WO2010113932A1 - ベローズ型メカニカルシール - Google Patents
ベローズ型メカニカルシール Download PDFInfo
- Publication number
- WO2010113932A1 WO2010113932A1 PCT/JP2010/055662 JP2010055662W WO2010113932A1 WO 2010113932 A1 WO2010113932 A1 WO 2010113932A1 JP 2010055662 W JP2010055662 W JP 2010055662W WO 2010113932 A1 WO2010113932 A1 WO 2010113932A1
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- WIPO (PCT)
- Prior art keywords
- bellows
- seal
- annular member
- peripheral surface
- type mechanical
- Prior art date
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J15/00—Sealings
- F16J15/16—Sealings between relatively-moving surfaces
- F16J15/34—Sealings between relatively-moving surfaces with slip-ring pressed against a more or less radial face on one member
- F16J15/36—Sealings between relatively-moving surfaces with slip-ring pressed against a more or less radial face on one member connected by a diaphragm or bellow to the other member
- F16J15/363—Sealings between relatively-moving surfaces with slip-ring pressed against a more or less radial face on one member connected by a diaphragm or bellow to the other member the diaphragm or bellow being made of metal
Definitions
- the present invention relates to a bellows type mechanical seal.
- Non-Patent Document 1 Mechanical seals equipped with bellows as shaft seals for pumps that handle fluids with a high solid content, such as asphalt, tar, pitch, etc. Is known (see Non-Patent Document 1).
- FIG. 6 is a schematic cross-sectional view illustrating the configuration of a bellows type mechanical seal according to a conventional example.
- 7 is a view taken in the direction of arrow X in FIG.
- FIG. 8 is a schematic cross-sectional view illustrating the configuration of a bellows mechanical seal according to another conventional example.
- the mechanical seal 100 shown in FIG. 6 includes a seal ring 102 elastically supported by the housing 200 via a retainer 104, a bellows 101, a collar 105, a seal cover 202, and the like, and a mating ring 103 fixed to the rotary shaft 300. And slidably contact each other, and the annular gap between the housing 200 and the rotating shaft 300 is sealed.
- the seal ring 102 is shrink-fitted or press-fitted into a retainer 104 welded to one end of the bellows 101.
- a collar 105 is welded to the other end of the bellows 101.
- the collar 105 is fixed to a seal cover 202 attached to the opening of the shaft hole 201 of the housing 200.
- the mating ring 103 is fixed to a sleeve 301 fixed to the outer peripheral surface of the rotating shaft 300.
- the seal ring 102 and the mating ring 103 are arranged in the axial direction so that end faces perpendicular to the shaft are in contact with each other. It is configured to slide.
- the seal ring 102 has improved followability with respect to the mating ring 103 when the bellows 101 elastically receives a sliding torque generated by sliding with the mating ring 103.
- a baffle sleeve 203 is provided for inducing a quench fluid such as steam to the seal end face to allow for cleaning of leaking leakage liquid from the seal end face and cooling and lubrication of the seal end face.
- the baffle sleeve 203 is attached to the seal cover 202, and has a cylindrical portion 203a extending in the axial direction on the inner diameter side of the seal ring 102 and the mating ring 103.
- a damper 104 a composed of a plurality of protruding portions protruding in the inner diameter direction is provided on the inner peripheral surface of the retainer 104.
- the damper 104a protrudes so as to partially narrow the gap between the inner peripheral surface of the retainer 104 and the outer peripheral surface of the cylindrical portion 203a of the baffle sleeve 203 within a range that does not hinder the movement of the retainer 104 in the axial direction. .
- the movement of the retainer 104 in the direction perpendicular to the axis is restricted, for example, the occurrence of high-cycle circumferential fine vibration (stick slip) on the seal end surface due to insufficient lubrication of the seal end surface is suppressed, Damage to the welded portion of the bellows 101 due to vibration is prevented.
- the seal ring 102 ′ is not fixed to the retainer 104 ′, but is brought into contact with the lapped (surface polished) surfaces.
