WO2011148685A1 - Surface treatment apparatus - Google Patents

Surface treatment apparatus Download PDF

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Publication number
WO2011148685A1
WO2011148685A1 PCT/JP2011/054920 JP2011054920W WO2011148685A1 WO 2011148685 A1 WO2011148685 A1 WO 2011148685A1 JP 2011054920 W JP2011054920 W JP 2011054920W WO 2011148685 A1 WO2011148685 A1 WO 2011148685A1
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WO
WIPO (PCT)
Prior art keywords
electrode member
negative electrode
peripheral surface
positive electrode
electrolyte
Prior art date
Application number
PCT/JP2011/054920
Other languages
French (fr)
Japanese (ja)
Inventor
小林大之
加藤誠喜
龍本和宏
Original Assignee
アイシン精機株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by アイシン精機株式会社 filed Critical アイシン精機株式会社
Priority to US13/583,710 priority Critical patent/US20130043122A1/en
Priority to EP11786385.2A priority patent/EP2578728A1/en
Priority to CN2011800218858A priority patent/CN102869815A/en
Priority to BR112012029980A priority patent/BR112012029980A2/en
Publication of WO2011148685A1 publication Critical patent/WO2011148685A1/en

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    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/02—Electroplating of selected surface areas
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D11/00—Electrolytic coating by surface reaction, i.e. forming conversion layers
    • C25D11/005—Apparatus specially adapted for electrolytic conversion coating
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D17/00—Constructional parts, or assemblies thereof, of cells for electrolytic coating
    • C25D17/10—Electrodes, e.g. composition, counter electrode
    • C25D17/12—Shape or form

Definitions

  • the present invention relates to a surface treatment apparatus.
  • the conventional surface treatment apparatus is, for example, a positive electrode member that is electrically connected to a metal workpiece having a circumferential groove as an annular treatment region on the outer circumferential surface, and the outer circumferential surface and the circumferential groove. Electrolysis along the circumferential groove is performed by sealing a gap between the inner circumferential surface and a frame member having inner circumferential surfaces facing each other with a gap therebetween, and both sides of the outer circumferential surface sandwiching the circumferential groove.
  • a non-conductive elastic sealing material capable of forming a liquid passage, a negative electrode member provided in the electrolyte passage, and an electrolyte flow means for flowing the electrolyte along the electrolyte passage. Yes.
  • the surface treatment apparatus forms an electrolyte passage along the annular treatment area on the outer peripheral surface of the object to be treated, and allows the electrolyte solution to flow along the electrolyte passage while, for example, anodizing.
  • the surface treatment can be efficiently performed on the annular processing region.
  • the frame member is formed of a conductive material, and the frame member is annularly opposed to the outer peripheral surface of the object to be processed and the annular treatment region (circumferential groove) with a space therebetween.
  • the negative electrode member which has the inner peripheral surface of is comprised (for example, refer patent document 1).
  • the conventional surface treatment apparatus due to energization between the positive electrode member and the negative electrode member at the time of the surface treatment, metal components such as copper which is easily cationized dissolved in the electrolytic solution are deposited on the surface of the negative electrode member. Easy to deposit. Since the conventional surface treatment apparatus is provided with a negative electrode member having an annular inner peripheral surface, the deposited metal tends to adhere and deposit uniformly on the inner peripheral surface of the negative electrode member over the entire circumference, and the deposited precipitation When the passage cross-sectional area of the electrolyte passage is narrowed by the metal, the smooth flow of the electrolyte is hindered.
  • the frame member constitutes a positive electrode member having an annular inner peripheral surface that is opposed to the outer peripheral surface of the object to be processed and the annular processing region with a gap
  • the frame member is dissolved in the electrolytic solution.
  • non-metallic components such as chlorides and sulfides that are easily anionized are deposited on the surface of the positive electrode member.
  • the temperature of the electrolytic solution is increased in the vicinity of the surface of the annular treatment region due to heat generated by the electrode reaction, and when the smooth flow of the electrolytic solution is hindered, the temperature of the electrolytic solution is likely to increase.
  • the present invention has been made in view of the above circumstances, and an object thereof is to provide a surface treatment apparatus capable of efficiently and repeatedly performing surface treatment at a high voltage.
  • the first characteristic configuration of the surface treatment apparatus includes one of a positive electrode member and a negative electrode member electrically connected to a metal workpiece having an annular treatment region on the outer peripheral surface, the outer peripheral surface, A frame member having a non-conductive inner peripheral surface facing the annular processing region with a space therebetween, and both sides of the outer peripheral surface sandwiching the annular processing region and the inner peripheral surface By sealing the gap, a non-conductive elastic sealing material capable of forming an electrolyte solution passage along the annular treatment region, and a side of the object to be processed so that a tip portion enters the electrolyte solution passage.
  • the other of the rod-shaped positive electrode member and the negative electrode member projecting toward the surface, and an electrolyte solution passing means for allowing the electrolyte solution to flow along the electrolyte passage.
  • the frame member has a non-conductive inner peripheral surface that is opposed to the outer peripheral surface of the object to be processed and the annular processing region with a space therebetween.
  • Nonmetallic components do not precipitate on the inner peripheral surface of the frame member.
  • the surface area of the other of the positive electrode member and negative electrode member is made smaller than before, so that metal components and non-metal components are deposited. The adhesion area of the component to the other of the positive electrode member and the negative electrode member can be reduced, and the adhesion strength of the deposited component to the other of the positive electrode member and the negative electrode member can be weakened.
  • the rod-shaped positive electrode member and the negative electrode member protrudes toward the object to be processed so that the tip portion enters the electrolyte passage, the rod-shaped positive electrode member and the negative electrode member
  • the deposited component having a weak adhesion strength deposited on the other side of the electrode is easily removed from the other of the rod-shaped positive electrode member and the negative electrode member by the force of the electrolyte flowing along the electrolyte passage.
  • the deposited component deposited on the other of the negative electrode members is difficult to grow greatly. Therefore, a smooth flow of the electrolytic solution in the electrolytic solution passage can be ensured over a long period of time, and a temperature increase in the vicinity of the surface of the annular processing region can be suppressed over a long period of time. Therefore, with the surface treatment apparatus of this configuration, the surface treatment can be efficiently and repeatedly performed at a high voltage.
  • a second characteristic configuration of the present invention is that a plurality of the other of the rod-like positive electrode member and the negative electrode member are dispersedly arranged along the circumferential direction of the electrolyte passage.
  • the third characteristic configuration of the present invention is that the other of the rod-like positive electrode member and the negative electrode member is projected so that the longitudinal direction thereof is a direction perpendicular to the outer peripheral surface.
  • an electric field is generated between the other of the rod-shaped positive electrode member and the negative electrode member and the annular processed region portions located on the left and right sides with respect to the other of the rod-shaped positive electrode member and the negative electrode member. It is generated symmetrically and it is easy to form a uniform film.
  • 4th characteristic structure of this invention exists in the point which formed the other outer peripheral surface of the said rod-shaped positive electrode member and negative electrode member in the uneven surface.
  • the other surface area of the rod-like positive electrode member and negative electrode member can be increased, so that a large current can flow, and a film having a desired thickness can be efficiently formed in a short time. easy.
  • the fifth characteristic configuration of the present invention is that the tip of the other of the rod-shaped positive electrode member and the negative electrode member is formed in a convex curved shape.
  • This configuration makes it difficult to concentrate the current on the tip near the workpiece, and it is difficult for sparks to occur, so that it is easy to form a uniform film.
  • FIG. 2 is a plan view of a second electrode portion taken along line II-II in FIG.
  • (A) is sectional drawing which shows the fixing structure of a negative electrode member
  • (b) is the III b-III b line arrow side view in (a).
  • First Embodiment 1 to 7 show an anodizing apparatus as an example of a surface processing apparatus according to the present invention.
  • This anodizing apparatus performs anodizing treatment for forming an alumite film on the surface of a piston ring groove A1 of an aluminum alloy piston A as an example of a metal workpiece.
  • the piston ring groove A1 corresponds to a circumferential groove as an annular process area on the piston outer peripheral surface B.
  • the anodizing apparatus includes an electrolytic solution tank 1, an electrolytic solution supply unit 2, an oxidation processing unit 3, and a current supplying unit 4.
  • the electrolytic solution tank 1 is made of vinyl chloride or stainless steel, and has a container shape with an upper end opened.
  • the electrolytic solution tank 1 receives and collects the electrolytic solution that has passed through the oxidation treatment unit 3 and returns to the electrolytic solution supply unit 2.
  • a reflux path 5 is provided.
  • the electrolytic solution supply unit 2 includes a cooling tank 6 for cooling the electrolytic solution refluxed from the electrolytic solution tank 1, a supply path 7 for supplying the electrolytic solution in the cooling tank 6 to the oxidation treatment unit 3, and a supply path 7 and a supply control unit 9 for controlling the operation of the supply pump 8 so that the electrolytic solution is supplied to the oxidation treatment unit 3 at a predetermined timing.
  • the cooling tank 6 includes a cooler 10 for cooling the recovered electrolyte solution, and a cooler 10 based on detection information of the electrolyte temperature by the temperature sensor 11 so that the electrolyte solution is cooled to a predetermined temperature. And a cooling control unit 12 for controlling the operation of the above.
  • the energization unit 4 is for energizing the oxidation treatment unit 3.
