WO2014167949A1 - Sealing-sheet application method and stealing-sheet application device - Google Patents
Sealing-sheet application method and stealing-sheet application device Download PDFInfo
- Publication number
- WO2014167949A1 WO2014167949A1 PCT/JP2014/057178 JP2014057178W WO2014167949A1 WO 2014167949 A1 WO2014167949 A1 WO 2014167949A1 JP 2014057178 W JP2014057178 W JP 2014057178W WO 2014167949 A1 WO2014167949 A1 WO 2014167949A1
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- WIPO (PCT)
- Prior art keywords
- sheet
- sealing sheet
- sealing
- supply unit
- semiconductor substrate
- Prior art date
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- 238000007789 sealing Methods 0.000 claims abstract description 202
- 239000004065 semiconductor Substances 0.000 claims abstract description 95
- 239000000758 substrate Substances 0.000 claims abstract description 78
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- 238000001514 detection method Methods 0.000 claims description 10
- 239000011342 resin composition Substances 0.000 claims description 8
- 238000007791 dehumidification Methods 0.000 claims description 4
- 238000004891 communication Methods 0.000 claims description 2
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- 238000005520 cutting process Methods 0.000 description 13
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- 229920005989 resin Polymers 0.000 description 8
- 239000011347 resin Substances 0.000 description 8
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- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
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- QUDWYFHPNIMBFC-UHFFFAOYSA-N bis(prop-2-enyl) benzene-1,2-dicarboxylate Chemical compound C=CCOC(=O)C1=CC=CC=C1C(=O)OCC=C QUDWYFHPNIMBFC-UHFFFAOYSA-N 0.000 description 1
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- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 1
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- 239000000454 talc Substances 0.000 description 1
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- 229920002803 thermoplastic polyurethane Polymers 0.000 description 1
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Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67132—Apparatus for placing on an insulating substrate, e.g. tape
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
- H01L21/56—Encapsulations, e.g. encapsulation layers, coatings
Definitions
- the present invention relates to a sealing sheet pasting method and a sealing sheet pasting apparatus for pasting and sealing a sealing sheet formed with a sealing layer made of a resin composition on a plurality of semiconductor elements formed on a semiconductor substrate. About.
- the first sealing resin sheet and the second sealing resin sheet made of prepreg impregnated with resin are sandwiched between both surfaces of the semiconductor chip.
- a semiconductor device is manufactured by sealing a semiconductor chip (see Patent Document 1).
- semiconductor devices tend to be miniaturized due to the demand for high-density mounting accompanying rapid development of applications. Therefore, after the semiconductor wafer is divided into semiconductor elements by the dicing process, the semiconductor elements are individually sealed with resin, resulting in a problem that throughput is lowered and production efficiency is lowered.
- the main objective is to provide the sealing sheet sticking method and sealing sheet sticking apparatus which can stick a sealing sheet efficiently to a semiconductor substrate.
- the present inventors obtained the following knowledge as a result of intensive studies by repeating experiments and simulations in order to solve the inconvenience.
- the sealing layer absorbs moisture and expands due to condensation. At this time, wrinkles were generated in the sealing sheet due to the difference in expansion between the sealing layer and the release liner.
- This invention has the following configuration in order to achieve such an object.
- a sealing sheet affixing method for affixing a sealing sheet formed of a resin composition on a release liner to a semiconductor substrate, A moisture-proof process for adjusting the temperature and humidity in the sheet supply unit for storing and supplying the sealing sheet closed by a lid member that can be freely opened and closed at the carry-out port; A transporting process for transporting a sealing sheet maintained in an atmosphere of a predetermined humidity in the sheet supply unit; A sheet attaching process for attaching a sealing sheet to the semiconductor substrate; It is provided with.
- the sheet supply unit may be moisture-proof as follows.
- the dried gas is supplied to the sheet supply unit and exhausted from the sheet supply unit. More preferably, the heated and dried gas is supplied to the sheet supply unit, the exhausted gas is cooled and dehumidified, and the dehumidified gas is circulated to the sheet supply unit.
- the temperature difference between the inside and the outside of the sealing sheet in a laminated state can be eliminated in a short time by the sheet supply unit.
- the surface temperature of the sealing sheet can be uniformly increased and can be taken out from the surface side in a timely manner.
- the heat exchange of the surface of the sealing sheet is efficiently performed by circulation of the heated gas, and heating is sequentially performed from the outside of the laminate, generation of wrinkles is also suppressed. That is, generation
- Each of the above methods includes a detection process of detecting the humidity in the sheet supply unit with a detector, It is preferable that the sheet supply unit supplies the sealing sheet by opening the lid member according to the result of the detection process.
- the sealing sheet can be supplied to the sheet sticking process in a state where the inside of the sheet supply unit is maintained in an atmosphere of a predetermined humidity.
