WO2010061546A1 - Branching device - Google Patents
Branching device Download PDFInfo
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- WO2010061546A1 WO2010061546A1 PCT/JP2009/006051 JP2009006051W WO2010061546A1 WO 2010061546 A1 WO2010061546 A1 WO 2010061546A1 JP 2009006051 W JP2009006051 W JP 2009006051W WO 2010061546 A1 WO2010061546 A1 WO 2010061546A1
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- Prior art keywords
- transport
- guide
- container
- path
- branch
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G13/00—Roller-ways
- B65G13/08—Roller-ways of curved form; with branch-offs
- B65G13/10—Switching arrangements
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G35/00—Mechanical conveyors not otherwise provided for
- B65G35/06—Mechanical conveyors not otherwise provided for comprising a load-carrier moving along a path, e.g. a closed path, and adapted to be engaged by any one of a series of traction elements spaced along the path
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
- B65G47/76—Fixed or adjustable ploughs or transverse scrapers
- B65G47/766—Adjustable ploughs or transverse scrapers
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
- B65G2201/02—Articles
- B65G2201/0297—Wafer cassette
Definitions
- the present invention relates to a branching device.
- This application claims priority based on Japanese Patent Application No. 2008-305279 filed in Japan on November 28, 2008, the contents of which are incorporated herein by reference.
- a turntable is known as a branching device that switches the transport direction of a transported object along a transport path such as a roller conveyor to the branch transport path side (see Patent Document 1).
- the turntable needs to be swung in a state where a transported object is placed on the turntable when the transport container transported on the transport path is switched to the branch transport path side. For this reason, at the time of turning of the turntable, the progress (conveyance) of the subsequent transported object is stopped and stagnated on the transport path, so that the transport efficiency is lowered.
- the present invention has been made in view of the above-described circumstances, and an object of the present invention is to provide a branching device that can smoothly and reliably change the transfer direction without stagnation of the flow of the transport container.
- the branching apparatus employs the following means in order to solve the above problems.
- the present invention is a branch device for a transport path for transporting a transport container that contains a transport object, and includes a first guide portion disposed on both sides in the width direction perpendicular to the transport direction on the top surface of the transport container, A second guide portion disposed on both sides in the width direction orthogonal to the transport direction of the lower surface, and disposed along both sides in the width direction of the transport direction excluding the intersection of the first transport path and the second transport path in the transport path.
- a plurality of transport rollers that support and transport the lower surface of the transport container, and guides that are disposed along both sides of the transport path in the width direction of the transport direction excluding the intersecting portion and abut against the second guide portion
- a switching guide which is horizontally movably disposed above the intersection and having a second switching guide rails comprising a.
- the guide rail may be disposed on the outer side in the width direction of the transport path in the transport direction than the transport roller.
- the transport roller may be disposed on the outer side in the width direction of the transport path in the transport direction than the guide rail.
- the first guide portion may have a guide roller having a rotation shaft extending in the vertical direction.
- the second guide portion may have a guide roller having a rotation shaft extending in the vertical direction.
- the first guide portion may be a side surface of a flat flange.
- the second guide portion may be a side surface portion of the transport container.
- the present invention it is possible to easily and reliably switch the transport direction (straight and branch) of the transport container simply by moving the position of the switching guide. Further, even when a plurality of transport containers are continuously transported, the plurality of transport containers can be continuously straightened or branched without being temporarily stopped.
- FIG. 1 is a perspective view showing a schematic configuration of a branching apparatus according to the first embodiment.
- FIG. 2 is a perspective view of a transport container used in the branching apparatus according to the first embodiment.
- the transfer container 10 is, for example, a container that transfers a plurality of disc-shaped semiconductor wafers D (transferred objects) arranged and accommodated in a plurality of stages.
- the transfer container 10 includes a storage case 12 in which a plurality of locking grooves for locking both sides of the semiconductor wafer D are formed on the inner sidewalls on both sides, and a lid body 14 that seals and closes the opening 13 of the storage case 12. It is configured.
- the transfer container 10 containing a plurality of semiconductor wafers D is transferred in the direction of the arrow along a main transfer path S or a branch transfer path B described later with the closed opening 13 facing sideways.
- a pair of first guide rollers G ⁇ b> 1 and G ⁇ b> 2 can be rotated at predetermined intervals in the front and rear directions in the transport direction on both sides of a rectangular flange 15 extending in the width direction held at a constant height by a support column. It is supported by.
- a pair of second guide rollers G3 and G4 are also supported on the lower surface E of the transport container 10 on both sides in the transport direction at the same positions as the first guide rollers G1 and G2, and are rotatable at predetermined intervals in the front and rear directions in the transport direction. (See FIGS. 3A, 3B, 4A and 4B).
- Each of these guide rollers G1, G2, G3, and G4 includes a rotation axis RA (see FIG. 3B) extending in the vertical direction, and rotates around the rotation axis.
- the first guide rollers G1 and G2 may be the side surfaces of the flange 15 having a flat plate shape instead of the rollers.
- the second guide rollers G3 and G4 may not be rollers, but may be side surfaces of the transport container 10 (the lower side surface 141 of the lid body 14 or the lower back surface 121 of the housing case 12 near the guide roller G4). That is, in the first embodiment, when there is no guide roller G1, G2, or G3, G4, the side surface of the flange 15 and the side surface portion of the transport container 10 function in the same manner as the guide rollers G1 to G4.
- 3A and 3B are branching devices according to the first embodiment of the present invention, and show a state in which the transfer direction of the transport container is switched to the straight traveling direction.
- 4A and 4B are diagrams illustrating a branching apparatus according to the first embodiment of the present invention, in a state where the transfer direction of the transport container is switched to the branching direction.
- the main transport path S that transports the transport container 10 in the straight traveling direction and the branch transport path B that transports the transport container 10 in the branch direction from the main transport path S intersect. It is arranged at the site.
- a plurality of transport rollers R1A and R2A are continuously arranged in the transport direction on both inner side surfaces of the frame 16 of the main transport path S and the branch transport path B.
- the transport rollers R1A and R2A are composed of a drive roller DR and a free roller FR that can freely rotate, and are in contact with the inner side in the width direction of the second guide rollers G3 and G4 disposed on the lower surface of the transport container 10. It is arranged.
- the second guide roller G3 on the lower surface of the conveyance container 10 is disposed outside the conveyance rollers R1A and R2A. , G4 are provided along the transfer direction to guide G4 in the transfer direction.
- the transport roller R2A located on the branch transport path B side of the main transport path S does not exist in the range intersecting with both the transport rollers R3A and R4A of the branch transport path B. Further, the transport roller R3A located on the main transport path S side of the branch transport path B does not exist in a range that intersects with both the transport rollers R1A and R2A of the main transport path S.
- the branching device 1A includes a switching guide 2A having a substantially triangular shape in top view that moves forward and backward (horizontal movement) in a direction crossing between the main transport path S and the branch transport path B by a drive source (not shown).
- the switching guide 2A is a linear first switching guide rail SG1 that abuts on a guide roller G2 disposed on the branch conveyance path B side of the first guide rollers G1 and G2 of the conveyance container 10 and guides it along the straight direction.
- an arcuate second switching guide rail BG1 that contacts the guide roller G1 disposed on the main conveyance path S side of the first guide rollers G1 and G2 and guides it along the branch direction.
- the first switching guide rail SG1 and the second switching guide rail BG1 are integrally configured so as to be the outer surfaces of the switching guide 2A.
- the operation of the branching apparatus 1A according to the first embodiment will be described with reference to FIGS. 3A, 3B, 4A, and 4B.
- the transport container 10 is moved straight on the main transport path S
- the upper surface of the transport container 10 is moved by moving the switching guide 2A from the main transport path S side to the branch transport path B side as shown in FIG. 3A.
- the branch path side guide roller G2 is guided to the first switching guide rail SG1.
