WO2014077431A1 - 스핀토크형 자기센서 - Google Patents
스핀토크형 자기센서 Download PDFInfo
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- WO2014077431A1 WO2014077431A1 PCT/KR2012/009720 KR2012009720W WO2014077431A1 WO 2014077431 A1 WO2014077431 A1 WO 2014077431A1 KR 2012009720 W KR2012009720 W KR 2012009720W WO 2014077431 A1 WO2014077431 A1 WO 2014077431A1
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- spin torque
- spin
- magnetic sensor
- magnetic field
- magnetic
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/12—Measuring magnetic properties of articles or specimens of solids or fluids
- G01R33/1284—Spin resolved measurements; Influencing spins during measurements, e.g. in spintronics devices
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/0064—Arrangements or instruments for measuring magnetic variables comprising means for performing simulations, e.g. of the magnetic variable to be measured
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
- G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
- G01R33/09—Magnetoresistive devices
Definitions
- the present invention relates to a magnetic sensor using a spin torque element, and more particularly, to a magnetic sensor that linearly responds to the strength of a magnetic field by controlling a coercive force by applying a bipolar pulse to the spin torque element.
- a magnetic sensor capable of controlling the sensitivity by controlling the dynamic range transition moving by the magnetic field corresponding to the offset bias and the amplitude intensity of the bipolar pulse is controlled. It is about.
- the magnetic sensor measures the magnitude or direction of the magnetic field by changing the magnetization or magnetic resistance of the material depending on the magnetic field.
- Commonly used magnetic sensors include Hall magnetic sensors using the Hall effect, Giant MagnetoResistance sensors using the giant magnetoresistance phenomenon (hereinafter referred to as 'GMR'), Tunneling MagnetoResistance: Sensor, saturation flux magnetic sensor and superconducting quantum interferometer element sensor.
- Such magnetic sensors are used depending on characteristics such as magnetic field range or sensitivity.
- Giant magnetoresistance sensor and tunneling magnetoresistance sensor can detect 100 Gauss level magnetic field with high sensitivity and can be manufactured very small in micro scale, so it is mainly used for reading information of hard disk drive (HDD).
- Saturated iron magnetic sensors can be manufactured in various sizes, ranging from large sensors to small sensors of hundreds of micrometers, and can detect magnetic fields of 10 gauss with high sensitivity. Is utilized.
- GMR sensor is a magnetic multilayer thin film structure consisting of 'magnetic layer / nonmagnetic layer / magnetic layer'.
- 'P' state When the magnetization directions of two magnetic layers are parallel (parallel, hereinafter referred to as 'P' state) by an external magnetic field, a large amount of current flows.
- the magnetic field is measured by measuring the change in resistance by using a phenomenon in which a small current flows due to a large electric resistance.
- STT Spin Transfer Torque
- the spin of the conducting electrons that make up the current is polarized as the current passes through the magnetic layer.
- STT Spin Transfer Torque
- a force corresponding to the change in the spin angular momentum of the conduction electrons is transmitted to the spin of the magnetic layer so that a torque that changes the magnetization direction of the magnetic layer in a direction opposite to the spin polarization direction of the conduction electrons is applied to the magnetization.
- STT is a phenomenon in which the magnetization direction is changed by directly interacting with a current rather than a magnetic field. Therefore, it can be used as a memory, a sensor, and an oscillator by changing the direction of magnetization simply by applying a current without a magnetic field.
- the magnetoresistance change rate of the GMR and TMR elements is about 10% and 50%, respectively, whereas the spin-torque device using STT has a high magnetoresistance change rate of more than 100% and the sensitivity is very high.
- SNRs signal-to-noise ratios
- the measurement section response region
- dispersion exists in the switching magnetic field in relation to the manufacturing process and thermal stability.
- Hc coercive field due to the magnetic history of the ferromagnetic layer
- the linearity is limited.
- a circuit additional function for improving the properties of the material itself or correcting the magnetic hysteresis characteristics is required.
- Korean Patent No. 0820079 discloses a technique for improving the magnetic history characteristic of a spin device by applying a control magnetic field of alternating current or direct current through an excitation conductor to the outside of the spin device.
- the magnetoresistive sensor applies a magnetic field from the outside, the structure of the magnetoresistive sensor requires additional excitation conductor and magnetic field control.
