WO2014034361A1 - 旋削方法および旋削装置 - Google Patents
旋削方法および旋削装置 Download PDFInfo
- Publication number
- WO2014034361A1 WO2014034361A1 PCT/JP2013/070643 JP2013070643W WO2014034361A1 WO 2014034361 A1 WO2014034361 A1 WO 2014034361A1 JP 2013070643 W JP2013070643 W JP 2013070643W WO 2014034361 A1 WO2014034361 A1 WO 2014034361A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- turning
- inner ring
- outer ring
- tool
- raceway surface
- Prior art date
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Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23B—TURNING; BORING
- B23B5/00—Turning-machines or devices specially adapted for particular work; Accessories specially adapted therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23B—TURNING; BORING
- B23B29/00—Holders for non-rotary cutting tools; Boring bars or boring heads; Accessories for tool holders
- B23B29/24—Tool holders for a plurality of cutting tools, e.g. turrets
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23B—TURNING; BORING
- B23B1/00—Methods for turning or working essentially requiring the use of turning-machines; Use of auxiliary equipment in connection with such methods
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23P—METAL-WORKING NOT OTHERWISE PROVIDED FOR; COMBINED OPERATIONS; UNIVERSAL MACHINE TOOLS
- B23P15/00—Making specific metal objects by operations not covered by a single other subclass or a group in this subclass
- B23P15/003—Making specific metal objects by operations not covered by a single other subclass or a group in this subclass bearings
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C19/00—Bearings with rolling contact, for exclusively rotary movement
- F16C19/02—Bearings with rolling contact, for exclusively rotary movement with bearing balls essentially of the same size in one or more circular rows
- F16C19/14—Bearings with rolling contact, for exclusively rotary movement with bearing balls essentially of the same size in one or more circular rows for both radial and axial load
- F16C19/18—Bearings with rolling contact, for exclusively rotary movement with bearing balls essentially of the same size in one or more circular rows for both radial and axial load with two or more rows of balls
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
- F16C33/30—Parts of ball or roller bearings
- F16C33/58—Raceways; Race rings
- F16C33/64—Special methods of manufacture
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23B—TURNING; BORING
- B23B2215/00—Details of workpieces
- B23B2215/12—Bearing races
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23B—TURNING; BORING
- B23B2270/00—Details of turning, boring or drilling machines, processes or tools not otherwise provided for
- B23B2270/14—Constructions comprising exactly two similar components
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C2220/00—Shaping
- F16C2220/60—Shaping by removing material, e.g. machining
- F16C2220/62—Shaping by removing material, e.g. machining by turning, boring, drilling
Definitions
- the present invention relates to a turning method and a turning apparatus.
- a bearing is freely rollable between an inner ring having an inner raceway surface formed on an outer diameter surface, an outer ring having an outer raceway surface formed on an inner diameter surface, and an inner raceway surface of the inner ring and an outer raceway surface of the outer ring.
- a main part is composed of a plurality of balls interposed between the inner ring and the outer ring, and a cage that holds the balls at equal intervals in the circumferential direction.
- each raceway surface of the inner ring and the outer ring is formed by turning.
- some bearings have balls that are rolling elements arranged in a double row.
- the processing apparatus etc. which are described in patent documents 1 etc. are used, the end face of both parts (inner ring and outer ring) can be processed simultaneously.
- the raceway (groove) of the inner ring is formed on the outer diameter surface and the raceway surface (groove) of the outer ring is formed on the inner diameter surface, the directions of the machining surfaces are different.
- the present invention provides a turning method and a turning apparatus capable of such turning, which can process a double row raceway surface (groove) with high precision in PCD dimensional difference and groove pitch (raceway pitch). There is to do.
- the turning method of the present invention is a turning method for turning each raceway surface of an inner ring and an outer ring of a double row bearing, and each raceway surface of either the inner ring or the outer ring is a turning tool having a plurality of cutting tools. After turning at the same time, the direction of the turning tool bit is changed, and the other raceway surface is simultaneously turned with this turning tool.
- the turning method of the present invention for example, if the respective raceway surfaces of the outer ring are simultaneously turned with a turning tool bite, the direction of the bite is changed, and each raceway surface of the inner ring is changed with this bite. Simultaneous turning can be performed. Thereby, the turning of each raceway surface of the inner ring is also completed. Conversely, after simultaneously turning each raceway surface of the inner ring, the direction of the tool can be changed, and each raceway surface of the outer ring can be turned simultaneously by this tool.
