WO2014080658A1 - Method of correcting detection position of electromagnetic inductance-type position detector - Google Patents
Method of correcting detection position of electromagnetic inductance-type position detector Download PDFInfo
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- WO2014080658A1 WO2014080658A1 PCT/JP2013/066433 JP2013066433W WO2014080658A1 WO 2014080658 A1 WO2014080658 A1 WO 2014080658A1 JP 2013066433 W JP2013066433 W JP 2013066433W WO 2014080658 A1 WO2014080658 A1 WO 2014080658A1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/20—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
- G01D5/24471—Error correction
- G01D5/24476—Signal processing
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
- G01D5/24471—Error correction
- G01D5/24495—Error correction using previous values
Definitions
- the present invention relates to a detection position correction method for an electromagnetic induction type position detector which is a linear scale or a rotary scale.
- Induct thin type scale which is an electromagnetic induction type position detector, is applied to position detection in various machines such as machine tools, automobiles and robots.
- Induct thin type scales include linear scales and rotary scales.
- a linear scale is installed on a moving body such as a table of a machine tool and detects a linear movement position of the moving body.
- a rotary scale is mounted on a moving body (rotating body) such as a rotary table of a machine tool. It is installed and detects the rotational position (rotational angle) of the moving body (rotating body).
- Both the linear scale and the rotary scale detect the position by electromagnetic induction of coil patterns arranged so as to face each other in parallel. This detection principle will be described based on the principle diagram of FIG.
- FIG. 6A is a perspective view showing a state in which a slider and a scale of a linear scale are arranged so as to face each other in parallel
- FIG. 6B is a view showing the slider and the scale side by side
- FIG. c) is a diagram showing the degree of electromagnetic coupling between the slider and the scale.
- the detection principle of the rotary scale is the same as that of the linear scale, and the stator and rotor of the rotary scale correspond to the slider and scale of the linear scale.
- Each of the linear type scale and the rotary type scale has a detection unit and a detection control device.
- the linear scale detector 10 includes a slider 1 as a primary member and a scale 2 as a secondary member.
- the slider 1 is a movable part, and has a first slider coil 3 that is a first primary coil and a second slider coil 4 that is a second primary coil.
- the scale 2 is a fixed part and has a scale coil 5 that is a secondary coil.
- the coils 3, 4 and 5 are folded back in a zigzag shape (comb pattern) and formed so as to be linear as a whole.
- the slider 1 is attached to a moving body such as a table of a machine tool and moves linearly with the moving body.
- the scale 2 is fixed to a fixed part such as a bed of a machine tool.
- the slider 1 (first slider coil 3 and second slider coil 4) and the scale 2 (scale coil 5) hold a predetermined gap g between them. Are arranged so that they face each other in parallel. Further, as shown in FIGS. 6A and 6B, the first slider coil 3 and the second slider coil 4 are shifted by 1 ⁇ 4 pitch.
- a first excitation current Ia as shown in the following equation (1) is passed through the first slider coil 3 and a second as shown in the following equation (2).
- the exciting current Ib is passed through the second slider coil 4.
- Ia ⁇ Icos (k ⁇ ) sin ( ⁇ t) (1)
- Ib Isin (k ⁇ ) sin ( ⁇ t) (2)
- I magnitude of excitation current k: 2 ⁇ / p p: coil pitch (length: angle for rotary scale)
- ⁇ angular frequency of excitation current (alternating current)
- t time
- ⁇ excitation position
- V KIsin (k (X ⁇ )) sin ( ⁇ t) (3)
- K Transmission coefficient depending on gap g and angular frequency ⁇ of exciting current
- X Detection position (moving position of moving body)
- an error of the coil pitch period (an error that periodically fluctuates according to the period of the coil pitch) that appears prominently as an error included in the detection position X is referred to as an interpolation error.
- a high-accuracy position detector different from the electromagnetic induction position detector is used, and the detection position of the high-accuracy position detector and the detection position X of the electromagnetic induction position detector are used.
- a method of acquiring correction data based on the above is conceivable.
- this method requires preparation of a high-accuracy position detector, which increases cost and labor.
- the present invention has been made in view of the above circumstances, and does not require a high-accuracy position detector different from the electromagnetic induction position detector, and obtains correction data by the electromagnetic induction position detector itself. It is an object of the present invention to provide a detection position correction method for an electromagnetic induction type position detector capable of correcting a detection position.
- the detection position correction method of the electromagnetic induction type position detector of the first invention that solves the above-described problem is A primary side member having a primary side coil and a secondary side member having a secondary side coil, and the primary side member or the secondary side member is attached to a movable body and moves together with the movable body.
- a detection position correction method of an electromagnetic induction type position detector arranged so that the primary side coil and the secondary side coil are parallel and face each other, A detection position acquisition process in which the moving body is moved by a speed command value of a constant speed, and the position of the moving body is detected by the electromagnetic induction type position detector to acquire a detection position; Based on the detection position and the coil pitch of the secondary coil, or based on the detection position, the constant speed, and the moving time of the moving body, or the coil pitch of the secondary coil and the constant speed And a constant speed determination process for determining that the mobile body has moved at the constant speed in a predetermined movement section based on the movement time of the mobile body; A detection position corresponding to the start position of any one of the coil pitches in the moving section is set as a reference detection position, and a product of an elapsed time after obtaining the reference detection position and the constant speed is set as the reference detection position.
- An approximate ideal position is obtained by addition, and correction data acquisition processing for acquiring correction data based on the approximate ideal position and
- the detection position correction method of the electromagnetic induction type position detector of the second invention is the detection position correction method of the electromagnetic induction type position detector of the first invention
- the moving section is a section corresponding to n times the coil pitch p (n is a natural number)
- the moving time required for the moving body to move in the moving section at the constant speed S is T 1
- the detection position corresponding to the start position of the movement section is X (t 0 )
- the detection position corresponding to the end position of the movement section is X (t 0 + T 1 )
- If the threshold is ⁇ L
- n * p ⁇ L ⁇ X (t 0 + T 1 ) ⁇ X (t 0 ) ⁇ n * p + L it is determined that the moving body has moved at the constant speed S in the moving section.
- the detection position correction method of the electromagnetic induction type position detector of the third invention is the detection position correction method of the electromagnetic induction type position detector of the first invention.
- the moving section is a section corresponding to n times the coil pitch p (n is a natural number)
- the moving time required for the moving body to move in the moving section at the constant speed S is T 1
- the detection position corresponding to the start position of the movement section is X (t 0 )
- the detection position corresponding to the end position of the movement section is X (t 0 + T 1 )
- If the threshold is ⁇ L
- S * T 1 ⁇ L ⁇ X (t 0 + T 1 ) ⁇ X (t 0 ) ⁇ S * T 1 + L it is determined that the moving body has moved at the constant speed S in the moving section. It is characterized by that.
- the detection position correction method of the electromagnetic induction type position detector of the fourth invention is the detection position correction method of the electromagnetic induction type position detector of the first invention.
- the moving section is a section corresponding to n times the coil pitch p (n is a natural number)
- T 2 is a movement time determined by the mobile body to have traveled the moving section
- If the threshold is ⁇ L, When the condition of n * p ⁇ L ⁇ S * T 2 ⁇ n * p + L is satisfied, it is determined that the moving body has moved at the constant speed S in the moving section.
- a detection position correction method for an electromagnetic induction position detector is the detection position correction method for an electromagnetic induction position detector according to any one of the first to fourth aspects of the invention.
- the time when the detection position corresponding to the starting end position of any coil pitch p in the moving section is acquired is t 0
- the time when the detection position corresponding to the terminal position of any other coil pitch p in the movement section is acquired is defined as t 0 + T.
- a detection position corresponding to the start position of any coil pitch p in the movement section is set as a reference detection position X (t 0 ),
- a detection position correction method for an electromagnetic induction type position detector comprising: A plurality of the movement sections are provided, correction data is acquired in the plurality of movement sections, and an average value of the plurality of correction data is used as final correction data.
- the primary side member includes a primary side member provided with a primary side coil and a secondary side member provided with a secondary side coil.
- an electromagnetic induction type position detector in which the secondary side member is attached to a moving body and moves together with the moving body, and the primary side coil and the secondary side coil are arranged in parallel to face each other.
- a detection position correction method wherein the moving body is moved by a speed command value at a constant speed, and the position of the moving body is detected by the electromagnetic induction type position detector to obtain a detection position; and Based on the detection position and the coil pitch of the secondary coil, or based on the detection position, the constant speed, and the moving time of the moving body, or the coil pitch of the secondary coil and the constant speed And the above Based on the movement time of the body, a constant speed determination process for determining that the moving body has moved at the constant speed in a predetermined movement section, and a detection position corresponding to the start position of any coil pitch in the movement section Is used as a reference detection position, and an approximate ideal position is obtained by adding, to the reference detection position, a product of an elapsed time since the acquisition of the reference detection position and the constant speed, and the approximate ideal position and the detection position.
- correction data acquisition processing that acquires correction data based on the above, it does not require a high-accuracy position detector different from the electromagnetic induction position detector, and the electromagnetic induction position detector itself Thus, correction data can be acquired and the detection position can be corrected.
- the moving section is defined as the coil.
- An interval corresponding to n times the pitch p (n is a natural number) is set, and the moving time required for the moving body to move in the moving interval at the constant speed S is T 1.
- the electromagnetic induction position detector itself Makes it easy and reliable to determine the constant speed of a moving object. I can.
- the moving section is defined as the coil.
- An interval corresponding to n times the pitch p (n is a natural number) is set, and the moving time required for the moving body to move in the moving interval at the constant speed S is T 1.
- the moving section is defined as the coil.
- the pitch p n is a natural number
- the moving time it is determined that required for moving the moving section and T 2
- the threshold value ⁇ L, n * When the condition of p ⁇ L ⁇ S * T 2 ⁇ n * p + L is satisfied, it is determined that the moving body has moved at the constant speed S in the moving section, so that the electromagnetic induction position detector itself
- the condition of p ⁇ L ⁇ S * T 2 ⁇ n * p + L it is determined that the moving body has moved at the constant speed S in the moving section, so that the electromagnetic induction position detector itself
- the detection position correction method of the electromagnetic induction type position detector of the fifth invention in the detection position correction method of any one of the first to fourth inventions, in the correction data acquisition process,
- the detection position corresponding to the start position of any coil pitch p in the moving section is the reference detection position X (t 0 )
- the reference detection position X (t 0 ) is
- ⁇ t is fixed and the index number m is associated with t (m), or
- ⁇ x is fixed
- the detection position correction method of the electromagnetic induction type position detector of the sixth aspect of the invention in the detection position correction method of any one of the first to fifth aspects of the invention, a plurality of the movement sections are provided, Since the correction data is acquired in the plurality of movement sections and the average value of the plurality of correction data is used as the final correction data, correction data with higher accuracy can be acquired.
- FIG. 1 It is a figure which shows the structure of the system which implements the detection position correction method of the electromagnetic induction type position sensor which concerns on Example 1 of this invention. It is a flowchart which shows the process sequence of the said detection position correction method.
- (A) is a graph showing the change over time of the detection position including the error and the change over time of the ideal position, and (b) is a graph showing the change over time of the error included in the detection position.
- (A) is a table showing the correspondence when ⁇ t is fixed and the index number m is associated with t (m), and (b) is the index number m and X (t 0 + t ( It is a table
- (A) is a perspective view showing a state in which a slider of a linear scale and the scale face each other in parallel
- (b) is a diagram showing the slider and the scale side by side
- (c) is an electromagnetic of the slider and the scale. It is a figure which shows a coupling
- Embodiment 1 A detection position correction method for an electromagnetic induction type position detector according to Embodiment 1 of the present invention will be described with reference to FIGS.
- the system shown in FIG. 1 has an electromagnetic induction position detector 11, a drive control device 20, and a moving body 21.
- the moving body 21 is a moving body that moves linearly, such as a table of a machine tool.
- the drive control device 20 includes a feed mechanism unit that linearly moves the moving body 21 (for example, a feed mechanism unit that includes a motor, a ball screw, and the like), and a drive control unit that controls driving of the mobile body 21 by the feed mechanism unit. Etc.
- the electromagnetic induction position detector 11 includes a detection unit 17 and a detection control device 18. Although the case where the electromagnetic induction type position detector 11 is a linear scale will be described here, the present invention can also be applied to the case where the electromagnetic induction type position detector 11 is a rotary type scale.
- the detection control device 18 includes a detection control unit 18A and a fixed memory 18B.
- the detection control unit 18A performs supply of excitation current to the detection unit 17, processing of a detection signal (induced voltage) of the detection unit 17, and the like.
- the fixed memory 18B is a type of memory (RAM, ROM) that retains stored data even when power supply to the fixed memory 18B is stopped.
- the configuration of the detection unit 17 of the electromagnetic induction type position detector 11 (linear scale) and the basic operation of the detection control device 18 (detection control unit 18A) are the same as those in the past.
- the detection unit 17 includes a slider 12 that is a primary side member and a scale 15 that is a secondary side member.
- the slider 12 is a movable part, and includes a first slider coil 13 that is a first primary coil and a second slider coil 14 that is a second primary coil.
- the scale 15 is a fixed part and has a scale coil 16 that is a secondary coil.
- the coils 13, 14, and 16 are folded back in a zigzag shape (comb pattern), and are formed to be linear as a whole.
- the slider 12 is attached to the moving body 21 and moves linearly with the moving body 12.
- the scale 12 is fixed to a fixed part such as a bed of a machine tool.
- the slider 12 (first slider coil 13 and second slider coil 14) and the scale 15 (scale coil 16) face each other in parallel with a predetermined gap g held between them. Are arranged (see FIG. 6A). Further, the first slider coil 13 and the second slider coil 14 are shifted by 1 ⁇ 4 pitch.
- the electromagnetic induction type position detector 11 having such a configuration, when an exciting current (alternating current) is passed through the first slider coil 13 and the second slider coil 14, the first slider coil 13 and the second slider coil 13 are moved along with the movement of the slider 12.
- an exciting current alternating current
- the degree of electromagnetic coupling between the first slider coil 13 and the second slider coil 14 and the scale coil 16 changes periodically (FIG. 6 (c)). For this reason, an induced voltage that periodically changes is generated in the scale coil 16.
- a first excitation current Ia as shown in the following equation (11) is passed through the first slider coil 13, and a second excitation current as shown in the following equation (12) is used. Ib flows through the second slider coil 14.
- Ia ⁇ Icos (k ⁇ ) sin ( ⁇ t) (11)
- Ib Isin (k ⁇ ) sin ( ⁇ t) (12)
- I magnitude of excitation current k: 2 ⁇ / p p: coil pitch (length: angle for rotary scale)
- ⁇ angular frequency of excitation current (alternating current)
- t time
- ⁇ excitation position
- V KIsin (k (X ⁇ )) sin ( ⁇ t) (13)
- K Transmission coefficient depending on gap g and angular frequency ⁇ of exciting current
- X Detection position (moving position of moving body)
- the actual electromagnetic induction type position detector 11 has a manufacturing error and an assembly error. Therefore, the above expression (13) is not satisfied, and the detection position X has an error E.
- a detection position acquisition process is performed in step S1.
- the moving body 21 (slider 12) is moved according to the speed command value of the constant speed S, and the position of the moving body 21 (slider 12) is detected by the electromagnetic induction position detector 11 to detect the detection position X.
- This detection position X can be expressed as X (t) as a function of time t during which the moving body 21 (slider 12) moves.
- a constant speed determination process is performed in step S2.
- the moving body 21 (slider 12) accelerates to the constant speed S and then moves to the vicinity of the target position at the constant speed S. Then, the vehicle decelerates and stops at the target position.
- the vehicle decelerates and stops at the target position.
- step S2 As a result of the constant speed determination process in step S2, if the mobile body 21 (slider 12) cannot be determined to move at the constant speed S in the moving section due to some problem (No), the problem is After the cancellation, the detection position acquisition process in step S1 and the constant speed determination process in step S2 are executed again. On the other hand, as a result of the constant speed determination process in step S2, if it is determined that the moving body 21 has moved at the constant speed S in the moving section (Yes), a correction data acquisition process is performed in the next step S3.
- a detection position corresponding to the start position of any one of the coil pitches p in the moving section is set as a reference detection position, and an elapsed time after acquiring this reference detection position is multiplied by a constant speed S.
- An approximate ideal position (position close to the ideal position) is obtained by adding the value to the reference detection position, and correction data is acquired based on the approximate ideal position and the detection position.
- step S4 the acquired correction data is stored in the fixed memory 18B.
- Detection position acquisition processing In order to acquire the detection position X (t), the moving body 21 (slider 12) is moved at a constant speed S. Specifically, a constant speed S as a speed command value and a target position are given to the drive control device 20.
- the drive control device 20 starts the moving body 21 (slider 12) by controlling the driving of the moving body 21 (slider 12) by the feed mechanism based on the speed command value of the constant speed S and the target position. After accelerating until reaching a constant speed S, it is moved to the vicinity of the target position at the constant speed S, and then decelerated and stopped at the target position. At this time, the detection control unit 18A of the detection control device 18 obtains the detection position X (t).
- the detection position X (t) is accompanied by an error E.
- the horizontal axis is time t
- the vertical axis is X (t), Xi (t).
- FIG. 3A shows the change over time of the detection position X (t) including the error E and the ideal.
- the position (true position) Xi (t) with time is shown.
- 3B the horizontal axis represents time t
- the vertical axis represents error E.
- FIG. 3B shows the change over time of the error E included in the detection position X (t), and the coil of the scale coil 16. It is shown corresponding to the pattern.
- the error E is a period corresponding to the coil pitch period of the scale coil 16 as illustrated in FIG. Fluctuates. Therefore, the detection position X (t) including the error E also periodically varies according to the coil pitch period of the scale coil 16 as illustrated in FIG. Note that in order to clearly show that the frequency fluctuates periodically according to the coil pitch cycle, the error E is represented by a sine wave in FIG. 3, but the actual error E has a slightly distorted waveform.
- the starting position of the coil pitch p means the starting position (starting point) p S in each coil pitch p of the scale coil 16 shown in FIG. 3B, and the end position of the coil pitch p.
- Constant speed determination process A constant speed determination process is performed using the detection position X (t) acquired in the detection position acquisition process. This constant speed determination process is performed by a first constant speed determination method, a second constant speed determination method, or a third constant speed determination method as described below.
- the detected position X (t) at time t 0 is X (t 0 ).
- the detection position X (t) at time t 0 + T 1 is assumed to be X (t 0 + T 1 ).
- a moving time required for the moving body 21 (slider 12) to move at a constant speed S and in a predetermined moving section that is n times the coil pitch p (n is a natural number) is T 1 .
- the movement amount is a movement distance (in the case of a rotary scale, it is a rotation angle).
- the moving time T 1 is a predetermined time set in advance, is determined by a constant speed S, a coil pitch p, and a coil pitch number n, and can be calculated by the equation n * p / S.
- * means the symbol x of multiplication (the same applies to other described portions, and the same applies to claims and drawings).
- the coil pitch p is, for example, 2 mm in the case of a linear scale (for example, 2 degrees in the case of a rotary scale).
- the coil pitch number n is, for example, 256 pitches.
- the predetermined movement section (section corresponding to n times the coil pitch p) is, for example, from the 101st coil pitch p of the scale coil 16 to the 356th scale coil 16 (when the coil pitch number n is 256).
- the section is set up to the coil pitch p.
- the detection position X (t 0 ) is a detection position corresponding to the start position of the predetermined movement section (section corresponding to n times the coil pitch p).
- the start position of the predetermined movement section (section corresponding to n times the coil pitch p) corresponds to the start position of the first (first) coil pitch p in the movement section.
- the detection position X (t 0 + T 1 ) is a detection position corresponding to the end position of the predetermined movement section (section corresponding to n times the coil pitch p).
- the end position of the predetermined movement section (section corresponding to n times the coil pitch p) corresponds to the end position of the last (nth: 256th) coil pitch p in the movement section.
- the start position of the predetermined movement section (section corresponding to n times the coil pitch p) is the first (1 ) Coil position p in the middle (position between the start position and end position of the coil pitch p), and the end position of the predetermined movement section (section corresponding to n times the coil pitch p) is It may be an intermediate position (position between the start end position and the end position of the coil pitch p) of the last (nth: 256th) coil pitch p in the movement section.
- a predetermined moving section (a section corresponding to n times the coil pitch p) in which it is determined that the moving body 21 (slider 12) has moved at a constant speed S is a start position of the first (first) coil pitch p.
- a start position of the first (first) coil pitch p is a start position of the first (first) coil pitch p.
- the last (nth: for example, 256th) coil pitch p from the middle position of the first (first) coil pitch p. It may be a section up to the middle position.
- the amount of movement X (t 0 + T 1) -X (t 0) is the closer to the ideal shift amount n * p, the detection position X (t 0) from the detection position X (t 0 + T 1) to section, i.e. It can be determined that the moving body 21 (slider 12) has moved at a constant speed S in the predetermined movement section (section corresponding to n times the coil pitch p). Times such as t 0 and T 1 can be measured by the number of clock counts provided in the detection control unit 18A of the detection control device 18 (may be measured by other time measurement means).
- the detection position at time t 0 + T 1 X (t 0 + T 1) is able to know the detection control unit 18A.
- the coil pitch p and the coil pitch number n are known values.
- the moving body 21 (slider 12) in the predetermined moving section (section corresponding to n times the coil pitch p) when the following expression (22) is satisfied. Can be determined to have moved at a constant speed S. Note that the relationship between X (t 0 + T 1 ) ⁇ X (t 0 ) and n * p ⁇ L is also illustrated in FIG. n * p ⁇ L ⁇ X (t 0 + T 1 ) ⁇ X (t 0 ) ⁇ n * p + L (22)
- the amount of movement X (t 0 + T 1) -X (t 0) is the ideal moving amount S * the closer to T 1, the detection position from the detection position X (t 0) X (t 0 + T 1) to section, That is, it can be determined that the moving body 21 (slider 12) has moved at a constant speed S in the predetermined movement section (section corresponding to n times the coil pitch p).
- the detection position X (t 0 ) corresponding to the start position of the predetermined movement section (section corresponding to n times the coil pitch p) and the detection position X (t 0 ) are acquired.
- the detection position at time t 0 + T 1 X (t 0 + T 1) is able to know the detection control unit 18A.
- the constant speed S and the movement time T 1 are known values.
- the detection position X (t) at time t 0 is assumed to be X (t 0 ).
- the detection position X (t) at time t 0 + T 1 is assumed to be X (t 0 + T 2 ).
- T 2 be the movement time when it is determined that the moving body 21 (slider 12) needs to move in a predetermined movement section that is n times the coil pitch p (n is a natural number).
- n is a natural number.
- the movement amount is a movement distance (in the case of a rotary scale, it is a rotation angle).
- the moving time T 2 is different from the above-mentioned fixed moving time T 1, and the moving body 21 (slider 12) moves in the predetermined moving section (a section corresponding to n times the coil pitch p).
- This time is determined to be necessary, and varies depending on the magnitude of the error included in the detection positions X (t 0 ) and X (t 0 + T 2 ).
- the coil pitch p is, for example, 2 mm in the case of a linear scale (for example, 2 degrees in the case of a rotary scale).
- the coil pitch number n is, for example, 256 pitches.
- the predetermined moving section (section corresponding to n times the coil pitch p) is, for example, the coil from the 101st coil pitch p of the scale coil 16 to the 356th scale coil 16 (when the coil pitch number n is 256). Set as interval up to pitch p.
- the movement time T 2 is the same as the constant movement time T 1, and thus the detection position X (t 0 ).
- S * T 2 and n * p are equal if the moving body 21 (slider 12) moves at a constant speed S in the section from the detection position X (t 0 + T 2 ) to the detection position X (t 0 + T 2 ).
- the detection positions X (t 0 ) and X (t 0 + T 2 ) include errors, and the movement time T 2 at this time is not the same as the constant movement time T 1 .
- the relationship between the movement amount S * T 2 and the ideal movement amount n * p is also expressed by the following equation (26).
- the above equation (25) is used to determine the constant speed.
- the relationship of the above equation (26) can be used. That is, if S * T 2 is close to n * p, it corresponds to a section from the detection position X (t 0 ) to the detection position X (t 0 + T 2 ), that is, the predetermined movement section (n times the coil pitch p). It is possible to determine that the moving body 21 (slider 12) has moved at a constant speed S in the section to be moved.
- Times such as t 0 and T 2 can be measured by the clock count provided in the detection control unit 18A of the detection control device 18 (may be measured by other time measurement means). Therefore, after obtaining the detection position X (t 0 ) corresponding to the start position of the predetermined movement section (section corresponding to n times the coil pitch p), the predetermined movement section (n times the coil pitch p) is obtained. Elapsed time (moving time) until the detection position X (t 0 + T 2 ) corresponding to the end position of the moving position (slider 12) is obtained in the predetermined moving section (coil pitch p). The movement time T 2 that is determined to have been required to move in the section corresponding to n times the number can be detected by the detection control unit 18A.
- the constant speed S, the coil pitch p, and the coil pitch number n are known values.
- the moving body 21 moves at a constant speed in the predetermined moving section (a section corresponding to n times the coil pitch p) when the condition of the following expression (27) is satisfied. It can be judged that it moved by S. n * p ⁇ L ⁇ S * T 2 ⁇ n * p + L (27)
- the moving body 21 is fixed by a constant speed determination process (a first constant speed determination method, a second constant speed determination method, or a third constant speed determination method).
- a constant speed determination process a first constant speed determination method, a second constant speed determination method, or a third constant speed determination method.
- the detection position X (t 0 ) is a detection position corresponding to the start position of the predetermined movement section (section corresponding to n times the coil pitch p), and the predetermined movement section (coil pitch p of the coil pitch p).
- the start position of the section corresponding to n times corresponds to the start position of the first (first) coil pitch p in the movement section, and corresponds to the predetermined movement section (n times the coil pitch p).
- correction data E (m) is acquired using the detected position data acquired in the section) as a whole will be described.
- the time when the detection position corresponding to the start position of the first (first) coil pitch p in the predetermined movement section (section corresponding to n times the coil pitch p) is acquired is t 0 .
- the time when the detection position corresponding to the terminal position of the last (nth: 256th, for example) coil pitch p in the predetermined movement section (section corresponding to n times the coil pitch p) is acquired as t 0 + T.
- the time T is the movement time T 1 or T 2 described in the constant speed determination process (the first constant speed determination method, the second constant speed determination method, or the third constant speed determination method).
- the detection position X (t 0 ) corresponding to the start position of the first (first) coil pitch p in the predetermined movement section (section corresponding to n times the coil pitch p) is set as a reference detection position.
- the index number m is associated with time t (m) or detection position X (t 0 + t (m)).
- X (t 0 ) + S * t (m) is a value close to the ideal position Xi (t 0 + t (m)).
- a position X (t 0 ) + S * t (m) close to the ideal position Xi (t 0 + t (m)) is referred to as an approximate ideal position.
- the correction data at the index number m is E (m).
- the ideal correction data E (m) can be obtained by subtracting the detected position X (t 0 + t (m)) from the ideal position Xi (t 0 + t (m)) as shown in the following equation (29). .
- the ideal position Xi (t 0 + t (m)) corresponding to the detected position X (t 0 + t (m)) cannot be known.
- E (m) Xi (t 0 + t (m)) ⁇ X (t 0 + t (m)) (29)
- X (t 0 ) is the detected position data acquired in the detected position acquisition process. Since the constant speed S and the time t (m) are known values, they can be calculated based on them.
- X (t 0 ) + S * t (m) and X (t 0 + t (m)) are obtained corresponding to the index number m, and these X (t 0 ) + S * t (m) and X (
- the correction data E (m) is calculated from the above equation (30) using t 0 + t (m)).
- the index number m is fixed with ⁇ t fixed as described above.
- X (t 0 ) + S * t (m) and X (X) are associated with the index number m by a method of associating the index number m with the time t (m) with ⁇ t fixed.
- An example when t 0 + t (m)) is obtained is shown.
- T is obtained by m * ⁇ t. That is, the time t 0 when the detection position X (t 0 ) is acquired is set as the reference time (0), and the time ⁇ t, 2 * ⁇ t, 3 * ⁇ t, every time ⁇ t time elapses from the reference time (0). ..., obtained as T.
- X (t 0 + t (m)) X (t 0 ), X (t 0 + ⁇ t), X (t 0 + 2 * ⁇ t), X (t 0 + 3 * ⁇ t),..., X (t 0 + T ) Is the detected position X (t 0 ) obtained at time t 0 , and thereafter the detected position X (t 0 + ⁇ t), X (t 0 + 2 * ⁇ t), X (t 0 +3) every time ⁇ t time elapses. * ⁇ t),..., X (t 0 + T).
- T is the time t when the detection position X (t 0 ) is acquired.
- the detection position X (t 0 ) + ⁇ x, X (t 0 ) + 2 * ⁇ x, X (t 0 ) + 3 * ⁇ x,. 0 ) + m m * ⁇ x is obtained as times t (1), t (2), t (3),.
- E (0) ( 0)
- E (1), E (2), E (3), .., E (m m ) are stored in order from the head address to each address of the fixed memory 18B. In this way, if the correction data E (m) is stored in order from the head address of the fixed memory 18B, it is not necessary to store the index number m.
- the address of the fixed memory 18B is the predetermined moving section (the section corresponding to n times the coil pitch p) from which the detected position data used for calculating the correction data E (m) is acquired. ) Corresponding to each coil pitch position from the start end position of the first (first) coil pitch p to the end position of the last (nth) coil pitch p. That is, the first address corresponds to the start position of the first (first) coil pitch p, and the m m + 1st address corresponds to the end position of the last (nth) coil pitch p, from the second to m m th. Address sequentially corresponds to each coil pitch position from the start position of the first (first) coil pitch p to the end position of the last (n-th) coil pitch p.
