WO2006059362A1 - 流体用機器の接続部シール構造 - Google Patents
流体用機器の接続部シール構造 Download PDFInfo
- Publication number
- WO2006059362A1 WO2006059362A1 PCT/JP2004/017757 JP2004017757W WO2006059362A1 WO 2006059362 A1 WO2006059362 A1 WO 2006059362A1 JP 2004017757 W JP2004017757 W JP 2004017757W WO 2006059362 A1 WO2006059362 A1 WO 2006059362A1
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- WIPO (PCT)
- Prior art keywords
- diameter
- seal
- flow path
- connection
- convex
- Prior art date
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K27/00—Construction of housing; Use of materials therefor
- F16K27/003—Housing formed from a plurality of the same valve elements
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J15/00—Sealings
- F16J15/02—Sealings between relatively-stationary surfaces
- F16J15/06—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces
- F16J15/062—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces characterised by the geometry of the seat
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J15/00—Sealings
- F16J15/02—Sealings between relatively-stationary surfaces
- F16J15/06—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces
- F16J15/10—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with non-metallic packing
- F16J15/104—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with non-metallic packing characterised by structure
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
- F16L23/00—Flanged joints
- F16L23/16—Flanged joints characterised by the sealing means
- F16L23/18—Flanged joints characterised by the sealing means the sealing means being rings
- F16L23/22—Flanged joints characterised by the sealing means the sealing means being rings made exclusively of a material other than metal
Definitions
- the present invention relates to a fluid device and relates to a seal structure of a connecting portion thereof.
- connection portion seal structure a seal structure in which an elastic body such as rubber is interposed, a seal structure by a joint, and a seal structure by welding or adhesion are generally known.
- Patent Document 1 an example of a seal structure that does not use an elastic body, a joint, and a welding 'adhesion means is described in Patent Document 1 below.
- This seal structure is a seal structure relating to a connecting portion between a central block and a lower block constituting a chemical valve, and it is disclosed that both blocks are connected in an uneven relationship.
- Patent Document 1 Japanese Patent Laid-Open No. 2001-149844
- the above-described seal structure using an elastic body is unsuitable for applications such as a chemical solution that has insufficient corrosion resistance against acids and alkalis.
- the seal structure using a joint requires a space for the joint itself and the joint construction, which tends to increase in size. Furthermore, welding and bonding cannot be removed or disassembled after connection, making them unsuitable for maintenance.
- the present invention has been made in view of the above circumstances, and an object thereof is to provide a seal structure for a fluid device that has corrosion resistance, can be used for maintenance, and can contribute to downsizing. It is in.
- the invention described in claim 1 includes a first component made of greaves.
- a fluid device connection part seal structure in which second parts made of grease are connected to each other, formed on the connection part of the first part and the connection part of the second part, respectively, and in a concave-convex relationship with each other. It is intended that it has a concave and convex portion that is fitted in step (b) and a press-fitting allowance provided in the thickness direction of the concave and convex portion on at least one of both concave and convex portions.
- connection part of the first component made of resin and the concave and convex strips in the connection part of the second component made of resin are fitted to each other, Concave ridges are tightly fitted by press-fitting allowance. Thereby, the connection parts of the first part and the second part are sealed to each other.
- the invention according to claim 2 is directed to a connection part seal for a fluid device in which a first part made of a resin and a second part made of a resin are connected to each other.
- the purpose is to provide a press-fitting allowance provided in the thickness direction of the concavo-convex strip on at least one of the corresponding concavo-convex strips.
- connection part seal for a fluid device in which a first part made of a resin and a second part made of a resin are connected to each other.
- An annular sealing part made of a resin interposed between the connection part of the first part and the connection part of the second part, and the connection of the connection part of the first part and the second part.
- connection part of the first part made of resin and the connection part of the second part made of resin are connected to each other, the annular seal part is connected to the connection part of the first part.
