 추출된 특징객체의 좌표에 적용하여 기준 데이터를 생성하는 단계를 포함하는,기판 검사를 위한 기준 데이터 생성방법.
- 제2항에 있어서,상기 특징객체는 상기 베어 기판 상의 홀 패턴, 서클 패턴 또는 굽은 패턴의 코너 부분 중 적어도 하나인,기판 검사를 위한 기준 데이터 생성방법.
- 제1항에 있어서,상기 기준 데이터는,상기 생성된 보상 매트릭스를 상기 실측 영상정보에 적용하여 생성한 이미지 정보인기판 검사를 위한 기준 데이터 생성방법.
- 제1항에 있어서,상기 영상정보는 상기 베어 기판에 대한 2차원 영상정보인,기판 검사를 위한 기준 데이터 생성방법.
- 제1항 내지 제5항 중 어느 한 항의 방법을 수행하기 위한 컴퓨터에서 구동 가능한 프로그램이 저장된 기록매체.
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2016542637A JP6603664B2 (ja) | 2013-09-12 | 2014-09-11 | 基板検査のための基準データ生成方法 |
CN201480050250.4A CN105532085B (zh) | 2013-09-12 | 2014-09-11 | 用于检查基板的基准数据生成方法 |
US15/021,349 US9911185B2 (en) | 2013-09-12 | 2014-09-11 | Method of generating reference data for inspecting a circuit board |
EP14844433.4A EP3046405B1 (en) | 2013-09-12 | 2014-09-11 | Reference data generating method for circuit board inspection |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR20130109909A KR101474859B1 (ko) | 2013-09-12 | 2013-09-12 | 기판 검사를 위한 기준 데이터 생성방법 |
KR10-2013-0109909 | 2013-09-12 |
Publications (1)
Publication Number | Publication Date |
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WO2015037918A1 true WO2015037918A1 (ko) | 2015-03-19 |
Family
ID=52665948
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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PCT/KR2014/008473 WO2015037918A1 (ko) | 2013-09-12 | 2014-09-11 | 기판 검사를 위한 기준 데이터 생성방법 |
Country Status (6)
Country | Link |
---|---|
US (1) | US9911185B2 (ko) |
EP (1) | EP3046405B1 (ko) |
JP (1) | JP6603664B2 (ko) |
KR (1) | KR101474859B1 (ko) |
CN (1) | CN105532085B (ko) |
WO (1) | WO2015037918A1 (ko) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
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KR101444259B1 (ko) * | 2013-09-12 | 2014-10-30 | 주식회사 고영테크놀러지 | 기판 검사 시의 보상 매트릭스 생성방법 |
Citations (5)
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JPH05210712A (ja) * | 1992-01-31 | 1993-08-20 | Matsushita Electric Ind Co Ltd | 実装データ修正方法 |
JPH10221035A (ja) * | 1997-02-04 | 1998-08-21 | Matsushita Electric Ind Co Ltd | 実装部品検査装置 |
JPH1173513A (ja) * | 1997-06-25 | 1999-03-16 | Matsushita Electric Works Ltd | パターン検査方法及びその装置 |
JP2006086432A (ja) * | 2004-09-17 | 2006-03-30 | I-Pulse Co Ltd | 実装基板の検査用データ作成方法及び作成装置 |
KR20120032247A (ko) * | 2010-09-28 | 2012-04-05 | 삼성전기주식회사 | 기판의 인쇄 오차 보정방법 |
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US4528500A (en) * | 1980-11-25 | 1985-07-09 | Lightbody James D | Apparatus and method for testing circuit boards |
US4443756A (en) * | 1980-11-25 | 1984-04-17 | Lightbody James D | Apparatus and method for testing circuit boards |
DE3204086A1 (de) * | 1982-02-06 | 1983-08-11 | Ibm Deutschland Gmbh, 7000 Stuttgart | Vorrichtung zur automatischen optischen beschaffenheitspruefung |
US5495535A (en) * | 1992-01-31 | 1996-02-27 | Orbotech Ltd | Method of inspecting articles |
JPH07140209A (ja) * | 1993-09-20 | 1995-06-02 | Fujitsu Ltd | 回路配線基板の検査装置およびその検査方法 |
US7089160B2 (en) | 2002-01-08 | 2006-08-08 | International Business Machines Corporation | Model for modifying drill data to predict hole locations in a panel structure |
JP2008185514A (ja) * | 2007-01-31 | 2008-08-14 | Oki Electric Ind Co Ltd | 基板外観検査装置 |
US8260030B2 (en) | 2009-03-30 | 2012-09-04 | Koh Young Technology Inc. | Inspection method |
KR101231597B1 (ko) | 2010-11-15 | 2013-02-08 | 주식회사 고영테크놀러지 | 검사방법 |
KR101692277B1 (ko) | 2010-11-23 | 2017-01-04 | 주식회사 고영테크놀러지 | 검사방법 |
KR101642897B1 (ko) * | 2011-07-13 | 2016-07-26 | 주식회사 고영테크놀러지 | 검사방법 |
-
2013
- 2013-09-12 KR KR20130109909A patent/KR101474859B1/ko active IP Right Grant
-
2014
- 2014-09-11 JP JP2016542637A patent/JP6603664B2/ja active Active
- 2014-09-11 EP EP14844433.4A patent/EP3046405B1/en active Active
- 2014-09-11 CN CN201480050250.4A patent/CN105532085B/zh active Active
- 2014-09-11 US US15/021,349 patent/US9911185B2/en active Active
- 2014-09-11 WO PCT/KR2014/008473 patent/WO2015037918A1/ko active Application Filing
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05210712A (ja) * | 1992-01-31 | 1993-08-20 | Matsushita Electric Ind Co Ltd | 実装データ修正方法 |
JPH10221035A (ja) * | 1997-02-04 | 1998-08-21 | Matsushita Electric Ind Co Ltd | 実装部品検査装置 |
JPH1173513A (ja) * | 1997-06-25 | 1999-03-16 | Matsushita Electric Works Ltd | パターン検査方法及びその装置 |
JP2006086432A (ja) * | 2004-09-17 | 2006-03-30 | I-Pulse Co Ltd | 実装基板の検査用データ作成方法及び作成装置 |
KR20120032247A (ko) * | 2010-09-28 | 2012-04-05 | 삼성전기주식회사 | 기판의 인쇄 오차 보정방법 |
Also Published As
Publication number | Publication date |
---|---|
EP3046405B1 (en) | 2020-10-07 |
JP2016535279A (ja) | 2016-11-10 |
CN105532085B (zh) | 2018-10-19 |
EP3046405A1 (en) | 2016-07-20 |
CN105532085A (zh) | 2016-04-27 |
US9911185B2 (en) | 2018-03-06 |
KR101474859B1 (ko) | 2014-12-30 |
EP3046405A4 (en) | 2016-11-16 |
JP6603664B2 (ja) | 2019-11-06 |
US20160225129A1 (en) | 2016-08-04 |
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