- the present invention is not necessarily limited to this, and the correction data E (m) may be stored at random in the address of the fixed memory 18B.
- the index number m is also stored in the fixed memory 18B, and the index number m and the correction data E (m) may be associated with each other.
- the index number 2 and the correction data E (2) may be stored at the fifth address
- the index number 3 and the correction data E (3) may be stored at the second address.
- the number of correction data E (m) stored in the fixed memory 18B is, for example, when the number of correction data E (m) per coil pitch p is 512 and the coil pitch number n is 256, There will be 131072.
- the predetermined moving section (the section corresponding to n times the coil pitch p) for acquiring the detection position data is made one, but the present invention is not limited to this, and the detection position data is acquired.
- detection position data is acquired in a plurality of movement sections (sections corresponding to n times the coil pitch p) by the same method as described above, and each movement section (coil pitch) is obtained based on these detection position data.
- correction data E (m) for each section is obtained, and an average value of the correction data E (m) for each of these movement sections (section corresponding to n times the coil pitch p) is obtained.
- the final correction data E (m) is used.
- the final (average value) correction data E (m) is stored in the fixed memory 18B. Also in this case, the method for storing the correction data E (m) in the fixed memory 18B is as described above.
- the detection control device 18 detects the detection position when the movable body 21 (slider 12) is moved to perform actual work (for example, machining with a machine tool).
- correction data E (m) is read from the fixed memory 18B.
- the detection position X (t 0 + t (m )) X by adding the correction data obtained E (m) read from the fixed memory 18B to '(t 0 + t (m ) ), And this X ′ (t 0 + t (m)) is output as a corrected detection position.
- X ′ (t 0 + t (m)) X (t 0 + t (m)) + E (m) (31)
- the detection control device 18 detects the position of the moving body 21 (slider 12) and obtains a certain detection position X (t)
- the detection position X (t) is It can be seen which coil pitch position corresponds to the detection position.
- the detection control device 18 detects the position of the moving body 21 (slider 12) and obtains a certain detection position X (t)
- the coil pitch position corresponding to a certain detection position X (t) corresponds to the coil pitch position corresponding to the first correction data E (m) and the second correction data E (m) next thereto.
- the first correction data E (m) for example, correction data E (10)
- the second correction data E (m) for example, correction data E (11)
- the corrected detection position is obtained by adding the correction data subjected to the interpolation to the detection position X (t).
- the correction data E (m) for the n coil pitches p acquired by the correction data acquisition process is repeatedly used for every n coil pitches p of the scale coil 16 to correct the detection position X (t).
- the coil pitch n may be one. That is, the correction data E (m) may be acquired for at least one coil pitch p. In this case, the correction data E (m) for one coil pitch p is repeatedly used for each coil pitch p of the scale coil 16 to correct the detection position X (t).
- the correction data E (m) is obtained using the detection position data in the predetermined movement section (section corresponding to n times the coil pitch p) as a whole, the present invention is not limited to this, and the detection position X ( The correction data E (m) may be obtained using a part of the data of t). That is, from the data of the detection position X (t N1 ) corresponding to the start position of an arbitrary N 1 th (for example, 50th) coil pitch p in the predetermined movement section (section corresponding to n times the coil pitch p).
- the correction data E (m) may be obtained by using it.
- the detection position X (t N1 ) becomes the reference detection position X (t 0 ), and the detection position X (t N2 ) becomes X (t 0 + t (m m )). Also in this case, the correction data E (m) can be acquired by the same method as described above.
- the predetermined movement determined that the moving body 21 has moved at the constant speed S Even when the section (section corresponding to n times the coil pitch p) is from the middle position of the first (first) coil pitch p to the middle position of the last (for example, 256th) coil pitch p,
- the correction data E (m) can be obtained by the same method.
- N 3rd for example, second
- N 4th for example, 256th
- the correction data E (m) may be obtained by using the data up to the detection position X (t N4 ) corresponding to the terminal position of the 255th coil pitch p.
- the end position of the N 4th (for example, 255th) coil pitch p from when the detection position X (t N3 ) corresponding to the start position of the N 3th (for example, 2nd) coil pitch p is obtained.
- T 4 the moving time until the detection position X (t N4 ) corresponding to is obtained is T 4
- the detection position X (t N3 ) becomes the reference detection position X (t 0 )
- the detection position X (t N4 ) becomes X (t 0 + t (m m )).
- the correction data E (m) can be acquired by the same method as described above.
- the detection position data from the middle position to the end position at the first (first) coil pitch p is added after the detection position data at the middle position at the last (for example, 256th) coil pitch p.
- Correction data E (m) may be acquired.
- correction data E (m) corresponding to the end position of the last (for example, 256th) coil pitch p can be acquired from the start end position of the second coil pitch p.
- the detection position correction method of the electromagnetic induction type position detector 11 includes the slider 12 including the first slider coil 13 and the second slider coil 14, and the scale coil 16.
- the slider 12 is attached to the moving body 21 and moves together with the moving body 21, and the first slider coil 13, the second slider coil 14, and the scale coil 16 are parallel to each other and face each other.
- the detection position correction method of the electromagnetic induction type position detector 11 is that the moving section is set to n times the coil pitch p in the constant speed determination process (first constant speed determination method).
- n is a natural number
- the electromagnetic induction position detector 11 itself can easily and reliably determine the constant speed S of the moving body 21.
- the detection position correction method of the electromagnetic induction type position detector 11 is that the moving section is set to n times the coil pitch p in the constant speed determination process (second constant speed determination method).
- n is a natural number
- the moving section is set to a coil pitch p.
- the section is equivalent to n times (n is a natural number)
- the moving time that the mobile body 21 has determined to have moved in the moving section is T 2
- the threshold is ⁇ L, n * p ⁇ L
- the electromagnetic induction position detector 11 itself can easily and reliably determine the constant speed S of the moving body 21.
- the detection position corresponding to the start position of any coil pitch p in the movement section. and t 0 the time when obtaining the time when acquiring the detection position corresponding to the end position of the other one of the coil pitch p in the movement zone and t 0 + T, either in the movement zone
- a detection position corresponding to the start position of the coil pitch p is set as a reference detection position X (t 0 ), and an elapsed time t (m) (m is an index number) after obtaining the reference detection position X (t 0 ).
- a plurality of the movement sections are obtained, correction data is acquired in the plurality of movement sections, and the plurality of correction data The average value is used as final correction data. For this reason, more accurate correction data can be acquired.
- FIG. 5 shows an example of correction data E (m) acquired by the same method as in the first embodiment.
- the horizontal axis represents the index number m
- the vertical axis represents the correction data E (m).
- the error E included in the detection position X (t) varies periodically according to the coil pitch period of the scale coil 16 (FIG. 3B). Therefore, as shown in FIG. 5, the correction data E (m) also varies periodically according to the coil pitch period of the scale coil 16.
- the correction data E (m) is represented by a sine wave in FIG. 5 as in the case of FIG. Similar to the case of the error E, the actual correction data E (m) also has a slightly distorted waveform.
- the detection control device 18 acquires the correction data E (m) and then uses the correction data E (m) as in the first embodiment. Instead of storing all of the correction data in the fixed memory 18B and reading out the correction data E (m) from the fixed memory 18B when correcting the detection position, the following processing is performed.
- correction data E (m) E (1), E (2), E (3),..., E (m m ) as exemplified in FIG.
- the data stored as the component F (i) is the amplitude, frequency, and phase.
- the correction data obtained E ′ (m) is added to the detection position X (t 0 + t (m)) to obtain X ′ ( t 0 + t (m)) is obtained, and this X ′ (t 0 + t (m)) is output as a corrected detection position.
- the details of the correction are the same as in the first embodiment.
- X ′ (t 0 + t (m)) X (t 0 + t (m)) + E ′ (m) (32)
- the correction data E (m) is Fourier-transformed to obtain the component F (i) having a large spectrum.
- the electromagnetic induction position detector is a linear scale.
- the present invention is not limited to this, and the electromagnetic induction position detector is a rotary scale as described above.
- the method of the present invention can be applied.
- the rotary scale has a stator (primary member) provided with a stator coil (primary coil) and a rotor (secondary member) provided with a rotor coil (secondary coil), and the rotor is a moving body. It is attached to the (rotating body) and moves (rotates) together with the moving body (rotating body), and is arranged so that the stator coil and the rotor coil are parallel to each other.
- the correction data is obtained by applying the method of the present invention, and the detection position (rotation angle) of the rotary scale can be corrected by this correction data.
- the present invention relates to a detection position correction method for an electromagnetic induction position detector, and does not use a high-accuracy position detector different from the electromagnetic induction position detector, and acquires correction data by the electromagnetic induction position detector itself.
- the present invention is useful when applied to the detection position correction.
- 11 electromagnetic induction position detector 12 slider, 13 first slider coil, 14 second slider coil, 15 scale, 16 scale coil, 17 detection unit, 18 detection control device, 18A detection control unit, 18B fixed memory, 20 drive control device, 21 moving body
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Abstract
The purpose of the present invention is to provide a method for correcting the detection position of an electromagnetic inductance-type position detector allowing for correction of detection positions without requiring a high precision position detector separate from the electromagnetic inductance-type position detectors, the correction data therefor being acquired by the electromagnetic inductance-type position detector itself. This is accomplished by performing: a detection position acquiring process of acquiring a detection position by moving a moving body according to a velocity command value for a constant velocity and detecting the position of the moving body with the electromagnetic inductance-type position detector; a constant velocity determining process of determining that the moving body has moved at the constant velocity in a prescribed movement section on the basis of, for example, the detection position and coil pitch; and a correction data acquiring process of acquiring correction data on the basis of an approximated ideal position and the detection position, wherein the approximated ideal position is found by adding the product of the constant velocity and the elapsed time since acquisition of a reference detection position to the reference detection position, where the reference detection position is the detection position corresponding to the starting position of any of the coil pitches in the movement section.
Description
本発明はリニア形スケール又はロータリ形スケールである電磁誘導式位置検出器の検出位置補正方法に関する。
The present invention relates to a detection position correction method for an electromagnetic induction type position detector which is a linear scale or a rotary scale.
電磁誘導式位置検出器であるインダクトシン方式のスケールは、工作機械、自動車、ロボットなどの各種機械における位置検出に適用される。インダクトシン方式のスケールにはリニア形スケールとロータリ形スケールがある。リニア形スケールは工作機械のテーブルなどの移動体に設置されて当該移動体の直線的な移動位置を検出するものであり、ロータリ形スケールは工作機械の回転テーブルなどの移動体(回転体)に設置されて当該移動体(回転体)の回転位置(回転角度)を検出するものである。
Induct thin type scale, which is an electromagnetic induction type position detector, is applied to position detection in various machines such as machine tools, automobiles and robots. Induct thin type scales include linear scales and rotary scales. A linear scale is installed on a moving body such as a table of a machine tool and detects a linear movement position of the moving body. A rotary scale is mounted on a moving body (rotating body) such as a rotary table of a machine tool. It is installed and detects the rotational position (rotational angle) of the moving body (rotating body).
リニア形スケールとロータリ形スケールは何れも、互いに平行に向かい合わせになるように配置されたコイルパターンの電磁誘導により位置を検出するものである。この検出原理を図6の原理図に基づいて説明する。
Both the linear scale and the rotary scale detect the position by electromagnetic induction of coil patterns arranged so as to face each other in parallel. This detection principle will be described based on the principle diagram of FIG.
図6(a)はリニア形スケールのスライダとスケールを互いに平行に向かい合わせになるように配置した状態を示す斜視図、図6(b)は前記スライダと前記スケールを並べて示す図、図6(c)は前記スライダと前記スケールの電磁結合度を示す図である。
なお、ロータリ形スケールの検出原理もリニア形スケールと同様であり、ロータリ形スケールのステータとロータがリニア形スケールのスライダとスケールに対応している。リニア形スケールとロータリ形スケールは何れも、検出部と検出制御装置とを有している。 6A is a perspective view showing a state in which a slider and a scale of a linear scale are arranged so as to face each other in parallel, FIG. 6B is a view showing the slider and the scale side by side, FIG. c) is a diagram showing the degree of electromagnetic coupling between the slider and the scale.
The detection principle of the rotary scale is the same as that of the linear scale, and the stator and rotor of the rotary scale correspond to the slider and scale of the linear scale. Each of the linear type scale and the rotary type scale has a detection unit and a detection control device.
なお、ロータリ形スケールの検出原理もリニア形スケールと同様であり、ロータリ形スケールのステータとロータがリニア形スケールのスライダとスケールに対応している。リニア形スケールとロータリ形スケールは何れも、検出部と検出制御装置とを有している。 6A is a perspective view showing a state in which a slider and a scale of a linear scale are arranged so as to face each other in parallel, FIG. 6B is a view showing the slider and the scale side by side, FIG. c) is a diagram showing the degree of electromagnetic coupling between the slider and the scale.
The detection principle of the rotary scale is the same as that of the linear scale, and the stator and rotor of the rotary scale correspond to the slider and scale of the linear scale. Each of the linear type scale and the rotary type scale has a detection unit and a detection control device.
図6(a)及び図6(b)に示すように、リニア形スケールの検出部10は、一次側部材であるスライダ1と、二次側部材であるスケール2とを有している。
As shown in FIGS. 6A and 6B, the linear scale detector 10 includes a slider 1 as a primary member and a scale 2 as a secondary member.
スライダ1は可動部であり、第1の一次側コイルである第1のスライダコイル3と、第2の一次側コイルである第2のスライダコイル4とを有している。スケール2は固定部であり、二次側コイルであるスケールコイル5を有している。コイル3,4,5はジグザグ状に折り返され(櫛形パターンとなっており)、全体が直線状となるように形成されている。スライダ1は工作機械のテーブルなどの移動体に取り付けられて当該移動体とともに直線的に移動する。スケール2は工作機械のベッドなどの固定部に固定される。
The slider 1 is a movable part, and has a first slider coil 3 that is a first primary coil and a second slider coil 4 that is a second primary coil. The scale 2 is a fixed part and has a scale coil 5 that is a secondary coil. The coils 3, 4 and 5 are folded back in a zigzag shape (comb pattern) and formed so as to be linear as a whole. The slider 1 is attached to a moving body such as a table of a machine tool and moves linearly with the moving body. The scale 2 is fixed to a fixed part such as a bed of a machine tool.
図6(a)に示すように、スライダ1(第1のスライダコイル3及び第2のスライダコイル4)と、スケール2(スケールコイル5)は、これらの間に所定のギャップgを保持した状態で互いに平行に向かい合わせになるように配置されている。また、図6(a)及び図6(b)に示すように、第1のスライダコイル3と第2のスライダコイル4は1/4ピッチずれている。
As shown in FIG. 6A, the slider 1 (first slider coil 3 and second slider coil 4) and the scale 2 (scale coil 5) hold a predetermined gap g between them. Are arranged so that they face each other in parallel. Further, as shown in FIGS. 6A and 6B, the first slider coil 3 and the second slider coil 4 are shifted by ¼ pitch.
かかる構成のリニア形スケールでは、第1のスライダコイル3と第2のスライダコイル4に励磁電流(交流電流)を流すと、スライダ1の移動に伴う第1スライダコイル3及び第2スライダコイル4とスケールコイル5との相対的な位置関係の変化に応じて、図6(c)に示すように第1のスライダコイル3及び第2のスライダコイル4とスケールコイル5との電磁結合度が周期的に変化する。このため、スケールコイル5には周期的に変化する誘起電圧が発生する。
In the linear scale having such a configuration, when an exciting current (alternating current) is passed through the first slider coil 3 and the second slider coil 4, the first slider coil 3 and the second slider coil 4 are moved along with the movement of the slider 1. In accordance with the change in the relative positional relationship with the scale coil 5, the degree of electromagnetic coupling between the first slider coil 3 and the second slider coil 4 and the scale coil 5 is periodic as shown in FIG. 6C. To change. For this reason, an induced voltage that periodically changes is generated in the scale coil 5.
具体的には、リニア形スケールの検出制御装置では、下記の(1)式のような第1の励磁電流Iaを第1のスライダコイル3に流し、下記の(2)式のような第2の励磁電流Ibを第2のスライダコイル4に流す。
Specifically, in the linear scale detection control device, a first excitation current Ia as shown in the following equation (1) is passed through the first slider coil 3 and a second as shown in the following equation (2). The exciting current Ib is passed through the second slider coil 4.
Ia=-Icos(kα)sin(ωt) (1)
Ib=Isin(kα)sin(ωt) (2)
但し、I:励磁電流の大きさ
k:2π/p
p:コイルピッチ(長さ:ロータリ形スケールでは角度)
ω:励磁電流(交流電流)の角周波数
t:時間
α:励振位置 Ia = −Icos (kα) sin (ωt) (1)
Ib = Isin (kα) sin (ωt) (2)
Where I: magnitude of excitation current k: 2π / p
p: coil pitch (length: angle for rotary scale)
ω: angular frequency of excitation current (alternating current) t: time α: excitation position
Ib=Isin(kα)sin(ωt) (2)
但し、I:励磁電流の大きさ
k:2π/p
p:コイルピッチ(長さ:ロータリ形スケールでは角度)
ω:励磁電流(交流電流)の角周波数
t:時間
α:励振位置 Ia = −Icos (kα) sin (ωt) (1)
Ib = Isin (kα) sin (ωt) (2)
Where I: magnitude of excitation current k: 2π / p
p: coil pitch (length: angle for rotary scale)
ω: angular frequency of excitation current (alternating current) t: time α: excitation position
その結果、第1のスライダコイル3及び第2のスライダコイル4とスケールコイル5との間の電磁誘導作用により、スケールコイル5には下記の(3)式のような誘起電圧Vが発生する。
As a result, due to the electromagnetic induction action between the first slider coil 3 and the second slider coil 4 and the scale coil 5, an induced voltage V as shown in the following equation (3) is generated in the scale coil 5.
V=KIsin(k(X-α))sin(ωt) (3)
但し、K:ギャップgと励磁電流の角周波数ωに依存する伝達係数
X:検出位置(移動体の移動位置) V = KIsin (k (X−α)) sin (ωt) (3)
However, K: Transmission coefficient depending on gap g and angular frequency ω of exciting current X: Detection position (moving position of moving body)
但し、K:ギャップgと励磁電流の角周波数ωに依存する伝達係数
X:検出位置(移動体の移動位置) V = KIsin (k (X−α)) sin (ωt) (3)
However, K: Transmission coefficient depending on gap g and angular frequency ω of exciting current X: Detection position (moving position of moving body)
前記検出制御装置では、スケールコイル5の誘起電圧Vを入力して、当該誘起電圧Vが0となる励振位置α(即ちX=αとなる励振位置α)の値を計算し、この励振位置αを、移動体(スライダ1)の検出位置Xとして出力し、且つ、この励振位置αに基づいて第1励磁電流Ia及び第2励磁電流Ibを調整する。即ち、X=αとなるように移動体(スライダ1)の位置Xに対して励振位置αを追従させて、誘起電圧V=0となるように制御することにより、移動体(スライダ1)の位置Xを検出して出力する。
In the detection control device, the induced voltage V of the scale coil 5 is inputted, the value of the excitation position α at which the induced voltage V becomes 0 (that is, the excitation position α where X = α) is calculated, and this excitation position α Is output as the detection position X of the movable body (slider 1), and the first excitation current Ia and the second excitation current Ib are adjusted based on the excitation position α. That is, the excitation position α is made to follow the position X of the moving body (slider 1) so that X = α, and control is performed so that the induced voltage V = 0. The position X is detected and output.
しかしながら、現実の電磁誘導式位置検出器(リニア形スケール、ロータリ形スケール)は、製造誤差や組み付け誤差があるため、上記の(3)式が成立せず、検出位置Xに誤差が伴う。一般に検出位置Xに含まれている誤差として顕著に現れるのはコイルピッチ周期の誤差(コイルピッチの周期に応じて周期的に変動する誤差)であり、これを内挿誤差という。
However, actual electromagnetic induction type position detectors (linear type scales, rotary type scales) have manufacturing errors and assembly errors, so the above equation (3) is not satisfied, and the detection position X has an error. In general, an error of the coil pitch period (an error that periodically fluctuates according to the period of the coil pitch) that appears prominently as an error included in the detection position X is referred to as an interpolation error.
検出位置Xを補正する方法としては、電磁誘導式位置検出器とは別の高精度位置検出器を用い、この高精度位置検出器の検出位置と電磁誘導式位置検出器の検出位置Xとに基づいて補正データを取得する方法が考えられる。しかし、この方法では高精度位置検出器を準備しなければならないため、コストが高くなり、手間もかかる。
As a method of correcting the detection position X, a high-accuracy position detector different from the electromagnetic induction position detector is used, and the detection position of the high-accuracy position detector and the detection position X of the electromagnetic induction position detector are used. A method of acquiring correction data based on the above is conceivable. However, this method requires preparation of a high-accuracy position detector, which increases cost and labor.
従って本発明は上記の事情に鑑みてなされたものであり、電磁誘導式位置検出器とは別の高精度位置検出器を必要とせず、電磁誘導式位置検出器自身で補正データを取得して検出位置の補正を行うことができる電磁誘導式位置検出器の検出位置補正方法を提供することを課題とする。
Therefore, the present invention has been made in view of the above circumstances, and does not require a high-accuracy position detector different from the electromagnetic induction position detector, and obtains correction data by the electromagnetic induction position detector itself. It is an object of the present invention to provide a detection position correction method for an electromagnetic induction type position detector capable of correcting a detection position.
上記課題を解決する第1発明の電磁誘導式位置検出器の検出位置補正方法は、
一次側コイルを備えた一次側部材と、二次側コイルを備えた二次側部材とを有し、前記一次側部材又は前記二次側部材が移動体に取り付けられて前記移動体とともに移動し、前記一次側コイルと前記二次側コイルが互いに平行で向かい合わせになるように配置された電磁誘導式位置検出器の検出位置補正方法であって、
一定速度の速度指令値によって前記移動体を移動させ、前記電磁誘導式位置検出器で前記移動体の位置を検出して検出位置を取得する検出位置取得処理と、
前記検出位置と前記二次側コイルのコイルピッチとに基づき、又は、前記検出位置と前記一定速度と前記移動体の移動時間とに基づき、又は、前記二次側コイルのコイルピッチと前記一定速度と前記移動体の移動時間とに基づき、所定の移動区間において前記移動体が前記一定速度で移動したことを判断する一定速度判断処理と、
前記移動区間における何れかのコイルピッチの始端位置に対応する検出位置を基準検出位置とし、前記基準検出位置を取得してからの経過時間と前記一定速度との乗算値を、前記基準検出位置に加算することによって近似理想位置を求め、この近似理想位置と検出位置とに基づいて補正データを取得する補正データ取得処理と
を行うことを特徴とする。 The detection position correction method of the electromagnetic induction type position detector of the first invention that solves the above-described problem is
A primary side member having a primary side coil and a secondary side member having a secondary side coil, and the primary side member or the secondary side member is attached to a movable body and moves together with the movable body. , A detection position correction method of an electromagnetic induction type position detector arranged so that the primary side coil and the secondary side coil are parallel and face each other,
A detection position acquisition process in which the moving body is moved by a speed command value of a constant speed, and the position of the moving body is detected by the electromagnetic induction type position detector to acquire a detection position;
Based on the detection position and the coil pitch of the secondary coil, or based on the detection position, the constant speed, and the moving time of the moving body, or the coil pitch of the secondary coil and the constant speed And a constant speed determination process for determining that the mobile body has moved at the constant speed in a predetermined movement section based on the movement time of the mobile body;
A detection position corresponding to the start position of any one of the coil pitches in the moving section is set as a reference detection position, and a product of an elapsed time after obtaining the reference detection position and the constant speed is set as the reference detection position. An approximate ideal position is obtained by addition, and correction data acquisition processing for acquiring correction data based on the approximate ideal position and the detected position is performed.
一次側コイルを備えた一次側部材と、二次側コイルを備えた二次側部材とを有し、前記一次側部材又は前記二次側部材が移動体に取り付けられて前記移動体とともに移動し、前記一次側コイルと前記二次側コイルが互いに平行で向かい合わせになるように配置された電磁誘導式位置検出器の検出位置補正方法であって、
一定速度の速度指令値によって前記移動体を移動させ、前記電磁誘導式位置検出器で前記移動体の位置を検出して検出位置を取得する検出位置取得処理と、
前記検出位置と前記二次側コイルのコイルピッチとに基づき、又は、前記検出位置と前記一定速度と前記移動体の移動時間とに基づき、又は、前記二次側コイルのコイルピッチと前記一定速度と前記移動体の移動時間とに基づき、所定の移動区間において前記移動体が前記一定速度で移動したことを判断する一定速度判断処理と、
前記移動区間における何れかのコイルピッチの始端位置に対応する検出位置を基準検出位置とし、前記基準検出位置を取得してからの経過時間と前記一定速度との乗算値を、前記基準検出位置に加算することによって近似理想位置を求め、この近似理想位置と検出位置とに基づいて補正データを取得する補正データ取得処理と
を行うことを特徴とする。 The detection position correction method of the electromagnetic induction type position detector of the first invention that solves the above-described problem is
A primary side member having a primary side coil and a secondary side member having a secondary side coil, and the primary side member or the secondary side member is attached to a movable body and moves together with the movable body. , A detection position correction method of an electromagnetic induction type position detector arranged so that the primary side coil and the secondary side coil are parallel and face each other,
A detection position acquisition process in which the moving body is moved by a speed command value of a constant speed, and the position of the moving body is detected by the electromagnetic induction type position detector to acquire a detection position;
Based on the detection position and the coil pitch of the secondary coil, or based on the detection position, the constant speed, and the moving time of the moving body, or the coil pitch of the secondary coil and the constant speed And a constant speed determination process for determining that the mobile body has moved at the constant speed in a predetermined movement section based on the movement time of the mobile body;
A detection position corresponding to the start position of any one of the coil pitches in the moving section is set as a reference detection position, and a product of an elapsed time after obtaining the reference detection position and the constant speed is set as the reference detection position. An approximate ideal position is obtained by addition, and correction data acquisition processing for acquiring correction data based on the approximate ideal position and the detected position is performed.
また、第2発明の電磁誘導式位置検出器の検出位置補正方法は、第1発明の電磁誘導式位置検出器の検出位置補正方法において、
前記一定速度判断処理では、
前記移動区間を、前記コイルピッチpのn倍(nは自然数)に相当する区間とし、
前記移動体が、前記一定速度Sで、前記移動区間を移動するのに要する移動時間をT1とし、
前記移動区間の始端位置に対応する検出位置をX(t0)、前記移動区間の終端位置に対応する検出位置をX(t0+T1)とし、
閾値を±Lとすると、
n*p-L≧X(t0+T1)-X(t0)≧n*p+Lの条件を満たすとき、前記移動区間において前記移動体が前記一定速度Sで移動したと判断する
ことを特徴とする。 Further, the detection position correction method of the electromagnetic induction type position detector of the second invention is the detection position correction method of the electromagnetic induction type position detector of the first invention,
In the constant speed judgment process,
The moving section is a section corresponding to n times the coil pitch p (n is a natural number),
The moving time required for the moving body to move in the moving section at the constant speed S is T 1 ,
The detection position corresponding to the start position of the movement section is X (t 0 ), the detection position corresponding to the end position of the movement section is X (t 0 + T 1 ),
If the threshold is ± L,
When the condition of n * p−L ≧ X (t 0 + T 1 ) −X (t 0 ) ≧ n * p + L is satisfied, it is determined that the moving body has moved at the constant speed S in the moving section. And
前記一定速度判断処理では、
前記移動区間を、前記コイルピッチpのn倍(nは自然数)に相当する区間とし、
前記移動体が、前記一定速度Sで、前記移動区間を移動するのに要する移動時間をT1とし、
前記移動区間の始端位置に対応する検出位置をX(t0)、前記移動区間の終端位置に対応する検出位置をX(t0+T1)とし、
閾値を±Lとすると、
n*p-L≧X(t0+T1)-X(t0)≧n*p+Lの条件を満たすとき、前記移動区間において前記移動体が前記一定速度Sで移動したと判断する
ことを特徴とする。 Further, the detection position correction method of the electromagnetic induction type position detector of the second invention is the detection position correction method of the electromagnetic induction type position detector of the first invention,
In the constant speed judgment process,
The moving section is a section corresponding to n times the coil pitch p (n is a natural number),
The moving time required for the moving body to move in the moving section at the constant speed S is T 1 ,
The detection position corresponding to the start position of the movement section is X (t 0 ), the detection position corresponding to the end position of the movement section is X (t 0 + T 1 ),
If the threshold is ± L,
When the condition of n * p−L ≧ X (t 0 + T 1 ) −X (t 0 ) ≧ n * p + L is satisfied, it is determined that the moving body has moved at the constant speed S in the moving section. And
また、第3発明の電磁誘導式位置検出器の検出位置補正方法は、第1発明の電磁誘導式位置検出器の検出位置補正方法において、
前記一定速度判断処理では、
前記移動区間を、前記コイルピッチpのn倍(nは自然数)に相当する区間とし、
前記移動体が、前記一定速度Sで、前記移動区間を移動するのに要する移動時間をT1とし、
前記移動区間の始端位置に対応する検出位置をX(t0)、前記移動区間の終端位置に対応する検出位置をX(t0+T1)とし、
閾値を±Lとすると、
S*T1-L≧X(t0+T1)-X(t0)≧S*T1+Lの条件を満たすとき、前記移動区間において前記移動体が前記一定速度Sで移動したと判断する
ことを特徴とする。 Further, the detection position correction method of the electromagnetic induction type position detector of the third invention is the detection position correction method of the electromagnetic induction type position detector of the first invention,
In the constant speed judgment process,
The moving section is a section corresponding to n times the coil pitch p (n is a natural number),
The moving time required for the moving body to move in the moving section at the constant speed S is T 1 ,
The detection position corresponding to the start position of the movement section is X (t 0 ), the detection position corresponding to the end position of the movement section is X (t 0 + T 1 ),
If the threshold is ± L,
When the condition of S * T 1 −L ≧ X (t 0 + T 1 ) −X (t 0 ) ≧ S * T 1 + L is satisfied, it is determined that the moving body has moved at the constant speed S in the moving section. It is characterized by that.
