WO2014084035A1 - 磁気センサ装置 - Google Patents
磁気センサ装置 Download PDFInfo
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- WO2014084035A1 WO2014084035A1 PCT/JP2013/080490 JP2013080490W WO2014084035A1 WO 2014084035 A1 WO2014084035 A1 WO 2014084035A1 JP 2013080490 W JP2013080490 W JP 2013080490W WO 2014084035 A1 WO2014084035 A1 WO 2014084035A1
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- coil
- magnetic
- detection coil
- arrangement space
- core
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01V—GEOPHYSICS; GRAVITATIONAL MEASUREMENTS; DETECTING MASSES OR OBJECTS; TAGS
- G01V3/00—Electric or magnetic prospecting or detecting; Measuring magnetic field characteristics of the earth, e.g. declination, deviation
- G01V3/08—Electric or magnetic prospecting or detecting; Measuring magnetic field characteristics of the earth, e.g. declination, deviation operating with magnetic or electric fields produced or modified by objects or geological structures or by detecting devices
- G01V3/10—Electric or magnetic prospecting or detecting; Measuring magnetic field characteristics of the earth, e.g. declination, deviation operating with magnetic or electric fields produced or modified by objects or geological structures or by detecting devices using induction coils
- G01V3/104—Electric or magnetic prospecting or detecting; Measuring magnetic field characteristics of the earth, e.g. declination, deviation operating with magnetic or electric fields produced or modified by objects or geological structures or by detecting devices using induction coils using several coupled or uncoupled coils
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01V—GEOPHYSICS; GRAVITATIONAL MEASUREMENTS; DETECTING MASSES OR OBJECTS; TAGS
- G01V3/00—Electric or magnetic prospecting or detecting; Measuring magnetic field characteristics of the earth, e.g. declination, deviation
- G01V3/38—Processing data, e.g. for analysis, for interpretation, for correction
Definitions
- the present invention relates to a magnetic sensor device that magnetically detects a metal material mixed in a sample to be inspected and a metal material added to the sample to be inspected.
- a transport path for continuously transporting the sample to be inspected is provided, a magnetized unit is disposed along the transport path, and two downstream units of the magnetized unit are provided.
- An apparatus (see Patent Document 1) that arranges a magnetic sensor and detects a metallic foreign object based on a difference between output signals of two magnetic sensors has been proposed.
- a relatively small metal foreign object can be detected by magnetizing the metal foreign object in advance with a magnetic unit. Further, by calculating the difference between the output signals of the two magnetic sensors, the influence of a disturbance magnetic field such as peripheral device noise is eliminated.
- the magnetic field generated by the magnetic sensor itself extends to the outside of the sensor. If there is a conductor other than the sample to be inspected in the magnetic field spreading outside the sensor and it moves in some way, including vibrations, even a change in the magnetic field due to this conductor is detected, which may cause false detection. It was. Although the apparatus described in Patent Document 1 can eliminate the influence of a disturbance magnetic field, there is a problem in that it is not possible to prevent erroneous detection of a conductor outside the sensor due to the magnetic field of the magnetic sensor itself.
- an object of the present invention is to provide a magnetic sensor device capable of preventing erroneous detection caused by a magnetic field generated by the magnetic sensor itself affecting a conductor outside the sensor.
- a magnetic sensor device of the present invention includes an excitation coil, a detection coil that faces the excitation coil and detects an AC magnetic field generated by the excitation coil, the detection coil, and the excitation
- the detection coil and the excitation excluding the sample arrangement space provided between the coil, the side facing the excitation coil around the detection coil, and the side facing the detection coil around the excitation coil
- a case member covering the entire periphery of the coil, and the case member is made of a nonmagnetic conductive metal.
- the detection coil and the excitation coil face each other with the sample arrangement space interposed therebetween, and the case member (nonmagnetic) covers the entire coil surrounding space excluding the side from each coil toward the sample arrangement space.
- Conductive metal is arranged. If it does in this way, an eddy current will generate in a case member (nonmagnetic conductive metal) by a magnetic field which spreads outside from a detection coil and an excitation coil, and a magnetic field opposite to a magnetic field by a detection coil and an excitation coil will generate
- a magnetic shield part made of a magnetic member disposed on either the inside or the outside of the case member or on both the inside and the outside of the case member. Since the magnetic member is easy to pass magnetism, when a disturbance magnetic field exists, the disturbance magnetic field passes through the magnetic member constituting the magnetic shield part. Therefore, it is possible to prevent the influence of the disturbance magnetic field from affecting the internal space covered with the magnetic shield part. Therefore, erroneous detection due to a disturbance magnetic field can be prevented.
- the magnetic shield part effectively functions as an electromagnetic noise countermeasure component (EMC) that can prevent erroneous detection and malfunction due to electromagnetic noise from the outside.
- EMC electromagnetic noise countermeasure component
- a first side surface disposed on a side opposite to the excitation coil with respect to the detection coil
- a first side surface disposed on a side opposite to the detection coil with respect to the excitation coil.
- Two side surfaces a third side surface connecting one side end of the first side surface and one side end of the second side surface, the other side end of the first side surface, and the other side of the second side surface.
- An upper end opening of a case side surface portion including the fourth side surface connecting the ends, the first side surface, the second side surface, the third side surface, and the fourth side surface, and the detection coil and the excitation coil A rectangular parallelepiped housing having an upper surface covering the upper side and a bottom surface covering the lower end opening of the case side surface and covering the lower side of the detection coil and the excitation coil can be used. And the said upper surface and the said bottom face are equipped with the opening formed in the site
- the magnetic shield portion is provided on the inner side surface of the bottom surface, and the side surface shield material attached to the inner side surfaces of the first side surface, the second side surface, the third side surface, and the fourth side surface.