- the driving power consumption is large to remove the coercive force, which causes a heat generation phenomenon.
- the present invention removes the coercive force of the magnetic sensor, improves sensitivity, and improves the dynamic range by applying a bipolar pulse and an offset bias to the spin torque element to correct the magnetic hysteresis characteristics of the magnetic sensor. And a spin-torque magnetic sensor to which the technique of controlling the offset of the response region is applied.
- the spin torque element of the magnetization direction is changed by the direction and intensity of the applied current, the spin to control the coercivity and sensitivity of the spin torque element
- a signal processor for counting the parallel state (P) or anti-parallel state (AP) of the spin torque element according to the bipolar pulse power applied to the torque element and calculating the magnetization degree or magnetoresistance.
- the signal processing unit is characterized in that it comprises a counter for counting the parallel or anti-parallel state of the spin-talk type element and a calculation unit for calculating the value counted by the counter.
- a low frequency band pass filter for removing high frequency components caused by the bipolar pulse is added to the front of the signal processor.
- it is characterized in that it further comprises a bias unit for applying an offset bias to the spin torque device in order to control the sensitive area of the spin torque device.
- a resistor unit having a resistance characteristic connected in series with the spin torque element may be included, and the resistance region of the magnetic sensor may be adjusted by controlling a resistance value of the register unit.
- the output voltage level (level) of the magnetic sensor is adjusted by connecting a second spin torque type device instead of the resistor unit.
- a spin torque device whose magnetization direction is changed by an applied current, an offset controller for controlling an offset bias applied to the spin torque device, and a signal are input and output to the spin torque device.
- an offset controller for controlling an offset bias applied to the spin torque device, and a signal are input and output to the spin torque device.
- a spin torque type magnetic sensor integrated circuit chip in which electrode pads are integrated on one substrate.
- the coercive force / sensing area controller for controlling the coercive force and sensitivity of the spin torque element and the parallel or antiparallel state of the spin torque element are counted according to the applied bipolar pulse. Characterized in that the signal processing unit for calculating the magnetoresistance is further included.
- it is characterized in that it further comprises an ADC for converting the analog signal of the sensor into a digital signal.
- the coercive force of the magnetoresistive element is controlled by adjusting the amplitude of the high frequency current waveform, and hysteresis can be eliminated.
- the output voltage region may be controlled by connecting an active variable resistor or a spin torque type device using a resistor or a transistor or in series.
- a wide area of tens of Malawids can be densely divided into resolutions of 1 réelled (Oe) or less, and thus can be utilized in a wide range of fields such as nanoparticle detection, nondestructive testing, metal detection, and geomagnetic detection. .
- the seventh and sixth effects can be compared with existing magnetic field sensing devices such as fluxgates and hall sensors to share the commercial market in the field. It can be applied and its utility is high.
- the excitation lead can be provided.
- the phase of the current wave input to the excitation conductor and the phase output from the magnetic sensor are different, which can be used as a phase modulation device. That is, if the coercive force is small, the output resistance according to the input current wave input to the excitation conductor is changed immediately, so the phase delay is small. If the coercive force is large, the time until the amplitude of the current wave is large enough to invert the magnetization Delayed, the electrical signal is output from the magnetic sensor.
- Figure 1 shows the difference in the switching phase diagram when the unipolar and bipolar pulses are applied to the spin-torque device.
- FIG. 2 illustrates the relationship between the bipolar pulse (FIG. 2 (a)) and the magnetoresistance (FIG. 2 (b), (c), (d)) according to the strength and direction of the magnetic field in a spin torque device. Picture.
- FIG. 3 illustrates the change of the magnetic field according to the bipolar pulse voltage as a bias voltage variable.
- Figure 5 shows a transition (shift) of the direct-current magnetic field (H bias) or a mixed voltage operation region in the coercive force that is applied to the alternating magnetic field or current removed.
- FIG. 6 shows an example of a system capable of performing a magnetic field sensing function by applying a bipolar pulse.
- FIG. 7 is an example of signal processing according to the direction and intensity of a magnetic field according to an embodiment of the present invention.
- FIG 8 shows that a bias unit and a low frequency pass filter are added as an embodiment of the present invention.
- FIG. 10 shows an example of a circuit capable of controlling the output voltage level of a magnetic field detection system using a spin torque element.
