WO2014124857A2 - Power supply arrangement for supplying industrial processes with power - Google Patents

Power supply arrangement for supplying industrial processes with power Download PDF

Info

Publication number
WO2014124857A2
WO2014124857A2 PCT/EP2014/052282 EP2014052282W WO2014124857A2 WO 2014124857 A2 WO2014124857 A2 WO 2014124857A2 EP 2014052282 W EP2014052282 W EP 2014052282W WO 2014124857 A2 WO2014124857 A2 WO 2014124857A2
Authority
WO
WIPO (PCT)
Prior art keywords
converter
current
direct
power supply
output
Prior art date
Application number
PCT/EP2014/052282
Other languages
French (fr)
Other versions
WO2014124857A3 (en
Inventor
Pawel OSIMEK
Andrzej Klimczak
Krzysztof Ruda
Original Assignee
Trumpf Huettinger Sp. Z O.O.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Trumpf Huettinger Sp. Z O.O. filed Critical Trumpf Huettinger Sp. Z O.O.
Publication of WO2014124857A2 publication Critical patent/WO2014124857A2/en
Publication of WO2014124857A3 publication Critical patent/WO2014124857A3/en

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M7/00—Conversion of ac power input into dc power output; Conversion of dc power input into ac power output
    • H02M7/42—Conversion of dc power input into ac power output without possibility of reversal
    • H02M7/44—Conversion of dc power input into ac power output without possibility of reversal by static converters
    • H02M7/48—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32018—Glow discharge
    • H01J37/32045—Circuits specially adapted for controlling the glow discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32917—Plasma diagnostics
    • H01J37/32935—Monitoring and controlling tubes by information coming from the object and/or discharge
    • H01J37/32944—Arc detection
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M1/00—Details of apparatus for conversion
    • H02M1/12—Arrangements for reducing harmonics from ac input or output
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M1/00—Details of apparatus for conversion
    • H02M1/32—Means for protecting converters other than automatic disconnection
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M1/00—Details of apparatus for conversion
    • H02M1/0067—Converter structures employing plural converter units, other than for parallel operation of the units on a single load
    • H02M1/007—Plural converter units in cascade
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M3/00—Conversion of dc power input into dc power output
    • H02M3/02—Conversion of dc power input into dc power output without intermediate conversion into ac
    • H02M3/04—Conversion of dc power input into dc power output without intermediate conversion into ac by static converters
    • H02M3/10—Conversion of dc power input into dc power output without intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode
    • H02M3/145—Conversion of dc power input into dc power output without intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal
    • H02M3/155—Conversion of dc power input into dc power output without intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only
    • H02M3/156—Conversion of dc power input into dc power output without intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only with automatic control of output voltage or current, e.g. switching regulators
    • H02M3/158—Conversion of dc power input into dc power output without intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only with automatic control of output voltage or current, e.g. switching regulators including plural semiconductor devices as final control devices for a single load
    • H02M3/1584—Conversion of dc power input into dc power output without intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only with automatic control of output voltage or current, e.g. switching regulators including plural semiconductor devices as final control devices for a single load with a plurality of power processing stages connected in parallel

