WO2011074466A1 - Method for manufacturing optical element and jig used in the method - Google Patents

Method for manufacturing optical element and jig used in the method Download PDF

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Publication number
WO2011074466A1
WO2011074466A1 PCT/JP2010/072094 JP2010072094W WO2011074466A1 WO 2011074466 A1 WO2011074466 A1 WO 2011074466A1 JP 2010072094 W JP2010072094 W JP 2010072094W WO 2011074466 A1 WO2011074466 A1 WO 2011074466A1
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WO
WIPO (PCT)
Prior art keywords
flat
laminated
optical member
flat plate
glass
Prior art date
Application number
PCT/JP2010/072094
Other languages
French (fr)
Japanese (ja)
Inventor
善行 小川
Original Assignee
コニカミノルタオプト株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by コニカミノルタオプト株式会社 filed Critical コニカミノルタオプト株式会社
Priority to JP2011546075A priority Critical patent/JP5617848B2/en
Publication of WO2011074466A1 publication Critical patent/WO2011074466A1/en

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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/10—Beam splitting or combining systems
    • G02B27/1073—Beam splitting or combining systems characterized by manufacturing or alignment methods
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/28—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising
    • G02B27/283—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising used for beam splitting or combining
    • G02B27/285—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising used for beam splitting or combining comprising arrays of elements, e.g. microprisms

Definitions

  • the present invention relates to a method of manufacturing an optical element such as a beam splitter and a jig used in the manufacturing method.
  • a beam splitter as an optical element is formed in a cubic shape by joining two triangular prismatic glass prisms via a polarization separation film, and transmits a predetermined polarization component in the polarization separation film. It has a function of reflecting the polarization component.
  • Patent Document 1 A manufacturing method for efficiently obtaining a large number of such beam splitters is disclosed in Patent Document 1.
  • a manufacturing method of Patent Document 1 first, a plurality of glass flat plates having the same configuration are prepared, and a polarization separation film is formed on one surface of each glass flat plate.
  • a jig comprising a horizontal plate-like base and an inclined side wall inclined upward at an inclination angle of 45 degrees from this base is prepared.
  • An ultraviolet curable adhesive is applied between the glass flat plates, and the glass flat plates are sequentially laminated on the base while aligning one end surface edge of each glass flat plate along the inclined side wall of the jig.
  • the laminated glass flat plate is pressurized to spread the adhesive between the glass flat plates, and the laminated glass flat plate is irradiated with ultraviolet rays in this state to cure the adhesive.
  • the laminated body which consists of a laminated glass flat plate is obtained.
  • This laminate is cut at a predetermined pitch along an inclination angle of 45 ° to obtain a plurality of laminate division bodies. Then, a plurality of laminated division bodies are laminated and temporarily fixed in an aligned state, cut at a predetermined pitch in the vertical and horizontal directions, and then temporarily fixed to be separated into individual beam splitters.
  • the step of forming the laminate of the above manufacturing method in order to spread the adhesive between the glass plates, one end surface edge of the laminated glass plates is brought into contact with the inclined side wall of the jig, and the laminated glass plates are pressurized. ing.
  • the upper laminated glass plate becomes unstable.
  • pressure is applied from the upper surface of the glass flat plate in this state, the portion supported by the lower glass flat plate can be sufficiently pressurized, but the portion on the inclined side wall that is not supported by the lower glass flat plate is sufficient. It is difficult to pressurize.
  • the pressure is not uniform between the inclined side of the glass plate and the opposite side, and the adhesive layer between the glass plates is relatively thick on the inclined side of the glass plate, and compared on the opposite side of the glass plate. Thin wedge shape.
  • the present invention has been made to solve the above-described problems, and an object of the present invention is to provide a manufacturing method for efficiently taking a large number of high-precision optical elements and a jig used in the manufacturing method. .
  • a method for manufacturing an optical element according to a first aspect is an optical element manufacturing method in which inclined surfaces of a plurality of prisms are joined, and a plurality of rectangular flat plates via an adhesive.
  • the flat optical members are stacked in a staircase pattern so that the flat surface connecting the end surface edges of the respective flat optical members and the flat surface of the flat optical member are inclined so as to be inclined.
  • a laminated body forming step for forming a laminated body, and the laminated body is cut at a predetermined angle and a predetermined pitch that are inclined in a direction along a plane connecting the end surface edges of the flat optical member, and the laminated body divided body is cut.
  • Laminate segment cutting that cuts at cutting intervals And in the laminate forming step, a lower exposed surface of a plurality of laminated flat optical members is supported by a jig, and an upper flat surface of the uppermost layer of the laminated flat optical members
  • another flat optical member is stacked via an adhesive, and after pressing the upper flat surface of the another flat optical member, the respective flat optical members are joined by an adhesive. .
  • a plurality of laminated flat optical members have their lower flat surfaces supported by the lower flat optical member and their lower exposed surfaces supported by the jig.
  • Another flat optical member is stacked on the upper flat surface of the uppermost layer of the laminated flat optical member via an adhesive, and then the upper flat surface of the other flat optical member is pressurized and bonded.
  • the agent spreads between the flat optical members with a uniform thickness.
  • the adhesive is cured by, for example, ultraviolet irradiation.
  • the jig supports the lower exposed surface of the flat optical member located in the middle of the laminated flat optical member, and the other flat plate.
  • the central part of the optical member is located on the flat optical member side arranged in the lower layer than the support surface of the jig in the horizontal direction. According to this, when the center part of another flat optical member to be laminated is positioned on the flat optical member side arranged below the support surface of the jig in the horizontal direction, the flat plate is interposed via the adhesive. Even if the optical members are laminated one after another and the flat optical member is pressurized each time, the laminated body does not fall down.
  • the jig includes a base portion on which the flat optical member is placed, and a horizontal support that supports the flat optical member placed in the horizontal direction. And a vertical support part for supporting the lower flat surface of the laminated flat optical member.
  • the flat optical member placed on the base portion is positioned in the horizontal direction by the horizontal support portion.
  • the laminated flat optical member is supported on the lower flat plate surface by the lower flat optical member and the vertical support portion.
  • the vertical support portion can be adjusted in the vertical direction and can be adjusted in the horizontal direction in accordance with the position of the laminated flat optical member. It is characterized by being. According to this method, the vertical support portion is adjusted to the flat optical member by adjusting the height and horizontal position of the vertical support portion according to the height and horizontal position of the lower flat plate surface of the laminated flat optical member. When arranged on the lower flat plate surface, the flat optical member is supported by the lower flat plate optical member and the vertical support portion on the lower flat plate surface.
  • optical element manufacturing method is characterized in that the position of the horizontal support portion can be adjusted in the horizontal direction.
  • a plurality of rectangular flat plate-shaped optical members are laminated via an adhesive, and a flat surface connecting the end surface edges of the respective flat plate-shaped optical members and a flat plate surface of the flat plate-shaped optical member
  • the flat plate optical member is sequentially shifted in the horizontal direction so as to incline and are laminated in a staircase shape to form a laminate, and the laminate is connected to the end surface edge of the flat plate optical member.
  • the laminate type A jig used in the process wherein the jig includes a base portion on which a flat optical member is placed, a horizontal support portion that horizontally supports the flat optical member placed above, and a laminated flat plate And a vertical support portion for supporting the lower exposed surface of the optical member.
  • the flat optical member placed on the base portion is positioned in the horizontal direction by the horizontal support portion.
  • a plurality of laminated flat optical members have their lower flat surfaces supported by the lower flat optical members, and their lower exposed surfaces supported by the vertical support portions.
  • Another flat optical member is stacked on the upper flat surface of the uppermost layer of the laminated flat optical member via an adhesive, and then the upper flat surface of the other flat optical member is pressurized and bonded.
  • the agent spreads between the flat optical members with a uniform thickness.
  • the adhesive is cured by, for example, ultraviolet irradiation.
  • the laminated flat optical member is supported by the lower flat optical member on the lower flat plate surface, and the lower exposed surface thereof. Supported by a jig.
  • Another flat optical member is stacked on the upper flat surface of the uppermost layer of the laminated flat optical member via an adhesive, and then the upper flat surface of the other flat optical member is pressurized and bonded.
  • the agent spreads between the flat optical members with a uniform thickness.
  • the adhesive is cured by, for example, ultraviolet irradiation. Therefore, a large number of highly accurate optical elements can be efficiently obtained by such a manufacturing method.
  • stacked is arrange
  • the flat optical member placed on the base portion is reliably positioned in the horizontal direction by the horizontal support portion. Then, the laminated flat optical member is stably supported on the lower flat plate surface by the lower flat optical member and the vertical support portion, and when the upper flat plate surface of the flat optical member is pressed, the adhesive is removed. It can be spread between flat optical members with a uniform thickness.
  • the height and horizontal direction position of a vertical support part are adjusted according to the height and horizontal direction position of the lower flat surface of the laminated flat optical member.
  • the vertical support portion is disposed on the lower flat surface of the flat optical member, the flat optical member is supported on the lower flat surface by the lower flat optical member and the vertical support portion. Therefore, when pressing the upper flat surface of the flat optical member, the adhesive between the flat optical members can be made to have a uniform thickness by a simple operation of arranging the vertical support portion on the lower flat surface of the flat optical member. Thus, a large number of highly accurate optical elements can be efficiently taken.
  • the horizontal support portion can be adjusted in the horizontal direction, so that the flat optical member placed on the base portion is horizontally aligned by the horizontal support portion. Is easily and reliably positioned. Moreover, when removing the completed laminated body, it can be easily removed without damaging the laminated body with a jig.
  • the flat optical member placed on the base portion is positioned in the horizontal direction by the horizontal support portion.
  • a plurality of laminated flat optical members have their lower flat surfaces supported by the lower flat optical members, and their lower exposed surfaces supported by the vertical support portions.
  • Another flat optical member is stacked on the upper flat surface of the uppermost layer of the laminated flat optical member via an adhesive, and then the upper flat surface of the other flat optical member is pressurized and bonded.
  • the agent spreads between the flat optical members with a uniform thickness.
  • the adhesive is cured by, for example, ultraviolet irradiation. Therefore, a large number of highly accurate optical elements can be efficiently taken only by using a jig having a simple configuration.
  • FIG. 1 and FIG. 2 are process diagrams for explaining a manufacturing method according to the present embodiment.
  • a beam splitter as an optical element is manufactured in the order of steps of FIGS. 1 (a) to (d) and FIGS. 2 (a) to (j).
  • the beam splitter has a cubic shape formed by joining two triangular prismatic glass prisms through a polarization separation film, and transmits a predetermined polarization component in the polarization separation film and reflects other polarization components. It has the function to do.
  • the glass flat plate 50 includes a rectangular plate glass 51 having a uniform thickness, a polarization separation film 13 formed on the upper surface of the plate glass 51, and a matching film 53 formed on the lower surface of the plate glass 51.
  • the matching film 53 prevents the refractive index of light transmitted through the glass flat plate from fluctuating due to the adhesive when the plurality of glass flat plates 50 are bonded with the adhesive.
  • FIG. 1 (b) is a diagram showing a process for forming the laminate 60.
  • the laminated body 60 is laminated
  • FIG. 1 (b) is a diagram showing a process for forming the laminate 60.
  • the laminated body 60 is laminated
  • the jig 90 includes a horizontal plate-shaped base portion 91, a horizontal support portion 92 disposed on the base portion 91, and a vertical support portion 93 that is movable in the horizontal direction and the vertical direction on the base portion 91. .
  • the glass flat plate 50 is placed on the base portion 91 with the polarization separation film 13 facing upward, and one end surface of the glass flat plate 50 is disposed in contact with the horizontal support portion 92.
  • the glass flat plate 50 is sequentially laminated on the upper surface of the glass flat plate 50.
  • the vertical support portion 93 is disposed so as to support the lower surface of the glass flat plate 50, and thereafter, an ultraviolet curable adhesive is applied to the upper surface of the glass flat plate 50.
  • the next glass flat plate 50 is placed on the upper surface of the glass flat plate 50 coated with an adhesive, and the next glass flat plate 50 is pressurized from the upper surface to spread the adhesive between the glass flat plates 50 uniformly.
  • the glass plate 50 is shifted in the horizontal direction by a distance corresponding to the thickness of the glass. Similarly, the glass flat plate 50 is sequentially shifted in the horizontal direction using the jig 90 and stacked.
  • the glass plate 50 is irradiated with ultraviolet rays from an ultraviolet light source (not shown) to cure the adhesive. Thereby, the step-shaped laminated body 60 with which the glass flat plate 50 was bonded together is obtained.
  • the laminate 60 is cut into a plurality of blocks by a wire saw at a predetermined pitch along a cutting line S ⁇ b> 1 inclined at 45 degrees with respect to the flat plate surface of the glass flat plate 50.
