WO2006129481A1

WO2006129481A1 - Gas purifier having reinforced vessel

Info

Publication number: WO2006129481A1
Application number: PCT/JP2006/309803
Authority: WO
Inventors: Fumio Nozaki
Original assignee: Entegris, Inc.
Priority date: 2005-05-30
Filing date: 2006-05-17
Publication date: 2006-12-07
Also published as: TW200709839A

Abstract

[PROBLEMS] A gas purifier for adsorptively removing gaseous fouling metal particles, etc. to produce a clean halogen or another gas has the following problem when it is constituted of a fluororesin. Since fluororesins are slightly permeable to halogen gases and ozone gas, halogen gases leak out through the wall of the vessel in the purifier to contaminate the working atmosphere in, e.g., a clean room, corrode nearby metals, and cause health hazard, etc. [MEANS FOR SOLVING PROBLEMS] A gas purifier is provided which comprises a barrel part made of a fluororesin, edge plates made of a fluororesin which have been united respectively to both ends of the barrel part, and a gas inlet member and a purified-gas outlet member which are made of a fluororesin and respectively have a feed gas inlet and a purified-gas outlet which extend through the two edge plates respectively, wherein a gas-purifying material is housed in the space surrounded by the barrel part and the two edge plates. The barrel part has a corrosion-resistant metallic sheath gastightly disposed therearound to prevent the purified gas from leaking out.

Description

明細書 Specification

強化容器を有するガス精製装置 Gas purifier with reinforced container

技術分野 Technical field

[0001] 本発明は、ガス精製装置に関し、より詳しくは、ハロゲンガス、オゾンガス等のタリーユングガスを精製するための全フッ素製ガス精製装置に関する。 TECHNICAL FIELD [0001] The present invention relates to a gas purifier, and more particularly to a perfluorinated gas purifier for purifying tallying gas such as halogen gas and ozone gas.

背景技術 Background art

[0002] 半導体の製造工程では、半導体製造装置のクリーニングのためにフッ素や塩素等のハロゲンガスやオゾンガス等のクリーニングガスを半導体製造装置内に流して、装置に付着した金属粒子その他の汚染物質を浄ィ匕することが行われている。これらのガス、特にフッ素ガス (F )やオゾンは酸化作用が強ぐ特に水分を含有すると配管金 [0002] In the semiconductor manufacturing process, a cleaning gas such as fluorine gas or halogen gas such as fluorine or chlorine, or ozone gas is flowed into the semiconductor manufacturing apparatus to clean the semiconductor manufacturing apparatus, so that metal particles and other contaminants adhered to the apparatus. It is done to clean up. These gases, especially fluorine gas (F) and ozone, have a strong oxidizing action, especially when they contain moisture,

2 2

属を腐食し、あるいは汚染金属粒子を発生させ、半導体の金属汚染を生じるので半導体の製造の障害となる。半導体製造装置へのガス供給配管系では、クリーニングガスに対する耐食性を向上させるために、配管の金属成分の選択又は配合、あるいは配管内の表面処理による反応性の低減が進められている。しかしながら、これらの管理された金属配管を使用してもウェハ上での金属粒子による汚染については充分に解決されていない。 Corrosion of the genus or generation of contaminating metal particles, resulting in semiconductor metal contamination, hindering semiconductor manufacturing. In the gas supply piping system to semiconductor manufacturing equipment, in order to improve the corrosion resistance against the cleaning gas, the reactivity is being reduced by selecting or blending metal components of the piping or surface treatment in the piping. However, even if these managed metal pipes are used, contamination by metal particles on the wafer has not been sufficiently solved.