Definitions

  • Power supply arrangement for supplying industrial processes with power
  • the invention relates to a power supply arrangement for supplying industrial processes with power, comprising:
  • a converter which is connected to an output of the direct- current-converter and which is configured to produce an alternating-current voltage or a pulsed direct-current voltage and to output it at the output thereof.
  • the scope of the invention further includes the use of a power supply arrangement according to the invention for producing and operating a plasma.
  • a plasma discharge is operated with a very rapidly changing current, this may lead to voltage peaks across semiconductor switches which are used for the power supply of the plasma.
  • Very rapidly changing currents may be an alternating current or a pulsed direct current, the pulsed direct current being able to fall to values in the range of 0 A (zero amps) or below.
  • the voltage peaks occur when the power supply has current source character, preferably with an inductive output and/or the plasma itself has an inductive character when it is supplied with a rapidly changing current. Additional line inductances accumulate to form the plasma inductance, whereby the resultant load inductance is increased. Therefore, the semi-conductor switches are arranged between two inductive switching components. Switching operations under these conditions generate voltage peaks which endanger the semiconductor switches .
  • An object of the present invention is therefore to provide a circuit topology by means of which voltage peaks across switching elements can be effectively prevented.
  • This object is achieved according to the invention by a power supply arrangement for supplying industrial processes with power, comprising:
  • a converter which is connected to an output of the direct- current-converter and which is configured to produce an alternating-current voltage or a pulsed direct-current voltage and to output it at the output thereof
  • an energy store being connected to a node point between two non- linear elements, which are connected in series.
  • the voltage peaks are returned directly, that is to say, immediately, to the input of the direct-current-converter . Consequently, the voltage peaks are kept away from the switching elements and the switching elements are protected. In this manner, an almost loss-free return of energy can be achieved. Furthermore, overvoltage protection is achieved. This can be used in a particularly advantageous manner with high switching
  • the power supply arrangement according to the invention requires very few devices, ideally only one nonlinear component. The likelihood of malfunction of the power supply arrangement is thereby reduced. Furthermore, the discharge of high voltage in order to protect the semiconductor switches can be carried out extremely rapidly. Industrial processes may include, for example, plasma
  • An energy store is connected to a node point between two nonlinear elements which are connected in series.
  • the energy store may be connected between the node point and an input connection of the converter.
  • the energy store may be a capacitor.
  • the energy store and the non- linear element between the node point and the input connection of the converter may be arranged
  • the voltage at the input of the converter can be limited by the energy store.
  • Such a circuit arrangement may advantageously be used when the connection lines from the converter to the input of the direct-current-converter would still be too slow to discharge very short voltage pulses in order to protect the switching elements of the converter.
  • the voltage peaks may charge the energy store which is arranged very close to the converter. The voltage peaks can thus be limited with substantially increased speed. Subsequently, the energy stored in the energy store can be discharged via the non-linear elements to the direct-current-converter. This can be carried out more slowly without the risk of any damage.
  • the arrangement between the node point and input of the direct- current converter may have a larger parasitic component and line inductance than the arrangement between the node point and converter.
  • the lines of the arrangement between the node point and input of the direct-current-converter may be constructed so as to be longer than the lines of the
  • the output of the direct-current-converter may be connected to the input of the direct-current-converter without a coil or a transformer being interposed.
  • the output of the direct-current-converter may be connected to the input of the direct-current-converter without an inductive element being interposed.
  • any line portion even of a very short length may have an inductance.
  • unavoidable inductances are not intended in this instance. Instead, such line portions are intended to be constructed so as to be as short and planar as possible, that is to say, with the smallest possible inductance.
  • the connection to the non-linear elements is in particular intended to have no choke coil which is connected in series and which has an inductance of more than 1 ⁇ , as are conventionally assembled in direct-current-converters .
  • the inductance of all the power portions taken together is preferably less than 500 nH, in particular less than 100 nH.
  • At least one non-linear element may be a diode.
  • nonlinear element particularly simple and cost-effective embodiment of a nonlinear element is thereby achieved.
  • at least one non- linear element may be a switch.
  • Other embodiments of non-linear elements are, however, also conceivable.
  • the series connection of a plurality of non- linear elements may have two non-linear elements, in particular two diodes which are connected in series .
  • the two non-linear elements may be connected in series in such a manner that they enable current flow in one direction and prevent it in the other direction. If a switching element is used for one or both of the two non-linear elements, for example, a transistor, voltage peaks can be even better suppressed.