- the humidity difference between the sheet supply unit installed in the clean room and other processing processes can be eliminated, and the clean room can be kept clean.
- the sheet sticking process is preferably performed while the sealing sheet is attached to the semiconductor substrate while reducing the pressure in the decompression chamber.
- the present invention has the following configuration in order to achieve such an object.
- a sealing sheet attaching device for attaching a sealing sheet formed of a resin composition to a release liner on a semiconductor substrate,
- a sheet supply unit having a gas supply port, an exhaust port and a carry-out port for the sealing sheet, and storing and supplying the sealing sheet;
- a lid member that can be opened and closed at a carry-out port of the sheet supply unit;
- a gas supply unit for supplying gas in communication with the gas supply port of the sheet supply unit;
- a sheet conveying mechanism that holds and conveys the sealing sheet from the sheet supply unit;
- a holding table for holding the semiconductor substrate;
- a pasting mechanism for pasting a sealing sheet to the semiconductor substrate; It is provided with.
- the gas supply unit supplies gas to the sheet supply unit and exhaust processing is performed from the sheet supply unit, so that the humidity in the sheet supply unit can be reduced.
- a heater in the gas supply unit and supply a heated and dried gas.
- the dehumidification time in the sheet supply unit can be shortened, but also the temperature difference between the inside and the outside of the laminated sealing sheets can be eliminated in a short time. That is, by supplying the heated and dried gas, the surface temperature of the sealing sheet can be uniformly increased and can be taken out from the surface side in a timely manner. Moreover, since the heat exchange of the surface of the sealing sheet is efficiently performed by circulation of the heated gas, and heating is sequentially performed from the outside of the laminate, generation of wrinkles is also suppressed. Therefore, it is possible to suppress voids and wrinkles generated due to condensation while returning the refrigerated sealing sheet to room temperature in a short time.
- the gas supply unit may include a cooler, and may be configured to cool and dehumidify the gas exhausted from the sheet supply unit, and to reuse and circulate the dehumidified gas.
- a detector that detects at least the humidity among the temperature and humidity in the sheet supply unit;
- a control unit may be provided that operates the opening and closing of the lid member according to the detection result of the detector to control the inside of the sheet supply unit to a predetermined humidity.
- At least the humidity among the humidity and temperature in the sheet supply unit can be reliably maintained in a predetermined atmosphere.
- the decompression chamber which accommodates a sticking mechanism.
- the sealing sheet is returned to room temperature in a short time, and voids are generated at the bonding interface between the sealing sheet and the semiconductor substrate, and the sealing sheet.
- the sealing sheet can be accurately attached to the semiconductor substrate while suppressing the generation of wrinkles.
- the sealing sheet T is supplied by being cut into a sheet-shaped body having a predetermined shape from an original roll or a raw roll in which a long sealing sheet T is wound.
- the sealing sheet T is provided with a protective first release liner S1 and a second release liner S2 on both surfaces of the sealing layer M.
- the sealing layer M is formed into a sheet shape from a sealing material.
- the sealing material include thermosetting silicone resin, epoxy resin, thermosetting polyimide resin, phenol resin, urea resin, melamine resin, unsaturated polyester resin, diallyl phthalate resin, thermosetting urethane resin, and the like.
- a curable resin is mentioned.
- the above-mentioned thermosetting resin and the thermosetting resin composition which contains an additive in an appropriate ratio can also be mentioned.
- Examples of the additive include a filler and a phosphor.
- Examples of the filler include inorganic fine particles such as silica, titania, talc, alumina, aluminum nitride, and silicon nitride, and organic fine particles such as silicone particles.
- the phosphor has a wavelength conversion function, and examples thereof include a yellow phosphor capable of converting blue light into yellow light, and a red phosphor capable of converting blue light into red light. .
- Examples of the yellow phosphor include garnet phosphors such as Y 3 Al 5 O 12 : Ce (YAG (yttrium, aluminum, garnet): Ce).
- Examples of the red phosphor include nitride phosphors such as CaAlSiN 3 : Eu and CaSiN 2 : Eu.
- the sealing layer M is adjusted to a semi-solid state before sealing the semiconductor element. Specifically, when the sealing material contains a thermosetting resin, for example, complete curing (C It is adjusted before being staged, that is, in a semi-cured (B stage) state.
- a thermosetting resin for example, complete curing (C It is adjusted before being staged, that is, in a semi-cured (B stage) state.
- the dimensions of the sealing layer M are appropriately set according to the dimensions of the semiconductor element and the substrate. Specifically, when the sealing sheet is prepared as a long sheet, the length in the left-right direction of the sealing layer, that is, the width is, for example, 100 mm or more, preferably 200 mm or more, for example, 1500 mm. Hereinafter, it is preferably 700 mm or less.
