WO2009130751A1 - 容器搬送装置 - Google Patents
容器搬送装置 Download PDFInfo
- Publication number
- WO2009130751A1 WO2009130751A1 PCT/JP2008/057696 JP2008057696W WO2009130751A1 WO 2009130751 A1 WO2009130751 A1 WO 2009130751A1 JP 2008057696 W JP2008057696 W JP 2008057696W WO 2009130751 A1 WO2009130751 A1 WO 2009130751A1
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- WIPO (PCT)
- Prior art keywords
- container
- transport
- path
- wheel
- discharge
- Prior art date
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
- B65G47/84—Star-shaped wheels or devices having endless travelling belts or chains, the wheels or devices being equipped with article-engaging elements
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
- B65G47/84—Star-shaped wheels or devices having endless travelling belts or chains, the wheels or devices being equipped with article-engaging elements
- B65G47/846—Star-shaped wheels or wheels equipped with article-engaging elements
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
Definitions
- the present invention relates to a container transport device including a transport path in which a container processing step is provided in the middle of a transport path of a container, and delivery of the container from the transport path to the container processing step is performed in a reciprocating process.
- FIG. 12 shows a system 151 that uses a conventional container transport device.
- a plurality of (five) devices 153 are arranged along a conveyor conveyer 152 that extends linearly.
- the transport conveyor 152 includes a container supply transport path 161 and a container discharge transport path 162.
- the container supply transport path 161 one main line 161a, five transport path switching points indicated by reference numeral P1, And five branch lines 161b branched from the switching point P1.
- the container discharge conveyance path 162 includes one main line 162a, four conveyance path switching points indicated by reference numeral P2, and four branch lines 162b that merge with the main line 162a at each switching point P2. It has been.
- a container delivery device 157 for taking out the containers from the transport conveyor 152 and returning them to the transport conveyor 152 is disposed, and the processed containers are returned to the transport conveyor 152, and the next process It is conveyed to.
- Patent Document 1 in a conventional example, in a container transfer device, the containers are arranged in a line on a transfer line, and a discharge unit for performing a plurality of film formations is arranged on the transfer path.
- a discharge unit for performing a plurality of film formations is arranged on the transfer path.
- the apparatus becomes large and it is difficult to shorten the film forming process time.
- containers transported in a single row are accommodated in a circular cassette that accommodates a plurality of containers, a number of containers are transported to a film forming chamber, and the containers are deposited.
- Conveyance of containers in the conveyer 152 shown in FIG. 12 is separated into a container supply conveyance path 161 and a container conveyance discharge path 162, but from the main line 161a to each branch line 161b and from the branch line 162b to the main line.
- transport path switching points P1 and P2 must be provided, and a large number of transport path switching devices (not shown) are required. For this reason, the timing for switching the conveyance of the container becomes complicated, and it is difficult to speed up the conveyance speed of the container. For example, when containers are preferentially supplied in order from the upstream device 153, the containers are not sufficiently distributed to the downstream device 153, and processing according to the operating capacity may not be performed.
- the system 151 is connected to the transport line conveyor 152.
- the installation area becomes longer and the installation area cannot be effectively used. As a result, the installation area of the entire system increases.
- one transport conveyor can be provided corresponding to one device 153, the same number of transport conveyors as the device 153 is required, and the installation area cannot be reduced.
- the present invention has been made in view of such circumstances, and can increase the speed of transporting containers in a transport path in which there is a container delivery device in the middle of the transport path of the container.
- An object of the present invention is to provide a container transfer device that can reduce the overall installation area.
- the container transport apparatus of the present invention has a container supply position for receiving a container and a container discharge position for delivering the container, and a transport path for transporting the container from the container supply position to the container discharge position. And a container transfer device having a container delivery position where the container is once taken out of the transfer path and then returned to the transfer path in the course of transfer of the container on the transfer path.
- An inner conveyance path that rotates around the center and an outer conveyance path that is disposed on the same axis and on the outer peripheral side, and supplies a container at a container supply position on one of the inner conveyance path and the outer conveyance path.
- a container discharge means for discharging the container at a container discharge position on the other conveyance path, and the container is taken out from the one conveyance path at the container delivery position, and then the other conveyance path is provided.
- the container transfer means to return the provided.
- the inner transport path and the outer transport path are individually controlled.
- the said container conveying apparatus has arrange
- the container supply means of the container transport device includes a rotatable container supply wheel having a container support, and a contact portion between the container transport track by the container supply wheel and the container transport track by the one transport path is provided.
- the container is provided at a container supply position, and the container is delivered at the contact portion.
- the container discharge means includes a rotatable container discharge wheel having a container support, and the container discharge track and the other transfer by the container discharge wheel. A contact point with the container transport track by the path is provided at the container discharge position, and the container is delivered at the contact point.
- the said container conveyance apparatus decided to provide in the outer periphery of the said container delivery means in several places along the circumferential direction of the said conveyance path.
- the transport path of the container transport device of the present invention includes an inner transport path that rotates about a rotation axis and an outer transport path disposed on the outer peripheral side of the inner transport path, and the inner transport path and the outer transport path.
