WO2010013389A1 - 広帯域反射鏡 - Google Patents
広帯域反射鏡 Download PDFInfo
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- WO2010013389A1 WO2010013389A1 PCT/JP2009/003014 JP2009003014W WO2010013389A1 WO 2010013389 A1 WO2010013389 A1 WO 2010013389A1 JP 2009003014 W JP2009003014 W JP 2009003014W WO 2010013389 A1 WO2010013389 A1 WO 2010013389A1
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- reflective
- film
- index material
- material layer
- refractive index
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/08—Mirrors
- G02B5/0816—Multilayer mirrors, i.e. having two or more reflecting layers
- G02B5/0825—Multilayer mirrors, i.e. having two or more reflecting layers the reflecting layers comprising dielectric materials only
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24S—SOLAR HEAT COLLECTORS; SOLAR HEAT SYSTEMS
- F24S23/00—Arrangements for concentrating solar-rays for solar heat collectors
- F24S23/70—Arrangements for concentrating solar-rays for solar heat collectors with reflectors
- F24S23/82—Arrangements for concentrating solar-rays for solar heat collectors with reflectors characterised by the material or the construction of the reflector
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24S—SOLAR HEAT COLLECTORS; SOLAR HEAT SYSTEMS
- F24S23/00—Arrangements for concentrating solar-rays for solar heat collectors
- F24S23/70—Arrangements for concentrating solar-rays for solar heat collectors with reflectors
- F24S2023/86—Arrangements for concentrating solar-rays for solar heat collectors with reflectors in the form of reflective coatings
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24S—SOLAR HEAT COLLECTORS; SOLAR HEAT SYSTEMS
- F24S23/00—Arrangements for concentrating solar-rays for solar heat collectors
- F24S23/70—Arrangements for concentrating solar-rays for solar heat collectors with reflectors
- F24S23/77—Arrangements for concentrating solar-rays for solar heat collectors with reflectors with flat reflective plates
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24S—SOLAR HEAT COLLECTORS; SOLAR HEAT SYSTEMS
- F24S23/00—Arrangements for concentrating solar-rays for solar heat collectors
- F24S23/70—Arrangements for concentrating solar-rays for solar heat collectors with reflectors
- F24S23/79—Arrangements for concentrating solar-rays for solar heat collectors with reflectors with spaced and opposed interacting reflective surfaces
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/40—Solar thermal energy, e.g. solar towers
Definitions
- the present invention relates to a broadband reflector for reflecting light having a wavelength band of 400 nm to 2500 nm.
- Nonpatent literature 1 etc. a system is known in which a plurality of heliostats are arranged on the ground, reflected light from the heliostat is reflected by a condensing reflecting mirror, and sunlight is condensed on a heat collector.
- a reflecting mirror is manufactured by coating a metal thin film such as aluminum or silver on a transparent substrate such as glass.
- a metal thin film such as aluminum or silver
- the reflecting mirror coated with such a metal thin film has a problem that it is inferior in heat resistance and weather resistance because the metal thin film on the surface is easily oxidized by the environmental atmosphere.
- Patent Document 1 in order to solve the above-described problem, there is provided a reflecting mirror for reflecting sunlight provided with a metal reflective film on a transparent substrate and provided with a transparent inorganic protective film on the metal reflective film. Proposed.
- Patent Document 2 proposes a reflective heat collecting plate in which a transparent inorganic substance protective film is provided on a reflective metal vapor-deposited film.
- a dielectric mirror As a reflecting mirror, a dielectric mirror is known in which a high-refractive index material layer such as niobium oxide and a low-refractive index material such as silicon oxide are alternately stacked and reflected by using interference of light.
- a dielectric mirror is used to reflect broadband light with a wavelength of 400 nm to 2500 nm, there is a problem that the number of films to be stacked must be increased considerably.
- An object of the present invention is to provide a broadband reflector having high reflectivity and excellent heat resistance and scratch resistance in a wavelength band of 400 nm to 2500 nm.
