WO2011138036A1 - Agencement et procédé d'interférométrie - Google Patents

Agencement et procédé d'interférométrie Download PDF

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Publication number
WO2011138036A1
WO2011138036A1 PCT/EP2011/002246 EP2011002246W WO2011138036A1 WO 2011138036 A1 WO2011138036 A1 WO 2011138036A1 EP 2011002246 W EP2011002246 W EP 2011002246W WO 2011138036 A1 WO2011138036 A1 WO 2011138036A1
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WO
WIPO (PCT)
Prior art keywords
sample
arm
radiation
detector
optical path
Prior art date
Application number
PCT/EP2011/002246
Other languages
German (de)
English (en)
Inventor
Holger Lubatschowski
Ole Massow
Original Assignee
Rowiak Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rowiak Gmbh filed Critical Rowiak Gmbh
Priority to US13/696,392 priority Critical patent/US20130128277A1/en
Publication of WO2011138036A1 publication Critical patent/WO2011138036A1/fr

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Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00Measuring instruments characterised by the use of optical techniques
    • G01B9/02Interferometers
    • G01B9/0209Low-coherence interferometers
    • G01B9/02091Tomographic interferometers, e.g. based on optical coherence
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61BDIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B3/00Apparatus for testing the eyes; Instruments for examining the eyes
    • A61B3/10Objective types, i.e. instruments for examining the eyes independent of the patients' perceptions or reactions
    • A61B3/102Objective types, i.e. instruments for examining the eyes independent of the patients' perceptions or reactions for optical coherence tomography [OCT]
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61BDIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00Measuring for diagnostic purposes; Identification of persons
    • A61B5/0059Measuring for diagnostic purposes; Identification of persons using light, e.g. diagnosis by transillumination, diascopy, fluorescence
    • A61B5/0062Arrangements for scanning
    • A61B5/0066Optical coherence imaging
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00Measuring instruments characterised by the use of optical techniques
    • G01B9/02Interferometers
    • G01B9/02015Interferometers characterised by the beam path configuration
    • G01B9/02027Two or more interferometric channels or interferometers
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00Measuring instruments characterised by the use of optical techniques
    • G01B9/02Interferometers
    • G01B9/02055Reduction or prevention of errors; Testing; Calibration
    • G01B9/02056Passive reduction of errors
    • G01B9/02057Passive reduction of errors by using common path configuration, i.e. reference and object path almost entirely overlapping