  • the energization section 4 preferably has current control means so that the current density can be adjusted.
  • the current control means a conventionally known one composed of an ammeter, a voltmeter, a rectifier or the like can be used.
  • the oxidation processing unit 3 includes a first electrode (anode) unit 13 and a second electrode (cathode) unit 14.
  • the first electrode portion 13 includes a positive electrode member 15 made of metal such as copper or stainless steel having conductivity, and an elevating device 16 that moves the positive electrode member 15 up and down with respect to the second electrode portion 14.
  • the positive electrode member 15 is also used as a holder for holding the piston A, and is electrically connected to the anode terminal 4a of the energizing portion 4, and is electrically connected to the piston A by holding the piston A. Connected.
  • the holder (positive electrode member) 15 is provided with a locking claw (not shown) that is detachable from the inner peripheral surface of the piston A at its lower end. By locking the locking claw to the inner peripheral surface of the piston A, the piston A is held in a posture in which the axial center is along the vertical direction and is electrically connected.
  • the second electrode portion 14 has a circular outer shape in plan view, and has a piston insertion hole 25 that is circular in plan view that allows the piston A to enter in a posture in which the axial center thereof is vertically aligned. Are formed concentrically.
  • the second electrode portion 14 includes a frame member 17 to which a plurality of negative electrode members 41 having a round bar shape are fixed, and fixing plates 18 and 19 disposed above and below the frame member 17.
  • the support base 20 is connected to each other by bolts.
  • Each negative electrode member 41 is formed of platinum (Pt) or conductive stainless steel (SUS).
  • the number of negative electrode members 41 is desirably 4 to 20, and in this embodiment, 14 negative electrode members 41 are dispersedly arranged along the circumferential direction of the frame member 17.
  • the frame member 17, the fixing plates 18, 19 and the support base 20 are all formed of a nonconductive material (insulator) such as vinyl chloride resin.
  • the frame member 17 includes an annular upward concave surface portion 21 in which the lower surface outer peripheral side of the upper fixing plate 18 is recessed upward, and an upper surface outer periphery of the lower fixing plate 19. It is fitted between an annular downward concave surface portion 22 having a side recessed downward and is bolted to each other.
  • the frame member 17 is configured by connecting two frame plates, that is, an upper first frame plate 23 and a lower second frame plate 24, as shown in FIGS.
  • the negative electrode member 41 is sandwiched and fixed between the first frame plate 23 and the second frame plate 24.
  • the first frame plate 23 and the second frame plate 24 are opposed to each other with a space 26 on the piston insertion hole 25 side of the first frame plate 23 and the second frame plate 24.
  • the opposed plate portions 27 and 28 to be made and the flange plate portions 29 and 30 protruding toward the piston insertion hole 25 along the inner peripheral side of the opposed plate portions 27 and 28 are formed in an annular shape.
  • the frame member 17 is a frame plate inner peripheral surface 31 formed as a non-conductive annular inner peripheral surface that is opposed to the piston outer peripheral surface B and the piston ring groove A1 at a predetermined interval over the entire periphery. It has.
  • the lower fixing plate 19 has the same diameter as the piston insertion hole 25, the concentric circular concave surface portion 32, and the top of the piston A in a posture in which the shaft core is vertically aligned.
  • a piston mounting portion 35 for mounting and supporting the surface is provided.
  • the connection flow path 33 connected to the electrolytic solution supply path 7 and the electrolytic solution accumulated in the circular concave surface portion 32 are discharged into the electrolytic solution tank 1 by natural flow.
  • a discharge hole 34 is provided.
  • the piston A held by the holder (positive electrode member) 15 with the shaft core electrically connected in a posture along the vertical direction is inserted through the piston insertion hole 25,
  • a constant interval is provided between the piston outer peripheral surface B and the frame plate inner peripheral surface 31 over the entire circumference. It is positioned concentrically with a gap C.
  • two upper and lower non-conductive annular elastic sealing members 40 are vertically moved over the entire circumference on the side of the inner peripheral surface 31 of the frame member 17.
  • the front end portion 44 is mounted so as not to come off at an interval and so as not to protrude from the inner peripheral surface 31 of the frame plate to the piston outer peripheral surface B side.
  • Each elastic sealing member 40 is formed in an annular shape with a non-conductive material (insulator) such as rubber, and as shown in FIG. 7, it extends so that its tip 44 is pressed against the piston outer peripheral surface B.
  • the annular electrolyte passage 45 along the circumferential groove A1 can be formed by sealing the gap C between the both sides of the piston outer circumferential surface B across the circumferential groove A1 and the inner peripheral surface 31 of the frame plate. is there.
  • Each elastic sealing material 40 is formed with a series of recessed portions 42 that open toward the outer peripheral side thereof over the entire circumference, and upper and lower side wall portions 43 and a tip end portion 44 that is brought into contact with the piston outer peripheral surface B. Are formed in a transverse U-shaped transverse cross-sectional shape.
  • the pressurizing mechanism 51 includes an air supply / discharge device 52 that can freely supply and discharge pressurized air, a supply / discharge control unit 53 that controls the air supply / discharge operation of the air supply / discharge device 52, and a recessed portion of the elastic seal material 40. 42, an air supply / discharge passage 54 communicating with each of the air supply / discharge passages 42, and a pipe joint 56 connecting the air supply / discharge passage 55 of the air supply / discharge device 52 and the air supply / discharge passage 54.
  • the air supply / discharge paths 54 are provided at three locations in the circumferential direction of the second electrode portion 14, and are connected to the air supply / discharge pipes 55 for each of the air supply / discharge paths 54, with respect to the recessed portions 42 of the elastic sealing materials 40. Thus, pressurized air can be freely supplied and discharged from three locations in the circumferential direction.
  • the pressurizing mechanism 51 will be described. As shown in FIG. 6, when the piston A is inserted into the piston insertion hole 25 and placed on the piston placement portion 35, the supply / exhaust control portion 53 passes through the air supply / exhaust passage 54 to insert the recessed portion of each elastic seal material 40. The air supply / exhaust device 52 is operated so that pressurized air is supplied to each of 42.
  • the elastic seal material 40 When pressurized air is supplied to the recessed portion 42 of the elastic seal material 40, the elastic seal material 40 elastically extends toward the piston outer peripheral surface B, and the tip end portion 44 faces the piston outer peripheral surface B. As shown in FIG. 7, the tip 44 is pressed against the piston outer peripheral surface B.
  • the tip 44 of the elastic seal material 40 is brought into pressure contact with the piston outer peripheral surface B, so that a gap C between the piston outer peripheral surface B and the frame plate inner peripheral surface 31 is formed on both sides of the peripheral groove A1. Sealed to form an annular electrolyte passage 45 along the circumferential groove A1.
  • each of the negative electrode members 41 has an electrode shaft portion 46 that protrudes toward the piston A so that the tip end portion 46 a enters the electrolyte passage 45.
  • a fixing shaft portion 47 fixed to the frame member 17 and a connecting shaft portion 48 electrically connected to the cathode terminal 4b of the energizing portion 4 are formed in a straight round bar shape.
  • the shape of the tip end portion 46a of the electrode shaft portion 46 is formed in a convex curved surface shape having no corners.
  • the negative electrode members 41 have an angle range of 75 degrees or less so that the longitudinal direction (axial center direction) is the same direction as the direction orthogonal to the piston outer peripheral surface B. It is desirable to arrange so as to be inclined at In the present embodiment, the plurality of negative electrode members 41 are arranged with respect to the center of the piston insertion hole 25 so that the longitudinal direction of the electrode shaft portion 46 is perpendicular to the piston outer peripheral surface B as shown in FIG. They are arranged radially and are distributed at equal intervals along the circumferential direction of the electrolyte passage 45.
  • each negative electrode member 41 has an electrode shaft portion 46 protruding toward the piston A side in an electrolyte discharge passage 38, which will be described later, and a connecting shaft as shown in FIG.
  • the fixing shaft portion 47 is sandwiched and fixed between the first frame plate 23 and the second frame plate 24 so that the portion 48 protrudes to the outer peripheral side of the frame member 17.
  • connection shaft portion 48 of each negative electrode member 41 is electrically connected to a common connection terminal plate 49 that is electrically connected to the cathode terminal 4 b of the energization portion 4.
  • the connection terminal plate 49 is formed in an annular shape surrounding the frame member 17, and each of the connection shaft portions 48 is fixed to the connection terminal plate 49 and the connection terminal plate 49 by bolts as shown in FIG. 50 and is electrically connected.
  • connection between the connection shaft portion 48 and the connection terminal plate 49 is released, and the negative electrode member 41 to be replaced is placed between the first frame plate 23 and the second frame plate 24. It is possible to easily replace the negative electrode member 41 by inserting it between the first frame plate 23 and the second frame plate 24 and connecting it to the connection terminal plate 49.
  • a plurality of the electrolyte supply nozzles 36 are arranged at regular intervals in the circumferential direction. It is desirable to dispose the same number of electrolyte supply nozzles 36 as the negative electrode members 41. In the present embodiment, 14 electrolytic electrode supply nozzles 36 having the same number as the negative electrode members 41 are disposed.
