WO2008062712A1 - Dispositif d'éjection d'encre et procédé, programme et support d'enregistrement pouvant être lu par ordinateur - Google Patents

Dispositif d'éjection d'encre et procédé, programme et support d'enregistrement pouvant être lu par ordinateur Download PDF

Info

Publication number
WO2008062712A1
WO2008062712A1 PCT/JP2007/072193 JP2007072193W WO2008062712A1 WO 2008062712 A1 WO2008062712 A1 WO 2008062712A1 JP 2007072193 W JP2007072193 W JP 2007072193W WO 2008062712 A1 WO2008062712 A1 WO 2008062712A1
Authority
WO
WIPO (PCT)
Prior art keywords
ink
ejection
target area
substrate
discharge
Prior art date
Application number
PCT/JP2007/072193
Other languages
English (en)
Japanese (ja)
Inventor
Hidetsugu Kawai
Chiyoshi Yoshioka
Yasuhiro Sakamoto
Original Assignee
Sharp Kabushiki Kaisha
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2007295494A external-priority patent/JP4503063B2/ja
Application filed by Sharp Kabushiki Kaisha filed Critical Sharp Kabushiki Kaisha
Publication of WO2008062712A1 publication Critical patent/WO2008062712A1/fr

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J3/00—Typewriters or selective printing or marking mechanisms characterised by the purpose for which they are constructed
    • B41J3/28—Typewriters or selective printing or marking mechanisms characterised by the purpose for which they are constructed for printing downwardly on flat surfaces, e.g. of books, drawings, boxes, envelopes, e.g. flat-bed ink-jet printers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J3/00—Typewriters or selective printing or marking mechanisms characterised by the purpose for which they are constructed
    • B41J3/44—Typewriters or selective printing mechanisms having dual functions or combined with, or coupled to, apparatus performing other functions

