WO2009028152A1 - 圧電アクチュエータおよびこれを用いた光学反射素子および圧電駆動装置 - Google Patents
圧電アクチュエータおよびこれを用いた光学反射素子および圧電駆動装置 Download PDFInfo
- Publication number
- WO2009028152A1 WO2009028152A1 PCT/JP2008/002246 JP2008002246W WO2009028152A1 WO 2009028152 A1 WO2009028152 A1 WO 2009028152A1 JP 2008002246 W JP2008002246 W JP 2008002246W WO 2009028152 A1 WO2009028152 A1 WO 2009028152A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- piezoelectric
- drive electrode
- same
- piezoelectric actuator
- optical reflection
- Prior art date
Links
- 230000003287 optical effect Effects 0.000 title 1
- 230000007423 decrease Effects 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
- B81B3/0064—Constitution or structural means for improving or controlling the physical properties of a device
- B81B3/0086—Electrical characteristics, e.g. reducing driving voltage, improving resistance to peak voltage
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
- G03B21/00—Projectors or projection-type viewers; Accessories therefor
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N9/00—Details of colour television systems
- H04N9/12—Picture reproducers
- H04N9/31—Projection devices for colour picture display, e.g. using electronic spatial light modulators [ESLM]
- H04N9/3129—Projection devices for colour picture display, e.g. using electronic spatial light modulators [ESLM] scanning a light beam on the display screen
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
- H10N30/2041—Beam type
- H10N30/2042—Cantilevers, i.e. having one fixed end
- H10N30/2044—Cantilevers, i.e. having one fixed end having multiple segments mechanically connected in series, e.g. zig-zag type
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
- H10N30/2041—Beam type
- H10N30/2042—Cantilevers, i.e. having one fixed end
- H10N30/2046—Cantilevers, i.e. having one fixed end adapted for multi-directional bending displacement
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/802—Circuitry or processes for operating piezoelectric or electrostrictive devices not otherwise provided for, e.g. drive circuits
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/03—Microengines and actuators
- B81B2201/038—Microengines and actuators not provided for in B81B2201/031 - B81B2201/037
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/04—Optical MEMS
- B81B2201/042—Micromirrors, not used as optical switches
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2203/00—Basic microelectromechanical structures
- B81B2203/05—Type of movement
- B81B2203/058—Rotation out of a plane parallel to the substrate
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Multimedia (AREA)
- Signal Processing (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Mechanical Optical Scanning Systems (AREA)
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
- Endoscopes (AREA)
- Micromachines (AREA)
Abstract
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009529976A JP5347963B2 (ja) | 2007-08-27 | 2008-08-20 | 圧電アクチュエータおよびこれを用いた光学反射素子および圧電駆動装置 |
CN2008801046486A CN101790840B (zh) | 2007-08-27 | 2008-08-20 | 压电致动器、使用该压电致动器的光学反射元件以及压电驱动装置 |
US12/673,238 US8437061B2 (en) | 2007-08-27 | 2008-08-20 | Piezoelectric actuator, optical reflection element using the same and piezoelectric driver |
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007-219509 | 2007-08-27 | ||
JP2007219509 | 2007-08-27 | ||
JP2008020471 | 2008-01-31 | ||
JP2008-020471 | 2008-01-31 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2009028152A1 true WO2009028152A1 (ja) | 2009-03-05 |
Family
ID=40386895
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2008/002246 WO2009028152A1 (ja) | 2007-08-27 | 2008-08-20 | 圧電アクチュエータおよびこれを用いた光学反射素子および圧電駆動装置 |