- the thickness of the sealing layer is appropriately set according to the size of the semiconductor element, and is, for example, 30 ⁇ m or more, preferably 100 ⁇ m or more, and for example, 3000 ⁇ m or less, preferably 1000 ⁇ m or less.
- first release liner S1 and the second release liner S2 include polymer sheets such as polyethylene sheets, polyester sheets (such as PET), polystyrene sheets, polycarbonate sheets, and polyimide sheets, such as ceramic sheets, such as metal foil. It is done.
- the contact surface in contact with the sealing layer can be subjected to a release treatment such as a fluorine treatment.
- the dimensions of the first release liner and the second release liner are appropriately set according to the release conditions, and the thickness is, for example, 15 ⁇ m or more, preferably 25 ⁇ m or more, and for example, 125 ⁇ m or less, preferably 75 ⁇ m. It is as follows.
- FIG. 3 is a front view of the sealing sheet sticking apparatus
- FIG. 4 is a plan view of the sealing sheet sticking apparatus.
- the sealing sheet sticking device includes a sheet supply unit 1, a first transport mechanism 21, a liner peeling mechanism 22, a first holding table 23, a second transport mechanism 24, a sticking mechanism 25, and the like.
- the sheet supply unit 1 includes a mounting table 2, a storage container 3, a dry air supply source 4, and the like.
- the mounting table 2 includes a connector that holds a storage container, which will be described later, in a plane and receives power and a control signal.
- the storage container 3 stacks and stores a single-sheet sealing sheet T cut into the shape of the semiconductor substrate W, for example, as shown in FIGS.
- the storage container 3 includes a lid member 5 that opens and closes a carry-out port for carrying out the sealing sheet T.
- the supply port 6 which takes in a gas from the one side wall which opposes is formed.
- An exhaust port 7 is formed below the other side wall.
- a humidity sensor 15 and a temperature sensor 16 are provided. Detection signals from both sensors 15 and 16 are sent to the control unit 100.
- the dry air supply source 4 includes a heater 8, a cooler 9, and a drain. That is, the dry air supply source 4 sucks the air in the clean room where the apparatus is installed. The heater 8 heats the sucked gas. Further, the dry air supply source 4 supplies the dry and heated air to the storage container 3 through the supply pipe 11 communicated with the supply port 6 of the storage container 3.
- the dry air supply source 4 sucks the gas exhausted from the storage container 3 through the exhaust pipe 12 communicated with the exhaust port 7 of the storage container 3.
- the cooler 9 cools and dehumidifies the exhausted gas, and discharges only water from the drain 10.
- the dehumidified gas is returned to the heater 8 to be heated and circulated again through the same path.
- the supply pipe 11 and the exhaust pipe 12 are provided with electromagnetic valves 13 and 14. These solenoid valves 13 and 14 can adjust the supply amount of dry air and operate to stop the supply based on a control signal from the control unit 100.
- the first transport mechanism 21 is provided with a suction plate 26 at the lower end of a suction unit that can move horizontally and move up and down and back and forth. That is, a first movable base 28 that moves on the guide rail R1 along the frame 27 extending in the lateral direction of the apparatus main body is provided. A guide rail R2 that is horizontally held toward the front and rear of the apparatus main body is attached to the lower portion of the first movable base 28. A suction plate 26 is provided that can move up and down along a vertical frame that is suspended and supported by a second movable base 30 that can move back and forth along the guide rail R2.
- the first transport mechanism 21 corresponds to the sheet transport mechanism of the present invention.
- the liner peeling mechanism 22 includes a peeling tape supply unit 31, a peeling unit 32, a tape collection unit 33, and a camera 34.
- the peeling tape supply unit 31 supplies a long peeling tape TS narrower than the sealing sheet T toward the peeling unit 32.
- the peeling unit 32 includes a peeling roller 35 around which the peeling tape TS is wound.
- the peeling roller 35 can be lifted and lowered to a position higher than the storage container 3. That is, in the process in which the sealing sheet T is sucked and held by the first transport mechanism 21 and is transported, the release roller 35 presses and attaches the release tape TS to the release liner S2 on the back surface of the sealing sheet T.
- the tape recovery unit 33 collects the release tape TS together with the release liner S2 peeled from the sealing sheet T by winding the release tape TS in a state of being attached to the release liner S2 on the back side of the sealing sheet T by the release roller 35.
- the release tape TS is wound around the bobbin and collected.
- the camera 34 images the sealing sheet T from which the second peeling liner S2 has been peeled off from the back surface, and transmits the image data to the control unit 100.
- the first holding table 23 is a chuck table that is larger than the semiconductor substrate W.
- the first holding table 23 is configured to rotate around the vertical axis to align the semiconductor substrate W. Further, the first holding table 23 is configured to reciprocate along the guide rail 38 over the mounting position of the semiconductor substrate W and the alignment position on the back side of the apparatus.
