WO2014030421A1 - パージ機能を備えたストッカと、ストッカユニット及びクリーンガスの供給方法 - Google Patents
パージ機能を備えたストッカと、ストッカユニット及びクリーンガスの供給方法 Download PDFInfo
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- WO2014030421A1 WO2014030421A1 PCT/JP2013/067083 JP2013067083W WO2014030421A1 WO 2014030421 A1 WO2014030421 A1 WO 2014030421A1 JP 2013067083 W JP2013067083 W JP 2013067083W WO 2014030421 A1 WO2014030421 A1 WO 2014030421A1
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- Prior art keywords
- stocker
- clean gas
- container
- base
- attached
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B5/00—Cleaning by methods involving the use of air flow or gas flow
- B08B5/02—Cleaning by the force of jets, e.g. blowing-out cavities
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/14—Stack holders or separators
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G45/00—Lubricating, cleaning, or clearing devices
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67389—Closed carriers characterised by atmosphere control
- H01L21/67393—Closed carriers characterised by atmosphere control characterised by the presence of atmosphere modifying elements inside or attached to the closed carrierl
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67769—Storage means
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67775—Docking arrangements
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/4238—With cleaner, lubrication added to fluid or liquid sealing at valve interface
Definitions
- the present invention relates to a stocker having a purge function, a stocker unit, and a method for supplying clean gas to a container in the stocker.
- Patent Document 1 JP2010-241515A proposes a stocker with a nozzle for supplying clean gas to a container
- Patent Document 2 proposes a SMIF pod with a gas inlet for storing a reticle. Yes.
- JP2010-241515A WO2008 / 106622 (JP2010-520625A)
- An object of the present invention is to provide a stocker in which a frontage with a purge function and a frontage without a purge function can coexist, and a frontage without a purge function can be easily changed to a frontage with a purge function.
- a stocker having a purge function includes a frame in which a plurality of shelf holders not provided with a clean gas supply nozzle can be attached in the vertical direction or in the horizontal direction; It consists of a stocker unit, The stocker unit is A base consisting of columns or beams and attached to the frame; A pipe for supplying a clean gas provided along the base; It consists of a plurality of shelves with purge functions, The shelf receiver with a purge function is attached to the base and arranged in the vertical direction or the horizontal direction, and includes a nozzle that can support the container and supplies clean gas from the pipe to the container.
- the stocker unit of the present invention is A base made of pillars or beams, which can be attached to the stocker frame, A pipe for supplying a clean gas provided along the base; A plurality of shelf holders with a purge function, which are attached to the base and arranged along the vertical direction or the horizontal direction;
- the shelf holder can support a container and includes a nozzle for supplying clean gas from the pipe to the container.
- a stocker that has a frame that can be attached to a plurality of shelf holders that do not have a clean gas supply nozzle in the vertical or horizontal direction, A base made of pillars or beams, a pipe for supplying clean gas provided along the base, and a nozzle that is attached to the base along the vertical direction or horizontal direction and supplies clean gas from the pipe Attaching a stocker unit comprising a plurality of shelf holders with a purge function to the stocker by attaching the base to the frame; Supplying clean gas from the nozzle to the container supported by the shelf holder; And execute.
- a purge function for supplying clean gas from the nozzle to the container can be added by attaching the stocker unit to the frame of the stocker.
- a stocker unit having a purge function and a shelf holder not having a purge function can be attached to the frame of the stocker.
- a stocker unit having a purge function can be incorporated into an existing stocker.
- the frame includes at least a pair of first pillars at a rear end of the storage space of the container
- the base is composed of at least a pair of second columns at the rear end of the storage space of the container, and the interval between the second columns is narrower than the interval between the first columns
- the 2nd pillar is located in front of the 1st pillar, and is attached to the 1st pillar, seeing from the storage space front of a container.
- the stocker unit When the stocker unit is installed in the stocker so that the second pillar of the stocker unit is located obliquely forward of the first pillar of the frame of the stocker, and the second pillar is attached to the first pillar, the stocker unit is Can be easily attached to the stocker.
- the shelf receiver with a purge function further includes a branch line for supplying clean gas from the pipe to the nozzle, and a valve for controlling the flow rate of the clean gas in the branch line,
- the pipe and the valve are provided on the rear side of the front end of the second column and on the front side of the rear end of the first column, as viewed from the front of the storage space of the container.
