WO2009037875A1 - 線幅測定装置の検査方法 - Google Patents
線幅測定装置の検査方法 Download PDFInfo
- Publication number
- WO2009037875A1 WO2009037875A1 PCT/JP2008/054163 JP2008054163W WO2009037875A1 WO 2009037875 A1 WO2009037875 A1 WO 2009037875A1 JP 2008054163 W JP2008054163 W JP 2008054163W WO 2009037875 A1 WO2009037875 A1 WO 2009037875A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- focusing
- stage
- focusing operation
- variation
- calculated
- Prior art date
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
- G01B21/04—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points
- G01B21/045—Correction of measurements
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/10—Measuring as part of the manufacturing process
- H01L22/12—Measuring as part of the manufacturing process for structural parameters, e.g. thickness, line width, refractive index, temperature, warp, bond strength, defects, optical inspection, electrical measurement of structural dimensions, metallurgic measurement of diffusions
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
測定点数が多い場合には、測定が長時間になる。このため、ステージを駆動するリニアモータ等の発熱により、ステージ構成部品が不均一に熱膨張を起こし、ステージの直交度の変化、又は、レーザ変位計若しくはレーザ干渉計とステージ間の相対位置の変化、等のずれが発生していた。 本発明の検査方法は、測定点位置が多数存在する基板を検査する場合に、測 定位置毎に行っていた合焦点動作を省略し、合焦点位置を内挿若しくは外挿できるような複数の一部の測定位置について行う。そして、取得した合焦点情報から、合焦点動作していない測定位置での合焦点高さを内挿補間若しくは外挿補間によって算出し、算出した合焦点高さ範囲内で合焦点動作をする。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007-242361 | 2007-09-19 | ||
JP2007242361A JP5096852B2 (ja) | 2007-09-19 | 2007-09-19 | 線幅測定装置および線幅測定装置の検査方法 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2009037875A1 true WO2009037875A1 (ja) | 2009-03-26 |
Family
ID=40467701
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2008/054163 WO2009037875A1 (ja) | 2007-09-19 | 2008-03-07 | 線幅測定装置の検査方法 |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP5096852B2 (ja) |
KR (1) | KR101067996B1 (ja) |
WO (1) | WO2009037875A1 (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103075970A (zh) * | 2012-12-27 | 2013-05-01 | 深圳市华星光电技术有限公司 | 测长装置直交度补偿方法及使用该方法的测长装置 |
US9080865B2 (en) | 2012-12-27 | 2015-07-14 | Shenzhen China Star Optoelectronics Technology Co., Ltd | Orthogonality compensation method for length measurement device and length measurement device using same |
KR20160037192A (ko) * | 2013-07-25 | 2016-04-05 | 케이엘에이-텐코 코포레이션 | 다이별 검사를 위한 오토포커스 시스템 및 방법 |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2012111603A1 (ja) * | 2011-02-17 | 2012-08-23 | シャープ株式会社 | 線幅測定装置 |
CN103837085B (zh) * | 2014-03-07 | 2016-07-06 | 哈尔滨工业大学 | 基于激光跟踪仪逐点标定的目标位移矢量测量装置及方法 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002228411A (ja) * | 2001-02-05 | 2002-08-14 | Hitachi Kokusai Electric Inc | 二次元測定装置 |
JP2004294358A (ja) * | 2003-03-28 | 2004-10-21 | Hitachi High-Technologies Corp | 欠陥検査方法および装置 |
JP2004347521A (ja) * | 2003-05-23 | 2004-12-09 | Mitsubishi Heavy Ind Ltd | 形状計測システム及び方法 |
JP2006179532A (ja) * | 2004-12-20 | 2006-07-06 | Disco Abrasive Syst Ltd | 焦点調整方法 |
JP2007121981A (ja) * | 2005-09-30 | 2007-05-17 | Matsushita Electric Ind Co Ltd | 基板検査方法 |
-
2007
- 2007-09-19 JP JP2007242361A patent/JP5096852B2/ja active Active
-
2008
- 2008-03-07 WO PCT/JP2008/054163 patent/WO2009037875A1/ja active Application Filing
- 2008-03-07 KR KR1020107003227A patent/KR101067996B1/ko active IP Right Grant
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002228411A (ja) * | 2001-02-05 | 2002-08-14 | Hitachi Kokusai Electric Inc | 二次元測定装置 |
JP2004294358A (ja) * | 2003-03-28 | 2004-10-21 | Hitachi High-Technologies Corp | 欠陥検査方法および装置 |
JP2004347521A (ja) * | 2003-05-23 | 2004-12-09 | Mitsubishi Heavy Ind Ltd | 形状計測システム及び方法 |
JP2006179532A (ja) * | 2004-12-20 | 2006-07-06 | Disco Abrasive Syst Ltd | 焦点調整方法 |
JP2007121981A (ja) * | 2005-09-30 | 2007-05-17 | Matsushita Electric Ind Co Ltd | 基板検査方法 |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103075970A (zh) * | 2012-12-27 | 2013-05-01 | 深圳市华星光电技术有限公司 | 测长装置直交度补偿方法及使用该方法的测长装置 |
WO2014101311A1 (zh) * | 2012-12-27 | 2014-07-03 | 深圳市华星光电技术有限公司 | 测长装置直交度补偿方法及使用该方法的测长装置 |
US9080865B2 (en) | 2012-12-27 | 2015-07-14 | Shenzhen China Star Optoelectronics Technology Co., Ltd | Orthogonality compensation method for length measurement device and length measurement device using same |
KR20160037192A (ko) * | 2013-07-25 | 2016-04-05 | 케이엘에이-텐코 코포레이션 | 다이별 검사를 위한 오토포커스 시스템 및 방법 |
JP2016534550A (ja) * | 2013-07-25 | 2016-11-04 | ケーエルエー−テンカー コーポレイション | ダイツーダイ検査のためのオートフォーカスシステム及び方法 |
KR102102018B1 (ko) | 2013-07-25 | 2020-04-17 | 케이엘에이 코포레이션 | 다이별 검사를 위한 오토포커스 시스템 및 방법 |
Also Published As
Publication number | Publication date |
---|---|
JP5096852B2 (ja) | 2012-12-12 |
KR101067996B1 (ko) | 2011-09-26 |
KR20100034038A (ko) | 2010-03-31 |
JP2009074849A (ja) | 2009-04-09 |
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