WO2009127274A3 - Mikromechanisches bauteil mit drehbarem stellelement, verfahren zum betreiben des bauteils und herstellungsverfahren für das bauteil - Google Patents

Mikromechanisches bauteil mit drehbarem stellelement, verfahren zum betreiben des bauteils und herstellungsverfahren für das bauteil Download PDF

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Publication number
WO2009127274A3
WO2009127274A3 PCT/EP2008/066721 EP2008066721W WO2009127274A3 WO 2009127274 A3 WO2009127274 A3 WO 2009127274A3 EP 2008066721 W EP2008066721 W EP 2008066721W WO 2009127274 A3 WO2009127274 A3 WO 2009127274A3
Authority
WO
WIPO (PCT)
Prior art keywords
component
adjusting element
spring
production
lever element
Prior art date
Application number
PCT/EP2008/066721
Other languages
English (en)
French (fr)
Other versions
WO2009127274A2 (de
Inventor
Tjalf Pirk
Stefan Pinter
Joerg Muchow
Joachim Fritz
Christoph Friese
Original Assignee
Robert Bosch Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch Gmbh filed Critical Robert Bosch Gmbh
Publication of WO2009127274A2 publication Critical patent/WO2009127274A2/de
Publication of WO2009127274A3 publication Critical patent/WO2009127274A3/de

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0035—Constitution or structural means for controlling the movement of the flexible or deformable elements
    • B81B3/004—Angular deflection
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0035—Constitution or structural means for controlling the movement of the flexible or deformable elements
    • B81B3/0037—For increasing stroke, i.e. achieve large displacement of actuated parts
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/085—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by electromagnetic means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/03—Microengines and actuators
    • B81B2201/033—Comb drives
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/03—Microengines and actuators
    • B81B2201/037—Microtransmissions
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/01—Suspended structures, i.e. structures allowing a movement
    • B81B2203/0181—See-saws
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/05—Type of movement
    • B81B2203/058—Rotation out of a plane parallel to the substrate

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Electromagnetism (AREA)
  • Micromachines (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)

Abstract

Die Erfindung betrifft ein mikromechanisches Bauteil mit einer Feder (20a, 20b), einem an einem ersten Ende der Feder (20a, 20b) befestigten Hebelelement (22a, 22b), einer Antriebeinrichtung, welche dazu ausgelegt ist, das Hebelelement (22a, 22b) um eine senkrecht zu einer Längsachse des Hebelelements (22a, 22b) ausgerichtete erste Drehachse zu drehen, und einem an einem zweiten Ende der Feder (20a, 20b) befestigten Stellelement (10), welches so mittels der Feder (20a, 20b) an das Hebelelement (22a, 22b) gekoppelt ist, dass bei einem Drehen des Hebelelements (22a, 22b) um die erste Drehachse mittels der Antriebeinrichtung das Stellelement (10) um eine zweite Drehachse (18) gedreht wird. Zusätzlich betrifft die Erfindung ein Verfahren zum Betreiben eines mikromechanischen Bauteils. Des Weiteren betrifft die Erfindung ein Herstellungsverfahren für ein mikromechanisches Bauteil.
PCT/EP2008/066721 2008-04-17 2008-12-03 Mikromechanisches bauteil, verfahren zum betreiben eines mikromechanischen bauteils und herstellungsverfahren für ein mikromechanisches bauteil WO2009127274A2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE200810001238 DE102008001238A1 (de) 2008-04-17 2008-04-17 Mikromechanisches Bauteil, Verfahren zum Betreiben eines mikromechanischen Bauteils und Herstellungsverfahren für ein mikromechanisches Bauteil
DE102008001238.6 2008-04-17

Publications (2)

Publication Number Publication Date
WO2009127274A2 WO2009127274A2 (de) 2009-10-22
WO2009127274A3 true WO2009127274A3 (de) 2010-05-14

Family

ID=41078432

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2008/066721 WO2009127274A2 (de) 2008-04-17 2008-12-03 Mikromechanisches bauteil, verfahren zum betreiben eines mikromechanischen bauteils und herstellungsverfahren für ein mikromechanisches bauteil

Country Status (2)

Country Link
DE (1) DE102008001238A1 (de)
WO (1) WO2009127274A2 (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102011103190A1 (de) * 2011-05-30 2012-09-20 Carl Zeiss Ag Mikro-elektro-mechanisches System mit einer Übersetzung für einen bewegbaren Spiegel
CN105143958B (zh) * 2013-04-24 2018-10-16 罗伯特·博世有限公司 微机械部件和用于微机械部件的制造方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040008400A1 (en) * 2001-12-05 2004-01-15 Jds Uniphase Corporation Articulated MEMS electrostatic rotary actuator
US6781744B1 (en) * 2003-06-11 2004-08-24 Lucent Technologies Inc. Amplification of MEMS motion
US20080061026A1 (en) * 2003-12-02 2008-03-13 Adriatic Research Institute Gimbal-less micro-electro-mechanical-system tip-tilt and tip-tilt-piston actuators and a method for forming the same

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040008400A1 (en) * 2001-12-05 2004-01-15 Jds Uniphase Corporation Articulated MEMS electrostatic rotary actuator
US6781744B1 (en) * 2003-06-11 2004-08-24 Lucent Technologies Inc. Amplification of MEMS motion
US20080061026A1 (en) * 2003-12-02 2008-03-13 Adriatic Research Institute Gimbal-less micro-electro-mechanical-system tip-tilt and tip-tilt-piston actuators and a method for forming the same

Also Published As

Publication number Publication date
DE102008001238A1 (de) 2009-10-22
WO2009127274A2 (de) 2009-10-22

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