WO2014115205A1 - Method for manufacturing lid with lens - Google Patents

Method for manufacturing lid with lens Download PDF

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Publication number
WO2014115205A1
WO2014115205A1 PCT/JP2013/006678 JP2013006678W WO2014115205A1 WO 2014115205 A1 WO2014115205 A1 WO 2014115205A1 JP 2013006678 W JP2013006678 W JP 2013006678W WO 2014115205 A1 WO2014115205 A1 WO 2014115205A1
Authority
WO
WIPO (PCT)
Prior art keywords
lens
mold
flange
lid
manufacturing
Prior art date
Application number
PCT/JP2013/006678
Other languages
French (fr)
Japanese (ja)
Inventor
沙季 石川
真太郎 林
友洋 中谷
福島　博司
Original Assignee
パナソニック株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by パナソニック株式会社 filed Critical パナソニック株式会社
Publication of WO2014115205A1 publication Critical patent/WO2014115205A1/en

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B11/00—Pressing molten glass or performed glass reheated to equivalent low viscosity without blowing
    • C03B11/06—Construction of plunger or mould
    • C03B11/08—Construction of plunger or mould for making solid articles, e.g. lenses
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
    • G02B7/022—Mountings, adjusting means, or light-tight connections, for optical elements for lenses lens and mount having complementary engagement means, e.g. screw/thread
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2215/00—Press-moulding glass
    • C03B2215/02—Press-mould materials
    • C03B2215/05—Press-mould die materials
    • C03B2215/07—Ceramic or cermets
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2215/00—Press-moulding glass
    • C03B2215/79—Uniting product and product holder during pressing, e.g. lens and lens holder
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P40/00—Technologies relating to the processing of minerals
    • Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
    • Y02P40/57—Improving the yield, e-g- reduction of reject rates