- the circumferential projection of the first component and the circumferential projection of the second component bite into and closely contact each other with the annular projection between the first component and the circumferential projection of the second component.
- the seal structure is provided for a fluid device that handles acid or alkaline chemicals. Corrosion resistance can be demonstrated. In addition, the space for joints and joint construction can be reduced, which can contribute to downsizing. Furthermore, since it is not a seal structure by welding or adhesion, it can be removed and disassembled after connection, and it can also handle the maintenance of the first and second parts.
- the first component, the second component, and the seal component are each formed from a resin, the fluid device that handles acid or alkaline chemicals,
- the seal structure can exhibit corrosion resistance.
- the space for joints and joint construction can be reduced, which can contribute to downsizing.
- it since it is not a seal structure by welding or bonding, it can be removed and disassembled after connection, and maintenance of the first and second parts can also be handled.
- the fluid device that handles acid or alkali chemicals is used as the device.
- the seal structure can exhibit corrosion resistance.
- the space for joints and joint construction can be reduced, which can contribute to downsizing.
- it since it is not a seal structure by welding or adhesion, it can be removed and disassembled after connection, and maintenance of the first and second parts can be handled.
- FIG. 1 is a cross-sectional view showing a chemical valve.
- FIG. 2 is an exploded sectional view showing a chemical valve.
- FIG. 3 is an enlarged sectional view showing a connection portion.
- FIG. 4 is an enlarged sectional view showing an H-shaped ring.
- FIG. 5 is a partial sectional view showing a circumferential groove.
- FIG. 6 An enlarged cross-sectional view showing a part of the concavo-convex portion of each connection portion corresponding to the H-shaped ring.
- FIG. 7 is a cross-sectional view showing a chemical valve.
- FIG. 8 is an exploded sectional view showing a chemical valve.
- FIG. 9 is a plan view showing a part of the hold base.
- FIG. 10 is a cross-sectional view showing a chemical valve.
- FIG. 11 is an exploded sectional view showing a chemical valve.
- FIG. 12 is an enlarged cross-sectional view showing a connection portion.
- FIG. 13 is an exploded enlarged cross-sectional view showing a connection portion.
- FIG. 14 is an enlarged sectional view showing a connection portion.
- FIG. 15 is an exploded enlarged sectional view showing a connection portion.
- FIG. 16 is an enlarged cross-sectional view showing a connection portion.
- FIG. 17 is an exploded enlarged sectional view showing a connection portion.
- FIG. 18 is a cross-sectional view showing a chemical valve.
- FIG. 19 is an exploded sectional view showing a chemical valve.
- FIG. 20 is an enlarged sectional view showing a connection part.
- FIG. 21 is an exploded enlarged sectional view showing a connection portion.
- connection device seal structure for a fluid device of the present invention is embodied will be described in detail with reference to the drawings.
- FIG. 1 is a cross-sectional view showing a hold-type chemical liquid valve 1 as a fluid device of the present invention.
- FIG. 2 shows the chemical valve 1 in an exploded sectional view.
- the chemical valve 1 includes a mounting plate 2, a manifold base 3 made of resin fixed on the plate 2, and a valve portion 4 made of resin fixed on the base 3.
- the chemical liquid valve 1 is configured by connecting the mother base 3 and the valve portion 4 to each other.
- the hold base 3 corresponds to the first part of the present invention
- the valve portion 4 corresponds to the second part of the present invention.
- both the hold base 3 and the flow path block 9 of the valve unit 4 are made of PTFE.
- a flow path 5 is formed in the maroonore base 3.
- a flow path 6 communicating with the flow path 5 is formed.
- the periphery of the flow path 6 is a connecting portion 7 of the hold base 3.
- the nozzle section 4 includes a flow path block 9 having a flow path 8 and a cylinder 11 having a piston 10 built therein.
- the flow path block 9 is provided with a pipe joint 12 for connecting a pipe to the flow path 8.
