WO2013044677A1 - Procédé et appareil de mesure de coordonnées tridimensionnelles à grande échelle comportant un suivi laser - Google Patents

Procédé et appareil de mesure de coordonnées tridimensionnelles à grande échelle comportant un suivi laser Download PDF

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Publication number
WO2013044677A1
WO2013044677A1 PCT/CN2012/079264 CN2012079264W WO2013044677A1 WO 2013044677 A1 WO2013044677 A1 WO 2013044677A1 CN 2012079264 W CN2012079264 W CN 2012079264W WO 2013044677 A1 WO2013044677 A1 WO 2013044677A1
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Prior art keywords
measuring machine
probe
laser tracker
measuring
laser
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PCT/CN2012/079264
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English (en)
Chinese (zh)
Inventor
裘祖荣
张国雄
李杏华
刘书桂
郭敬滨
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天津大学
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Publication of WO2013044677A1 publication Critical patent/WO2013044677A1/fr

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/002—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/004—Measuring arrangements characterised by the use of mechanical techniques for measuring coordinates of points
    • G01B5/008—Measuring arrangements characterised by the use of mechanical techniques for measuring coordinates of points using coordinate measuring machines

Definitions

  • the invention relates to spatial coordinate measurement of large-scale engineering and large machines and workpieces, and can be used in engineering, machine operation, parts processing and assembly field.
  • the size of the object to be tested can be much larger than the size of the testing equipment, and the measurement precision is high, which belongs to testing technology.
  • the field of instruments involving the measurement of three-dimensional coordinates of large-scale space. Specifically, it relates to large-scale three-coordinate measuring methods and devices with laser tracking. Background technique
  • the most widely used geometric coordinate coordinate detection is the orthogonal coordinate measuring machine, but the orthogonal three-coordinate measuring machine cannot meet the requirements of high-precision detection of large engineering objects in many aspects.
  • the first thing to measure the larger the workpiece, the larger the CMM. This CMM is not only expensive, but also technically difficult.
  • a gantry structure is generally used, as shown in Fig. 1. From the structural form, the scale and drive can only be on the side. Not only will it bring a large Abbe arm and swing around the Z axis, resulting in a large Abbe error, and the drive is not easy to stabilize.
  • a dual-drive and double-scale solution is often used for a measuring machine with a 7-direction stroke of 2 m or more.
  • the signal fed back by the double ruler controls the synchronous movement of the left and right sides, which is technically difficult.
  • the manufacture of long rails is also very difficult.
  • the world's largest measuring machine has a stroke of 20m and the price is millions of dollars. More importantly, this CMM cannot be used in the field, but it is necessary to move the object to the CMM. This is not possible in many cases.
  • the theodolite shown in Figure 2 is a commonly used instrument. Using two or more theodolites to aim at the same target point P, each theodolite measures two angles, one is the horizontal azimuth angle, and the other is the angle on the vertical plane. The P point can be obtained by triangulation. Coordinates in three-dimensional space.
  • the disadvantage of this method is that in order to obtain the coordinates of the P-point, the distance b and the height difference h of the optical centers of the two theodolites must be known, which requires calibration with a long gauge or other standard specimen. Long gauge or standard specimens are difficult to manufacture, inconvenient to use, and the accuracy is difficult to guarantee.
  • Fig. 3 is a principle of measuring a large size by using a multi-camera, and the same point P is simultaneously imaged in a plurality of cameras, and the spatial coordinates of the P point can be determined by data processing.
  • the multi-camera system like the theodolite system, is based on the principle of triangulation angle measurement, which requires calibration with a long standard rule or standard sample. The measurement uncertainty increases rapidly with increasing distance and is difficult to measure the internal parameters of the object.
  • Figure 4a shows the laser tracker, which uses the spherical coordinate measurement principle shown in Figure 4b.
  • the target shown in Figure 5 is used for the measurement, and the target moves along the surface to be measured.
  • the outgoing beam reflected by the target does not return along the original path, but is staggered by a distance, as shown in Fig. 5.
  • the laser tracker picks up this information, tracks it, and changes the direction of the beam until the incident beam from the laser tracker passes through the center of the target.
  • the position of the target point Pi can be determined according to the angle ⁇ ⁇ , 9 i of the laser tracker about the horizontal and vertical axis and the distance Li from the origin of the interferometer to the target center 0 measured by the interferometer inside the laser tracker ( Figure 4b).
  • the laser tracker has high precision and a large measuring range (tens of meters).
  • the main disadvantage is that it is difficult to measure the internal characteristics of the object under test. It is true that manufacturers of laser trackers have also introduced hand-held light pens (Fig. 6), one end of which is a probe (or rigid probe), the other end is a target, and the laser tracker is aimed at the target for measurement. It allows you to measure certain internal features that are not far from the outline of the object being measured.
  • the main problem is that it is difficult to control the direction of the stylus during manual operation, and the relative position of the probe (or the probe) to the target is unchanged. A slight tilt of the stylus can cause significant errors. For this reason, and for operational reasons, the light pen is usually short and does not exceed 200-300mm.
  • the technical solution adopted by the invention is a large-scale three-coordinate measuring device with laser tracking, which is composed of a measuring machine, a laser tracker and a calculation control system, and a laser interferometer for measuring line displacement;
