WO2007110900A1 - 欠陥検査装置及び欠陥検査方法 - Google Patents
欠陥検査装置及び欠陥検査方法 Download PDFInfo
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- WO2007110900A1 WO2007110900A1 PCT/JP2006/305978 JP2006305978W WO2007110900A1 WO 2007110900 A1 WO2007110900 A1 WO 2007110900A1 JP 2006305978 W JP2006305978 W JP 2006305978W WO 2007110900 A1 WO2007110900 A1 WO 2007110900A1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/04—Analysing solids
- G01N29/12—Analysing solids by measuring frequency or resonance of acoustic waves
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/04—Analysing solids
- G01N29/06—Visualisation of the interior, e.g. acoustic microscopy
- G01N29/0609—Display arrangements, e.g. colour displays
- G01N29/0618—Display arrangements, e.g. colour displays synchronised with scanning, e.g. in real-time
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/04—Analysing solids
- G01N29/11—Analysing solids by measuring attenuation of acoustic waves
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/36—Detecting the response signal, e.g. electronic circuits specially adapted therefor
- G01N29/38—Detecting the response signal, e.g. electronic circuits specially adapted therefor by time filtering, e.g. using time gates
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/44—Processing the detected response signal, e.g. electronic circuits specially adapted therefor
- G01N29/4445—Classification of defects
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/44—Processing the detected response signal, e.g. electronic circuits specially adapted therefor
- G01N29/46—Processing the detected response signal, e.g. electronic circuits specially adapted therefor by spectral analysis, e.g. Fourier analysis or wavelet analysis
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/02—Indexing codes associated with the analysed material
- G01N2291/028—Material parameters
- G01N2291/0289—Internal structure, e.g. defects, grain size, texture
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/04—Wave modes and trajectories
- G01N2291/044—Internal reflections (echoes), e.g. on walls or defects
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/26—Scanned objects
- G01N2291/269—Various geometry objects
- G01N2291/2693—Rotor or turbine parts
Definitions
- the present invention relates to a defect inspection apparatus and a defect inspection method.
- Metal parts exposed to high temperature and high stress such as boiler tubes and gas turbine engine rotor blades, may suffer voids or cracks due to fatigue failure or creep damage due to aging There is.
- metal parts used in reforming plant pipes that produce mixed gas containing hydrogen by reforming natural gas or the like may cause defects such as voids and cracks due to hydrogen erosion. Inspecting the degree of progress of these defects and accurately predicting the remaining life of metal parts is very important in planning the timing of inspection and replacement of the metal parts.
- FIG. 12 (a) shows an example of a noise signal detected when an ultrasonic wave is incident on an early metal part in which no defect has occurred.
- W1 is an ultrasonic wave incident signal
- WN is a noise signal
- W2 is a bottom surface reflection signal detected by the reflected ultrasonic wave reflected from the bottom surface (back surface) of the metal part.
- Figure 12 (b) shows the noise signal WN detected in this way, cut out in the time window corresponding to the time width Tg. This is a frequency spectrum obtained by FFT processing of the obtained signal.
- FIG. 13 (a) shows an example of the noise signal WN detected when an ultrasonic wave is incident on a metal part for which a predetermined operating time has elapsed.
- FIG. 13 (b) shows a frequency spectrum obtained by cutting out the noise signal WN detected in this way through a time window corresponding to the time Tg and subjecting the cut signal to FFT processing.
- a characteristic curve indicating the relationship (hereinafter referred to as a remaining life curve).
- the life consumption rate is the ratio of the time t elapsed from the operation start time of the metal part to the creep rupture life t.
- Specified operating time has elapsed f
- the lifetime consumption rate of the product is about 85% based on Fig. 14 above. Therefore, the remaining life is predicted to be 15% of the creep rupture life t.
- Patent Document 1 Japanese Patent No. 1646031
- the present invention has been made in view of the above-described circumstances, and is generated inside a material to be inspected.
- the purpose is to quantitatively evaluate the distribution of defects.
- an ultrasonic probe and a predetermined propagation medium via the ultrasonic probe are provided.
- Ultrasonic transmission / reception means for receiving ultrasonic waves as noise signals while ultrasonic waves are incident on the surface of the material to be inspected provided with a defect existing inside the material to be inspected, and the noise signal Frequency spectrum calculating means for time-division by a time width corresponding to the position in the depth direction of the material to be inspected, and calculating a frequency spectrum for each time-divided noise signal, and based on the frequency spectrum Therefore, a means is used which comprises defect distribution detecting means for calculating a value indicating the degree of progress of the defect corresponding to the position in the depth direction of the material to be inspected.
