WO2013139061A1 - 基板的检测方法及装置 - Google Patents

基板的检测方法及装置 Download PDF

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Publication number
WO2013139061A1
WO2013139061A1 PCT/CN2012/074754 CN2012074754W WO2013139061A1 WO 2013139061 A1 WO2013139061 A1 WO 2013139061A1 CN 2012074754 W CN2012074754 W CN 2012074754W WO 2013139061 A1 WO2013139061 A1 WO 2013139061A1
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light
substrate
light source
detecting
detecting device
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PCT/CN2012/074754
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English (en)
French (fr)
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郑文达
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深圳市华星光电技术有限公司
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Priority to US13/515,934 priority Critical patent/US20130248692A1/en
Publication of WO2013139061A1 publication Critical patent/WO2013139061A1/zh

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/94—Investigating contamination, e.g. dust

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  • the present invention relates to the field of liquid crystal panel technology, and in particular, to a method and device for detecting a substrate.
  • Liquid crystal display (Liquid Crystal Display, LCD) is a flat panel display device that uses the characteristics of liquid crystal materials to display images (Flat Panel) Display, FPD), which has the advantages of light weight, low driving voltage and low power consumption compared to other display devices, has become the mainstream product in the entire consumer market.
  • LCD Liquid Crystal Display
  • FPD Full Panel Display
  • the liquid crystal panel is the most important component of the liquid crystal display.
  • the manufacturing process of the liquid crystal panel is mainly to laminate the thin film transistor array substrate and the color filter substrate, and the liquid crystal layer is disposed between the two substrates.
  • the thin film transistor array substrate and the color filter substrate are formed by depositing a thin film layer, exposing, etching, or the like on the substrate.
  • the substrate is subjected to the above process, if impurities are adhered to the substrate, the process may be adversely affected or the substrate may be scrapped, which seriously affects the yield of the liquid crystal panel and causes waste of the substrate.
  • the glass crumb is the impurity that has the greatest influence on the yield of the liquid crystal panel. Therefore, there is an urgent need for a method for quickly detecting the presence of glass debris on the substrate.
  • a primary object of the present invention is to provide a substrate detecting apparatus for quickly detecting the presence of glass swarf on a substrate.
  • the invention provides a substrate detecting device, comprising a light source, a light detecting device and a control device.
  • the light source and the light detecting device are all disposed on the same side of the substrate, and the traveling direction of the light emitted by the light source is sandwiched by the substrate.
  • An angular setting the light detecting device receives the direction of the light at an angle with the traveling direction of the light emitted by the light source; and the control device is connected to the light detecting device for controlling the light detecting device to move in a preset trajectory.
  • the direction of travel of the light emitted by the light source is 0-90° from the substrate.
  • the light detecting device receives an angle of 70-110° between the direction of the light and the traveling direction of the light emitted by the light source.
  • control device is configured to control the movement of the light detecting device in the up, down, left, and right directions with respect to the substrate.
  • the light detecting device receives an angle of 90° between the direction of the light and the traveling direction of the light emitted by the light source.
  • the two light detecting devices are two in a symmetrical structure centered on the light source.
  • the present invention also provides a substrate detecting device, comprising a light source and a light detecting device, wherein the light source and the light detecting device are disposed on the same side of the substrate, and the traveling direction of the light emitted by the light source is at an angle with the substrate.
  • the direction in which the light detecting device receives the light is set at an angle to the traveling direction of the light emitted by the light source.
  • the direction of travel of the light emitted by the light source is 0-90° from the substrate.
  • the light detecting device receives an angle of 70-110° between the direction of the light and the traveling direction of the light emitted by the light source.
  • the light detecting device receives an angle of 90° between the direction of the light and the traveling direction of the light emitted by the light source.
  • the two light detecting devices are two in a symmetrical structure centered on the light source.
  • the invention further provides a method for detecting a substrate, comprising the following steps:
  • the light source placement and the light detecting device are placed on the same side of the substrate, and the traveling direction of the light emitted by the light source is disposed at an angle with the substrate, and the traveling direction of the light emitted by the light source is set at an angle with the direction in which the light detecting device receives the light, and Turn on the light source and the light detecting device;
  • the light detecting device If the light detecting device detects the light signal, it returns the result information of the glass swarf.
  • the direction of travel of the light emitted by the light source is 0-90° from the substrate.
  • the light detecting device receives an angle of 70-110° between the direction of the light and the traveling direction of the light emitted by the light source.
  • the light detecting device receives an angle of 90° between the direction of the light and the traveling direction of the light emitted by the light source.
  • the method further includes:
  • the light detecting device After the light source and the light detecting device are turned on, the light detecting device is controlled to move in a preset trajectory.
  • the controlling the light detecting device to move in a preset trajectory specifically controls the movement of the light detecting device in the up, down, left and right directions with respect to the substrate.
  • the light detecting device can receive only the light refracted by the light source through the glass swarf, so that the glass swarf can be quickly detected on the substrate.
  • FIG. 1 is a schematic structural view of an embodiment of a detecting device for a substrate of the present invention
  • FIG. 2 is a schematic view showing a path of light rays after a substrate on which a light source is irradiated with glass chips in the detecting device of the substrate of the present invention
  • FIG. 3 is a schematic flow chart of an embodiment of a method for detecting a substrate of the present invention
  • FIG. 4 is a flow chart showing another embodiment of a method for detecting a substrate of the present invention.
  • FIG. 1 is a schematic structural view of an embodiment of a substrate detecting device according to the present invention.
  • the detecting device of the substrate includes a light source 1, and a light detecting device 2 for detecting the substrate 3.
  • the light source 1 and the light detecting device 2 are both disposed on the same side of the substrate 3, and the light source 1 emits
  • the traveling direction of the light is disposed at an angle with the substrate 3, and the direction in which the light detecting device 2 receives the light is set at an angle to the traveling direction of the light emitted by the light source 1.
  • the detecting device of the above substrate the light emitted by the light source 1 may reflect or be absorbed when encountering other impurities; and the refraction occurs when the glass swarf is encountered, as shown in FIG. 2 . Therefore, the photodetecting device 2 is placed at an appropriate position, even though it can only receive the light refracted by the glass swarf, and cannot receive the light reflected by the substrate 3 or other impurities, so that the substrate 3 can be quickly detected. Is there glass swarf?
  • the angle of travel of the light emitted by the light source 1 and the substrate 3 is 0-90, and the angle between the direction in which the light detecting device 2 receives the light and the substrate 3 is 0-90.
  • the angle between the traveling direction of the light emitted by the light source 1 and the direction in which the light detecting device 2 receives the light is 70-110. Among them, the angle is preferably 90°.
  • the detecting device of the substrate may further include a control device (not shown) connected to the light detecting device 2 for controlling the light detecting device 2 Move in a preset trajectory.
  • FIG. 2 it is a schematic diagram of the path of the light after the light source is irradiated with the glass swarf in the detecting device of the substrate of the present invention.
  • the light detecting device 2 is controlled to move in the up, down, left, and right directions with respect to the substrate 3.
  • the angle at which the light detecting means 2 receives the light and the direction of travel of the light emitted by the light source 1 must be between 70 and 110 degrees.
  • the photodetecting device 2 may be provided in plural, for example, two, and has a symmetrical structure centering on the light source.
  • FIG. 3 is a flow chart showing an embodiment of a method for detecting a substrate of the present invention.
  • the method for detecting the substrate includes the following steps:
  • Step S01 placing the substrate 3 on the inspection platform
  • Step S02 the light source 1 and the light detecting device 2 are respectively placed on the same side of the substrate 3, and the traveling direction of the light emitted by the light source 1 is disposed at an angle with the substrate 3, and the traveling direction of the light emitted by the light source 1 and the light detecting device 2 The direction of receiving light is set at an angle, and the light source 1 and the light detecting device 2 are turned on;
  • the angle of travel of the light emitted by the light source 1 and the substrate 3 is 0-90, and the angle between the direction in which the light detecting device 2 receives the light and the substrate 3 is 0-90.
  • the angle between the traveling direction of the light emitted by the light source 1 and the traveling direction of the light received by the light detecting device 2 is 70-110. Among them, the angle is preferably 90°.
  • step S03 if the light detecting device 2 detects the light signal, the result information of the glass swarf is returned.
  • the above-mentioned substrate detection method mainly utilizes the physical characteristics of light, that is, the light emitted by the light source 1 may reflect or be absorbed when encountering other impurities, and refraction occurs when the glass swarf is encountered, as shown in FIG. Therefore, the photodetecting device 2 is placed at an appropriate position, even though it can only receive the light refracted by the glass swarf, and cannot receive the light reflected by the substrate 3 or other impurities, so that the substrate 3 can be quickly detected. Is there glass swarf?
  • step S02 is a schematic flow chart of another embodiment of a method for detecting a substrate according to the present invention.
  • the method for detecting the substrate of the embodiment after step S02, the method further includes:
  • Step S04 controlling the light detecting device 2 to move in a preset trajectory.
  • the light detecting device 2 can be controlled to move in a preset trajectory by the control device. As shown in FIG. 2, the light detecting device 2 can be controlled to move up, down, left, and right with respect to the substrate. Of course, when moving, the angle of the direction of travel of the refracted ray received by the light detecting device 2 and the direction of travel of the light emitted by the light source 1 must be between 70 and 110 degrees. Further, the photodetecting device 2 may be provided in plural, for example, two, and has a symmetrical structure centering on the light source.