前記一定速度判断処理では、
前記移動区間を、前記コイルピッチpのn倍(nは自然数)に相当する区間とし、
前記移動体が、前記一定速度Sで、前記移動区間を移動するのに要する移動時間をT1とし、
前記移動区間の始端位置に対応する検出位置をX(t0)、前記移動区間の終端位置に対応する検出位置をX(t0+T1)とし、
閾値を±Lとすると、
S*T1-L≧X(t0+T1)-X(t0)≧S*T1+Lの条件を満たすとき、前記移動区間において前記移動体が前記一定速度Sで移動したと判断する
ことを特徴とする。 Further, the detection position correction method of the electromagnetic induction type position detector of the third invention is the detection position correction method of the electromagnetic induction type position detector of the first invention,
In the constant speed judgment process,
The moving section is a section corresponding to n times the coil pitch p (n is a natural number),
The moving time required for the moving body to move in the moving section at the constant speed S is T 1 ,
The detection position corresponding to the start position of the movement section is X (t 0 ), the detection position corresponding to the end position of the movement section is X (t 0 + T 1 ),
If the threshold is ± L,
When the condition of S * T 1 −L ≧ X (t 0 + T 1 ) −X (t 0 ) ≧ S * T 1 + L is satisfied, it is determined that the moving body has moved at the constant speed S in the moving section. It is characterized by that.
また、第4発明の電磁誘導式位置検出器の検出位置補正方法は、第1発明の電磁誘導式位置検出器の検出位置補正方法において、
前記一定速度判断処理では、
前記移動区間を、前記コイルピッチpのn倍(nは自然数)に相当する区間とし、
前記移動体が、前記移動区間を移動するのに要したと判断した移動時間をT2とし、
閾値を±Lとすると、
n*p-L≧S*T2≧n*p+Lの条件を満たすとき、前記移動区間において前記移動体が前記一定速度Sで移動したと判断する
ことを特徴とする。 Further, the detection position correction method of the electromagnetic induction type position detector of the fourth invention is the detection position correction method of the electromagnetic induction type position detector of the first invention,
In the constant speed judgment process,
The moving section is a section corresponding to n times the coil pitch p (n is a natural number),
T 2 is a movement time determined by the mobile body to have traveled the moving section,
If the threshold is ± L,
When the condition of n * p−L ≧ S * T 2 ≧ n * p + L is satisfied, it is determined that the moving body has moved at the constant speed S in the moving section.
前記一定速度判断処理では、
前記移動区間を、前記コイルピッチpのn倍(nは自然数)に相当する区間とし、
前記移動体が、前記移動区間を移動するのに要したと判断した移動時間をT2とし、
閾値を±Lとすると、
n*p-L≧S*T2≧n*p+Lの条件を満たすとき、前記移動区間において前記移動体が前記一定速度Sで移動したと判断する
ことを特徴とする。 Further, the detection position correction method of the electromagnetic induction type position detector of the fourth invention is the detection position correction method of the electromagnetic induction type position detector of the first invention,
In the constant speed judgment process,
The moving section is a section corresponding to n times the coil pitch p (n is a natural number),
T 2 is a movement time determined by the mobile body to have traveled the moving section,
If the threshold is ± L,
When the condition of n * p−L ≧ S * T 2 ≧ n * p + L is satisfied, it is determined that the moving body has moved at the constant speed S in the moving section.
また、第5発明の電磁誘導式位置検出器の検出位置補正方法は、第1~第4発明の何れか1つの電磁誘導式位置検出器の検出位置補正方法において、
前記補正データ取得処理では、
前記移動区間における何れかのコイルピッチpの始端位置に対応する検出位置を取得したときの時間をt0とし、
前記移動区間における他の何れかのコイルピッチpの終端位置に対応する検出位置を取得したときの時間をt0+Tとし、
前記移動区間における何れかのコイルピッチpの始端位置に対応する検出位置を基準検出位置X(t0)とし、
前記基準検出位置X(t0)を取得してからの経過時間t(m)(mはインデックス番号)を、t(m)=0~Tとし、
Δtを固定してインデックス番号mとt(m)との対応づけをし、又は、Δxを固定してインデックス番号mとX(t0+t(m))との対応づけをし、
インデックス番号mに対応する補正データE(m)を、E(m)=X(t0)+S*t(m)-X(t0+t(m))の式によって算出する
ことを特徴とする。 A detection position correction method for an electromagnetic induction position detector according to a fifth aspect of the invention is the detection position correction method for an electromagnetic induction position detector according to any one of the first to fourth aspects of the invention.
In the correction data acquisition process,
The time when the detection position corresponding to the starting end position of any coil pitch p in the moving section is acquired is t 0 ,
The time when the detection position corresponding to the terminal position of any other coil pitch p in the movement section is acquired is defined as t 0 + T.
A detection position corresponding to the start position of any coil pitch p in the movement section is set as a reference detection position X (t 0 ),
An elapsed time t (m) (m is an index number) after obtaining the reference detection position X (t 0 ) is t (m) = 0 to T,
Δt is fixed to associate the index number m with t (m), or Δx is fixed to associate the index number m with X (t 0 + t (m)),
The correction data E (m) corresponding to the index number m is calculated by the equation E (m) = X (t 0 ) + S * t (m) −X (t 0 + t (m)). .
前記補正データ取得処理では、
前記移動区間における何れかのコイルピッチpの始端位置に対応する検出位置を取得したときの時間をt0とし、
前記移動区間における他の何れかのコイルピッチpの終端位置に対応する検出位置を取得したときの時間をt0+Tとし、
前記移動区間における何れかのコイルピッチpの始端位置に対応する検出位置を基準検出位置X(t0)とし、
前記基準検出位置X(t0)を取得してからの経過時間t(m)(mはインデックス番号)を、t(m)=0~Tとし、
Δtを固定してインデックス番号mとt(m)との対応づけをし、又は、Δxを固定してインデックス番号mとX(t0+t(m))との対応づけをし、
インデックス番号mに対応する補正データE(m)を、E(m)=X(t0)+S*t(m)-X(t0+t(m))の式によって算出する
ことを特徴とする。 A detection position correction method for an electromagnetic induction position detector according to a fifth aspect of the invention is the detection position correction method for an electromagnetic induction position detector according to any one of the first to fourth aspects of the invention.
In the correction data acquisition process,
The time when the detection position corresponding to the starting end position of any coil pitch p in the moving section is acquired is t 0 ,
The time when the detection position corresponding to the terminal position of any other coil pitch p in the movement section is acquired is defined as t 0 + T.
A detection position corresponding to the start position of any coil pitch p in the movement section is set as a reference detection position X (t 0 ),
An elapsed time t (m) (m is an index number) after obtaining the reference detection position X (t 0 ) is t (m) = 0 to T,
Δt is fixed to associate the index number m with t (m), or Δx is fixed to associate the index number m with X (t 0 + t (m)),
The correction data E (m) corresponding to the index number m is calculated by the equation E (m) = X (t 0 ) + S * t (m) −X (t 0 + t (m)). .
また、第6発明の電磁誘導式位置検出器の検出位置補正方法は、第1~第5発明の何れか1つの電磁誘導式位置検出器の検出位置補正方法において、
前記移動区間を複数とし、これら複数の移動区間で補正データを取得し、これら複数の補正データの平均値を最終的な補正データとすることを特徴とする。 According to a sixth aspect of the present invention, there is provided a detection position correction method for an electromagnetic induction type position detector, comprising:
A plurality of the movement sections are provided, correction data is acquired in the plurality of movement sections, and an average value of the plurality of correction data is used as final correction data.
前記移動区間を複数とし、これら複数の移動区間で補正データを取得し、これら複数の補正データの平均値を最終的な補正データとすることを特徴とする。 According to a sixth aspect of the present invention, there is provided a detection position correction method for an electromagnetic induction type position detector, comprising:
A plurality of the movement sections are provided, correction data is acquired in the plurality of movement sections, and an average value of the plurality of correction data is used as final correction data.
また、第7発明の電磁誘導式位置検出器の検出位置補正方法は、第1~第6発明の何れか1つの電磁誘導式位置検出器の検出位置補正方法において、
前記補正データをフーリエ変換して、スぺクトルの大きい成分F(i)を上位j個分(i=0~j-1)メモリに記憶しておき、
前記メモリから成分F(i)を読み出し、逆フーリエ変換をして補正データを求めること
を特徴とする。 According to a seventh aspect of the present invention, there is provided a detection position correction method for an electromagnetic induction type position detector according to any one of the first to sixth aspects of the detection position correction method for an electromagnetic induction type position detector,
Fourier correction is performed on the correction data, and the component F (i) having a large spectrum is stored in the memory for the upper j (i = 0 to j−1),
The correction data is obtained by reading the component F (i) from the memory and performing inverse Fourier transform.
前記補正データをフーリエ変換して、スぺクトルの大きい成分F(i)を上位j個分(i=0~j-1)メモリに記憶しておき、
前記メモリから成分F(i)を読み出し、逆フーリエ変換をして補正データを求めること
を特徴とする。 According to a seventh aspect of the present invention, there is provided a detection position correction method for an electromagnetic induction type position detector according to any one of the first to sixth aspects of the detection position correction method for an electromagnetic induction type position detector,
Fourier correction is performed on the correction data, and the component F (i) having a large spectrum is stored in the memory for the upper j (i = 0 to j−1),
The correction data is obtained by reading the component F (i) from the memory and performing inverse Fourier transform.
第1発明の電磁誘導式位置検出器の検出位置補正方法によれば、一次側コイルを備えた一次側部材と、二次側コイルを備えた二次側部材とを有し、前記一次側部材又は前記二次側部材が移動体に取り付けられて前記移動体とともに移動し、前記一次側コイルと前記二次側コイルが互いに平行で向かい合わせになるように配置された電磁誘導式位置検出器の検出位置補正方法であって、一定速度の速度指令値によって前記移動体を移動させ、前記電磁誘導式位置検出器で前記移動体の位置を検出して検出位置を取得する検出位置取得処理と、前記検出位置と前記二次側コイルのコイルピッチとに基づき、又は、前記検出位置と前記一定速度と前記移動体の移動時間とに基づき、又は、前記二次側コイルのコイルピッチと前記一定速度と前記移動体の移動時間とに基づき、所定の移動区間において前記移動体が前記一定速度で移動したことを判断する一定速度判断処理と、前記移動区間における何れかのコイルピッチの始端位置に対応する検出位置を基準検出位置とし、前記基準検出位置を取得してからの経過時間と前記一定速度との乗算値を、前記基準検出位置に加算することによって近似理想位置を求め、この近似理想位置と検出位置とに基づいて補正データを取得する補正データ取得処理とを行うことを特徴としているため、電磁誘導式位置検出器とは別の高精度位置検出器を必要とせず、電磁誘導式位置検出器自身で補正データを取得して検出位置の補正を行うことができる。
According to the detection position correction method of the electromagnetic induction type position detector of the first invention, the primary side member includes a primary side member provided with a primary side coil and a secondary side member provided with a secondary side coil. Or an electromagnetic induction type position detector in which the secondary side member is attached to a moving body and moves together with the moving body, and the primary side coil and the secondary side coil are arranged in parallel to face each other. A detection position correction method, wherein the moving body is moved by a speed command value at a constant speed, and the position of the moving body is detected by the electromagnetic induction type position detector to obtain a detection position; and Based on the detection position and the coil pitch of the secondary coil, or based on the detection position, the constant speed, and the moving time of the moving body, or the coil pitch of the secondary coil and the constant speed And the above Based on the movement time of the body, a constant speed determination process for determining that the moving body has moved at the constant speed in a predetermined movement section, and a detection position corresponding to the start position of any coil pitch in the movement section Is used as a reference detection position, and an approximate ideal position is obtained by adding, to the reference detection position, a product of an elapsed time since the acquisition of the reference detection position and the constant speed, and the approximate ideal position and the detection position. Because it is characterized by performing correction data acquisition processing that acquires correction data based on the above, it does not require a high-accuracy position detector different from the electromagnetic induction position detector, and the electromagnetic induction position detector itself Thus, correction data can be acquired and the detection position can be corrected.
第2発明の電磁誘導式位置検出器の検出位置補正方法によれば、第1発明の電磁誘導式位置検出器の検出位置補正方法において、前記一定速度判断処理では、前記移動区間を、前記コイルピッチpのn倍(nは自然数)に相当する区間とし、前記移動体が、前記一定速度Sで、前記移動区間を移動するのに要する移動時間をT1とし、前記移動区間の始端位置に対応する検出位置をX(t0)、前記移動区間の終端位置に対応する検出位置をX(t0+T1)とし、閾値を±Lとすると、n*p-L≧X(t0+T1)-X(t0)≧n*p+Lの条件を満たすとき、前記移動区間において前記移動体が前記一定速度Sで移動したと判断することを特徴としているため、電磁誘導式位置検出器自身で移動体の一定速度の判断を容易且つ確実に行うことができる。
According to the detection position correction method of the electromagnetic induction type position detector of the second aspect of the invention, in the detection position correction method of the electromagnetic induction type position detector of the first aspect of the invention, in the constant speed determination process, the moving section is defined as the coil. An interval corresponding to n times the pitch p (n is a natural number) is set, and the moving time required for the moving body to move in the moving interval at the constant speed S is T 1. If the corresponding detection position is X (t 0 ), the detection position corresponding to the end position of the moving section is X (t 0 + T 1 ), and the threshold is ± L, then n * p−L ≧ X (t 0 + T 1 ) When the condition of −X (t 0 ) ≧ n * p + L is satisfied, it is determined that the moving body has moved at the constant speed S in the moving section. Therefore, the electromagnetic induction position detector itself Makes it easy and reliable to determine the constant speed of a moving object. I can.
第3発明の電磁誘導式位置検出器の検出位置補正方法によれば、第1発明の電磁誘導式位置検出器の検出位置補正方法において、前記一定速度判断処理では、前記移動区間を、前記コイルピッチpのn倍(nは自然数)に相当する区間とし、前記移動体が、前記一定速度Sで、前記移動区間を移動するのに要する移動時間をT1とし、前記移動区間の始端位置に対応する検出位置をX(t0)、前記移動区間の終端位置に対応する検出位置をX(t0+T1)とし、閾値を±Lとすると、S*T1-L≧X(t0+T1)-X(t0)≧S*T1+Lの条件を満たすとき、前記移動区間において前記移動体が前記一定速度Sで移動したと判断することを特徴としているため、電磁誘導式位置検出器自身で移動体の一定速度の判断を容易且つ確実に行うことができる。
According to the detection position correction method of the electromagnetic induction type position detector of the third aspect of the invention, in the detection position correction method of the electromagnetic induction type position detector of the first aspect of the invention, in the constant speed determination process, the moving section is defined as the coil. An interval corresponding to n times the pitch p (n is a natural number) is set, and the moving time required for the moving body to move in the moving interval at the constant speed S is T 1. Assuming that the corresponding detection position is X (t 0 ), the detection position corresponding to the end position of the moving section is X (t 0 + T 1 ), and the threshold is ± L, S * T 1 −L ≧ X (t 0 + T 1 ) −X (t 0 ) ≧ S * T 1 + L When the condition is satisfied, it is determined that the moving body has moved at the constant speed S in the moving section. Easy and reliable determination of the constant speed of the moving body with the detector itself Can be done.
第4発明の電磁誘導式位置検出器の検出位置補正方法によれば、第1発明の電磁誘導式位置検出器の検出位置補正方法において、前記一定速度判断処理では、前記移動区間を、前記コイルピッチpのn倍(nは自然数)に相当する区間とし、前記移動体が、前記移動区間を移動するのに要したと判断した移動時間をT2とし、閾値を±Lとすると、n*p-L≧S*T2≧n*p+Lの条件を満たすとき、前記移動区間において前記移動体が前記一定速度Sで移動したと判断することを特徴としているため、電磁誘導式位置検出器自身で移動体の一定速度の判断を容易且つ確実に行うことができる。
According to the detection position correction method of the electromagnetic induction type position detector of the fourth aspect of the invention, in the detection position correction method of the electromagnetic induction type position detector of the first aspect of the invention, in the constant speed determination process, the moving section is defined as the coil. When n times the pitch p (n is a natural number) and section corresponding to the moving body, the moving time it is determined that required for moving the moving section and T 2, the threshold value ± L, n * When the condition of p−L ≧ S * T 2 ≧ n * p + L is satisfied, it is determined that the moving body has moved at the constant speed S in the moving section, so that the electromagnetic induction position detector itself Thus, it is possible to easily and reliably determine the constant speed of the moving body.
第5発明の電磁誘導式位置検出器の検出位置補正方法によれば、第1~第4発明の何れか1つの電磁誘導式位置検出器の検出位置補正方法において、前記補正データ取得処理では、前記移動区間における何れかのコイルピッチpの始端位置に対応する検出位置を取得したときの時間をt0とし、前記移動区間における他の何れかのコイルピッチpの終端位置に対応する検出位置を取得したときの時間をt0+Tとし、前記移動区間における何れかのコイルピッチpの始端位置に対応する検出位置を基準検出位置X(t0)とし、前記基準検出位置X(t0)を取得してからの経過時間t(m)(mはインデックス番号)を、t(m)=0~Tとし、Δtを固定してインデックス番号mとt(m)との対応づけをし、又は、Δxを固定してインデックス番号mとX(t0+t(m))との対応づけをし、インデックス番号mに対応する補正データE(m)を、E(m)=X(t0)+S*t(m)-X(t0+t(m))の式によって算出することを特徴としているため、電磁誘導式位置検出器自身で補正データE(m)を容易且つ確実に取得することができる。
According to the detection position correction method of the electromagnetic induction type position detector of the fifth invention, in the detection position correction method of any one of the first to fourth inventions, in the correction data acquisition process, The time when the detection position corresponding to the start position of any one of the coil pitches p in the moving section is t 0, and the detection position corresponding to the terminal position of any other coil pitch p in the moving section is The acquired time is t 0 + T, the detection position corresponding to the start position of any coil pitch p in the moving section is the reference detection position X (t 0 ), and the reference detection position X (t 0 ) is The elapsed time t (m) after acquisition (m is an index number) is t (m) = 0 to T, Δt is fixed and the index number m is associated with t (m), or , Δx is fixed The correspondence between box number m and X (t 0 + t (m )), the correction data E corresponding to the index number m a (m), E (m) = X (t 0) + S * t (m) Since the calculation is based on the equation −X (t 0 + t (m)), the correction data E (m) can be easily and reliably acquired by the electromagnetic induction type position detector itself.
第6発明の電磁誘導式位置検出器の検出位置補正方法によれば、第1~第5発明の何れか1つの電磁誘導式位置検出器の検出位置補正方法において、前記移動区間を複数とし、これら複数の移動区間で補正データを取得し、これら複数の補正データの平均値を最終的な補正データとすることを特徴としているため、より精度の高い補正データを取得することができる。
According to the detection position correction method of the electromagnetic induction type position detector of the sixth aspect of the invention, in the detection position correction method of any one of the first to fifth aspects of the invention, a plurality of the movement sections are provided, Since the correction data is acquired in the plurality of movement sections and the average value of the plurality of correction data is used as the final correction data, correction data with higher accuracy can be acquired.
第7発明の電磁誘導式位置検出器の検出位置補正方法によれば、第1~第6発明の何れか1つの電磁誘導式位置検出器の検出位置補正方法において、前記補正データをフーリエ変換して、スぺクトルの大きい成分F(i)を上位j個分(i=0~j-1)メモリに記憶しておき、前記メモリから成分F(i)を読み出し、逆フーリエ変換をして補正データを求めることを特徴としているため、メモリの容量を低減することができる。
According to a detection position correction method for an electromagnetic induction position detector according to a seventh aspect of the present invention, in the detection position correction method for an electromagnetic induction position detector according to any one of the first to sixth aspects, the correction data is subjected to Fourier transform. Then, the component F (i) having a large spectrum is stored in the upper j (i = 0 to j−1) memory, the component F (i) is read from the memory, and the inverse Fourier transform is performed. Since the correction data is obtained, the memory capacity can be reduced.
以下、本発明の実施の形態例を図面に基づいて詳細に説明する。
Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.
<実施の形態例1>
図1~図4に基づき、本発明の実施の形態例1に係る電磁誘導式位置検出器の検出位置補正方法について説明する。 <Embodiment 1>
A detection position correction method for an electromagnetic induction type position detector according toEmbodiment 1 of the present invention will be described with reference to FIGS.
図1~図4に基づき、本発明の実施の形態例1に係る電磁誘導式位置検出器の検出位置補正方法について説明する。 <
A detection position correction method for an electromagnetic induction type position detector according to
まず、図1に基づき、本実施の形態例1の電磁誘導式位置検出器の検出位置補正方法を実施するシステムの構成について説明する。
First, based on FIG. 1, the structure of the system which implements the detection position correction method of the electromagnetic induction type position detector of the first embodiment will be described.
図1に示すシステムは、電磁誘導式位置検出器11と、駆動制御装置20と、移動体21とを有する構成となっている。移動体21は、例えば工作機械のテーブルなどのような直線的に移動する移動体である。駆動制御装置20は、移動体21を直線的に移動させる送り機構部(例えばモータやボールねじなどを備えた送り機構部)や、この送り機構部による移動体21の駆動を制御する駆動制御部などを備えている。
The system shown in FIG. 1 has an electromagnetic induction position detector 11, a drive control device 20, and a moving body 21. The moving body 21 is a moving body that moves linearly, such as a table of a machine tool. The drive control device 20 includes a feed mechanism unit that linearly moves the moving body 21 (for example, a feed mechanism unit that includes a motor, a ball screw, and the like), and a drive control unit that controls driving of the mobile body 21 by the feed mechanism unit. Etc.
電磁誘導式位置検出器11は、検出部17と検出制御装置18とを有している。
なお、ここでは電磁誘導式位置検出器11がリニア形スケールである場合について説明するが、本発明は電磁誘導式位置検出器11がロータリ形スケールである場合についても適用することができる。 The electromagneticinduction position detector 11 includes a detection unit 17 and a detection control device 18.
Although the case where the electromagnetic inductiontype position detector 11 is a linear scale will be described here, the present invention can also be applied to the case where the electromagnetic induction type position detector 11 is a rotary type scale.
なお、ここでは電磁誘導式位置検出器11がリニア形スケールである場合について説明するが、本発明は電磁誘導式位置検出器11がロータリ形スケールである場合についても適用することができる。 The electromagnetic
Although the case where the electromagnetic induction
検出制御装置18は、検出制御部18Aと固定メモリ18Bとを有している。検出制御部18Aは、検出部17への励磁電流の供給や検出部17の検出信号(誘起電圧)の処理などを行う。固定メモリ18Bは、固定メモリ18Bへの給電を停止しても記憶データが保持されるタイプのメモリ(RAM、ROM)である。
The detection control device 18 includes a detection control unit 18A and a fixed memory 18B. The detection control unit 18A performs supply of excitation current to the detection unit 17, processing of a detection signal (induced voltage) of the detection unit 17, and the like. The fixed memory 18B is a type of memory (RAM, ROM) that retains stored data even when power supply to the fixed memory 18B is stopped.
電磁誘導式位置検出器11(リニア形スケール)の検出部17の構成や、検出制御装置18(検出制御部18A)の基本的な動作については、従来と同様である。
The configuration of the detection unit 17 of the electromagnetic induction type position detector 11 (linear scale) and the basic operation of the detection control device 18 (detection control unit 18A) are the same as those in the past.
詳述すると、検出部17は、一次側部材であるスライダ12と、二次側部材であるスケール15とを有している。
スライダ12は可動部であり、第1の一次側コイルである第1のスライダコイル13と、第2の一次側コイルである第2のスライダコイル14とを有している。スケール15は固定部であり、二次側コイルであるスケールコイル16を有している。コイル13,14,16はジグザグ状に折り返され(櫛形パターンとなっており)、全体が直線状となるように形成されている。スライダ12は移動体21に取り付けられて移動体12とともに直線的に移動する。スケール12は例えば工作機械のベッドなどの固定部に固定される。 More specifically, thedetection unit 17 includes a slider 12 that is a primary side member and a scale 15 that is a secondary side member.
Theslider 12 is a movable part, and includes a first slider coil 13 that is a first primary coil and a second slider coil 14 that is a second primary coil. The scale 15 is a fixed part and has a scale coil 16 that is a secondary coil. The coils 13, 14, and 16 are folded back in a zigzag shape (comb pattern), and are formed to be linear as a whole. The slider 12 is attached to the moving body 21 and moves linearly with the moving body 12. The scale 12 is fixed to a fixed part such as a bed of a machine tool.
スライダ12は可動部であり、第1の一次側コイルである第1のスライダコイル13と、第2の一次側コイルである第2のスライダコイル14とを有している。スケール15は固定部であり、二次側コイルであるスケールコイル16を有している。コイル13,14,16はジグザグ状に折り返され(櫛形パターンとなっており)、全体が直線状となるように形成されている。スライダ12は移動体21に取り付けられて移動体12とともに直線的に移動する。スケール12は例えば工作機械のベッドなどの固定部に固定される。 More specifically, the
The
スライダ12(第1のスライダコイル13及び第2のスライダコイル14)と、スケール15(スケールコイル16)は、これらの間に所定のギャップgを保持した状態で互いに平行に向かい合わせになるように配置されている(図6(a)参照)。また、第1のスライダコイル13と第2のスライダコイル14は1/4ピッチずれている。
The slider 12 (first slider coil 13 and second slider coil 14) and the scale 15 (scale coil 16) face each other in parallel with a predetermined gap g held between them. Are arranged (see FIG. 6A). Further, the first slider coil 13 and the second slider coil 14 are shifted by ¼ pitch.
かかる構成の電磁誘導式位置検出器11では、第1のスライダコイル13と第2のスライダコイル14に励磁電流(交流電流)を流すと、スライダ12の移動に伴う第1スライダコイル13及び第2スライダコイル14とスケールコイル16との相対的な位置関係の変化に応じて、第1のスライダコイル13及び第2のスライダコイル14とスケールコイル16との電磁結合度が周期的に変化する(図6(c)参照)。このため、スケールコイル16には周期的に変化する誘起電圧が発生する。
In the electromagnetic induction type position detector 11 having such a configuration, when an exciting current (alternating current) is passed through the first slider coil 13 and the second slider coil 14, the first slider coil 13 and the second slider coil 13 are moved along with the movement of the slider 12. In accordance with the change in the relative positional relationship between the slider coil 14 and the scale coil 16, the degree of electromagnetic coupling between the first slider coil 13 and the second slider coil 14 and the scale coil 16 changes periodically (FIG. 6 (c)). For this reason, an induced voltage that periodically changes is generated in the scale coil 16.
具体的には、検出制御部18Aでは、下記の(11)式のような第1の励磁電流Iaを第1のスライダコイル13に流し、下記の(12)式のような第2の励磁電流Ibを第2のスライダコイル14に流す。
Specifically, in the detection control unit 18A, a first excitation current Ia as shown in the following equation (11) is passed through the first slider coil 13, and a second excitation current as shown in the following equation (12) is used. Ib flows through the second slider coil 14.
Ia=-Icos(kα)sin(ωt) (11)
Ib=Isin(kα)sin(ωt) (12)
但し、I:励磁電流の大きさ
k:2π/p
p:コイルピッチ(長さ:ロータリ形スケールでは角度)
ω:励磁電流(交流電流)の角周波数
t:時間
α:励振位置 Ia = −Icos (kα) sin (ωt) (11)
Ib = Isin (kα) sin (ωt) (12)
Where I: magnitude of excitation current k: 2π / p
p: coil pitch (length: angle for rotary scale)
ω: angular frequency of excitation current (alternating current) t: time α: excitation position
Ib=Isin(kα)sin(ωt) (12)
但し、I:励磁電流の大きさ
k:2π/p
p:コイルピッチ(長さ:ロータリ形スケールでは角度)
ω:励磁電流(交流電流)の角周波数
t:時間
α:励振位置 Ia = −Icos (kα) sin (ωt) (11)
Ib = Isin (kα) sin (ωt) (12)
Where I: magnitude of excitation current k: 2π / p
p: coil pitch (length: angle for rotary scale)
ω: angular frequency of excitation current (alternating current) t: time α: excitation position
その結果、第1のスライダコイル13及び第2のスライダコイル14とスケールコイル16との間の電磁誘導作用により、スケールコイル16には下記の(3)式のような誘起電圧Vが発生する。
As a result, due to the electromagnetic induction action between the first slider coil 13 and the second slider coil 14 and the scale coil 16, an induced voltage V as shown in the following equation (3) is generated in the scale coil 16.
V=KIsin(k(X-α))sin(ωt) (13)
但し、K:ギャップgと励磁電流の角周波数ωに依存する伝達係数
X:検出位置(移動体の移動位置) V = KIsin (k (X−α)) sin (ωt) (13)
However, K: Transmission coefficient depending on gap g and angular frequency ω of exciting current X: Detection position (moving position of moving body)
但し、K:ギャップgと励磁電流の角周波数ωに依存する伝達係数
X:検出位置(移動体の移動位置) V = KIsin (k (X−α)) sin (ωt) (13)
However, K: Transmission coefficient depending on gap g and angular frequency ω of exciting current X: Detection position (moving position of moving body)
検出制御部18Aでは、スケールコイル16の誘起電圧Vを入力して、当該誘起電圧Vが0となる励振位置α(即ちX=αとなる励振位置α)の値を計算し、この励振位置αを、移動体21(スライダ12)の検出位置Xとして出力し、且つ、この励振位置αに基づいて第1励磁電流Ia及び第2励磁電流Ibを調整する。即ち、X=αとなるように移動体21(スライダ12)の位置Xに対して励振位置αを追従させて、誘起電圧V=0となるように制御することにより、移動体21(スライダ12)の位置Xを検出して出力する。
In the detection control unit 18A, the induced voltage V of the scale coil 16 is input, the value of the excitation position α where the induced voltage V becomes 0 (that is, the excitation position α where X = α) is calculated, and this excitation position α Is output as the detection position X of the moving body 21 (slider 12), and the first excitation current Ia and the second excitation current Ib are adjusted based on the excitation position α. In other words, the excitation position α is made to follow the position X of the moving body 21 (slider 12) so that X = α, and control is performed so that the induced voltage V = 0. ) Is detected and output.