  • each electrolyte supply nozzle 36 is connected to the connection flow path 33 and includes a supply flow path 37 for supplying the electrolyte solution to the electrolyte passage 45. 37 is open to the inner peripheral surface 31 of the frame plate. As shown in FIG. 2, the electrolyte supply nozzle 36 is provided such that the flow channel axis X of the supply flow channel 37 is inclined at an angle range of 5 to 75 degrees with respect to the tangent to the inner peripheral surface 31 of the frame plate. It is desirable that
  • the space 26 between the upper and lower opposing plate portions 27 and 28 and the space between the upper and lower plate portions 29 and 30 between the electrolyte supply nozzles 36 adjacent in the circumferential direction are as follows. It is provided as an electrolyte discharge channel 38.
  • Each electrolytic solution supply nozzle 36 can supply the electrolytic solution to the electrolytic solution passage 45 from a direction inclined with respect to the tangent to the inner peripheral surface 31 of the frame plate so that the electrolytic solution flows along the electrolytic solution passage 45. It is arranged.
  • the electrolytic solution supply unit 2 including these electrolytic solution supply nozzles 36 is provided as an electrolytic solution flow means for flowing the electrolytic solution along the electrolytic solution passage 45, as shown by an arrow a in FIG. Since the electrolytic solution flows so as to surround the surface of the electrode shaft portion 46, it is easy to remove the deposited metal deposited on the electrode shaft portion 46 with low adhesion strength by the force of the electrolytic solution.
  • a through hole 39 penetrating through the lower opposing plate portion 28, the lower fixing plate 19, and the support base 20 is formed at a position between the electrolyte solution supply nozzles 36 adjacent in the circumferential direction. Then, the electrolytic solution in the discharge channel 38 naturally flows down from these through holes 39 and is discharged into the electrolytic solution tank 1.
  • the deposited metal deposited on the negative electrode member 41 is large and difficult to grow. Therefore, the electrode is used until the deposited thickness of the deposited metal reaches a thickness that requires replacement of the negative electrode member 41.
  • the time is approximately twice as long as that of a conventional anodizing apparatus having a negative electrode member having an annular inner peripheral surface facing the outer peripheral surface B and the peripheral groove A1 of the piston A with a space therebetween. It was.
  • the burn voltage is 50 V or more higher than the conventional anodizing apparatus disclosed in Patent Document 1, and the set voltage is 30 V.
  • the processing time could be shortened by 30% or more.
  • FIG. 8 shows a negative electrode member 41 in another embodiment of the surface treatment apparatus (anodizing apparatus) according to the present invention.
  • an uneven surface 57 having convex and concave curved surfaces alternately in the axial direction is formed on the outer peripheral surface thereof so that the surface area of the electrode shaft portion 46 is increased.
  • the convex curved surface and the concave curved surface are formed in a spiral shape around the axis of the electrode shaft portion 46.
  • Other configurations are the same as those of the first embodiment.
  • the surface treatment apparatus according to the present invention may perform surface treatment on a convex surface (mountain shape) or a planar annular region to be processed which is provided on the outer peripheral surface of the object to be processed.
  • the surface treatment apparatus according to the present invention includes a negative electrode member that is electrically connected to a metal object to be processed, and a protrusion that projects toward the object to be processed so that the tip portion enters the electrolyte passage.
  • a certain rod-shaped positive electrode member may be provided.
  • the surface treatment apparatus according to the present invention may include the other of a positive electrode member and a negative electrode member in the shape of an ellipse or polygonal in cross section. 4).
  • the surface treatment apparatus according to the present invention may include the other of a single rod-shaped positive electrode member and a negative electrode member. 5.
  • the other of the rod-like positive electrode member and the negative electrode member may protrude so that the longitudinal direction thereof is an oblique direction with respect to the outer peripheral surface of the workpiece. 6).
  • the other of the rod-like positive electrode member and the negative electrode member is projected so that the longitudinal direction thereof is an oblique direction toward the upper side of the electrolyte flow direction in the electrolyte passage. Alternatively, it may be provided so as to project in an oblique direction toward the lower side in the flow direction. 7).
  • the surface treatment apparatus according to the present invention may be an electroplating apparatus for performing an electroplating process as a surface treatment.
  • Electrolyte flow means 15 One of positive electrode member and negative electrode member (positive electrode member) 17 Frame member 31 Non-conductive inner peripheral surface 40 Elastic seal material 41 The other of the rod-shaped positive electrode member and the negative electrode member (negative electrode member) 45 Electrolyte passage 46a Tip portion 57 Uneven surface A Object A1 Annular region (circumferential groove) B Outer peripheral surface C Clearance

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  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
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  • Electroplating Methods And Accessories (AREA)

Abstract

Disclosed is a surface treatment apparatus that is provided with: either one of a positive electrode member and a negative electrode member, which are electrically connected to a metallic subject to be treated, said subject having, on the outer circumferential surface, an annular region to be treated; a frame member, which is provided with the nonconductive inner circumferential surface that faces, with a gap therebetween, the outer circumferential surface and the annular region to be treated; a nonconductive elastic seal material, with which an electrolyte path can be formed along the annular region to be treated, by sealing the gap between the outer circumferential surface portions and the inner circumferential surfaces, said outer circumferential surface portions having the annular region therebetween; the other one of the bar-like positive electrode member and the negative electrode member, which protrude toward the subject to be treated such that the leading end portion of the member enters the electrolyte path; and an electrolyte circulating means, which makes the electrolyte circulate along the electrolyte path.

Description

表面処理装置Surface treatment equipment
　本発明は表面処理装置に関する。 The present invention relates to a surface treatment apparatus.
　従来の表面処理装置は、例えば、環状被処理領域としての周溝を外周面に有する金属製の被処理物に電気的に接続される陽電極部材と、前記外周面及び前記周溝に対して間隔を隔てて対向する内周面を備えた枠部材と、前記外周面のうち前記周溝を挟んだ両側夫々と前記内周面との隙間をシールすることにより、前記周溝に沿った電解液通路を形成可能な非導電性の弾性シール材と、前記電解液通路に設けてある陰電極部材と、前記電解液通路に沿って電解液を通流させる電解液通流手段とを備えている。
　上記表面処理装置は、被処理物の外周面に有する環状被処理領域に沿った電解液通路を形成して、その電解液通路に沿って電解液を通流させながら、例えば陽極酸化処理などの表面処理を環状被処理領域に対して効率良く行うことができる。
　従来の上記表面処理装置では、枠部材を導電性の材料で形成して、この枠部材で、被処理物の外周面及び環状被処理領域（周溝）に対して間隔を隔てて対向する環状の内周面を有する陰電極部材を構成してある（例えば、特許文献１参照）。 The conventional surface treatment apparatus is, for example, a positive electrode member that is electrically connected to a metal workpiece having a circumferential groove as an annular treatment region on the outer circumferential surface, and the outer circumferential surface and the circumferential groove. Electrolysis along the circumferential groove is performed by sealing a gap between the inner circumferential surface and a frame member having inner circumferential surfaces facing each other with a gap therebetween, and both sides of the outer circumferential surface sandwiching the circumferential groove. A non-conductive elastic sealing material capable of forming a liquid passage, a negative electrode member provided in the electrolyte passage, and an electrolyte flow means for flowing the electrolyte along the electrolyte passage. Yes.
The surface treatment apparatus forms an electrolyte passage along the annular treatment area on the outer peripheral surface of the object to be treated, and allows the electrolyte solution to flow along the electrolyte passage while, for example, anodizing. The surface treatment can be efficiently performed on the annular processing region.
In the conventional surface treatment apparatus, the frame member is formed of a conductive material, and the frame member is annularly opposed to the outer peripheral surface of the object to be processed and the annular treatment region (circumferential groove) with a space therebetween. The negative electrode member which has the inner peripheral surface of is comprised (for example, refer patent document 1).
特開２００３－１１９５９３号公報（段落番号［００２４］）JP 2003-119593 A (paragraph number [0024])
　上記表面処理装置は、表面処理時における陽電極部材と陰電極部材とに亘る通電により、電解液に溶解している陽イオン化し易い銅などの金属成分が陰電極部材の表面に析出して付着堆積し易い。
　従来の表面処理装置は、環状の内周面を有する陰電極部材を設けてあるために、析出金属が陰電極部材の内周面に全周に亘って均一に付着堆積し易く、堆積した析出金属によって電解液通路の通路断面積が狭められると電解液の円滑な通流が妨げられる。
　尚、枠部材が、被処理物の外周面及び環状被処理領域に対して間隔を隔てて対向する環状の内周面を有する陽電極部材を構成している場合は、電解液に溶解している陰イオン化し易い塩化物や硫化物などの非金属成分が陽電極部材の表面に析出して、同様の現象が生じる。
　電解液の温度は、電極反応で発生する熱により環状被処理領域の表面近傍で高くなり、電解液の円滑な通流が妨げられると、電解液の温度が上昇し易い。
　電解液の温度が上昇すると、例えばアルマイト被膜などの被膜を環状被処理領域に形成する表面処理において皮膜ヤケが生じ易くなる。すなわち、陽極酸化処理時に電流分布が不均一になり、或いは電流密度が過大になること等によって生じた、焼けたような外観を呈し易くなり、表面処理を高い電圧で能率良く繰り返し行うことができないおそれがある。
　本発明は上記実情に鑑みてなされたものであって、表面処理を高い電圧で能率良く繰り返し行うことができる表面処理装置を提供することを目的とする。 In the above surface treatment apparatus, due to energization between the positive electrode member and the negative electrode member at the time of the surface treatment, metal components such as copper which is easily cationized dissolved in the electrolytic solution are deposited on the surface of the negative electrode member. Easy to deposit.
