CN104718432B - The detection method for correcting position of induction position detector - Google Patents

The detection method for correcting position of induction position detector Download PDF

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Publication number
CN104718432B
CN104718432B CN201380051299.7A CN201380051299A CN104718432B CN 104718432 B CN104718432 B CN 104718432B CN 201380051299 A CN201380051299 A CN 201380051299A CN 104718432 B CN104718432 B CN 104718432B
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coil
detection
certain speed
mentioned
span
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CN104718432A (en
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竹内克佳
石井浩
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Mitsubishi Heavy Industries Ltd
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Mitsubishi Heavy Industries Ltd
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/20—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
    • G01D5/24471—Error correction
    • G01D5/24476—Signal processing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
    • G01D5/24471—Error correction
    • G01D5/24495—Error correction using previous values

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Signal Processing (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Control Of Position, Course, Altitude, Or Attitude Of Moving Bodies (AREA)

Abstract

Present invention aim at providing the detection method for correcting position of a kind of induction position detector, need not the high precision position detector different from induction position detector, and correction data can be obtained by induction position detector self and carry out detecting the correction of position.To this end, carry out following process: detection position acquirement process, make moving body move according to the speed value of certain speed, utilize the position of induction position detector detection moving body to obtain detection position；Certain speed judgement processes, based on such as detecting position, coil-span judge that moving body has carried out this situation mobile with certain speed in predetermined moving section；And correction data acquirement process, position is detected on the basis of being installed by detecting position corresponding to the position, top of any line turn separation in described moving section, to Reference detection positions plus the multiplied value obtaining the elapsed time after described Reference detection positions and certain speed, thus obtain approximate ideal position, obtain correction data based on this approximate ideal position and detection position.

Description

The detection method for correcting position of induction position detector
Technical field
The present invention relates to the induction position detector of line style rule or rotary-type rule Detection method for correcting position.
Background technology
The induction position detector i.e. rule of inductosyn mode be applicable to lathe, Position detection in the various machinery such as automobile, robot.The rule of inductosyn mode is deposited At line style rule and rotary-type rule.Line style rule is located at the workbench of lathe etc. and is moved Body and detect the shift position of the straight line of this moving body, the rotation of lathe is located at by rotary-type rule The moving bodys such as workbench (rotary body) and detect this moving body (rotary body) position of rotation (rotation Gyration).
Line style rule and rotary-type rule are all the coils by configuring the most in opposite directions The electromagnetic induction of pattern detects position.Schematic diagram based on Fig. 6 illustrates this Cleaning Principle.
Fig. 6 (a) is to represent that the slide rule making line style rule is joined the most in opposite directions with rule The axonometric chart of the state put, above-mentioned slide rule is represented by Fig. 6 (b) with the arrangement of above-mentioned rule Figure, Fig. 6 (c) is the figure representing above-mentioned slide rule with the electromagnetic coupled degree of above-mentioned rule.
It addition, the Cleaning Principle of rotary-type rule is also as line style rule, rotary-type quarter The stator of degree chi and rotor correspond to slide rule and the rule of line style rule.Line style rule and Rotary-type rule all has test section and detection control apparatus.
As shown in Fig. 6 (a) and Fig. 6 (b), the test section 10 of line style rule has conduct The slide rule 1 of primary side parts and the rule 2 as secondary side parts.
Slide rule 1 is movable part, has the 1st slide rule coil 3 He as the 1st first siding ring The 2nd slide rule coil 4 as the 2nd first siding ring.Rule 2 is fixed part, has conduct The rule coil 5 of second siding ring.Turn back coil 3,4,5 indentation and (become comb shape Pattern), formed in the way of entirety becomes linearity.Slide rule 1 is installed on the workbench of lathe Linearly move together with this moving body Deng moving body.Rule 2 is fixed on the bed of lathe The fixed parts such as body.
As shown in Fig. 6 (a), slide rule 1 (the 1st slide rule coil the 3 and the 2nd slide rule coil 4) and Rule 2 (rule coil 5) is mutual to maintain the state of predetermined gap g between which Mode the most in opposite directions configures.And, as shown in Fig. 6 (a) and Fig. 6 (b), the 1st is sliding Chi coil the 3 and the 2nd slide rule coil 4 staggers 1/4 spacing.
In the line style rule of said structure, when exciting current (alternating current) is sliding the 1st In chi coil the 3 and the 2nd slide rule coil 4 during flowing, correspond to what the movement with slide rule 1 was accompanied The relative position relation of the 1st slide rule coil the 3 and the 2nd slide rule coil 4 and rule coil 5 Change, as shown in Fig. 6 (c), the 1st slide rule coil the 3 and the 2nd slide rule coil 4 and rule The electromagnetic coupled degree of coil 5 periodically changes.Therefore, the cycle is produced at rule coil 5 Property ground change induced voltage.
Specifically, in the detection control apparatus of line style rule, following (1) formula is such The 1st exciting current Ia flow in the 1st slide rule coil 3, as following (2) formula 2 exciting current Ib flow in the 2nd slide rule coil 4.
Ia=-Icos (k α) sin (ω t) (1)
Ib=Isin (k α) sin (ω t) (2)
Wherein, the size of I: exciting current
K:2 π/p
P: coil-span (length: be angle in rotary-type rule)
The angular frequency of ω: exciting current (alternating current)
T: the time
α: vibrator position
As a result of which it is, due to the 1st slide rule coil the 3 and the 2nd slide rule coil 4 and rule coil Electromagnetic induction effect between 5, produces the such sense of following (3) formula at rule coil 5 Answer voltage V.
V=KIsin (k (X-α)) sin (ω t) (3)
Wherein, K: depend on the carry-over factor of the angular frequency of gap g and exciting current
X: detection position (shift position of moving body)
In above-mentioned detection control apparatus, the induced voltage V of input rule coil 5, calculate This induced voltage V is the value of the vibrator position alpha (becoming the vibrator position alpha of X=α) of 0, And this vibrator position alpha is exported as the detection position X of moving body (slide rule 1), and base The 1st exciting current Ia and the 2nd exciting current Ib is adjusted in this vibrator position alpha.That is, to become Mode for X=α makes vibrator position alpha follow the position X of moving body (slide rule 1), and to become Mode for induced voltage V=0 is controlled, and thus detects the position X of moving body (slide rule 1) And export.
Patent documentation 1: Japanese Unexamined Patent Publication 2000-180107 publication
Summary of the invention
But, induction position detector (line style rule, the rotary-type scale of reality Chi) there is foozle, assembly error, the most above-mentioned (3) formula is false, and detects position X is attended by error.Usually used as the error being contained in detection position X, hence it is evident that occur that line The error (error periodically changed corresponding to the cycle of coil-span) in turn separation cycle, It is referred to as interpolated error.
As the method that detection position X is corrected, it is contemplated that use and induction position Put the high precision position detector that detector is different, detection based on this high precision position detector The method that the detection position X of position and induction position detector obtains correction data. But, in the method, it is necessary to preparing high precision position detector, therefore cost raises, also Spend time and labor.
Therefore, the present invention makes in view of the above circumstances, and problem is to provide one need not The high precision position detector different from induction position detector and by induction Position detector self can obtain correction data and carry out detecting the electromagnetic induction of the correction of position The detection method for correcting position of formula position detector.
Solve the school, detection position of the induction position detector of the 1st invention of above-mentioned problem In correction method, above-mentioned induction position detector has primary side parts and secondary side parts, Above-mentioned primary side parts possess first siding ring, and above-mentioned secondary side parts possess second siding ring, Above-mentioned primary side parts or above-mentioned secondary side parts are installed on moving body and together with above-mentioned moving body Mobile, above-mentioned first siding ring and above-mentioned second siding ring by be parallel to each other and in opposite directions in the way of join Putting, the detection method for correcting position of above-mentioned induction position detector is characterised by, enters Row is following to be processed: detection position acquirement process, makes according to the speed value of certain speed State moving body to move, utilize above-mentioned induction position detector to detect the position of above-mentioned moving body Put and obtain detection position；Certain speed judgement processes, based on above-mentioned detection position and above-mentioned two The coil-span of secondary lateral coil, or based on above-mentioned detection position, above-mentioned certain speed and above-mentioned The traveling time of moving body, or coil-span based on above-mentioned second siding ring, above-mentioned necessarily Speed and the traveling time of above-mentioned moving body, it is judged that above-mentioned moving body in predetermined moving section with Above-mentioned certain speed has carried out this situation mobile；And correction data acquirement process, by above-mentioned shifting The detecting position corresponding to position, top of any line turn separation in dynamic interval detects on the basis of installing Position, to above-mentioned Reference detection positions plus from obtain said reference detection position through out-of-date Between with the multiplied value of above-mentioned certain speed, thus obtain approximate ideal position, manage based on this approximation Think that position and detection position are to obtain correction data.
It addition, the detection method for correcting position of the induction position detector of the 2nd invention with Based on the detection method for correcting position of the induction position detector of the 1st invention, it is special Levy and be, in above-mentioned certain speed judgement processes, be set to above-mentioned moving section to be equivalent on Stating the interval of n times of coil-span p, n is natural number, by above-mentioned moving body with above-mentioned certain speed Traveling time needed for degree S is mobile in above-mentioned moving section is set to T1, by above-mentioned moving section The detecting position corresponding to position, top install as X (t0), by the end position of above-mentioned moving section Put corresponding detecting position to install as X (t0+T1), threshold value is set to ± L, is then meeting n*p-L ≤X(t0+T1)-X(t0During the condition of)≤n*p+L, it is judged that for above-mentioned moving body in above-mentioned shifting Moved with above-mentioned certain speed S in dynamic interval.
