WO2009127274A3 - Mikromechanisches bauteil mit drehbarem stellelement, verfahren zum betreiben des bauteils und herstellungsverfahren für das bauteil - Google Patents
Mikromechanisches bauteil mit drehbarem stellelement, verfahren zum betreiben des bauteils und herstellungsverfahren für das bauteil Download PDFInfo
- Publication number
- WO2009127274A3 WO2009127274A3 PCT/EP2008/066721 EP2008066721W WO2009127274A3 WO 2009127274 A3 WO2009127274 A3 WO 2009127274A3 EP 2008066721 W EP2008066721 W EP 2008066721W WO 2009127274 A3 WO2009127274 A3 WO 2009127274A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- component
- adjusting element
- spring
- production
- lever element
- Prior art date
Links
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
- B81B3/0035—Constitution or structural means for controlling the movement of the flexible or deformable elements
- B81B3/004—Angular deflection
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
- B81B3/0035—Constitution or structural means for controlling the movement of the flexible or deformable elements
- B81B3/0037—For increasing stroke, i.e. achieve large displacement of actuated parts
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/085—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by electromagnetic means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/03—Microengines and actuators
- B81B2201/033—Comb drives
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/03—Microengines and actuators
- B81B2201/037—Microtransmissions
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2203/00—Basic microelectromechanical structures
- B81B2203/01—Suspended structures, i.e. structures allowing a movement
- B81B2203/0181—See-saws
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2203/00—Basic microelectromechanical structures
- B81B2203/05—Type of movement
- B81B2203/058—Rotation out of a plane parallel to the substrate
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Electromagnetism (AREA)
- Micromachines (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
Abstract
Die Erfindung betrifft ein mikromechanisches Bauteil mit einer Feder (20a, 20b), einem an einem ersten Ende der Feder (20a, 20b) befestigten Hebelelement (22a, 22b), einer Antriebeinrichtung, welche dazu ausgelegt ist, das Hebelelement (22a, 22b) um eine senkrecht zu einer Längsachse des Hebelelements (22a, 22b) ausgerichtete erste Drehachse zu drehen, und einem an einem zweiten Ende der Feder (20a, 20b) befestigten Stellelement (10), welches so mittels der Feder (20a, 20b) an das Hebelelement (22a, 22b) gekoppelt ist, dass bei einem Drehen des Hebelelements (22a, 22b) um die erste Drehachse mittels der Antriebeinrichtung das Stellelement (10) um eine zweite Drehachse (18) gedreht wird. Zusätzlich betrifft die Erfindung ein Verfahren zum Betreiben eines mikromechanischen Bauteils. Des Weiteren betrifft die Erfindung ein Herstellungsverfahren für ein mikromechanisches Bauteil.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE200810001238 DE102008001238A1 (de) | 2008-04-17 | 2008-04-17 | Mikromechanisches Bauteil, Verfahren zum Betreiben eines mikromechanischen Bauteils und Herstellungsverfahren für ein mikromechanisches Bauteil |
DE102008001238.6 | 2008-04-17 |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2009127274A2 WO2009127274A2 (de) | 2009-10-22 |
WO2009127274A3 true WO2009127274A3 (de) | 2010-05-14 |
Family
ID=41078432
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/EP2008/066721 WO2009127274A2 (de) | 2008-04-17 | 2008-12-03 | Mikromechanisches bauteil, verfahren zum betreiben eines mikromechanischen bauteils und herstellungsverfahren für ein mikromechanisches bauteil |
Country Status (2)
Country | Link |
---|---|
DE (1) | DE102008001238A1 (de) |
WO (1) | WO2009127274A2 (de) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102011103190A1 (de) * | 2011-05-30 | 2012-09-20 | Carl Zeiss Ag | Mikro-elektro-mechanisches System mit einer Übersetzung für einen bewegbaren Spiegel |
CN105143958B (zh) * | 2013-04-24 | 2018-10-16 | 罗伯特·博世有限公司 | 微机械部件和用于微机械部件的制造方法 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20040008400A1 (en) * | 2001-12-05 | 2004-01-15 | Jds Uniphase Corporation | Articulated MEMS electrostatic rotary actuator |
US6781744B1 (en) * | 2003-06-11 | 2004-08-24 | Lucent Technologies Inc. | Amplification of MEMS motion |
US20080061026A1 (en) * | 2003-12-02 | 2008-03-13 | Adriatic Research Institute | Gimbal-less micro-electro-mechanical-system tip-tilt and tip-tilt-piston actuators and a method for forming the same |
-
2008
- 2008-04-17 DE DE200810001238 patent/DE102008001238A1/de not_active Ceased
- 2008-12-03 WO PCT/EP2008/066721 patent/WO2009127274A2/de active Application Filing
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20040008400A1 (en) * | 2001-12-05 | 2004-01-15 | Jds Uniphase Corporation | Articulated MEMS electrostatic rotary actuator |
US6781744B1 (en) * | 2003-06-11 | 2004-08-24 | Lucent Technologies Inc. | Amplification of MEMS motion |
US20080061026A1 (en) * | 2003-12-02 | 2008-03-13 | Adriatic Research Institute | Gimbal-less micro-electro-mechanical-system tip-tilt and tip-tilt-piston actuators and a method for forming the same |
Also Published As
Publication number | Publication date |
---|---|
DE102008001238A1 (de) | 2009-10-22 |
WO2009127274A2 (de) | 2009-10-22 |
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