WO2013084910A1 - 超音波トランスデューサー - Google Patents

超音波トランスデューサー Download PDF

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Publication number
WO2013084910A1
WO2013084910A1 PCT/JP2012/081454 JP2012081454W WO2013084910A1 WO 2013084910 A1 WO2013084910 A1 WO 2013084910A1 JP 2012081454 W JP2012081454 W JP 2012081454W WO 2013084910 A1 WO2013084910 A1 WO 2013084910A1
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WO
WIPO (PCT)
Prior art keywords
piezoelectric element
ultrasonic transducer
element layer
opening
layer
Prior art date
Application number
PCT/JP2012/081454
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English (en)
French (fr)
Japanese (ja)
Inventor
西江純一
近藤親史
太田順司
Original Assignee
株式会社村田製作所
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社村田製作所 filed Critical 株式会社村田製作所
Priority to KR1020147015132A priority Critical patent/KR101516654B1/ko
Priority to JP2013525021A priority patent/JP5574050B2/ja
Priority to CN201280049791.6A priority patent/CN103875257B/zh
Publication of WO2013084910A1 publication Critical patent/WO2013084910A1/ja

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B06B1/0607—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements
    • B06B1/0611—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements in a pile
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure

Definitions

  • This invention relates to an ultrasonic transducer having a structure in which a piezoelectric element layer and a matching layer are laminated.
  • the present invention relates to an ultrasonic transducer in which a piezoelectric element layer vibrates in the thickness direction in a stacking direction of a piezoelectric element layer and a matching layer.
  • the ultrasonic transducer is configured to include a piezoelectric element layer for transmitting or receiving a sound wave.
  • a matching layer for matching acoustic impedance may be provided between the piezoelectric element layer and the outside world.
  • FIG. 8A is a diagram for explaining a configuration example of the ultrasonic transducer according to the first conventional example.
  • the ultrasonic transducer 111 includes a piezoelectric element layer 112, a matching layer 113, an input / output terminal 114, and a sound absorbing material 115.
  • the piezoelectric element layer 112 is configured in a flat plate shape.
  • the matching layer 113 has an opening into which the piezoelectric element layer 112 is fitted.
  • the piezoelectric element layer 112 is bonded to the inner bottom surface of the opening of the matching layer 113, and is entirely held in the opening of the matching layer 113.
  • the sound absorbing material 115 is filled so as to cover the piezoelectric element layer 112 in the opening of the matching layer 113.
  • the input / output terminal 114 passes through the sound absorbing material 115 and is connected to the electrode of the piezoelectric element layer 112.
  • an ultrasonic transducer When mounting an ultrasonic transducer having such a configuration on a mounting board, the acoustic wave characteristics may become unstable due to the bottom surface of the matching layer coming into contact with the mounting board. In addition, since the entire matching layer is exposed to the outside, the durability performance such as weather resistance and impact resistance is poor, and the matching layer may be damaged and the sound wave characteristics may be deteriorated. Therefore, in general, a case is provided, and an ultrasonic transducer is configured by accommodating a matching layer and a piezoelectric element layer in the case.
  • FIG. 8B is a diagram illustrating a configuration example of the ultrasonic transducer according to the second conventional example.
  • the ultrasonic transducer 121 includes a piezoelectric element layer 122, a matching layer 123, an input / output terminal 124, a sound absorbing material 125, a support material 126, and a case 127.
  • the piezoelectric element layer 122 is configured in a flat plate shape.
  • the matching layer 123 has an opening into which the piezoelectric element layer 122 is fitted.
  • the piezoelectric element layer 122 is bonded to the inner bottom surface of the opening of the matching layer 123.
  • the sound absorbing material 125 is disposed on the back side of the piezoelectric element layer 122.
  • the support material 126 is a cylindrical member that surrounds the sound absorbing material 125, and is joined to the bottom surface of the matching layer 123.
  • the case 127 is a cylindrical member surrounding the support material 126. The support member 126 is held by the case 127 so that a part of the matching layer 123 protrudes from the case 127. The case 127 is in contact with the side surface of the matching layer 123 to enhance the durability performance of the matching layer 123.