ところが、先にも述べたとおり、現実の電磁誘導式位置検出器11は、製造誤差や組み付け誤差があるため、上記の(13)式が成立せず、検出位置Xに誤差Eが伴う。この誤差Eとして顕著に現れるのはコイルピッチ周期の誤差(内挿誤差)である。
However, as described above, the actual electromagnetic induction type position detector 11 has a manufacturing error and an assembly error. Therefore, the above expression (13) is not satisfied, and the detection position X has an error E. An error (interpolation error) of the coil pitch period that appears prominently as this error E.
このため、精度のよい位置検出を行うには、補正データを取得して検出位置Xを補正する必要がある。
Therefore, in order to perform accurate position detection, it is necessary to acquire correction data and correct the detection position X.
以下、この検出位置Xの補正方法について説明する。まず、図2のフローチャートに基づき、検出制御装置18(検出制御部18A、固定メモリ18B)で実施する検出位置補正方法の各処理について概要を説明し、続いて図1~図4に基づき、前記検出位置補正方法の各処理について詳細に説明する。
Hereinafter, a method for correcting the detection position X will be described. First, an outline of each process of the detection position correction method performed by the detection control device 18 (detection control unit 18A, fixed memory 18B) will be described based on the flowchart of FIG. Each process of the detection position correction method will be described in detail.
図2に示すように、まず、ステップS1で検出位置取得処理を行う。
この検出位置取得処理では、一定速度Sの速度指令値によって移動体21(スライダ12)を移動させ、電磁誘導式位置検出器11で移動体21(スライダ12)の位置を検出して検出位置Xを取得する。この検出位置Xは、移動体21(スライダ12)が移動する時間tの関数としてX(t)と表すことができる。 As shown in FIG. 2, first, a detection position acquisition process is performed in step S1.
In this detection position acquisition process, the moving body 21 (slider 12) is moved according to the speed command value of the constant speed S, and the position of the moving body 21 (slider 12) is detected by the electromagneticinduction position detector 11 to detect the detection position X. To get. This detection position X can be expressed as X (t) as a function of time t during which the moving body 21 (slider 12) moves.
この検出位置取得処理では、一定速度Sの速度指令値によって移動体21(スライダ12)を移動させ、電磁誘導式位置検出器11で移動体21(スライダ12)の位置を検出して検出位置Xを取得する。この検出位置Xは、移動体21(スライダ12)が移動する時間tの関数としてX(t)と表すことができる。 As shown in FIG. 2, first, a detection position acquisition process is performed in step S1.
In this detection position acquisition process, the moving body 21 (slider 12) is moved according to the speed command value of the constant speed S, and the position of the moving body 21 (slider 12) is detected by the electromagnetic
次に、ステップS2において一定速度判断処理を行う。
一定速度Sの速度指令値によって移動体21(スライダ12)を移動させる場合、移動体21(スライダ12)は、一定速度Sになるまで加速した後、一定速度Sで目標位置の近くまで移動し、その後、減速して目標位置に停止する。そして、補正データの取得には、移動体21(スライダ12)が実際に一定速度Sで移動したときの検出位置X(t)を用いる必要がある。
このため、一定速度判断処理では、検出位置X(t)と二次側コイル16のコイルピッチpとに基づき(第1の一定速度判断方法)、又は、検出位置X(t)と一定速度Sと移動体21(スライダ12)の移動時間とに基づき(第2の一定速度判断方法)、又は、二次側コイル16のコイルピッチpと一定速度Sと移動体21(スライダ12)の移動時間とに基づき(第3の一定速度判断方法)、所定の移動区間において移動体21が一定速度Sで移動したことを判断する。 Next, a constant speed determination process is performed in step S2.
When moving the moving body 21 (slider 12) according to the speed command value of the constant speed S, the moving body 21 (slider 12) accelerates to the constant speed S and then moves to the vicinity of the target position at the constant speed S. Then, the vehicle decelerates and stops at the target position. For obtaining the correction data, it is necessary to use the detected position X (t) when the moving body 21 (slider 12) actually moves at a constant speed S.
Therefore, in the constant speed determination process, based on the detection position X (t) and the coil pitch p of the secondary coil 16 (first constant speed determination method), or the detection position X (t) and the constant speed S. And the moving time of the moving body 21 (slider 12) (second constant speed determination method) or the coil pitch p and the constant speed S of thesecondary coil 16 and the moving time of the moving body 21 (slider 12). Based on the above (third constant speed determination method), it is determined that the moving body 21 has moved at a constant speed S in a predetermined movement section.
一定速度Sの速度指令値によって移動体21(スライダ12)を移動させる場合、移動体21(スライダ12)は、一定速度Sになるまで加速した後、一定速度Sで目標位置の近くまで移動し、その後、減速して目標位置に停止する。そして、補正データの取得には、移動体21(スライダ12)が実際に一定速度Sで移動したときの検出位置X(t)を用いる必要がある。
このため、一定速度判断処理では、検出位置X(t)と二次側コイル16のコイルピッチpとに基づき(第1の一定速度判断方法)、又は、検出位置X(t)と一定速度Sと移動体21(スライダ12)の移動時間とに基づき(第2の一定速度判断方法)、又は、二次側コイル16のコイルピッチpと一定速度Sと移動体21(スライダ12)の移動時間とに基づき(第3の一定速度判断方法)、所定の移動区間において移動体21が一定速度Sで移動したことを判断する。 Next, a constant speed determination process is performed in step S2.
When moving the moving body 21 (slider 12) according to the speed command value of the constant speed S, the moving body 21 (slider 12) accelerates to the constant speed S and then moves to the vicinity of the target position at the constant speed S. Then, the vehicle decelerates and stops at the target position. For obtaining the correction data, it is necessary to use the detected position X (t) when the moving body 21 (slider 12) actually moves at a constant speed S.
Therefore, in the constant speed determination process, based on the detection position X (t) and the coil pitch p of the secondary coil 16 (first constant speed determination method), or the detection position X (t) and the constant speed S. And the moving time of the moving body 21 (slider 12) (second constant speed determination method) or the coil pitch p and the constant speed S of the
ステップS2の一定速度判断処理の結果、何らかの不具合により、前記移動区間において移動体21(スライダ12)が一定速度Sで移動したと判断することができなかった場合(No)には、当該不具合が解消した後、再度、ステップS1の検出位置取得処理とステップS2の一定速度判断処理を実行する。
一方、ステップS2の一定速度判断処理の結果、前記移動区間において移動体21が一定速度Sで移動したと判断した場合(Yes)、次のステップS3において補正データ取得処理を行う。 As a result of the constant speed determination process in step S2, if the mobile body 21 (slider 12) cannot be determined to move at the constant speed S in the moving section due to some problem (No), the problem is After the cancellation, the detection position acquisition process in step S1 and the constant speed determination process in step S2 are executed again.
On the other hand, as a result of the constant speed determination process in step S2, if it is determined that the movingbody 21 has moved at the constant speed S in the moving section (Yes), a correction data acquisition process is performed in the next step S3.
一方、ステップS2の一定速度判断処理の結果、前記移動区間において移動体21が一定速度Sで移動したと判断した場合(Yes)、次のステップS3において補正データ取得処理を行う。 As a result of the constant speed determination process in step S2, if the mobile body 21 (slider 12) cannot be determined to move at the constant speed S in the moving section due to some problem (No), the problem is After the cancellation, the detection position acquisition process in step S1 and the constant speed determination process in step S2 are executed again.
On the other hand, as a result of the constant speed determination process in step S2, if it is determined that the moving
この補正データ取得処理では、前記移動区間における何れかのコイルピッチpの始端位置に対応する検出位置を基準検出位置とし、この基準検出位置を取得してからの経過時間と一定速度Sとの乗算値を、基準検出位置に加算することによって近似理想位置(理想位置に近い位置)を求め、この近似理想位置と検出位置とに基づいて補正データを取得する。
In this correction data acquisition process, a detection position corresponding to the start position of any one of the coil pitches p in the moving section is set as a reference detection position, and an elapsed time after acquiring this reference detection position is multiplied by a constant speed S. An approximate ideal position (position close to the ideal position) is obtained by adding the value to the reference detection position, and correction data is acquired based on the approximate ideal position and the detection position.
ステップS4では、取得した補正データを固定メモリ18Bに記憶させる。
In step S4, the acquired correction data is stored in the fixed memory 18B.
次に、検出位置補正方法の各処理、即ち、検出位置取得処理と一定速度判断処理と補正データ取得処理について説明する。
Next, each process of the detection position correction method, that is, a detection position acquisition process, a constant speed determination process, and a correction data acquisition process will be described.
(1) 検出位置取得処理
検出位置X(t)を取得するため、移動体21(スライダ12)を一定速度Sで移動させる。
具体的には、駆動制御装置20に速度指令値としての一定速度Sと目標位置とを与える。駆動制御装置20は、一定速度Sの速度指令値と目標位置とに基づき、送り機構部による移動体21(スライダ12)の駆動を制御することにより、移動体21(スライダ12)を、始動させて一定速度Sになるまで加速させた後、一定速度Sで目標位置の近くまで移動させ、その後、減速させて目標位置に停止させる。
このときに検出制御装置18の検出制御部18Aでは、検出位置X(t)を得る。 (1) Detection position acquisition processing In order to acquire the detection position X (t), the moving body 21 (slider 12) is moved at a constant speed S.
Specifically, a constant speed S as a speed command value and a target position are given to thedrive control device 20. The drive control device 20 starts the moving body 21 (slider 12) by controlling the driving of the moving body 21 (slider 12) by the feed mechanism based on the speed command value of the constant speed S and the target position. After accelerating until reaching a constant speed S, it is moved to the vicinity of the target position at the constant speed S, and then decelerated and stopped at the target position.
At this time, thedetection control unit 18A of the detection control device 18 obtains the detection position X (t).
検出位置X(t)を取得するため、移動体21(スライダ12)を一定速度Sで移動させる。
具体的には、駆動制御装置20に速度指令値としての一定速度Sと目標位置とを与える。駆動制御装置20は、一定速度Sの速度指令値と目標位置とに基づき、送り機構部による移動体21(スライダ12)の駆動を制御することにより、移動体21(スライダ12)を、始動させて一定速度Sになるまで加速させた後、一定速度Sで目標位置の近くまで移動させ、その後、減速させて目標位置に停止させる。
このときに検出制御装置18の検出制御部18Aでは、検出位置X(t)を得る。 (1) Detection position acquisition processing In order to acquire the detection position X (t), the moving body 21 (slider 12) is moved at a constant speed S.
Specifically, a constant speed S as a speed command value and a target position are given to the
At this time, the
このときに検出位置X(t)は誤差Eを伴っている。
図3(a)において横軸は時間t、縦軸はX(t),Xi(t)であり、図3(a)には誤差Eを含む検出位置X(t)の経時変化と、理想位置(真の位置)Xi(t)の経時変化とを示している。
図3(b)において横軸は時間t、縦軸は誤差Eであり、図3(b)には検出位置X(t)に含まれている誤差Eの経時変化を、スケールコイル16のコイルパターンに対応させて示している。 At this time, the detection position X (t) is accompanied by an error E.
3A, the horizontal axis is time t, and the vertical axis is X (t), Xi (t). FIG. 3A shows the change over time of the detection position X (t) including the error E and the ideal. The position (true position) Xi (t) with time is shown.
3B, the horizontal axis represents time t, and the vertical axis represents error E. FIG. 3B shows the change over time of the error E included in the detection position X (t), and the coil of thescale coil 16. It is shown corresponding to the pattern.
図3(a)において横軸は時間t、縦軸はX(t),Xi(t)であり、図3(a)には誤差Eを含む検出位置X(t)の経時変化と、理想位置(真の位置)Xi(t)の経時変化とを示している。
図3(b)において横軸は時間t、縦軸は誤差Eであり、図3(b)には検出位置X(t)に含まれている誤差Eの経時変化を、スケールコイル16のコイルパターンに対応させて示している。 At this time, the detection position X (t) is accompanied by an error E.
3A, the horizontal axis is time t, and the vertical axis is X (t), Xi (t). FIG. 3A shows the change over time of the detection position X (t) including the error E and the ideal. The position (true position) Xi (t) with time is shown.
3B, the horizontal axis represents time t, and the vertical axis represents error E. FIG. 3B shows the change over time of the error E included in the detection position X (t), and the coil of the
前述のとおり誤差Eとして顕著に現れるのはコイルピッチ周期の誤差(内挿誤差)であるため、誤差Eは、図3(b)に例示するようにスケールコイル16のコイルピッチ周期に応じて周期的に変動する。従って、誤差Eを含む検出位置X(t)も、図3(a)に例示するようにスケールコイル16のコイルピッチ周期に応じて周期的に変動する。なお、コイルピッチ周期に応じて周期的に変動することを明示するため、図3では誤差Eを正弦波で表しているが、実際の誤差Eは、もう少し歪んだ波形となる。
As described above, since the error (interpolation error) of the coil pitch appears significantly as the error E, the error E is a period corresponding to the coil pitch period of the scale coil 16 as illustrated in FIG. Fluctuates. Therefore, the detection position X (t) including the error E also periodically varies according to the coil pitch period of the scale coil 16 as illustrated in FIG. Note that in order to clearly show that the frequency fluctuates periodically according to the coil pitch cycle, the error E is represented by a sine wave in FIG. 3, but the actual error E has a slightly distorted waveform.
なお、以下の説明において、コイルピッチpの始端位置とは、図3(b)に示すスケールコイル16の各コイルピッチpにおける始めの位置(始点)pSを意味し、コイルピッチpの終端位置とは、図3(b)に示すスケールコイル16の各コイルピッチpにおける終わり位置(終点)pEを意味する。なお、始端位置及び終端位置は何れも、隣り合うコイルピッチpの境界(節目)でもある。
In the following description, the starting position of the coil pitch p means the starting position (starting point) p S in each coil pitch p of the scale coil 16 shown in FIG. 3B, and the end position of the coil pitch p. Means the end position (end point) p E at each coil pitch p of the scale coil 16 shown in FIG. Note that both the start end position and the end position are also boundaries (nodes) between adjacent coil pitches p.
(2) 一定速度判断処理
検出位置取得処理で取得した検出位置X(t)を用いて、一定速度判断処理を行う。
この一定速度判断処理は、以下に示すような第1の一定速度判断方法又は第2の一定速度判断方法又は第3の一定速度判断方法によって行う。 (2) Constant speed determination process A constant speed determination process is performed using the detection position X (t) acquired in the detection position acquisition process.
This constant speed determination process is performed by a first constant speed determination method, a second constant speed determination method, or a third constant speed determination method as described below.
検出位置取得処理で取得した検出位置X(t)を用いて、一定速度判断処理を行う。
この一定速度判断処理は、以下に示すような第1の一定速度判断方法又は第2の一定速度判断方法又は第3の一定速度判断方法によって行う。 (2) Constant speed determination process A constant speed determination process is performed using the detection position X (t) acquired in the detection position acquisition process.
This constant speed determination process is performed by a first constant speed determination method, a second constant speed determination method, or a third constant speed determination method as described below.
(a) 第1の一定速度判断方法
時間t0における検出位置X(t)を、X(t0)とする。
時間t0+T1における検出位置X(t)を、X(t0+T1)とする。
移動体21(スライダ12)が、一定速度Sで、コイルピッチpのn倍(nは自然数)である所定の移動区間を移動するのに要する移動時間をT1とする。なお、ここでは電磁誘導式位置検出器11としてリニア形スケールの例(図1)を示しているため、移動量は移動距離である(ロータリ形スケールの場合には回転角度になる)。
移動時間T1はあらかじめ設定した一定時間であり、一定速度Sとコイルピッチpとコイルピッチ数nによって決まり、n*p/Sの式によって算出できる。なお、*は掛け算の記号×を意味している(他の記載箇所においても同様であり、特許請求の範囲及び図面においても同様である)。
コイルピッチpは、リニア形スケールの場合には例えば2mm(ロータリ形スケールの場合には例えば2度)である。
コイルピッチ数nは、例えば256ピッチとする。
前記所定の移動区間(コイルピッチpのn倍に相当する区間)は、例えば、スケールコイル16の101番目のコイルピッチpから、スケールコイル16の356番目(コイルピッチ数nが256の場合)のコイルピッチpまでの区間として設定する。 (A) First Constant Speed Determination Method The detected position X (t) at time t 0 is X (t 0 ).
The detection position X (t) at time t 0 + T 1 is assumed to be X (t 0 + T 1 ).
A moving time required for the moving body 21 (slider 12) to move at a constant speed S and in a predetermined moving section that is n times the coil pitch p (n is a natural number) is T 1 . Here, since an example of a linear scale (FIG. 1) is shown as the electromagnetic inductiontype position detector 11, the movement amount is a movement distance (in the case of a rotary scale, it is a rotation angle).
The moving time T 1 is a predetermined time set in advance, is determined by a constant speed S, a coil pitch p, and a coil pitch number n, and can be calculated by the equation n * p / S. In addition, * means the symbol x of multiplication (the same applies to other described portions, and the same applies to claims and drawings).
The coil pitch p is, for example, 2 mm in the case of a linear scale (for example, 2 degrees in the case of a rotary scale).
The coil pitch number n is, for example, 256 pitches.
The predetermined movement section (section corresponding to n times the coil pitch p) is, for example, from the 101st coil pitch p of thescale coil 16 to the 356th scale coil 16 (when the coil pitch number n is 256). The section is set up to the coil pitch p.
時間t0における検出位置X(t)を、X(t0)とする。
時間t0+T1における検出位置X(t)を、X(t0+T1)とする。
移動体21(スライダ12)が、一定速度Sで、コイルピッチpのn倍(nは自然数)である所定の移動区間を移動するのに要する移動時間をT1とする。なお、ここでは電磁誘導式位置検出器11としてリニア形スケールの例(図1)を示しているため、移動量は移動距離である(ロータリ形スケールの場合には回転角度になる)。
移動時間T1はあらかじめ設定した一定時間であり、一定速度Sとコイルピッチpとコイルピッチ数nによって決まり、n*p/Sの式によって算出できる。なお、*は掛け算の記号×を意味している(他の記載箇所においても同様であり、特許請求の範囲及び図面においても同様である)。
コイルピッチpは、リニア形スケールの場合には例えば2mm(ロータリ形スケールの場合には例えば2度)である。
コイルピッチ数nは、例えば256ピッチとする。
前記所定の移動区間(コイルピッチpのn倍に相当する区間)は、例えば、スケールコイル16の101番目のコイルピッチpから、スケールコイル16の356番目(コイルピッチ数nが256の場合)のコイルピッチpまでの区間として設定する。 (A) First Constant Speed Determination Method The detected position X (t) at time t 0 is X (t 0 ).
The detection position X (t) at time t 0 + T 1 is assumed to be X (t 0 + T 1 ).
A moving time required for the moving body 21 (slider 12) to move at a constant speed S and in a predetermined moving section that is n times the coil pitch p (n is a natural number) is T 1 . Here, since an example of a linear scale (FIG. 1) is shown as the electromagnetic induction
The moving time T 1 is a predetermined time set in advance, is determined by a constant speed S, a coil pitch p, and a coil pitch number n, and can be calculated by the equation n * p / S. In addition, * means the symbol x of multiplication (the same applies to other described portions, and the same applies to claims and drawings).
The coil pitch p is, for example, 2 mm in the case of a linear scale (for example, 2 degrees in the case of a rotary scale).
The coil pitch number n is, for example, 256 pitches.
The predetermined movement section (section corresponding to n times the coil pitch p) is, for example, from the 101st coil pitch p of the
検出位置X(t0)は、前記所定の移動区間(コイルピッチpのn倍に相当する区間)の始端位置に対応する検出位置である。また、前記所定の移動区間(コイルピッチpのn倍に相当する区間)の始端位置は、当該移動区間における最初(1番目)のコイルピッチpの始端位置に相当する。
検出位置X(t0+T1)は、前記所定の移動区間(コイルピッチpのn倍に相当する区間)の終端位置に対応する検出位置である。また、前記所定の移動区間(コイルピッチpのn倍に相当する区間)の終端位置は、当該移動区間における最後(n番目:例えば256番目)のコイルピッチpの終端位置に相当する。 The detection position X (t 0 ) is a detection position corresponding to the start position of the predetermined movement section (section corresponding to n times the coil pitch p). The start position of the predetermined movement section (section corresponding to n times the coil pitch p) corresponds to the start position of the first (first) coil pitch p in the movement section.
The detection position X (t 0 + T 1 ) is a detection position corresponding to the end position of the predetermined movement section (section corresponding to n times the coil pitch p). The end position of the predetermined movement section (section corresponding to n times the coil pitch p) corresponds to the end position of the last (nth: 256th) coil pitch p in the movement section.
検出位置X(t0+T1)は、前記所定の移動区間(コイルピッチpのn倍に相当する区間)の終端位置に対応する検出位置である。また、前記所定の移動区間(コイルピッチpのn倍に相当する区間)の終端位置は、当該移動区間における最後(n番目:例えば256番目)のコイルピッチpの終端位置に相当する。 The detection position X (t 0 ) is a detection position corresponding to the start position of the predetermined movement section (section corresponding to n times the coil pitch p). The start position of the predetermined movement section (section corresponding to n times the coil pitch p) corresponds to the start position of the first (first) coil pitch p in the movement section.
The detection position X (t 0 + T 1 ) is a detection position corresponding to the end position of the predetermined movement section (section corresponding to n times the coil pitch p). The end position of the predetermined movement section (section corresponding to n times the coil pitch p) corresponds to the end position of the last (nth: 256th) coil pitch p in the movement section.
なお、このように設定することが望ましいが、これに限定するものではなく、前記所定の移動区間(当該コイルピッチpのn倍に相当する区間)の始端位置が、当該移動区間における最初(1番目)のコイルピッチpの途中位置(当該コイルピッチpの始端位置と終端位置の間の位置)であり、前記所定の移動区間(コイルピッチpのn倍に相当する区間)の終端位置が、当該移動区間における最後(n番目:例えば256番目)のコイルピッチpの途中位置(当該コイルピッチpの始端位置と終端位置の間の位置)であってもよい。
即ち、移動体21(スライダ12)が一定速度Sで移動したことを判断する所定の移動区間(コイルピッチpのn倍に相当する区間)は、最初(1番目)のコイルピッチpの始端位置から最後(n番目:例えば256番目)のコイルピッチpの終端位置までの区間に限らず、最初(1番目)のコイルピッチpの途中位置から最後(n番目:例えば256番目)のコイルピッチpの途中位置までの区間であってもよい。 Although it is desirable to set in this way, the present invention is not limited to this, and the start position of the predetermined movement section (section corresponding to n times the coil pitch p) is the first (1 ) Coil position p in the middle (position between the start position and end position of the coil pitch p), and the end position of the predetermined movement section (section corresponding to n times the coil pitch p) is It may be an intermediate position (position between the start end position and the end position of the coil pitch p) of the last (nth: 256th) coil pitch p in the movement section.
That is, a predetermined moving section (a section corresponding to n times the coil pitch p) in which it is determined that the moving body 21 (slider 12) has moved at a constant speed S is a start position of the first (first) coil pitch p. To the last (nth: for example, 256th) coil pitch p, and the last (nth: for example, 256th) coil pitch p from the middle position of the first (first) coil pitch p. It may be a section up to the middle position.
即ち、移動体21(スライダ12)が一定速度Sで移動したことを判断する所定の移動区間(コイルピッチpのn倍に相当する区間)は、最初(1番目)のコイルピッチpの始端位置から最後(n番目:例えば256番目)のコイルピッチpの終端位置までの区間に限らず、最初(1番目)のコイルピッチpの途中位置から最後(n番目:例えば256番目)のコイルピッチpの途中位置までの区間であってもよい。 Although it is desirable to set in this way, the present invention is not limited to this, and the start position of the predetermined movement section (section corresponding to n times the coil pitch p) is the first (1 ) Coil position p in the middle (position between the start position and end position of the coil pitch p), and the end position of the predetermined movement section (section corresponding to n times the coil pitch p) is It may be an intermediate position (position between the start end position and the end position of the coil pitch p) of the last (nth: 256th) coil pitch p in the movement section.
That is, a predetermined moving section (a section corresponding to n times the coil pitch p) in which it is determined that the moving body 21 (slider 12) has moved at a constant speed S is a start position of the first (first) coil pitch p. To the last (nth: for example, 256th) coil pitch p, and the last (nth: for example, 256th) coil pitch p from the middle position of the first (first) coil pitch p. It may be a section up to the middle position.
取得した検出位置X(t0)と検出位置X(t0+T1)には誤差が含まれているため、検出位置X(t0)から検出位置X(t0+T1)までの移動量X(t0+T1)-X(t0)と、理想移動量(真の移動量)n*pとの関係は、下記の(21)式となる。
X(t0+T1)-X(t0)≒n*p (21) Since the obtained detection position X (t 0) and the detected position X (t 0 + T 1) includes error, the movement amount from the detection position X (t 0) to the detection position X (t 0 + T 1) The relationship between X (t 0 + T 1 ) −X (t 0 ) and the ideal movement amount (true movement amount) n * p is expressed by the following equation (21).
X (t 0 + T 1 ) −X (t 0 ) ≈n * p (21)
X(t0+T1)-X(t0)≒n*p (21) Since the obtained detection position X (t 0) and the detected position X (t 0 + T 1) includes error, the movement amount from the detection position X (t 0) to the detection position X (t 0 + T 1) The relationship between X (t 0 + T 1 ) −X (t 0 ) and the ideal movement amount (true movement amount) n * p is expressed by the following equation (21).
X (t 0 + T 1 ) −X (t 0 ) ≈n * p (21)
従って、移動量X(t0+T1)-X(t0)が理想移動量n*pに近ければ、検出位置X(t0)から検出位置X(t0+T1)までの区間、即ち前記所定の移動区間(コイルピッチpのn倍に相当する区間)において、移動体21(スライダ12)が一定速度Sで移動したと判断することができる。
t0やT1などの時間は検出制御装置18の検出制御部18Aに設けられているクロックのカウント数で計測することができる(他の時間計測手段によって計測するようにしてもよい)。
従って、前記所定の移動区間(コイルピッチpのn倍に相当する区間)の始端位置に対応する検出位置X(t0)と、この検出位置X(t0)を取得したときの時間t0と、この時間t0からの経過時間(移動時間)T1と、時間t0+T1における検出位置X(t0+T1)は、検出制御部18Aにおいて知ることができる。また、コイルピッチpとコイルピッチ数nは既知の値である。 Therefore, the amount of movement X (t 0 + T 1) -X (t 0) is the closer to the ideal shift amount n * p, the detection position X (t 0) from the detection position X (t 0 + T 1) to section, i.e. It can be determined that the moving body 21 (slider 12) has moved at a constant speed S in the predetermined movement section (section corresponding to n times the coil pitch p).
Times such as t 0 and T 1 can be measured by the number of clock counts provided in thedetection control unit 18A of the detection control device 18 (may be measured by other time measurement means).
Therefore, the detection position X (t 0 ) corresponding to the start position of the predetermined movement section (section corresponding to n times the coil pitch p) and the time t 0 when this detection position X (t 0 ) is acquired. When, the elapsed time (moving time) T 1 from the time t 0, the detection position attime t 0 + T 1 X (t 0 + T 1) is able to know the detection control unit 18A. The coil pitch p and the coil pitch number n are known values.
t0やT1などの時間は検出制御装置18の検出制御部18Aに設けられているクロックのカウント数で計測することができる(他の時間計測手段によって計測するようにしてもよい)。
従って、前記所定の移動区間(コイルピッチpのn倍に相当する区間)の始端位置に対応する検出位置X(t0)と、この検出位置X(t0)を取得したときの時間t0と、この時間t0からの経過時間(移動時間)T1と、時間t0+T1における検出位置X(t0+T1)は、検出制御部18Aにおいて知ることができる。また、コイルピッチpとコイルピッチ数nは既知の値である。 Therefore, the amount of movement X (t 0 + T 1) -X (t 0) is the closer to the ideal shift amount n * p, the detection position X (t 0) from the detection position X (t 0 + T 1) to section, i.e. It can be determined that the moving body 21 (slider 12) has moved at a constant speed S in the predetermined movement section (section corresponding to n times the coil pitch p).