- the container is returned to the transport path, and the inner transport path and the outer transport path can be controlled individually, and the container supply and discharge timing can be taken separately, so that the container can be transported at high speed. I was able to do it.
- the container transport device does not require a plurality of branch paths or transport path switching points as in the conventional device (FIG. 12), it is not necessary to take time such as waiting for the timing of switching the transport path of the container,
- the container supply and discharge time can be shortened.
- the container can be conveyed according to the processing capacity on the apparatus side, and the production efficiency can be improved.
- even when there are a plurality of container processing apparatuses (vapor deposition apparatuses) on the conveyance path it is possible to effectively use the installation area without the entire system extending in a straight line direction.
- the container supply conveyance path and the container discharge conveyance path are provided.
- the branch path it is necessary to convey the container by the four conveyance paths and increase the installation area.
- the installation area can be reduced.
- FIG. 5 is a cross-sectional view of the container transport device on the container supply side in the direction of line AA in FIG. 4.
- FIG. 5 is a cross-sectional view on the container supply side of the container transport device in the direction of line BB in FIG.
- FIG. 5 is a cross-sectional view on the container supply side of the container transport device in the direction of line CC in FIG. 4.
- FIG. 5 is a cross-sectional view of the container transport device on the container discharge side in the DD line direction of FIG. 4.
- FIG. 5 is a cross-sectional view of the container transport device on the container discharge side in the direction of line EE in FIG. 4.
- FIG. 5 is a cross-sectional view of the container transport device on the container discharge side in the direction of line FF in FIG. 4. It is a schematic plan view of the conventional vapor deposition system.
- FIG. 1 is a plan view of a vapor deposition system for a container equipped with a container transport device according to the present invention
- FIG. 2 is an enlarged plan view of the vapor deposition system (note that only one vapor deposition apparatus 1 is shown because of the space in the drawing) Is).
- the vapor deposition system deposits a functional raw material by microwaves on the inner surface of the container while the container moves from the upstream side to the downstream side of the vapor deposition system.
- the container 25 flows with the supply conveyor 2, the container supply wheel 3, the transport wheel 4, the container transfer device (robot) 5, 6, and the vapor deposition device 1 that are located on the upstream side of the vapor deposition system. Returned to the wheel 4, the container discharge wheel 7 and the discharge conveyor 8 flow in this order from the transport wheel 4.
- the supply conveyor 2 side is the upstream side
- the discharge conveyor 8 side is the downstream side along the flow of the work process of the container 25.
- supply conveyor 2 conveys the container 25 in the linear direction indicated by arrow a in an upright posture with the opening of container 25 facing upward.
- a timing screw 39 is provided on the downstream side of the supply conveyor 2, the container 25 is brought into contact with the groove 39 a of the timing screw 39 and conveyed, and the container 25 is transferred to the container supply wheel 3 at the transfer point b.
- the container supply wheel 3 is supported by a supply wheel base 42 via a bearing 45 so that the rotary shaft 3a is rotatable.
- a wheel surface of the rotating wheel 3b is disposed in the upper part of the rotating shaft 3a in the horizontal direction, and an inner guide 40 for the container is provided on the outer periphery in the radial direction.
- the inner guide 40 includes an annular guide plate 40a, and a curved groove-shaped container regulating portion 40b is formed on the outer peripheral side end surface of the guide plate 40a.
- the container restricting portion 40b cooperates with the groove 39a of the timing screw 39 described above, so that the container supply wheel 3 can receive the container 25.
- the guide plate 40a is provided at an interval in the vertical direction so that the upper and lower portions of the middle position of the container can be supported.
- the container supply wheel 3 is provided with an outer guide 41, and the container 25 is regulated by the regulating part 40 b and is conveyed between the inner guide 40 and the outer guide 41.
- the outer guide 41 is disposed between the delivery point b and the delivery point d shown in FIG. As shown in FIG. 6, the outer guide 41 is supported by a support bar 44 erected on an L-shaped bracket 43 attached to the side wall of the supply wheel base 42, and the outer guide includes a container 25 and a circular guide plate 41b for supporting the peripheral wall portion of the container.
- the guide plates 41b are arranged at intervals in the vertical direction.
- the container supply wheel 3 is rotated by the drive of the servo motor 46. That is, the servo motor 46 is disposed at the lower part of the transport wheel 4 and is located at the lower part of the rotating shaft 48a of the intermediate gear main body 48 provided in the pulley 47a and the supply wheel base 42 at the intermediate position in the vertical direction of the main shaft 46a. A belt 49 is stretched between the pulley 47b attached to the belt. An intermediate gear 48b is attached to the rotation shaft 48a of the intermediate gear body 48, and a gear 3c attached to the rotation shaft 3a of the container supply wheel 3 meshes with the intermediate gear 48b. Therefore, the driving force of the servo motor 46 is transmitted to the container supply wheel 3 in the order of the servo motor 46, the belt 49, the intermediate gear 48b, and the gear 3c, and the rotating wheel 3b rotates.
- the conveyance wheel 4 has a circular inner conveyance path 9 and an outer conveyance path 10 having concentric rotation axes, and the inner and outer conveyance paths 9 and 10 are rotated clockwise as indicated by an arrow e. It is configured to rotate in the direction.