- Two cameras 39 are provided above the alignment position, take an image of the semiconductor substrate W, and transmit both image data to the control unit 100.
- the second transport mechanism 24 includes a movable base 42 that moves the apparatus on a guide rail R3 that reaches the pasting mechanism 25 side along a frame 41 that extends in the lateral direction of the apparatus main body.
- a suction plate 44 is provided at the lower end of the suction unit that can be moved up and down along a vertical frame 43 suspended and supported by the movable table 42.
- the suction plate 44 is larger than the shape of the semiconductor substrate W. That is, the substrate transport mechanism 24 is configured to reciprocate from the first holding table 23 to a second holding table 45 described later.
- the pasting mechanism 25 includes a second holding table 45, a decompression chamber 46, and the like.
- the second holding table 45 is housed in the lower housing 46B among the upper and lower upper housings 46A and 46B constituting the decompression chamber 46.
- the lower housing 46B is configured to reciprocate between the receiving position of the semiconductor substrate W on the front side of the apparatus main body and below the upper housing 46A along the guide rail 48.
- the upper and lower housings 46A constituting the decompression chamber 46 are provided in the lift drive mechanism 50.
- the elevating drive mechanism 50 includes a movable base 53 that can be moved up and down along a rail 52 that is vertically arranged on the back of a vertical wall 51, a movable frame 54 that is supported on the movable base 53 so that the height can be adjusted, and the movable frame 53.
- An arm 55 extending forward from the frame 54 is provided.
- An upper housing 46A is mounted on a support shaft 56 that extends downward from the tip of the arm 55.
- the movable base 53 is adapted to be screwed up and down by rotating the screw shaft 57 forward and backward by a motor 58.
- a push plate 59 that can be raised and lowered is housed inside the upper housing 46A.
- a heater 60 is embedded in the pressing plate 59.
- the storage container 3 storing the sealing sheet T managed by the external refrigerator is mounted on the mounting table 2 and is electrically connected to the mounting table 2 with a connector. Further, a supply pipe 11 is connected to the supply port 6 of the storage container 3 and an exhaust pipe 12 is connected to the exhaust port 7.
- Supplied dry air supply source 4 starts supplying a predetermined warmed and dried air.
- the control unit 100 monitors the temperature and humidity in the storage container 3.
- the control unit 100 opens the lid member 5 and sucks and conveys the sealing sheet T by the first transport mechanism 21, as shown in FIG. In addition, after carrying out the sealing sheet T, it adjusts so that the temperature and humidity of the storage container 3 may be kept constant, closing the cover member 5 and supplying dry air inside continuously.
- the sealing sheet T sucked and held by the first transport mechanism 21 is transported above the camera 34.
- the peeling roller 35 rises to a position in front of the transport direction that is out of the storage container 3 in the process of horizontal transport.
- the release tape TS wound around the release roller 35 is pressed against the second release liner S2 on the back surface side of the sealing sheet T as shown in FIG.
- the second release liner S2 is peeled from the sealing sheet T while winding the release tape TS at a speed synchronized with the transport speed of the first transport mechanism 21.
- the peeled second peeling liner S2 is wound and collected by the collecting bobbin 19 together with the peeling tape TS.
- the sealing sheet T When the sealing sheet T reaches above the camera 34, the sealing sheet T is imaged. The acquired image data is transmitted to the control unit 100.
- the first transport mechanism 21 moves onto the first holding table 23 while holding the sealing sheet T by suction.
- the semiconductor substrate W is placed on the first holding table 23 substantially simultaneously with the sealing sheet T being carried out of the storage container 3.
- the first holding table 23 holding the semiconductor substrate W by suction moves to the alignment position, and the surface of the first holding table 23 is imaged by the camera 39.
- the captured image data is transmitted to the control unit 100.
- the first holding stage 23 returns to the placement position.
- the alignment of the semiconductor substrate W is performed so that the contour of the sealing sheet T obtained by the image analysis processing of the control unit 100 matches the contour of the semiconductor substrate W.
- Alignment is performed by rotating the first holding table 23 around the vertical axis.
- the sealing sheet T transported by the first transport mechanism 21 is disposed to face the semiconductor substrate W as shown in FIG. Thereafter, as shown in FIG. 11, the suction plate 26 is lowered to a predetermined height. At this time, the sealing sheet T is moderately pressed and temporarily bonded to the semiconductor substrate W. When the temporary pressure bonding of the sealing sheet T is completed, the first transport mechanism 21 returns to the standby position on the mounting table 2 side.
- the semiconductor substrate W on which the sealing sheet T has been temporarily press-bonded is sucked and held by the second transport mechanism 24 and transported to the second holding table 45.
- the second transport mechanism 24 rises and returns to the first holding table 23 side.
- the second holding table 45 moves to below the upper housing 46A while holding the semiconductor substrate W by suction.