  • the converter may be embodied as a half bridge or full bridge circuit of switching elements. Using such a converter, an alternating-current voltage can be produced at the output in a particularly simple manner. Such a converter can be
  • the direct-current-converter may be constructed as a step-up converter or a step-down converter. Using such circuit components, an intermediate circuit voltage can be produced in a particularly simple and reliable manner.
  • the direct-current-converter may have an inductance which is connected in series between the input and the output thereof .
  • Such an inductance may be configured in such a manner that it brings about an additional filtering effect for very short voltage peaks (less than 10 ⁇ ) . In this manner, the voltage peaks which are applied at the input of the direct-current- converter can be damped and are coupled to the output of the direct-current-converter only to a small extent.
  • one or more inductances may be connected in series between the direct-current-converter and the converter. These inductances may be configured so that the power supply has current source character.
  • a switch may be arranged in series with respect to the inductance of the direct-current-converter . From the above, it can be seen that the input and the output of the direct- current-converter can be connected in a completely internal manner by means of a non-linear element (switch) and
  • the inductance In the external connection to the non- linear element, however, the inductance is intended to be kept as small as possible.
  • the scope of the invention further includes the use of a power supply arrangement according to the invention for igniting and operating a plasma process.
  • arcs often occur and can also have effects on the switching elements of the converter connected upstream of the plasma.
  • the voltage peaks produced by arcs can also be discharged in the power supply arrangement according to the invention to the direct-current-converter in order thereby to protect the switching elements .
  • Figure 1 shows a first embodiment of a power supply
  • Figure 2 shows a second embodiment of a power supply- arrangement according to the invention.
  • Figure 1 shows a power supply arrangement 10 having a direct current source 11 which is connected to an input 12 of a direct-current-converter 13 which is constructed in this instance as a parallel arrangement of two step-down
  • the direct-current-converter 13 has, parallel with the input 12 thereof, a capacitor C .
  • a capacitor may alternatively or additionally also be connected to the input connections of the direct-current-converter 13 outside the direct-current-converter 13.
  • the switches 14, 15 have diodes 16, 17 and inductances 19, 20 which are
  • the input 22 of a converter 23 is connected to the output 18 of the direct- current-converter 13.
  • the converter 23 has a full bridge which has four switching elements 24, 25, 26, 27.
  • the switching elements 24 - 27 are also controlled by the control circuit 21.
  • a plasma chamber 33 having electrodes 34, 35 is connected to the output 28 of the converter 23 via lines 29, 30 which have line inductances 31, 32.
  • converter 23 provides an alternating current at the output thereof .
  • a non-linear element 40 which is constructed as a diode and by means of which the output 18 of the direct-current-converter 13 is directly connected to the input 12 of the direct-current-converter 13 (externally) .
  • the line 41 is constructed to be as short as possible and as wide as possible. The energy contained in the voltage peaks is consequently returned particularly quickly to the direct-current-converter 13.
  • the output connection 42 is connected to the input connection 43 by means of the non-linear element 40. It can be seen that no discrete inductance is provided between the output connection 42 and the input connection 43. Inside the direct-current-converter 13, however, the input connection 43 is connected to the output connection 42 by means of the parallel connection of the series connection comprising the switching element 14 and the inductance 19 and the series connection comprising the switching element 15 and the inductive element 20. If, instead of the non-linear element 40 which is constructed in the embodiment in Figure 1 as a diode, a switching element is used, for example, a transistor, this transistor may also be connected to the control circuit 21. The control circuit 21 can then also control the switching element.
  • FIG 2 shows an alternative embodiment of a power supply arrangement 100 according to the invention.
  • the power supply arrangement 100 differs from the power supply arrangement 10 of Figure 1 only owing to the switching member 101.
  • the switching member 101 has a series connection comprising two non- linear elements 102, 103 which are constructed as diodes. The anode of the first diode 103 is connected
  • An energy store C 2 which is constructed as a capacitor is connected to the node point 104, that is to say, the connection point of the series connection of the nonlinear elements 102, 103.
  • the energy store C 2 is connected between the node point 104 and the input
  • connection 105 of the input 22 of the converter 23 If a switching element is used for one or both of the two nonlinear elements 102, 103, for example, a transistor, these transistors may also be connected to the control circuit 21. The control circuit 21 may then also control the switching elements .
  • the energy store C 2 When an arc occurs in the plasma chamber 33, or a voltage peak occurs across one of the switching elements 24 - 27, the energy store C 2 is charged. The energy which is stored in the energy store C 2 can subsequently be discharged into the direct -current converter 13 via the non-linear elements 102, 103. In particular, the excess energy is absorbed by the diodes 16, 17 and the inductances 19, 20. In this instance, it should be mentioned that the voltage across the capacitor Ci is always greater than the total of the voltages across the energy store C 2 and the non- linear element 103. The capacitor C cannot be overloaded by the return of the energy since the total energy which is returned is guided through the direct -current converter 18 to the converter 23.