- FIG 11 shows an embodiment according to the present invention.
- FIG. 12 shows an example of a magnetic field sensor integrated circuit using a spin torque element.
- Figure 13 shows an example of a disposable magnetic field sensor module according to the present invention.
- FIG. 14 is a conceptual diagram in which a disposable magnetic field sensor module is mounted in a portable reader as an embodiment of the present invention.
- the spin torque type magnetic sensor includes a spin torque type element whose magnetization direction changes when a current is applied, a bipolar pulse power applied to the spin torque type element to control the coercive force and the sensitive area of the spin torque type element; And a signal processor for counting the parallel or anti-parallel state of the spin torque element according to the applied bipolar pulse to calculate magnetization or magnetoresistance.
- the spin torque device used in the present invention uses a magnetic multilayer thin film structure composed of a general 'magnetic layer / nonmagnetic layer / magnetic layer'.
- the magnetic layer is a ferromagnetic material in which magnetic moments influence the spin and orbital angular momentum of the electrons.
- the magnetization increases to reach the magnetic saturation state, and if the magnetic field decreases, the residual magnetization remains even without the magnetic field, and when the magnetic field is applied in the opposite direction, the same phenomenon occurs in the opposite direction. Show the hysteresis loop of the closed curve. Therefore, the magnetization is made nonlinear according to the applied magnetic field, and the residual magnetization is generated by spontaneous magnetization.
- the magnetic field in the opposite direction to eliminate it is called coercive field (Hc) or coercive force.
- the present invention additionally proposes a technique for controlling sensitivity by applying a high amplitude bipolar pulse above a minimum voltage or current (threshold voltage or threshold current) that can be magnetized by voltage or current alone.
- the spin torque device As in the conventional spin device, magnetic switching is performed only by a magnetic field in the absence of a bias current or voltage. Another feature of the spin torque device is that magnetic switching occurs only with the current or voltage passing through the spin torque device in the absence of a magnetic field. Therefore, the spin-torque device has one more variable to achieve magnetic switching than the conventional spin device.
- FIG. 1 is a diagram illustrating a switching state of a spin torque type device in which a voltage or current is shown as a horizontal axis and a switching magnetic field is shown as a vertical axis.
- FIG. 1A is a typical state diagram. There are two curves in the switching state diagram. One is a line indicating a boundary that changes from a parallel (P) state to an antiparallel (AP) state, and the other is a line showing a boundary that changes from an antiparallel (AP) state to a parallel (P) state.
- the right line passing through the four quadrants is called the boundary (AP ⁇ P), which changes from the antiparallel (AP) state to the parallel (P) state, and the left line passing through the second quadrant is antiparallel in the parallel (P) state.
- the boundary that changes to the AP state is called P ⁇ AP.
- Figure 1 (b) is a parallel (P) state is easy to apply when a positive unipolar pulse is applied, the right line passing through the quadrant 4 is moved to the origin direction
- Figure 1 (c) is a negative value When the unipolar pulse is applied, it is easy to be in antiparallel (AP) state, which shows that the left line passing through the quadrant moves in the origin direction.
- a bipolar pulse is applied alternately between positive and negative signs, the boundary lines in quadrant 4 and quadrant 2 converge on the diagonal across the first and third quadrants.
- the minimum voltage or current that can be switched by voltage or current alone is referred to as a threshold voltage or a threshold current, and when the amplitude of the bipolar pulse exceeds the threshold voltage or the threshold current, the AP and P states alternately appear. Averaged over time, the resistance between the AP and P is shown. In addition, even a small magnetic field change of several Oe easily indicates the AP or P state. And the coercivity disappears.
- FIG. 2 (a) shows a bipolar pulse train, in which the magnetic resistance in saturation with a positive magnetic field (H> 0) is referred to as R H , and the saturation magnetization with a negative magnetic field (H ⁇ 0).
- R H the magnetic resistance in saturation with a positive magnetic field
- H ⁇ 0 the saturation magnetization with a negative magnetic field
- the average magnetoresistance R avg is the average value of R H and R L ((R H + R L ) / 2 2 (c) shows the average magnetoresistance (R avg ) equal to the average value when the positive / negative pulses are the same, and FIG. 2 (d) shows the average of the negative magnetic field, that is, when there are many negative pulses.