- the distance between the centers of the first guide rollers G1 and G1 and G2 and G2 on the upper surface of the transport container 10 is L.
- the end of the guide rail TG1 at the intersection of the guide rails TG1 of the main transport path S and the branch transport path B is denoted by TG10, and the transport of the transport container 10 of the first switching rail SG1 is performed.
- SG10 be the end on the rear side.
- the distance S1 between these end portions TG10 and SG10 is S1 ⁇ L
- the transport container 10 is smoothly transferred by the other three guide rollers G3, G3, and G2 without colliding with the guide rail SG1.
- the dimension of the switching guide 2A is set large so that the position of the end SG10 of the first switching rail SG1 substantially coincides with the position of the end TG10 of the guide rail TG1. That's fine.
- the switching guide 2A is horizontally moved from the branch transfer path B side to the main transfer path S side.
- the main transport path guide roller G1 is guided by the second switching guide rail BG1. It is obvious that if the distance of the intermittent part B1 in FIG. 4A is B1 ⁇ L, or if the second switching guide rail BG1 is installed large, the same function as described above can be achieved.
- FIG. 5A and FIG. 5B are diagrams illustrating a branching apparatus according to the second embodiment of the present invention, in a state where the transfer direction of the transport container is switched to the straight traveling direction.
- 6A, 6B, and 6C are diagrams illustrating a branching device according to the second embodiment of the present invention, in which the transfer direction of the transport container is switched to the branching direction.
- the transport container 20 containing a plurality of semiconductor wafers D has the same structure as that of the first embodiment.
- a pair of first guide rollers G11 and G12 are supported on both sides of the rectangular flange 17 held at a constant height so as to be rotatable at predetermined intervals in the front and rear directions.
- a pair of second guide rollers G13 and G14 are also supported on the lower surface E of the transport container 20 on both sides in the transport direction at the same position as the first guide rollers G11 and G12, and can be rotated at predetermined intervals in the front and rear directions in the transport direction. It is supported by.
- Each of these guide rollers G11, G12, G13, and G14 includes a rotation axis RA (see FIG. 5B) extending in the vertical direction, and rotates around this rotation axis.
- the side surface of the flange 15 functions similarly to the guide rollers G11 and G12.
- a plurality of transport rollers R1B and R2B are continuously disposed on both inner side surfaces of the frame 18 of the main transport path S and the branch transport path B in the transport direction.
- the transport rollers R1B and R2B are composed of a drive roller DR and a free-rotating free roller FR, and are close to the outside in the width direction of the second guide rollers G13 and G14 disposed on the lower surface of the transport container 20. Arranged.
- the second guide roller on the lower surface of the conveyance container 20 is located inside the conveyance rollers R1B and R2B.
- Guide rails TG2 for guiding G13 and G14 in the transfer direction are provided along the transfer direction.
- the transport roller R2B located on the branch transport path B side of the main transport path S does not exist in the range intersecting with both the transport rollers R3B and R4B of the branch transport path B. Further, the transport roller R3B located on the main transport path S side of the branch transport path B does not exist in a range intersecting with both the transport rollers R1B and R2B of the main transport path S.
- the branching device 1B includes a switching guide 2B that moves forward and backward in a direction crossing between the main transport path S and the branch transport path B by a drive source (not shown).
- the switching guide 2B is in contact with the guide roller G12 disposed on the branch path side of the first guide rollers G11 and G12 on the upper surface T of the transport container 20, and guides along the straight traveling direction.
- an arcuate second switching guide rail BG2 that contacts the guide roller G11 disposed on the main transport path S side of the first guide rollers G11 and G12 and guides it along the branch direction.
- the first switching guide rail SG2 and the second switching guide rail BG2 are integrally configured so as to be the outer surfaces of the switching guide 2B.
- the operation of the branching apparatus 1B according to the second embodiment will be described with reference to FIGS. 5A, 5B, 6A, 6B, and 6C.
- the transport container 20 is moved straight on the main transport path S
- the upper surface of the transport container 20 is moved by moving the switching guide 2B from the main transport path S side to the branch transport path B side as shown in FIG. 5A.
- the branch path side guide roller G12 is guided to the first switching guide rail SG2.
- the switching guide 2B is moved from the branch transfer path B side to the main transfer path S side.
- the main transport path side guide roller G11 is guided by the second switching guide rail BG2. Note that, at the intersection, the straight and branching guide rails TG2 and TG2 may be extended to the intersecting position as shown in FIG. 6C.
- the first and second guide rollers disposed before and after the transport direction on the upper surface or the lower surface of the transport container may not be at the same position.
- the specification which has at least 1 each of the 1st guide roller in the width direction of a conveyance direction may be sufficient.
- the branching device of the present invention can be applied to a portion where the main transport path and the branch transport path merge.
- the transport containers can be continuously transported in a straight line or branching direction without being temporarily stopped.
- 1A, 1B ... branching device S ... main transport path (first transport path), B ... branch transport path (second transport path), R1A, R2A, R1B, R2B, R3A, R4A, R3B, R4B ... transport rollers, TG1, TG2 ... guide rail, D ... conveyed material, 10,20 ... conveying container, T ... top surface, E ... bottom surface, G1, G2, G11, G12 ... first guide roller (first guide part), G3, G4 G13, G14: second guide roller (second guide part), 2A, 2B ... switching guide, SG1, SG2 ... first switching guide rail, BG1, BG2: second switching guide rail, 15 ... flange (guide part), 14 ... lid, 141 ... lower side of the lid (guide part), 12 ... storage case, 121 ... lower back of the storage case
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Branching, Merging, And Special Transfer Between Conveyors (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
Provided is a branching device (1A) of a conveyor line that conveys a conveying container (10) configured to receive an object (D) to be conveyed. The branching device includes: first guide parts (G1, G2) installed on an upper surface of the conveying container; second guide parts installed on a lower surface of the conveying container; a plurality of conveying rollers (R1A-R4A) installed along both lateral sides in a conveying direction except for at a junction between a first conveying line (S) and a second conveying line (B) to move the conveying container; guide rails (TG1) installed along both lateral sides in the conveying direction except for at the junction and contacting the second guide parts to guide the second guide parts; and a horizontally movable switch guide (2A) installed at the upside of the junction and comprising a first switching guide rail (SG1) contacting the first guide parts to guide the conveying container along the first conveying line, and a second switching guide rail (BG1) contacting the first guide parts to guide the conveying container along the second conveying line.
Description
本発明は、分岐装置に関する。
本願は、2008年11月28日に、日本に出願された特願2008-305279号に基づき優先権を主張し、その内容をここに援用する。 The present invention relates to a branching device.
This application claims priority based on Japanese Patent Application No. 2008-305279 filed in Japan on November 28, 2008, the contents of which are incorporated herein by reference.
本願は、2008年11月28日に、日本に出願された特願2008-305279号に基づき優先権を主張し、その内容をここに援用する。 The present invention relates to a branching device.
This application claims priority based on Japanese Patent Application No. 2008-305279 filed in Japan on November 28, 2008, the contents of which are incorporated herein by reference.
ローラコンベア等の搬送路に沿って移送される搬送物の移送方向を分岐搬送路側に切換える分岐装置として、ターンテーブルが知られている(特許文献1参照)。
A turntable is known as a branching device that switches the transport direction of a transported object along a transport path such as a roller conveyor to the branch transport path side (see Patent Document 1).
ターンテーブルは、搬送路上で移送される搬送容器を分岐搬送路側に切換える際に、ターンテーブル上に搬送物を載置した状態で、旋回させる必要がある。このため、ターンテーブルの旋回時は、後続する搬送物の進行(搬送)が停止され搬送路上で停滞するので、搬送効率が低下する。
The turntable needs to be swung in a state where a transported object is placed on the turntable when the transport container transported on the transport path is switched to the branch transport path side. For this reason, at the time of turning of the turntable, the progress (conveyance) of the subsequent transported object is stopped and stagnated on the transport path, so that the transport efficiency is lowered.