- the present invention is a broadband reflector for reflecting light in a wavelength band of 400 nm to 2500 nm, and has a wavelength of 400 nm in which first high-refractive index material layers and first low-refractive index material layers are alternately stacked.
- the first reflective laminated film for reflecting light in the short wavelength side of the ⁇ 2500 nm band, the second high refractive index material layer, and the second low refractive index material layer were alternately laminated.
- a second reflective laminated film for reflecting light in the longer wavelength side of the wavelength band of 400 nm to 2500 nm, the first reflective laminated film being disposed on the light incident side, and the second reflective laminated film The film is disposed at a position where the light transmitted through the first reflective laminated film can be reflected, and the first high refractive index material layer is formed of niobium oxide, titanium oxide, zirconium oxide, tantalum oxide, hafnium oxide.
- the first low refractive index material layer is formed from at least one selected from the group consisting of silicon oxide and magnesium fluoride, and has a second high refraction.
- the refractive index material layer is formed from at least one selected from the group consisting of silicon and germanium, and the second low refractive index material layer is formed from at least one selected from the group consisting of silicon oxide and magnesium fluoride. It is characterized by being.
- a second reflective laminated film for reflecting the first reflective laminated film, and the first reflective laminated film is configured by alternately laminating the first high refractive index material layer and the first low refractive index material layer,
- the second reflective laminated film is formed by alternately laminating second high refractive index material layers and second low refractive index material layers.
- the first high refractive index material layer is formed of at least one selected from the group consisting of niobium oxide, titanium oxide, zirconium oxide, tantalum oxide, hafnium oxide, silicon nitride, yttrium oxide, and indium tin oxide.
- the first low refractive index material layer is formed from at least one selected from the group consisting of silicon oxide and magnesium fluoride, and the second high refractive index material layer is at least one selected from the group consisting of silicon and magnesium.
- the second low refractive index material layer is formed of at least one selected from the group consisting of silicon oxide and magnesium fluoride.
- the present invention at least two different types of the first reflective laminated film for reflecting the light in the short wavelength side band and the second reflective laminated film for reflecting the light in the long wavelength side band are used.
- the reflective laminated film By providing the reflective laminated film, the number of films laminated as a whole reflecting mirror is reduced. Therefore, a manufacturing process can be simplified and it can produce efficiently.
- the number of films to be stacked can be reduced, it is possible to reduce warping due to stress generated when a thin film is deposited.
- the second low-refractive index material layer alternately stacked with these thin films is silicon oxide or magnesium fluoride. Further, by arranging a layer of silicon oxide or magnesium fluoride, high heat resistance and high scratch resistance can be imparted.
- the second high refractive index material layer is formed from silicon
- silicon since silicon has a high transmittance in a wavelength region longer than the wavelength of 1200 nm, the short wavelength reflected by the first reflective laminated film
- the side band is preferably set to a wavelength of 400 nm to 1200 nm, and the long wavelength side band reflected by the second reflective laminated film is preferably set to a wavelength of 1200 nm to 2500 nm.
- germanium When the second high refractive index material layer is formed of germanium, germanium has a high transmittance on the long wavelength side from the wavelength of 2000 nm, so the band on the short wavelength side that is reflected by the first reflective laminated film.
- the wavelength is preferably set to 400 nm to 2000 nm
- the long wavelength band reflected by the second reflective laminated film is preferably set to a wavelength of 2000 nm to 2500 nm.
- the first reflective multilayer film is disposed on the light incident side, and the second reflective multilayer film is disposed at a position where the light transmitted through the first reflective multilayer film can be reflected. .
- the first reflective laminated film and the second reflective laminated film a high reflectance can be obtained.
- the second reflective multilayer film is arranged on the light incident side, light in the wavelength band that should be reflected by the first reflective multilayer film is absorbed by the second reflective multilayer film, so that the reflectance as a broadband reflector is high. Can't get.