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Dc-Dc Converters (AREA)
  • Direct Current Feeding And Distribution (AREA)
  • Power Conversion In General (AREA)
  • Inverter Devices (AREA)

Abstract

A power supply arrangement (10, 100) for supplying industrial processes with power comprises: a. a direct-current-converter (13) which has an input (12) for connection to a direct-current voltage and which provides an intermediate circuit voltage at the output (18) thereof; b. a converter (23) which is connected to the output (18) of the direct-current-converter (13) and which is configured to produce an alternating-current voltage or a pulsed direct-current voltage and to output it at the output (18) thereof, c. the output (18) of the direct-current-converter being connected to the input (12) of the direct-current-converter (13) directly by means of a non-linear element (40) or a series connection comprising a plurality of non-linear elements (102, 103).

Description

DESCRIPTION
Power supply arrangement for supplying industrial processes with power
The invention relates to a power supply arrangement for supplying industrial processes with power, comprising:
a. a direct-current converter which has an input for
connection to a direct-current voltage and which provides an intermediate circuit voltage at the output thereof;
b. a converter which is connected to an output of the direct- current-converter and which is configured to produce an alternating-current voltage or a pulsed direct-current voltage and to output it at the output thereof.
The scope of the invention further includes the use of a power supply arrangement according to the invention for producing and operating a plasma. When a plasma discharge is operated with a very rapidly changing current, this may lead to voltage peaks across semiconductor switches which are used for the power supply of the plasma. Very rapidly changing currents may be an alternating current or a pulsed direct current, the pulsed direct current being able to fall to values in the range of 0 A (zero amps) or below.
The voltage peaks occur when the power supply has current source character, preferably with an inductive output and/or the plasma itself has an inductive character when it is supplied with a rapidly changing current. Additional line inductances accumulate to form the plasma inductance, whereby the resultant load inductance is increased. Therefore, the semi-conductor switches are arranged between two inductive switching components. Switching operations under these conditions generate voltage peaks which endanger the semiconductor switches .
When conventional overvoltage protection devices are used, there occur high losses which are in particular proportional to the switching frequency. In applications which operate with high currents and frequencies, the losses in comparison with the power supplied to the plasma may be very large. It is known to use DC/DC-converters in order to solve the problem. However, these increase the complexity and costs of the power supply arrangement .
An object of the present invention is therefore to provide a circuit topology by means of which voltage peaks across switching elements can be effectively prevented. This object is achieved according to the invention by a power supply arrangement for supplying industrial processes with power, comprising:
a. a direct-current-converter which has an input for
connection to a direct-current voltage and which provides an intermediate circuit voltage at the output thereof;
b. a converter which is connected to an output of the direct- current-converter and which is configured to produce an alternating-current voltage or a pulsed direct-current voltage and to output it at the output thereof,
c. the output of the direct-current-converter being connected to the input of the direct-current-converter directly by means of a non-linear element or a series connection
comprising a plurality of non-linear elements,
d. an energy store being connected to a node point between two non- linear elements, which are connected in series.
With such a power supply arrangement, the voltage peaks are returned directly, that is to say, immediately, to the input of the direct-current-converter . Consequently, the voltage peaks are kept away from the switching elements and the switching elements are protected. In this manner, an almost loss-free return of energy can be achieved. Furthermore, overvoltage protection is achieved. This can be used in a particularly advantageous manner with high switching
frequencies or in the case of a frequent occurrence of arcs in a plasma load which is connected to the output of the converter. The power supply arrangement according to the invention requires very few devices, ideally only one nonlinear component. The likelihood of malfunction of the power supply arrangement is thereby reduced. Furthermore, the discharge of high voltage in order to protect the semiconductor switches can be carried out extremely rapidly. Industrial processes may include, for example, plasma
processes, laser processes or induction applications.
An energy store is connected to a node point between two nonlinear elements which are connected in series. The energy store may be connected between the node point and an input connection of the converter. Furthermore, there may be provision for the energy store to be a capacitor. The energy store and the non- linear element between the node point and the input connection of the converter may be arranged
particularly close to the converter. The voltage at the input of the converter can be limited by the energy store. Such a circuit arrangement may advantageously be used when the connection lines from the converter to the input of the direct-current-converter would still be too slow to discharge very short voltage pulses in order to protect the switching elements of the converter. The voltage peaks may charge the energy store which is arranged very close to the converter. The voltage peaks can thus be limited with substantially increased speed. Subsequently, the energy stored in the energy store can be discharged via the non-linear elements to the direct-current-converter. This can be carried out more slowly without the risk of any damage. Consequently, the arrangement between the node point and input of the direct- current converter may have a larger parasitic component and line inductance than the arrangement between the node point and converter. The lines of the arrangement between the node point and input of the direct-current-converter may be constructed so as to be longer than the lines of the
arrangement between the node point and converter. The output of the direct-current-converter may be connected to the input of the direct-current-converter without a coil or a transformer being interposed. In particular, the output of the direct-current-converter may be connected to the input of the direct-current-converter without an inductive element being interposed. In fact, any line portion even of a very short length may have an inductance. However, such
unavoidable inductances are not intended in this instance. Instead, such line portions are intended to be constructed so as to be as short and planar as possible, that is to say, with the smallest possible inductance. The connection to the non-linear elements is in particular intended to have no choke coil which is connected in series and which has an inductance of more than 1 μΗ, as are conventionally assembled in direct-current-converters . The inductance of all the power portions taken together is preferably less than 500 nH, in particular less than 100 nH.
At least one non-linear element may be a diode. A
particularly simple and cost-effective embodiment of a nonlinear element is thereby achieved. Alternatively, at least one non- linear element may be a switch. Other embodiments of non-linear elements are, however, also conceivable.
The series connection of a plurality of non- linear elements may have two non-linear elements, in particular two diodes which are connected in series .