本発明は、上述した事情に鑑みてなされたもので、搬送容器の流れを停滞させることなく円滑且つ確実に移送方向を変換することができる分岐装置を提供することを目的とする。
The present invention has been made in view of the above-described circumstances, and an object of the present invention is to provide a branching device that can smoothly and reliably change the transfer direction without stagnation of the flow of the transport container.
本発明に係る分岐装置では、上記課題を解決するために以下の手段を採用する。
本発明は、搬送物を収容する搬送容器を搬送する搬送路の分岐装置であって、搬送容器の上面の搬送方向と直交する幅方向両側に配設された第一ガイド部と、搬送容器の下面の搬送方向と直交する幅方向両側に配設された第二ガイド部と、搬送路のうち第一搬送路と第二搬送路の交差部分を除く搬送方向の幅方向両側に沿って配設されて搬送容器の下面を支持して移送する複数の搬送ローラと、搬送路のうち交差部分を除く搬送方向の幅方向両側に沿って配設されて第二ガイド部に当接して案内するガイドレールと、第一ガイド部のうち第二搬送路側に配設されたものに当接して搬送容器を第一搬送路に沿って案内する第一切換ガイドレール及び第一ガイド部のうち第一搬送路側に配設されたものに当接して搬送容器を第二搬送路に沿って案内する第二切換ガイドレールを有すると共に交差部分の上方において水平移動可能に配設された切換ガイドと、を備える。 The branching apparatus according to the present invention employs the following means in order to solve the above problems.
The present invention is a branch device for a transport path for transporting a transport container that contains a transport object, and includes a first guide portion disposed on both sides in the width direction perpendicular to the transport direction on the top surface of the transport container, A second guide portion disposed on both sides in the width direction orthogonal to the transport direction of the lower surface, and disposed along both sides in the width direction of the transport direction excluding the intersection of the first transport path and the second transport path in the transport path. A plurality of transport rollers that support and transport the lower surface of the transport container, and guides that are disposed along both sides of the transport path in the width direction of the transport direction excluding the intersecting portion and abut against the second guide portion The first transfer guide rail and the first guide part of the first guide part that contact the rail and the first guide part arranged on the second transfer path side to guide the transfer container along the first transfer path A transport container along the second transport path in contact with the one arranged on the road side A switching guide which is horizontally movably disposed above the intersection and having a second switching guide rails comprising a.
本発明は、搬送物を収容する搬送容器を搬送する搬送路の分岐装置であって、搬送容器の上面の搬送方向と直交する幅方向両側に配設された第一ガイド部と、搬送容器の下面の搬送方向と直交する幅方向両側に配設された第二ガイド部と、搬送路のうち第一搬送路と第二搬送路の交差部分を除く搬送方向の幅方向両側に沿って配設されて搬送容器の下面を支持して移送する複数の搬送ローラと、搬送路のうち交差部分を除く搬送方向の幅方向両側に沿って配設されて第二ガイド部に当接して案内するガイドレールと、第一ガイド部のうち第二搬送路側に配設されたものに当接して搬送容器を第一搬送路に沿って案内する第一切換ガイドレール及び第一ガイド部のうち第一搬送路側に配設されたものに当接して搬送容器を第二搬送路に沿って案内する第二切換ガイドレールを有すると共に交差部分の上方において水平移動可能に配設された切換ガイドと、を備える。 The branching apparatus according to the present invention employs the following means in order to solve the above problems.
The present invention is a branch device for a transport path for transporting a transport container that contains a transport object, and includes a first guide portion disposed on both sides in the width direction perpendicular to the transport direction on the top surface of the transport container, A second guide portion disposed on both sides in the width direction orthogonal to the transport direction of the lower surface, and disposed along both sides in the width direction of the transport direction excluding the intersection of the first transport path and the second transport path in the transport path. A plurality of transport rollers that support and transport the lower surface of the transport container, and guides that are disposed along both sides of the transport path in the width direction of the transport direction excluding the intersecting portion and abut against the second guide portion The first transfer guide rail and the first guide part of the first guide part that contact the rail and the first guide part arranged on the second transfer path side to guide the transfer container along the first transfer path A transport container along the second transport path in contact with the one arranged on the road side A switching guide which is horizontally movably disposed above the intersection and having a second switching guide rails comprising a.
また、ガイドレールは、搬送ローラよりも、搬送路の搬送方向の幅方向外側に配設されてもよい。
Further, the guide rail may be disposed on the outer side in the width direction of the transport path in the transport direction than the transport roller.
また、搬送ローラは、ガイドレールよりも、搬送路の搬送方向の幅方向外側に配設されてもよい。
In addition, the transport roller may be disposed on the outer side in the width direction of the transport path in the transport direction than the guide rail.
また、第一ガイド部には、鉛直方向に延びる回転軸を備えるガイドローラを有してもよい。
Further, the first guide portion may have a guide roller having a rotation shaft extending in the vertical direction.
また、第二ガイド部には、鉛直方向に延びる回転軸を備えるガイドローラを有してもよい。
Further, the second guide portion may have a guide roller having a rotation shaft extending in the vertical direction.
また、第一ガイド部は、平板状をなすフランジの側面であってもよい。
The first guide portion may be a side surface of a flat flange.
また、第二ガイド部は、搬送容器の側面部であってもよい。
The second guide portion may be a side surface portion of the transport container.
本発明によれば、切換ガイドの位置を移動させるだけで、搬送容器の搬送方向(直進と分岐)を簡単かつ確実に切り替えることができる。また、複数の搬送容器が連続的に搬送されてきた場合であっても、これら複数の搬送容器を一旦停止させることなく、そのまま連続的に直進或いは分岐させることができる。
According to the present invention, it is possible to easily and reliably switch the transport direction (straight and branch) of the transport container simply by moving the position of the switching guide. Further, even when a plurality of transport containers are continuously transported, the plurality of transport containers can be continuously straightened or branched without being temporarily stopped.
以下、本発明に係る分岐装置の実施形態について図面を参照して説明する。
図1は、第一実施形態に係る分岐装置の概略構成を示す斜視図である。
図2は、第一実施形態に係る分岐装置で使用する搬送容器の斜視図である。 Hereinafter, embodiments of a branching apparatus according to the present invention will be described with reference to the drawings.
FIG. 1 is a perspective view showing a schematic configuration of a branching apparatus according to the first embodiment.
FIG. 2 is a perspective view of a transport container used in the branching apparatus according to the first embodiment.
図1は、第一実施形態に係る分岐装置の概略構成を示す斜視図である。
図2は、第一実施形態に係る分岐装置で使用する搬送容器の斜視図である。 Hereinafter, embodiments of a branching apparatus according to the present invention will be described with reference to the drawings.
FIG. 1 is a perspective view showing a schematic configuration of a branching apparatus according to the first embodiment.
FIG. 2 is a perspective view of a transport container used in the branching apparatus according to the first embodiment.
搬送容器10は、例えば複数の円板状半導体ウェハーD(搬送物)を複数段に整列収容して搬送する容器である。この搬送容器10は、両側内部側壁に半導体ウェハーDの両側を係止する複数段の係止溝を形成した収容ケース12と、この収容ケース12の開口部13を密封閉塞する蓋体14とから構成されている。
The transfer container 10 is, for example, a container that transfers a plurality of disc-shaped semiconductor wafers D (transferred objects) arranged and accommodated in a plurality of stages. The transfer container 10 includes a storage case 12 in which a plurality of locking grooves for locking both sides of the semiconductor wafer D are formed on the inner sidewalls on both sides, and a lid body 14 that seals and closes the opening 13 of the storage case 12. It is configured.