[0003] この対策として、ガス状金属汚染物や水分を除去するための精製剤が開発されている。例えば高シリカゼォライト等の吸着剤を精製装置に充填して汚染金属粒子等を吸着精製し清浄なハロゲンガス等を製造している (特許文献 1)。なお、精製装置の容器を構成する素材としてステンレス鋼が知られてヽるが、フッ素ガス等のタリーニングガスはステンレス容器を腐食して金属汚染の原因となり得るので好ましくない。 [0003] As a countermeasure against this, a purifier for removing gaseous metal contaminants and moisture has been developed. For example, a purification apparatus is filled with an adsorbent such as high silica zeolite to adsorb and purify contaminated metal particles and the like to produce clean halogen gas (Patent Document 1). Although stainless steel is known as a material constituting the container of the refining apparatus, a tapping gas such as fluorine gas is not preferable because it can corrode the stainless steel container and cause metal contamination.

[0004] また、ガス状金属系の汚染源を防止するために、配管の内面をフッ素系榭脂で被覆したり、あるいは精製装置の全体を PFAのようなフッ素系榭脂により構成する対策が行われている。この対策は半導体の製造装置の汚染対策として有効である。 [0004] Further, in order to prevent gaseous metal-based contamination sources, measures have been taken to cover the inner surface of the piping with fluorine-based resin or to configure the entire purification apparatus with fluorine-based resin such as PFA. It has been broken. This measure is effective as a measure against contamination of semiconductor manufacturing equipment.

[0005] 特許文献 1：特表 2003— 530287号明細書 [0005] Patent Document 1: Special Table 2003- 530287 Specification

発明の開示 Disclosure of the invention

発明が解決しょうとする課題 [0006] 上記のように、フッ素ガス等のクリーニングガスは非常に反応性が高ぐ特に配管系に水分が付着していると、金属配管の腐食により金属粒子等の汚染物を生じ反応室を汚染するので、ガス状金属汚染物や水分を除去するために、高シリカゼォライト等の吸着剤を精製装置に充填して、ガス状汚染金属粒子等を吸着精製し清浄なハロゲンガス等を製造することが有効であり (特許文献 1)、精製装置をフッ素系榭脂で構成することによりさらに半導体製造装置の反応室の汚染が防止できるが、フッ素系榭脂はハロゲンガスやオゾンガス、特にフッ素ガスに対してわずかに透過性があり、ノヽロゲンガスが精製装置の容器壁を通して外部に漏洩してクリーンルーム等の作業環境を汚染し、周囲の金属を腐食させ、また健康障害等の原因となる。 Problems to be solved by the invention [0006] As described above, cleaning gas such as fluorine gas is very reactive, and especially when moisture is attached to the piping system, metal pipes corrode to produce contaminants such as metal particles. In order to remove gaseous metal contaminants and moisture, the purification equipment should be filled with an adsorbent such as high silica zeolite to adsorb and purify gaseous contaminated metal particles to produce clean halogen gas, etc. Is effective (Patent Document 1), and contamination of the reaction chamber of the semiconductor manufacturing equipment can be further prevented by configuring the refining device with fluorine-based resin. However, fluorine-based resin is halogen gas, ozone gas, especially fluorine gas. It is slightly permeable to water, and the nitrogen gas leaks to the outside through the wall of the refining equipment, contaminates the work environment such as clean rooms, corrodes surrounding metals, and causes health problems. That.

[0007] このような状況に鑑み、本発明は環境汚染のない優れたガス精製装置を提供することを目的とする。 In view of such circumstances, an object of the present invention is to provide an excellent gas purification apparatus free from environmental pollution.