- the first reflective laminated film and the second reflective laminated film are provided on the transparent substrate.
- the thin films can be sequentially laminated and then used as a broadband reflector.
- the transparent substrate include a glass substrate, a sapphire substrate, and a resin substrate.
- the first reflective laminated film is arranged on one side of the transparent substrate, and the second reflective laminated film is arranged on the other side of the transparent substrate.
- the reflective laminated film is formed on both surfaces of the transparent substrate, the stress generated when the thin films are stacked is generated on both sides of the transparent substrate, and the stress balance is balanced on both sides of the transparent substrate. Can be taken. For this reason, the curvature of a reflective mirror can be reduced. Therefore, according to the first embodiment, it is possible to manufacture a flat broadband reflecting mirror substantially free from warpage.
- the second reflective multilayer film is disposed on the transparent substrate, and the first reflective multilayer film is disposed on the second reflective multilayer film.
- the first reflective laminated film and the second reflective laminated film are arranged in this way, the light transmitted through the first reflective laminated film arranged on the light incident side is directly reflected on the second reflective laminated film. It can be incident on the film. Since light can be incident on the second reflective laminated film without passing through the transparent substrate, a high reflectance can be obtained.
- the first reflective multilayer film is disposed on the transparent substrate, and the second reflective multilayer film is disposed on the first reflective multilayer film.
- the transparent substrate can be arranged on the outside, so that durability such as scratch resistance and chemical resistance can be enhanced.
- the broadband reflecting mirror of the present invention can reflect light in a wavelength band of 400 nm to 2500 nm, it can be suitably used as a reflecting mirror for utilizing the thermal energy of sunlight.
- it can be used as a heliostat reflecting mirror of a solar light collecting system, a condensing reflecting mirror for collecting light reflected by a heliostat reflecting mirror, or the like.
- the first reflective laminated film in the present invention is formed by alternately laminating first high refractive index material layers and first low refractive index material layers.
- the above materials can be used for the first high refractive index material layer and the first low refractive index material layer.
- the same material may be used for each of the stacked films, or two or more different materials may be used.
- all the films to be stacked may be made of niobium oxide, or a part of the film may be formed of another high refractive index material such as titanium oxide.
- the first low-refractive index material layer may be the same material or a different material in the stacked films. However, it is desirable to use the same material from the viewpoint of production efficiency.
- the number of films laminated in the first reflective laminated film is not particularly limited, but the total of the first high refractive index material layer and the first low refractive index material layer is 30 to 200 layers. It is preferably within the range, and more preferably within the range of 70 to 90 layers.
- the film thickness of the first reflective laminated film that is, the total film thickness in the laminated film of the first high refractive index material layer and the first low refractive index material layer is not particularly limited. It is preferably in the range of ⁇ 20 ⁇ m, more preferably in the range of 7 to 10 ⁇ m.
- the second high-refractive index material layer and the second low-refractive index material layer may be the same type, or two or more different types.
- the number of films to be laminated is not particularly limited, but is preferably in the range of 9 to 50 layers, more preferably in the range of 15 to 25 layers. .
- the film thickness of the second reflective laminated film that is, the total film thickness obtained by laminating the second high refractive index material layer and the second low refractive index material layer is not particularly limited, but is 2 to 10 ⁇ m. Is preferably in the range of 2 to 6 ⁇ m.
- the method for forming the first high refractive index material layer, the first low refractive index material layer, the second high refractive index material layer, and the second low refractive index material layer is particularly limited. Instead, it can be formed by a general thin film forming method. For example, it can be formed by a sputtering method, an evaporation method such as an ion beam evaporation method, a CVD method, or the like.
- the film configuration including the layer thickness can be designed by simulation. For example, it can be designed using simulation software commercially available from manufacturers such as The Essential Macleod Thin Film Center Inc., TF Calc Software Spectra Inc, and Film Star FTG Software Associates.
- a metal film may be provided as a third reflective film at a position where the light transmitted through the second reflective multilayer film can be reflected.