- a diaphragm valve element 13 that opens and closes the flow path 8 is provided between the flow path block 9 and the cylinder 11.
- the diaphragm valve body 13 is connected to the piston 10. Pilot air enters and exits through a corresponding air port 17 into the lower chamber 15 of the cylinder 11 divided up and down by the piston 10. As the piston 10 moves in response to this notlot air, the die 10 The aphram valve element 13 is activated and the flow path 8 is opened.
- a flow path 18 is provided on the lower surface of the flow path block 9.
- the periphery of the flow path 18 is a connection portion 19 of the flow path block 9.
- An H-shaped ring 20 is interposed between the connection portion 7 of the hold base 3 and the connection portion 19 of the flow path block 9 as a sealing part made of the resin of the present invention.
- the H-shaped ring 20 is formed of PFA that is slightly harder than PTFE.
- FIG. 3 is an enlarged cross-sectional view of the connecting portions 7 and 19 described above.
- Concave and convex strips 21 and 22 are formed at corresponding portions of the connecting portion 7 of the mother base 3 and the H-shaped ring 20 so as to be fitted in a concave-convex relationship.
- Concave and convex strips 23 and 24 are formed in the corresponding portions of the connecting portion 19 of the same flow path block 9 and the H-shaped ring 20 so as to fit with each other in a concave-convex relationship.
- FIG. 4 shows the H-shaped ring 20 in an enlarged cross-sectional view.
- the H-shaped ring 20 has an H-shaped cross section.
- the H-shaped ring 20 has a thick ring shape, and on its lower surface, a circumferential groove 25 is formed in the center of the thickness direction (radial direction) indicated by an arrow X to form a ring-shaped uneven strip 22.
- a circumferential groove 26 is formed at the center in the thickness direction (radial direction) indicated by an arrow X, and a ring-shaped uneven strip 24 is formed.
- a press-fitting allowance 27 having a thickness in the thickness direction (radial direction) of the H-shaped ring 20 is provided on the inner wall of each circumferential groove 25, 26 so as to be surrounded by a broken line in FIG.
- FIG. 5 shows a cross-sectional shape of the upper circumferential groove 26.
- the circumferential groove 26 includes a tapered opening portion 26a, and an upper step portion 26b and a lower step portion 26c located on the lower side thereof.
- the width W1 of the upper step portion 26b is set to be slightly wider than the width W2 of the lower step portion 26c, and the difference AW of the width is the press-fitting allowance 27 provided corresponding to the lower step portion 26c. That is, the opposite inner portions of the lower step portion 26c of the circumferential groove 26 become the press-fitting allowance 27.
- FIG. 6 is an enlarged sectional view showing a part of the ridges 21 and 23 of the connecting portions 7 and 19 corresponding to the H-shaped ring 20.
- the concave and convex strip 21 of the lower connection portion 7 has a circumferential convex strip 21a corresponding to the circumferential groove 25 of the H-shaped ring 20 at the radial center of the circumferential step portion, and is configured in an annular shape.
- the concave and convex strips 23 of the upper connecting portion 19 have an annular ridge 23a corresponding to the circumferential groove 26 of the H-shaped ring 20 at the radial center of the circumferential step portion, and are configured in an annular shape.
- the width W3 of the circumferential ridges 21a, 23a in the thickness direction is set to be the same as the width W1 of the upper ridges 25b, 26b of the circumferential grooves 25, 26 of the H-shaped ring 20.
- the seal structure of each of the connection portions 7 and 19 is configured.
- connection portion seal structure when the connection portion 7 of the resin base 3 made of resin and the connection portion 19 of the flow path block 9 made of resin are connected to each other, The concave and convex strip 21 of the base 3 and the concave and convex strip 22 of the H-shaped ring 20 are fitted to each other, and the concave and convex strip 23 of the flow path block 9 and the concave and convex strip 24 of the H-shaped ring 20 are fitted to each other.