課題を解決するための手段 Means for solving the problem

[0008] 本発明のガス精製装置は、フッ素榭脂製の円筒状胴部と、該胴部の両端に一体に設けたフッ素榭脂製の端板と、前記両端板をそれぞれ貫通する原料ガス入口及び精製ガス出口とを有するフッ素榭脂製のガス入口部材及び精製ガス出口部材とよりなり、前記胴部と両端板により囲まれた空間内にガス精製材を収容したガス精製装置において、前記胴部の周りに、耐蝕金属製外套を気密的に設けたことを特徴とするガス精製装置により、ハロゲンガス又はオゾンガスの漏洩を防ぎ、環境汚染の問題を解決する。 [0008] The gas purification apparatus of the present invention includes a cylindrical body made of fluorine resin, an end plate made of fluorine resin integrally provided at both ends of the body, and a raw material gas penetrating the both end plates. A gas purification apparatus comprising a gas inlet member and a purified gas outlet member made of fluorine resin having an inlet and a purified gas outlet, and containing a gas purification material in a space surrounded by the body and both end plates. In addition, the gas purification apparatus characterized by airtightly providing a corrosion-resistant metal mantle around the body portion prevents leakage of halogen gas or ozone gas and solves the problem of environmental pollution.

[0009] ここに外套を形成する耐食金属は好ましくはステンレス鋼製である。さらに好ましくは円筒状胴部及び端板と耐食性金属製外套の間には空間を形成し、そこにハロゲンガスを捕捉できる吸着剤を収納する。 [0009] The corrosion-resistant metal forming the jacket here is preferably made of stainless steel. More preferably, a space is formed between the cylindrical body and the end plate and the corrosion-resistant metal sheath, and an adsorbent capable of trapping the halogen gas is accommodated therein.

[0010] ガス精製装置の好ましくはフッ素榭脂製の円筒状の胴部と、該胴部の両端に一体に設けたフッ素榭脂製の端板と、前記両端板をそれぞれ貫通する原料ガス入口及び精製ガス出口とを有するフッ素榭脂製のガス入口部材及び精製ガス出口部材、その他ハロゲンガス等の精製すべきガスに直接触れる部材はすべてフッ素榭脂で形成される。このようなフッ素榭脂としては、加熱により溶融する熱可塑性フッ素榭脂で、例えば四フッ化工チレンパーフルォロアルキルビュルエーテル共重合体（PFA)、四フッ化工チレン一六フッ化プロピレン共重合体（FEP)、四フッ化工チレンパーフルォロアルキルビュルエーテル共重合体一六フッ化プロピレン共重合体（EPE)等であり、フッ素榭脂同士で互いに融着が可能なものを指す。 [0010] Preferably, the gas purifying apparatus has a cylindrical body made of fluororesin, an end plate made of fluororesin integrally provided at both ends of the body, and a raw material gas inlet penetrating the both end plates. The gas inlet member made of fluorine resin having the purified gas outlet and the purified gas outlet member, and other members that directly contact the gas to be purified such as halogen gas are all made of fluorine resin. Examples of such a fluorine resin include thermoplastic fluorine resins that melt upon heating. For example, tetrafluoroethylene / perfluoroalkyl butyl ether copolymer (PFA), tetra Fluoropolymerized Tylene Hexafluoropropylene Copolymer (FEP), Tetrafluorinated Tylene Perfluoroalkyl Bulle Ether Copolymer, Hexafluoropropylene Copolymer (EPE), etc. It refers to those that can be fused.

[0011] 円筒状胴部と該胴部の両端に一体に融着された端板とにより形成される全フッ素榭脂製容器の吸着剤収納部には水分や金属粉末を吸着してハロゲンガスを精製する吸着剤粒子が収納される。例えば特許文献 1にはアルミノ珪酸塩ゼオライト、特にシリカ Zアルミナ比が高いケィ酸塩ゼオライトが提案されており、本発明でもシリカ Z アルミナ比が 10以上のゼォライトは十分安定であると考えられる。例えば微量水分除去に使用される高シリカ Zアルミナ比を有するゼォライトの一つの型として、巿場で入手可能である UOP社の AW— 300型分子篩が公知である。詳しくは同文献を参照されたい。 [0011] The adsorbent storage part of the all-fluorine resin container formed by a cylindrical body part and end plates integrally fused to both ends of the body part adsorbs moisture and metal powder to generate halogen gas. Contains adsorbent particles for purification. For example, Patent Document 1 proposes an aluminosilicate zeolite, particularly a silicate zeolite having a high silica Z alumina ratio. In the present invention, zeolite having a silica Z alumina ratio of 10 or more is considered to be sufficiently stable. For example, one type of zeolite having a high silica Z-alumina ratio used for removing trace moisture is UOP's AW-300 type molecular sieve, which is available on the market. For details, see the same document.