- the number of films to be laminated in the second reflective laminated film can be reduced.
- it can be in the range of 2 to 10 layers.
- the film thickness of the second reflective laminated film can be reduced.
- it can be in the range of 0.3 to 1 ⁇ m.
- the metal film examples include aluminum (Al), silver (Ag), and gold (Au). From the viewpoint of heat resistance, aluminum (Al) is preferably used.
- the thickness of the metal film is not particularly limited, but is preferably in the range of 0.03 to 1 ⁇ m, and more preferably in the range of 0.05 to 0.25 ⁇ m.
- the method for forming the third reflective film is not particularly limited, and can be formed by a general thin film forming method.
- it can be formed by a method such as vapor deposition or sputtering.
- the present invention it is possible to obtain a broadband reflector having high reflectivity and excellent heat resistance and scratch resistance in a wavelength band of 400 nm to 2500 nm.
- FIG. 1 is a schematic diagram showing a broadband reflecting mirror according to a first embodiment of the present invention.
- FIG. 2 is a schematic diagram showing a broadband reflecting mirror according to a second embodiment of the present invention.
- FIG. 3 is a schematic diagram showing a broadband reflector according to a third embodiment of the present invention.
- FIG. 4 is a diagram showing the reflectance of the broadband reflecting mirror of Example 1 according to the present invention.
- FIG. 5 is a diagram showing the reflectance of the broadband reflector according to the first embodiment of the present invention and the broadband reflector using the conventional metal film.
- FIG. 6 is a diagram showing the reflectance before and after heating of the wide-band reflecting mirror of Example 1 according to the present invention.
- FIG. 1 is a schematic diagram showing a broadband reflecting mirror according to a first embodiment of the present invention.
- FIG. 2 is a schematic diagram showing a broadband reflecting mirror according to a second embodiment of the present invention.
- FIG. 3 is a schematic diagram showing a broadband reflector according to a third embodiment of
- FIG. 7 is a diagram showing the reflectance before and after heating of the reflecting mirror using an Ag (silver) film.
- FIG. 8 is a diagram showing the reflectance before and after heating of the reflecting mirror using an Al (aluminum) film.
- FIG. 9 is a diagram showing the relationship between the heating time and the reflectance in Example 1 according to the present invention.
- FIG. 10 is a schematic diagram illustrating an example of a sunlight collecting system.
- FIG. 11 is a diagram showing the reflectance of the broadband reflecting mirrors of Example 6 and Example 7 according to the present invention.
- FIG. 1 is a schematic cross-sectional view showing a broadband reflector 1 according to the first embodiment.
- the first reflective multilayer film 3 is disposed on one surface side of the transparent substrate 2, and the second reflective multilayer film 4 is disposed on the other surface side of the transparent substrate 2.
- Light enters from the upper side of the drawing enters the first reflective multilayer film 3, passes through the transparent substrate 2, and enters the second reflective multilayer film 4.
- the first reflective multilayer film 3 reflects light in the short wavelength band of the wavelength range of 400 nm to 2500 nm. Therefore, the light passing through the first reflective laminated film has less light in this band and is mainly light in the long wavelength band.
- the light transmitted through the first reflective laminated film passes through the transparent substrate 2 and is incident on the second reflective laminated film 4.
- the second reflective multilayer film reflects light in a longer wavelength band out of a wavelength band of 400 nm to 2500 nm.
- the second reflective laminated film uses silicon or germanium as the second high refractive index material layer. By using silicon or germanium as the second high refractive index material layer, it is possible to reduce the number of films stacked in the second reflective multilayer film, and the total of the first reflective multilayer film and the second reflective multilayer film. The number of laminated films can be remarkably reduced.
- the reflective laminated film is provided on both sides of the transparent substrate 2
- the stress generated when the thin film is deposited can be balanced on both sides of the transparent substrate. For this reason, it is possible to reduce warpage due to stress generated during thin film deposition, and it is possible to manufacture a broadband reflecting mirror with less warpage.
