WO2011086766A1 - 液晶表示装置及びその製造方法 - Google Patents
液晶表示装置及びその製造方法 Download PDFInfo
- Publication number
- WO2011086766A1 WO2011086766A1 PCT/JP2010/070706 JP2010070706W WO2011086766A1 WO 2011086766 A1 WO2011086766 A1 WO 2011086766A1 JP 2010070706 W JP2010070706 W JP 2010070706W WO 2011086766 A1 WO2011086766 A1 WO 2011086766A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- alignment mark
- liquid crystal
- crystal display
- panel
- display device
- Prior art date
Links
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/133354—Arrangements for aligning or assembling substrates
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/13338—Input devices, e.g. touch panels
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
- G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
- G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
- G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
- G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
- G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
- G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
- G06F3/0412—Digitisers structurally integrated in a display
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F2203/00—Indexing scheme relating to G06F3/00 - G06F3/048
- G06F2203/041—Indexing scheme relating to G06F3/041 - G06F3/045
- G06F2203/04103—Manufacturing, i.e. details related to manufacturing processes specially suited for touch sensitive devices
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
- G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
- G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
- G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
- G06F3/0416—Control or interface arrangements specially adapted for digitisers
- G06F3/0418—Control or interface arrangements specially adapted for digitisers for error correction or compensation, e.g. based on parallax, calibration or alignment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2223/00—Details relating to semiconductor or other solid state devices covered by the group H01L23/00
- H01L2223/544—Marks applied to semiconductor devices or parts
- H01L2223/5442—Marks applied to semiconductor devices or parts comprising non digital, non alphanumeric information, e.g. symbols
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2223/00—Details relating to semiconductor or other solid state devices covered by the group H01L23/00
- H01L2223/544—Marks applied to semiconductor devices or parts
- H01L2223/54426—Marks applied to semiconductor devices or parts for alignment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/544—Marks applied to semiconductor devices or parts, e.g. registration marks, alignment structures, wafer maps
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Definitions
- the present invention relates to a liquid crystal display device having a touch panel function and a method for manufacturing the liquid crystal display device.
- a liquid crystal display panel as a display unit for displaying information including characters and images, and a touch panel assembled on the display surface side of the liquid crystal display panel or on the opposite side thereof The thing with is provided.
- an operation input function using a touch panel is provided so that various services such as information display according to an instruction input from the user can be provided to the user. It is possible to provide to.
- the liquid crystal display device is configured to display the operation input screen on the display surface of the liquid crystal display panel, and the touch panel is configured to detect an operation input from the user on the operation input screen.
- the liquid crystal display device can display the information desired by the user by changing the display surface from the operation input screen to a display screen displaying the information desired by the user in accordance with the detection result by the touch panel. It is configured.
- a high-value-added liquid crystal display device in which a capacitive touch panel (multi-touch) is made into an in-cell in a liquid crystal display panel has a very high possibility of production.
- the effect that the man-hour can be greatly reduced and the member cost can be greatly reduced is expected.
- such a liquid crystal display device will be described.
- FIG. 11 is a schematic configuration diagram of the liquid crystal display device described above.
- the liquid crystal display device 500 includes a liquid crystal display panel 505 and a touch panel 506.
- the liquid crystal display panel 505 includes a TFT substrate 501, a color filter substrate 502, and a glass substrate 503.
- the touch panel 506 includes a glass substrate 503 and a protective film 504.
- the liquid crystal display panel 505 and the touch panel 506 are formed in this order. As described above, the touch panel 506 is in-celled on the liquid crystal display panel 505. ing.
- FIG. 12 is a view for explaining alignment between the back surface side and the front surface side of the glass substrate 503.
- the alignment mark 51 is formed on the color filter substrate 502.
- the alignment mark 51 has a cross-shaped planar shape (see I in FIG. 12).
- the design pattern on the glass substrate 503 is aligned with the alignment mark 51 as a reference.
- the alignment mark 52 On the glass substrate 503, a design pattern having an optimum positional relationship with respect to the alignment mark 51 is formed, and the alignment mark 52 is included in a part thereof.
- the alignment mark 52 also has a cross shape in plan view (see J in FIG. 12).
- FIG. 13 is a diagram for explaining a procedure for forming the alignment mark 51 and the alignment mark 52.
- a metal film 52b is deposited on a glass substrate 503.
- the metal film 52b is deposited on the entire surface of the glass substrate 503.
- a resist pattern 53 is formed on the metal film 52b.
- the resist pattern 53 is a pattern for removing the metal film 52b deposited above the alignment region where the plurality of alignment marks 51 are formed on the color filter substrate 502.
- the design pattern of the resist pattern 53 is not aligned with the alignment mark 51 as a reference.
- the metal film 52b is removed according to the resist pattern 53, that is, the metal film 52b above the alignment region on the color filter substrate 502 is removed. After the metal film 52b is removed in this way, the resist pattern 53 is removed.
- a resist pattern 54 is formed on the remaining metal film 52b.
- the resist pattern 54 is a pattern for forming the alignment mark 52.
- the design pattern of the resist pattern 54 is aligned with the alignment mark 51 as a reference.
- the metal film 52b is removed according to the resist pattern 54, that is, the alignment mark 52 is formed on the glass substrate 503.
- the resist pattern 54 is removed.
- a protective film 504 is deposited on the glass substrate 503 and the alignment mark 52.
- FIG. 14 is a diagram for explaining a procedure for forming the alignment mark 51 and the alignment mark 52.
- a metal film 52b is deposited on a glass substrate 503.
- a deposition prevention mask 55 for preventing the metal film 52b from being deposited above the alignment region is disposed above the alignment region on the color filter substrate 502. . For this reason, the upper part of the alignment region on the color filter substrate 502 enters the shadow of the deposition preventing mask 55, and the metal film 52b is not deposited.
- the deposition preventing mask 55 is removed.
- a resist pattern 54 is formed on the metal film 52b.
- the resist pattern 54 is a pattern for forming the alignment mark 52.
- the design pattern of the resist pattern 54 is aligned with the alignment mark 51 as a reference.
- the metal film 52 b is removed according to the resist pattern 54, that is, the alignment mark 52 is formed on the glass substrate 503.
- the resist pattern 54 is removed.
- a protective film 504 is deposited on the glass substrate 503 and the alignment mark 52.
- FIG. 15 is another schematic configuration diagram of the liquid crystal display device described above.
- the liquid crystal display device 600 includes a touch panel 605 and a liquid crystal display panel 606.
- the touch panel 605 includes a protective film 601 and a glass substrate 602.
- the liquid crystal display panel 606 includes a glass substrate 602, a color filter substrate 603, and a TFT substrate 604.
- the touch panel 605 and the liquid crystal display panel 606 are formed in this order, and the touch panel 605 is in-celled in the liquid crystal display panel 606 as described above. ing.
- FIG. 16 is a diagram for explaining alignment between the back surface side and the front surface side of the glass substrate 602. As shown in FIG. 16, an alignment mark 61 is formed on the protective film 601. The alignment mark 61 has a cross-shaped planar shape (see K in FIG. 16).
- the design pattern on the glass substrate 602 is aligned with the alignment mark 61 as a reference.
- a design pattern having an optimal positional relationship with respect to the alignment mark 61 is formed on the glass substrate 602, and the alignment mark 62 is included in a part thereof.
- the alignment mark 62 also has a cross shape in plan view (see L in FIG. 16).