- a bottom shield member that is affixed, and a lid shield member that is affixed to the inner surface of the top surface, wherein the bottom shield member and the lid shield member are formed in a portion corresponding to the sample arrangement space It is preferable to provide an opening. Since the magnetic member is easy to pass magnetism, when a disturbance magnetic field exists, the disturbance magnetic field passes through the magnetic member constituting the magnetic shield part. Therefore, it is possible to prevent the influence of the disturbance magnetic field from affecting the internal space covered with the magnetic shield part. Therefore, erroneous detection due to a disturbance magnetic field can be prevented.
- the magnetic shield part effectively functions as an electromagnetic noise countermeasure component (EMC) that can prevent erroneous detection and malfunction due to electromagnetic noise from the outside.
- EMC electromagnetic noise countermeasure component
- a magnetic flux passage portion disposed at a position deviated in a direction perpendicular to a direction in which the excitation coil and the detection coil are opposed from a range in which the excitation coil and the detection coil are opposed to each other.
- the magnetic flux passage part is preferably made of a nonmagnetic conductive metal. If it does in this way, the leakage magnetic flux which goes to the exterior of a sample arrangement
- the magnetic flux passage portions are arranged on both sides of one side in the width direction of the sample arrangement space and the other side in the width direction of the sample arrangement space.
- the said magnetic flux passage part is attached to the said bottom face of the said case member, and is formed so that it may protrude toward the said upper surface of the said case member from the said bottom face. If it does in this way, the leakage magnetic flux which goes to the exterior of a sample arrangement
- a resin sealing portion that seals the magnetic sensor element configured, and the resin sealing portion constitutes a resin block body that seals the magnetic sensor element. It is desirable that it is attached to the case member via a magnetic flux passage part. Thus, by sealing a coil and a core body with resin, the malfunction by humidity, a vibration, etc. can be reduced and reliability and durability can be improved. Further, since the magnetic flux passage portion can be used as an attachment member for fixing the magnetic sensor element, the number of constituent members can be reduced.
- the exciting coil core and the detection coil core are magnetically coupled. If it does in this way, a leakage magnetic flux can be reduced and a sensitivity can be raised.
- the exciting coil core and the detection coil core are provided in a frame-shaped core body surrounding the sample arrangement space, and the core body is plate-shaped and disposed on the core body and the surface side thereof. It is desirable that the distance between the case member portion and the core member and the case member portion disposed on the back side of the core body are equal. If it does in this way, the magnetic field of the front side and back side of a core body can be made symmetrical, and the sensitivity with respect to the sample to be examined which passes through sample arrangement space can be raised.
- the excitation coil is provided in an excitation coil core disposed on one side of the sample arrangement space
- the detection coil is provided in a detection coil core disposed on the other side of the sample arrangement space.
- the exciting coil core and the detection coil core are magnetically coupled. According to such a configuration, since the leakage magnetic flux can be reduced, there is an advantage that high sensitivity can be obtained.
- a plurality of the detection coil cores are arranged on the other side of the sample arrangement space, and the detection coils are provided for each of the plurality of detection coil cores. Furthermore, in the present invention, it is preferable that one exciting coil core is arranged on one side of the sample arrangement space.
- the exciting coil core is a salient pole-shaped core protruding from one side of the sample arrangement space toward the other side of the sample arrangement space
- the detection coil core is the sample arrangement space. It is preferable that it is a salient pole-shaped core which protrudes toward the one side of the sample arrangement space from the other side. According to this configuration, since the excitation coil and the detection coil are wound around the salient pole-shaped core, the leakage magnetic flux can be reduced. Therefore, high sensitivity can be obtained and the resolution is high because the leakage magnetic flux hardly affects the adjacent detection coils.
- a transport mechanism for transporting the sample to be inspected is provided in the sample arrangement space. If it does in this way, a sample for inspection can be conveyed automatically.
- an eddy current is generated in the case member (nonmagnetic conductive metal) by a magnetic field spreading from the detection coil and the excitation coil to the outside, and a magnetic field opposite to the magnetic field generated by the detection coil and the excitation coil is generated.
- the original magnetic field is cancelled, so that it is possible to prevent the magnetic field from spreading outside by the detection coil and the excitation coil without affecting the magnetic field in the sample arrangement space. Therefore, it is possible to prevent erroneous detection caused by a conductor outside the sample arrangement space (a conductor other than the sample to be inspected).
- the direction in which the excitation coil and the detection coil face each other is the Z-axis direction
- the direction orthogonal to the Z-axis direction is the X-axis direction
- the directions orthogonal to the X-axis direction and the Z-axis direction are The description will be made on the Y axis direction.
- the Z-axis direction corresponds to the thickness direction of the inspection target sample
- the X-axis direction corresponds to the width direction of the inspection target sample
- the Y-axis direction corresponds to the transport direction of the inspection target sample.
- FIG. 1 is an explanatory diagram of an inspection instrument provided with a magnetic sensor device according to an embodiment of the present invention.
- an ATM device 1 automated teller machine
- a clip or staple needle is attached to one or a plurality of bills 2 (samples to be inspected).
- a magnetic sensor device 10 for magnetically inspecting whether or not the metal foreign matter S such as is mixed is mounted.
- the magnetic sensor device 10 includes a belt-type transport mechanism 4 that transports the bill 2 in the Y-axis direction from the insertion port 3 to the sample placement space 40 of the magnetic sensor device 10, and a bill discriminator from the sample placement space 40 of the magnetic sensor device 10.
- a belt-type transport mechanism 5 that transports the banknote 2 in the Y-axis direction up to (not shown) is provided.
- FIGS. 2A and 2B are explanatory views schematically showing the magnetic sensor device 10.
- FIG. 2A is a front view of the magnetic sensor device
- FIG. 2B is a cross-sectional view taken along line AA of FIG. 2A.
- FIG. 3 is an exploded perspective view schematically showing the magnetic sensor device.
