WO2009121051A3 - X-ray inspection systems and methods - Google Patents

X-ray inspection systems and methods Download PDF

Info

Publication number
WO2009121051A3
WO2009121051A3 PCT/US2009/038748 US2009038748W WO2009121051A3 WO 2009121051 A3 WO2009121051 A3 WO 2009121051A3 US 2009038748 W US2009038748 W US 2009038748W WO 2009121051 A3 WO2009121051 A3 WO 2009121051A3
Authority
WO
WIPO (PCT)
Prior art keywords
ray
detector
carriage
stage
methods
Prior art date
Application number
PCT/US2009/038748
Other languages
French (fr)
Other versions
WO2009121051A2 (en
Inventor
Steven Ainsworth
Qiang Fu
Dragos Golubovic
Jason Mcgaffey
Benjamin Kingsley Stuart Peecock
Owen Yik-On Sit
Original Assignee
Nordson Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nordson Corporation filed Critical Nordson Corporation
Publication of WO2009121051A2 publication Critical patent/WO2009121051A2/en
Publication of WO2009121051A3 publication Critical patent/WO2009121051A3/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302—Contactless testing
    • G01R31/304—Contactless testing of printed or hybrid circuits
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/02—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
    • G01N23/04—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material
    • G01N23/044—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material using laminography or tomosynthesis
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/30—Accessories, mechanical or electrical features
    • G01N2223/33—Accessories, mechanical or electrical features scanning, i.e. relative motion for measurement of successive object-parts
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/60—Specific applications or type of materials
    • G01N2223/611—Specific applications or type of materials patterned objects; electronic devices
    • G01N2223/6113—Specific applications or type of materials patterned objects; electronic devices printed circuit board [PCB]

Abstract

X-ray inspection systems and methods for inspecting a region of interest on a printed circuit board. The system includes an X-ray source configured to emit an X-ray beam, an X-ray detector, an X-Y transport mechanism configured to hold and move the printed circuit board in an inspection plane situated between the X-ray source and the X-ray detector, and an X-Y transport mechanism having a carnage coupled with the detector such that the detector faces toward the X-ray source, a first stage coupled with the carriage, and a second stage also coupled with the carriage. The first stage is configured to move the carriage in an X-direction. The second stage is configured to independently move the carriage in a Y-direction orthogonal to the X-direction so that the detector is movable within an imaging plane.
PCT/US2009/038748 2008-03-28 2009-03-30 X-ray inspection systems and methods WO2009121051A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US4024408P 2008-03-28 2008-03-28
US61/040,244 2008-03-28

Publications (2)

Publication Number Publication Date
WO2009121051A2 WO2009121051A2 (en) 2009-10-01
WO2009121051A3 true WO2009121051A3 (en) 2010-01-07

Family

ID=41114817

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2009/038748 WO2009121051A2 (en) 2008-03-28 2009-03-30 X-ray inspection systems and methods

Country Status (1)

Country Link
WO (1) WO2009121051A2 (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5544636B2 (en) * 2009-10-20 2014-07-09 東芝Ｉｔコントロールシステム株式会社 Tomography equipment
US8831179B2 (en) 2011-04-21 2014-09-09 Carl Zeiss X-ray Microscopy, Inc. X-ray source with selective beam repositioning
JP5863547B2 (en) * 2012-04-20 2016-02-16 ヤマハ発動機株式会社 Printed circuit board inspection equipment
EP2927944A1 (en) * 2014-04-04 2015-10-07 Nordson Corporation X-ray inspection apparatus for inspecting semiconductor wafers
JP6722048B2 (en) * 2016-06-09 2020-07-15 キヤノン株式会社 Stage device and linear actuator
KR20210021067A (en) * 2018-10-15 2021-02-24 가부시키가이샤 도쿄 웰드 Non-destructive automatic inspection system
US11555793B1 (en) 2021-08-04 2023-01-17 International Business Machines Corporation Anti-vibration fixturing system for nondestructive testing

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20030058983A1 (en) * 2000-12-06 2003-03-27 Dale Thayer Off-center tomosynthesis
US20060274883A1 (en) * 2005-06-02 2006-12-07 Buck Dean C X-ray inspection system having on-axis and off-axis sensors
US7215736B1 (en) * 2004-03-05 2007-05-08 Xradia, Inc. X-ray micro-tomography system optimized for high resolution, throughput, image quality

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20030058983A1 (en) * 2000-12-06 2003-03-27 Dale Thayer Off-center tomosynthesis
US7215736B1 (en) * 2004-03-05 2007-05-08 Xradia, Inc. X-ray micro-tomography system optimized for high resolution, throughput, image quality
US20060274883A1 (en) * 2005-06-02 2006-12-07 Buck Dean C X-ray inspection system having on-axis and off-axis sensors

Also Published As

Publication number Publication date
WO2009121051A2 (en) 2009-10-01

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