- FIG. 17 is a diagram for explaining a procedure for forming the alignment mark 61 and the alignment mark 62.
- a metal film 62b is deposited on a glass substrate 602.
- the metal film 62b is deposited on the entire surface of the glass substrate 602.
- a resist pattern 63 is formed on the metal film 62b.
- the resist pattern 63 is a pattern for removing the metal film 62b deposited above the alignment region where the plurality of alignment marks 61 are formed on the protective film 601.
- the design pattern of the resist pattern 63 is not aligned with the alignment mark 61 as a reference.
- the metal film 62b is removed according to the resist pattern 63, that is, the metal film 62b above the alignment region on the protective film 601 is removed. After the metal film 62b is removed in this way, the resist pattern 63 is removed.
- a resist pattern 64 is formed on the remaining metal film 62b.
- the resist pattern 64 is a pattern for forming the alignment mark 62.
- the design pattern of the resist pattern 64 is aligned with the alignment mark 61 as a reference.
- the metal film 62b is removed according to the resist pattern 64, that is, the alignment mark 62 is formed on the glass substrate 602.
- the resist pattern 64 is removed.
- a color filter substrate 603 is formed on the glass substrate 602 and the alignment mark 62.
- FIG. 18 is a diagram for explaining a procedure for forming the alignment mark 61 and the alignment mark 62.
- a metal film 62b is deposited on a glass substrate 602.
- a deposition preventing mask 65 for preventing the metal film 62b from being deposited above the alignment region is disposed above the alignment region on the protective film 601. For this reason, the upper part of the alignment region on the protective film 601 enters the shadow of the deposition preventing mask 65, and the metal film 62b is not deposited.
- the deposition preventing mask 65 is removed.
- a resist pattern 64 is formed on the metal film 62b.
- the resist pattern 64 is a pattern for forming the alignment mark 62.
- the design pattern of the resist pattern 64 is aligned with the alignment mark 61 as a reference.
- the metal film 62 b is removed according to the resist pattern 64, that is, the alignment mark 62 is formed on the glass substrate 602.
- the resist pattern 64 is removed.
- a color filter substrate 603 is formed on the glass substrate 602 and the alignment mark 62 as shown in FIG.
- the liquid crystal display device as described above still has room for reducing the number of man-hours and reducing the material cost.
- the metal film 52b deposited above the alignment region on the color filter substrate 502 is removed, and The alignment mark 51 formed on the back side of the glass substrate 503 must be made detectable.
- the deposition preventing mask 55 must be separately manufactured. Needless to say, it is preferable to reduce the man-hours and the member costs.
- an object of the present invention is to provide a liquid crystal display device and a method for manufacturing the liquid crystal display device that can reduce the number of man-hours and the member costs.
- a liquid crystal display device of the present invention includes a touch panel and a liquid crystal display panel, and one of the touch panel and the liquid crystal display panel is between the touch panel and the liquid crystal display panel.
- the other panel is aligned with the one panel, and the other panel has a first alignment mark arranged on the one panel.
- the aligned second alignment mark is arranged, and the second alignment mark is made of a transparent member.
- the transparent member when the transparent member is patterned so as to be aligned with the first alignment mark, the first alignment mark previously formed through the transparent member is detected, and the detected first alignment mark is detected.
- the transparent member can be patterned using one alignment mark as a reference.
- the step of partially removing the member constituting the second alignment mark before the patterning based on the previously formed first alignment mark, which was necessary in the past, is unnecessary.
- the man-hour of the liquid crystal display device and its member cost can be reduced.
- one of the touch panel and the liquid crystal display panel is used as a reference for alignment between the touch panel and the liquid crystal display panel, and the other panel is used as the one panel.
- the second alignment mark aligned with the first alignment mark disposed on the one panel is disposed on the other panel.
- the transparent member when the transparent member is patterned so as to be aligned with the first alignment mark, the first alignment mark previously formed through the transparent member is detected, and the detection is performed.
- the transparent member can be patterned using the first alignment mark as a reference.
- the step of partially removing the member constituting the second alignment mark before the patterning based on the previously formed first alignment mark, which was necessary in the past, is unnecessary.
- the man-hour of the liquid crystal display device and its member cost can be reduced.
- one of the touch panel and the liquid crystal display panel is used as a reference for alignment between the touch panel and the liquid crystal display panel, and the other panel is used as the one panel.
- the second alignment mark aligned with the first alignment mark disposed on the one panel is disposed on the other panel.
- the transparent substrate constituting the other panel is patterned so as to be aligned with the first alignment mark, and as a result of the patterning, the convex portion formed on the transparent substrate is changed to the second alignment mark.
- the transparent substrate when the transparent substrate is patterned so as to be aligned with the first alignment mark, the first alignment mark previously formed through the transparent substrate is detected, and the detection is performed.
- the transparent substrate can be patterned using the first alignment mark as a reference.
- the step of partially removing the member constituting the second alignment mark before the patterning based on the previously formed first alignment mark, which was necessary in the past, is unnecessary.
- the man-hour of the liquid crystal display device and its member cost can be reduced.
- the liquid crystal display device of the present invention includes a touch panel and a liquid crystal display panel, and any one of the touch panel and the liquid crystal display panel is used as a reference for alignment between the touch panel and the liquid crystal display panel.
- a mark is arranged, and the second alignment mark is made of a transparent member.
- FIG. 4 is a diagram showing each step of the manufacturing method of the liquid crystal display device, and (a) to (f) are cross-sectional views showing states after completion of each step. It is a figure for demonstrating the other alignment between the back surface side and front surface side of the glass substrate of said liquid crystal display device.
- FIG. 7 is a diagram showing each step of another manufacturing method of the above liquid crystal display device, and (a) to (e) are cross-sectional views showing states after completion of each step.
- FIG. 4 is a diagram showing each step of the manufacturing method of the liquid crystal display device, and (a) to (f) are cross-sectional views showing states after completion of each step. It is a figure for demonstrating the other alignment between the back surface side and front surface side of the glass substrate of said liquid crystal display device.
- FIG. 7 is a diagram showing each step of another manufacturing method of the above liquid crystal display device, and (a) to (e) are cross-sectional views showing states after completion of each step. It is sectional drawing which shows schematic structure of the conventional liquid crystal display device.
- FIG. 5 is a diagram showing each step of the manufacturing method of the liquid crystal display device, and (a) to (g) are cross-sectional views showing a state after completion of each step.
- FIG. 7 is a diagram showing each step of another manufacturing method of the above liquid crystal display device, and (a) to (f) are cross-sectional views showing states after completion of each step. It is sectional drawing which shows schematic structure of the conventional liquid crystal display device. It is a figure for demonstrating the alignment between the back surface side and front surface side of the glass substrate of said liquid crystal display device.
- FIG. 5 is a diagram showing each step of the manufacturing method of the liquid crystal display device, and (a) to (g) are cross-sectional views showing a state after completion of each step.
- FIG. 7 is a diagram showing each step of another manufacturing method of the above liquid crystal display device, and (a) to (f) are cross-sectional views showing states after completion of each step.
- FIG. 1 is a cross-sectional view showing a schematic configuration of a liquid crystal display device according to Embodiment 1 of the present invention.
- the liquid crystal display device 100 in the present embodiment includes a liquid crystal display panel 105 and a touch panel 106.
- the liquid crystal display panel 105 includes a TFT substrate 101, a color filter substrate 102, and a glass substrate 103.