Definitions

  • the present invention relates to a method of manufacturing a lid with a lens.
  • the lens-equipped lid is used, for example, in a package that houses a photoelectric conversion element.
  • a package for example, a CAN package including a lid with a lens and a base to which the lid with a lens is fixed is widely known.
  • the photoelectric conversion element there are a light emitting element that converts electric energy into light, a light receiving element that converts light into electric energy, and the like.
  • the lens is welded to the lens sealing hole of the metal shell in a state where the lower jig made of graphite and the upper jig made of graphite are in contact with the metal shell (lid body).
  • the metal shell is made of Kovar (Fe—Ni—Co alloy).
  • the lens is made of borosilicate glass.
  • the linear expansion coefficient of the lower jig and the upper jig is larger than that of the glass lens, and borosilicate glass is more resistant to compression than Kovar.
  • the metal shell may be deformed.
  • the stress applied to the lens during cooling causes cracking of the lens, the airtightness between the lens and the metal shell decreases, and the yield of the lid with a lens decreases. It can be considered.
  • an object of the present invention is to provide a method for manufacturing a lid body with a lens capable of improving the yield.
  • the manufacturing method of the lid body with a lens of this invention manufactures the lid body with a lens (1) provided with the lid body (2) and the lens (3).
  • the lid body (2) is made of metal.
  • the lens (3) is made of borosilicate glass.
  • the lid body (2) has a cylindrical body (20), a first flange (21), and a second flange (22).
  • the first flange (21) protrudes outward from the first end (20aa) of the cylindrical body (20).
  • the second flange (22) protrudes inward of the cylinder (20) from the second end (20ab) of the cylinder (20).
  • the lens cover (1) is welded to the second flange (22) so that the lens (3) closes the window hole (23) surrounded by the second flange (22).
  • the first mold (4), the second mold (5), the lens material (30) from which the lens (3) is based, and the cylindrical outer frame (6) The 1st step which arranges is provided.
  • the first mold (4) is fitted inside the cylinder (20).
  • the second mold (5) is positioned outside the cylinder (20) on the second end (20ab) side of the cylinder (20).
  • the lens material (30) is located between the first mold (4) and the second mold (5).
  • the second mold (5) and the lid body (2) are fitted into the cylindrical outer frame (6).
  • the lens cover (1) is manufactured by heating the lens material (30) from the outside of the outer frame (6) to melt it and then cooling it to form the lens (3) and the lens (3). And a second step of welding the second flange (22).
  • the manufacturing method of the lens-attached lid (1) includes a third step of removing the lens-attached lid (1) from the first mold (4), the second mold (5), and the outer frame (6).
  • the material of the first mold (4), the second mold (5), and the outer frame (6) is silicon nitride.
  • the lens (3) has an aspherical lens part (31) and a base part (32).
  • the aspheric lens part (31) has a biconvex lens shape.
  • the base part (32) protrudes outward from the outer peripheral part (31aa) of the aspherical lens part (31) over the entire circumference.
  • the lens (3) has an aspheric lens portion (31) disposed in the window hole (23).
  • the lens (3) has a base portion (32) welded to the second flange (22).
  • the lens (3) has a spherical lens material (30).
  • the first surface (41) on the second flange (22) side is the shape of the aspheric lens part (31) and the base part (32). Prepare the one corresponding to.
  • the second surface (51) on the second flange (22) side becomes the aspheric lens part (31) and the second flange (22).
  • the portion corresponding to the second flange (22) in the second mold (5) is preferably arranged so as to be in contact with the second flange (22).
  • the lens material (30) has a true spherical shape.
  • FIG. 1A to 1F are main process cross-sectional views for explaining a method of manufacturing a lens-attached lid body according to the embodiment.
  • FIG. 2 is a schematic cross-sectional view of the lens-attached lid body according to the embodiment.
  • FIG. 3 is a schematic perspective view of a lid body with a lens in the embodiment.
  • 4A and 4B are main process cross-sectional views for explaining a manufacturing method of a modified example of the lid body with a lens according to the embodiment.
  • FIG. 5 is a block diagram illustrating a manufacturing apparatus used in the method for manufacturing the lens-attached lid body according to the embodiment.
  • the lid 1 with a lens will be described with reference to FIGS. 2 and 3, and then the manufacturing method of the lid 1 with a lens will be described with reference to FIG. 1.
  • the lid 1 with a lens can be applied to, for example, a part of a package that houses a photoelectric conversion element.
  • a photoelectric conversion element there are a light emitting element that converts electric energy into light, a light receiving element that converts light into electric energy, and the like.
  • the light emitting element include a light emitting diode and a semiconductor laser.
  • the light receiving element include a photodiode and a phototransistor.
  • the lens 3 preferably has a transmittance of 70% or more, more preferably 80% or more, for light (electromagnetic wave) having a wavelength to be transmitted.
  • the lens cover 1 employs borosilicate glass as the material of the lens 3.
  • the photoelectric conversion element is a light emitting element that emits ultraviolet rays
  • the lens-equipped lid 1 uses a borosilicate glass lens 3 so that the transmittance of the lens 3 with respect to light emitted from the light emitting element is 80% or more. It becomes possible.
  • the lid body 1 with a lens includes a lid body 2 made of metal and a lens 3 made of borosilicate glass.
  • the lid body 2 includes a cylindrical body 20, a first flange 21 protruding outward from the first end 20aa of the cylindrical body 20, and a second flange 22 protruding inward from the second end 20ab of the cylindrical body 20. And have.
  • the cylinder 20 has a cylindrical shape.
  • the outer diameter of the cylinder 20 is set to 8 mm.
  • the outer diameter of the cylinder 20 is not limited to this value.
  • the cylinder 20 is not limited to a cylindrical shape.
  • the cylindrical body 20 only needs to have a cylindrical shape, and may be, for example, a rectangular cylindrical shape.
  • the outer peripheral shape of the first flange 21 is circular.
  • the outer peripheral shape of the first flange 21 is not limited to a circular shape.
  • the outer peripheral shape of the first flange 21 may be, for example, an elliptical shape or a polygonal shape.
  • the lid body 2 has a window hole 23 surrounded by the second flange 22.
  • the lens 3 is welded to the second flange 22 so as to close the window hole 23.
  • the inner peripheral shape of the second flange 22 is a circular shape. Therefore, the window hole 23 is a circular hole.
  • the inner diameter of the window hole 23 is set to 3 mm.
  • the inner diameter of the window hole 23 is not limited to this value.
  • the inner peripheral shape of the second flange 22 is not limited to a circular shape.
  • the inner peripheral shape of the second flange 22 may be, for example, an elliptical shape or a polygonal shape.
  • the lens 3 has an aspheric lens part 31 and a base part 32.
  • the aspheric lens unit 31 is a biconvex lens having the shape of a biconvex lens.
  • the base part 32 protrudes outward from the outer peripheral part 31aa of the aspherical lens part 31 over the entire circumference.
  • the base portion 32 is formed in an annular shape.
  • the base portion 32 preferably has a uniform thickness dimension.
  • the aspheric lens unit 31 includes a first lens surface 31a and a second lens surface 31b.
  • the 1st lens surface 31a is located inside the cylinder 20.
  • the 2nd lens surface 31b is located in the outer side of the lid body 2.
  • the first lens surface 31a is an aspherical first convex curved surface.
  • the curvature of the first convex curved surface changes continuously.
  • the second lens surface 31b is an aspherical second convex curved surface.
  • the curvature of the second convex curved surface changes continuously.
  • the first lens surface 31a and the second lens surface 31b may have the same shape or different shapes.
  • the lens 3 has an aspheric lens portion 31 disposed in the window hole 23.
  • the lens 3 has a base portion 32 welded to the second flange 22.
  • the base portion 32 is welded to the second flange 22 over the entire circumference of one surface in the thickness direction of the second flange 22.
  • the base portion 32 preferably has a larger width dimension in the direction along the radial direction of the aspheric lens portion 31.
  • the lid body with lens 1 it is preferable for the lid body with lens 1 that the width dimension of the base portion 32 and the width dimension of the second flange 22 are substantially the same.
  • the cover body 1 with a lens can improve joining reliability and airtightness more.
  • the airtightness of the lens-attached lid body 1 means the airtightness of the joint portion between the lid body 2 and the lens 3.
  • the package including the lens-equipped lid 1 can improve the hermeticity of the package and can extend the life.
  • Examples of the package to which the lens-equipped lid 1 is applied include a CAN package, a surface-mount package, and other various forms of packages, but are not particularly limited.
  • the lens-equipped lid 1 has a larger linear expansion coefficient of the metal that is the material of the lid body 2 than the linear expansion coefficient of the borosilicate glass that is the material of the lens 3.
  • the cover body 1 with a lens the one where the linear expansion coefficient difference with a borosilicate glass and a metal is small is preferable.
  • the cover body 1 with a lens can reduce the stress which generate
  • borosilicate glass having a transmittance of 80% or more for ultraviolet rays emitted from the light emitting element is adopted.
  • a borosilicate glass for example, a product name Glass 8337B manufactured by SCHOTT Corporation can be adopted.
  • This borosilicate glass has a linear expansion coefficient of 4.1 ⁇ 10 ⁇ 6 K ⁇ 1 and a temperature at which the viscosity is 10 7.6 dPa ⁇ s is 705 ° C.
  • stainless steel As the metal that is the material of the lid body 2, stainless steel is adopted.
  • stainless steel for example, ferritic stainless steel can be employed.
  • ferritic stainless steel for example, the product name SF20T manufactured by Shimomura Special Seiko Co., Ltd. can be used.
  • the linear expansion coefficient of this ferritic stainless steel is, for example, 10.4 ⁇ 10 ⁇ 6 K ⁇ 1 .
  • the metal that is the material of the lid body 2 is not limited to stainless steel, and for example, Kovar can be used.
  • Kovar is an alloy containing iron and nickel.
  • the component ratio of Kovar is, by weight, iron: 53.5% by weight, nickel: 29% by weight, cobalt: 17% by weight, silicon: 0.2% by weight, manganese: 0.3% by weight. .
  • the linear expansion coefficient of Kovar having such a component ratio is 5 ⁇ 10 ⁇ 6 K ⁇ 1 .
  • the component ratio of Kovar is not particularly limited. Kovar having a component ratio such that the linear expansion coefficient is smaller than the linear expansion coefficient of borosilicate glass can be employed.
  • the lid main body 2 may be one in which an oxide film is formed by oxidizing the surface of a base made of this metal.
  • the first step, the second step, and the third step are sequentially performed.
  • the first mold 4 is fitted into the cylinder 20.
  • the lens material 30 that is the basis of the lens 3 is then placed on the first surface 41 side of the first mold 4 on the second flange 22 side.
  • the lid body 2 is then fitted into the cylindrical outer frame 6 (FIG. 1A).
  • the second mold 5 is subsequently fitted into the outer frame 6 (FIG. 1B).
  • the lid body 2, the first mold 4, the second mold 5, the lens material 30 that is the basis of the lens 3, and the cylindrical outer frame 6 are arranged.
  • the first mold 4 is fitted inside the cylindrical body 20 of the lid body 2.
  • the second mold 5 is positioned outside the cylinder 20 on the second end 20ab side of the cylinder 20.
  • the lens material 30 that is the base of the lens 3 is positioned between the first mold 4 and the second mold 5.
  • the cylindrical outer frame 6 is fitted with the second mold 5 and the lid body 2.
  • the first mold 4 is a lower mold and the second mold 5 is an upper mold.
  • the first mold 4 is held on the stage 7.
  • the first mold 4 is movable in the vertical direction with respect to a plane including the upper surface of the stage 7.
  • the lid body 1 with a lens can be manufactured using the manufacturing apparatus 11 shown in FIG. 5, for example.
  • the manufacturing apparatus 11 includes a first driving device 14, a second driving device 15, a heating device 16, and a controller 17.
  • the manufacturing apparatus 11 preferably includes a supply unit 18 that can supply the lens material 30 to the first surface 41 of the first mold 4.
  • the controller 17 controls driving of the first driving device 14, the second driving device 15, the heating device 16, and the supply unit 18.
  • the first mold 4 is moved in the vertical direction by the first driving device 14.
  • Examples of the first drive device 14 include an air cylinder and a hydraulic cylinder.
  • the second mold 5 and the outer frame 6 are individually moved in the vertical direction by the second driving device 15.
  • the second driving device 15 include an air cylinder and a hydraulic cylinder.
  • mold 5, and the outer frame 6 are collectively called a shaping
  • the manufacturing apparatus 11 is configured so that the cylindrical body 20 and the lens material 30 can be appropriately arranged in a mold and processed automatically.
  • the first mold 4 is prepared in advance so that the first surface 41 on the second flange 22 side corresponds to the shape of the aspherical lens part 31 and the base part 32.
  • the first mold 4 has a function of molding the first lens surface 31 a of the aspheric lens part 31 and the exposed surface 32 a of the base part 32.
  • the shape of the side surface is designed to fit along the inner surface of the cylindrical body 20 so as to fit inside the cylindrical body 20. For this reason, the 1st type
  • a first concave curved surface 41 a is formed at the center of the first surface 41 on the second flange 22 side.
  • the first concave curved surface 41 a is formed in a shape that matches a predetermined shape of the first lens surface 31 a of the aspheric lens portion 31.
  • the first mold 4 is arranged such that a predetermined gap is formed between the peripheral portion 41 b of the first concave curved surface 41 a on the first surface 41 and the second flange 22.
  • the predetermined gap may be set to a desired thickness dimension of the base portion 32 of the lens 3, for example.
  • the first surface 41 is a molding surface.
  • the surface to which the lens 3 is welded is preferably a mirror surface.
  • FIG. 1 means a surface that is mirror-polished.
  • the surface to which the lens 3 is welded preferably has an arithmetic average roughness Ra defined by, for example, JIS B 0601-2001 or ISO 4287-1997 of 10 nm or less, and several nm or less. More preferably.
  • the material of the lens material 30 is borosilicate glass.
  • the borosilicate glass that is the material of the lens material 30 is preferably one having a low yield point and a low melting point. Thereby, in the manufacturing method of the cover body 1 with a lens, it becomes possible to increase the shape accuracy of the first lens surface 31a and the second lens surface 31b of the aspheric lens portion 31 in the lens 3. It is preferable that the borosilicate glass that is the material of the lens material 30 has a high transmittance with respect to light to be transmitted.
  • the shape of the lens material 30 is preferably spherical.
  • the spherical lens material 30 can be formed, for example, by forming a disk-shaped lump obtained by slicing a cylindrical member made of borosilicate glass preformed into a cylindrical shape into a spherical shape.
  • the molding method of the spherical lens material 30 is not particularly limited.
  • the spherical lens material 30 is more preferably spherical.
  • the lens material 30 can easily manage the volume of the lens material 30, and can improve the accuracy of the volume. Therefore, in the manufacturing method of the lid body with lens 1, it is possible to improve the shape accuracy of the lens 3 by using the true spherical lens material 30. That is, in the manufacturing method of the lid body with lens 1, it is possible to improve the shape accuracy of the aspheric lens portion 31 of the lens 3.
  • the lens material 30 preferably has a spherical shape as shown in FIG. 1A and its diameter is set smaller than the inner diameter of the window hole 23.
  • the lens material 30 is formed in a spherical shape having a diameter smaller than the inner diameter of the window hole 23, so that the lens material 30 is placed on the center line of the first concave curved surface 41 a in the first surface 41 of the first mold 4 by the weight of the lens material 30. Is self-aligned so that the center of Thereby, in the manufacturing method of the cover body 1 with a lens, the positioning accuracy of the lens material 30 with respect to the 1st type
  • the diameter of the lens material 30 may be set to a desired thickness dimension of the lens 3, for example.
  • the desired thickness dimension of the lens 3 is the thickness dimension of the lens 3 on the center line of the lens 3.
  • the lens material 30 is not limited to a spherical shape, and may be a plate shape such as a disk shape.
  • the outer frame 6 may have a cylindrical shape whose inner peripheral shape matches the outer peripheral shape of the cylindrical body 20 and the outer peripheral shape of the second mold 5, and has a cylindrical shape.
  • the outer frame 6 can have a function of aligning the central axis of the first mold 4 and the central axis of the second mold 5 on a straight line.
  • the outer frame 6 has a function of holding the lid body 2, the first mold 4, and the second mold 5.
  • the second mold 5 is prepared in advance so that the second surface 51 on the second flange 22 side corresponds to the aspheric lens part 31 and the second flange 22.
  • the second mold 5 has a function of molding the second lens surface 31b of the aspheric lens unit 31.
  • the shape of the side surface is designed to fit along the outer surface of the cylindrical body 20 so as to fit inside the outer frame 6.
  • mold 5 is formed in the column-shaped shape.
  • the outer diameter dimension of the second mold 5 is set to the same value as the outer diameter dimension of the cylindrical body 20.
  • a second concave curved surface 51 a is formed at the center of the second surface 51 on the second flange 22 side.
  • the second concave curved surface 51 a is formed in a shape that matches a predetermined shape of the second lens surface 31 b of the aspheric lens portion 31.
  • the second mold 5 is preferably arranged so that the peripheral portion of the second concave curved surface 51 a on the second surface 51 is in contact with the second flange 22.
  • the second mold 5 is preferably arranged so that a portion of the second mold 5 corresponding to the second flange 22 is in contact with the second flange 22.
  • the second concave curved surface 51 a of the second surface 51 is a molding surface.
  • the distance between the first mold 4 and the second mold 5 can be defined by the lens material 30.
  • the first mold 4, the second mold 5 and the outer frame 6 are made of silicon nitride which is a kind of ceramics.
  • the first mold 4, the second mold 5 and the outer frame 6 preferably have the same linear expansion coefficient.
  • the linear expansion coefficient of silicon nitride that is the material of the first mold 4, the second mold 5, and the outer frame 6 is smaller than the linear expansion coefficient of borosilicate glass that is the material of the lens 3.
  • the linear expansion coefficient of silicon nitride, which is the material of the first mold 4, the second mold 5, and the outer frame 6, is 1.6 ⁇ 10 ⁇ 6 K ⁇ 1 .
  • the first mold 4 is preferably provided with a noble metal coating on the first surface 41 from the viewpoint of improving the releasability of the lens-equipped lid 1.
  • the second mold 5 is preferably provided with a noble metal film on the second surface 51.
  • the lens material 30 is heated from the outside of the outer frame 6 to be softened and then cooled to mold the lens 3 and weld the lens 3 and the second flange 22 (FIG. 1C).
  • the lens material 30 is heated by heating the mold.
  • the mold is heated up to a specified temperature equal to or higher than the predetermined temperature so that the lens material 30 has a predetermined temperature equal to or higher than the yield point.
  • cooling of the mold is started.
  • the mold is preferably heated in an inert gas atmosphere.
  • nitrogen gas can be employed as the inert gas.
  • the inert gas is not limited to nitrogen gas, and may be argon gas, for example.
  • the heating device 16 for heating the mold for example, a tunnel furnace, an oven, a hot plate, a high-frequency heating device, or the like can be employed.
  • the predetermined temperature may be set to 620 ° C., but is not particularly limited.
  • the specified time may be appropriately set within a range of about 15 to 120 seconds, for example.
  • the second step when the lens material 30 is cooled, it is preferable to cool it slowly in order to suppress sink marks and distortion of the lens 3.
  • the cooling rate when cooling slowly, for example, the cooling rate may be set in the range of about 5 to 30 ° C./min. Further, the temperature at which the cooling of the mold is finished may be, for example, room temperature, but may be, for example, about 100 ° C. from the viewpoint of improving productivity.
  • the outer frame 6 is formed of silicon nitride, which is a kind of ceramic, the outermost surface portion on the inner surface side of the outer frame 6 is compared with the case where the outer frame 6 is formed of graphite. It is possible to suppress the transfer to the lid body 2 like graphite. Therefore, in the manufacturing method of the lid body 1 with a lens, it is possible to suppress the deterioration of the outer frame 6 and to extend the life of the outer frame 6.
  • the lens material 30 when the lens material 30 is spherical, bubbles are more easily removed than when the lens material 30 is plate-shaped, and bubbles are generated in the vicinity of the lens 3 and the joint portion between the lens 3 and the cylindrical body 20. Can be suppressed.
  • the cover body 1 with a lens it becomes possible to suppress the fall of the transmittance
  • the lens cover 1 is removed from the first mold 4, the second mold 5 and the outer frame 6 (FIGS. 1D to 1F).
  • release is performed.
  • the second mold 5 and the outer frame 6 are moved upward so as to be separated from the lens cover 1 (FIG. 1D).
  • the first mold 4 is moved downward so as to be housed in the stage 7, and the first mold 4 is removed from the lens cover 1 (FIGS. 1E and 1F).
  • the lens-equipped lid 1 on the stage 7 may be removed by a robot, a pickup tool, a hand, or the like.
  • the relationship of [linear expansion coefficient of the cylindrical body 20]> [linear expansion coefficient of borosilicate glass]> [linear expansion coefficient of the outer frame 6] is satisfied.
  • a gap is generated between the outer surface of the cylinder 20 and the inner surface of the outer frame 6 in the lens cover 1 in the state shown in FIGS. 1D to 1F. For this reason, it becomes possible to remove the lid body 1 with a lens from the outer frame 6 easily.
  • the manufacturing method of the lens-equipped lid body 1 described above includes the first step, the second step, and the third step described above, and the material of the first mold 4, the second mold 5, and the outer frame 6 is silicon nitride. And thereby, in the manufacturing method of the cover body 1 with a lens, a deformation
  • the structure of the lid body 1 with a lens and the manufacturing method thereof are not limited to the form described in FIG.
  • a spherical lens material 30 having a diameter larger than the inner diameter of the window hole 23 is arranged on the first concave curved surface 41a.
  • the manufacturing method of the lid body 1 with a lens may thereafter form the lens 3 and weld the lens 3 and the second flange 22 in the second step.
  • the manufacturing apparatus 11 illustrated in FIG. 5 can be used similarly to the manufacturing method of the lid body with a lens 1 described with reference to FIG. 1.
  • the shape of the aspherical lens portion 31 is the shape of a biconvex aspherical lens has been described, but the present invention is not limited thereto.
  • the shape of the aspheric lens portion 31 may be formed into a plano-convex or plano-concave aspheric lens shape.
  • each figure demonstrated in the above-mentioned embodiment is a typical thing, and ratio of each magnitude