[0012] 次に円筒状胴部と端板よりなる容器の周りに配置される耐食性金属製、特にステンレス製の外套は、ハロゲンガスに対する耐蝕性がフッ素榭脂に比較して劣る力ハロゲンガスに対する遮断性が優れて、る。フッ素榭脂製の容器と耐食性金属製の外套の間には漏出してくる微少なハロゲンガスを保持するために空間であっても良いが、ハロゲンガス等を吸着保持する性質の吸着剤を使用することが好ましい。このような吸着剤としては、オゾン吸着用には活性炭とセラミックの複合により活性炭消費に伴ぅ粉ィ匕のおそれがな、吸着材が粒状白鷺 GOC (商品名、日本エンバイ口ケミカル社製）として市販されている。またハロゲン及びハロゲン化水素の吸着剤としては通常の活性炭と比べ高ヽ除去効率を有する粒状白鷺 XRC (商品名、日本エンバイロケミカル社製）が市販されて！、る。 [0012] Next, the outer shell made of corrosion-resistant metal, particularly stainless steel, which is disposed around the container including the cylindrical body and the end plate, has a lower resistance to halogen gas than that of fluorine resin. It has excellent barrier properties against There may be a space between the fluorine resin container and the corrosion-resistant metal jacket to hold the minute halogen gas that leaks out, but use an adsorbent that absorbs and holds the halogen gas. It is preferable to do. As such an adsorbent, the adsorbent is granular white leopard GOC (trade name, manufactured by Nippon Enbiguchi Chemical Co., Ltd.), because there is no risk of powder generation due to activated carbon consumption due to the combination of activated carbon and ceramic for ozone adsorption. It is commercially available. As an adsorbent for halogens and hydrogen halides, granular white birch XRC (trade name, manufactured by Nippon Environmental Chemical Co., Ltd.), which has higher soot removal efficiency than ordinary activated carbon, is now on the market! RU

[0013] より具体的な実施形態において、精製装置は、さらに出口部材側に前記一方の端板に接する封止板と、前記封止板の外周部に係合すると共に内ねじを有するロックナットとを含み、前記外套は一端に環状端部を有すると共に他端に外ねじを有し、前記ロックナットの内ねじは前記封止板を介在して前記外套の外ねじに螺合締着され、それにより前記外套を封止している。前記封止板の外周面は前記外套の内面に接触しており、上流側の前記端板と前記環状部、下流側の前記端板と前記封止板、及び前記封止板の外周と前記外套の内面間にはそれぞれシールリングが挿入されて、外套と封止板の組立を容易にし、且つ高、シール効果を達成することができる。発明を実施するための最良の形態 [0013] In a more specific embodiment, the refining device further includes a sealing plate that is in contact with the one end plate on the outlet member side, and a lock nut that engages with an outer peripheral portion of the sealing plate and has an internal screw. The outer sleeve has an annular end at one end and an outer screw at the other end, and the inner screw of the lock nut is screwed to the outer screw of the outer jacket via the sealing plate. Thereby, the outer jacket is sealed. The outer peripheral surface of the sealing plate is in contact with the inner surface of the mantle, and the upstream end plate and the annular portion, the downstream end plate and the sealing plate, and the outer periphery of the sealing plate And a seal ring is inserted between the inner surface of the outer jacket and Assembling of the mantle and the sealing plate is facilitated, and a high sealing effect can be achieved. BEST MODE FOR CARRYING OUT THE INVENTION

[0014] 以下、図面を参照して、本発明をより具体的に説明する。 Hereinafter, the present invention will be described more specifically with reference to the drawings.