- the magnetoresistance (R avg ) shows that it is smaller than the average of R H and R L.
- 3 shows a switching state diagram when a bipolar pulse is applied to a spin torque device. 3 shows an experimental result in which two variables simultaneously act as a DC bias voltage is added as a variable. When the bipolar pulse amplitude reaches the threshold current or threshold voltage, the coercive force is removed and the response region shifts according to the DC bias voltage (x-axis).
- FIG. 4 illustrates a method of enlarging a sensitive area according to the present invention, in which an excessive amplitude pulse (over shoot pulse) is applied to a threshold voltage or a threshold current required for switching.
- this function is realized by applying a magnetic field pulse (H AC ), but in the spin torque device according to the present invention, the magnetic field pulse as well as the voltage (V AC) or the current pulse (I AC ) passing through the sample. It is possible to control the sensitivity by applying.
- H AC magnetic field pulse
- V AC voltage
- I AC current pulse
- a method of moving a response region in response to a magnetic field is to apply an additional offset bias (direct magnetic field or voltage (current)) in the state of applying a bipolar pulse.
- FIG. 5 (a) (“(a) and (b)” of FIG. 5) shows a case where a bipolar pulse is applied while applying a positive (negative) offset bias magnetic field (voltage (current)). The sensitive region shifts to the negative magnetic field region by the offset magnetic field.
- FIG. 5B shows a case in which a bipolar pulse is applied while applying a negative offset positive magnetic field (voltage (current)), and the sensitive region is shifted to the positive magnetic field region by the negative offset magnetic field.
- applying a bipolar pulse while changing the offset bias at regular intervals can move or select the sensitive region.
- FIG. 6 shows a coercive force control method according to the present invention.
- the magnetic sensor shown in FIG. 6 includes a bipolar pulse power supply 1, a spin torque element 2, and a signal processor 22 composed of a counter 3 and a calculation unit 4. As shown in FIG.
- the bipolar pulse power supply 1 is a pulse having a positive / negative amplitude applied directly to the spin-torque element 2 to cancel the coercive force of the spin-torque element 2. It is preferred for linearization of sensors.
- the waveform of the bipolar pulse power supply 1 can be a bipolar sine wave or a triangular wave in addition to the bipolar square wave pulse as shown in Fig. 2 (a). Among the three examples of the bipolar waveforms, the bipolar square wave pulse has the lowest power consumption.
- the spin torque type device 2 generally has a multilayer thin film structure of a fixed magnetic layer, a nonmagnetic layer, and a free magnetic layer, but is not limited thereto and may be a single magnetic layer, and may be implemented as a nano contact or a nano pillar. If necessary, it can be implemented as an array in which unit spin-torque devices are connected in series or by magnetic sensors.
- the signal processor 22 counts the number of times the magnetization degree or magnetoresistance is saturated by counting the parallel state or antiparallel state of the spin torque element 2 according to the applied bipolar pulse.
- the signal processor 22 may include a counter 3 and a calculator 4.
- the counter 3 counts the number per unit time when the spin torque element 2 is in the antiparallel state and in the parallel state when the bipolar pulse is applied.
- the magnetoresistance is lowered when the magnetization direction of the fixed magnetic layer and the magnetization direction of the free magnetic layer become parallel.
- the magnetoresistance of the spin torque element 2 becomes high.
- the calculation unit 4 has dwell time and pulse period ⁇ c of each pulse, the number of anti-parallel states counted by the counter 3, and the number of parallel states n as shown in Equation (1). Calculate the average value through.
- ⁇ p and ⁇ ap are residence times in parallel (P) and antiparallel (AP) states, respectively.
- FIG. 7 shows an example of a calculation process.
- a large number of anti-parallel states (m) is large and an average resistance is large.
- 7 (c) shows that the number m of antiparallel states and the number n of parallel states are equal, and the average resistance is medium.
- 7 (d) shows a large number of negative pulses (H ⁇ 0), a large number n of parallel states, and an average resistance smaller than the middle.
- the antiparallel state and the parallel state are counted in a circuit such as a flip-flop provided in the counter 3, and a low frequency band pass filter may be further provided in front of the counter 4 to remove the high frequency bipolar pulse.