- the inner transport path 9 is provided with an arc-shaped inner guide 50, and a plurality of curved groove-shaped container support portions 50 a are provided at equal intervals in the circumferential direction on the outer peripheral side end face of the inner guide 50.
- the circular orbit of the container support portion 50a is in contact with the circular orbit of the container supply wheel 3 at the delivery position d, and the container support portion 50a is the container at the delivery position d in cooperation with the container regulation portion 40b of the container supply wheel 3 described above. Can receive.
- the inner conveyance path 9 is supported on a conveyance wheel support base 53, and more specifically, the cross section placed on the conveyance wheel support base 53 is fixed to the upper surface of a U-shaped bracket 54. It is supported by an annular inner wheel guide member 55. That is, the inner wheel gear 56 of the inner conveyance path 9 is slidably disposed on the inner peripheral surface of the wheel gear guide member 55, and an annular bearing 57 is provided on the sliding portion, and the inner wheel gear 56 serves as the inner wheel guide.
- the member 55 can rotate so as to slide on the inner peripheral surface of the member 55.
- the inner conveyance path 9 is provided with a bottom plate 50b on which a container is placed, and the inner guide 50 described above is supported on the bottom plate 50b. Two inner guides 50 are provided at intervals in the vertical direction so that the upper and lower portions of the middle position of the container can be supported.
- Teeth are formed on the inner peripheral surface of the inner wheel gear 56, meshed with the main gear 46 b attached to the upper part of the main shaft 46 a of the servo motor 46, and can be rotated by the driving force of the servo motor 46.
- a support plate 54a is provided on the upper portion of the bracket 54, and an outer guide 51 is provided on the upper portion of the support plate.
- the outer guide 51 is provided with an arcuate guide plate 51a that supports the peripheral wall of the container. Two guide plates 51a are arranged at intervals in the up-down direction.
- the outer guide 51 is arranged from the delivery position d of the inner conveyance path 9 to the container discharge wheel 7 (see FIG. 3).
- the conveyance wheel 4 can convey the container to the delivery area f of the inner conveyance path 9 and deliver the container to the delivery devices 5 and 6.
- the delivery devices 5 and 6 can rotate (reverse) toward the vapor deposition device 1 around the rotation axis.
- FIG. 8 is an enlarged cross-sectional view of the vapor deposition apparatus 1.
- the vapor deposition apparatus 1 is provided with a rotary table 14, which can be rotated in the clockwise direction indicated by an arrow g, and a plurality of vapor deposition units 15 are disposed on the outer periphery of the rotary table 14.
- 16 vapor deposition units 15 are disposed in the circumferential direction of the turntable 14, and the two vapor deposition units 15 are integrally disposed as a set.
- Each vapor deposition unit 15 can move along a circular orbit on a concentric circle by the rotational movement of the turntable 14.
- the vapor deposition unit 15 is provided with a vacuum chamber 24 having a circular cross section, and a vacuum pump (not shown) is connected so that the chamber can be decompressed.
- the vapor deposition unit 15 is provided with a waveguide 32 communicating with the decompression chamber 24.
- a microwave oscillator 34 is close to the waveguide 32.
- the microwave oscillator 34 is fixed to the outside of the turntable 14, and four units are provided in this embodiment.
- the microwave oscillator 34 is disposed at a position located on the opposite side of the turntable 14 in the radial direction from the delivery devices 5 and 6.
- the four (plurality) of microwave oscillators 34 are arranged corresponding to the plural (four) vapor deposition units 15 that are continuous in the circumferential direction.
- the container delivery devices 5 and 6 can be taken out together with the supply of the container 25 to the decompression chamber 24.
- These delivery devices 5 and 6 can take in and out the container 25 with respect to the four vapor deposition units 15 arranged at the site indicated as the first stage in FIG.
- the delivery apparatuses 5 and 6 can deliver the container 25 to the outer side conveyance path 10 in the delivery area h of the conveyance wheel 4 shown in FIG.
- the outer conveyance path 10 is provided with an arc-shaped inner guide 60, and a plurality of curved groove-shaped container support portions 60 a are formed in the circumferential direction on the outer peripheral portion of the inner guide 60.
- the outer conveyance path 10 rotates in the clockwise direction of the arrow e to convey the container 25 and delivers the container to the container discharge wheel 7 at the delivery position i.
- the circular orbit of the container support 60a is in contact with the circular orbit of the container supply / discharge wheel 7 at the transfer position i, and the container support 60a can transfer the container to the container discharge wheel 7.
- the container support portion 60 a is provided with a plurality of container support portions 60 a at equal intervals in the circumferential direction of the outer transport path 10.
- the container support 60a is formed at the same pitch as the container support 50a of the inner conveyance path 9.
- the outer transport path 10 is supported on a transport wheel support base 53, and specifically supported by an outer wheel guide member 65 attached to the transport wheel support base 53. That is, the outer wheel gear 66 of the outer conveyance path 10 is slidably disposed on the outer peripheral surface of the outer wheel guide member 65, and the annular bearing 67 is provided on the sliding portion, and the outer wheel gear 66 serves as the outer wheel guide member. It can rotate with respect to 65 outer peripheral surfaces.
- the outer conveyance path 10 is provided with a bottom plate 60b that supports the container, and the above-described inner guide 60 is supported on the bottom plate 60b.