- the touch panel 106 includes a glass substrate 103 and a protective film 104.
- the glass substrate 103 has a TFT substrate 101 and a color filter substrate 102 disposed on the back side (one main surface side), and a protective film 104 disposed on the surface side (the other main surface side).
- the glass substrate 103 and the TFT substrate 101 and the color filter substrate 102 disposed on the back side thereof constitute the liquid crystal display panel 105. Further, the glass substrate 103 and the protective film 104 disposed on the surface side constitute a touch panel 106.
- the liquid crystal display panel 105 and the touch panel 106 are formed in this order, and the touch panel 106 is in-celled on the liquid crystal display panel 105.
- the TFT substrate 101 is composed of a transparent insulating substrate such as glass in which TFTs and pixel electrodes are arranged in a matrix.
- the color filter substrate 102 is an insulating substrate such as glass in which a plurality of black matrices (BM) provided on the side facing the glass substrate 103 and a color filter provided in a region partitioned by the black matrix are arranged. It is composed of
- a liquid crystal layer (not shown) in which a liquid crystal material is sealed is sandwiched between the TFT substrate 101 and the color filter substrate 102.
- FIG. 2 is a diagram for explaining alignment between the back surface side and the front surface side of the glass substrate 103.
- an alignment mark (first alignment mark) 11 is formed on the color filter substrate 102.
- the alignment mark 11 has a cross-shaped planar shape (see A in FIG. 2).
- the size is 50 ⁇ m ⁇ 50 ⁇ m.
- planar shape of the alignment mark 11 is not limited to the cross shape.
- the planar shape and size may be a square shape (50 ⁇ m ⁇ 50 ⁇ m) or a round shape (diameter 50 ⁇ m).
- the planar shape and size of the alignment mark 11 may be selected as appropriate for the alignment mark 11 detection method.
- the alignment mark 11 may be a black matrix metal film disposed on the color filter substrate 102, for example. By doing so, it is not necessary to separately deposit a metal film for forming the alignment mark 11, and therefore, the man-hour and the member cost of the liquid crystal display device 100 can be further reduced.
- the design pattern on the glass substrate 103 is aligned with the alignment mark 11 as a reference.
- a design pattern having an optimal positional relationship with respect to the alignment mark 11 is formed on the glass substrate 103, and an alignment mark (second alignment mark) 12 is included in a part thereof.
- the alignment mark 12 also has a cross-shaped planar shape (see B in FIG. 2).
- planar shape of the alignment mark 12 is not limited to the cross shape like the alignment mark 11 described above.
- the planar shape and size may be a square shape (50 ⁇ m ⁇ 50 ⁇ m) or a round shape (diameter 50 ⁇ m).
- the planar shape and size of the alignment mark 12 may be selected as appropriate for the alignment mark 12 detection method.
- the alignment mark 12 is made of a known transparent conductive film (transparent member) such as ITO, IZO, ZnO or the like.
- transparent member transparent member
- IZO IZO
- ZnO zinc oxide
- an opaque film (opaque member) 13 which will be described later, is disposed.
- the planar shape of the opaque film 13 may be any shape as long as it covers at least the entire planar shape of the alignment mark 12.
- FIG. 3 is a diagram for explaining a procedure for forming the alignment mark 11, the alignment mark 12, and the opaque film 13.
- a transparent conductive film 12a is deposited on a glass substrate 103.
- This transparent conductive film 12 a is deposited on the entire surface of the glass substrate 103.
- the transparent conductive film 12a for example, a transparent conductive film for a touch electrode constituting the touch panel 106 may be used. This transparent conductive film for touch electrodes is formed on the glass substrate 103. By doing so, it is not necessary to separately deposit a transparent conductive film for forming the alignment mark 12, and therefore, the man-hour and the member cost of the liquid crystal display device 100 can be further reduced.
- a resist pattern 14 is formed on the transparent conductive film 12a.
- the resist pattern 14 is a pattern for forming the alignment mark 12.
- the design pattern of the resist pattern 14 is aligned with the alignment mark 11 as a reference.
- the resist pattern 53 was formed on the metal film 52b.
- the resist pattern 53 is a pattern for removing the metal film 52b deposited above the alignment region on the color filter substrate 502.
- the alignment region on the color filter substrate 502 is temporarily set as described above. A step of removing the metal film 52b deposited above is necessary.
- the alignment mark 12 is composed of the transparent conductive film 12a, so that the transparent conductive film 12a deposited on the entire surface of the glass substrate 103 as shown in FIG.
- the alignment mark 11 can be detected through the alignment of the design pattern on the glass substrate 103 based on the alignment mark 11.
- the step of removing the metal film 52b once to detect the alignment mark 51 as shown in FIG. 13B is unnecessary, and as a result, the man-hour of the liquid crystal display device 100 is reduced, The member cost can be reduced.
- the transparent conductive film 12 a is removed according to the resist pattern 14, that is, the alignment mark 12 is formed on the glass substrate 103.
- a metal film 13 a is deposited on the glass substrate 103 and the alignment mark 12. This metal film 13 a is deposited on the entire surface of the glass substrate 103. Then, after the metal film 13a is deposited, a resist pattern 15 is formed on the metal film 13a.
- the metal film 13a is for making the alignment mark 12 made of the transparent conductive film 12a opaque. Similar to the alignment mark 11, the design pattern above the alignment mark 12 is aligned with respect to the alignment mark 12. For this reason, it is necessary to make the alignment mark 12 opaque so that the alignment mark 12 can be detected.
- the metal film 13a for example, a metal film for metal wiring that forms the touch panel 106 formed on the glass substrate 103 may be used. By doing so, it is not necessary to separately deposit a metal film for making the alignment mark 12 opaque, so that the man-hours and the member costs of the liquid crystal display device 100 can be further reduced.
- a resist pattern 15 is formed on the metal film 13a.
- the resist pattern 15 is a pattern for forming an opaque film 13 that makes the alignment mark 12 opaque.
- the design pattern of the resist pattern 15 is aligned with, for example, the alignment mark 12 as a reference. Of course, alignment based on the alignment mark 11 may be performed.
- the planar shape of the opaque film 13 may be any shape as long as it covers at least the entire planar shape of the alignment mark 12. This is because if the planar shape of the opaque film 13 covers at least the entire planar shape of the alignment mark 12, the planar shape of the alignment mark 12 is made opaque and can be detected.
- the metal film 13 a is removed according to the resist pattern 15, that is, the opaque film 13 is formed on the glass substrate 103. Then, after the metal film 13a is removed, the resist pattern 15 is removed.
- a protective film 104 is deposited on the glass substrate 103 and the opaque film 13.
- the alignment mark 12 is formed of the transparent conductive film 12a, and thus passes through the transparent conductive film 12a deposited on the entire surface of the glass substrate 103.
- the alignment mark 11 can be detected and the design pattern on the glass substrate 103 can be aligned with the alignment mark 11 as a reference.
- the process of once removing the transparent conductive film 12a in order to detect the alignment mark 11 becomes unnecessary, and as a result, the man-hour of the liquid crystal display device 100 can be reduced, and the member cost can be reduced.
- FIG. 4 is a diagram for explaining alignment between the back surface side and the front surface side of the glass substrate 103.
- an alignment mark 11 is formed on the color filter substrate 102.
- the alignment mark 11 has a cross-shaped planar shape (see C in FIG. 4). Since the alignment mark 11 is the same as that in the first embodiment, description thereof is omitted here.