- the magnetic sensor device 10 includes a substantially rectangular parallelepiped sensor case 11, a magnetic sensor element 12 configured in the sensor case 11, and a sensor case 11.
- a circuit board 13 electrically connected to the sensor element 12 and a resin sealing portion 14 for sealing the magnetic sensor element 12 are provided.
- the resin sealing portion 14 includes a resin frame 14a that is molded in advance and disposed in the sensor case 11, and a filling resin portion 14b that is filled to cover the magnetic sensor element 12 disposed on the resin frame 14a. ing.
- the circuit board 13 is not shown.
- the filling resin portion 14b is not shown.
- a resin block body 15 in which the magnetic sensor element 12 is sealed is constituted by the resin sealing portion 14 (the resin frame 14a and the filling resin portion 14b).
- a rectangular recess 14c corresponding to the outer shape of the magnetic sensor element 12 is formed on the upper surface of the resin frame 14a.
- An inner recess 14d that is recessed by one step from the bottom surface of the recess 14c is formed on the inner peripheral portion of the bottom surface of the recess 14c.
- An outer frame portion 14e is provided on the outer peripheral side of the concave portion 14c, and an inner frame portion 14f is provided on the inner peripheral side of the inner concave portion 14d.
- a through portion 14g that penetrates the resin frame 14a in the Y-axis direction is provided inside the inner frame portion 14f.
- the penetrating portion 14g has a horizontally long shape in the X-axis direction.
- the filled resin portion 14b is filled in the concave portion 14c and the inner concave portion 14d and covers all portions other than the tip of the terminal pin 12a of the magnetic sensor element 12.
- the circuit board 13 is disposed on the surface of the filling resin portion 14b, and the circuit board 13 is connected to the terminal pins 12a protruding from the filling resin portion 14b.
- the central region in the X-axis direction in the penetration portion 14g of the resin frame 14a is configured to define the sample placement space 40 when placed in the sensor case 11.
- a first attachment portion 16A having a width in the Z-axis direction wider than the sample arrangement space 40 is provided at one end side X1 in the X-axis direction of the penetrating portion 14g.
- a second mounting portion 16B having a width in the Z-axis direction wider than the sample arrangement space 40 is provided on the other end side X2 in the X-axis direction of the penetrating portion 14g.
- the first and second attachment portions 16A and 16B are provided at positions deviating in the X-axis direction from the range where the excitation coil 20 and the detection coil 30 are opposed to each other. As will be described later, the resin block body 15 is attached to the magnetic flux passage portions 19A and 19B provided in the sensor case 11 via the first and second attachment portions 16A and 16B.
- FIGS. 4A and 4B are explanatory views of the magnetic sensor element 12.
- FIG. 4A is a front view of the magnetic sensor element 12
- FIG. 4B is a plan view of the detection coil viewed from the Z-axis direction
- FIG. ) Is a plan view of the exciting coil viewed from the Z-axis direction.
- the magnetic sensor element 12 includes an excitation coil 20 disposed on one side Z1 in the Z-axis direction with respect to the sample arrangement space 40, and a Z-axis direction with respect to the sample arrangement space 40.
- a plurality of detection coils 30 arranged on the other side Z2 and a core body 60 around which the excitation coil 20 and the detection coil 30 are wound are provided. The plurality of detection coils 30 are opposed to the excitation coil 20 in the Z-axis direction.
- the core body 60 is a plate-like magnetic body having a thickness direction in the Y-axis direction. As shown in FIG. 4A, the core body 60 includes a frame portion 61 extending in the X-axis direction on the other side Z2 in the Z-axis direction with respect to the sample arrangement space 40, and a Z-axis with respect to the sample arrangement space 40.
- a frame portion 62 extending in the X-axis direction on one side Z1 in the axial direction, a frame portion 63 connecting the ends of one side X1 in the X-axis direction of the frame portions 61 and 62, and the X of the frame portions 61 and 62 It has a rectangular frame shape including a frame portion 64 that connects ends of the other side X2 in the axial direction.
- the outer shape of the core body 60 is a rectangle having the frame portions 61 and 62 as long sides and the frame portions 63 and 64 as short sides.
- a plurality of salient pole-shaped detection coil cores 65 protruding toward the frame portion 62 are formed at a constant pitch in the X-axis direction on the edge facing the frame portion 62.
- one salient pole-shaped exciting coil core 66 that protrudes toward the frame portion 61 is formed at an edge facing the frame portion 61.
- An exciting coil 20 is wound around the exciting coil core 66.
- the detection coil 30 is wound around each of the plurality of detection coil cores 65.
- the plurality of detection coils 30 are linearly arranged in the X-axis direction, and are arranged on the opposite side to the sample arrangement space 40 (the other side Z2 in the Z-axis direction) with respect to the excitation coil 20.
- the exciting coil 20 is driven by a drive circuit (not shown) to generate an alternating magnetic field, and the detection coil 30 detects the alternating magnetic field generated by the exciting coil 20.
- the exciting coil core 66 and the detection coil core 65 are formed in the integral core body 60 and are magnetically coupled, the leakage magnetic flux can be reduced. Therefore, high sensitivity can be obtained and the resolution is high because the leakage magnetic flux hardly affects the adjacent detection coils 30.
- positioning the magnetic body which comprises the core 66 for excitation coils, and the magnetic body which comprises the core 65 for detection coils may be sufficient.
- the exciting coil 20 has a rectangular shape in which the dimension in the width direction (X-axis direction) of the sample arrangement space 40 is larger than the dimension in the Y-axis direction.
- the dimension in the X-axis direction of the exciting coil 20 is slightly larger than the dimension in the width direction (X-axis direction) of the sample arrangement space 40.
- the detection coil 30 has a rectangular shape whose dimension in the X-axis direction is substantially equal to the dimension in the Y-axis direction.