Since the conventional surface treatment apparatus is provided with a negative electrode member having an annular inner peripheral surface, the deposited metal tends to adhere and deposit uniformly on the inner peripheral surface of the negative electrode member over the entire circumference, and the deposited precipitation When the passage cross-sectional area of the electrolyte passage is narrowed by the metal, the smooth flow of the electrolyte is hindered.
In addition, when the frame member constitutes a positive electrode member having an annular inner peripheral surface that is opposed to the outer peripheral surface of the object to be processed and the annular processing region with a gap, the frame member is dissolved in the electrolytic solution. The same phenomenon occurs when non-metallic components such as chlorides and sulfides that are easily anionized are deposited on the surface of the positive electrode member.
The temperature of the electrolytic solution is increased in the vicinity of the surface of the annular treatment region due to heat generated by the electrode reaction, and when the smooth flow of the electrolytic solution is hindered, the temperature of the electrolytic solution is likely to increase.
When the temperature of the electrolytic solution rises, for example, a coating burn is likely to occur in the surface treatment in which a coating such as an alumite coating is formed in the annular processing region. In other words, the current distribution becomes uneven during anodizing treatment, or a burnt appearance caused by excessive current density is likely to be exhibited, and the surface treatment cannot be efficiently and repeatedly performed at a high voltage. There is a fear.
The present invention has been made in view of the above circumstances, and an object thereof is to provide a surface treatment apparatus capable of efficiently and repeatedly performing surface treatment at a high voltage.
　本発明による表面処理装置の第１特徴構成は、環状被処理領域を外周面に有する金属製の被処理物に電気的に接続される陽電極部材及び陰電極部材の一方と、前記外周面及び前記環状被処理領域に対して間隔を隔てて対向する非導電性の内周面を備えた枠部材と、前記外周面のうち前記環状被処理領域を挟んだ両側夫々と前記内周面との隙間をシールすることにより、前記環状被処理領域に沿った電解液通路を形成可能な非導電性の弾性シール材と、先端部が前記電解液通路の中に入り込むように前記被処理物の側に向けて突設してある棒状の陽電極部材及び陰電極部材の他方と、前記電解液通路に沿って電解液を通流させる電解液通流手段とを備えた点にある。 The first characteristic configuration of the surface treatment apparatus according to the present invention includes one of a positive electrode member and a negative electrode member electrically connected to a metal workpiece having an annular treatment region on the outer peripheral surface, the outer peripheral surface, A frame member having a non-conductive inner peripheral surface facing the annular processing region with a space therebetween, and both sides of the outer peripheral surface sandwiching the annular processing region and the inner peripheral surface By sealing the gap, a non-conductive elastic sealing material capable of forming an electrolyte solution passage along the annular treatment region, and a side of the object to be processed so that a tip portion enters the electrolyte solution passage. The other of the rod-shaped positive electrode member and the negative electrode member projecting toward the surface, and an electrolyte solution passing means for allowing the electrolyte solution to flow along the electrolyte passage.
　本構成であれば、枠部材が被処理物の外周面及び環状被処理領域に対して間隔を隔てて対向する非導電性の内周面を備えているので、表面処理時において、金属成分や非金属成分が枠部材の内周面に析出することがない。
　また、棒状の陽電極部材及び陰電極部材の他方を突設してあるので、陽電極部材及び陰電極部材の他方の表面積を従来に比べて小さくして、金属成分や非金属成分などの析出成分の陽電極部材及び陰電極部材の他方に対する付着面積を小さくすることができ、析出成分の陽電極部材及び陰電極部材の他方に対する付着強度を弱めることができる。
　そして、棒状の陽電極部材及び陰電極部材の他方を先端部が電解液通路の中に入り込むように被処理物の側に向けて突設してあるので、棒状の陽電極部材及び陰電極部材の他方に堆積した付着強度が弱い析出成分を、電解液通路に沿って通流する電解液の勢いで押し流して棒状の陽電極部材及び陰電極部材の他方から取り除き易くなり、棒状の陽電極部材及び陰電極部材の他方に堆積した析出成分が大きく成長し難い。
　したがって、電解液通路における電解液の円滑な通流を長期に亘って確保して、環状被処理領域の表面近傍における温度上昇を長期に亘って抑制することができる。
　よって、本構成の表面処理装置であれば、表面処理を高い電圧で能率良く繰り返し行うことができる。 In this configuration, the frame member has a non-conductive inner peripheral surface that is opposed to the outer peripheral surface of the object to be processed and the annular processing region with a space therebetween. Nonmetallic components do not precipitate on the inner peripheral surface of the frame member.
In addition, since the other of the rod-shaped positive electrode member and negative electrode member is protruded, the surface area of the other of the positive electrode member and negative electrode member is made smaller than before, so that metal components and non-metal components are deposited. The adhesion area of the component to the other of the positive electrode member and the negative electrode member can be reduced, and the adhesion strength of the deposited component to the other of the positive electrode member and the negative electrode member can be weakened.
Since the other of the rod-shaped positive electrode member and the negative electrode member protrudes toward the object to be processed so that the tip portion enters the electrolyte passage, the rod-shaped positive electrode member and the negative electrode member The deposited component having a weak adhesion strength deposited on the other side of the electrode is easily removed from the other of the rod-shaped positive electrode member and the negative electrode member by the force of the electrolyte flowing along the electrolyte passage. And the deposited component deposited on the other of the negative electrode members is difficult to grow greatly.
Therefore, a smooth flow of the electrolytic solution in the electrolytic solution passage can be ensured over a long period of time, and a temperature increase in the vicinity of the surface of the annular processing region can be suppressed over a long period of time.
Therefore, with the surface treatment apparatus of this configuration, the surface treatment can be efficiently and repeatedly performed at a high voltage.
　本発明の第２特徴構成は、前記棒状の陽電極部材及び陰電極部材の他方の複数を前記電解液通路の周方向に沿って分散配置した点にある。 A second characteristic configuration of the present invention is that a plurality of the other of the rod-like positive electrode member and the negative electrode member are dispersedly arranged along the circumferential direction of the electrolyte passage.
　本構成であれば、棒状の陽電極部材及び陰電極部材の他方と環状被処理領域との間に発生する電場の強さを環状被処理領域に沿って分散させて、均質な被膜を形成し易い。 With this configuration, the electric field generated between the other of the rod-shaped positive electrode member and the negative electrode member and the annular treatment area is dispersed along the annular treatment area to form a uniform film. easy.
　本発明の第３特徴構成は、前記棒状の陽電極部材及び陰電極部材の他方を、その長手方向が前記外周面に対して直交する方向となるように突設した点にある。 The third characteristic configuration of the present invention is that the other of the rod-like positive electrode member and the negative electrode member is projected so that the longitudinal direction thereof is a direction perpendicular to the outer peripheral surface.
　本構成であれば、棒状の陽電極部材及び陰電極部材の他方と、その棒状の陽電極部材及び陰電極部材の他方に対して左右両側に位置する環状被処理領域部分との間に電場を左右対称に発生させて、均質な被膜を形成し易い。 In this configuration, an electric field is generated between the other of the rod-shaped positive electrode member and the negative electrode member and the annular processed region portions located on the left and right sides with respect to the other of the rod-shaped positive electrode member and the negative electrode member. It is generated symmetrically and it is easy to form a uniform film.
　本発明の第４特徴構成は、前記棒状の陽電極部材及び陰電極部材の他方の外周面を凹凸面に形成した点にある。 4th characteristic structure of this invention exists in the point which formed the other outer peripheral surface of the said rod-shaped positive electrode member and negative electrode member in the uneven surface.
　本構成であれば、棒状の陽電極部材及び陰電極部材の他方の表面積を大きくすることができるので大きな電流を流すことができるようになり、所望厚さの被膜を短い時間で能率良く形成し易い。 With this configuration, the other surface area of the rod-like positive electrode member and negative electrode member can be increased, so that a large current can flow, and a film having a desired thickness can be efficiently formed in a short time. easy.
　本発明の第５特徴構成は、前記棒状の陽電極部材及び陰電極部材の他方における先端部の形状を凸曲面状に形成した点にある。 The fifth characteristic configuration of the present invention is that the tip of the other of the rod-shaped positive electrode member and the negative electrode member is formed in a convex curved shape.
　本構成であれば、被処理物に近い先端部に電流が集中し難くなり、スパークが発生し難いので、均質な被膜を形成し易い。 This configuration makes it difficult to concentrate the current on the tip near the workpiece, and it is difficult for sparks to occur, so that it is easy to form a uniform film.
