WO2012074271A3 - 전계방출 표시장치와 그 제조방법 - Google Patents
전계방출 표시장치와 그 제조방법 Download PDFInfo
- Publication number
- WO2012074271A3 WO2012074271A3 PCT/KR2011/009156 KR2011009156W WO2012074271A3 WO 2012074271 A3 WO2012074271 A3 WO 2012074271A3 KR 2011009156 W KR2011009156 W KR 2011009156W WO 2012074271 A3 WO2012074271 A3 WO 2012074271A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- display device
- manufacturing
- field emission
- emission display
- diffusion barrier
- Prior art date
Links
- 238000004519 manufacturing process Methods 0.000 title abstract 2
- 230000004888 barrier function Effects 0.000 abstract 3
- 238000009792 diffusion process Methods 0.000 abstract 3
- 239000002184 metal Substances 0.000 abstract 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 abstract 2
- 239000002041 carbon nanotube Substances 0.000 abstract 2
- 229910021393 carbon nanotube Inorganic materials 0.000 abstract 2
- 239000000758 substrate Substances 0.000 abstract 2
- 239000013078 crystal Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/02—Manufacture of electrodes or electrode systems
- H01J9/18—Assembling together the component parts of electrode systems
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
- H01J1/02—Main electrodes
- H01J1/30—Cold cathodes, e.g. field-emissive cathode
- H01J1/304—Field-emissive cathodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
- H01J3/02—Electron guns
- H01J3/021—Electron guns using a field emission, photo emission, or secondary emission electron source
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J31/00—Cathode ray tubes; Electron beam tubes
- H01J31/08—Cathode ray tubes; Electron beam tubes having a screen on or from which an image or pattern is formed, picked up, converted, or stored
- H01J31/10—Image or pattern display tubes, i.e. having electrical input and optical output; Flying-spot tubes for scanning purposes
- H01J31/12—Image or pattern display tubes, i.e. having electrical input and optical output; Flying-spot tubes for scanning purposes with luminescent screen
- H01J31/123—Flat display tubes
- H01J31/125—Flat display tubes provided with control means permitting the electron beam to reach selected parts of the screen, e.g. digital selection
- H01J31/127—Flat display tubes provided with control means permitting the electron beam to reach selected parts of the screen, e.g. digital selection using large area or array sources, i.e. essentially a source for each pixel group
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/02—Manufacture of electrodes or electrode systems
- H01J9/022—Manufacture of electrodes or electrode systems of cold cathodes
- H01J9/025—Manufacture of electrodes or electrode systems of cold cathodes of field emission cathodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/02—Manufacture of electrodes or electrode systems
- H01J9/14—Manufacture of electrodes or electrode systems of non-emitting electrodes
- H01J9/148—Manufacture of electrodes or electrode systems of non-emitting electrodes of electron emission flat panels, e.g. gate electrodes, focusing electrodes or anode electrodes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y99/00—Subject matter not provided for in other groups of this subclass
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2201/00—Electrodes common to discharge tubes
- H01J2201/30—Cold cathodes
- H01J2201/304—Field emission cathodes
- H01J2201/30446—Field emission cathodes characterised by the emitter material
- H01J2201/30453—Carbon types