  • the laminated divided body 70 has a parallelogram in cross section and extends in the paper surface direction of FIG. 1, and a plurality of polarization separation films 13 are formed at equal intervals between the plate glasses 51.
  • the laminated divided body 70 is mirror-finished on both upper and lower surfaces (cut surfaces), and the anti-reflection film 71 is coated on both upper and lower surfaces after mirror finishing.
  • the laminated divided body 70 is laminated in an aligned state by applying an ultraviolet curable adhesive on the upper and lower surfaces.
  • an ultraviolet curable adhesive between the laminated divided bodies 70 and irradiating an amount smaller than the amount of ultraviolet light necessary for complete curing, each laminated divided body 70 is temporarily fixed.
  • the laminated division bodies 70 laminated in the vertical direction are cut by a wire saw at a predetermined pitch along a cutting line S2 orthogonal to the upper and lower surfaces of the laminated division body 70.
  • a temporary fixing laminated body 80 is obtained.
  • the temporary fixing laminate 80 is configured to be connected in the vertical direction via an ultraviolet curable adhesive and extend in the paper surface direction.
  • the temporary fixing laminate 80 is cut by a wire saw at a predetermined pitch along the cutting line S3.
  • This cutting line S3 is orthogonal to the cutting line S2 in FIG.
  • the temporary fixing laminate 80 is in a state of being connected by an ultraviolet curable adhesive, and by immersing the temporary fixing laminate 80 in an organic solvent, the ultraviolet curable adhesive that is not sufficiently cured is dissolved, and FIG. As shown in f), it is separated into a plurality of beam splitters 10.
  • the separated beam splitter 10 is mirror-finished on the upper and lower surfaces by a double-sided lapping machine (not shown) to be a finished product.
  • FIG. 3 is a diagram showing a pre-process for forming a laminate
  • FIG. 4 is a diagram showing a post-process for forming the laminate.
  • 3 (a) and 4 (a) are plan views
  • FIG. 3 (b) and FIG. 4 (b) are side views.
  • the glass flat plates 50 are referred to as glass flat plates 50A, 50B, 50C, 50D, 50E, and 50M, 50N in the order of lamination.
  • the jig 90 includes a horizontal plate-shaped base portion 91, a horizontal support portion 92 fixed on the base portion 91, and a vertical support portion 93 that is movable in the horizontal direction and the vertical direction on the base portion 91.
  • the horizontal support portion 92 has a rectangular parallelepiped shape, and is longer than the width of the glass flat plate 50 in the longitudinal direction (see FIG. 3A).
  • the abutment surface 92a of the horizontal support portion 92 abuts on one end surface of the glass flat plate 50 and can position the glass flat plate 50 in the horizontal direction.
  • the vertical support portion 93 has a rectangular parallelepiped shape and is longer than the width of the glass flat plate 50 in the longitudinal direction (see FIG. 3A).
  • the support surface 93 a of the vertical support portion 93 can contact the lower flat plate surface of the glass flat plate 50 to support the glass flat plate 50.
  • the vertical support part 93 is arrange
  • the vertical support portion 93 is operated so as to move in the vertical and horizontal directions.
  • the vertical support portion 93 is provided with a horizontal rack and a vertical rack (not shown), and the base portion 91 is provided with a pinion that meshes with each rack (not shown). By driving each pinion, the vertical support portion 93 moves in the horizontal direction or the vertical direction.
  • the glass flat plate 50 ⁇ / b> A is placed on the base portion 91 of the jig 90. At this time, the one end surface 50Ac of the glass flat plate 50A comes into contact with the contact surface 92a of the horizontal support portion 92, and the glass flat plate 50A is positioned.
  • An ultraviolet curable adhesive is applied to the upper flat surface 50Ab of the glass flat plate 50A. Then, the glass flat plate 50B is placed on the upper flat plate surface 50Ab of the glass flat plate 50A coated with an adhesive. Thereafter, the glass flat plate 50B is pressed from the upper flat surface 50Bb of the glass flat plate 50B to spread the adhesive between the glass flat plates 50A and 50B uniformly, and the horizontal direction of the glass flat plate 50B by a distance corresponding to the thickness of the glass (FIG. 3A). Shift left).
  • an ultraviolet curable adhesive may be applied to the lower flat surface 50Ba of the glass flat plate 50B, and the glass flat plate 50B coated with the adhesive may be placed on the upper flat surface 50Ab of the glass flat plate 50A.
  • the glass flat plates 50C and 50D are laminated in the same manner as described above. In the lamination of the glass flat plates 50A to 50D, even if pressure is applied from the upper flat plate surface 50b of the glass flat plate 50, the adhesive spreads uniformly between the glass flat plates 50.
  • the glass flat plates 50A to 50D have been stacked in a staircase pattern sequentially shifted in the horizontal direction. However, each time the glass flat plates 50A to 50D are stacked, the position of the center of gravity by the stacked glass flat plates 50 gradually moves to the left side of FIG. . And if the next glass flat plate 50E is laminated
  • the glass flat plate 50D it is difficult to pressurize because it is not supported by the glass flat plate 50D. Therefore, when pressure is applied in this state, the pressure is not uniform at both ends of the glass flat plate 50E, and the adhesive layer thickness between the glass flat plates 50D and 50E is relatively thick at the other end of the glass flat plate 50E.
  • the one end of the flat plate 50E has a relatively thin wedge shape.
  • the vertical support portion 93 is used.
  • the number of laminated glass plates may become at least unstable, but in this case, the vertical support portion starts when the number of laminated layers is small. 93 is used.
  • the vertical support part 93 is moved to the vicinity of the glass flat plate 50D. And the vertical support part 93 is horizontally moved to the position where the standing surface 93b of the vertical support part 93 and the other end face 50Cd of the glass flat plate 50C arranged below the glass flat plate 50D abut. Next, the height of the vertical support portion 93 is adjusted, and the support surface 93a of the vertical support portion 93 is brought into contact with the lower exposed surface of the lower flat plate surface 50Da of the glass flat plate 50D.
  • the lower exposed surface of the lower flat plate surface 50Da is a surface that is not in contact with the upper flat plate surface 50Cb of the glass flat plate 50C. Accordingly, the glass flat plate 50D is supported by the upper flat plate surface 50Cb of the glass flat plate 50C and the support surface 93a of the vertical support portion 93, and is in a stable state.
  • an ultraviolet curable adhesive is applied to the upper flat surface 50Db of the glass flat plate 50D.
  • the glass flat plate 50E is stacked on the upper flat plate surface 50Db of the glass flat plate 50D, and then pressed from the upper flat plate surface 50Eb of the glass flat plate 50E to uniformly spread the adhesive between the glass flat plates 50D and 50E.
  • 50E is shifted in the horizontal direction by a distance corresponding to the thickness of the glass.
  • an ultraviolet light source (not shown) from an ultraviolet light source necessary for complete curing of the ultraviolet curable adhesive is used so that the position of the glass flat plate 50E does not shift. Irradiate a small amount of ultraviolet light to temporarily cure the adhesive.
  • the vertical support portion 93 is moved in the horizontal direction and the vertical direction, and the lower surface of the glass flat plate 50M is supported by the support surface 93a of the vertical support portion 93.
  • the lower exposed surface of the flat plate surface 50Ma is supported.
  • the glass flat plate 50N is stacked on the upper flat plate surface 50Mb of the glass flat plate 50M, and then pressed from the upper flat plate surface 50Nb of the glass flat plate 50N to spread the applied adhesive uniformly between the glass flat plates 50M and 50N.
  • the flat plate 50N is shifted in the horizontal direction by a distance corresponding to the thickness of the glass, and ultraviolet rays are irradiated at this predetermined position to temporarily cure the adhesive between the glass flat plates 50M and 50N.
  • the glass plate 50 When a predetermined number of glass plates 50 are laminated, the glass plate 50 is sufficiently irradiated with ultraviolet rays to completely cure the adhesive. Thereby, the step-shaped laminated body 60 with which the glass flat plate 50 was bonded together is obtained.
  • the laminated body 60 is removed from the jig 90, and the laminated body 60 is processed in the following process.
  • the horizontal support portion 92 may be configured to be movable in the horizontal direction with respect to the base portion 91. In this configuration, when the completed laminated body 60 is removed after the horizontal support portion 92 is moved to the right in FIG. 4A, the laminated body 60 can be easily removed without damaging it with a jig.
  • FIG. 5 shows the beam splitter 10 completed through the final process from the formation process of the laminate 60.
  • FIG. 5A shows a beam splitter 10 finished to a normal size. A light beam incident from the horizontal direction is reflected by the polarization separation film 13 and emitted in the vertical direction.
  • FIG. 5B shows the beam splitter 10 in which the polarization separation film 13 (the bonding surface between the glass flat plates 50) is shifted from the normal position (the one-dot chain line position in FIG. 5). The incident light beam is reflected by the polarization separation film 13 and emitted in the vertical direction, but the light beam is emitted with a positional deviation in the horizontal direction.
  • FIG. 5 shows the beam splitter 10 completed through the final process from the formation process of the laminate 60.
  • FIG. 5A shows a beam splitter 10 finished to a normal size. A light beam incident from the horizontal direction is reflected by the polarization separation film 13 and emitted in the vertical direction.
  • FIG. 5B shows the beam splitter 10
  • 5C shows a beam splitter 10 in which an angle deviation (junction surface angle deviation) of the polarization separation film 13 (joint surface between the glass flat plates 50) is generated, and the light beam incident from the horizontal direction is the polarization separation film. 13 is reflected and emitted from the vertical direction with a declination.
  • the accuracy of the beam splitter 10 manufactured using the jig 90 of this embodiment and the beam splitter manufactured using the jig according to Patent Document 1 was measured and evaluated.
  • the flat glass 50 has a plate thickness of 3 mm and a square shape of 65 mm square, and the laminated body 60 is obtained by laminating 18 pieces of the flat glass 50.
  • the beam splitter 10 is used for a pickup prism of an optical disk drive.
  • the tolerance of the pickup prism of a Blu-ray optical disk drive generally has a joint surface position deviation of 0.03 mm to 0.05 mm and a joint surface angle deviation. Is less than 3 minutes.
  • the beam splitter has the above-mentioned positional deviation, and it is difficult to apply it to a pickup prism of a Blu-ray optical disc drive.
  • the flat glass 50 is laminated using the jig according to the present embodiment, by laminating the 18 flat glass 50, the maximum misalignment of the joining surface occurs by 0.004 mm, and the joining surface angle is increased. Deviation occurred for 10 seconds.
  • the beam splitter having this positional deviation can be applied to a pickup prism of a Blu-ray optical disc drive.
  • the present invention is applied to a beam splitter composed of two prisms with one polarization separation film interposed therebetween.
  • the present invention is not limited to this, and a plurality of two or more polarization separation films are interposed. You may apply to the beam splitter which consists of this prism. In this case, the pitch at which the laminated divided body 70 is cut is set larger than that in the above embodiment so that two or more polarization separation films are included.
  • the vertical support portion 93 of the jig 90 is configured to be driven in the horizontal and vertical directions by the rack and pinion.
  • the present invention is not limited to this, and the vertical support portion 93 is a A plurality of blocks having different sizes may be prepared, a block that matches the height of the laminated glass flat plate 50 may be selected from the plurality of blocks, and the glass flat plate 50 may be supported by the block.
  • the adhesive in addition to the ultraviolet curable adhesive, a visible light curable adhesive, a thermosetting adhesive, or the like can be used.
  • the method of manufacturing the beam splitter 10 in which the inclined surfaces of the plurality of prisms are joined includes laminating a plurality of rectangular glass flat plates (flat optical members) 50 via an adhesive, The glass flat plate 50 is sequentially shifted in the horizontal direction so that the plane connecting the edge 50c (or 50d) edge (end surface edge) of the glass flat plate 50 and the flat plate surface 50a (or 50b) of the glass flat plate 50 are inclined, and stacked in a staircase pattern.
  • the lower exposed surface 50Da of the glass flat plate 50D that is laminated is supported by the jig 90, and the glass flat plate 50Db is bonded to the upper flat surface 50Db of the glass flat plate 50D via an adhesive.
  • the glass flat plates 50D and 50E are joined to each other by an adhesive.
  • a plurality of laminated glass flat plates 50D are supported on the lower flat plate surface 50Da by the lower glass flat plate 50C and supported on the lower exposed surface by the jig 90.
  • the glass flat plate 50E is stacked on the upper flat plate surface 50Db of the glass flat plate 50D through an adhesive, and then the upper flat plate surface 50Eb of the glass flat plate 50E is pressurized, so that the adhesive has a uniform thickness and the glass flat plate 50D. Spread between 50E. Thereafter, the adhesive is cured by, for example, ultraviolet irradiation. Therefore, a large number of highly accurate beam splitters 10 can be efficiently obtained by such a manufacturing method.