- the lower end of the upper housing 46A is lowered to a position where it comes into contact with the lower housing 46B. That is, the decompression chamber 46 is formed. Thereafter, the inside of the decompression chamber 46 is decompressed. Further, as shown in FIG. 13, the pressing plate 59 is lowered, the sealing sheet T is pressed and heated, and finally press-bonded to the semiconductor substrate W. At this point, the sealing layer M is not completely cured.
- the decompression chamber 46 is returned to the atmospheric pressure, and the upper housing 46A is opened.
- the lower housing 46B returns to the substrate transfer position together with the second holding table 45.
- the first release liner S1 is peeled off from the semiconductor substrate W to which the sealing sheet T is press-bonded. Thus, a series of operations for attaching the sealing sheet T to the semiconductor substrate W is completed.
- the sealing sheet T that is refrigerated is stored in the storage container 3 and immediately set in the sealing sheet sticking apparatus, the heated and dried dry air is stored in the storage container 3.
- the sealing sheet T is returned to room temperature in the clean room in a short time by being supplied and exhausted. Therefore, there is no temperature difference between the temperature of the sealing sheet T itself and the atmospheric temperature, and the sealing sheet T can be prevented from condensing. Further, since the temperature difference between the inside and the outside of the laminated sealing sheet T is removed from the sheet supply unit 1 in a short time, wrinkles are generated due to the temperature difference between the inside and the outside of the sealing sheet T. Can be prevented. As a result, the generation of voids at the bonding interface between the sealing layer M of the sealing sheet T attached to the semiconductor substrate W and the semiconductor substrate W can be suppressed.
- the present invention can also be implemented in the following forms.
- the sealing sheet T in place of the single-sheet sealing sheet T, as shown in FIG. 1, in the process of paying out and supplying a long sealing sheet T wound in a roll shape, You may comprise so that the sealing sheet T half-cut in the shape may be supplied.
- the half-cut encapsulating sheet T does not completely match the notch and the orientation flat shape formed on the semiconductor substrate, but includes a circular sheet covering the notch and the like.
- the sheet supply unit 1 includes a roll loading unit 70, a cutting mechanism 71, a peeling plate 72, a sheet collection unit 73, and the like.
- the roll loading unit 70 guides the sealing sheet T with the first and second release liners S ⁇ b> 1 and S ⁇ b> 2 on both surfaces fed out from the supply bobbin 74 by the feed roller 75 and the guide roller 76 and guides it to the cutting mechanism 71.
- the cutting mechanism 71 has a cutting roller 77 and a receiving roller 78 that are synchronously driven so as to face each other. As shown in FIG. 17, the cutting roller 77 is configured by mounting a sheet 80 on which a cutting blade 79 is formed on a driving roller 81. The cutting blade 79 cuts the first peeling liner S1 and the sealing layer M while leaving the second peeling liner S2.
- the receiving roller 78 is a metal driving roller. Note that at least one of the cutting roller 77 and the receiving roller 78 is configured to be moved up and down by a drive cylinder. Therefore, the setting of the gap between the rollers 77 and 78 can be changed according to the thickness of the adhesive tape T.
- the peeling plate 72 is fixedly arranged horizontally on the apparatus frame, and has a flat surface that can hold the entire back surface of the half-cut sealing sheet T horizontally.
- the release plate 72 has a tapered shape. That is, the peeling plate 72 folds back the second peeling liner S ⁇ b> 2 and guides it to the sheet collecting unit 73.
- the sheet collection unit 73 is configured to wind up the sealing sheet T cut out in the shape of the semiconductor substrate W around the collection bobbin.
- the roll loading unit 70, the cutting mechanism 71, the peeling plate 72, and the sheet collecting unit 73 are housed in a processing chamber 85 that is separate from the apparatus main body.
- the processing chamber 85 includes a lid member 86 that is opened and closed by the control unit 100 above the peeling plate 72. Further, the processing chamber 85 circulates the dry air supplied from the dry air supply source 4 as in the above embodiment, and the internal temperature and humidity are detected by the humidity and temperature sensors 15 and 16, and according to the detection result. Temperature and humidity control.
- the operation from the sheet supply unit 1 to the transport of the sealing sheet T to the first holding table 23 is performed as described above. Different from the example.
- the sealing sheet T half-cut by the cutting mechanism 71 is carried out from the sheet supply unit 1 in a state where the second release liner S2 on the back surface is peeled off. Therefore, the carried-out sealing sheet T is conveyed directly below the camera 34, and the sealing sheet T is imaged.
- the subsequent processing is the same as in the above embodiment.
- the cutting mechanism 71 may have the following configuration.
- the sealing sheet T is half-cut with a Thomson blade formed in the shape of the semiconductor substrate W.
- the sealing sheet may be half-cut into the shape of the semiconductor substrate W by turning a round blade or a tapered cutter.