- the ultrasonic probe is moved along the surface of the material to be inspected.
- the probe further comprises an ultrasonic probe driving means for lowering the ultrasonic probe toward the surface and contacting the surface, wherein the defect distribution detecting means is For each inspection position, a value indicating the degree of progress of the defect corresponding to the position in the depth direction of the material to be inspected is calculated, and two-dimensional distribution data of the value indicating the degree of progress of the defect is generated.
- the ultrasonic probe is placed on the surface of the material to be inspected via the propagation medium. When contacting, it is characterized by rotating in the in-plane direction of the surface of the material to be inspected.
- the ultrasonic transmission / reception means includes: an ultrasonic probe;
- the ultrasonic wave reflected from the bottom surface is received as a bottom surface reflection signal, and based on the intensity of the bottom surface reflection signal, it is determined whether or not the ultrasonic wave is correctly incident on the material to be inspected. It further comprises a determining means.
- the ultrasonic wave is detected in accordance with a time width in which the noise signal is time-divided in the first solving means.
- Set frequency It is characterized by.
- the first solving means is based on a value indicating the degree of progress of the defect. It further comprises a destruction life judging means for judging the destruction life of the inspection material.
- an ultrasonic wave is incident on the surface of the material to be inspected via a predetermined propagation medium and exists inside the material to be inspected.
- the ultrasonic wave scattered by the defect is detected as a noise signal, the detected noise signal is time-divided by a time width corresponding to the position in the depth direction of the material to be inspected, and each time-divided noise signal is detected.
- a means is used in which a frequency spectrum is calculated, and a value indicating the degree of progress of defects corresponding to the position in the depth direction of the material to be inspected is calculated based on the frequency spectrum.
- the first solution means an ultrasonic wave is incident at each inspection position on the surface of the material to be inspected, and the inspection position A value indicating the degree of progress of a defect corresponding to a position in the depth direction of the material to be inspected is calculated every time, and two-dimensional distribution data of a value indicating the degree of progress of the defect is generated.
- the third solving means relating to the defect inspection method the first solution described above is used.
- the propagation medium is an oil having a density of 1 (g / cm 3 ) or less and a kinematic viscosity of 100 (mm 2 Zs) or less.
- the fourth solving means related to the defect inspection method the first solution described above is used.
- the ultrasonic wave reflected from the bottom surface of the material to be inspected is detected as a bottom surface reflected signal, and the ultrasonic wave is correctly incident on the material to be inspected based on the intensity of the bottom surface reflected signal. It is characterized by determining whether or not the force.
- the ultrasonic signal is time-divided according to a time width. It is characterized by setting the frequency.
- the first solution means is based on a value indicating the degree of progress of the defect. Destruction life of inspection materials It is characterized by determining.
- an ultrasonic wave is incident on the surface of a material to be inspected via a predetermined propagation medium, and the ultrasonic wave scattered by a defect existing inside the material to be inspected is used as a noise signal.
- Detecting time-dividing the noise signal by a time width corresponding to a position in the depth direction of the material to be inspected, calculating a frequency spectrum for each time-divided noise signal, and based on the frequency spectrum Since the value indicating the degree of progress of the defect corresponding to the position in the depth direction of the material to be inspected is calculated, the defect distribution in the depth direction of the material to be inspected can be quantitatively evaluated.
- FIG. 1 is a block diagram showing a configuration of a defect inspection apparatus according to an embodiment of the present invention.
- FIG. 2 is a detailed view around the ultrasound probe 1 according to an embodiment of the present invention.
- FIG. 3 is a detailed view showing a contact state of the ultrasonic probe 1 according to one embodiment of the present invention.
- FIG. 4 is an explanatory diagram showing a defect distribution detection method according to an embodiment of the present invention.
- FIG. 5 is a schematic diagram of a defect distribution detected by a defect inspection apparatus according to an embodiment of the present invention.
- FIG. 6 is an explanatory diagram showing the characteristics of ultrasonic waves used in the defect inspection apparatus according to one embodiment of the present invention.
- FIG. 7 is a schematic diagram of a defect distribution detected when an ultrasonic wave having a frequency band of 4 to 8 (MHz) is used in the defect inspection apparatus according to one embodiment of the present invention.