- a design pattern having an optimal positional relationship with respect to the alignment mark 11 is formed on the glass substrate 103, and an alignment mark (second alignment mark) 16 is included in a part thereof.
- the alignment mark 16 also has a cross-shaped planar shape (see D in FIG. 4).
- the alignment mark 16 is different from the alignment mark 12 of the first embodiment in that a convex shape is formed on a glass substrate 103 from a part of the glass substrate 103, and the convex shape (convex shape portion). Is used for the alignment mark 16.
- the convex shape may be formed at the same time as the glass substrate 103 is thinned. By doing so, it is not necessary to separately reduce the thickness of the glass substrate 103 for forming the alignment mark 16, and therefore the man-hours and the member costs of the liquid crystal display device 100 can be further reduced.
- planar shape of the alignment mark 16 is not limited to the cross shape, similar to the alignment mark 11 described above.
- the planar shape and size may be a square shape (50 ⁇ m ⁇ 50 ⁇ m) or a round shape (diameter 50 ⁇ m).
- the planar shape and size of the alignment mark 16 may be selected as appropriate for the alignment mark 16 detection method.
- the opaque film 13 is disposed on the alignment mark 16 as in the first embodiment. Note that the opaque film 13 is the same as that in the first embodiment, and thus the description thereof is omitted here.
- FIG. 5 is a diagram for explaining a procedure for forming the alignment mark 11, the alignment mark 16, and the opaque film 13.
- a resist pattern 17 is formed on the glass substrate 103.
- the resist pattern 17 is a pattern for forming the alignment mark 16.
- the design pattern of the resist pattern 17 is aligned with the alignment mark 11 as a reference.
- the glass substrate 103 is removed according to the resist pattern 17, that is, an alignment mark 16 having a convex shape using a part of the glass substrate 103 is formed. .
- a metal film 13a is deposited on the glass substrate 103 and the alignment mark 16. Then, after the metal film 13a is deposited, a resist pattern 18 is formed on the metal film 13a. Note that the metal film 13a is the same as that in the first embodiment, and thus the description thereof is omitted here.
- a resist pattern 18 is formed on the metal film 13a.
- the resist pattern 18 is a pattern for forming the opaque film 13 that makes the alignment mark 16 opaque.
- the design pattern of the resist pattern 18 is aligned with the alignment mark 16 as a reference, for example. Of course, alignment based on the alignment mark 11 may be performed.
- the metal film 13 a is removed according to the resist pattern 18, that is, the opaque film 13 is formed on the glass substrate 103. Then, after the metal film 13a is removed, the resist pattern 18 is removed.
- a protective film 104 is deposited on the glass substrate 103 and the opaque film 13.
- the alignment mark 11 is detected through the glass substrate 103 by forming the alignment mark 16 from a convex shape that is a part of the glass substrate 103. Then, the design pattern on the glass substrate 103 can be aligned with the alignment mark 11 as a reference.
- the man-hour of the liquid crystal display device 100 can be reduced, and the member cost can be reduced.
- FIG. 6 is a cross-sectional view showing a schematic configuration of the liquid crystal display device according to Embodiment 3 of the present invention.
- the liquid crystal display device 200 in this embodiment includes a touch panel 205 and a liquid crystal display panel 206.
- the touch panel 205 includes a protective film 201 and a glass substrate 202.
- the liquid crystal display panel 206 includes a glass substrate 202, a color filter substrate 203, and a TFT substrate 204.
- the glass substrate 202 has a protective film 201 disposed on the back surface side (one main surface side), and a color filter substrate 203 and a TFT substrate 204 disposed on the front surface side (the other main surface side).
- the glass substrate 202 and the protective film 201 disposed on the back side thereof constitute the touch panel 205.
- the glass substrate 202 and the color filter substrate 203 and the TFT substrate 204 arranged on the surface side constitute a liquid crystal display panel 206.
- the touch panel 205 and the liquid crystal display panel 206 are formed in this order, and the touch panel 205 is in-celled on the liquid crystal display panel 206.
- the color filter substrate 203 is a glass or other insulating substrate on which a plurality of black matrices (BM) provided on the side facing the glass substrate 202 and a color filter provided in a region partitioned by the black matrix are arranged. It is composed of
- the TFT substrate 204 is composed of a transparent insulating substrate such as glass in which TFTs and pixel electrodes are arranged in a matrix.
- a liquid crystal layer (not shown) in which a liquid crystal material is sealed is sandwiched between the color filter substrate 203 and the TFT substrate 204.
- FIG. 7 is a diagram for explaining alignment between the back surface side and the front surface side of the glass substrate 202.
- an alignment mark (first alignment mark) 21 is formed on the protective film 201.
- the alignment mark 21 has a cross-shaped planar shape (see E in FIG. 7).
- the size is 50 ⁇ m ⁇ 50 ⁇ m.
- planar shape of the alignment mark 21 is not limited to the cross shape.
- the planar shape and size may be a square shape (50 ⁇ m ⁇ 50 ⁇ m) or a round shape (diameter 50 ⁇ m).
- the planar shape and size of the alignment mark 21 may be selected as appropriate for the alignment mark 21 detection method.
- the alignment mark 21 may be a metal film for metal wiring that constitutes the touch panel 205 and is disposed on the protective film 201, for example. By doing so, it is not necessary to separately deposit a metal film for forming the alignment mark 21, and therefore, the man-hour and the member cost of the liquid crystal display device 200 can be further reduced.
- the design pattern on the glass substrate 202 is aligned with the alignment mark 21 as a reference.
- a design pattern having an optimal positional relationship with respect to the alignment mark 21 is formed on the glass substrate 202, and an alignment mark (second alignment mark) 22 is included in a part thereof.
- the alignment mark 22 also has a cross-shaped planar shape (see F in FIG. 7).
- planar shape of the alignment mark 22 is not limited to the cross shape, like the alignment mark 21 described above.
- the planar shape and size may be a square shape (50 ⁇ m ⁇ 50 ⁇ m) or a round shape (diameter 50 ⁇ m).
- the planar shape and the size of the alignment mark 22 may be selected as appropriate for the alignment mark 22 detection method.
- the alignment mark 22 is composed of a known transparent resin film (transparent member) such as an alkali resin or an epoxy resin.
- An opaque film (opaque member) 23 described later is disposed on the alignment mark 22.
- the planar shape of the opaque film 23 may be any shape as long as it covers at least the entire planar shape of the alignment mark 22.
- FIG. 8 is a diagram for explaining a procedure for forming the alignment mark 21, the alignment mark 22, and the opaque film 23.
- a transparent resin film 22a is applied on the glass substrate 202.
- the transparent resin film 22a is applied to the entire surface of the glass substrate 202.
- the transparent resin film 22a for example, a photosensitive transparent resin film that constitutes a column of the color filter substrate 203 disposed on the glass substrate 202 may be used. By doing so, it is not necessary to separately apply a transparent resin film for forming the alignment mark 22, and therefore, the man-hours and the member costs of the liquid crystal display device 200 can be further reduced.
- a resist pattern 24 is formed on the transparent resin film 22a.
- the resist pattern 24 is a pattern for forming the alignment mark 22.
- the design pattern of the resist pattern 24 is aligned with the alignment mark 21 as a reference.
- the alignment mark 22 is composed of the transparent resin film 22a, whereby the alignment mark 21 is detected through the transparent resin film 22a applied to the entire surface of the glass substrate 202, and the glass substrate is based on the alignment mark 21 as a reference.