- the inner guide 60 is provided at an interval in the vertical direction so that the upper and lower portions of the middle position of the container can be supported.
- Teeth are formed on the outer peripheral surface of the outer wheel gear 66 and directly mesh with the main gear 68b attached to the upper part of the main shaft 68a of the servo motor 68.
- the outer wheel gear 66 is rotated by the driving force of the servo motor 68. can do.
- a support frame 64 is attached to the side of the transport wheel support base 53, a support plate 64a is provided on the upper portion of the support frame 64, and an outer guide 61 is disposed on the upper portion of the support plate 64a.
- the outer guide 61 is provided with an arcuate guide plate 64 b that supports the peripheral wall portion of the container 25.
- the guide plates 64b are arranged at intervals in the vertical direction.
- the outer guide 61 is disposed from the position of the container supply wheel 3 with the delivery position i as an end point (see FIG. 3).
- the inner conveyance path 9 and the outer conveyance path 10 are configured to rotate independently, and the height position of the inner conveyance path 9 is arranged at a position higher than the position of the outer conveyance path 10. Yes.
- the container discharge wheel 7 is rotatably supported by a rotation shaft 7a via a bearing 63 supported by a take-out wheel base 62.
- a rotating wheel 7b is disposed in the horizontal direction above the rotating shaft 7a.
- an annular plate-shaped inner guide 70 is provided in the horizontal direction.
- a curved groove-shaped container regulating portion 70a is provided in the circumferential direction.
- the container discharge wheel 7 is provided with an outer guide 71 on the outer peripheral side, and the container 25 is transported between the container regulating portion 70 a and the outer guide 71 at the delivery position i.
- the outer guide 71 is disposed between the delivery point i and the delivery point k shown in FIG.
- the container regulation part 70 a can receive the container 25 in cooperation with the container support part 60 a of the outer conveyance path 10.
- the inner guide 70 is provided at an interval in the vertical direction so that the upper and lower portions of the middle position of the container can be supported.
- the outer guide 71 has the same configuration as the outer guide 41 of the container supply wheel 3.
- the container discharge wheel 7 rotates by driving a servo motor 68. That is, in the servo motor 68, the belt 76 is stretched between the pulley 68c at the intermediate position in the vertical direction of the main shaft 68a and the pulley 7c provided on the rotating shaft 7a of the container discharge wheel 7.
- the driving force of the servo motor 68 is transmitted to the container discharge wheel 7 via the belt 76, and the rotating wheel 7b rotates.
- the container discharge wheel 7 rotates in the counterclockwise direction of the arrow j and extends in the rotational tangential direction of the container discharge wheel 7 at the delivery position k of the discharge conveyor 8 shown in FIG. 11.
- the container 25 can be delivered. In the discharge conveyor 8, the container 25 is conveyed along the linear direction of the arrow m.
- the container 25 is continuously conveyed by the supply conveyor 2 arrange
- the container 25 is supported between the container regulating portion 40 b of the inner guide 40 of the container supply wheel 3 and the guide plate 41 b of the outer guide 41 at the delivery position b of the supply conveyor 2. Then, the container 25 is supplied to the transport wheel 4 at the delivery position d of the inner transport path 9 of the transport wheel 4 in contact with the container supply wheel 3.
- the container supply wheel 3 can continuously supply the container 25 to the inner conveyance path 9 of the conveyance wheel 4.
- the container 25 is disposed on the container support portion 50 a of the inner guide 50, and the container 25 is continuously conveyed clockwise between the inner guide 50 and the outer guide 51.
- five vapor deposition apparatuses 1 are provided on the outer side in the radial direction of the transfer wheel 4 (FIG. 2 shows only one).
- FIGS. 1 and 3 show only one.
- the container 25 reaches the container take-out position p of the transport wheel 4 facing the vapor deposition apparatus 1a located on the downstream side, four containers 25 in the first group are changed to 4 by the transfer apparatuses 5 and 6 of the vapor deposition apparatus 1a.
- the two vapor deposition units 15 are delivered.
- the second group of containers 25 is delivered to the vapor deposition apparatus 1b, the third group of containers 25 to the vapor deposition apparatus 1c, the fourth group of containers 25 to the vapor deposition apparatus 1d, and the fifth group of containers 25 to the vapor deposition apparatus 1e.
- the container 25 After the container 25 is delivered to the vapor deposition apparatuses 1a to 1e, the container 25 after the leading position n before the container removal is continuously conveyed through the inner conveyance path 9 in the inner conveyance path 9.
- the turntable 14 rotates every 90 degrees from the first stage toward the second stage at regular cycle intervals.
- the container 25 is delivered by the container delivery devices 5 and 6 (see FIG. 1) described above.
- all of the containers 25 transported between the first group and the fifth group shown in FIG. 3 are taken out from the inner transport path 9 and supplied to the vapor deposition unit 15.
- the turntable 14 is rotated 90 degrees to move the vapor deposition unit 15 to the second stage.
- the vapor deposition unit 15 arranged on the fourth stage is transferred to the first stage by the rotation of the turntable 14.
- the container delivery devices 5 and 6 only supply the container 25 to the deposition unit 15.