  • tool 90 is the base part 91 in which the glass flat plate 50 is mounted, the horizontal support part 92 which supports the mounted glass flat plate 50 in a horizontal direction, and the laminated glass flat plate. 50 and a vertical support portion 93 that supports the lower flat plate surface 50a. Accordingly, the glass flat plate 50 placed on the base portion 91 is reliably positioned in the horizontal direction by the horizontal support portion 92.
  • the laminated glass flat plate 50 is stably supported at the lower flat plate surface 50a by the lower glass flat plate 50 and the vertical support portion 93, and is bonded when the upper flat plate surface 50b of the glass flat plate 50 is pressurized.
  • the agent can be spread between the glass flat plates 50 with a uniform thickness.
  • the vertical support part 93 can be position-adjusted to a perpendicular direction according to the position of the laminated
  • the height and horizontal position of the vertical support portion 93 are adjusted according to the height and horizontal position of the lower flat surface 50a of the laminated glass flat plates 50, and the vertical support portion 93 is placed under the glass flat plate 50.
  • the glass flat plate 50 is supported on the lower flat plate surface 50 a by the lower glass flat plate 50 and the vertical support portion 93.
  • the adhesive between the glass flat plates 50 has a uniform thickness by a simple operation of arranging the vertical support portion 93 on the lower flat surface 50a of the glass flat plate 50.
  • a large number of highly accurate optical elements can be efficiently taken.
  • the horizontal support portion 92 can be adjusted in the horizontal direction, so that the glass flat plate 50 placed on the base portion 91 can be easily and reliably secured in the horizontal direction by the horizontal support portion 92. Positioned. Moreover, when removing the completed laminated body 60, the laminated body 60 can be easily removed without being damaged by the jig 90.
  • the vertical support portion 93 of the jig 90 is rearranged and the uppermost glass flat plate is supported by the vertical support portion 93.
  • the lower exposed surface of the glass plate located in the middle of the laminated glass plates may be supported by a vertical support portion 93.
  • the support surface 93a of the vertical support portion 93 supports the lower exposed surface of the lower flat surface 50Ga of the glass flat plate 50G. Even if the glass flat plate 50N is laminated and the glass flat plate 50N is pressurized at the position supported by the vertical support portion 93, the laminated body 60 does not fall down. That is, if the central portion P of the laminated glass flat plate 50N is on the glass substrate side (right side of the support surface 93a) below the support surface 93a of the vertical support portion 93 in the horizontal direction, The laminated body 60 is supported by the jig 90 and does not fall down.
  • the glass flat plate 50N is stacked on the upper flat plate surface 50Mb of the glass flat plate 50M via an adhesive, and then pressed from the upper flat plate surface 50Nb of the glass flat plate 50N so that the applied adhesive is uniform between the glass flat plates 50M and 50N.
  • the glass flat plate 50N is shifted in the horizontal direction by a distance corresponding to the glass thickness.
  • the adhesive between the glass flat plates 50M and 50N is temporarily cured by irradiating with ultraviolet rays. Furthermore, the following glass flat plate is laminated and the adhesive is temporarily cured.
  • the vertical support part 93 is hold
  • the vertical support portion 93 is disposed on the left side of FIG. 6 and a plurality of glass flat plates are bonded together as described above. Therefore, a plurality of flat optical members can be bonded together without frequently moving the jig, and the working efficiency is good.
  • the present invention can be used for a manufacturing method of an optical element such as a beam splitter and a jig used in the manufacturing method.
  • Beam splitter 50 Glass flat plate (flat optical member) 50a Lower flat surface (flat surface) 50b Upper flat surface (flat surface) 50c One end face (end face) 50d The other end face (end face) 51 Plate glass 53 Matching film 60 Laminated body 70 Laminated division body 71 Antireflection film 80 Temporary fixing laminated body 90 Jig 91 Base part 92 Horizontal support part 92a Contact surface 93 Vertical support part 93a Support surface 93b Standing surface

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Joining Of Glass To Other Materials (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Polarising Elements (AREA)

Abstract

Disclosed is a method for manufacturing a beam splitter (10) wherein the tilted surfaces of a plurality of prisms are bonded to each other. The lower exposed surface of the lower flat plate surface (50Da) of a glass flat plate (50D) among a plurality of laminated glass flat plates is supported by means of a jig (90), and another glass flat plate (50E) is stacked on the upper flat plate surface (50Db) of the glass flat plate (50D) with an adhesive therebetween. After applying pressure to the upper flat plate surface (50Eb) of the glass flat plate (50E), the glass flat plates (50D, 50E) are bonded to each other with the adhesive, and a laminate (60) is provided.

Description

光学素子の製造方法及びその製造方法に用いる治具Optical element manufacturing method and jig used in the manufacturing method
　本発明は、ビームスプリッタ等の光学素子の製造方法及びその製造方法に用いる治具に関するものである。 The present invention relates to a method of manufacturing an optical element such as a beam splitter and a jig used in the manufacturing method.
　光学素子としてのビームスプリッタは、偏光分離膜を介して２つの三角柱状のガラスプリズムを接合することにより立方体状に構成したものであり、偏光分離膜において所定の偏光成分を透過し、それ以外の偏光成分を反射する機能を有する。 A beam splitter as an optical element is formed in a cubic shape by joining two triangular prismatic glass prisms via a polarization separation film, and transmits a predetermined polarization component in the polarization separation film. It has a function of reflecting the polarization component.
　このようなビームスプリッタを効率良く多数個取りする製造方法が特許文献１に開示されている。特許文献１の製造方法では、まず、同一の構成を備えたガラス平板を複数枚用意して、各ガラス平板の一方の面に偏光分離膜を形成する。 A manufacturing method for efficiently obtaining a large number of such beam splitters is disclosed in Patent Document 1. In the manufacturing method of Patent Document 1, first, a plurality of glass flat plates having the same configuration are prepared, and a polarization separation film is formed on one surface of each glass flat plate.
　次に、水平な板状のベースとこのベースから４５度の傾斜角度で上方に傾斜した傾斜側壁とからなる治具を用意する。各ガラス平板間には紫外線硬化型接着剤を塗布しておき、各ガラス平板の一端面縁を治具の傾斜側壁に沿って整列させながら、ガラス平板をベースに順次積層する。その後、積層したガラス平板を加圧して接着剤をガラス平板間で広げ、この状態で積層したガラス平板に紫外線を照射し、接着剤を硬化させる。このようにして、積層したガラス平板からなる積層体を得ている。 Next, a jig comprising a horizontal plate-like base and an inclined side wall inclined upward at an inclination angle of 45 degrees from this base is prepared. An ultraviolet curable adhesive is applied between the glass flat plates, and the glass flat plates are sequentially laminated on the base while aligning one end surface edge of each glass flat plate along the inclined side wall of the jig. Then, the laminated glass flat plate is pressurized to spread the adhesive between the glass flat plates, and the laminated glass flat plate is irradiated with ultraviolet rays in this state to cure the adhesive. Thus, the laminated body which consists of a laminated glass flat plate is obtained.
　この積層体を４５°の傾斜角度に沿って所定ピッチで切断して、複数の積層分割体を得る。そして、複数の積層分割体を整合状態で積層して仮止めし、縦横方向に所定ピッチで切断した後、仮止めをはずして個々のビームスプリッタに分離している。 This laminate is cut at a predetermined pitch along an inclination angle of 45 ° to obtain a plurality of laminate division bodies. Then, a plurality of laminated division bodies are laminated and temporarily fixed in an aligned state, cut at a predetermined pitch in the vertical and horizontal directions, and then temporarily fixed to be separated into individual beam splitters.
特開２０００－１４３２６４号公報（段落［００１０］、第１図）JP 2000-143264 A (paragraph [0010], FIG. 1)
　上記製造方法の積層体を形成する工程において、接着剤をガラス平板間に広げるために、積層したガラス平板の一端面縁を治具の傾斜側壁に当接させて、積層したガラス平板を加圧している。しかしながら、この工程において、ガラス平板を傾斜側壁に当接させた状態で、ガラス平板を階段状に積層すると、高く積層した上側のガラス平板は不安定な状態になる。この状態でガラス平板の上面から加圧すると、下側のガラス平板で支持されている部位は十分に加圧することができるが、下側のガラス平板で支持されていない傾斜側壁側の部位は十分に加圧することがむずかしい。従って、ガラス平板の傾斜側壁側とその反対側とで加圧が不均一となり、ガラス平板間の接着剤層は、ガラス平板の傾斜側壁側では比較的に厚く、ガラス平板のその反対側では比較的に薄いクサビ状となる。ガラス平板を積層する毎に、この接着剤厚の偏りは累積されることになり、完成したビームスプリッタには、接合面、つまり偏光分離膜の位置ズレや角度ズレが発生し、このような偏光分離膜では、光ビームが所定の方向に反射しないという不都合があった。 In the step of forming the laminate of the above manufacturing method, in order to spread the adhesive between the glass plates, one end surface edge of the laminated glass plates is brought into contact with the inclined side wall of the jig, and the laminated glass plates are pressurized. ing. However, in this process, when the glass flat plate is laminated stepwise with the glass flat plate in contact with the inclined side wall, the upper laminated glass plate becomes unstable. When pressure is applied from the upper surface of the glass flat plate in this state, the portion supported by the lower glass flat plate can be sufficiently pressurized, but the portion on the inclined side wall that is not supported by the lower glass flat plate is sufficient. It is difficult to pressurize. Therefore, the pressure is not uniform between the inclined side of the glass plate and the opposite side, and the adhesive layer between the glass plates is relatively thick on the inclined side of the glass plate, and compared on the opposite side of the glass plate. Thin wedge shape. Each time the glass flat plate is laminated, this deviation in the adhesive thickness is accumulated, and the completed beam splitter generates a positional deviation or angular deviation of the bonding surface, that is, the polarization separation film. The separation film has a disadvantage that the light beam is not reflected in a predetermined direction.
　本発明は、上記のような課題を解決するためになされたものであり、精度の高い光学素子を効率良く多数個取りする製造方法及びその製造方法に用いる治具を提供することを目的とする。 The present invention has been made to solve the above-described problems, and an object of the present invention is to provide a manufacturing method for efficiently taking a large number of high-precision optical elements and a jig used in the manufacturing method. .
　上記目的を達成するために第１の態様に係る光学素子の製造方法は、複数のプリズムの各傾斜面を接合した光学素子の製造方法であって、接着剤を介して複数枚の矩形の平板状光学部材を積層するとともに、各平板状光学部材の端面縁を結ぶ平面と平板状光学部材の平板面とが傾斜するように平板状光学部材を水平方向に順次ずらして階段状に積層して、積層体を形成する積層体形成工程と、前記積層体を、前記平板状光学部材の端面縁を結ぶ平面に沿う方向に傾斜する所定の角度および所定のピッチで切断し、積層体分割体を形成する積層体分割体形成工程と、前記積層体分割体を、前記平面状光学部材の接合面を間に含むように、前記積層体分割体形成工程における切断面に垂直な方向に、所定の切断間隔で切断する積層体分割体切断工程と、を有し、前記積層体形成工程において、複数枚積層された平板状光学部材の下側露出面を治具によって支持し、前記積層された平板状光学部材の最上層の上側平板面に、接着剤を介して別の平板状光学部材を積み、前記別の平板状光学部材の上側平板面を加圧した後、接着剤によって互いの平板状光学部材を接合することを特徴としている。 In order to achieve the above object, a method for manufacturing an optical element according to a first aspect is an optical element manufacturing method in which inclined surfaces of a plurality of prisms are joined, and a plurality of rectangular flat plates via an adhesive. The flat optical members are stacked in a staircase pattern so that the flat surface connecting the end surface edges of the respective flat optical members and the flat surface of the flat optical member are inclined so as to be inclined. A laminated body forming step for forming a laminated body, and the laminated body is cut at a predetermined angle and a predetermined pitch that are inclined in a direction along a plane connecting the end surface edges of the flat optical member, and the laminated body divided body is cut. A laminated body forming step to be formed, and the laminated body divided body in a direction perpendicular to the cut surface in the laminated body forming body forming step so as to include the bonding surface of the planar optical member therebetween. Laminate segment cutting that cuts at cutting intervals And in the laminate forming step, a lower exposed surface of a plurality of laminated flat optical members is supported by a jig, and an upper flat surface of the uppermost layer of the laminated flat optical members In addition, another flat optical member is stacked via an adhesive, and after pressing the upper flat surface of the another flat optical member, the respective flat optical members are joined by an adhesive. .