  • the measuring machine is provided with: a column and The bottom is provided with wheels for moving the measuring machine to the object to be measured and close to the measured feature point;
  • the horizontal arm mounted on the column can be moved, and the spindle mounted at one end of the horizontal arm can make z direction Movement, the other end of the horizontal arm is equipped with a corner prism;
  • the upper end of the main shaft is equipped with a probe revolving body, and the revolving body of the measuring head can rotate horizontally and vertically;
  • the probe is equipped with a probe on the rotating body, and the probe is equipped with a probe
  • the probe has a strain gauge for measuring the deformation of the probe;
  • the other end of the spindle is equipped with a target and a goniometer, and a temperature measuring
  • the distance between the optical center of the target and the center of the revolving body of the probe is determined
  • the laser interferometer is aimed at the corner cube prism at the end of the horizontal arm.
  • the beam of the laser interferometer is adjusted to be parallel to the movement of the horizontal arm.
  • the laser tracker is aimed at the target and the horizontal arm moves in the direction, and the laser interferometer and the laser are recorded.
  • the reading of the tracer, after data processing, can simultaneously determine the distance between the optical center of the laser tracker and the optical center of the target at the calibration initial position, and the spatial relative position between the corner prism and the optical center of the target;
  • the laser tracker is used to track and measure the position of the optical center point of the target.
  • the angle measuring device is used to measure the deflection angle of the main axis with respect to the object to be measured, and the strain gauge measures the bending deformation of the probe and performs error compensation.
  • the device is provided with a probe protection mechanism, and the probe protection mechanism is a movable seat.
  • the spring and the positioning mechanism accurately position the movable seat relative to the probe base, and the side head is fixed on the movable seat, and the side head seat is fixed on the probe.
  • the positioning mechanism is disengaged, the contact pair in the positioning mechanism is disconnected, the measuring machine stops moving, and the measuring head and the measuring machine are protected.
  • the angle measuring device is two electronic level meters, which measure the rotation of the main shaft around the ⁇ and the axis.
  • a large three-coordinate measuring method with laser tracking is implemented by means of a large coordinate measuring device with laser tracking and includes the following steps:
  • optimization of the measurement scheme and path planning including the determination of the number of positions and specific positions that the measuring machine needs to move; the path planning and optimization of the horizontal arm, the main shaft, the revolving body of the measuring machine at various positions, anti-collision and anti-laser Tracker lost light inspection; laser tracker needs to move the number of positions and the specific location is determined;
  • the computer collects and stores the laser tracker readings of each sampling point: including the rotation angle of the two axes around the laser tracker and the measurement by the interferometer.
  • the above path planning keeps the laser tracker in motion and moves the measuring machine to the next position.
  • special attention should be paid to prevent the laser tracker from losing light. And on the basis of this, keep the coordinate system one before and after the movement of the measuring machine;
  • the invention has the following technical effects - 1. It can measure various geometric parameters of large workpieces, machines or engineering objects with a size of several tens of meters;
  • the measuring system can be moved and can be measured at the site of the measured object.
  • the measurement accuracy is high, and there is no strict requirement for the motion accuracy of the measuring machine.
  • the measurement accuracy is mainly guaranteed by laser tracker, error compensation (spindle rotation angle and deformation measurement, probe deformation measurement, etc.), probe and probe revolving body, calibration and so on.
  • the measuring machine works safely and reliably.
  • Figure 1 is a schematic diagram of a large gantry type CMM.
  • 10 is the column
  • 11 is the guide rail
  • 12 is the beam
  • 13 is the carriage
  • 14 is the main shaft.
  • Figure 2 is a schematic diagram of the theodolite.
  • Figure 3 is a schematic diagram of a multi-camera system.
  • Figure 4 is a schematic diagram of a laser tracker.
  • Figure 5 is a schematic diagram of the target.
  • Figure 6 is a schematic diagram of the light pen.
  • Figure 7 is a schematic diagram of a large three-coordinate measuring system with laser tracking.
  • Figure 8 is a schematic diagram of a collision protection mechanism.
  • 1 is the probe
  • 2 is the positioning mechanism and the contact pair
  • 3 is the movable seat
  • 4 is the spring
  • 5 is the probe holder.
  • the present invention is directed to the above problems, and an invention (1) can be used at an engineering or production site; (2) high measurement accuracy; (3) safe and reliable; (4) large measurement range; (5) capable of detecting the inside of the object to be tested
  • the external features of the large-scale three-coordinate measuring system with laser tracking can meet the needs of large-scale measurement in various engineering and production.
  • the large three-coordinate measuring system with laser tracking consists of three parts: measuring machine, laser tracker and calculation control system, as shown in Figure 7.
  • the main function of the measuring machine is to explore the feature points of the measured object, including external feature points and internal feature points.
  • the bottom of the measuring machine's column 3 has a wheel 2, which can be moved to the site of the object to be measured and is closer to the measured feature point.
  • the pawl 1 is lowered to give the measuring machine a stable position.
  • the horizontal arm 5 can be moved in the X direction
  • the main shaft 8 can be moved in the z direction
  • the revolving body 11 of the probe can be rotated horizontally and perpendicularly, and the probe 10 detects the position of the measured point.
  • the laser tracker is used to track and aim the target 6 to determine the position of the optical center M point of the target.