- the dry air is circulated and supplied to the storage container 3, but the dry air is supplied from the dry air supply source 4, and the exhausted gas is discharged out of the apparatus or out of the clean room. It may be configured.
- only the humidity may be controlled based on the detection result of the humidity sensor 15.
- a heater may be embedded in the mounting table 2 to heat the sealing sheet T in the storage container 3 to promote dehumidification.
- the shape of the semiconductor substrate W is not limited to a circle. Therefore, the semiconductor substrate W may be a quadrangle such as a square or a rectangle.
- the storage container 3 may be fixedly arranged in the apparatus. In this case, the operator loads the sealing sheet T into the storage container 3.
- the position of the supply port 6 formed in the storage container 3 and the storage chamber 6 is not limited to the illustrated position. Therefore, the supply port 6 and the exhaust port 7 are appropriately formed at a position where the dehumidification efficiency is good.
- the sealing sheet T is not limited to the shape of the semiconductor substrate W.
- the distribution region of the plurality of semiconductor elements C formed on the semiconductor substrate W is half-cut into small pieces in accordance with the dividing line that surrounds the plurality of semiconductor elements C and has an area smaller than the area of the distribution region. It may be a plurality of sealing sheet pieces CT.
- the distribution region is a region including a plurality of semiconductor elements scheduled to be separated into semiconductor substrates and including a planned cutting line at the outermost periphery.
- a sealing sheet piece says the form of the state by which the peeling liner was attached to the sealing layer.
- the semiconductor element C is sealed in units of small distribution areas divided on the semiconductor substrate W. Therefore, warpage of the semiconductor substrate W due to thermal expansion or contraction during the curing process of the sealing layer M can be suppressed. That is, when a single sealing sheet in the shape of a semiconductor substrate is attached to the semiconductor substrate W, shrinkage stress concentrates toward the center of the semiconductor substrate W, so that the semiconductor substrate W is likely to warp. However, when divided into a plurality of sealing sheet pieces CT and attached to the semiconductor substrate W, the sealing layer M of the sealing sheet pieces CT contracts individually, so that the contraction stress is dispersed. Therefore, warpage and breakage of the semiconductor substrate W can be suppressed.
- the sealing sheet piece CT has a smaller area than the semiconductor substrate shape, the semiconductor substrate W can be easily attached. In other words, it is easy to avoid entrainment of bubbles at the bonding interface between the sealing layer M and the semiconductor substrate W.
- a heater may be embedded in the suction plate 26 of the first transport mechanism 21, and the sealing sheet T to be sucked and transported may be transported while being kept at a predetermined temperature higher than room temperature.
- the present invention is suitable for attaching a sealing sheet to a semiconductor substrate with high accuracy.
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Abstract
Description
搬出口で開閉自在な蓋部材によって閉じられた前記封止シートを収納および供給するシート供給部内の温度および湿度を調整する防湿過程と、
前記シート供給部で所定湿度の雰囲気に保たれた封止シートを搬送する搬送過程と、
前記半導体基板に封止シートを貼り付けるシート貼付け過程と、
を備えたことを特徴とする。 That is, a sealing sheet affixing method for affixing a sealing sheet formed of a resin composition on a release liner to a semiconductor substrate,
A moisture-proof process for adjusting the temperature and humidity in the sheet supply unit for storing and supplying the sealing sheet closed by a lid member that can be freely opened and closed at the carry-out port;
A transporting process for transporting a sealing sheet maintained in an atmosphere of a predetermined humidity in the sheet supply unit;
A sheet attaching process for attaching a sealing sheet to the semiconductor substrate;
It is provided with.
シート供給部は、検出過程の結果に応じて蓋部材を開いて封止シートを供給することが好ましい。 Each of the above methods includes a detection process of detecting the humidity in the sheet supply unit with a detector,
It is preferable that the sheet supply unit supplies the sealing sheet by opening the lid member according to the result of the detection process.
気体供給口、排気口および前記封止シートの搬出口を有し、封止シートを収納および供給するシート供給部と、
前記シート供給部の搬出口で開閉自在な蓋部材と、
前記シート供給部の気体供給口に連通して気体を供給する気体供給ユニットと、
前記シート供給部から封止シートを保持して搬送するシート搬送機構と、
前記半導体基板を保持する保持テーブルと、
前記半導体基板に封止シートを貼り付ける貼付け機構と、
を備えたことを特徴とする。 That is, a sealing sheet attaching device for attaching a sealing sheet formed of a resin composition to a release liner on a semiconductor substrate,
A sheet supply unit having a gas supply port, an exhaust port and a carry-out port for the sealing sheet, and storing and supplying the sealing sheet;
A lid member that can be opened and closed at a carry-out port of the sheet supply unit;
A gas supply unit for supplying gas in communication with the gas supply port of the sheet supply unit;
A sheet conveying mechanism that holds and conveys the sealing sheet from the sheet supply unit;
A holding table for holding the semiconductor substrate;
A pasting mechanism for pasting a sealing sheet to the semiconductor substrate;
It is provided with.