- FIG. 8 is a schematic diagram of a defect distribution detected when an ultrasonic wave having a frequency band of 4 to 20 (MHz) is used in the defect inspection apparatus according to one embodiment of the present invention.
- FIG. 9 is a schematic diagram of a defect distribution detected when an ultrasonic wave having a frequency band of 10 to 20 (MHz) is used in the defect inspection apparatus according to one embodiment of the present invention.
- FIG. 10 is a schematic diagram of a defect distribution detected when an ultrasonic wave having a frequency band of 15 to 20 (MHz) is used in the defect inspection apparatus according to one embodiment of the present invention.
- FIG. 11 is a characteristic diagram showing the relationship between the lifetime consumption rate and the parameter indicating the scattered wave intensity when ultrasonic waves having respective frequency bands are used.
- FIG. 12 is a first explanatory diagram showing a conventional defect detection method.
- FIG. 13 is a second explanatory diagram showing a conventional defect detection method.
- FIG. 14 is a third explanatory diagram showing a conventional defect detection method.
- FIG. 1 is a configuration block diagram of a defect evaluation apparatus according to an embodiment of the present invention.
- This defect evaluation apparatus quantitatively evaluates the distribution of defects caused by tape damage inside the metal part (inspected material) R having welds R1 and R2.
- the defect evaluation apparatus includes an ultrasonic probe 1, a probe driving unit 2, and an ultrasonic probe.
- the acoustic wave transmission / reception unit 3, the AZD converter 4, the frequency spectrum calculation unit 5, the defect distribution detection unit 6, the image processing unit 7, the control unit 8, the storage unit 9, and the display unit 10 are included.
- the ultrasonic probe 1 is a frequency band of 4 to 20 MHz input from the ultrasonic transmission / reception unit 3.
- the ultrasonic wave having a region is incident on the surface of the material R to be inspected through a predetermined contact medium, while being scattered by defects such as voids and cracks existing inside the material R to be inspected (scattering).
- the ultrasonic probe 1 is mechanically connected to the probe driving unit 2 and moved by the probe driving unit 2 in the X-axis direction, that is, along the surface of the material R to be measured. On the other hand, it moves up and down in the Z-axis direction, that is, in the direction perpendicular to the surface of the material R to be inspected.
- FIG. 2 shows the detailed configuration of the periphery of the ultrasonic probe 1.
- the ultrasonic probe 1 is gripped by a probe holder la, and the probe holder la is rotatably connected to a scanning unit connecting jig lc via a connection screw lb. .
- the scanning part connecting jig lc is connected to a movable part (not shown) of the probe driving part 2 in the X and Z axis directions.
- the contact medium C has a predetermined thickness on the surface of the material R to be inspected. It has been applied.
- the contact medium C is preferably one having a low viscosity. For example, it is preferable to use an oil having a density of 1 (g / cm 3 ) or less and a kinematic viscosity of 100 (mmVs) or less.
- the probe driving unit 2 is controlled under the control of the control unit 8.
- the ultrasonic transmission / reception unit 3 generates an ultrasonic wave having a frequency band of 4 to 20 MHz under the control of the control unit 8 and outputs the ultrasonic wave to the ultrasonic probe 1 at a predetermined timing, while the ultrasonic probe 1
- the received scattered wave and bottom reflected wave are detected, and an incident signal Wl indicating the incident ultrasonic wave, a noise signal WN indicating the scattered wave, and a bottom reflected signal W2 indicating the bottom reflected wave are output to the AZD converter 4 .
- the AZD converter 4 includes the incident signal Wl and the noise signal W which are analog signals.
- N and bottom reflection signal W2 are converted into digital signals and output to frequency spectrum calculation unit 5. Further, the AZD converter 4 outputs the bottom surface reflection signal W2 converted into a digital signal to the control unit 8.
- the frequency spectrum calculation unit 5 performs the FFT processing of the noise signal WN based on the incident signal Wl, the noise signal WN, and the bottom reflection signal W2 converted into digital signals by the AZD converter 4! Information indicating the obtained frequency spectrum is output to the defect distribution detector 6.
- the frequency spectrum calculation unit 5 determines the time width Tg from the time when the incident signal W1 is incident until the bottom surface reflected signal W2 is received as a plurality of time widths Tgl to The frequency spectrum is calculated by performing FFT processing for each of the noise signals WN1 to WNn divided into Tgn and cut out by the time windows corresponding to the divided time widths Tgl to Tgn.