表面処理装置（陽極酸化処理装置）の概略図である。It is the schematic of a surface treatment apparatus (anodization processing apparatus). 図１のII－II線矢視における第２電極部の平面図である。FIG. 2 is a plan view of a second electrode portion taken along line II-II in FIG. （ａ）は陰電極部材の固定構造を示す断面図、（ｂ）は（ａ）におけるIII ｂ－III ｂ線矢視側面図である。(A) is sectional drawing which shows the fixing structure of a negative electrode member, (b) is the III b-III b line arrow side view in (a). 第２電極部の電解液供給ノズル部分を示す断面図である。It is sectional drawing which shows the electrolyte solution supply nozzle part of a 2nd electrode part. 第２電極部の内周側を示す側面図である。It is a side view which shows the inner peripheral side of a 2nd electrode part. 第２電極部の弾性シール材がピストンの外周面から離間している状態を示す断面図である。It is sectional drawing which shows the state from which the elastic sealing material of the 2nd electrode part is spaced apart from the outer peripheral surface of a piston. 第２電極部の弾性シール材がピストンの外周面に圧接されている状態を示す断面図である。It is sectional drawing which shows the state by which the elastic sealing material of a 2nd electrode part is press-contacted to the outer peripheral surface of a piston. 第２実施形態の表面処理装置（陽極酸化処理装置）における陰電極部材を示す側面図である。It is a side view which shows the negative electrode member in the surface treatment apparatus (anodization apparatus) of 2nd Embodiment.
　以下に本発明の実施の形態を図面に基づいて説明する。
〔第１実施形態〕
　図１～図７は、本発明による表面処理装置の一例としての陽極酸化処理装置を示している。この陽極酸化処理装置は、金属製の被処理物の一例としてのアルミニウム合金製ピストンＡのピストンリング溝Ａ１に対して、その表面にアルマイト被膜を形成する陽極酸化処理を行うものである。 Embodiments of the present invention will be described below with reference to the drawings.
[First Embodiment]
1 to 7 show an anodizing apparatus as an example of a surface processing apparatus according to the present invention. This anodizing apparatus performs anodizing treatment for forming an alumite film on the surface of a piston ring groove A1 of an aluminum alloy piston A as an example of a metal workpiece.
　具体的には、円柱状のピストンＡの頂部からスカート部にかけて形成された３個のピストンリング溝Ａ１，Ａ２，Ａ３のうちの、頂部側のピストンリング（コンプレッションリング）溝Ａ１の表面を含む外周面（以下、ピストン外周面という）Ｂに対して陽極酸化処理を実施する。
　ピストンリング溝Ａ１が、ピストン外周面Ｂに有する環状被処理領域としての周溝に相当している。 Specifically, the outer periphery including the surface of the piston ring (compression ring) groove A1 on the top side of the three piston ring grooves A1, A2 and A3 formed from the top to the skirt of the cylindrical piston A Anodizing is performed on the surface (hereinafter referred to as piston outer peripheral surface) B.
The piston ring groove A1 corresponds to a circumferential groove as an annular process area on the piston outer peripheral surface B.
　陽極酸化処理装置は、図１に示すように、電解液槽１と電解液供給部２と酸化処理部３と通電部４とを有する。
　電解液槽１は、塩化ビニル製又はステンレス鋼製で、上端が開口する容器状のものであり、酸化処理部３を通過した電解液を受け止めて回収するとともに、電解液供給部２に還流するための還流路５が設けられている。 As shown in FIG. 1, the anodizing apparatus includes an electrolytic solution tank 1, an electrolytic solution supply unit 2, an oxidation processing unit 3, and a current supplying unit 4.
The electrolytic solution tank 1 is made of vinyl chloride or stainless steel, and has a container shape with an upper end opened. The electrolytic solution tank 1 receives and collects the electrolytic solution that has passed through the oxidation treatment unit 3 and returns to the electrolytic solution supply unit 2. A reflux path 5 is provided.
　電解液供給部２は、電解液槽１から還流された電解液を冷却するための冷却槽６と、冷却槽６の電解液を酸化処理部３に供給するための供給路７と、供給路７に設けてある供給ポンプ８と、電解液が所定のタイミングで酸化処理部３に供給されるように供給ポンプ８の運転を制御する供給制御部９とを有している。 The electrolytic solution supply unit 2 includes a cooling tank 6 for cooling the electrolytic solution refluxed from the electrolytic solution tank 1, a supply path 7 for supplying the electrolytic solution in the cooling tank 6 to the oxidation treatment unit 3, and a supply path 7 and a supply control unit 9 for controlling the operation of the supply pump 8 so that the electrolytic solution is supplied to the oxidation treatment unit 3 at a predetermined timing.
　冷却槽６には、回収された電解液を冷却するための冷却機１０と、電解液が所定温度に冷却されるように、温度センサ１１による電解液温度の検出情報に基づいて、冷却機１０の運転を制御する冷却制御部１２とが設けられている。 The cooling tank 6 includes a cooler 10 for cooling the recovered electrolyte solution, and a cooler 10 based on detection information of the electrolyte temperature by the temperature sensor 11 so that the electrolyte solution is cooled to a predetermined temperature. And a cooling control unit 12 for controlling the operation of the above.
　通電部４は、酸化処理部３に通電するものである。この通電部４は電流密度を調整できるように電流制御手段を持つものとするのが好ましい。電流制御手段は電流計、電圧計、整流器等で構成された従来公知のものを用いることができる。 The energization unit 4 is for energizing the oxidation treatment unit 3. The energization section 4 preferably has current control means so that the current density can be adjusted. As the current control means, a conventionally known one composed of an ammeter, a voltmeter, a rectifier or the like can be used.
　酸化処理部３は、第１電極（陽極）部１３と第２電極（陰極）部１４とを有する。
　第１電極部１３は、導電性を備えた銅やステンレス鋼などの金属製の陽電極部材１５と、陽電極部材１５を第２電極部１４に対して昇降させる昇降装置１６とを備えている。
　陽電極部材１５は、ピストンＡを保持する保持具と兼用してあって、通電部４の陽極端子４ａに電気的に接続されており、ピストンＡを保持することにより当該ピストンＡに電気的に接続される。 The oxidation processing unit 3 includes a first electrode (anode) unit 13 and a second electrode (cathode) unit 14.
The first electrode portion 13 includes a positive electrode member 15 made of metal such as copper or stainless steel having conductivity, and an elevating device 16 that moves the positive electrode member 15 up and down with respect to the second electrode portion 14. .
The positive electrode member 15 is also used as a holder for holding the piston A, and is electrically connected to the anode terminal 4a of the energizing portion 4, and is electrically connected to the piston A by holding the piston A. Connected.
　保持具（陽電極部材）１５は、ピストンＡの内周面に係脱自在な係止爪（図示せず）をその下端部に備えている。この係止爪をピストンＡの内周面に係止することにより、ピストンＡをその軸芯が垂直方向に沿う姿勢で、かつ、電気的に接続した状態で保持する。 The holder (positive electrode member) 15 is provided with a locking claw (not shown) that is detachable from the inner peripheral surface of the piston A at its lower end. By locking the locking claw to the inner peripheral surface of the piston A, the piston A is held in a posture in which the axial center is along the vertical direction and is electrically connected.
　第２電極部１４は、図２に示すように、外形が平面視で円形に形成され、ピストンＡをその軸芯を上下方向に沿わせた姿勢で入り込ませる平面視で円形のピストン挿入孔２５が同芯状に形成されている。 As shown in FIG. 2, the second electrode portion 14 has a circular outer shape in plan view, and has a piston insertion hole 25 that is circular in plan view that allows the piston A to enter in a posture in which the axial center thereof is vertically aligned. Are formed concentrically.
　第２電極部１４は、図１～図３に示すように、丸棒状の複数の陰電極部材４１を固定してある枠部材１７と、枠部材１７の上下に配置した固定板１８，１９と、支持基盤２０とを有し、互いにボルト連結してある。各陰電極部材４１は、白金（Ｐｔ）又は導電性のステンレス鋼（ＳＵＳ）で形成してある。
　陰電極部材４１の数は４～２０本が望ましく、本実施形態では、１４本の陰電極部材４１を枠部材１７の周方向に沿って分散配置してある。
　枠部材１７、固定板１８，１９及び支持基盤２０は、いずれも、塩化ビニル樹脂などの非導電性材料（絶縁体）で形成されている。 As shown in FIGS. 1 to 3, the second electrode portion 14 includes a frame member 17 to which a plurality of negative electrode members 41 having a round bar shape are fixed, and fixing plates 18 and 19 disposed above and below the frame member 17. The support base 20 is connected to each other by bolts. Each negative electrode member 41 is formed of platinum (Pt) or conductive stainless steel (SUS).
The number of negative electrode members 41 is desirably 4 to 20, and in this embodiment, 14 negative electrode members 41 are dispersedly arranged along the circumferential direction of the frame member 17.
The frame member 17, the fixing plates 18, 19 and the support base 20 are all formed of a nonconductive material (insulator) such as vinyl chloride resin.
　枠部材１７は、図１，図３，図４に示すように、上側固定板１８の下面外周側を上向きに凹入させてある環状の上向き凹面部２１と、下側固定板１９の上面外周側を下向きに凹入させてある環状の下向き凹面部２２との間に嵌合されて、互いにボルト連結してある。 As shown in FIGS. 1, 3, and 4, the frame member 17 includes an annular upward concave surface portion 21 in which the lower surface outer peripheral side of the upper fixing plate 18 is recessed upward, and an upper surface outer periphery of the lower fixing plate 19. It is fitted between an annular downward concave surface portion 22 having a side recessed downward and is bolted to each other.
　枠部材１７は、図１に示すように、上側の第１枠板２３と下側の第２枠板２４との二枚の枠板をボルト連結することにより構成してあり、図３，図５に示すように、第１枠板２３と第２枠板２４との間に陰電極部材４１を挟み込んで固定してある。 As shown in FIG. 1, the frame member 17 is configured by connecting two frame plates, that is, an upper first frame plate 23 and a lower second frame plate 24, as shown in FIGS. As shown in FIG. 5, the negative electrode member 41 is sandwiched and fixed between the first frame plate 23 and the second frame plate 24.