Country Status (5)
Country | Link |
---|---|
US (1) | US8437061B2 (ja) |
JP (1) | JP5347963B2 (ja) |
CN (1) | CN101790840B (ja) |
TW (1) | TWI470271B (ja) |
WO (1) | WO2009028152A1 (ja) |
Cited By (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2010122751A1 (ja) * | 2009-04-21 | 2010-10-28 | パナソニック株式会社 | 光学反射素子 |
WO2010131557A1 (ja) * | 2009-05-11 | 2010-11-18 | ミツミ電機株式会社 | アクチュエータ及びアクチュエータを用いた光走査装置 |
WO2010131556A1 (ja) * | 2009-05-11 | 2010-11-18 | ミツミ電機株式会社 | 圧電アクチュエータ |
JP2011097661A (ja) * | 2009-10-27 | 2011-05-12 | Stanley Electric Co Ltd | 圧電振動発電機及びこれを用いた発電装置 |
EP2416199A1 (en) * | 2010-08-02 | 2012-02-08 | Funai Electric Co., Ltd. | Vibrating Mirror Element |
JP2013083769A (ja) * | 2011-10-07 | 2013-05-09 | Stanley Electric Co Ltd | 光偏向器 |
JP2013092750A (ja) * | 2011-10-03 | 2013-05-16 | Mitsumi Electric Co Ltd | 光走査装置及び光走査制御装置 |
JP2013190498A (ja) * | 2012-03-12 | 2013-09-26 | Stanley Electric Co Ltd | 光偏向器 |
JP2013200337A (ja) * | 2012-03-23 | 2013-10-03 | Stanley Electric Co Ltd | 光偏向器 |
JP2013205818A (ja) * | 2012-03-29 | 2013-10-07 | Stanley Electric Co Ltd | 光偏向器 |
JP2014126715A (ja) * | 2012-12-26 | 2014-07-07 | Ricoh Co Ltd | 圧電アクチュエータ装置、2次元走査装置、画像形成装置、及び画像投影装置 |
JP2015132762A (ja) * | 2014-01-15 | 2015-07-23 | 株式会社リコー | 光偏向装置、画像形成装置、及び画像投影装置 |
WO2017110694A1 (ja) * | 2015-12-22 | 2017-06-29 | 株式会社リコー | 回動装置、光走査装置及び画像表示装置 |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
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CN101976013A (zh) * | 2010-09-30 | 2011-02-16 | 上海理工大学 | 具有消除激光散斑的投影机 |
US9287488B2 (en) * | 2012-01-31 | 2016-03-15 | Panasonic Intellectual Property Management Co., Ltd. | Piezoelectric actuator device and method for manufacturing same |
WO2013136759A1 (ja) | 2012-03-15 | 2013-09-19 | パナソニック株式会社 | 光学反射素子とアクチュエータ |
CN104755992A (zh) * | 2012-10-31 | 2015-07-01 | 松下知识产权经营株式会社 | 致动器 |
JP6264709B2 (ja) * | 2013-12-25 | 2018-01-24 | スタンレー電気株式会社 | 車両用灯具 |
JP6398454B2 (ja) * | 2014-08-13 | 2018-10-03 | セイコーエプソン株式会社 | 圧電駆動装置、ロボット、及び、それらの駆動方法 |
RU2720478C2 (ru) * | 2015-06-03 | 2020-04-30 | Конинклейке Филипс Н.В. | Устройство с исполнительным механизмом на основе электроактивного полимера |
DE102018215528A1 (de) * | 2018-09-12 | 2020-03-12 | Robert Bosch Gmbh | Mikromechanisches Bauteil und Herstellungsverfahren für ein mikromechanisches Bauteil |
CN109794405A (zh) * | 2019-02-18 | 2019-05-24 | 河南中医药大学 | 高强度聚焦超声信号校准电路 |
CN112817141B (zh) * | 2020-12-31 | 2023-03-24 | 歌尔股份有限公司 | Mems扫描镜及其驱动方法、激光投影仪 |
CN112782845B (zh) * | 2020-12-31 | 2023-02-21 | 歌尔股份有限公司 | Mems扫描镜及激光投影仪 |
Citations (4)
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JP2003089206A (ja) * | 2001-09-19 | 2003-03-25 | Sharp Corp | インクジェットヘッドの駆動方法及びインクジェットプリンタ |
JP2005148459A (ja) * | 2003-11-17 | 2005-06-09 | Stanley Electric Co Ltd | 2次元光スキャナ及び光学装置 |
JP2006039066A (ja) * | 2004-07-26 | 2006-02-09 | Pentax Corp | ヒンジ構造 |
JP2007171989A (ja) * | 2007-02-16 | 2007-07-05 | Fujitsu Ltd | マイクロミラー素子およびその製造方法 |
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JP3518099B2 (ja) * | 1995-10-06 | 2004-04-12 | 株式会社デンソー | 光スキャナ装置 |
JP3050130B2 (ja) * | 1996-07-31 | 2000-06-12 | 日本電気株式会社 | 圧電トランスおよびその異常動作検出保護装置 |
JP2001111672A (ja) * | 1999-10-05 | 2001-04-20 | Kenwood Corp | 移動体通信端末 |
JP2003181800A (ja) * | 2001-12-19 | 2003-07-02 | Hitachi Ltd | 圧電型マイクロアクチュエータ及びこれを備えたマイクロミラー |
JP4286553B2 (ja) * | 2003-02-06 | 2009-07-01 | 日本信号株式会社 | プレーナー型アクチュエータ |
US7356880B2 (en) * | 2004-07-26 | 2008-04-15 | Pentax Corporation | Hinge structure of micromirror device |
JP5052835B2 (ja) * | 2006-07-27 | 2012-10-17 | スタンレー電気株式会社 | 圧電アクチュエータ及びその製造方法 |
