WO2011069500A3 - Method for producing solar cells and method for producing solar modules - Google Patents

Method for producing solar cells and method for producing solar modules Download PDF

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Publication number
WO2011069500A3
WO2011069500A3 PCT/DE2010/075145 DE2010075145W WO2011069500A3 WO 2011069500 A3 WO2011069500 A3 WO 2011069500A3 DE 2010075145 W DE2010075145 W DE 2010075145W WO 2011069500 A3 WO2011069500 A3 WO 2011069500A3
Authority
WO
WIPO (PCT)
Prior art keywords
semiconductor wafer
type
rear side
front side
ohm
Prior art date
Application number
PCT/DE2010/075145
Other languages
German (de)
French (fr)
Other versions
WO2011069500A2 (en
Inventor
Til Bartel
Hans-Christoph Ploigt
Florian Stenzel
Andreas Mohr
Matthias Gundermann
Anke Zerres
Original Assignee
Q-Cells Se
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Q-Cells Se filed Critical Q-Cells Se
Priority to DE112010004698T priority Critical patent/DE112010004698A5/en
Publication of WO2011069500A2 publication Critical patent/WO2011069500A2/en
Publication of WO2011069500A3 publication Critical patent/WO2011069500A3/en

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02—Details
    • H01L31/0224—Electrodes
    • H01L31/022408—Electrodes for devices characterised by at least one potential jump barrier or surface barrier
    • H01L31/022425—Electrodes for devices characterised by at least one potential jump barrier or surface barrier for solar cells
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/14—Decomposition by irradiation, e.g. photolysis, particle radiation or by mixed irradiation sources
    • C23C18/143—Radiation by light, e.g. photolysis or pyrolysis
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • H01L31/1804—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof comprising only elements of Group IV of the Periodic Table
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy
    • Y02E10/547—Monocrystalline silicon PV cells
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Sustainable Development (AREA)
  • Materials Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Sustainable Energy (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Photovoltaic Devices (AREA)

Abstract

The invention relates to a method for producing a solar cell, comprising the following steps: making a semiconductor wafer available which has a front side and a rear side, said wafer being selected from the group consisting of: a p-type semiconductor wafer having a p-type base and an n-doped front side emitter which has a value of 70 ohm/sq or more, preferably 90 ohm/sq, and especially preferred more than 110 ohm/sq, and/or which has a surface concentration of less than 1020 doping atoms/cm3, preferably less than 5x1019 doping atoms /cm3, an n-type semiconductor wafer having an n-type base, an n-type front side section for the front side contact of the n-type base and a p-type emitter, an n-type semiconductor waver having an n-type base and a p-doped 40 ohm/sq or more front side emitter and an n-type semiconductor wafer having an n-type base and a p-doped emitter structure for the rear side contact or a p-type semiconductor wafer having a p-type base and an n-doped emitter structure for rear side contact, applying a seed layer structure (4a) for a multilayer electrode structure to the front side or to the rear side of the semiconductor wafer, baking the semiconductor wafer for baking the seed layer structure (4a) to give baked seed layer structures (4b), electrodepositing metal onto the baked seed layers (4b) to produce a multilayer electrode structure (4b, 4c) and applying a rear side metallization onto the rear side of the semiconductor layer to give a rear side electrode structure corresponding to the multilayer electrode structure, the semiconductor waver not being exposed to a reducing atmosphere at a temperature of more than 200°C neither between the step of baking and the step of electrodeposition nor after the step of electrodeposition, thereby allowing the production of an electrical contact of the quality < 10 mohm cm2 solely by the electrodeposition of a metal for example onto a high-resistivity (>70 ohm/sq) semiconductor wafer.
PCT/DE2010/075145 2009-12-08 2010-11-25 Method for producing solar cells and method for producing solar modules WO2011069500A2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE112010004698T DE112010004698A5 (en) 2009-12-08 2010-11-25 PROCESS FOR THE PRODUCTION OF SOLAR CELLS AND METHOD FOR THE PRODUCTION OF SOLAR MODULES