複数の半導体ウェハーDを収容した搬送容器10は、閉塞された開口部13を横に向けて後述する主搬送路Sまたは分岐搬送路Bを矢印方向に移送される。
搬送容器10の上面Tには、支柱により一定高さに保持された幅方向に延びる矩形状のフランジ15の両側にそれぞれ一対の第1ガイドローラG1,G2が搬送方向前後に所定間隔で回転自在に支持されている。また、搬送容器10の下面Eにも、搬送方向両側に一対の第2ガイドローラG3,G4が第1ガイドローラG1,G2と同じ位置に支持されており、搬送方向前後に所定間隔で回転自在に支持されている(図3A、図3B、図4A及び図4B参照)。これらのガイドローラG1,G2,G3,G4は、いずれも鉛直方向に延びる回転軸RA(図3B参照)を備え、この回転軸回りに回転する。 Thetransfer container 10 containing a plurality of semiconductor wafers D is transferred in the direction of the arrow along a main transfer path S or a branch transfer path B described later with the closed opening 13 facing sideways.
On the upper surface T of thetransport container 10, a pair of first guide rollers G <b> 1 and G <b> 2 can be rotated at predetermined intervals in the front and rear directions in the transport direction on both sides of a rectangular flange 15 extending in the width direction held at a constant height by a support column. It is supported by. A pair of second guide rollers G3 and G4 are also supported on the lower surface E of the transport container 10 on both sides in the transport direction at the same positions as the first guide rollers G1 and G2, and are rotatable at predetermined intervals in the front and rear directions in the transport direction. (See FIGS. 3A, 3B, 4A and 4B). Each of these guide rollers G1, G2, G3, and G4 includes a rotation axis RA (see FIG. 3B) extending in the vertical direction, and rotates around the rotation axis.
搬送容器10の上面Tには、支柱により一定高さに保持された幅方向に延びる矩形状のフランジ15の両側にそれぞれ一対の第1ガイドローラG1,G2が搬送方向前後に所定間隔で回転自在に支持されている。また、搬送容器10の下面Eにも、搬送方向両側に一対の第2ガイドローラG3,G4が第1ガイドローラG1,G2と同じ位置に支持されており、搬送方向前後に所定間隔で回転自在に支持されている(図3A、図3B、図4A及び図4B参照)。これらのガイドローラG1,G2,G3,G4は、いずれも鉛直方向に延びる回転軸RA(図3B参照)を備え、この回転軸回りに回転する。 The
On the upper surface T of the
第1ガイドローラG1,G2がローラでなく、平板状をなすフランジ15の側面であってもよい。また、第2ガイドローラG3,G4がローラでなく、搬送容器10の側面部(蓋体14の側面下部141若しくはガイドローラG4近傍となる収容ケース12の背面下部121)であってもよい。すなわち、第1実施形態において、ガイドローラG1,G2又はG3,G4がない場合は、フランジ15の側面や搬送容器10の側面部が上記ガイドローラG1~G4と同様に機能する。
The first guide rollers G1 and G2 may be the side surfaces of the flange 15 having a flat plate shape instead of the rollers. Further, the second guide rollers G3 and G4 may not be rollers, but may be side surfaces of the transport container 10 (the lower side surface 141 of the lid body 14 or the lower back surface 121 of the housing case 12 near the guide roller G4). That is, in the first embodiment, when there is no guide roller G1, G2, or G3, G4, the side surface of the flange 15 and the side surface portion of the transport container 10 function in the same manner as the guide rollers G1 to G4.
図3A及び図3Bは、本発明の第一実施形態に係る分岐装置であって、搬送容器の移送方向を直進方向に切換えた状態を示す図である。
図4A及び図4Bは、本発明の第一実施形態に係る分岐装置であって、搬送容器の移送方向を分岐方向に切換えた状態を示す図である。 3A and 3B are branching devices according to the first embodiment of the present invention, and show a state in which the transfer direction of the transport container is switched to the straight traveling direction.
4A and 4B are diagrams illustrating a branching apparatus according to the first embodiment of the present invention, in a state where the transfer direction of the transport container is switched to the branching direction.
図4A及び図4Bは、本発明の第一実施形態に係る分岐装置であって、搬送容器の移送方向を分岐方向に切換えた状態を示す図である。 3A and 3B are branching devices according to the first embodiment of the present invention, and show a state in which the transfer direction of the transport container is switched to the straight traveling direction.
4A and 4B are diagrams illustrating a branching apparatus according to the first embodiment of the present invention, in a state where the transfer direction of the transport container is switched to the branching direction.
図3A、図4Aにおいて、分岐装置1Aは、搬送容器10を直進方向に搬送する主搬送路Sと、この主搬送路Sから搬送容器10を分岐方向に搬送する分岐搬送路Bとが交差する部位に配設されている。
3A and 4A, in the branching apparatus 1A, the main transport path S that transports the transport container 10 in the straight traveling direction and the branch transport path B that transports the transport container 10 in the branch direction from the main transport path S intersect. It is arranged at the site.
主搬送路S並びに分岐搬送路Bのフレーム16の両内側面には、複数の搬送ローラR1A,R2Aが搬送方向に向けて連続的に配設されている。搬送ローラR1A,R2Aは、駆動ローラDRと自由回転可能なフリーローラFRとから構成されており、搬送容器10の下面に配設される第2ガイドローラG3,G4の幅方向内側に当接するように配設されている。
A plurality of transport rollers R1A and R2A are continuously arranged in the transport direction on both inner side surfaces of the frame 16 of the main transport path S and the branch transport path B. The transport rollers R1A and R2A are composed of a drive roller DR and a free roller FR that can freely rotate, and are in contact with the inner side in the width direction of the second guide rollers G3 and G4 disposed on the lower surface of the transport container 10. It is arranged.
また、主搬送路Sと分岐搬送路Bが交差する分岐領域BA1(二点鎖線で囲まれる領域)以外の領域において、搬送ローラR1A,R2Aの外側には搬送容器10下面の第2ガイドローラG3,G4を移送方向に案内するガイドレールTG1が移送方向に沿って設けられている。
In areas other than the branch area BA1 (area surrounded by the two-dot chain line) where the main conveyance path S and the branch conveyance path B intersect, the second guide roller G3 on the lower surface of the conveyance container 10 is disposed outside the conveyance rollers R1A and R2A. , G4 are provided along the transfer direction to guide G4 in the transfer direction.
分岐領域BA1において、主搬送路Sの分岐搬送路B側に位置する搬送ローラR2Aは、分岐搬送路Bの両搬送ローラR3A,R4Aと交差する範囲には存在しない。また、分岐搬送路Bの主搬送路S側に位置する搬送ローラR3Aは、主搬送路Sの両搬送ローラR1A,R2Aと交差する範囲には存在しない。
In the branch area BA1, the transport roller R2A located on the branch transport path B side of the main transport path S does not exist in the range intersecting with both the transport rollers R3A and R4A of the branch transport path B. Further, the transport roller R3A located on the main transport path S side of the branch transport path B does not exist in a range that intersects with both the transport rollers R1A and R2A of the main transport path S.
分岐装置1Aは、不図示の駆動源にて主搬送路Sと分岐搬送路Bの間を横切る方向に進退移動(水平移動)する、上面視略三角形の切換ガイド2Aを備えている。
切換ガイド2Aは、搬送容器10の第1ガイドローラG1,G2のうち分岐搬送路B側に配設したガイドローラG2に当接して直進方向に沿って案内する直線状の第1切換ガイドレールSG1と、第1ガイドローラG1,G2のうち主搬送路S側に配設したガイドローラG1に当接して分岐方向に沿って案内する円弧状の第2切換ガイドレールBG1と、を備えている。そして、第1切換ガイドレールSG1と第2切換ガイドレールBG1がそれぞれ切換ガイド2Aの外側面となるように一体的に構成されている。 Thebranching device 1A includes a switching guide 2A having a substantially triangular shape in top view that moves forward and backward (horizontal movement) in a direction crossing between the main transport path S and the branch transport path B by a drive source (not shown).