It addition, the detection method for correcting position of the induction position detector of the 3rd invention with Based on the detection method for correcting position of the induction position detector of the 1st invention, it is special Levy and be, in above-mentioned certain speed judgement processes, be set to above-mentioned moving section to be equivalent on Stating the interval of n times of coil-span p, n is natural number, by above-mentioned moving body with above-mentioned certain speed Traveling time needed for degree S is mobile in above-mentioned moving section is set to T1, by above-mentioned moving section The detecting position corresponding to position, top install as X (t0), by the end position of above-mentioned moving section Put corresponding detecting position to install as X (t0+T1), threshold value is set to ± L, is then meeting S*T1-L ≤X(t0+T1)-X(t0)≤S*T1During the condition of+L, it is judged that for above-mentioned moving body in above-mentioned shifting Moved with above-mentioned certain speed S in dynamic interval.
It addition, the detection method for correcting position of the induction position detector of the 4th invention with Based on the detection method for correcting position of the induction position detector of the 1st invention, it is special Levy and be, in above-mentioned certain speed judgement processes, be set to above-mentioned moving section to be equivalent on Stating the interval of n times of coil-span p, n is natural number, will be deemed as above-mentioned moving body above-mentioned Traveling time required for moving in moving section is set to T2, threshold value is set to ± L, is then meeting n*p-L≤S*T2During the condition of≤n*p+L, it is judged that for above-mentioned moving body in above-mentioned moving section Moved with above-mentioned certain speed S.
It addition, the detection method for correcting position of the induction position detector of the 5th invention with The detection method for correcting position of the arbitrary induction position detector in the 1st～the 4th invention is Basis, it is characterised in that in above-mentioned correction data acquirement processes, above-mentioned movement will be achieved Time when detecting position corresponding to the position, top of any line turn separation p in interval is set to t0, corresponding to the terminal position of the another any line turn separation p achieved in above-mentioned moving section Time during detection position is set to t0+ T, by any line turn separation p's in above-mentioned moving section Detecting position corresponding to position, top detects position X (t on the basis of installing0), above-mentioned base will be obtained Quasi-detection position X (t0Elapsed time t (m) after) is set to t (m)=0～T, and m is rope Draw numbering, Δ t is fixed and sets up the corresponding relation of index number m and t (m), or by Δ x Fix and set up index number m and X (t0+ t (m)) corresponding relation, by E (m) =X (t0)+S*t(m)-X(t0+ t (m)) formula calculate corresponding with index number m Correction data E (m).
It addition, the detection method for correcting position of the induction position detector of the 6th invention with The detection method for correcting position of the arbitrary induction position detector in the 1st～the 5th invention is Basis, it is characterised in that above-mentioned moving section is set to multiple, takes at these multiple moving sections Obtain correction data, the meansigma methods of these multiple correction datas is set to final correction data.
It addition, the detection method for correcting position of the induction position detector of the 7th invention with The detection method for correcting position of the arbitrary induction position detector in the 1st～the 6th invention is Basis, it is characterised in that above-mentioned correction data is carried out Fourier transformation, by upper several j amounts The component F (i) that spectrum is big is stored in memorizer, wherein i=0～j-1, reads from above-mentioned memorizer Component F (i), carries out inverse Fourier transform and obtains correction data.
Invention effect
The detection method for correcting position of the induction position detector according to the 1st invention, on State induction position detector and there is primary side parts and secondary side parts, above-mentioned primary side Parts possess first siding ring, and above-mentioned secondary side parts possess second siding ring, above-mentioned primary side Parts or above-mentioned secondary side parts are installed on moving body and move together with above-mentioned moving body, above-mentioned First siding ring and above-mentioned second siding ring by be parallel to each other and in opposite directions in the way of configure, above-mentioned electricity The detection method for correcting position of magnetic inductive position detector is characterised by, carries out following process: Detection position acquirement process, makes above-mentioned moving body move according to the speed value of certain speed, Above-mentioned induction position detector is utilized to detect the position of above-mentioned moving body and obtain detecting position Put；Certain speed judgement processes, based on above-mentioned detection position and the coil of above-mentioned second siding ring Spacing, or based on above-mentioned detection position, above-mentioned certain speed and above-mentioned moving body mobile time Between, or coil-span based on above-mentioned second siding ring, above-mentioned certain speed and above-mentioned movement The traveling time of body, it is judged that above-mentioned moving body enters with above-mentioned certain speed in predetermined moving section Go and moved this situation；And correction data acquirement process, arbitrary by above-mentioned moving section The detecting position corresponding to position, top of coil-span detects position, to above-mentioned base on the basis of installing Quasi-detection position is plus the elapsed time from obtaining said reference detection position and an above-mentioned constant speed The multiplied value of degree, thus obtains approximate ideal position, based on this approximate ideal position and detecting position Put and obtain correction data, therefore, there is no need to the height different from induction position detector Precision position detector, it is possible to obtain correction data by induction position detector self And carry out detecting the correction of position.
The detection method for correcting position of the induction position detector according to the 2nd invention, with Based on the detection method for correcting position of the induction position detector of the 1st invention, it is special Levy and be, in above-mentioned certain speed judgement processes, be set to above-mentioned moving section to be equivalent on Stating the interval of n times of coil-span p, n is natural number, by above-mentioned moving body with above-mentioned certain speed Traveling time needed for degree S is mobile in above-mentioned moving section is set to T1, by above-mentioned moving section The detecting position corresponding to position, top install as X (t0), by the end position of above-mentioned moving section Put corresponding detecting position to install as X (t0+T1), threshold value is set to ± L, is then meeting n*p-L ≤X(t0+T1)-X(t0During the condition of)≤n*p+L, it is judged that for above-mentioned moving body in above-mentioned shifting Moved with above-mentioned certain speed S, therefore, by induction position in dynamic interval Detector self can to easily and reliably move the judgement of the certain speed of body.
The detection method for correcting position of the induction position detector according to the 3rd invention, with Based on the detection method for correcting position of the induction position detector of the 1st invention, it is special Levy and be, in above-mentioned certain speed judgement processes, be set to above-mentioned moving section to be equivalent on Stating the interval of n times of coil-span p, n is natural number, by above-mentioned moving body with above-mentioned certain speed Traveling time needed for degree S is mobile in above-mentioned moving section is set to T1, by above-mentioned moving section The detecting position corresponding to position, top install as X (t0), by the end position of above-mentioned moving section Put corresponding detecting position to install as X (t0+T1), threshold value is set to ± L, is then meeting S*T1-L ≤X(t0+T1)-X(t0)≤S*T1During the condition of+L, it is judged that for above-mentioned moving body in above-mentioned shifting Moved with above-mentioned certain speed S, therefore, by induction position in dynamic interval Detector self can to easily and reliably move the judgement of the certain speed of body.
The detection method for correcting position of the induction position detector according to the 4th invention, with Based on the detection method for correcting position of the induction position detector of the 1st invention, it is special Levy and be, in above-mentioned certain speed judgement processes, be set to above-mentioned moving section to be equivalent on Stating the interval of n times of coil-span p, n is natural number, will be deemed as above-mentioned moving body above-mentioned Traveling time required for moving in moving section is set to T2, threshold value is set to ± L, is then meeting n*p-L≤S*T2During the condition of≤n*p+L, it is judged that for above-mentioned moving body in above-mentioned moving section Moved with above-mentioned certain speed S, therefore, by induction position detector certainly Body can to easily and reliably move the judgement of the certain speed of body.
The detection method for correcting position of the induction position detector according to the 5th invention, with The detection method for correcting position of the arbitrary induction position detector in the 1st～the 4th invention is Basis, it is characterised in that in above-mentioned correction data acquirement processes, above-mentioned movement will be achieved Time when detecting position corresponding to the position, top of any line turn separation p in interval is set to t0, corresponding to the terminal position of the another any line turn separation p achieved in above-mentioned moving section Time during detection position is set to t0+ T, by any line turn separation p's in above-mentioned moving section Detecting position corresponding to position, top detects position X (t on the basis of installing0), above-mentioned base will be obtained Quasi-detection position X (t0Elapsed time t (m) after) is set to t (m)=0～T, and m is rope Draw numbering, Δ t is fixed and sets up the corresponding relation of index number m and t (m), or by Δ x Fix and set up index number m and X (t0+ t (m)) corresponding relation, by E (m) =X (t0)+S*t(m)-X(t0+ t (m)) formula calculate corresponding with index number m Correction data E (m), therefore, by induction position detector self can easily and Reliably obtain correction data E (m).
The detection method for correcting position of the induction position detector according to the 6th invention, with The detection method for correcting position of the arbitrary induction position detector in the 1st～the 5th invention is Basis, it is characterised in that be multiple by above-mentioned moving section, obtains at these multiple moving sections Correction data, is set to final correction data by the meansigma methods of these multiple correction datas, therefore can Enough obtain the correction data of higher precision.