- the dimension of the detection coil 30 in the Y-axis direction is substantially equal to the dimension of the excitation coil 20 in the Y-axis direction, and the dimension of the detection coil 30 in the X-axis direction is considerably smaller than the dimension of the excitation coil 20 in the X-axis direction.
- the length dimension when ten detection coils 30 are arranged in the X-axis direction is the same as the sample arrangement space 40.
- the sample arrangement space 40 is defined by the range in which the detection coils 30 are arranged.
- FIG. 5A and 5B are explanatory views showing the measurement principle in the magnetic sensor element 12.
- FIG. 5A is an explanatory view showing a state where no metallic foreign matter is present
- FIG. 5B is an explanatory view showing a state where the metallic foreign matter is present. is there.
- the detection coil 30 detects a magnetic field generated by the excitation coil 20.
- the magnetic lines of force L draw a line in which the direction of the tangent coincides with the direction of the magnetic field by the exciting coil 20, as shown in FIG.
- FIG. 5A is an explanatory view showing a state where no metallic foreign matter is present
- FIG. 5B is an explanatory view showing a state where the metallic foreign matter is present. is there.
- the magnetic lines of force L are magnetic fields generated by the exciting coil 20 at the position away from the metal foreign matter S.
- the magnetic lines of force L0 are distorted and a line that does not coincide with the direction of the magnetic field generated by the exciting coil 20 is drawn. Accordingly, the detection result of the detection coil 30 located near the metal foreign object S among the plurality of detection coils 30 changes. For example, when the metal foreign object S is made of a magnetic material, the magnetic permeability is increased, so that the output level from the detection coil 30 located near the metal foreign object S among the plurality of detection coils 30 is increased.
- the inspection circuit (not shown) of the magnetic sensor device 10 can detect that the metal foreign matter S is mixed in the banknote 2.
- the belt-type transport mechanism 5 uses the banknote 2 that has been inserted this time as a banknote recognition unit at the subsequent stage. Transport to.
- the belt-type transport mechanism 5 does not transport the banknote 2 inserted this time to the banknote recognition unit at the subsequent stage.
- the belt-type transport mechanism 4 returns the bill 2 that has been inserted this time to the insertion slot 3. Therefore, the metal foreign object S such as a clip is not conveyed to the banknote recognition unit, and the trouble due to the metal foreign object S does not occur in the banknote recognition unit.
- the sensor case 11 includes a substantially rectangular parallelepiped case member (hereinafter referred to as an outer case 17) that is slightly larger than the resin block body 15 in which the magnetic sensor element 12 is sealed, and an outer case.
- a magnetic shield part 18 is provided on the inner surface of the case 17.
- the outer case 17 is made of a nonmagnetic conductive metal such as aluminum. In addition, it can replace with aluminum and can also use materials, such as zinc, brass, and SUS.
- the magnetic shield part 18 is formed from magnetic metals, such as a permalloy, Si steel plate, and SPCC.
- the plate thickness of the magnetic metal material constituting the magnetic shield portion 18 is desirably thick from the viewpoint of enhancing the shielding effect.
- the outer case 17 has a rectangular parallelepiped shape and includes a lower case 51 and an upper case 52.
- the lower case 51 includes a bottom surface 53 that constitutes a surface on one end side Y2 in the Y-axis direction, and side surfaces 54 and 55 (third, third) that constitute surfaces on one side X1 and the other side X2 in the X-axis direction. 4 side surfaces) and side surfaces 56 and 57 (first and second side surfaces) constituting the surfaces of one side Z1 and the other side Z2 in the Z-axis direction.
- the side surface 56 is disposed on the opposite side of the excitation coil 20 from the detection coil 30, and the side surface 57 is disposed on the opposite side of the detection coil 30 from the excitation coil 20.
- the side surface 54 connects the side ends of the side surfaces 56 and 57 on the one end side X1 in the X-axis direction, and the side surface 55 connects the side ends of the side surfaces 56 and 57 on the other end side X2 in the X-axis direction. ing.
- the side surfaces 54 to 57 constitute a side surface portion (case side surface portion) of the outer case 17, and the bottom surface 53 closes the lower end opening of the case side surface portion.
- the surface on the opposite side Y2 in the Y-axis direction with respect to the bottom surface 53 is an opening.
- the upper case 52 has a rectangular plate shape and is attached so as to close the opening of the lower case 51 (the upper end opening of the side surface portion of the case).
- the attached upper case 52 forms the upper surface of the outer case 17 and covers the excitation coil 20 and the detection coil 30 (one side Y2 in the Y-axis direction).
- the lower side (the other side Y1 in the Y-axis direction) of the excitation coil 20 and the detection coil 30 is covered with the bottom surface 53 of the lower case 51.
- the side surfaces 54 to 57 cover the exciting coil 20 and the detection coil 30 from both sides X1, X2 in the X-axis direction and both sides Z1, Z2 in the Z-axis direction.
- an opening 52a and an opening 53a are formed at a position overlapping with the sample arrangement space 40 in the Y-axis direction.
- a magnetic flux passage portion 19A is arranged at a position on one side X1 in the width direction (X-axis direction) of the sample arrangement space 40 in the outer case 17. Moreover, the magnetic flux passage part 19B is arrange
- the magnetic flux passing portions 19A and 19B are located laterally from the range in which the detection coil 30 and the excitation coil 20 face each other (Z where both coils face each other).
- One side X1 and the other side X2) in the X-axis direction, which is a direction orthogonal to the axial direction, are provided at positions deviated from each other.
- the magnetic flux passing portions 19 ⁇ / b> A and 19 ⁇ / b> B are attached to the bottom surface 53 of the lower case 51.
- the magnetic flux passing portions 19 ⁇ / b> A and 19 ⁇ / b> B are made of a nonmagnetic conductive metal such as aluminum, like the outer case 17. Therefore, the magnetic flux passing portions 19A and 19B can be formed integrally with the lower case 51.