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Led Device Packages (AREA)
  • Lens Barrels (AREA)

Abstract

In a lid with a lens, a metal lid body has a cylinder, a first flange, and a second flange, a borosilicate glass lens being adhered to the second flange so as to cover a window hole. A method for manufacturing the lid with a lens is provided with: a first step for disposing a first mold that is fitted into the inner side of the cylinder, a second mold that is positioned on the outer side of the cylinder, lens material, and a cylindrical outer frame; a second step for heating to a molten state the lens material to form a lens and adhering the lens to the second flange; and a third step for removing the lid with a lens from the first mold, the second mold, and the outer frame. Silicon nitride is used as the material for the first mold, the second mold, and the outer frame.

Description

レンズ付き蓋体の製造方法Manufacturing method of lid with lens
　本発明は、レンズ付き蓋体の製造方法に関するものである。 The present invention relates to a method of manufacturing a lid with a lens.
　レンズ付き蓋体は、例えば、光電変換素子を収納するパッケージに用いられている。この種のパッケージとしては、例えば、レンズ付き蓋体と、このレンズ付き蓋体が固着される基台とを備えたＣＡＮパッケージが広く知られている。光電変換素子としては、電気エネルギを光に変換する発光素子や、光を電気エネルギに変換する受光素子等がある。 The lens-equipped lid is used, for example, in a package that houses a photoelectric conversion element. As this type of package, for example, a CAN package including a lid with a lens and a base to which the lid with a lens is fixed is widely known. As the photoelectric conversion element, there are a light emitting element that converts electric energy into light, a light receiving element that converts light into electric energy, and the like.
　レンズ付き蓋体の製造方法としては、グラファイト製の下部冶具及びグラファイト製の上部冶具を金属シェル（蓋体）に接触させた状態で、金属シェルのレンズ封着穴にレンズを溶着するようにした製造方法がある（例えば、日本国特許公開５６－１９６８５号公報を参照）。ここで、金属シェルは、コバール（Ｆｅ－Ｎｉ－Ｃｏ合金）により形成されている。レンズは、硼珪酸ガラスにより形成されている。 As a method of manufacturing the lid with lens, the lens is welded to the lens sealing hole of the metal shell in a state where the lower jig made of graphite and the upper jig made of graphite are in contact with the metal shell (lid body). There is a manufacturing method (see, for example, Japanese Patent Publication No. 56-19985). Here, the metal shell is made of Kovar (Fe—Ni—Co alloy). The lens is made of borosilicate glass.
　ところで、上述のレンズ付き蓋体の製造方法では、下部冶具及び上部冶具の線膨張係数がガラスレンズの線膨張係数よりも大きく、硼珪酸ガラスの方がコバールよりも圧縮に強いので、冷却の際に金属シェルが変形してしまうことがある。上述のレンズ付き蓋体の製造方法では、金属シェルが変形した場合、下部冶具及び上部冶具からレンズ付き蓋体を取り外しにくくなることがある。また、上述のレンズ付き蓋体の製造方法では、冷却時にレンズにかかる応力により、レンズに割れが発生したり、レンズと金属シェルとの気密性が低下し、レンズ付き蓋体の歩留まりが低下してしまうことも考えられる。 By the way, in the manufacturing method of the lid with a lens described above, the linear expansion coefficient of the lower jig and the upper jig is larger than that of the glass lens, and borosilicate glass is more resistant to compression than Kovar. The metal shell may be deformed. In the above-described method for manufacturing a lid with a lens, when the metal shell is deformed, it may be difficult to remove the lid with a lens from the lower jig and the upper jig. Further, in the above method for manufacturing a lid with a lens, the stress applied to the lens during cooling causes cracking of the lens, the airtightness between the lens and the metal shell decreases, and the yield of the lid with a lens decreases. It can be considered.
　そこで、本発明の目的は、歩留まりの向上を図ることが可能なレンズ付き蓋体の製造方法を提供することにある。 Therefore, an object of the present invention is to provide a method for manufacturing a lid body with a lens capable of improving the yield.
　本発明のレンズ付き蓋体の製造方法は、蓋本体(２)と、レンズ（３）とを備えたレンズ付き蓋体（１）を製造する。蓋本体（２）は、金属により形成されている。レンズ（３）は、硼珪酸ガラスにより形成されている。レンズ付き蓋体（１）は、蓋本体（２）が、筒体（２０）と、第１フランジ（２１）と、第２フランジ（２２）とを有している。第１フランジ（２１）は、筒体（２０）の第１端部（２０ａａ）から筒体（２０）の外方へ突出している。第２フランジ（２２）は、筒体（２０）の第２端部（２０ａｂ）から筒体（２０）の内方へ突出している。レンズ付き蓋体（１）は、レンズ（３）が、第２フランジ（２２）により囲まれた窓孔（２３）を塞ぐように第２フランジ（２２）に溶着されている。レンズ付き蓋体（１）の製造方法では、第１型（４）、第２型（５）、レンズ（３）の元になるレンズ素材（３０）、及び筒状の外枠（６）、を配置する第１ステップを備えている。第１型（４）は、筒体（２０）の内側に嵌め込まれる。第２型（５）は、筒体（２０）の第２端部（２０ａｂ）側で筒体（２０）の外側に位置させる。レンズ素材（３０）は、第１型（４）と第２型（５）との間に位置する。筒状の外枠（６）には、第２型（５）と蓋本体（２）とが嵌め込まれる。レンズ付き蓋体（１）の製造方法は、外枠（６）の外側からレンズ素材（３０）を加熱して溶融させてから冷却することによりレンズ（３）を成形し、且つレンズ（３）と第２フランジ（２２）とを溶着させる第２ステップを備えている。レンズ付き蓋体（１）の製造方法は、レンズ付き蓋体（１）を第１型（４）、第２型（５）及び外枠（６）から取り外す第３ステップを備えている。レンズ付き蓋体（１）の製造方法では、第１型（４）、第２型（５）及び外枠（６）の材料を窒化珪素とすることを特徴とする。これにより、本発明のレンズ付き蓋体の製造方法においては、歩留まりの向上を図ることが可能となる、という効果がある。 The manufacturing method of the lid body with a lens of this invention manufactures the lid body with a lens (1) provided with the lid body (2) and the lens (3). The lid body (2) is made of metal. The lens (3) is made of borosilicate glass. In the lid body with lens (1), the lid body (2) has a cylindrical body (20), a first flange (21), and a second flange (22). The first flange (21) protrudes outward from the first end (20aa) of the cylindrical body (20). The second flange (22) protrudes inward of the cylinder (20) from the second end (20ab) of the cylinder (20). The lens cover (1) is welded to the second flange (22) so that the lens (3) closes the window hole (23) surrounded by the second flange (22). In the manufacturing method of the lid with lens (1), the first mold (4), the second mold (5), the lens material (30) from which the lens (3) is based, and the cylindrical outer frame (6), The 1st step which arranges is provided. The first mold (4) is fitted inside the cylinder (20). The second mold (5) is positioned outside the cylinder (20) on the second end (20ab) side of the cylinder (20). The lens material (30) is located between the first mold (4) and the second mold (5). The second mold (5) and the lid body (2) are fitted into the cylindrical outer frame (6). The lens cover (1) is manufactured by heating the lens material (30) from the outside of the outer frame (6) to melt it and then cooling it to form the lens (3) and the lens (3). And a second step of welding the second flange (22). The manufacturing method of the lens-attached lid (1) includes a third step of removing the lens-attached lid (1) from the first mold (4), the second mold (5), and the outer frame (6). In the manufacturing method of the lens-attached lid (1), the material of the first mold (4), the second mold (5), and the outer frame (6) is silicon nitride. Thereby, in the manufacturing method of the lid body with a lens of this invention, there exists an effect that it becomes possible to aim at the improvement of a yield.
　このレンズ付き蓋体（１）の製造方法において、レンズ（３）は、非球面レンズ部（３１）と、ベース部（３２）とを有している。非球面レンズ部（３１）は、両凸型のレンズ形状をしている。ベース部（３２）は、非球面レンズ部（３１）の外周部（３１ａａ）から全周に亘って外方に突出している。レンズ（３）は、非球面レンズ部（３１）が窓孔（２３）に配置されている。レンズ（３）は、ベース部（３２）が第２フランジ（２２）に溶着されたものである。レンズ付き蓋体（１）の製造方法では、レンズ（３）は、レンズ素材（３０）の形状を球状としている。レンズ付き蓋体（１）の製造方法は、第１型（４）として、第２フランジ（２２）側の第１面（４１）が非球面レンズ部（３１）及びベース部（３２）の形状に対応したものを用意する。レンズ付き蓋体（１）の製造方法は、第２型（５）として、第２フランジ（２２）側の第２面（５１）が非球面レンズ部（３１）及び第２フランジ（２２）に対応したものを用意する。前記第１ステップでは、第２型（５）において第２フランジ（２２）に対応する部分を第２フランジ（２２）に接するように配置することが好ましい。 In this method of manufacturing the lid with lens (1), the lens (3) has an aspherical lens part (31) and a base part (32). The aspheric lens part (31) has a biconvex lens shape. The base part (32) protrudes outward from the outer peripheral part (31aa) of the aspherical lens part (31) over the entire circumference. The lens (3) has an aspheric lens portion (31) disposed in the window hole (23). The lens (3) has a base portion (32) welded to the second flange (22). In the manufacturing method of the lid body with lens (1), the lens (3) has a spherical lens material (30). In the manufacturing method of the lens-attached lid (1), as the first mold (4), the first surface (41) on the second flange (22) side is the shape of the aspheric lens part (31) and the base part (32). Prepare the one corresponding to. In the manufacturing method of the lens-attached lid (1), as the second mold (5), the second surface (51) on the second flange (22) side becomes the aspheric lens part (31) and the second flange (22). Prepare a compatible one. In the first step, the portion corresponding to the second flange (22) in the second mold (5) is preferably arranged so as to be in contact with the second flange (22).
　このレンズ付き蓋体（１）の製造方法において、レンズ素材（３０）の形状を真球状とすることが好ましい。 In this method of manufacturing the lid body with lens (1), it is preferable that the lens material (30) has a true spherical shape.
　本発明の好ましい実施形態をさらに詳細に記述する。本発明の他の特徴及び利点は、以下の詳細な記述及び添付図面に関連して一層良く理解されるものである。
図１Ａないし図１Ｆは、実施形態のレンズ付き蓋体の製造方法を説明するための主要工程断面図である。 図２は、実施形態におけるレンズ付き蓋体の概略断面図である。 図３は、実施形態におけるレンズ付き蓋体の概略斜視図である。 図４Ａ及び図４Ｂは、実施形態のレンズ付き蓋体の変形例の製造方法を説明するための主要工程断面図である。 図５は、実施形態のレンズ付き蓋体の製造方法に用いられる製造装置を説明するブロック図である。 Preferred embodiments of the invention are described in further detail. Other features and advantages of the present invention will be better understood with reference to the following detailed description and accompanying drawings.
1A to 1F are main process cross-sectional views for explaining a method of manufacturing a lens-attached lid body according to the embodiment. FIG. 2 is a schematic cross-sectional view of the lens-attached lid body according to the embodiment. FIG. 3 is a schematic perspective view of a lid body with a lens in the embodiment. 4A and 4B are main process cross-sectional views for explaining a manufacturing method of a modified example of the lid body with a lens according to the embodiment. FIG. 5 is a block diagram illustrating a manufacturing apparatus used in the method for manufacturing the lens-attached lid body according to the embodiment.
　以下では、まず、レンズ付き蓋体１について図２及び図３に基づいて説明し、その後、レンズ付き蓋体１の製造方法について図１に基づいて説明する。 Hereinafter, first, the lid 1 with a lens will be described with reference to FIGS. 2 and 3, and then the manufacturing method of the lid 1 with a lens will be described with reference to FIG. 1.
　レンズ付き蓋体１は、例えば、光電変換素子を収納するパッケージの一部に適用することができる。光電変換素子としては、電気エネルギを光に変換する発光素子や、光を電気エネルギに変換する受光素子等がある。発光素子としては、例えば、発光ダイオード、半導体レーザ等がある。受光素子としては、例えば、フォトダイオード、フォトトランジスタ等がある。レンズ３は、透過対象の波長の光（電磁波）に対する透過率が７０％以上であるのが好ましく、８０％以上であるのがより好ましい。 The lid 1 with a lens can be applied to, for example, a part of a package that houses a photoelectric conversion element. As the photoelectric conversion element, there are a light emitting element that converts electric energy into light, a light receiving element that converts light into electric energy, and the like. Examples of the light emitting element include a light emitting diode and a semiconductor laser. Examples of the light receiving element include a photodiode and a phototransistor. The lens 3 preferably has a transmittance of 70% or more, more preferably 80% or more, for light (electromagnetic wave) having a wavelength to be transmitted.