　図４～図６に示すように、第１枠板２３及び第２枠板２４のピストン挿入孔２５の側には、第１枠板２３と第２枠板２４とを空間２６を隔てて対向させる対向板部２７，２８と、対向板部２７，２８の内周側に沿ってピストン挿通孔２５の側に突出する鍔板部２９，３０とを環状に形成してある。 As shown in FIGS. 4 to 6, the first frame plate 23 and the second frame plate 24 are opposed to each other with a space 26 on the piston insertion hole 25 side of the first frame plate 23 and the second frame plate 24. The opposed plate portions 27 and 28 to be made and the flange plate portions 29 and 30 protruding toward the piston insertion hole 25 along the inner peripheral side of the opposed plate portions 27 and 28 are formed in an annular shape.
　各鍔板部２９，３０の内周面（以下、枠板内周面という）３１の内側がピストン挿通孔２５として形成されている。
　したがって、枠部材１７は、ピストン外周面Ｂ及びピストンリング溝Ａ１に対して全周に亘って一定間隔を隔てて対向する非導電性の円環状内周面として形成された枠板内周面３１を備えている。 Inside the inner peripheral surfaces (hereinafter referred to as “frame plate inner peripheral surfaces”) 31 of the flange plate portions 29, 30 are formed as piston insertion holes 25.
Therefore, the frame member 17 is a frame plate inner peripheral surface 31 formed as a non-conductive annular inner peripheral surface that is opposed to the piston outer peripheral surface B and the piston ring groove A1 at a predetermined interval over the entire periphery. It has.
　図１に示すように、下側固定板１９には、ピストン挿通孔２５と同径で、かつ、同芯の円形凹面部３２と、軸芯を上下方向に沿わせた姿勢のピストンＡの頂面を載置支持するピストン載置部３５とを設けてある。
　下側固定板１９と支持基盤２０とに亘って、電解液の供給路７に接続される接続流路３３と、円形凹面部３２に溜まった電解液を自然流下により電解液槽１に排出する排出孔３４とが設けられている。 As shown in FIG. 1, the lower fixing plate 19 has the same diameter as the piston insertion hole 25, the concentric circular concave surface portion 32, and the top of the piston A in a posture in which the shaft core is vertically aligned. A piston mounting portion 35 for mounting and supporting the surface is provided.
Over the lower fixing plate 19 and the support base 20, the connection flow path 33 connected to the electrolytic solution supply path 7 and the electrolytic solution accumulated in the circular concave surface portion 32 are discharged into the electrolytic solution tank 1 by natural flow. A discharge hole 34 is provided.
　したがって、図１に示すように、軸芯が鉛直方向に沿う姿勢で電気的に接続した状態で保持具（陽電極部材）１５に保持されたピストンＡが、ピストン挿通孔２５に挿通されて、その頂面がピストン載置部３５に載置されることにより、図３，図４に示すように、ピストン外周面Ｂと枠板内周面３１との間に全周に亘って一定間隔の隙間Ｃを有する同芯状に位置決めされる。 Therefore, as shown in FIG. 1, the piston A held by the holder (positive electrode member) 15 with the shaft core electrically connected in a posture along the vertical direction is inserted through the piston insertion hole 25, By placing the top surface on the piston mounting portion 35, as shown in FIGS. 3 and 4, a constant interval is provided between the piston outer peripheral surface B and the frame plate inner peripheral surface 31 over the entire circumference. It is positioned concentrically with a gap C.
　枠部材１７における枠板内周面３１の側には、図１，図３～図７に示すように、上下二個の非導電性の環状の弾性シール材４０を全周に亘って上下に間隔を隔てて抜け止め状態で、かつ、先端部４４が枠板内周面３１よりもピストン外周面Ｂの側に突出しないように装着してある。 As shown in FIGS. 1 and 3 to 7, two upper and lower non-conductive annular elastic sealing members 40 are vertically moved over the entire circumference on the side of the inner peripheral surface 31 of the frame member 17. The front end portion 44 is mounted so as not to come off at an interval and so as not to protrude from the inner peripheral surface 31 of the frame plate to the piston outer peripheral surface B side.
　各弾性シール材４０は、ゴムなどの非導電性材料（絶縁体）で円環状に形成してあり、図７に示すように、その先端部４４がピストン外周面Ｂに圧接されるように伸長させて、ピストン外周面Ｂのうち周溝Ａ１を挟んだ両側夫々と枠板内周面３１との隙間Ｃをシールすることにより、周溝Ａ１に沿った環状の電解液通路４５を形成可能である。 Each elastic sealing member 40 is formed in an annular shape with a non-conductive material (insulator) such as rubber, and as shown in FIG. 7, it extends so that its tip 44 is pressed against the piston outer peripheral surface B. The annular electrolyte passage 45 along the circumferential groove A1 can be formed by sealing the gap C between the both sides of the piston outer circumferential surface B across the circumferential groove A1 and the inner peripheral surface 31 of the frame plate. is there.
　各弾性シール材４０は、その外周側に向けて開口する凹入部４２を全周に亘って一連に形成して、上下の側壁部４３と、ピストン外周面Ｂに対して接触させる先端部４４とを一体に備えた横向きＵ字状の横断面形状に形成してある。 Each elastic sealing material 40 is formed with a series of recessed portions 42 that open toward the outer peripheral side thereof over the entire circumference, and upper and lower side wall portions 43 and a tip end portion 44 that is brought into contact with the piston outer peripheral surface B. Are formed in a transverse U-shaped transverse cross-sectional shape.
　図１，図６，図７に示すように、各弾性シール材４０の外周側に加圧流体としての加圧空気を同時に供給することにより、これら弾性シール材４０の内周側（先端部４４）を全周に亘ってピストン外周面Ｂに圧接し、かつ、圧接を解除自在な加圧機構５１を設けてある。 As shown in FIGS. 1, 6, and 7, by simultaneously supplying pressurized air as a pressurized fluid to the outer peripheral side of each elastic sealing material 40, the inner peripheral side (tip portion 44) of these elastic sealing materials 40. ) Is press-contacted to the piston outer peripheral surface B over the entire circumference, and a pressurizing mechanism 51 capable of releasing the press-contact is provided.
　加圧機構５１は、加圧空気の供給及び排出が自在な空気給排装置５２と、空気給排装置５２の空気給排動作を制御する給排制御部５３と、弾性シール材４０の凹入部４２の夫々に連通する空気給排路５４と、空気給排装置５２の空気給排管５５と空気給排路５４とを接続する管継手５６とを有する。 The pressurizing mechanism 51 includes an air supply / discharge device 52 that can freely supply and discharge pressurized air, a supply / discharge control unit 53 that controls the air supply / discharge operation of the air supply / discharge device 52, and a recessed portion of the elastic seal material 40. 42, an air supply / discharge passage 54 communicating with each of the air supply / discharge passages 42, and a pipe joint 56 connecting the air supply / discharge passage 55 of the air supply / discharge device 52 and the air supply / discharge passage 54.
　空気給排路５４は、第２電極部１４の周方向三箇所に設けられ、各空気給排路５４毎に空気給排管５５に接続して、各弾性シール材４０の凹入部４２に対して周方向の三箇所から加圧空気を給排自在である。 The air supply / discharge paths 54 are provided at three locations in the circumferential direction of the second electrode portion 14, and are connected to the air supply / discharge pipes 55 for each of the air supply / discharge paths 54, with respect to the recessed portions 42 of the elastic sealing materials 40. Thus, pressurized air can be freely supplied and discharged from three locations in the circumferential direction.
　加圧機構５１の動作を説明する。
　図６に示すようにピストンＡがピストン挿通孔２５に挿通されてピストン載置部３５に載置されると、給排制御部５３は、空気給排路５４を通して各弾性シール材４０の凹入部４２の夫々に加圧空気が供給されるように、空気給排装置５２を作動させる。 The operation of the pressurizing mechanism 51 will be described.
As shown in FIG. 6, when the piston A is inserted into the piston insertion hole 25 and placed on the piston placement portion 35, the supply / exhaust control portion 53 passes through the air supply / exhaust passage 54 to insert the recessed portion of each elastic seal material 40. The air supply / exhaust device 52 is operated so that pressurized air is supplied to each of 42.
　弾性シール材４０の凹入部４２に加圧空気が供給されると、当該弾性シール材４０がピストン外周面Ｂの側に向けて弾性的に伸長すると共に、先端部４４がピストン外周面Ｂに向けて弾性的に膨出移動して、図７に示すように当該先端部４４がピストン外周面Ｂに圧接される。 When pressurized air is supplied to the recessed portion 42 of the elastic seal material 40, the elastic seal material 40 elastically extends toward the piston outer peripheral surface B, and the tip end portion 44 faces the piston outer peripheral surface B. As shown in FIG. 7, the tip 44 is pressed against the piston outer peripheral surface B.