- the hold base 3, the flow path block 9, and the H-shaped ring 20 are each formed of fluorine resin, so that the chemical valve 1 that handles acid and alkaline chemicals is used, and the seals thereof are used.
- the structure can exhibit corrosion resistance.
- the joint is not used to connect the manifold base 3 and the valve part 4 to each other, and the structure is such that the H-shaped ring 20 is interposed between the parts 3 and 4. This can also contribute to miniaturization.
- it since it is not a seal structure by welding or bonding, it can be removed and disassembled after connection, and maintenance of both parts 3 and 4 can also be handled.
- FIG. 7 is a cross-sectional view of a manifold type chemical valve 31 as a resin-made device of the present invention.
- FIG. 8 shows the chemical valve 31 in an exploded sectional view.
- Fig. 9 shows a part of the hold base 3 in plan view.
- This embodiment differs from the first embodiment in that the connecting portion seal structure is a double seal.
- connection portion 7 of the hold base 3 is formed with the first small-diameter irregularities 32 and the first large-diameter irregularities 33 centered on the same point. Is done. 1st small diameter
- a first flow path B 34 is formed inside the uneven strip 32. This flow passage b 34 leads to a flow passage 35 formed in the mold base 3.
- a second flow path 36 is formed between the first small-diameter irregularities 32 and the first large-diameter irregularities 33.
- This flow path 36 leads to a flow path 37 formed in the mold base 3.
- the connecting portion 19 of the nozzle portion 4 has a second small-diameter concavo-convex strip 38 and a second large-diameter concavo-convex strip centered on the same point. 39 is formed.
- a third flow path 40 is formed inside the second small-diameter unevenness 38.
- the flow path B 40 leads to a flow path 41 formed in the flow path block 9.
- the flow path B 40 is aligned with the first flow path B 34.
- a fourth flow path 42 is formed between the second small-diameter concavo-convex line 38 and the second large-diameter concavo-convex line 39.
- This flow path 42 also leads to the flow path 43 formed in the flow path block 9.
- This flow path B corresponds to the second flow path B.
- each of the small diameter uneven strips 32, 38 and each of the large diameter uneven strips 33, 39 is basically the same as each of the uneven strips 21, 23 shown in Fig. 6 and includes a circumferential convex strip. .
- a small-diameter H-shaped ring 44 as a small-diameter sealing part made of the resin of the present invention is interposed between the two connecting portions 7 and 19 and between the small-diameter irregularities 32 and 38.
- a first small-diameter seal irregularity 44a is formed that fits into the first small-diameter irregularity 32 in an irregular relationship.
- a second small-diameter seal irregularity 44b that fits in a concave-convex relationship with the second small-diameter irregularity 38 is formed.
- the configuration of the small-diameter H-shaped ring 44 is basically the same as the H-shaped ring 20 shown in FIGS. Further, the configuration of each of the small-diameter seal irregularities 44a and 44b is basically the same as the irregularities 22 and 24 of the first embodiment, and includes a circumferential groove.
- a large-diameter H-shaped ring 45 serving as a large-diameter sealing part made of the resin of the present invention is interposed between the two large-diameter irregularities 33 and 39 between the two connecting portions 7 and 19.
- a second large-diameter seal uneven strip 45b that fits into the second large-diameter uneven strip 39 in a concave-convex relationship is formed.
- the configuration of the large-diameter H-shaped ring 45 is basically the same as that of the H-shaped ring 20 shown in FIGS.
- the configuration of each large-diameter seal uneven strip 45a, 45b is the same as the uneven strip 22, 24 of the first embodiment. This is essentially the same and includes a circumferential groove.
- connection device seal structure for a fluid device of the present invention is specifically described will be described in detail with reference to the drawings.
- FIG. 10 shows a sectional view of a hold-type chemical valve 61 as a fluid device of the present invention.
- FIG. 11 shows an exploded sectional view of the chemical valve 61.