Definitions

  • Ink ejection apparatus method thereof, program, and computer-readable recording medium
  • the present invention relates to an ink ejection apparatus that ejects ink to a plurality of objects existing on a medium, a method, a program, and a computer-readable recording medium.
  • Ink ejection technology is generally applied to consumer printers and the like.
  • the application of the above technology to industrial applications has been promoted, and the applications are diversified.
  • Inkjet patterning technology is a technology that forms a fine pattern on a substrate by ejecting a small amount of liquid (ink) from the power of an ink ejection device.
  • This inkjet patterning technology is attracting attention as a technique that can be applied to a pattern formation method using a vacuum removal process instead of a conventional pattern formation method using a vacuum process based on photolithography.
  • Manufacturing apparatuses using inkjet patterning technology include, for example, CF (Color Filter) panels and TFT (Thin Film Transistor) panels used for liquid crystal displays, organic EL (electroluminescence) elements, and substrates. And a manufacturing apparatus used for forming a fine metal wire.
  • the CF panel manufacturing apparatus is an apparatus for forming pixels on a transparent substrate (glass substrate) using an ink jet mechanism that discharges a small amount of ink.
  • a pixel is made up of a plurality of RGB pixel areas formed on a glass substrate by landing ink of one of red (R), green (G), and blue (B). It is formed by filling (coloring) the pixel region.
  • the inkjet patterning technology is used in the manufacture of CF panels for liquid crystal V, which has become larger year by year.
  • the above-mentioned ink jet patterning technology is described above in the CF panel manufacturing process.
  • the repairing process for defective pixels is being developed in the process of repairing defects in the colored portion of the pixels.
  • the defect that the pixel has is, for example, color mixing in the colored portion, mixing or adhesion of impurities.
  • the defective portion of the pixel is used as a repair method used in the defective pixel repair device as described above.
  • the ink can be repaired by ejecting the ink using ink jet patterning technology.
  • Patent Document 1 discloses a pixel defect in which the entire colored portion of a defective pixel is removed instead of removing a portion of the colored portion including a defect in the colored portion of the pixel. A repair method is disclosed.
  • Patent Document 2 discloses that the amount of ink calculated based on the area of the region where the colored portion is removed in a rectangular shape is accurately applied to the region. The method of discharging is disclosed!
  • the CF panel is generally composed of a BM (black matrix) film formed on a transparent substrate, and the RGB pixel region surrounded by the BM film in a matrix.
  • the BM film has functions of preventing color mixing that occurs when adjacent pixels are colored, improving the contrast of the pixels, and preventing light from entering the TFT drive unit.
  • the area of the BM film may be increased.
  • the BM film When the area is increased, the image quality deteriorates due to a decrease in the aperture ratio of the pixel. Therefore, in order to realize a high-quality liquid crystal display device, it is necessary to form a BM film having an area and shape that can simultaneously achieve light shielding of the TFT drive unit and a high aperture ratio of the pixel. For this reason, the BM film needs to be formed to have a different width depending on a place where the pixel periphery is not simply formed so as to be surrounded by a wide line shape.
  • a portion that shields the TFT drive unit (for example, a corner portion of a pixel) is formed to have a complicated shape in order to efficiently shield the TFT drive unit.
  • the pixel surrounded by the BM film as described above naturally has a complicated shape.
  • Patent Document 1 Japanese Patent Publication “JP 2003-66218 (Publication Date: March 5, 2003)”
  • Patent Document 2 Japanese Published Patent Publication “JP 2004-251988 Publication (Publication Date: September 9, 2004)”
  • Patent Document 1 does not give any consideration to the shape of the RGB pixel region (region surrounded by the BM film). For this reason, the wettability state of the substrate that forms the RGB pixel area. Even if the RGB pixel area has a simple shape, it does not become a problem. There is a high possibility that the ink does not spread and spread in a portion adjacent to the pixel region, particularly in a corner portion of the pixel region. Area force where the ink did not spread We formed bright spots (white areas) of the pixels, and the image deteriorated.
  • the degree of removal of the colored portion may vary due to fluctuations in the laser power or unevenness of the intensity in the laser irradiation area.
  • the wettability state of the substrate is the degree of lyophilicity and liquid repellency of the substrate with respect to the ink. The lyophilicity is high, the wettability state is better, and the liquid repellency is higher! The wettability state is poor. Wetability due to adhesion of foreign matter (dust etc.) or contamination with organic matter Deteriorates (the lyophilicity of the substrate decreases or the liquid repellency increases).
  • Patent Document 2 describes that the force S, the shape of the RGB pixel area, and the ink landing position are described in which the ink discharge amount is determined based on the volume of the restoration target area. It has not been. For this reason, if the defect exists in the vicinity of the BM film, the following problems may occur.
  • the BM film may be included in the removal target region.
  • the aperture ratio may change due to damage to the BM film by laser irradiation. If the corner of the BM film is present in the laser irradiation area, the volume of the removal area may differ from the volume calculated from the set area irradiated with the laser. It cannot be formed thick.
  • the laser irradiation position may deviate from the set position, and the coloring portion may be changed due to an error in scanning accuracy of the apparatus including the laser.
  • the area or position of the removed region may deviate from the setting. For this reason, for example, in a 200 ⁇ 600 ⁇ 111 pixel, the laser irradiation position causes a positional deviation of about ⁇ 15 111 at the maximum. At this time, the variation of the area of the region from which the colored portion is removed exceeds about 18%.
  • Patent Documents 1 and 2 it is described that the colored portion including the defective portion is removed after the defective portion is imaged by the camera, but after the colored portion is removed, the colored portion is removed. It is not described that the removed area (repair target area) is imaged by a camera. In other words, no consideration is given to accurately confirming the position and area of the actual repair target area. Therefore, Patent Documents 1 and 2 do not determine the position and the volume of ink that need to be repaired based on the information on the actual repair target area. For this reason, if the colored part remains in the area to be repaired without being removed, ink is ejected. The position and quantity may not be determined accurately.
  • the CF panel has the power to arrange pixels of the same size and shape in the same direction as before. It ’s getting better than Ruri. For example, by integrating the TFT drive unit at the center of four pixels, a contrivance has been made to ensure light shielding by using a BM film with a smaller area.
  • Patent Documents 1 and 2 only describe that the colored portion of the CF panel is repaired using color material ink.
  • the defective portion of the gate insulating film is repaired with the insulating material ink, and the ITO (Indium Tin Oxide) film defective portion that is the pixel electrode Repair of electrode film with ink containing ITO fine particles, polyimide precursor for polyimide alignment film defects, alignment film repair with ink, or resist coating repair with resist ink for resist coating defects in each TFT photolithography process, etc.
  • the repair region is formed by laser removal, the action of the laser (such as removal of the base film) on the lower layer (underlayer film) of the laminated film may not be ignored.
  • a desired repair region is formed by removing the repair region including the defect portion by laser, the following problems arise. For example, when a repair region including a defective portion where a base film that is susceptible to laser action (easy to be removed by a laser) is exposed is formed, the base film is excessively removed. On the other hand, for example, even in the case of forming a repair region including a defective portion where a base film that is susceptible to laser action (easy to be removed by a laser) is exposed, a part of the base film may be formed due to laser power variation. It will be removed excessively. In these cases, the thickness of the normal underlayer changes and the TFT does not operate normally.
  • the present invention has been made in view of the above-described problems, and an object of the present invention is to quickly and accurately ink a plurality of areas having a fine and complicated shape on a medium. It is an object of the present invention to provide an ink ejection apparatus capable of applying the ink, its method, a program, and a computer-readable recording medium.
  • an ink ejection apparatus of the present invention includes:
  • An ejection target area determining means for determining the shape of an ink ejection target area based on a pattern desired to be formed on a substrate; a nozzle driving means for driving a plurality of nozzles of the inkjet head; Based on the shape of the target area, the nozzles for ejecting ink are determined, and control signals for controlling the number of ejections of ink ejected from each of the nozzles for ejecting ink and the landing position are supplied to the nozzle driving means. And supply control means.
  • the ejection target area determining means sets the ejection target area in accordance with the shape of the pattern desired to be formed. At this time, it is preferable that the ejection target area determining means sets the ejection target area inside the pattern so that the ejected ink can surely land in the pattern.
  • the shape of the pattern include a shape having three, four, five or more corners and sides, a shape including an arc and a curve, and the like. Then, the shape of the ejection target region is determined so as to correspond to the shape of the pattern.
  • the control means calculates the number of ink ejections and the landing position in accordance with the shape of the ejection target area so that the ink is uniformly applied to the pattern with a desired thickness, and the number of ejections And determine (assign) the nozzles that eject ink from the landing position to the target area.
  • the number of ink landings per unit area in the ejection target region may be uniform or non-uniform in all locations of the ejection target region.
  • the pattern ink will be in a place corresponding to a place where the pattern ink is difficult to get wet and has a wide force (a place having unevenness).
  • the number of ink ejections and the landing position may be set so that the number of ink landings is greater than in other locations.
  • the number of ink ejections and the landing position may be set so that the number of ink landings is equal.
  • the nozzle driving means that has been supplied with the control signal generated by the control means drives the nozzle in accordance with the control signal. That is, ink is ejected from the desired nozzle a desired number of times, and the ejected ink lands on a desired position in the ejection target area corresponding to the driven nozzle. In other words, a desired landing position can be obtained by driving a nozzle facing the desired landing position.
  • ink can be applied so as to have a desired thickness and shape on at least one ejection target region having a fine and complicated shape.
  • the control means determines a nozzle that ejects ink according to the width of the ejection target area, and ejects from each of the nozzles that eject ink according to the length of the ejection target area.
  • a control signal for controlling the number of ink ejections and the landing position may be supplied to the nozzle driving means.
  • the control means determines (assigns) five nozzles to be ejected according to the width (lateral distance) of the ejection target area
  • the ejection target area has the same width. Divide it vertically into five.
  • the control means determines the number of times and the landing position of the ink ejected from each of the nozzles according to the length of the divided area (vertical distance) to which the nozzle is assigned.
  • the lengths of the five divided regions are not all the same, the number of ejections and the number of ejections in each of the assigned nozzles are uniform so that the number of ink landings per unit area in the entire ejection target region is uniform. Independent landing position decide.
  • the ink ejection device of the present invention includes:
  • the angle formed by the width direction of the ejection target area and the nozzle arrangement direction of the ink jet head is adjusted so as to increase the number of nozzles that the control means can determine as nozzles that eject ink. It is preferable to further include an angle adjusting means.
  • the angle between the width direction of the ejection target area and the arrangement direction of the plurality of nozzles The closer the angle is to a right angle, the more force S can increase the number of nozzles that eject ink to the target area.
  • the angle adjustment means is used to adjust the width of the plurality of nozzles so that it does not become smaller than the width of the discharge target region and the angle is closer to a right angle, the ink discharge process The tact time can be shortened.
  • the discharge target area determining means is a means for further associating the positions of the plurality of discharge target areas on the substrate with respect to the shapes of the plurality of discharge target areas based on the pattern. It is preferable to further include a discharge order determining means for determining the order of the plurality of discharge target areas for performing ink discharge based on the shape of the ink and its corresponding position.
  • the position on the substrate is further associated with each of the shapes of the plurality of ejection target regions. Relative movement between the inkjet head and the substrate necessary to eject ink to all the ejection target areas existing on the substrate based on the shape of the plurality of ejection target areas and the position on the substrate It is possible to calculate the distance S.
  • the ejection order determining means determines the ink ejection order to the plurality of ejection target areas so that the relative moving distance is the shortest.
  • the ink can be discharged in the shortest time with respect to all of the plurality of ejection target areas on the substrate.
  • the order for performing ejection can be determined. That is, the tact time of the ink ejection process can be shortened.
  • the ink ejection device of the present invention includes:
  • a scanning direction determining means for determining a relative scanning direction of the inkjet head and the substrate based on the order of the plurality of ejection target areas for performing ink ejection; the relative scanning direction; and the ejection target area It is preferable that the apparatus further includes a correction signal supply unit that supplies a signal that rotates the shape of the ejection target region to the control unit by an amount corresponding to a difference in angle with the scanning direction assumed at the time of determination.
  • the above-described discharge order is determined so that no wasteful time occurs in the ink discharge process!