前記検出器の検出結果に応じて蓋部材の開閉を操作し、シート供給部内を所定の湿度に制御する制御部を備えてもよい。 Further, in the above configuration, a detector that detects at least the humidity among the temperature and humidity in the sheet supply unit;
A control unit may be provided that operates the opening and closing of the lid member according to the detection result of the detector to control the inside of the sheet supply unit to a predetermined humidity.
2 … 載置台
3 … 収納容器
4 … ドライエア供給源
5 … 蓋部材
8 … 加熱機
9 … 冷却機
10 … ドレイン
11 … 供給管
12 … 排気管
15 … 湿度センサ
16 … 温度センサ
21 … 第1搬送機構
22 … 剥離機構
23 … 第1保持テーブル
24 … 第2搬送機構
25 … 貼付け機構
100 … 制御部
T … 封止シート
C … 半導体素子
M … 封止層
S1,S2…第1および第2剥離ライナ
W … 半導体基板 DESCRIPTION OF
封止シートTは、例えば、図1および図2に示すように、長尺の封止シートTを巻き回した原反ロールまたは当該原反ロールから所定形状の枚様体に切断して供給される。また、当該封止シートTは、封止層Mの両面に保護用の第1剥離ライナS1および第2剥離ライナS2が添設されている。 <Sealing sheet>
For example, as shown in FIGS. 1 and 2, the sealing sheet T is supplied by being cut into a sheet-shaped body having a predetermined shape from an original roll or a raw roll in which a long sealing sheet T is wound. The Further, the sealing sheet T is provided with a protective first release liner S1 and a second release liner S2 on both surfaces of the sealing layer M.
次に、上記封止シート貼付け装置によって半導体基板に封止シートを貼り付ける一連の動作について詳述する。 <Sealing sheet pasting process>
Next, a series of operations for attaching the sealing sheet to the semiconductor substrate by the sealing sheet attaching device will be described in detail.
Claims (10)
- 剥離ライナに樹脂組成物からなる封止層の形成された封止シートを半導体基板に貼り付ける封止シート貼付け方法であって、
搬出口で開閉自在な蓋部材によって閉じられた前記封止シートを収納および供給するシート供給部内の温度および湿度を調整する防湿過程と、
前記シート供給部で所定湿度の雰囲気に保たれた封止シートを搬送する搬送過程と、
前記半導体基板に封止シートを貼り付けるシート貼付け過程と、
を備えたことを特徴とする封止シート貼付け方法。 A sealing sheet affixing method for affixing a sealing sheet formed of a resin composition to a release liner on a semiconductor substrate,
A moisture-proof process for adjusting the temperature and humidity in the sheet supply unit for storing and supplying the sealing sheet closed by a lid member that can be freely opened and closed at the carry-out port;
A transporting process for transporting a sealing sheet maintained in an atmosphere of a predetermined humidity in the sheet supply unit;
A sheet attaching process for attaching a sealing sheet to the semiconductor substrate;
The sealing sheet sticking method characterized by having provided. - 請求項1に記載の封止シート貼付け方法において、
前記防湿過程は、乾燥された気体をシート供給部に供給するとともに、当該シート供給部から排気を行う
ことを特徴とする封止シート貼付け方法。 In the sealing sheet sticking method of Claim 1,
The said moisture-proof process supplies exhausted gas to a sheet supply part, and exhausts from the said sheet supply part. Sealing sheet sticking method characterized by the above-mentioned. - 請求項2に記載の封止シート貼付け方法において、
前記防止過程は、加温および乾燥された気体をシート供給部に供給するとともに、排気される気体を冷却して除湿し、除湿後の当該気体をシート供給部に循環させる
ことを特徴とする封止シート貼付け方法。 In the sealing sheet sticking method of Claim 2,
In the sealing process, the heated and dried gas is supplied to the sheet supply unit, the exhausted gas is cooled and dehumidified, and the dehumidified gas is circulated to the sheet supply unit. Stop sheet pasting method. - 請求項1に記載の封止シート貼付け方法において、
前記シート供給部内の湿度を検出器で検出する検出過程を備え、
前記シート供給部は、前記検出過程の結果に応じて蓋部材を開いて封止シートを供給する
ことを特徴とする封止シート貼付け方法。 In the sealing sheet sticking method of Claim 1,
A detection process for detecting the humidity in the sheet supply unit with a detector;
The said sheet supply part opens a cover member according to the result of the said detection process, and supplies a sealing sheet. The sealing sheet sticking method characterized by the above-mentioned. - 請求項1に記載の封止シート貼付け方法において、
前記シート貼付け過程は、半導体基板への封止シートの貼り付けを減圧室で減圧しながら行う
ことを特徴とする封止シート貼付け方法。 In the sealing sheet sticking method of Claim 1,
The said sheet | seat sticking process performs sticking of the sealing sheet to a semiconductor substrate, reducing pressure in a decompression chamber. The sealing sheet sticking method characterized by the above-mentioned. - 剥離ライナに樹脂組成物からなる封止層の形成された封止シートを半導体基板に貼り付ける封止シート貼付け装置であって、