Definitions

  • the present invention relates to an arrangement for interferometry according to the preamble of claim 1 and to a corresponding method.
  • OCT optical coherence tomography
  • the FD-OCT devices use a spectrometer as a detector.
  • the so-called spectral interference a modulation of the spectrum, is measured, whereby the modulation frequency is proportional to the path length difference of reference mirror to an object in the sample arm. Since this way the frequencies of different objects can be superpositioned, with this method the entire depth information can be captured with a single measurement.
  • OCT optical dual-beam
  • Conventional optical dual-beam (OCT) arrangements and corresponding methods for interferometry are known, for example, from A. Baumgartner, CK Hitzenberger, E. Ergun, M. Stur, H. Sattmann, W. Drexler, AF Fercher, "Resolution -improved dual-beam and standard optical coherence tomography: A comparison ", Graefe's Arch. Clin. Exp. Ophthalmology 238, 385-392 (2000), by W. Drexler, CK Hitzenberger, H. Sattmann, AF Fercher," Measurement of the thickness of fundus layers by partial coherence tomography ", Opt. Closely. 34, 701-710 (1995), by W. Drexler, O.
  • OCT In the medical field, OCT is used to a very limited extent for cancer diagnosis and skin examination, but to a lesser extent in ophthalmology. Compared to other fabrics, the eye has the advantage that its components are hardly scattering for the radiation used, so that the penetration depth is increased in OCT.
  • Commercially available OCT devices for example, have an imaging depth of approximately 3 mm.
  • information about the condition and the inner structure of the eye can be gained by means of the OCT. This information can be used as a basis for the control of a subsequent treatment of the eye.
  • presbyopia can also be treated.
  • the human eye becomes presbyop (age-prone) because the lens of the human eye loses its elasticity with age, resulting in hardening of the lens and thus loss of accommodation Samplitude. With age, the image can only be sharply focused on the retina over a smaller and smaller area.
  • a treatment of the presbyopia is made possible by the fact that the eye lens is processed with a laser, in order to increase its flexibility again.
  • the human eye lens usually hardens further and becomes cloudy.
  • This disease is called cataract (cataract).
  • the hardened lens is comminuted with an ultrasonic cannula and removed from the eye.
  • an artificial lens is implanted.
  • Both the treatment of the presbyopia, as well as the crushing of the hardened lens in cataract can be done by ultra-short pulse laser.
  • the foci of the individual laser pulses must be placed within the eye lens targeted at predetermined locations, so that there is the desired treatment pattern.
  • a disadvantage of the conventional OCT devices in this context is the already mentioned limitation of their imaging depth to about 3 mm.
  • the area of the eye that is relevant for a laser treatment of an eye includes the cornea (cornea), the area between the cornea and the anterior surface of the lens, and the eye lens. These components of the eye have the following dimensions along the optical axis:
  • the cornea has a thickness of approximately 500 ⁇ m
  • the distance between the back of the cornea and the front surface of the lens is approximately 4 mm
  • the eye lens itself itself has a thickness of 4 to 6 mm.
  • Object of the present invention is to provide an arrangement and a method for interferometry with structurally simple means as possible, with which a significantly improved representation of the sample to be examined is made possible.
  • the (optical or measuring) arrangement according to the invention for interferometry is characterized in that a reference element which is partially transparent to the radiation and part of the radiation is arranged in the beam path of the sample arm, behind which the sample to be examined can be positioned. So- If the sample is no further from the reflective surface of the reference element than the coherence length of the radiation used, an interferometric measurement can be performed with the beam portions reflected from the sample and at the reference element in the manner of a common path interferometer. In addition, a further interferometric measurement can be carried out with the beam component reflected from the sample and passing through the reference arm (ie in the manner of a Michelson interferometer). This results in a structurally simple way two interferometric paths.
  • the advantage of the invention lies in the fact that the two interferometric measurements can not only take place simultaneously, but can detect different depths in the sample to be examined.
  • the interferometric measurement with the fraction of radiation reflected on the reference element will detect structures near the surface of the sample (for example, to a depth of 3 mm), while the interferometric measurement with the fraction of radiation from the reference arm will detect deeper structures in the sample (for example, at a depth from 3 to 6 mm).
  • the invention offers, inter alia, the following advantages:
  • the arrangement according to the invention for interferometry is relatively simple (and therefore hardly susceptible to interference), since it - in contrast, for example, the dual or multi-beam OCT manages with a single beam splitting.
  • the inventive interferometry arrangement avoids multiple reference arms or uses the sample as a second reference arm, more light comes to the sample, and the signal-to-noise ratio improves.
  • the surface of the reference element facing the sample is flat. It can be achieved by a partially reflecting coating and / or by a refractive index jump on this surface that a part of the coherent radiation is reflected onto the detector from this surface. It is advantageous if the partially reflective surface of the reference element is oriented so that as much reflected light reaches the detector. In addition, if this surface is flat, it facilitates the determination of the distance between the reference surface of the reference element and the sample. It is particularly favorable if the sample can be positioned in direct contact with the reference element. In this way, the refractive index jump between the material of the reference element (for example, glass) and the sample for reflecting the coherent radiation can be utilized.