- the influence of the difference in thermal expansion coefficient is reduced, sealing performance can be maintained even during high temperature use, and damage due to the influence of thermal deformation or the like can be suppressed.
- special processes such as shrink fitting, press fitting, and subsequent heat treatment are not necessary, and the manufacturing cost can be reduced.
- the convex portion 203b provided at the tip of the cylindrical portion 203a of the baffle sleeve 203 ′ is loosely fitted into the notch 102a provided on the inner peripheral surface of the seal ring 102 ′.
- a baffle sleeve 203 ' is configured to clutch the seal ring 102'. As a result, the sliding torque is not transmitted to the bellows 101.
- dampers 104 a ′ that are a plurality of projecting portions projecting in the inner diameter direction are provided.
- the damper 104a ′ is similar to the damper 104a of the mechanical seal 100 shown in FIG. 6 described above, so that the movement of the retainer 104 ′ in a direction perpendicular to the axis of the retainer 104 ′ is restricted and the vibration of the bellows 11 is suppressed.
- the plurality of portions protrude in the inner diameter direction so as to partially narrow the gap between the retainer 104 ′ and the cylindrical portion 203a of the baffle sleeve 203 ′.
- annular recess is formed by the stepped portion 102b and the stepped portion 104b that partially reduce the outer diameter on the outer peripheral surface of the seal ring 102 ′ and the outer peripheral surface of the retainer 104 ′.
- a centering case 106 for centering between the 102 ′ and the retainer 104 ′ is mounted.
- the centering case 106 is fitted with a minute gap in consideration of a change in dimensions due to thermal expansion, if a fluid such as tar or pitch enters into the gap and is fixed, vibration is applied to the bellows 101. In some cases, the bellows 101 may be damaged.
- the present invention has been made to solve the above-described problems of the prior art, and an object thereof is to provide a bellows type mechanical seal capable of reducing the influence of vibration on the bellows.
- the bellows type mechanical seal in the present invention is: A bellows type mechanical seal that seals an annular gap between a shaft hole provided in a housing and a rotating shaft inserted through the shaft hole, A first annular member fixed to the rotating shaft; A second annular member elastically supported via a bellows with respect to the housing at a position closer to the opening of the shaft hole than the first annular member; A seal ring having a first seal end face perpendicular to an axis that slidably contacts the first annular member and a second seal end face perpendicular to the axis that contacts the second annular member; In the bellows type mechanical seal with Centering the shaft center of the seal ring and the second annular member in contact with the inner peripheral surface of the seal ring and the inner peripheral surface of the second annular member facing the unsealed region in the annular gap, respectively. A member is provided.
- the centering member for aligning the axial centers of the seal ring and the second annular member is disposed in the non-sealing target region, the propagation of vibration to the bellows due to the fixing of the sealing target fluid as in the prior art. Is suppressed. That is, according to the present invention, the fluid to be sealed, which is fluid at high temperatures, such as tar and pitch, but solidifies when the temperature is reduced, includes the centering member, the seal ring, and the second annular member. It will not be stuck in the gap between the two. Therefore, it is possible to suppress the vibration due to the sliding between the first annular member and the seal ring from being transmitted to the bellows, and to prevent the bellows from being damaged.
- An axial direction extends between the outer peripheral surface of the rotating shaft and the inner peripheral surface of the second annular member and the seal ring, and on the inner peripheral side of the seal surface between the second annular member and the seal ring.
- a baffle sleeve having a cylindrical portion for guiding the quench fluid and fixed to the housing may be provided.
- the elastic member can buffer the vibration generated in the second annular member due to the sliding between the first annular member fixed to the rotating shaft and the seal ring, and the propagation of the vibration to the bellows can be suppressed.
- the elastic member is between the outer peripheral surface of the cylindrical portion of the baffle sleeve and the inner peripheral surface of the centering member, or the outer peripheral surface of the cylindrical portion of the baffle sleeve and the inner peripheral surface of the second annular member. It is good to install between.
- the elastic member may be a leaf spring configured in an annular shape.
- the influence of vibration on the bellows can be reduced.
- FIG. 7 is a view taken in the direction of arrow X in FIG. It is a typical sectional view explaining composition of a bellows type mechanical seal concerning other conventional examples.