- the magnetic flux passage portions 19 ⁇ / b> A and 19 ⁇ / b> B are used as attachment members for attaching the resin block body 15 to the outer case 17.
- FIG. 6 is an exploded perspective view of the sensor case 11.
- the magnetic shield portion 18 includes a bottom shield material 71 affixed to the inner surface of the bottom surface 53 of the lower case 51, and a side surface shield material affixed to the inner surfaces of the side surfaces 54, 55, 56, 57 of the lower case 51. 72, 73, 74, 75. Further, the magnetic shield part 18 includes a lid part shield material 76 attached to the inner surface of the upper case 52.
- the bottom shield material 71 and the lid shield material 76 are provided with openings 71a and 76a at portions corresponding to the sample arrangement space 40 and the magnetic flux passing portions 19A and 19B on both sides thereof.
- the assembly operation of the magnetic sensor device 10 is performed in the following order (1) to (4).
- (1) The magnetic sensor element 12 is disposed and positioned in the recess 14c and the inner recess 14d of the resin frame 14a. At this time, the frame portions 61, 62, 63, 64 of the core body 60 are brought into contact with the bottom surface of the recess 14c. After the positioning, the recess 14c and the inner recess 14d are filled with resin, and all parts of the magnetic sensor element 12 other than the terminal pins 12a are covered with resin and solidified. Thereby, the resin block body 15 is comprised.
- circuit board 13 is disposed on the surface of the filling resin portion 14b, and the connection work between the terminal pins 12a and the circuit board 13 is performed.
- the bottom shield material 71 and the side shield materials 72, 73, 74, 75 are attached to the inner side surface of the lower case 51, and the resin block body 15 and the circuit board 13 are mounted therein.
- the magnetic flux passage portions 19A and 19B protruding from the bottom surface 53 of the lower case 51 are mounted in the first and second mounting portions 16A and 16B, and the resin block body 15 is fixed.
- connection work between the circuit board 13 and external connection wiring or connector terminals (not shown) is performed.
- the magnetic sensor device 10 is formed in which the periphery of the magnetic sensor element 12 is completely covered by the outer case 17 and the magnetic shield part 18 except for the portion facing the sample arrangement space 40. Is done.
- the distance L1 between the core body 60 and the bottom surface 53 of the lower case 51 and the distance L2 between the core body 60 and the upper case 52 are as follows. Are equal.
- the detection coil 30 and the excitation coil 20 are opposed to each other with the sample arrangement space 40 interposed therebetween, and the coil surrounding space excluding the side from each coil toward the sample arrangement space 40 is excluded.
- An outer case 17 (a casing made up of a lower case 51 and an upper case 52) is disposed so as to cover all of them. Specifically, one side Y1 of the detection coil 30 and the excitation coil 20 in the Y-axis direction is covered with the bottom surface 53 of the lower case 51, and the other side Y1 is covered with the upper case 52.
- one side X1 of the detection coil 30 and the exciting coil 20 in the X-axis direction is covered with the side surface 54 of the lower case 51, and the other side X2 is covered with the side surface 55 of the lower case 51.
- one side Z1 of the excitation coil 20 in the Z-axis direction is covered with the side surface 56 of the lower case 51, and the other side Z2 of the detection coil 30 in the Z-axis direction is covered with the side surface 57 of the lower case 51.
- the magnetic field of the sample arrangement space 40 can be prevented from spreading outside by the detection coil 30 and the excitation coil 20 without affecting the magnetic field. Therefore, it is possible to prevent erroneous detection caused by a conductor outside the sample arrangement space 40 (a conductor other than the sample to be inspected). Moreover, since the spread of the magnetic field to the range outside the sample arrangement space 40 can be prevented, the detection resolution is improved.
- a magnetic shield portion 18 made of a magnetic member is attached to the inner side surface of the outer case 17.
- the magnetic shield part 18 includes side surfaces 56 and 57 (first and second side surfaces) constituting the surfaces of one side Z1 and the other side Z2 of the lower case 51 in the Z-axis direction of the outer case 17.
- side surface shield materials 72, 73, 74 affixed to the inner side surfaces of the side surfaces 54, 55 (third and fourth side surfaces) constituting the surfaces of the one side X1 and the other side X2 in the X-axis direction, 75, a bottom shield member 71 affixed to the inner surface of the bottom surface 53 constituting the surface of one end Y2 in the Y-axis direction of the lower case 51, and an upper case 52 forming the upper surface of the outer case 17.
- a lid part shielding member 76 attached to the inner side surface.
- the bottom shield member 71 and the lid shield member 76 are provided with openings 71a and 76a at portions corresponding to the sample arrangement space 40 and the magnetic flux passing portions 19A and 19B on both sides thereof. Since the magnetic member is easy to pass magnetism, when the disturbance magnetic field exists, the disturbance magnetic field passes through the magnetic member constituting the magnetic shield part 18. Therefore, the influence of the disturbance magnetic field on the internal space covered with the magnetic shield portion 18 can be prevented. Therefore, erroneous detection due to a disturbance magnetic field can be prevented. Moreover, the magnetic shield part 18 effectively functions as an electromagnetic noise countermeasure component (EMC) that can prevent malfunction and detection due to electromagnetic noise from the outside.
- EMC electromagnetic noise countermeasure component
- the magnetic sensor element 12 including the detection coil 30, the excitation coil 20, and the core body 60 is sealed by the resin sealing portion 14 (the resin frame 14a and the filling resin portion 14b), the humidity, Problems caused by vibrations can be reduced. Therefore, the reliability and durability of the magnetic sensor device 10 can be improved.
- the resin block body 15 encapsulating the magnetic sensor element 12 is attached to the outer case 17 via the magnetic flux passage portions 19A and 19B.
- the magnetic flux passage portions 19A and 19B are attached to the outer case 17.