　図７に示すように弾性シール材４０の先端部４４がピストン外周面Ｂに圧接されることにより、周溝Ａ１を挟む両側夫々においてピストン外周面Ｂと枠板内周面３１との隙間Ｃがシールされて周溝Ａ１に沿った環状の電解液通路４５が形成される。 As shown in FIG. 7, the tip 44 of the elastic seal material 40 is brought into pressure contact with the piston outer peripheral surface B, so that a gap C between the piston outer peripheral surface B and the frame plate inner peripheral surface 31 is formed on both sides of the peripheral groove A1. Sealed to form an annular electrolyte passage 45 along the circumferential groove A1.
　図２，図３，図５に示すように、陰電極部材４１の夫々は、先端部４６ａが電解液通路４５の中に入り込むようにピストンＡの側に向けて突設される電極軸部４６と、枠部材１７に固定される固定用軸部４７と、通電部４の陰極端子４ｂに電気的に接続される接続軸部４８とを備えた真っ直ぐな丸棒状に形成してある。
　電極軸部４６の先端部４６ａの形状は、角部を備えない凸曲面形状に形成してある。 As shown in FIGS. 2, 3, and 5, each of the negative electrode members 41 has an electrode shaft portion 46 that protrudes toward the piston A so that the tip end portion 46 a enters the electrolyte passage 45. And a fixing shaft portion 47 fixed to the frame member 17 and a connecting shaft portion 48 electrically connected to the cathode terminal 4b of the energizing portion 4 are formed in a straight round bar shape.
The shape of the tip end portion 46a of the electrode shaft portion 46 is formed in a convex curved surface shape having no corners.
　複数の陰電極部材４１は、その長手方向（軸芯方向）がピストン外周面Ｂに対して直交する方向と同じ方向となるように、又は、その直交する方向に対して７５度以内の角度範囲で傾斜するように配置するのが望ましい。
　本実施形態では、複数の陰電極部材４１を、図２に示すように、電極軸部４６の長手方向がピストン外周面Ｂに対して直交する方向となるように、ピストン挿入孔２５の中心に対する放射状に配設して、電解液通路４５の周方向に沿って等間隔で分散配置してある。 The negative electrode members 41 have an angle range of 75 degrees or less so that the longitudinal direction (axial center direction) is the same direction as the direction orthogonal to the piston outer peripheral surface B. It is desirable to arrange so as to be inclined at
In the present embodiment, the plurality of negative electrode members 41 are arranged with respect to the center of the piston insertion hole 25 so that the longitudinal direction of the electrode shaft portion 46 is perpendicular to the piston outer peripheral surface B as shown in FIG. They are arranged radially and are distributed at equal intervals along the circumferential direction of the electrolyte passage 45.
　各陰電極部材４１は、図３，図５に示すように電極軸部４６が後述する電解液の排出流路３８の中をピストンＡの側に向けて突出し、図２に示すように接続軸部４８が枠部材１７の外周側に突出するように、固定用軸部４７を第１枠板２３と第２枠板２４との間に嵌合状態で挟み込んで固定されている。 As shown in FIGS. 3 and 5, each negative electrode member 41 has an electrode shaft portion 46 protruding toward the piston A side in an electrolyte discharge passage 38, which will be described later, and a connecting shaft as shown in FIG. The fixing shaft portion 47 is sandwiched and fixed between the first frame plate 23 and the second frame plate 24 so that the portion 48 protrudes to the outer peripheral side of the frame member 17.
　各陰電極部材４１の接続軸部４８は、図２に示すように、通電部４の陰極端子４ｂに電気的に接続された共通の接続端子板４９に電気的に接続されている。
　接続端子板４９は枠部材１７を囲む円環状に形成され、接続軸部４８の夫々は、図３（ｂ）に示すように、接続端子板４９と接続端子板４９にボルト固定される受け板５０との間に挟み込んで、電気的に接続されている。 As shown in FIG. 2, the connection shaft portion 48 of each negative electrode member 41 is electrically connected to a common connection terminal plate 49 that is electrically connected to the cathode terminal 4 b of the energization portion 4.
The connection terminal plate 49 is formed in an annular shape surrounding the frame member 17, and each of the connection shaft portions 48 is fixed to the connection terminal plate 49 and the connection terminal plate 49 by bolts as shown in FIG. 50 and is electrically connected.
　したがって、陰電極部材４１の交換に際しては、接続軸部４８と接続端子板４９との接続を解除して、交換対象の陰電極部材４１を第１枠板２３と第２枠板２４との間から抜き出し、新たな陰電極部材４１を第１枠板２３と第２枠板２４との間に差し込んで接続端子板４９に接続することにより、容易に交換することができる。 Therefore, when replacing the negative electrode member 41, the connection between the connection shaft portion 48 and the connection terminal plate 49 is released, and the negative electrode member 41 to be replaced is placed between the first frame plate 23 and the second frame plate 24. It is possible to easily replace the negative electrode member 41 by inserting it between the first frame plate 23 and the second frame plate 24 and connecting it to the connection terminal plate 49.
　図２，図４，図５に示すように、第１枠板２３における対向板部２７及び鍔板部２９と、第２枠板２４における対向板部２８及び鍔板部３０との間には、電解液供給ノズル３６の複数が周方向に一定間隔を隔てて配設されている。
　電解液供給ノズル３６は、陰電極部材４１と同じ数を配設するのが望ましく、本実施形態では陰電極部材４１と同じ数の１４個を配設してある。 As shown in FIGS. 2, 4, and 5, there is a gap between the opposing plate portion 27 and the saddle plate portion 29 in the first frame plate 23 and the opposing plate portion 28 and the saddle plate portion 30 in the second frame plate 24. A plurality of the electrolyte supply nozzles 36 are arranged at regular intervals in the circumferential direction.
It is desirable to dispose the same number of electrolyte supply nozzles 36 as the negative electrode members 41. In the present embodiment, 14 electrolytic electrode supply nozzles 36 having the same number as the negative electrode members 41 are disposed.
　図４，図５に示すように、各電解液供給ノズル３６は、接続流路３３に接続されているとともに、電解液通路４５に電解液を供給する供給流路３７を備え、この供給流路３７が枠板内周面３１に開口している。
　電解液供給ノズル３６は、図２に示すように、その供給流路３７の流路軸芯Ｘが枠板内周面３１の接線に対して５～７５度の角度範囲で傾斜するように設けてあるのが望ましい。 As shown in FIGS. 4 and 5, each electrolyte supply nozzle 36 is connected to the connection flow path 33 and includes a supply flow path 37 for supplying the electrolyte solution to the electrolyte passage 45. 37 is open to the inner peripheral surface 31 of the frame plate.
As shown in FIG. 2, the electrolyte supply nozzle 36 is provided such that the flow channel axis X of the supply flow channel 37 is inclined at an angle range of 5 to 75 degrees with respect to the tangent to the inner peripheral surface 31 of the frame plate. It is desirable that
　図１，図５に示すように、周方向で隣り合う電解液供給ノズル３６の間における上下の対向板部２７，２８の間の空間２６及び上下の鍔板部２９，３０の間の空間が電解液の排出流路３８として設けられている。 As shown in FIGS. 1 and 5, the space 26 between the upper and lower opposing plate portions 27 and 28 and the space between the upper and lower plate portions 29 and 30 between the electrolyte supply nozzles 36 adjacent in the circumferential direction are as follows. It is provided as an electrolyte discharge channel 38.
　各電解液供給ノズル３６は、電解液が電解液通路４５に沿って通流するように、枠板内周面３１の接線に対して傾斜する方向から電解液通路４５に電解液を供給できるように配設されている。 Each electrolytic solution supply nozzle 36 can supply the electrolytic solution to the electrolytic solution passage 45 from a direction inclined with respect to the tangent to the inner peripheral surface 31 of the frame plate so that the electrolytic solution flows along the electrolytic solution passage 45. It is arranged.
　したがって、これらの電解液供給ノズル３６を備えた電解液供給部２が、電解液通路４５に沿って電解液を通流させる電解液通流手段として設けられ、図５において矢印ａで示すように、電解液は電極軸部４６の表面を取り巻くように通流するので、電極軸部４６に堆積した付着強度が弱い析出金属を電解液の勢いで押し流して取り除き易い。 Therefore, the electrolytic solution supply unit 2 including these electrolytic solution supply nozzles 36 is provided as an electrolytic solution flow means for flowing the electrolytic solution along the electrolytic solution passage 45, as shown by an arrow a in FIG. Since the electrolytic solution flows so as to surround the surface of the electrode shaft portion 46, it is easy to remove the deposited metal deposited on the electrode shaft portion 46 with low adhesion strength by the force of the electrolytic solution.
　電極軸部４６に堆積した析出金属を取り除き易いので、堆積した析出金属がピストン外周面Ｂや周溝Ａ１に接触することによるスパークが発生し難く、形成したアルマイト被膜がスパークにより溶解して処理品質が低下するおそれが少ない。 Since it is easy to remove the deposited metal deposited on the electrode shaft portion 46, it is difficult for sparks to be generated due to the deposited deposited metal coming into contact with the piston outer peripheral surface B or the circumferential groove A1, and the formed alumite film is dissolved by the spark and processed quality. Is less likely to decrease.
　図２に示すように、周方向で隣り合う電解液供給ノズル３６の間の位置に、下側の対向板部２８，下側固定板１９及び支持基盤２０に亘って貫通する貫通孔３９が形成され、排出流路３８の電解液はこれらの貫通孔３９から自然流下して電解液槽１に排出される。 As shown in FIG. 2, a through hole 39 penetrating through the lower opposing plate portion 28, the lower fixing plate 19, and the support base 20 is formed at a position between the electrolyte solution supply nozzles 36 adjacent in the circumferential direction. Then, the electrolytic solution in the discharge channel 38 naturally flows down from these through holes 39 and is discharged into the electrolytic solution tank 1.