- FIG. 1 is a schematic cross-sectional view illustrating the configuration of a bellows type mechanical seal according to Embodiment 1 of the present invention.
- the bellows type mechanical seal 1 is a pump for handling a fluid containing a large amount of solids at a high temperature exceeding 200 ° C. such as asphalt, tar, and pitch in an oil refinery, a petrochemical plant, an iron manufacturing chemical plant, or the like. Used as a shaft seal device.
- the bellows type mechanical seal 1 generally includes a mating ring 13 in which a seal ring 12 is fixed to a rotary shaft 30, and a retainer that is elastically supported by a housing 20 via a bellows 11, a collar 15, a seal cover 22, and the like. 14, the annular clearance between the shaft hole 21 of the housing 20 and the rotary shaft 30 is sealed. Thereby, the sealing target fluid such as tar and pitch is prevented from leaking from the sealing target region (O) in the machine to the non-sealing target region (A) on the atmosphere side.
- the bellows type mechanical seal 1 includes a baffle sleeve 23 for inducing quench fluid such as steam for cleaning the seal surface of the seal ring 12 and the retainer 14.
- the baffle sleeve 23 has a cylindrical portion 23 a that extends in the axial direction between the inner peripheral surface of the seal ring 12, the retainer 14, and the like and the outer peripheral surface of the rotary shaft 30.
- the baffle sleeve 23 is made of a metal material such as SUS630.
- the mating ring 13 as the first annular member is made of a metal material having a low thermal expansion coefficient of about 5 ⁇ 10 ⁇ 6 1 / ° C., such as 42% Ni—Fe, on the sleeve 31 fixed to the outer peripheral surface of the rotating shaft 30.
- the retainer 32 is fixed.
- the mating ring 13 has an end surface 13 a perpendicular to the axis at the end of the shaft hole 21 on the opening side.
- the retainer 14 as a second annular member is an annular member made of a metal such as Inconel 625 or a different material whose thermal expansion coefficient is approximately similar to the material of the bellows 11, and the bellows 11 at the end of the shaft hole 21 on the opening side. One end is welded.
- the bellows 11 is a metal bellows-like member such as Inconel 625. As shown in FIG. 1, the bellows 11 connects the inner peripheral part or outer peripheral part of the some metal disk (metal diaphragm board) shape
- the bellows 11 shown in FIG. 1 is merely an example of a specific configuration of the welding bellows, and the configuration of the bellows used in each embodiment of the present invention is limited to the configuration shown in FIG. It is not a thing. 2, 5, 6, and 8, the specific shape of the bellows 11 is not shown.
- a collar 15 is welded to the other end of the bellows 11.
- the collar 15 is a metal annular member such as SUS304, and is fixed to a seal cover 22 attached to the opening of the shaft hole 21 of the housing 20.
- the three members, the retainer 14, the bellows 11, and the collar 15, which are welded to each other, can be assembled to the housing 20 (seal cover 22) as one unit (bellows assembly).
- the retainer 14 has an end surface 14a perpendicular to the shaft at the end of the shaft hole 21 on the side opposite to the opening.
- the retainer 14 is a damper that includes protrusions that protrude in the inner diameter direction at a plurality of locations on the inner peripheral surface and partially narrow the gap between the inner peripheral surface of the retainer 14 and the outer peripheral surface of the cylindrical portion 23a of the baffle sleeve 23. 14b is provided.
- the specific configuration of the damper 14b is the same as the damper 104a of the mechanical seal 100 shown in FIG. 6 (see FIG. 7) and the damper 104a ′ of the mechanical seal 100 ′ shown in FIG.
- the gap between the retainer 14 and the cylindrical portion 23a of the baffle sleeve 23 is an enlarged region between adjacent projecting portions, and the quench fluid supplied from the quench hole 22a of the seal cover 22 is transferred to the baffle sleeve 23.
- An enlarged flow path that facilitates guidance to the seal end face side along the outer periphery of the cylindrical portion 23a is formed.
