WO2009028152A1 - 圧電アクチュエータおよびこれを用いた光学反射素子および圧電駆動装置 - Google Patents

圧電アクチュエータおよびこれを用いた光学反射素子および圧電駆動装置 Download PDF

Info

Publication number
WO2009028152A1
WO2009028152A1 PCT/JP2008/002246 JP2008002246W WO2009028152A1 WO 2009028152 A1 WO2009028152 A1 WO 2009028152A1 JP 2008002246 W JP2008002246 W JP 2008002246W WO 2009028152 A1 WO2009028152 A1 WO 2009028152A1
Authority
WO
WIPO (PCT)
Prior art keywords
piezoelectric
drive electrode
same
piezoelectric actuator
optical reflection
Prior art date
Application number
PCT/JP2008/002246
Other languages
English (en)
French (fr)
Inventor
Jirou Terada
Shinsuke Nakazono
Shigeo Furukawa
Original Assignee
Panasonic Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Panasonic Corporation filed Critical Panasonic Corporation
Priority to JP2009529976A priority Critical patent/JP5347963B2/ja
Priority to CN2008801046486A priority patent/CN101790840B/zh
Priority to US12/673,238 priority patent/US8437061B2/en
Publication of WO2009028152A1 publication Critical patent/WO2009028152A1/ja

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0064—Constitution or structural means for improving or controlling the physical properties of a device
    • B81B3/0086—Electrical characteristics, e.g. reducing driving voltage, improving resistance to peak voltage
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B21/00—Projectors or projection-type viewers; Accessories therefor
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N9/00—Details of colour television systems
    • H04N9/12—Picture reproducers
    • H04N9/31—Projection devices for colour picture display, e.g. using electronic spatial light modulators [ESLM]
    • H04N9/3129—Projection devices for colour picture display, e.g. using electronic spatial light modulators [ESLM] scanning a light beam on the display screen
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2041—Beam type
    • H10N30/2042—Cantilevers, i.e. having one fixed end
    • H10N30/2044—Cantilevers, i.e. having one fixed end having multiple segments mechanically connected in series, e.g. zig-zag type
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2041—Beam type
    • H10N30/2042—Cantilevers, i.e. having one fixed end
    • H10N30/2046—Cantilevers, i.e. having one fixed end adapted for multi-directional bending displacement
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/802—Circuitry or processes for operating piezoelectric or electrostrictive devices not otherwise provided for, e.g. drive circuits
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/03—Microengines and actuators
    • B81B2201/038—Microengines and actuators not provided for in B81B2201/031 - B81B2201/037
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/04—Optical MEMS
    • B81B2201/042—Micromirrors, not used as optical switches
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/05—Type of movement
    • B81B2203/058—Rotation out of a plane parallel to the substrate

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Multimedia (AREA)
  • Signal Processing (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Endoscopes (AREA)
  • Micromachines (AREA)

Abstract

本発明は、第一駆動電極を有する第一圧電素子を備えた第一振動部と、第一振動部とは異なる中心軸を有し、第二駆動電極を有する第二圧電素子を備えた第二振動部とから構成され、第一駆動電極および第二駆動電極が共通接続された構成を有する。これにより、駆動電極の配線電極数が減り、引き回しが容易となり、結果として生産効率を向上させることができる。
PCT/JP2008/002246 2007-08-27 2008-08-20 圧電アクチュエータおよびこれを用いた光学反射素子および圧電駆動装置 WO2009028152A1 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2009529976A JP5347963B2 (ja) 2007-08-27 2008-08-20 圧電アクチュエータおよびこれを用いた光学反射素子および圧電駆動装置
CN2008801046486A CN101790840B (zh) 2007-08-27 2008-08-20 压电致动器、使用该压电致动器的光学反射元件以及压电驱动装置
US12/673,238 US8437061B2 (en) 2007-08-27 2008-08-20 Piezoelectric actuator, optical reflection element using the same and piezoelectric driver

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2007-219509 2007-08-27
JP2007219509 2007-08-27
JP2008020471 2008-01-31
JP2008-020471 2008-01-31

Publications (1)

Publication Number Publication Date
WO2009028152A1 true WO2009028152A1 (ja) 2009-03-05