　本実施形態の陽極酸化処理装置は、陰電極部材４１に堆積した析出金属が大きく成長し難いので、析出金属の析出厚さが陰電極部材４１の交換が必要な厚さになるまでの電極使用時間が、ピストンＡの外周面Ｂ及び周溝Ａ１に対して間隔を隔てて対向する環状の内周面を有する陰電極部材を備えた従来の陽極酸化処理装置に比べて、略２倍になった。 In the anodizing apparatus of this embodiment, the deposited metal deposited on the negative electrode member 41 is large and difficult to grow. Therefore, the electrode is used until the deposited thickness of the deposited metal reaches a thickness that requires replacement of the negative electrode member 41. The time is approximately twice as long as that of a conventional anodizing apparatus having a negative electrode member having an annular inner peripheral surface facing the outer peripheral surface B and the peripheral groove A1 of the piston A with a space therebetween. It was.
　また、表１に示すように、膜厚が１５μｍのアルマイト被膜を形成する場合、特許文献１に開示された従来の陽極酸化処理装置に比べて、ヤケ電圧が５０Ｖ以上高くなり、設定電圧を３０Ｖ以上高くすることにより、処理時間を３０％以上短縮することができた。 As shown in Table 1, when an alumite film having a film thickness of 15 μm is formed, the burn voltage is 50 V or more higher than the conventional anodizing apparatus disclosed in Patent Document 1, and the set voltage is 30 V. By increasing the above, the processing time could be shortened by 30% or more.
Figure JPOXMLDOC01-appb-T000001
Figure JPOXMLDOC01-appb-T000001
〔第２実施形態〕
　図８は、本発明による表面処理装置（陽極酸化処理装置）の別実施形態における陰電極部材４１を示す。
　本実施形態では、電極軸部４６の表面積が大きくなるように、その外周面に凸曲面と凹曲面とを軸芯方向に交互に備えた凹凸面５７を形成してある。凸曲面と凹曲面は電極軸部４６の軸芯周りで螺旋状に形成してある。
　その他の構成は第１実施形態と同様である。 [Second Embodiment]
FIG. 8 shows a negative electrode member 41 in another embodiment of the surface treatment apparatus (anodizing apparatus) according to the present invention.
In the present embodiment, an uneven surface 57 having convex and concave curved surfaces alternately in the axial direction is formed on the outer peripheral surface thereof so that the surface area of the electrode shaft portion 46 is increased. The convex curved surface and the concave curved surface are formed in a spiral shape around the axis of the electrode shaft portion 46.
Other configurations are the same as those of the first embodiment.
〔その他の実施形態〕
１．本発明による表面処理装置は、被処理物の外周面に有する凸面状（山状）や平面状の環状被処理領域に対して表面処理を行うものであっても良い。
２．本発明による表面処理装置は、金属製の被処理物に電気的に接続される陰電極部材と、先端部が電解液通路の中に入り込むように被処理物の側に向けて突設してある棒状の陽電極部材とを備えていてもよい。
３．本発明による表面処理装置は、横断面形状が楕円形や多角形の棒状の陽電極部材及び陰電極部材の他方を備えていてもよい。
４．本発明による表面処理装置は、単一の棒状の陽電極部材及び陰電極部材の他方を備えていてもよい。
５．本発明による表面処理装置は、棒状の陽電極部材及び陰電極部材の他方を、その長手方向が被処理物の外周面に対して斜めの方向となるように突設してあってもよい。
６．本発明による表面処理装置は、棒状の陽電極部材及び陰電極部材の他方を、その長手方向が電解液通路における電解液の流れ方向上手側に向かう斜めの方向となるように突設してあっても、流れ方向下手側に向かう斜めの方向となるように突設してあってもよい。７．本発明による表面処理装置は、表面処理としての電気メッキ処理を行うための電気メッキ処理装置であってもよい。 [Other Embodiments]
1. The surface treatment apparatus according to the present invention may perform surface treatment on a convex surface (mountain shape) or a planar annular region to be processed which is provided on the outer peripheral surface of the object to be processed.
2. The surface treatment apparatus according to the present invention includes a negative electrode member that is electrically connected to a metal object to be processed, and a protrusion that projects toward the object to be processed so that the tip portion enters the electrolyte passage. A certain rod-shaped positive electrode member may be provided.
3. The surface treatment apparatus according to the present invention may include the other of a positive electrode member and a negative electrode member in the shape of an ellipse or polygonal in cross section.
4). The surface treatment apparatus according to the present invention may include the other of a single rod-shaped positive electrode member and a negative electrode member.
5. In the surface treatment apparatus according to the present invention, the other of the rod-like positive electrode member and the negative electrode member may protrude so that the longitudinal direction thereof is an oblique direction with respect to the outer peripheral surface of the workpiece.
6). In the surface treatment apparatus according to the present invention, the other of the rod-like positive electrode member and the negative electrode member is projected so that the longitudinal direction thereof is an oblique direction toward the upper side of the electrolyte flow direction in the electrolyte passage. Alternatively, it may be provided so as to project in an oblique direction toward the lower side in the flow direction. 7). The surface treatment apparatus according to the present invention may be an electroplating apparatus for performing an electroplating process as a surface treatment.
２　電解液通流手段
１５　陽電極部材及び陰電極部材の一方（陽電極部材）
１７　枠部材
３１　非導電性の内周面
４０　弾性シール材
４１　棒状の陽電極部材及び陰電極部材の他方（陰電極部材）
４５　電解液通路
４６ａ　先端部
５７　凹凸面
Ａ　被処理物
Ａ１　環状被処理領域（周溝）
Ｂ　外周面
Ｃ　隙間
  2 Electrolyte flow means 15 One of positive electrode member and negative electrode member (positive electrode member)
17 Frame member 31 Non-conductive inner peripheral surface 40 Elastic seal material 41 The other of the rod-shaped positive electrode member and the negative electrode member (negative electrode member)
45 Electrolyte passage 46a Tip portion 57 Uneven surface A Object A1 Annular region (circumferential groove)
B Outer peripheral surface C Clearance

Claims (5)

  1. 　環状被処理領域を外周面に有する金属製の被処理物に電気的に接続される陽電極部材及び陰電極部材の一方と、
    　前記外周面及び前記環状被処理領域に対して間隔を隔てて対向する非導電性の内周面を備えた枠部材と、
    　前記外周面のうち前記環状被処理領域を挟んだ両側夫々と前記内周面との隙間をシールすることにより、前記環状被処理領域に沿った電解液通路を形成可能な非導電性の弾性シール材と、
    　先端部が前記電解液通路の中に入り込むように前記被処理物の側に向けて突設してある棒状の陽電極部材及び陰電極部材の他方と、
    　前記電解液通路に沿って電解液を通流させる電解液通流手段とを備えている表面処理装置。     One of a positive electrode member and a negative electrode member electrically connected to a metal object to be processed having an annular treatment region on the outer peripheral surface;
    A frame member having a non-conductive inner peripheral surface facing the outer peripheral surface and the annular processing region with a gap therebetween;
    A non-conductive elastic seal capable of forming an electrolyte passage along the annular processing region by sealing a gap between each of the outer peripheral surfaces sandwiching the annular processing region and the inner peripheral surface. Material,
    The other of the rod-shaped positive electrode member and the negative electrode member projecting toward the object to be processed so that the tip portion enters the electrolyte passage,
    A surface treatment apparatus comprising: an electrolyte solution flow means for causing the electrolyte solution to flow along the electrolyte solution passage.
  2. 　前記棒状の陽電極部材及び陰電極部材の他方の複数を前記電解液通路の周方向に沿って分散配置してある請求項１記載の表面処理装置。 2. The surface treatment apparatus according to claim 1, wherein a plurality of the other of the rod-shaped positive electrode member and the negative electrode member are dispersedly arranged along a circumferential direction of the electrolyte passage.
  3. 　前記棒状の陽電極部材及び陰電極部材の他方を、その長手方向が前記外周面に対して直交する方向となるように突設してある請求項１又は２記載の表面処理装置。 3. The surface treatment apparatus according to claim 1, wherein the other of the rod-shaped positive electrode member and the negative electrode member is projected so that the longitudinal direction thereof is perpendicular to the outer peripheral surface.
  4. 　前記棒状の陽電極部材及び陰電極部材の他方の外周面を凹凸面に形成してある請求項１～３のいずれか１項記載の表面処理装置。 The surface treatment apparatus according to any one of claims 1 to 3, wherein the other outer peripheral surface of the rod-shaped positive electrode member and negative electrode member is formed as an uneven surface.
  5. 　前記棒状の陽電極部材及び陰電極部材の他方における先端部の形状を凸曲面状に形成してある請求項１～４のいずれか１項記載の表面処理装置。 The surface treatment apparatus according to any one of claims 1 to 4, wherein a shape of a tip portion of the other of the rod-shaped positive electrode member and the negative electrode member is formed in a convex curved surface shape.
PCT/JP2011/054920 2010-05-27 2011-03-03 Surface treatment apparatus WO2011148685A1 (en)

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