JP4328980B2 (ja) * | 2006-12-18 | 2009-09-09 | セイコーエプソン株式会社 | 圧電振動子およびその製造方法、並びに、memsデバイスおよびその製造方法 |
-
2008
- 2008-08-20 WO PCT/JP2008/002246 patent/WO2009028152A1/ja active Application Filing
- 2008-08-20 US US12/673,238 patent/US8437061B2/en active Active
- 2008-08-20 CN CN2008801046486A patent/CN101790840B/zh active Active
- 2008-08-20 JP JP2009529976A patent/JP5347963B2/ja active Active
- 2008-08-25 TW TW97132360A patent/TWI470271B/zh not_active IP Right Cessation
Patent Citations (4)
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JP2003089206A (ja) * | 2001-09-19 | 2003-03-25 | Sharp Corp | インクジェットヘッドの駆動方法及びインクジェットプリンタ |
JP2005148459A (ja) * | 2003-11-17 | 2005-06-09 | Stanley Electric Co Ltd | 2次元光スキャナ及び光学装置 |
JP2006039066A (ja) * | 2004-07-26 | 2006-02-09 | Pentax Corp | ヒンジ構造 |
JP2007171989A (ja) * | 2007-02-16 | 2007-07-05 | Fujitsu Ltd | マイクロミラー素子およびその製造方法 |
Cited By (25)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2010122751A1 (ja) * | 2009-04-21 | 2010-10-28 | パナソニック株式会社 | 光学反射素子 |
CN102405433A (zh) * | 2009-04-21 | 2012-04-04 | 松下电器产业株式会社 | 光学反射元件 |
US8279508B2 (en) | 2009-04-21 | 2012-10-02 | Panasonic Corporation | Optical reflection element |
CN103840704B (zh) * | 2009-05-11 | 2016-09-14 | 三美电机株式会社 | 致动器及使用致动器的光扫描装置 |
WO2010131556A1 (ja) * | 2009-05-11 | 2010-11-18 | ミツミ電機株式会社 | 圧電アクチュエータ |
US8610983B2 (en) | 2009-05-11 | 2013-12-17 | Mitsumi Electric Co., Ltd. | Actuator and optical scanning device using actuator |
WO2010131557A1 (ja) * | 2009-05-11 | 2010-11-18 | ミツミ電機株式会社 | アクチュエータ及びアクチュエータを用いた光走査装置 |
CN102422521A (zh) * | 2009-05-11 | 2012-04-18 | 三美电机株式会社 | 致动器及使用致动器的光扫描装置 |
JP2010288435A (ja) * | 2009-05-11 | 2010-12-24 | Mitsumi Electric Co Ltd | アクチュエータ及びこれを用いた光走査装置 |
CN103840704A (zh) * | 2009-05-11 | 2014-06-04 | 三美电机株式会社 | 致动器及使用致动器的光扫描装置 |
US8681404B2 (en) | 2009-05-11 | 2014-03-25 | Mitsumi Electric Co., Ltd. | Actuator and optical scanning device using actuator |
JP2011097661A (ja) * | 2009-10-27 | 2011-05-12 | Stanley Electric Co Ltd | 圧電振動発電機及びこれを用いた発電装置 |
US8432596B2 (en) | 2010-08-02 | 2013-04-30 | Funai Electric Co., Ltd. | Vibrating mirror element and optical scanner |
EP2416199A1 (en) * | 2010-08-02 | 2012-02-08 | Funai Electric Co., Ltd. | Vibrating Mirror Element |
JP2013092750A (ja) * | 2011-10-03 | 2013-05-16 | Mitsumi Electric Co Ltd | 光走査装置及び光走査制御装置 |
JP2013083769A (ja) * | 2011-10-07 | 2013-05-09 | Stanley Electric Co Ltd | 光偏向器 |
JP2013190498A (ja) * | 2012-03-12 | 2013-09-26 | Stanley Electric Co Ltd | 光偏向器 |
JP2013200337A (ja) * | 2012-03-23 | 2013-10-03 | Stanley Electric Co Ltd | 光偏向器 |
JP2013205818A (ja) * | 2012-03-29 | 2013-10-07 | Stanley Electric Co Ltd | 光偏向器 |
JP2014126715A (ja) * | 2012-12-26 | 2014-07-07 | Ricoh Co Ltd | 圧電アクチュエータ装置、2次元走査装置、画像形成装置、及び画像投影装置 |
JP2015132762A (ja) * | 2014-01-15 | 2015-07-23 | 株式会社リコー | 光偏向装置、画像形成装置、及び画像投影装置 |
WO2017110694A1 (ja) * | 2015-12-22 | 2017-06-29 | 株式会社リコー | 回動装置、光走査装置及び画像表示装置 |
JPWO2017110694A1 (ja) * | 2015-12-22 | 2018-10-04 | 株式会社リコー | 回動装置、光走査装置及び画像表示装置 |
JP2020112801A (ja) * | 2015-12-22 | 2020-07-27 | 株式会社リコー | 回動装置、光走査装置及び画像表示装置 |
US10793418B2 (en) | 2015-12-22 | 2020-10-06 | Ricoh Company, Ltd. | Rotating apparatus, optical scanning apparatus, and image display apparatus |
Also Published As
Publication number | Publication date |
---|---|
CN101790840B (zh) | 2013-03-20 |
JPWO2009028152A1 (ja) | 2010-11-25 |
CN101790840A (zh) | 2010-07-28 |
US20110122471A1 (en) | 2011-05-26 |
TW200925648A (en) | 2009-06-16 |
US8437061B2 (en) | 2013-05-07 |
TWI470271B (zh) | 2015-01-21 |
JP5347963B2 (ja) | 2013-11-20 |
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