The two non-linear elements may be connected in series in such a manner that they enable current flow in one direction and prevent it in the other direction. If a switching element is used for one or both of the two non-linear elements, for example, a transistor, voltage peaks can be even better suppressed.
The converter may be embodied as a half bridge or full bridge circuit of switching elements. Using such a converter, an alternating-current voltage can be produced at the output in a particularly simple manner. Such a converter can be
protected from voltage peaks in a particularly effective manner in the power supply arrangement according to the invention.
The direct-current-converter may be constructed as a step-up converter or a step-down converter. Using such circuit components, an intermediate circuit voltage can be produced in a particularly simple and reliable manner.
The direct-current-converter may have an inductance which is connected in series between the input and the output thereof . Such an inductance may be configured in such a manner that it brings about an additional filtering effect for very short voltage peaks (less than 10 μβ) . In this manner, the voltage peaks which are applied at the input of the direct-current- converter can be damped and are coupled to the output of the direct-current-converter only to a small extent.
Additionally or alternatively to the inductances in the direct-current-converter, one or more inductances may be connected in series between the direct-current-converter and the converter. These inductances may be configured so that the power supply has current source character.
A switch may be arranged in series with respect to the inductance of the direct-current-converter . From the above, it can be seen that the input and the output of the direct- current-converter can be connected in a completely internal manner by means of a non-linear element (switch) and
inductance. In the external connection to the non- linear element, however, the inductance is intended to be kept as small as possible.
The scope of the invention further includes the use of a power supply arrangement according to the invention for igniting and operating a plasma process. In plasma processes, arcs often occur and can also have effects on the switching elements of the converter connected upstream of the plasma. The voltage peaks produced by arcs can also be discharged in the power supply arrangement according to the invention to the direct-current-converter in order thereby to protect the switching elements .
Other features and advantages of the invention will be appreciated from the following description of an embodiment of the invention, with reference to the Figures of the drawings, which show details which are significant to the invention, and from the claims. The individual features can be implemented individually or together in any combination in a variant of the invention.
Preferred embodiments of the invention are schematically illustrated in the drawings and are explained in greater detail below with reference to the Figures of the drawings, in which:
Figure 1 shows a first embodiment of a power supply
arrangement according to the invention; Figure 2 shows a second embodiment of a power supply- arrangement according to the invention.
Figure 1 shows a power supply arrangement 10 having a direct current source 11 which is connected to an input 12 of a direct-current-converter 13 which is constructed in this instance as a parallel arrangement of two step-down
converters. The direct-current-converter 13 has, parallel with the input 12 thereof, a capacitor C . Such a capacitor may alternatively or additionally also be connected to the input connections of the direct-current-converter 13 outside the direct-current-converter 13. Furthermore, the switches 14, 15 have diodes 16, 17 and inductances 19, 20 which are
connected in series between the input 12 and output 18. The switches 14, 15 are controlled by means of a control circuit 21. At the output 18, the direct-current-converter 13
produces an intermediate circuit voltage. The input 22 of a converter 23 is connected to the output 18 of the direct- current-converter 13. In the embodiment shown, the converter 23 has a full bridge which has four switching elements 24, 25, 26, 27. The switching elements 24 - 27 are also controlled by the control circuit 21. A plasma chamber 33 having electrodes 34, 35 is connected to the output 28 of the converter 23 via lines 29, 30 which have line inductances 31, 32. The
converter 23 provides an alternating current at the output thereof .
Rapid current changes, in particular switching-off operations at the switching elements 24 - 27 may lead to voltage peaks across the switching elements 24 - 27. Voltage peaks may further appear when arcs occur in the plasma chamber 33. In order to protect the switching elements 24 - 27, there is provided according to the invention a non-linear element 40 which is constructed as a diode and by means of which the output 18 of the direct-current-converter 13 is directly connected to the input 12 of the direct-current-converter 13 (externally) . In order to keep the line inductance of the line 41 as small as possible, the line 41 is constructed to be as short as possible and as wide as possible. The energy contained in the voltage peaks is consequently returned particularly quickly to the direct-current-converter 13.
In the embodiment shown, in particular the output connection 42 is connected to the input connection 43 by means of the non-linear element 40. It can be seen that no discrete inductance is provided between the output connection 42 and the input connection 43. Inside the direct-current-converter 13, however, the input connection 43 is connected to the output connection 42 by means of the parallel connection of the series connection comprising the switching element 14 and the inductance 19 and the series connection comprising the switching element 15 and the inductive element 20. If, instead of the non-linear element 40 which is constructed in the embodiment in Figure 1 as a diode, a switching element is used, for example, a transistor, this transistor may also be connected to the control circuit 21. The control circuit 21 can then also control the switching element.
Figure 2 shows an alternative embodiment of a power supply arrangement 100 according to the invention. The power supply arrangement 100 differs from the power supply arrangement 10 of Figure 1 only owing to the switching member 101.
Corresponding components are therefore given the same
reference numerals and are not explained in greater detail. The switching member 101 has a series connection comprising two non- linear elements 102, 103 which are constructed as diodes. The anode of the first diode 103 is connected
together with the cathode of the second diode 102 at the node point 104. An energy store C2 which is constructed as a capacitor is connected to the node point 104, that is to say, the connection point of the series connection of the nonlinear elements 102, 103. In particular, the energy store C2 is connected between the node point 104 and the input
connection 105 of the input 22 of the converter 23. If a switching element is used for one or both of the two nonlinear elements 102, 103, for example, a transistor, these transistors may also be connected to the control circuit 21. The control circuit 21 may then also control the switching elements .
When an arc occurs in the plasma chamber 33, or a voltage peak occurs across one of the switching elements 24 - 27, the energy store C2 is charged. The energy which is stored in the energy store C2 can subsequently be discharged into the direct -current converter 13 via the non-linear elements 102, 103. In particular, the excess energy is absorbed by the diodes 16, 17 and the inductances 19, 20. In this instance, it should be mentioned that the voltage across the capacitor Ci is always greater than the total of the voltages across the energy store C2 and the non- linear element 103. The capacitor C cannot be overloaded by the return of the energy since the total energy which is returned is guided through the direct -current converter 18 to the converter 23.