　レンズ付き蓋体１は、レンズ３の材料として硼珪酸ガラスを採用する。レンズ付き蓋体１は、特に、光電変換素子が紫外線を放射する発光素子の場合、硼珪酸ガラスのレンズ３を用いることで、発光素子から放射される光に対するレンズ３の透過率を８０％以上とすることが可能となる。 蓋 The lens cover 1 employs borosilicate glass as the material of the lens 3. When the photoelectric conversion element is a light emitting element that emits ultraviolet rays, the lens-equipped lid 1 uses a borosilicate glass lens 3 so that the transmittance of the lens 3 with respect to light emitted from the light emitting element is 80% or more. It becomes possible.
　レンズ付き蓋体１は、金属により形成された蓋本体２と、硼珪酸ガラスにより形成されたレンズ３とを備える。 The lid body 1 with a lens includes a lid body 2 made of metal and a lens 3 made of borosilicate glass.
　蓋本体２は、筒体２０と、筒体２０の第１端部２０ａａから外方へ突出した第１フランジ２１と、筒体２０の第２端部２０ａｂから内方へ突出した第２フランジ２２とを有する。筒体２０は、円筒状の形状としてある。筒体２０の外径は、８ｍｍに設定してある。筒体２０の外径は、この値に限定するものではない。筒体２０は、円筒状の形状だけに限らない。筒体２０は、筒状の形状であればよく、例えば、角筒状の形状でもよい。第１フランジ２１の外周形状は、円形状である。第１フランジ２１の外周形状は、円形状だけに限らない。第１フランジ２１の外周形状は、例えば、楕円形状や多角形状等でもよい。 The lid body 2 includes a cylindrical body 20, a first flange 21 protruding outward from the first end 20aa of the cylindrical body 20, and a second flange 22 protruding inward from the second end 20ab of the cylindrical body 20. And have. The cylinder 20 has a cylindrical shape. The outer diameter of the cylinder 20 is set to 8 mm. The outer diameter of the cylinder 20 is not limited to this value. The cylinder 20 is not limited to a cylindrical shape. The cylindrical body 20 only needs to have a cylindrical shape, and may be, for example, a rectangular cylindrical shape. The outer peripheral shape of the first flange 21 is circular. The outer peripheral shape of the first flange 21 is not limited to a circular shape. The outer peripheral shape of the first flange 21 may be, for example, an elliptical shape or a polygonal shape.
　蓋本体２は、第２フランジ２２により囲まれた窓孔２３を有している。レンズ３は、窓孔２３を塞ぐように第２フランジ２２に溶着されている。第２フランジ２２の内周形状は、円形状である。よって、窓孔２３は、円形状の孔である。窓孔２３の内径は、３ｍｍに設定してある。窓孔２３の内径は、この値に限定するものではない。第２フランジ２２の内周形状は、円形状だけに限られない。第２フランジ２２の内周形状は、例えば、楕円形状や多角形状等でもよい。 The lid body 2 has a window hole 23 surrounded by the second flange 22. The lens 3 is welded to the second flange 22 so as to close the window hole 23. The inner peripheral shape of the second flange 22 is a circular shape. Therefore, the window hole 23 is a circular hole. The inner diameter of the window hole 23 is set to 3 mm. The inner diameter of the window hole 23 is not limited to this value. The inner peripheral shape of the second flange 22 is not limited to a circular shape. The inner peripheral shape of the second flange 22 may be, for example, an elliptical shape or a polygonal shape.
　レンズ３は、非球面レンズ部３１と、ベース部３２とを有する。非球面レンズ部３１は、両凸レンズの形状をした両凸型としている。ベース部３２は、非球面レンズ部３１の外周部３１ａａから全周に亘って外方に突出している。ベース部３２は、円環状に形成されている。ベース部３２は、厚み寸法が一様であるのが好ましい。非球面レンズ部３１は、第１レンズ面３１ａと、第２レンズ面３１ｂとを備える。非球面レンズ部３１は、第１レンズ面３１ａが筒体２０の内側に位置している。非球面レンズ部３１は、第２レンズ面３１ｂが蓋本体２の外側に位置している。第１レンズ面３１ａは、非球面の第１凸曲面である。第１凸曲面は、曲率が連続的に変化している。第２レンズ面３１ｂは、非球面の第２凸曲面である。第２凸曲面は、曲率が連続的に変化している。第１レンズ面３１ａと第２レンズ面３１ｂとは、同じ形状でもよいし、異なる形状でもよい。 The lens 3 has an aspheric lens part 31 and a base part 32. The aspheric lens unit 31 is a biconvex lens having the shape of a biconvex lens. The base part 32 protrudes outward from the outer peripheral part 31aa of the aspherical lens part 31 over the entire circumference. The base portion 32 is formed in an annular shape. The base portion 32 preferably has a uniform thickness dimension. The aspheric lens unit 31 includes a first lens surface 31a and a second lens surface 31b. As for the aspherical lens part 31, the 1st lens surface 31a is located inside the cylinder 20. As shown in FIG. As for the aspherical lens part 31, the 2nd lens surface 31b is located in the outer side of the lid body 2. FIG. The first lens surface 31a is an aspherical first convex curved surface. The curvature of the first convex curved surface changes continuously. The second lens surface 31b is an aspherical second convex curved surface. The curvature of the second convex curved surface changes continuously. The first lens surface 31a and the second lens surface 31b may have the same shape or different shapes.
　レンズ３は、非球面レンズ部３１が窓孔２３に配置されている。レンズ３は、ベース部３２が第２フランジ２２に溶着されている。ベース部３２は、第２フランジ２２の厚み方向の一面の全周に亘って第２フランジ２２と溶着されている。ベース部３２は、非球面レンズ部３１の径方向に沿った方向の幅寸法が大きいほうが好ましい。要するに、レンズ付き蓋体１は、ベース部３２の幅寸法と第２フランジ２２の幅寸法とが略同じであるのが好ましい。これにより、レンズ付き蓋体１は、接合信頼性及び気密性を、より向上させることが可能となる。ここで、レンズ付き蓋体１の気密性とは、蓋本体２とレンズ３との接合部位の気密性を意味する。 The lens 3 has an aspheric lens portion 31 disposed in the window hole 23. The lens 3 has a base portion 32 welded to the second flange 22. The base portion 32 is welded to the second flange 22 over the entire circumference of one surface in the thickness direction of the second flange 22. The base portion 32 preferably has a larger width dimension in the direction along the radial direction of the aspheric lens portion 31. In short, it is preferable for the lid body with lens 1 that the width dimension of the base portion 32 and the width dimension of the second flange 22 are substantially the same. Thereby, the cover body 1 with a lens can improve joining reliability and airtightness more. Here, the airtightness of the lens-attached lid body 1 means the airtightness of the joint portion between the lid body 2 and the lens 3.
　よって、レンズ付き蓋体１を備えたパッケージは、このパッケージの気密性を高めることが可能となり、長寿命化を図ることが可能となる。レンズ付き蓋体１を適用するパッケージは、例えば、ＣＡＮパッケージ、表面実装型のパッケージ、その他の種々の形態のパッケージ等が挙げられるが、特に限定するものではない。 Therefore, the package including the lens-equipped lid 1 can improve the hermeticity of the package and can extend the life. Examples of the package to which the lens-equipped lid 1 is applied include a CAN package, a surface-mount package, and other various forms of packages, but are not particularly limited.
　レンズ付き蓋体１は、レンズ３の材料である硼珪酸ガラスの線膨張係数よりも蓋本体２の材料である金属の線膨張係数が大きい。ここで、レンズ付き蓋体１は、硼珪酸ガラスと金属との線膨張係数差が小さいほうが好ましい。これにより、レンズ付き蓋体１は、レンズ３と蓋本体２との線膨張係数差に起因してレンズ３に発生する応力を低減することが可能となる。 The lens-equipped lid 1 has a larger linear expansion coefficient of the metal that is the material of the lid body 2 than the linear expansion coefficient of the borosilicate glass that is the material of the lens 3. Here, as for the cover body 1 with a lens, the one where the linear expansion coefficient difference with a borosilicate glass and a metal is small is preferable. Thereby, the cover body 1 with a lens can reduce the stress which generate | occur | produces in the lens 3 resulting from the linear expansion coefficient difference of the lens 3 and the cover main body 2. FIG.
　レンズ付き蓋体１は、例えば、２３０ｎｍ～３５０ｎｍの紫外波長領域で発光する発光素子のパッケージに適用する場合、発光素子から放射される紫外線に対する透過率が８０％以上の硼珪酸ガラスを採用することが好ましい。このような硼珪酸ガラスとしては、例えば、ＳＣＨＯＴＴ社製の製品名Ｇｌａｓｓ　８３３７Ｂ等を採用することができる。この硼珪酸ガラスは、線膨張係数が４．１×１０-6Ｋ-1、粘度が１０7.6ｄＰａ・ｓとなる温度が７０５℃である。 For example, when the lid 1 with a lens is applied to a package of a light emitting element that emits light in an ultraviolet wavelength region of 230 nm to 350 nm, borosilicate glass having a transmittance of 80% or more for ultraviolet rays emitted from the light emitting element is adopted. Is preferred. As such a borosilicate glass, for example, a product name Glass 8337B manufactured by SCHOTT Corporation can be adopted. This borosilicate glass has a linear expansion coefficient of 4.1 × 10 −6 K −1 and a temperature at which the viscosity is 10 7.6 dPa · s is 705 ° C.
　蓋本体２の材料である金属としては、ステンレス鋼を採用している。ステンレス鋼としては、例えば、フェライト系ステンレス鋼等を採用することができる。フェライト系ステンレス鋼としては、例えば、下村特殊精工株式会社の製品名ＳＦ２０Ｔ等を採用することができる。このフェライト系ステンレス鋼の線膨張係数は、例えば、１０．４×１０-6Ｋ-1である。蓋本体２の材料である金属は、ステンレス鋼に限らず、例えば、コバール（Kovar）を採用することができる。コバールは、鉄にニッケル、コバルトを配合した合金である。コバールの成分比の一例は、重量％で、鉄：５３．５重量％、ニッケル：２９重量％、コバルト：１７重量％、シリコン：０．２重量％、マンガン：０．３重量％、である。このような成分比のコバールの線膨張係数は、５×１０-6Ｋ-1である。コバールの成分比は、特に限定するものではない。コバールは、線膨張係数が硼珪酸ガラスの線膨張係数よりも小さくなるような成分比のものを採用することができる。蓋本体２は、金属がコバールの場合、この金属からなる母体の表面を酸化することにより酸化膜が形成されたものでもよい。 As the metal that is the material of the lid body 2, stainless steel is adopted. As stainless steel, for example, ferritic stainless steel can be employed. As the ferritic stainless steel, for example, the product name SF20T manufactured by Shimomura Special Seiko Co., Ltd. can be used. The linear expansion coefficient of this ferritic stainless steel is, for example, 10.4 × 10 −6 K −1 . The metal that is the material of the lid body 2 is not limited to stainless steel, and for example, Kovar can be used. Kovar is an alloy containing iron and nickel. An example of the component ratio of Kovar is, by weight, iron: 53.5% by weight, nickel: 29% by weight, cobalt: 17% by weight, silicon: 0.2% by weight, manganese: 0.3% by weight. . The linear expansion coefficient of Kovar having such a component ratio is 5 × 10 −6 K −1 . The component ratio of Kovar is not particularly limited. Kovar having a component ratio such that the linear expansion coefficient is smaller than the linear expansion coefficient of borosilicate glass can be employed. When the metal is Kovar, the lid main body 2 may be one in which an oxide film is formed by oxidizing the surface of a base made of this metal.
　以下では、レンズ付き蓋体１の製造方法について、図１に基づいて説明する。 Below, the manufacturing method of the cover body 1 with a lens is demonstrated based on FIG.
　レンズ付き蓋体１の製造にあたっては、第１ステップ、第２ステップ及び第３ステップを順次行う。 In manufacturing the lid body with lens 1, the first step, the second step, and the third step are sequentially performed.
　第１ステップでは、まず、筒体２０に第１型４を嵌め込む。第１ステップでは、その後、レンズ３の元になるレンズ素材３０を第１型４における第２フランジ２２側の第１面４１側に載せ置く。第１ステップは、その後、筒状の外枠６に蓋本体２を嵌め込む（図１Ａ）。第１ステップは、続いて、外枠６に第２型５を嵌め込む（図１Ｂ）。 In the first step, first, the first mold 4 is fitted into the cylinder 20. In the first step, the lens material 30 that is the basis of the lens 3 is then placed on the first surface 41 side of the first mold 4 on the second flange 22 side. In the first step, the lid body 2 is then fitted into the cylindrical outer frame 6 (FIG. 1A). In the first step, the second mold 5 is subsequently fitted into the outer frame 6 (FIG. 1B).
