WO2008126243A1 - 駆動装置 - Google Patents
駆動装置 Download PDFInfo
- Publication number
- WO2008126243A1 WO2008126243A1 PCT/JP2007/057068 JP2007057068W WO2008126243A1 WO 2008126243 A1 WO2008126243 A1 WO 2008126243A1 JP 2007057068 W JP2007057068 W JP 2007057068W WO 2008126243 A1 WO2008126243 A1 WO 2008126243A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- stage
- driver unit
- elastic body
- base
- resonance frequency
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B9/00—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor
- G11B9/12—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor
- G11B9/14—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor using microscopic probe means, i.e. recording or reproducing by means directly associated with the tip of a microscopic electrical probe as used in Scanning Tunneling Microscopy [STM] or Atomic Force Microscopy [AFM] for inducing physical or electrical perturbations in a recording medium; Record carriers or media specially adapted for such transducing of information
- G11B9/1418—Disposition or mounting of heads or record carriers
- G11B9/1427—Disposition or mounting of heads or record carriers with provision for moving the heads or record carriers relatively to each other or for access to indexed parts without effectively imparting a relative movement
- G11B9/1436—Disposition or mounting of heads or record carriers with provision for moving the heads or record carriers relatively to each other or for access to indexed parts without effectively imparting a relative movement with provision for moving the heads or record carriers relatively to each other
- G11B9/1454—Positioning the head or record carrier into or out of operative position or across information tracks; Alignment of the head relative to the surface of the record carrier
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B9/00—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor
- G11B9/02—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using ferroelectric record carriers; Record carriers therefor
Landscapes
- Micromachines (AREA)
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009508793A JP4542617B2 (ja) | 2007-03-30 | 2007-03-30 | 駆動装置 |
US12/532,794 US7884526B2 (en) | 2007-03-30 | 2007-03-30 | Driving apparatus |
PCT/JP2007/057068 WO2008126243A1 (ja) | 2007-03-30 | 2007-03-30 | 駆動装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/JP2007/057068 WO2008126243A1 (ja) | 2007-03-30 | 2007-03-30 | 駆動装置 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2008126243A1 true WO2008126243A1 (ja) | 2008-10-23 |
Family
ID=39863424
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2007/057068 WO2008126243A1 (ja) | 2007-03-30 | 2007-03-30 | 駆動装置 |
Country Status (3)
Country | Link |
---|---|
US (1) | US7884526B2 (ja) |
JP (1) | JP4542617B2 (ja) |
WO (1) | WO2008126243A1 (ja) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2008126244A1 (ja) * | 2007-03-30 | 2008-10-23 | Pioneer Corporation | 駆動装置 |
WO2008126235A1 (ja) * | 2007-03-30 | 2008-10-23 | Pioneer Corporation | 駆動装置 |
WO2008126236A1 (ja) * | 2007-03-30 | 2008-10-23 | Pioneer Corporation | 駆動装置 |
US8089053B1 (en) * | 2009-11-10 | 2012-01-03 | Dudley Finch | Dynamically tilting specimen holder for stereo and tomographic imaging in a transmission electron microscope using a combination of micro electro mechanical systems (MEMS) and piezoelectric transducers (PZTs) |
US9835595B2 (en) * | 2013-05-23 | 2017-12-05 | Qorvo Us, Inc. | Sensors, methods of making and devices |
US9527733B2 (en) * | 2014-11-07 | 2016-12-27 | The Chinese University Of Hong Kong | Method and apparatus for dynamic-tuning |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05126517A (ja) * | 1991-11-05 | 1993-05-21 | Canon Inc | 走査機構及びこれを用いた走査型顕微鏡及び記録再生装置 |
JPH06231493A (ja) * | 1993-02-03 | 1994-08-19 | Canon Inc | 基板位置決め機構および記録再生装置 |
JPH08146029A (ja) * | 1994-11-16 | 1996-06-07 | Murata Mfg Co Ltd | 振動子の共振周波数調整方法およびその装置 |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62105440A (ja) | 1985-11-01 | 1987-05-15 | Olympus Optical Co Ltd | 振動型ステ−ジ装置 |
JP3029499B2 (ja) | 1992-05-07 | 2000-04-04 | キヤノン株式会社 | 記録再生装置 |
US6555829B1 (en) * | 2000-01-10 | 2003-04-29 | Applied Materials, Inc. | High precision flexure stage |
JP3817120B2 (ja) * | 2000-07-07 | 2006-08-30 | 住友重機械工業株式会社 | 移動テーブルの変位制御方法、部材加工方法、x−yステージ装置、該x−yステージ装置の製造方法 |
JP4007767B2 (ja) * | 2001-01-18 | 2007-11-14 | 日本碍子株式会社 | 圧電/電歪デバイスおよびその製造方法 |
KR100552687B1 (ko) * | 2003-08-22 | 2006-02-20 | 삼성전자주식회사 | 대면적 스테이지를 구비한 2축 액츄에이터 |
US7461543B2 (en) * | 2005-06-17 | 2008-12-09 | Georgia Tech Research Corporation | Overlay measurement methods with firat based probe microscope |
JP2007273589A (ja) * | 2006-03-30 | 2007-10-18 | Fujitsu Ltd | 薄膜圧電デバイスおよびその作製方法 |
WO2008126235A1 (ja) * | 2007-03-30 | 2008-10-23 | Pioneer Corporation | 駆動装置 |
EP2133878A4 (en) * | 2007-03-30 | 2011-05-25 | Pioneer Corp | TRAINING UNIT |
JP4542614B2 (ja) * | 2007-03-30 | 2010-09-15 | パイオニア株式会社 | 駆動装置 |
WO2008126247A1 (ja) * | 2007-03-30 | 2008-10-23 | Pioneer Corporation | 駆動装置 |
WO2008126234A1 (ja) * | 2007-03-30 | 2008-10-23 | Pioneer Corporation | 駆動装置 |
-
2007
- 2007-03-30 WO PCT/JP2007/057068 patent/WO2008126243A1/ja active Search and Examination
- 2007-03-30 JP JP2009508793A patent/JP4542617B2/ja not_active Expired - Fee Related
- 2007-03-30 US US12/532,794 patent/US7884526B2/en not_active Expired - Fee Related
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05126517A (ja) * | 1991-11-05 | 1993-05-21 | Canon Inc | 走査機構及びこれを用いた走査型顕微鏡及び記録再生装置 |
JPH06231493A (ja) * | 1993-02-03 | 1994-08-19 | Canon Inc | 基板位置決め機構および記録再生装置 |
JPH08146029A (ja) * | 1994-11-16 | 1996-06-07 | Murata Mfg Co Ltd | 振動子の共振周波数調整方法およびその装置 |
Also Published As
Publication number | Publication date |
---|---|
JP4542617B2 (ja) | 2010-09-15 |
US20100133953A1 (en) | 2010-06-03 |
JPWO2008126243A1 (ja) | 2010-07-22 |
US7884526B2 (en) | 2011-02-08 |
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