Claims

Patent Claims
1. Power supply arrangement (10, 100) for supplying
industrial processes with power, comprising:
a. a direct-current-converter (13) which has an input (12) for connection to a direct-current voltage and which provides an intermediate circuit voltage at the output (18) thereof; b. a converter (23) which is connected to the output (18) of the direct-current-converter (13) and which is configured to produce an alternating-current voltage or a pulsed direct- current voltage and to output it at the output (28) thereof, wherein
c. the output (18) of the direct-current converter (13) is connected to the input (12) of the direct-current converter (13) directly by means of a non- linear element or a series connection comprising a plurality of non-linear elements (102, 103 ) , wherein
d. an energy store (C2) is connected to a node point (104) between two non-linear elements (102, 103) which are
connected in series .
2. Power supply arrangement according to claim 1,
characterised in that the output (18) of the direct-current- converter (13) is connected to the input (12) of the direct- current-converter (13) without a coil or a transformer being interposed .
3. Power supply arrangement according to either of the
preceding claims, characterised in that at least one nonlinear element (40, 102, 103) is as a diode.
4. Power supply arrangement according to any of the preceding claims, characterised in that the energy store (C2) is - Un connected between the node point (102) and an input
connection (105) of the converter (23) .
5. Power supply arrangement according to any of the preceding claims, characterised in that the energy store (C2) is a capacitor .
6. Power supply arrangement according to any one of the preceding claims, characterised in that the converter (23) is constructed as a half or full bridge circuit comprising switching elements (24 - 27) .
7. Power supply arrangement according to any one of the preceding claims, characterised in that the direct-current- converter (13) is constructed as a step-up converter or as a step-down converter.
8. Power supply arrangement according to any one of the preceding claims, characterised in that the direct-current- converter (13) has an inductance (19, 20) which is connected in series between the input (12) and output (18) thereof.
9. Use of a power supply arrangement according to any one of the preceding claims for supplying a plasma process with power .
PCT/EP2014/052282 2013-02-14 2014-02-06 Power supply arrangement for supplying industrial processes with power WO2014124857A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102013202428.2 2013-02-14
DE102013202428.2A DE102013202428A1 (en) 2013-02-14 2013-02-14 Power supply arrangement for powering industrial processes