図 1は本発明の好ましい実施例によるハロゲンガスやオゾンガスのためのガス精製装置 1を例示する。ガス精製装置 1の内部には、ハロゲンガス等の被精製ガスカもガス状金属粒子を除去するために、ゼォライト等の精製材粒子 2が充填されている。ガス精製装置 1は、いずれもが PFA等のフッ素榭脂製である、円筒状の胴部 3とこの胴部の両端に設けたほぼ円盤状の端板 5、 7と、これらの端板に一体に成形されているガス入口部材 9及びガス出口部材 11を有し、端板力これらの部材を貫通してそれぞれ入口通路 16及び出口通路 17が形成されている。胴部 3と端板 5、 7の接合部 13 、 15はそれぞれ熱融着されて気密状態の容器を形成してヽる。 FIG. 1 illustrates a gas purification apparatus 1 for halogen gas or ozone gas according to a preferred embodiment of the present invention. The gas purification apparatus 1 is filled with purified material particles 2 such as zeolite to remove gas-like metal particles to be purified such as halogen gas. The gas refining device 1 is made of a fluorocarbon resin such as PFA, and has a cylindrical body 3 and substantially disc-shaped end plates 5 and 7 provided at both ends of the body, and these end plates. The gas inlet member 9 and the gas outlet member 11 are formed integrally with each other, and the end plate force penetrates these members to form an inlet passage 16 and an outlet passage 17, respectively. The joints 13 and 15 between the body 3 and the end plates 5 and 7 are heat-sealed to form an airtight container.

[0015] ガス入口部材 9には多数の貫通孔 19を設けた台形部を有する PFA等のフッ素榭脂製の小円筒 23が配置されて入口部材 9の入口通路 16の内壁に融着又はねじ結合されている。小円筒 23は胴部 3の内部の吸着材 2が脱落するのを抑制しながらノ、ロゲンガス等の精製すべき原料ガスの導入を可能にするためである。同様に出口部材 11の内端には下流側に多数の貫通孔 25を有する PFA等のフッ素榭脂製の円筒 27がねじ結合ゃ融着で結合されており、円筒 27の上流端は閉鎖されている。上流側の多孔小円筒 23は比較的粗、細孔を有すれば充分であるが、下流側の多孔円筒 27は精製材の微粉末も通さな、程度の細カ^、細孔を有する必要がある。好まヽ例では、図示されて!、るように多孔円筒 27の内部にさらに小さ、細孔を多数設け外側に PTFE等のフィルタ又はろ過膜 30を卷付け溶着した内側円筒 29を挿入して精製材の微粉末 (及びそれに吸着された金属粒子や水分その他の汚染物質)を阻止している。内側円筒 29の詳細は図 2に示したように、多数の小リブ 32が円周方向に延びていてそれらの間に小溝 34を形成しており、小リブ 32の頂面はろ過膜 30を支持している。図 3に示したように内側円筒 29には軸線方向に延び且つ円筒を貫通する 3 本の開口 36が形成されている。これにより、精製フッ素ガスはろ過膜 30を透過し、小溝 34により開口 36を経て内部の通路に集められ、次いで出口通路 17に導かれる。 38は軸線方向に延びる補強リブである。なお、精製材 2を充填した本発明のガス精製装置 1の清浄度を、実際に現場に設置する時まで維持するために、ガス入口部材及び出口部材にキャップ又は栓体を設ける。 [0015] A small cylinder 23 made of fluorine resin such as PFA having a trapezoidal portion provided with a large number of through holes 19 is arranged in the gas inlet member 9, and is fused or screwed to the inner wall of the inlet passage 16 of the inlet member 9. It is bound. This is because the small cylinder 23 enables the introduction of the raw material gas to be purified, such as a norologene gas, while suppressing the adsorbent 2 inside the barrel 3 from falling off. Similarly, a cylinder 27 made of fluorine resin such as PFA having a large number of through holes 25 on the downstream side is connected to the inner end of the outlet member 11 by screw bonding or fusion, and the upstream end of the cylinder 27 is closed. Has been. It is sufficient that the upstream small porous cylinder 23 is relatively coarse and has pores, but the downstream porous cylinder 27 has fine particles and pores that do not allow fine powder of purified material to pass through. There is a need. In the preferred example, as shown in the figure, the inner cylinder 29 is inserted with a smaller number of pores inside the porous cylinder 27 and a filter such as PTFE or a filtration membrane 30 attached to the outside. It prevents fine powder of fine wood (and metal particles adsorbed on it, moisture and other contaminants). As shown in FIG. 2, the details of the inner cylinder 29 are as follows. A large number of small ribs 32 extend in the circumferential direction to form a small groove 34 therebetween, and the top surface of the small ribs 32 is a filtration membrane 30. Is supported. As shown in FIG. 3, the inner cylinder 29 is formed with three openings 36 extending in the axial direction and penetrating the cylinder. As a result, the purified fluorine gas passes through the filtration membrane 30, is collected in the internal passage through the opening 36 by the small groove 34, and is then guided to the outlet passage 17. Reference numeral 38 denotes a reinforcing rib extending in the axial direction. The gas refinement of the present invention filled with the purification material 2 is used. In order to maintain the cleanliness of the manufacturing apparatus 1 until it is actually installed on the site, caps or stoppers are provided on the gas inlet member and outlet member.