  • the ultrasonic transducer having such a configuration is configured such that the piezoelectric element layer 122 vibrates in the plane direction.
  • the area vibration of the piezoelectric element layer 122 is converted into bending vibration between the piezoelectric element layer 122 and the matching layer 123. Sound waves will be transmitted from the surface of the.
  • the acoustic characteristics vary depending on the bonding strength, contact pressure, physical property variation, and position variation of each part. (Sensitivity) varies.
  • the ultrasonic transducer may be used as a double feed detection sensor for detecting double feed of a sheet by a printing machine or the like. Since a double feed detection sensor uses absorption and reflection of sound waves on an extremely thin sheet, it is necessary to use sound waves in a higher frequency band than sensors for other applications. In order to use sound waves in the high frequency band, it is necessary to downsize the ultrasonic transducer. However, if the ultrasonic transducer according to the conventional example is downsized as it is, the vibration area at the center of the vibration surface is significantly reduced. It is unavoidable that the sound wave characteristics are deteriorated. In addition, unnecessary vibration occurs at a frequency near the resonance frequency, and when the resonance frequency shifts due to material variation or the like, the sound wave characteristic is deteriorated due to the influence of the unnecessary vibration.
  • an object of the present invention is a structure suitable for use in a high frequency band, has high durability performance, and is less susceptible to the influence of sound strength due to bonding strength, contact pressure, and material variations between members. It is to realize a sonic transducer.
  • the ultrasonic transducer of the present invention includes a case portion and a vibrator.
  • the case part has an opening.
  • the vibrator includes a matching layer and a piezoelectric element layer.
  • the piezoelectric element layer is configured to vibrate in thickness, and a side surface that intersects the main surface in the thickness direction is opposed to and in contact with the inner wall surface of the opening.
  • the matching layer is laminated in the thickness direction of the piezoelectric element layer, a part of the matching layer is exposed from the opening in the thickness direction of the piezoelectric element layer, and a side surface intersecting the main surface in the thickness direction is opened from the inner wall surface of the opening. ing.
  • the piezoelectric element layer vibrates in thickness, the entire surface of the matching layer is displaced (vibrated) almost uniformly in the thickness direction. Therefore, no vibration node is generated on the surface of the matching layer, and the vibration area can be increased. As a result, even if the overall size of the ultrasonic transducer is reduced, the sound pressure and sensitivity of the sound wave due to thickness vibration are less likely to decrease. Moreover, since the piezoelectric element layer is disposed to face the inner wall surface of the case portion, high durability performance can be realized. In addition, the vibrator is supported on the inner wall surface of the case portion by the piezoelectric element layer. However, the influence on the sound wave characteristics due to the restraint of the side surface direction of the piezoelectric element layer is compared to the configuration in which the matching layer is restrained. Small and stable sound wave characteristics can be realized.
  • the matching layer has a side surface facing the inner wall surface of the opening.
  • the entire piezoelectric element layer and a part of the side surface of the matching layer are arranged in the opening of the case portion, and higher durability performance can be realized.
  • the piezoelectric element layer has a position where the contact position with the inner wall surface of the opening is a vibration node point. Thereby, it is possible to reliably prevent the thickness vibration of the piezoelectric element layer from being hindered by the case portion, and to realize more stable sound wave characteristics.
  • the matching layer has a tapered side surface in the thickness direction, and the edge of the interface portion between the matching layer and the piezoelectric element layer is in point contact with the inner wall surface of the opening. This facilitates the die cutting of the matching layer when the matching layer is molded. Further, the alignment layer can be positioned in the horizontal direction with higher accuracy.
  • the side surface of the matching layer and the side surface of the piezoelectric element layer are flush with each other.
  • the piezoelectric element layer vibrates in thickness, no vibration node is generated on the surface of the matching layer, the vibration area can be increased, and even if the overall size of the ultrasonic transducer is reduced, It is difficult for the sound pressure and sensitivity of the sound wave to decrease due to the thickness vibration.