- the transport wheel 4 the container 25 that was in the leading position n before the container removal on the inner transport path 9 is transported to the container removal position p.
- the container delivery apparatuses 5 and 6 supply the undeposited container 25 received from the inner conveyance path 9 to the vapor deposition unit 15 from which the container 25 has been taken out.
- the vapor-deposited container is accommodated in the decompression chamber 24. 25 is taken out and the container 25 is delivered to the outer conveyance path 10. After the second stage is completed, the turntable 14 is rotated 90 degrees to move the vapor deposition unit 15 to the third stage.
- the rotating table 14 is further rotated 90 degrees to move the vapor deposition unit 15 to the fourth stage.
- the turntable 14 rotates 90 degrees, the container 25 is disposed from the vapor deposition unit 15 so as to face the delivery devices 5 and 6, and the container 25 is delivered to the outer transport path 10.
- the transfer wheel 4 the container 25 is returned to the outer transfer path 10 from the vapor deposition apparatuses 1 a to 1 e by the transfer apparatuses 5 and 6.
- the container 25 is conveyed by rotating in the direction of arrow e shown in FIG. 2, and the container 25 is delivered to the container discharge wheel 7 at the delivery position i.
- the container 25 is stably transferred between the inner guide 60 and the outer guide 61.
- the container regulating portion 70a of the inner guide 70 of the container discharge wheel 7 and the container support portion 60a of the outer conveyance path 10 cooperate to smoothly move the container 25 from the outer conveyance path 10 to the container discharge wheel 7. Can be handed over.
- the container 25 is stably conveyed between the inner guide 70 and the outer guide 71.
- the container 25 is rotated in the counterclockwise direction indicated by the arrow j by the container discharge wheel 7 and can transfer the container 25 at the transfer position k of the discharge conveyor 8.
- the container 25 is conveyed along the linear direction of the arrow m, and the container 25 is supplied to the next process.
- the conveyance wheel 4 is rotatably arranged, the conveyance path is provided with two inner and outer routes in the radial direction, and the inner conveyance path 9 on the supply side of the container 25 and the outer conveyance on the container take-out side.
- the container 25 can be conveyed at high speed. That is, unlike the conventional apparatus shown in FIG. 12, there is no need for a plurality of branch paths and transfer path switching points, so there is no need to wait for the timing for switching the transfer path of the containers, and the supply and discharge times of the containers. Can be shortened.
