WO2008114330A1 - Ｍｅｍｓデバイスおよび光スイッチ - Google Patents

Ｍｅｍｓデバイスおよび光スイッチ Download PDF

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Publication number
WO2008114330A1
WO2008114330A1 PCT/JP2007/052977 JP2007052977W WO2008114330A1 WO 2008114330 A1 WO2008114330 A1 WO 2008114330A1 JP 2007052977 W JP2007052977 W JP 2007052977W WO 2008114330 A1 WO2008114330 A1 WO 2008114330A1
Authority
WO
WIPO (PCT)
Prior art keywords
mems device
optical switch
electrodes
electrode
movable electrode
Prior art date
Application number
PCT/JP2007/052977
Other languages
English (en)
French (fr)
Inventor
Takashi Shimizu
Kazuyuki Mori
Original Assignee
Fujitsu Limited
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Limited filed Critical Fujitsu Limited
Priority to JP2009504921A priority Critical patent/JP5099121B2/ja
Priority to PCT/JP2007/052977 priority patent/WO2008114330A1/ja
Publication of WO2008114330A1 publication Critical patent/WO2008114330A1/ja
Priority to US12/500,665 priority patent/US7847995B2/en

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0064—Constitution or structural means for improving or controlling the physical properties of a device
    • B81B3/0086—Electrical characteristics, e.g. reducing driving voltage, improving resistance to peak voltage
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/03—Microengines and actuators
    • B81B2201/033—Comb drives

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Micromachines (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)

Abstract

　ＭＥＭＳデバイスは、固定電極（４１０）に対して可動電極（４２０）が印加電圧に応じて変位するＭＥＭＳデバイスである。電極（４１１～４１４）は固定電極（４１０）に設けられている。電極（４２１～４２４）は、可動電極（４２０）に設けられ、電極（４１１～４１４）に対向して位置している。電極（４１１～４１４）および電極（４２１～４２４）は互いに抵抗（４１１ａ～４１４ａ，４２１ａ～４２４ａ）を介して接続されている。
PCT/JP2007/052977 2007-02-19 2007-02-19 Ｍｅｍｓデバイスおよび光スイッチ WO2008114330A1 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2009504921A JP5099121B2 (ja) 2007-02-19 2007-02-19 Ｍｅｍｓデバイスおよび光スイッチ
PCT/JP2007/052977 WO2008114330A1 (ja) 2007-02-19 2007-02-19 Ｍｅｍｓデバイスおよび光スイッチ
US12/500,665 US7847995B2 (en) 2007-02-19 2009-07-10 MEMS device and optical switch

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2007/052977 WO2008114330A1 (ja) 2007-02-19 2007-02-19 Ｍｅｍｓデバイスおよび光スイッチ

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US12/500,665 Continuation US7847995B2 (en) 2007-02-19 2009-07-10 MEMS device and optical switch

Publications (1)

Publication Number Publication Date
WO2008114330A1 true WO2008114330A1 (ja) 2008-09-25

Family

ID=39765451

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2007/052977 WO2008114330A1 (ja) 2007-02-19 2007-02-19 Ｍｅｍｓデバイスおよび光スイッチ

Country Status (3)

Country Link
US (1) US7847995B2 (ja)
JP (1) JP5099121B2 (ja)
WO (1) WO2008114330A1 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017509878A (ja) * 2014-02-25 2017-04-06 ノースロップ グルマン リテフ ゲーエムベーハーＮｏｒｔｈｒｏｐ Ｇｒｕｍｍａｎ ＬＩＴＥＦ ＧｍｂＨ ガルバニック絶縁した分割動作構造を有する微小機械コンポーネント、およびその駆動方法

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102290708B (zh) * 2011-04-29 2013-03-27 上海交通大学 Mems可动电极式火花隙开关
CN106403922A (zh) * 2015-07-31 2017-02-15 立锜科技股份有限公司 具有电性补偿的微机电元件及其读取电路

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08179590A (ja) * 1994-12-27 1996-07-12 Sharp Corp 帯電装置およびその製造方法
JP2003246070A (ja) * 2002-02-25 2003-09-02 Ricoh Co Ltd 液滴吐出ヘッド及びその製造方法、インクジェット記録装置並びにマイクロデバイス
JP2006162699A (ja) * 2004-12-02 2006-06-22 Fujitsu Ltd マイクロ揺動素子

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2223353A (en) * 1988-09-30 1990-04-04 Philips Electronic Associated Thin-film transistor
KR100400218B1 (ko) * 2000-08-18 2003-10-30 삼성전자주식회사 마이크로 액튜에이터 및 그 제조방법
US6825967B1 (en) * 2000-09-29 2004-11-30 Calient Networks, Inc. Shaped electrodes for micro-electro-mechanical-system (MEMS) devices to improve actuator performance and methods for fabricating the same
JP2004103559A (ja) * 2002-07-15 2004-04-02 Toshiba Corp Ｍｅｍｓ装置
JP2004070053A (ja) 2002-08-07 2004-03-04 Sun Tec Kk 光スイッチ及び光スイッチアレー
JP4581453B2 (ja) * 2004-03-29 2010-11-17 ソニー株式会社 Ｍｅｍｓ素子、光学ｍｅｍｓ素子、回折型光学ｍｅｍｓ素子、並びにレーザディスプレイ
JP2006053396A (ja) * 2004-08-12 2006-02-23 Tohoku Univ 駆動機構、および該機構を備えたマイクロミラー装置
JP4288275B2 (ja) * 2006-08-30 2009-07-01 富士通株式会社 光スイッチ装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08179590A (ja) * 1994-12-27 1996-07-12 Sharp Corp 帯電装置およびその製造方法
JP2003246070A (ja) * 2002-02-25 2003-09-02 Ricoh Co Ltd 液滴吐出ヘッド及びその製造方法、インクジェット記録装置並びにマイクロデバイス
JP2006162699A (ja) * 2004-12-02 2006-06-22 Fujitsu Ltd マイクロ揺動素子

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017509878A (ja) * 2014-02-25 2017-04-06 ノースロップ グルマン リテフ ゲーエムベーハーＮｏｒｔｈｒｏｐ Ｇｒｕｍｍａｎ ＬＩＴＥＦ ＧｍｂＨ ガルバニック絶縁した分割動作構造を有する微小機械コンポーネント、およびその駆動方法

Also Published As

Publication number Publication date
US20100134860A1 (en) 2010-06-03
JP5099121B2 (ja) 2012-12-12
US7847995B2 (en) 2010-12-07
JPWO2008114330A1 (ja) 2010-06-24

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WO2008114330A1 (ja) Ｍｅｍｓデバイスおよび光スイッチ

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