　要するに、第１ステップでは、蓋本体２、第１型４、第２型５、レンズ３の元になるレンズ素材３０、及び筒状の外枠６、を配置する。第１型４は、蓋本体２の筒体２０の内側に嵌め込まれる。第２型５は、筒体２０の第２端部２０ａｂ側で筒体２０の外側に位置させる。レンズ３の元になるレンズ素材３０は、第１型４と第２型５との間に位置させる。筒状の外枠６は、第２型５と蓋本体２とが嵌め込まれる。なお、本実施形態のレンズ付き蓋体１の製造方法では、第１型４を下型とし、第２型５を上型とする。第１型４は、ステージ７に保持されている。第１型４は、ステージ７の上面を含む平面に対して上下方向に移動可能となっている。本実施形態のレンズ付き蓋体１の製造方法では、例えば、図５に示す製造装置１１を用いてレンズ付き蓋体１を製造することができる。製造装置１１は、第１駆動装置１４と、第２駆動装置１５と、加熱装置１６と、コントローラ１７とを備えている。また、製造装置１１は、レンズ素材３０を第１型４の第１面４１に供給可能な供給部１８を備えていることが好ましい。製造装置１１は、コントローラ１７により第１駆動装置１４、第２駆動装置１５、加熱装置１６や供給部１８の駆動を制御する。第１型４は、第１駆動装置１４により上下方向に移動される。第１駆動装置１４としては、例えば、エアシリンダや油圧シリンダ等が挙げられる。また、第２型５及び外枠６は、第２駆動装置１５によりそれぞれ各別に上下方向に移動される。第２駆動装置１５としては、例えば、エアシリンダや油圧シリンダ等が挙げられる。また、本明細書では、第１型４と第２型５と外枠６とを併せて成形型と称する。製造装置１１は、筒体２０やレンズ素材３０を成形型内に適宜に配置して自動的に加工することができるように構成している。 In short, in the first step, the lid body 2, the first mold 4, the second mold 5, the lens material 30 that is the basis of the lens 3, and the cylindrical outer frame 6 are arranged. The first mold 4 is fitted inside the cylindrical body 20 of the lid body 2. The second mold 5 is positioned outside the cylinder 20 on the second end 20ab side of the cylinder 20. The lens material 30 that is the base of the lens 3 is positioned between the first mold 4 and the second mold 5. The cylindrical outer frame 6 is fitted with the second mold 5 and the lid body 2. In the manufacturing method of the lens-equipped lid body 1 of the present embodiment, the first mold 4 is a lower mold and the second mold 5 is an upper mold. The first mold 4 is held on the stage 7. The first mold 4 is movable in the vertical direction with respect to a plane including the upper surface of the stage 7. In the manufacturing method of the lid body 1 with a lens of this embodiment, the lid body 1 with a lens can be manufactured using the manufacturing apparatus 11 shown in FIG. 5, for example. The manufacturing apparatus 11 includes a first driving device 14, a second driving device 15, a heating device 16, and a controller 17. The manufacturing apparatus 11 preferably includes a supply unit 18 that can supply the lens material 30 to the first surface 41 of the first mold 4. In the manufacturing apparatus 11, the controller 17 controls driving of the first driving device 14, the second driving device 15, the heating device 16, and the supply unit 18. The first mold 4 is moved in the vertical direction by the first driving device 14. Examples of the first drive device 14 include an air cylinder and a hydraulic cylinder. Further, the second mold 5 and the outer frame 6 are individually moved in the vertical direction by the second driving device 15. Examples of the second driving device 15 include an air cylinder and a hydraulic cylinder. Moreover, in this specification, the 1st type | mold 4, the 2nd type | mold 5, and the outer frame 6 are collectively called a shaping | molding die. The manufacturing apparatus 11 is configured so that the cylindrical body 20 and the lens material 30 can be appropriately arranged in a mold and processed automatically.
　第１型４としては、第２フランジ２２側の第１面４１が非球面レンズ部３１及びベース部３２の形状に対応したものを予め用意する。第１型４は、非球面レンズ部３１の第１レンズ面３１ａ及びベース部３２の露出面３２ａを成形する機能を有する。第１型４は、筒体２０の内側に嵌るように側面の形状を筒体２０の内側面に沿った形状に設計してある。このため、第１型４は、円柱状の形状に形成されている。第１型４は、第２フランジ２２側の第１面４１の中央部に第１の凹曲面４１ａが形成されている。第１の凹曲面４１ａは、非球面レンズ部３１の第１レンズ面３１ａの所定形状に合致する形状に形成されている。第１型４は、第１面４１における第１の凹曲面４１ａの周部４１ｂが第２フランジ２２との間に所定ギャップが形成されるように配置する。所定ギャップは、例えば、レンズ３のベース部３２の所望の厚み寸法に設定すればよい。第１型４は、第１面４１が成形面である。なお、第２フランジ２２において、レンズ３が溶着される面は、鏡面であるのが好ましい。これにより、レンズ付き蓋体１の製造方法では、ベース部３２と第２フランジ２２との接合部位の気密性を向上させることが可能となる。鏡面とは、鏡面研磨されている面を意味する。第２フランジ２２において、レンズ３が溶着される面は、例えば、ＪＩＳ　Ｂ　０６０１－２００１やＩＳＯ　４２８７－１９９７で規定されている算術平均粗さＲａが１０ｎｍ以下であることが好ましく、数ｎｍ以下であることが、より好ましい。 The first mold 4 is prepared in advance so that the first surface 41 on the second flange 22 side corresponds to the shape of the aspherical lens part 31 and the base part 32. The first mold 4 has a function of molding the first lens surface 31 a of the aspheric lens part 31 and the exposed surface 32 a of the base part 32. In the first mold 4, the shape of the side surface is designed to fit along the inner surface of the cylindrical body 20 so as to fit inside the cylindrical body 20. For this reason, the 1st type | mold 4 is formed in the column-shaped shape. In the first mold 4, a first concave curved surface 41 a is formed at the center of the first surface 41 on the second flange 22 side. The first concave curved surface 41 a is formed in a shape that matches a predetermined shape of the first lens surface 31 a of the aspheric lens portion 31. The first mold 4 is arranged such that a predetermined gap is formed between the peripheral portion 41 b of the first concave curved surface 41 a on the first surface 41 and the second flange 22. The predetermined gap may be set to a desired thickness dimension of the base portion 32 of the lens 3, for example. In the first mold 4, the first surface 41 is a molding surface. In the second flange 22, the surface to which the lens 3 is welded is preferably a mirror surface. Thereby, in the manufacturing method of the cover body 1 with a lens, it becomes possible to improve the airtightness of the junction part of the base part 32 and the 2nd flange 22. FIG. The mirror surface means a surface that is mirror-polished. In the second flange 22, the surface to which the lens 3 is welded preferably has an arithmetic average roughness Ra defined by, for example, JIS B 0601-2001 or ISO 4287-1997 of 10 nm or less, and several nm or less. More preferably.
　レンズ素材３０の材料は、硼珪酸ガラスである。レンズ素材３０の材料である硼珪酸ガラスは、屈伏点及び融点が低いものが好ましい。これにより、レンズ付き蓋体１の製造方法では、レンズ３における非球面レンズ部３１の第１レンズ面３１ａ及び第２レンズ面３１ｂの形状精度の高精度化を図ることが可能となる。レンズ素材３０の材料である硼珪酸ガラスは、透過対象の光に対する透過率が高いほうが好ましい。 The material of the lens material 30 is borosilicate glass. The borosilicate glass that is the material of the lens material 30 is preferably one having a low yield point and a low melting point. Thereby, in the manufacturing method of the cover body 1 with a lens, it becomes possible to increase the shape accuracy of the first lens surface 31a and the second lens surface 31b of the aspheric lens portion 31 in the lens 3. It is preferable that the borosilicate glass that is the material of the lens material 30 has a high transmittance with respect to light to be transmitted.
　レンズ素材３０の形状は、球状としていることが好ましい。球状のレンズ素材３０は、例えば、円柱状にプリフォームされた硼珪酸ガラス製の円柱部材を所定の厚みでスライスした円板状の塊を球状に成形することで形成することができる。球状のレンズ素材３０の成形方法は、特に限定するものではない。球状のレンズ素材３０は、真球状であるのが、より好ましい。レンズ素材３０は、真球状のレンズ素材３０を用いることにより、レンズ素材３０の体積の管理が容易になり、且つ、体積の精度を高めることが可能となる。よって、レンズ付き蓋体１の製造方法においては、真球状のレンズ素材３０を用いることにより、レンズ３の形状精度の向上を図ることが可能となる。つまり、レンズ付き蓋体１の製造方法においては、レンズ３の非球面レンズ部３１の形状精度を向上させることが可能となる。 The shape of the lens material 30 is preferably spherical. The spherical lens material 30 can be formed, for example, by forming a disk-shaped lump obtained by slicing a cylindrical member made of borosilicate glass preformed into a cylindrical shape into a spherical shape. The molding method of the spherical lens material 30 is not particularly limited. The spherical lens material 30 is more preferably spherical. By using the spherical lens material 30, the lens material 30 can easily manage the volume of the lens material 30, and can improve the accuracy of the volume. Therefore, in the manufacturing method of the lid body with lens 1, it is possible to improve the shape accuracy of the lens 3 by using the true spherical lens material 30. That is, in the manufacturing method of the lid body with lens 1, it is possible to improve the shape accuracy of the aspheric lens portion 31 of the lens 3.
　レンズ素材３０は、図１Ａに示すように、球状の形状とし、その直径を窓孔２３の内径よりも小さく設定することが好ましい。レンズ素材３０は、窓孔２３の内径よりも小さい直径の球状にすることにより、レンズ素材３０の自重により第１型４の第１面４１における第１の凹曲面４１ａの中心線上にレンズ素材３０の中心が位置するようにセルフアライメントされる。これにより、レンズ付き蓋体１の製造方法では、第１型４に対するレンズ素材３０の位置決め精度を高めることが可能となる。 The lens material 30 preferably has a spherical shape as shown in FIG. 1A and its diameter is set smaller than the inner diameter of the window hole 23. The lens material 30 is formed in a spherical shape having a diameter smaller than the inner diameter of the window hole 23, so that the lens material 30 is placed on the center line of the first concave curved surface 41 a in the first surface 41 of the first mold 4 by the weight of the lens material 30. Is self-aligned so that the center of Thereby, in the manufacturing method of the cover body 1 with a lens, the positioning accuracy of the lens material 30 with respect to the 1st type | mold 4 can be improved.
　レンズ素材３０は、その直径を、例えば、レンズ３の所望の厚み寸法に設定すればよい。レンズ３の所望の厚み寸法とは、レンズ３の中心線上でのレンズ３の厚み寸法である。なお、レンズ素材３０は、球状に限らず、例えば、円板状等の板状としてもよい。 The diameter of the lens material 30 may be set to a desired thickness dimension of the lens 3, for example. The desired thickness dimension of the lens 3 is the thickness dimension of the lens 3 on the center line of the lens 3. The lens material 30 is not limited to a spherical shape, and may be a plate shape such as a disk shape.
　外枠６は、内周形状が筒体２０の外周形状及び第２型５の外周形状に合致する筒状であればよく、円筒状の形状としてある。外枠６は、第１型４の中心軸と第２型５の中心軸とを一直線上に揃える機能を有することができる。また、外枠６は、蓋本体２、第１型４及び第２型５を保持する機能を有する。 The outer frame 6 may have a cylindrical shape whose inner peripheral shape matches the outer peripheral shape of the cylindrical body 20 and the outer peripheral shape of the second mold 5, and has a cylindrical shape. The outer frame 6 can have a function of aligning the central axis of the first mold 4 and the central axis of the second mold 5 on a straight line. The outer frame 6 has a function of holding the lid body 2, the first mold 4, and the second mold 5.
　第２型５としては、第２フランジ２２側の第２面５１が非球面レンズ部３１及び第２フランジ２２に対応したものを予め用意する。第２型５は、非球面レンズ部３１の第２レンズ面３１ｂを成形する機能を有する。第２型５は、外枠６の内側に嵌るように側面の形状を筒体２０の外側面に沿った形状に設計してある。このため、第２型５は、円柱状の形状に形成されている。ここで、第２型５の外径寸法は、筒体２０の外径寸法と同じ値に設定してある。第２型５は、第２フランジ２２側の第２面５１の中央部に第２の凹曲面５１ａが形成されている。第２の凹曲面５１ａは、非球面レンズ部３１の第２レンズ面３１ｂの所定形状に合致する形状に形成されている。第２型５は、第２面５１における第２の凹曲面５１ａの周部が第２フランジ２２に接するように配置するのが好ましい。第２型５は、この第２型５において第２フランジ２２に対応する部分が第２フランジ２２と接するように配置するのが好ましい。第２型５は、第２面５１の第２の凹曲面５１ａが成形面である。成形型では、第１型４と第２型５との間隔をレンズ素材３０により規定することが可能となる。 The second mold 5 is prepared in advance so that the second surface 51 on the second flange 22 side corresponds to the aspheric lens part 31 and the second flange 22. The second mold 5 has a function of molding the second lens surface 31b of the aspheric lens unit 31. In the second mold 5, the shape of the side surface is designed to fit along the outer surface of the cylindrical body 20 so as to fit inside the outer frame 6. For this reason, the 2nd type | mold 5 is formed in the column-shaped shape. Here, the outer diameter dimension of the second mold 5 is set to the same value as the outer diameter dimension of the cylindrical body 20. In the second mold 5, a second concave curved surface 51 a is formed at the center of the second surface 51 on the second flange 22 side. The second concave curved surface 51 a is formed in a shape that matches a predetermined shape of the second lens surface 31 b of the aspheric lens portion 31. The second mold 5 is preferably arranged so that the peripheral portion of the second concave curved surface 51 a on the second surface 51 is in contact with the second flange 22. The second mold 5 is preferably arranged so that a portion of the second mold 5 corresponding to the second flange 22 is in contact with the second flange 22. In the second mold 5, the second concave curved surface 51 a of the second surface 51 is a molding surface. In the mold, the distance between the first mold 4 and the second mold 5 can be defined by the lens material 30.