- the defect distribution detection unit 6 determines the frequency spectrum area value (S 1 to Sn) for each noise signal WNl to WNn. And calculated the area value (S 1 to Sn) by experimentation in advance.
- the image processing unit 7 corresponds to the noise signals WNl to WNn (that is, each divided time width Tg 1) based on the vector area ratio for each of the noise signals WNl to WNn input from the defect distribution detection unit 6.
- Image data indicating the relationship between the position in the depth direction of the material R to be inspected (corresponding to Tgn) and the spectral area ratio is generated and output to the control unit 8.
- the image processing unit 7 is related to the depth direction and the X-axis direction of the material R to be inspected. Generate image data showing the distribution of the dimensional spectral area ratio.
- the control unit 8 controls the overall operation of the present defect inspection apparatus based on a control program stored in the storage unit 9, and an ultrasonic probe by the probe driving unit 2 is used. While controlling the movement of the transducer 1 in the X-axis direction, the vertical movement in the Z-axis direction, the incidence of ultrasonic waves by the ultrasonic transmission / reception unit 3, etc., the image data input from the image processing unit 7 is stored in the storage unit 9. A display signal for displaying the image data is generated and output to the display unit 10 while being stored. Although details will be described later, the control unit 8 performs a coupling check based on the bottom surface reflection signal W2 input from the AZD converter 4.
- the storage unit 9 stores a control program, image data, and other various data used by the control unit 8.
- the display unit 10 displays an image showing the distribution of the two-dimensional spectral area ratio in the depth direction and the X-axis direction of the material R to be inspected based on the display signal input by the control unit 8.
- Coupling check refers to whether or not the ultrasonic wave is correctly incident when the ultrasonic probe 1 is brought into contact with the surface of the material R to be inspected, to which the contact medium C has been applied in advance in order to make the ultrasonic wave incident. This is a process for judging the above.
- the control unit 8 performs super-contact so as to contact the surface of the material R to be inspected via the contact medium C.
- the probe driving unit 2 is controlled so that the acoustic probe 1 is lowered in the Z-axis direction.
- the ultrasonic probe 1 is further lowered in the Z-axis direction by a certain distance. By doing so, as shown in FIG. 3, the distance between the probe holder la and the scanning section connecting jig lc is set.
- the connecting screw lb rotates together with the probe holder la.
- the contact medium C is well adapted to the contact surface of the ultrasonic probe 1, the air between the ultrasonic probe 1 and the material R to be inspected can be removed, and the ultrasonic wave can be incident correctly. it can.
- connection screw lb It is desirable to provide a mechanism for returning the probe holder 1a to the original state.
- the density of the contact medium C for propagating ultrasonic waves is
- Use oil with l (g / cm 3 ) or less and kinematic viscosity of 100 (mm 2 Zs) or less In general, in non-destructive inspection using ultrasonic waves, a contact medium having a relatively high viscosity such as glycerin paste was used. This is because the higher the density and viscosity of the contact medium, the better the transmission efficiency of the ultrasonic wave, so that the incident intensity of the ultrasonic wave on the material to be inspected can be kept high, and as a result, the influence of noise due to disturbance is reduced. This is because it is possible.
- the distance between the ultrasonic probe 1 and the surface of the material R to be inspected varies depending on the position where the ultrasonic wave is incident. It's easy to do. In other words, the incident intensity varies greatly depending on the position where the ultrasonic wave is incident, making it difficult to accurately detect the defect.
- this defect inspection apparatus quantitatively detects minute defects caused by tape damage, the distance between the ultrasonic probe 1 and the surface of the material R to be inspected must be kept minimal and constant. There is. Therefore, by using the low-density and low-viscosity oil as described above, a uniform contact medium with a small film thickness can be formed, and defects can be accurately detected.
- control unit 8 As described above, when the ultrasonic probe 1 is brought into contact with the surface of the material to be inspected, the control unit 8
- the ultrasonic transmission / reception unit 3 is controlled, and ultrasonic waves are incident on the inside of the material to be inspected via the ultrasonic probe 1.
- the incident ultrasonic waves are scattered by defects existing inside the material R to be inspected, and the ultrasonic probe 1 receives scattered waves generated by the scattering.
- the ultrasonic wave (bottom reflected wave) reflected by the bottom surface (back surface) of the material to be inspected R is super high. Received by acoustic probe 1.