  • the wasted time for example, the power of the inkjet head returning to the start end in the scanning direction without discharging ink after reaching the end in the running direction in the discharge target region can be cited.
  • the relative scanning direction of the inkjet head and the substrate changes in the reverse direction, or the scanning direction when the shape is determined by the ejection target region determining unit. Different things can happen.
  • the correction signal supply unit rotates the shape of the discharge target region by an angle at which the scanning direction changes.
  • the signal to be transmitted is transmitted.
  • the correction signal supply means is equivalent to the difference in angle between the two scanning directions. Then, a signal for rotating the shape of the discharge target region is transmitted.
  • the shape and orientation of the ejection target region when ink is actually ejected can be accurately recognized.
  • the shape of the ejection target area in the relative scanning direction of the ink jet head and the substrate can be kept constant throughout the ink ejection process.
  • the ink ejection device of the present invention comprises:
  • Pattern recognition means for recognizing the shape and position of the pattern desired to be formed on the substrate, and the discharge target area determining means is configured to perform ink based on the shape and position recognized by the pattern recognition means.
  • the shape of the discharge target area may be determined.
  • the pattern recognition means specifies the shape and position of the pattern from a solid-state image sensor that images a defective pixel formed on the substrate and an electric signal output from the solid-state image sensor. And a program for converting it into data.
  • the inside of the pattern is lyophilic with respect to ink and the outside of the pattern is lyophobic with respect to ink
  • the ejection target area determining means determines the ejection target area as a polygon connecting a plurality of ink landing candidate positions inside the shape recognized by the pattern recognition means.
  • the ejection target area determining means determines the ejection target area as a polygon connecting a plurality of ink landing candidate positions outside the shape recognized by the pattern recognition means. It is preferable.
  • the ejection target area determination unit selects a plurality of ink landing candidate positions that minimize the area of the polygon.
  • the substrate is a transparent substrate in which a plurality of pixels, which are unit regions colored by the ink, are formed, and the pattern has one pixel or a defective portion among the pixels formed on the transparent substrate. It can be a collection of multiple pixels.
  • the substrate may be a transparent substrate partitioned using a light shielding portion, and the pattern may be a pixel region surrounded by the light shielding portion.
  • the ink ejection method of the present invention includes:
  • an ejection target region determining step for determining the shape of an ink ejection target region based on a pattern desired to be formed on the substrate, and the ejection target Based on the shape of the region, the internal force of the plurality of nozzles of the inkjet head, the nozzles that eject ink are determined, and the number of ejections of ink ejected from each of the nozzles that eject ink and It includes a control step of supplying a control signal for controlling the landing position to the nozzle driving means, and a nozzle driving step of driving the nozzle used for ink ejection.
  • an ink ejection control program of the present invention provides:
  • a computer is caused to function as each means provided in the ink ejection device.
  • the computer can be operated as the ink ejection device, and the above-described effects exhibited by the ink ejection device can be obtained.
  • a recording medium on which the ink ejection control program is recorded is also included in the scope of the present invention.
  • FIG. 1 is a block diagram showing an example of the configuration of an ink ejection apparatus according to the present invention.
  • FIG. 2 is a perspective view showing an example of the external configuration of the ink ejection apparatus according to the present invention.
  • FIG. 3 is a perspective view showing an internal configuration of an ink discharge unit in the ink discharge apparatus of FIG. 2.
  • FIG. 4 is a flowchart showing an example of a procedure for operating the ink ejection apparatus of FIG. 5]
  • FIG. 5 is a plan view showing an example of the manner in which the shape of the ejection target region is determined based on the shape of the defective pixel.
  • FIG. 5 (a) shows the pixel from which the colored portion is removed by the laser.
  • FIG. 5B shows an example in which a discharge target region is set in the colored portion of FIG. 5A.
  • FIG. 6 is a diagram showing a part of the processing of the ink ejection apparatus in FIG. 2, and FIG. 6 (a) is a plan view for explaining the relative scanning direction of the ink jet head and the substrate.
  • FIG. 6B is a plan view for explaining the scanning direction opposite to FIG. 6A, and
  • FIG. 6C is a diagram for explaining the processing procedure when the shape of the defective pixel is different. is there.
  • FIG. 7 is a diagram for explaining the relationship between the nozzle arrangement direction and the pixel width direction.
  • FIG. 7 (a) shows the state in which the nozzle arrangement direction and the pixel width direction are parallel to each other.
  • FIG. 7B is a plan view for explaining a state in which the nozzle arrangement direction and the pixel width direction have an angle ⁇ .
  • FIG. 8 is a flowchart showing an example of detailed processing in S8 of the flowchart of FIG.
  • FIG. 9 is a plan view for explaining a state in which the ejection target area is divided by the number of nozzles.
  • FIG. 10 is a plan view for explaining the number of ejections and landing positions of ink ejected from one nozzle to one divided region.
  • FIG. 11 shows an example of a control signal transmitted by the control unit
  • FIG. 11 (a) shows the nozzle drive means for realizing the number of ink ejections and the landing position shown in FIG. Fig. 11 (b) is a graph showing the signal waveform of (a).
  • FIG. 12 is a diagram showing the shape of a pixel according to the present invention
  • FIG. 12 (a) is a plan view showing a modification of the shape of the colored portion in the pixel shown in FIG. 12
  • FIG. 12 (b) is a plan view showing another modification of the shape of the colored portion in the pixel shown in FIG. 6,
  • FIG. 12 (c) is another modification of the shape of the colored portion in the pixel shown in FIG. It is a top view which further shows an example. 13]
  • FIG. 13 is a plan view showing another example of the manner in which the shape of the ejection target region is determined based on the shape of the defective pixel.
  • FIG. 14 is a diagram showing the structure of a TFT panel, and FIG. 14B is a cross-sectional view showing the structure of the gate / source cross portion, and FIG. 14B is a cross-sectional view showing a case where foreign matter is adhered during the formation of the gate wiring film of the TFT panel, and FIG. FIG. 14 is a cross-sectional view showing a state after removing foreign matter from (b), and FIG. 14 (d) is a cross-sectional view showing a state in which a source film is formed on (c).
  • FIG. 15 is a plan view showing an example of image processing in the repair of the defective part of FIG. 14 (c).
  • FIG. 16 is a plan view showing another example of image processing in the repair of the defective part of FIG. 14 (c).
  • FIG. 17 is a diagram showing an example of image processing according to the present invention.
  • FIG. 17 (a) is a plan view showing details of the first half of the image processing of FIG. 16, and
  • FIG. b) is a plan view showing details of the processing following (a).
  • Pattern recognition unit (pattern recognition means)
  • Discharge target area determination unit (Discharge target area determination means)
  • Control unit (control means)
  • Discharge order determination unit (Discharge order determination means)
  • FIG. 1 is a block diagram showing the configuration of the ink ejection device 10.
  • the ink ejection apparatus 10 includes an information processing unit 1, an inkjet head 3, a pattern recognition unit 5 (pattern recognition unit), a movable unit 7, and a start instruction output unit 9.
  • Nozzle 31 force S is formed on inkjet head 3.
  • An external input device 19 that obtains pattern position information on the substrate and supplies the position information to the information processing section 1 is connected to the start instruction output section 9.
  • the above-described configuration of the ink ejection apparatus 10 operates as follows. Based on the operation start instruction from the start instruction output unit 9, the pattern recognition unit 5 acquires the pattern shape information desired to be formed on the substrate 20, and the external input device 19 acquires the position information of the pattern. Then, the shape information and position information of the acquired pattern are transmitted to the information processing unit 1. Based on the two pieces of information transmitted from the pattern recognition unit 5 and the external input device 19, the information processing unit 1 determines the nozzle 31 used for ejection, controls the ink ejected from the nozzle 31, and the ink ejection target area.
  • a control signal is generated for determining the ejection order of the ink and for controlling the relative scanning direction of the inkjet head 3 using the movable part 7 and the substrate 20.
  • Information processing department Based on the above four control signals generated by 1, the ink is ejected so that a desired pattern can be formed on the substrate 20.
  • the pattern recognition unit 5 is a program that converts a camera including a solid-state image pickup device that picks up an image of a subject and electrical signals output from the solid-state image pickup device into data for specifying the shape of the subject. And a processing unit.
  • the information processing unit 1 that sets the main operation of the ink ejection apparatus 10 includes an ejection target region determination unit 11 (ejection target region determination unit), a control unit 12 (control unit), and a nozzle drive unit. 13 (nozzle drive means), angle adjustment section 14 (angle adjustment means), discharge order determination section 15 (discharge order determination means), scanning direction determination section 16 (scanning direction determination means) and correction signal supply section 17 (correction) Signal supply means)!
  • the ejection target area determination unit 11 determines the shape information of the ink ejection target area on the substrate 20 based on the pattern shape information and the position information from the pattern recognition unit 5 and the external input device 19. The position information on the substrate 20 is associated with the shape information. Furthermore, the ejection target region determination unit 11 transmits both or one of the two pieces of information to the control unit 12, the angle adjustment unit 14, and the ejection order determination unit 15.
  • the ejection order determination unit 15 performs the ink ejection process in the shortest time on the plurality of ejection target areas based on the shape information and position information of the determined ejection target areas! /, The order of the ejection target areas for ejecting ink is determined so as to obtain. The determined order of the ejection target area is transmitted to the control unit 12 and the scanning direction determination unit 16.
  • the scanning direction determination unit 16 determines a relative scanning direction between the inkjet head 3 and the substrate 20 based on the above order, and the movable unit 7 holds the substrate in which the inkjet head 3 and the substrate 20 are held. Decide the direction to move the platform 24a.
  • the correction signal supply unit 17 corrects the shape of the ejection target region determined by the ejection target region determination unit 11 as necessary. For example, when the driving direction of the movable unit 7 is different from the scanning direction at the time of pattern recognition by the pattern recognition unit, the correction is performed by rotating the ejection target region by the difference in angle between the two directions. . The angle obtained by correcting (rotating) the discharge target region is transmitted to the control unit 12 and the angle adjusting unit 14.
  • the angle adjusting unit 14 determines the determined shape of the discharge target area and the discharge target area. Based on the corrected (rotated) angle, the angle at which the inkjet head 3 is rotated is set. The arrangement direction of the nozzles 31 is changed by the rotation of the inkjet head 3. By changing the arrangement direction of the nozzles 31, the number of nozzles 31 that can discharge to the discharge target area is increased, or the nozzles 31 that discharge to the discharge target area are changed to the discharge target area. Disperse uniformly. The angle set for rotating the inkjet head 3 is transmitted to the control unit 12.
  • the control unit 12 determines the shape of the discharge target region associated with the position on the substrate 20, the angle by which the arrangement direction of the nozzles 31 is rotated, the determined order of the discharge target region, and the discharge target region. Based on the angle corrected (rotated), the nozzles 31 to be ejected are determined for each of the ejection target areas, and the number of ejections and the landing positions of the ink ejected from the nozzles 31 are determined. decide. Further, the control unit 12 generates a control signal for controlling the number of ejections of the ink ejected from the nozzles 31 and the landing position. By supplying the control signal, the nozzle 31 is caused to eject ink based on the ink ejection signal generated by the nozzle driving unit 13.
  • FIG. 2 is a perspective view for explaining the external configuration of the ink ejection device 10.
  • the ink ejection apparatus 10 includes a computer 21 that includes an information processing unit 1, an ink ejection unit 22 that includes an inkjet head 3, and a pattern.
  • a recognition unit 5, a head stage 23, a substrate stage 24, and a bridge 25 are provided.
  • the computer 21 is connected to the ink discharge unit 22, the pattern recognition unit 5, and the substrate stage 24.
  • the substrate stage 24 includes a substrate holder 24a and a stage 24b.
  • a start instruction output unit 9 is formed on the substrate placement portion of the substrate support 24a. Further, a movable portion 7 (not shown) is formed between the substrate holding base 24a and the stage 24b.
  • a camera is used as the pattern recognition unit 5 and a sensor is used as the start instruction output unit 9.
  • the ink ejection unit 22 and the pattern recognition unit 5 have their respective axes in the height direction as shown in FIG. It is fixed to the head stage 23 so as to be parallel to the Z axis.
  • the head stage 23 is connected to a bridge 25 via a movable part 7 (not shown), and is movable on the bridge 25 in the Y-axis direction.
  • the substrate stage 24 is arranged in parallel with the XY plane of FIG. 2, and the substrate 20 is similarly held by the substrate holding table 24a so as to be parallel to the XY plane.
  • the substrate holding table 24a is movable in the X-axis direction.
  • the substrate holding table 24a is formed with a gap adjusting portion (not shown) between the substrate 20 and the held substrate 20.
  • the gap adjusting portion includes the ink discharge unit 22, the substrate 20 and the substrate holding table. It is formed to adjust the distance from 24a.
  • the ink ejection surface of the ink ejection unit 22 (the lower surface of the ink ejection unit 22) and the imaging surface of the pattern recognition unit 5 (the lower surface of the pattern recognition unit 5) are always on the upper surface of the substrate 20. Opposing in parallel. In other words, this state can be rephrased that the formation surfaces of the ink discharge unit 22 and the pattern recognition unit 5 of the head stage 23 are orthogonal to the substrate arrangement surface of the substrate stage 24.
