WO2009066624A1 - ガラス基板のエッチング処理方法 - Google Patents

ガラス基板のエッチング処理方法 Download PDF

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Publication number
WO2009066624A1
WO2009066624A1 PCT/JP2008/070813 JP2008070813W WO2009066624A1 WO 2009066624 A1 WO2009066624 A1 WO 2009066624A1 JP 2008070813 W JP2008070813 W JP 2008070813W WO 2009066624 A1 WO2009066624 A1 WO 2009066624A1
Authority
WO
WIPO (PCT)
Prior art keywords
glass substrate
etching
substrate surface
etching glass
concentration
Prior art date
Application number
PCT/JP2008/070813
Other languages
English (en)
French (fr)
Inventor
Yoshitaka Saijo
Yuichi Suzuki
Ryoji Akiyama
Atsuyoshi Takenaka
Junichiro Kase
Original Assignee
Asahi Glass Co., Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asahi Glass Co., Ltd. filed Critical Asahi Glass Co., Ltd.
Priority to JP2009542539A priority Critical patent/JPWO2009066624A1/ja
Priority to CN200880116763A priority patent/CN101868428A/zh
Publication of WO2009066624A1 publication Critical patent/WO2009066624A1/ja
Priority to US12/781,884 priority patent/US8273262B2/en

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C15/00—Surface treatment of glass, not in the form of fibres or filaments, by etching
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K13/00—Etching, surface-brightening or pickling compositions
    • C09K13/04—Etching, surface-brightening or pickling compositions containing an inorganic acid
    • C09K13/08—Etching, surface-brightening or pickling compositions containing an inorganic acid containing a fluorine compound

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Inorganic Chemistry (AREA)
  • Surface Treatment Of Glass (AREA)
  • Electroluminescent Light Sources (AREA)

Abstract

　本発明は、ガラス基板の薄板化を目的とするエッチング処理方法であって、エッチングレートが高く、かつ、ガラス基板表面でのヘイズの発生を抑制することができるエッチング処理方法を提供する。本発明は、ガラス基板表面をエッチング量で１～６９０μｍエッチング処理するガラス基板表面のエッチング処理方法において、前記エッチング処理がＨＦ濃度１～５ｗｔ％、ＨＣｌ濃度１ｗｔ％以上のエッチング液により行われることを特徴とするガラス基板表面のエッチング処理方法に関する。
PCT/JP2008/070813 2007-11-19 2008-11-14 ガラス基板のエッチング処理方法 WO2009066624A1 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2009542539A JPWO2009066624A1 (ja) 2007-11-19 2008-11-14 ガラス基板のエッチング処理方法
CN200880116763A CN101868428A (zh) 2007-11-19 2008-11-14 玻璃基板的蚀刻处理方法
US12/781,884 US8273262B2 (en) 2007-11-19 2010-05-18 Method for etching glass substrate

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007-299066 2007-11-19
JP2007299066 2007-11-19

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US12/781,884 Continuation US8273262B2 (en) 2007-11-19 2010-05-18 Method for etching glass substrate

Publications (1)

Publication Number Publication Date
WO2009066624A1 true WO2009066624A1 (ja) 2009-05-28

Family

ID=40667447

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/070813 WO2009066624A1 (ja) 2007-11-19 2008-11-14 ガラス基板のエッチング処理方法

Country Status (6)

Country Link
US (1) US8273262B2 (ja)
JP (1) JPWO2009066624A1 (ja)
KR (1) KR20100087168A (ja)
CN (1) CN101868428A (ja)
TW (1) TWI429606B (ja)
WO (1) WO2009066624A1 (ja)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009157378A1 (ja) * 2008-06-25 2009-12-30 旭硝子株式会社 無アルカリガラス基板のエッチング方法及び表示デバイス
US20120052302A1 (en) * 2010-08-24 2012-03-01 Matusick Joseph M Method of strengthening edge of glass article
KR20150077319A (ko) 2013-12-27 2015-07-07 아사히 가라스 가부시키가이샤 유리 기판 및 유리 기판의 제조 방법
JP5761187B2 (ja) * 2010-06-21 2015-08-12 旭硝子株式会社 ガラス板の研磨方法、ガラス板の製造方法、およびガラス板の製造装置
JP2015523306A (ja) * 2012-05-31 2015-08-13 コーニング インコーポレイテッド ウエット酸エッチングにおけるスラッジ制御のための方法
KR20160145616A (ko) 2014-04-28 2016-12-20 아사히 가라스 가부시키가이샤 무알칼리 유리
US9663395B2 (en) 2012-06-07 2017-05-30 Asahi Glass Company, Limited Alkali-free glass and alkali-free glass plate using same