- the design pattern on 202 can be aligned.
- the transparent resin film 22a is removed according to the resist pattern 24, that is, the alignment mark 22 is formed on the glass substrate 202.
- a metal film 23 a is deposited on the glass substrate 202 and the alignment mark 22. This metal film 23 a is deposited on the entire surface of the glass substrate 202. Then, after the metal film 23a is deposited, a resist pattern 25 is formed on the metal film 23a.
- the metal film 23a is for making the alignment mark 22 made of the transparent resin film 22a opaque. Similar to the alignment mark 21, the design pattern above the alignment mark 22 is aligned with respect to the alignment mark 22. For this reason, it is necessary to make the alignment mark 22 opaque so that the alignment mark 22 can be detected.
- the metal film 23a may be, for example, a black matrix metal film disposed on the color filter substrate 203 disposed on the glass substrate 202. By doing so, it is not necessary to separately deposit a metal film for forming the opaque film 23. Therefore, the man-hours and the member costs of the liquid crystal display device 200 can be further reduced.
- a resist pattern 25 is formed on the metal film 23a.
- the resist pattern 25 is a pattern for forming an opaque film 23 that makes the alignment mark 22 opaque.
- the design pattern of the resist pattern 25 is aligned with the alignment mark 22 as a reference, for example. Of course, alignment based on the alignment mark 21 may be performed.
- the opaque film 23 may have any planar shape as long as it covers at least the entire planar shape of the alignment mark 22. This is because if the planar shape of the opaque film 23 covers at least the entire planar shape of the alignment mark 22, the planar shape of the alignment mark 22 becomes opaque and can be detected.
- the metal film 23 a is removed according to the resist pattern 25, that is, the opaque film 23 is formed on the glass substrate 202. Then, after the metal film 23a is removed, the resist pattern 25 is removed.
- a color filter substrate 203 is formed on the glass substrate 202 and the opaque film 23.
- the alignment mark 22 is formed of the transparent resin film 22a, thereby passing through the transparent resin film 22a applied on the entire surface of the glass substrate 202.
- the alignment mark 21 can be detected and the design pattern on the glass substrate 202 can be aligned with the alignment mark 21 as a reference.
- the process of once removing the transparent resin film 22a in order to detect the alignment mark 21 becomes unnecessary, and as a result, the man-hour of the liquid crystal display device 200 can be reduced, and the member cost can be reduced.
- the alignment mark 22 is made opaque by covering the alignment mark 22 with the metal film 23a.
- the present invention is not limited to this.
- the alignment mark 22 may be made opaque by irradiating the alignment mark 22 made of the transparent resin film 22a with a laser beam to blacken it (blackening treatment).
- FIG. 9 is a diagram for explaining alignment between the back surface side and the front surface side of the glass substrate 202.
- an alignment mark 21 is formed on the protective film 201.
- the alignment mark 21 has a cross-shaped planar shape (see G in FIG. 9). Since the alignment mark 21 is the same as that in the third embodiment, description thereof is omitted here.
- a design pattern having an optimal positional relationship with respect to the alignment mark 21 is formed on the glass substrate 202, and the alignment mark 26 (second alignment mark) is included in a part thereof.
- the alignment mark 26 also has a cross-shaped planar shape (see H in FIG. 9).
- the alignment mark 26 is different from the alignment mark 22 of the third embodiment in that a convex shape is formed on a part of the glass substrate 202 on the glass substrate 202, and the convex shape is used for the alignment mark 26. It was a point.
- the convex shape may be formed simultaneously with the thinning of the glass substrate 202. By doing so, it is not necessary to separately reduce the thickness of the glass substrate 202 for forming the alignment mark 26, and therefore the man-hours and the member costs of the liquid crystal display device 200 can be further reduced.
- planar shape of the alignment mark 26 is not limited to the cross shape like the alignment mark 21 described above.
- the planar shape and size may be a square shape (50 ⁇ m ⁇ 50 ⁇ m) or a round shape (diameter 50 ⁇ m).
- the planar shape and size of the alignment mark 26 may be selected as appropriate for the alignment mark 26 detection method.
- the opaque film 23 is arranged as in the third embodiment. Note that the opaque film 23 is the same as that of the third embodiment, and thus the description thereof is omitted here.
- FIG. 10 is a diagram for explaining a procedure for forming the alignment mark 21, the alignment mark 26, and the opaque film 23.
- a resist pattern 27 is formed on a glass substrate 202.
- the resist pattern 27 is a pattern for forming the alignment mark 26.
- the design pattern of the resist pattern 27 is aligned with the alignment mark 21 as a reference.
- the glass substrate 202 is removed according to the resist pattern 27, that is, the alignment mark 26 having a convex shape using a part of the glass substrate 202 is formed. .
- a metal film 23 a is deposited on the glass substrate 202 and the alignment mark 26. Then, after the metal film 23a is deposited, a resist pattern 28 is formed on the metal film 23a. Note that the metal film 23a is the same as that in the third embodiment, and thus the description thereof is omitted here.
- a resist pattern 28 is formed on the metal film 23a.
- the resist pattern 28 is a pattern for forming an opaque film 23 that makes the alignment mark 26 opaque.
- the design pattern of the resist pattern 28 is aligned with, for example, the alignment mark 26 as a reference. Of course, alignment based on the alignment mark 21 may be performed.
- the metal film 23 a is removed according to the resist pattern 28, that is, the opaque film 23 is formed on the glass substrate 202. Then, after the metal film 23a is removed, the resist pattern 28 is removed.
- the color filter substrate 203 is formed on the glass substrate 202 and the opaque film 23.
- the alignment mark 26 is formed of a convex shape that is a part of the glass substrate 202, thereby detecting the alignment mark 21 through the glass substrate 202. Then, the design pattern on the glass substrate 202 can be aligned with the alignment mark 21 as a reference.
- the man-hour of the liquid crystal display device 200 can be reduced, and the member cost can be reduced.
- the alignment mark 26 is made opaque by covering the alignment mark 26 with the metal film 23a.
- the present invention is not limited to this.
- the alignment mark 26 may be made opaque by irradiating the alignment mark 26 having a convex shape on the glass substrate 202 with a laser beam to blacken it (blackening treatment).
- the liquid crystal display device of the present invention includes a touch panel and a liquid crystal display panel, and any one of the touch panel and the liquid crystal display panel is positioned between the touch panel and the liquid crystal display panel.
- the liquid crystal display device is used as a reference, and the other panel is aligned with the one panel, and the other panel is aligned with the first alignment mark disposed on the one panel.
- a second alignment mark is arranged, and the second alignment mark is made of a transparent member.
- the transparent member is preferably a convex portion provided on a transparent substrate constituting the other panel.
- the transparent member may be formed by removing the transparent substrate around a region where the convex portion should be provided on the main surface side of the transparent substrate facing the one panel. More preferred.
- the convex shape can be formed simultaneously with the thinning of the transparent substrate, it is not necessary to separately thin the transparent substrate for forming the second alignment mark. The number of man-hours for the liquid crystal display device and its member costs can be further reduced.
- the transparent member is a region on the main surface where the second alignment mark is to be disposed from a transparent film deposited on the main surface facing the one panel of the transparent substrate constituting the other panel. It is preferable that the transparent film is removed by removing the transparent film.
- a transparent conductive film for a touch electrode that constitutes a touch panel may be used as the transparent member.