The detection method for correcting position of the induction position detector according to the 7th invention, with The detection method for correcting position of the arbitrary induction position detector in the 1st～the 6th invention is Basis, it is characterised in that above-mentioned correction data is carried out Fourier transformation, by upper several j amounts The component F (i) that the spectrum of (i=0～j-1) is big is stored in memorizer, reads from above-mentioned memorizer Component F (i), carries out inverse Fourier transform and obtains correction data, therefore, it is possible to reduce storage The capacity of device.
Accompanying drawing explanation
Fig. 1 is the induction position detector representing and implementing embodiments of the present invention example 1 The figure of structure of system of detection method for correcting position.
Fig. 2 is the flow chart of the processing order representing above-mentioned detection method for correcting position.
Fig. 3 (a) is rheological parameters' change with time and the warp of ideal position representing the detection position comprising error The coordinate diagram of Shi Bianhua, Fig. 3 (b) is the rheological parameters' change with time representing the error being contained in detection position Coordinate diagram.
Fig. 4 (a) is to represent to be fixed by Δ t and to establish index number m corresponding with t (m) The table of corresponding relation during relation, Fig. 4 (b) is to represent to be fixed by Δ x and establish index number M Yu X (t0+ t (m)) corresponding relation time the table of corresponding relation.
Fig. 5 is the coordinate diagram of the change representing correction data E (m).
Fig. 6 (a) be the slide rule that represents and make line style rule with rule the most in opposite directions The axonometric chart of state, Fig. 6 (b) is that above-mentioned slide rule and above-mentioned rule are arranged the figure represented, Fig. 6 (c) is the figure representing above-mentioned slide rule with the electromagnetic coupled degree of above-mentioned rule.
Detailed description of the invention
Hereinafter, based on accompanying drawing, describe embodiments of the present invention example in detail.
<embodiment example 1>
Based on Fig. 1～Fig. 4, the induction position inspection of embodiments of the present invention example 1 is described Survey the detection method for correcting position of device.
First, based on Fig. 1, illustrate to implement the induction position inspection of present embodiment example 1 Survey the structure of the system of the detection method for correcting position of device.
System shown in Fig. 1 become have induction position detector 11, drive control dress Put 20, the structure of moving body 21.The workbench of moving body 21 e.g. lathe etc. are such straight The moving body that line moves.Drive dynamic control device 20 and possess the feeding making moving body 21 move linearly Mechanism part (such as possessing the feed mechanism such as motor, ball-screw portion), control this feeding machine The structure portion drive control part etc. to the driving of moving body 21.
Induction position detector 11 has test section 17, detection control apparatus 18.
It addition, here, the situation that induction position detector 11 is line style rule is described, But the present invention is readily adaptable for use in what induction position detector 11 was rotary-type rule Situation.
Detection control apparatus 18 has detection control portion 18A and read-only storage 18B.Detection control Portion 18A processed carries out exciting current to the supply of test section 17, the detection signal (sense of test section 17 Answer voltage) process etc..Even if read-only storage 18B is to stop supplying to read-only storage 18B Electricity also can keep the memorizer (RAM, ROM) storing the type of data.
Knot about the test section 17 of induction position detector 11 (line style rule) Structure, the basic acts of detection control apparatus 18 (detection control portion 18A), as in the past.
Specifically, test section 17 has the slide rule 12 as primary side parts and as secondary The rule 15 of sidepiece part.
Slide rule 12 is movable part, has the 1st slide rule coil 13 as the 1st first siding ring With the 2nd slide rule coil 14 as the 2nd first siding ring.Rule 15 is fixed part, has Rule coil 16 as second siding ring.Turn back coil 13,14,16 indentation and (become For comb pattern), formed in the way of entirety becomes linearity.Slide rule 12 is installed on moving body 21 and move linearly together with moving body 12.Rule 12 is fixed on the lathe bed etc. of such as lathe Fixed part.
Slide rule 12 (the 1st slide rule coil the 13 and the 2nd slide rule coil 14), rule 15 (are carved Degree chi coil 16) to maintain the state of predetermined gap g between which the most in opposite directions Configuration (with reference to Fig. 6 (a)).And, the 1st slide rule coil the 13 and the 2nd slide rule coil 14 Stagger 1/4 spacing.
In the induction position detector 11 of said structure, when exciting current (alternating current Stream) during flowing, correspond to and slide rule in the 1st slide rule coil the 13 and the 2nd slide rule coil 14 The movement of 12 the 1st slide rule coil the 13 and the 2nd slide rule coil 14 and rule coil 16 together The change of relative position relation, the 1st slide rule coil the 13 and the 2nd slide rule coil 14 and scale The electromagnetic coupled degree of chi coil 16 periodically changes (with reference to Fig. 6 (c)).Therefore, scale Chi coil 16 produces the induced voltage periodically changed.
Specifically, in detection control portion 18A, as following (11) formula, the 1st encourages Magnetoelectricity stream Ia flows in the 1st slide rule coil 13, the 2nd excitation as following (12) formula Electric current Ib flows in the 2nd slide rule coil 14.
Ia=-Icos (k α) sin (ω t) (11)
Ib=Isin (k α) sin (ω t) (12)
Wherein, the size of I: exciting current
K:2 π/p
P: coil-span (length: be angle in rotary-type rule)
The angular frequency of ω: exciting current (alternating current)
T: the time
α: vibrator position
As a result of which it is, due to the 1st slide rule coil the 13 and the 2nd slide rule coil 14 and rule line Circle 16 between electromagnetic induction effect, rule coil 16 produce following (13) formula that The induced voltage V of sample.
V=KIsin (k (X-α)) sin (ω t) (13)
Wherein, K: depend on the carry-over factor of the angular frequency of gap g and exciting current
X: detection position (shift position of moving body)
In detection control portion 18A, the induced voltage V of input rule coil 16, calculating should Induced voltage V is the value of the vibrator position alpha (becoming the vibrator position alpha of X=α) of 0, will This vibrator position alpha exports as the detection position X of moving body 21 (slide rule 12), and based on This vibrator position alpha adjusts the 1st exciting current Ia and the 2nd exciting current Ib.That is, to become The mode of X=α makes vibrator position alpha follow the position X of moving body 21 (slide rule 12), and to become Mode for induced voltage V=0 is controlled, thus the position of detection moving body 21 (slide rule 12) Put X and export.
But, as previously discussed, there is system in the induction position detector 11 of reality Making error, assembly error, the most above-mentioned (13) formula is false, and detection position X is attended by Error E.As this error E, significantly show is the error (interpolated error) in coil-span cycle.
Therefore, in order to carry out the detection of high-precision position, need to obtain correction data to correct inspection Location puts X.
Hereinafter, the bearing calibration of this detection position X is described.First, flow chart based on Fig. 2, Illustrate to be implemented by detection control apparatus 18 (detection control portion 18A, read-only storage 18B) Each summary processed of detection method for correcting position, then, based on Fig. 1～Fig. 4, describes in detail Each process of above-mentioned detection method for correcting position.
As in figure 2 it is shown, first, carry out in step sl detecting position acquirement process.
In this detection position acquirement processes, make mobile according to the speed value of certain speed S Body 21 (slide rule 12) is mobile, detects moving body 21 by induction position detector 11 The position of (slide rule 12) obtains detection position X.This detection position X is (sliding as moving body 21 Chi 12) function of time t of movement and X (t) can be expressed as.
Then, in step s 2, certain speed judgement process is carried out.
In the feelings making moving body 21 (slide rule 12) movement according to the speed value of certain speed S Under condition, moving body 21 (slide rule 12) is after accelerating to become certain speed S, with a constant speed Degree S moves near target location, then, carries out slowing down and stopping at target location.And And, the acquirement of correction data needs to use moving body 21 (slide rule 12) actual with certain speed S Detection position X (t) time mobile.
Therefore, in certain speed judgement processes, based on detection position X (t) and secondary side line Coil-span p (the 1st certain speed determination methods) of circle 16, or based on detection position X (t), certain speed S, traveling time (the 2nd certain speed of moving body 21 (slide rule 12) Determination methods), or coil-span p based on second siding ring 16, certain speed S, shifting The traveling time (the 3rd certain speed determination methods) of kinetoplast 21 (slide rule 12), it is judged that mobile Body 21 has carried out this situation mobile with certain speed S in predetermined moving section.
The result processed in the certain speed judgement of step S2 is nothing due to certain unfavorable condition Method is judged as that moving body 21 (slide rule 12) is carried out with certain speed S in above-mentioned moving section In the case of movement (no), after this unfavorable condition eliminates, again perform the inspection of step S1 Location is put the certain speed judgement of acquirement process and step S2 and is processed.
On the other hand, the result processed in the certain speed judgement of step S2 is to be judged as moving body 21 in above-mentioned moving section with certain speed S carried out mobile in the case of (YES), under One step S3 is corrected data acquirement process.
This correction data acquirement process in, by above-mentioned moving section with any line turn separation Detection position corresponding to the position, top of p, as Reference detection positions, adds to Reference detection positions Obtain elapsed time and the multiplied value of certain speed S that this Reference detection positions rises, thus obtain Approximate ideal position (close to the position of ideal position), and based on this approximate ideal position and Detection position obtains correction data.
In step s 4, the correction data of acquirement is stored in read-only storage 18B.
Then, illustrate to detect method for correcting position each process, i.e. detection position acquirement process, Certain speed judgement process, correction data acquirement process.
(1) detection position acquirement process
In order to obtain detection position X (t), make moving body 21 (slide rule 12) with certain speed S Mobile.