  • the piezoelectric element layer is disposed to face the inner wall surface of the case portion, high durability performance can be realized.
  • the vibrator is supported on the inner wall surface of the case portion by the piezoelectric element layer.
  • the influence on the acoustic characteristics due to the restraint of the side surface direction of the piezoelectric element layer is compared to the configuration in which the matching layer is restrained. Small and stable sound wave characteristics can be realized.
  • FIG. 1A is a conceptual diagram of a double feed detection sensor 101 using ultrasonic transducers 1A and 1B according to the first embodiment of the present invention.
  • the double feed detection sensor 101 includes an ultrasonic transducer 1A for wave transmission and an ultrasonic transducer 1B for wave reception. Further, an oscillator 102 connected to the ultrasonic transducer 1A, an oscilloscope 104 connected to the ultrasonic transducer 1B, and an amplifier 103 connected between the ultrasonic transducer 1B and the oscilloscope 104 are provided.
  • the ultrasonic transducer 1A and the ultrasonic transducer 1B are disposed opposite to each other on both sides of the paper conveyance path 109 in a printing machine or the like.
  • the oscillator 102 oscillates a frequency pulse signal for driving the ultrasonic transducer 1A.
  • the ultrasonic transducer 1A receives the frequency pulse signal, and transmits an ultrasonic pulse of 100 kHz or more to the paper conveyance path 109. Ultrasonic pulses of 100 kHz or higher are suitable for detecting the multi-feed state for various thicknesses and types of paper. In the paper conveyance path 109, the ultrasonic pulse passes through the conveyed paper and reaches the ultrasonic transducer 1B. At this time, if the paper is in a double feed state, the attenuation of the sound wave is remarkably increased.
  • the ultrasonic transducer 1B receives an ultrasonic pulse and outputs a detection signal.
  • the amplifier 103 amplifies the detection signal input from the ultrasonic transducer 1B.
  • the oscilloscope 104 determines from the detection signal amplified by the amplifier 103 that if the attenuation of the sound wave is remarkably large, it is determined that the paper is being double-fed in the paper conveyance path 109; It is determined that it has been sent.
  • FIG. 1B is a side view of the ultrasonic transducer 1A according to the present embodiment.
  • the upward direction in the drawing is the direction in which ultrasonic waves are transmitted, and is the front direction of the ultrasonic transducer 1A.
  • the ultrasonic transducer 1B has almost the same configuration as the ultrasonic transducer 1A, and detailed description thereof is omitted here.
  • the ultrasonic transducer 1B is different from the ultrasonic transducer 1A in the number of laminated piezoelectric material layers and electrode layers in the vibrator 11 and the overall dimensions.
  • the ultrasonic transducer 1 ⁇ / b> A includes a metal cover 2, a resin case 3, a vibrator 11, and metal terminals 5 and 6.
  • the metal cover 2 is made of a conductive metal material and has a cylindrical shape with an open front and back.
  • the metal cover 2 holds the resin case 3 and functions as an electromagnetic shield.
  • the resin case 3 is formed by injection molding of plastic resin, and has a bottomed cylindrical shape with an open front side.
  • the resin case 3 holds the vibrator 11 so that the end of the vibrator 11 protrudes from the opening to the front side.
  • the resin case 3 corresponds to the case portion in the present embodiment.
  • the metal terminals 5 and 6 have rear end portions protruding from the rear surface of the resin case 3, and apply a drive voltage to the vibrator 11.
  • FIG. 1C is a perspective view of the vibrator 11 according to this embodiment.
  • 1C is the direction in which ultrasonic waves are transmitted and received, and is the front direction of the vibrator 11.
  • the vibrator 11 includes a matching layer 11A and a piezoelectric element layer 11B.
  • the matching layer 11A has a columnar shape with a square front and back.
  • the piezoelectric element layer 11B has a square columnar shape on the front and back surfaces.
  • the vertical and horizontal dimensions of the piezoelectric element layer 11B on the front and back are slightly larger than the vertical and horizontal dimensions on the front and back of the matching layer 11A.