- FIG. 2 is a schematic cross-sectional view showing a broadband reflecting mirror 1 according to a second embodiment of the present invention.
- the second reflective laminated film 4 is provided on one side of the transparent substrate 2, and the first reflective laminated film 3 is provided thereon. Since the light transmitted through the first reflective multilayer film 3 is directly incident on the second reflective multilayer film 4, there is no light absorption by the transparent substrate 2, and a broadband reflector having a high reflectance can be manufactured.
- FIG. 3 is a schematic cross-sectional view showing a broadband reflector 1 according to a third aspect of the present invention.
- the first reflective laminated film 3 is provided on one side of the transparent substrate 2, and the second reflective laminated film 4 is provided thereon.
- the transparent substrate 2 can be disposed on the outside, a broadband reflector having excellent durability such as scratch resistance and chemical resistance can be produced.
- the following example is an implementation of a broadband reflector in which a first reflective multilayer film is disposed on one side of a transparent substrate and a second reflective multilayer film is disposed on the other side according to the first embodiment of the present invention. It is an example.
- Example 1 This example is an example of a broadband reflecting mirror in which a first reflective laminated film is provided on one side of a glass substrate and a second reflective laminated film is provided on the other side of the glass substrate.
- the glass substrate is “OA-10” manufactured by Nippon Electric Glass Co., Ltd. having a thickness of 0.3 mm.
- Nb 2 O 5 niobium pentoxide
- SiO 2 silicon oxide
- Table 1 shows the film thickness and film structure of each layer. Layer No. in Table 1 Is the order from the glass substrate side. As shown in Table 1, the number of layers of the first reflective multilayer film is 79.
- the broadband reflector according to the present embodiment is a broadband reflector designed to exhibit the highest reflectance when the incident angle of light is approximately 20 °.
- Si silicon
- SiO 2 silicon oxide
- Table 2 shows the film configuration of the second reflective laminated film.
- the layer No. Indicates the order from the glass substrate side.
- the number of layers of the second reflective laminated film in this example is 25.
- a second low refractive index material layer made of SiO 2 is disposed as the outermost layer.
- the first reflective laminated film having 79 layers is provided on one side of the glass substrate, and the second reflective laminated film having 25 layers is provided on the other side of the glass substrate.
- the number of layers is 67 layers. Therefore, the number of layers of the entire broadband reflector is 146. According to the present invention, the number of layers to be stacked can be greatly reduced by using silicon or germanium as the second high refractive index material layer of the second reflective multilayer film.
- FIG. 4 is a diagram showing the reflectance at a wavelength of 400 nm to 2500 nm in the present example.
- the broadband reflector of the present example has a high reflectance over the entire wavelength band of 400 nm to 2500 nm.
- FIG. 5 shows the reflectance of a comparative reflector produced by forming an Ag film, an Al film, or an Au film as a metal film on the same glass substrate as used in Example 1, and the reflectance of this example. It is a figure shown with.
- FIG. 5 also shows an enlarged view showing an enlarged region having a reflectance of 80 to 100%. Note that the wavelength scale on the horizontal axis corresponds to a graph with a reflectance of 0 to 100%.
- FIG. 6 is a diagram showing the change in reflectance before and after the heating test of the broadband reflector according to the present embodiment.
- the heating test was performed at 300 ° C. for 264 hours.
- FIG. 7 is a diagram showing the reflectance before and after heating of the reflector using the Ag film.
- the heating condition is 300 ° C. for 1 hour.
- the reflector using the Ag film has a higher reflectance than other metal film reflectors, but is inferior in heat resistance.
- FIG. 8 is a diagram showing the reflectance before and after heating of the reflecting mirror using the Al film.
- the reflecting mirror using the Al film has good heat resistance.
- the reflectance is inferior.
- FIG. 9 is a diagram showing the heat resistance of the broadband reflecting mirror of this example.