  • the head stage 23 is movable in the Y-axis direction and the substrate holder 24a is movable in the X-axis direction
  • the lower surface of the ink discharge unit 22 and the lower surface of the pattern recognition unit 5 are opposed to the entire area of the upper surface of the substrate 20.
  • the pattern recognition unit 5 is imaged to detect defective pixels. 19 is instructed to start repair processing of defective pixels.
  • the sensor may detect the end of alignment between the substrate 20 and the ink ejection device 10 performed after the substrate 20 is carried in, and may instruct the start of the repair process.
  • An illumination unit such as a fiber lamp is attached in the vicinity of the camera used as the pattern recognition means 5.
  • the camera captures a reflected image of the substrate 20 obtained by irradiating the substrate 20 with light from the illumination unit.
  • the captured reflection image of the substrate 20 is converted into data and sent to the information processing unit 1.
  • the above data of the reflection image of the substrate 20 is based on the shape of the ink layer having a defective portion (hereinafter referred to as a defective pixel) in the ejection target region determining means of the information processing unit 1 and the position of the defective pixel on the substrate 20. To identify Used.
  • the information processing unit 1 determines the nozzles used for ejection, controls the ink ejected from the nozzles 31, determines the ejection order of the ink to the ejection target area, and the inkjet head 3. Then, a control signal for controlling the scanning direction relative to the substrate 20 is generated. Based on the above four control signals, the information processing section 1 transmits a control signal to another configuration of the ink ejection device 10 so that a desired pattern can be formed on the substrate. See Fig. 1 and [Ink Ejecting Device 10] for the internal processing of the information processing unit 1.
  • the ink discharge apparatus 10 may include a force having a single ink discharge unit 22 and a plurality of ink discharge units 22. At this time, one or more ink discharge units 22 may be connected to a plurality of head stages 23 which may be connected to one head stage 23. Further, if necessary, the ink discharge unit 22 and the pattern recognition unit 5 may be connected to a separate head stage 23.
  • the ink ejection device 10 may be configured not to include the pattern recognition unit 5.
  • the shape information and position information of the pattern formed on the substrate 20 are acquired using an external device before the substrate 20 is loaded, and the acquired shape information and position information are automatically or manually processed by the information processing unit 1. It may be configured to transmit to the discharge target area determination unit.
  • the ink ejection device 10 is a force substrate configured to perform ink ejection processing by moving both the substrate 20 and the ink ejection unit 22 using the two movable parts 7.
  • the configuration may be such that only one of the 20 and / or the displacement of the ink discharge unit 22 is moved.
  • a configuration in which the bridge 25 is connected to the substrate stage 24 through the movable portion 25 can be exemplified.
  • the substrate 20 may be carried into and out of the ink ejection apparatus 10 using, for example, an automatic conveyance apparatus (not shown) such as a robot.
  • an automatic conveyance apparatus such as a robot.
  • FIG. Fig. 3 illustrates the internal configuration of the ink discharge unit 21 FIG.
  • the ink discharge unit 22 includes an inkjet head 3, a head holding unit 37, a rotating unit 35, and a fixed unit 39.
  • the ink-jet head 3 should be arranged in the head holding part 37 for the types of ink colors used for coloring the pixels!
  • three colors of red (R), green (G), and blue (B) are used for coloring the pixels, so that the three ink-jet heads 3 are provided in the head holding unit 37. Has been placed.
  • the head holding part 37 holding the inkjet head 3 is connected to the fixed part 39 via the rotating part 35.
  • the rotating unit 35 is a structure for rotating the inkjet head 3.
  • a ⁇ stage is used as the rotating unit 35, but various conventionally known structures can be adopted as long as the structure is for rotating the inkjet head 3.
  • the ink jet head 3, the head holding unit 37, and the rotating unit 35 are fixed to the ink discharge unit 22 by a fixing unit 39.
  • each of the inkjet heads 3 is connected to the information processing unit 1 via the computer 21, and independent discharge control can be performed using the information processing unit 1.
  • a plurality of nozzles 31 are formed on the lower surface of the inkjet head 3 so as to be arranged in a straight line parallel to the Y axis. Further, each of the plurality of nozzles 31 is connected to the information processing unit 1. For this reason, it is possible to form a linear pattern by ejecting ink droplets once using a plurality of nozzles 31 and to independently control ink ejection from the plurality of nozzles 31.
  • independently controlling ink ejection from the plurality of nozzles 31 means independently controlling the timing of ink ejection performed by each of the plurality of nozzles 31. Furthermore, it is preferable that the information processing unit 1 independently controls the voltage for causing each of the plurality of nozzles 31 to eject ink.
  • the inkjet head 3 is connected to the rotating unit 35 via the head holding unit 37, the angle of the arrangement direction of the nozzles 31 with respect to the discharge target region on the substrate 20 can be arbitrarily set. Can be adjusted.
  • the rotation of the ink jet yacht head 3 using the rotation unit 35 will be described in detail in the following [Repair processing of defective pixels of the ink ejection device 10].
  • the ink jet head 3 is further provided with an ink supply port (not shown).
  • the ink supply port receives ink supplied from an ink supply unit (not shown) provided on the head stage 23.
  • the ink supply section is filled with R, G, and B inks.
  • the inkjet head 3 is formed so as to be aligned in a straight line parallel to the plurality of nozzle 31 force SY axes.
  • a force not specifically described may be provided with a plurality of linear arrays of a plurality of nozzles 31 on one inkjet head 3.
  • FIG. 4 is a flowchart showing an example of the procedure of the ink ejection apparatus 10.
  • the start instruction output unit 9 is instructed to start repairing defective pixels on the substrate 20 with respect to the ink ejection apparatus 10 (step S1).
  • the output of the repair start instruction using the start instruction output unit 9 is detected when a sensor formed on the substrate holding unit 24a detects that the substrate 20 has been carried into the substrate holding unit 24a by the robot. This is performed by transmitting a signal instructing the start to the pattern recognition unit 5 and the external input device 19.
  • the colored portions of all defective pixels are removed using a YAG laser or the like, and the entire colored portions of defective pixels are removed.
  • the position information of the defective pixel existing on the substrate 20 is acquired when the colored portion is removed using the laser, and is stored in the external input device 19.
  • the output of the start instruction may be a force or other method performed by sensing that the substrate 20 has been carried in using a sensor.
  • a method in which the pattern recognition unit 5 recognizes the loading of the substrate 20 can be cited.
  • the start instruction may be output manually.
  • An example of a method in which output is performed manually is a method in which an operator who desires to repair defective pixels of the substrate 20 inputs a start instruction to the computer 21.
  • the force that obtains the pattern shape information by imaging the defective pixel using the camera that is the pattern recognition unit 5 may be stored in the external input device 19. .
  • a method of acquiring the positional information and the shape information of the defective pixel on the substrate 20 in association with each other can be used.
  • the ink ejection device 10 does not have to include the pattern recognition unit 5.
  • a method for determining the ejection target area based on the shape information of the defective pixel, and the correspondence between the shape information of the ejection target area and the position information on the substrate 20 Will be described with reference to FIG. Fig. 5
  • (a) shows the image data generated based on the reflected image of the defective pixel imaged by the camera
  • (b) shows the ejection target area determined based on the image data of (a). Shows the state.
  • one defective pixel imaged by the camera from which the ink layer including the defective portion has been removed is surrounded by a light shielding portion 61 called a black matrix (BM).
  • the discharge target area determination unit 11 recognizes it as the colored part 62!
  • the light shielding unit 61 is usually a black material that does not transmit light in order to shield the TFT drive unit, improve the contrast between two adjacent pixels, and prevent ink leakage. It is formed from a liquid material.
  • the colored portion 62 is transparent and does not absorb light in the visible region and has lyophilicity to the ink in order to transmit white light such as knock light and to easily form ink. It is formed from the material which has (for example, glass etc.). For this reason, in the camera (pattern recognition unit 5) that captures a reflected image from the defective pixel of the irradiated light, the light shielding unit 61 has a low reflected light intensity, so the dark region and the colored portion 62 have a reflected light intensity. Because it is strong, it is recognized as a bright area. Data captured by the camera is transmitted to the ejection target area determination unit 11 in the computer 21.
  • the ejection target region determination unit 11 sets the threshold value between the reflected light intensity of the light shielding unit 61 and the reflected light intensity of the colored portion 62, thereby obtaining the data transmitted from the camera. Recognized as binarized image data. Then, the actual area of the colored portion 62 is obtained based on the pixel size of the colored portion 62 in the recognized image data and the magnification of the camera. Further, based on the determined area 62 to be colored, the desired film thickness of the ink layer, the ejection volume per ink drop, and the remaining film ratio of the ink layer, the desired shape and film thickness of the colored part 62 are obtained. Calculate the total number of ink ejections required to form a CF film (ink layer) with. The calculated total number of ink ejections is transmitted to the control unit 12.
  • the ejection target region 63 has a distance obtained by adding the maximum variation amount and the radius of the ink landing diameter as shown in FIG. Only W1 needs to be set inside the part 62 to be colored.
  • the maximum variation amount and the radius of the ink landing diameter are input to the initial ejection target area determination unit 11.
  • the radius of the ink landing diameter may be measured using a material such as glossy paper that absorbs in the thickness direction immediately after ink landing.
  • W1 is 30 m. Therefore, the ejection target region 62 is formed as a similar shape of the colored portion 62 30 inward from the boundary between the colored portion 62 and the light shielding portion 61.
  • the discharge target area 63 may be set inside.
  • the colored parts 62 the colored parts by the laser are located near the light shielding part 61.
  • the lyophilicity of a part of the colored portion 62 may be deteriorated due to the ink (coloring material) being not completely removed but remaining as a slight residue.
  • the ink may not wet and spread throughout the colored portion 62.
  • the colored portion 62 may not get wet enough to spread.
  • the ejection target area 63 may be determined so that a part of the light shielding part 61 formed by only the colored part 62 overlaps.
  • the discharge target region 63 may be determined from the outer periphery of the coloring portion 62 to the outside by W9. W9 at this time is 30 ⁇ m.
  • W9 at this time is 30 ⁇ m.
  • the film thickness of the ink formed on the colored portion 62 is slightly reduced, and the characteristics as CF are slightly deteriorated.
  • the ink can be reliably wetted and spread throughout the colored portion 62, white light leakage due to the formation of bright spots can be reliably prevented.
  • CF with white light leakage cannot be used as a product, but there is no problem as a product as long as the ink film thickness is slightly reduced. Therefore, it is preferable to set the ejection target region 63 larger than the coloring portion 62 from the viewpoint of surely repairing the CF. Further, if the amount of ink that rides on the light shielding portion 61 is obtained by experiments, it is possible to reliably prevent the formation of bright spots and at the same time form an ink layer having a desired film thickness on the colored portion 62. it can.
  • the above-described processing is performed on data obtained by imaging all defective pixels.
  • the shape information of the plurality of ejection target regions 63 is obtained by collating position information on the substrate 20 where the camera has captured the defective pixels with position information of the defective pixels on the substrate 20 acquired from the external output device 19. Each of these is associated with a position on the substrate 20.
  • the discharge target area determination unit 11 transmits the shape of the discharge target area 63 associated with the position on the substrate 20 to the discharge order determination unit 15, the angle adjustment unit 14, and the control unit 12.
  • the ejection order determining unit 15 ejects ink to the plurality of ejection target regions 63 based on the shape of the ejection target region 63 with which the position on the substrate 20 is associated. Is determined (step S4).
  • the discharge order determining unit 15 is configured to discharge the target area 63 The order is determined so that the time required to eject ink is minimized for all of the above.
  • the following methods can be cited. For example, (1) a method for determining the order so that the scanning distance in the ink ejection process for the substrate 20 is the shortest, (2) a method for determining the order so that the number of times the scanning direction is reversed is minimized, and (3) For example, the shape and position of the target ejection target region 63 and the method of selecting the ejection target region 63 with the shortest scanning distance as the region where ejection is performed next can be cited. As a result, the takt time of the defective pixel repair process using the ink ejection apparatus 10 can be shortened.
  • the scanning direction determination unit 16 determines the relative scanning direction between the substrate 20 and the nozzle 31 when ink is ejected to each of the plurality of ejection target regions 63. Determine (step S5).
  • the scanning direction determination unit 16 determines the movable direction of the movable unit 7 included in the substrate stage 24 and the movable unit 7 included in the head stage so that the ink can be discharged in the discharge order.
  • the relative scanning directions of the substrate 20 and the inkjet head 3 when ink is ejected to each of the plurality of ejection target regions 63 are determined.
  • the scanning direction determination unit 16 controls the driving of the movable unit 7 during the ink ejection process based on the determined movable direction. Further, each of the relative scanning directions when the ejection is performed on each of the plurality of ejection target regions 63 is transmitted to the correction signal supply unit 17.