- the plurality of vapor deposition apparatuses 1a to 1e which are container processing apparatuses, are arranged in the circumferential direction of the circular transfer wheel 4, the entire system does not extend in a straight line direction, and the installation area is effectively used. As a result, the system can be reduced by about 30% from the conventional system.
- the delivery devices 5 and 6 deliver the four containers 25 from the four vapor deposition units 15, but the number of delivery containers 25 of the containers 25 of the delivery devices 5 and 6 is plural. You may make it deliver not only a container but one container.
- the robots are used as the delivery devices 5 and 6 as the container delivery means of the present invention in the above embodiment, devices using other means may be used instead of the robots.
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Abstract
Description
システム151は、直線状に延びる搬送コンベア152に沿って複数(5台)の装置153が配設されている。
搬送コンベア152には、容器供給搬送路161と容器排出搬送路162とが備えられ、容器供給搬送路161では、1つの主ライン161aと、符合P1で示す5カ所の搬送路切換ポイントと、各切換ポイントP1から分岐する5つの分岐ライン161bとが備えられている。同様に、容器排出搬送路162では、1つの主ライン162aと、符合P2で示す4カ所の搬送路切換ポイントと、各切換ポイントP2にて主ライン162aに合流する4つの分岐ライン162bとが備えられている。
搬送コンベア152と装置153との間には、容器を搬送コンベア152から取出し、搬送コンベア152へ戻す容器受け渡し装置157が配設されていて、処理済みの容器は搬送コンベア152に戻され、次工程へ搬送される。
例えば、上流側装置153から順に容器を優先的に供給したような場合に、下流側装置153に容器が十分に行き渡らないで、稼働能力に応じた処理ができなかったりした。
また、上述したように、搬送コンベア152の搬送路途上に装置153などの処理装置が搬送コンベア152に沿って直列に複数台(5台)並設されると、システム151が搬送ラインコンベア152に沿う方向へ長くなり、設置エリアの有効活用ができず、その結果システム全体の設置面積が大きくなる。また、1つの装置153に対応させて1つの搬送コンベアを備えることもできるが、搬送コンベアが装置153と同じ数だけ必要となり、設置面積を狭くすることはできない。
本発明はこのような事情に鑑みてなされたものであって、容器の搬送路途上に容器の受け渡し装置があるような搬送路にて、容器の搬送スピードの高速化を図ることができると共にシステム全体の設置面積のコンパクト化が図れる容器搬送装置を提供することを目的とする。
上記容器搬送装置は、前記内側搬送路と前記外側搬送路とは個々に制御することとした。
上記容器搬送装置は、前記外側搬送路の高さ位置を前記内側搬送路の高さ位置と同等あるいは低くなるように配置した。
上記容器搬送装置の前記容器供給手段は、容器支持部を有する回転自在の容器供給ホイールを備え、該容器供給ホイールによる容器の搬送軌道と前記一方の搬送路による容器の搬送軌道との接点部を容器供給位置に設け、該接点部で容器を受け渡し、又、前記容器排出手段は、容器支持部を有する回転自在の容器排出ホイールを備え、該容器排出ホイールによる容器の搬送軌道と前記他方の搬送路による容器の搬送軌道との接点部を容器排出位置に設け、該接点部で容器を受け渡しすることとした。
上記容器搬送装置は、前記容器受け渡し手段の外周には前記搬送路の周方向に沿って複数個所に設けることとした。
また、搬送路途上で容器処理装置(蒸着装置)が複数あるような場合でも、システム全体が一直線方向へ延在することなく、設置面積の有効利用を図ることができるようになった。さらに、従来の装置では、容器供給搬送路と容器排出搬送路を備えていたが、実質的には、分岐路を含めると4つの搬送路によって容器を搬送し、設置面積を広くとる必要があったが、本発明では、容器の供給搬送路と排出搬送路のみであり、互いの搬送路の形状はことなるが、この点においても設置面積を狭くすることができる。
2 供給コンベア
3 容器供給ホイール
3a 回転軸
3b,7b 回転ホイール
3c ギア
4 搬送ホイール
5,6 容器受け渡し装置
7 容器排出ホイール
7a,48a 回転軸
7c,47a,47b,68c プーリ
8 排出コンベア
9 内側搬送路
10 外側搬送路
14 回転台
15 蒸着ユニット
24 減圧室
25 容器
34 マイクロ波発振器
39 タイミングスクリュー
39a 溝
40 インナーガイド
40a ガイド板
40b 容器規制部
41 アウターガイド
41a 底板
41b ガイドプレート
42 供給ホイール用基台
43,54 ブラケット
44 支持棒
45,63 ベアリング
46,68 サーボモータ
46a 主軸
46b 68b メインギア
48 中間ギア本体
48a 回動軸
48b 中間ギア
49,76 ベルト
50,60,70 インナーガイド
50a 容器支持部
50b,60b 底板
51,61,71 容器アウターガイド
51a 64b,74b ガイド板
53 搬送ホイール支持基台
54a,64a 支持板
55 内側ホイールガイド部材
56 内側ホイールギア
57,67 ベアリング
60a 容器支持部
62 取出ホイール用基台
64 支持フレーム
65 外側ホイールガイド部材
66 外側ホイールギア
68a 主軸
70a 容器規制部
d 容器供給位置
i 容器排出位置
f,h 容器受け渡し位置
蒸着システムは、容器が蒸着システムの上流側から下流側へ移動する間に、容器の内表面をマイクロ波によって機能性の原料を蒸着するものである。容器25は、蒸着システムの上流側に位置する供給コンベア2、容器供給ホイール3、搬送ホイール4、容器受け渡し装置(ロボット)5,6、蒸着装置1と流れ、再度容器受け渡し装置5,6、搬送ホイール4に戻され、該搬送ホイール4から容器排出ホイール7、排出コンベア8の順に流れる。なお、本実施形態では、容器25の作業工程の流れに沿って供給コンベア2側を上流側とし、排出コンベア8側を下流側とする。