- it is made of a nonmagnetic conductive metal, and is arranged on one side X1 and the other side X2 in the width direction (X-axis direction) of the sample arrangement space 40. If it does in this way, the leakage magnetic flux which goes to the exterior of the sample arrangement
- Necessary dimensions (thickness in the X-axis direction) of the magnetic flux passage portions 19 ⁇ / b> A and 19 ⁇ / b> B can be determined based on the drive frequency of the exciting coil 20. For example, if the drive frequency of the exciting coil 20 is 1 MHz, it is preferably 0.1 mm or more, and if it is 5 KHz, it is preferably 2 mm or more. With such dimensions, the leakage magnetic flux can be guided to the magnetic flux passage portions 19A and 19B.
- the distance L1 between the core body 60 and the bottom surface 53 of the lower case 51 is equal to the distance L2 between the core body 60 and the upper case 52. That is, the distance L1 between the core body 60 and the bottom surface 53 that is a part of the outer case 17 disposed on the front surface side thereof, and the upper case 52 that is the part of the core body 60 and the outer case 17 disposed on the back surface side thereof.
- the sensor case 11 is configured so that the distances L ⁇ b> 2 are equal and symmetrical with respect to the detection coil 30 and the excitation coil 20. With such a configuration, the magnetic field on the bottom 53 side and the magnetic field on the upper case 52 side can be symmetric. Therefore, the sensitivity to the banknote 2 passing through the sample arrangement space 40 can be increased.
- the exciting coil 20 is provided on the exciting coil core 66 arranged on one side Z1 in the Z-axis direction with respect to the sample arrangement space 40, and the detection coil 30 is arranged with respect to the sample arrangement space 40.
- the detection coil core 65 Provided in the detection coil core 65 disposed on the other side Z2 in the Z-axis direction, the excitation coil core 66 and the detection coil core 65 are magnetically coupled. Therefore, leakage magnetic flux can be reduced. Accordingly, high sensitivity can be obtained and the resolution is high because the leakage magnetic flux hardly affects the adjacent detection coils 30.
- the exciting coil core 66 has a salient pole shape protruding from the one side Z1 in the Z-axis direction with respect to the sample arrangement space 40 toward the other side Z2 in the Z-axis direction with respect to the sample arrangement space 40.
- the detection coil core 65 has a salient pole shape protruding from the other side Z2 in the Z-axis direction with respect to the sample arrangement space 40 toward the one side Z1 in the Z-axis direction with respect to the sample arrangement space 40. Is the core.
- a plurality of detection coil cores 65 are arranged on the other side Z ⁇ b> 2 in the Z-axis direction with respect to the sample arrangement space 40, and a detection coil 30 is provided for each of the plurality of detection coil cores 65.
- one exciting coil core 66 is arranged on one side Z1 in the Z-axis direction with respect to the sample arrangement space 40. According to this configuration, since the exciting coil 20 and the detection coil 30 are wound around the salient pole-shaped core, the leakage magnetic flux can be reduced, so that high sensitivity can be obtained and the leakage magnetic flux is adjacent to the magnetic flux. The resolution is high because it hardly affects the matching detection coil.
- the magnetic shield portion 18 made of a magnetic member is attached to the inner surface of the outer case 17, but the magnetic shield made of a magnetic member is attached to the outer surface of the outer case 17.
- the part 18 may be pasted.
- magnetic shields 18 may be formed on both the inner and outer surfaces of the outer case 17 by attaching magnetic members to both the inner and outer surfaces of the outer case 17. Further, the magnetic member constituting the magnetic shield portion 18 and the outer case 17 may be in contact with each other as described above, or a gap may be provided between the magnetic member and the outer case 17.
- the magnetic flux passage portions 19A and 19B for reducing the leakage magnetic flux to the outside are also used as mounting members for fixing the resin block body 15 in the outer case 17, but the resin block The body 15 may be fixed in the outer case 17 by other methods. For example, it can be fixed to the bottom surface of the outer case 17 with screws or the like. In this case, since it is not necessary to give the magnetic flux passage portions 19A and 19B a function as an attachment member, the shapes, positions, and dimensions of the magnetic flux passage portions 19A and 19B can be set more freely. Moreover, in the said form, although the magnetic flux passage parts 19A and 19B were provided in the both sides of the sample arrangement
- the outer case 17 made of a non-magnetic conductive metal is a rectangular parallelepiped housing, and the lower case 51 constituting the bottom and side surfaces of the housing, and the upper case consisting only of the top surface of the housing
- the shape of the member for assembling the outer case 17 is not limited to this. That is, the bottom surface, side surface, and top surface of the housing may be separated members, or a plurality of surfaces may be appropriately integrated into one member.
- the shape of the outer case 17 is not limited to a rectangular parallelepiped, and may be any shape that can cover all the surrounding spaces of both coils except the side from the detection coil 30 and the excitation coil 20 toward the sample arrangement space 40. Good.
- the planar shape of the bottom surface and the top surface may be an ellipse or a polygon.
- magnetic members (the bottom shield material 71, the side shield materials 72, 73, 74, 75, and the lid shield material 76) that are separate from the outer case 17 are provided on the inner surface of the outer case 17.
- the magnetic shield portion 18 is assembled by pasting, but a component in which each magnetic member constituting the magnetic shield portion 18 and a nonmagnetic conductive metal plate constituting each surface of the outer case 17 are integrated in advance. It may be used.
- the core body of another shape can also be used.
- the magnetic body constituting the excitation coil core 66 and the magnetic body constituting the detection coil core 65 may be separated and magnetically coupled by arranging them close to each other. .
- the form which forms these in an integrated magnetic body via another magnetic body may be sufficient.
- the excitation coil 20 is arranged on one side Z1 in the Z-axis direction with respect to the sample arrangement space 40, and the detection coil 30 is arranged on the other side Z2.
- the first excitation coil and the first detection coil may be arranged on one side Z1 in the Z-axis direction, and the second excitation coil and the second detection coil may be arranged on the other side Z2.