Specifically, the certain speed S as speed value is given to driving dynamic control device 20 And target location.Drive dynamic control device 20 speed value based on certain speed S and target position Put, control the driving to moving body 21 (slide rule 12) of the feed mechanism portion, thus make moving body After 21 (slide rule 12) starts and accelerate to certain speed S, move to mesh with certain speed S The vicinity of cursor position, then, carries out slowing down and stopping at target location.
Now in the detection control portion 18A of detection control apparatus 18, obtain detection position X (t)。
Now, detection position X (t) is with error E.
In Fig. 3 (a), transverse axis is time t, and the longitudinal axis is X (t), Xi (t), Fig. 3 (a) Represent rheological parameters' change with time and ideal position (the real position of detection position X (t) comprising error E Put) rheological parameters' change with time of Xi (t).
In Fig. 3 (b), transverse axis is time t, and the longitudinal axis is error E, and Fig. 3 (b) will comprise The coil pattern pair of rheological parameters' change with time and rule coil 16 in the error E of detection position X (t) Illustrate with answering.
As it was noted above, significantly occur that as error E the error in coil-span cycle is (interior Insert error), therefore error E corresponds to the line of rule coil 16 as illustrated in Fig. 3 (b) The turn separation cycle and periodically change.Therefore, detection position X (t) of error E is comprised also As Fig. 3 (a) illustrate correspond to like that rule coil 16 the coil-span cycle and periodically Variation.It addition, periodically change this in order to explicitly indicate that corresponding to the coil-span cycle Situation, in figure 3, represents error E with sine wave, but the error E of reality becomes slightly The waveform of deformation.
It addition, in the following description, the position, top of coil-span p refers to Fig. 3 (b) institute Starting position (starting point) p of each coil-span p of the rule coil 16 shownS, coil-span The terminal position of p refers to the knot of each coil-span p of the rule coil 16 shown in Fig. 3 (b) Bundle position (terminal) pE.It addition, position, top and terminal position are all adjacent coil-spans p Boundary (joint eye).
(2) certain speed judgement processes
Use detection position X (t) obtained by detection position acquirement process, carry out certain speed Judgement processes.
This certain speed judgement processes by the 1st certain speed determination methods shown below or the 2 certain speed determination methods or the 3rd certain speed determination methods are carried out.
(a) the 1st certain speed determination methods
By time t0Detection position X (t) be set to X (t0)。
By time t0+T1Detection position X (t) be set to X (t0+T1)。
By moving body 21 (slide rule 12), with certain speed S, n times of coil-span p, (n is Natural number) predetermined moving section in mobile needed for traveling time be set to T1.It addition, here, As induction position detector 11, the example (Fig. 1) of line style rule is shown, because of This amount of movement is displacement (becoming the anglec of rotation in the case of rotary-type rule).
Traveling time T1It it is certain time set in advance, by certain speed S, coil-span P, coil-span number n determine, it is possible to calculated by the formula of n*p/S.Take advantage of it addition, * represents The mark of method computing × (other record position too, in claims and accompanying drawing also Equally).
Coil-span p is that such as 2mm is (at rotary-type rule in the case of line style rule In the case of be such as 2 degree).
Coil-span number n is set to such as 256 spacing.
As a example by above-mentioned predetermined moving section (being equivalent to the interval of n times of coil-span p) sets As from the 101st of rule coil 16 the coil-span p to the 356th of rule coil 16 Interval till individual (when coil-span number n is 256) coil-span p.
Detection position X (t0) it is that above-mentioned predetermined moving section (is equivalent to n times of coil-span p Interval) the detection position corresponding to position, top.And, above-mentioned predetermined moving section (phase When in the interval of n times of coil-span p) position, top be equivalent to the initial of this moving section The position, top of coil-span p of (the 1st).
Detection position X (t0+T1) it is that above-mentioned predetermined moving section (is equivalent to coil-span p The interval of n times) the detection position corresponding to terminal position.And, above-mentioned predetermined moving section The terminal position of (being equivalent to the interval of n times of coil-span p) is equivalent to this moving section The finally terminal position of coil-span p of (the n-th: such as the 256th).
Although it addition, the most so set, but being not limited to this, it is also possible to be, above-mentioned pre- The position, top determining moving section (being equivalent to the interval of n times of this coil-span p) is this shifting The half-way of coil-span p of dynamic interval initial (the 1st) be (this coil-span p Position between position, top and terminal position), above-mentioned predetermined moving section (is equivalent to coil The interval of n times of spacing p) terminal position be last (the n-th: example of this moving section Such as the 256th) coil-span p half-way (position, top of this coil-span p with Position between terminal position).
That is, it is judged that moving body 21 (slide rule 12) has carried out this situation mobile with certain speed S Predetermined moving section (being equivalent to the interval of n times of coil-span p) be not limited to from initially The position, top of coil-span p of (the 1st) is to finally (the n-th: such as the 256th) Coil-span p terminal position till interval, it is also possible to from initially (the 1st) The half-way of coil-span p is to coil-span p of last (the n-th: such as the 256th) Half-way till interval.
The detection position X (t obtained0) and detection position X (t0+T1) comprise error, therefore from Detection position X (t0) to detecting position X (t0+T1) amount of movement X (t0+T1)-X(t0) Following (21) formula is become with the relation of preferable amount of movement (real amount of movement) n*p.
X(t0+T1)-X(t0)≈n*p (21)
Therefore, if amount of movement X (t0+T1)-X(t0) close to preferable amount of movement n*p, then exist From detection position X (t0) to detecting position X (t0+T1Predetermined shifting interval, the most above-mentioned till) Dynamic interval (being equivalent to the interval of n times of coil-span p), it is possible to be judged as moving body 21 (cunning Chi 12) moved with certain speed S.
t0、T1Can be arranged by the detection control portion 18A at detection control apparatus 18 Deng the time The counting of clock carry out measuring (can also be measured) by other times measurement means.
Therefore, above-mentioned predetermined moving section (being equivalent to the interval of n times of coil-span p) Detection position X (t corresponding to position, top0), achieve this detection position X (t0) time Time t0, from this time t0Elapsed time (traveling time) T risen1, time t0+T1Detection Position X (t0+T1) can know in detection control portion 18A.And, coil-span p and Coil-span number n is known value.
Therefore, in this case, if threshold value to be set to ± L, then following (22) are being met During the condition of formula, it is possible to be judged as that moving body 21 (slide rule 12) is in above-mentioned predetermined moving section (phase When in the interval of n times of coil-span p) in moved with certain speed S.It addition, About X (t0+T1)-X(t0) and the relation of n*p ± L, Fig. 3 (a) also has illustration.
n*p-L≤X(t0+T1)-X(t0)≤n*p+L (22)
(b) the 2nd certain speed determination methods
It addition, in the above cases, it is also possible to by following method, it is judged that moving body 21 (slide rule 12) has carried out this situation mobile with certain speed S.
Moving body 21 (slide rule 12) moves T with certain speed S1Amount of movement (the S*T during time1) With n times of coil-span p (n*p) equal (n*p=S*T1).Therefore, from detection position X (t0) to detecting position X (t0+T1) amount of movement X (t0+T1)-X(t0) move with ideal Amount S*T1Relation become following (23) formula.
X(t0+T1)-X(t0)≈S*T1 (23)
Therefore, if amount of movement X (t0+T1)-X(t0) close to preferable amount of movement S*T1, then Can interpolate that as moving body 21 (slide rule 12) from detection position X (t0) to detecting position X (t0+T1Predetermined moving section interval, the most above-mentioned till) (is equivalent to the n of coil-span p Times interval) in moved with certain speed S.
As previously discussed, above-mentioned predetermined moving section (is equivalent to n times of coil-span p Interval) the detection position X (t corresponding to position, top0), achieve this detection position X (t0) time time t0, from this time t0Elapsed time (traveling time) T risen1, time t0+T1 Detection position X (t0+T1) can know in detection control portion 18A.And, a constant speed Degree S and traveling time T1It it is known value.
Therefore, in this case, if threshold value to be set to ± L, then following (24) are being met During the condition of formula, it is possible to be judged as that moving body 21 (slide rule 12) is in above-mentioned predetermined moving section (phase When in the interval of n times of coil-span p) in moved with certain speed S.
S*T1-L≤X(t0+T1)-X(t0)≤S*T1+L (24)
(c) the 3rd certain speed determination methods
Alternatively, it is also possible to by following method, judge that moving body 21 (slide rule 12) is with one Constant speed degree S has carried out this situation mobile.
By time t0Detection position X (t) be set to X (t0)。
By time t0+T1Detection position X (t) be set to X (t0+T1)。
Will be deemed as moving body 21 (slide rule 12) need coil-span p n times (n be oneself So number) predetermined moving section in the traveling time of movement be set to T2.It addition, here, conduct Induction position detector 11, it is shown that the example (Fig. 1) of line style rule, therefore Amount of movement is displacement (becoming the anglec of rotation in the case of rotary-type rule).
In this case traveling time T2With aforesaid certain traveling time T1Difference, is to sentence Break and need (to be equivalent to coil-span at above-mentioned predetermined moving section for moving body 21 (slide rule 12) The interval of n times of p) in time of movement, corresponding to detection position X (t0)、X(t0+T1) The mistake extent that comprised and change.