- the chemical valve 61 includes a mounting plate 62, a resin-made hold base 63 fixed on the plate 62, and a resin-made valve unit 64 fixed on the base 63. Also in this embodiment, the chemical liquid valve 61 is configured by connecting the hold base 63 and the valve portion 64 to each other.
- the hold base 63 corresponds to the first part made of the resin of the present invention
- the valve portion 64 corresponds to the second part made of the resin of the present invention.
- the hold body 63 and the flow path block 70 of the valve portion 64 are both formed of PTFE.
- the hold base 63 includes a flow path 65 and a pipe joint 66 that connects a pipe to the flow path 65.
- a flow path 67 is provided on the upper surface of the base 63.
- the periphery of the flow path 67 is a connecting portion 68 of the manifold base 63.
- the valve section 64 includes a flow path block 70 having a flow path 69, a manual actuator 72 incorporating a shaft 71, and the like.
- the channel block 70 is provided with a pipe joint 73 for connecting a pipe to the channel 69.
- a diaphragm valve element 74 that opens and closes the flow path 69 is provided between the flow path block 70 and the manual actuator 72.
- Diaphragm valve body 74 is connected to shaft 71.
- the shaft 71 is moved by turning a manual knob connected to the screw, the diaphragm valve element 74 is activated, and the flow path 69 is opened and closed.
- a flow path 75 is provided on the lower surface of the flow path block 70. The periphery of the flow path 75 is the connection portion 76 of the flow path block 70.
- FIG. 12 is an enlarged cross-sectional view of the connection portions 68 and 76 described above.
- Figure 13 shows the connection 6 8 and 76 are exploded and shown in an enlarged sectional view.
- Concave and convex strips 77 and 78 are formed on the connecting portion 68 of the mother base 63 and the connecting portion 76 of the flow path block 70 so as to be fitted in a concave-convex relationship.
- the ridges 77 of the hold base 63 have peripheral ridges 77a at positions outside the annular recess formed around the flow path 67.
- the uneven strip 78 of the channel block 70 has a circumferential groove 78 a at a position outside the cylindrical convex portion formed around the channel port 75.
- press-fitting allowances 79 are provided on both sides in the thickness direction (radial direction) of the circumferential ridge 77 a of the concavo-convex ridge 77. That is, in this embodiment, the width W12 of the circumferential projection 77a of the projection 77 is set slightly larger than the width W11 of the circumferential groove 78a of the projection 78, and the difference between the widths W11 and W12 is the circumferential projection.
- the 77a press-fit allowance is 79.
- connection portion seal structure of this embodiment the projections and depressions 77 in the connection portion 68 of the marble base 63 made of resin and the connection portion 76 of the flow path block 70 made of resin.
- the concavo-convex ridges 78 are tightly fitted by press-fitting allowances 79.
- the circumferential ridge 77a is fitted into the circumferential groove 78a, and each circumferential ridge 77a is tightly fitted in the thickness direction (radial direction) by the press-fitting allowance 79.
- the circumferential ridge 77a is also pressed by both side forces in the radial direction, and the gap between the ridges 77 and 78 is sealed. Therefore, the connection bases 68 and 76 of the manifold base 63 and the flow path block 70 are securely sealed to each other.
- the hold base 63 and the flow path block 70 are each formed of fluorine resin, so that the chemical valve 61 that handles acid or alkaline chemicals is used, and the seal structure exhibits corrosion resistance. Can do.
- a joint is not used to connect the hold base 63 and the valve part 64 to each other, and a seal part such as an H-shaped ring is not interposed, so the number of parts is reduced. Can also contribute.
- it since it is not a seal structure by welding or adhesion, it can be removed and disassembled after connection, and maintenance of both parts 63 and 64 can also be handled.
- FIG. 14 is an enlarged cross-sectional view of the connection portions 7 and 19 of the hold base 3 and the flow path block 9.
- FIG. 15 is an exploded sectional view of the connecting parts 7 and 19.