  • the shape of the front surface and the back surface of the vibrator 11 is preferably a square or a circle because vibration efficiency can be increased and unnecessary vibration can be prevented. However, it may be rectangular or oval in order to control the directivity of sound waves.
  • the matching layer 11A is made of a low specific gravity material in which a glass balloon is mixed with an epoxy resin that can be bonded by potting and thermosetting.
  • the matching layer 11A is located on the front side of the vibrator 11 and is connected to the piezoelectric element layer 11B and the outside world (outside air). ) To match the acoustic impedance.
  • the piezoelectric element layer 11B is located on the back side of the vibrator 11, and is configured by laminating a plurality of electrode layers 11B1 and a plurality of piezoelectric layers 11B2 with the direction between the front and the back as the laminating direction.
  • the piezoelectric layer 11B2 is made of a lead zirconate titanate ceramic having a large electromechanical coupling coefficient and piezoelectric d constant and a small mechanical quality factor.
  • the vibrator 11 is configured such that two side surfaces parallel to the stacking direction (the right side surface and the left side surface in the left-right direction in FIG. 1B) are electrode connection portions, and are not shown.
  • the even-numbered or odd-numbered electrode layers 11B1 are selectively connected to each other by the electrode and the insulating film, and are connected to the metal terminal 5 or the metal terminal 6.
  • FIG. 2 is a cross-sectional view of the ultrasonic transducer 1A.
  • FIG. 2A is a cross-sectional view taken along the alternate long and short dash line B-B ′ shown in FIG.
  • FIG. 2B is a cross-sectional view taken along the alternate long and short dash line A-A ′ shown in FIG.
  • the metal cover 2 includes a cylindrical part 2A and a tongue-like part 2B.
  • the cylindrical part 2A is a cylindrical part without a bottom, and the outer shape and the inner shape of the front surface and the back surface are square.
  • the tongue-shaped part 2B is an elongated tongue-shaped part extending in the back direction from the back side of the cylindrical part 2A, and is used as a ground terminal.
  • the resin case 3 has a bottomed cylindrical shape, is formed with an outer dimension substantially equal to the inner dimension of the metal cover 2, and is formed on the outer surface in the vicinity of the back surface with the outer dimension partially enlarged. 3D is provided.
  • the step portion 3D is for locking the resin case 3 when the cylindrical portion 2A of the metal cover 2 comes into contact. Further, in the stepped portion 3D, a groove through which the tongue-like portion 2B passes is formed in part.
  • the resin case 3 is provided with a rectangular opening 3A on the front surface.
  • the opening 3A is where the vibrator 11 is inserted.
  • the resin case 3 is provided with a rectangular hole 3B on the back surface.
  • the hole 3B communicates with the inner bottom surface of the opening 3A, and the rear side ends of the metal terminals 5 and 6 are inserted therein.
  • a groove 3C extending from the hole 3B along the inner bottom surface and the inner wall surface is formed in the opening 3A.
  • the groove 3 ⁇ / b> C is for locking the metal terminals 5 and 6.
  • the distance from the front surface to the inner bottom surface is set to be shallower than the thickness dimension of the vibrator 11.
  • the end of the vibrator 11 protrudes from the opening 3A, that is, the matching layer 11A partially protrudes from the opening 3A.
  • the metal terminals 5 and 6 are roughly rod-shaped members made of a conductive metal material, and are provided with a step portion bent twice around the center.
  • the ends and step portions on the front side of the step portions of the metal terminals 5 and 6 are fitted into the groove 3C of the resin case 3 and are provided inside the opening portion 3A.
  • the end on the back side of the stepped portions of the metal terminals 5 and 6 is provided to protrude from the hole 3B to the back side.
  • the front ends of the metal terminals 5 and 6 are narrowed between the side surface of the vibrator 11 and the inner wall surface of the resin case 3 in the opening 3A of the resin case 3, and project at the position to the vibrator 11 side. A bow-shaped part that bends is formed.