- the seal ring 12 has seal end faces 12a1 and 12a2 perpendicular to the shaft on both sides in the axial direction.
- the seal end surface 12a1 (first seal end surface) on the side opposite to the opening of the shaft hole 21 (inner side) is in contact with the end surface 13a of the mating ring 13, and the seal end surface 12a2 (second) on the opening side of the shaft hole 21.
- the seal end face) is in contact with the end face 14a of the retainer 14.
- the surface width of the seal end surface 12a2 in contact with the retainer 14 is set to be substantially the same as or slightly narrower than the surface width of the seal end surface 12a1 in contact with the mating ring 13.
- the end surface 13a of the mating ring 13 and the end surface 14a of the retainer 14 are both lapped (surface polished), and have the same surface roughness and flatness as the seal end surfaces 12a1 and 12a2 of the seal ring. These wrapping surfaces come into sealing contact with each other by the spring force of the bellows 11 and the pressing force due to the fluid pressure.
- One or a plurality of cutouts 12b are provided on the inner peripheral surface of the seal ring 12, and the convex portion 23b provided at the tip of the cylindrical portion 23a of the baffle sleeve 23 has a minute gap with the cutout 12b. (See the broken line portion surrounded by a circle at the center of FIG. 1).
- This clutch mechanism allows the seal ring 12 to move freely in the axial direction, but is configured to restrict circumferential movement, that is, rotational movement.
- the seal end surface 12a1 that contacts the end surface 13a of the mating ring 13 is slidably contacted by the rotation of the rotary shaft 30, but the seal end surface 12a2 that contacts the end surface 14a of the retainer 14 is in contact with the retainer 14. Since the rotation of the seal ring 12 is restricted, it becomes a substantially stationary sealing surface that does not slide due to the rotation.
- a step portion 12 c that expands the inner diameter of the seal ring 12 on the retainer 14 side is provided on the inner peripheral surface of the seal ring 12.
- a step portion 14 c that expands the inner diameter of the retainer 14 on the seal ring 12 side is also provided on the inner peripheral surface of the retainer 14.
- These step portions 12 c and 14 c are set to have substantially the same inner diameter, and form an annular recess at the boundary between the seal ring 12 and the retainer 14.
- a centering case 16 as a centering member for centering the seal ring 12 and the retainer 14 is attached to the recess.
- the centering case 16 is an annular member made of the same material as the seal ring 12 or a material (for example, SiC) having the same or smaller thermal expansion coefficient as that of the seal ring 12, and is small in the radial direction with respect to the recess. It is fitted with a gap.
- the seal ring 12 is not fixed to the retainer 14 as in the prior art, and can freely slide between the mating ring 13 and the retainer 14 in a direction perpendicular to the axis. It is configured as follows. Therefore, the dimensional change in the axial direction due to the influence of thermal expansion or the like is absorbed by the expansion and contraction of the bellows 11, and the dimensional change in the direction perpendicular to the axis (radial direction) causes the seal end faces perpendicular to the axis to slide with each other ( It will be absorbed.
- the flatness of the seal end face of the seal ring 12 that is in sliding contact with the mating ring 13 is not affected by thermal expansion even in a high temperature atmosphere, and the sealing performance is maintained. Further, the retainer 14 itself is not affected by pressure deformation or thermal deformation.
- seal ring 12 is not fixed to the retainer 14 since the seal ring 12 is not fixed to the retainer 14, special processes such as shrink fitting, press fitting, and subsequent heat treatment are not required as in the prior art, and jigs associated therewith are also unnecessary. Therefore, cost reduction and man-hour reduction can be achieved. Also, the seal ring replacement work is facilitated.
- a centering case 16 for centering the seal ring 12 and the retainer 14 is provided on each inner peripheral surface of the seal ring 12 and the retainer 14 on the non-sealing target region side. It is configured to be attached to. That is, since the centering case 16 fitted with a minute gap in consideration of the difference in thermal expansion coefficient is not in the fluid to be sealed, the fluid to be sealed is easily solidified and fixed at a low temperature. Even in the case of a fluid having properties or a fluid having a high solid content, the fluid to be sealed does not adhere to the gap between the centering case 16, the seal ring 12, and the retainer 14. Further, since the centering case 16 is disposed on the quench fluid side, the gap is always cleaned with the quench fluid, and the lapped end surfaces of the seal portion can always slip smoothly. .