- the space behind the front end of the second pillar and ahead of the rear end of the first pillar tends to be an empty space that does not interfere with the container.
- a plurality of shelf holders not provided with clean gas supply nozzles are attached to the frame, and the stocker unit is attached to the frame. That is, a shelf holder that does not have a clean gas supply nozzle and a shelf holder with a purge function that has a clean gas supply nozzle coexist in the same stocker.
- Plan view of main part of stocker of embodiment 1 is an enlarged plan view of the main part of FIG.
- FIG. 1 to 3 show a stocker 2 and a stocker unit 12 of the embodiment.
- FIG. 1 shows the overall structure of the stocker 2, and for example, a space between a pair of shelves 4, 4 is used as a space for a conveying device, and a conveying device such as a stacker crane (not shown) travels.
- a loading / unloading load port (not shown) is provided in a part of the shelves 4 and 4 to exchange containers such as FOUP and SMIF pods with an overhead traveling vehicle (not shown).
- the transfer device exchanges containers between the load port and the shelf 4 or between the shelves 4 and 4.
- the space 6 side is the front and the opposite side is the rear.
- a plurality of pillars 8 are provided at the rear ends of the shelves 4 and 4, and a plurality of shelf supports 10 are attached to the pair of pillars 8 and 8 vertically.
- a stocker unit 12 having a purge function is attached to the pair of columns 8 and 8.
- the stocker unit 12 includes a pair of vertical columns 14 and 14 at the rear end thereof, and a purge line 18 composed of a pipe substantially parallel to the column 14, and dry nitrogen and clean dry air from a pipeline or the like provided in the factory. A clean gas such as can be supplied into the container.
- a plurality of shelf supports 16 are provided vertically so as to be supported by the pair of columns 14, 14, and the purge line 18 penetrates the shelf supports 16 up and down, and nozzles 19, 19 for blowing clean gas into the container;
- a nozzle 20 for exhausting clean gas from the container is provided on the shelf holder 16.
- One nozzle 19 may be provided per shelf holder 16, and two exhaust nozzles 20 may be provided on the left and right. When clean gas is naturally exhausted from the gap between the container body and the lid, the exhaust nozzle 20 is not necessary.
- a stock sensor 22 detects the presence or absence of a container supported by the shelf receiver 16.
- in-stock sensors 22 are provided for each shelf receiver 16, three or more may be provided, and the in-stock sensor 22 is not provided, and the container sensor 22 is provided on the basis of the data of the container being taken in and out of the shelf receiver 16. The presence or absence may be determined.
- FIGS. 2 and 3 show the details of the stocker unit 12.
- the rear end portion of the shelf receiver 16 is bent vertically upward to form a vertical plate 24, to which a control unit 26, a flow meter 36 and a valve 38 are attached.
- a branch line 34 for each shelf receiver 16 is connected to the purge line 18 by a joint 32.
- the control unit 26 opens a valve 38 in response to a signal from the stock sensor 22, and a flow meter 36 monitors the flow rate of the branch line 34. Feedback is made to 38 so that a constant flow of clean gas flows through the branch line 34.
- the branch line 34 is divided into two branches by a joint 39, and clean gas is introduced into the FOUP 44 from the nozzles 19 and 19 through the gas introduction hole of the FOUP 44.
- Reference numeral 45 is a cover of the FOUP 44, and 46 is a handle for the overhead traveling vehicle to hold. Nitrogen gas exhausted from the nozzle 20 is collected through an exhaust pipe 47 and an exhaust line 48 composed of a pipe substantially parallel to the column 14.
- Reference numeral 42 denotes an attachment member for attaching the shelf holder 10 to the column 8.
- the column 8 corresponds to the first column in the claims
- the column 14 corresponds to the second column
- the column 8 is the main part of the frame of the stocker 2.
- a space between the front end of the column 14 and the rear end of the column 8, particularly a space between the rear end of the FOUP 44 and the rear end of the column 8 tends to be an empty space. Therefore, the purge line 18, the control unit 26, the flow meter 36, the valve 38 and the like are accommodated in this space.
- the columns 14 and 14 are disposed obliquely in front of the columns 8 and 8, and the interval between the columns 14 and 14 is narrower than the interval between the columns 8 and 8.