- the arrangement pitch of a plurality of (for example, two) tools can be kept constant between the inner ring and the outer ring.
- the change of the turning tool bite direction can be reversed 180 degrees of the turning tool.
- the bearing inner ring of the present invention is turned by the turning method.
- the bearing outer ring of the present invention is turned by the turning method.
- the bearing of this invention is equipped with the bearing inner ring
- a turning device of the present invention is a turning device for turning each raceway surface of an inner ring and an outer ring of a double row bearing, and has a plurality of cutting tools for simultaneously turning each raceway surface of either an inner ring or an outer ring.
- a tool and a changing mechanism that changes the direction of the turning tool to enable simultaneous turning of the other raceway surface.
- each raceway surface of the outer ring can be turned simultaneously with a turning tool bite.
- the direction of the cutting tool can be changed via the changing mechanism, and the respective raceway surfaces of the inner ring can be simultaneously turned with this cutting tool.
- the turning of each raceway surface of the inner ring is also completed.
- the direction of the tool can be changed, and each raceway surface of the outer ring can be turned simultaneously by this tool.
- the turning tool is provided with a radial adjustment mechanism that allows adjustment in the radial direction of the raceway surface of the cutting tool, and further, a pitch adjustment mechanism that enables adjustment in the raceway surface arrangement pitch of the turning tool bite.
- a radial adjustment mechanism that allows adjustment in the radial direction of the raceway surface of the cutting tool
- a pitch adjustment mechanism that enables adjustment in the raceway surface arrangement pitch of the turning tool bite.
- the double-row raceway surface of the inner ring and the double-row raceway surface of the outer ring can be performed with the same turning tool, and the mutual difference between the raceway pitch of the inner ring and the raceway pitch of the outer ring can be determined.
- the arrangement pitch of a plurality of bits (for example, two) can be kept constant between the inner ring and the outer ring. High precision machining is possible.
- raceway surfaces are simultaneously turned in the inner ring and the outer ring, they are not easily affected by changes over time during processing (such as thermal deformation of the work such as the apparatus and / or inner ring and outer ring).
- FIG. 1 is a schematic view of a main part in a state of turning an outer ring, showing a turning device showing an embodiment of the present invention.
- 1 is a schematic view of a main part in a state of turning an inner ring, showing a turning device showing an embodiment of the present invention.
- It is a simplified block diagram of the turning apparatus which shows embodiment of this invention. It is sectional drawing of the bearing using the outer ring
- FIG. 4 shows a bearing 1 using an inner ring 2 and an outer ring 3 that are turned by the turning method according to the present invention.
- the bearing 1 is disposed on the outer surface of the inner ring 2 in which double-row (in this case, two rows) inner raceway surfaces 2a and 2a are formed, and on the outer side of the inner ring 2, and on the inner surface of the double-row (in this case 2).
- a plurality of rolling wheels interposed between the inner raceway surfaces 2a and 2a of the inner ring 2 and the outer raceway surfaces 3a and 3a of the outer ring 3.
- the main part is comprised by the ball
- a turning tool 10 as shown in FIGS. 1 and 2 is used.
- the turning tool has a plurality of (in this case, a pair) cutting tools 11A and 11B.
- the turning tool 10 can change the direction of the cutting tools 11A and 11B of the turning tool 10 by the changing mechanism 12 shown in FIG. That is, the changing mechanism 12 can turn the raceway surfaces 3a and 3a of the outer ring 3 as shown in FIG. 1, and can turn the raceway surfaces 2a and 2a of the inner ring 2 as shown in FIG.
- the direction of the turning tool 10 can be changed to the state.
- the turning tool 10 includes a tool main body 15, the cutting tools 11A and 11B attached to the tool main body 15, a radial adjustment mechanism 16 that enables adjustment of the cutting tools 11A and 11B in the raceway surface radial direction, a cutting tool 11A, And a pitch adjusting mechanism 17 that enables adjustment of the 11B track surface arrangement pitch.
- the turning tool 10 is held by a tool post (not shown).
- the radial direction adjusting mechanism 16 can be configured by a mechanism that enables the tools 11A and 11B to reciprocate in the directions of arrows X1 and X2, for example, a reciprocating mechanism such as a cylinder mechanism, a ball nut mechanism, and a linear motor mechanism.
- a reciprocating mechanism such as a cylinder mechanism, a ball nut mechanism, and a linear motor mechanism.
- the radial direction adjusting mechanism 16 is controlled by the control means 18.