Theswitching guide 2A is a linear first switching guide rail SG1 that abuts on a guide roller G2 disposed on the branch conveyance path B side of the first guide rollers G1 and G2 of the conveyance container 10 and guides it along the straight direction. And an arcuate second switching guide rail BG1 that contacts the guide roller G1 disposed on the main conveyance path S side of the first guide rollers G1 and G2 and guides it along the branch direction. The first switching guide rail SG1 and the second switching guide rail BG1 are integrally configured so as to be the outer surfaces of the switching guide 2A.
切換ガイド2Aは、搬送容器10の第1ガイドローラG1,G2のうち分岐搬送路B側に配設したガイドローラG2に当接して直進方向に沿って案内する直線状の第1切換ガイドレールSG1と、第1ガイドローラG1,G2のうち主搬送路S側に配設したガイドローラG1に当接して分岐方向に沿って案内する円弧状の第2切換ガイドレールBG1と、を備えている。そして、第1切換ガイドレールSG1と第2切換ガイドレールBG1がそれぞれ切換ガイド2Aの外側面となるように一体的に構成されている。 The
The
次に、第一実施形態に係る分岐装置1Aの作用に付き、図3A、図3B、図4A及び図4Bを参照して説明する。
先ず、搬送容器10を主搬送路S上で直進移送する際は、図3Aに示すように、切換ガイド2Aを主搬送路S側から分岐搬送路B側に移動させることで、搬送容器10上面Tの第1ガイドローラG1,G2のうち、分岐路側ガイドローラG2が第1切換ガイドレールSG1に案内される。 Next, the operation of the branchingapparatus 1A according to the first embodiment will be described with reference to FIGS. 3A, 3B, 4A, and 4B.
First, when thetransport container 10 is moved straight on the main transport path S, the upper surface of the transport container 10 is moved by moving the switching guide 2A from the main transport path S side to the branch transport path B side as shown in FIG. 3A. Of the T first guide rollers G1, G2, the branch path side guide roller G2 is guided to the first switching guide rail SG1.
先ず、搬送容器10を主搬送路S上で直進移送する際は、図3Aに示すように、切換ガイド2Aを主搬送路S側から分岐搬送路B側に移動させることで、搬送容器10上面Tの第1ガイドローラG1,G2のうち、分岐路側ガイドローラG2が第1切換ガイドレールSG1に案内される。 Next, the operation of the branching
First, when the
すなわち、図3Bに示すように、搬送容器10が分岐領域BA1において直進する場合は、搬送容器10の上面Tの分岐路側ガイドローラG2が第1切換ガイドレールSG1に案内される。そのため、搬送容器10の分岐路側への傾倒が防止され、搬送容器10は水平姿勢を維持した状態で搬送ローラR1Aの駆動力により進行方向に沿って円滑に移送される。
That is, as shown in FIG. 3B, when the transport container 10 goes straight in the branch area BA1, the branch path side guide roller G2 on the upper surface T of the transport container 10 is guided to the first switching guide rail SG1. Therefore, the conveyance container 10 is prevented from tilting toward the branch path, and the conveyance container 10 is smoothly transferred along the traveling direction by the driving force of the conveyance roller R1A while maintaining the horizontal posture.
ここで、図1に示すように搬送容器10の上面の第1ガイドローラG1とG1、G2とG2の中心間の距離をともにLとする。また、図3Aに示すように、主搬送路S及び分岐搬送路BのガイドレールTG1同士の交差部におけるガイドレールTG1の端部を符号TG10とし、第1切替レールSG1の、搬送容器10の移送方向後方側の端部をSG10とする。この時、これら端部TG10,SG10間の距離S1がS1<Lであれば、搬送前後方向に2つのガイドローラG2、G2が存在する場合には、一方のG2が間欠部を通過する際にも、搬送容器10はガイドレールSG1に衝突することなく、他の3つのガイドローラG3,G3,G2によって円滑に移送される。
また、ガイドローラG2が1つの場合には、第1切替レールSG1の端部SG10の位置が、ガイドレールTG1の端部TG10の位置にほぼ一致するように、切換ガイド2Aの寸法を大きく設定すればよい。 Here, as shown in FIG. 1, the distance between the centers of the first guide rollers G1 and G1 and G2 and G2 on the upper surface of thetransport container 10 is L. Further, as shown in FIG. 3A, the end of the guide rail TG1 at the intersection of the guide rails TG1 of the main transport path S and the branch transport path B is denoted by TG10, and the transport of the transport container 10 of the first switching rail SG1 is performed. Let SG10 be the end on the rear side. At this time, if the distance S1 between these end portions TG10 and SG10 is S1 <L, when two guide rollers G2 and G2 exist in the front-rear direction of conveyance, when one G2 passes through the intermittent portion, However, the transport container 10 is smoothly transferred by the other three guide rollers G3, G3, and G2 without colliding with the guide rail SG1.
Further, when there is one guide roller G2, the dimension of the switchingguide 2A is set large so that the position of the end SG10 of the first switching rail SG1 substantially coincides with the position of the end TG10 of the guide rail TG1. That's fine.
また、ガイドローラG2が1つの場合には、第1切替レールSG1の端部SG10の位置が、ガイドレールTG1の端部TG10の位置にほぼ一致するように、切換ガイド2Aの寸法を大きく設定すればよい。 Here, as shown in FIG. 1, the distance between the centers of the first guide rollers G1 and G1 and G2 and G2 on the upper surface of the
Further, when there is one guide roller G2, the dimension of the switching
また、図4Aに示すように、搬送容器10が主搬送路Sから分岐搬送路Bに分岐移送する場合は、切換ガイド2Aを分岐搬送路B側から主搬送路S側に水平移動させる。その結果、搬送容器10上面の第1ガイドローラG1,G2のうち、主搬送路ガイドローラG1が第2切換ガイドレールBG1によって案内される。
なお、図4Aにおける間欠部B1の距離がB1<Lとなるようにすれば、又は第2切換ガイドレールBG1を大きく設置すれば、前述と同様の機能を果たせることは明らかである。 As shown in FIG. 4A, when thetransfer container 10 is branched and transferred from the main transfer path S to the branch transfer path B, the switching guide 2A is horizontally moved from the branch transfer path B side to the main transfer path S side. As a result, of the first guide rollers G1, G2 on the upper surface of the transport container 10, the main transport path guide roller G1 is guided by the second switching guide rail BG1.
It is obvious that if the distance of the intermittent part B1 in FIG. 4A is B1 <L, or if the second switching guide rail BG1 is installed large, the same function as described above can be achieved.
なお、図4Aにおける間欠部B1の距離がB1<Lとなるようにすれば、又は第2切換ガイドレールBG1を大きく設置すれば、前述と同様の機能を果たせることは明らかである。 As shown in FIG. 4A, when the
It is obvious that if the distance of the intermittent part B1 in FIG. 4A is B1 <L, or if the second switching guide rail BG1 is installed large, the same function as described above can be achieved.
すなわち、図4Bに示すように、搬送容器10が分岐領域BA1において分岐搬送路B側に分岐する場合は、搬送容器10の上面Tの主搬送路ガイドローラG1が第2切換ガイドレールBG1に案内される。そのため、搬送容器10の主搬送路側への傾倒が防止され、搬送容器10は水平姿勢を維持した状態で搬送ローラR4A側の駆動ローラDRにより分岐搬送路Bの進行方向に沿って円滑に移送される。
That is, as shown in FIG. 4B, when the transport container 10 branches to the branch transport path B side in the branch area BA1, the main transport path guide roller G1 on the upper surface T of the transport container 10 guides to the second switching guide rail BG1. Is done. Therefore, the transport container 10 is prevented from tilting toward the main transport path, and the transport container 10 is smoothly transferred along the traveling direction of the branch transport path B by the driving roller DR on the transport roller R4A side while maintaining the horizontal posture. The
このように、切換ガイド2Aを水平に移動させるだけで、搬送容器10の直進と分岐方向への移動を簡単かつ確実に切り替えることができる。したがって、複数の搬送容器10が連続的に搬送されてきた場合であっても、これら複数の搬送容器10を一旦停止させることなく、そのまま連続的に直進或いは分岐方向に移動させることができる。
In this way, it is possible to easily and reliably switch between the straight movement of the transport container 10 and the movement in the branching direction only by moving the switching guide 2A horizontally. Accordingly, even when the plurality of transport containers 10 are continuously transported, the plurality of transport containers 10 can be continuously moved in a straight line or branching direction without being temporarily stopped.