- the pillar 14 is fastened to the pillar 8 by the L-shaped member 28 and the fastening member 30.
- the rear side of the FOUP 44 has a shape that tapers toward the rear end in plan view, that is, a shape in which the horizontal width becomes narrower.
- the shape may be an arc shape in plan view or a shape in which the left and right sides are cut out in a chamfered shape. Due to such a shape, the column 14 can be provided at a position where it does not interfere with the FOUP 44.
- the L-shaped member may be arranged on the rear end side of the column 14, and as shown in an enlarged view at the bottom of FIG. 2, for example, a cross-shaped attachment piece 31 is used. May be. Appropriate design changes can be made according to the configuration of the stocker.
- the horizontal width of the stocker unit 12 is almost the same as the width of the shelf holder 10, and the stocker unit 12 can be installed between the pillars 8 and 8 of the shelf 4. For this reason, for example, a purge function can be added by incorporating the stocker unit 12 into an existing stocker that does not have a purge function. Further, the stocker 2 can be provided with a shelf receiver 16 having a purge function and a shelf receiver 10 not equipped with a purge function. Can be replaced. *
- a plurality of shelf supports 16 are arranged vertically, but they may be arranged horizontally.
- a pair of beams are provided so as to overlap in the vertical direction, and the beams are attached to the beam of the frame of the stocker.
- the upper and lower sides of the vertical plate 24 are attached to a pair of horizontal beams.
- a plurality of shelf supports 10 are arranged in the longitudinal direction of the beam.
- the supply of clean gas to the purge line 18 is performed by a pipeline provided in the factory.
- a portable cylinder or the like may be used.
- a cylinder or the like for supplying clean gas to the purge line 18 is disposed at an appropriate position such as the lowermost part of the stocker unit 12.
- the stocker unit 12 is manufactured separately from the stocker 2 and attached to the stocker 2 using the pillars 8 and 8.
- the following effects can be obtained. 1) An existing stocker that does not have a purge function can be easily modified into a stocker 2 that has a purge function. 2) In the stocker 2, the shelf receiver 16 having the purge function and the shelf receiver 10 not having the purge function can be arranged at an arbitrary ratio. 3) By making the interval between the columns 14 and 14 smaller than the interval between the columns 8 and 8, the stocker unit 12 can be easily incorporated into the stocker 2 using the L-shaped member 28. 4) The pipe 18, the control unit 26, the flow meter 36, the valve 38, etc. can be arranged in the empty space on the rear end side of the FOUP 44.
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- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