  • the distance between the optical center of the target 6 and the center Q of the probe is determined.
  • the effect of the temperature change on the change in the distance between the M point and the Q point can be compensated by the temperature measuring element attached to the spindle 8.
  • the most serious impact comes from the uncertainty of the spindle 8 direction.
  • the tilt of the entire measuring machine, the angular motion error of the horizontal arm 5, the bending deformation of the horizontal arm 5, and the angular motion error of the spindle 8 all seriously affect the spatial position of the ⁇ point with respect to the M point. Since the object to be measured is a large-sized piece, / and / ⁇ in Fig. 7, the length of the spindle 8 should be large enough so that the probe 10 can detect the measured point to be measured.
  • the present invention uses an angle measuring device 7 to measure the deflection angle of the main shaft with respect to the object to be measured and the direction of _y, and introduces error compensation.
  • WoJ uses a laser tracker to accurately measure the position of the optical center point of the target, and uses the angle measuring device 7 to measure the deflection angle of the main shaft 8 with respect to the object to be measured around the X direction, and uses the strain gauge to measure the bending deformation of the probe 9, and performs After the error compensation, the spatial position of each feature point inside or outside the measured object can be accurately measured.
  • the invention adopts anti-collision technology and collision protection technology based on virtual coordinate measuring machine.
  • the optical center of the laser tracker (the origin of the interferometer) functions as a reference point, and in principle, the position of the laser tracker is required to be fixed throughout the measurement.
  • the position of the laser tracker is required to be fixed throughout the measurement.
  • the present invention has developed a technique for allowing a mobile laser tracker to be moved under the premise of ensuring uniformity of the reference. The laser tracker achieves uniformity by aiming at the same fixed target 6 before and after shifting.
  • the calculation control system performs tasks such as motion control, measurement data acquisition, error compensation, and data processing. And (6) the new pose parameters of the transmitting station after changing the posture.
  • the invention proposes a requirement that can be used in engineering or production field, high measurement precision, safe and reliable work, large measuring range, capable of detecting internal and external features of the object to be tested, and capable of meeting large-scale measurement in various engineering and production. Large three-coordinate measuring system with laser tracking.
  • the invention relates to a large-scale three-coordinate measuring system composed of a movable low-precision coordinate measuring machine, a laser tracker and a calculation control system.
  • the measuring machine, laser tracker and calculation control system are all movable from the requirements of being able to measure on-site at the object under test.
  • An important innovation of the present invention is to separate the implementation from the guaranteed measurement accuracy.
  • the measuring machine can be moved to the object to be measured and stopped at the desired position.
  • its horizontal arm 5 can do
  • the spindle 8 In the X-direction movement, the spindle 8 can be moved in the z-direction, and the spindle 8 is provided with the probe revolving body 11 and the probe 10, so that it can easily detect the measured point.
  • the target 6 is mounted above the main shaft 8, and the target can be a cat's eye or a corner prism.
  • the position of target 6 is accurately determined by a laser tracker.
  • the overall movement of the measuring machine, as well as the upward movement of the horizontal arm 5, and the z-direction motion accuracy of the spindle 8 have substantially no effect on the measurement uncertainty. Their accuracy is as long as they meet the requirements of being able to detect the point to be measured.
  • the spindle 8 is provided with a goniometer 7 for measuring the rotation of the spindle about the X and the shaft, and is attached with a temperature measuring element.
  • the probe 9 of the probe 10 is provided with a strain gauge which can detect the deformation of the probe due to the measurement force and gravity, and introduces error compensation for the deformation of the probe according to it. Since the above error compensation measures are introduced, the measuring machine can be moved to the corresponding position near the object to be measured as needed, and the deformation of the horizontal arm of the measuring machine and the motion error of the horizontal arm and the vertical spindle do not affect the measurement accuracy, and can be reduced.
  • the small measuring machine is small in size, reduces the manufacturing precision requirements of the measuring machine, uses long horizontal arms and spindles, and goes deep into the various parts of the object to be measured, while maintaining high measurement accuracy.
  • a virtual coordinate measuring machine is used to model the measuring machine and the measured object. After manually detecting several points on the object to be measured, the conversion and unification between the laser tracker coordinate system and the coordinate system of the object to be measured (workpiece coordinate system) can be realized. It can be realized on the virtual coordinate measuring machine: (1) It is determined that the three coordinate measuring machine needs to move several positions and move to which positions to complete the measurement of all the elements to be tested of the measured object. The overall position of the measuring machine is optimized. (2) Determine if the laser tracker's beam is able to detect the target 6 unobstructed for these positions of the CMM.
  • the position of the target center M measured by the laser tracker, the spindle 8 measured by the angle measuring device 7 around the X and y axis, the spindle temperature measured by the temperature measuring element, the probe revolving body 11 The angle around the horizontal and vertical axis, the deformation of the probe 9 measured by the strain gauge, and the reading of the probe 10 can accurately calculate the position of the measuring end P in the laser tracker coordinate system and display it on the computer screen.
  • the measuring machine has the probe protection mechanism of Fig. 8.