- the ultrasonic transmission / reception unit 3 detects the scattered wave and the bottom reflected wave received by the ultrasonic probe 1, and the incident signal Wl indicating the incident ultrasonic wave, the noise signal WN indicating the scattered wave, and the bottom surface reflection.
- Figure 4 shows the incident signal Wl, noise signal WN, and bottom reflection signal W2.
- the AZD converter 4 outputs the bottom surface reflection signal W2 converted into a digital signal to the control unit 8.
- the control unit 8 compares the amplitude of the bottom surface reflection signal W2 with a predetermined threshold value. When the amplitude is smaller than the threshold value, the control unit 8 determines that the ultrasonic wave is not correctly incident, and displays the determination result on the display unit 10. To inform the user that a coupling error has occurred. Then, the control unit 8 controls the probe driving unit 2 to move the ultrasonic probe 1 in the X-axis direction and detect the bottom surface reflection signal W2 again. When the ultrasonic probe 1 is moved in the X-axis direction, it is desirable to move the ultrasonic probe 1 after raising the surface force Z of the material R to be inspected once in the Z-axis direction.
- control unit 8 compares the amplitude of the bottom surface reflection signal W2 with a predetermined threshold, and determines that the ultrasonic wave is correctly incident if the amplitude is equal to or greater than the threshold.
- the defect inspection described below is started.
- the control unit 8 controls the ultrasonic transmission / reception unit 3. Then, an ultrasonic wave is incident from the ultrasonic probe 1 into the material R to be inspected.
- the ultrasonic transmission / reception unit 3 detects the scattered wave and bottom reflected wave received by the ultrasonic probe 1, and includes an incident signal W1 indicating the incident ultrasonic wave as shown in FIG. 4, a noise signal WN indicating the scattered wave,
- the bottom reflection signal W2 indicating the bottom reflection wave is output to the AZD converter 4.
- the AZD converter 4 converts the incident signal Wl, noise signal WN, and bottom surface reflection signal W2, which are analog signals, into digital signals and outputs them to the frequency spectrum calculation unit 5.
- the frequency spectrum calculation unit 5 performs FFT processing on the noise signal WN based on the incident signal Wl, the noise signal WN, and the bottom reflection signal W2 digitally input by the AZD converter 4! Then, information indicating the frequency spectrum obtained from the FFT processing is output to the defect distribution detection unit 6. More specifically, the frequency spectrum calculation unit 5 calculates a time width Tg (see FIG. 4) from when the incident signal W1 is incident until the force bottom reflection signal W2 is received, to a plurality of time widths Tg 1 to Tgn. The frequency spectrum is calculated by performing FFT processing for each noise signal WN1 to WNn cut out by the time window corresponding to each divided time width Tg1 to Tgn.
- Each of the divided time widths Tgl to Tgn corresponds to the position in the depth direction of the material R to be inspected.
- the propagation speed of ultrasonic waves inside the material R to be inspected is assumed to be 5.95 (mm / ⁇ s) (general steel If the distance of lmm is converted into a time width, the following equation (1) is obtained.
- each of the time widths Tgl to Tgn is obtained by equally dividing the time width Tg by 0.34 ( ⁇ s).
- the time width Tg is divided into time widths Tgl to Tgn, and FFT processing is performed for each noise signal WN1 to WNn cut out in the time window corresponding to each time width Tgl to Tgn.
- a frequency spectrum as shown in FIG. 13 (b) can be obtained at every lmm pitch with respect to the depth direction of the material R to be inspected.
- the defect distribution detection unit 6 determines the frequency spectrum area value (S1 to Sn) for each of the divided noise signals WNl to WNn. ) And calculate the area value (S1 ⁇ Sn)
- the toll area ratios Pl to Pn are output to the image processing unit 7.
- Such a spectral area ratio is a value indicating the degree of progress of defects.
- the image processing unit 7 corresponds to each noise signal WN1 to WNn (that is, corresponding to each divided time width Tgl to Tgn) based on the spectral area ratio Pl to Pn.
- Image data showing the relationship between the position in the depth direction and the spectral area ratios P1 to Pn.
- the image data indicates the relationship between the position in the depth direction of the material R to be inspected at the inspection position at a certain coordinate on the X axis and the spectral area ratio Pl to Pn.
- the control unit 8 controls the probe driving unit 2 to move the ultrasonic probe 1 by a certain distance (for example, about several mm) in the X-axis direction (scanning direction).