  • the correction signal supply unit 17 has the following two scanning directions:
  • step S6 the correction signal supply unit 17 performs (1) with respect to a certain discharge target region 63.
  • the shape correction of the ejection target region 63 is not performed. Then, a signal not to perform shape correction is transmitted to the control unit 12 and the angle adjustment unit 14.
  • step S6 when the correction signal supply unit 17 determines that the direction of (1) and the direction of (2) are different (YES) with respect to a certain ejection target region 63, the direction of (1) Then, a signal for rotating the shape of a certain ejection target region 63 is transmitted to the control unit 12 and the angle adjusting unit 14 by the difference in angle between the directions (2) (step S61).
  • a method in which the correction signal supply unit 17 determines whether or not to correct the shape of the ejection target region 63 and a method of correcting the shape of the ejection target region 63 will be described below with reference to FIG. To do.
  • the inkjet head 3 when the substrate holder 24a on which the substrate 20 is arranged moves in the D2 direction, in order to repair the colored portion 62a of the defective pixel, the inkjet head 3 Among them, it is necessary to start discharging from all the nozzles 31 passing through the discharge target region 63 of the coloring portion 62a. In other words, when the scanning direction changes, the timing of ejection from the plurality of nozzles 31 must be changed depending on the shape of the ejection target region 63.
  • each of the pixel shape patterns recognized by the pattern recognition unit 5 when the substrate 20 is scanned in the D1 direction (for example, shaper, ii, and u) is stored in the correction signal supply unit 17 in advance.
  • the relative scanning direction (here, the scanning direction of the substrate 20) determined by the scanning direction determination unit 16 is D2 when the inkjet head 3 passes over the colored portions 62a and 62b, and the inkjet head 3 On the colored parts 62c and 62d Suppose that it is Dl when passing.
  • the shape information of each of the ejection target regions 63 of the plurality of defective pixels is acquired (Step 1).
  • the discharge target region 63 of the colored portion 62a is compared with each of the stored plural shape patterns.
  • the shape of the discharge target region 63 of the colored portion 62a is associated with a shape pattern (shape) having a shape similar to the shape of the discharge target region 63 (step 2).
  • the scanning direction (D2) relative to the shape of the ejection target region 63 of the colored portion 62a associated with the shaper is further associated (step 3).
  • the correction signal supply unit 17 recognizes that the discharge target region 63 of the colored portion 62a has a shape and is a region where discharge is performed while scanning in the D2 direction (step 4).
  • the generated correction signal is supplied to the control unit 12 and the angle adjusting unit 14 and used for shape correction of the ejection target region 63.
  • the control unit 12 performs the ejection target region in accordance with the actual ink ejection processing. 63 shapes can be acquired. That is, the shape of the ejection target region in the relative scanning direction between the inkjet head and the substrate can be kept constant throughout the entire ink ejection process using the ink ejection device 10.
  • the angle adjustment unit 14 sets the angle between the nozzle arrangement direction and the width direction of the ejection target region 63 by comparing the width in the nozzle arrangement direction with the width of the ejection target region 63. To do.
  • the rotating unit 35 adjusts the angle of the nozzle array based on the set angle (step S7).
  • FIG. 7 (a) shows a state in which the nozzle arrangement direction and the long side direction of the colored portion 62 of the defective pixel are substantially parallel, and (b) shows the colored direction of the defective pixel and the colored portion of the defective pixel.
  • the arrow in the figure indicates the direction in which the colored portion 62 of the defective pixel on the substrate 20 moves.
  • the width W4 of the nozzle array is longer than the width W2 of the ejection target region 63.
  • the angle adjustment unit 14 sets the angle ⁇ for adjusting the nozzle arrangement direction so that the two nozzles 31 at both ends of the inkjet head 3b are located inside the width W2, and the set angle ⁇ Is transmitted to the control unit 12 and the rotation unit 35.
  • the number of nozzles 31 that can eject ink to the ejection target area 63 is the number of nozzles 31. It depends on the pitch. For example, if the size of the ejection target area 63 is 399 m (W2) wide, 133 m long, and the pitch force 69 111 ( ⁇ 3) of Nozzle 31 is a nozzle that can eject ink to the ejection target area 63 The maximum number of 31 is three.
  • the total number of ink ejections required to repair the colored portion 62 for which the ejection target area 63 having the above size is determined is 300.
  • the number of nozzles 31 that can eject the ink to the ejection target area 63 is three, it is necessary to eject 100 drops of ink from one nozzle 31.
  • each of the plurality of nozzles 31 can be set to minimize the number of ejected inks, so that the scanning speed is the fastest. It is. However, since the range where the ink can be applied is narrow, it is necessary to reciprocate over the ejection target region 63 many times in order to repair one colored portion 62. In this case, the restoration process of the portion to be colored 62 takes extra time. In addition, if ⁇ is set too large, the nozzles 31 at both ends of the ink jet head 3 are arranged on the inner side larger than W2, so that the ink is sufficiently wetted and spread in the colored portion 62 by only one scan. Absent. These reasons Therefore, the angle adjusting unit 14 sets the angle ⁇ so that the ink discharge to the discharge target region 63 is completed in one scan and the scanning speed becomes higher.
  • the minimum angle ⁇ at which ink ejection can be completed in the ejection target area 63 by one scan is ⁇
  • the landing interval between two inks ejected consecutively from 31 can be expressed as s / f.
  • the maximum number of inks that can be discharged from one nozzle 31 is there.
  • the number of inks required for restoration (the number obtained by dividing the deposition of the colored portion 62 by the deposition of one drop of ink) divided by the maximum number of inks that can be ejected from one nozzle 31 (rounded up to the nearest decimal place) ) Force This is the minimum number of nozzles 31 required to repair the discharge target area 63 in one scan.
  • the control unit 12 controls the allocation of the number of nozzles 31 used for ejection to one ejection target region 63, the number of ejections of ink ejected from each of the allocated nozzles 31 and the landing position. (Step S8).
  • FIG. 8 is a flowchart for explaining an example of the control process performed by the control unit 12.
  • the shape information of the ejection target region 63 is acquired (step S81).
  • the acquired shape information is information supplied from steps S3 and S7 (shape information of the discharge target region 63 and a correction angle of the discharge target region 63). Based on the shape information of the ejection target region 63, the shape and direction of the ejection target region 63 that actually ejects ink are recognized.
  • step S82 Based on the adjustment angle setting of the nozzle array from step S7, the width of the entire nozzle array after the angle adjustment with respect to the width direction of the discharge target area 63 and the interval of the nozzles 31 with respect to the width direction of the discharge target area 63 are determined. Confirm (step S82).
  • the width of the ejection target area 63 acquired in step S81 is compared with the width of the entire nozzle array acquired in step S82, and ink is applied based on the interval of the nozzles 31 acquired in step S82.
  • the nozzle 31 to be discharged is determined (step S83). For example, when the width of the entire nozzle array acquired in step S82 is large compared to the width of the ejection target region 63 acquired in step S81, the position of the nozzle 31 is specified using the interval of the nozzles 31. Therefore, the nozzle 31 that passes inside the width of the ejection target area 63 acquired in step S81 is determined as the nozzle 31 used for ejection. On the other hand, when the width of the entire nozzle array acquired in step S82 is slightly smaller than the width of the discharge target region 63 acquired in step S81, all of the nozzles 31 are used for discharge.
  • the method for determining the nozzle 31 that performs ejection is based on the maximum length of the ejection target area 63 in the direction orthogonal to the substrate scanning direction, the pitch of the nozzles 31, and the angle ⁇ in the nozzle arrangement direction. In other words, the maximum number of nozzles that pass through can be calculated.
  • the discharge target area 63 is equally divided in the vertical direction by the number of nozzles 31 determined in step S83 (step S84).
  • the number of ejections of ink ejected from each of the nozzles 31 is determined in accordance with the vertical distance of the assigned divided regions (step S86).
  • FIG. 9 is a plan view for explaining a state in which the ejection target area 63 is divided into divided areas having the same width as the number of nozzles used for ejection.
  • the discharge target area 63 corrected (rotated) in the direction in which discharge is actually performed is the number of nozzles 31 used for discharge. It is divided in the direction.
  • the discharge target region 63 is composed of two types of regions 63a and 63b having two types of lengths (W7 and W8).
  • the region 63a is also configured with five divided regions 63a 'forces
  • the region 63b is also configured with 16 divided regions 63b' forces.
  • the number of nozzles 31 used for ejection is determined as 2 1 in step S84.
  • the number of nozzles 31 is the number determined in step S83, and is the number of nozzles 31 that pass inside the width (W5 + W6) of the ejection target region 63.
  • step S85 a total of 21 divided regions 63a 'and 63b' are respectively provided. Is assigned one nozzle 31 passing over it.
  • the number of ink droplets ejected from each of the 21 nozzles 31 is determined so that the ratio between W8) and the number of ejected ink droplets is constant.
  • ⁇ 5 100 111
  • W6 320 ⁇ 111
  • ⁇ 7 112
  • W8 140 m.
  • the total number of ink droplets that need to be ejected to the ejection target area 63 (total number of ink ejections) is 100.
  • Region 63a has a length W7 and a width W5
  • 20 drops of ink force are applied to the area 63a, and 80 drops of ink must be ejected to the area 63b.
  • five nozzles 31 are assigned to the region 63a, and sixteen nozzles 31 are assigned to the region 63b. Therefore, the control unit 12 generates a control signal so that the nozzle 31 passing through the region 63a ′ discharges four drops of ink and the nozzle 31 passing through the region 63b ′ discharges five drops of ink.
  • step S86 based on the number of ink discharges of each nozzle 31 determined in step S86 (the number of ink discharges for each of the divided regions 63a 'and 63b'), each of the divided regions 63a 'and 63b' The ink landing position with respect to is determined (step S87).
  • FIG. 10 shows the ink landing position with respect to the divided region 63a ′ of FIG.
  • step S86 the number of ink droplets ejected from the nozzle 31 assigned to the divided region 63a ′ for repairing the colored portion 62 of this defective pixel is four. Therefore, in the present embodiment, four landing positions 102 are selected from thirteen landing positions 101 so that ink can be uniformly applied to the divided region 63a ′.
  • p represents the minimum landing interval of ink ejected from the nozzles 31.
  • the number of possible landing positions 101 of the divided area 63a ' is calculated from the length p, the length W7 of the divided area 63a', and the radius of the ink landing diameter.
  • the minimum landing interval p of the nozzles 31 in the ink ejection apparatus 10 of the present embodiment depends on the frequency of the ink ejection signal and the moving speed of the substrate holding table 24a of the substrate stage 24.
  • the minimum landing interval p is expressed by the following formula:
  • Ink discharge device 10 has frequency f of the ink discharge signal set to 33.3 kHz and drive speed s of substrate holder 24a set to 300 mm / s, so the minimum landing interval p is 9 m.
  • W7 is 112 m, the force S is set to set the maximum 13 possible landing positions 101 on the divided area 63a ′.
  • FIG. 10 the ink droplet is depicted as landing in the divided region 63a ′.
  • FIG. 10 schematically shows the landing possible position 101, the landing position 102, and the divided region 63a ′.
  • FIG. 10 Actually, if the landing possible position 101 is set so that the center of the landing mark of the ink having a substantially circular shape falls within the divided area 63a ′, a part of the ink droplet crosses the boundary line of the divided area 63a ′. You may land. Further, landing marks of a plurality of inks may overlap each other.
  • the ejection target region 63 is set inside the colored portion 62 by a distance W1 in consideration of the maximum variation amount of the ink landing position and the landing radius of the ink droplet. (See Figure 5 (b)). Therefore, the ink droplet can be reliably landed in the colored portion 62 without landing on the light shielding portion 61.
  • the landing position 102 may be adjusted between the adjacent divided regions 63a ′ so that ink can be uniformly applied to the entire region 63a.
  • the landing position 102 may be adjusted between the regions 63a and 63b so that the ink can be uniformly applied to the entire ejection target region 63.
  • the ejection target region 63 has a particularly complicated shape, or the landing material has a landing frequency so that the landing frequency becomes high in a portion where the ink is difficult to spread due to the formed material.
  • Position 102 may be adjusted.
  • step S8 Based on the above determination in step S8 (steps S8;! To 87), the control unit 12 generates a control signal to be supplied to the nozzle driving unit 13 (step S9).
  • the nozzle reaches the discharge target region 63. It is necessary to consider what to do.
  • the time lag when the ink ejected from the two adjacent nozzles 31 reaches the ejection target region 63 is different from the shape of the ejection target region 63, the pitch of the nozzles 31, the nozzle array adjustment angle ⁇ , and the substrate holder 24a.
  • Operation speed s force Calculated force S Output of the ink ejection signal from the nozzle drive unit 13 for driving the adjacent nozzle 31 by adjusting the output of the control signal generated in the control unit 12 according to the calculated time (timing deviation) Adjust the timing (advance or defer).
  • the ink ejection start may not be synchronized.
  • the inkjet head 3 in which the channel for supplying ink to the nozzle 31 is separated by the wall of one piezoelectric element, ink cannot be ejected simultaneously from the three nozzles 31 aligned (4 The two nozzles 31 located at both ends of the nozzles 31 arranged side by side can eject ink simultaneously).
  • the frequency f of the ink ejection signal for ejecting ink from the two adjacent nozzles 31 is 100 kHz
  • the angle ⁇ of the nozzle arrangement is 0 degree
  • the driving speed s of the substrate holder 24a is 300 mm / s. To do.
  • the adjacent nozzles 31 cannot be driven simultaneously, the landing positions of the ink ejected from the adjacent nozzles 31 are shifted by 3 m in the movable direction of the substrate holding base 24a. Due to this deviation, the landing possible position 101 for the divided area 63a ′ or 63b ′ may be reduced.