  • the probe is not directly fixed to the probe base, but is fixed on a movable seat, and the movable seat is accurately positioned relative to the probe base by the spring and the positioning mechanism.
  • the positioning mechanism is disengaged, the contact pair in the positioning mechanism is disconnected, the measuring machine stops moving, and the probe and the measuring machine are protected.
  • the laser tracker When the laser tracker has to be moved, the target 6 in Fig. 7 does not move, the laser tracker moves and tracks, and it records the distance moved by the optical center of the laser tracker, the angle at which the laser beam is rotated, and the laser tracker is calculated by calculation.
  • the new position of the optical center is converted by the coordinate system to maintain the uniformity of the measurement coordinate system.
  • the measurement system has the function of determining the position of the measuring machine relative to the laser tracker to determine its spatial position.
  • a laser tracker is an incremental code measurement system that needs to know the distance between the optical center of the laser tracker and the target optical center at the initial position.
  • the measurement system has the function of calibrating the distance between the optical center of the laser tracker and the optical center of the target at the measurement site.
  • the working principle is to use a common laser interferometer for measuring the displacement of the line, aiming at the corner cube 4 mounted at the end of the horizontal arm 5 in Fig. 7, and adjusting the beam to the X axis, that is, the horizontal arm 5 The direction of the line.
  • the laser tracker is aimed at the target 6.
  • the data processing can simultaneously determine the distance between the optical center of the laser tracker and the target optical center at the calibration initial position, and the spatial relative position between the corner cube 4 and the optical center of the target 6.
  • An object of the present invention is to provide a coordinate measuring system capable of measuring internal and external characteristic elements of a large engineering object having a size of several tens of meters on the object to be measured, which has the characteristics of high precision, safe and reliable work, and low cost.
  • the invention proposes a large coordinate measuring system with laser tracking. Its working principle is shown in Figure 7.
  • the measuring machine consists of a measuring machine, a laser tracker and a calculation control system.
  • the measuring machine, the laser tracker and the control computing system are all movable from the requirements of being able to measure on-site at the object under test.
  • the measuring machine develop or select the measuring machine according to the measured object and measurement requirements, including the X and z stroke of the measuring machine, the size of the 1 h in Figure 7, the length of the probe 9, etc., the probe and the revolving body of the probe, etc. Configure to meet measurement requirements.
  • the angle measuring device 7 in Fig. 7 can employ two electronic levels, which respectively measure the rotation of the main shaft 8 about the X and y axes, and the target 6 can adopt a cat's eye or a corner cube.
  • the probe 10 can be used with a 3D analog probe (eg SP25) or a trigger probe.
  • the model of the measuring machine is established in the virtual coordinate measuring machine according to the structure, size, configuration and movement of the coordinate measuring machine.
  • the model of the measured object is established according to the drawing of the object to be tested.
  • the measuring machine, laser tracker and calculation control system are installed at the measurement site. Move the measuring machine to the first position next to the object to be measured according to the measurement needs.
  • a common line displacement measuring laser interferometer is used to aim at the corner ridge mirror 4 in Fig. 7, and the laser beam of the interferometer is adjusted to be parallel to the X-direction movement of the horizontal arm 5 of the measuring machine.
  • the absolute distance between the target 6 and the optical center of the laser tracker is calibrated by moving the horizontal arm 5 in the full range of the X direction while recording a series of readings of the line displacement measuring laser interferometer and the laser tracker.
  • the measuring machine is used to measure several points on the object to be measured, and the laser tracker, the measuring machine and the coordinate system of the object to be measured are unified.
  • the virtual coordinate measuring machine is used to realize the optimization of the measurement scheme and the path planning, including the determination of the number of positions and specific positions that the measuring machine needs to move; the path planning and optimization of the horizontal arm, the main shaft and the measuring head revolving body of the measuring machine at various positions, Anti-collision and anti-laser tracker light loss inspection.
  • the laser tracker needs to determine the number of positions to move and the specific position.
  • the computer collects and stores the laser tracker readings of each sampling point (including the angle between the two axes of the laser tracker and the optical center of the laser tracker measured by the interferometer to the optical center of the target), and the angle measuring device Measured the angle of the spindle of the measuring machine around the x and y axes, the temperature of the spindle measured by the temperature measuring element, the angle of rotation of the probe's rotating body around its two axes, the deformation of the probe measured by the strain gauge, and the reading of the 3D probe.
  • the path planning is determined according to the virtual coordinate measuring machine, and the laser tracker is kept stationary, and the measuring machine is moved to the next position.
  • special attention should be paid to prevent the laser tracker from losing light, and on this basis, the coordinate system before and after the movement of the measuring machine is maintained.
  • the path plan determined by the virtual coordinate measuring machine if necessary, keep the target of the measuring machine stationary and move the laser tracker to the next position.
  • special attention should be paid to prevent the laser tracker from losing light, and on this basis, the coordinate system before and after the movement of the laser tracker is maintained.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)