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Abstract
Description
ストッカユニットとから成り、
前記ストッカユニットは、
柱または梁から成り、前記フレームに取り付けられているベースと、
前記ベースに沿って設けられているクリーンガスの供給用のパイプと、
複数個のパージ機能付き棚受けとから成り、
前記パージ機能付き棚受けは、前記ベースに取り付けられて、上下方向あるいは水平方向に沿って配列され、コンテナを支持自在で、かつコンテナに前記パイプからクリーンガスを供給するノズルを備えている。
柱または梁から成り、ストッカのフレームに取り付け自在なベースと、
前記ベースに沿って設けられているクリーンガスの供給用のパイプと、
前記ベースに取り付けられ、かつ上下方向あるいは水平方向に沿って配列されている、複数のパージ機能付き棚受けとを備え、
前記棚受けはコンテナを支持自在で、かつコンテナに前記パイプからクリーンガスを供給するノズルを備えている。
クリーンガスの供給用ノズルを備えない棚受けを、上下方向あるいは水平方向に沿って、複数取り付け自在なフレームを有するストッカに対して、
柱または梁から成るベースと、前記ベースに沿って設けられているクリーンガスの供給用のパイプと、前記ベースに上下方向あるいは水平方向に沿って取り付けられると共に、前記パイプからクリーンガスを供給するノズルを備えている、複数個のパージ機能付き棚受け、とから成るストッカユニットを、前記ベースを前記フレームに取り付けることにより、前記ストッカに取り付けるステップと、
前記棚受けに支持されているコンテナに、前記ノズルからクリーンガスを供給するステップ、
とを実行する。
前記ベースは、コンテナの収容スペース後端の、少なくとも一対の第2の柱から成り、 前記第2の柱の間隔は、前記第1の柱の間隔よりも狭く、
かつコンテナの収容スペース前方から見て、前記第2の柱は前記第1の柱の斜め前に位置して、前記第1の柱に取り付けられている。
前記パイプと前記バルブは、コンテナの収容スペース前方から見て、前記第2の柱の前端よりも後側で、かつ前記第1の柱の後端よりも前側に設けられている。
1) パージ機能を備えない既存のストッカを簡単に改造して、パージ機能を備えるストッカ2にできる。
2) ストッカ2では、パージ機能を備える棚受け16と備えない棚受け10とを任意の割合で配置できる。
3) 柱14,14の間隔を柱8,8の間隔よりも狭くすることにより、L字部材28を用いて、簡単にストッカユニット12をストッカ2に組み込むことができる。
4) FOUP44の後端側の空スペースに、パイプ18,制御部26,流量計36,バルブ38等を配置できる。
10,16 棚受け 12 ストッカユニット 18 パージライン
19,20 ノズル 22 在荷センサ 24 鉛直板
26 制御部 28 L字部材 30 締結部材
32,39 ジョイント 34 分岐ライン 36 流量計
38 バルブ 40,42 取り付け部材 44 FOUP
46 取手 47 排気パイプ 48 排気ライン
Claims (6)
- クリーンガスの供給用ノズルを備えない棚受けを、上下方向あるいは水平方向に沿って、複数取り付け自在なフレームと、
ストッカユニットとから成り、
前記ストッカユニットは、
柱または梁から成り、前記フレームに取り付けられているベースと、
前記ベースに沿って設けられているクリーンガスの供給用のパイプと、
複数個のパージ機能付き棚受けとから成り、
前記パージ機能付き棚受けは、前記ベースに取り付けられて、上下方向あるいは水平方向に沿って配列され、コンテナを支持自在で、かつコンテナに前記パイプからクリーンガスを供給するノズルを備えている、パージ機能を有するストッカ。 - 前記フレームは、コンテナの収容スペース後端に、少なくとも一対の第1の柱を備え、 前記ベースは、コンテナの収容スペース後端の、少なくとも一対の第2の柱から成り、 前記第2の柱の間隔は、前記第1の柱の間隔よりも狭く、
かつコンテナの収容スペース前方から見て、前記第2の柱は前記第1の柱の斜め前に位置して、前記第1の柱に取り付けられていることを特徴とする、請求項1のパージ機能を備えたストッカ。 - 前記パージ機能付き棚受けは、前記パイプからクリーンガスを前記ノズルへ供給する分岐ラインと、分岐ラインでのクリーンガスの流量を制御するバルブ、とをさらに備え、
前記パイプと前記バルブは、コンテナの収容スペース前方から見て、前記第2の柱の前端よりも後側で、かつ前記第1の柱の後端よりも前側に設けられていることを特徴とする、請求項2のパージ機能を備えたストッカ。 - 前記フレームにクリーンガスの供給用ノズルを備えない棚受けが複数個取り付けられると共に、前記フレームに前記ストッカユニットが取り付けられていることを特徴とする、請求項2または3のパージ機能を備えたストッカ。
- 柱または梁から成り、ストッカのフレームに取り付け自在なベースと、
前記ベースに沿って設けられているクリーンガスの供給用のパイプと、
前記ベースに取り付けられ、かつ上下方向あるいは水平方向に沿って配列されている、複数のパージ機能付き棚受けとから成り、
前記棚受けはコンテナを支持自在で、かつコンテナに前記パイプからクリーンガスを供給するノズルを備えている、ストッカユニット。 - クリーンガスの供給用ノズルを備えない棚受けを、上下方向あるいは水平方向に沿って、複数取り付け自在なフレームを有するストッカに対して、
柱または梁から成るベースと、前記ベースに沿って設けられているクリーンガスの供給用のパイプと、前記ベースに上下方向あるいは水平方向に沿って取り付けられると共に、前記パイプからクリーンガスを供給するノズルを備えている、複数個のパージ機能付き棚受け、とから成るストッカユニットを、前記ベースを前記フレームに取り付けることにより、前記ストッカに取り付けるステップと、
前記棚受けに支持されているコンテナに、前記ノズルからクリーンガスを供給するステップ、
とを実行するコンテナへのクリーンガスの供給方法。
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020157004131A KR101679734B1 (ko) | 2012-08-21 | 2013-06-21 | 퍼지 기능을 구비한 스토커와, 스토커 유닛 및 클린 가스의 공급 방법 |
US14/421,215 US9878353B2 (en) | 2012-08-21 | 2013-06-21 | Stocker provided with purging functionality, stocker unit, and method for supplying cleaning gas |