- a transient pulse of more than a threshold voltage (current) may be applied, and a resistance change rate may be adjusted by adding a resistor network or attenuator.
- FIG. 8 illustrates a method for controlling an offset region offset according to the present invention.
- a bias part 6 capable of applying an offset bias to Embodiment 1 is added.
- the offset of the sensitive region can be controlled only by the offset bias of the voltage (current), but an excitation conductor 7 may be added to extend the offset control to a wider region.
- an excitation conductor 7 may be added to extend the offset control to a wider region. It is also possible to replace the signal processor 22 of FIG. 6 with the low pass band filter 5.
- the low pass filter removes high frequency noise caused by bipolar pulses and smoothes the filter against variation in magnetoresistance values.
- Figure 9 shows an embodiment of the role of the offset bias. If no offset bias is applied to the voltage, a magnetic field near zero can be detected. As shown in FIG. 1, applying a positive offset bias has an effect of applying a negative magnetic field. Therefore, the sensitive region moves to the positive magnetic field region by the negative magnetic field strength. Using this principle, applying a bipolar pulse while varying the offset bias allows the sensitive area to be positioned where desired.
- a transient pulse capable of magnetizing above a threshold current (voltage) or a magnetic field may be applied, and a resistance change rate may be adjusted by adding a resistor network or an attenuator.
- FIG. 10 shows an output level (level) control method according to the present invention.
- the magnetic sensor shown in FIG. 10 shows that a resistor network or attenuator 8 capable of changing the resistance level is added in series with the spin torque element 2a. By adjusting the size of the resistor, the level of the output signal Vout can be determined by the voltage division law.
- FIG. 11 shows an embodiment in which the spin torque element 2b is added in series instead of the register section 8.
- Separate spin elements can be connected in series or in parallel, and vary in the level of the output voltage depending on the connection method. For example, when the magnetic field sensing direction of the spin torque element 2b is opposite to the spin torque element 2a, a push-pull function is possible.
- a magnetic sensor according to the present invention is integrated into a chip, and includes a silicon substrate 9, a spin torque magnetic sensor 10, a coercive force / responsive area controller 11, an offset controller 12, and an analog-digital sensor. And a converter 13.
- Spin-talk type devices are compatible with silicon CMOS processes, which is advantageous for miniaturization and integrated circuits.
- the coercive force / responsive region control unit 11 outputs control signals ctrl1 and ctrl2 for controlling the bipolar pulse power supply 1 and the bias unit 6 to the spin torque magnetic sensor 10.
- the offset control unit 12 controls the offset of the spin torque magnetic sensor 10.
- the analog to digital converter 13 converts the analog output signal of the magnetic sensor 10 into a digital signal. Magnetic field information can be selected by digital or analogue output.
- FIG. 13 illustrates a substrate having a disposable spin-torque magnetic sensor capable of simplifying the structure of the sensor module and lowering the manufacturing cost by outputting only an analog signal when a host device is provided with a digital to analog converter (DAC).
- the disposable integrated circuit chip integrates only the spin torque type magnetic sensor 15 and the offset control unit 16 on the substrate 14 to reduce the production cost and to enable disposable use.
- the disposable magnetic sensor 19 is connected to the mobile communication terminal 21 through the port 20 of the mobile communication terminal, and the information detected from the disposable magnetic sensor 19 is read through the mobile communication terminal 21.
- the disposable magnetic sensor 19 may be a sensor for detecting human DNA information attached to the nanoparticles.
- the nanoparticles are magnetic nanoparticles capable of magnetization and the DNA probe is attached to the disposable magnetic sensor 19, the nanoparticles may reach the disposable magnetic sensor 19 and adhere to each other.
- the disposable magnetic sensor 19 may be sensitive to the magnetic field generated around the nanoparticles to count the number of the nanoparticles to which the desired DNA is attached.
- the spin torque magnetic sensor of the present invention is easy to be applied to non-destructive inspection sensors for detecting microcracks, medical nanoparticle sensors, future micro robot applications.
- the spin torque magnetic sensor of the present invention is easy to develop a disposable diagnostic kit low manufacturing cost. It is possible to secure high marketability because it can be applied to electronic compass for mobile device because it can secure small size and high sensitivity.