[0016] 次に、胴部 3と端板 5、 7の周りにはステンレス鋼のような耐食性金属力も成る円筒形外套 31が取り付けられる。外套 31の上流側は中央開口を有する環状端板 33となつており、外套の下流側の周部には外ねじ 35が設けられている。下流側には同様な金属素材の封止板 37が設けられ、この封止板 37の外周部には内ねじ 39を有する同様な金属素材のロックナット 41が配置され、内外ねじ 35、 39を螺合して締め付けることにより、封止板 37と外套 31を互いに気密固定すると共にこれらの部材を両端板 5、 7に対して締め付けて封止する。封止を助けるために端板 5と環状端板 33の間にフッ素榭脂製のシールリング 43が、端板 7と封止板 37との間にシールリング 45が、封止板 37と外套の下流端内面との間にシールリング 47がそれぞれ設けられている。 Next, a cylindrical mantle 31 having a corrosion-resistant metal force such as stainless steel is attached around the body 3 and the end plates 5 and 7. An upstream end of the mantle 31 is an annular end plate 33 having a central opening, and an outer screw 35 is provided on a peripheral portion on the downstream side of the mantle. A similar metal material sealing plate 37 is provided on the downstream side, and a similar metal material lock nut 41 having an inner screw 39 is disposed on the outer periphery of the sealing plate 37, and the inner and outer screws 35, 39. By screwing and tightening, the sealing plate 37 and the outer mantle 31 are hermetically fixed to each other, and these members are fastened to the both end plates 5 and 7 for sealing. To assist sealing, a fluorine resin seal ring 43 is provided between the end plate 5 and the annular end plate 33, and a seal ring 45 is provided between the end plate 7 and the sealing plate 37. Seal rings 47 are respectively provided between the inner surfaces of the outer ends of the mantles.

[0017] 胴部 3及び端板 5、 7との外周面と外套 31の内面との間には隙間 49が形成されていることが好ましぐこの空間に好ましくは精製ガスに対する吸着性を有する吸着材を収納する。 [0017] It is preferable that a gap 49 is formed between the outer peripheral surface of the body portion 3 and the end plates 5 and 7 and the inner surface of the outer cannula 31. This space preferably has adsorptivity to purified gas. Store the adsorbent.