- the change in the average reflectance at wavelengths of 400 nm to 2500 nm with the heating time is measured.
- FIG. 9 it can be seen that the average reflectance in this example hardly changes even if heating at 300 ° C. is continued for 264 hours.
- the broadband reflector of this example is a broadband reflector that exhibits the highest reflectivity when the incident angle is approximately 16 °.
- Nb 2 O 5 is used as the first high refractive index material layer
- SiO 2 is used as the first low refractive index material layer.
- Table 3 shows the film configuration of the first reflective laminated film.
- the second reflective laminated film can have the same film configuration as in the first embodiment. Therefore, the film configuration shown in Table 2 can be obtained.
- the broadband reflector of this example is a broadband reflector that exhibits the highest reflectivity when the incident angle is approximately 23 °.
- Nb 2 O 5 is used as the first high refractive index material layer
- SiO 2 is used as the first low refractive index material layer.
- Table 4 shows the film configuration of the first reflective laminated film.
- the second reflective laminated film can have the same film configuration as in the first embodiment. Therefore, the film configuration shown in Table 2 can be obtained.
- the broadband reflecting mirror of this example is a broadband reflecting mirror that exhibits the highest reflectivity when the incident angle is approximately 30 °.
- Nb 2 O 5 is used as the first high refractive index material layer
- SiO 2 is used as the first low refractive index material layer.
- Table 5 shows the film configuration of the first reflective laminated film.
- the second reflective laminated film can have the same film configuration as in the first embodiment. Therefore, the film configuration shown in Table 2 can be obtained.
- the broadband reflector of this example is a broadband reflector using germanium as the second high refractive index material layer.
- germanium has a large absorption in a short wavelength region up to a wavelength of 2000 nm. Therefore, the first reflective laminated film is designed to reflect light in a wavelength band of 400 nm to 2000 nm. Further, the second reflective laminated film is designed to reflect light in a wavelength band of 2000 nm to 2500 nm.
- Table 6 shows the film configuration of the first reflective multilayer film when Nb 2 O 5 is used as the first high refractive index material layer and SiO 2 is used as the first low refractive index material layer.
- the number of layers of the first reflective laminated film is 101.
- Table 7 shows the film configuration of the second reflective laminated film when Ge (germanium) is used as the second high refractive index material layer and SiO 2 (silicon oxide) is used as the second low refractive index material layer. .
- the number of layers of the second reflective laminated film is 21.
- the number of layers in the entire broadband reflector is 122, which is less than the number of layers 146 when the broadband reflector is composed of only Nb 2 O 5 and SiO 2, but more than the number of layers in the first embodiment. ing.
- the broadband reflecting mirror of the present example is a broadband reflecting mirror in which a metal film as a third reflecting film is provided on the second reflecting laminated film. It is a broadband reflector that exhibits the highest reflectivity when the reflection angle is approximately 20 °.
- the configuration of the first reflective laminated film in this example is the configuration shown in Table 1.
- the configurations of the second reflective laminated film and the third reflective film in this example are the film configurations shown in Table 8.
- the second reflective laminated film is configured by laminating the Si layer and the SiO 2 layer.
- An Al layer as a third reflective film is formed on the SiO 2 layer.
- the number of layers of the second reflective laminated film can be reduced.
- FIG. 11 is a diagram showing the reflectance at a wavelength of 400 nm to 2500 nm in the present example. As can be seen from FIG. 11, even in the broadband reflector of this example, a high reflectance is obtained over the entire band of wavelengths from 400 nm to 2500 nm. Further, the reflectance after heating at 300 ° C. for 264 hours is the same as that in FIG. 11, and it has been confirmed that it has excellent heat resistance.
- the broadband reflecting mirror of this example is a broadband reflecting mirror in which a metal film as a third reflecting film is provided on the second reflecting laminated film. It is a broadband reflector that exhibits the highest reflectance when the incident angle is approximately 20 °.
- the first reflective laminated film has a film configuration shown in Table 1.