JP2014531533A JP6021046B2 (ja) | 2012-08-21 | 2013-06-21 | パージ機能を備えたストッカと、ストッカユニット |
CN201380043277.6A CN104603032B (zh) | 2012-08-21 | 2013-06-21 | 具备清洗功能的储料器、储料器单元以及洁净气体的供给方法 |
EP13830946.3A EP2889235B1 (en) | 2012-08-21 | 2013-06-21 | Stocker provided with purging functionality, stocker unit, and method for supplying cleaning gas |
IL236345A IL236345A (en) | 2012-08-21 | 2014-12-18 | Storage device with purification functionality, storage unit, and cleaning gas supply method |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012182191 | 2012-08-21 | ||
JP2012-182191 | 2012-08-21 |
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WO2014030421A1 true WO2014030421A1 (ja) | 2014-02-27 |
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PCT/JP2013/067083 WO2014030421A1 (ja) | 2012-08-21 | 2013-06-21 | パージ機能を備えたストッカと、ストッカユニット及びクリーンガスの供給方法 |
Country Status (8)
Country | Link |
---|---|
US (1) | US9878353B2 (ja) |
EP (1) | EP2889235B1 (ja) |
JP (1) | JP6021046B2 (ja) |
KR (1) | KR101679734B1 (ja) |
CN (1) | CN104603032B (ja) |
IL (1) | IL236345A (ja) |
TW (1) | TWI570042B (ja) |
WO (1) | WO2014030421A1 (ja) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101609338B1 (ko) * | 2015-03-16 | 2016-04-05 | 크린팩토메이션 주식회사 | 웨이퍼 캐리어를 천정에 보관하고 처리하는 장치 |
WO2016189975A1 (ja) * | 2015-05-26 | 2016-12-01 | 村田機械株式会社 | 多段棚及びこれを用いた天井走行車システム |
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---|---|---|---|---|
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Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11168135A (ja) * | 1997-12-03 | 1999-06-22 | Toshiba Corp | 基板保管装置および基板保管方法 |
JPH11314703A (ja) * | 1998-04-30 | 1999-11-16 | Ebara Corp | 基板保管装置 |
JP2000340641A (ja) * | 1999-05-27 | 2000-12-08 | Kokusai Electric Co Ltd | 基板処理装置 |
JP2008159734A (ja) * | 2006-12-22 | 2008-07-10 | Asyst Technologies Japan Inc | コンテナの搬送システム及び測定用コンテナ |
WO2008106622A2 (en) | 2007-02-28 | 2008-09-04 | Entegris, Inc. | Purge system for a substrate container |
JP2010182747A (ja) * | 2009-02-03 | 2010-08-19 | Dan Takuma:Kk | 保管システムおよび保管方法 |
JP2010241515A (ja) | 2009-04-01 | 2010-10-28 | Murata Machinery Ltd | 保管倉庫 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6579052B1 (en) * | 1997-07-11 | 2003-06-17 | Asyst Technologies, Inc. | SMIF pod storage, delivery and retrieval system |
US6079927A (en) * | 1998-04-22 | 2000-06-27 | Varian Semiconductor Equipment Associates, Inc. | Automated wafer buffer for use with wafer processing equipment |
US6506009B1 (en) * | 2000-03-16 | 2003-01-14 | Applied Materials, Inc. | Apparatus for storing and moving a cassette |
US6745908B2 (en) * | 2001-06-30 | 2004-06-08 | Applied Materials, Inc. | Shelf module adapted to store substrate carriers |
JP2003292118A (ja) * | 2002-04-05 | 2003-10-15 | Murata Mach Ltd | 自動倉庫 |
JP4378652B2 (ja) * | 2007-01-10 | 2009-12-09 | 株式会社ダイフク | 浄化空気通風式の物品保管設備 |
JP4688000B2 (ja) * | 2008-02-06 | 2011-05-25 | 株式会社ダイフク | 物品収納設備 |