- H01J2201/30469—Carbon nanotubes (CNTs)
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2329/00—Electron emission display panels, e.g. field emission display panels
- H01J2329/02—Electrodes other than control electrodes
- H01J2329/04—Cathode electrodes
- H01J2329/0407—Field emission cathodes
- H01J2329/0439—Field emission cathodes characterised by the emitter material
- H01J2329/0444—Carbon types
- H01J2329/0455—Carbon nanotubes (CNTs)
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2329/00—Electron emission display panels, e.g. field emission display panels
- H01J2329/46—Arrangements of electrodes and associated parts for generating or controlling the electron beams
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S977/00—Nanotechnology
- Y10S977/902—Specified use of nanostructure
- Y10S977/932—Specified use of nanostructure for electronic or optoelectronic application
- Y10S977/952—Display
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Cold Cathode And The Manufacture (AREA)
- Cathode-Ray Tubes And Fluorescent Screens For Display (AREA)
- Carbon And Carbon Compounds (AREA)
Abstract
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013539781A JP2014500593A (ja) | 2010-12-01 | 2011-11-29 | 電界放出表示装置とその製造方法 |
EP11845718.3A EP2648205A2 (en) | 2010-12-01 | 2011-11-29 | Field emission display device and manufacturing method thereof |
US13/990,859 US20130249382A1 (en) | 2010-12-01 | 2011-11-29 | Field emission display and fabrication method thereof |
CN201180058047.8A CN103270571B (zh) | 2010-12-01 | 2011-11-29 | 场发射显示器装置及其制造方法 |
Applications Claiming Priority (8)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR10-2010-0121469 | 2010-12-01 | ||
KR20100121469 | 2010-12-01 | ||
KR10-2011-0025131 | 2011-03-22 | ||
KR1020110025131A KR101157215B1 (ko) | 2010-12-01 | 2011-03-22 | 전계방출 표시장치와 그 제조방법 |
KR1020110047395A KR101141760B1 (ko) | 2011-05-19 | 2011-05-19 | 전계방출 표시장치와 그 제조방법 |
KR10-2011-0047395 | 2011-05-19 | ||
KR10-2011-0120642 | 2011-11-18 | ||
KR1020110120642A KR101266055B1 (ko) | 2011-11-18 | 2011-11-18 | 전계방출 표시장치와 그 제조 방법 |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2012074271A2 WO2012074271A2 (ko) | 2012-06-07 |
WO2012074271A3 true WO2012074271A3 (ko) | 2012-10-04 |
Family
ID=46172386
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/KR2011/009156 WO2012074271A2 (ko) | 2010-12-01 | 2011-11-29 | 전계방출 표시장치와 그 제조방법 |
Country Status (6)
Country | Link |
---|---|
US (1) | US20130249382A1 (ko) |
EP (1) | EP2648205A2 (ko) |
JP (1) | JP2014500593A (ko) |
CN (1) | CN103270571B (ko) |
TW (1) | TWI436941B (ko) |
WO (1) | WO2012074271A2 (ko) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9159669B2 (en) * | 2014-01-30 | 2015-10-13 | Infineon Technologies Ag | Nanotube structure based metal damascene process |
JP6589124B2 (ja) * | 2015-04-09 | 2019-10-16 | パナソニックIpマネジメント株式会社 | 樹脂構造体とその構造体を用いた電子部品、電子機器 |
CN104882345A (zh) * | 2015-05-13 | 2015-09-02 | 京东方科技集团股份有限公司 | 阵列基板及制作方法、显示面板及制作方法和显示装置 |
KR102492733B1 (ko) | 2017-09-29 | 2023-01-27 | 삼성디스플레이 주식회사 | 구리 플라즈마 식각 방법 및 디스플레이 패널 제조 방법 |
CN110299388B (zh) * | 2019-06-24 | 2021-07-06 | 深圳市华星光电半导体显示技术有限公司 | 一种显示面板及其制备方法 |
CN111987111B (zh) * | 2020-08-12 | 2023-09-05 | Tcl华星光电技术有限公司 | 一种阵列基板、阵列基板制程方法及显示面板 |
US11664474B2 (en) | 2020-08-12 | 2023-05-30 | Tcl China Star Optoelectronics Technology Co., Ltd | Array substrate, fabrication method for array substrate, and display panel |
US11776793B2 (en) * | 2020-11-13 | 2023-10-03 | Applied Materials, Inc. | Plasma source with ceramic electrode plate |