- the exciting coil core 66 and the detecting coil core 65 instead of the exciting coil core 66 and the detecting coil core 65 as described above, a salient pole around which the detecting coil is wound is formed, and the exciting coil is wound around the base portion of the salient pole.
- a core having a shape that can be used may be used.
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Abstract
Description
図1は、本発明の実施形態に係る磁気センサ装置を備えた検査機器の説明図である。図1において、銀行等に設置されているATM装置1(現金自動預け払い機;Automatic Teller Machine)においては、投入された1枚乃至複数枚の紙幣2(検査対象試料)にクリップやホッチキスの針等の金属異物Sが混在していないか磁気的に検査する磁気センサ装置10が搭載されている。磁気センサ装置10には、投入口3から磁気センサ装置10の試料配置空間40まで紙幣2をY軸方向に搬送するベルト式搬送機構4と、磁気センサ装置10の試料配置空間40から紙幣識別機(図示せず)まで紙幣2をY軸方向に搬送するベルト式搬送機構5とが設けられている。
図2は、磁気センサ装置10を模式的に示す説明図であり、図2(a)は磁気センサ装置の正面図、図2(b)は図2(a)のA-A断面図である。また、図3は磁気センサ装置を模式的に示す分解斜視図である。図2、図3に示すように、磁気センサ装置10は、概略直方体状のセンサケース11と、センサケース11の内部に構成された磁気センサ素子12と、センサケース11の内部に配置され、磁気センサ素子12に対して電気的に接続された回路基板13と、磁気センサ素子12を封止する樹脂封止部14とを有している。樹脂封止部14は、予め成形されてセンサケース11内に配置される樹脂フレーム14aと、樹脂フレーム14a上に配置された磁気センサ素子12を覆うように充填される充填樹脂部14bから構成されている。なお、図2(a)において回路基板13は図示を省略している。また、図3において、充填樹脂部14bは図示を省略している。センサケース11内には、樹脂封止部14(樹脂フレーム14aおよび充填樹脂部14b)により、磁気センサ素子12が封止された樹脂ブロック体15が構成されている。
図4は、磁気センサ素子12の説明図であり、図4(a)は磁気センサ素子12の正面図、図4(b)は検出コイルのZ軸方向から見た平面図、図4(c)は励磁コイルのZ軸方向から見た平面図である。図2~図4に示すように、磁気センサ素子12は、試料配置空間40に対してZ軸方向の一方側Z1に配置された励磁コイル20と、試料配置空間40に対してZ軸方向の他方側Z2に配置された複数の検出コイル30と、励磁コイル20および検出コイル30が巻回されたコア体60とを備えている。複数の検出コイル30は、励磁コイル20に対してZ軸方向で対向している。
図2、図3に示すように、センサケース11は、磁気センサ素子12が封止された樹脂ブロック体15よりも一回り大きい概略直方体状のケース部材(以下、外ケース17という)と、外ケース17の内側表面に配置された磁気シールド部18を備えている。外ケース17は、アルミ等の非磁性の導電性金属から形成されている。なお、アルミに代えて、亜鉛、真鍮、SUSなどの素材を用いることもできる。一方、磁気シールド部18は、パーマロイ、Si鋼板、SPCCなどの磁性金属から形成されている。磁気シールド部18を構成する磁性金属材の板厚は、シールド効果を高めるという観点からは厚いことが望ましい。
磁気センサ装置10の組立作業は、以下の(1)~(4)の順で行われる。(1)樹脂フレーム14aの凹部14cおよび内側凹部14d内に磁気センサ素子12を配置して位置決めする。このとき、コア体60の枠部61、62、63、64を凹部14cの底面に当接させる。位置決め後、凹部14cおよび内側凹部14d内に樹脂を充填し、磁気センサ素子12の端子ピン12a以外の部位を全て樹脂で覆い、固化させる。これにより、樹脂ブロック体15が構成される。
以上のように、本形態の磁気センサ装置10では、検出コイル30および励磁コイル20が試料配置空間40を挟んで対向しており、各コイルから試料配置空間40へ向かう側を除くコイル周囲空間を全て覆うように外ケース17(下ケース51および上ケース52からなる筐体)を配置している。具体的には、検出コイル30および励磁コイル20のY軸方向の一方側Y1を下ケース51の底面53で覆い、他方側Y1を上ケース52で覆っている。また、検出コイル30および励磁コイル20のX軸方向の一方側X1を下ケース51の側面54で覆い、他方側X2を下ケース51の側面55で覆っている。更に、励磁コイル20のZ軸方向の一方側Z1を下ケース51の側面56で覆い、検出コイル30のZ軸方向の他方側Z2を下ケース51の側面57で覆っている。このようにすると、外ケース17を形成している非磁性の導電性金属(本形態では、アルミ)に渦電流が発生して、検出コイル30および励磁コイル20による磁界とは逆の磁界が発生する。これにより、元の磁界がキャンセルされるため、試料配置空間40の磁界には影響を及ぼすことなく、検出コイル30および励磁コイル20による磁界の外部への広がりを防止できる。よって、試料配置空間40の外部にある導電体(検査対象試料以外の導電体)に起因する誤検出を防止できる。また、試料配置空間40から外れた範囲への磁界の広がりを防止できるため、検出分解能が向上する。
(1)上記形態では、外ケース17の内側面に磁性部材(本例では、パーマロイ)からなる磁気シールド部18が貼り付けられているが、外ケース17の外側面に磁性部材からなる磁気シールド部18を貼り付けてもよい。あるいは、外ケース17の内側面と外側面の両方に磁性部材を貼り付けて、外ケース17の内外両面に磁気シールド部18を形成してもよい。また、磁気シールド部18を構成する磁性部材と外ケース17は、上記形態のように接触していてもよいし、磁性部材と外ケース17との間に隙間を設けても良い。