　この方法によれば、複数枚積層された平板状光学部材は、その下側平板面を下方の平板状光学部材によって支持され、且つ、その下側露出面を治具によって支持される。積層された平板状光学部材の最上層の上側平板面に、接着剤を介して別の平板状光学部材が積まれ、次に、別の平板状光学部材の上側平板面が加圧され、接着剤が均一な厚みで平板状光学部材間に広がる。この後、例えば紫外線照射によって、接着剤が硬化する。 According to this method, a plurality of laminated flat optical members have their lower flat surfaces supported by the lower flat optical member and their lower exposed surfaces supported by the jig. Another flat optical member is stacked on the upper flat surface of the uppermost layer of the laminated flat optical member via an adhesive, and then the upper flat surface of the other flat optical member is pressurized and bonded. The agent spreads between the flat optical members with a uniform thickness. Thereafter, the adhesive is cured by, for example, ultraviolet irradiation.
　また、第２の態様に係る光学素子の製造方法では、前記治具は複数枚積層された平板状光学部材の途中に位置する平板状光学部材の下側露出面を支持し、前記別の平板状光学部材の中央部は、水平方向において、前記治具の支持面よりも下層に配置される平板状光学部材側に位置する。これによれば、積層される別の平板状光学部材の中央部が、水平方向において、治具の支持面よりも下層に配置される平板状光学部材側に位置すると、接着剤を介して平板状光学部材を次々と積層し平板状光学部材をその都度加圧しても、積層体が倒れない。 In the optical element manufacturing method according to the second aspect, the jig supports the lower exposed surface of the flat optical member located in the middle of the laminated flat optical member, and the other flat plate. The central part of the optical member is located on the flat optical member side arranged in the lower layer than the support surface of the jig in the horizontal direction. According to this, when the center part of another flat optical member to be laminated is positioned on the flat optical member side arranged below the support surface of the jig in the horizontal direction, the flat plate is interposed via the adhesive. Even if the optical members are laminated one after another and the flat optical member is pressurized each time, the laminated body does not fall down.
　また、第３の態様に係る光学素子の製造方法では、前記治具は、平板状光学部材が載置されるベース部と、前記載置された平板状光学部材を水平方向に支持する水平支持部と、積層された平板状光学部材の下側平板面を支持する垂直支持部とを有することを特徴としている。この治具では、ベース部に載置された平板状光学部材は、水平支持部によって水平方向に位置決めされる。そして、積層した平板状光学部材は、その下側平板面を下方の平板状光学部材と垂直支持部とによって支持される。 In the optical element manufacturing method according to the third aspect, the jig includes a base portion on which the flat optical member is placed, and a horizontal support that supports the flat optical member placed in the horizontal direction. And a vertical support part for supporting the lower flat surface of the laminated flat optical member. In this jig, the flat optical member placed on the base portion is positioned in the horizontal direction by the horizontal support portion. The laminated flat optical member is supported on the lower flat plate surface by the lower flat optical member and the vertical support portion.
　また、第４の態様に係る光学素子の製造方法では、前記垂直支持部は、積層した平板状光学部材の位置に応じて、垂直方向に位置調整可能であるとともに、水平方向に位置調整可能であることを特徴としている。この方法によれば、積層した平板状光学部材の下側平板面の高さ及び水平方向位置に応じて垂直支持部の高さ及び水平方向位置を調整して、垂直支持部を平板状光学部材の下側平板面に配置すると、平板状光学部材は、その下側平板面を下方の平板状光学部材と垂直支持部とによって支持される。 In the optical element manufacturing method according to the fourth aspect, the vertical support portion can be adjusted in the vertical direction and can be adjusted in the horizontal direction in accordance with the position of the laminated flat optical member. It is characterized by being. According to this method, the vertical support portion is adjusted to the flat optical member by adjusting the height and horizontal position of the vertical support portion according to the height and horizontal position of the lower flat plate surface of the laminated flat optical member. When arranged on the lower flat plate surface, the flat optical member is supported by the lower flat plate optical member and the vertical support portion on the lower flat plate surface.
　また、第５の態様に係る光学素子の製造方法では、前記水平支持部は水平方向に位置調整可能であることを特徴としている。 Further, the optical element manufacturing method according to the fifth aspect is characterized in that the position of the horizontal support portion can be adjusted in the horizontal direction.
　また、第６の態様に係る治具では、接着剤を介して複数枚の矩形の平板状光学部材を積層するとともに、各平板状光学部材の端面縁を結ぶ平面と平板状光学部材の平板面とが傾斜するように平板状光学部材を水平方向に順次ずらして階段状に積層して、積層体を形成する積層体形成工程と、前記積層体を、前記平板状光学部材の端面縁を結ぶ平面に沿う方向に傾斜する所定の角度および所定のピッチで切断し、積層体分割体を形成する積層体分割体形成工程と、前記積層体分割体を、前記平面状光学部材の接合面を間に含むように、前記積層体分割体形成工程における切断面に垂直な方向に、所定の切断間隔で切断する積層体分割体切断工程と、を有する、複数のプリズムの各傾斜面を接合した光学素子の製造方法において、前記積層体形成工程に用いる治具であって、前記治具は、平板状光学部材が載置されるベース部と、前記載置された平板状光学部材を水平方向に支持する水平支持部と、積層した平板状光学部材の下側露出面を支持する垂直支持部とを有することを特徴としている。 In the jig according to the sixth aspect, a plurality of rectangular flat plate-shaped optical members are laminated via an adhesive, and a flat surface connecting the end surface edges of the respective flat plate-shaped optical members and a flat plate surface of the flat plate-shaped optical member The flat plate optical member is sequentially shifted in the horizontal direction so as to incline and are laminated in a staircase shape to form a laminate, and the laminate is connected to the end surface edge of the flat plate optical member. A laminate divided body forming step of forming a laminate divided body by cutting at a predetermined angle and a predetermined pitch inclined in a direction along the plane, and the laminate divided body between the bonding surfaces of the planar optical members. A laminated body cutting step for cutting at a predetermined cutting interval in a direction perpendicular to the cut surface in the laminated body forming step so as to join the inclined surfaces of the plurality of prisms. In the element manufacturing method, the laminate type A jig used in the process, wherein the jig includes a base portion on which a flat optical member is placed, a horizontal support portion that horizontally supports the flat optical member placed above, and a laminated flat plate And a vertical support portion for supporting the lower exposed surface of the optical member.
　この構成によれば、ベース部に載置された平板状光学部材は、水平支持部によって水平方向に位置決めされる。そして、複数枚積層された平板状光学部材は、その下側平板面を下方の平板状光学部材によって支持され、且つ、その下側露出面を垂直支持部によって支持される。積層された平板状光学部材の最上層の上側平板面に、接着剤を介して別の平板状光学部材が積まれ、次に、別の平板状光学部材の上側平板面が加圧され、接着剤が均一な厚みで平板状光学部材間に広がる。この後、例えば紫外線照射によって、接着剤が硬化する。 According to this configuration, the flat optical member placed on the base portion is positioned in the horizontal direction by the horizontal support portion. A plurality of laminated flat optical members have their lower flat surfaces supported by the lower flat optical members, and their lower exposed surfaces supported by the vertical support portions. Another flat optical member is stacked on the upper flat surface of the uppermost layer of the laminated flat optical member via an adhesive, and then the upper flat surface of the other flat optical member is pressurized and bonded. The agent spreads between the flat optical members with a uniform thickness. Thereafter, the adhesive is cured by, for example, ultraviolet irradiation.
　第１の態様に係る光学素子の製造方法によれば、複数枚積層された平板状光学部材は、その下側平板面を下方の平板状光学部材によって支持され、且つ、その下側露出面を治具によって支持される。積層された平板状光学部材の最上層の上側平板面に、接着剤を介して別の平板状光学部材が積まれ、次に、別の平板状光学部材の上側平板面が加圧され、接着剤が均一な厚みで平板状光学部材間に広がる。この後、例えば紫外線照射によって、接着剤が硬化する。従って、このような製造方法によって、精度の高い光学素子を効率良く多数個取りすることができる。 According to the method for manufacturing an optical element according to the first aspect, the laminated flat optical member is supported by the lower flat optical member on the lower flat plate surface, and the lower exposed surface thereof. Supported by a jig. Another flat optical member is stacked on the upper flat surface of the uppermost layer of the laminated flat optical member via an adhesive, and then the upper flat surface of the other flat optical member is pressurized and bonded. The agent spreads between the flat optical members with a uniform thickness. Thereafter, the adhesive is cured by, for example, ultraviolet irradiation. Therefore, a large number of highly accurate optical elements can be efficiently obtained by such a manufacturing method.
　また、第２の態様に係る光学素子の製造方法によれば、積層される別の平板状光学部材の中央部が、水平方向において、治具の支持面よりも下層に配置される平板状光学部材側に位置すると、接着剤を介して平板状光学部材を次々と積層し平板状光学部材をその都度加圧しても、積層体が倒れない。従って、治具を頻繁に移動させることなく、複数枚の平板状光学部材を貼り合わせることができ、作業効率が良い。 Moreover, according to the manufacturing method of the optical element which concerns on a 2nd aspect, the center part of another flat plate-shaped optical member laminated | stacked is arrange | positioned in the horizontal direction in the lower layer rather than the support surface of a jig | tool. If it is located on the member side, even if the flat optical members are laminated one after another via the adhesive and the flat optical member is pressed each time, the laminated body does not fall down. Therefore, a plurality of flat optical members can be bonded together without frequently moving the jig, and the working efficiency is good.
　また、第３の態様に係る光学素子の製造方法によれば、ベース部に載置された平板状光学部材は、水平支持部によって水平方向に確実に位置決めされる。そして、積層した平板状光学部材は、その下側平板面を下方の平板状光学部材と垂直支持部とによって安定して支持され、平板状光学部材の上側平板面を加圧すると、接着剤を均一な厚みで平板状光学部材間に広げることができる。 Further, according to the method for manufacturing an optical element according to the third aspect, the flat optical member placed on the base portion is reliably positioned in the horizontal direction by the horizontal support portion. Then, the laminated flat optical member is stably supported on the lower flat plate surface by the lower flat optical member and the vertical support portion, and when the upper flat plate surface of the flat optical member is pressed, the adhesive is removed. It can be spread between flat optical members with a uniform thickness.
　また、第４の態様に係る光学素子の製造方法によれば、積層した平板状光学部材の下側平板面の高さ及び水平方向位置に応じて垂直支持部の高さ及び水平方向位置を調整して、垂直支持部を平板状光学部材の下側平板面に配置すると、平板状光学部材は、その下側平板面を下方の平板状光学部材と垂直支持部とによって支持される。従って、平板状光学部材の上側平板面を加圧するときに、垂直支持部を平板状光学部材の下側平板面に配置するという簡単な作業によって、平板状光学部材間の接着剤が均一な厚みとなり、精度の高い光学素子を効率良く多数個取りすることができる。 Moreover, according to the manufacturing method of the optical element which concerns on a 4th aspect, the height and horizontal direction position of a vertical support part are adjusted according to the height and horizontal direction position of the lower flat surface of the laminated flat optical member. When the vertical support portion is disposed on the lower flat surface of the flat optical member, the flat optical member is supported on the lower flat surface by the lower flat optical member and the vertical support portion. Therefore, when pressing the upper flat surface of the flat optical member, the adhesive between the flat optical members can be made to have a uniform thickness by a simple operation of arranging the vertical support portion on the lower flat surface of the flat optical member. Thus, a large number of highly accurate optical elements can be efficiently taken.
　また、第５の態様に係る光学素子の製造方法によれば、水平支持部は水平方向に位置調整可能であるので、ベース部に載置された平板状光学部材は、水平支持部によって水平方向に簡単に且つ確実に位置決めされる。また、完成した積層体を取り外すときに、積層体を治具で傷つけることなく簡単に取り外すことができる。 Further, according to the method for manufacturing an optical element according to the fifth aspect, the horizontal support portion can be adjusted in the horizontal direction, so that the flat optical member placed on the base portion is horizontally aligned by the horizontal support portion. Is easily and reliably positioned. Moreover, when removing the completed laminated body, it can be easily removed without damaging the laminated body with a jig.
　また、第６の態様に係る治具によれば、ベース部に載置された平板状光学部材は、水平支持部によって水平方向に位置決めされる。そして、複数枚積層された平板状光学部材は、その下側平板面を下方の平板状光学部材によって支持され、且つ、その下側露出面を垂直支持部によって支持される。積層された平板状光学部材の最上層の上側平板面に、接着剤を介して別の平板状光学部材が積まれ、次に、別の平板状光学部材の上側平板面が加圧され、接着剤が均一な厚みで平板状光学部材間に広がる。この後、例えば紫外線照射によって、接着剤が硬化する。従って、簡単な構成の治具を用いるだけで、精度の高い光学素子を効率良く多数個取りすることができる。 Further, according to the jig according to the sixth aspect, the flat optical member placed on the base portion is positioned in the horizontal direction by the horizontal support portion. A plurality of laminated flat optical members have their lower flat surfaces supported by the lower flat optical members, and their lower exposed surfaces supported by the vertical support portions. Another flat optical member is stacked on the upper flat surface of the uppermost layer of the laminated flat optical member via an adhesive, and then the upper flat surface of the other flat optical member is pressurized and bonded. The agent spreads between the flat optical members with a uniform thickness. Thereafter, the adhesive is cured by, for example, ultraviolet irradiation. Therefore, a large number of highly accurate optical elements can be efficiently taken only by using a jig having a simple configuration.