Times such as t 0 and T 1 can be measured by the number of clock counts provided in the
Therefore, the detection position X (t 0 ) corresponding to the start position of the predetermined movement section (section corresponding to n times the coil pitch p) and the time t 0 when this detection position X (t 0 ) is acquired. When, the elapsed time (moving time) T 1 from the time t 0, the detection position at
従って、この場合、閾値を±Lとすると、下記の(22)式の条件を満すとき、前記所定の移動区間(コイルピッチpのn倍に相当する区間)において移動体21(スライダ12)が一定速度Sで移動したと判断することができる。なお、X(t0+T1)-X(t0)とn*p±Lとの関係については、図3(a)にも例示している。
n*p-L≧X(t0+T1)-X(t0)≧n*p+L (22) Therefore, in this case, when the threshold value is ± L, the moving body 21 (slider 12) in the predetermined moving section (section corresponding to n times the coil pitch p) when the following expression (22) is satisfied. Can be determined to have moved at a constant speed S. Note that the relationship between X (t 0 + T 1 ) −X (t 0 ) and n * p ± L is also illustrated in FIG.
n * p−L ≧ X (t 0 + T 1 ) −X (t 0 ) ≧ n * p + L (22)
n*p-L≧X(t0+T1)-X(t0)≧n*p+L (22) Therefore, in this case, when the threshold value is ± L, the moving body 21 (slider 12) in the predetermined moving section (section corresponding to n times the coil pitch p) when the following expression (22) is satisfied. Can be determined to have moved at a constant speed S. Note that the relationship between X (t 0 + T 1 ) −X (t 0 ) and n * p ± L is also illustrated in FIG.
n * p−L ≧ X (t 0 + T 1 ) −X (t 0 ) ≧ n * p + L (22)
(b) 第2の一定速度判断方法
また、上記の場合、次のような方法によって、移動体21(スライダ12)が一定速度Sで移動したことを判断することもできる。 (B) Second Constant Speed Determination Method In the above case, it can also be determined that the moving body 21 (slider 12) has moved at a constant speed S by the following method.
また、上記の場合、次のような方法によって、移動体21(スライダ12)が一定速度Sで移動したことを判断することもできる。 (B) Second Constant Speed Determination Method In the above case, it can also be determined that the moving body 21 (slider 12) has moved at a constant speed S by the following method.
移動体21(スライダ12)が一定速度SでT1時間移動したときの移動量(S*T1)と、コイルピッチpのn倍(n*p)は等しい(n*p=S*T1)。従って、検出位置X(t0)から検出位置X(t0+T1)までの移動量X(t0+T1)-X(t0)と、理想移動量S*T1との関係は、下記の(23)式となる。
X(t0+T1)-X(t0)≒S*T1 (23) The moving amount (S * T 1 ) when the moving body 21 (slider 12) moves at a constant speed S for T 1 hours is equal to n times (n * p) of the coil pitch p (n * p = S * T). 1 ). Therefore, the detected position X (t 0) from the detection position X (t 0 + T 1) the amount of movement of up to X (t 0 + T 1) -X (t 0), the relationship between the ideal moving amount S * T 1, The following equation (23) is obtained.
X (t 0 + T 1 ) −X (t 0 ) ≈S * T 1 (23)
X(t0+T1)-X(t0)≒S*T1 (23) The moving amount (S * T 1 ) when the moving body 21 (slider 12) moves at a constant speed S for T 1 hours is equal to n times (n * p) of the coil pitch p (n * p = S * T). 1 ). Therefore, the detected position X (t 0) from the detection position X (t 0 + T 1) the amount of movement of up to X (t 0 + T 1) -X (t 0), the relationship between the ideal moving amount S * T 1, The following equation (23) is obtained.
X (t 0 + T 1 ) −X (t 0 ) ≈S * T 1 (23)
従って、移動量X(t0+T1)-X(t0)が理想移動量S*T1に近ければ、検出位置X(t0)から検出位置X(t0+T1)までの区間、即ち前記所定の移動区間(コイルピッチpのn倍に相当する区間)において、移動体21(スライダ12)が一定速度Sで移動したと判断することができる。
先にも述べたとおり、前記所定の移動区間(コイルピッチpのn倍に相当する区間)の始端位置に対応する検出位置X(t0)と、この検出位置X(t0)を取得したときの時間t0と、この時間t0からの経過時間(移動時間)T1と、時間t0+T1における検出位置X(t0+T1)は、検出制御部18Aにおいて知ることができる。また、一定速度Sと移動時間T1は既知の値である。 Therefore, the amount of movement X (t 0 + T 1) -X (t 0) is the ideal moving amount S * the closer to T 1, the detection position from thedetection position X (t 0) X (t 0 + T 1) to section, That is, it can be determined that the moving body 21 (slider 12) has moved at a constant speed S in the predetermined movement section (section corresponding to n times the coil pitch p).
As described above, the detection position X (t 0 ) corresponding to the start position of the predetermined movement section (section corresponding to n times the coil pitch p) and the detection position X (t 0 ) are acquired. and the time t 0 of time, and the elapsed time (moving time) T 1 from the time t 0, the detection position attime t 0 + T 1 X (t 0 + T 1) is able to know the detection control unit 18A. The constant speed S and the movement time T 1 are known values.
先にも述べたとおり、前記所定の移動区間(コイルピッチpのn倍に相当する区間)の始端位置に対応する検出位置X(t0)と、この検出位置X(t0)を取得したときの時間t0と、この時間t0からの経過時間(移動時間)T1と、時間t0+T1における検出位置X(t0+T1)は、検出制御部18Aにおいて知ることができる。また、一定速度Sと移動時間T1は既知の値である。 Therefore, the amount of movement X (t 0 + T 1) -X (t 0) is the ideal moving amount S * the closer to T 1, the detection position from the
As described above, the detection position X (t 0 ) corresponding to the start position of the predetermined movement section (section corresponding to n times the coil pitch p) and the detection position X (t 0 ) are acquired. and the time t 0 of time, and the elapsed time (moving time) T 1 from the time t 0, the detection position at
従って、この場合、閾値を±Lとすると、下記の(24)式の条件を満すとき、前記所定の移動区間(コイルピッチpのn倍に相当する区間)において移動体21(スライダ12)が一定速度Sで移動したと判断することができる。
S*T1-L≧X(t0+T1)-X(t0)≧S*T1+L (24) Therefore, in this case, when the threshold is ± L, the moving body 21 (slider 12) in the predetermined movement section (section corresponding to n times the coil pitch p) when the condition of the following expression (24) is satisfied. Can be determined to have moved at a constant speed S.
S * T 1 −L ≧ X (t 0 + T 1 ) −X (t 0 ) ≧ S * T 1 + L (24)
S*T1-L≧X(t0+T1)-X(t0)≧S*T1+L (24) Therefore, in this case, when the threshold is ± L, the moving body 21 (slider 12) in the predetermined movement section (section corresponding to n times the coil pitch p) when the condition of the following expression (24) is satisfied. Can be determined to have moved at a constant speed S.
S * T 1 −L ≧ X (t 0 + T 1 ) −X (t 0 ) ≧ S * T 1 + L (24)
(c) 第3の一定速度判断方法
また、次のような方法によって、移動体21(スライダ12)が一定速度Sで移動したことを判断することもできる。 (C) Third Constant Speed Determination Method It can also be determined that the moving body 21 (slider 12) has moved at a constant speed S by the following method.
また、次のような方法によって、移動体21(スライダ12)が一定速度Sで移動したことを判断することもできる。 (C) Third Constant Speed Determination Method It can also be determined that the moving body 21 (slider 12) has moved at a constant speed S by the following method.
時間t0における検出位置X(t)を、X(t0)とする。
時間t0+T1における検出位置X(t)を、X(t0+T2)とする。
移動体21(スライダ12)が、コイルピッチpのn倍(nは自然数)である所定の移動区間を移動するのに要したと判断した移動時間をT2とする。なお、ここでは電磁誘導式位置検出器11としてリニア形スケールの例(図1)を示しているため、移動量は移動距離である(ロータリ形スケールの場合には回転角度になる)。
この場合の移動時間T2は前述の一定の移動時間T1とは異なり、移動体21(スライダ12)が前記所定の移動区間(コイルピッチpのn倍に相当する区間)を移動するのに要したと判断された時間であり、検出位置X(t0),X(t0+T2)に含まれる誤差の大きさ応じて変わる。
コイルピッチpは、リニア形スケールの場合には例えば2mm(ロータリ形スケールの場合には例えば2度)である。
コイルピッチ数nは、例えば256ピッチとする。
前記所定の移動区間(コイルピッチpのn倍に相当する区間)は、例えばスケールコイル16の101番目のコイルピッチpから、スケールコイル16の356番目(コイルピッチ数nが256の場合)のコイルピッチpまでの区間として設定する。 The detection position X (t) at time t 0 is assumed to be X (t 0 ).
The detection position X (t) at time t 0 + T 1 is assumed to be X (t 0 + T 2 ).
Let T 2 be the movement time when it is determined that the moving body 21 (slider 12) needs to move in a predetermined movement section that is n times the coil pitch p (n is a natural number). Here, since an example of a linear scale (FIG. 1) is shown as the electromagnetic inductiontype position detector 11, the movement amount is a movement distance (in the case of a rotary scale, it is a rotation angle).
In this case, the moving time T 2 is different from the above-mentioned fixed moving time T 1, and the moving body 21 (slider 12) moves in the predetermined moving section (a section corresponding to n times the coil pitch p). This time is determined to be necessary, and varies depending on the magnitude of the error included in the detection positions X (t 0 ) and X (t 0 + T 2 ).
The coil pitch p is, for example, 2 mm in the case of a linear scale (for example, 2 degrees in the case of a rotary scale).
The coil pitch number n is, for example, 256 pitches.
The predetermined moving section (section corresponding to n times the coil pitch p) is, for example, the coil from the 101st coil pitch p of thescale coil 16 to the 356th scale coil 16 (when the coil pitch number n is 256). Set as interval up to pitch p.
時間t0+T1における検出位置X(t)を、X(t0+T2)とする。
移動体21(スライダ12)が、コイルピッチpのn倍(nは自然数)である所定の移動区間を移動するのに要したと判断した移動時間をT2とする。なお、ここでは電磁誘導式位置検出器11としてリニア形スケールの例(図1)を示しているため、移動量は移動距離である(ロータリ形スケールの場合には回転角度になる)。
この場合の移動時間T2は前述の一定の移動時間T1とは異なり、移動体21(スライダ12)が前記所定の移動区間(コイルピッチpのn倍に相当する区間)を移動するのに要したと判断された時間であり、検出位置X(t0),X(t0+T2)に含まれる誤差の大きさ応じて変わる。
コイルピッチpは、リニア形スケールの場合には例えば2mm(ロータリ形スケールの場合には例えば2度)である。
コイルピッチ数nは、例えば256ピッチとする。
前記所定の移動区間(コイルピッチpのn倍に相当する区間)は、例えばスケールコイル16の101番目のコイルピッチpから、スケールコイル16の356番目(コイルピッチ数nが256の場合)のコイルピッチpまでの区間として設定する。 The detection position X (t) at time t 0 is assumed to be X (t 0 ).
The detection position X (t) at time t 0 + T 1 is assumed to be X (t 0 + T 2 ).
Let T 2 be the movement time when it is determined that the moving body 21 (slider 12) needs to move in a predetermined movement section that is n times the coil pitch p (n is a natural number). Here, since an example of a linear scale (FIG. 1) is shown as the electromagnetic induction
In this case, the moving time T 2 is different from the above-mentioned fixed moving time T 1, and the moving body 21 (slider 12) moves in the predetermined moving section (a section corresponding to n times the coil pitch p). This time is determined to be necessary, and varies depending on the magnitude of the error included in the detection positions X (t 0 ) and X (t 0 + T 2 ).
The coil pitch p is, for example, 2 mm in the case of a linear scale (for example, 2 degrees in the case of a rotary scale).
The coil pitch number n is, for example, 256 pitches.
The predetermined moving section (section corresponding to n times the coil pitch p) is, for example, the coil from the 101st coil pitch p of the
検出位置X(t0),X(t0+T2)には誤差が含まれているため、検出位置X(t0)から検出位置X(t0+T2)までの移動量X(t0+T2)-X(t0)と、理想移動量n*pとの関係は、下記の(25)式のようになる。
X(t0+T2)-X(t0)≒n*p (25) Detection position X (t 0), X since the (t 0 + T 2) contains errors, the movement amount from the detection position X (t 0) to the detection position X (t 0 + T 2) X (t 0 The relationship between + T 2 ) −X (t 0 ) and the ideal movement amount n * p is expressed by the following equation (25).
X (t 0 + T 2 ) −X (t 0 ) ≈n * p (25)
X(t0+T2)-X(t0)≒n*p (25) Detection position X (t 0), X since the (t 0 + T 2) contains errors, the movement amount from the detection position X (t 0) to the detection position X (t 0 + T 2) X (
X (t 0 + T 2 ) −X (t 0 ) ≈n * p (25)
また、検出位置X(t0),X(t0+T2)に誤差が含まれていなければ、移動時間T2は一定の移動時間T1と同じになるため、検出位置X(t0)から検出位置X(t0+T2)までの区間において移動体21(スライダ12)が一定速度Sで移動したとすれば、S*T2とn*pは等しくなる。
しかし、実際には検出位置X(t0),X(t0+T2)には誤差が含まれており、このときの移動時間T2は一定の移動時間T1と同じにはならないため、移動量S*T2と理想移動量n*pの関係も、下記の(26)式となる。
S*T2≒n*p (26) If the detection positions X (t 0 ) and X (t 0 + T 2 ) do not include an error, the movement time T 2 is the same as the constant movement time T 1, and thus the detection position X (t 0 ). S * T 2 and n * p are equal if the moving body 21 (slider 12) moves at a constant speed S in the section from the detection position X (t 0 + T 2 ) to the detection position X (t 0 + T 2 ).
However, actually, the detection positions X (t 0 ) and X (t 0 + T 2 ) include errors, and the movement time T 2 at this time is not the same as the constant movement time T 1 . The relationship between the movement amount S * T 2 and the ideal movement amount n * p is also expressed by the following equation (26).
S * T 2 ≒ n * p (26)
しかし、実際には検出位置X(t0),X(t0+T2)には誤差が含まれており、このときの移動時間T2は一定の移動時間T1と同じにはならないため、移動量S*T2と理想移動量n*pの関係も、下記の(26)式となる。
S*T2≒n*p (26) If the detection positions X (t 0 ) and X (t 0 + T 2 ) do not include an error, the movement time T 2 is the same as the constant movement time T 1, and thus the detection position X (t 0 ). S * T 2 and n * p are equal if the moving body 21 (slider 12) moves at a constant speed S in the section from the detection position X (t 0 + T 2 ) to the detection position X (t 0 + T 2 ).
However, actually, the detection positions X (t 0 ) and X (t 0 + T 2 ) include errors, and the movement time T 2 at this time is not the same as the constant movement time T 1 . The relationship between the movement amount S * T 2 and the ideal movement amount n * p is also expressed by the following equation (26).
S * T 2 ≒ n * p (26)
そして、この場合には移動時間T2が検出位置X(t0),X(t0+T2)に含まれる誤差の大きさ応じて変わるため、一定速度の判断には上記の(25)式の関係ではなく、上記の(26)式の関係を利用することができる。
即ち、S*T2がn*pに近ければ、検出位置X(t0)から検出位置X(t0+T2)までの区間、即ち前記所定の移動区間(コイルピッチpのn倍に相当する区間)において、移動体21(スライダ12)が一定速度Sで移動したと判断することができる。
t0やT2などの時間は検出制御装置18の検出制御部18Aに設けられているクロックのカウント数で計測することができる(他の時間計測手段によって計測するようにしてもよい)。
従って、前記所定の移動区間(コイルピッチpのn倍に相当する区間)の始端位置に対応する検出位置X(t0)を取得してから、前記所定の移動区間(コイルピッチpのn倍に相当する区間)の終端位置に対応する検出位置X(t0+T2)を取得するまでの経過時間(移動時間)、即ち移動体21(スライダ12)が前記所定の移動区間(コイルピッチpのn倍に相当する区間)を移動するのに要したと判断される移動時間T2は、検出制御部18Aにおいて知ることができる。また、一定速度Sとコイルピッチpとコイルピッチ数nは既知の値である。 In this case, since the movement time T 2 changes according to the magnitude of the error included in the detection positions X (t 0 ) and X (t 0 + T 2 ), the above equation (25) is used to determine the constant speed. Instead of the relationship, the relationship of the above equation (26) can be used.
That is, if S * T 2 is close to n * p, it corresponds to a section from the detection position X (t 0 ) to the detection position X (t 0 + T 2 ), that is, the predetermined movement section (n times the coil pitch p). It is possible to determine that the moving body 21 (slider 12) has moved at a constant speed S in the section to be moved.
Times such as t 0 and T 2 can be measured by the clock count provided in thedetection control unit 18A of the detection control device 18 (may be measured by other time measurement means).
Therefore, after obtaining the detection position X (t 0 ) corresponding to the start position of the predetermined movement section (section corresponding to n times the coil pitch p), the predetermined movement section (n times the coil pitch p) is obtained. Elapsed time (moving time) until the detection position X (t 0 + T 2 ) corresponding to the end position of the moving position (slider 12) is obtained in the predetermined moving section (coil pitch p). The movement time T 2 that is determined to have been required to move in the section corresponding to n times the number can be detected by thedetection control unit 18A. The constant speed S, the coil pitch p, and the coil pitch number n are known values.
即ち、S*T2がn*pに近ければ、検出位置X(t0)から検出位置X(t0+T2)までの区間、即ち前記所定の移動区間(コイルピッチpのn倍に相当する区間)において、移動体21(スライダ12)が一定速度Sで移動したと判断することができる。
t0やT2などの時間は検出制御装置18の検出制御部18Aに設けられているクロックのカウント数で計測することができる(他の時間計測手段によって計測するようにしてもよい)。
従って、前記所定の移動区間(コイルピッチpのn倍に相当する区間)の始端位置に対応する検出位置X(t0)を取得してから、前記所定の移動区間(コイルピッチpのn倍に相当する区間)の終端位置に対応する検出位置X(t0+T2)を取得するまでの経過時間(移動時間)、即ち移動体21(スライダ12)が前記所定の移動区間(コイルピッチpのn倍に相当する区間)を移動するのに要したと判断される移動時間T2は、検出制御部18Aにおいて知ることができる。また、一定速度Sとコイルピッチpとコイルピッチ数nは既知の値である。 In this case, since the movement time T 2 changes according to the magnitude of the error included in the detection positions X (t 0 ) and X (t 0 + T 2 ), the above equation (25) is used to determine the constant speed. Instead of the relationship, the relationship of the above equation (26) can be used.
That is, if S * T 2 is close to n * p, it corresponds to a section from the detection position X (t 0 ) to the detection position X (t 0 + T 2 ), that is, the predetermined movement section (n times the coil pitch p). It is possible to determine that the moving body 21 (slider 12) has moved at a constant speed S in the section to be moved.
Times such as t 0 and T 2 can be measured by the clock count provided in the
Therefore, after obtaining the detection position X (t 0 ) corresponding to the start position of the predetermined movement section (section corresponding to n times the coil pitch p), the predetermined movement section (n times the coil pitch p) is obtained. Elapsed time (moving time) until the detection position X (t 0 + T 2 ) corresponding to the end position of the moving position (slider 12) is obtained in the predetermined moving section (coil pitch p). The movement time T 2 that is determined to have been required to move in the section corresponding to n times the number can be detected by the
従って、閾値を±Lとすると、下記の(27)式の条件を満すとき、前記所定の移動区間(コイルピッチpのn倍に相当する区間)において移動体21(スライダ12)が一定速度Sで移動したと判断することができる。
n*p-L≧S*T2≧n*p+L (27) Therefore, when the threshold is ± L, the moving body 21 (slider 12) moves at a constant speed in the predetermined moving section (a section corresponding to n times the coil pitch p) when the condition of the following expression (27) is satisfied. It can be judged that it moved by S.
n * p−L ≧ S * T 2 ≧ n * p + L (27)
n*p-L≧S*T2≧n*p+L (27) Therefore, when the threshold is ± L, the moving body 21 (slider 12) moves at a constant speed in the predetermined moving section (a section corresponding to n times the coil pitch p) when the condition of the following expression (27) is satisfied. It can be judged that it moved by S.
n * p−L ≧ S * T 2 ≧ n * p + L (27)
(3) 補正データ取得処理
次に、一定速度判断処理(第1の一定速度判断方法又は第2の一定速度判断方法又は第3の一定速度判断方法)により、移動体21(スライダ12)が一定速度Sで移動したと判断された前記所定の移動区間(コイルピッチpのn倍に相当する区間)において取得されたX(t0)からX(t0+T)までの検出位置データを用いて、補正データE(m)を取得する。 (3) Correction Data Acquisition Process Next, the moving body 21 (slider 12) is fixed by a constant speed determination process (a first constant speed determination method, a second constant speed determination method, or a third constant speed determination method). using the detected position data from the speed S at the moved with the determined predetermined movement section obtained in (coil pitch p of the n times corresponding section of the) the X (t 0) to X (t 0 + T) The correction data E (m) is acquired.
次に、一定速度判断処理(第1の一定速度判断方法又は第2の一定速度判断方法又は第3の一定速度判断方法)により、移動体21(スライダ12)が一定速度Sで移動したと判断された前記所定の移動区間(コイルピッチpのn倍に相当する区間)において取得されたX(t0)からX(t0+T)までの検出位置データを用いて、補正データE(m)を取得する。 (3) Correction Data Acquisition Process Next, the moving body 21 (slider 12) is fixed by a constant speed determination process (a first constant speed determination method, a second constant speed determination method, or a third constant speed determination method). using the detected position data from the speed S at the moved with the determined predetermined movement section obtained in (coil pitch p of the n times corresponding section of the) the X (t 0) to X (t 0 + T) The correction data E (m) is acquired.
ここでは、検出位置X(t0)が、前記所定の移動区間(コイルピッチpのn倍に相当する区間)の始端位置に対応する検出位置であり、前記所定の移動区間(コイルピッチpのn倍に相当する区間)の始端位置が、当該移動区間における最初(1番目)のコイルピッチpの始端位置に相当する場合であって、前記所定の移動区間(コイルピッチpのn倍に相当する区間)において取得された検出位置データを全体的に用いて補正データE(m)を取得する場合について、説明する。
Here, the detection position X (t 0 ) is a detection position corresponding to the start position of the predetermined movement section (section corresponding to n times the coil pitch p), and the predetermined movement section (coil pitch p of the coil pitch p). The start position of the section corresponding to n times corresponds to the start position of the first (first) coil pitch p in the movement section, and corresponds to the predetermined movement section (n times the coil pitch p). The case where correction data E (m) is acquired using the detected position data acquired in the section) as a whole will be described.
前記所定の移動区間(コイルピッチpのn倍に相当する区間)における最初(1番目)のコイルピッチpの始端位置に対応する検出位置を取得したときの時間をt0とする。
前記所定の移動区間(コイルピッチpのn倍に相当する区間)における最後(n番目:例えば256番目)のコイルピッチpの終端位置に対応する検出位置を取得したときの時間をt0+Tとする。
即ち、時間Tは一定速度判断処理(第1の一定速度判断方法又は第2の一定速度判断方法又は第3の一定速度判断方法)において述べた移動時間T1又はT2である。
前記所定の移動区間(コイルピッチpのn倍に相当する区間)における最初(1番目)のコイルピッチpの始端位置に対応する検出位置X(t0)を、基準検出位置とする。
この基準検出位置X(t0)を取得してからの経過時間t(m)を、t(m)=0~Tとする。
mはインデックス番号(0及び正の整数)である。例えば、インデックス番号mが0の場合にはt(0)=0とする。インデックス番号mの最大値をmmとすると、t(mm)=Tである。
インデックス番号mは、補正データE(m)の算出に用いる検出位置データを取得した前記所定の移動区間(コイルピッチpのn倍に相当する区間)における最初(1番目)のコイルピッチpの始端位置から最後(n番目)のコイルピッチpの終端位置までの各コイルピッチ位置に対応している。即ち、m=0は最初(1番目)のコイルピッチpの始端位置に対応し、m=mmは最後(n番目)のコイルピッチpの終端位置に対応し、その間のm=1,2,3,・・・,mm-1は最初(1番目)のコイルピッチpの始端位置から最後(n番目)のコイルピッチpの終端位置までの間の各コイルピッチ位置に対応している。 The time when the detection position corresponding to the start position of the first (first) coil pitch p in the predetermined movement section (section corresponding to n times the coil pitch p) is acquired is t 0 .
The time when the detection position corresponding to the terminal position of the last (nth: 256th, for example) coil pitch p in the predetermined movement section (section corresponding to n times the coil pitch p) is acquired as t 0 + T. To do.
That is, the time T is the movement time T 1 or T 2 described in the constant speed determination process (the first constant speed determination method, the second constant speed determination method, or the third constant speed determination method).
The detection position X (t 0 ) corresponding to the start position of the first (first) coil pitch p in the predetermined movement section (section corresponding to n times the coil pitch p) is set as a reference detection position.
The elapsed time t (m) after obtaining this reference detection position X (t 0 ) is t (m) = 0 to T.
m is an index number (0 and a positive integer). For example, when the index number m is 0, t (0) = 0. Assuming that the maximum value of the index number m is m m , t (m m ) = T.
The index number m is the beginning of the first (first) coil pitch p in the predetermined movement section (section corresponding to n times the coil pitch p) from which the detection position data used for calculating the correction data E (m) is acquired. This corresponds to each coil pitch position from the position to the end position of the last (nth) coil pitch p. That, m = 0 initially corresponds to the starting end position of the coil pitch p of (first), m = m m corresponds to the end position of the coil pitch p of the last (n-th), during which the m = 1, 2 , 3,..., M m −1 correspond to the coil pitch positions from the start position of the first (first) coil pitch p to the end position of the last (nth) coil pitch p. .
前記所定の移動区間(コイルピッチpのn倍に相当する区間)における最後(n番目:例えば256番目)のコイルピッチpの終端位置に対応する検出位置を取得したときの時間をt0+Tとする。
即ち、時間Tは一定速度判断処理(第1の一定速度判断方法又は第2の一定速度判断方法又は第3の一定速度判断方法)において述べた移動時間T1又はT2である。
前記所定の移動区間(コイルピッチpのn倍に相当する区間)における最初(1番目)のコイルピッチpの始端位置に対応する検出位置X(t0)を、基準検出位置とする。
この基準検出位置X(t0)を取得してからの経過時間t(m)を、t(m)=0~Tとする。
mはインデックス番号(0及び正の整数)である。例えば、インデックス番号mが0の場合にはt(0)=0とする。インデックス番号mの最大値をmmとすると、t(mm)=Tである。
インデックス番号mは、補正データE(m)の算出に用いる検出位置データを取得した前記所定の移動区間(コイルピッチpのn倍に相当する区間)における最初(1番目)のコイルピッチpの始端位置から最後(n番目)のコイルピッチpの終端位置までの各コイルピッチ位置に対応している。即ち、m=0は最初(1番目)のコイルピッチpの始端位置に対応し、m=mmは最後(n番目)のコイルピッチpの終端位置に対応し、その間のm=1,2,3,・・・,mm-1は最初(1番目)のコイルピッチpの始端位置から最後(n番目)のコイルピッチpの終端位置までの間の各コイルピッチ位置に対応している。 The time when the detection position corresponding to the start position of the first (first) coil pitch p in the predetermined movement section (section corresponding to n times the coil pitch p) is acquired is t 0 .
The time when the detection position corresponding to the terminal position of the last (nth: 256th, for example) coil pitch p in the predetermined movement section (section corresponding to n times the coil pitch p) is acquired as t 0 + T. To do.
That is, the time T is the movement time T 1 or T 2 described in the constant speed determination process (the first constant speed determination method, the second constant speed determination method, or the third constant speed determination method).
The detection position X (t 0 ) corresponding to the start position of the first (first) coil pitch p in the predetermined movement section (section corresponding to n times the coil pitch p) is set as a reference detection position.
The elapsed time t (m) after obtaining this reference detection position X (t 0 ) is t (m) = 0 to T.
m is an index number (0 and a positive integer). For example, when the index number m is 0, t (0) = 0. Assuming that the maximum value of the index number m is m m , t (m m ) = T.
The index number m is the beginning of the first (first) coil pitch p in the predetermined movement section (section corresponding to n times the coil pitch p) from which the detection position data used for calculating the correction data E (m) is acquired. This corresponds to each coil pitch position from the position to the end position of the last (nth) coil pitch p. That, m = 0 initially corresponds to the starting end position of the coil pitch p of (first), m = m m corresponds to the end position of the coil pitch p of the last (n-th), during which the m = 1, 2 , 3,..., M m −1 correspond to the coil pitch positions from the start position of the first (first) coil pitch p to the end position of the last (nth) coil pitch p. .
そして、インデックス番号mと、時間t(m)又は検出位置X(t0+t(m))との対応づけを行う。
例えば、インデックス番号mと時間t(m)とを対応づける場合には、Δtを固定として、t(m)=m*Δtとすればよく、インデックス番号mと検出位置X(t0+t(m))を対応づける場合には、Δxを固定として、X(t0+t(m))=X(t0)+m*Δxとすればよい。 Then, the index number m is associated with time t (m) or detection position X (t 0 + t (m)).
For example, when associating the index number m with the time t (m), Δt is fixed and t (m) = m * Δt. The index number m and the detection position X (t 0 + t (m) )) Can be associated with each other, Δx is fixed and X (t 0 + t (m)) = X (t 0 ) + m * Δx.
例えば、インデックス番号mと時間t(m)とを対応づける場合には、Δtを固定として、t(m)=m*Δtとすればよく、インデックス番号mと検出位置X(t0+t(m))を対応づける場合には、Δxを固定として、X(t0+t(m))=X(t0)+m*Δxとすればよい。 Then, the index number m is associated with time t (m) or detection position X (t 0 + t (m)).
For example, when associating the index number m with the time t (m), Δt is fixed and t (m) = m * Δt. The index number m and the detection position X (t 0 + t (m) )) Can be associated with each other, Δx is fixed and X (t 0 + t (m)) = X (t 0 ) + m * Δx.