- the spin torque magnetic sensor according to the present invention can be applied to non-destructive inspection sensors for detecting microcracks, medical nanoparticle sensors, gear tooth sensors of small precision mechanical parts, and future micro robot applications.
- the size of the spin-torque magnetic sensor is very small, which facilitates the development of a transparent sensor.
- the spin torque magnetic sensor of the present invention is easy to develop a disposable diagnostic kit low manufacturing cost. It is possible to secure high marketability because it can be applied to electronic compass for mobile device because it can secure small size and high sensitivity.
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Claims (15)
- 가해진 직류전원에 의하여 자화방향이 변화되는 스핀토크형 소자;상기 스핀토크형 소자의 보자력 및 민감도를 제어하기 위하여 상기 스핀토크형 소자에 가해지는 양극성 펄스 전원 및가해진 양극성 펄스에 따라 상기 스핀토크형 소자의 평행상태 또는 반평행상태를 계수하여 자화도 또는 자기저항을 계산하는 신호처리부를 포함하는 것을 특징으로 하는 스핀토크형 자기센서.
- 제1 항에 있어서,상기 신호처리부는,상기 스핀토크형 소자의 평행상태 또는 반평행상태를 계수하는 카운터 및상기 카운터에서 계수한 값들을 연산처리하는 연산부로 구성되는 것을 특징으로 하는 스핀토크형 자기센서.
- 제1항에 있어서,상기 양극성 펄스에 의한 고주파 성분을 제거하기 위하여 저주파대역 통과필터를 상기 신호처리부 전단에 부가하는 것을 특징으로 하는 스핀토크형 자기센서.
- 제1항 내지 제3항 중 어느 한 항에 있어서,상기 스핀토크형 소자의 감응영역 위치를 제어하기 위해 상기 스핀토크형 소자에 오프셋 바이어스를 인가하는 바이어스부를 더 포함하는 것을 특징으로 하는 스핀토크형 자기센서
- 제1항 내지 제3항 중 어느 한 항에 있어서,상기 스핀토크형 소자와 직렬 연결된 저항 특성의 레지스터부를 포함하고, 상기 레지스터부의 저항값을 제어하여 상기 자기센서의 출력 수준을 조절하는 것을 특징으로 하는 스핀토크형 자기센서.
- 제5항에 있어서,상기 스핀토크형 소자와 직렬 연결된 제2 스핀토크형 소자에 의해 상기 자기센서의 출력 수준을 조절하는 것을 특징으로 하는 스핀토크형 자기센서.
- 가해진 직류전원에 의하여 자화방향이 변화되는 스핀토크형 소자;상기 스핀토크형 소자의 보자력 및 민감도를 제어하기 위하여 상기 스핀토크형 소자에 가해지는 양극성 펄스 전원; 및상기 스핀토크형 소자의 변동되는 자기저항의 평균값을 추출하는 저주파대역 통과필터를 포함하는 것을 특징으로 하는 스핀토크형 자기센서.
- 가해진 직류전류에 의하여 자화방향이 변화되는 스핀토크형 소자;상기 스핀토크형 소자의 출력에서 오프셋을 제어하기 위한 오프셋 제어부 및상기 스핀토크형 소자에 신호를 입력하고 출력하기 위한 전극 패드가 하나의 기판에 집적된 스핀토크형 자기센서 집적회로 칩.
- 제8항에 있어서,상기 스핀토크형 소자의 보자력 및 민감도를 제어하기 위한 보자력/감응영역 제어부 및가해진 양극성 펄스에 따라 상기 스핀토크형 소자의 평행상태 또는 반평행상태를 계수하여 자화도 또는 자기저항을 계산하는 신호처리부가 더 포함된 것을 특징으로 하는 스핀토크형 자기센서 집적회로 칩.
- 제9항에 있어서,상기 신호처리부 대신에 상기 스핀토크형 소자의 자화도의 평균을 추출하는 저주파대역 통과필터를 포함하는 것을 특징으로 하는 스핀토크형 자기센서 집적회로 칩.
- 제8항에 있어서,상기 센서의 아날로그 신호를 디지털 신호로 변환하는 ADC가 더 포함된 것을 특징으로 하는 스핀토크형 자기센서 집적회로 칩.
- 제8항의 집적회로 칩을 사용한 일회용 스핀토크형 자기센서.