- FIG. 2 is a schematic cross-sectional view illustrating the configuration of a bellows mechanical seal 1 ′ according to the second embodiment of the present invention.
- 3A and 3B are schematic views illustrating the configuration of the elastic member, FIG. 3A is a schematic cross-sectional view of the elastic member, and FIG. 3B is a cross-sectional view taken along arrow A in FIG. 3A.
- the same components as those in the first embodiment are denoted by the same reference numerals, detailed description thereof is omitted, and only different portions from the first embodiment are described.
- the configuration not described is the same as that of the first embodiment.
- the present embodiment includes an elastic member 17 that applies an elastic force to the retainer 14 in the outer diameter direction.
- the elastic member 17 is mounted in an annular groove 16 a provided on the inner peripheral side of the centering case 16 ′, and is configured to elastically contact the cylindrical portion 23 a of the baffle sleeve 23.
- the elastic member 17 is a very thin and elastic band member (annular leaf spring member), and a large number of R-shaped projections 17a are provided on one side in a uniform manner.
- the elastic member 17 is annularly mounted between the cylindrical portion 23a of the baffle sleeve 23 and the centering case 16 ', and the protrusion 17a is accommodated in the annular groove 16a on the inner periphery of the centering case 16'. The movement in the axial direction is restricted.
- the elastic member 17 has a flat surface portion (inner peripheral side) 17b in contact with the outer periphery of the cylindrical portion 23a of the baffle sleeve 23 with an extremely low surface pressure due to the elastic biasing force obtained by the deformation of the protrusion 17a in the radial direction.
- the vibration of the seal ring 12 and the retainer 14 is buffered through the case 16 '.
- the planar portion (inner peripheral side) 17b of the elastic member 17 and the outer periphery of the cylindrical portion 23a of the baffle sleeve 23 can freely slide in the axial direction.
- each part of the elastic member 17 the size of the surface pressure (elastic force) applied to the inner peripheral surface of the centering case 16 ′ and the outer peripheral surface of the cylindrical portion 23 a of the baffle sleeve 23, etc.
- Vibration generated by sliding between the seal ring 12 and the mating ring 13 can be sufficiently buffered by deformation of the projection 17a, and the flat portion 17b can be freely displaced in the axial direction of the seal ring 12 and the retainer 14 (bellows).
- 11 is suitably set so as to contact at a low surface pressure that does not hinder the expansion and contraction.
- the stick slip of the seal end face propagates to the retainer 14 and tries to vibrate. Since it is buffered by 17, the propagation of vibration to the bellows 11 is suppressed, and the welded portion of the bellows 11 is prevented from being damaged.
- the elastic member 17 is housed in the inner periphery of the centering case 16 ′ and the centering case 16 ′ is independent, it can be easily fitted into the cylindrical portion 23 a of the baffle sleeve 23 and can be easily assembled.
- FIG. 4 is a schematic cross-sectional view illustrating the configuration of a bellows mechanical seal 1 ′′ according to Embodiment 3 of the present invention.
- the same components as those in the above embodiments are denoted by the same reference numerals, detailed description thereof is omitted, and only the portions different from those in the above embodiments will be described.
- the configuration not described is the same as that in each of the above embodiments.
- an annular groove 14d is provided on the inner peripheral side of the retainer 14 ', and an elastic member 17 is attached to the annular groove 14d. That is, the second embodiment is configured so as to buffer the vibration of the seal ring 12 and the retainer 14 through the centering case 16 ', whereas in the present embodiment, the vibration of the retainer 14' is elastic member. 17 is configured to buffer directly.
- FIG. 5 is a schematic perspective view illustrating another configuration of the elastic member.
- the elastic member 17 ′ shown in FIG. 5 is configured by forming a plurality of convex portions 17 a ′ by press molding on a thin strip plate material made of stainless steel or the like and bending it in an annular shape.
