WO2009060861A1 - 貼合せ基板製造装置および貼合せ基板製造方法 - Google Patents
貼合せ基板製造装置および貼合せ基板製造方法 Download PDFInfo
- Publication number
- WO2009060861A1 WO2009060861A1 PCT/JP2008/070121 JP2008070121W WO2009060861A1 WO 2009060861 A1 WO2009060861 A1 WO 2009060861A1 JP 2008070121 W JP2008070121 W JP 2008070121W WO 2009060861 A1 WO2009060861 A1 WO 2009060861A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- substrate
- bonding substrate
- substrate manufacturing
- bonding
- pressurizing member
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67092—Apparatus for mechanical treatment
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B37/00—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
- B32B37/10—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the pressing technique, e.g. using action of vacuum or fluid pressure
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/063—Transporting devices for sheet glass
- B65G49/064—Transporting devices for sheet glass in a horizontal position
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
- B65G2249/02—Controlled or contamination-free environments or clean space conditions
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
- B65G2249/04—Arrangements of vacuum systems or suction cups
- B65G2249/045—Details of suction cups suction cups
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Nonlinear Science (AREA)
- Liquid Crystal (AREA)
- Fluid Mechanics (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Computer Hardware Design (AREA)
- Optics & Photonics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Lining Or Joining Of Plastics Or The Like (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Abstract
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN200880109657A CN101808810A (zh) | 2007-11-08 | 2008-11-05 | 粘合基板制造装置和粘合基板制造方法 |
KR1020107008841A KR101246800B1 (ko) | 2007-11-08 | 2008-11-05 | 접합기판 제조장치 및 접합기판 제조방법 |
JP2009540058A JP4955069B2 (ja) | 2007-11-08 | 2008-11-05 | 貼合せ基板製造装置および貼合せ基板製造方法 |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007-290913 | 2007-11-08 | ||
JP2007290913 | 2007-11-08 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2009060861A1 true WO2009060861A1 (ja) | 2009-05-14 |
Family
ID=40625748
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2008/070121 WO2009060861A1 (ja) | 2007-11-08 | 2008-11-05 | 貼合せ基板製造装置および貼合せ基板製造方法 |
Country Status (5)
Country | Link |
---|---|
JP (1) | JP4955069B2 (ja) |
KR (1) | KR101246800B1 (ja) |
CN (1) | CN101808810A (ja) |
TW (1) | TW200928503A (ja) |
WO (1) | WO2009060861A1 (ja) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5837247B1 (ja) * | 2015-03-31 | 2015-12-24 | 株式会社日立製作所 | 基板組立装置とそれを用いた基板組立方法 |
US10487863B2 (en) * | 2017-02-17 | 2019-11-26 | Ford Global Technologies, Llc | Castellated joint for improved adhesive coverage when using mechanical fixings and adhesive in one joint |
KR101953761B1 (ko) * | 2017-10-13 | 2019-03-04 | 한국기계연구원 | 복제 스탬프 제조장치 및 이의 제조방법 |
KR102520642B1 (ko) * | 2020-12-29 | 2023-04-11 | 주식회사 기가레인 | 패턴 정렬 가능한 전사 장치 |
CN115072369B (zh) * | 2022-06-28 | 2024-07-09 | 深圳市华星光电半导体显示技术有限公司 | 搬运组件及成膜装置 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0631500A (ja) * | 1992-07-20 | 1994-02-08 | Hitachi Ltd | ホットプレス |
JP2002131762A (ja) * | 2000-10-30 | 2002-05-09 | Shinetsu Engineering Kk | 液晶パネル用基板の貼り合わせ装置及び貼り合わせ方法 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3535044B2 (ja) * | 1999-06-18 | 2004-06-07 | 株式会社 日立インダストリイズ | 基板の組立て装置とその方法、及び液晶パネルの製造方法 |
TWI257515B (en) * | 2002-11-16 | 2006-07-01 | Lg Philips Lcd Co Ltd | Substrate bonding apparatus for liquid crystal display device |
-
2008
- 2008-11-05 WO PCT/JP2008/070121 patent/WO2009060861A1/ja active Application Filing
- 2008-11-05 KR KR1020107008841A patent/KR101246800B1/ko active IP Right Grant
- 2008-11-05 JP JP2009540058A patent/JP4955069B2/ja not_active Expired - Fee Related
- 2008-11-05 CN CN200880109657A patent/CN101808810A/zh active Pending
- 2008-11-07 TW TW97143222A patent/TW200928503A/zh unknown
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0631500A (ja) * | 1992-07-20 | 1994-02-08 | Hitachi Ltd | ホットプレス |
JP2002131762A (ja) * | 2000-10-30 | 2002-05-09 | Shinetsu Engineering Kk | 液晶パネル用基板の貼り合わせ装置及び貼り合わせ方法 |
Also Published As
Publication number | Publication date |
---|---|
TW200928503A (en) | 2009-07-01 |
JPWO2009060861A1 (ja) | 2011-03-24 |
CN101808810A (zh) | 2010-08-18 |
KR20100060001A (ko) | 2010-06-04 |
JP4955069B2 (ja) | 2012-06-20 |
KR101246800B1 (ko) | 2013-03-26 |
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