  • ink cannot be ejected at the same time unless the nozzles 31 are three apart from each other. Therefore, even if the frequency f of the ink ejection signal is set to 100 kHz, each nozzle 31 has f / 3. Ink is ejected at a frequency of.
  • control unit 12 controls the ink ejection signal generation of the nozzle driving unit 13 for each of the nozzles 31. This process is performed for all of the nozzles 31 that discharge ink to one discharge target region 63.
  • the nozzle drive unit 13 Based on the control signal supplied from the control unit 12, the nozzle drive unit 13 generates an ink ejection signal. Based on the generated ink ejection signal, each of the nozzles 31 is driven to form a pattern on the substrate 20 (step S10).
  • FIG. 11 shows an example of the ink ejection signal generated by the nozzle drive unit 13 based on the control signal of the landing position 102 of FIG. 10 determined by the control unit 12, and (b) shows the signal of (a). It is a graph which shows the signal waveform for producing
  • a signal for instructing ejection is 1 and a signal for not performing ejection is 0.
  • the nozzle drive unit 13 generates a digital signal as shown in FIG. 11 (a) based on the control signal from the control unit 12 so that it can land at the landing position 102 of FIG.
  • the arrow indicates the direction in which the nozzle 31 passes relatively over the divided region 63a ′.
  • the signal waveform when the digital signal in Fig. 11 (a) is output can be expressed as a waveform as shown in (b).
  • the horizontal axis indicates time (t) and the vertical axis indicates voltage magnitude (V).
  • the output of the ink ejection signal output for driving each of the nozzles 31 from the nozzle driving unit 13 is controlled by the control signal from the control unit 12.
  • the control signal from the control unit 12 By sending an ink ejection signal to the inkjet head 3 and sending a drive signal from the scanning direction determination unit 16 to the movable unit 7, the ejection of ink from the nozzle 31 and the drive of the movable unit 7 are linked.
  • the force S for forming a pattern having a desired shape at a desired position can be obtained.
  • Steps S6 to S6 are performed for each of all the discharge target regions 63 existing on the substrate 20. It is confirmed whether or not processing up to S10 has been performed (step SI 1).
  • step S6 If the pattern formation is completed for each of all the ejection target regions 63, the ink ejection device 10 ends the process. If there is an ejection target area 63 that has not been repaired, the process is repeated from step S6.
  • control process by the control unit 12 is performed when ink is ejected to each of the ejection target regions 63.
  • the nozzles 31 are assigned according to the pixel shape, and the number of ink ejections and the landing position are controlled. Therefore, it is possible to repair a defective pixel having a complicated shape in a short time with the film thickness accurately controlled.
  • Fig. 12 shows the shape of one pixel surrounded by the light shielding part 61, and (b) shows a CF panel in which a plurality of pixels having different shapes are arranged on the same substrate 20. (C) shows a CF panel made up of multiple pixels of different sizes! /.
  • the colored portion 62 of the pixel surrounded by the light-shielding portion 61 with the corners removed is a shape that is expected to be developed in the future.
  • the CF panel that combines pixels with the shape of (a) reversed left and right, and pixels with multiple shapes that are flipped upside down (multiple pixels with the same shape). is assumed.
  • the shape of the light-shielding part 61 formed so as to increase in width near the center of the four pixels is the same as that of the TFT drive part. Since the rate can be increased, it is effective as a CF panel configuration.
  • the panel size diversifies, it can be considered that pixels with different areas are formed as shown in (c).
  • each pixel is formed of a polygonal shape having five or more corners and sides
  • a plurality of pixels having different shapes are formed on one panel.
  • the pixel having a desired shape and film thickness can be obtained by using the ink ejection device 10 of the present embodiment. Can be formed accurately and in a short time. Therefore, a CF panel in which clear pixels are formed can be easily manufactured.
  • the force described using the ink discharge apparatus 10 for repairing defective pixels on the CF panel as an example is not limited to this.
  • the present invention can be applied to, for example, repairing a defective portion of a laminated film existing on a TFT panel.
  • the present invention can be applied, for example, to the manufacture of an electoluminescence (EL) display device having a plurality of discharge portions arranged in a matrix or stripe form.
  • the present invention can be applied to, for example, manufacturing a back substrate of a plasma display device.
  • the present invention can be applied, for example, to the manufacture of an image display device provided with an electron-emitting device.
  • the present invention can be applied, for example, to the formation of wirings and insulating films for semiconductor circuit elements or electronic circuit boards.
  • the discharge target region is determined based on the shape of the pattern recognized by the pattern recognition unit 5, and the pixel including the defective portion is removed by the laser.
  • 62 describes the ink ejection device 10 that ejects ink.
  • the ink ejection device 10 can execute a sequence in which an appropriate amount of CF ink for correction is applied to an appropriate location in accordance with the shape of the defective pixel of the CF. In the following, a method for repairing an irregular defect portion without removing it with a laser will be described.
  • a rectangular or polygonal colored portion 62 may be formed by laser trimming, and ink may be ejected to the colored portion 62.
  • ink may be ejected to the colored portion 62.
  • insulating film defects, transparent electrode defects, wiring defects, alignment film defects Alternatively, defects having various shapes (indeterminate shapes other than polygons) such as resist defect portions in the photolithography process are generated. These defects are part of the laminated film, and it is difficult to remove a region including the defective portion into a desired shape by laser irradiation. Further, in many cases, a difference in wettability or a bank (step) is not formed at the boundary between the film defect portion and the normal film formation portion.
  • the ink ejection apparatus 10 of the present invention can appropriately repair an irregular film defect portion in a TFT panel or the like according to the example of the processing flow shown in FIG. it can. Details of the process of repairing the irregular defect by the ink ejection apparatus 10 of the present invention will be described below with reference to FIGS.
  • the processing in step 3 may be changed in the processing described in the section “Repair processing of defective pixel of ink ejection apparatus 10”. Specifically, the processing of the image of the defective portion captured by the pattern recognition unit 5 by the ejection target region determination unit 11 in step 3 is different.
  • the pattern recognition unit 5 provided in the ink ejection apparatus 10 images the film defect portion on the TFT panel.
  • the film defect part is preferably imaged in a state where the pattern recognition unit 5 and the TFT panel having the film defect part to be imaged are stationary. This is because the position information and shape (dimension) information of the film defect portion are obtained more accurately. Even when acquiring information such as the position, shape, and area of the colored portion 62 of the CF pixel after laser removal, the colored portion 62 is imaged while the pattern recognition unit 5 and the imaging target are stationary. It is preferable. By obtaining accurate information, the ink ejection position and ejection amount can be determined more accurately, so that defects can be repaired more accurately.
  • the pattern recognition unit 5 scans the entire surface of the TFT panel and images the film defect portion.
  • information on the film defect portion may be acquired in advance using another defect inspection apparatus.
  • information such as a repair region including a defect portion of a CF pixel can be acquired by a pattern recognition unit 5 that is a relatively simple optical system, such as a film defect portion having a thickness S of submicron.
  • the pattern recognition unit 5 is equipped with a differential interference optical system and the like.
  • Fig. 14 (a) is a cross-sectional view of a normal source / gate cross section in a TFT of a TFT panel, and Fig.
  • (b) is a cross-sectional view showing an example of a panel to which foreign matter has adhered during TFT formation.
  • (C) is a cross-sectional view showing a state when foreign matter is removed from the panel of (b), and
  • (d) is a cross-sectional view showing a state in which a source film is formed on (c). It is.
  • the TFT includes a gate film 71 formed on a glass substrate 70, a gate insulating film 72 formed on the substrate 70 and the gate film 71, and a gate insulating film 72. It is composed of a source film 73 formed thereon.
  • the film constituting the TFT is not formed on a flat surface except for the gate film 71.
  • TFTs are formed by laminating films with different properties. For this reason, when a defect occurs, laser processing may be difficult due to the nature of the film (substrate) exposed as the defect. In addition, it is difficult to form a uniform film on the defective part by repair because the defective part is not formed on a flat surface or the nature of the film (substrate) exposed as the defective part may be different. There is a case.
  • the gate insulating film 72 is not properly formed in a part of 70.
  • the gate film 71 and a part of the glass substrate 70 are exposed as a defective portion 75 (pattern). If the source film 73 is formed while leaving the defect 75 left unattended, the gate film 71 and the source film 73 are short-circuited as shown in FIG. If it is assembled as a liquid crystal display in this state, all the pixels connected in a straight line will not be driven!
  • a defective portion 75 that needs to be repaired may be formed.
  • a TFT panel has a partial force S that is exposed as a defective part, is not flat, or may be made of a material having different properties. Requires processing.
  • Fig. 14 (c) is a pattern recognition unit 5 of the ink ejection apparatus 10.
  • the defect portion 75 of the insulating film when the image is picked up with a force lens having a differential interference optical system is not shown! /, Acquired as a color image
  • the power to do S can be changed by adjusting the optical system.
  • the insulating film It is possible to change the color of the defective part 75 to blue or orange and display it in an embossed manner on the image.
  • the defect 75 of the insulating film imaged by the pattern recognition unit 5 is irregular (indefinite) in size and shape.
  • the defective portion 75 of the insulating film is a portion where various base films such as the gate film 71 or the glass substrate 70 are exposed, the wettability with respect to the ink made of the insulating material for correction is different. Furthermore, there is no difference in wettability (liquid-repellent contrast) at the boundary between the defective part and the normal part, and at the same time, an ink dam appears around the defective part 75 (ink ink There is no bank (step) to stop the outflow. In order to properly repair such a defective portion 75 of the film, it is necessary to modify the surface of the defective portion 75 (ink coating surface) and to appropriately control the ejection of ink to the defective portion 75 of the film.
  • the ink ejection device 10 may include an ink adhesion surface modification unit such as an atmospheric pressure plasma source or an ultraviolet cleaning light source.
  • an ink adhesion surface modification unit such as an atmospheric pressure plasma source or an ultraviolet cleaning light source.
  • the ink spreads from 48 111 to (1) 70 111. Therefore, the repair of the defective portion 75 by ink ejection (repair ink application process) can be realized with good reproducibility. At the same time, since the ejected ink is prevented from being repelled, it is possible to prevent the occurrence of pinholes. As described above, by modifying the surface of the defect portion 75, the defect portion 75 of the film can be surely repaired.
  • the ink ejection apparatus 10 of the present invention can be realized by the ink ejection apparatus 10 of the present invention.
  • the pattern recognition unit 5 images the film defect 75. To recognize the shape.
  • the discharge target region determination unit 11 virtually generates a discharge target region (polygon) 63 including the defect portion 75 by image processing.
  • the discharge target area determination unit 1 1 Since all of one defective portion is contained in the captured image, the ejection target region 63 is determined as a polygon having the maximum area in the captured image (for example, a rectangle closest to the size of the image). Just eject the ejected ink onto the TFT panel to fill the virtually generated ejection target area 63! /. Except for the process of determining the ejection target region 63, the section [Repair process of defective pixels of the ink ejection apparatus 10] may be referred to. As described above, by applying a predetermined amount of the ink made of the insulating material for repair to a large area including the defect portion 75 of the film, the irregular defect film 75 can be suitably repaired.
  • the repairing ink is applied to an area larger than the defective portion 75 of the film, the defective portion 75 of the film can be reliably repaired.
  • the ink for repairing is ejected to an area larger than necessary compared to the defective part 75, the ink is naturally applied to a part (normal part or normal surface) where it is not necessary to apply the ink for repairing. That is, the layer thickness of the normal surface around the defective portion 75 of the film in the TFT panel is slightly increased. As a result, the thickness of the liquid crystal layer in the normal part is changed, so that the liquid crystal display characteristics in the normal part are deteriorated. For this reason, it is preferable to apply a repairing ink to the defective portion 75 of the film and the normal portion having the smallest possible area.
  • FIG. 16 is a plan view showing an image in which the minimum ejection target region 63 is set for the defect 75 in FIG. 14 (c).
  • FIG. 17 (a) is a plan view showing the process of setting the ejection target region 63 based on the shape of the defective portion 75, and (b) is a plan view showing the process performed after (a). It is.
  • the ejection target region determination unit 11 determines the ejection target region 63 from the image of the film defect portion 75 acquired by the pattern recognition unit 5.
  • the discharge target area 63 in FIG. 16 is set as a polygon having the smallest area that includes the notch 75 and connects the ink landing possible positions (ink discharge candidate positions).
  • the ink landing possible position can be obtained from the moving speed of the substrate holder 24a, the frequency of the ejection signal, and the relationship force between the scanning direction of the inkjet head 3 and the angle ⁇ .
  • the film thickness after film formation is relatively thin (for example, 0.3 to 1 ⁇ m). To a certain extent). For this reason, it is necessary to avoid the overlapping of the landing inks that would not cause problems in CF restoration. This is because, in CF repair, a large amount of ink is put in an area surrounded by a bank (BM or laser removed! /, Na! /, Colored part) having a difference in wettability (lyophilic and liquid repellent contrast). This is because even if the ink overlaps slightly, the film thickness after film formation is not greatly affected!