- image data is generated again by detecting the relationship between the position in the depth direction of the material R to be inspected in the X-axis coordinates and the spectral area ratios P 1 to Pn.
- the distribution of the spectral area ratio that is, the distribution of defects, where the vertical axis is the position in the depth direction of the material R to be inspected and the horizontal axis is the X-axis coordinate, as shown in FIG. 5, is shown.
- Image data can be obtained.
- the control unit 8 generates a display signal for displaying the image data as described above and outputs the display signal to the display unit 10.
- the display unit 10 determines the depth direction of the material R to be inspected and the display signal based on the display signal. An image showing the distribution of the two-dimensional spectral area ratio (defect distribution) in the X-axis direction is displayed.
- Fig. 5 shows the distribution of defects from the operation start time (initial state) of the material R to be inspected until creep rupture (lifetime consumption rate 100%), and the value of the spectral area ratio is large.
- the part that is, the degree of progress of the defect is large
- the part is indicated by a pattern having a higher numerical value.
- numbers from 1 (low progress) to 8 (high progress) are assigned according to the progress of defects.
- the ultrasonic wave has a center frequency of 12 (MHz) and a frequency that decreases by 20 (dB) with respect to the peak intensity is 4, 20 (MHz), that is, 4 to 20 (MHz) frequency band.
- the reason for using such supersonic waves will be explained below.
- the time width Tg must be equally divided by 0.34 (s).
- FIG. 7 shows the case where an ultrasonic wave having a frequency band of 4 to 8 (MHz) is used.
- Fig. 8 shows the case where an ultrasonic wave having a frequency band of 4 to 20 (MHz) is used.
- Fig. 10 shows the creep of the starting time force of the material R to be inspected when using ultrasonic waves having a frequency band of 15-20 (MHz). It shows the distribution of defects leading to destruction (lifetime consumption rate 100%).
- FIG. 11 is a characteristic diagram showing the relationship between the lifetime consumption rate and the parameter indicating the scattered wave intensity when ultrasonic waves having respective frequency bands are used.
- the distribution of defects generated in the inspection material R is quantitatively evaluated.
- the present invention is not limited to this, and based on the evaluation result of such a distribution of defects.
- a configuration may be provided that includes a function (destructive life judging means) for predicting the remaining life of the material R to be inspected.
- the remaining life curve force shown in FIG. 14 can predict the remaining life as in the past.
- the defect distribution for each lmm is detected in the depth direction of the material R to be inspected.
- the present invention is not limited to this, and the defect detection pitch in the depth direction is appropriately changed. It is possible. However, when changing the defect detection pitch in the depth direction, it is necessary to adjust the frequency of the ultrasonic wave used and the division time width of the time width Tg according to the change.
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Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
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EP06729926.3A EP2006676B1 (en) | 2006-03-24 | 2006-03-24 | Defect inspection apparatus, and defect inspection method |
CA2647004A CA2647004C (en) | 2006-03-24 | 2006-03-24 | Defect inspection apparatus and defect inspection method |
US12/294,076 US8175820B2 (en) | 2006-03-24 | 2006-03-24 | Defect inspection apparatus and defect inspection method |
JP2008507281A JP4821848B2 (ja) | 2006-03-24 | 2006-03-24 | 欠陥検査装置及び欠陥検査方法 |
PCT/JP2006/305978 WO2007110900A1 (ja) | 2006-03-24 | 2006-03-24 | 欠陥検査装置及び欠陥検査方法 |
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PCT/JP2006/305978 WO2007110900A1 (ja) | 2006-03-24 | 2006-03-24 | 欠陥検査装置及び欠陥検査方法 |
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US (1) | US8175820B2 (ja) |
EP (1) | EP2006676B1 (ja) |
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Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2010243375A (ja) * | 2009-04-08 | 2010-10-28 | National Maritime Research Institute | 進展亀裂検出方法、装置およびプログラム |
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CA2647004C (en) | 2013-02-12 |
EP2006676A1 (en) | 2008-12-24 |
JP4821848B2 (ja) | 2011-11-24 |
JPWO2007110900A1 (ja) | 2009-08-06 |
US8175820B2 (en) | 2012-05-08 |
CA2647004A1 (en) | 2007-10-04 |
US20090105967A1 (en) | 2009-04-23 |
EP2006676B1 (en) | 2020-03-04 |
EP2006676A4 (en) | 2012-10-03 |
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