Coil-span p is that such as 2mm is (at rotary-type rule in the case of line style rule In the case of be such as 2 degree).
Coil-span number n is set to such as 256 spacing.
As a example by above-mentioned predetermined moving section (being equivalent to the interval of n times of coil-span p) sets As from the 101st of rule coil 16 the coil-span p to the 356th of rule coil 16 The interval of individual (coil-span number n is the situation of 256) coil-span p.
At detection position X (t0)、X(t0+T1) comprise error, therefore from detection position X (t0) To detection position X (t0+T1) amount of movement X (t0+T1)-X(t0) and preferable amount of movement n*p Relation (25) formula described as follows such.
X(t0+T1)-X(t0)≈n*p (25)
If it addition, detection position X (t0)、X(t0+T1) do not comprise error, then traveling time T2With certain traveling time T1It is identical, if therefore moving body 21 (slide rule 12) is from detection Position X (t0) to detecting position X (t0+T1) interval in moved with certain speed S, Then S*T2Equal with n*p.
But, actually detection position X (t0)、X(t0+T1) comprise error, shifting now Dynamic time T2Not with certain traveling time T1Identical, therefore amount of movement S*T2Move with ideal The relation of amount n*p also becomes following (26) formula.
S*T2≈n*p (26)
Further, in this case, traveling time T2Corresponding to detection position X (t0)、X (t0+T1) the mistake extent that comprised and change, therefore the judgement of certain speed can be unfavorable The relation of above-mentioned (26) formula is utilized by the relation of above-mentioned (25) formula.
If that is, S*T2Close to n*p, then can interpolate that into moving body 21 (slide rule 12) from Detection position X (t0) to detecting position X (t0+T1) predetermined moving section interval, the most above-mentioned Moved with certain speed S in (being equivalent to the interval of n times of coil-span p).
t0、T2Can be arranged by the detection control portion 18A at detection control apparatus 18 Deng the time The counting of clock carry out measuring (can also be measured) by other times measurement means.
Therefore, (district of n times of coil-span p is equivalent to from obtaining above-mentioned predetermined moving section Between) the detection position X (t corresponding to position, top0) play the above-mentioned predetermined moving section of acquirement The detection position X corresponding to terminal position of (being equivalent to the interval of n times of coil-span p) (t0+T1Elapsed time (traveling time) till), i.e. it is judged as moving body 21 (slide rule 12) Need to move in above-mentioned predetermined moving section (being equivalent to the interval of n times of coil-span p) Traveling time T2Can know in detection control portion 18A.And, certain speed S, line Turn separation p, coil-span number n are known value.
Therefore, if threshold value is ± L, then when meeting the condition of following (27) formula, it is possible to sentence Break and (be equivalent to coil-span p for moving body 21 (slide rule 12) at above-mentioned predetermined moving section The interval of n times) in moved with certain speed S.
n*p-L≤S*T2≤n*p+L (27)
(3) correction data acquirement process
Then, (the 1st certain speed determination methods or the 2nd one are processed by certain speed judgement Constant speed degree determination methods or the 3rd certain speed determination methods), use and be judged as that moving body 21 is (sliding Chi 12) the above-mentioned predetermined moving section that moved with certain speed S (is equivalent between coil The interval of n times away from p) in obtain from X (t0) to X (t0+ T) detection position data, Obtain correction data E (m).
Here, explanation detection position X (t0) it is that above-mentioned predetermined moving section (is equivalent between coil The interval of n times away from p) the detection position corresponding to position, top and above-mentioned predetermined movement The position, top of interval (being equivalent to the interval of n times of coil-span p) is comparable to this and moves The situation of the position, top of coil-span p of interval initial (the 1st), i.e. globality ground Use acquirement in above-mentioned predetermined moving section (being equivalent to the interval of n times of coil-span p) Detection position data and obtain the situation of correction data E (m).
Above-mentioned predetermined moving section (being equivalent to the interval of n times of coil-span p) will be achieved In initial (the 1st) coil-span p position, top corresponding to detection position time Time is set to t0。
Above-mentioned predetermined moving section (being equivalent to the interval of n times of coil-span p) will be achieved Corresponding to the terminal position of coil-span p of interior last (the n-th: such as the 256th) Detection position time time be set to t0+T。
That is, time T is to process (the 1st certain speed determination methods or the in certain speed judgement 2 certain speed determination methods or the 3rd certain speed determination methods) the middle traveling time T described1 Or T2。
Initial by above-mentioned predetermined moving section (being equivalent to the interval of n times of coil-span p) The detection position X (t corresponding to position, top of coil-span p of (the 1st)0) it is set to base Quasi-detection position.
By acquirement this Reference detection positions X (t0) rise elapsed time t (m) be set to t (m) =0～T.
M is index number (0 and positive integer).Such as, it is the feelings of 0 in index number m Under condition, t (0)=0.If the maximum of index number m is set to mm, then t (mm)=T.
Index number m is corresponding to achieving the detection that the calculating of correction data E (m) is used The above-mentioned predetermined moving section of position data (being equivalent to the interval of n times of coil-span p) Coil from the position, top of initially coil-span p of (the 1st) to last (n-th) Each coil-span position till the terminal position of spacing p.That is, m=0 is corresponding to the initially the (the 1st Individual) the position, top of coil-span p, m=mmBetween the coil corresponding to last (n-th) Away from the terminal position of p, between m=1,2,3 ..., mm-1 corresponding to from the initially the (the 1st Individual) the position, top of coil-span p to the end of coil-span p of last (n-th) Each coil-span position between position.
Further, index number m and time t (m) or detection position X (t are set up0+t(m)) Corresponding relation.
Such as, in the case of index number m and time t (m) are set up corresponding relation, only Δ t to fix and to make t (m)=m* Δ t, by index number m and detection position X (t0+ t (m)) set up corresponding relation in the case of, as long as Δ x being fixed and making X (t0+t(m)) =X (t0)+m* Δ x.
Detection position X (t when moving body 21 (slide rule 12) moves with certain speed S0+t(m)) Corresponding ideal position Xi (t0+ t (m)) can (28) formula represent like that described as follows.
Xi(t0+t(m))≈X(t0)+S*t(m) (28)
That is, it is determined that the above-mentioned predetermined moving section moved with certain speed S is (quite In the interval of n times of coil-span p) in the detection position X (t at initial stage0) (initially (the 1) the detection position corresponding to position, top of coil-span p) on the basis of, to this benchmark Detection position X (t0) plus certain speed S and multiplied value S*t (m) institute of time t (m) The value obtained i.e. X (t0)+S*t (m) is close to ideal position Xi (t0+ t (m)) value. Will be close to this ideal position Xi (t0+ t (m)) position X (t0)+S*t (m) is the most closely Like ideal position.
Correction data under index number m is set to E (m).
If (29) formula described as follows is like that from ideal position Xi (t0+ t (m)) deduct detecting position Put X (t0+ t (m)), then can obtain preferable correction data E (m).But, it is impossible to Know and detection position X (t0+ t (m)) corresponding ideal position Xi (t0+t(m))。
E (m)=Xi (t0+t(m))-X(t0+t(m)) (29)
On the other hand, about close to ideal position Xi (t0+ t (m)) approximate ideal position X(t0)+S*t (m), X (t0) it is the detection position obtained in detection position acquirement processes Data, certain speed S and time t (m) are known values, therefore, it is possible to calculate based on them.
Therefore, if replacing ideal position Xi (t0+ t (m)) and use approximate ideal position X (t0) + S*t (m), based on following (30) formula, from approximate ideal position X (t0)+S*t(m) Deduct detection position X (t0+ t (m)), then can obtain close to preferable correction data E (m)。
E (m)=X (t0)+S*t(m)-X(t0+t(m)) (30)
Therefore, X (t is obtained corresponding to index number m0)+S*t (m) and X (t0+ t (m)), Use these X (t0)+S*t (m) and X (t0+ t (m)), by above-mentioned (30) formula Calculate correction data E (m).
Now, as obtaining X (t corresponding to index number m0)+S*t (m) and X (t0+t (m)) method, there is aforementioned being fixed by Δ t like that and by index number m and time t (m) Set up corresponding relation method, Δ x is fixed and by index number m with detection position X (t0+t (m)) method of setting up corresponding relation.
In the table of Fig. 4 (a), it is shown that by Δ t being fixed and by index number m and time t M () sets up the method for corresponding relation, obtain X (t corresponding to index number m0)+S*t(m) With X (t0+ t (m)) time example.
In the table of Fig. 4 (a), in the case of m=0,
T (m)=m* Δ t is t (0)=0,
X(t0+ t (m)) it is X (t0+ t (0))=X (t0),
X(t0)+S*t (m) is X (t0)+S*t (0)=X (t0)。
Therefore, E (m), according to (30) formula, becomes E (0)=X (t0)-X(t0)=0.