- a ring-shaped seal part 81 made of grease is interposed between the connection part 7 of the marble base 3 made of grease and the connection part 19 of the flow path block 9 made of grease.
- Concavity and convexity ridges 82 and 83 are formed at corresponding portions of the connection portion 7 of the mother base 3 and the seal part 81 so as to be fitted with each other in a concavo-convex relationship.
- Concavity and convexity strips 84 and 85 are formed in the corresponding portions of the connection portion 19 of the flow path block 9 and the seal part 81 so as to be fitted in a concave-convex relationship with each other.
- the concave and convex strip 82 of the hold base 3 is formed with the circumferential groove 82a formed around the flow path b 6 and the flow path b 6 inside the circumferential groove 82a. And a shape including a sleeve 82b.
- the opening of the sleeve portion 82b connected to the flow path 6 is a tapered surface 82c.
- the uneven strip 84 of the flow path block 9 includes a circumferential groove 84a formed around the flow path 18 and a sleeve portion 84b formed around the flow path opening 18 inside the circumferential groove 84a.
- the opening of the sleeve 84b connected to the flow path port 18 is a tapered surface 84c.
- the concave and convex strip 83 of the seal part 81 corresponding to the concave and convex strip 82 of the hold base 3 is located on the inner side of the peripheral convex strip 83a and the peripheral convex strip 83a to be press-fitted into the peripheral groove 82a.
- a shape including the above-described circumferential recess 83b into which the sleeve 82b is press-fitted is formed.
- the circumferential groove 83b has a tapered surface 83c aligned with the tapered surface 82c of the sleeve portion 82b.
- the concave / convex strip 85 of the seal part 81 corresponding to the concave / convex strip 84 of the same flow path block 9 is located on the inner side of the peripheral convex strip 85a and the peripheral convex strip 85a. And a circumferential recess 85b into which the sleeve portion 84b is press-fitted.
- the circumferential groove 85b has a tapered surface 85c that matches the teno 4c of the sleeve 84b.
- a press-fitting allowance 87 is provided on the inner side in the thickness direction (radial direction) of the circumferential protrusions 83a and 85a of the seal part 81.
- the width W22 of the root portion of each circumferential protrusion 83a, 85a of the seal part 81 is set slightly larger than the width W21 of the circumferential grooves 82a, 84a of each unevenness 82, 84. Then, the difference between the widths W21 and W22 becomes the press-fitting allowance 87 of each circumferential ridge 83a and 85a!
- connection device seal structure for a fluid device of the present invention is specifically described will be described in detail with reference to the drawings.
- FIG. 16 is an enlarged cross-sectional view showing the connection parts 7 and 19 of the hold base 3 and the flow path block 9.
- FIG. 17 is an exploded sectional view of the connecting portions 7 and 19.
- the configuration of the fourth embodiment is the same as the configuration of the concave and convex strips 82 and 84 of the hold base 3 and the flow path block 9, and the shape of the concave and convex strips 83 and 85 of the seal part 81. Are different.
- the concave and convex strips 8 2 and 84 of the hold base 3 and the flow path block 9 are formed on the sleeve portions 82b and 84b, and the outer sleeve portions 82d and 84d located outside thereof. including . Then, the teno surfaces 82e and 84e are respectively formed on the outer peripheries of the outer surfaces 82d and 84d.
- the concave and convex strips 83 and 85 of the seal part 81 include outer peripheral concave strips 83d and 85d located outside the peripheral convex strips 83a and 85a in addition to the peripheral concave strips 83b and 85b.
- outer circumferential recesses 83d and 85d are respectively formed with tapered surfaces 83e and 85e.
- a press-fitting allowance 87 is also provided on the outer side in the thickness direction (radial direction) of each circumferential ridge 83a, 85a.
- the tapered surface 82c of the sleeve portion 82b and the tapered surface 83c of the circumferential concave strip 83b are provided.