- the second reflective laminated film and the third reflective film have a film configuration shown in Table 9.
- the SiO 2 layer 5 is a protective layer for protecting the Al film as the third reflective film.
- the layer No. No. 1 SiO 2 layer is the layer no. 2 is a layer provided to improve the adhesion of the Si layer to the glass substrate.
- the second reflective laminated film has layer No. 1-No. It is composed of three.
- the Si layer is a second high refractive index material layer, and SiO 2 is a second low refractive index material layer.
- the number of layers of the second reflective multilayer film can be reduced.
- a SiO 2 layer layer No. 5 as a protective layer is provided outside the Al layer, and the heat resistance can be further improved.
- the reflectance in the wavelength range of 400 nm to 2500 nm in the example is as shown in FIG. Moreover, it was confirmed that it has the outstanding heat resistance similarly to Example 6.
- FIG. 10 is a schematic diagram showing an example of a sunlight collecting system.
- a plurality of heliostats 6 are arranged on the ground.
- Each heliostat 6 can change the angle of the reflecting mirror according to the position of the sun so as to reflect the reflected light of the sunlight 5 to the condensing point 9.
- a condensing reflecting mirror 7 is provided at a high position in front of the condensing point 9 so that the reflected light from the heliostat 6 can be reflected.
- the condensing reflecting mirror 7 reflects the reflected light from the heliostat 6 so as to be condensed on the heat collector 8 provided near the ground.
- the reflected light of all the heliostats 6 is directed to the condensing reflecting mirror 7, reflected by the condensing reflecting mirror 7, and collected on the heat collector 8.
- the broadband reflecting mirror of the present invention can be used for the reflecting mirror of the heliostat 6 and the reflecting mirror 7 for condensing.
- the condensing reflecting mirror 7 is heated to a high temperature because the reflected light from all the heliostats 6 is condensed. For this reason, the condensing reflecting mirror 7 is required to have high heat resistance. Therefore, the broadband reflecting mirror of the present invention can be suitably used for such a condensing reflecting mirror.
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Abstract
Description
Claims (8)
- 波長400nm~2500nmの帯域の光を反射するための広帯域反射鏡であって、 第1の高屈折率材料層と第1の低屈折率材料層とを交互に積層させた波長400nm~2500nmの帯域のうち短波長側の帯域の光を反射するための第1の反射積層膜と、 第2の高屈折率材料層と第2の低屈折率材料層とを交互に積層させた波長400nm~2500nmの帯域のうち長波長側の帯域の光を反射するための第2の反射積層膜とを備え、 前記第1の反射積層膜が光の入射側に配置され、前記第2の反射積層膜が、前記第1の反射積層膜を透過してきた光を反射することができる位置に配置され、かつ 前記第1の高屈折率材料層が、酸化ニオブ、酸化チタン、酸化ジルコニウム、酸化タンタル、酸化ハフニウム、窒化珪素、酸化イットリウム、及び酸化インジウム錫からなる群より選ばれる少なくとも1種から形成され、前記第1の低屈折率材料層が、酸化珪素及びフッ化マグネシウムからなる群より選ばれる少なくとも1種から形成され、前記第2の高屈折率材料層が、珪素及びゲルマニウムからなる群より選ばれる少なくとも1種から形成され、前記第2の低屈折率材料層が、酸化珪素及びフッ化マグネシウムからなる群より選ばれる少なくとも1種から形成されていることを特徴とする広帯域反射鏡。