- the circumferential cross-sectional shape (cross-sectional shape seen from the axial direction) is corrugated by the plurality of convex portions 17 a ′, and the plurality of convex portions 17 a ′ are arranged in the centering case 16 ′ and the retainer.
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Abstract
Description
ハウジングに設けられた軸孔と該軸孔に挿通された回転軸との間の環状隙間をシールするベローズ型メカニカルシールであって、
前記回転軸に固定された第1環状部材と、
前記第1環状部材よりも前記軸孔の開口部側の位置において、前記ハウジングに対してベローズを介して弾性的に支持された第2環状部材と、
前記第1環状部材と摺動自在に接触する軸に垂直な第1のシール端面と前記第2環状部材と接触する軸に垂直な第2のシール端面とを有するシールリングと、
を備えたベローズ型メカニカルシールにおいて、
前記環状隙間における非密封対象領域に面した前記シールリングの内周面及び前記第2環状部材の内周面にそれぞれ当接して、前記シールリングと前記第2環状部材の軸中心を合わせる芯出し部材を備えることを特徴とする。
図1を参照して、本発明の実施例1に係るベローズ型メカニカルシールについて説明する。図1は、本発明の実施例1に係るベローズ型メカニカルシールの構成を説明する模式的断面図である。
図2~図3Bを参照して、本発明の実施例2に係るベローズ型メカニカルシール1´について説明する。図2は、本発明の実施例2に係るベローズ型メカニカルシール1´の構成を説明する模式的断面図である。図3A及び図3Bは、弾性部材の構成を説明する模式図であり、図3Aは弾性部材の模式的断面図、図3Bは図3AのA矢視断面図である。ここでは、上記実施例1と同様の構成については、同じ符号を付してその詳しい説明については省略し、実施例1と異なる部分についてのみ説明するものとする。説明をしない構成は、実施例1と同様である。
図4を参照して、本発明の実施例3に係るベローズ型メカニカルシール1´´について説明する。図4は、本発明の実施例3に係るベローズ型メカニカルシール1´´の構成を説明する模式的断面図である。ここでは、上記各実施例と同様の構成については、同じ符号を付してその詳しい説明については省略し、上記各実施例と異なる部分についてのみ説明するものとする。説明をしない構成は、上記各実施例と同様である。
11 ベローズ
12 シールリング
13 メイティングリング
14 リテーナ
15 カラー
20 ハウジング
21 軸孔
22 シールカバー
23 バッフルスリーブ
30 回転軸
Claims (6)
- ハウジングに設けられた軸孔と該軸孔に挿通された回転軸との間の環状隙間をシールするベローズ型メカニカルシールであって、
前記回転軸に固定された第1環状部材と、
前記第1環状部材よりも前記軸孔の開口部側の位置において、前記ハウジングに対してベローズを介して弾性的に支持された第2環状部材と、
前記第1環状部材と摺動自在に接触する軸に垂直な第1のシール端面と前記第2環状部材と接触する軸に垂直な第2のシール端面とを有するシールリングと、
を備えたベローズ型メカニカルシールにおいて、
前記環状隙間における非密封対象領域に面した前記シールリングの内周面及び前記第2環状部材の内周面にそれぞれ当接して、前記シールリングと前記第2環状部材の軸中心を合わせる芯出し部材を備えることを特徴とするベローズ型メカニカルシール。 - 前記回転軸の外周面と前記第2環状部材及び前記シールリングの内周面との間を軸方向に延びて、前記第2環状部材と前記シールリングとの間のシール面の内周側にクエンチ流体を導くための円筒部を有し、前記ハウジングに固定されるバッフルスリーブを備えることを特徴とする請求項1に記載のベローズ型メカニカルシール。
- 前記第2環状部材に対して外径方向に弾性力を作用させる弾性部材を備えることを特徴とする請求項2に記載のベローズ型メカニカルシール。
- 前記弾性部材は、前記バッフルスリーブの前記円筒部の外周面と前記芯出し部材の内周面との間に装着されることを特徴とする請求項3に記載のベローズ型メカニカルシール。
- 前記弾性部材は、前記バッフルスリーブの前記円筒部の外周面と前記第2環状部材の内周面との間に装着されることを特徴とする請求項3に記載のベローズ型メカニカルシール。
- 前記弾性部材は、環状に構成された板ばねであることを特徴とする請求項3~5のいずれかに記載のベローズ型メカニカルシール。
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JP2011507205A JPWO2010113932A1 (ja) | 2009-03-31 | 2010-03-30 | ベローズ型メカニカルシール |
CN2010800150282A CN102378872A (zh) | 2009-03-31 | 2010-03-30 | 波纹管型机械密封 |
US13/258,793 US8517388B2 (en) | 2009-03-31 | 2010-03-30 | Bellows type mechanical seal |
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JP2009-086856 | 2009-03-31 | ||