  • the metal terminals 5 and 6 are always in contact with the vibrator 11 by elastically deforming this part.
  • the metal terminals 5 and 6 may be bonded to the side surface of the vibrator 11 by using a conductive adhesive or the like. Further, the vibrator 11 may be adhered to the inner bottom surface of the resin case 3 using an insulating adhesive or the like.
  • the vibrator 11 is inserted into the opening 3A from the piezoelectric element layer 11B side, and the matching layer 11A side projects forward from the opening 3A.
  • the dimension of the opening 3A is set so that the inner wall surface elastically contacts the outer wall surface of the piezoelectric element layer 11B except for the formation region of the groove 3C.
  • the vertical and horizontal dimensions of the matching layer 11A are smaller than the vertical and horizontal dimensions of the piezoelectric element layer 11B as described above, the side surfaces are spaced apart (opened) from the inner wall surface of the opening 3A. Therefore, the vibrator 11 is supported by the resin case 3 on the outer surface of the piezoelectric element layer 11B.
  • a vibrator having a matching layer and a piezoelectric element layer
  • the matching layer and the piezoelectric element layer are separated. May occur.
  • thermal stress tensile stress
  • the vertical and horizontal dimensions of the matching layer are the same as the vertical and horizontal dimensions of the piezoelectric element layer
  • thermal stress tensile stress
  • the resonance frequency is lowered and the sensitivity is lowered.
  • the thermal stress (tensile stress) applied to the piezoelectric element layer 11B is dispersed, thereby causing the matching layer 11A and the piezoelectric layer to expand.
  • the thermal stress applied to the portion between the element layer 11B is reduced, and peeling between the matching layer 11A and the piezoelectric element layer 11B hardly occurs. For this reason, in the ultrasonic transducer 1A, the resonance frequency and the sensitivity are not easily lowered.
  • the ultrasonic transducer 1A is composed of the above-described members, the metal cover 2, the resin case 3, the vibrator 11, and the metal terminals 5 and 6.
  • the vibrator 11 is configured to vibrate in the thickness direction along the front-back direction. Therefore, the entire front surface of the vibrator 11 becomes a vibration region, and even if the size is reduced, a change in resonance frequency, a decrease in sound pressure, and a sensitivity are unlikely to occur. Therefore, good sound wave characteristics can be realized as the double feed detection sensor 101. Further, since the vibrator 11 has a part of the matching layer 11A and the piezoelectric element layer 11B disposed inside the opening 3A of the resin case 3, it is not easily affected by external impacts and has high durability performance. realizable.
  • the vibrator 11 is supported on the inner wall surface of the opening 3A of the resin case 3 by the outer surface of the piezoelectric element layer 11B, and the outer surface of the matching layer 11A is released from the inner wall surface of the opening 3A.
  • the vibrator 11 is supported on the inner wall surface of the opening 3A of the resin case 3 by the outer surface of the piezoelectric element layer 11B, and the outer surface of the matching layer 11A is released from the inner wall surface of the opening 3A.
  • the inner wall surface of the opening 3A is in contact with the outer surface of the layer 11A, it is possible to prevent deterioration and instability of sound wave characteristics.
  • FIG. 3 and 4 are diagrams for explaining the influence of the acoustic characteristics depending on the contact position between the vibrator and the resin case based on the frequency-impedance characteristics.
  • FIG. 3 shows an ultrasonic transducer according to a comparative example.
  • FIG. 4 shows an ultrasonic transducer according to an embodiment of the present invention.
  • the ultrasonic transducer according to the comparative example has a transducer having an outer surface flush with the matching layer and the piezoelectric element layer, and an inner wall surface of the opening at a uniform interval with the outer surface of the transducer.
  • the matching resin layer and the resin case are joined with an adhesive using an opposing resin case.
  • the ultrasonic transducer according to the embodiment of the present invention has a configuration in which a vibrator and a resin case having the same configuration as the ultrasonic transducer 1A are used, and the piezoelectric element layer and the resin case are bonded with an adhesive. .