[0018] 次に動作を説明するに、ハロゲンガス例えば水分や金属微粉末あるいはガス状金属成分等を含むフッ素ガス (F )が原料ガス入口 16に導入され、全フッ素榭脂製であ [0018] Next, in order to explain the operation, a fluorine gas (F) containing a halogen gas such as moisture, fine metal powder, or a gaseous metal component is introduced into the raw material gas inlet 16, and is made of an all-fluorine resin.

2 2

る容器 (胴部 3と端板 5、 7)に収納された高シリカアルミノケィ酸塩吸着材粒子 2と接触しながら流れて下流側に向けて次第に精製され、このようにして水分や金属微粉末等を除去されたハロゲンガスは円筒 27に設けた多孔 25を経て、さらに内側円筒の外側に卷付けた PTFE等のろ過膜 30を通過して精製ガス流としてガス出口通路 17 に出てくる。精製ガスは適宜の配管により半導体製造装置に導かれる。 Flowing in contact with the high-silica aluminosilicate adsorbent particles 2 stored in the container (body 3 and end plates 5 and 7) and gradually refined toward the downstream side. The halogen gas from which fine powder has been removed passes through the porous 25 provided in the cylinder 27, and further passes through a filtration membrane 30 such as PTFE attached to the outside of the inner cylinder, and then goes out to the gas outlet passage 17 as a purified gas flow. come. The purified gas is led to a semiconductor manufacturing apparatus through appropriate piping.

[0019] 一方、原料ガスが吸着材 2と接触しながら流れると、極少量ではあるがフッ素ガス等のハロゲンガスの一部はフッ素榭脂製胴部 3及び端板 5、 7を透過して外側に漏出する力耐食性金属製の外套 31の内部に封止されるので、外部には漏出しない。またハロゲンガスを吸着する吸着材を胴部 3、外套 5、 7と外套 31との間に収容しておくことにより外套 31の腐食を防ぎ、外套の長期の使用を可能にする。 On the other hand, when the raw material gas flows in contact with the adsorbent 2, a small amount of halogen gas such as fluorine gas passes through the fluoro-resin body 3 and the end plates 5 and 7 even though the amount is small. Force leaking to the outside Since it is sealed inside the corrosion-resistant metal jacket 31, it does not leak to the outside. In addition, by storing an adsorbent that adsorbs the halogen gas between the body 3, the mantle 5, 7 and the mantle 31, corrosion of the mantle 31 can be prevented, and the mantle can be used for a long time.

[0020] 以上のように、本発明によると腐食性ガスの漏出を防止し、クリーンルーム等の周囲環境を保全し、周囲の金属等の腐食を防止することができる。図面の簡単な説明 [0020] As described above, according to the present invention, it is possible to prevent leakage of corrosive gas, preserve the surrounding environment such as a clean room, and prevent corrosion of surrounding metals and the like. Brief Description of Drawings

[0021] [図 1]本発明の好ま、実施例によるハロゲンガスやオゾンガスのためのガス精製装置の断面図である。 FIG. 1 is a sectional view of a gas purification apparatus for halogen gas or ozone gas according to a preferred embodiment of the present invention.

[図 2]図 1に示された内側円筒の拡大図であり、見やすくするために中心線よりも下側のろ過膜は省略してある。 [FIG. 2] This is an enlarged view of the inner cylinder shown in FIG. 1, and the filtration membrane below the center line is omitted for easy viewing.

[図 3]図 2の A— A'から見た断面図である。 FIG. 3 is a sectional view taken along line AA ′ of FIG.