  • the ejection target region determination unit 11 binarizes the image of the defective portion 75 and the normal portion acquired by the pattern recognition unit 5, and then (1) the defective portion 75 center of gravity 7 8 determination, (2) Arrangement of multiple rays 79 extending from the center of gravity 78 (partitioning of binarized image), (3) Determination of representative point 80 in the section, (4) Deemed defect shape 81 And (5) enlarge the defect shape 81.
  • the center of gravity 78 is determined from a binarized shape of the defect portion 75 by a known calculation process using a computer or the like.
  • the number of radiation 79 to be arranged may be arbitrarily increased or decreased.
  • binarized defect portion 75 using 36 radiations 79 is sectioned into a substantially fan shape. If the number of radiations 79 is increased, the assumed defect shape 81 can be brought closer to the shape of the defect part 75. Naturally, when the number of substantially fan-shaped sections increases, the calculation process takes time. Therefore, the number of radiations 79 may be adjusted as appropriate in accordance with the accuracy required for repairing the defective portion 75.
  • the representative point 80 is selected as the point farthest from the center of gravity 78 out of the substantially sector-shaped section of the defect 75.
  • the deemed defect shape 81 is determined as a region surrounded by connecting all the representative points 80 in two adjacent sections.
  • the assumed defect shape 81 is enlarged by moving the representative point 80 along the straight line connecting the representative point 80 and the center of gravity 78 by 1 C ⁇ m. As a result, the enlarged region 77 is determined.
  • the defect 75 can be surely included in the ejection target region 63. That is, a part of the normal part near the defective part 75 is also included in the ejection target region 63.
  • the discharge target area 63 is expanded. Large area 77 may be used to repair irregular defects 75.
  • the enlarged region 77 is determined as a polygon surrounded by a straight line connecting the plurality of ink landing possible positions 82.
  • the enlarged region 77 can be determined as a simple shape. That is, the information capacity S of the data representing the enlarged region 77 is reduced. Therefore, the ink ejection apparatus 10 can be operated efficiently (defects repaired) by improving the speed of the arithmetic processing.
  • the ink landing possible position 82 is determined from the nozzle pitch in the sub-scanning direction and the ink landing pitch in the main scanning direction.
  • the nozzle pitch is determined from the rotation angle of the inkjet head, the scanning direction, and the nozzle arrangement position.
  • the landing pitch is determined from the moving speed of the substrate holder 24a (scanning speed of the inkjet head) and the frequency of the ejection signal.
  • the ink ejection device 10 normally ejects ink so that the ink is landed at the center of the landable position 82.
  • the landing possible position 82 is a virtual position determined by the operating conditions of the ink ejection apparatus 10 as described above. Further, the landing possible position 82 has a two-dimensional matrix-like distribution arranged in the X direction (left and right of the paper surface) and (up and down the paper surface) Y direction on the plane of the image. Further, for example, coordinates on the board support 24a are assigned to the centers of the landing positions 82.
  • the ejection target area determination unit 11 superimposes the data representing the distribution of the landing possible positions 82 and the data representing the enlarged areas 77 to specify the coordinates representing the landing possible positions 82 inside the enlarged area 77. Thereby, the coordinates representing the landing possible position 82 outside the enlarged region 77 are also specified. Then, the discharge target area determining unit 11 sets the discharge target area 63 as a polygon connecting each of the two adjacent landing possible positions 82 out of the plurality of possible landing positions 82 outside the enlarged area 77. decide. Further, in order to minimize the area of the ejection target region 63, the landing possible position 82 closest to the enlarged region 77 that does not contact the enlarged region 77 is selected as a point constituting the polygon.
  • an example of a method for minimizing the polygon as the ejection target region 63 will be described below.
  • an arbitrary polygon for example, a rectangle
  • the temporary ejection target area is reduced.
  • the landing possible position 82 set as the outer periphery of the temporary discharge target area is adjacent to the direction of the center of gravity 78. Change to possible landing position 82.
  • the setting is further changed to the landing possible position 82 adjacent in the direction of the center of gravity 78.
  • the landing possible position 82 before the change is determined as the landing possible position 82 constituting the true ejection target area 63.
  • the discharge target area determining means 11 includes the true discharge target area 63 by moving the outer periphery of the temporary discharge target area (a plurality of landing possible positions 82 set as) in the direction of the center of gravity 78 of the defective portion 75. Reduces possible landing position 82. At this time, the ejection target area 63 is minimized by deforming the temporary ejection target area.
  • the landing possible position 82 filled in black represents the expected ejection position selected as the ink ejection position. As shown in FIG.
  • the ejection target area determination unit 11 determines the appropriate amount of ink to be ejected into the ejection target area 63 and the planned ejection position where some of the landed ink droplets overlap each other.
  • the inkjet head 3 that ejects 6 pl of ink is used and the contact angle of the defect 75 is small (for example, 10 °), one drop of ink is about 70 m Wet and spread in a circle of diameter.
  • the inkjet head 3 may be rotated so that the landing pitch is 70 m or less.
  • the angle at which the inkjet head 3 is rotated may be appropriately changed in accordance with the amount of ink discharged or the contact angle (degree of ink wetting and spreading) of the target to which ink is discharged.
  • the ink jet head 3 is adjusted according to the condition with the worst wettability with respect to ink. You may change the rotation angle.
  • the discharge target area 63 set in the defect portion 75 has a diameter of about 30 m. It is preferable that the substrate 20 and the nozzle 31 be stationary and a required amount of ink is ejected to one place. As a result, the film formed by discharging the ink can have a minimum area. Therefore, the amount of ink used can be reduced, and the double film formation in the normal part around the defective part 75 can be given the minimum.
  • a discharge target area 63 larger than the irregular defect portion 75 may be set.
  • the irregular defect portion 75 is a portion where the gate film is exposed without the resist being applied normally.
  • the contact angle of the resist ink to the gate film is about 10 to 20 °.
  • the contact angle of the resist ink with respect to the baked resist film is about 50 to 60 °.
  • a defect repairing device that discharges colored material with an inkjet head and repairs defective pixels scattered on a transparent filter substrate that is partitioned by a light-shielding part that does not transmit light and is formed with a colored material on a transparent substrate.
  • Shape recognition means for recognizing a dischargeable area composed of a polygonal shape capable of ink landing on defective pixels scattered on the medium;
  • Nozzle assigning means for allocating discharge nozzles according to the shape of the dischargeable area recognized by the shape recognition means
  • a discharge position calculating means for calculating a discharge landing position according to the shape of the dischargeable region for each assigned nozzle
  • An ink ejection apparatus comprising: ejection pattern generation means for generating an ejection pattern according to an ejection landing position and transmitting the result as an electrical signal to an ink ejection section.
  • the shape recognition means includes
  • An information transfer means for transferring an unnecessary film removal pattern for removing at least a part of the coloring material forming region of the defective pixel to the nozzle assigning means;
  • a repair order determining means for determining a repair order of the defective pixels based on position information of the unnecessary film removal pattern
  • a scanning direction determining means for determining a relative scanning direction between the substrate inkjet heads for repairing the defective pixels by the repair order determining means;
  • the unnecessary film removal pattern shape correcting means for recognizing the shape of the unnecessary film removal pattern by rotating
  • An ink ejection apparatus comprising:
  • the discharge position calculating means includes
  • An ink ejection apparatus according to a first configuration, wherein the ejection landing position from each nozzle assigned according to the shape of the unnecessary film removal pattern is adjusted for each nozzle.
  • a defect repairing device that discharges colored material with an inkjet head and repairs defective pixels scattered on a transparent filter substrate that is partitioned by a light-shielding part that does not transmit light and is formed with a colored material on a transparent substrate.
  • an ink ejection control method for ejecting ink droplets by generating an ejection pattern according to an ejection landing position and transmitting the result as an electrical signal to an ink ejection unit.
  • An unnecessary film removal pattern for removing at least a part of the coloring material forming region of the defective pixel is transferred to the nozzle assigning unit, and
  • the ink ejection control method according to the fourth configuration, wherein the unnecessary film removal pattern shape is corrected by rotating and recognizing the shape of the unnecessary film removal pattern based on information on the scanning direction for each defective pixel.
  • the above-mentioned discharge target area determining means on the substrate where the substrate surface in the area where the ink is attached is relatively lyophilic and the substrate surface in the area where the ink is not adhered is relatively lyophobic
  • a stationary imaging means images the pattern on the substrate within a single field of view, and a polygon that connects the ink discharge area to the outermost peripheral position of the ink discharge candidate position on the substrate is formed.
  • An ink ejection device that determines to eject ink to ink ejection candidate positions that fall within a desired pattern and exist within the polygon.
  • the substrate surface in the area where the ink is adhered and the substrate surface in the area where the ink is not adhered are relatively lyophobic! /
  • the discharge target area determining means on the substrate is connected to the pattern recognition means.
  • the pattern recognition means picks up the image of the pattern on the substrate within one field of view by the stationary imaging means, and connects the ink discharge area to the outermost peripheral position of the ink discharge candidate position on the substrate.
  • An ink ejecting apparatus that determines a polygon so that a polygon is larger than a desired pattern, an area of the polygon is minimized, and ink is ejected to ink ejection candidate positions existing in the polygon.
  • each block included in the ink ejection apparatus may be configured by hardware logic. Or, CPU (Central Processing)
  • the ink ejection apparatus includes a CPU that executes instructions of a control program that realizes each function, a ROM (Read Only Memory) that stores the control program, and a RAM that expands the control program into an executable format. (Random Access Memory) and a storage device (recording medium) such as a memory for storing the control program and various data.
  • the object of the present invention can also be achieved by using a predetermined recording medium.
  • the predetermined recording medium records the program code (execution format program, intermediate code program, source program) of the control program of the ink ejection device, which is software that realizes the above-described functions, in a readable manner using a computer. It only has to be.
  • the recording medium is supplied to the ink ejection device. This makes it possible to read out and execute the program code recorded on the supplied recording medium, such as an ink ejection device equipped with a computer or a CPU or MPU) 1S.
  • the recording medium for supplying the program code is not limited to a specific structure or type. That is, examples of the recording medium include a tape system such as a magnetic tape and a cassette tape, a magnetic disk such as a floppy (registered trademark) disk / hard disk, and an optical disk such as a CD-ROM / MO / MD / DVD / CD-R. Disk systems including IC cards (including memory cards) / optical cards, and semiconductor memory systems such as mask ROM / EPROM / EE PROM / flash ROM.
  • the object of the present invention can also be achieved by configuring the ink ejection device to be connectable to a communication network.
  • the program code is supplied to the ink ejection device via the communication network.
  • the communication network is not limited to a specific type or form as long as it can supply a program code to the ink ejection device. Examples of the communication network include the Internet, intranet, extranet, LAN, ISDN, VAN, CATV communication network, virtual private network, telephone line network, mobile communication network, satellite communication network, etc. be able to.
  • the transmission medium constituting the communication network is not limited to a specific configuration or type as long as it is an arbitrary medium capable of transmitting the program code.
  • Transmission media that make up a communication network include, for example, IEEE1394, USB (Universal Serial Bus), power line carrier, Cape Nore TV line, telephone line, ADSL (Asymmetric Digital Subscriber Line) line, etc. It is possible to cite wireless such as infrared, Bluetooth (registered trademark), 802.11 wireless, HDR, mobile phone network, satellite line, terrestrial digital network.
  • the present invention can also be realized as a form of a computer data signal embedded in a carrier wave, in which the program code is embodied by electronic transmission.
  • the ink discharge apparatus and the ink discharge method of the present invention determine the shape of the ink discharge target area, and have the inkjet head based on the shape of the discharge target area!
  • a nozzle that ejects ink is determined from a plurality of nozzles, and the number and landing positions of ink ejected from each of the nozzles that eject ink are controlled. If the ink can be applied to the discharge target area so as to have a desired thickness and shape, an effect can be obtained.
  • ink can be applied quickly and accurately to a plurality of regions existing on a medium having a fine and complicated shape. For this reason, the present invention can be applied to the repair of defective pixels existing on the CF panel. In addition, the present invention can be applied to repair a defective portion of a laminated film existing on a TFT panel. Further, the present invention can be applied to repairing a defective portion of a laminated film of a semiconductor circuit element or an electronic circuit board. In addition, since the present invention can be used to form a plurality of discharged portions arranged in a matrix or stripe form, the present invention can be applied to the manufacture of an electro-luminescence (EL) display device. In addition, the present invention provides a manufacturing method for a back substrate of a plasma display device. Can be applied to. Furthermore, the present invention can be applied to the manufacture of an image display device having an electron-emitting device.
  • EL electro-luminescence