Publications (2)

Publication Number Publication Date
WO2014124857A2 true WO2014124857A2 (en) 2014-08-21
WO2014124857A3 WO2014124857A3 (en) 2015-05-07

Family

ID=50070549

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2014/052282 WO2014124857A2 (en) 2013-02-14 2014-02-06 Power supply arrangement for supplying industrial processes with power

Country Status (2)

Country Link
DE (1) DE102013202428A1 (en)
WO (1) WO2014124857A2 (en)

Cited By (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10431437B2 (en) 2014-12-19 2019-10-01 Trumpf Huettinger Sp. Z O. O. Detecting an arc occuring during supplying power to a plasma process
US11462389B2 (en) 2020-07-31 2022-10-04 Applied Materials, Inc. Pulsed-voltage hardware assembly for use in a plasma processing system
US11476090B1 (en) 2021-08-24 2022-10-18 Applied Materials, Inc. Voltage pulse time-domain multiplexing
US11476145B2 (en) 2018-11-20 2022-10-18 Applied Materials, Inc. Automatic ESC bias compensation when using pulsed DC bias
US11495470B1 (en) 2021-04-16 2022-11-08 Applied Materials, Inc. Method of enhancing etching selectivity using a pulsed plasma
US11508554B2 (en) 2019-01-24 2022-11-22 Applied Materials, Inc. High voltage filter assembly
US11569066B2 (en) 2021-06-23 2023-01-31 Applied Materials, Inc. Pulsed voltage source for plasma processing applications
US11694876B2 (en) 2021-12-08 2023-07-04 Applied Materials, Inc. Apparatus and method for delivering a plurality of waveform signals during plasma processing
US11699572B2 (en) 2019-01-22 2023-07-11 Applied Materials, Inc. Feedback loop for controlling a pulsed voltage waveform
US11791138B2 (en) 2021-05-12 2023-10-17 Applied Materials, Inc. Automatic electrostatic chuck bias compensation during plasma processing
US11798790B2 (en) 2020-11-16 2023-10-24 Applied Materials, Inc. Apparatus and methods for controlling ion energy distribution
US11810760B2 (en) 2021-06-16 2023-11-07 Applied Materials, Inc. Apparatus and method of ion current compensation
US11901157B2 (en) 2020-11-16 2024-02-13 Applied Materials, Inc. Apparatus and methods for controlling ion energy distribution
US11948780B2 (en) 2021-05-12 2024-04-02 Applied Materials, Inc. Automatic electrostatic chuck bias compensation during plasma processing
US11967483B2 (en) 2021-06-02 2024-04-23 Applied Materials, Inc. Plasma excitation with ion energy control
US11972924B2 (en) 2022-06-08 2024-04-30 Applied Materials, Inc. Pulsed voltage source for plasma processing applications
US11984306B2 (en) 2021-06-09 2024-05-14 Applied Materials, Inc. Plasma chamber and chamber component cleaning methods

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102014220094A1 (en) * 2014-10-02 2016-04-07 TRUMPF Hüttinger GmbH + Co. KG Method of operating a MF power generator and MF power generator

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3737755A (en) * 1972-03-22 1973-06-05 Bell Telephone Labor Inc Regulated dc to dc converter with regulated current source driving a nonregulated inverter
JPH04271283A (en) * 1991-02-25 1992-09-28 Okuma Mach Works Ltd High frequency power supply
US5418707A (en) * 1992-04-13 1995-05-23 The United States Of America As Represented By The United States Department Of Energy High voltage dc-dc converter with dynamic voltage regulation and decoupling during load-generated arcs
DE19937859C2 (en) * 1999-08-13 2003-06-18 Huettinger Elektronik Gmbh Electrical supply unit for plasma systems