は、本発明の実施形態に係る製造方法の前工程を示す図These are figures which show the pre-process of the manufacturing method which concerns on embodiment of this invention. は、本発明の実施形態に係る製造方法の後工程を示す図These are figures which show the post process of the manufacturing method which concerns on embodiment of this invention. は、本発明の実施形態に係る製造方法の積層体形成の前工程を示す図These are figures which show the pre-process of laminated body formation of the manufacturing method which concerns on embodiment of this invention. は、本発明の実施形態に係る製造方法の積層体形成の後工程を示す図These are figures which show the post process of laminated body formation of the manufacturing method which concerns on embodiment of this invention. は、本発明の実施形態に係る製造方法を適用する光学素子と、先行技術の製造方法を適用する光学素子を示す図These are the figures which show the optical element which applies the manufacturing method which concerns on embodiment of this invention, and the optical element which applies the manufacturing method of a prior art は、本発明の別の実施形態に係る製造方法の積層体形成の工程を示す図These are figures which show the process of the laminated body formation of the manufacturing method which concerns on another embodiment of this invention.
　以下に本発明の実施形態について図面を参照して説明するが、本発明は、この実施形態に限定されない。また発明の用途やここで示す用語等はこれに限定されるものではない。 Hereinafter, an embodiment of the present invention will be described with reference to the drawings, but the present invention is not limited to this embodiment. Further, the use of the invention and the terms shown here are not limited thereto.
　図１、図２は、本実施形態である製造方法を説明する工程図である。図１（ａ）～（ｄ）、図２（ａ）～（ｊ）の工程順に光学素子としてのビームスプリッタが製造される。ビームスプリッタは、偏光分離膜を介して２つの三角柱状のガラスプリズムを接合することにより立方体状に構成したものであり、偏光分離膜において所定の偏光成分を透過し、それ以外の偏光成分を反射する機能を有する。 FIG. 1 and FIG. 2 are process diagrams for explaining a manufacturing method according to the present embodiment. A beam splitter as an optical element is manufactured in the order of steps of FIGS. 1 (a) to (d) and FIGS. 2 (a) to (j). The beam splitter has a cubic shape formed by joining two triangular prismatic glass prisms through a polarization separation film, and transmits a predetermined polarization component in the polarization separation film and reflects other polarization components. It has the function to do.
　図１（ａ）に示すように、複数のガラス平板５０が用意される。ガラス平板５０は、均一な厚みの矩形状の板ガラス５１と、板ガラス５１の上面に形成される偏光分離膜１３と、板ガラス５１の下面に形成されるマッチング膜５３とを備える。マッチング膜５３は、複数のガラス平板５０を接着剤によって接着する際に、接着剤に起因してガラス平板を透過する光の屈折率が変動することを防止するものである。 As shown in FIG. 1A, a plurality of glass flat plates 50 are prepared. The glass flat plate 50 includes a rectangular plate glass 51 having a uniform thickness, a polarization separation film 13 formed on the upper surface of the plate glass 51, and a matching film 53 formed on the lower surface of the plate glass 51. The matching film 53 prevents the refractive index of light transmitted through the glass flat plate from fluctuating due to the adhesive when the plurality of glass flat plates 50 are bonded with the adhesive.
　図１（ｂ）は積層体６０の形成工程を示す図である。積層体６０は、治具９０を用いて複数のガラス平板５０を水平方向にずらした状態で積層されるものである。 FIG. 1 (b) is a diagram showing a process for forming the laminate 60. The laminated body 60 is laminated | stacked in the state which shifted the several glass flat plate 50 to the horizontal direction using the jig | tool 90. FIG.
　治具９０は、水平な板状のベース部９１と、ベース部９１上に配設される水平支持部９２と、ベース部９１上で水平方向及び垂直方向に可動する垂直支持部９３とを備える。 The jig 90 includes a horizontal plate-shaped base portion 91, a horizontal support portion 92 disposed on the base portion 91, and a vertical support portion 93 that is movable in the horizontal direction and the vertical direction on the base portion 91. .
　ガラス平板５０が偏光分離膜１３を上向きにしてベース部９１に載置され、ガラス平板５０の一端面が水平支持部９２に当接して配置される。このガラス平板５０の上面に、順次、ガラス平板５０が積層される。積むときに、垂直支持部９３はガラス平板５０の下面を支持するように配置され、その後、ガラス平板５０の上面に紫外線硬化型接着剤が塗布される。そして、次のガラス平板５０が接着剤を塗布したガラス平板５０の上面に載置され、次のガラス平板５０の上面から加圧して、ガラス平板５０間の接着剤を均一に広げながら、次のガラス平板５０をガラスの厚み相当の距離だけ水平方向にずらす。同様にして、治具９０を用いてガラス平板５０を順次水平方向にずらして積層していく。積層を終えると、図示しない紫外線光源から紫外線をガラス平板５０に照射して接着剤を硬化させる。これで、ガラス平板５０が貼り合わされた階段状の積層体６０が得られる。 The glass flat plate 50 is placed on the base portion 91 with the polarization separation film 13 facing upward, and one end surface of the glass flat plate 50 is disposed in contact with the horizontal support portion 92. The glass flat plate 50 is sequentially laminated on the upper surface of the glass flat plate 50. When stacking, the vertical support portion 93 is disposed so as to support the lower surface of the glass flat plate 50, and thereafter, an ultraviolet curable adhesive is applied to the upper surface of the glass flat plate 50. Then, the next glass flat plate 50 is placed on the upper surface of the glass flat plate 50 coated with an adhesive, and the next glass flat plate 50 is pressurized from the upper surface to spread the adhesive between the glass flat plates 50 uniformly. The glass plate 50 is shifted in the horizontal direction by a distance corresponding to the thickness of the glass. Similarly, the glass flat plate 50 is sequentially shifted in the horizontal direction using the jig 90 and stacked. When the lamination is finished, the glass plate 50 is irradiated with ultraviolet rays from an ultraviolet light source (not shown) to cure the adhesive. Thereby, the step-shaped laminated body 60 with which the glass flat plate 50 was bonded together is obtained.
　次に図１（ｃ）に示すように、積層体６０は、ガラス平板５０の平板面に対して４５度に傾斜した切断線Ｓ１に沿って所定ピッチで、ワイヤソーにより複数ブロックに切断される。これによって、図１（ｄ）に示す複数の積層分割体７０が得られる。積層分割体７０は断面平行四辺形で図１の紙面方向に延在し、板ガラス５１間に等間隔で複数の偏光分離膜１３が形成されることになる。 Next, as shown in FIG. 1C, the laminate 60 is cut into a plurality of blocks by a wire saw at a predetermined pitch along a cutting line S <b> 1 inclined at 45 degrees with respect to the flat plate surface of the glass flat plate 50. Thereby, a plurality of laminated division bodies 70 shown in FIG. The laminated divided body 70 has a parallelogram in cross section and extends in the paper surface direction of FIG. 1, and a plurality of polarization separation films 13 are formed at equal intervals between the plate glasses 51.
　次に図２(ａ) に示すように、積層分割体７０は上下両面（切断面）を鏡面加工され、鏡面加工後に上下両面に反射防止膜７１がコーティングされる。 Next, as shown in FIG. 2 (a), the laminated divided body 70 is mirror-finished on both upper and lower surfaces (cut surfaces), and the anti-reflection film 71 is coated on both upper and lower surfaces after mirror finishing.
　図２(b)に示すように、積層分割体７０は上下両面に紫外線硬化型接着剤を塗布されて、整合状態で積層される。積層分割体７０間に紫外線硬化型接着剤を塗布し、完全硬化に必要な紫外線量より少ない量を照射しておくことにより、各積層分割体７０は仮止めされる。 As shown in FIG. 2 (b), the laminated divided body 70 is laminated in an aligned state by applying an ultraviolet curable adhesive on the upper and lower surfaces. By applying an ultraviolet curable adhesive between the laminated divided bodies 70 and irradiating an amount smaller than the amount of ultraviolet light necessary for complete curing, each laminated divided body 70 is temporarily fixed.
　次に図２(ｃ)に示すように、上下方向に積層された積層分割体７０は、積層分割体７０の上下面と直交する切断線Ｓ２に沿って所定ピッチで、ワイヤソーにより切断される。この切断によって、仮止め積層体８０が得られる。 Next, as shown in FIG. 2 (c), the laminated division bodies 70 laminated in the vertical direction are cut by a wire saw at a predetermined pitch along a cutting line S2 orthogonal to the upper and lower surfaces of the laminated division body 70. By this cutting, a temporary fixing laminated body 80 is obtained.
　図２（ｄ）に示すように、仮止め積層体８０は紫外線硬化型接着剤を介して上下方向に連結されて紙面方向に延在する構成となっている。 As shown in FIG. 2 (d), the temporary fixing laminate 80 is configured to be connected in the vertical direction via an ultraviolet curable adhesive and extend in the paper surface direction.
　次に図２（ｅ）の側面図に示すように、仮止め積層体８０は切断線Ｓ３に沿って所定ピッチで、ワイヤソーにより切断される。この切断線Ｓ３は図２(ｃ)の切断線Ｓ２と直交している。 Next, as shown in the side view of FIG. 2 (e), the temporary fixing laminate 80 is cut by a wire saw at a predetermined pitch along the cutting line S3. This cutting line S3 is orthogonal to the cutting line S2 in FIG.
　仮止め積層体８０は紫外線硬化型接着剤によって接続された状態にあり、仮止め積層体８０を有機溶剤に浸すことによって、充分に硬化していない紫外線硬化型接着剤が溶解され、図２（ｆ）に示すように、複数のビームスプリッタ１０に分離される。分離されたビームスプリッタ１０は、図示しない両面ラップ盤で上下面を鏡面加工され完成品となる。 The temporary fixing laminate 80 is in a state of being connected by an ultraviolet curable adhesive, and by immersing the temporary fixing laminate 80 in an organic solvent, the ultraviolet curable adhesive that is not sufficiently cured is dissolved, and FIG. As shown in f), it is separated into a plurality of beam splitters 10. The separated beam splitter 10 is mirror-finished on the upper and lower surfaces by a double-sided lapping machine (not shown) to be a finished product.
　次に、図３、図４を用いて積層体６０の形成工程（図１（ｂ）参照）を詳しく説明する。図３は積層体形成の前工程を示す図であり、図４は積層体形成の後工程を示す図である。図３（ａ）、図４（ａ）は平面図で、図３（ｂ）、図４（ｂ）は側面図である。尚、ガラス平板５０は積層していく順に、ガラス平板５０Ａ、５０Ｂ、５０Ｃ、５０Ｄ、５０Ｅ、及び５０Ｍ、５０Ｎと呼称する。 Next, the step of forming the laminate 60 (see FIG. 1B) will be described in detail with reference to FIGS. FIG. 3 is a diagram showing a pre-process for forming a laminate, and FIG. 4 is a diagram showing a post-process for forming the laminate. 3 (a) and 4 (a) are plan views, and FIG. 3 (b) and FIG. 4 (b) are side views. The glass flat plates 50 are referred to as glass flat plates 50A, 50B, 50C, 50D, 50E, and 50M, 50N in the order of lamination.
　治具９０は、前述のように水平な板状のベース部９１と、ベース部９１上に固着される水平支持部９２と、ベース部９１上で水平方向及び垂直方向に可動する垂直支持部９３とを備える。 As described above, the jig 90 includes a horizontal plate-shaped base portion 91, a horizontal support portion 92 fixed on the base portion 91, and a vertical support portion 93 that is movable in the horizontal direction and the vertical direction on the base portion 91. With.
　水平支持部９２は直方体形状をなし、その長手方向にガラス平板５０の幅より長く形成されている（図３（ａ）参照）。水平支持部９２の当接面９２ａはガラス平板５０の一端面に当接しガラス平板５０を水平方向に位置決めすることが可能である。 The horizontal support portion 92 has a rectangular parallelepiped shape, and is longer than the width of the glass flat plate 50 in the longitudinal direction (see FIG. 3A). The abutment surface 92a of the horizontal support portion 92 abuts on one end surface of the glass flat plate 50 and can position the glass flat plate 50 in the horizontal direction.