- the radial adjustment mechanism 16 may be manually adjustable. In this case, highly accurate adjustment is possible by using a block gauge or the like.
- the pitch adjusting mechanism 17 reciprocates the cutting tool 11 (for example, 11A) in the directions of arrows Y1 and Y2 orthogonal to the directions of the arrows X1 and X2.
- the pitch adjusting mechanism 17 can be constituted by a reciprocating mechanism such as a cylinder mechanism, a ball nut mechanism, or a linear motor mechanism, similarly to the radial direction adjusting mechanism 16.
- the radial direction adjusting mechanism 16 is controlled by the control means 18.
- the control means 18 is, for example, a microcomputer in which a ROM (Read Only Memory), a RAM (Random Access Memory), and the like are connected to each other via a bus with a CPU (Central Processing Unit) as a center.
- Various data from a storage device as storage means are input to the control means 18.
- the storage device includes an HDD (Hard Disc Drive), a DVD (Digital Versatile Disc) drive, a CD-R (Compact Disc-Recordable) drive, an EEPROM (Electronically Eraseable and Programmable Read Only Memory), and the like.
- the ROM stores programs executed by the CPU and data.
- the change mechanism 12 can be composed of a Kirbic coupling attached to the tool post. It can be controlled by the control means 18. That is, as shown in FIG. 1, the raceway surfaces 3 a and 3 a of the outer ring 3 can be set in a state in which the outer ring 3 whose one end face (axial end face) is fixed by a magnet chuck or the like can be turned. Further, the changing mechanism 12 changes from the state shown in FIG. 1 to the state shown in FIG. 2, that is, the raceway surface of the inner ring 2 with respect to the inner ring 2 whose one end face (axial end face) is fixed by a magnet chuck or the like. 2a, 2a can be set in a state where turning is possible. Further, the changing mechanism 12 may be constituted by an XYZ ⁇ stage, a robot arm, or the like.
- FIGS. A method of turning the raceway surfaces 2a, 2a of the inner ring 2 and the raceway surfaces 3a, 3a of the outer ring 3 as shown in FIG. 4 using the turning device constructed as described above is shown in FIGS. This will be described with reference to FIG. In this case, first, as shown in FIG. 1, a case where the raceway surfaces 3a and 3a of the outer ring 3 are turned will be described.
- step S1 the change mechanism 12 is driven to set the cutting tools 11A and 11B of the tool body 15 shown in FIG. 1 in a state in which the raceways 3a and 3a can be turned (step S1 in FIG. 5). That is, the radial adjusting mechanism 16 adjusts the cutting tools 11A and 11B in the X1 and X2 directions, and the pitch adjusting mechanism 17 adjusts the cutting tools 11A and 11B in the Y1 and Y2 directions. Thereafter, the process proceeds to step S2, and the turning of the raceway surfaces 3a and 3b of the outer ring 3 is started.
- the cutting tools 11A and 11B are moved in the directions of arrows A1, B1, A2 and B2, and the outer ring 3 is rotated about its axis. Thereby, the raceway surfaces 3a and 3a of the outer ring 3 can be turned.
- step S3 determines whether the raceway surfaces 3a and 3a of the outer ring 3 have been turned. That is, it is performed until the raceway surfaces 3a and 3a are completed. If completed, the turning tool 10 is reversed and set to the state shown in FIG. 2 (step S4). In this case, adjustment of the cutting tools 11A and 11B in the X1 and X2 directions by the radial adjusting mechanism 16 and adjustment of the cutting tools 11A and 11B in the Y1 and Y2 directions by the pitch adjusting mechanism 17 are not performed.
- step S5 the turning of the raceway surfaces 2a, 2a of the inner ring 2 is started. That is, the cutting tools 11A and 11B are moved in the directions of arrows A1, B1, A2 and B2, and the inner ring 2 is rotated about its axis. Thereby, the raceway surfaces 2a and 2a of the inner ring 2 can be turned.
- step S6 it is determined whether the raceway surfaces 2a, 2a of the inner ring 2 have been turned. That is, it is performed until the raceway surfaces 2a and 2a are completed. And if it is complete
- the double-row raceway surface 2a of the inner ring 2 and the double-row raceway surface 3a of the outer ring 3 can be performed with the same turning tool 10, and the raceway pitch of the inner ring 2 and the raceway pitch of the outer ring 3 can be achieved.
- the difference between the two can be reduced and high quality products can be molded.