In the table of Fig. 4 (a), in the case of m=1,
T (m)=m* Δ t is t (1)=Δ t,
X(t0+ t (m)) it is X (t0+ t (1))=X (t0+ Δ t),
X(t0)+S*t (m) is X (t0)+S*t (1)=X (t0)+S*Δt。
Therefore, E (m), according to (30) formula, becomes E (1)=X (t0)+S*Δt-X(t0+Δt)。
In the table of Fig. 4 (a), in the case of m=2,
T (m)=m* Δ t is t (2)=2* Δ t,
X(t0+ t (m)) it is X (t0+ t (2))=X (t0+ 2* Δ t),
X(t0)+S*t (m) is X (t0)+S*t (2)=X (t0)+S*2*Δt。
Therefore, E (m), according to (30) formula, becomes E (m)=X (t0)+S*2*Δt-X(t0+2*Δt)。
In the table of Fig. 4 (a), in the case of m=3,
T (m)=m* Δ t is t (3)=3* Δ t,
X(t0+ t (m)) it is X (t0+ t (3))=X (t0+ 3* Δ t),
X(t0)+S*t (m) is X (t0)+S*t (3)=X (t0)+S*3*Δt。
Therefore, E (m), according to (30) formula, becomes E (m)=X (t0)+S*3*Δt-X(t0+3*Δt)。
Below, although omission record in the table of Fig. 4 (a), but m=4,5 ..., mm Situation too,
In the table of Fig. 4 (a), at m=mmIn the case of,
T (m)=m* Δ t is t (mm)=mm* Δ t=T,
X(t0+ t (m)) it is X (t0+t(mm))=X (t0+ T),
X(t0)+S*t (m) is X (t0)+S*t(mm)=X (t0)+S*T。
Therefore, E (m), according to (30) formula, becomes E (m)=X (t0)+S*T-X(t0+T)。
It addition, t (m)=0, Δ t, 2* Δ t, 3* Δ t ..., T are obtained by m* Δ t. That is, detection position X (t will be achieved0) time time t0It is set to fiducial time (0), obtains As from this fiducial time (0) often through the Δ t time time Δ t, 2* Δ t, 3* Δ t ..., T。
X(t0+ t (m))=X (t0)、X(t0+Δt)、X(t0+2*Δt)、X(t0+3*Δt)、 …、X(t0+ T) as at time t0The detection position X (t obtained0) and the most often through Δ t The detection position X (t of time0+Δt)、X(t0+2*Δt)、X(t0+3*Δt)、…、X (t0+ T) and be obtained.
In the table of Fig. 4 (b), it is shown that by Δ x being fixed and by index number m and detection Position X (t0+ t (m)) method of setting up corresponding relation, obtain corresponding to index number m X(t0)+S*t (m) and X (t0+ t (m)) the example of situation.
In the table of Fig. 4 (b), in the case of m=0,
T (m) is t (0)=0,
X(t0+ t (m))=X (t0)+m* Δ x is X (t0+ t (0))=X (t0),
X(t0)+S*t (m) is X (t0)+S*t (0)=X (t0)。
Therefore, E (m), according to (30) formula, becomes E (0)=X (t0)-X(t0)=0.
In the table of Fig. 4 (b), in the case of m=1,
T (m) is t (1),
X(t0+ t (m))=X (t0)+m* Δ x is X (t0+ t (1))=X (t0)+Δ x,
X(t0)+S*t (m) is X (t0)+S*t(1)。
Therefore, E (m), according to (30) formula, becomes E (1)=X (t0)+S*t(1)-X (t0)+Δx。
In the table of Fig. 4 (b), in the case of m=2,
T (m) is t (2),
X(t0+ t (m))=X (t0)+m* Δ x is X (t0+ t (2))=X (t0)+2* Δ x,
X(t0)+S*t (m) is X (t0)+S*t(2)。
Therefore, E (m), according to (30) formula, becomes E (2)=X (t0)+S*t(2)-X (t0)+2*Δx。
In the table of Fig. 4 (b), in the case of m=3,
T (m) is t (3),
X(t0+ t (m))=X (t0)+m* Δ x is X (t0+ t (3))=X (t0)+3* Δ x,
X(t0)+S*t (m) is X (t0)+S*t(3)。
Therefore, E (m), according to (30) formula, becomes E (3)=X (t0)+S*t(3)-X (t0)+3*Δx。
Hereinafter, record although omitting in the table of Fig. 4 (b), but m=4,5 ..., mm Situation too,
In the table of Fig. 4 (b), at m=mmIn the case of,
T (m)=t (mm)=T,
X(t0+ t (m))=X (t0)+m* Δ x is X (t0+t(mm))=X (t0+T) =X (t0)+mm* Δ x,
X(t0)+S*t (m) is X (t0)+S*t(mm)=X (t0)+S*T。
Therefore, E (m), according to (30) formula, becomes E (m)=X (t0)+S*T-X(t0) +mm*Δx。
It addition, X (t0+ t (m))=X (t0)+m* Δ x=X (t0)、X(t0)+Δx、X (t0)+2*Δx、X(t0)+3*Δx、…、X(t0)+mm* Δ x is as at time t0? The detection position X (t arrived0), the detection position X (t of every amount of movement Δ x afterwards0)+Δx、 X(t0)+2*Δx、X(t0)+3*Δx、…、X(t0)+mm* Δ x and obtain.
T (m)=t (0) (=0), t (1), t (2), t (3) ...,
T is as achieving detection position X (t0) time time t0It is set to t fiducial time (0) Detection position X (t has been obtained after (=0)0)+Δx、X(t0)+2*Δx、X(t0)+3*Δx、 …、X(t0)+mm* Δ x detection position time time t (1), t (2), t (3), ..., T and obtain.
It addition, about the above-mentioned corresponding relation with index number m, also enter in Fig. 3 (a) Go illustration.
Correction data E (m)=E (0) (=0) of calculating based on above-mentioned (30) formula, E(1)、E(2)、E(3)、…、E(mm) according to index number m:0,1,2, 3、…、mmOrder, i.e. E (0) (=0), E (1), E (2), E (3), …、E(mm) order store successively to the address from the outset, each address of read-only storage 18B. If so correction data E (m) is stored, then successively from the beginning address of read-only storage 18B Need not store index number m.
In this case, replacing index number m, the address of read-only storage 18B corresponds to Achieve the above-mentioned predetermined movement of the detection position data that the calculating of correction data E (m) is used The coil from initial (the 1st) of interval (being equivalent to the interval of n times of coil-span p) The position, top of spacing p is to each line of the terminal position of coil-span p of last (n-th) Turn separation position.
That is, beginning address is corresponding to the position, top of initially coil-span p of (the 1st), Mm+ 1 address corresponds to the terminal position of finally coil-span p of (n-th), from 2nd to mmIndividual address was corresponding in turn in the beginning from initially coil-span p of (the 1st) End position is to each coil-span between the terminal position of coil-span p of last (n-th) Position.
It addition, this may not be defined in, it is also possible to correction data E (m) is stored at random fixing The address of memorizer 18B.In this case, index number m is also stored in read-only storage 18B, as long as setting up corresponding relation by this index number m and correction data E (m).Example As, can be in the 5th address, store index number 2 and correction data E (2), the 2 addresses store index number 3 and the method for correction data E (3).
The number of correction data E (m) of the most every 1 coil-span p is 512, and line When turn separation number n is 256, be stored in read-only storage 18B correction data E (m) All 131072 of number.
It addition, the above-mentioned predetermined moving section of above-mentioned acquirement detection position data (is equivalent to line The interval of n times of turn separation p) it is set to 1, but it is not limited to this, obtain detection position The above-mentioned predetermined moving section of data (being equivalent to the interval of n times of coil-span p) can be Multiple.
In this case, by above-mentioned same method, at multiple moving sections (quite In the interval of n times of coil-span p) obtain detection position data, based on above-mentioned detecting position Put data to obtain the correction of each moving section (being equivalent to the interval of n times of coil-span p) Data E (m), by above-mentioned each moving section (being equivalent to the interval of n times of coil-span p) The meansigma methods of correction data E (m) be set to final correction data E (m).
Further, (meansigma methods) correction data E (m) that this is final is stored in fixed storage Device 18B.In this case, about correction data E (m) being stored in read-only storage 18B Method, as mentioned before.
(4) correction of position is detected
Then, in detection control apparatus 18 (detection control portion 18A), moving body 21 is made (slide rule 12) is mobile and when carrying out operation (processing of such as lathe) of reality etc., is carrying out In the case of the correction of detection position X (t), read correction data E from read-only storage 18B (m)。
Further, based on following (31) formula, to detection position X (t0+ t (m)) plus from Correction data E (m) that read-only storage 18B reads, thus obtains X ' (t0+ t (m)), As to this X ' (t0+ t (m)) the detection position that corrected and export.
X’(t0+ t (m))=X (t0+t(m))+E(m) (31)
Specifically, the shift position of moving body 21 (slide rule 12) and the scale of rule 15 The position (coil-span position) of chi coil 16 is corresponding, the therefore coil of rule coil 16 Spaced position is corresponding with detection position X (t).
Therefore, in detection control apparatus 18 (detection control portion 18A), at detection moving body The position of 21 (slide rules 12) and in the case of having obtained certain detection position X (t), it is known that this inspection It is the detection position corresponding with which coil-span position that location puts X (t).
Therefore, in detection control apparatus 18 (detection control portion 18B), at detection moving body The position of 21 (slide rules 12) and in the case of having obtained certain detection position X (t), it is judged that with this The coil-span position that detection position X (t) is corresponding, by the school corresponding with this coil-span position Correction data E (m) reads from read-only storage 18B, by this detection position X (t) and this school Correction data E (m) is added, the detection position after thus being corrected.