次に、本発明の第二実施形態に係る分岐装置に付き、図5A、図5B、図6A、図6B及び図6Cを参照して説明する。
なお、第一実施形態と同一構成部材については、同一符号を付して説明を省略する。
図5A、図5Bは、本発明の第二実施形態に係る分岐装置であって、搬送容器の移送方向を直進方向に切換えた状態を示す図である。
図6A、図6B及び図6Cは、本発明の第二実施形態に係る分岐装置であって、搬送容器の移送方向を分岐方向に切換えた状態を示す図である。 Next, it attaches to the branch apparatus which concerns on 2nd embodiment of this invention, and demonstrates with reference to FIG. 5A, FIG. 5B, FIG. 6A, FIG. 6B, and FIG.
In addition, about the same component as 1st embodiment, the same code | symbol is attached | subjected and description is abbreviate | omitted.
FIG. 5A and FIG. 5B are diagrams illustrating a branching apparatus according to the second embodiment of the present invention, in a state where the transfer direction of the transport container is switched to the straight traveling direction.
6A, 6B, and 6C are diagrams illustrating a branching device according to the second embodiment of the present invention, in which the transfer direction of the transport container is switched to the branching direction.
なお、第一実施形態と同一構成部材については、同一符号を付して説明を省略する。
図5A、図5Bは、本発明の第二実施形態に係る分岐装置であって、搬送容器の移送方向を直進方向に切換えた状態を示す図である。
図6A、図6B及び図6Cは、本発明の第二実施形態に係る分岐装置であって、搬送容器の移送方向を分岐方向に切換えた状態を示す図である。 Next, it attaches to the branch apparatus which concerns on 2nd embodiment of this invention, and demonstrates with reference to FIG. 5A, FIG. 5B, FIG. 6A, FIG. 6B, and FIG.
In addition, about the same component as 1st embodiment, the same code | symbol is attached | subjected and description is abbreviate | omitted.
FIG. 5A and FIG. 5B are diagrams illustrating a branching apparatus according to the second embodiment of the present invention, in a state where the transfer direction of the transport container is switched to the straight traveling direction.
6A, 6B, and 6C are diagrams illustrating a branching device according to the second embodiment of the present invention, in which the transfer direction of the transport container is switched to the branching direction.
図5A、図5B、図6A、図6B及び図6Cにおいて、複数の半導体ウェハーDを収容した搬送容器20は、容器本体は第一実施形態と同一構成となっている。
搬送容器20の上面Tには、一定高さに保持された矩形状フランジ17の両側にそれぞれ一対の第1ガイドローラG11,G12が搬送方向前後に所定間隔で回転自在に支持されている。また、搬送容器20の下面Eにも、搬送方向両側に一対の第2ガイドローラG13,G14が第1ガイドローラG11,G12と同じ位置に支持されており、搬送方向前後に所定間隔で回転自在に支持されている。これらのガイドローラG11,G12,G13,G14は、いずれも鉛直方向に延びる回転軸RA(図5B参照)を備え、この回転軸回りに回転する。
なお、第2実施形態において、ガイドローラG11,G12がない場合には、フランジ15の側面が上記ガイドローラG11,G12と同様に機能する。 5A, FIG. 5B, FIG. 6A, FIG. 6B and FIG. 6C, thetransport container 20 containing a plurality of semiconductor wafers D has the same structure as that of the first embodiment.
On the upper surface T of thetransport container 20, a pair of first guide rollers G11 and G12 are supported on both sides of the rectangular flange 17 held at a constant height so as to be rotatable at predetermined intervals in the front and rear directions. A pair of second guide rollers G13 and G14 are also supported on the lower surface E of the transport container 20 on both sides in the transport direction at the same position as the first guide rollers G11 and G12, and can be rotated at predetermined intervals in the front and rear directions in the transport direction. It is supported by. Each of these guide rollers G11, G12, G13, and G14 includes a rotation axis RA (see FIG. 5B) extending in the vertical direction, and rotates around this rotation axis.
In the second embodiment, when the guide rollers G11 and G12 are not provided, the side surface of theflange 15 functions similarly to the guide rollers G11 and G12.
搬送容器20の上面Tには、一定高さに保持された矩形状フランジ17の両側にそれぞれ一対の第1ガイドローラG11,G12が搬送方向前後に所定間隔で回転自在に支持されている。また、搬送容器20の下面Eにも、搬送方向両側に一対の第2ガイドローラG13,G14が第1ガイドローラG11,G12と同じ位置に支持されており、搬送方向前後に所定間隔で回転自在に支持されている。これらのガイドローラG11,G12,G13,G14は、いずれも鉛直方向に延びる回転軸RA(図5B参照)を備え、この回転軸回りに回転する。
なお、第2実施形態において、ガイドローラG11,G12がない場合には、フランジ15の側面が上記ガイドローラG11,G12と同様に機能する。 5A, FIG. 5B, FIG. 6A, FIG. 6B and FIG. 6C, the
On the upper surface T of the
In the second embodiment, when the guide rollers G11 and G12 are not provided, the side surface of the
一方、主搬送路S並びに分岐搬送路Bのフレーム18の両内側面には、複数の搬送ローラR1B,R2Bが搬送方向に向けて連続的に配設されている。この搬送ローラR1B,R2Bは、駆動ローラDRと自由回転可能なフリーローラFRとから構成されており、搬送容器20の下面に配設される第2ガイドローラG13,G14の幅方向外側に近接して配設されている。
On the other hand, a plurality of transport rollers R1B and R2B are continuously disposed on both inner side surfaces of the frame 18 of the main transport path S and the branch transport path B in the transport direction. The transport rollers R1B and R2B are composed of a drive roller DR and a free-rotating free roller FR, and are close to the outside in the width direction of the second guide rollers G13 and G14 disposed on the lower surface of the transport container 20. Arranged.
また、主搬送路Sと分岐搬送路Bが交差する分岐領域BA2(二点鎖線で囲まれる領域)以外の領域において、搬送ローラR1B,R2Bの内側には搬送容器20の下面の第2ガイドローラG13,G14を移送方向に案内するガイドレールTG2が移送方向に沿って設けられている。
In areas other than the branch area BA2 (area surrounded by the two-dot chain line) where the main conveyance path S and the branch conveyance path B intersect, the second guide roller on the lower surface of the conveyance container 20 is located inside the conveyance rollers R1B and R2B. Guide rails TG2 for guiding G13 and G14 in the transfer direction are provided along the transfer direction.
分岐領域BA2において、主搬送路Sの分岐搬送路B側に位置する搬送ローラR2Bは、分岐搬送路Bの両搬送ローラR3B,R4Bと交差する範囲には存在しない。また、分岐搬送路Bの主搬送路S側に位置する搬送ローラR3Bは、主搬送路Sの両搬送ローラR1B,R2Bと交差する範囲には存在しない。
In the branch area BA2, the transport roller R2B located on the branch transport path B side of the main transport path S does not exist in the range intersecting with both the transport rollers R3B and R4B of the branch transport path B. Further, the transport roller R3B located on the main transport path S side of the branch transport path B does not exist in a range intersecting with both the transport rollers R1B and R2B of the main transport path S.