- an opaque member is further disposed on the other panel so as to cover the second alignment mark.
- the second alignment mark made of a transparent member can be made opaque.
- the design pattern above the second alignment mark can be aligned with respect to the second alignment mark.
- the second alignment mark is preferably made opaque by a blackening process by laser light irradiation.
- one of the touch panel and the liquid crystal display panel is used as a reference for alignment between the touch panel and the liquid crystal display panel, and the other panel is used as the one panel.
- the second alignment mark aligned with the first alignment mark disposed on the one panel is disposed on the other panel.
- the first alignment mark is detected through the transparent member to be patterned, and the resist pattern is aligned with the detected first alignment mark.
- the transparent member can be patterned with the detected first alignment mark as a reference.
- one of the touch panel and the liquid crystal display panel is used as a reference for alignment between the touch panel and the liquid crystal display panel, and the other panel is used as the one panel.
- the second alignment mark aligned with the first alignment mark disposed on the one panel is disposed on the other panel.
- the transparent substrate constituting the other panel is patterned so as to be aligned with the first alignment mark, and as a result of the patterning, the convex portion formed on the transparent substrate is changed to the second alignment mark.
- the method further includes a step of forming a resist pattern aligned with the first alignment mark through the transparent substrate on the transparent substrate, and patterning the transparent substrate using the resist pattern.
- the first alignment mark is detected through the transparent substrate to be patterned, and the resist pattern is aligned with the detected first alignment mark.
- the transparent substrate can be patterned with the detected first alignment mark as a reference.
- the method further includes a step of arranging an opaque member so as to cover the second alignment mark.
- the second alignment mark made of a transparent member or a transparent substrate can be made opaque.
- the design pattern above the second alignment mark can be aligned with respect to the second alignment mark.
- the method further includes a step of making the second alignment mark opaque by irradiating the second alignment mark with laser light to make it black.
- the present invention can be applied to a liquid crystal display device having a touch panel function.
- a liquid crystal display device for example, it can be used in an active matrix type liquid crystal display device, and an electrophoretic display, a twist ball display, a reflective display using a fine prism film, a digital mirror device
- light modulation elements such as organic EL light-emitting elements, organic EL light-emitting elements, inorganic EL light-emitting elements
- displays using elements with variable emission luminance such as LEDs (Light Emitting Diode), field emission displays (FED)
- Transparent conductive film transparent member 13
- Opaque membrane opaque member 14
- Resist pattern 22a Transparent resin film (transparent member) 100, 200 Liquid crystal display device 101, 204 TFT substrate 102, 203 Color filter substrate 103, 202 Glass substrate (transparent substrate) 104, 201 Protective film 105, 206 Liquid crystal display panel 106, 205 Touch panel
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Theoretical Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Human Computer Interaction (AREA)
- Crystallography & Structural Chemistry (AREA)
- Optics & Photonics (AREA)
- Chemical & Material Sciences (AREA)
- Mathematical Physics (AREA)
- Liquid Crystal (AREA)
- Position Input By Displaying (AREA)
Abstract
Description
図1は、本発明の実施の形態1における液晶表示装置の概略構成を示す断面図である。図1に示すように、本実施の形態における液晶表示装置100は、液晶表示パネル105と、タッチパネル106と、を備えている。
次に、本発明の実施の形態2について説明する。本実施の形態においては、上記の実施の形態1と同様、ガラス基板(透明基板)103の裏面側に配置されるカラーフィルタ基板102上の既存パターンと、ガラス基板103の表面側に配置される保護膜104下の設計パターンとの間においては、それらパターン間に最適な相対位置関係を設定するためのアライメントが要求される。
次に、本発明の実施の形態3について説明する。図6は、本発明の実施の形態3における液晶表示装置の概略構成を示す断面図である。図6に示すように、本実施の形態における液晶表示装置200は、タッチパネル205と、液晶表示パネル206と、を備えている。
次に、本発明の実施の形態4について説明する。本実施の形態においては、上記の実施の形態3と同様、ガラス基板202の裏面側に配置される保護膜201上の既存パターンと、ガラス基板202の表面側に配置されるカラーフィルタ基板203下の設計パターンとの間においては、それらパターン間に最適な相対位置関係を設定するためのアライメントが要求される。
12、16、22、26 アライメントマーク(第2のアライメントマーク、凸形状部)
12a 透明導電膜(透明部材)
13、23 不透明膜(不透明部材)
14、15、17、18、24、25、27、28 レジストパターン
22a 透明樹脂膜(透明部材)
100、200 液晶表示装置
101、204 TFT基板
102、203 カラーフィルタ基板
103、202 ガラス基板(透明基板)
104、201 保護膜
105、206 液晶表示パネル
106、205 タッチパネル
Claims (12)
- タッチパネルと液晶表示パネルとを備え、当該タッチパネル及び液晶表示パネルのうちのいずれか一方のパネルが前記タッチパネルと前記液晶表示パネルとの間における位置合せの基準とされ、他方のパネルが前記一方のパネルに位置合せされた液晶表示装置であって、
前記他方のパネルには、前記一方のパネル上に配置された第1のアライメントマークに位置合せされた第2のアライメントマークが配置されており、当該第2のアライメントマークは透明部材から構成されていることを特徴とする液晶表示装置。 - 前記透明部材は、前記他方のパネルを構成する透明基板に設けられた凸形状部であることを特徴とする請求項1に記載の液晶表示装置。
- 前記透明部材は、前記透明基板の前記一方のパネルに対向する主面側において、前記凸形状部を設けるべき領域の周囲にある前記透明基板を除去することにより、形成されていることを特徴とする請求項2に記載の液晶表示装置。
- 前記透明部材は、前記他方のパネルを構成する透明基板の前記一方のパネルに対向する主面上に堆積された透明膜から、前記第2のアライメントマークが配置されるべき前記主面上の領域の周囲にある前記透明膜を除去することにより、形成されていることを特徴とする請求項1に記載の液晶表示装置。
- 前記他方のパネルには、前記第2のアライメントマークを覆うように不透明部材がさらに配置されていることを特徴とする請求項1~4のいずれか1項に記載の液晶表示装置。
- 前記第2のアライメントマークは、レーザ光の照射による黒化処理によって、不透明化されていることを特徴とする請求項1~4のいずれか1項に記載の液晶表示装置。