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Abstract

一种基板检测装置及方法，该基板检测装置包括光源（1）、光检测装置（2）及控制装置，所述光源（1）、光检测装置（2）均设置在基板（3）的同一侧，且所述光源（1）发出的光线的行进方向与基板（3）呈夹角设置，所述光检测装置（2）接收光线的方向与光源（1）发出的光线的行进方向呈夹角设置；所述控制装置与光检测装置（2）连接，用于控制光检测装置（2）以预置的轨迹运动。通过设置光源（1）及光检测装置（2）的合适位置，使光检测装置（2）可以仅接收到光源（1）经过玻璃屑发生折射的光线，从而可以快速地检测出基板（3）上是否存在玻璃屑。

Description

基板的检测方法及装置
技术领域
本发明涉及液晶面板技术领域，尤其涉及一种基板的检测方法及装置。
背景技术
液晶显示器（Liquid Crystal Display，LCD）是利用液晶材料的特性来显示图像的一种平板显示装置（Flat Panel Display，FPD），其相较于其他显示装置而言具轻薄、低驱动电压及低功耗等优点，已经成为整个消费市场上的主流产品。
液晶面板是液晶显示器最主要的组成元件，液晶面板的制作工艺主要为将薄膜式晶体管阵列基板及彩色滤光片基板贴合，并将液晶层设置在两基板之间。该薄膜式晶体管阵列基板及彩色滤光片基板均为在基板上通过沉积薄膜层、曝光、蚀刻等制程而形成。基板在进行上述制程时，若基板上粘附有杂质，会对上述制程产生不良影响甚至是造成基板报废，严重影响液晶面板的良率，造成基板的浪费。而玻璃碎屑则是对液晶面板的良率影响最大的杂质，因此，急切需要一种能快速检测基板上是否存在玻璃碎屑的方法。
发明内容
本发明的主要目的是提供一种基板的检测装置，旨在快速地检测出基板上是否存在玻璃屑。
本发明提供了一种基板的检测装置，包括光源、光检测装置及控制装置，所述光源、光检测装置均设置在基板的同一侧，且所述光源发出的光线的行进方向与基板呈夹角设置，所述光检测装置接收光线的方向与光源发出的光线的行进方向呈夹角设置；所述控制装置与光检测装置连接，用于控制光检测装置以预置的轨迹运动。
优选地，所述光源发出的光线的行进方向与基板的夹角为0-90°。
优选地，所述光检测装置接收光线的方向与光源发出的光线的行进方向形成的夹角为70-110°。
优选地，所述控制装置用于控制光检测装置相对于基板进行上、下、左、右方向上的运动。
优选地，所述光检测装置接收光线的方向与光源发出的光线的行进方向形成的夹角为90°。
优选地，所述光检测装置为两个，以光源为中心呈对称结构。
本发明还提供了一种基板的检测装置，包括光源、光检测装置，所述光源、光检测装置均设置在基板的同一侧，且所述光源发出的光线的行进方向与基板呈夹角设置，所述光检测装置接收光线的方向与光源发出的光线的行进方向呈夹角设置。
优选地，所述光源发出的光线的行进方向与基板的夹角为0-90°。
优选地，所述光检测装置接收光线的方向与光源发出的光线的行进方向形成的夹角为70-110°。
优选地，所述光检测装置接收光线的方向与光源发出的光线的行进方向形成的夹角为90°。
优选地，所述光检测装置为两个，以光源为中心呈对称结构。
本发明又提供了一种基板的检测方法，包括以下步骤：
将基板置于检测台上；
将光源放置及光检测装置放置在基板的同一侧，且光源发出的光线的行进方向与基板呈夹角设置，光源发出的光线的行进方向与光检测装置接收光线的方向呈夹角设置，并开启光源及光检测装置；
若光检测装置检测到光信号，则返回存在玻璃屑的结果信息。
优选地，所述光源发出的光线行进方向与基板的夹角为0-90°。
优选地，所述光检测装置接收光线的方向与光源发出的光线的行进方向形成的夹角为70-110°。
优选地，所述光检测装置接收光线的方向与光源发出的光线的行进方向形成的夹角为90°。
优选地，所述方法还包括：
在开启光源及光检测装置后，控制光检测装置以预置的轨迹运动。
优选地，所述控制光检测装置以预置的轨迹运动具体为控制光检测装置相对于基板进行上、下、左、右方向上的运动。