　第１型４、第２型５及び外枠６は、セラミックスの一種である窒化珪素により形成されている。 The first mold 4, the second mold 5 and the outer frame 6 are made of silicon nitride which is a kind of ceramics.
　第１型４、第２型５及び外枠６は、線膨張係数が同じであるのが好ましい。第１型４、第２型５及び外枠６の材料である窒化珪素の線膨張係数は、レンズ３の材料である硼珪酸ガラスの線膨張係数よりも小さい。第１型４、第２型５及び外枠６の材料である窒化珪素の線膨張係数は、１．６×１０-6Ｋ-1である。第１型４は、レンズ付き蓋体１の離型性を向上させる観点から、第１面４１に貴金属の被膜が設けられているのが好ましい。同様に、第２型５は、第２面５１に貴金属の被膜が設けられているのが好ましい。これらにより、レンズ付き蓋体１の製造方法では、レンズ付き蓋体１の離型性を向上させることが可能となる。貴金属としては、例えば、Ｐｔ等を採用することができる。 The first mold 4, the second mold 5 and the outer frame 6 preferably have the same linear expansion coefficient. The linear expansion coefficient of silicon nitride that is the material of the first mold 4, the second mold 5, and the outer frame 6 is smaller than the linear expansion coefficient of borosilicate glass that is the material of the lens 3. The linear expansion coefficient of silicon nitride, which is the material of the first mold 4, the second mold 5, and the outer frame 6, is 1.6 × 10 −6 K −1 . The first mold 4 is preferably provided with a noble metal coating on the first surface 41 from the viewpoint of improving the releasability of the lens-equipped lid 1. Similarly, the second mold 5 is preferably provided with a noble metal film on the second surface 51. By these, in the manufacturing method of the cover body 1 with a lens, it becomes possible to improve the mold release property of the cover body 1 with a lens. For example, Pt or the like can be adopted as the noble metal.
　第２ステップでは、外枠６の外側からレンズ素材３０を加熱して軟化させてから冷却することによりレンズ３を成型し且つレンズ３と第２フランジ２２とを溶着させる（図１Ｃ）。第２ステップでは、成形型を加熱することでレンズ素材３０を加熱する。第２ステップでは、レンズ素材３０が屈伏点以上の所定温度となるように成形型を前記所定温度以上の規定温度まで昇温している。第２ステップでは、前記規定温度に加熱された状態を規定時間だけ維持した後、成形型の冷却を開始する。成形型の加熱は、不活性ガスの雰囲気中で行うのが好ましい。不活性ガスとしては、例えば、窒素ガスを採用することができる。不活性ガスは、窒素ガスに限らず、例えば、アルゴンガス等でもよい。成形型の加熱を行う加熱装置１６としては、例えば、トンネル炉、オーブン、ホットプレート、高周波加熱装置などを採用することができる。前記所定温度は、例えば、レンズ素材３０の屈伏点が６００℃の場合、６２０℃に設定すればよいが、特に限定するものではない。また、前記規定時間は、例えば、１５～１２０秒程度の範囲で適宜設定すればよい。また、第２ステップでは、レンズ素材３０を冷却する場合、レンズ３のひけ（sink mark）や歪を抑制するために、徐冷するのが好ましい。第２ステップでは、徐冷する場合、例えば、冷却速度を５～３０℃／ｍｉｎ程度の範囲で設定すればよい。また、成形型の冷却を終了する温度は、例えば、常温でもよいが、生産性を向上させる観点から、例えば、１００℃程度としてもよい。 In the second step, the lens material 30 is heated from the outside of the outer frame 6 to be softened and then cooled to mold the lens 3 and weld the lens 3 and the second flange 22 (FIG. 1C). In the second step, the lens material 30 is heated by heating the mold. In the second step, the mold is heated up to a specified temperature equal to or higher than the predetermined temperature so that the lens material 30 has a predetermined temperature equal to or higher than the yield point. In the second step, after maintaining the state heated to the specified temperature for a specified time, cooling of the mold is started. The mold is preferably heated in an inert gas atmosphere. For example, nitrogen gas can be employed as the inert gas. The inert gas is not limited to nitrogen gas, and may be argon gas, for example. As the heating device 16 for heating the mold, for example, a tunnel furnace, an oven, a hot plate, a high-frequency heating device, or the like can be employed. For example, when the yield point of the lens material 30 is 600 ° C., the predetermined temperature may be set to 620 ° C., but is not particularly limited. Further, the specified time may be appropriately set within a range of about 15 to 120 seconds, for example. Further, in the second step, when the lens material 30 is cooled, it is preferable to cool it slowly in order to suppress sink marks and distortion of the lens 3. In the second step, when cooling slowly, for example, the cooling rate may be set in the range of about 5 to 30 ° C./min. Further, the temperature at which the cooling of the mold is finished may be, for example, room temperature, but may be, for example, about 100 ° C. from the viewpoint of improving productivity.
　第２ステップでは、外枠６がセラミックの一種である窒化珪素により形成されているので、外枠６がグラファイトにより形成されている場合に比べて、外枠６の内側面側の最表面部がグラファイトのごとく蓋本体２に転写されるのを抑制することが可能となる。よって、レンズ付き蓋体１の製造方法では、外枠６の劣化を抑制することが可能となり、外枠６の長寿命化を図ることが可能となる。 In the second step, since the outer frame 6 is formed of silicon nitride, which is a kind of ceramic, the outermost surface portion on the inner surface side of the outer frame 6 is compared with the case where the outer frame 6 is formed of graphite. It is possible to suppress the transfer to the lid body 2 like graphite. Therefore, in the manufacturing method of the lid body 1 with a lens, it is possible to suppress the deterioration of the outer frame 6 and to extend the life of the outer frame 6.
　第２ステップでは、レンズ素材３０が球状の場合、レンズ素材３０が板状の場合に比べて気泡が抜けやすく、レンズ３や、レンズ３と筒体２０との接合部位付近に気泡が発生するのを抑制することが可能となる。これにより、レンズ付き蓋体１の製造方法では、気泡に起因したレンズ３の透過率の低下や、気密性の低下を抑制することが可能となる。 In the second step, when the lens material 30 is spherical, bubbles are more easily removed than when the lens material 30 is plate-shaped, and bubbles are generated in the vicinity of the lens 3 and the joint portion between the lens 3 and the cylindrical body 20. Can be suppressed. Thereby, in the manufacturing method of the cover body 1 with a lens, it becomes possible to suppress the fall of the transmittance | permeability of the lens 3 resulting from a bubble, and the fall of airtightness.
　第３ステップでは、レンズ付き蓋体１を第１型４、第２型５及び外枠６から取り外す（図１Ｄ～図１Ｆ）。要するに、第３ステップでは、離型を行う。この第３ステップでは、例えば、第２型５及び外枠６をレンズ付き蓋体１から離れるように上方向に移動させる（図１Ｄ）。第３ステップでは、その後、第１型４をステージ７に収納するように下方向に移動させて第１型４をレンズ付き蓋体１から取り外せばよい（図１Ｅ、図１Ｆ）。その後は、ステージ７上のレンズ付き蓋体１を、ロボット、ピックアップツール、手等により取ればよい。本実施形態のレンズ付き蓋体１の製造方法では、〔筒体２０の線膨張係数〕＞〔硼珪酸ガラスの線膨張係数〕＞〔外枠６の線膨張係数〕の関係を満たしている。レンズ付き蓋体１の製造方法では、図１Ｄ～図１Ｆの状態で、レンズ付き蓋体１における筒体２０の外側面と外枠６の内側面との間に隙間が発生している。このため、レンズ付き蓋体１を外枠６から簡単に取り外すことが可能となる。 In the third step, the lens cover 1 is removed from the first mold 4, the second mold 5 and the outer frame 6 (FIGS. 1D to 1F). In short, in the third step, release is performed. In this third step, for example, the second mold 5 and the outer frame 6 are moved upward so as to be separated from the lens cover 1 (FIG. 1D). In the third step, after that, the first mold 4 is moved downward so as to be housed in the stage 7, and the first mold 4 is removed from the lens cover 1 (FIGS. 1E and 1F). Thereafter, the lens-equipped lid 1 on the stage 7 may be removed by a robot, a pickup tool, a hand, or the like. In the manufacturing method of the lens-equipped lid body 1 of the present embodiment, the relationship of [linear expansion coefficient of the cylindrical body 20]> [linear expansion coefficient of borosilicate glass]> [linear expansion coefficient of the outer frame 6] is satisfied. In the manufacturing method of the lens cover 1, a gap is generated between the outer surface of the cylinder 20 and the inner surface of the outer frame 6 in the lens cover 1 in the state shown in FIGS. 1D to 1F. For this reason, it becomes possible to remove the lid body 1 with a lens from the outer frame 6 easily.
　以上説明したレンズ付き蓋体１の製造方法では、上述の第１ステップと、第２ステップと、第３ステップとを備え、第１型４、第２型５及び外枠６の材料を窒化珪素とする。これにより、レンズ付き蓋体１の製造方法では、蓋本体２の変形を抑制でき、第１型４、第２型５及び外枠６から容易に取り外すことが可能となる。また、本実施形態のレンズ付き蓋体１の製造方法では、冷却時にレンズ３にかかる応力により、レンズ３に割れが発生したり、気密性が低下したりするのを抑制することが可能となる。 The manufacturing method of the lens-equipped lid body 1 described above includes the first step, the second step, and the third step described above, and the material of the first mold 4, the second mold 5, and the outer frame 6 is silicon nitride. And Thereby, in the manufacturing method of the cover body 1 with a lens, a deformation | transformation of the cover main body 2 can be suppressed, and it becomes possible to remove from the 1st type | mold 4, the 2nd type | mold 5, and the outer frame 6 easily. Moreover, in the manufacturing method of the lens-equipped lid body 1 according to the present embodiment, it is possible to prevent the lens 3 from being cracked or having hermeticity deteriorated due to the stress applied to the lens 3 during cooling. .
　レンズ付き蓋体１の構造及びその製造方法は、図１で説明した形態に限らない。例えば、レンズ付き蓋体１の製造方法では、図４Ａに示すように、第１ステップにおいて直径が窓孔２３の内径よりも大きい球状のレンズ素材３０を第１の凹曲面４１ａ上に配置してもよい。レンズ付き蓋体１の製造方法は、その後、図４Ｂに示すように、第２ステップにおいてレンズ３を成形し且つレンズ３と第２フランジ２２とを溶着させるようにしてもよい。図４で説明するレンズ付き蓋体１の製造方法では、図１で説明したレンズ付き蓋体１の製造方法と同様に、図５に示す製造装置１１を用いることができる。 The structure of the lid body 1 with a lens and the manufacturing method thereof are not limited to the form described in FIG. For example, in the manufacturing method of the lid body 1 with a lens, as shown in FIG. 4A, in the first step, a spherical lens material 30 having a diameter larger than the inner diameter of the window hole 23 is arranged on the first concave curved surface 41a. Also good. As shown in FIG. 4B, the manufacturing method of the lid body 1 with a lens may thereafter form the lens 3 and weld the lens 3 and the second flange 22 in the second step. In the manufacturing method of the lid body with a lens 1 described with reference to FIG. 4, the manufacturing apparatus 11 illustrated in FIG. 5 can be used similarly to the manufacturing method of the lid body with a lens 1 described with reference to FIG. 1.
　上述の実施形態では、非球面レンズ部３１の形状が両凸型の非球面レンズの形状である場合について説明したが、これに限らない。レンズ付き蓋体１の製造方法では、例えば、非球面レンズ部３１の形状を平凸型や平凹型の非球面レンズの形状に形成してもよい。 In the above-described embodiment, the case where the shape of the aspherical lens portion 31 is the shape of a biconvex aspherical lens has been described, but the present invention is not limited thereto. In the manufacturing method of the lid body with lens 1, for example, the shape of the aspheric lens portion 31 may be formed into a plano-convex or plano-concave aspheric lens shape.
　なお、上述の実施形態において説明した各図は、模式的なものであり、各構成要素の大きさや厚さそれぞれの比が、必ずしも実際のものの寸法比を反映しているとは限らない。 In addition, each figure demonstrated in the above-mentioned embodiment is a typical thing, and ratio of each magnitude | size and thickness of each component does not necessarily reflect the dimensional ratio of an actual thing.

