WO2011049362A3 - 모터 내장형 스크루 로터 타입 진공펌프 - Google Patents

모터 내장형 스크루 로터 타입 진공펌프 Download PDF

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Publication number
WO2011049362A3
WO2011049362A3 PCT/KR2010/007189 KR2010007189W WO2011049362A3 WO 2011049362 A3 WO2011049362 A3 WO 2011049362A3 KR 2010007189 W KR2010007189 W KR 2010007189W WO 2011049362 A3 WO2011049362 A3 WO 2011049362A3
Authority
WO
WIPO (PCT)
Prior art keywords
vacuum pump
type vacuum
rotor type
pair
screw rotor
Prior art date
Application number
PCT/KR2010/007189
Other languages
English (en)
French (fr)
Other versions
WO2011049362A2 (ko
Inventor
이헌
Original Assignee
(주)코디박
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by (주)코디박 filed Critical (주)코디박
Priority to JP2012534124A priority Critical patent/JP2013507575A/ja
Publication of WO2011049362A2 publication Critical patent/WO2011049362A2/ko
Publication of WO2011049362A3 publication Critical patent/WO2011049362A3/ko

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
    • F04C18/16—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/082—Details specially related to intermeshing engagement type pumps
    • F04C18/084—Toothed wheels
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
    • F04C18/20—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with dissimilar tooth forms
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/0021—Systems for the equilibration of forces acting on the pump
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/02—Lubrication; Lubricant separation
    • F04C29/023—Lubricant distribution through a hollow driving shaft
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/50—Bearings
    • F04C2240/56—Bearing bushings or details thereof

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)

Abstract

본 발명은 한 쌍의 스크루 로터 중 어느 하나의 스크루 로터 내부에 구동을 위한 모터가 내장된 스크루 로터 타입 진공펌프에 관한 것으로서, 상기 한 쌍의 스크루 로터의 회전시 회전 밸런스의 변형을 감소시킬 수 있는 기술에 관한 것이다. 본 발명에 따르면, 서로 맞물리며 회전하는 한 쌍의 스크루 로터와; 상기 한 쌍의 스크루 로터를 수납하며, 일측에는 흡입구가 구비되고 타측에는 토출구가 구비된 하우징; 및 상기 한 쌍의 스크루 로터 중 어느 하나의 스크루 로터 내부에, 회전축의 구동을 위하여 내장된 모터; 를 포함하는 것을 특징으로 하는 스크루 로터 타입 진공 펌프가 제공된다.
PCT/KR2010/007189 2009-10-21 2010-10-20 모터 내장형 스크루 로터 타입 진공펌프 WO2011049362A2 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2012534124A JP2013507575A (ja) 2009-10-21 2010-10-20 モータ内蔵型スクリューロータ型真空ポンプ

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1020090100399A KR101138389B1 (ko) 2009-10-21 2009-10-21 모터 내장형 스크루 로터 타입 진공펌프
KR10-2009-0100399 2009-10-21

Publications (2)

Publication Number Publication Date
WO2011049362A2 WO2011049362A2 (ko) 2011-04-28
WO2011049362A3 true WO2011049362A3 (ko) 2011-10-27

Family

ID=43900818

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/KR2010/007189 WO2011049362A2 (ko) 2009-10-21 2010-10-20 모터 내장형 스크루 로터 타입 진공펌프

Country Status (3)

Country Link
JP (1) JP2013507575A (ko)
KR (1) KR101138389B1 (ko)
WO (1) WO2011049362A2 (ko)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101333056B1 (ko) * 2012-01-20 2013-11-26 주식회사 코디박 냉각 기능을 갖는 모터 내장형 스크루 로터 타입 진공펌프
JP6155423B2 (ja) * 2013-12-02 2017-07-05 株式会社飯塚鉄工所 スクリュー真空ポンプ
JPWO2015128906A1 (ja) * 2014-02-28 2017-03-30 国立大学法人東北大学 スクリュー排気ポンプ用のオイル供給部品及びその部品を備えたスクリュー排気ポンプ
DE202018107141U1 (de) * 2018-12-13 2020-03-18 Vogelsang Gmbh & Co. Kg Drehkolbenpumpe mit innenliegender Lagerung
FR3124236A1 (fr) * 2021-07-05 2022-12-23 Pfeiffer Vacuum Pompe à vide

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001055992A (ja) * 1999-07-19 2001-02-27 Sterling Fluid Systems Germany Gmbh 圧縮可能媒体用排出機
JP2004263629A (ja) * 2003-03-03 2004-09-24 Tadahiro Omi スクリュー真空ポンプ
KR20050042066A (ko) * 2001-11-15 2005-05-04 라이볼트 바쿰 게엠베하 스크루 타입 진공 펌프를 템퍼링하기 위한 방법
JP2005195027A (ja) * 2005-02-14 2005-07-21 Dia Shinku Kk スクリュー流体機械及びねじ歯車

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6336680U (ko) * 1986-08-27 1988-03-09
JPH01267384A (ja) * 1988-04-15 1989-10-25 Hitachi Ltd 勾配歯を有するスクリューロータ
JPH02283898A (ja) * 1989-04-21 1990-11-21 Hitachi Koki Co Ltd ねじ溝分子ポンプ
JPH07217748A (ja) * 1994-01-31 1995-08-15 Hitachi Ltd 真空ポンプ用軸封装置
JPH08100779A (ja) * 1994-10-04 1996-04-16 Matsushita Electric Ind Co Ltd 真空ポンプ
KR100360236B1 (ko) * 1999-10-04 2002-11-08 엘지전자 주식회사 스크롤 압축기의 가스누설 저감구조
JP5197157B2 (ja) 2008-05-27 2013-05-15 株式会社神戸製鋼所 スクリュ流体機械

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001055992A (ja) * 1999-07-19 2001-02-27 Sterling Fluid Systems Germany Gmbh 圧縮可能媒体用排出機
KR20050042066A (ko) * 2001-11-15 2005-05-04 라이볼트 바쿰 게엠베하 스크루 타입 진공 펌프를 템퍼링하기 위한 방법
JP2004263629A (ja) * 2003-03-03 2004-09-24 Tadahiro Omi スクリュー真空ポンプ
JP2005195027A (ja) * 2005-02-14 2005-07-21 Dia Shinku Kk スクリュー流体機械及びねじ歯車

Also Published As

Publication number Publication date
WO2011049362A2 (ko) 2011-04-28
JP2013507575A (ja) 2013-03-04
KR20110043331A (ko) 2011-04-27
KR101138389B1 (ko) 2012-04-26

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