- a plurality of (for example, two) cutting tools 11A and 11B are used for the inner ring 2 and the outer ring 3 as long as the cutting tool is not removed until the turning of the raceway surfaces 2a and 3a of the inner ring 2 and the outer ring 3 is completed. Therefore, it is possible to perform processing with higher accuracy that can maintain a constant arrangement pitch.
- raceways 2a, 2a, 3a, 3a are simultaneously turned in the inner ring 2 and the outer ring 3, changes over time during processing (such as the apparatus and / or the inner ring 2, the outer ring 3, etc.). It is difficult to be affected by thermal deformation of the workpiece, etc., and high-precision machining of double row PCD dimensional differences and groove pitches (track surface pitches) is possible.
- the raceway surface of the inner ring 2 is set.
- the bearing 1 using the inner ring 2 and the outer ring 3 is a stable high-quality product as a bearing.
- the raceway surfaces 3a and 3a of the outer ring 3 are turned first. After the turning, the raceway surfaces 3a and 3a of the inner ring 2 are turned. However, the raceway surfaces 3a and 3a of the inner ring 2 are turned first, and after the turning, the raceway surfaces 3a and 3a of the outer ring 3 are turned. You may turn. Further, the raceway surfaces 2a and 3a of the inner and outer rings 2 and 3 are not limited to two rows, and may be three or more rows.
- the adjustment of the cutting tools 11A and 11B in the directions of the arrows Y1 and Y2 is to move both the cutting tools 11A and 11B in the embodiment, but only one of them may be moved.
- the raceway surface is not limited to two rows, but may be three or more rows. Turn with a turning tool that has as many tools as the number of tools in the row of the raceway of the bearing to be turned.
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Rolling Contact Bearings (AREA)
- Turning (AREA)
- Cutting Tools, Boring Holders, And Turrets (AREA)
Abstract
Description
2 内輪
2a 軌道面
3 外輪
3a 軌道面
10 旋削工具
11A,11B バイト
12 変更機構
16 径方向調整機構
17 ピッチ調整機構
Claims (9)
- 複列の軸受の内輪及び外輪の各軌道面を旋削加工する旋削方法であって、
内輪と外輪のいずれか一方の各軌道面を、複数のバイトを有する旋削工具で同時に旋削した後、旋削工具のバイトの向きを変更して、他方の各軌道面をこの旋削工具で同時に旋削することを特徴とする旋削方法。 - 内輪及び外輪の各軌道面の旋削終了まで、バイト取り外しを行わないことを特徴とする請求項1に記載の旋削方法。
- 旋削工具のバイトの向きの変更が、旋削工具の180度反転であることを特徴とする請求項1又は請求項2に記載の旋削方法。
- 前記請求項1~請求項3のいずれか1項に記載の旋削方法にて旋削されてなることを特徴とする軸受内輪。
- 前記請求項1~請求項3のいずれか1項に記載の旋削方法にて旋削されてなることを特徴とする軸受外輪。
- 前記請求項1~請求項3のいずれか1項に記載の旋削方法にて旋削されてなる内輪と、前記請求項1~請求項3のいずれか1項に記載の旋削方法にて旋削されてなる外輪とを備えたことを特徴とする軸受。
- 複列の軸受の内輪及び外輪の各軌道面を旋削加工する旋削装置であって、
内輪と外輪のいずれか一方の各軌道面を同時に旋削する複数のバイトを有する旋削工具と、
前記旋削工具のバイトの向きを変更して、他方の各軌道面の同時の旋削を可能とする変更機構とを備えたことを特徴とする旋削装置。 - 前記旋削工具のバイトの軌道面径方向における調節を可能とする径方向調整機構を備えたことを特徴とする請求項7に記載の旋削装置。
- 前記旋削工具のバイトの軌道面配設ピッチにおける調節を可能とするピッチ調整機構を備えたことを特徴とする請求項7に記載の旋削装置。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201380044635.5A CN104582879B (zh) | 2012-08-30 | 2013-07-30 | 车削方法以及车削装置 |
EP13832439.7A EP2891535A4 (en) | 2012-08-30 | 2013-07-30 | TURNING METHOD AND TURNING DEVICE |
KR20157003574A KR20150044891A (ko) | 2012-08-30 | 2013-07-30 | 선삭 방법 및 선삭 장치 |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012-189974 | 2012-08-30 | ||