移動体21(スライダ12)が一定速度Sで移動しているときの検出位置X(t0+t(m))に対応する理想位置Xi(t0+t(m))は、下記の(28)式のように表すことができる。
Xi(t0+t(m))≒X(t0)+S*t(m) (28)
即ち、一定速度Sで移動したと判断された前記所定の移動区間(コイルピッチpのn倍に相当する区間)における初期の検出位置X(t0)(最初(1番目)のコイルピッチpの始端位置に対応する検出位置)を基準とし、この基準検出位置X(t0)に対して、一定速度Sと時間t(m)との乗算値S*t(m)を加算した値であるX(t0)+S*t(m)は、理想位置Xi(t0+t(m))に近い値である。この理想位置Xi(t0+t(m))に近い位置X(t0)+S*t(m)を、近似理想位置と称する。 An ideal position Xi (t 0 + t (m)) corresponding to the detected position X (t 0 + t (m)) when the moving body 21 (slider 12) is moving at a constant speed S is expressed by the following (28) It can be expressed as:
Xi (t 0 + t (m)) ≈X (t 0 ) + S * t (m) (28)
That is, the initial detection position X (t 0 ) (the first (first) coil pitch p of the first (first) coil pitch p) in the predetermined movement section (a section corresponding to n times the coil pitch p) determined to have moved at a constant speed S. This is a value obtained by adding a multiplication value S * t (m) of a constant speed S and time t (m) to the reference detection position X (t 0 ) with reference to a detection position corresponding to the start end position). X (t 0 ) + S * t (m) is a value close to the ideal position Xi (t 0 + t (m)). A position X (t 0 ) + S * t (m) close to the ideal position Xi (t 0 + t (m)) is referred to as an approximate ideal position.
Xi(t0+t(m))≒X(t0)+S*t(m) (28)
即ち、一定速度Sで移動したと判断された前記所定の移動区間(コイルピッチpのn倍に相当する区間)における初期の検出位置X(t0)(最初(1番目)のコイルピッチpの始端位置に対応する検出位置)を基準とし、この基準検出位置X(t0)に対して、一定速度Sと時間t(m)との乗算値S*t(m)を加算した値であるX(t0)+S*t(m)は、理想位置Xi(t0+t(m))に近い値である。この理想位置Xi(t0+t(m))に近い位置X(t0)+S*t(m)を、近似理想位置と称する。 An ideal position Xi (t 0 + t (m)) corresponding to the detected position X (t 0 + t (m)) when the moving body 21 (slider 12) is moving at a constant speed S is expressed by the following (28) It can be expressed as:
Xi (t 0 + t (m)) ≈X (t 0 ) + S * t (m) (28)
That is, the initial detection position X (t 0 ) (the first (first) coil pitch p of the first (first) coil pitch p) in the predetermined movement section (a section corresponding to n times the coil pitch p) determined to have moved at a constant speed S. This is a value obtained by adding a multiplication value S * t (m) of a constant speed S and time t (m) to the reference detection position X (t 0 ) with reference to a detection position corresponding to the start end position). X (t 0 ) + S * t (m) is a value close to the ideal position Xi (t 0 + t (m)). A position X (t 0 ) + S * t (m) close to the ideal position Xi (t 0 + t (m)) is referred to as an approximate ideal position.
インデックス番号mでの補正データをE(m)とする。
下記の(29)式のように理想位置Xi(t0+t(m))から検出位置X(t0+t(m))を差し引けば、理想の補正データE(m)を得ることができる。しかし、検出位置X(t0+t(m))に対応する理想位置Xi(t0+t(m))を知ることはできない。
E(m)=Xi(t0+t(m))-X(t0+t(m)) (29) The correction data at the index number m is E (m).
The ideal correction data E (m) can be obtained by subtracting the detected position X (t 0 + t (m)) from the ideal position Xi (t 0 + t (m)) as shown in the following equation (29). . However, the ideal position Xi (t 0 + t (m)) corresponding to the detected position X (t 0 + t (m)) cannot be known.
E (m) = Xi (t 0 + t (m)) − X (t 0 + t (m)) (29)
下記の(29)式のように理想位置Xi(t0+t(m))から検出位置X(t0+t(m))を差し引けば、理想の補正データE(m)を得ることができる。しかし、検出位置X(t0+t(m))に対応する理想位置Xi(t0+t(m))を知ることはできない。
E(m)=Xi(t0+t(m))-X(t0+t(m)) (29) The correction data at the index number m is E (m).
The ideal correction data E (m) can be obtained by subtracting the detected position X (t 0 + t (m)) from the ideal position Xi (t 0 + t (m)) as shown in the following equation (29). . However, the ideal position Xi (t 0 + t (m)) corresponding to the detected position X (t 0 + t (m)) cannot be known.
E (m) = Xi (t 0 + t (m)) − X (t 0 + t (m)) (29)
一方、理想位置Xi(t0+t(m))に近い近似理想位置X(t0)+S*t(m)に関しては、X(t0)は検出位置取得処理において取得された検出位置データであり、一定速度S及び時間t(m)は既知の値であるため、これらに基づいて算出することができる。
On the other hand, for the approximate ideal position X (t 0 ) + S * t (m) close to the ideal position Xi (t 0 + t (m)), X (t 0 ) is the detected position data acquired in the detected position acquisition process. Since the constant speed S and the time t (m) are known values, they can be calculated based on them.
従って、理想位置Xi(t0+t(m))の代わりに近似理想位置X(t0)+S*t(m)を用いて、下記の(30)式に基づき、近似理想位置X(t0)+S*t(m)から検出位置X(t0+t(m))を差し引けば、理想に近い補正データE(m)を得ることができる。
E(m)=X(t0)+S*t(m)-X(t0+t(m)) (30) Therefore, the approximate ideal position X (t 0) in place of the ideal position Xi (t 0 + t (m )) + S * with t (m), based on (30) below, the approximate ideal position X (t 0 ) + S * t (m) is subtracted from the detected position X (t 0 + t (m)), correction data E (m) close to ideal can be obtained.
E (m) = X (t 0 ) + S * t (m) −X (t 0 + t (m)) (30)
E(m)=X(t0)+S*t(m)-X(t0+t(m)) (30) Therefore, the approximate ideal position X (t 0) in place of the ideal position Xi (t 0 + t (m )) + S * with t (m), based on (30) below, the approximate ideal position X (t 0 ) + S * t (m) is subtracted from the detected position X (t 0 + t (m)), correction data E (m) close to ideal can be obtained.
E (m) = X (t 0 ) + S * t (m) −X (t 0 + t (m)) (30)
そこで、インデックス番号mに対応させてX(t0)+S*t(m)とX(t0+t(m))とを求め、これらのX(t0)+S*t(m)とX(t0+t(m))を用いて、上記の(30)式により補正データE(m)を算出する。
このとき、インデックス番号mに対応させてX(t0)+S*t(m)とX(t0+t(m))とを求める方法としては、前述のようにΔtを固定としてインデックス番号mと時間t(m)を対応づける方法と、Δxを固定としてインデックス番号mと検出位置X(t0+t(m))を対応づける方法とがある。 Accordingly, X (t 0 ) + S * t (m) and X (t 0 + t (m)) are obtained corresponding to the index number m, and these X (t 0 ) + S * t (m) and X ( The correction data E (m) is calculated from the above equation (30) using t 0 + t (m)).
At this time, as a method for obtaining X (t 0 ) + S * t (m) and X (t 0 + t (m)) corresponding to the index number m, the index number m is fixed with Δt fixed as described above. There are a method of associating the time t (m) and a method of associating the index number m and the detection position X (t 0 + t (m)) with Δx fixed.
このとき、インデックス番号mに対応させてX(t0)+S*t(m)とX(t0+t(m))とを求める方法としては、前述のようにΔtを固定としてインデックス番号mと時間t(m)を対応づける方法と、Δxを固定としてインデックス番号mと検出位置X(t0+t(m))を対応づける方法とがある。 Accordingly, X (t 0 ) + S * t (m) and X (t 0 + t (m)) are obtained corresponding to the index number m, and these X (t 0 ) + S * t (m) and X ( The correction data E (m) is calculated from the above equation (30) using t 0 + t (m)).
At this time, as a method for obtaining X (t 0 ) + S * t (m) and X (t 0 + t (m)) corresponding to the index number m, the index number m is fixed with Δt fixed as described above. There are a method of associating the time t (m) and a method of associating the index number m and the detection position X (t 0 + t (m)) with Δx fixed.
図4(a)の表には、Δtを固定としてインデックス番号mと時間t(m)を対応づける方法により、インデックス番号mに対応させてX(t0)+S*t(m)とX(t0+t(m))とを求めた場合の例を示す。
In the table of FIG. 4A, X (t 0 ) + S * t (m) and X (X) are associated with the index number m by a method of associating the index number m with the time t (m) with Δt fixed. An example when t 0 + t (m)) is obtained is shown.
図4(a)の表において、m=0の場合には、
t(m)=m*Δtは、t(0)=0、
X(t0+t(m))は、X(t0+t(0))=X(t0)、
X(t0)+S*t(m)は、X(t0)+S*t(0)=X(t0)である。
従って、E(m)は(30)式から、E(0)=X(t0)-X(t0)=0となる。
図4(a)の表において、m=1の場合には、
t(m)=m*Δtは、t(1)=Δt、
X(t0+t(m))は、X(t0+t(1))=X(t0+Δt)、
X(t0)+S*t(m)は、X(t0)+S*t(1)=X(t0)+S*Δtである。
従って、E(m)は(30)式から、E(1)=X(t0)+S*Δt-X(t0+Δt)となる。
図4(a)の表において、m=2の場合には、
t(m)=m*Δtは、t(2)=2*Δt、
X(t0+t(m))は、X(t0+t(2))=X(t0+2*Δt)、
X(t0)+S*t(m)は、X(t0)+S*t(2)=X(t0)+S*2*Δtである。
従って、E(m)は(30)式から、E(m)=X(t0)+S*2*Δt-X(t0+2*Δt)となる。
図4(a)の表において、m=3の場合には、
t(m)=m*Δtは、t(3)=3*Δt、
X(t0+t(m))は、X(t0+t(3))=X(t0+3*Δt)、
X(t0)+S*t(m)は、X(t0)+S*t(3)=X(t0)+S*3*Δtである。
従って、E(m)は(30)式から、E(m)=X(t0)+S*3*Δt-X(t0+3*Δt)となる。
以下、図4(a)の表では記載を省略しているが、m=4,5,・・・,mmの場合も同様であり、
図4(a)の表において、m=mmの場合には、
t(m)=m*Δtは、t(mm)=mm*Δt=T、
X(t0+t(m))は、X(t0+t(mm))=X(t0+T)、
X(t0)+S*t(m)は、X(t0)+S*t(mm)=X(t0)+S*Tである。
従って、E(m)は(30)式から、E(m)=X(t0)+S*T-X(t0+T)となる。 In the table of FIG. 4A, when m = 0,
t (m) = m * Δt is t (0) = 0,
X (t 0 + t (m)) is X (t 0 + t (0)) = X (t 0 ),
X (t 0 ) + S * t (m) is X (t 0 ) + S * t (0) = X (t 0 ).
Therefore, E (m) becomes E (0) = X (t 0 ) −X (t 0 ) = 0 from the equation (30).
In the table of FIG. 4A, when m = 1,
t (m) = m * Δt is t (1) = Δt,
X (t 0 + t (m)) is X (t 0 + t (1)) = X (t 0 + Δt),
X (t 0 ) + S * t (m) is X (t 0 ) + S * t (1) = X (t 0 ) + S * Δt.
Therefore, E (m) becomes E (1) = X (t 0 ) + S * Δt−X (t 0 + Δt) from the equation (30).
In the table of FIG. 4A, when m = 2,
t (m) = m * Δt is t (2) = 2 * Δt,
X (t 0 + t (m)) is X (t 0 + t (2)) = X (t 0 + 2 * Δt),
X (t 0 ) + S * t (m) is X (t 0 ) + S * t (2) = X (t 0 ) + S * 2 * Δt.
Therefore, E (m) becomes E (m) = X (t 0 ) + S * 2 * Δt−X (t 0 + 2 * Δt) from the equation (30).
In the table of FIG. 4A, when m = 3,
t (m) = m * Δt is t (3) = 3 * Δt,
X (t 0 + t (m)) is X (t 0 + t (3)) = X (t 0 + 3 * Δt),
X (t 0 ) + S * t (m) is X (t 0 ) + S * t (3) = X (t 0 ) + S * 3 * Δt.
Therefore, E (m) becomes E (m) = X (t 0 ) + S * 3 * Δt−X (t 0 + 3 * Δt) from the equation (30).
Hereinafter, although not described in the table of FIG. 4 (a), m = 4,5 , ···, The same applies to the case of m m,
In the table of FIG. 4 (a), when the m = m m is
t (m) = m * Δt is t (m m ) = m m * Δt = T,
X (t 0 + t (m)) is X (t 0 + t (m m )) = X (t 0 + T),
X (t 0 ) + S * t (m) is X (t 0 ) + S * t (m m ) = X (t 0 ) + S * T.
Therefore, E (m) becomes E (m) = X (t 0 ) + S * T−X (t 0 + T) from the equation (30).
t(m)=m*Δtは、t(0)=0、
X(t0+t(m))は、X(t0+t(0))=X(t0)、
X(t0)+S*t(m)は、X(t0)+S*t(0)=X(t0)である。
従って、E(m)は(30)式から、E(0)=X(t0)-X(t0)=0となる。
図4(a)の表において、m=1の場合には、
t(m)=m*Δtは、t(1)=Δt、
X(t0+t(m))は、X(t0+t(1))=X(t0+Δt)、
X(t0)+S*t(m)は、X(t0)+S*t(1)=X(t0)+S*Δtである。
従って、E(m)は(30)式から、E(1)=X(t0)+S*Δt-X(t0+Δt)となる。
図4(a)の表において、m=2の場合には、
t(m)=m*Δtは、t(2)=2*Δt、
X(t0+t(m))は、X(t0+t(2))=X(t0+2*Δt)、
X(t0)+S*t(m)は、X(t0)+S*t(2)=X(t0)+S*2*Δtである。
従って、E(m)は(30)式から、E(m)=X(t0)+S*2*Δt-X(t0+2*Δt)となる。
図4(a)の表において、m=3の場合には、
t(m)=m*Δtは、t(3)=3*Δt、
X(t0+t(m))は、X(t0+t(3))=X(t0+3*Δt)、
X(t0)+S*t(m)は、X(t0)+S*t(3)=X(t0)+S*3*Δtである。
従って、E(m)は(30)式から、E(m)=X(t0)+S*3*Δt-X(t0+3*Δt)となる。
以下、図4(a)の表では記載を省略しているが、m=4,5,・・・,mmの場合も同様であり、
図4(a)の表において、m=mmの場合には、
t(m)=m*Δtは、t(mm)=mm*Δt=T、
X(t0+t(m))は、X(t0+t(mm))=X(t0+T)、
X(t0)+S*t(m)は、X(t0)+S*t(mm)=X(t0)+S*Tである。
従って、E(m)は(30)式から、E(m)=X(t0)+S*T-X(t0+T)となる。 In the table of FIG. 4A, when m = 0,
t (m) = m * Δt is t (0) = 0,
X (t 0 + t (m)) is X (t 0 + t (0)) = X (t 0 ),
X (t 0 ) + S * t (m) is X (t 0 ) + S * t (0) = X (t 0 ).
Therefore, E (m) becomes E (0) = X (t 0 ) −X (t 0 ) = 0 from the equation (30).
In the table of FIG. 4A, when m = 1,
t (m) = m * Δt is t (1) = Δt,
X (t 0 + t (m)) is X (t 0 + t (1)) = X (t 0 + Δt),
X (t 0 ) + S * t (m) is X (t 0 ) + S * t (1) = X (t 0 ) + S * Δt.
Therefore, E (m) becomes E (1) = X (t 0 ) + S * Δt−X (t 0 + Δt) from the equation (30).
In the table of FIG. 4A, when m = 2,
t (m) = m * Δt is t (2) = 2 * Δt,
X (t 0 + t (m)) is X (t 0 + t (2)) = X (t 0 + 2 * Δt),
X (t 0 ) + S * t (m) is X (t 0 ) + S * t (2) = X (t 0 ) + S * 2 * Δt.
Therefore, E (m) becomes E (m) = X (t 0 ) + S * 2 * Δt−X (t 0 + 2 * Δt) from the equation (30).
In the table of FIG. 4A, when m = 3,
t (m) = m * Δt is t (3) = 3 * Δt,
X (t 0 + t (m)) is X (t 0 + t (3)) = X (t 0 + 3 * Δt),
X (t 0 ) + S * t (m) is X (t 0 ) + S * t (3) = X (t 0 ) + S * 3 * Δt.
Therefore, E (m) becomes E (m) = X (t 0 ) + S * 3 * Δt−X (t 0 + 3 * Δt) from the equation (30).
Hereinafter, although not described in the table of FIG. 4 (a), m = 4,5 , ···, The same applies to the case of m m,
In the table of FIG. 4 (a), when the m = m m is
t (m) = m * Δt is t (m m ) = m m * Δt = T,
X (t 0 + t (m)) is X (t 0 + t (m m )) = X (t 0 + T),
X (t 0 ) + S * t (m) is X (t 0 ) + S * t (m m ) = X (t 0 ) + S * T.
Therefore, E (m) becomes E (m) = X (t 0 ) + S * T−X (t 0 + T) from the equation (30).
なお、t(m)=0,Δt,2*Δt,3*Δt,・・・,Tは、m*Δtによって得られる。即ち、検出位置X(t0)を取得したときの時間t0を基準時間(0)とし、この基準時間(0)からΔt時間が経過するごとの時間Δt,2*Δt,3*Δt,・・・,Tとして得られる。
X(t0+t(m))=X(t0),X(t0+Δt),X(t0+2*Δt),X(t0+3*Δt),・・・,X(t0+T)は、時間t0において所得した検出位置X(t0)と、その後、Δt時間が経過するごとの検出位置X(t0+Δt),X(t0+2*Δt),X(t0+3*Δt),・・・,X(t0+T)として得られる。 Note that t (m) = 0, Δt, 2 * Δt, 3 * Δt,..., T is obtained by m * Δt. That is, the time t 0 when the detection position X (t 0 ) is acquired is set as the reference time (0), and the time Δt, 2 * Δt, 3 * Δt, every time Δt time elapses from the reference time (0). ..., obtained as T.
X (t 0 + t (m)) = X (t 0 ), X (t 0 + Δt), X (t 0 + 2 * Δt), X (t 0 + 3 * Δt),..., X (t 0 + T ) Is the detected position X (t 0 ) obtained at time t 0 , and thereafter the detected position X (t 0 + Δt), X (t 0 + 2 * Δt), X (t 0 +3) every time Δt time elapses. * Δt),..., X (t 0 + T).
X(t0+t(m))=X(t0),X(t0+Δt),X(t0+2*Δt),X(t0+3*Δt),・・・,X(t0+T)は、時間t0において所得した検出位置X(t0)と、その後、Δt時間が経過するごとの検出位置X(t0+Δt),X(t0+2*Δt),X(t0+3*Δt),・・・,X(t0+T)として得られる。 Note that t (m) = 0, Δt, 2 * Δt, 3 * Δt,..., T is obtained by m * Δt. That is, the time t 0 when the detection position X (t 0 ) is acquired is set as the reference time (0), and the time Δt, 2 * Δt, 3 * Δt, every time Δt time elapses from the reference time (0). ..., obtained as T.
X (t 0 + t (m)) = X (t 0 ), X (t 0 + Δt), X (t 0 + 2 * Δt), X (t 0 + 3 * Δt),..., X (t 0 + T ) Is the detected position X (t 0 ) obtained at time t 0 , and thereafter the detected position X (t 0 + Δt), X (t 0 + 2 * Δt), X (t 0 +3) every time Δt time elapses. * Δt),..., X (t 0 + T).
図4(b)の表には、Δxを固定としてインデックス番号mと検出位置X(t0+t(m))を対応づける方法により、インデックス番号mに対応させてX(t0)+S*t(m)とX(t0+t(m))とを求めた場合の例を示す。
In the table of FIG. 4B, X (t 0 ) + S * t is associated with the index number m by a method in which Δx is fixed and the index number m is associated with the detection position X (t 0 + t (m)). An example in which (m) and X (t 0 + t (m)) are obtained will be shown.
図4(b)の表において、m=0の場合には、
t(m)は、t(0)=0、
X(t0+t(m))=X(t0)+m*Δxは、X(t0+t(0))=X(t0)、
X(t0)+S*t(m)は、X(t0)+S*t(0)=X(t0)である。
従って、E(m)は(30)式から、E(0)=X(t0)-X(t0)=0となる。
図4(b)の表において、m=1の場合には、
t(m)は、t(1)、
X(t0+t(m))=X(t0)+m*Δxは、X(t0+t(1))=X(t0)+Δx、
X(t0)+S*t(m)は、X(t0)+S*t(1)である。
従って、E(m)は(30)式から、E(1)=X(t0)+S*t(1)-X(t0)+Δxとなる。
図4(b)の表において、m=2の場合には、
t(m)は、t(2)、
X(t0+t(m))=X(t0)+m*Δxは、X(t0+t(2))=X(t0)+2*Δx、
X(t0)+S*t(m)は、X(t0)+S*t(2)である。
従って、E(m)は(30)式から、E(2)=X(t0)+S*t(2)-X(t0)+2*Δxとなる。
図4(b)の表において、m=3の場合には、
t(m)は、t(3)、
X(t0+t(m))=X(t0)+m*Δxは、X(t0+t(3))=X(t0)+3*Δx、
X(t0)+S*t(m)は、X(t0)+S*t(3)である。
従って、E(m)は(30)式から、E(3)=X(t0)+S*t(3)-X(t0)+3*Δxとなる。
以下、図4(b)の表では記載を省略しているが、m=4,5,・・・,mmの場合も同様であり、
図4(b)の表において、m=mmの場合には、
t(m)=t(mm)=T、
X(t0+t(m))=X(t0)+m*Δxは、X(t0+t(mm))=X(t0+T)=X(t0)+mm*Δx、
X(t0)+S*t(m)は、X(t0)+S*t(mm)=X(t0)+S*Tである。
従って、E(m)は(30)式から、E(m)=X(t0)+S*T-X(t0)+mm*Δxとなる。 In the table of FIG. 4B, when m = 0,
t (m) is t (0) = 0,
X (t 0 + t (m)) = X (t 0 ) + m * Δx is X (t 0 + t (0)) = X (t 0 ),
X (t 0 ) + S * t (m) is X (t 0 ) + S * t (0) = X (t 0 ).
Therefore, E (m) becomes E (0) = X (t 0 ) −X (t 0 ) = 0 from the equation (30).
In the table of FIG. 4B, when m = 1,
t (m) is t (1),
X (t 0 + t (m)) = X (t 0 ) + m * Δx is X (t 0 + t (1)) = X (t 0 ) + Δx,
X (t 0 ) + S * t (m) is X (t 0 ) + S * t (1).
Therefore, E (m) becomes E (1) = X (t 0 ) + S * t (1) −X (t 0 ) + Δx from the equation (30).
In the table of FIG. 4B, when m = 2,
t (m) is t (2),
X (t 0 + t (m)) = X (t 0 ) + m * Δx is X (t 0 + t (2)) = X (t 0 ) + 2 * Δx,
X (t 0 ) + S * t (m) is X (t 0 ) + S * t (2).
Therefore, E (m) becomes E (2) = X (t 0 ) + S * t (2) −X (t 0 ) + 2 * Δx from the equation (30).
In the table of FIG. 4B, when m = 3,
t (m) is t (3),
X (t 0 + t (m)) = X (t 0 ) + m * Δx is X (t 0 + t (3)) = X (t 0 ) + 3 * Δx,
X (t 0 ) + S * t (m) is X (t 0 ) + S * t (3).
Therefore, E (m) becomes E (3) = X (t 0 ) + S * t (3) −X (t 0 ) + 3 * Δx from the equation (30).
Hereinafter, although not described in the table of FIG. 4 (b), m = 4,5 , ···, The same applies to the case of m m,
In the table of FIG. 4 (b), when the m = m m is
t (m) = t (m m ) = T,
X (t 0 + t (m)) = X (t 0 ) + m * Δx is X (t 0 + t (m m )) = X (t 0 + T) = X (t 0 ) + mm * Δx,
X (t 0 ) + S * t (m) is X (t 0 ) + S * t (m m ) = X (t 0 ) + S * T.
Therefore, E (m) becomes E (m) = X (t 0 ) + S * T−X (t 0 ) + m m * Δx from the equation (30).
t(m)は、t(0)=0、
X(t0+t(m))=X(t0)+m*Δxは、X(t0+t(0))=X(t0)、
X(t0)+S*t(m)は、X(t0)+S*t(0)=X(t0)である。
従って、E(m)は(30)式から、E(0)=X(t0)-X(t0)=0となる。
図4(b)の表において、m=1の場合には、
t(m)は、t(1)、
X(t0+t(m))=X(t0)+m*Δxは、X(t0+t(1))=X(t0)+Δx、
X(t0)+S*t(m)は、X(t0)+S*t(1)である。
従って、E(m)は(30)式から、E(1)=X(t0)+S*t(1)-X(t0)+Δxとなる。
図4(b)の表において、m=2の場合には、
t(m)は、t(2)、
X(t0+t(m))=X(t0)+m*Δxは、X(t0+t(2))=X(t0)+2*Δx、
X(t0)+S*t(m)は、X(t0)+S*t(2)である。
従って、E(m)は(30)式から、E(2)=X(t0)+S*t(2)-X(t0)+2*Δxとなる。
図4(b)の表において、m=3の場合には、
t(m)は、t(3)、
X(t0+t(m))=X(t0)+m*Δxは、X(t0+t(3))=X(t0)+3*Δx、
X(t0)+S*t(m)は、X(t0)+S*t(3)である。
従って、E(m)は(30)式から、E(3)=X(t0)+S*t(3)-X(t0)+3*Δxとなる。
以下、図4(b)の表では記載を省略しているが、m=4,5,・・・,mmの場合も同様であり、
図4(b)の表において、m=mmの場合には、
t(m)=t(mm)=T、
X(t0+t(m))=X(t0)+m*Δxは、X(t0+t(mm))=X(t0+T)=X(t0)+mm*Δx、
X(t0)+S*t(m)は、X(t0)+S*t(mm)=X(t0)+S*Tである。
従って、E(m)は(30)式から、E(m)=X(t0)+S*T-X(t0)+mm*Δxとなる。 In the table of FIG. 4B, when m = 0,
t (m) is t (0) = 0,
X (t 0 + t (m)) = X (t 0 ) + m * Δx is X (t 0 + t (0)) = X (t 0 ),
X (t 0 ) + S * t (m) is X (t 0 ) + S * t (0) = X (t 0 ).
Therefore, E (m) becomes E (0) = X (t 0 ) −X (t 0 ) = 0 from the equation (30).
In the table of FIG. 4B, when m = 1,
t (m) is t (1),
X (t 0 + t (m)) = X (t 0 ) + m * Δx is X (t 0 + t (1)) = X (t 0 ) + Δx,
X (t 0 ) + S * t (m) is X (t 0 ) + S * t (1).
Therefore, E (m) becomes E (1) = X (t 0 ) + S * t (1) −X (t 0 ) + Δx from the equation (30).
In the table of FIG. 4B, when m = 2,
t (m) is t (2),
X (t 0 + t (m)) = X (t 0 ) + m * Δx is X (t 0 + t (2)) = X (t 0 ) + 2 * Δx,
X (t 0 ) + S * t (m) is X (t 0 ) + S * t (2).
Therefore, E (m) becomes E (2) = X (t 0 ) + S * t (2) −X (t 0 ) + 2 * Δx from the equation (30).
In the table of FIG. 4B, when m = 3,
t (m) is t (3),
X (t 0 + t (m)) = X (t 0 ) + m * Δx is X (t 0 + t (3)) = X (t 0 ) + 3 * Δx,
X (t 0 ) + S * t (m) is X (t 0 ) + S * t (3).
Therefore, E (m) becomes E (3) = X (t 0 ) + S * t (3) −X (t 0 ) + 3 * Δx from the equation (30).
Hereinafter, although not described in the table of FIG. 4 (b), m = 4,5 , ···, The same applies to the case of m m,
In the table of FIG. 4 (b), when the m = m m is
t (m) = t (m m ) = T,
X (t 0 + t (m)) = X (t 0 ) + m * Δx is X (t 0 + t (m m )) = X (t 0 + T) = X (t 0 ) + mm * Δx,
X (t 0 ) + S * t (m) is X (t 0 ) + S * t (m m ) = X (t 0 ) + S * T.
Therefore, E (m) becomes E (m) = X (t 0 ) + S * T−X (t 0 ) + m m * Δx from the equation (30).
なお、X(t0+t(m))=X(t0)+m*Δx=X(t0),X(t0)+Δx,X(t0)+2*Δx,X(t0)+3*Δx,・・・,X(t0)+mm*Δxは、時間t0において所得した検出位置X(t0)と、その後の移動量Δxごとの検出位置X(t0)+Δx,X(t0)+2*Δx,X(t0)+3*Δx,・・・,X(t0)+mm*Δxとして得られる。
t(m)=t(0)(=0),t(1),t(2),t(3),・・・,Tは、検出位置X(t0)を取得したときの時間t0を基準時間t(0)(=0)とし、その後、検出位置X(t0)+Δx,X(t0)+2*Δx,X(t0)+3*Δx,・・・,X(t0)+mm*Δxの検出位置を得たときの時間t(1),t(2),t(3),・・・,Tとして得られる。 X (t 0 + t (m)) = X (t 0 ) + m * Δx = X (t 0 ), X (t 0 ) + Δx, X (t 0 ) + 2 * Δx, X (t 0 ) + 3 * Δx,..., X (t 0 ) + m m * Δx is the detected position X (t 0 ) obtained at time t 0 and the detected position X (t 0 ) + Δx, X ( t 0 ) + 2 * Δx, X (t 0 ) + 3 * Δx,..., X (t 0 ) + m m * Δx.
t (m) = t (0) (= 0), t (1), t (2), t (3),..., T is the time t when the detection position X (t 0 ) is acquired. 0 is set as the reference time t (0) (= 0), and then the detection position X (t 0 ) + Δx, X (t 0 ) + 2 * Δx, X (t 0 ) + 3 * Δx,. 0 ) + m m * Δx is obtained as times t (1), t (2), t (3),.
t(m)=t(0)(=0),t(1),t(2),t(3),・・・,Tは、検出位置X(t0)を取得したときの時間t0を基準時間t(0)(=0)とし、その後、検出位置X(t0)+Δx,X(t0)+2*Δx,X(t0)+3*Δx,・・・,X(t0)+mm*Δxの検出位置を得たときの時間t(1),t(2),t(3),・・・,Tとして得られる。 X (t 0 + t (m)) = X (t 0 ) + m * Δx = X (t 0 ), X (t 0 ) + Δx, X (t 0 ) + 2 * Δx, X (t 0 ) + 3 * Δx,..., X (t 0 ) + m m * Δx is the detected position X (t 0 ) obtained at time t 0 and the detected position X (t 0 ) + Δx, X ( t 0 ) + 2 * Δx, X (t 0 ) + 3 * Δx,..., X (t 0 ) + m m * Δx.
t (m) = t (0) (= 0), t (1), t (2), t (3),..., T is the time t when the detection position X (t 0 ) is acquired. 0 is set as the reference time t (0) (= 0), and then the detection position X (t 0 ) + Δx, X (t 0 ) + 2 * Δx, X (t 0 ) + 3 * Δx,. 0 ) + m m * Δx is obtained as times t (1), t (2), t (3),.