　垂直支持部９３は直方体形状をなし長手方向にガラス平板５０の幅より長く形成されている（図３（ａ）参照）。そして垂直支持部９３の支持面９３ａはガラス平板５０の下側平板面に当接しガラス平板５０を支持することが可能である。また、垂直支持部９３はガラス基板５０に対して水平支持部９２の反対側で図３（ａ）の左右方向に移動可能に配置される。更に、垂直支持部９３は水平方向の各移動位置において垂直方向（図３（ａ）の上下方向）に移動可能である。積層したガラス平板５０の高さ及び水平方向の位置に応じて、垂直支持部９３は垂直及び水平方向に移動するように操作される。垂直支持部９３には、図示しない水平方向のラックと垂直方向のラックが設けられ、ベース部９１には、図示しない各ラックと噛み合うピニオンが設けられている。各ピニオンを駆動させることによって、垂直支持部９３は水平方向または垂直方向に移動する。 The vertical support portion 93 has a rectangular parallelepiped shape and is longer than the width of the glass flat plate 50 in the longitudinal direction (see FIG. 3A). The support surface 93 a of the vertical support portion 93 can contact the lower flat plate surface of the glass flat plate 50 to support the glass flat plate 50. Moreover, the vertical support part 93 is arrange | positioned with respect to the glass substrate 50 on the opposite side of the horizontal support part 92 so that a movement in the left-right direction of Fig.3 (a) is possible. Further, the vertical support portion 93 is movable in the vertical direction (vertical direction in FIG. 3A) at each horizontal movement position. Depending on the height and horizontal position of the laminated glass flat plates 50, the vertical support portion 93 is operated so as to move in the vertical and horizontal directions. The vertical support portion 93 is provided with a horizontal rack and a vertical rack (not shown), and the base portion 91 is provided with a pinion that meshes with each rack (not shown). By driving each pinion, the vertical support portion 93 moves in the horizontal direction or the vertical direction.
　図３に示すように、ガラス平板５０Ａが治具９０のベース部９１上に載置される。このとき、ガラス平板５０Ａの一端面５０Ａｃは水平支持部９２の当接面９２ａに当接し、ガラス平板５０Ａは位置決めされる。 As shown in FIG. 3, the glass flat plate 50 </ b> A is placed on the base portion 91 of the jig 90. At this time, the one end surface 50Ac of the glass flat plate 50A comes into contact with the contact surface 92a of the horizontal support portion 92, and the glass flat plate 50A is positioned.
　ガラス平板５０Ａの上側平板面５０Ａｂに紫外線硬化型接着剤が塗布される。そして、ガラス平板５０Ｂが接着剤を塗布したガラス平板５０Ａの上側平板面５０Ａｂに載置される。その後、ガラス平板５０Ｂの上側平板面５０Ｂｂから加圧して、ガラス平板５０Ａ、５０Ｂ間の接着剤を均一に広げながら、ガラス平板５０Ｂをガラスの厚み相当の距離だけ水平方向（図３（ａ）の左方向）にずらす。尚、ガラス平板５０Ｂの下側平板面５０Ｂａに紫外線硬化型接着剤を塗布して、接着剤を塗布したガラス平板５０Ｂをガラス平板５０Ａの上側平板面５０Ａｂに載置するようにしてもよい。 An ultraviolet curable adhesive is applied to the upper flat surface 50Ab of the glass flat plate 50A. Then, the glass flat plate 50B is placed on the upper flat plate surface 50Ab of the glass flat plate 50A coated with an adhesive. Thereafter, the glass flat plate 50B is pressed from the upper flat surface 50Bb of the glass flat plate 50B to spread the adhesive between the glass flat plates 50A and 50B uniformly, and the horizontal direction of the glass flat plate 50B by a distance corresponding to the thickness of the glass (FIG. 3A). Shift left). Alternatively, an ultraviolet curable adhesive may be applied to the lower flat surface 50Ba of the glass flat plate 50B, and the glass flat plate 50B coated with the adhesive may be placed on the upper flat surface 50Ab of the glass flat plate 50A.
　上記同様にして、ガラス平板５０Ｃ、５０Ｄが積層される。ガラス平板５０Ａ～５０Ｄの積層では、ガラス平板５０の上側平板面５０ｂから加圧しても、接着剤がガラス平板５０間で均一に広がるので、垂直支持部９３を用いるまでもない。 The glass flat plates 50C and 50D are laminated in the same manner as described above. In the lamination of the glass flat plates 50A to 50D, even if pressure is applied from the upper flat plate surface 50b of the glass flat plate 50, the adhesive spreads uniformly between the glass flat plates 50.
　ここまで、ガラス平板５０Ａ～５０Ｄを順次水平方向ずらして階段状に積層してきたが、積層する毎に、積層したガラス平板５０による重心位置が図３（ａ）の左側に徐々に移動していく。そして、次のガラス平板５０Ｅを積層すると、ガラス平板５０Ｅは不安定な状態になる。この状態でガラス平板５０Ｄに接着剤塗布後、平板５０Ｅの上側平板面５０Ｅｂから加圧すると、ガラス平板５０Ｅの一端側（図３（ａ）の右側）では十分に加圧することができるが、ガラス平板５０Ｅの他端側（図３（ａ）の左側）では、ガラス平板５０Ｄに支持されていないので、加圧するのが難しくなる。従って、この状態で加圧すると、ガラス平板５０Ｅの両端側で加圧が不均一となり、ガラス平板５０Ｄ、５０Ｅ間の接着剤層厚は、ガラス平板５０Ｅの他端側では比較的に厚く、ガラス平板５０Ｅの一端側では比較的に薄いクサビ状となる。 Up to this point, the glass flat plates 50A to 50D have been stacked in a staircase pattern sequentially shifted in the horizontal direction. However, each time the glass flat plates 50A to 50D are stacked, the position of the center of gravity by the stacked glass flat plates 50 gradually moves to the left side of FIG. . And if the next glass flat plate 50E is laminated | stacked, the glass flat plate 50E will be in an unstable state. When an adhesive is applied to the glass flat plate 50D in this state and then pressurized from the upper flat plate surface 50Eb of the flat plate 50E, the glass flat plate 50E can be sufficiently pressurized at one end side (the right side in FIG. 3A). On the other end side of the flat plate 50E (the left side in FIG. 3A), it is difficult to pressurize because it is not supported by the glass flat plate 50D. Therefore, when pressure is applied in this state, the pressure is not uniform at both ends of the glass flat plate 50E, and the adhesive layer thickness between the glass flat plates 50D and 50E is relatively thick at the other end of the glass flat plate 50E. The one end of the flat plate 50E has a relatively thin wedge shape.
　そこで、ガラス平板５０Ｅより高く積層するときには、垂直支持部９３を用いる。尚、ガラス平板のサイズや、積層するときのずらし量によっては、ガラス平板の積層数がもっと少なくとも、不安定状態になることがあるが、この場合には、積層数の少ないときから垂直支持部９３を用いる。 Therefore, when stacking higher than the glass flat plate 50E, the vertical support portion 93 is used. Depending on the size of the glass plate and the amount of shift when laminating, the number of laminated glass plates may become at least unstable, but in this case, the vertical support portion starts when the number of laminated layers is small. 93 is used.
　垂直支持部９３をガラス平板５０Ｄの近傍へ移動させる。そして、垂直支持部９３の立ち面９３ｂと、ガラス平板５０Ｄの下方に配置されたガラス平板５０Ｃの他端面５０Ｃｄとが当接する位置に、垂直支持部９３を水平移動する。次に、垂直支持部９３の高さ調整を行い、垂直支持部９３の支持面９３ａをガラス平板５０Ｄの下側平板面５０Ｄａの下側露出面に当接させる。尚、下側平板面５０Ｄａの下側露出面は、ガラス平板５０Ｃの上側平板面５０Ｃｂに当接していない面のことである。これによって、ガラス平板５０Ｄは、ガラス平板５０Ｃの上側平板面５０Ｃｂと垂直支持部９３の支持面９３ａに支持され、安定した状態となる。 The vertical support part 93 is moved to the vicinity of the glass flat plate 50D. And the vertical support part 93 is horizontally moved to the position where the standing surface 93b of the vertical support part 93 and the other end face 50Cd of the glass flat plate 50C arranged below the glass flat plate 50D abut. Next, the height of the vertical support portion 93 is adjusted, and the support surface 93a of the vertical support portion 93 is brought into contact with the lower exposed surface of the lower flat plate surface 50Da of the glass flat plate 50D. The lower exposed surface of the lower flat plate surface 50Da is a surface that is not in contact with the upper flat plate surface 50Cb of the glass flat plate 50C. Accordingly, the glass flat plate 50D is supported by the upper flat plate surface 50Cb of the glass flat plate 50C and the support surface 93a of the vertical support portion 93, and is in a stable state.
　次に、ガラス平板５０Ｄの上側平板面５０Ｄｂに紫外線硬化型接着剤が塗布される。そして、ガラス平板５０Ｅがガラス平板５０Ｄの上側平板面５０Ｄｂに積まれ、その後、ガラス平板５０Ｅの上側平板面５０Ｅｂから加圧して、ガラス平板５０Ｄ、５０Ｅ間の接着剤を均一に広げながら、ガラス平板５０Ｅをガラスの厚み相当の距離だけ水平方向にずらす。ガラス平板５０Ｅがガラス平板５０Ｄに対して所定位置に配置されると、ガラス平板５０Ｅの位置がずれないように、図示しない紫外線光源から、紫外線硬化型接着剤の完全硬化に必要な紫外線量よりも少ない紫外線を照射し、接着剤を仮硬化させる。 Next, an ultraviolet curable adhesive is applied to the upper flat surface 50Db of the glass flat plate 50D. Then, the glass flat plate 50E is stacked on the upper flat plate surface 50Db of the glass flat plate 50D, and then pressed from the upper flat plate surface 50Eb of the glass flat plate 50E to uniformly spread the adhesive between the glass flat plates 50D and 50E. 50E is shifted in the horizontal direction by a distance corresponding to the thickness of the glass. When the glass flat plate 50E is disposed at a predetermined position with respect to the glass flat plate 50D, an ultraviolet light source (not shown) from an ultraviolet light source necessary for complete curing of the ultraviolet curable adhesive is used so that the position of the glass flat plate 50E does not shift. Irradiate a small amount of ultraviolet light to temporarily cure the adhesive.
　同様にして、ガラス平板５０を順次積層するために、図４に示すように、垂直支持部９３を水平方向と垂直方向に移動させ、垂直支持部９３の支持面９３ａによってガラス平板５０Ｍの下側平板面５０Ｍａの下側露出面を支持する。そして、ガラス平板５０Ｎをガラス平板５０Ｍの上側平板面５０Ｍｂに積み、その後、ガラス平板５０Ｎの上側平板面５０Ｎｂから加圧して、塗布した接着剤をガラス平板５０Ｍ、５０Ｎ間で均一に広げながら、ガラス平板５０Ｎをガラスの厚み相当の距離だけ水平方向にずらし、この所定の位置において紫外線を照射して、ガラス平板５０Ｍ、５０Ｎ間の接着剤を仮硬化させる。 Similarly, in order to sequentially laminate the glass flat plates 50, as shown in FIG. 4, the vertical support portion 93 is moved in the horizontal direction and the vertical direction, and the lower surface of the glass flat plate 50M is supported by the support surface 93a of the vertical support portion 93. The lower exposed surface of the flat plate surface 50Ma is supported. Then, the glass flat plate 50N is stacked on the upper flat plate surface 50Mb of the glass flat plate 50M, and then pressed from the upper flat plate surface 50Nb of the glass flat plate 50N to spread the applied adhesive uniformly between the glass flat plates 50M and 50N. The flat plate 50N is shifted in the horizontal direction by a distance corresponding to the thickness of the glass, and ultraviolet rays are irradiated at this predetermined position to temporarily cure the adhesive between the glass flat plates 50M and 50N.
　所定枚数のガラス平板５０を積層すると、紫外線をガラス平板５０に充分に照射して接着剤を完全硬化させる。これで、ガラス平板５０が貼り合わされた階段状の積層体６０が得られる。治具９０から積層体６０を取り外し、積層体６０は次の工程で加工される。尚、水平支持部９２がベース部９１に対して水平方向に移動可能であるように構成してもよい。この構成では、水平支持部９２を図４（ａ）の右方向に移動させてから、完成した積層体６０を取り外すと、積層体６０を治具で傷つけることなく簡単に取り外すことができる。 When a predetermined number of glass plates 50 are laminated, the glass plate 50 is sufficiently irradiated with ultraviolet rays to completely cure the adhesive. Thereby, the step-shaped laminated body 60 with which the glass flat plate 50 was bonded together is obtained. The laminated body 60 is removed from the jig 90, and the laminated body 60 is processed in the following process. Note that the horizontal support portion 92 may be configured to be movable in the horizontal direction with respect to the base portion 91. In this configuration, when the completed laminated body 60 is removed after the horizontal support portion 92 is moved to the right in FIG. 4A, the laminated body 60 can be easily removed without damaging it with a jig.