- the tapered surface 82e of the outer sleeve 82d and the tapered surface 83e of the outer circumferential groove 83d are pressed against each other, so that the press-fitting allowance 87 of the circumferential convex 83a is tightly fitted in the circumferential groove 82a. It is.
- the concave and convex strips 84 and 85 of the flow path block 9 and the seal part 81 are fitted together.
- the tapered surface 84c of the sleeve 84b and the tapered surface 85c of the circumferential groove 85b, and the tapered surface 84e of the outer sleeve 84d and the tapered surface 85e of the outer circumferential groove 85d are in pressure contact with each other.
- the press-fitting allowance 87 of the circumferential ridge 85a is tightly fitted in the circumferential groove 84a.
- the connection parts 7 and 19 of the hold base 3 and the valve part 4 are sealed with each other via the seal part 81.
- this embodiment can provide the same effects as those of the first embodiment.
- connection device seal structure for a fluid device of the present invention is concretely described with reference to the drawings.
- connection portion seal structure of this embodiment the first component and the second component are not connected and connected in a concave-convex relationship between the first component and the second component via the seal component.
- the structure is different from the connection seal structure of the first to fifth embodiments in that it is a type in which the components are connected by crimping in the axial direction through an annular seal component. That is, FIG. 18 shows a sectional view of a hold type chemical liquid valve 91 as a fluid device of the present invention. FIG. 19 shows an exploded sectional view of the chemical valve 91.
- a first recess 92 and a second recess 93 are formed in the connection portion 7 of the hold base 3. Inside the first recess 92, a first flow path 34 that communicates with the flow path 35 is formed. Inside the second recess 93, a second flow path port 36 communicating with the flow path 37 is formed.
- a third recess 94 and a fourth recess 95 are formed in the connecting portion 19 of the nozzle portion 4 (flow channel block 9). Inside the third recess 94, a third flow path 40 that communicates with the flow path 41 is formed. The flow path B 40 is aligned with the first flow path B 34. Inside the fourth recess 95, a fourth flow path B 42 communicating with the flow path 43 is formed. This channel B 42 is aligned with the second channel B 36.
- annular seal component 96 made of the grease of the present invention is interposed between the first recess 92 and the third recess 94.
- annular seal part 97 made of the grease of the present invention is interposed between the second concave portion 93 and the fourth concave portion 95.
- FIG. 20 is an enlarged cross-sectional view of the first and third recesses 92 and 94 in the connection portions 7 and 19 described above.
- the first and third recesses 92, 94 are disassembled and an enlarged sectional view is shown. Show. Since the configuration of the second and fourth recesses 93 and 95 is the same as the configuration of the first and third recesses 92 and 94, description thereof will be omitted.
- Circumferential protrusions 98 and 99 are formed on the bottom surfaces of the first and third recesses 92 and 94, respectively. In this embodiment, each circumferential protrusion 98, 99 has a cross-sectional shape with a sharpened tip.
- the circumferential protrusions 98, 99 is designed to bite and connect to the lower and upper surfaces of the annular seal parts 96,97.
- connection part seal structure when connecting the connection part 7 of the marble base 3 made of fluorine resin and the connection part 19 of the valve part 4 made of fluorine resin, Annular seal parts 96, 97 made of fluorine resin are pressed against the bottom surfaces of the recesses 92-95 of both connecting parts 7, 19.
- the connecting portion 7 of the mother base 3 and the connecting portion 19 of the valve portion 4 are sealed together via the annular seal parts 96, 97.
- the mold base 3, the nozzle part 4 and the annular seal parts 96, 97 are made of fluorine resin, respectively. It can be demonstrated.
- the space for joints and joint construction can be reduced, contributing to downsizing.
- it since it is not a seal structure by welding or adhesion, it can be removed and disassembled after connection, and maintenance of the hold base 3 and the valve unit 4 can be handled.