なお、上記のようなインデックス番号mとの対応関係については、図3(a)にも例示している。
The correspondence relationship with the index number m as described above is also illustrated in FIG.
上記の(30)式に基づいて算出した補正データE(m)=E(0)(=0),E(1),E(2),E(3),・・・,E(mm)は、インデックス番号m:0,1,2,3,・・・,mmに沿う順、即ちE(0)(=0),E(1),E(2),E(3),・・・,E(mm)の順に固定メモリ18Bの各アドレスへ、先頭アドレスから順に記憶させる。このように補正データE(m)を固定メモリ18Bの先頭アドレスから順に記憶させるようにすれば、インデックス番号mを記憶させる必要はない。
この場合には、インデックス番号mに代えて固定メモリ18Bのアドレスが、補正データE(m)の算出に用いる検出位置データを取得した前記所定の移動区間(コイルピッチpのn倍に相当する区間)における最初(1番目)のコイルピッチpの始端位置から最後(n番目)のコイルピッチpの終端位置までの各コイルピッチ位置に対応している。
即ち、先頭アドレスは最初(1番目)のコイルピッチpの始端位置に対応し、mm+1番目のアドレスは最後(n番目)のコイルピッチpの終端位置に対応し、2番目からmm番目のアドレスは最初(1番目)のコイルピッチpの始端位置から最後(n番目)のコイルピッチpの終端位置まで間の各コイルピッチ位置に順に対応している。 Correction data E (m) = E (0) (= 0), E (1), E (2), E (3),..., E (m m ) calculated based on the above equation (30) ) In the order along the index numbers m: 0, 1, 2, 3,..., M m , that is, E (0) (= 0), E (1), E (2), E (3), .., E (m m ) are stored in order from the head address to each address of the fixedmemory 18B. In this way, if the correction data E (m) is stored in order from the head address of the fixed memory 18B, it is not necessary to store the index number m.
In this case, instead of the index number m, the address of the fixedmemory 18B is the predetermined moving section (the section corresponding to n times the coil pitch p) from which the detected position data used for calculating the correction data E (m) is acquired. ) Corresponding to each coil pitch position from the start end position of the first (first) coil pitch p to the end position of the last (nth) coil pitch p.
That is, the first address corresponds to the start position of the first (first) coil pitch p, and the m m + 1st address corresponds to the end position of the last (nth) coil pitch p, from the second to m m th. Address sequentially corresponds to each coil pitch position from the start position of the first (first) coil pitch p to the end position of the last (n-th) coil pitch p.
この場合には、インデックス番号mに代えて固定メモリ18Bのアドレスが、補正データE(m)の算出に用いる検出位置データを取得した前記所定の移動区間(コイルピッチpのn倍に相当する区間)における最初(1番目)のコイルピッチpの始端位置から最後(n番目)のコイルピッチpの終端位置までの各コイルピッチ位置に対応している。
即ち、先頭アドレスは最初(1番目)のコイルピッチpの始端位置に対応し、mm+1番目のアドレスは最後(n番目)のコイルピッチpの終端位置に対応し、2番目からmm番目のアドレスは最初(1番目)のコイルピッチpの始端位置から最後(n番目)のコイルピッチpの終端位置まで間の各コイルピッチ位置に順に対応している。 Correction data E (m) = E (0) (= 0), E (1), E (2), E (3),..., E (m m ) calculated based on the above equation (30) ) In the order along the index numbers m: 0, 1, 2, 3,..., M m , that is, E (0) (= 0), E (1), E (2), E (3), .., E (m m ) are stored in order from the head address to each address of the fixed
In this case, instead of the index number m, the address of the fixed
That is, the first address corresponds to the start position of the first (first) coil pitch p, and the m m + 1st address corresponds to the end position of the last (nth) coil pitch p, from the second to m m th. Address sequentially corresponds to each coil pitch position from the start position of the first (first) coil pitch p to the end position of the last (n-th) coil pitch p.
なお、必ずしもこれに限定するものではなく、補正データE(m)を固定メモリ18Bのアドレスにランダムに記憶させてもよい。この場合にはインデックス番号mも固定メモリ18Bに記憶させておき、このインデックス番号mと補正データE(m)とを対応づけておけばよい。例えば、5番目のアドレスにインデックス番号2と補正データE(2)を記憶させ、2番目のアドレスにインデックス番号3と補正データE(3)を記憶させるような方法でもよい。
Note that the present invention is not necessarily limited to this, and the correction data E (m) may be stored at random in the address of the fixed memory 18B. In this case, the index number m is also stored in the fixed memory 18B, and the index number m and the correction data E (m) may be associated with each other. For example, the index number 2 and the correction data E (2) may be stored at the fifth address, and the index number 3 and the correction data E (3) may be stored at the second address.
固定メモリ18Bに記憶される補正データE(m)の個数は、例えば、1つのコイルピッチp当たりの補正データE(m)の数を512個とし、コイルピッチ数nを256とすると、全部で131072個になる。
The number of correction data E (m) stored in the fixed memory 18B is, for example, when the number of correction data E (m) per coil pitch p is 512 and the coil pitch number n is 256, There will be 131072.
また、上記では検出位置データを取得する前記所定の移動区間(コイルピッチpのn倍に相当する区間)を1つにしているが、これに限定するものではなく、検出位置データを取得する前記所定の移動区間(コイルピッチpのn倍に相当する区間)は複数であってもよい。
この場合には、上記の同様の方法によって、複数の移動区間(コイルピッチpのn倍に相当する区間)において検出位置データを取得し、これらの検出位置データに基づいて各移動区間(コイルピッチpのn倍に相当する区間)ごとの補正データE(m)を取得し、これらの各移動区間(コイルピッチpのn倍に相当する区間)ごとの補正データE(m)の平均値を最終的な補正データE(m)とする。
そして、この最終的な(平均値の)補正データE(m)を、固定メモリ18Bに記憶させる。この場合も、補正データE(m)を固定メモリ18Bに記憶させる方法については前述のとおりである。 In the above description, the predetermined moving section (the section corresponding to n times the coil pitch p) for acquiring the detection position data is made one, but the present invention is not limited to this, and the detection position data is acquired. There may be a plurality of predetermined movement sections (sections corresponding to n times the coil pitch p).
In this case, detection position data is acquired in a plurality of movement sections (sections corresponding to n times the coil pitch p) by the same method as described above, and each movement section (coil pitch) is obtained based on these detection position data. correction data E (m) for each section (corresponding to n times p) is obtained, and an average value of the correction data E (m) for each of these movement sections (section corresponding to n times the coil pitch p) is obtained. The final correction data E (m) is used.
Then, the final (average value) correction data E (m) is stored in the fixedmemory 18B. Also in this case, the method for storing the correction data E (m) in the fixed memory 18B is as described above.
この場合には、上記の同様の方法によって、複数の移動区間(コイルピッチpのn倍に相当する区間)において検出位置データを取得し、これらの検出位置データに基づいて各移動区間(コイルピッチpのn倍に相当する区間)ごとの補正データE(m)を取得し、これらの各移動区間(コイルピッチpのn倍に相当する区間)ごとの補正データE(m)の平均値を最終的な補正データE(m)とする。
そして、この最終的な(平均値の)補正データE(m)を、固定メモリ18Bに記憶させる。この場合も、補正データE(m)を固定メモリ18Bに記憶させる方法については前述のとおりである。 In the above description, the predetermined moving section (the section corresponding to n times the coil pitch p) for acquiring the detection position data is made one, but the present invention is not limited to this, and the detection position data is acquired. There may be a plurality of predetermined movement sections (sections corresponding to n times the coil pitch p).
In this case, detection position data is acquired in a plurality of movement sections (sections corresponding to n times the coil pitch p) by the same method as described above, and each movement section (coil pitch) is obtained based on these detection position data. correction data E (m) for each section (corresponding to n times p) is obtained, and an average value of the correction data E (m) for each of these movement sections (section corresponding to n times the coil pitch p) is obtained. The final correction data E (m) is used.
Then, the final (average value) correction data E (m) is stored in the fixed
(4) 検出位置の補正
その後、検出制御装置18(検出制御部18A)では、移動体21(スライダ12)を移動させて実際の作業(例えば工作機械による加工)を行うときなどにおいて、検出位置X(t)の補正を行う場合には、固定メモリ18Bから補正データE(m)を読み出す。
そして、下記の(31)式に基づき、検出位置X(t0+t(m))に固定メモリ18Bから読み出した補正データ得E(m)を加算することによってX’(t0+t(m))を求め、このX’(t0+t(m))を補正した検出位置として出力する。
X’(t0+t(m))=X(t0+t(m))+E(m) (31) (4) Correction of detection position Thereafter, the detection control device 18 (detection control unit 18A) detects the detection position when the movable body 21 (slider 12) is moved to perform actual work (for example, machining with a machine tool). When X (t) is corrected, correction data E (m) is read from the fixed memory 18B.
Then, based on equation (31) below, the detection position X (t 0 + t (m )) X by adding the correction data obtained E (m) read from the fixedmemory 18B to '(t 0 + t (m ) ), And this X ′ (t 0 + t (m)) is output as a corrected detection position.
X ′ (t 0 + t (m)) = X (t 0 + t (m)) + E (m) (31)
その後、検出制御装置18(検出制御部18A)では、移動体21(スライダ12)を移動させて実際の作業(例えば工作機械による加工)を行うときなどにおいて、検出位置X(t)の補正を行う場合には、固定メモリ18Bから補正データE(m)を読み出す。
そして、下記の(31)式に基づき、検出位置X(t0+t(m))に固定メモリ18Bから読み出した補正データ得E(m)を加算することによってX’(t0+t(m))を求め、このX’(t0+t(m))を補正した検出位置として出力する。
X’(t0+t(m))=X(t0+t(m))+E(m) (31) (4) Correction of detection position Thereafter, the detection control device 18 (
Then, based on equation (31) below, the detection position X (t 0 + t (m )) X by adding the correction data obtained E (m) read from the fixed
X ′ (t 0 + t (m)) = X (t 0 + t (m)) + E (m) (31)
詳述すると、移動体21(スライダ12)の移動位置とスケール15のスケールコイル16の位置(コイルピッチ位置)は対応しているため、スケールコイル16のコイルピッチ位置と検出位置X(t)は対応している。
従って、検出制御装置18(検出制御部18A)では、移動体21(スライダ12)の位置を検出して、或る検出位置X(t)が得られた場合、当該検出位置X(t)が、どのコイルピッチ位置に対応する検出位置であるのかが分かる。
従って、検出制御装置18(検出制御部18B)では、移動体21(スライダ12)の位置を検出して或る検出位置X(t)が得られた場合、当該検出位置X(t)に対応するコイルピッチ位置を判断し、当該コイルピッチ位置に対応する補正データE(m)を固定メモリ18Bから読み出し、当該検出位置X(t)と当該補正データE(m)とを加算することによって、補正した検出位置を得る。 More specifically, since the moving position of the moving body 21 (slider 12) corresponds to the position of thescale coil 16 of the scale 15 (coil pitch position), the coil pitch position of the scale coil 16 and the detection position X (t) are It corresponds.
Therefore, when the detection control device 18 (detection control unit 18A) detects the position of the moving body 21 (slider 12) and obtains a certain detection position X (t), the detection position X (t) is It can be seen which coil pitch position corresponds to the detection position.
Accordingly, when the detection control device 18 (detection control unit 18B) detects the position of the moving body 21 (slider 12) and obtains a certain detection position X (t), it corresponds to the detection position X (t). By determining the coil pitch position to be performed, reading the correction data E (m) corresponding to the coil pitch position from the fixed memory 18B, and adding the detection position X (t) and the correction data E (m), A corrected detection position is obtained.
従って、検出制御装置18(検出制御部18A)では、移動体21(スライダ12)の位置を検出して、或る検出位置X(t)が得られた場合、当該検出位置X(t)が、どのコイルピッチ位置に対応する検出位置であるのかが分かる。
従って、検出制御装置18(検出制御部18B)では、移動体21(スライダ12)の位置を検出して或る検出位置X(t)が得られた場合、当該検出位置X(t)に対応するコイルピッチ位置を判断し、当該コイルピッチ位置に対応する補正データE(m)を固定メモリ18Bから読み出し、当該検出位置X(t)と当該補正データE(m)とを加算することによって、補正した検出位置を得る。 More specifically, since the moving position of the moving body 21 (slider 12) corresponds to the position of the
Therefore, when the detection control device 18 (
Accordingly, when the detection control device 18 (
なお、或る検出位置X(t)に対応するコイルピッチ位置が、第1の補正データE(m)に対応するコイルピッチ位置と、その次の第2の補正データE(m)に対応するコイルピッチ位置との間の位置である場合(例えば補正データE(10)に対応するコイルピッチ位置と、補正データE(11)に対応するコイルピッチ位置との間の位置である場合)には、第1の補正データE(m)(例えば補正データE(10))と、第2の補正データE(m)(例えば補正データE(11))とを内挿補間して補正データを求め、この内挿補間した補正データを、当該検出位置X(t)に加算することによって、補正した検出位置を得る。
Note that the coil pitch position corresponding to a certain detection position X (t) corresponds to the coil pitch position corresponding to the first correction data E (m) and the second correction data E (m) next thereto. When the position is between the coil pitch positions (for example, when the position is between the coil pitch position corresponding to the correction data E (10) and the coil pitch position corresponding to the correction data E (11)). The first correction data E (m) (for example, correction data E (10)) and the second correction data E (m) (for example, correction data E (11)) are interpolated to obtain correction data. The corrected detection position is obtained by adding the correction data subjected to the interpolation to the detection position X (t).
また、補正データ取得処理によって取得したn個のコイルピッチp分の補正データE(m)は、スケールコイル16のn個のコイルピッチpごとに繰り返し用いられて検出位置X(t)を補正することなる。
なお、原理的にはコイルピッチnは1個でもよい。即ち、少なくとも1つのコイルピッチpの分だけ補正データE(m)を取得するばよい。この場合には、1つのコイルピッチp分の補正データE(m)が、スケールコイル16の各コイルピッチpごとに繰り返し用いられて、検出位置X(t)を補正することなる。 Further, the correction data E (m) for the n coil pitches p acquired by the correction data acquisition process is repeatedly used for every n coil pitches p of thescale coil 16 to correct the detection position X (t). It will be different.
In principle, the coil pitch n may be one. That is, the correction data E (m) may be acquired for at least one coil pitch p. In this case, the correction data E (m) for one coil pitch p is repeatedly used for each coil pitch p of thescale coil 16 to correct the detection position X (t).
なお、原理的にはコイルピッチnは1個でもよい。即ち、少なくとも1つのコイルピッチpの分だけ補正データE(m)を取得するばよい。この場合には、1つのコイルピッチp分の補正データE(m)が、スケールコイル16の各コイルピッチpごとに繰り返し用いられて、検出位置X(t)を補正することなる。 Further, the correction data E (m) for the n coil pitches p acquired by the correction data acquisition process is repeatedly used for every n coil pitches p of the
In principle, the coil pitch n may be one. That is, the correction data E (m) may be acquired for at least one coil pitch p. In this case, the correction data E (m) for one coil pitch p is repeatedly used for each coil pitch p of the
また、上記では、一定速度判断処理(第1の一定速度判断方法又は第2の一定速度判断方法又は第3の一定速度判断方法)において、移動体21が一定速度Sで移動したと判断した前記所定の移動区間(コイルピッチpのn倍に相当する区間)における検出位置データを全体的に用いて補正データE(m)を求めたが、これに限定するものではなく、当該検出位置X(t)のデータのうちの一部を用いて補正データE(m)を求めるようにしてもよい。
即ち、前記所定の移動区間(コイルピッチpのn倍に相当する区間)における任意のN1番目(例えば50番目)のコイルピッチpの始端位置に対応する検出位置X(tN1)のデータから、前記所定の移動区間(コイルピッチpのn倍に相当する区間)における任意のN2番目(例えば150番目)のコイルピッチpの終端位置に対応する検出位置X(tN2)のデータまでを用いて、補正データE(m)を求めてもよい。
この場合、N1番目(例えば50番目)のコイルピッチpの始端位置に対応する検出位置X(tN1)が得られたときから、N2番目(例えば150番目)のコイルピッチpの終端位置に対応する検出位置X(tN2)が得られたときまでの移動時間がT3であるとすると、前述の時間t(m)=0~TにおけるTをT3とすればよい。また、検出位置X(tN1)が基準の検出位置X(t0)となり、検出位置X(tN2)がX(t0+t(mm))となる。
そして、この場合も、上記と同様の方法によって補正データE(m)を取得することができる。 In the above description, it is determined that the movingbody 21 has moved at the constant speed S in the constant speed determination process (the first constant speed determination method, the second constant speed determination method, or the third constant speed determination method). Although the correction data E (m) is obtained using the detection position data in the predetermined movement section (section corresponding to n times the coil pitch p) as a whole, the present invention is not limited to this, and the detection position X ( The correction data E (m) may be obtained using a part of the data of t).
That is, from the data of the detection position X (t N1 ) corresponding to the start position of an arbitrary N 1 th (for example, 50th) coil pitch p in the predetermined movement section (section corresponding to n times the coil pitch p). , Up to the data of the detection position X (t N2 ) corresponding to the terminal position of an arbitrary N 2nd (for example, 150th) coil pitch p in the predetermined movement section (section corresponding to n times the coil pitch p). The correction data E (m) may be obtained by using it.
In this case, the end position of the N 2 (for example, 150th) coil pitch p from when the detection position X (t N1 ) corresponding to the start position of the N 1 (for example, 50th) coil pitch p is obtained. If the moving time until the detection position X (t N2 ) corresponding to is obtained is T 3 , T at the above-described time t (m) = 0 to T may be T 3 . Also, the detection position X (t N1 ) becomes the reference detection position X (t 0 ), and the detection position X (t N2 ) becomes X (t 0 + t (m m )).
Also in this case, the correction data E (m) can be acquired by the same method as described above.
即ち、前記所定の移動区間(コイルピッチpのn倍に相当する区間)における任意のN1番目(例えば50番目)のコイルピッチpの始端位置に対応する検出位置X(tN1)のデータから、前記所定の移動区間(コイルピッチpのn倍に相当する区間)における任意のN2番目(例えば150番目)のコイルピッチpの終端位置に対応する検出位置X(tN2)のデータまでを用いて、補正データE(m)を求めてもよい。
この場合、N1番目(例えば50番目)のコイルピッチpの始端位置に対応する検出位置X(tN1)が得られたときから、N2番目(例えば150番目)のコイルピッチpの終端位置に対応する検出位置X(tN2)が得られたときまでの移動時間がT3であるとすると、前述の時間t(m)=0~TにおけるTをT3とすればよい。また、検出位置X(tN1)が基準の検出位置X(t0)となり、検出位置X(tN2)がX(t0+t(mm))となる。
そして、この場合も、上記と同様の方法によって補正データE(m)を取得することができる。 In the above description, it is determined that the moving
That is, from the data of the detection position X (t N1 ) corresponding to the start position of an arbitrary N 1 th (for example, 50th) coil pitch p in the predetermined movement section (section corresponding to n times the coil pitch p). , Up to the data of the detection position X (t N2 ) corresponding to the terminal position of an arbitrary N 2nd (for example, 150th) coil pitch p in the predetermined movement section (section corresponding to n times the coil pitch p). The correction data E (m) may be obtained by using it.
In this case, the end position of the N 2 (for example, 150th) coil pitch p from when the detection position X (t N1 ) corresponding to the start position of the N 1 (for example, 50th) coil pitch p is obtained. If the moving time until the detection position X (t N2 ) corresponding to is obtained is T 3 , T at the above-described time t (m) = 0 to T may be T 3 . Also, the detection position X (t N1 ) becomes the reference detection position X (t 0 ), and the detection position X (t N2 ) becomes X (t 0 + t (m m )).
Also in this case, the correction data E (m) can be acquired by the same method as described above.
また、一定速度判断処理(第1の一定速度判断方法又は第2の一定速度判断方法又は第3の一定速度判断方法)において、移動体21が一定速度Sで移動したと判断した前記所定の移動区間(コイルピッチpのn倍に相当する区間)が、最初(1番目)のコイルピッチpの途中位置から、最後(例えば256番目)のコイルピッチpの途中位置までであった場合も、上記と同様の方法によって補正データE(m)を所得することができる。
Further, in the constant speed determination process (the first constant speed determination method, the second constant speed determination method, or the third constant speed determination method), the predetermined movement determined that the moving body 21 has moved at the constant speed S. Even when the section (section corresponding to n times the coil pitch p) is from the middle position of the first (first) coil pitch p to the middle position of the last (for example, 256th) coil pitch p, The correction data E (m) can be obtained by the same method.
即ち、前記所定の移動区間(コイルピッチpのn倍に相当する区間)における最初(1番目)のコイルピッチpを除いた任意のN3番目(例えば2番目)のコイルピッチpの始端位置に対応する検出位置X(tN3)のデータから、前記所定の移動区間(コイルピッチpのn倍に相当する区間)の最後(例えば256番目)のコイルピッチpを除いた任意のN4番目(例えば255番目)のコイルピッチpの終端位置に対応する検出位置X(tN4)のデータまでを用いて、補正データE(m)を求めればよい。
この場合、N3番目(例えば2番目)のコイルピッチpの始端位置に対応する検出位置X(tN3)が得られたときから、N4番目(例えば255番目)のコイルピッチpの終端位置に対応する検出位置X(tN4)が得られたときまでの移動時間がT4であるとすると、前述の時間t(m)=0~TにおけるTをT4とすればよい。また、検出位置X(tN3)が基準の検出位置X(t0)となり、検出位置X(tN4)がX(t0+t(mm))となる。
そして、この場合も、上記と同様の方法によって補正データE(m)を取得することができる。 That is, at the start position of an arbitrary N 3rd (for example, second) coil pitch p excluding the first (first) coil pitch p in the predetermined movement section (section corresponding to n times the coil pitch p). Arbitrary N 4th (for example, 256th) coil pitch p at the end of the predetermined movement section (section corresponding to n times the coil pitch p) is removed from the corresponding detection position X (t N3 ) data. For example, the correction data E (m) may be obtained by using the data up to the detection position X (t N4 ) corresponding to the terminal position of the 255th coil pitch p.
In this case, the end position of the N 4th (for example, 255th) coil pitch p from when the detection position X (t N3 ) corresponding to the start position of the N 3th (for example, 2nd) coil pitch p is obtained. If the moving time until the detection position X (t N4 ) corresponding to is obtained is T 4 , T at the above-described time t (m) = 0 to T may be T 4 . Further, the detection position X (t N3 ) becomes the reference detection position X (t 0 ), and the detection position X (t N4 ) becomes X (t 0 + t (m m )).
Also in this case, the correction data E (m) can be acquired by the same method as described above.
この場合、N3番目(例えば2番目)のコイルピッチpの始端位置に対応する検出位置X(tN3)が得られたときから、N4番目(例えば255番目)のコイルピッチpの終端位置に対応する検出位置X(tN4)が得られたときまでの移動時間がT4であるとすると、前述の時間t(m)=0~TにおけるTをT4とすればよい。また、検出位置X(tN3)が基準の検出位置X(t0)となり、検出位置X(tN4)がX(t0+t(mm))となる。
そして、この場合も、上記と同様の方法によって補正データE(m)を取得することができる。 That is, at the start position of an arbitrary N 3rd (for example, second) coil pitch p excluding the first (first) coil pitch p in the predetermined movement section (section corresponding to n times the coil pitch p). Arbitrary N 4th (for example, 256th) coil pitch p at the end of the predetermined movement section (section corresponding to n times the coil pitch p) is removed from the corresponding detection position X (t N3 ) data. For example, the correction data E (m) may be obtained by using the data up to the detection position X (t N4 ) corresponding to the terminal position of the 255th coil pitch p.
In this case, the end position of the N 4th (for example, 255th) coil pitch p from when the detection position X (t N3 ) corresponding to the start position of the N 3th (for example, 2nd) coil pitch p is obtained. If the moving time until the detection position X (t N4 ) corresponding to is obtained is T 4 , T at the above-described time t (m) = 0 to T may be T 4 . Further, the detection position X (t N3 ) becomes the reference detection position X (t 0 ), and the detection position X (t N4 ) becomes X (t 0 + t (m m )).
Also in this case, the correction data E (m) can be acquired by the same method as described above.
或いは、この場合には、最初(1番目)のコイルピッチpにおける途中位置から終端位置までの検出位置データを、最後(例えば256番目)のコイルピッチpにおける途中位置の検出位置データの後に加えて、補正データE(m)を取得してもよい。この場合には、2番目のコイルピッチpの始端位置から、最後(例えば256番目)のコイルピッチpの終端位置に対応する補正データE(m)を取得することができる。
Alternatively, in this case, the detection position data from the middle position to the end position at the first (first) coil pitch p is added after the detection position data at the middle position at the last (for example, 256th) coil pitch p. Correction data E (m) may be acquired. In this case, correction data E (m) corresponding to the end position of the last (for example, 256th) coil pitch p can be acquired from the start end position of the second coil pitch p.
以上のように、本実施の形態例1に係る電磁誘導式位置検出器11の検出位置補正方法は、第1のスライダコイル13及び第2のスライダコイル14を備えたスライダ12と、スケールコイル16を備えたスケール15とを有し、スライダ12が移動体21に取り付けられて移動体21とともに移動し、第1のスライダコイル13及び第2のスライダコイル14とスケールコイル16が互いに平行で向かい合わせになるように配置された電磁誘導式位置検出器11の検出位置補正方法であって、一定速度Sの速度指令値によって移動体21を移動させ、電磁誘導式位置検出器11で移動体21の位置を検出して検出位置X(t)を取得する検出位置取得処理と、検出位置X(t)とスケールコイル16のコイルピッチpとに基づき(第1の一定速度判断方法)、又は、検出位置X(t)と一定速度Sと移動体21の移動時間T1とに基づき(第2の一定速度判断方法)、又は、スケールコイル16のコイルピッチpと一定速度Sと移動体21の移動時間T2とに基づき(第3の一定速度判断方法)、所定の移動区間において移動体21が一定速度Sで移動したことを判断する一定速度判断処理と、前記移動区間における何れかのコイルピッチpの始端位置に対応する検出位置X(t0)を基準検出位置とし、前記基準検出位置X(t0)を取得してからの経過時間Tと一定速度Sとの乗算値を、基準検出位置X(t0)に加算することによって近似理想位置を求め、この近似理想位置と検出位置とに基づいて補正データを取得する補正データ取得処理とを行うことを特徴としている。
このため、電磁誘導式位置検出器11とは別の高精度位置検出器を必要とせず、電磁誘導式位置検出器11自身で補正データを取得して検出位置の補正を行うことができる。 As described above, the detection position correction method of the electromagnetic inductiontype position detector 11 according to the first embodiment includes the slider 12 including the first slider coil 13 and the second slider coil 14, and the scale coil 16. The slider 12 is attached to the moving body 21 and moves together with the moving body 21, and the first slider coil 13, the second slider coil 14, and the scale coil 16 are parallel to each other and face each other. Is a detection position correction method of the electromagnetic induction type position detector 11 arranged so that the moving body 21 is moved by a speed command value of a constant speed S, and the electromagnetic induction position detector 11 Based on the detection position acquisition process for detecting the position and acquiring the detection position X (t), and the detection position X (t) and the coil pitch p of the scale coil 16 (first first Speed determining method), or, based on the detected position X (t) and a constant speed S and moving time T 1 of the moving body 21 (second constant velocity determination method), or, the coil pitch p of the scale coils 16 constant Based on the speed S and the moving time T 2 of the moving body 21 (third constant speed determining method), a constant speed determining process for determining that the moving body 21 has moved at a constant speed S in a predetermined moving section; A detection position X (t 0 ) corresponding to the starting end position of any coil pitch p in the movement section is set as a reference detection position, and an elapsed time T and a constant speed S after obtaining the reference detection position X (t 0 ). Is added to the reference detection position X (t 0 ) to obtain an approximate ideal position, and correction data acquisition processing is performed for acquiring correction data based on the approximate ideal position and the detection position. It is a feature.
For this reason, a high-accuracy position detector different from the electromagnetic inductiontype position detector 11 is not required, and correction data can be obtained by obtaining correction data by the electromagnetic induction type position detector 11 itself.