JP2009086856 | 2009-03-31 |
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US (1) | US8517388B2 (ja) |
JP (1) | JPWO2010113932A1 (ja) |
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
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WO2014034582A1 (ja) | 2012-08-29 | 2014-03-06 | イーグル工業株式会社 | メカニカルシール |
JP2014059007A (ja) * | 2012-09-14 | 2014-04-03 | Eagle Industry Co Ltd | メカニカルシール |
US20150211638A1 (en) * | 2012-10-04 | 2015-07-30 | Eagle Industry Co., Ltd. | Mechanical seal |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9568108B2 (en) * | 2009-03-30 | 2017-02-14 | Eagle Industry Co., Ltd. | Bellows type mechanical seal |
WO2010116844A1 (ja) * | 2009-03-30 | 2010-10-14 | イーグル工業株式会社 | ベローズ型メカニカルシール |
WO2012147416A1 (ja) * | 2011-04-26 | 2012-11-01 | イーグル工業株式会社 | 半導体製造装置用溶接ベローズ |
JP5791085B2 (ja) * | 2011-04-26 | 2015-10-07 | イーグル工業株式会社 | 半導体製造装置用溶接ベローズ |
US10352454B2 (en) | 2014-11-04 | 2019-07-16 | Eagle Industry Co., Ltd. | Mechanical seal device |
US10145475B2 (en) * | 2014-11-04 | 2018-12-04 | Eagle Industry Co., Ltd. | Mechanical seal device |
CN104989823A (zh) * | 2015-06-17 | 2015-10-21 | 宁波东联密封件有限公司 | 一种机械密封装置 |
DE102016200821B3 (de) * | 2016-01-21 | 2017-05-11 | Eagleburgmann Germany Gmbh & Co. Kg | Gleitringdichtungsanordnung mit rückseitiger Abdichtung |
US20210246982A1 (en) * | 2018-08-07 | 2021-08-12 | Sekisui Polymatech Co., Ltd. | Waterproof Member |
CN109139918A (zh) * | 2018-09-28 | 2019-01-04 | 安徽安密机械密封有限公司 | 一种双端面弹簧机械密封及其安装方法 |
PL238837B1 (pl) * | 2019-03-20 | 2021-10-11 | Politechnika Swietokrzyska | Mechaniczne uszczelnienie czołowe |
CN110056656A (zh) * | 2019-05-22 | 2019-07-26 | 蚌埠凯盛工程技术有限公司 | 自动补偿密封装置 |
WO2021025892A1 (en) * | 2019-08-05 | 2021-02-11 | Tides Marine, Inc. | Shaft seal |
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WO2014034582A1 (ja) | 2012-08-29 | 2014-03-06 | イーグル工業株式会社 | メカニカルシール |
US20150184754A1 (en) * | 2012-08-29 | 2015-07-02 | Eagle Industry Co. Ltd. | Mechanical seal |
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US20150211638A1 (en) * | 2012-10-04 | 2015-07-30 | Eagle Industry Co., Ltd. | Mechanical seal |
Also Published As
Publication number | Publication date |
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CN102378872A (zh) | 2012-03-14 |
US8517388B2 (en) | 2013-08-27 |
US20120013076A1 (en) | 2012-01-19 |
JPWO2010113932A1 (ja) | 2012-10-11 |
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