Claims (15)
- 励磁コイルと、
当該励磁コイルに対向しており、当該励磁コイルが発生させる交流磁界を検出する検出コイルと、
当該検出コイルと前記励磁コイルとの間に設けられた試料配置空間と、
前記検出コイルの周囲における前記励磁コイルに対向する側、および、前記励磁コイルの周囲における前記検出コイルに対向する側を除く前記検出コイルおよび前記励磁コイルの周囲を全て覆うケース部材とを有し、
当該ケース部材は、非磁性の導電性金属からなることを特徴とする磁気センサ装置。 - 前記ケース部材の内側と外側のいずれか一方、あるいは前記ケース部材の内側と外側の両方に配置された磁性部材からなる磁気シールド部を有することを特徴とする請求項1に記載の磁気センサ装置。
- 前記ケース部材は、
前記励磁コイルに対して前記検出コイルとは反対の側に配置された第1側面と、
前記検出コイルに対して前記励磁コイルとは反対の側に配置された第2側面と、
前記第1側面の一方の側端と前記第2側面の一方の側端とを接続する第3側面と、
前記第1側面の他方の側端と前記第2側面の他方の側端とを接続する第4側面と、
前記第1側面、前記第2側面、前記第3側面、前記第4側面からなるケース側面部の上端開口を塞いでおり、前記検出コイルおよび前記励磁コイルの上方を覆う上面と、
前記ケース側面部の下端開口を塞いでおり、前記検出コイルおよび前記励磁コイルの下方を覆う底面と、を備え、
前記上面および前記底面は、前記試料配置空間に対応する部位に形成された開口を備えていることを特徴とする請求項1または2に記載の磁気センサ装置。 - 前記磁気シールド部は、前記第1側面と前記第2側面と前記第3側面と前記第4側面の各内側面に貼り付けられた側面部シールド材と、
前記底面の内側面に貼り付けられた底面シールド部材と、
前記上面の内側面に貼り付けられた蓋部シールド部材と、を備え、
前記底面シールド部材と前記蓋部シールド部材は、前記試料配置空間に対応する部位に形成された開口を備えていることを特徴とする請求項3に記載の磁気センサ装置。 - 前記励磁コイルおよび前記検出コイルが対向している範囲から、前記励磁コイルおよび前記検出コイルが対向している方向と直交する方向に外れた位置に配置された磁束通過部を有し、
当該磁束通過部は、非磁性の導電性金属からなることを特徴とする請求項1乃至4の何れか一項に記載の磁気センサ装置。 - 前記磁束通過部は、前記試料配置空間の幅方向の一方側と前記試料配置空間の幅方向の他方側の両側に配置されていることを特徴とする請求項5に記載の磁気センサ装置。
- 前記磁束通過部は、前記ケース部材の前記底面に取り付けられており、当該底面から前記ケース部材の前記上面に向けて突出するように形成されていることを特徴とする請求項5に記載の磁気センサ装置。
- 前記励磁コイルが取り付けられる励磁コイル用コアと、
前記検出コイルが取り付けられる検出コイル用コアと、
前記励磁コイル用コアに前記励磁コイルを取り付けると共に前記検出コイル用コアに前記検出コイルを取り付けて構成した磁気センサ素子を封止する樹脂封止部とを有し、
当該樹脂封止部は、前記磁気センサ素子を封止した樹脂ブロック体を構成しており、
当該樹脂ブロック体は、前記磁束通過部を介して、前記ケース部材に取り付けられていることを特徴とする請求項5に記載の磁気センサ装置。 - 前記励磁コイル用コアと前記検出コイル用コアとは磁気的に結合していることを特徴とする請求項8に記載の磁気センサ装置。
- 前記励磁コイル用コアおよび前記検出コイル用コアは、前記試料配置空間を囲む枠状のコア体に設けられ、
当該コア体は板状であり、
当該コア体とその表面側に配置された前記ケース部材の部位との距離と、前記コア体とその裏面側に配置された前記ケース部材の部位との距離が等しいことを特徴とする請求項8または9に記載の磁気センサ装置。 - 前記励磁コイルは、前記試料配置空間の一方側に配置された励磁コイル用コアに設けられ、
前記検出コイルは、前記試料配置空間の他方側に配置された検出コイル用コアに設けられ、
前記励磁コイル用コアと前記検出コイル用コアとは磁気的に結合していることを特徴とする請求項1に記載の磁気センサ装置。 - 前記検出コイル用コアは、前記試料配置空間の他方側に複数配置され、
前記複数の検出コイル用コア毎に前記検出コイルが設けられていることを特徴とする請求項11に記載の磁気センサ装置。 - 前記励磁コイル用コアは、前記試料配置空間の一方側に1つ配置されていることを特徴とする請求項11に記載の磁気センサ装置。
- 前記励磁コイル用コアは、前記試料配置空間の一方側から前記試料配置空間の他方側に向けて突出する突極状のコアであり、
前記検出コイル用コアは、前記試料配置空間の他方側から前記試料配置空間の一方側に向けて突出する突極状のコアであることを特徴とする請求項11に記載の磁気センサ装置。 - 前記試料配置空間に検査対象試料を搬送する搬送機構を有していることを特徴とする請求項1乃至14の何れか一項に記載の磁気センサ装置。
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JP7161501B2 (ja) * | 2020-02-27 | 2022-10-26 | 株式会社熊平製作所 | 金属検出器及び金属検出装置 |
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JP2009092599A (ja) * | 2007-10-11 | 2009-04-30 | San Denshi Kk | 金属検出装置 |
JP2011013165A (ja) * | 2009-07-06 | 2011-01-20 | Kyoritsu Denki Kk | 物体検出装置 |
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CN104813192A (zh) | 2015-07-29 |
KR20150090088A (ko) | 2015-08-05 |
US20150309204A1 (en) | 2015-10-29 |
JP2014106156A (ja) | 2014-06-09 |
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