分岐装置1Bは、不図示の駆動源にて主搬送路Sと分岐搬送路Bの間で横切る方向に進退移動する切換ガイド2Bを備えている。
切換ガイド2Bは、搬送容器20の上面Tの第1ガイドローラG11,G12のうち分岐路側に配設したガイドローラG12に当接して直進方向に沿って案内する直線状の第1切換ガイドレールSG2と、第1ガイドローラG11,G12のうち主搬送路S側に配設したガイドローラG11に当接して分岐方向に沿って案内する円弧状の第2切換ガイドレールBG2と、を備えている。そして、第1切換ガイドレールSG2と第2切換ガイドレールBG2がそれぞれ切換ガイド2Bの外側面となるように一体的に構成されている。 The branchingdevice 1B includes a switching guide 2B that moves forward and backward in a direction crossing between the main transport path S and the branch transport path B by a drive source (not shown).
The switchingguide 2B is in contact with the guide roller G12 disposed on the branch path side of the first guide rollers G11 and G12 on the upper surface T of the transport container 20, and guides along the straight traveling direction. And an arcuate second switching guide rail BG2 that contacts the guide roller G11 disposed on the main transport path S side of the first guide rollers G11 and G12 and guides it along the branch direction. The first switching guide rail SG2 and the second switching guide rail BG2 are integrally configured so as to be the outer surfaces of the switching guide 2B.
切換ガイド2Bは、搬送容器20の上面Tの第1ガイドローラG11,G12のうち分岐路側に配設したガイドローラG12に当接して直進方向に沿って案内する直線状の第1切換ガイドレールSG2と、第1ガイドローラG11,G12のうち主搬送路S側に配設したガイドローラG11に当接して分岐方向に沿って案内する円弧状の第2切換ガイドレールBG2と、を備えている。そして、第1切換ガイドレールSG2と第2切換ガイドレールBG2がそれぞれ切換ガイド2Bの外側面となるように一体的に構成されている。 The branching
The switching
次に、第二実施形態に係る分岐装置1Bの作用に付き、図5A、図5B、図6A、図6B及び図6Cを参照して説明する。
先ず、搬送容器20を主搬送路S上で直進移送する際は、図5Aに示すように、切換ガイド2Bを主搬送路S側から分岐搬送路B側に移動させることで、搬送容器20上面Tの第1ガイドローラG11,G12の内、分岐路側ガイドローラG12が第1切換ガイドレールSG2に案内される。 Next, the operation of the branchingapparatus 1B according to the second embodiment will be described with reference to FIGS. 5A, 5B, 6A, 6B, and 6C.
First, when thetransport container 20 is moved straight on the main transport path S, the upper surface of the transport container 20 is moved by moving the switching guide 2B from the main transport path S side to the branch transport path B side as shown in FIG. 5A. Of the T first guide rollers G11 and G12, the branch path side guide roller G12 is guided to the first switching guide rail SG2.
先ず、搬送容器20を主搬送路S上で直進移送する際は、図5Aに示すように、切換ガイド2Bを主搬送路S側から分岐搬送路B側に移動させることで、搬送容器20上面Tの第1ガイドローラG11,G12の内、分岐路側ガイドローラG12が第1切換ガイドレールSG2に案内される。 Next, the operation of the branching
First, when the
すなわち、図5Bに示すように、搬送容器20が分岐領域BA2において直進する場合は、搬送容器20の上面Tの分岐路側ガイドローラG12が第1切換ガイドレールSG2に案内される。そのため、搬送容器20が分岐搬送路B側へ傾倒するのが防止され、搬送容器10は水平姿勢を維持した状態で搬送ローラR1Bの駆動力により進行方向に沿って円滑に移送される。
That is, as shown in FIG. 5B, when the transport container 20 goes straight in the branch area BA2, the branch path side guide roller G12 on the upper surface T of the transport container 20 is guided to the first switching guide rail SG2. Therefore, the conveyance container 20 is prevented from tilting toward the branch conveyance path B, and the conveyance container 10 is smoothly transferred along the traveling direction by the driving force of the conveyance roller R1B while maintaining the horizontal posture.
また、図6Aに示すように、搬送容器20が主搬送路Sから分岐搬送路Bに分岐移送する場合は、切換ガイド2Bを分岐搬送路B側から主搬送路S側に移動させることで、搬送容器10の上面の第1ガイドローラG11,G12のうち、主搬送路側ガイドローラG11が第2切換ガイドレールBG2によって案内される。
なお、交差部においては、直進用と分岐用のガイドレールTG2,TG2は、図6Cに示すように交差する位置まで延長して敷設してもよい。 Further, as shown in FIG. 6A, when thetransfer container 20 is branched and transferred from the main transfer path S to the branch transfer path B, the switching guide 2B is moved from the branch transfer path B side to the main transfer path S side. Of the first guide rollers G11 and G12 on the upper surface of the transport container 10, the main transport path side guide roller G11 is guided by the second switching guide rail BG2.
Note that, at the intersection, the straight and branching guide rails TG2 and TG2 may be extended to the intersecting position as shown in FIG. 6C.
なお、交差部においては、直進用と分岐用のガイドレールTG2,TG2は、図6Cに示すように交差する位置まで延長して敷設してもよい。 Further, as shown in FIG. 6A, when the
Note that, at the intersection, the straight and branching guide rails TG2 and TG2 may be extended to the intersecting position as shown in FIG. 6C.
すなわち、図6Bに示すように、搬送容器20が分岐領域BA2において分岐搬送路B側に搬送される場合は、搬送容器20の上面Tの主搬送路側ガイドローラG1が第2切換ガイドレールBG2に案内される。そのため、搬送容器10の主搬送路側への傾倒が防止され、搬送容器10は水平姿勢を維持した状態で搬送ローラR4B側の駆動ローラDRにより分岐搬送路Bの進行方向に沿って円滑に移送される。
That is, as shown in FIG. 6B, when the transport container 20 is transported to the branch transport path B side in the branch area BA2, the main transport path side guide roller G1 on the upper surface T of the transport container 20 is moved to the second switching guide rail BG2. Guided. Therefore, the transport container 10 is prevented from tilting toward the main transport path, and the transport container 10 is smoothly transferred along the traveling direction of the branch transport path B by the driving roller DR on the transport roller R4B side while maintaining the horizontal posture. The
このように、切換ガイド2Bを移動させるだけで、搬送容器20の直進と分岐方向への移動を簡単かつ確実に切り替えることができる。したがって、複数の搬送容器20が連続的に搬送されてきた場合であっても、これら複数の搬送容器20を一旦停止は勿論、減速させることなく、そのまま連続的に直進或いは分岐方向に移動させることができる。
付随する効果としては、搬送容器を分岐カーブ内側に傾斜させるので、容器内の半導体ウエハ等の物品が遠心力による位置ずれを生じにくいことも挙げられる。 In this way, it is possible to easily and surely switch between the straight movement and the movement in the branching direction of thetransport container 20 only by moving the switching guide 2B. Therefore, even when the plurality of transport containers 20 are continuously transported, the transport containers 20 are continuously moved straightly or in a branching direction without being decelerated as well as being temporarily stopped. Can do.
As an accompanying effect, since the transfer container is inclined to the inner side of the branching curve, an article such as a semiconductor wafer in the container is less likely to be displaced due to centrifugal force.
付随する効果としては、搬送容器を分岐カーブ内側に傾斜させるので、容器内の半導体ウエハ等の物品が遠心力による位置ずれを生じにくいことも挙げられる。 In this way, it is possible to easily and surely switch between the straight movement and the movement in the branching direction of the
As an accompanying effect, since the transfer container is inclined to the inner side of the branching curve, an article such as a semiconductor wafer in the container is less likely to be displaced due to centrifugal force.