Family

ID=40386895

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/002246 WO2009028152A1 (ja) 2007-08-27 2008-08-20 圧電アクチュエータおよびこれを用いた光学反射素子および圧電駆動装置

Country Status (5)

Country Link
US (1) US8437061B2 (ja)
JP (1) JP5347963B2 (ja)
CN (1) CN101790840B (ja)
TW (1) TWI470271B (ja)
WO (1) WO2009028152A1 (ja)

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010122751A1 (ja) * 2009-04-21 2010-10-28 パナソニック株式会社 光学反射素子
WO2010131557A1 (ja) * 2009-05-11 2010-11-18 ミツミ電機株式会社 アクチュエータ及びアクチュエータを用いた光走査装置
WO2010131556A1 (ja) * 2009-05-11 2010-11-18 ミツミ電機株式会社 圧電アクチュエータ
JP2011097661A (ja) * 2009-10-27 2011-05-12 Stanley Electric Co Ltd 圧電振動発電機及びこれを用いた発電装置
EP2416199A1 (en) * 2010-08-02 2012-02-08 Funai Electric Co., Ltd. Vibrating Mirror Element
JP2013083769A (ja) * 2011-10-07 2013-05-09 Stanley Electric Co Ltd 光偏向器
JP2013092750A (ja) * 2011-10-03 2013-05-16 Mitsumi Electric Co Ltd 光走査装置及び光走査制御装置
JP2013190498A (ja) * 2012-03-12 2013-09-26 Stanley Electric Co Ltd 光偏向器
JP2013200337A (ja) * 2012-03-23 2013-10-03 Stanley Electric Co Ltd 光偏向器
JP2013205818A (ja) * 2012-03-29 2013-10-07 Stanley Electric Co Ltd 光偏向器
JP2014126715A (ja) * 2012-12-26 2014-07-07 Ricoh Co Ltd 圧電アクチュエータ装置、２次元走査装置、画像形成装置、及び画像投影装置
JP2015132762A (ja) * 2014-01-15 2015-07-23 株式会社リコー 光偏向装置、画像形成装置、及び画像投影装置
WO2017110694A1 (ja) * 2015-12-22 2017-06-29 株式会社リコー 回動装置、光走査装置及び画像表示装置

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101976013A (zh) * 2010-09-30 2011-02-16 上海理工大学 具有消除激光散斑的投影机
US9287488B2 (en) * 2012-01-31 2016-03-15 Panasonic Intellectual Property Management Co., Ltd. Piezoelectric actuator device and method for manufacturing same
WO2013136759A1 (ja) 2012-03-15 2013-09-19 パナソニック株式会社 光学反射素子とアクチュエータ
CN104755992A (zh) * 2012-10-31 2015-07-01 松下知识产权经营株式会社 致动器
JP6264709B2 (ja) * 2013-12-25 2018-01-24 スタンレー電気株式会社 車両用灯具
JP6398454B2 (ja) * 2014-08-13 2018-10-03 セイコーエプソン株式会社 圧電駆動装置、ロボット、及び、それらの駆動方法
RU2720478C2 (ru) * 2015-06-03 2020-04-30 Конинклейке Филипс Н.В. Устройство с исполнительным механизмом на основе электроактивного полимера
DE102018215528A1 (de) * 2018-09-12 2020-03-12 Robert Bosch Gmbh Mikromechanisches Bauteil und Herstellungsverfahren für ein mikromechanisches Bauteil
CN109794405A (zh) * 2019-02-18 2019-05-24 河南中医药大学 高强度聚焦超声信号校准电路
CN112817141B (zh) * 2020-12-31 2023-03-24 歌尔股份有限公司 Mems扫描镜及其驱动方法、激光投影仪
CN112782845B (zh) * 2020-12-31 2023-02-21 歌尔股份有限公司 Mems扫描镜及激光投影仪

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003089206A (ja) * 2001-09-19 2003-03-25 Sharp Corp インクジェットヘッドの駆動方法及びインクジェットプリンタ
JP2005148459A (ja) * 2003-11-17 2005-06-09 Stanley Electric Co Ltd ２次元光スキャナ及び光学装置
JP2006039066A (ja) * 2004-07-26 2006-02-09 Pentax Corp ヒンジ構造
JP2007171989A (ja) * 2007-02-16 2007-07-05 Fujitsu Ltd マイクロミラー素子およびその製造方法