  • the resonance frequencies are about 171 kHz, about 268 kHz, about 302 kHz, and about 375 kHz, and about 176 kHz, about 295 kHz, about 326kHz, about 396kHz is the anti-resonance frequency.
  • the difference between the resistance value at each resonance frequency (resonance resistance) and the resistance value at each anti-resonance frequency is compared to the non-contact configuration of the matching layer and the resin case (non-contact). Larger and smaller when touched.
  • the resonance frequencies are about 168 kHz, about 267 kHz, about 303 kHz, and about 374 kHz.
  • Anti-resonance frequencies are 293 kHz, about 322 kHz, and about 398 kHz.
  • the difference between the resistance value at each resonance frequency (resonance resistance) and the resistance value at each anti-resonance frequency is a pole of about 267 kHz or higher compared to a configuration in which the piezoelectric element layer and the resin case are not in contact (when not in contact). In the vicinity of the value, the difference in resistance value is smaller at the time of contact, but in the vicinity of about 168 kHz and about 173 kHz, the difference in resistance value hardly changes.
  • the thickness vibration and the sound wave are maximized when driven at a resonance frequency of about 171 kHz in the case of FIG. 3 and at a resonance frequency of about 168 kHz in the case of FIG. Become.
  • the matching layer is fixed to the resin case, it is difficult to achieve the intrinsic acoustic characteristics of the vibrator, and some degradation occurs.
  • the original sound wave characteristic of the vibrator can be realized as it is without deterioration.
  • the ultrasonic transducer of the present invention has been described using a configuration in which the outer surface of the vibrator is non-flat and the inner wall surface of the opening is flat.
  • the ultrasonic transducer of the present invention has been described. Can be realized with other configurations.
  • FIG. 5 is a cross-sectional view of an ultrasonic transducer 21 according to the second embodiment of the present invention.
  • FIG. 5A is a cross-sectional view taken along the alternate long and short dash line BB ′ shown in FIG.
  • FIG. 5B is a cross-sectional view taken along a dashed line AA ′ shown in FIG.
  • the ultrasonic transducer 21 of the present embodiment includes a vibrator 31 having a configuration different from that of the first embodiment.
  • the vibrator 31 includes a matching layer 31A and a piezoelectric element layer 31B.
  • the matching layer 31 ⁇ / b> A has a square shape on the front surface and the back surface, and has a columnar shape in which the vertical and horizontal dimensions on the back surface are larger than the vertical and horizontal dimensions on the front surface, and the side surface is tapered.
  • the vertical and horizontal dimensions of the back surface of the matching layer 31A are equal to the vertical and horizontal dimensions of the front surface of the piezoelectric element layer 31B.
  • the edge of the interface portion between the matching layer 31A and the piezoelectric element layer 31B is in point contact with the inner wall surface of the opening 3A, the horizontal position of the matching layer 31A is fixed with higher accuracy, and the acoustic wave characteristics are improved. More enhanced. Further, when the member of the matching layer 31A is molded, the matching layer 31A can be easily punched. Therefore, the ultrasonic transducer 21 can be manufactured more easily.
  • FIG. 6 is a cross-sectional view of an ultrasonic transducer 41 according to the third embodiment of the present invention.
  • FIG. 6A is a cross-sectional view taken along the alternate long and short dash line BB ′ shown in FIG.
  • FIG. 6B is a cross-sectional view taken along a dashed line AA ′ shown in FIG.
  • the ultrasonic transducer 41 of the present embodiment includes a vibrator 51 and a resin case 43 having a configuration different from that of the first embodiment.
  • the vibrator 51 includes a matching layer 51A and a piezoelectric element layer 51B.
  • the matching layer 51A has a square front and back surface, the vertical and horizontal dimensions are equal to the vertical and horizontal dimensions of the piezoelectric element layer 51B, and the outer surface of the matching layer 51A and the outer surface of the piezoelectric element layer 51B are configured to be flush with each other.
  • the resin case 43 has an opening 43A, a hole 43B, a groove 43C, and a stepped portion 43D.
  • the opening 43A has a stepped shape so that the inner diameter dimension on the front side is larger than the inner diameter dimension on the back side.