- タッチパネル及び液晶表示パネルのうちのいずれか一方のパネルを前記タッチパネルと前記液晶表示パネルとの間における位置合せの基準とし、他方のパネルを前記一方のパネルに位置合せした構造において、前記他方のパネルに、前記一方のパネル上に配置された第1のアライメントマークに位置合せされた第2のアライメントマークが配置された液晶表示装置の製造方法であって、
前記他方のパネルを構成する透明基板の全面に透明部材を配置する工程と、
前記第1のアライメントマークに位置合せするように前記透明部材をパターニングし、そのパターニングの結果、前記透明基板上に残存する前記透明部材を前記第2のアライメントマークとする工程と
を含むことを特徴とする液晶表示装置の製造方法。 - 前記透明基板の全面に配置された前記透明部材上に、前記透明部材を通して第1のアライメントマークに位置合せされたレジストパターンを形成する工程をさらに含み、
前記レジストパターンを用いて、前記透明部材をパターニングすることを特徴とする請求項7に記載の液晶表示装置の製造方法。 - タッチパネル及び液晶表示パネルのうちのいずれか一方のパネルを前記タッチパネルと前記液晶表示パネルとの間における位置合せの基準とし、他方のパネルを前記一方のパネルに位置合せした構造において、前記他方のパネルに、前記一方のパネル上に配置された第1のアライメントマークに位置合せされた第2のアライメントマークが配置された液晶表示装置の製造方法であって、
前記第1のアライメントマークに位置合せするように、前記他方のパネルを構成する透明基板をパターニングし、そのパターニングの結果、前記透明基板上に形成された凸形状部を前記第2のアライメントマークとする工程
を含むことを特徴とする液晶表示装置の製造方法。 - 前記透明基板上に、前記透明基板を通して第1のアライメントマークに位置合せされたレジストパターンを形成する工程をさらに含み、
前記レジストパターンを用いて、前記透明基板をパターニングすることを特徴とする請求項9に記載の液晶表示装置の製造方法。 - 前記第2のアライメントマークを覆うように不透明部材を配置する工程をさらに含むことを特徴とする請求項7~10のいずれか1項に記載の液晶表示装置の製造方法。
- 前記第2のアライメントマークにレーザ光を照射して黒化させることにより、前記第2のアライメントマークを不透明化する工程をさらに含むことを特徴とする請求項7~10のいずれか1項に記載の液晶表示装置の製造方法。
Priority Applications (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
RU2012132801/28A RU2510063C1 (ru) | 2010-01-15 | 2010-11-19 | Жидкокристаллическое устройство отображения и способ его изготовления |
JP2011549866A JP5607078B2 (ja) | 2010-01-15 | 2010-11-19 | 液晶表示装置及びその製造方法 |
EP10843121.4A EP2511756A4 (en) | 2010-01-15 | 2010-11-19 | LIQUID CRYSTAL DISPLAY DEVICE AND MANUFACTURING METHOD THEREFOR |
CN201080061443.1A CN102713737B (zh) | 2010-01-15 | 2010-11-19 | 液晶显示装置及其制造方法 |
BR112012017239A BR112012017239A2 (pt) | 2010-01-15 | 2010-11-19 | dispositivo de vídeo de cristal líquido e método para a fabricação do mesmo |
KR1020127020669A KR101403809B1 (ko) | 2010-01-15 | 2010-11-19 | 액정 표시 장치 및 그 제조 방법 |
US13/518,948 US9274633B2 (en) | 2010-01-15 | 2010-11-19 | Liquid crystal display device and method for manufacturing same |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010007253 | 2010-01-15 | ||
JP2010-007253 | 2010-01-15 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2011086766A1 true WO2011086766A1 (ja) | 2011-07-21 |
Family
ID=44304058
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2010/070706 WO2011086766A1 (ja) | 2010-01-15 | 2010-11-19 | 液晶表示装置及びその製造方法 |
Country Status (8)
Country | Link |
---|---|
US (1) | US9274633B2 (ja) |
EP (1) | EP2511756A4 (ja) |
JP (1) | JP5607078B2 (ja) |
KR (1) | KR101403809B1 (ja) |
CN (1) | CN102713737B (ja) |
BR (1) | BR112012017239A2 (ja) |
RU (1) | RU2510063C1 (ja) |
WO (1) | WO2011086766A1 (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103218068A (zh) * | 2012-01-20 | 2013-07-24 | 群康科技(深圳)有限公司 | 触控显示装置及其制造方法 |
US9207790B2 (en) | 2012-01-20 | 2015-12-08 | Innolux Corporation | Touch display apparatus and method for fabricating the same |
Families Citing this family (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2014140047A2 (en) | 2013-03-12 | 2014-09-18 | Micronic Mydata AB | Method and device for writing photomasks with reduced mura errors |
EP2972589B1 (en) | 2013-03-12 | 2017-05-03 | Micronic Mydata AB | Mechanically produced alignment fiducial method and alignment system |
CN103389533A (zh) * | 2013-07-31 | 2013-11-13 | 京东方科技集团股份有限公司 | 一种制造彩色滤光片的方法和彩色滤光片 |
KR102182881B1 (ko) * | 2013-11-13 | 2020-11-26 | 엘지디스플레이 주식회사 | 얼라인 키를 포함하는 표시패널 및 그 제조방법 |
KR102086579B1 (ko) * | 2013-11-26 | 2020-04-16 | 엘지디스플레이 주식회사 | 얼라인 마크의 제조방법 및 얼라인 마크를 포함하는 표시장치 |
CN103676245B (zh) * | 2013-12-26 | 2016-08-17 | 南京中电熊猫液晶显示科技有限公司 | 一种阵列基板对位标记结构及其对位方法 |
KR102250042B1 (ko) | 2014-03-17 | 2021-05-11 | 삼성디스플레이 주식회사 | 디스플레이 장치 |
CN104267544A (zh) * | 2014-10-17 | 2015-01-07 | 京东方科技集团股份有限公司 | 一种显示基板及具有该显示基板的显示装置 |
CN104317451B (zh) * | 2014-10-27 | 2018-11-13 | 昆山龙腾光电有限公司 | 触控显示装置的制造方法 |
WO2016154830A1 (zh) * | 2015-03-27 | 2016-10-06 | 深圳市柔宇科技有限公司 | 触摸屏模组及其制作方法 |
US10558101B2 (en) | 2016-03-22 | 2020-02-11 | Boe Technology Group Co., Ltd. | Array substrate motherboard, display panel motherboard, and fabricating method thereof |
CN105607316B (zh) * | 2016-03-22 | 2018-12-18 | 京东方科技集团股份有限公司 | 一种阵列基板母板和显示面板母板 |
US11121091B2 (en) * | 2017-03-20 | 2021-09-14 | Ev Group E. Thallner Gmbh | Method for arranging two substrates |
CN111913316B (zh) * | 2018-01-02 | 2023-07-04 | 上海中航光电子有限公司 | 显示装置 |
CN111383515B (zh) * | 2018-12-27 | 2022-03-11 | 北京小米移动软件有限公司 | 显示屏及其制作方法、电子设备 |
TW202111721A (zh) * | 2019-05-22 | 2021-03-16 | 加拿大商弗瑞爾公司 | 用於傳送設置之對準方法 |
CN111025799B (zh) * | 2019-12-02 | 2021-07-27 | 苏州华星光电技术有限公司 | 显示面板及显示装置 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04205342A (ja) * | 1990-11-30 | 1992-07-27 | Toshiba Corp | 一体型表示入力装置 |
JP2000173384A (ja) * | 1998-12-02 | 2000-06-23 | Rohm Co Ltd | タッチパネル一体型の画像表示装置、および画像表示盤に対するタッチパネルの位置補正方法 |
JP2008009054A (ja) | 2006-06-28 | 2008-01-17 | Optrex Corp | 表示装置及びその製造方法 |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4297004A (en) * | 1978-09-20 | 1981-10-27 | Technical Research of Citizen Watch Co., Ltd. | Liquid crystal display cell |
US5366588A (en) * | 1992-03-13 | 1994-11-22 | U.S. Philips Corporation | Method of manufacturing an electrically conductive pattern of tin-doped indium oxide (ITO) on a substrate |
TW473629B (en) * | 1996-03-29 | 2002-01-21 | Toshiba Corp | Liquid crystal display device and its manufacture |
JP3422923B2 (ja) * | 1998-01-26 | 2003-07-07 | シャープ株式会社 | カラーフィルタの製造方法およびアライメントマーク |
JP3117010B2 (ja) * | 1998-11-05 | 2000-12-11 | 日本電気株式会社 | 液晶表示パネル |