容器供給ホイール3は、供給ホイール用基台42に軸受け45を介して、回転軸3aが回転可能に支持されている。回転軸3aの上部には回転ホイール3bのホイール面が水平方向に配設され、その半径方向外周部には、容器のインナーガイド40を備えている。インナーガイド40は環状のガイド板40aを備え、ガイド板40aの外周側端面には、湾曲した溝形状の容器規制部40bを形成している。該容器規制部40bは、上述したタイミングスクリュー39の溝39aと協働し、容器供給ホイール3が容器25を受け取ることができる。ガイド板40aは、容器の中間位置の上部と下部を支持できるように、上下に間隔を空けて設けられている。
図6に示すように、アウターガイド41は、供給ホイール用基台42の側壁に取付けられたL字形状のブラケット43上に立設された支持棒44に支持され、該アウターガイドには、容器25を支える底板41aと容器の周壁部を支持する円弧状のガイドプレート41b設けられている。ガイドプレート41bは上下方向に間隔を空けて配設されている。
内側搬送路9には、円弧状のインナーガイド50を設け、インナーガイド50の外周側端面には、湾曲した溝形状の容器支持部50aが周方向に等間隔で複数設けられている。容器支持部50aの円軌道は、受け渡し位置dで容器供給ホイール3の円軌道と接し、上述した容器供給ホイール3の容器規制部40bと協働して、受け渡し位置dで容器支持部50aが容器を受け取ることができる。
内側搬送路9は、容器を載置する底板50bを設け、底板50bに上述したインナーガイド50を支持させている。インナーガイド50は、容器の中間位置の上部と下部を支持できるように、上下方向に間隔を空けて2個設けられている。
ブラケット54の上部には支持板54aを設け、支持板のさらに上部には、アウターガイド51が配設されている。アウターガイド51は、容器の周壁部を支持する円弧状のガイド板51aが設けられている。ガイド板51aは上下方向に間隔を空けて2個が配設されている。アウターガイド51は、内側搬送路9の受け渡し位置dを起点として容器排出ホイール7まで配設されている(図3参照)。
図2に示すように、搬送ホイール4は、内側搬送路9の受け渡しエリアfまで容器を搬送し、受渡し装置5,6に容器を受け渡すことができる。受け渡し装置5,6は、回転軸を中心に、蒸着装置1側へ回転(反転)することができる。
蒸着装置1には、回転台14を設け、回転台14は矢印gの時計回り方向へ回転可能であり、回転台14の外周部には、複数の蒸着ユニット15が配設されている。本実施形態では、蒸着ユニット15が回転台14の周方向へ16個配設され、2個の蒸着ユニット15を1組として一体に配設している。各蒸着ユニット15は、回転台14の回転移動によって、同心円上に円周軌道に沿って移動することができる。
蒸着ユニット15には、横断面が円形の減圧室24を設け、室内を減圧できるよう図示しない真空ポンプが接続されている。蒸着ユニット15には、減圧室24と連通する導波管32が設けられている。導波管32には、マイクロ波発振器34が近接する。
容器受け渡し装置5,6は、容器25の減圧室24への供給と共に、取り出しもすることができる。これらの受け渡し装置5,6は、図8の第1ステージと表示する部位に配置されている4つの蒸着ユニット15について、容器25の出し入れをすることができる。そして、受け渡し装置5,6は、図2に示す搬送ホイール4の受け渡しエリアhで、外側搬送路10へ容器25を受け渡すことができる。
外側搬送路10は、矢印eの時計回り方向へ回転して容器25を搬送し、受け渡し位置iで容器を容器排出ホイール7に受け渡す。容器支持部60aの円軌道は、受け渡し位置iで容器供給排出ホイール7の円軌道と接し、容器支持部60aが容器を容器排出ホイール7に受け渡すことができる。
容器支持部60aは、外側搬送路10の周方向に等間隔で複数の容器支持部60aを配設している。容器支持部60aは、内側搬送路9の容器支持部50aと同ピッチに形成されている。
外側搬送路10は、容器を支える底板60bを設け、底板60bに上述したインナーガイド60を支持させている。インナーガイド60は、容器の中間位置の上部と下部を支持できるように、上下方向に間隔を空けて設けられている。
搬送ホイール支持基台53の側部には、支持フレーム64を取付け、支持フレーム64の上部には、支持板64aを設け、支持板64aのさらに上部には、アウターガイド61が配設されている。アウターガイド61は、容器25の周壁部を支持する円弧状のガイド板64bが設けられている。ガイド板64bは上下方向に間隔を空けて配設されている。アウターガイド61は、容器供給ホイール3の位置から受け渡し位置iを終点として配設されている(図3参照)。
このように、内側搬送路9と外側搬送路10は、各々が独立して回転するように構成され、内側搬送路9の高さ位置は外側搬送路10の位置よりも高い位置に配置されている。
図3に示すように、容器排出ホイール7には、外周側にアウターガイド71が設けられており、容器25は受け渡し位置iにて、容器規制部70aとアウターガイド71間を搬送される。アウターガイド71は、図2に示す受け渡し点iと受け渡し点kとの間に配設される。
容器排出ホイール7は、容器規制部70aが外側搬送路10の容器支持部60aと協働して容器25を受け取ることができる。インナーガイド70は、容器の中間位置の上部と下部を支持できるように、上下に間隔を空けて設けられている。アウターガイド71は、容器供給ホイール3のアウターガイド41と同じ構成である。
図2に示すように、容器排出ホイール7は、矢印jの反時計回方向へ回転し、容器排出ホイール7の回転接線方向に延在する図11に示す排出コンベア8の受け渡し位置kにて、容器25の受け渡しができる。
排出コンベア8では、矢印mの直線方向へ沿って容器25を搬送する。
図3を参照にして、蒸着システムにおける初期の稼働時では、容器25は、蒸着システムの上流側位置に配設されている供給コンベア2によって、連続的に搬送される。容器25は、供給コンベア2の受け渡し位置bで、容器供給ホイール3のインナーガイド40の容器規制部40bとアウターガイド41のガイドプレート41bとの間に支持されている。そして、容器供給ホイール3と回転軌道が接する搬送ホイール4の内側搬送路9の受け渡し位置dで容器25を、搬送ホイール4に供給する。容器供給ホイール3は、このように、搬送ホイール4の内側搬送路9に容器25を連続的に供給することができる。内側搬送路9では、インナーガイド50の容器支持部50aに容器25が配設され、容器25は、インナーガイド50とアウターガイド51との間を時計回りに連続的に搬送される。