本发明通过设置光源及光检测装置的恰当位置，使光检测装置可以仅接收到光源经过玻璃屑发生折射的光线，从而可以快速地检测出基板上是否存在玻璃屑。
附图说明
图1是本发明基板的检测装置一实施例的结构示意图；
图2是本发明基板的检测装置中光源照射有玻璃屑的基板后的光线的路径示意图；
图3是本发明基板的检测方法一实施例的流程示意图；
图4是本发明基板的检测方法另一实施例的流程示意图。
本发明目的的实现、功能特点及优点将结合实施例，参照附图做进一步说明。
具体实施方式
以下将结合附图及实施例，对实现发明目的的技术方案作详细说明。应当理解，此处所描述的具体实施例仅仅用以解释本发明，并不用于限定本发明。
图1是本发明提出的一种基板的检测装置一实施例的结构示意图。
参照图1，该基板的检测装置包括光源1、光检测装置2，其用于检测基板3，所述光源1、光检测装置2均设置在基板3的同一侧，且所述光源1发出的光线的行进方向与基板3呈夹角设置，所述光检测装置2接收光线的方向与光源1发出的光线的行进方向呈夹角设置。
上述基板的检测装置，在光源1发出的光线，遇到其他杂质，可能会反射或被吸收；而遇到玻璃屑时则会发生折射，如图2所示。因此，将光检测装置2设置在适当的位置，即使其仅能接收到经过玻璃屑发生折射后的光线，而不能接收经基板3或其他杂质发生反射的光线，从而可以快速检测出基板3上是否有玻璃屑。
上述光源1发出的光线的行进方向与基板3的夹角为0-90°，光检测装置2接受光线的方向与基板3的夹角为0-90°。上述光源1发出的光线的行进方向与光检测装置2接收光线的方向形成的夹角为70-110°。其中，该夹角优选为90°。
为了使得光检测装置2能够更准确的检测玻璃屑，上述基板的检测装置还可以包括控制装置（图中未示出），所述控制装置与光检测装置2连接，用于控制光检测装置2以预置的轨迹运动。如图2所示，其是本发明基板的检测装置中光源照射有玻璃屑的基板后的光线的路径示意图。控制光检测装置2相对于基板3进行上、下、左、右方向上的运动。当然，在运动时，光检测装置2接收光线的方向与光源1发出的光线的行进方向形成的夹角必须在70-110°。另外，该光检测装置2也可以设置多个，例如两个，以光源为中心呈对称结构。
图3是本发明基板的检测方法一实施例的流程示意图。
参照图3，该基板的检测方法，包括以下步骤：
步骤S01、将基板3置于检测台上；
步骤S02、将光源1及光检测装置2分别放置在基板3的同一侧，且光源1发出的光线的行进方向与基板3呈夹角设置，光源1发出的光线的行进方向与光检测装置2接收光线的方向呈夹角设置，并开启光源1及光检测装置2；
上述光源1发出的光线的行进方向与基板3的夹角为0-90°，光检测装置2接受光线的方向与基板3的夹角为0-90°。上述光源1发出的光线的行进方向与光检测装置2接收光线的行进方向之间的夹角为70-110°。其中，该夹角优选为90°。
步骤S03、若光检测装置2检测到光信号，则返回存在玻璃屑的结果信息。
上述基板的检测方法，主要利用了光的物理特性，即光源1发出的光线，遇到其他杂质，可能会反射或被吸收；而遇到玻璃屑时则会发生折射，如图2所示。因此，将光检测装置2设置在适当的位置，即使其仅能接收到经过玻璃屑发生折射后的光线，而不能接收经基板3或其他杂质发生反射的光线，从而可以快速检测出基板3上是否有玻璃屑。
参照图4，其为本发明基板的检测方法另一实施例的流程示意图。在上述方法实施例的基础上，本实施例基板的检测方法中，步骤S02之后还包括：
步骤S04、控制光检测装置2以预置的轨迹运动。
为了使得光检测装置2能够更准确的检测玻璃屑，可以通过控制装置来控制光检测装置2以预置的轨迹运动。如图2所示，可以控制光检测装置2相对于基板进行上、下、左、右的运动。当然，在运动时，光检测装置2接收到的折射光线的行进方向与光源1发出的光线的行进方向形成的夹角必须在70-110°。另外，该光检测装置2也可以设置多个，例如两个，以光源为中心呈对称结构。
以上所述仅为本发明的优选实施例，并非因此限制本发明的专利范围，凡是利用本发明说明书及附图内容所作的等效结构或流程变换，或直接或间接运用在其他相关的技术领域，均同理包括在本发明的专利保护范围内。