CN1171189C (zh) * | 2000-08-04 | 2004-10-13 | 友达光电股份有限公司 | 等离子体显示面板及其制造方法 |
CN1333420C (zh) * | 2003-12-25 | 2007-08-22 | 友达光电股份有限公司 | 对位图案及包括该对位图案的平面显示面板 |
KR20080068164A (ko) * | 2007-01-18 | 2008-07-23 | 삼성전자주식회사 | 액정 표시 장치 |
KR100911010B1 (ko) * | 2007-08-03 | 2009-08-05 | 삼성에스디아이 주식회사 | 플라즈마 디스플레이 패널과, 이의 제조 방법 |
US7916247B2 (en) * | 2007-08-30 | 2011-03-29 | Seiko Epson Corporation | Electro-optic device, and electronic apparatus including the same |
TWI439891B (zh) * | 2007-09-29 | 2014-06-01 | Chunghwa Picture Tubes Ltd | 觸控式液晶顯示器 |
-
2010
- 2010-11-19 US US13/518,948 patent/US9274633B2/en not_active Expired - Fee Related
- 2010-11-19 JP JP2011549866A patent/JP5607078B2/ja not_active Expired - Fee Related
- 2010-11-19 EP EP10843121.4A patent/EP2511756A4/en not_active Withdrawn
- 2010-11-19 KR KR1020127020669A patent/KR101403809B1/ko active IP Right Grant
- 2010-11-19 BR BR112012017239A patent/BR112012017239A2/pt not_active Application Discontinuation
- 2010-11-19 WO PCT/JP2010/070706 patent/WO2011086766A1/ja active Application Filing
- 2010-11-19 RU RU2012132801/28A patent/RU2510063C1/ru not_active IP Right Cessation
- 2010-11-19 CN CN201080061443.1A patent/CN102713737B/zh not_active Expired - Fee Related
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04205342A (ja) * | 1990-11-30 | 1992-07-27 | Toshiba Corp | 一体型表示入力装置 |
JP2000173384A (ja) * | 1998-12-02 | 2000-06-23 | Rohm Co Ltd | タッチパネル一体型の画像表示装置、および画像表示盤に対するタッチパネルの位置補正方法 |
JP2008009054A (ja) | 2006-06-28 | 2008-01-17 | Optrex Corp | 表示装置及びその製造方法 |
Non-Patent Citations (1)
Title |
---|
See also references of EP2511756A4 * |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103218068A (zh) * | 2012-01-20 | 2013-07-24 | 群康科技(深圳)有限公司 | 触控显示装置及其制造方法 |
US9207790B2 (en) | 2012-01-20 | 2015-12-08 | Innolux Corporation | Touch display apparatus and method for fabricating the same |
CN103218068B (zh) * | 2012-01-20 | 2017-08-04 | 群康科技(深圳)有限公司 | 触控显示装置及其制造方法 |
US9874962B2 (en) | 2012-01-20 | 2018-01-23 | Innolux Corporation | Touch display apparatus and method for fabricating the same |
Also Published As
Publication number | Publication date |
---|---|
KR101403809B1 (ko) | 2014-06-03 |
CN102713737A (zh) | 2012-10-03 |
US9274633B2 (en) | 2016-03-01 |
BR112012017239A2 (pt) | 2016-03-22 |
KR20120113771A (ko) | 2012-10-15 |
US20120287357A1 (en) | 2012-11-15 |
EP2511756A1 (en) | 2012-10-17 |
CN102713737B (zh) | 2015-04-08 |
JP5607078B2 (ja) | 2014-10-15 |
RU2510063C1 (ru) | 2014-03-20 |
JPWO2011086766A1 (ja) | 2013-05-16 |
EP2511756A4 (en) | 2013-06-12 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5607078B2 (ja) | 液晶表示装置及びその製造方法 | |
CN107491211B (zh) | 一种触控显示面板和触控显示装置 | |
US9411471B2 (en) | Display device with integrated touch screen panel and fabricating method thereof | |
WO2018000824A1 (zh) | 显示面板及其制备方法、显示装置 | |
KR102122402B1 (ko) | 씨오티 구조 액정표시장치 및 이의 제조방법 | |
WO2019128208A1 (zh) | 一种触控面板及其装置 | |
US20140375911A1 (en) | In-cell touch display panel structure using conductive wires to connect with sensing electrodes | |
US20120206395A1 (en) | Touch panel-equipped display device | |
WO2010026682A1 (ja) | 液晶表示装置 | |
US9152265B2 (en) | Touch sensitive display | |
WO2017008450A1 (zh) | 平面转换模式阵列基板及其制作方法、显示器件 | |
JP2010033478A (ja) | 表示装置 | |
CN110471568B (zh) | 触控结构、触控显示装置及其制备方法 | |
JP2010072584A (ja) | 表示装置用基板、および、表示装置 | |
KR20160083609A (ko) | 광 제어 필름과 이를 포함하는 디스플레이 장치 | |
US10877340B2 (en) | TFT array substrate, fabrication method thereof and liquid crystal display panel | |
JP2012068287A (ja) | カラーフィルタ基板及びその製造方法 | |
JP2012220670A (ja) | タッチパネル電極付きカラーフィルタとその製造方法 | |
CN110703941A (zh) | 触控结构及其制备方法、触控基板、触控显示装置 | |
JP2017084153A (ja) | タッチパネル一体型有機エレクトロルミネッセンス表示装置用センサ電極基材、タッチパネル一体型有機エレクトロルミネッセンス表示装置、およびタッチパネル一体型有機エレクトロルミネッセンス表示装置の製造方法 | |
KR20140015017A (ko) | 터치센서를 구비한 액정표시장치 및 그 제조 방법 | |
TWI680328B (zh) | 顯示裝置及其製造方法 | |
WO2015188539A1 (zh) | 光栅基板及其制作方法、显示装置 | |
JP2006350346A (ja) | 液晶表示装置の製造方法 | |
KR20150058629A (ko) | 터치 스크린이 내장된 액정표시장치 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
WWE | Wipo information: entry into national phase |
Ref document number: 201080061443.1 Country of ref document: CN |
|
121 | Ep: the epo has been informed by wipo that ep was designated in this application |
Ref document number: 10843121 Country of ref document: EP Kind code of ref document: A1 |
|
WWE | Wipo information: entry into national phase |
Ref document number: 13518948 Country of ref document: US |
|
REEP | Request for entry into the european phase |
Ref document number: 2010843121 Country of ref document: EP |
|
WWE | Wipo information: entry into national phase |
Ref document number: 2011549866 Country of ref document: JP Ref document number: 2010843121 Country of ref document: EP |
|
NENP | Non-entry into the national phase |
Ref country code: DE |
|
WWE | Wipo information: entry into national phase |
Ref document number: 6259/CHENP/2012 Country of ref document: IN |
|
ENP | Entry into the national phase |
Ref document number: 20127020669 Country of ref document: KR Kind code of ref document: A |
|
WWE | Wipo information: entry into national phase |
Ref document number: 2012132801 Country of ref document: RU |
|
REG | Reference to national code |
Ref country code: BR Ref legal event code: B01A Ref document number: 112012017239 Country of ref document: BR |
|
ENP | Entry into the national phase |
Ref document number: 112012017239 Country of ref document: BR Kind code of ref document: A2 Effective date: 20120712 |