Claims (3)

  1. 　金属により形成された蓋本体と、硼珪酸ガラスにより形成されたレンズとを備え、前記蓋本体が、筒体と、前記筒体の第１端部から外方へ突出した第１フランジと、前記筒体の第２端部から内方へ突出した第２フランジとを有し、前記レンズが、前記第２フランジにより囲まれた窓孔を塞ぐように前記第２フランジに溶着されているレンズ付き蓋体の製造方法であって、前記筒体の内側に嵌め込まれる第１型、前記筒体の前記第２端部側で前記筒体の外側に位置させる第２型、前記第１型と前記第２型との間に位置し前記レンズの元になるレンズ素材、及び前記第２型と前記蓋本体とが嵌め込まれる筒状の外枠、を配置する第１ステップと、前記外枠の外側から前記レンズ素材を加熱して溶融させてから冷却することにより前記レンズを成形し且つ前記レンズと前記第２フランジとを溶着させる第２ステップと、前記レンズ付き蓋体を前記第１型、前記第２型及び前記外枠から取り外す第３ステップとを備え、前記第１型、前記第２型及び前記外枠の材料を窒化珪素とすることを特徴とするレンズ付き蓋体の製造方法。 A lid body made of metal and a lens made of borosilicate glass, wherein the lid body has a cylindrical body, a first flange projecting outward from a first end of the cylindrical body, and And a second flange projecting inward from the second end of the cylindrical body, and the lens is welded to the second flange so as to close a window hole surrounded by the second flange A method of manufacturing a lid, wherein the first mold is fitted inside the cylinder, the second mold is positioned outside the cylinder on the second end side of the cylinder, the first mold and the A first step of disposing a lens material positioned between the second mold and the lens, and a cylindrical outer frame into which the second mold and the lid body are fitted; and an outer side of the outer frame The lens material is heated and melted from And a second step of welding the lens and the second flange, and a third step of removing the lid with lens from the first mold, the second mold, and the outer frame. A method of manufacturing a lid with a lens, wherein the material of the second mold and the outer frame is silicon nitride.
  2. 　前記レンズは、両凸型の非球面レンズ部と、前記非球面レンズ部の外周部から全周に亘って外方に突出したベース部とを有し、前記非球面レンズ部が前記窓孔に配置され、前記ベース部が前記第２フランジに溶着されたものであり、前記レンズ素材の形状を球状とし、前記第１型として、前記第２フランジ側の第１面が前記非球面レンズ部及びベース部の形状に対応したものを用意し、且つ、前記第２型として、前記第２フランジ側の第２面が前記非球面レンズ部及び前記第２フランジに対応したものを用意し、前記第１ステップでは、前記第２型において前記第２フランジに対応する部分を前記第２フランジに接するように配置すること特徴とする請求項１記載のレンズ付き蓋体の製造方法。 The lens has a biconvex aspherical lens part and a base part protruding outward from the outer peripheral part of the aspherical lens part, and the aspherical lens part is formed in the window hole. Arranged, the base portion is welded to the second flange, the lens material has a spherical shape, and as the first mold, the first surface on the second flange side is the aspheric lens portion and A material corresponding to the shape of the base part is prepared, and the second mold is prepared such that the second surface on the second flange side corresponds to the aspheric lens part and the second flange. 2. The method of manufacturing a lid with a lens according to claim 1, wherein in one step, a portion corresponding to the second flange in the second mold is disposed so as to contact the second flange.
  3. 　前記レンズ素材の形状を真球状とすることを特徴とする請求項２記載のレンズ付き蓋体の製造方法。 3. The method of manufacturing a lens-attached lid according to claim 2, wherein the lens material has a spherical shape.
PCT/JP2013/006678 2013-01-28 2013-11-13 Method for manufacturing lid with lens WO2014115205A1 (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11691363B2 (en) 2020-03-20 2023-07-04 Steris Instrument Management Services, Inc. Method of forming and incorporating a polymeric lens within a lens housing