このため、電磁誘導式位置検出器11とは別の高精度位置検出器を必要とせず、電磁誘導式位置検出器11自身で補正データを取得して検出位置の補正を行うことができる。 As described above, the detection position correction method of the electromagnetic induction
For this reason, a high-accuracy position detector different from the electromagnetic induction
また、本実施の形態例1の電磁誘導式位置検出器11の検出位置補正方法は、前記一定速度判断処理(第1の一定速度判断方法)では、前記移動区間を、コイルピッチpのn倍(nは自然数)に相当する区間とし、移動体21が、一定速度Sで、前記移動区間を移動するのに要する移動時間をT1とし、前記移動区間の始端位置に対応する検出位置をX(t0)、前記移動区間の終端位置に対応する検出位置をX(t0+T1)とし、閾値を±Lとすると、n*p-L≧X(t0+T1)-X(t0)≧n*p+Lの条件を満たすとき、前記移動区間において移動体が一定速度Sで移動したと判断することを特徴としている。
このため、電磁誘導式位置検出器11自身で移動体21の一定速度Sの判断を容易且つ確実に行うことができる。 Further, the detection position correction method of the electromagnetic inductiontype position detector 11 according to the first embodiment is that the moving section is set to n times the coil pitch p in the constant speed determination process (first constant speed determination method). (n is a natural number) and section corresponding to the moving body 21, at a constant rate S, the moving time required to move the moving section and T 1, a detection position corresponding to the starting end position of the movement section X (T 0 ), where the detection position corresponding to the end position of the moving section is X (t 0 + T 1 ) and the threshold is ± L, n * p−L ≧ X (t 0 + T 1 ) −X (t 0 ) ≧ n * p + L When the condition is satisfied, it is determined that the moving body has moved at a constant speed S in the moving section.
For this reason, the electromagneticinduction position detector 11 itself can easily and reliably determine the constant speed S of the moving body 21.
このため、電磁誘導式位置検出器11自身で移動体21の一定速度Sの判断を容易且つ確実に行うことができる。 Further, the detection position correction method of the electromagnetic induction
For this reason, the electromagnetic
また、本実施の形態例1の電磁誘導式位置検出器11の検出位置補正方法は、前記一定速度判断処理(第2の一定速度判断方法)では、前記移動区間を、コイルピッチpのn倍(nは自然数)に相当する区間とし、移動体21が、一定速度Sで、前記移動区間を移動するのに要する移動時間をT1とし、前記移動区間の始端位置に対応する検出位置をX(t0)、前記移動区間の終端位置に対応する検出位置をX(t0+T1)とし、閾値を±Lとすると、S*T1-L≧X(t0+T1)-X(t0)≧S*T1+Lの条件を満たすとき、前記移動区間において移動体21が一定速度Sで移動したと判断することを特徴としている。
このため、電磁誘導式位置検出器11自身で移動体21の一定速度Sの判断を容易且つ確実に行うことができる。 Further, the detection position correction method of the electromagnetic inductiontype position detector 11 according to the first embodiment is that the moving section is set to n times the coil pitch p in the constant speed determination process (second constant speed determination method). (n is a natural number) and section corresponding to the moving body 21, at a constant rate S, the moving time required to move the moving section and T 1, a detection position corresponding to the starting end position of the movement section X (T 0 ), where the detection position corresponding to the end position of the moving section is X (t 0 + T 1 ) and the threshold is ± L, S * T 1 −L ≧ X (t 0 + T 1 ) −X ( When the condition of t 0 ) ≧ S * T 1 + L is satisfied, it is determined that the moving body 21 has moved at a constant speed S in the moving section.
For this reason, the electromagneticinduction position detector 11 itself can easily and reliably determine the constant speed S of the moving body 21.
このため、電磁誘導式位置検出器11自身で移動体21の一定速度Sの判断を容易且つ確実に行うことができる。 Further, the detection position correction method of the electromagnetic induction
For this reason, the electromagnetic
また、本実施の形態例1の電磁誘導式位置検出器11の検出位置補正方法によれば、前記一定速度判断処理(第3の一定速度判断方法)では、前記移動区間を、コイルピッチpのn倍(nは自然数)に相当する区間とし、移動体21が、前記移動区間を移動するのに要したと判断した移動時間をT2とし、閾値を±Lとすると、n*p-L≧S*T2≧n*p+Lの条件を満たすとき、前記移動区間において移動体21が一定速度Sで移動したと判断することを特徴としている。
このため、電磁誘導式位置検出器11自身で移動体21の一定速度Sの判断を容易且つ確実に行うことができる。 Further, according to the detection position correction method of the electromagnetic inductiontype position detector 11 of the first embodiment, in the constant speed determination process (third constant speed determination method), the moving section is set to a coil pitch p. Assuming that the section is equivalent to n times (n is a natural number), the moving time that the mobile body 21 has determined to have moved in the moving section is T 2 , and the threshold is ± L, n * p−L When the condition of ≧ S * T 2 ≧ n * p + L is satisfied, it is determined that the moving body 21 has moved at a constant speed S in the moving section.
For this reason, the electromagneticinduction position detector 11 itself can easily and reliably determine the constant speed S of the moving body 21.
このため、電磁誘導式位置検出器11自身で移動体21の一定速度Sの判断を容易且つ確実に行うことができる。 Further, according to the detection position correction method of the electromagnetic induction
For this reason, the electromagnetic
また、本実施の形態例1の電磁誘導式位置検出器11の検出位置補正方法によれば、前記補正データ取得処理では、前記移動区間における何れかのコイルピッチpの始端位置に対応する検出位置を取得したときの時間をt0とし、前記移動区間における他の何れかのコイルピッチpの終端位置に対応する検出位置を取得したときの時間をt0+Tとし、前記移動区間における何れかのコイルピッチpの始端位置に対応する検出位置を基準検出位置X(t0)とし、前記基準検出位置X(t0)を取得してからの経過時間t(m)(mはインデックス番号)を、t(m)=0~Tとし、Δtを固定してインデックス番号mとt(m)との対応づけをし、又は、Δxを固定してインデックス番号mとX(t0+t(m))との対応づけをし、インデックス番号mに対応する補正データE(m)を、E(m)=X(t0)+S*t(m)-X(t0+t(m))の式によって算出することを特徴としている。
このため、電磁誘導式位置検出器11自身で補正データE(m)を容易且つ確実に取得することができる。 Further, according to the detection position correction method of the electromagnetic inductiontype position detector 11 of Embodiment 1, in the correction data acquisition process, the detection position corresponding to the start position of any coil pitch p in the movement section. and t 0 the time when obtaining the time when acquiring the detection position corresponding to the end position of the other one of the coil pitch p in the movement zone and t 0 + T, either in the movement zone A detection position corresponding to the start position of the coil pitch p is set as a reference detection position X (t 0 ), and an elapsed time t (m) (m is an index number) after obtaining the reference detection position X (t 0 ). , T (m) = 0 to T, Δt is fixed and the index number m is associated with t (m), or Δx is fixed and the index number m and X (t 0 + t (m) ) Correction data E corresponding to hex number m a (m), is characterized by calculating by the formula E (m) = X (t 0) + S * t (m) -X (t 0 + t (m)) .
For this reason, the correction data E (m) can be acquired easily and reliably by the electromagnetic inductiontype position detector 11 itself.
このため、電磁誘導式位置検出器11自身で補正データE(m)を容易且つ確実に取得することができる。 Further, according to the detection position correction method of the electromagnetic induction
For this reason, the correction data E (m) can be acquired easily and reliably by the electromagnetic induction
また、本実施の形態例1の電磁誘導式位置検出器11の検出位置補正方法によれば、前記移動区間を複数とし、これら複数の移動区間で補正データを取得し、これら複数の補正データの平均値を最終的な補正データとすることを特徴としている。
このため、より精度の高い補正データを取得することができる。 In addition, according to the detection position correction method of the electromagnetic inductiontype position detector 11 of the first embodiment, a plurality of the movement sections are obtained, correction data is acquired in the plurality of movement sections, and the plurality of correction data The average value is used as final correction data.
For this reason, more accurate correction data can be acquired.
このため、より精度の高い補正データを取得することができる。 In addition, according to the detection position correction method of the electromagnetic induction
For this reason, more accurate correction data can be acquired.
<実施の形態例2>
図5に基づき、本発明の実施の形態例2に係る電磁誘導式位置検出器の検出位置補正方法について説明する。 <Embodiment 2>
Based on FIG. 5, the detection position correction method of the electromagnetic induction type position detector according to the second embodiment of the present invention will be described.
図5に基づき、本発明の実施の形態例2に係る電磁誘導式位置検出器の検出位置補正方法について説明する。 <
Based on FIG. 5, the detection position correction method of the electromagnetic induction type position detector according to the second embodiment of the present invention will be described.
本実施の形態例2は、そのシステム構成や、補正データE(m)を所得するまでの処理(検出位置取得処理、一定速度判断処理、補正データ取得処理)については、上記実施の形態例1と同じであるが(図1~図4)、固定メモリ18Bへの補正データE(m)の記憶に関して上記実施の形態例1と異なる。
In the second embodiment, the system configuration and the processing until the correction data E (m) is obtained (detection position acquisition processing, constant speed determination processing, correction data acquisition processing) are described in the first embodiment. (FIGS. 1 to 4) are different from the first embodiment with respect to the storage of the correction data E (m) in the fixed memory 18B.
図5には上記実施の形態例1と同じ方法によって取得した補正データE(m)の例を示す。図5において、横軸はインデックス番号m、縦軸は補正データE(m)である。
先にも述べたとおり、検出位置X(t)に含まれている誤差Eは、スケールコイル16のコイルピッチ周期に応じて周期的に変動する(図3(b))。
従って、図5に示すように、補正データE(m)も、スケールコイル16のコイルピッチ周期に応じて周期的に変動する。なお、コイルピッチ周期に応じて周期的に変動することを明示するため、図3(b)の場合と同様に図5でも、補正データE(m)を正弦波で表しているが、実際の誤差Eの場合と同様に実際の補正データE(m)も、もう少し歪んだ波形となる。 FIG. 5 shows an example of correction data E (m) acquired by the same method as in the first embodiment. In FIG. 5, the horizontal axis represents the index number m, and the vertical axis represents the correction data E (m).
As described above, the error E included in the detection position X (t) varies periodically according to the coil pitch period of the scale coil 16 (FIG. 3B).
Therefore, as shown in FIG. 5, the correction data E (m) also varies periodically according to the coil pitch period of thescale coil 16. In addition, in order to clarify that it fluctuates periodically according to the coil pitch cycle, the correction data E (m) is represented by a sine wave in FIG. 5 as in the case of FIG. Similar to the case of the error E, the actual correction data E (m) also has a slightly distorted waveform.
先にも述べたとおり、検出位置X(t)に含まれている誤差Eは、スケールコイル16のコイルピッチ周期に応じて周期的に変動する(図3(b))。
従って、図5に示すように、補正データE(m)も、スケールコイル16のコイルピッチ周期に応じて周期的に変動する。なお、コイルピッチ周期に応じて周期的に変動することを明示するため、図3(b)の場合と同様に図5でも、補正データE(m)を正弦波で表しているが、実際の誤差Eの場合と同様に実際の補正データE(m)も、もう少し歪んだ波形となる。 FIG. 5 shows an example of correction data E (m) acquired by the same method as in the first embodiment. In FIG. 5, the horizontal axis represents the index number m, and the vertical axis represents the correction data E (m).
As described above, the error E included in the detection position X (t) varies periodically according to the coil pitch period of the scale coil 16 (FIG. 3B).
Therefore, as shown in FIG. 5, the correction data E (m) also varies periodically according to the coil pitch period of the
そして、本実施の形態例2の場合、検出制御装置18(検出制御部18A)では、補正データE(m)を取得した後、上記実施の形態例1のように補正データE(m)を全て固定メモリ18Bに記憶させて、この補正データE(m)を検出位置補正の際に固定メモリ18Bからを読み出すのではなく、次のような処理を行う。
In the second embodiment, the detection control device 18 (detection control unit 18A) acquires the correction data E (m) and then uses the correction data E (m) as in the first embodiment. Instead of storing all of the correction data in the fixed memory 18B and reading out the correction data E (m) from the fixed memory 18B when correcting the detection position, the following processing is performed.
まず、図5に例示するような補正データE(m)=E(1),E(2),E(3),・・・、E(mm)を、フーリエ変換する。
そして、このフーリエ変換の結果から、スペクトルの大きい成分F(i)を、上位j個分(i=0~j-1)(F(0),F(1),F(2),・・・,F(j-1))を選択して、これらを固定メモリ18Bに記憶させておく(jは自然数)。なお、成分F(i)として記憶するデータは、振幅、周波数、位相である。 First, correction data E (m) = E (1), E (2), E (3),..., E (m m ) as exemplified in FIG.
Then, from the result of the Fourier transform, the component F (i) having a large spectrum corresponds to the upper j (i = 0 to j−1) (F (0), F (1), F (2),. ., F (j-1)) are selected and stored in the fixedmemory 18B (j is a natural number). The data stored as the component F (i) is the amplitude, frequency, and phase.
そして、このフーリエ変換の結果から、スペクトルの大きい成分F(i)を、上位j個分(i=0~j-1)(F(0),F(1),F(2),・・・,F(j-1))を選択して、これらを固定メモリ18Bに記憶させておく(jは自然数)。なお、成分F(i)として記憶するデータは、振幅、周波数、位相である。 First, correction data E (m) = E (1), E (2), E (3),..., E (m m ) as exemplified in FIG.
Then, from the result of the Fourier transform, the component F (i) having a large spectrum corresponds to the upper j (i = 0 to j−1) (F (0), F (1), F (2),. ., F (j-1)) are selected and stored in the fixed
その後、移動体21(スライダ12)を移動させて実際の作業(例えば工作機械による加工作業など)を行うときなどにおいて、検出位置X(t)の補正を行う場合には、固定メモリ18Bから成分F(i)=F(0),F(1),F(2),・・・,F(j-1)を読み出し、この成分F(i)の逆フーリエ変換することによって、補正データE’(m)=E’(0),E’(1),E’(2),E’(3),・・・,E’(mm)を求める。
そして、上記実施の形態例1の場合と同様に下記の(32)式に基づき、検出位置X(t0+t(m))に補正データ得E’(m)を加算することによってX’(t0+t(m))を求め、このX’(t0+t(m))を補正した検出位置として出力する。なお、補正の詳細については上記実施の形態例1の場合と同様である。
X’(t0+t(m))=X(t0+t(m))+E’(m) (32) Thereafter, when the detected position X (t) is corrected when the moving body 21 (slider 12) is moved to perform actual work (for example, machining work by a machine tool), the component from the fixedmemory 18B is used. F (i) = F (0), F (1), F (2),..., F (j−1) is read, and the correction data E is obtained by performing an inverse Fourier transform on this component F (i). '(M) = E' (0), E '(1), E' (2), E '(3), ..., E' (m m ) is obtained.
Similarly to the first embodiment, based on the following equation (32), the correction data obtained E ′ (m) is added to the detection position X (t 0 + t (m)) to obtain X ′ ( t 0 + t (m)) is obtained, and this X ′ (t 0 + t (m)) is output as a corrected detection position. The details of the correction are the same as in the first embodiment.
X ′ (t 0 + t (m)) = X (t 0 + t (m)) + E ′ (m) (32)
そして、上記実施の形態例1の場合と同様に下記の(32)式に基づき、検出位置X(t0+t(m))に補正データ得E’(m)を加算することによってX’(t0+t(m))を求め、このX’(t0+t(m))を補正した検出位置として出力する。なお、補正の詳細については上記実施の形態例1の場合と同様である。
X’(t0+t(m))=X(t0+t(m))+E’(m) (32) Thereafter, when the detected position X (t) is corrected when the moving body 21 (slider 12) is moved to perform actual work (for example, machining work by a machine tool), the component from the fixed
Similarly to the first embodiment, based on the following equation (32), the correction data obtained E ′ (m) is added to the detection position X (t 0 + t (m)) to obtain X ′ ( t 0 + t (m)) is obtained, and this X ′ (t 0 + t (m)) is output as a corrected detection position. The details of the correction are the same as in the first embodiment.
X ′ (t 0 + t (m)) = X (t 0 + t (m)) + E ′ (m) (32)
以上のように、本実施の形態例2に係る電磁誘導式位置検出器11の検出位置補正方法は、補正データE(m)をフーリエ変換して、スぺクトルの大きい成分F(i)を上位j個分(i=0~j-1)固定メモリ18Bに記憶しておき、固定メモリ18Bから成分F(i)を読み出し、逆フーリエ変換をして補正データE’(m)を求めることを特徴としている。
このため、固定メモリ18Bの容量を低減することができる。 As described above, in the detection position correction method of the electromagnetic inductiontype position detector 11 according to the second embodiment, the correction data E (m) is Fourier-transformed to obtain the component F (i) having a large spectrum. The upper j pieces (i = 0 to j−1) are stored in the fixed memory 18B, the component F (i) is read from the fixed memory 18B, and the inverse Fourier transform is performed to obtain correction data E ′ (m). It is characterized by.
For this reason, the capacity of the fixedmemory 18B can be reduced.
このため、固定メモリ18Bの容量を低減することができる。 As described above, in the detection position correction method of the electromagnetic induction
For this reason, the capacity of the fixed
なお、上記では電磁誘導式位置検出器がリニア形スケールである場合について説明したが、これに限定するものでなく、先にも述べたとおり電磁誘導式位置検出器がロータリ形スケールである場合についても本発明の方法を適用することができる。
ロータリ形スケールは、ステータコイル(一次側コイル)を備えたステータ(一次側部材)と、ロータコイル(二次側コイル)を備えたロータ(二次側部材)とを有し、ロータが移動体(回転体)に取り付けられて移動体(回転体)とともに移動(回転)し、ステータコイルとロータコイルが互いに平行で向かい合わせになるように配置されたものである。
このようなロータリ形スケールに対しても、本発明の方法を適用して補正データを取得し、この補正データによってロータリ形スケールの検出位置(回転角度)を補正することができる。 In the above description, the electromagnetic induction position detector is a linear scale. However, the present invention is not limited to this, and the electromagnetic induction position detector is a rotary scale as described above. Also, the method of the present invention can be applied.
The rotary scale has a stator (primary member) provided with a stator coil (primary coil) and a rotor (secondary member) provided with a rotor coil (secondary coil), and the rotor is a moving body. It is attached to the (rotating body) and moves (rotates) together with the moving body (rotating body), and is arranged so that the stator coil and the rotor coil are parallel to each other.
Even for such a rotary scale, the correction data is obtained by applying the method of the present invention, and the detection position (rotation angle) of the rotary scale can be corrected by this correction data.
ロータリ形スケールは、ステータコイル(一次側コイル)を備えたステータ(一次側部材)と、ロータコイル(二次側コイル)を備えたロータ(二次側部材)とを有し、ロータが移動体(回転体)に取り付けられて移動体(回転体)とともに移動(回転)し、ステータコイルとロータコイルが互いに平行で向かい合わせになるように配置されたものである。
このようなロータリ形スケールに対しても、本発明の方法を適用して補正データを取得し、この補正データによってロータリ形スケールの検出位置(回転角度)を補正することができる。 In the above description, the electromagnetic induction position detector is a linear scale. However, the present invention is not limited to this, and the electromagnetic induction position detector is a rotary scale as described above. Also, the method of the present invention can be applied.
The rotary scale has a stator (primary member) provided with a stator coil (primary coil) and a rotor (secondary member) provided with a rotor coil (secondary coil), and the rotor is a moving body. It is attached to the (rotating body) and moves (rotates) together with the moving body (rotating body), and is arranged so that the stator coil and the rotor coil are parallel to each other.
Even for such a rotary scale, the correction data is obtained by applying the method of the present invention, and the detection position (rotation angle) of the rotary scale can be corrected by this correction data.
本発明は電磁誘導式位置検出器の検出位置補正方法に関するものであり、電磁誘導式位置検出器とは別の高精度位置検出器を用いず、電磁誘導式位置検出器自身で補正データを取得して検出位置の補正を行う場合に適用して有用なものである。
The present invention relates to a detection position correction method for an electromagnetic induction position detector, and does not use a high-accuracy position detector different from the electromagnetic induction position detector, and acquires correction data by the electromagnetic induction position detector itself. Thus, the present invention is useful when applied to the detection position correction.
11 電磁誘導式位置検出器、 12 スライダ、 13 第1のスライダコイル、 14 第2のスライダコイル、 15 スケール、 16 スケールコイル、 17 検出部、 18 検出制御装置、 18A 検出制御部、 18B 固定メモリ、 20 駆動制御装置、 21 移動体
11 electromagnetic induction position detector, 12 slider, 13 first slider coil, 14 second slider coil, 15 scale, 16 scale coil, 17 detection unit, 18 detection control device, 18A detection control unit, 18B fixed memory, 20 drive control device, 21 moving body
Claims (7)
- 一次側コイルを備えた一次側部材と、二次側コイルを備えた二次側部材とを有し、前記一次側部材又は前記二次側部材が移動体に取り付けられて前記移動体とともに移動し、前記一次側コイルと前記二次側コイルが互いに平行で向かい合わせになるように配置された電磁誘導式位置検出器の検出位置補正方法であって、
一定速度の速度指令値によって前記移動体を移動させ、前記電磁誘導式位置検出器で前記移動体の位置を検出して検出位置を取得する検出位置取得処理と、
前記検出位置と前記二次側コイルのコイルピッチとに基づき、又は、前記検出位置と前記一定速度と前記移動体の移動時間とに基づき、又は、前記二次側コイルのコイルピッチと前記一定速度と前記移動体の移動時間とに基づき、所定の移動区間において前記移動体が前記一定速度で移動したことを判断する一定速度判断処理と、
前記移動区間における何れかのコイルピッチの始端位置に対応する検出位置を基準検出位置とし、前記基準検出位置を取得してからの経過時間と前記一定速度との乗算値を、前記基準検出位置に加算することによって近似理想位置を求め、この近似理想位置と検出位置とに基づいて補正データを取得する補正データ取得処理と
を行うことを特徴とする電磁誘導式位置検出器の検出位置補正方法。 A primary side member having a primary side coil and a secondary side member having a secondary side coil, and the primary side member or the secondary side member is attached to a movable body and moves together with the movable body. , A detection position correction method of an electromagnetic induction type position detector arranged so that the primary side coil and the secondary side coil are parallel and face each other,
A detection position acquisition process in which the moving body is moved by a speed command value of a constant speed, and the position of the moving body is detected by the electromagnetic induction type position detector to acquire a detection position;
Based on the detection position and the coil pitch of the secondary coil, or based on the detection position, the constant speed, and the moving time of the moving body, or the coil pitch of the secondary coil and the constant speed And a constant speed determination process for determining that the mobile body has moved at the constant speed in a predetermined movement section based on the movement time of the mobile body;
A detection position corresponding to the start position of any one of the coil pitches in the moving section is set as a reference detection position, and a product of an elapsed time after obtaining the reference detection position and the constant speed is set as the reference detection position. A detection position correction method for an electromagnetic induction type position detector, characterized in that an approximate ideal position is obtained by addition, and correction data acquisition processing is performed for acquiring correction data based on the approximate ideal position and the detection position. - 請求項1に記載する電磁誘導式位置検出器の検出位置補正方法において、
前記一定速度判断処理では、
前記移動区間を、前記コイルピッチpのn倍(nは自然数)に相当する区間とし、
前記移動体が、前記一定速度Sで、前記移動区間を移動するのに要する移動時間をT1とし、
前記移動区間の始端位置に対応する検出位置をX(t0)、前記移動区間の終端位置に対応する検出位置をX(t0+T1)とし、
閾値を±Lとすると、
n*p-L≧X(t0+T1)-X(t0)≧n*p+Lの条件を満たすとき、前記移動区間において前記移動体が前記一定速度Sで移動したと判断する
ことを特徴とする電磁誘導式位置検出器の検出位置補正方法。 In the detection position correction method of the electromagnetic induction type position detector according to claim 1,
In the constant speed judgment process,
The moving section is a section corresponding to n times the coil pitch p (n is a natural number),
The moving time required for the moving body to move in the moving section at the constant speed S is T 1 ,
The detection position corresponding to the start position of the movement section is X (t 0 ), the detection position corresponding to the end position of the movement section is X (t 0 + T 1 ),
If the threshold is ± L,
When the condition of n * p−L ≧ X (t 0 + T 1 ) −X (t 0 ) ≧ n * p + L is satisfied, it is determined that the moving body has moved at the constant speed S in the moving section. Detecting position correction method of electromagnetic induction type position detector. - 請求項1に記載する電磁誘導式位置検出器の検出位置補正方法において、
前記一定速度判断処理では、
前記移動区間を、前記コイルピッチpのn倍(nは自然数)に相当する区間とし、
前記移動体が、前記一定速度Sで、前記移動区間を移動するのに要する移動時間をT1とし、
前記移動区間の始端位置に対応する検出位置をX(t0)、前記移動区間の終端位置に対応する検出位置をX(t0+T1)とし、
閾値を±Lとすると、
S*T1-L≧X(t0+T1)-X(t0)≧S*T1+Lの条件を満たすとき、前記移動区間において前記移動体が前記一定速度Sで移動したと判断する
ことを特徴とする電磁誘導式位置検出器の検出位置補正方法。 In the detection position correction method of the electromagnetic induction type position detector according to claim 1,
In the constant speed judgment process,
The moving section is a section corresponding to n times the coil pitch p (n is a natural number),
The moving time required for the moving body to move in the moving section at the constant speed S is T 1 ,
The detection position corresponding to the start position of the movement section is X (t 0 ), the detection position corresponding to the end position of the movement section is X (t 0 + T 1 ),
If the threshold is ± L,
When the condition of S * T 1 −L ≧ X (t 0 + T 1 ) −X (t 0 ) ≧ S * T 1 + L is satisfied, it is determined that the moving body has moved at the constant speed S in the moving section. A detection position correction method for an electromagnetic induction type position detector. - 請求項1に記載する電磁誘導式位置検出器の検出位置補正方法において、
前記一定速度判断処理では、
前記移動区間を、前記コイルピッチpのn倍(nは自然数)に相当する区間とし、
前記移動体が、前記移動区間を移動するのに要したと判断した移動時間をT2とし、
閾値を±Lとすると、
n*p-L≧S*T2≧n*p+Lの条件を満たすとき、前記移動区間において前記移動体が前記一定速度Sで移動したと判断する
ことを特徴とする電磁誘導式位置検出器の検出位置補正方法。 In the detection position correction method of the electromagnetic induction type position detector according to claim 1,
In the constant speed judgment process,
The moving section is a section corresponding to n times the coil pitch p (n is a natural number),
T 2 is a movement time determined by the mobile body to have traveled the moving section,
If the threshold is ± L,
An electromagnetic induction position detector characterized in that, when the condition of n * p−L ≧ S * T 2 ≧ n * p + L is satisfied, it is determined that the moving body has moved at the constant speed S in the moving section. Detection position correction method. - 請求項1に記載する電磁誘導式位置検出器の検出位置補正方法において、
前記補正データ取得処理では、
前記移動区間における何れかのコイルピッチpの始端位置に対応する検出位置を取得したときの時間をt0とし、
前記移動区間における他の何れかのコイルピッチpの終端位置に対応する検出位置を取得したときの時間をt0+Tとし、
前記移動区間における何れかのコイルピッチpの始端位置に対応する検出位置を、基準検出位置X(t0)とし、
前記基準検出位置X(t0)を取得してからの経過時間t(m)(mはインデックス番号)を、t(m)=0~Tとし、
Δtを固定してインデックス番号mとt(m)との対応づけをし、又は、Δxを固定してインデックス番号mとX(t0+t(m))との対応づけをし、
インデックス番号mに対応する補正データE(m)を、E(m)=X(t0)+S*t(m)-X(t0+t(m))の式によって算出する
ことを特徴とする電磁誘導式位置検出器の検出位置補正方法。 In the detection position correction method of the electromagnetic induction type position detector according to claim 1,
In the correction data acquisition process,
The time when the detection position corresponding to the starting end position of any coil pitch p in the moving section is acquired is t 0 ,
The time when the detection position corresponding to the terminal position of any other coil pitch p in the movement section is acquired is defined as t 0 + T.
A detection position corresponding to the start position of any coil pitch p in the moving section is a reference detection position X (t 0 ),
An elapsed time t (m) (m is an index number) after obtaining the reference detection position X (t 0 ) is t (m) = 0 to T,
Δt is fixed to associate the index number m with t (m), or Δx is fixed to associate the index number m with X (t 0 + t (m)),
The correction data E (m) corresponding to the index number m is calculated by the following equation: E (m) = X (t 0 ) + S * t (m) −X (t 0 + t (m)) A detection position correction method for an electromagnetic induction type position detector. - 請求項1に記載する電磁誘導式位置検出器の検出位置補正方法において、
前記移動区間を複数とし、これら複数の移動区間で補正データを取得し、これら複数の補正データの平均値を最終的な補正データとすることを特徴とする電磁誘導式位置検出器の検出位置補正方法。 In the detection position correction method of the electromagnetic induction type position detector according to claim 1,
Detection position correction of an electromagnetic induction type position detector characterized in that a plurality of the movement sections are obtained, correction data is acquired in the plurality of movement sections, and an average value of the plurality of correction data is used as final correction data. Method. - 請求項1に記載する電磁誘導式位置検出器の検出位置補正方法において、
前記補正データをフーリエ変換して、スぺクトルの大きい成分F(i)を上位j個分(i=0~j-1)メモリに記憶しておき、
前記メモリから成分F(i)を読み出し、逆フーリエ変換をして補正データを求めること
を特徴とする電磁誘導式位置検出器の検出位置補正方法。 In the detection position correction method of the electromagnetic induction type position detector according to claim 1,
Fourier correction is performed on the correction data, and the component F (i) having a large spectrum is stored in the memory for the upper j (i = 0 to j−1),
A detection position correction method for an electromagnetic induction type position detector, wherein the correction data is obtained by reading the component F (i) from the memory and performing inverse Fourier transform.
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