  • the ultrasonic transducer of the present invention may be configured such that the outer surface of the transducer is flat or the inner wall surface of the opening is non-flat.
  • the vibrator 51 Since the vibrator 51 has a rectangular parallelepiped shape as a whole, it is possible to manufacture the plurality of vibrators 51 at a time by forming the vibrators 51 integrally and then dividing them by dicing or the like. Become. Therefore, the manufacturing cost of the vibrator 51 can be reduced.
  • FIG. 7 is a cross-sectional view of an ultrasonic transducer 61 according to the fourth embodiment of the present invention.
  • FIG. 7A is a cross-sectional view taken along the alternate long and short dash line BB ′ shown in FIG.
  • FIG. 7B is a cross-sectional view taken along a dashed line AA ′ shown in FIG.
  • the ultrasonic transducer 61 of the present embodiment includes a vibrator 71 and a resin case 63 having a configuration different from that of the first embodiment.
  • the vibrator 71 includes a matching layer 71A and a piezoelectric element layer 71B.
  • the matching layer 71A has a square front and back and a vertical and horizontal dimension equal to the vertical and horizontal dimensions of the piezoelectric element layer 71B.
  • the resin case 63 is formed with an opening 63A, a hole 63B, a groove 63C, and a stepped portion 63D, and the opening 63A is formed with a protrusion 63E protruding from the inner wall surface.
  • the protrusion 63E is formed so as to substantially circulate the opening 63A at a predetermined distance from the inner bottom surface of the opening 63A. Only the inner bottom surfaces of the protrusion 63E and the opening 63A are configured to contact the vibrator 71.
  • the formation position of the protrusion 63E is set so as to come into contact with the vibrator 71 at a position that becomes a node point of the thickness vibration of the piezoelectric element layer 71B.
  • the protrusion 63E provided in the opening 63A is brought into contact with the piezoelectric element layer 71B of the vibrator 71, thereby The inner wall surface of the opening 63A is prevented from contacting the side surface of the matching layer 71A. Since the protrusion 63E contacts a position that becomes a node point of the thickness vibration of the piezoelectric element layer 71B, it is possible to reliably prevent the thickness vibration of the piezoelectric element layer 71B from being hindered and to realize more stable sound wave characteristics. It becomes possible.
  • the ultrasonic transducer of the present invention may be configured.
  • the vibrator 71 Since the vibrator 71 has a rectangular parallelepiped shape as a whole, it is possible to manufacture the plurality of vibrators 71 at a time by forming the plurality of vibrators 71 integrally and then dividing them by dicing or the like. Become. Therefore, the manufacturing cost of the vibrator 71 can be reduced.
  • the projecting portion may be configured integrally with the resin case, may be configured integrally with the vibrator, or may be configured separately from the resin case and the vibrator.
  • the present invention can be implemented, but the ultrasonic transducer of the present invention can also be used in other devices for double feed detection sensors.
  • the specific configuration and materials of the vibrator and the ultrasonic transducer are not limited to those described above, and if the piezoelectric element layer is supported by the case portion with at least the side surface of the matching layer being open, Other configurations and materials may be employed.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • Controlling Sheets Or Webs (AREA)
PCT/JP2012/081454 2011-12-06 2012-12-05 超音波トランスデューサー WO2013084910A1 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
KR1020147015132A KR101516654B1 (ko) 2011-12-06 2012-12-05 초음파 트랜스듀서
JP2013525021A JP5574050B2 (ja) 2011-12-06 2012-12-05 超音波トランスデューサー
CN201280049791.6A CN103875257B (zh) 2011-12-06 2012-12-05 超声波换能器

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JP2011-266609 2011-12-06
JP2011266609 2011-12-06

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WO2013084910A1 true WO2013084910A1 (ja) 2013-06-13

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WO2016117722A1 (ko) * 2015-01-20 2016-07-28 알피니언메디칼시스템 주식회사 산화 분말로 구성된 정합층을 가진 초음파 트랜스듀서

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