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102009044823.3 2009-12-08
DE102009044823A DE102009044823A1 (en) 2009-12-08 2009-12-08 Process for the production of solar cells and process for the production of solar modules

Publications (2)

Publication Number Publication Date
WO2011069500A2 WO2011069500A2 (en) 2011-06-16
WO2011069500A3 true WO2011069500A3 (en) 2012-07-19

Family

ID=43971871

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/DE2010/075145 WO2011069500A2 (en) 2009-12-08 2010-11-25 Method for producing solar cells and method for producing solar modules

Country Status (2)

Country Link
DE (2) DE102009044823A1 (en)
WO (1) WO2011069500A2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102012205498A1 (en) * 2012-04-04 2013-10-10 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Solar cell and method of making electrical contact thereon
DE102013221941A1 (en) 2013-10-29 2015-04-30 SolarWorld Industries Thüringen GmbH A method for contacting a solar cell and a solar cell produced by such a method

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1865563A2 (en) * 2006-06-05 2007-12-12 Rohm and Haas Electronic Materials, L.L.C. Light assisted electro plating process
US20090120497A1 (en) * 2007-11-09 2009-05-14 Schetty Iii Robert A Method of metallizing solar cell conductors by electroplating with minimal attack on underlying materials of construction

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4703553A (en) * 1986-06-16 1987-11-03 Spectrolab, Inc. Drive through doping process for manufacturing low back surface recombination solar cells
DE102007031958A1 (en) * 2007-07-10 2009-01-15 Deutsche Cell Gmbh Contact structure for a semiconductor device and method for producing the same

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1865563A2 (en) * 2006-06-05 2007-12-12 Rohm and Haas Electronic Materials, L.L.C. Light assisted electro plating process
US20090120497A1 (en) * 2007-11-09 2009-05-14 Schetty Iii Robert A Method of metallizing solar cell conductors by electroplating with minimal attack on underlying materials of construction

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
CLEMENT F ET ALL: "INDUSTRIALLY FEASIBLE MC-SI SOLAR CELLS WITH FINE LINE PRINTED FRONT CONTACTS ON HIGH EMITTER SHEET RESISTANCE TOWARDS 17% EFFICIENCY", EUROPEAN PHOTOVOLTAIC SOLAR ENERGY CONFERENCE AND EXHIBITION (EU PVSEC)24TH, HAMBURG, GERMANY, 21 September 2009 (2009-09-21), XP040530155, ISBN: 978-3-936338-25-6 *
D. PYSCH ET AL: "Comprehensive analysis of advanced solar cell contacts consisting of printed fine-line seed layers thickened by silver plating", PROGRESS IN PHOTOVOLTAICS: RESEARCH AND APPLICATIONS, vol. 17, no. 2, 1 October 2008 (2008-10-01), pages 101 - 114, XP055026524, ISSN: 1062-7995, DOI: 10.1002/pip.855 *
OBERHOLTZER F, DUBÉ C. E.: "EFFICIENCY IMPROVEMENTS OF STRING RIBBON SILICON SOLAR CELLS EMPLOYING TEXTURIZATION, HIGH SHEET RESISTANCE EMITTER AND LIGHT-INDUCED SILVER PLATING ONSCREEN-PRINTED FRONT GRID", THE COMPILED STATE-OF-THE-ART OF PV SOLAR TECHNOLOGY AND DEPLOYMENT : 22ND EUROPEAN PHOTOVOLTAIC SOLAR ENERGY CONFERENCE, EU PVSEC ; PROCEEDINGS OF THE INTERNATIONAL CONFERENCE, HELD IN MILAN, ITALY, 3 - 7 SEPTEMBER 2007, MUNICH : WIP-RENEWABLE ENERG, 3 September 2007 (2007-09-03), XP040513135, ISBN: 978-3-936338-22-5 *

Also Published As

Publication number Publication date
DE102009044823A1 (en) 2011-06-09
DE112010004698A5 (en) 2012-10-31
WO2011069500A2 (en) 2011-06-16

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