上述した実施の形態において示した各構成部材の諸形状や組み合わせ等は一例であって、本発明の主旨から逸脱しない範囲において設計要求等に基づき種々変更可能である。
The various shapes and combinations of the constituent members shown in the above-described embodiments are merely examples, and various modifications can be made based on design requirements and the like without departing from the gist of the present invention.
例えば、前述のように、搬送容器の上面ないし下面の搬送方向前後に配設される第1,第2ガイドローラは、同一位置でなくともよい。また、第1ガイドローラは、搬送方向の幅方向にそれぞれ少なくとも1つある仕様であってもよい。
For example, as described above, the first and second guide rollers disposed before and after the transport direction on the upper surface or the lower surface of the transport container may not be at the same position. Moreover, the specification which has at least 1 each of the 1st guide roller in the width direction of a conveyance direction may be sufficient.
また、上述した実施形態では、搬送容器の搬送方向を直進又は分岐する場合について説明したが、本発明の適用分野はこれに限らない。例えば、本発明の分岐装置を、主搬送路と分岐搬送路が合流する部分に適用することもできる。
In the above-described embodiment, the case where the conveyance direction of the conveyance container moves straight or branches has been described, but the application field of the present invention is not limited to this. For example, the branching device of the present invention can be applied to a portion where the main transport path and the branch transport path merge.
本発明によれば、切換ガイドの位置を移動させるだけで、搬送容器の搬送方向(直進と分岐)を簡単かつ確実に切り替えることができる。また、複数の搬送容器が連続的に搬送されてきた場合であっても、これら複数の搬送容器を一旦停止させることなく、そのまま連続的に直進或いは分岐方向に搬送させることができる。
According to the present invention, it is possible to easily and reliably switch the transport direction (straight and branch) of the transport container simply by moving the position of the switching guide. Further, even when a plurality of transport containers are continuously transported, the transport containers can be continuously transported in a straight line or branching direction without being temporarily stopped.
1A,1B…分岐装置、 S…主搬送路(第一搬送路)、 B…分岐搬送路(第二搬送路)、 R1A,R2A,R1B,R2B,R3A,R4A,R3B,R4B…搬送ローラ、 TG1,TG2…ガイドレール、 D…搬送物、 10,20…搬送容器、 T…上面、 E…下面、 G1,G2,G11,G12…第1ガイドローラ(第一ガイド部)、 G3,G4,G13,G14…第2ガイドローラ(第二ガイド部)、 2A,2B…切換ガイド、 SG1,SG2…第1切換ガイドレール、 BG1,BG2…第2切換ガイドレール、 15…フランジ(ガイド部)、 14…蓋体、 141…蓋体の側面下方(ガイド部)、 12…収容ケース、 121…収容ケースの背面下方
1A, 1B ... branching device, S ... main transport path (first transport path), B ... branch transport path (second transport path), R1A, R2A, R1B, R2B, R3A, R4A, R3B, R4B ... transport rollers, TG1, TG2 ... guide rail, D ... conveyed material, 10,20 ... conveying container, T ... top surface, E ... bottom surface, G1, G2, G11, G12 ... first guide roller (first guide part), G3, G4 G13, G14: second guide roller (second guide part), 2A, 2B ... switching guide, SG1, SG2 ... first switching guide rail, BG1, BG2: second switching guide rail, 15 ... flange (guide part), 14 ... lid, 141 ... lower side of the lid (guide part), 12 ... storage case, 121 ... lower back of the storage case
Claims (7)
- 搬送物を収容する搬送容器を搬送する搬送路の分岐装置であって、
前記搬送容器の上面の搬送方向と直交する幅方向両側に配設された第一ガイド部と、
前記搬送容器の下面の搬送方向と直交する幅方向両側に配設された第二ガイド部と、
前記搬送路のうち第一搬送路と第二搬送路の交差部分を除く搬送方向の幅方向両側に沿って配設されて前記搬送容器の下面を支持して移送する複数の搬送ローラと、
前記搬送路のうち前記交差部分を除く搬送方向の幅方向両側に沿って配設されて前記第二ガイド部に当接して案内するガイドレールと、
前記第一ガイド部のうち前記第二搬送路側に配設されたものに当接して前記搬送容器を前記第一搬送路に沿って案内する第一切換ガイドレール及び前記第一ガイド部のうち前記第一搬送路側に配設されたものに当接して前記搬送容器を前記第二搬送路に沿って案内する第二切換ガイドレールを有すると共に前記交差部分の上方において水平移動可能に配設された切換ガイドと、
を備える分岐装置。 A branching device for a transport path for transporting a transport container for storing a transported object,
A first guide portion disposed on both sides in the width direction orthogonal to the transport direction of the upper surface of the transport container;
A second guide portion disposed on both sides in the width direction orthogonal to the transport direction of the lower surface of the transport container;
A plurality of transport rollers disposed along both sides in the width direction of the transport direction excluding the intersection of the first transport path and the second transport path among the transport paths, and supporting and transporting the lower surface of the transport container;
A guide rail disposed along both sides in the width direction of the transport direction excluding the intersecting portion of the transport path and guiding the second guide portion in contact with the guide rail;
Of the first guide portion, the first switching guide rail that contacts the one arranged on the second conveyance path side and guides the conveyance container along the first conveyance path, and the first guide portion. A second switching guide rail that contacts the one disposed on the first conveyance path side and guides the conveyance container along the second conveyance path and is disposed so as to be horizontally movable above the intersection. A switching guide;
A branching device comprising: - 前記ガイドレールは、前記搬送ローラよりも、前記搬送路の搬送方向の幅方向外側に配設される請求項1に記載の分岐装置。 The branching device according to claim 1, wherein the guide rail is disposed on the outer side in the width direction in the transport direction of the transport path than the transport roller.
- 前記搬送ローラは、前記ガイドレールよりも、前記搬送路の搬送方向の幅方向外側に配設される請求項1に記載の分岐装置。 The branching device according to claim 1, wherein the transport roller is disposed on the outer side in the width direction in the transport direction of the transport path than the guide rail.
- 前記第一ガイド部には、鉛直方向に延びる回転軸を備えるガイドローラを有する請求項1に記載の分岐装置。 The branching device according to claim 1, wherein the first guide portion includes a guide roller having a rotation shaft extending in a vertical direction.
- 前記第二ガイド部には、鉛直方向に延びる回転軸を備えるガイドローラを有する請求項1に記載の分岐装置。 The branching device according to claim 1, wherein the second guide portion includes a guide roller having a rotating shaft extending in a vertical direction.
- 前記第二ガイド部は、平板状をなすフランジの側面である請求項2に記載の分岐装置。 The branching device according to claim 2, wherein the second guide part is a side surface of a flat flange.
- 前記第一ガイド部は、前記搬送容器の側面部である請求項2に記載の分岐装置。 The branching device according to claim 2, wherein the first guide part is a side part of the transfer container.
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CN103129930A (en) * | 2013-02-16 | 2013-06-05 | 上海三禾服装物流设备制造有限公司 | Manual line translation branch system |
WO2015024936A1 (en) * | 2013-08-23 | 2015-02-26 | Siemens Aktiengesellschaft | Switching arrangement for a cargo-conveying system |
CN109030843A (en) * | 2017-06-08 | 2018-12-18 | 豪夫迈·罗氏有限公司 | Converter for the transmission line for trafficking experiments room diagnosis container carrier |
EP3412603B1 (en) * | 2017-06-08 | 2021-07-28 | Roche Diagnostics GmbH | Switch for a conveying line for transporting a laboratory diagnostic vessel carrier |
US11204360B2 (en) | 2017-06-08 | 2021-12-21 | Roche Diagnostics Operations, Inc. | Switch for a conveying line for transporting a laboratory diagnostic vessel carrier |
Also Published As
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TW201029901A (en) | 2010-08-16 |
JP2010126334A (en) | 2010-06-10 |
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