Landscapes

  • Application Of Or Painting With Fluid Materials (AREA)
  • Optical Filters (AREA)

Abstract

L'invention concerne un dispositif d'éjection d'encre (10) conçu pour former un motif sur un substrat (20) par éjection d'encre à l'aide d'une tête à jet d'encre (3) et ayant des moyens (11) de décision de zone cible d'éjection, une section (13) de commande de buse et des moyens de commande (12). Les moyens (11) de décision de zone cible d'éjection décident de la forme d'une zone cible d'éjection d'encre sur la base d'un motif désiré devant être formé sur le substrat (20). La section de commande de buse (13) commande des buses (31) de la tête à jet d'encre (3). Les moyens de commande (12) décident, sur la base de la forme de la zone cible d'éjection, des buses (31) effectuant une éjection d'encre et fournissent un signal de commande à une section (13) de commande de buse, où le signal de commande commande le nombre de fois d'éjection de et la position d'arrivée de l'encre éjectée de chacune des buses (31) effectuant l'éjection d'encre. Le dispositif d'éjection d'encre et le procédé permettent une application d'encre rapide et précise sur des zones qui sont présentes sur un support et ayant des formes fines et complexes.
PCT/JP2007/072193 2006-11-20 2007-11-15 Dispositif d'éjection d'encre et procédé, programme et support d'enregistrement pouvant être lu par ordinateur WO2008062712A1 (fr)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2006-313586 2006-11-20
JP2006313586 2006-11-20
JP2007295494A JP4503063B2 (ja) 2006-11-20 2007-11-14 インク吐出装置、その方法、プログラムおよびコンピュータ読み取り可能な記録媒体
JP2007-295494 2007-11-14

Publications (1)

Publication Number Publication Date
WO2008062712A1 true WO2008062712A1 (fr) 2008-05-29

Family

ID=39429647

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2007/072193 WO2008062712A1 (fr) 2006-11-20 2007-11-15 Dispositif d'éjection d'encre et procédé, programme et support d'enregistrement pouvant être lu par ordinateur

Country Status (1)

Country Link
WO (1) WO2008062712A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2019155362A (ja) * 2019-04-12 2019-09-19 東芝テック株式会社 インクジェット装置、インクジェット印刷方法及び印刷処理プログラム

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004243267A (ja) * 2003-02-17 2004-09-02 Seiko Epson Corp 液滴吐出装置、電気光学装置の製造方法、電気光学装置、および電子機器
JP2005224659A (ja) * 2004-02-10 2005-08-25 Seiko Epson Corp 液滴吐出装置、液滴吐出方法、電気光学装置の製造方法および電子機器
JP2006030283A (ja) * 2004-07-12 2006-02-02 Sharp Corp カラーフィルタの修正方法及びその装置
JP2006150751A (ja) * 2004-11-29 2006-06-15 Sharp Corp ３次元形状構成物の製造方法、及びマイクロレンズ
JP2006178208A (ja) * 2004-12-22 2006-07-06 Sharp Corp 表示装置用基板及びその製造方法
JP2006187733A (ja) * 2005-01-06 2006-07-20 Sharp Corp インク吐出しデータ生成装置、コンピュータをインク吐出しデータ生成装置として機能させるためのインク吐出しデータ生成プログラムおよび記録媒体
WO2006134926A1 (fr) * 2005-06-14 2006-12-21 Sharp Kabushiki Kaisha Dispositif de décharge d’encre et procédé de contrôle de décharge d’encre
WO2007058131A1 (fr) * 2005-11-17 2007-05-24 Sharp Kabushiki Kaisha Dispositif a jet d’encre et procede a jet d’encre
WO2007132705A1 (fr) * 2006-05-12 2007-11-22 Sharp Kabushiki Kaisha Dispositif de distribution et de tirage de gouttes liquides

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004243267A (ja) * 2003-02-17 2004-09-02 Seiko Epson Corp 液滴吐出装置、電気光学装置の製造方法、電気光学装置、および電子機器
JP2005224659A (ja) * 2004-02-10 2005-08-25 Seiko Epson Corp 液滴吐出装置、液滴吐出方法、電気光学装置の製造方法および電子機器
JP2006030283A (ja) * 2004-07-12 2006-02-02 Sharp Corp カラーフィルタの修正方法及びその装置
JP2006150751A (ja) * 2004-11-29 2006-06-15 Sharp Corp ３次元形状構成物の製造方法、及びマイクロレンズ
JP2006178208A (ja) * 2004-12-22 2006-07-06 Sharp Corp 表示装置用基板及びその製造方法
JP2006187733A (ja) * 2005-01-06 2006-07-20 Sharp Corp インク吐出しデータ生成装置、コンピュータをインク吐出しデータ生成装置として機能させるためのインク吐出しデータ生成プログラムおよび記録媒体
WO2006134926A1 (fr) * 2005-06-14 2006-12-21 Sharp Kabushiki Kaisha Dispositif de décharge d’encre et procédé de contrôle de décharge d’encre
WO2007058131A1 (fr) * 2005-11-17 2007-05-24 Sharp Kabushiki Kaisha Dispositif a jet d’encre et procede a jet d’encre
WO2007132705A1 (fr) * 2006-05-12 2007-11-22 Sharp Kabushiki Kaisha Dispositif de distribution et de tirage de gouttes liquides

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2019155362A (ja) * 2019-04-12 2019-09-19 東芝テック株式会社 インクジェット装置、インクジェット印刷方法及び印刷処理プログラム

Similar Documents

Publication Publication Date Title
JP4503063B2 (ja) インク吐出装置、その方法、プログラムおよびコンピュータ読み取り可能な記録媒体
TWI761324B (zh) 用於以改良的均勻度和列印速度來製造薄膜的技術
US8128197B2 (en) Liquid droplet ejection apparatus, method for manufacturing electro-optic device, electro-optic device, and electronic equipment
US7204573B2 (en) Volume measuring method, volume measuring device and droplet discharging device comprising the same, and manufacturing method of electro-optic device, electro-optic device and electronic equipment
US7625064B2 (en) Liquid droplet ejection apparatus, method for manufacturing electro-optic device, electro-optic device, and electronic equipment
JP4018120B2 (ja) 液滴吐出描画装置
JP2004160449A (ja) デバイス製造装置及びデバイスの製造方法、電子機器
US20090122110A1 (en) Ink Discharging Apparatus and Ink Discharging Method
US7185966B2 (en) Detection apparatus and detecting method, droplet discharge apparatus and droplet discharge method, device and electronic equipment
JP2008100138A (ja) 液滴吐出装置、電気光学装置の製造方法、電気光学装置および電子機器
US7059705B2 (en) Workpiece processing and liquid droplet ejection inspection apparatus
JP2008225246A (ja) 液滴吐出装置、並びに電気光学装置の製造方法、電気光学装置および電子機器
JP4696862B2 (ja) 画像処理装置、画像処理方法および描画装置
US20100053263A1 (en) Droplet discharge drawing apparatus, droplet discharge drawing method, and droplet discharge drawing program
WO2008062712A1 (fr) Dispositif d'éjection d'encre et procédé, programme et support d'enregistrement pouvant être lu par ordinateur
JP2014104385A (ja) 基板製造方法及び基板製造装置
JP4541321B2 (ja) 液滴塗布装置、液滴塗布方法、プログラム及びコンピュータ読み取り可能な記録媒体
JP2006044059A (ja) 液滴吐出装置の液滴着弾位置補正方法および液滴吐出装置、並びに電気光学装置の製造方法、電気光学装置および電子機器
JP5240108B2 (ja) 液滴吐出装置
JP4302749B2 (ja) インク吐出装置およびその制御方法
WO2022172762A1 (fr) Dispositif d'évacuation de gouttelettes et procédé d'évacuation de gouttelettes
WO2023095521A1 (fr) Dispositif d'éjection de liquide, procédé d'évaluation d'état d'éjection, dispositif de traitement d'informations et procédé de production de carte imprimée
JP3928456B2 (ja) 液滴吐出装置とその液状材料充填方法、およびデバイス製造装置とデバイス製造方法並びにデバイス
WO2008056515A1 (fr) Dispositif, procédé et programme de contrôle du jet d'encre et moyen d'enregistrement
JP2008225248A (ja) 液滴吐出装置および液滴吐出装置の制御方法、並びに電気光学装置の製造方法、電気光学装置および電子機器

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 07831923

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 07831923

Country of ref document: EP

Kind code of ref document: A1