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2521699A1 (en) * 2010-01-07 2012-11-14 Corning Incorporated Impact-damage-resistant glass sheet
TWI452024B (zh) * 2010-10-28 2014-09-11 Novatech Co Ltd 可高效率地提取光之玻璃基板及其製造方法
CN102180598B (zh) * 2010-12-30 2012-12-05 东旭集团有限公司 一种借助化学方法提高玻璃透光率的工艺及清洗***
KR101223877B1 (ko) * 2011-03-14 2013-01-17 노바테크인더스트리 주식회사 초박판 패널 제조 시스템
US9315412B2 (en) * 2011-07-07 2016-04-19 Corning Incorporated Surface flaw modification for strengthening of glass articles
CN104321289B (zh) 2011-11-10 2017-04-19 康宁股份有限公司 玻璃的酸强化
US9488857B2 (en) 2014-01-10 2016-11-08 Corning Incorporated Method of strengthening an edge of a glass substrate
KR102269921B1 (ko) * 2014-03-31 2021-06-28 삼성디스플레이 주식회사 유리 강화용 조성물 및 이를 이용한 터치 스크린 글래스의 제조 방법
CN104761150B (zh) * 2015-03-16 2017-09-22 南昌欧菲光学技术有限公司 玻璃蚀刻液、利用该蚀刻液蚀刻玻璃的方法、盖板玻璃及其制备方法
CN106673455B (zh) * 2016-12-31 2018-10-23 赫得纳米科技（黄石）有限公司 用于液晶显示屏玻璃基板表面处理的组合物
CN106630659B (zh) * 2017-01-09 2019-09-20 天津美泰真空技术有限公司 一种tft玻璃基板薄化工艺预处理液
WO2018226513A1 (en) * 2017-06-05 2018-12-13 Corning Incorporated Methods of etching glass articles
CN107946482A (zh) * 2017-11-09 2018-04-20 信利半导体有限公司 一种柔性显示器的制作方法
CN113087404A (zh) * 2021-04-07 2021-07-09 惠州市清洋实业有限公司 一种钢化玻璃大r角深度刻蚀液及其刻蚀方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003020255A (ja) * 2001-04-12 2003-01-24 Nishiyama Stainless Chem Kk ガラス基板の化学加工方法
JP2003313049A (ja) * 2002-04-19 2003-11-06 Asahi Glass Co Ltd エッチング液、ガラス基板のエッチング処理方法およびエッチング液の再生処理方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06340448A (ja) 1993-05-26 1994-12-13 Asahi Glass Co Ltd ガラスのエッチング処理方法
JP2000164586A (ja) * 1998-11-24 2000-06-16 Daikin Ind Ltd エッチング液
US6479395B1 (en) * 1999-11-02 2002-11-12 Alien Technology Corporation Methods for forming openings in a substrate and apparatuses with these openings and methods for creating assemblies with openings
JP2002237030A (ja) 2001-02-13 2002-08-23 Nippon Sheet Glass Co Ltd 情報記録媒体用基板及びその製造方法
US6830979B2 (en) * 2001-05-23 2004-12-14 Matsushita Electric Industrial Co., Ltd. Method for fabricating semiconductor device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003020255A (ja) * 2001-04-12 2003-01-24 Nishiyama Stainless Chem Kk ガラス基板の化学加工方法
JP2003313049A (ja) * 2002-04-19 2003-11-06 Asahi Glass Co Ltd エッチング液、ガラス基板のエッチング処理方法およびエッチング液の再生処理方法

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009157378A1 (ja) * 2008-06-25 2009-12-30 旭硝子株式会社 無アルカリガラス基板のエッチング方法及び表示デバイス
JP5423674B2 (ja) * 2008-06-25 2014-02-19 旭硝子株式会社 無アルカリガラス基板のエッチング方法及び表示デバイス
JP5761187B2 (ja) * 2010-06-21 2015-08-12 旭硝子株式会社 ガラス板の研磨方法、ガラス板の製造方法、およびガラス板の製造装置
KR101853984B1 (ko) * 2010-06-21 2018-05-02 아사히 가라스 가부시키가이샤 유리판, 유리판의 연마 방법, 유리판의 제조 방법 및 유리판의 제조 장치
US20120052302A1 (en) * 2010-08-24 2012-03-01 Matusick Joseph M Method of strengthening edge of glass article
JP2015523306A (ja) * 2012-05-31 2015-08-13 コーニング インコーポレイテッド ウエット酸エッチングにおけるスラッジ制御のための方法
US9663395B2 (en) 2012-06-07 2017-05-30 Asahi Glass Company, Limited Alkali-free glass and alkali-free glass plate using same
TWI613174B (zh) * 2012-06-07 2018-02-01 Asahi Glass Co Ltd 無鹼玻璃及使用其之無鹼玻璃板
KR20150077319A (ko) 2013-12-27 2015-07-07 아사히 가라스 가부시키가이샤 유리 기판 및 유리 기판의 제조 방법
KR20160145616A (ko) 2014-04-28 2016-12-20 아사히 가라스 가부시키가이샤 무알칼리 유리

Also Published As

Publication number Publication date
TW200938500A (en) 2009-09-16
TWI429606B (zh) 2014-03-11
US8273262B2 (en) 2012-09-25
KR20100087168A (ko) 2010-08-03
CN101868428A (zh) 2010-10-20
US20100224589A1 (en) 2010-09-09
JPWO2009066624A1 (ja) 2011-04-07

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