　この積層体６０の形成工程から最終工程を経て完成したビームスプリッタ１０を図５に示す。図５（ａ）は正規寸法に仕上がったビームスプリッタ１０であり、水平方向から入射した光ビームは、偏光分離膜１３で反射し垂直方向に射出している。図５（ｂ）は、正規位置（図５の一点鎖線位置）から偏光分離膜１３（ガラス平板５０間の接合面）が位置ズレ（接合面位置ズレ）したビームスプリッタ１０であり、水平方向から入射した光ビームは、偏光分離膜１３で反射し垂直方向に射出しているが、光ビームが水平方向に位置ズレして射出している。図５（ｃ）は、偏光分離膜１３（ガラス平板５０間の接合面）の角度ズレ（接合面角度ズレ）が発生したビームスプリッタ１０であり、水平方向から入射した光ビームは、偏光分離膜１３で反射し垂直方向から偏角して射出している。 FIG. 5 shows the beam splitter 10 completed through the final process from the formation process of the laminate 60. FIG. 5A shows a beam splitter 10 finished to a normal size. A light beam incident from the horizontal direction is reflected by the polarization separation film 13 and emitted in the vertical direction. FIG. 5B shows the beam splitter 10 in which the polarization separation film 13 (the bonding surface between the glass flat plates 50) is shifted from the normal position (the one-dot chain line position in FIG. 5). The incident light beam is reflected by the polarization separation film 13 and emitted in the vertical direction, but the light beam is emitted with a positional deviation in the horizontal direction. FIG. 5C shows a beam splitter 10 in which an angle deviation (junction surface angle deviation) of the polarization separation film 13 (joint surface between the glass flat plates 50) is generated, and the light beam incident from the horizontal direction is the polarization separation film. 13 is reflected and emitted from the vertical direction with a declination.
　本実施形態の治具９０を用いて製造したビームスプリッタ１０と、特許文献１による治具（特許文献の図１（ｂ）参照）用いて製造したビームスプリッタとの精度を測定評価した。平板ガラス５０は、板厚が３ｍｍで、６５ｍｍ角の正方形状であり、積層体６０はこの平板ガラス５０を１８枚積層したものである。 The accuracy of the beam splitter 10 manufactured using the jig 90 of this embodiment and the beam splitter manufactured using the jig according to Patent Document 1 (see FIG. 1B of Patent Document) was measured and evaluated. The flat glass 50 has a plate thickness of 3 mm and a square shape of 65 mm square, and the laminated body 60 is obtained by laminating 18 pieces of the flat glass 50.
　特許文献１の治具を用いて平板ガラス５０を積層した場合には、平板ガラス５０間の接着剤層は一端面５０ｃから他端面５０ｄにおいてクサビ状の状態で接合されていた。１８枚の平板ガラス５０を積層することにより、このクサビ状の接着剤層厚の誤差が累積され、最大で、接合面位置ズレが０．０４ｍｍ発生し、接合面角度ズレが１０分発生した。 When the flat glass 50 was laminated | stacked using the jig | tool of patent document 1, the adhesive bond layer between the flat glass 50 was joined in the wedge-shaped state from the one end surface 50c to the other end surface 50d. By laminating the 18 flat glass plates 50, the wedge-shaped adhesive layer thickness error was accumulated, with a maximum joining surface position deviation of 0.04 mm and a joining surface angle deviation of 10 minutes.
　ビームスプリッタ１０は光ディスクドライブのピックアップ用プリズムに用いられるが、ブルーレイ光ディスクドライブのピックアップ用プリズムの許容公差は、一般的に接合面位置ズレが０．０３ｍｍ～０．０５ｍｍ以下であり、接合面角度ズレが３分以下である。特許文献１の治具を用いて平板ガラスを積層した場合には、ビームスプリッタは上記の位置ズレを有し、ブルーレイ光ディスクドライブのピックアップ用プリズムに適用することは困難である。 The beam splitter 10 is used for a pickup prism of an optical disk drive. The tolerance of the pickup prism of a Blu-ray optical disk drive generally has a joint surface position deviation of 0.03 mm to 0.05 mm and a joint surface angle deviation. Is less than 3 minutes. When flat glass is laminated using the jig of Patent Document 1, the beam splitter has the above-mentioned positional deviation, and it is difficult to apply it to a pickup prism of a Blu-ray optical disc drive.
　一方、本実施形態の治具を用いて平板ガラス５０を積層した場合には、１８枚の平板ガラス５０を積層することにより、最大で、接合面位置ズレが０．００４ｍｍ発生し、接合面角度ズレが１０秒発生した。この位置ズレを有するビームスプリッタではブルーレイ光ディスクドライブのピックアップ用プリズムに適用することは可能である。 On the other hand, when the flat glass 50 is laminated using the jig according to the present embodiment, by laminating the 18 flat glass 50, the maximum misalignment of the joining surface occurs by 0.004 mm, and the joining surface angle is increased. Deviation occurred for 10 seconds. The beam splitter having this positional deviation can be applied to a pickup prism of a Blu-ray optical disc drive.
　尚、上記実施形態では、光学素子として、立方体状のビームスプリッタ１０に適用した例を示したが、本発明はこれに限らず、直方体状のビームスプリッタに適用してもよい。 In addition, although the example applied to the cube-shaped beam splitter 10 was shown as an optical element in the said embodiment, this invention is not limited to this, You may apply to a rectangular parallelepiped beam splitter.
　また、上記施形態では、１つの偏光分離膜を介在した２つのプリズムからなるビームスプリッタに適用した例を示したが、本発明にこれに限らず、２つ以上の偏光分離膜が介在する複数のプリズムからなるビームスプリッタに適用してもよい。この場合には、２つ以上の偏光分離膜が含まれるように、積層分割体７０を切断するピッチを上記実施形態より大きくして設定することになる。 In the above embodiment, an example is shown in which the present invention is applied to a beam splitter composed of two prisms with one polarization separation film interposed therebetween. However, the present invention is not limited to this, and a plurality of two or more polarization separation films are interposed. You may apply to the beam splitter which consists of this prism. In this case, the pitch at which the laminated divided body 70 is cut is set larger than that in the above embodiment so that two or more polarization separation films are included.
　また、上記施形態では、治具９０の垂直支持部９３は、ラックとピニオンによって水平及び垂直方向に駆動させられる構成を示したが、本発明はこれに限らず、垂直支持部９３として、高さの異なる複数のブロックを用意し、複数のブロックの中から積層したガラス平板５０の高さに合うブロックを選び、そのブロックによってガラス平板５０を支持するように構成してもよい。 In the above embodiment, the vertical support portion 93 of the jig 90 is configured to be driven in the horizontal and vertical directions by the rack and pinion. However, the present invention is not limited to this, and the vertical support portion 93 is a A plurality of blocks having different sizes may be prepared, a block that matches the height of the laminated glass flat plate 50 may be selected from the plurality of blocks, and the glass flat plate 50 may be supported by the block.
　また、上記実施形態では、接着剤としては、紫外線硬化型接着剤以外に、可視光硬化型接着剤や熱硬化型接着剤などを使用することも可能である。 Further, in the above embodiment, as the adhesive, in addition to the ultraviolet curable adhesive, a visible light curable adhesive, a thermosetting adhesive, or the like can be used.
　上記実施形態によれば、複数のプリズムの各傾斜面を接合したビームスプリッタ１０の製造方法は、接着剤を介して複数枚の矩形のガラス平板（平板状光学部材）５０を積層するとともに、各ガラス平板５０の端面５０ｃ（または５０ｄ）縁（端面縁）を結ぶ平面とガラス平板５０の平板面５０ａ（または５０ｂ）とが傾斜するようにガラス平板５０を水平方向に順次ずらして階段状に積層する積層体６０を形成する積層体形成工程を有する。積層体形成工程において、複数枚積層されたガラス平板５０Ｄの下側平板面５０Ｄａの下側露出面を治具９０によって支持し、ガラス平板５０Ｄの上側平板面５０Ｄｂに、接着剤を介してガラス平板５０Ｅを積み、ガラス平板５０Ｅの上側平板面５０Ｅｂを加圧した後、接着剤によって互いのガラス平板５０Ｄ、５０Ｅを接合する。 According to the above-described embodiment, the method of manufacturing the beam splitter 10 in which the inclined surfaces of the plurality of prisms are joined includes laminating a plurality of rectangular glass flat plates (flat optical members) 50 via an adhesive, The glass flat plate 50 is sequentially shifted in the horizontal direction so that the plane connecting the edge 50c (or 50d) edge (end surface edge) of the glass flat plate 50 and the flat plate surface 50a (or 50b) of the glass flat plate 50 are inclined, and stacked in a staircase pattern. A laminated body forming step of forming the laminated body 60 to be performed. In the laminated body forming step, the lower exposed surface 50Da of the glass flat plate 50D that is laminated is supported by the jig 90, and the glass flat plate 50Db is bonded to the upper flat surface 50Db of the glass flat plate 50D via an adhesive. After stacking 50E and pressurizing the upper flat surface 50Eb of the glass flat plate 50E, the glass flat plates 50D and 50E are joined to each other by an adhesive.
　この方法によると、複数枚積層されたガラス平板５０Ｄは、その下側平板面５０Ｄａを下方のガラス平板５０Ｃによって支持され、且つ、その下側露出面を治具９０によって支持される。このガラス平板５０Ｄの上側平板面５０Ｄｂに、接着剤を介してガラス平板５０Ｅが積まれ、次に、ガラス平板５０Ｅの上側平板面５０Ｅｂが加圧され、接着剤が均一な厚みでガラス平板５０Ｄ、５０Ｅ間に広がる。この後、例えば紫外線照射によって、接着剤が硬化する。従って、このような製造方法によって、精度の高いビームスプリッタ１０を効率良く多数個取りすることができる。 According to this method, a plurality of laminated glass flat plates 50D are supported on the lower flat plate surface 50Da by the lower glass flat plate 50C and supported on the lower exposed surface by the jig 90. The glass flat plate 50E is stacked on the upper flat plate surface 50Db of the glass flat plate 50D through an adhesive, and then the upper flat plate surface 50Eb of the glass flat plate 50E is pressurized, so that the adhesive has a uniform thickness and the glass flat plate 50D. Spread between 50E. Thereafter, the adhesive is cured by, for example, ultraviolet irradiation. Therefore, a large number of highly accurate beam splitters 10 can be efficiently obtained by such a manufacturing method.
　また、上記実施形態によれば、治具９０は、ガラス平板５０が載置されるベース部９１と、載置されたガラス平板５０を水平方向に支持する水平支持部９２と、積層したガラス平板５０の下側平板面５０ａを支持する垂直支持部９３とを有する。これによって、ベース部９１に載置されたガラス平板５０は、水平支持部９２によって水平方向に確実に位置決めされる。そして、積層したガラス平板５０は、その下側平板面５０ａを下方のガラス平板５０と垂直支持部９３とによって安定して支持され、ガラス平板５０の上側平板面５０ｂが加圧されると、接着剤を均一な厚みでガラス平板５０間に広げることができる。 Moreover, according to the said embodiment, the jig | tool 90 is the base part 91 in which the glass flat plate 50 is mounted, the horizontal support part 92 which supports the mounted glass flat plate 50 in a horizontal direction, and the laminated glass flat plate. 50 and a vertical support portion 93 that supports the lower flat plate surface 50a. Accordingly, the glass flat plate 50 placed on the base portion 91 is reliably positioned in the horizontal direction by the horizontal support portion 92. The laminated glass flat plate 50 is stably supported at the lower flat plate surface 50a by the lower glass flat plate 50 and the vertical support portion 93, and is bonded when the upper flat plate surface 50b of the glass flat plate 50 is pressurized. The agent can be spread between the glass flat plates 50 with a uniform thickness.
　また、上記実施形態によれば、垂直支持部９３は、積層したガラス平板５０の位置に応じて、垂直方向に位置調整可能であるとともに、水平方向に位置調整可能である。これによって、積層したガラス平板５０の下側平板面５０ａの高さ及び水平方向位置に応じて垂直支持部９３の高さ及び水平方向位置を調整して、垂直支持部９３をガラス平板５０の下側平板面５０ａに配置すると、ガラス平板５０は、その下側平板面５０ａを下方のガラス平板５０と垂直支持部９３とによって支持される。従って、ガラス平板５０の上側平板面５０ｂを加圧するときに、垂直支持部９３をガラス平板５０の下側平板面５０ａに配置するという簡単な作業によって、ガラス平板５０間の接着剤が均一な厚みとなり、精度の高い光学素子を効率良く多数個取りすることができる。 Moreover, according to the said embodiment, the vertical support part 93 can be position-adjusted to a perpendicular direction according to the position of the laminated | stacked glass flat plate 50, and can be position-adjusted to a horizontal direction. As a result, the height and horizontal position of the vertical support portion 93 are adjusted according to the height and horizontal position of the lower flat surface 50a of the laminated glass flat plates 50, and the vertical support portion 93 is placed under the glass flat plate 50. When arranged on the side flat plate surface 50 a, the glass flat plate 50 is supported on the lower flat plate surface 50 a by the lower glass flat plate 50 and the vertical support portion 93. Therefore, when pressing the upper flat surface 50b of the glass flat plate 50, the adhesive between the glass flat plates 50 has a uniform thickness by a simple operation of arranging the vertical support portion 93 on the lower flat surface 50a of the glass flat plate 50. Thus, a large number of highly accurate optical elements can be efficiently taken.