KR102526595B1 (ko) * | 2021-01-22 | 2023-04-28 | 주식회사 일렉필드퓨처 | 캐소드 에미터 기판의 제조방법, 이에 의해 제조된 캐소드 에미터 기판 그리고, 이를 포함하는 엑스레이소스 |
CN113675058B (zh) * | 2021-08-31 | 2022-05-31 | 重庆大学 | 一种阈值电压可调的大电流场发射二极管及其加工方法 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
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KR20050043211A (ko) * | 2003-11-05 | 2005-05-11 | 엘지전자 주식회사 | 전계 방출 소자 |
KR20050073733A (ko) * | 2004-01-10 | 2005-07-18 | 엘지전자 주식회사 | 전계 방출 소자 및 그 제조 방법 |
KR20090072535A (ko) * | 2007-12-28 | 2009-07-02 | 삼성모바일디스플레이주식회사 | 전계 방출 면광원 소자 및 그 제조 방법 |
Family Cites Families (16)
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JP2001195972A (ja) * | 2000-01-13 | 2001-07-19 | Sharp Corp | 冷陰極及びその冷陰極の製造方法 |
JP2003045317A (ja) * | 2001-08-03 | 2003-02-14 | Sony Corp | 電子放出体及びその製造方法、冷陰極電界電子放出素子及びその製造方法、並びに、冷陰極電界電子放出表示装置及びその製造方法 |
JP2004107162A (ja) * | 2002-09-20 | 2004-04-08 | Canon Inc | カーボンファイバー、カーボンファイバーを有する電子放出素子および画像表示装置の製造方法 |
JP2004171968A (ja) * | 2002-11-21 | 2004-06-17 | Hitachi Ltd | 平面型表示装置 |
US7833580B2 (en) * | 2003-07-04 | 2010-11-16 | Samsung Electronics Co., Ltd. | Method of forming a carbon nano-material layer using a cyclic deposition technique |
KR100537512B1 (ko) * | 2003-09-01 | 2005-12-19 | 삼성에스디아이 주식회사 | 카본나노튜브구조체 및 이의 제조방법 그리고 이를 응용한전계방출소자 및 표시장치 |
JP2005310647A (ja) * | 2004-04-23 | 2005-11-04 | Teco Nanotech Co Ltd | 電界放射型ディスプレイおよびその製造方法 |
KR20060089841A (ko) * | 2005-02-04 | 2006-08-09 | 삼성에스디아이 주식회사 | 전계방출소자 및 그 제조방법 |
JP2006253100A (ja) * | 2005-02-10 | 2006-09-21 | Sony Corp | 電子/イオン源装置とその製造方法、表示装置及びその製造方法 |
JP5028744B2 (ja) * | 2005-02-15 | 2012-09-19 | 富士通株式会社 | カーボンナノチューブの形成方法および電子デバイスの製造方法 |
JP4833639B2 (ja) * | 2005-11-09 | 2011-12-07 | 株式会社アルバック | カソード基板及びその作製方法、並びに表示素子及びその作製方法 |
WO2007114655A1 (en) * | 2006-04-05 | 2007-10-11 | Industry Academic Cooperation Foundation Of Kyunghee University | Field emission display and manufacturing method of the same having selective array of electron emission source |
CN100573778C (zh) * | 2006-07-07 | 2009-12-23 | 清华大学 | 场发射阴极及其制造方法 |
KR100858811B1 (ko) * | 2006-11-10 | 2008-09-17 | 삼성에스디아이 주식회사 | 전자 방출 표시 소자의 제조 방법 |
KR101638463B1 (ko) * | 2008-02-25 | 2016-07-11 | 스몰텍 에이비 | 나노구조 프로세싱을 위한 도전성 보조층의 증착과 선택적 제거 |
JP2010080402A (ja) * | 2008-09-29 | 2010-04-08 | Rohm Co Ltd | 炭素繊維装置及び炭素繊維装置の製造方法 |
-
2011
- 2011-11-29 JP JP2013539781A patent/JP2014500593A/ja active Pending
- 2011-11-29 TW TW100143800A patent/TWI436941B/zh not_active IP Right Cessation
- 2011-11-29 CN CN201180058047.8A patent/CN103270571B/zh not_active Expired - Fee Related
- 2011-11-29 US US13/990,859 patent/US20130249382A1/en not_active Abandoned
- 2011-11-29 WO PCT/KR2011/009156 patent/WO2012074271A2/ko active Application Filing
- 2011-11-29 EP EP11845718.3A patent/EP2648205A2/en not_active Withdrawn
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20050043211A (ko) * | 2003-11-05 | 2005-05-11 | 엘지전자 주식회사 | 전계 방출 소자 |
KR20050073733A (ko) * | 2004-01-10 | 2005-07-18 | 엘지전자 주식회사 | 전계 방출 소자 및 그 제조 방법 |
KR20090072535A (ko) * | 2007-12-28 | 2009-07-02 | 삼성모바일디스플레이주식회사 | 전계 방출 면광원 소자 및 그 제조 방법 |
Also Published As
Publication number | Publication date |
---|---|
CN103270571A (zh) | 2013-08-28 |
US20130249382A1 (en) | 2013-09-26 |
TW201223855A (en) | 2012-06-16 |
CN103270571B (zh) | 2016-04-06 |
EP2648205A2 (en) | 2013-10-09 |
TWI436941B (zh) | 2014-05-11 |
JP2014500593A (ja) | 2014-01-09 |
WO2012074271A2 (ko) | 2012-06-07 |
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