Abstract

La présente invention porte sur un système de mesure de coordonnées tridimensionnelles à grande échelle, comportant un suivi laser, et un appareil de mesure de coordonnées tridimensionnelles à grande échelle, avec suivi laser, composé de trois parties, à savoir une machine de mesure, un dispositif de pointage laser et un système de commande d'ordinateur, et un interféromètre laser mesurant un déplacement de ligne, la machine de mesure comportant un bras horizontal (5) apte à se déplacer dans la direction X et un axe principal (8) apte à se déplacer dans la direction Z ; un prisme de coin (4) est monté sur l'autre extrémité du bras horizontal (5) ; un corps tournant de tête de mesure (11) est disposé sur une extrémité de l'axe principal (8) ; une tête de mesure (10) est disposée sur le corps tournant de tête de mesure (11) ; une cible (6) et un moyen de mesure d'angle (7) sont disposés sur l'autre extrémité de l'axe principal (8) ; et un élément de mesure de température est fixé sur l'axe principal (8) pour compensation de température. La présente invention est principalement applicable à une mesure de coordonnées tridimensionnelles.
PCT/CN2012/079264 2011-09-29 2012-07-27 Procédé et appareil de mesure de coordonnées tridimensionnelles à grande échelle comportant un suivi laser WO2013044677A1 (fr)

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CN2011102943872A CN102506702B (zh) 2011-09-29 2011-09-29 带有激光跟踪的大型三坐标测量方法与装置
CN201110294387.2 2011-09-29

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