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
None

Cited By (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10431437B2 (en) 2014-12-19 2019-10-01 Trumpf Huettinger Sp. Z O. O. Detecting an arc occuring during supplying power to a plasma process
US11476145B2 (en) 2018-11-20 2022-10-18 Applied Materials, Inc. Automatic ESC bias compensation when using pulsed DC bias
US11699572B2 (en) 2019-01-22 2023-07-11 Applied Materials, Inc. Feedback loop for controlling a pulsed voltage waveform
US11508554B2 (en) 2019-01-24 2022-11-22 Applied Materials, Inc. High voltage filter assembly
US11776789B2 (en) 2020-07-31 2023-10-03 Applied Materials, Inc. Plasma processing assembly using pulsed-voltage and radio-frequency power
US11462389B2 (en) 2020-07-31 2022-10-04 Applied Materials, Inc. Pulsed-voltage hardware assembly for use in a plasma processing system
US11462388B2 (en) 2020-07-31 2022-10-04 Applied Materials, Inc. Plasma processing assembly using pulsed-voltage and radio-frequency power
US11848176B2 (en) 2020-07-31 2023-12-19 Applied Materials, Inc. Plasma processing using pulsed-voltage and radio-frequency power
US11901157B2 (en) 2020-11-16 2024-02-13 Applied Materials, Inc. Apparatus and methods for controlling ion energy distribution
US11798790B2 (en) 2020-11-16 2023-10-24 Applied Materials, Inc. Apparatus and methods for controlling ion energy distribution
US11495470B1 (en) 2021-04-16 2022-11-08 Applied Materials, Inc. Method of enhancing etching selectivity using a pulsed plasma
US11791138B2 (en) 2021-05-12 2023-10-17 Applied Materials, Inc. Automatic electrostatic chuck bias compensation during plasma processing
US11948780B2 (en) 2021-05-12 2024-04-02 Applied Materials, Inc. Automatic electrostatic chuck bias compensation during plasma processing
US11967483B2 (en) 2021-06-02 2024-04-23 Applied Materials, Inc. Plasma excitation with ion energy control
US11984306B2 (en) 2021-06-09 2024-05-14 Applied Materials, Inc. Plasma chamber and chamber component cleaning methods
US11810760B2 (en) 2021-06-16 2023-11-07 Applied Materials, Inc. Apparatus and method of ion current compensation
US11569066B2 (en) 2021-06-23 2023-01-31 Applied Materials, Inc. Pulsed voltage source for plasma processing applications
US11887813B2 (en) 2021-06-23 2024-01-30 Applied Materials, Inc. Pulsed voltage source for plasma processing
US11476090B1 (en) 2021-08-24 2022-10-18 Applied Materials, Inc. Voltage pulse time-domain multiplexing
US11694876B2 (en) 2021-12-08 2023-07-04 Applied Materials, Inc. Apparatus and method for delivering a plurality of waveform signals during plasma processing
US11972924B2 (en) 2022-06-08 2024-04-30 Applied Materials, Inc. Pulsed voltage source for plasma processing applications

Also Published As

Publication number Publication date
DE102013202428A1 (en) 2014-08-14
WO2014124857A3 (en) 2015-05-07

Similar Documents

Publication Publication Date Title
WO2014124857A2 (en) Power supply arrangement for supplying industrial processes with power
US11538670B2 (en) Controlling multiple plasma processes
US10516337B2 (en) DC voltage conversion circuit
US10491103B2 (en) Step-up converter, corresponding inverter and method of operation
JP5872494B2 (en) Power converter for vehicle
US20140126247A1 (en) Snubber circuit for dc-dc voltage converter
US20110134671A1 (en) Ac/dc converter preloading circuit
CN102403914A (en) Modular switch, electrical converter, as well as method for operating an electrical converter
JP2008545359A (en) Power supply apparatus having full bridge circuit and large adjustment area
US10122281B2 (en) Power conversion device for cancelling leakage current
US20150222114A1 (en) Methods and systems of impedance source semiconductor device protection
US9654016B2 (en) Step-up or step-down converter comprising a bypass capacitor
WO2019163205A1 (en) Power semiconductor module and power conversion device using same
US9287767B2 (en) DC voltage conversion circuit having output voltage with a predetermined magnitude
US9531252B2 (en) Snubber circuit
KR101995684B1 (en) Power supply
US9537394B2 (en) Switch protection i auxiliary resonant circuit
JP5741199B2 (en) Rectifier snubber circuit
Patel et al. Power supplies for plasma heating: PSM and involved challenges
JP6448759B1 (en) Power converter
JP2015167433A (en) chopper circuit
KR20140028782A (en) Electric circuit including a snubber circuit
US11374485B2 (en) Filter unit and frequency inverter
US20220060160A1 (en) Radiofrequency Power Amplifier
US20170207781A1 (en) Half bridge having two semiconductor switches for operating a load

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 14703340

Country of ref document: EP

Kind code of ref document: A2

122 Ep: pct application non-entry in european phase

Ref document number: 14703340

Country of ref document: EP

Kind code of ref document: A2