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3518099B2 (ja) * 1995-10-06 2004-04-12 株式会社デンソー 光スキャナ装置
JP3050130B2 (ja) * 1996-07-31 2000-06-12 日本電気株式会社 圧電トランスおよびその異常動作検出保護装置
JP2001111672A (ja) * 1999-10-05 2001-04-20 Kenwood Corp 移動体通信端末
JP2003181800A (ja) * 2001-12-19 2003-07-02 Hitachi Ltd 圧電型マイクロアクチュエータ及びこれを備えたマイクロミラー
JP4286553B2 (ja) * 2003-02-06 2009-07-01 日本信号株式会社 プレーナー型アクチュエータ
US7356880B2 (en) * 2004-07-26 2008-04-15 Pentax Corporation Hinge structure of micromirror device
JP5052835B2 (ja) * 2006-07-27 2012-10-17 スタンレー電気株式会社 圧電アクチュエータ及びその製造方法
JP4328980B2 (ja) * 2006-12-18 2009-09-09 セイコーエプソン株式会社 圧電振動子およびその製造方法、並びに、ｍｅｍｓデバイスおよびその製造方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003089206A (ja) * 2001-09-19 2003-03-25 Sharp Corp インクジェットヘッドの駆動方法及びインクジェットプリンタ
JP2005148459A (ja) * 2003-11-17 2005-06-09 Stanley Electric Co Ltd ２次元光スキャナ及び光学装置
JP2006039066A (ja) * 2004-07-26 2006-02-09 Pentax Corp ヒンジ構造
JP2007171989A (ja) * 2007-02-16 2007-07-05 Fujitsu Ltd マイクロミラー素子およびその製造方法

Cited By (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010122751A1 (ja) * 2009-04-21 2010-10-28 パナソニック株式会社 光学反射素子
CN102405433A (zh) * 2009-04-21 2012-04-04 松下电器产业株式会社 光学反射元件
US8279508B2 (en) 2009-04-21 2012-10-02 Panasonic Corporation Optical reflection element
CN103840704B (zh) * 2009-05-11 2016-09-14 三美电机株式会社 致动器及使用致动器的光扫描装置
WO2010131556A1 (ja) * 2009-05-11 2010-11-18 ミツミ電機株式会社 圧電アクチュエータ
US8610983B2 (en) 2009-05-11 2013-12-17 Mitsumi Electric Co., Ltd. Actuator and optical scanning device using actuator
WO2010131557A1 (ja) * 2009-05-11 2010-11-18 ミツミ電機株式会社 アクチュエータ及びアクチュエータを用いた光走査装置
CN102422521A (zh) * 2009-05-11 2012-04-18 三美电机株式会社 致动器及使用致动器的光扫描装置
JP2010288435A (ja) * 2009-05-11 2010-12-24 Mitsumi Electric Co Ltd アクチュエータ及びこれを用いた光走査装置
CN103840704A (zh) * 2009-05-11 2014-06-04 三美电机株式会社 致动器及使用致动器的光扫描装置
US8681404B2 (en) 2009-05-11 2014-03-25 Mitsumi Electric Co., Ltd. Actuator and optical scanning device using actuator
JP2011097661A (ja) * 2009-10-27 2011-05-12 Stanley Electric Co Ltd 圧電振動発電機及びこれを用いた発電装置
US8432596B2 (en) 2010-08-02 2013-04-30 Funai Electric Co., Ltd. Vibrating mirror element and optical scanner
EP2416199A1 (en) * 2010-08-02 2012-02-08 Funai Electric Co., Ltd. Vibrating Mirror Element
JP2013092750A (ja) * 2011-10-03 2013-05-16 Mitsumi Electric Co Ltd 光走査装置及び光走査制御装置
JP2013083769A (ja) * 2011-10-07 2013-05-09 Stanley Electric Co Ltd 光偏向器
JP2013190498A (ja) * 2012-03-12 2013-09-26 Stanley Electric Co Ltd 光偏向器
JP2013200337A (ja) * 2012-03-23 2013-10-03 Stanley Electric Co Ltd 光偏向器
JP2013205818A (ja) * 2012-03-29 2013-10-07 Stanley Electric Co Ltd 光偏向器
JP2014126715A (ja) * 2012-12-26 2014-07-07 Ricoh Co Ltd 圧電アクチュエータ装置、２次元走査装置、画像形成装置、及び画像投影装置
JP2015132762A (ja) * 2014-01-15 2015-07-23 株式会社リコー 光偏向装置、画像形成装置、及び画像投影装置
WO2017110694A1 (ja) * 2015-12-22 2017-06-29 株式会社リコー 回動装置、光走査装置及び画像表示装置
JPWO2017110694A1 (ja) * 2015-12-22 2018-10-04 株式会社リコー 回動装置、光走査装置及び画像表示装置
JP2020112801A (ja) * 2015-12-22 2020-07-27 株式会社リコー 回動装置、光走査装置及び画像表示装置
US10793418B2 (en) 2015-12-22 2020-10-06 Ricoh Company, Ltd. Rotating apparatus, optical scanning apparatus, and image display apparatus