Claims (18)

  1. 一种基板的检测装置，其特征在于，包括光源、光检测装置及控制装置，所述光源、光检测装置均设置在基板的同一侧，且所述光源发出的光线的行进方向与基板呈夹角设置，所述光检测装置接收光线的方向与光源发出的光线的行进方向呈夹角设置；所述控制装置与光检测装置连接，用于控制光检测装置以预置的轨迹运动。
  2. 根据权利要求1所述的基板的检测装置，其特征在于，所述光源发出的光线的行进方向与基板的夹角为0-90°。
  3. 根据权利要求2所述的基板的检测装置，其特征在于，所述光检测装置接收光线的方向与光源发出的光线的行进方向形成的夹角为70-110°。
  4. 根据权利要求3所述的基板的检测装置，其特征在于，所述控制装置用于控制光检测装置相对于基板进行上、下、左、右方向上的运动。
  5. 根据权利要求4所述的基板的检测装置，其特征在于，所述光检测装置接收光线的方向与光源发出的光线的行进方向形成的夹角为90°。
  6. 根据权利要求1所述的基板的检测装置，其特征在于，所述光检测装置为两个，以光源为中心呈对称结构。
  7. 一种基板的检测装置，其特征在于，包括光源、光检测装置，所述光源、光检测装置均设置在基板的同一侧，且所述光源发出的光线的行进方向与基板呈夹角设置，所述光检测装置接收光线的方向与光源发出的光线的行进方向呈夹角设置。
  8. 根据权利要求7所述的基板的检测装置，其特征在于，所述光源发出的光线的行进方向与基板的夹角为0-90°。
  9. 根据权利要求8所述的基板的检测装置，其特征在于，所述光检测装置接收光线的方向与光源发出的光线的行进方向形成的夹角为70-110°。
  10. 根据权利要求9所述的基板的检测装置，其特征在于，所述光检测装置接收光线的方向与光源发出的光线的行进方向形成的夹角为90°。
  11. 根据权利要求7所述的基板的检测装置，其特征在于，所述光检测装置为两个，以光源为中心呈对称结构。
  12. 种基板的检测方法，其特征在于，包括以下步骤：
    将基板置于检测台上；
    将光源放置及光检测装置放置在基板的同一侧，且光源发出的光线的行进方向与基板呈夹角设置，光源发出的光线的行进方向与光检测装置接收光线的方向呈夹角设置，并开启光源及光检测装置；
    若光检测装置检测到光信号，则返回存在玻璃屑的结果信息。
  13. 根据权利要求12所述的基板的检测方法，其特征在于，所述光源发出的光线行进方向与基板的夹角为0-90°。
  14. 根据权利要求13所述的基板的检测方法，其特征在于，所述光检测装置接收光线的方向与光源发出的光线的行进方向形成的夹角为70-110°。
  15. 据权利要求14所述的基板的检测方法，其特征在于，所述光检测装置接收光线的方向与光源发出的光线的行进方向形成的夹角为90°。
  16. 权利要求12所述的基板的检测方法，其特征在于，所述光检测装置接收光线的方向与光源发出的光线的行进方向形成的夹角为70-110°
  17. 据权利要求12所述的基板的检测方法，其特征在于，还包括： 在开启光源及光检测装置后，控制光检测装置以预置的轨迹运动。
  18. 根据权利要求17所述的基板的检测方式，其特征在于，所述控制光检测装置以预置的轨迹运动具体为控制光检测装置相对于基板进行上、下、左、右方向上的运动。
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