- 제12항의 일회용 스핀토크형 자기센서를 사용하여 이동통신 단말기의 포트와 연결하고 상기 이동통신 단말기의 자기장 측정 어플리케이션을 구동하여 상기 스핀토크형 자기센서에 인가된 자기장을 측정하는 방법.
- 제7항 내지 제10항 중 어느 한 항의 스핀토크형 자기센서 집적회로 칩을 이용한 미세균열을 감지하는 비파괴 검사용 센서.
- 제8항 내지 제11항 중 어느 한 항의 스핀토크형 자기센서 집적회로 칩을 이용한 의료용 나노입자 센서.
Priority Applications (5)
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JP2015515926A JP2015527565A (ja) | 2012-11-16 | 2012-11-16 | スピントルク型磁気センサー |
US14/000,913 US20140139214A1 (en) | 2012-11-16 | 2012-11-16 | Magnetic sensor using spin transfer torque devices |
PCT/KR2012/009720 WO2014077431A1 (ko) | 2012-11-16 | 2012-11-16 | 스핀토크형 자기센서 |
KR1020147022426A KR101593665B1 (ko) | 2012-11-16 | 2012-11-16 | 스핀토크형 자기센서 |
EP12888453.3A EP2843433A4 (en) | 2012-11-16 | 2012-11-16 | TORQUE MAGNETIC SENSOR |
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PCT/KR2012/009720 WO2014077431A1 (ko) | 2012-11-16 | 2012-11-16 | 스핀토크형 자기센서 |
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WO2014077431A1 true WO2014077431A1 (ko) | 2014-05-22 |
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PCT/KR2012/009720 WO2014077431A1 (ko) | 2012-11-16 | 2012-11-16 | 스핀토크형 자기센서 |
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US (1) | US20140139214A1 (ko) |
EP (1) | EP2843433A4 (ko) |
JP (1) | JP2015527565A (ko) |
KR (1) | KR101593665B1 (ko) |
WO (1) | WO2014077431A1 (ko) |
Families Citing this family (10)
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KR101890561B1 (ko) | 2016-02-03 | 2018-08-22 | 고려대학교 세종산학협력단 | 스핀홀 현상을 이용한 자기장 측정 장치 및 방법 |
JP7186481B2 (ja) * | 2018-05-18 | 2022-12-09 | 株式会社東海理化電機製作所 | 磁気センサ装置 |
US11738336B2 (en) * | 2019-04-12 | 2023-08-29 | Western Digital Technologies, Inc. | Spin torque oscillator (STO) sensors used in nucleic acid sequencing arrays and detection schemes for nucleic acid sequencing |
US11327073B2 (en) | 2019-04-12 | 2022-05-10 | Western Digital Technologies, Inc. | Thermal sensor array for molecule detection and related detection schemes |
US11112468B2 (en) | 2019-04-12 | 2021-09-07 | Western Digital Technologies, Inc. | Magnetoresistive sensor array for molecule detection and related detection schemes |
US11609208B2 (en) | 2019-04-12 | 2023-03-21 | Western Digital Technologies, Inc. | Devices and methods for molecule detection based on thermal stabilities of magnetic nanoparticles |
US11579217B2 (en) | 2019-04-12 | 2023-02-14 | Western Digital Technologies, Inc. | Devices and methods for frequency- and phase-based detection of magnetically-labeled molecules using spin torque oscillator (STO) sensors |
US11208682B2 (en) | 2019-09-13 | 2021-12-28 | Western Digital Technologies, Inc. | Enhanced optical detection for nucleic acid sequencing using thermally-dependent fluorophore tags |
US11747329B2 (en) | 2019-11-22 | 2023-09-05 | Western Digital Technologies, Inc. | Magnetic gradient concentrator/reluctance detector for molecule detection |
CN112198465B (zh) * | 2020-08-07 | 2022-08-09 | 国网宁夏电力有限公司电力科学研究院 | 一种变压器的剩余磁通的检测方法、介质及*** |
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Also Published As
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JP2015527565A (ja) | 2015-09-17 |
EP2843433A4 (en) | 2015-04-15 |
KR20140134271A (ko) | 2014-11-21 |
EP2843433A1 (en) | 2015-03-04 |
KR101593665B1 (ko) | 2016-02-16 |
US20140139214A1 (en) | 2014-05-22 |
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