It addition, be the 1st correction in the coil-span position corresponding to certain detection position X (t) Right with the 2nd correction data E (m) institute then according to the coil-span position corresponding to E (m) In the case of position between the coil-span position answered, (such as correction data E (10) is corresponding Coil-span position and correction data E (11) corresponding to coil-span position between position In the case of), to the 1st correction data E (m) (such as correction data E (10)) and 2 correction datas E (m) (such as correction data E (11)) carry out interpolation interpolation and obtain school Correction data, is added the correction data of this interpolation interpolation gained with this detection position X (t), by This corrected after detection position.
It addition, the correction of n the coil-span p amount being processed by correction data acquirement and obtaining Each coil-span p in n coil-span p of the corresponding rule coil 16 of data E (m) And Reusability, thus detection position X (t) is corrected.
It addition, coil-span n can be 1 in principle.If that is, correction data E (m) Obtain at least 1 coil-span p to measure.In this case, 1 coil-span p amount Each coil-span p Reusability of the corresponding rule coil 16 of correction data E (m), thus Detection position X (t) is corrected.
It addition, in above-mentioned, process (the 1st certain speed determination methods in certain speed judgement Or the 2nd certain speed determination methods or the 3rd certain speed determination methods) in, make to globality By the above-mentioned predetermined moving section (phase being judged as that moving body 21 is moved with certain speed S When in the interval of n times of coil-span p) detection position data obtain correction data E (m), But it is not limited to this, it is possible to use the part in the data of this detection position X (t) is come Obtain correction data E (m).
That is, use from above-mentioned predetermined moving section (being equivalent to the interval of n times of coil-span p) Arbitrary N1The inspection corresponding to position, top of individual (such as the 50th) coil-span p Location puts X (tN1) data (be equivalent to the n of coil-span p to above-mentioned predetermined moving section Times interval) arbitrary N2The terminal position of individual (such as the 150th) coil-span p Corresponding detection position X (tN2) data, obtain correction data E (m).
In this case, if from obtaining N1Individual (such as the 50th) coil-span p Detection position X (t corresponding to position, topN1) time play and obtain N2Individual (the such as the 150th Individual) the detection position X (t corresponding to terminal position of coil-span pN2) time till movement Time is T3As long as the T in the most aforesaid time t (m)=0～T is set to T3?.And, Detection position X (tN1) detection position X (t on the basis of one-tenth0), detect position X (tN2) become For X (t0+t(mm))。
Further, in this case, it is also possible to obtain correction by method similar to the above According to E (m).
It addition, process (the 1st certain speed determination methods or the 2nd certain in certain speed judgement Velocity estimated method or the 3rd certain speed determination methods) in, even if being judged as moving body 21 (n of coil-span p is equivalent to the above-mentioned predetermined moving section that certain speed S is moved Times interval) from the half-way of coil-span p of initially (the 1st) to (the most such as 256th) coil-span p half-way in the case of, it is also possible to by with above-mentioned with The method of sample obtains correction data E (m).
That is, as long as using above-mentioned predetermined moving section (to be equivalent to the district of n times of coil-span p Between) in the arbitrary N in addition to coil-span p of initially (the 1st)3Individual (example Such as the 2nd) the detection position X (t corresponding to position, top of coil-span pN3) data To above-mentioned predetermined moving section (being equivalent to the interval of n times of coil-span p) except finally Arbitrary N outside coil-span p of (such as the 256th)4Individual (such as the 255th) Detection position X (t corresponding to the terminal position of coil-span pN4) data obtain correction Data E (m).
In this case, if from obtaining N3The beginning of individual (such as the 2nd) coil-span p Detection position X (t corresponding to end positionN3) time to obtaining N4Individual (such as the 255th) Detection position X (t corresponding to the terminal position of coil-span pN4) time traveling time be T4, As long as then the T in aforesaid time t (m)=0～T being set to T4?.And, detecting position Put X (tN3) detection position X (t on the basis of one-tenth0), detect position X (tN4) become X (t0+t (mm))。
Further, in this case, it is also possible to obtain correction by method similar to the above Data E (m).
Or, in this case, it is also possible in coil-span p by initially (the 1st) The detection position data from half-way to terminal position join finally (such as the 256th) Coil-span p half-way detection position data after, obtain correction data E (m). In this case, it is possible to obtain from the position, top of the 2nd coil-span p to last (example Such as the 256th) correction data E (m) corresponding to terminal position of coil-span p.
As previously discussed, the detection of the induction position detector 11 of present embodiment example 1 In method for correcting position, induction position detector 11 has slide rule 12 and rule 15, Slide rule 12 possesses the 1st slide rule coil the 13 and the 2nd slide rule coil 14, and rule 15 possesses scale Chi coil 16, slide rule 12 is installed on moving body 21 and moves together with moving body 21, and the 1st is sliding Chi coil the 13 and the 2nd slide rule coil 14 and rule coil 16 are to be parallel to each other and side in opposite directions Formula configures, and the detection method for correcting position of induction position detector 11 is characterised by, Carry out following process: detect position acquirement process, make according to the speed value of certain speed S Moving body 21 moves, and utilizes induction position detector 11 to detect the position of moving body 21 And obtain detection position X (t)；Certain speed judgement process, based on detection position X (t), Coil-span p (the 1st certain speed determination methods) of rule coil 16, or based on inspection Location puts the traveling time T of X (t), certain speed S, moving body 211(the 2nd certain speed Determination methods), or coil-span p based on rule coil 16, certain speed S, shifting The traveling time T of kinetoplast 212(the 3rd certain speed determination methods), judges moving body 21 This situation mobile has been carried out with certain speed S in predetermined moving section；And correction data takes Must process, by the inspection corresponding to the position, top of any line turn separation p in above-mentioned moving section Location puts X (t0) it is set to Reference detection positions, to Reference detection positions X (t0) plus from taking Obtain said reference detection position X (t0) multiplied value of elapsed time T and certain speed S that rises, Thus obtain approximate ideal position, obtain correction based on this approximate ideal position and detection position Data.
Therefore, there is no need to the high precision position detection different from induction position detector 11 Device, utilizes induction position detector 11 self can obtain correction data and detect The correction of position.
It addition, the school, detection position of the induction position detector 11 of present embodiment example 1 Correction method is characterised by, processes (the 1st certain speed judgement side in above-mentioned certain speed judgement Method) in, if above-mentioned moving section is set to be equivalent to n times (n is natural number) of coil-span p Interval, by moving body 21 with certain speed S in above-mentioned moving section mobile needed for movement Time is set to T1, the detecting position corresponding to the position, top of above-mentioned moving section is installed as X (t0), the detecting position corresponding to the terminal position of above-mentioned moving section is installed as X (t0+T1), Threshold value is set to ± L, is then meeting n*p-L≤X (t0+T1)-X(t0The condition of)≤n*p+L Time, it is judged that moved with certain speed S in above-mentioned moving section for moving body.
Therefore, can to easily and reliably be carried out by induction position detector 11 self The judgement of the certain speed S of moving body 21.
It addition, the school, detection position of the induction position detector 11 of present embodiment example 1 Correction method is characterised by, processes (the 2nd certain speed judgement side in above-mentioned certain speed judgement Method) in, if above-mentioned moving section is set to be equivalent to n times (n is natural number) of coil-span p Interval, by moving body 21 with certain speed S in above-mentioned moving section mobile needed for movement Time is set to T1, the detecting position corresponding to the position, top of above-mentioned moving section is installed as X (t0), the detecting position corresponding to the terminal position of above-mentioned moving section is installed as X (t0+T1), Threshold value is set to ± L, is then meeting S*T1-L≤X(t0+T1)-X(t0)≤S*T1The bar of+L During part, it is judged that moved with certain speed S in above-mentioned moving section for moving body 21.
Therefore, can to easily and reliably be carried out by induction position detector 11 self The judgement of the certain speed S of moving body 21.
It addition, the detecting position of the induction position detector 11 according to present embodiment example 1 Put bearing calibration, it is characterised in that process (the 3rd certain speed in above-mentioned certain speed judgement Determination methods) in, if above-mentioned moving section is set to be equivalent to n times of coil-span p, (n is Natural number) interval, will be deemed as moving body 21 needs the shifting of movement in above-mentioned moving section The dynamic time is set to T2, threshold value is set to ± L, is then meeting n*p-L≤S*T2The bar of≤n*p+L During part, it is judged that moved with certain speed S in above-mentioned moving section for moving body 21.
Therefore, can to easily and reliably be carried out by induction position detector 11 self The judgement of the certain speed S of moving body 21.
It addition, the detecting position of the induction position detector 11 according to present embodiment example 1 Put bearing calibration, it is characterised in that in above-mentioned correction data acquirement processes, if will achieve Corresponding to the position, top of any line turn separation p in above-mentioned moving section detection position time Time is set to t0, the terminal position institute of another coil-span p that will achieve in above-mentioned moving section Corresponding time when detecting position is set to t0+ T, by between the arbitrary coil in above-mentioned moving section Position X (t is detected on the basis of the detecting position corresponding to the position, top of p installs0), will be from taking Obtain said reference detection position X (t0) rise elapsed time t (m) (m is index number) set For t (m)=0～T, Δ t is fixed and sets up the corresponding relation of index number m and t (m), Or Δ x is fixed and sets up index number m and X (t0+ t (m)) corresponding relation, logical Cross E (m)=X (t0)+S*t(m)-X(t0+ t (m)) formula calculate index number Correction data E (m) corresponding to m.