- 前記第2の高屈折率材料層が珪素から形成され、前記短波長側の帯域が波長400nm~1200nmであり、前記長波長側の帯域が波長1200nm~2500nmであることを特徴とする請求項1に記載の広帯域反射鏡。
- 前記第2の高屈折率材料層がゲルマニウムから形成され、前記短波長側の帯域が波長400nm~2000nmであり、前記長波長側の帯域が波長2000nm~2500nmであることを特徴とする請求項1に記載の広帯域反射鏡。
- 前記第1の反射積層膜及び前記第2の反射積層膜が、透明基板上に設けられており、前記第1の反射積層膜が前記透明基板の一方面側に配置されており、前記第2の反射積層膜が前記透明基板の他方面側に配置されていることを特徴とする請求項1~3のいずれか1項に記載の広帯域反射鏡。
- 前記第1の反射積層膜及び前記第2の反射積層膜が、透明基板上に設けられており、前記透明基板上に前記第2の反射積層膜が配置され、前記第2の反射積層膜の上に前記第1の反射積層膜が配置されていることを特徴とする請求項1~3のいずれか1項に記載の広帯域反射鏡。
- 前記第1の反射積層膜及び前記第2の反射積層膜が、透明基板上に設けられており、前記透明基板上に前記第1の反射積層膜が配置され、前記第1の反射積層膜の上に前記第2の反射積層膜が配置されていることを特徴とする請求項1~3のいずれか1項に記載の広帯域反射鏡。
- 前記第2の反射積層膜を透過してきた光を反射することができる位置に、第3の反射膜として金属膜が設けられていることを特徴とする請求項1~6のいずれか1項に記載の広帯域反射鏡。
- 太陽光集光システムのヘリオスタット用反射鏡またはヘリオスタット用反射鏡で反射された光を集光するための集光用反射鏡として用いられることを特徴とする請求項1~7のいずれか1項に記載の広帯域反射鏡。
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CN2009801298744A CN102112897B (zh) | 2008-07-28 | 2009-06-30 | 宽波段反射镜 |
EP09802639.6A EP2320253A4 (en) | 2008-07-28 | 2009-06-30 | BROADBAND REFLECTION MIRROR |
AU2009277894A AU2009277894B2 (en) | 2008-07-28 | 2009-06-30 | Broadband reflecting mirror |
US12/997,612 US20110096391A1 (en) | 2008-07-28 | 2009-06-30 | Broadband reflecting mirror |
IL209882A IL209882A0 (en) | 2008-07-28 | 2010-12-09 | Broadband reflecting mirror |
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JP2009092807A JP5229075B2 (ja) | 2008-07-28 | 2009-04-07 | 広帯域反射鏡 |
JP2009-092807 | 2009-04-07 |
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US (1) | US20110096391A1 (ja) |
EP (1) | EP2320253A4 (ja) |
JP (1) | JP5229075B2 (ja) |
CN (1) | CN102112897B (ja) |
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CN102540310B (zh) * | 2010-12-13 | 2015-07-01 | 鸿富锦精密工业(深圳)有限公司 | 双色镜、阳光收集装置及太阳能装置 |
WO2012123038A1 (de) * | 2011-03-17 | 2012-09-20 | Von Ardenne Anlagentechnik Gmbh | Reflexionsschichtsystem für solartechnische anwendungen und verfahren zu seiner herstellung |
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JP2014191230A (ja) * | 2013-03-27 | 2014-10-06 | Fujifilm Corp | 太陽光集光用フィルムミラー |
WO2018135124A1 (ja) * | 2017-01-18 | 2018-07-26 | 旭硝子株式会社 | Cspミラー、およびcspミラー用の膜付きガラス基板の製造方法 |
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WO2021251476A1 (ja) * | 2020-06-12 | 2021-12-16 | 日東電工株式会社 | フィルムミラー積層体、及びミラー部材 |
Also Published As
Publication number | Publication date |
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CN102112897A (zh) | 2011-06-29 |
JP2010055058A (ja) | 2010-03-11 |
AU2009277894B2 (en) | 2014-06-05 |
AU2009277894A1 (en) | 2010-02-04 |
CN102112897B (zh) | 2013-02-13 |
US20110096391A1 (en) | 2011-04-28 |
JP5229075B2 (ja) | 2013-07-03 |
EP2320253A1 (en) | 2011-05-11 |
IL209882A0 (en) | 2011-02-28 |
EP2320253A4 (en) | 2013-06-05 |
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