  • the material of the reference element for example, glass
  • This position is also advantageous because a particularly deep region of the sample is still within the coherence length of the optical radiation, measured from the partially reflecting surface of the reference element.
  • elastic or gel-like samples for example soft tissue such as eyes, but also elastomeric plastics
  • the reference element is wedge-shaped.
  • further interferometric referencing is avoided by the light reflected from the top of the plate again on the sample.
  • the optical path length of the reference arm and / or of the sample arm can be changed in each case starting from the beam splitter. This makes it possible to capture structures at different depths in the sample interferometrically.
  • the measuring ranges can be partially overlapped with each other at different depths, so that the spatial relationship of the structures detected in one measuring range to the structures detected in the other measuring range becomes recognizable. With a conventional common-path interferometer, it is not possible to independently change the optical path length of the reference arm and the sample arm.
  • the respective reference surfaces can be displaced separately from one another against the sample. It is particularly expedient if the optical path lengths of the reference arm and / or the sample arm are adjustable so that these optical path lengths (each starting from the beam splitter) are completely aligned with each other. If these path lengths correspond to one another, the two interferometric paths of the arrangement according to the invention capture structures at the same depth within the sample. This allows the two interferometric paths to be calibrated against each other.
  • a focusing element is preferably provided in the sample arm. It ensures that the examination of the sample is limited to a certain range and within this range the available light intensity is increased. It is particularly favorable if the focusing element has such a refractive power for the radiation that the optical path length of the specimen arm from the beam splitter to the focus of the focusing element is longer by a maximum of the Rayleigh length of the radiation than the optical path length of the reference arm.
  • the Rayleigh length is the distance along the optical axis within which the cross-sectional area of a laser beam (starting from the beam waist) doubles. This Rayleigh length z R can be calculated by the
  • Formula Z R ⁇ ⁇ w 0 2 / ⁇ , where w 0 is the beam radius in focus and ⁇ is the wavelength of the light used. If the regions of the sample which can be represented by the two interferometric paths of the arrangement according to the invention lie together within the Rayleigh length, an optimum signal-to-noise ratio and an optimal lateral resolution result (otherwise the light intensity between the one examined region and the other examined region results) falls sharply).
  • the invention relates not only to an interferometric arrangement, but also to a method for interferometry, which is feasible with the arrangement described above.
  • this method the interference of a first beam component passing through the reference arm is measured with a second beam component reaching the detector from the sample.
  • the interference of a third, partially transparent to the radiation, located in the sample before the sample reference element on the detector beam passing portion is measured with a fourth, reaching from the sample to the detector beam component.
  • information about structures from different deep regions of the sample can be obtained in a structurally simple way and possibly even simultaneously.
  • the detected depth range can be doubled, for example, from 3 mm to 6 mm, while maintaining the resolution of a conventional system with a depth range of only 3 mm.
  • the sample is positioned in direct contact with the reference element during the measurement, if the regions of the sample detected by the two interferometric paths of the measuring arrangement do not exceed the Rayleigh length of the radiation defined by the focussing element from- are removed from each other and / or when the reference arm and the sample arm are adjusted for calibration so that their optical path lengths are the same.
  • in vivo samples can be examined, but also ex vivo samples, for example extracted or artificial samples of biological or organic material, plants or suitable plastics or glasses.
  • FIG. 1A shows a schematic structure of the optical arrangement according to the invention
  • FIG. 1B shows a schematic view of the measurement data obtained with the arrangement according to the invention
  • FIG. 2A shows a first interferometric path of the arrangement shown in FIG. 1A
  • Figure 2B is a representation of the data obtained in the first interferometric path
  • FIG. 3A shows a second interferometric path of the arrangement shown in FIG. 1A
  • Figure 3B is a representation of the obtained in the second interferometric path
  • FIG. 1A shows a schematic representation of a (measuring) arrangement 1 according to the invention.
  • the arrangement 1 has a light source 2 for producing coherent radiation, i. a laser.
  • the laser may be a pulsed laser, such as an ultrashort pulse laser that produces a broad spectrum suitable for FD-OCT.
  • a detector 3 is provided for detecting interferometric measurement data.
  • the detector 3 may be a CCD camera.
  • the detector 3 is connected to a suitable evaluation unit and a display device (not shown).
  • a beam splitter 4 divides the coherent radiation 5 generated by the light source 2 into a sample arm 6 and a reference arm 7.
  • the beam splitter 4 is the only beam splitter within the arrangement 1 according to the invention. In alternative embodiments, several beam splitters 4 may also be used and coupled by optical fibers so that one can separate different structures from each other
  • a reflector 8 At the end of the reference arm 7 there is a reflector 8. It is aligned so that the light passing through the referenceami 7 and reflected back from it is directed via the beam splitter 4 to the detector 3.