Also Published As

Publication number Publication date
CN101790840B (zh) 2013-03-20
JPWO2009028152A1 (ja) 2010-11-25
CN101790840A (zh) 2010-07-28
US20110122471A1 (en) 2011-05-26
TW200925648A (en) 2009-06-16
US8437061B2 (en) 2013-05-07
TWI470271B (zh) 2015-01-21
JP5347963B2 (ja) 2013-11-20

Similar Documents

Publication Publication Date Title
WO2009028152A1 (ja) 圧電アクチュエータおよびこれを用いた光学反射素子および圧電駆動装置
WO2009104840A3 (en) Hybrid electric device using piezo-electric polymer substrate and its fabrication method
WO2010002009A3 (en) Element array, electromechanical conversion device, and process for producing the same
WO2007100606A3 (en) Compliant electroactive polymer transducers for sonic applications
WO2007115294A3 (en) Electrostatic comb driver actuator/transducer and fabrication of the same
DE102005040900A8 (de) Gestapeltes piezoelektrisches Element, dessen Herstellungsverfahren und elektrisch leitendes Haftmittel
WO2008039828A3 (en) Bending mode accelerometer
EP2571071A3 (en) Transducer and transducer module
ATE550885T1 (de) Elektroakustische line-array-wandlung
WO2008105382A1 (ja) 積層型圧電素子
WO2009060418A3 (en) Transgenic plants and modulators for improved stress tolerance
WO2008123357A1 (ja) プラズマ発生体及び反応装置
EP2182348A3 (en) Surface acoustic wave element, surface acoustic wave device and methods for manufacturing the same
WO2008122499A3 (de) Ein längliches horn umfassender ultraschall-transducer
WO2009060673A1 (ja) 積層圧電素子及び超音波モータ
EP2073284A3 (en) Piezoelectric/electrostrictive membrane element
WO2008105381A1 (ja) 積層型圧電素子
EP1901362A4 (en) METHOD FOR MANUFACTURING PIEZOELECTRIC ELEMENT / D ELECTROSTRICTION
DE602006013751D1 (de) Laminiertes piezoelektrisches/elektrostriktives Element
WO2009154981A3 (en) Mems microphone array on a chip
WO2008042234A3 (en) Acoustic transducer array element having a plurality of acoustically coupled transducer assemblies
WO2008078640A1 (ja) 振動アクチュエータ、レンズ鏡筒、カメラ
EP1705724A3 (en) Piezoelectric actator and liquid discharging device
EP1811584A3 (en) Laminated piezoelectric/electrostrictive device
WO2008141053A3 (en) Micro-fluid ejection devices having reduced input/output addressable heaters

Legal Events

Date Code Title Description
WWE Wipo information: entry into national phase

Ref document number: 200880104648.6

Country of ref document: CN

121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 08828837

Country of ref document: EP

Kind code of ref document: A1

ENP Entry into the national phase

Ref document number: 2009529976

Country of ref document: JP

Kind code of ref document: A

WWE Wipo information: entry into national phase

Ref document number: 12673238

Country of ref document: US

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 08828837

Country of ref document: EP

Kind code of ref document: A1