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6942041B2 (en) 2017-12-14 2021-09-29 マクセル株式会社 Lens unit and camera module
DE102018105171A1 (en) * 2018-03-07 2019-09-12 Schott Ag Lens cap, photodiode with a lens cap and method of making the same
CN113985936B (en) * 2021-09-28 2023-09-22 宁波合力科技股份有限公司 Casting control Wen Dingzhen and temperature control method thereof

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5619685A (en) * 1979-07-25 1981-02-24 Nec Home Electronics Ltd Manufacture of lens cap for optical semiconductor
JPH1129333A (en) * 1997-05-13 1999-02-02 Hoya Corp Pressing machine for optical element glass and pressing optical element glass
JP2010195683A (en) * 2010-05-31 2010-09-09 Hoya Corp Method for producing optical element

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5619685A (en) * 1979-07-25 1981-02-24 Nec Home Electronics Ltd Manufacture of lens cap for optical semiconductor
JPH1129333A (en) * 1997-05-13 1999-02-02 Hoya Corp Pressing machine for optical element glass and pressing optical element glass
JP2010195683A (en) * 2010-05-31 2010-09-09 Hoya Corp Method for producing optical element

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11691363B2 (en) 2020-03-20 2023-07-04 Steris Instrument Management Services, Inc. Method of forming and incorporating a polymeric lens within a lens housing

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