気体供給口、排気口および前記封止シートの搬出口を有し、封止シートを収納および供給するシート供給部と、
前記シート供給部の搬出口で開閉自在な蓋部材と、
前記シート供給部の気体供給口に連通して気体を供給する気体供給ユニットと、
前記シート供給部から封止シートを保持して搬送するシート搬送機構と、
前記半導体基板を保持する保持テーブルと、
前記半導体基板に封止シートを貼り付ける貼付け機構と、
を備えたことを特徴とする封止シート貼付け装置。 A sealing sheet affixing device for affixing a sealing sheet formed of a resin composition on a release liner to a semiconductor substrate,
A sheet supply unit having a gas supply port, an exhaust port and a carry-out port for the sealing sheet, and storing and supplying the sealing sheet;
A lid member that can be opened and closed at a carry-out port of the sheet supply unit;
A gas supply unit for supplying gas in communication with the gas supply port of the sheet supply unit;
A sheet conveying mechanism that holds and conveys the sealing sheet from the sheet supply unit;
A holding table for holding the semiconductor substrate;
A pasting mechanism for pasting a sealing sheet to the semiconductor substrate;
The sealing sheet sticking apparatus characterized by having provided. - 請求項6に記載の封止シート貼付け装置において、
前記気体供給ユニットは、加熱機を備え、加温および乾燥された気体を供給する
ことを特徴とする封止シート貼付け装置。 In the sealing sheet sticking device according to claim 6,
The gas supply unit includes a heater, and supplies a heated and dried gas. - 請求項7に記載の封止シート貼付け装置において、
前記気体供給ユニットは、冷却機を備え、シート供給部から排気された気体を冷却して除湿し、除湿後の気体を再利用して循環させるよう構成した
ことを特徴とする封止シート貼付け装置。 In the sealing sheet sticking device according to claim 7,
The gas supply unit includes a cooler, and is configured to cool and dehumidify the gas exhausted from the sheet supply unit, and to reuse and circulate the gas after dehumidification. . - 請求項6に記載の封止シート貼付け装置において、
前記シート供給部内の温度および湿度のうち少なくとも湿度を検出する検出器と、
前記検出器の検出結果に応じて蓋部材の開閉を操作し、シート供給部内を所定の湿度に制御する制御部を備えた
ことを特徴とする封止シート貼付け装置。 In the sealing sheet sticking device according to claim 6,
A detector for detecting at least the humidity among the temperature and humidity in the sheet supply unit;
An encapsulating sheet pasting apparatus comprising: a control unit that operates opening and closing of the lid member according to a detection result of the detector and controls the inside of the sheet supply unit to a predetermined humidity. - 請求項6に記載の封止シート貼付け装置において、
前記貼付け機構を収納する減圧室を備えた
ことを特徴とする封止シート貼付け装置。 In the sealing sheet sticking device according to claim 6,
A sealing sheet sticking device comprising a decompression chamber for storing the sticking mechanism.
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CN201480019189.7A CN105074890A (en) | 2013-04-08 | 2014-03-17 | Sealing-sheet application method and stealing-sheet application device |
SG11201508198XA SG11201508198XA (en) | 2013-04-08 | 2014-03-17 | Method and apparatus for joining sealing sheet |
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JP2006245242A (en) * | 2005-03-02 | 2006-09-14 | Nitto Denko Corp | Method for manufacturing semiconductor device |
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- 2014-03-17 WO PCT/JP2014/057178 patent/WO2014167949A1/en active Application Filing
- 2014-03-17 SG SG11201508198XA patent/SG11201508198XA/en unknown
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JPS61120431A (en) * | 1984-11-15 | 1986-06-07 | Matsushita Electric Works Ltd | Manufacture of package of semiconductor or the like |
JPH05291319A (en) * | 1992-04-07 | 1993-11-05 | Toshiba Corp | Resin sealing-type semiconductor device |
JPH11254642A (en) * | 1998-03-16 | 1999-09-21 | Dainippon Printing Co Ltd | Dryer |
JP2002324814A (en) * | 2001-04-25 | 2002-11-08 | Nec Corp | Method and apparatus for resin molding of cof semiconductor package |
JP2006245242A (en) * | 2005-03-02 | 2006-09-14 | Nitto Denko Corp | Method for manufacturing semiconductor device |
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KR20150143537A (en) | 2015-12-23 |
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