  • the sample 9 to be examined is arranged, in the illustrated case a human eye.
  • This eye 9 has a cornea (cornea) 10 and an eye lens 11.
  • An area of the front side of the cornea 10 is in direct contact with a flat rear surface 12 of a reference element 13.
  • the reference element 13 acts applanierend on the in contact with him Part of the sample 9.
  • the reference element 13 is designed as an optical wedge in that its front side 14 is not aligned parallel to the rear surface 2.
  • the rear surface 12 of the reference element 13 is partially reflecting for the radiation passing through the sample arm 6 5, by a corresponding coating and / or by a refractive index jump between the reference element 13 and the material of the sample 9. It thereby forms the reference surface of the reference element.
  • the reference element 13 may for example consist of glass.
  • a lens Between the beam splitter 4 and the reference element 13 is arranged as a focusing element 15, a lens.
  • the lens 15 is chosen so that it focuses the radiation in the sample 6 relatively weak.
  • the Rayleigh length of the radiation is relatively large and it can be on the two interferometric paths of the arrangement 1 information from clearly (ie several millimeters) away from each other depths of the sample 9 win.
  • the beam radius w 0 generated by the lens 15 may be 30 ⁇ m to obtain a Rayleigh length of about 4 mm.
  • Up to this Rayleigh length z R centers may be the two areas covered by the respective interferometric paths of the array 1 areas away from each other. At most, the two detected areas are likely to be separated by up to twice the Rayleigh length in order to be able to carry out the two measurements with a good signal-to-noise ratio and a good lateral resolution.
  • FIG. 1B shows the information obtained with the arrangement 1 about the structures in the sample 9, in this case the topography of the cornea 10 and the eye lens 11, as well as the anterior chamber 16 of the eye 9 lying between these two structures How this data is obtained is explained below with reference to FIGS. 2 and 3.
  • FIG. 2A schematically shows a first interferometric path of the arrangement 1 according to the invention.
  • the return reflection by the reference element 13 plays no role.
  • the reference element 13 is therefore hidden in FIG. 2A.
  • the first interferometric path shown in FIG. 2A corresponds to a Michelson interferometer.
  • a first beam component of the radiation 5 generated by the light source 2 passes through the reference arm 7 and from there via the beam splitter 4 to the detector 3.
  • this first beam component interferes with a second beam component reaching the detector 3 from the sample 9.
  • This interferometric measurement can take the form of a TD-OCT (in which the depth of the structures detected in the sample 9 is determined by the optical path length of the reference arm 7), but preferably by means of an FD-OCT, in which different spectral components are brought into interference to simultaneously obtain information about different depths in the sample 9.
  • the focusing element 15 is selected and positioned such that a sufficient light intensity is available in the depth of the sample 9 to be examined.
  • FIG. 2A The area B of the sample 9, from which information is obtained by the interferometric measurement, is shown in FIG. 2A by a dash-dotted box.
  • information about the topography of the eye lens 11 is obtained by the interferometric measurement in the first path, namely about the position and the curvature of its front surface 17 and its back surface 18. These surfaces are at a depth T of, for example, 2 to 5 mm below the surface of the eye. 9
  • FIG. 3A shows a schematic representation of a second interferometric path of the arrangement 1. Since the reference arm 7 plays no role in this path, it is hidden in FIG. 3A.
  • the second interferometric path shown in FIG. 3A corresponds to a common path interferometer.
  • a third portion of the radiation 5 in the sample arm 6 is reflected by the partially reflecting rear surface 12 of the reference element 13 onto the detector 3.
  • this third beam at the part interferes with a fourth, from the sample reaching the detector beam portion, as far as this fourth beam portion is within the coherence length of the radiation (starting from the rear surface 12 of the reference element 13).
  • the region B 'within the sample 9, from which information is obtained, thus lies just below the surface of the sample 9.
  • This region B' is shown in FIG. 3A with a line-pressed box and in FIG. 3B in an enlargement.
  • information about the structure and the curvature of the cornea 10 of the eye 9 is obtained by the second interferometric path. It can be clearly seen in FIG. 3B that the middle section of the cornea 10 is applanated by the abutment against the reference element 13. Through the second interferometric path information can be obtained from the sample 9 at a depth of 0 to 3 mm.
  • the measuring arrangement 1 according to the invention shown in FIG. 1A is a combination or superimposition of the two interferometric paths shown in FIGS. 2A and 3A.
  • several optical components are shared, for example, the beam splitter 4 and the focusing element 15.
  • the inventive method provides to carry out the measurements of the two paths of the interferometric arrangement simultaneously or sequentially. Since the measuring ranges of the two interferometric paths lie at different depths of the sample 9, information about the internal structure of the sample can be obtained over a wide depth range of the sample 9.
  • the measurement results of the measurements in the two interferometric paths can also be combined, as shown in FIG. 1B.
  • FIG. 1B shows the structures of both the eye lens 11 and the cornea 10 of the examined eye 9.
  • the optical path length of the reference arm 7 is adjusted so that it corresponds as exactly as possible to the optical path length of the sample arm 6, ie the distance between the beam splitter 4 and the partially reflecting surface 12 of the reference element 13.
  • the inventive arrangement 1 and the inventive method can be modified in many ways. For example, it is possible to operate the arrangement not as FD-OCT but as TD-OCT.