この際、搬送ホイール4では、内側搬送路9の容器取出前先頭位置nにあった容器25が容器取出位置pまで搬送される。そして、容器受け渡し装置5,6は、容器25が取り出された蒸着ユニット15に、内側搬送路9から受け取った蒸着未処理の容器25を供給する。
なお、容器25の蒸着作業が1サイクル終了以降である場合は、蒸着済みの容器が減圧室24に収容されているので、受け渡し装置5,6によって内側搬送路9の受け渡しエリアfで4つの容器25の取り出しを行って、外側搬送路10に容器25の受け渡しを行う。
第2ステージが終了した後は、回転台14を90度回転させて、蒸着ユニット15を第3ステージに移動させる。
第4ステージが終了した後は、回転台14が90度回転し、蒸着ユニット15から容器25が受け渡し装置5,6に対向して配置され、外側搬送路10に容器25が受け渡される。
搬送ホイール4では、蒸着装置1a~1eから受け渡し装置5,6によって、容器25が外側搬送路10に戻される。
受け渡し位置iでは、容器排出ホイール7のインナーガイド70の容器規制部70aと外側搬送路10の容器支持部60aとが協働して、外側搬送路10から容器排出ホイール7に容器25を円滑に受け渡すことができる。容器排出ホイール7では、容器25がインナーガイド70とアウターガイド71との間を安定して搬送される。
容器25は、容器排出ホイール7にて、矢印jの反時計回方向へ回転し、排出コンベア8の受け渡し位置kで容器25を受け渡すことができる。
排出コンベア8では、矢印mの直線方向へ沿って容器25を搬送し、次工程に容器25を供給する。
また、容器処理装置である複数の蒸着装置1a~1eを円形の搬送ホイール4の円周方向へ配設するようにしたので、システム全体が一直線方向へ延在することなく、設置面積の有効利用を図ることができるようになり、従来のシステムより約3割減少させることができた。
上記実施形態では、受け渡し装置5,6が4つの蒸着ユニット15から4つの容器25の受け渡しをするようにしたが、この受け渡し装置5,6の容器25の受け渡しの容器25の数は、複数の容器に限らず1つの容器を受け渡すようにしてもよい。
本発明の容器受け渡し手段としての受け渡し装置5,6は、上記実施形態ではロボットを使用したが、ロボットに代えて他の手段による装置を使用してもよい。
Claims (6)
- 容器を受け取る容器供給位置と容器を受け渡す容器排出位置とを有し、前記容器供給位置から前記容器排出位置まで容器を搬送する搬送路を備え、該搬送路の容器搬送途上で、一旦容器が前記搬送路外に取り出された後に再度前記搬送路に戻される容器受け渡し位置を有した容器搬送装置において、
前記搬送路は、回転軸を中心に回転する内側搬送路と同一軸上で外周側に配設される外側搬送路とを備え、前記内側搬送路と前記外側搬送路のうち一方の搬送路上の容器供給位置にて容器を供給する容器供給手段を設け、他方の搬送路上の容器排出位置にて容器を排出する容器排出手段を設け、
前記容器受け渡し位置にて前記一方の搬送路から容器が取り出された後に前記他方の搬送路に容器を戻すようにした容器受け渡し手段を設けたことを特徴とする容器搬送装置。 - 前記内側搬送路と前記外側搬送路とは個々に制御が可能であることを特徴とする請求項1に記載の容器搬送装置。
- 前記外側搬送路の高さ位置を前記内側搬送路の高さ位置と同等あるいは低くなるように配置したことを特徴とする請求項1又は2に記載の容器搬送装置。
- 前記容器供給手段は、容器支持部を有する回転自在の容器供給ホイールを備え、該容器供給ホイールによる容器の搬送軌道と前記一方の搬送路による容器の搬送軌道との接点部を容器供給位置に設け、該接点部で容器を受け渡し、
又、前記容器排出手段は、容器支持部を有する回転自在の容器排出ホイールを備え、該容器排出ホイールによる容器の搬送軌道と前記他方の搬送路による容器の搬送軌道との接点部を容器排出位置に設け、該接点部で容器を受け渡しするようにしたことを特徴とする請求項1~3のいずれかに記載の容器搬送装置。 - 前記容器受け渡し手段を前記搬送路の周方向に沿って複数個所に設けたことを特徴とする請求項1~4のいずれかに記載の容器搬送装置。
- 前記容器受け渡し手段の外周には、容器の面をコーティングするコーティング装置を配設するようにしたことを特徴とする請求項1~5のいずれかに記載の容器搬送装置。
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- 2008-04-21 CN CN200880001320A patent/CN101678966A/zh active Pending
- 2008-04-21 JP JP2009516773A patent/JP5392078B2/ja not_active Expired - Fee Related
- 2008-04-21 US US12/445,893 patent/US20100163367A1/en not_active Abandoned
- 2008-04-21 EP EP08740738A patent/EP2179946A1/en not_active Withdrawn
- 2008-04-21 KR KR1020097009060A patent/KR20100136394A/ko not_active Application Discontinuation
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Cited By (2)
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JP2016511152A (ja) * | 2013-02-21 | 2016-04-14 | マル プルス ヘアラン シュヴァイツ アクチエンゲゼルシャフトMall + Herlan Schweiz AG | 送り装置および連続的に送る方法 |
WO2023139875A1 (ja) * | 2022-01-19 | 2023-07-27 | 株式会社フジシールインターナショナル | 搬送装置 |
Also Published As
Publication number | Publication date |
---|---|
JP5392078B2 (ja) | 2014-01-22 |
EP2179946A1 (en) | 2010-04-28 |
JPWO2009130751A1 (ja) | 2011-08-11 |
KR20100136394A (ko) | 2010-12-28 |
CN101678966A (zh) | 2010-03-24 |
US20100163367A1 (en) | 2010-07-01 |
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