JP2012189974A JP5968728B2 (ja) | 2012-08-30 | 2012-08-30 | 旋削方法および旋削装置 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2014034361A1 true WO2014034361A1 (ja) | 2014-03-06 |
Family
ID=50183180
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2013/070643 WO2014034361A1 (ja) | 2012-08-30 | 2013-07-30 | 旋削方法および旋削装置 |
Country Status (5)
Country | Link |
---|---|
EP (1) | EP2891535A4 (ja) |
JP (1) | JP5968728B2 (ja) |
KR (1) | KR20150044891A (ja) |
CN (1) | CN104582879B (ja) |
WO (1) | WO2014034361A1 (ja) |
Cited By (3)
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GB2547537A (en) * | 2015-12-27 | 2017-08-23 | Faro Tech Inc | 3D measurement device with accessory interface |
JP2022058930A (ja) * | 2017-06-21 | 2022-04-12 | デクセリアルズ株式会社 | 微細加工装置、微細加工ユニット、制御装置、原盤の製造方法、及び原盤用基材の微細加工方法 |
JP7132456B1 (ja) | 2022-02-08 | 2022-09-06 | デクセリアルズ株式会社 | 微細加工装置、微細加工ユニット、制御装置、原盤の製造方法、及び原盤用基材の微細加工方法 |
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CN105081356A (zh) * | 2015-08-31 | 2015-11-25 | 黄石哈特贝尔精密锻造有限公司 | 一种轴承外圈连线车削新工艺 |
KR20170001814U (ko) | 2015-11-16 | 2017-05-24 | 현대텍주식회사 | 얇은 두께의 원통형 베어링의 케이싱 가공 장치 |
CN105598646B (zh) * | 2016-02-01 | 2018-07-10 | 洛阳市洛凌轴承科技股份有限公司 | 一种深沟球轴承无流转车加工工艺及方法 |
CN108374904B (zh) * | 2016-05-03 | 2019-05-17 | 浙江石化阀门有限公司 | 一种用于加工撑开式球面闸阀的上限位环的滚柱孔的加工工艺 |
CN106424985B (zh) * | 2016-12-01 | 2019-03-15 | 广东工业大学 | 一种大导程多滚道滚珠螺母圆弧螺旋槽的加工工具及工艺 |
CN110434362A (zh) * | 2019-09-12 | 2019-11-12 | 哈尔滨理工大学 | 一种轴承滚道专用加工车削刀具 |
CN111015130B (zh) * | 2019-12-31 | 2021-05-18 | 江阴燎原装备制造有限公司 | 内圈的加工方法 |
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2012
- 2012-08-30 JP JP2012189974A patent/JP5968728B2/ja not_active Expired - Fee Related
-
2013
- 2013-07-30 CN CN201380044635.5A patent/CN104582879B/zh not_active Expired - Fee Related
- 2013-07-30 KR KR20157003574A patent/KR20150044891A/ko not_active Application Discontinuation
- 2013-07-30 WO PCT/JP2013/070643 patent/WO2014034361A1/ja active Application Filing
- 2013-07-30 EP EP13832439.7A patent/EP2891535A4/en not_active Withdrawn
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Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
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GB2547537A (en) * | 2015-12-27 | 2017-08-23 | Faro Tech Inc | 3D measurement device with accessory interface |
US10605898B2 (en) | 2015-12-27 | 2020-03-31 | Faro Technologies, Inc. | 3D measurement device with accessory interface |
JP2022058930A (ja) * | 2017-06-21 | 2022-04-12 | デクセリアルズ株式会社 | 微細加工装置、微細加工ユニット、制御装置、原盤の製造方法、及び原盤用基材の微細加工方法 |
JP7106774B2 (ja) | 2017-06-21 | 2022-07-26 | デクセリアルズ株式会社 | 微細加工装置、微細加工ユニット、制御装置、原盤の製造方法、及び原盤用基材の微細加工方法 |
JP7132456B1 (ja) | 2022-02-08 | 2022-09-06 | デクセリアルズ株式会社 | 微細加工装置、微細加工ユニット、制御装置、原盤の製造方法、及び原盤用基材の微細加工方法 |
JP2022136125A (ja) * | 2022-02-08 | 2022-09-15 | デクセリアルズ株式会社 | 微細加工装置、微細加工ユニット、制御装置、原盤の製造方法、及び原盤用基材の微細加工方法 |
Also Published As
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JP2014046389A (ja) | 2014-03-17 |
EP2891535A1 (en) | 2015-07-08 |
JP5968728B2 (ja) | 2016-08-10 |
CN104582879B (zh) | 2016-12-21 |
CN104582879A (zh) | 2015-04-29 |
KR20150044891A (ko) | 2015-04-27 |
EP2891535A4 (en) | 2016-04-27 |
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