　また、上記実施形態によれば、水平支持部９２は水平方向に位置調整可能であるので、ベース部９１に載置されたガラス平板５０は、水平支持部９２によって水平方向に簡単に且つ確実に位置決めされる。また、完成した積層体６０を取り外すときに、積層体６０を治具９０で傷つけることなく簡単に取り外すことができる。 In addition, according to the above embodiment, the horizontal support portion 92 can be adjusted in the horizontal direction, so that the glass flat plate 50 placed on the base portion 91 can be easily and reliably secured in the horizontal direction by the horizontal support portion 92. Positioned. Moreover, when removing the completed laminated body 60, the laminated body 60 can be easily removed without being damaged by the jig 90.
　上記実施形態では、ガラス基板を積層する毎に、治具９０の垂直支持部９３を再配置して、最上層のガラス平板を垂直支持部９３で支持する方法を示したが、別実施形態として、図６に示すように、複数枚積層されたガラス平板の途中に位置するガラス平板の下側露出面を垂直支持部９３で支持するようにしてもよい。 In the above embodiment, each time the glass substrates are laminated, the vertical support portion 93 of the jig 90 is rearranged and the uppermost glass flat plate is supported by the vertical support portion 93. However, as another embodiment, As shown in FIG. 6, the lower exposed surface of the glass plate located in the middle of the laminated glass plates may be supported by a vertical support portion 93.
　この場合、垂直支持部９３の支持面９３ａは、ガラス平板５０Ｇの下側平板面５０Ｇａの下側露出面を支持する。この垂直支持部９３で支持する位置では、ガラス平板５０Ｎを積層しガラス平板５０Ｎを加圧しても、積層体６０が倒れない。つまり、積層したガラス平板５０Ｎの中央部Ｐが水平方向において垂直支持部９３の支持面９３ａよりも下層のガラス基板側（支持面９３ａの右側）にあると、ガラス平板５０Ｎを加圧しても、積層体６０は治具９０に支持されて倒れることがない。 In this case, the support surface 93a of the vertical support portion 93 supports the lower exposed surface of the lower flat surface 50Ga of the glass flat plate 50G. Even if the glass flat plate 50N is laminated and the glass flat plate 50N is pressurized at the position supported by the vertical support portion 93, the laminated body 60 does not fall down. That is, if the central portion P of the laminated glass flat plate 50N is on the glass substrate side (right side of the support surface 93a) below the support surface 93a of the vertical support portion 93 in the horizontal direction, The laminated body 60 is supported by the jig 90 and does not fall down.
　そこで、ガラス平板５０Ｎをガラス平板５０Ｍの上側平板面５０Ｍｂに接着剤を介して積み、その後、ガラス平板５０Ｎの上側平板面５０Ｎｂから加圧して、塗布した接着剤をガラス平板５０Ｍ、５０Ｎ間で均一に広げながら、ガラス平板５０Ｎをガラスの厚み相当の距離だけ水平方向にずらす。この所定の位置において、紫外線を照射してガラス平板５０Ｍ、５０Ｎ間の接着剤を仮硬化させる。更に、次のガラス平板を積層し、接着剤を仮硬化させる。 Therefore, the glass flat plate 50N is stacked on the upper flat plate surface 50Mb of the glass flat plate 50M via an adhesive, and then pressed from the upper flat plate surface 50Nb of the glass flat plate 50N so that the applied adhesive is uniform between the glass flat plates 50M and 50N. The glass flat plate 50N is shifted in the horizontal direction by a distance corresponding to the glass thickness. At this predetermined position, the adhesive between the glass flat plates 50M and 50N is temporarily cured by irradiating with ultraviolet rays. Furthermore, the following glass flat plate is laminated and the adhesive is temporarily cured.
　そして、次々と積層したガラス平板の水平方向の中央部Ｐが垂直支持部９３の支持面９３ａに至るまで、垂直支持部９３をその位置に保持し、貼り合せる。積層するガラス平板の中央部Ｐが支持面９３ａから図６の左側に越えると、垂直支持部９３を図６の左側に配置して、上記同様に、複数枚のガラス平板を貼り合わせる。従って、治具を頻繁に移動させることなく、複数枚の平板状光学部材を貼り合わせることができ、作業効率が良い。 And the vertical support part 93 is hold | maintained and bonded to the position until the horizontal center part P of the laminated glass flat plate reaches the support surface 93a of the vertical support part 93 one after another. When the central portion P of the laminated glass flat plate exceeds the left side of FIG. 6 from the support surface 93a, the vertical support portion 93 is disposed on the left side of FIG. 6 and a plurality of glass flat plates are bonded together as described above. Therefore, a plurality of flat optical members can be bonded together without frequently moving the jig, and the working efficiency is good.
　本発明は、ビームスプリッタ等の光学素子の製造方法及びその製造方法に用いる治具に利用することができる。 The present invention can be used for a manufacturing method of an optical element such as a beam splitter and a jig used in the manufacturing method.
　　　１０　　ビームスプリッタ
　　　５０　　ガラス平板（平板状光学部材）
　　　５０ａ　　下側平板面（平板面）
　　　５０ｂ　　上側平板面（平板面）
　　　５０ｃ　　一端面（端面）
　　　５０ｄ　　他端面（端面）
　　　５１　　板ガラス
　　　５３　　マッチング膜
　　　６０　　積層体
　　　７０　　積層分割体
　　　７１　　反射防止膜
　　　８０　　仮止め積層体
　　　９０　　治具
　　　９１　　ベース部
　　　９２　　水平支持部
　　　９２ａ　　当接面
　　　９３　　垂直支持部
　　　９３ａ　　支持面
　　　９３ｂ　　立ち面 10 Beam splitter 50 Glass flat plate (flat optical member)
50a Lower flat surface (flat surface)
50b Upper flat surface (flat surface)
50c One end face (end face)
50d The other end face (end face)
51 Plate glass 53 Matching film 60 Laminated body 70 Laminated division body 71 Antireflection film 80 Temporary fixing laminated body 90 Jig 91 Base part 92 Horizontal support part 92a Contact surface 93 Vertical support part 93a Support surface 93b Standing surface

Claims (6)

  1. 　複数のプリズムの各傾斜面を接合した光学素子の製造方法であって、
    　接着剤を介して複数枚の矩形の平板状光学部材を積層するとともに、各平板状光学部材の端面縁を結ぶ平面と平板状光学部材の平板面とが傾斜するように平板状光学部材を水平方向に順次ずらして階段状に積層して、積層体を形成する積層体形成工程と、
    　前記積層体を、前記平板状光学部材の端面縁を結ぶ平面に沿う方向に傾斜する所定の角度および所定のピッチで切断し、積層体分割体を形成する積層体分割体形成工程と、
    　前記積層体分割体を、前記平面状光学部材の接合面を間に含むように、前記積層体分割体形成工程における切断面に垂直な方向に、所定の切断間隔で切断する積層体分割体切断工程と、を有し、
    　前記積層体形成工程において、複数枚積層された平板状光学部材の下側露出面を治具によって支持し、前記積層された平板状光学部材の最上層の上側平板面に、接着剤を介して別の平板状光学部材を積み、前記別の平板状光学部材の上側平板面を加圧した後、接着剤によって互いの平板状光学部材を接合することを特徴とする光学素子の製造方法。     A method of manufacturing an optical element in which inclined surfaces of a plurality of prisms are joined,
    A plurality of rectangular flat optical members are laminated via an adhesive, and the flat optical members are horizontally arranged so that the flat surface connecting the end surface edges of the flat optical members and the flat surface of the flat optical member are inclined. Laminate forming step of sequentially laminating in the direction and laminating in a staircase shape to form a laminate,
    A laminated body forming step of cutting the laminated body at a predetermined angle and a predetermined pitch that are inclined in a direction along a plane connecting end edges of the flat optical member, and forming a laminated body; and
    Cutting the laminated body cut at a predetermined cutting interval in a direction perpendicular to the cut surface in the laminated body forming step so that the laminated body includes the joint surface of the planar optical member. And having a process
    In the laminated body forming step, a lower exposed surface of the laminated flat optical member is supported by a jig, and an upper flat plate surface of the laminated flat optical member is bonded to the upper flat surface of the laminated optical member via an adhesive. A method of manufacturing an optical element, comprising: stacking another flat optical member, pressurizing the upper flat surface of the another flat optical member, and bonding the flat optical members with an adhesive.
  2. 　前記治具は複数枚積層された平板状光学部材の途中に位置する平板状光学部材の下側露出面を支持し、前記別の平板状光学部材の中央部は、水平方向において、前記治具の支持面よりも下層に配置される平板状光学部材側に位置することを特徴とする請求項１に記載の光学素子の製造方法。 The jig supports a lower exposed surface of a flat optical member positioned in the middle of a plurality of laminated flat optical members, and a central portion of the another flat optical member is arranged in the horizontal direction in the jig. 2. The method of manufacturing an optical element according to claim 1, wherein the optical element is located on a side of a flat optical member arranged in a lower layer than the support surface of the optical element.
  3. 　前記治具は、平板状光学部材が載置されるベース部と、前記載置された平板状光学部材を水平方向に支持する水平支持部と、積層した平板状光学部材の下側平板面を支持する垂直支持部とを有することを特徴とする請求項１または請求項２に記載の光学素子の製造方法。 The jig includes a base portion on which a flat optical member is placed, a horizontal support portion that horizontally supports the flat optical member placed above, and a lower flat surface of the laminated flat optical member. The method for manufacturing an optical element according to claim 1, further comprising a vertical support portion that supports the optical element.
  4. 　前記垂直支持部は、積層した平板状光学部材の位置に応じて、垂直方向に位置調整可能であるとともに、水平方向に位置調整可能であることを特徴とする請求項１～請求項３のいずれかに記載の光学素子の製造方法。 4. The vertical support portion can be adjusted in the vertical direction and in the horizontal direction according to the position of the stacked flat optical members, and can be adjusted in the horizontal direction. A method for producing the optical element according to claim 1.
  5. 　前記水平支持部は水平方向に位置調整可能であることを特徴とする請求項４に記載の光学素子の製造方法。 5. The method of manufacturing an optical element according to claim 4, wherein the position of the horizontal support portion can be adjusted in the horizontal direction.
  6. 　接着剤を介して複数枚の矩形の平板状光学部材を積層するとともに、各平板状光学部材の端面縁を結ぶ平面と平板状光学部材の平板面とが傾斜するように平板状光学部材を水平方向に順次ずらして階段状に積層して、積層体を形成する積層体形成工程と、前記積層体を、前記平板状光学部材の端面縁を結ぶ平面に沿う方向に傾斜する所定の角度および所定のピッチで切断し、積層体分割体を形成する積層体分割体形成工程と、前記積層体分割体を、前記平面状光学部材の接合面を間に含むように、前記積層体分割体形成工程における切断面に垂直な方向に、所定の切断間隔で切断する積層体分割体切断工程と、を有する、複数のプリズムの各傾斜面を接合した光学素子の製造方法において、前記積層体形成工程に用いる治具であって、
    　前記治具は、平板状光学部材が載置されるベース部と、前記載置された平板状光学部材を水平方向に支持する水平支持部と、積層した平板状光学部材の下側露出面を支持する垂直支持部とを有することを特徴とする治具。     A plurality of rectangular flat optical members are laminated via an adhesive, and the flat optical members are horizontally arranged so that the flat surface connecting the end surface edges of the flat optical members and the flat surface of the flat optical member are inclined. A laminated body forming step of forming a laminated body by sequentially shifting in the direction and forming a laminated body; and a predetermined angle and a predetermined angle in which the laminated body is inclined in a direction along a plane connecting the edge of the flat optical member. The laminated body forming step for forming the laminated body divided body by cutting at a pitch of the laminated body divided body, and the laminated body divided body forming step so that the laminated body divided body includes the bonding surface of the planar optical member therebetween In the method of manufacturing an optical element in which the inclined surfaces of a plurality of prisms are joined, the laminate divided body cutting step of cutting at a predetermined cutting interval in a direction perpendicular to the cut surface in A jig to be used,
    The jig includes a base portion on which the flat optical member is placed, a horizontal support portion that horizontally supports the flat optical member placed above, and a lower exposed surface of the laminated flat optical member. A jig having a vertical support portion to support.
PCT/JP2010/072094 2009-12-15 2010-12-09 Method for manufacturing optical element and jig used in the method WO2011074466A1 (en)

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