- connection seal structure of the double seal is embodied when a small-diameter seal component and a large-diameter seal component are interposed between the first component and the second component. did .
- connection seal structure of the double seal is specifically described in the case where the seal part is not interposed between the first part and the second part as in the third embodiment. Well ...
- the hold base and the body are connected to each other.
- the first small-diameter irregularities and the first large-diameter irregularities centering on the same point are formed at the joint of the manifold base.
- a first flow path B is formed on the inner side.
- a second flow path B is formed between the first small-diameter irregularities and the first large-diameter irregularities.
- a second small-diameter irregularity strip and a second large-diameter irregularity strip centering on the same point are formed at the connection portion of the body, and aligned with the first flow path port inside the second small-diameter irregularity strip.
- a third flow path B is formed.
- a fourth flow path B corresponding to the second flow path opening is formed between the second small diameter uneven line and the second large diameter uneven line. Then, the first small-diameter ridges and the second small-diameter ridges are fitted with each other in a concavo-convex relationship, and a press-fitting allowance is provided in the thickness direction of the small-diameter concavo-convex strips in at least one of the small-diameter concavo-convex strips.
- first large-diameter concavo-convex ridge and the second large-diameter concavo-convex ridge are fitted with each other in a concavo-convex relationship, and at least one of the large-diameter concavo-convex ridges is press-fitted in the thickness direction of the large-diameter concavo-convex ridge. Is provided.
- These small-diameter concavo-convex ridges and large-diameter concavo-convex ridges have shapes conforming to the concavo-convex ridges 77 and 78 shown in FIGS.
- the second flow path port and the fourth flow path port are sealed and connected in the space between the both small diameter irregularities and both large diameter irregularities.
- the first small-diameter irregularities and the first large-diameter irregularities are formed around the same point in the connection portion of the mold base, and the second small-diameter irregularities and the second large-diameter stripe in the body connection are formed.
- the diameter irregularities are formed around the same point. For this reason, the alignment accuracy with a small positional deviation between the corresponding small-diameter concavo-convex ridges and the corresponding large-diameter concavo-convex ridges is improved.
- the gap between the first and second small-diameter irregularities can be reliably sealed, and the gap between the first and second large-diameter irregularities can be reliably sealed.
- Fluidic equipment made by connecting a first part made of resin and a second part made of resin together A connecting portion sealing structure
- a third flow path opening formed inside the second small-diameter irregularities and aligned with the first flow path opening;
- a small-diameter seal part made of a resin interposed between the first and second small-diameter concavo-convex ridges; 1 small-diameter seal irregularities,
- connection part seal structure for a fluid device comprising:
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Abstract
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Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/JP2004/017757 WO2006059362A1 (ja) | 2004-11-30 | 2004-11-30 | 流体用機器の接続部シール構造 |
US11/666,206 US7581764B2 (en) | 2004-11-30 | 2004-11-30 | Connection seal structure for fluidic device |
CN2004800445226A CN101069035B (zh) | 2004-11-30 | 2004-11-30 | 用于流体装置的连接密封结构 |
Applications Claiming Priority (1)
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PCT/JP2004/017757 WO2006059362A1 (ja) | 2004-11-30 | 2004-11-30 | 流体用機器の接続部シール構造 |
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WO2006059362A1 true WO2006059362A1 (ja) | 2006-06-08 |
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Family Applications (1)
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PCT/JP2004/017757 WO2006059362A1 (ja) | 2004-11-30 | 2004-11-30 | 流体用機器の接続部シール構造 |
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US (1) | US7581764B2 (ja) |
CN (1) | CN101069035B (ja) |
WO (1) | WO2006059362A1 (ja) |
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Also Published As
Publication number | Publication date |
---|---|
US7581764B2 (en) | 2009-09-01 |
US20070262581A1 (en) | 2007-11-15 |
CN101069035A (zh) | 2007-11-07 |
CN101069035B (zh) | 2012-05-23 |
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