Therefore, self can to easily and reliably be obtained by induction position detector 11 Correction data E (m).
It addition, the detecting position of the induction position detector 11 according to present embodiment example 1 Put bearing calibration, it is characterised in that be set to multiple by above-mentioned moving section, in these multiple movements Interval acquirement correction data, is set to final correction data by the meansigma methods of these multiple correction datas.
Therefore, it is possible to obtain the correction data of higher precision.
<embodiment example 2>
Based on Fig. 5, the induction position detector of embodiments of the present invention example 2 is described Detection method for correcting position.
Present embodiment example 2 is about the place till its system structure, acquirement correction data E (m) Reason (detection position acquirement process, certain speed judgement process, correction data acquirement process), Identical with above-mentioned embodiment example 1 (Fig. 1～Fig. 4), but correction data E (m) is to fixing The storage of memorizer 18B is different from above-mentioned embodiment example 1.
Fig. 5 represents correction data E obtained by the method identical with above-mentioned embodiment example 1 The example of (m).In Figure 5, transverse axis is index number m, and the longitudinal axis is correction data E (m).
The most as previously discussed, the error E of detection position X (t) it is contained in corresponding to scale Coil-span cycle of chi coil 16 and periodically change (Fig. 3 (b)).
Therefore, as it is shown in figure 5, correction data E (m) also corresponds to rule coil 16 The coil-span cycle and periodically change.It addition, in order to express corresponding to the coil-span cycle And periodically change this situation, as the situation of Fig. 3 (b), in Figure 5, with just String wave table shows correction data E (m), but as the situation of actual error E, actual Correction data E (m) also becomes the waveform slightly deformed.
Further, in the case of present embodiment example 2, in detection control apparatus 18 (detection control Portion 18A processed) in, after achieving correction data E (m), such as above-mentioned embodiment example 1 Correction data E (m) is all stored in read-only storage 18B, to this correction data like that E (m) carries out detecting position timing, does not reads from read-only storage 18B, carries out following Process.
First, Fig. 5 is illustrated such correction data E (m)=E (1), E (2), E (3) ..., E (mm) carry out Fourier transformation.
Further, according to the result of this Fourier transformation, j amount (i=0～j-1) of number in selection The component F (i) (F (0), F (1), F (2) ..., F (j-1)) that spectrum is big, And store them in read-only storage 18B (j is natural number).It addition, as component F (i) And the data stored are amplitude, frequency, phase place.
Then, moving body 21 (slide rule 12) movement is made to carry out operation (the such as machine of reality The processing operation etc. of bed) time etc., in the case of the correction carrying out detection position X (t), from Read-only storage 18B reads component F (i)=F (0), F (1), F (2) ..., F (j-1), carry out the inverse Fourier transform of this component F (i), thus obtain correction data E ' (m) =E ' (0), E ' (1), E ' (2), E ' (3) ..., E ' (mm)。
Further, as the situation of above-mentioned embodiment example 1, based on following (32) formula, By to detection position X (t0+ t (m)) add that correction data obtains E ' (m) and obtains X ' (t0+t (m)), and by this X ' (t0+ t (m)) export as the detection position after correction.Separately Outward, about the details of correction, as the situation of above-mentioned embodiment example 1.
X’(t0+ t (m))=X (t0+t(m))+E’(m) (32)
As described above, the detection of the induction position detector 11 of present embodiment example 2 Method for correcting position is characterised by, correction data E (m) is carried out Fourier transformation, by upper The component F (i) that the spectrum of j amount (i=0～j-1) of number is big is stored in read-only storage 18B, from Read-only storage 18B reads component F (i), carries out inverse Fourier transform and obtains correction data E’(m)。
Therefore, it is possible to reduce the capacity of read-only storage 18B.
It addition, in above-mentioned, although illustrate that induction position detector is line style scale The situation of chi, but it is not limited to this, as previously discussed, about induction position Detector is the method that the situation of rotary-type rule also is able to be suitable for the present invention.
Rotary-type rule has stator (primary side parts) and rotor (secondary side parts), This stator (primary side parts) possesses stator coil (first siding ring), this rotor (secondary Sidepiece part) possess rotor coil (second siding ring), rotor is installed on moving body (rotary body) And moving (rotation) together with moving body (rotary body), stator coil and rotor coil are with phase Mode the most parallel and in opposite directions configures.
For such rotary-type rule, it is also possible to be suitable for the method for the present invention and obtain correction Data, correct the detection position (anglec of rotation) of rotary-type rule by this correction data.
Industrial applicibility
The present invention relates to the detection method for correcting position of induction position detector, do not make With the high precision position detector different from induction position detector, pass through electromagnetic induction Formula position detector self obtain correction data carry out detect position correction in the case of also can Enough applicable.
Description of reference numerals
11 induction position detectors
12 slide rules
13 the 1st slide rule coils
14 the 2nd slide rule coils
15 rules
16 rule coils
17 test sections
18 detection control apparatus
18A detects control portion
18B read-only storage
20 drive dynamic control device
21 moving bodys

Claims (7)

1. a detection method for correcting position for induction position detector, described electromagnetism sense The formula position detector of answering has primary side parts and secondary side parts, and described primary side parts possess First siding ring, described secondary side parts possess second siding ring, described primary side parts or institute State secondary side parts to be installed on moving body and move together with described moving body, a described side line Enclose with described second siding ring by be parallel to each other and in opposite directions in the way of configure,
The detection method for correcting position of described induction position detector is characterised by, enters Row is following to be processed:
Detection position acquirement process, makes described moving body according to the speed value of certain speed Mobile, utilize described induction position detector to detect the position of described moving body and obtain Detection position；
Certain speed judgement processes, based on described detection position and the coil of described second siding ring Spacing, or based on described detection position, described certain speed and described moving body mobile time Between, or coil-span based on described second siding ring, described certain speed and described movement The traveling time of body, it is judged that described moving body is carried out with described certain speed at predetermined moving section This situation mobile；And
Correction data acquirement process, by the position, top of any line turn separation in described moving section Put detection position on the basis of corresponding detecting position installs, to described Reference detection positions plus taking Obtain the multiplied value in the elapsed time after described Reference detection positions and described certain speed, thus Obtain approximate ideal position, obtain correction based on described approximate ideal position and detection position According to.
The detection position correction of induction position detector the most according to claim 1 Method, it is characterised in that
In described certain speed judgement processes,
Described moving section is set to be equivalent to the interval of n times of described coil-span p, and n is Natural number,
Shifting needed for described moving body is moved in described moving section with described certain speed S The dynamic time is set to T1,
Detecting position corresponding to the position, top of described moving section is installed as X (t0), by institute State the detecting position corresponding to the terminal position of moving section to install as X (t0+T1),
Threshold value is set to ± L,
Then meeting n*p-L≤X (t0+T1)-X(t0During the condition of)≤n*p+L, it is judged that for Described moving body is moved with described certain speed S in described moving section.
The detection position correction of induction position detector the most according to claim 1 Method, it is characterised in that
In described certain speed judgement processes,
Described moving section is set to be equivalent to the interval of n times of described coil-span p, and n is Natural number,
Shifting needed for described moving body is moved in described moving section with described certain speed S The dynamic time is set to T1,
Detecting position corresponding to the position, top of described moving section is installed as X (t0), by institute State the detecting position corresponding to the terminal position of moving section to install as X (t0+T1),
Threshold value is set to ± L,
Then meeting S*T1-L≤X(t0+T1)-X(t0)≤S*T1During the condition of+L, it is judged that Moved with described certain speed S in described moving section for described moving body.
The detection position correction of induction position detector the most according to claim 1 Method, it is characterised in that
In described certain speed judgement processes,
Described moving section is set to be equivalent to the interval of n times of described coil-span p, and n is Natural number,
Will be deemed as the traveling time required for described moving body moves in described moving section to set For T2,
Threshold value is set to ± L,
Then meeting n*p-L≤S*T2During the condition of≤n*p+L, it is judged that for described moving body in institute Moved with described certain speed S in stating moving section.
The detection position correction of induction position detector the most according to claim 1 Method, it is characterised in that
In described correction data acquirement processes,
Corresponding to the position, top of any line turn separation p achieved in described moving section Time during detection position is set to t0,
Corresponding to the terminal position of the another any line turn separation p achieved in described moving section Detection position time time be set to t0+ T,
By the detecting position corresponding to the position, top of any line turn separation p in described moving section Position X (t is detected on the basis of installing0),
Described Reference detection positions X (t will be obtained0Elapsed time t (m) after) is set to t (m)=0～T, m is index number,
Δ t is fixed and sets up the corresponding relation of index number m and t (m), or by Δ x Fix and set up index number m and X (t0+ t (m)) corresponding relation,
By E (m)=X (t0)+S*t(m)-X(t0+ t (m)) formula calculate and rope Draw correction data E (m) that numbering m is corresponding.
The detection position correction of induction position detector the most according to claim 1 Method, it is characterised in that
Described moving section is set to multiple, obtains correction data at these multiple moving sections, will The meansigma methods of these multiple correction datas is set to final correction data.
The detection position correction of induction position detector the most according to claim 1 Method, it is characterised in that
Described correction data is carried out Fourier transformation, according to the order that spectrum is descending, will Front j component F (i) is stored in memorizer, wherein i=0～j-1,
Read component F (i) from described memorizer, carry out inverse Fourier transform and obtain correction According to.
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