WO2008123131A1 - 弾性表面波装置 - Google Patents

弾性表面波装置 Download PDF

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Publication number
WO2008123131A1
WO2008123131A1 PCT/JP2008/055246 JP2008055246W WO2008123131A1 WO 2008123131 A1 WO2008123131 A1 WO 2008123131A1 JP 2008055246 W JP2008055246 W JP 2008055246W WO 2008123131 A1 WO2008123131 A1 WO 2008123131A1
Authority
WO
WIPO (PCT)
Prior art keywords
surface wave
elastic surface
idt electrode
standardized
metal
Prior art date
Application number
PCT/JP2008/055246
Other languages
English (en)
French (fr)
Inventor
Michio Kadota
Original Assignee
Murata Manufacturing Co., Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co., Ltd. filed Critical Murata Manufacturing Co., Ltd.
Priority to JP2009509068A priority Critical patent/JP4811517B2/ja
Publication of WO2008123131A1 publication Critical patent/WO2008123131A1/ja

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Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02543—Characteristics of substrate, e.g. cutting angles
    • H03H9/02574—Characteristics of substrate, e.g. cutting angles of combined substrates, multilayered substrates, piezoelectrical layers on not-piezoelectrical substrate

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)

Abstract

　温度変化による特性の変動が生じ難く、ＩＤＴの電極指１本当たりの反射係数が高く、狭帯域化が容易な弾性表面波装置を得る。 　オイラー角が（０°±５°，０°～１４０°，０°±４０°）である水晶からなる圧電基板２の上面の複数本の溝２ａに金属が充填されて、ＩＤＴ電極３が形成されており、ＩＤＴ電極３を覆うようにｃ軸配向のＺｎＯからなる圧電膜４が形成されており、弾性表面波としてレイリー波が利用される弾性表面波装置において、ＩＤＴ電極３が、Ａｕ、Ｔａ、Ｗ、Ｐｔ、Ｃｕ、Ｎｉ及びＭｏからなる群から選択された少なくとも１種の金属を主体とする金属材料からなり、弾性表面波の波長をλとした場合、前記ＩＤＴ電極３において主体となる金属と、ＩＤＴ電極３のλで規格化してなる規格化膜厚と、圧電膜のλで規格化してなる規格化膜厚とが、下記の表１で示す各組み合わせの範囲内とされている弾性表面波装置１。
PCT/JP2008/055246 2007-03-30 2008-03-21 弾性表面波装置 WO2008123131A1 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2009509068A JP4811517B2 (ja) 2007-03-30 2008-03-21 弾性表面波装置

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007-092126 2007-03-30
JP2007092126 2007-03-30

Publications (1)

Publication Number Publication Date
WO2008123131A1 true WO2008123131A1 (ja) 2008-10-16

Family

ID=39830628

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/055246 WO2008123131A1 (ja) 2007-03-30 2008-03-21 弾性表面波装置

Country Status (2)

Country Link
JP (1) JP4811517B2 (ja)
WO (1) WO2008123131A1 (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010058544A1 (ja) * 2008-11-18 2010-05-27 株式会社村田製作所 チューナブルフィルタ
JP2010283807A (ja) * 2009-05-08 2010-12-16 Murata Mfg Co Ltd 弾性表面波装置
US8310321B2 (en) 2008-11-18 2012-11-13 Murata Manufacturing Co., Ltd. Tunable filter including a variable capacitor connected with a surface acoustic wave resonator

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002152000A (ja) * 2000-11-14 2002-05-24 Seiko Epson Corp 弾性表面波素子
JP2003037467A (ja) * 2001-07-24 2003-02-07 Murata Mfg Co Ltd 弾性表面波装置
WO2006011417A1 (ja) * 2004-07-26 2006-02-02 Murata Manufacturing Co., Ltd. 弾性表面波装置
JP2006270906A (ja) * 2005-03-23 2006-10-05 Kazuhiko Yamanouchi 温度高安定・高結合溝構造弾性表面波基板とその基板を用いた弾性表面波機能素子

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100713966B1 (ko) * 1997-07-28 2007-05-02 가부시끼가이샤 도시바 탄성표면파 장치 및 그의 제조방법
JP2002280856A (ja) * 2001-03-21 2002-09-27 Seiko Epson Corp 弾性表面波素子の製造方法
JP4244656B2 (ja) * 2003-02-26 2009-03-25 株式会社村田製作所 弾性表面波装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002152000A (ja) * 2000-11-14 2002-05-24 Seiko Epson Corp 弾性表面波素子
JP2003037467A (ja) * 2001-07-24 2003-02-07 Murata Mfg Co Ltd 弾性表面波装置
WO2006011417A1 (ja) * 2004-07-26 2006-02-02 Murata Manufacturing Co., Ltd. 弾性表面波装置
JP2006270906A (ja) * 2005-03-23 2006-10-05 Kazuhiko Yamanouchi 温度高安定・高結合溝構造弾性表面波基板とその基板を用いた弾性表面波機能素子

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
KADOTA M. ET AL.: "ZnO-maku Hyomen Kenma ni yoru SAW Filter no Shuhasu Tokusei Baratsuki no Teigen", THE TRANSACTIONS OF THE INSTITUTE OF ELECTRONICS, INFORMATION AND COMMUNICATION ENGINEERS, vol. J76-A, no. 10, 25 October 1993 (1993-10-25), pages 1399 - 1406 *

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010058544A1 (ja) * 2008-11-18 2010-05-27 株式会社村田製作所 チューナブルフィルタ
CN102204091A (zh) * 2008-11-18 2011-09-28 株式会社村田制作所 可调滤波器
US8305163B2 (en) 2008-11-18 2012-11-06 Murata Manufacturing Co., Ltd. Tunable filter including a surface acoustic wave resonator and a variable capacitor
US8310321B2 (en) 2008-11-18 2012-11-13 Murata Manufacturing Co., Ltd. Tunable filter including a variable capacitor connected with a surface acoustic wave resonator
JP5120461B2 (ja) * 2008-11-18 2013-01-16 株式会社村田製作所 チューナブルフィルタ
JP5420564B2 (ja) * 2008-11-18 2014-02-19 株式会社村田製作所 チューナブルフィルタ
JP2010283807A (ja) * 2009-05-08 2010-12-16 Murata Mfg Co Ltd 弾性表面波装置

Also Published As

Publication number Publication date
JP4811517B2 (ja) 2011-11-09
JPWO2008123131A1 (ja) 2010-07-15

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