符号の説明 Explanation of symbols

[0022] 1 ガス精製装置 [0022] 1 Gas purification device

2 ガス状金属粒子吸着材 2 Gaseous metal particle adsorbent

3 胴部 3 Torso

5、 7 端板 5, 7 end plate

9 ガス入口部材 9 Gas inlet member

11 ガス出口部材 11 Gas outlet member

13、 15 接合部 13, 15 Joint

16 入口通路 16 Entrance passage

17 出口通路 17 Exit passage

19 孔 19 holes

23 小円筒 23 Small cylinder

25 多孔 25 porous

27 円筒 27 cylinder

29 内側多孔円筒 29 inner porous cylinder

30 ろ過膜 30 Filtration membrane

31 耐蝕金属製外套 31 Corrosion-resistant metal jacket

32 小リブ 32 small ribs

33 環状部 33 Annulus

34 小溝 34 Small groove

35 外ねじ封止板 35 External thread Sealing plate

内ねじ Inner thread

補強リブ Reinforcement rib

ロックナツ卜 Rock nuts

45、 47 シールリング隙間 45, 47 Seal ring gap

Claims

請求の範囲 The scope of the claims

[1] フッ素榭脂製の胴部と、該胴部の両端に一体に設けたフッ素榭脂製の端板と、前記両端板をそれぞれ貫通する原料ガス入口及び精製ガス出口とを有するフッ素榭脂製のガス入口部材及び精製ガス出口部材とよりなり、前記胴部と両端板により囲まれた空間内にガス精製材を収容したガス精製装置において、前記胴部の周りに、耐蝕金属製外套を気密的に設けたことを特徴とする、ガス状金属粒子を含有するガス精製装置。 [1] A fluorine resin body having a barrel, a fluorine resin end plate integrally provided at both ends of the barrel, and a raw material gas inlet and a purified gas outlet respectively penetrating the both end plates. In a gas purification apparatus comprising a gas inlet member and a purified gas outlet member made of a resin, and containing a gas purification material in a space surrounded by the barrel and both end plates, a corrosion-resistant metal is formed around the barrel. A gas purification apparatus containing gaseous metal particles, characterized in that a mantle is provided in an airtight manner.

[2] 前記外套はステンレス鋼製である請求項 1のガス精製装置。 2. The gas purifier according to claim 1, wherein the mantle is made of stainless steel.

[3] 前記外套と前記胴部の間に空隙を設け、前記ガスに対する吸着剤を収納した請求項 1又は 2のガス精製装置。 [3] The gas purifier according to claim 1 or 2, wherein an air gap is provided between the mantle and the body portion and an adsorbent for the gas is stored.

[4] さらに出口部材側に、前記一方の端板に接する封止板と、前記封止板の外周部に係合すると共に内ねじを有するロックナットとを含み、前記外套は上流側の一端に環状端部を有すると共に下流側の他端に外ねじを有し、前記ロックナットの内ねじは前記封止板を介在して前記外套の外ねじに螺合締着され、それにより前記外套を封止して、る請求項 1または 2のガス精製装置。 [4] The outlet member further includes a sealing plate in contact with the one end plate, and a lock nut that engages with an outer peripheral portion of the sealing plate and has an internal screw, and the mantle has an upstream end. Having an annular end and an outer thread at the other end on the downstream side, and the inner thread of the lock nut is screwed and fastened to the outer thread of the mantle through the sealing plate. The gas purifier according to claim 1 or 2, wherein the jacket is sealed.

[5] 前記封止板は前記外套の内面に接触している請求項 4のガス精製装置。 5. The gas purifier according to claim 4, wherein the sealing plate is in contact with the inner surface of the mantle.

[6] 上流側の前記端板と前記環状部、下流側の前記端板と前記封止板、及び前記封止板の外周と前記外套の内面間にはそれぞれシールリングが挿入されている請求項[6] A seal ring is inserted between the end plate and the annular portion on the upstream side, the end plate and the sealing plate on the downstream side, and the outer periphery of the sealing plate and the inner surface of the outer jacket, respectively. Term

5のガス精製装置。 5 gas purification equipment.

[7] 原料ガスはガス状金属粒子を含有するハロゲンガス、ハロゲンィ匕水素ガス、又はォゾンガスである請求項 1〜6のいずれか一項のガス精製装置。 7. The gas purifier according to any one of claims 1 to 6, wherein the source gas is a halogen gas, a halogenated hydrogen gas, or an ozone gas containing gaseous metal particles.