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  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Medical Informatics (AREA)
  • Biophysics (AREA)
  • Heart & Thoracic Surgery (AREA)
  • Engineering & Computer Science (AREA)
  • Molecular Biology (AREA)
  • Surgery (AREA)
  • Animal Behavior & Ethology (AREA)
  • Biomedical Technology (AREA)
  • Public Health (AREA)
  • Veterinary Medicine (AREA)
  • Ophthalmology & Optometry (AREA)
  • Pathology (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)

Abstract

L'invention concerne un agencement (1) d'interférométrie, qui comprend une source de lumière (2) pour la génération d'un faisceau cohérent (5), un détecteur (3) et un diviseur de faisceau (4) pour la division du faisceau (5) généré par la source de lumière (2). Ce faisceau (5) est divisé en une branche échantillon (6), dans laquelle un échantillon à étudier (9) peut être positionné, et une branche référence (7). L'invention se distingue en ce qu'un élément de référence optique (13) partiellement transparent pour le faisceau (5), qui reflète une partie du faisceau (5) vers le détecteur (3), est agencé sur le chemin optique de la branche échantillon (6), après lequel l'échantillon à étudier (9) peut être positionné. L'invention concerne également un procédé correspondant d'interférométrie.
PCT/EP2011/002246 2010-05-07 2011-05-05 Agencement et procédé d'interférométrie WO2011138036A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US13/696,392 US20130128277A1 (en) 2010-05-07 2011-05-05 Arrangement and method for interferometry

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP10004872.7 2010-05-07
EP10004872.7A EP2384692B1 (fr) 2010-05-07 2010-05-07 Appareil et procédé destinés à l'interférométrie

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Publication Number Publication Date
WO2011138036A1 true WO2011138036A1 (fr) 2011-11-10

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EP (1) EP2384692B1 (fr)
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DE102014216829B4 (de) * 2014-08-25 2021-08-05 Trumpf Laser- Und Systemtechnik Gmbh Vorrichtung und Verfahren zur temperaturkompensierten interferometrischen Abstandsmessung beim Laserbearbeiten von Werkstücken
WO2018140703A1 (fr) * 2017-01-27 2018-08-02 The Uab Research Foundation Tomographie par cohérence optique sensible à la phase à trajet commun
WO2024069058A1 (fr) * 2022-09-29 2024-04-04 Sorbonne Universite Equipement optique pour une imagerie microscopique de tomographie à cohérence optique temporelle en plein champ autoréférencée, installation et procédé associés

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EP2384692A1 (fr) 2011-11-09
EP2384692B1 (fr) 2020-09-09

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