TWI357474B (en) | 2008-10-14 | 2012-02-01 | Gudeng Prec Industral Co Ltd | Gas filling socket, gas filling socket set, and ga |
-
2013
- 2013-06-21 CN CN201380043277.6A patent/CN104603032B/zh active Active
- 2013-06-21 JP JP2014531533A patent/JP6021046B2/ja active Active
- 2013-06-21 EP EP13830946.3A patent/EP2889235B1/en active Active
- 2013-06-21 WO PCT/JP2013/067083 patent/WO2014030421A1/ja active Application Filing
- 2013-06-21 KR KR1020157004131A patent/KR101679734B1/ko active IP Right Grant
- 2013-06-21 US US14/421,215 patent/US9878353B2/en active Active
- 2013-08-15 TW TW102129259A patent/TWI570042B/zh active
-
2014
- 2014-12-18 IL IL236345A patent/IL236345A/en active IP Right Grant
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11168135A (ja) * | 1997-12-03 | 1999-06-22 | Toshiba Corp | 基板保管装置および基板保管方法 |
JPH11314703A (ja) * | 1998-04-30 | 1999-11-16 | Ebara Corp | 基板保管装置 |
JP2000340641A (ja) * | 1999-05-27 | 2000-12-08 | Kokusai Electric Co Ltd | 基板処理装置 |
JP2008159734A (ja) * | 2006-12-22 | 2008-07-10 | Asyst Technologies Japan Inc | コンテナの搬送システム及び測定用コンテナ |
WO2008106622A2 (en) | 2007-02-28 | 2008-09-04 | Entegris, Inc. | Purge system for a substrate container |
JP2010520625A (ja) | 2007-02-28 | 2010-06-10 | インテグリス・インコーポレーテッド | 基板コンテナ用パージシステム |
JP2010182747A (ja) * | 2009-02-03 | 2010-08-19 | Dan Takuma:Kk | 保管システムおよび保管方法 |
JP2010241515A (ja) | 2009-04-01 | 2010-10-28 | Murata Machinery Ltd | 保管倉庫 |
Non-Patent Citations (1)
Title |
---|
See also references of EP2889235A4 |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2017506836A (ja) * | 2014-09-01 | 2017-03-09 | ローツェ システムズ コーポレーション | パージモジュール及びそれを含むロードポート |
US10141210B2 (en) | 2014-09-01 | 2018-11-27 | Rorze Systems Corporation | Purge module and load port having the same |
KR101609338B1 (ko) * | 2015-03-16 | 2016-04-05 | 크린팩토메이션 주식회사 | 웨이퍼 캐리어를 천정에 보관하고 처리하는 장치 |
US10141213B2 (en) | 2015-03-16 | 2018-11-27 | Daifuku Co., Ltd. | Apparatus for storing and handling article at ceiling |
US10453724B2 (en) | 2015-03-16 | 2019-10-22 | Daifuku Co., Ltd. | Apparatus for storing and handling article at ceiling |
WO2016189975A1 (ja) * | 2015-05-26 | 2016-12-01 | 村田機械株式会社 | 多段棚及びこれを用いた天井走行車システム |
JP2017050425A (ja) * | 2015-09-02 | 2017-03-09 | 株式会社ダイフク | 保管設備 |
Also Published As
Publication number | Publication date |
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CN104603032B (zh) | 2016-12-07 |
IL236345A (en) | 2016-11-30 |
US20150202664A1 (en) | 2015-07-23 |
EP2889235A4 (en) | 2016-04-27 |
TW201418121A (zh) | 2014-05-16 |
EP2889235A1 (en) | 2015-07-01 |
CN104603032A (zh) | 2015-05-06 |
TWI570042B (zh) | 2017-02-11 |
EP2889235B1 (en) | 2020-08-05 |
IL236345A0 (en) | 2015-02-26 |
KR101679734B1 (ko) | 2016-11-25 |
JP6021046B2 (ja) | 2016-11-02 |
KR20150034272A (ko) | 2015-04-02 |
JPWO2014030421A1 (ja) | 2016-07-28 |
US9878353B2 (en) | 2018-01-30 |
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